Scanning particle beam microscope with energy-filtering detector system

Abstract

Scanning particle beam microscope (1) for examining an object (9), comprising a particle-optical system (2) comprising an objective (7) for focusing a primary beam (6) of the scanning particle beam microscope (1) onto an object region (OR) of the particle-optical system (2), such that particles are emitted from the object (9) and pass through a principal plane (PP) of the objective (7); and a detector system (11) comprising a particle-optical detector component (12) for generating an electrostatic field in a beam path of the emitted particles; wherein the field is arranged at least partially outside an objective field of the objective (7) and exerts a collecting particle-optical effect on the emitted particles; wherein the detector system (11) is configured to spatially filter the emitted particles after passing through the field and to detect a proportion of the filtered emitted particles; wherein the particle-optical detector component (12) is designed such that the spatial filtering filters the emitted particles according to a kinetic energy of the emitted particles, characterized by the fact that the field of the detector system is axially symmetric.

Description

Technical field

[0001] The present disclosure relates to a particle beam microscope with a detector system for detecting particles emitted from an interaction zone of a primary beam with the object. Specifically, the present disclosure relates to a particle beam microscope with a detection device for energy-selective and / or solid-angle-selective detection of the emitted particles. background

[0002] For scanning electron microscopes, spectrometers have been developed to investigate the energy of secondary electrons and / or backscattered electrons. Due to their size and geometry, these spectrometers can only be positioned outside the electron-optical system. They must be placed close to the object to capture as many of the emitted particles as possible.

[0003] Therefore, the use of these spectrometers requires that the objective lens be located at a relatively large distance from the object. However, a greater distance between the objective lens and the object results in increased aberrations of the primary beam, thereby limiting the achievable spatial resolution of the scanning electron microscope.

[0004] Therefore, when the scanning electron microscope is operated together with the spectrometer, the achievable spatial resolution is comparatively low.

[0005] Document DE 10 2006 043 895 A1 discloses an electron microscope in which an energy selector is arranged in a vacuum chamber within the particle-optical system. The energy selector has a first and a second grating. The electron microscope further comprises a voltage source for generating a suitable electric field between the first and the second grating to enable the selection of secondary electrons emitted from the object surface.

[0006] Document US 2004 / 0051041 A1 refers to a scanning electron microscope that incorporates an energy filter. Electrons passing through the energy filter collide with a conductive plate that has a central opening through which the primary electron beam can pass. Electrons colliding with the shielding grid of the energy filter generate secondary electrons, which are directed by a deflection electrode to a detector.

[0007] Document US 2001 / 0010357 A1 relates to a scanning electron microscope which has a conversion electrode with a central aperture through which the primary electron beam can pass. An energy filter is located in front of the conversion electrode. Secondary electrons emitted by the conversion electrode are directed to a scintillator by a voltage.

[0008] Document DE 36 38 682 A1 relates to a spectrometer objective for a scanning electron microscope. The spectrometer objective has grating electrodes, with a common center point of the grating electrodes located on the optical axis. This ensures position- and angle-independent detection of the secondary electrons emitted in the direction of the axis of symmetry of the secondary electron beam in one or more detectors arranged symmetrically to the optical axis.

[0009] The article “Surface potential measurements of electron-irradiated insulators using backscattered and secondary electron spectra from an electrostatic toroidal spectrometer adapted for scanning electron microscope applications” by O. Jbara et al., published in the “Review of Scientific Instruments” 72, 1788 (2001), refers to the measurement of energy spectra of electrons generated by irradiating insulators with electron beams. A spectrometer is positioned between the objective lens and the object and is configured so that the electrons traverse a circular sector in which they are deflected by an electrostatic field.

[0010] Document DE 35 32 781 A1 discloses an arrangement for the detection of secondary and / or backscattered electrons in a scanning electron microscope. An electromagnetic dipole field and a backscatter detector are arranged on the side of the projection lens facing away from the sample. The electromagnetic dipole field can also be replaced by an electromagnetic quadrupole to reduce higher-order chromatic and geometric image aberrations.

[0011] The article “An off-axis multi-channel analyzer for secondary electrons” by M. Kienle et al., published in “Nuclear Instruments and Methods in Physics Research”, Section A, 519 (2004), discloses a scanning particle beam microscope with a particle-optical system comprising an objective for focusing a primary beam and a detector system with a particle-optical detector component for generating an electrostatic field in the beam path of the emitted particles. The detector system is configured to spatially filter the emitted particles by filtering them according to their kinetic energy. As the title of this article indicates, this is an off-axis arrangement, meaning the field is necessarily asymmetric with respect to the axis.

