Main body of furnace for substrate processing apparatus

CN310076362SActive Publication Date: 2026-07-07KOKUSAI DENKI KK
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
KOKUSAI DENKI KK
Filing Date
2022-09-13
Publication Date
2026-07-07

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Abstract

1. Name of the designed product: main body of furnace for substrate processing apparatus. 2. Use of the designed product: heat treatment of substrate in substrate processing apparatus. 3. Design points of the designed product: in shape. 4. Picture or photograph best indicating the design points: perspective view. 5. Other circumstances or explanations: the part indicated by solid line is the partial design to be protected.
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