[0012] Therefore, there is a need for scanning particle beam microscopes that have a detector system designed for energy filtering of particles, and that have a compact design and provide effective energy filtering. Summary

[0013] Embodiments provide a scanning particle beam microscope for examining an object that incorporates a particle-optical system. The particle-optical system includes an objective lens for focusing a primary beam of the scanning particle beam microscope onto an object region of the particle-optical system, causing particles to be emitted from the object and pass through a principal plane of the objective lens. Furthermore, the scanning particle beam microscope includes a detector system with a particle-optical detector component for generating an electrostatic field in the beam path of the emitted particles. The field is located at least partially outside the objective field of the lens. The detector system is configured to spatially filter the emitted particles after they have passed through the field and to detect a proportion of the filtered emitted particles.The particle-optical detector component is designed such that the spatial filtering filters the emitted particles according to the kinetic energy of the emitted particles.

[0014] This provides a scanning particle beam microscope with a compact detector system that allows for effective energy filtering. Because the emitted particles pass through the primary plane of the objective lens, the lens can be positioned close to the object. This short distance reduces primary beam aberrations and enables high-resolution microscopic images.

[0015] A scanning particle beam microscope can be a scanning electron microscope and / or a focused ion beam microscope. A focused ion beam microscope can utilize a gas field ion source, a plasma ion source, and / or a liquid metal ion source. For example, a focused ion beam microscope can be a helium ion microscope.

[0016] The object area can be defined as a spatial region over which the primary beam can be scanned. A surface area located within the object area can be imaged microscopically by the scanning particle microscope. The particle-optical system can include a scanning device to scan the primary beam laterally within the object area, that is, perpendicular to the axis of the primary beam.

[0017] The objective field can be configured to focus the primary beam emerging from a particle beam microscope source or from a condenser system of the particle optics system onto the object area. The objective field can have a magnetic field and / or an electric field. In other words, the objective can be an electrostatic, magnetic, or combined electrostatic-magnetic objective. The focus within the object area can, for example, have a diameter in the range of 0.5 nanometers to 100 nanometers, or in the range of 0.5 nanometers to 10 nanometers.

[0018] The emitted particles can be primary particles, which are scattered in the interaction region, and / or object particles, which are ejected from the interaction region. If the scanning particle beam microscope is configured as a scanning electron microscope, the primary particles, which are scattered in the interaction region, can be backscattered electrons, and the object particles can be secondary electrons. If the scanning particle beam microscope is configured as a helium-ion microscope, the primary particles, which are scattered by the object, can be backscattered helium ions, and the object particles can be secondary electrons and / or secondary ions.

[0019] The emitted particles pass through the principal plane of the objective lens. The principal plane may be limited to the objective field. In other words, the principal plane may be defined in such a way that it is not to be understood as a mathematical plane of infinite extent. The emitted particles may pass through part or all of the objective field. At least one segment of the emitted particle beam path may travel in a direction opposite or substantially opposite to a segment of the primary particle beam path. These segments may extend through the principal plane. The segments may extend at least from the object region to the particle-optical detector component. A portion of the emitted particle beam path may lie within the particle-optical system.The particle optic system may include an electrode to guide the emitted particles through the main plane. The electrode may be a beam guide tube. The beam guide tube may surround at least a portion of the primary beam.

[0020] The detector system or the particle-optical detector component can be arranged at least partially inside or outside the particle-optical system. At least part of the detector system or the particle-optical detector component can be arranged between the objective field and the condenser field of the condenser system. The detector system or the particle-optical detector component can be arranged inside the beamline.

[0021] At least part of the field is located outside the objective field. At least part of the field can be situated between the principal plane or the objective field on the one hand and a detector or a spatial filter of the detector system on the other. The primary beam path can extend outside the field of the particle-optical detector component. The maximum radial distance of the field from the axis of the primary beam can be less than 200 millimeters, or less than 150 millimeters, or less than 100 millimeters, or less than 70 millimeters, or less than 50 millimeters.

[0022] The field can exert a collecting or dispersing particle-optical effect on the incoming emitted particles. A collecting particle-optical effect can, for example, enhance the convergence of the emitted particles, decrease their divergence, or transform a divergent beam path into a convergent one. A dispersing particle-optical effect can, for example, enhance divergence, decrease convergence, or transform a convergent beam path into a divergent one.

[0023] The field can be designed such that at least some of the emitted particles are deflected after passing through it. In addition to deflection, the field can also alter the kinetic energy of the emitted particles.

[0024] The detector system is designed to spatially filter the emitted particles after they have passed through the field. The detector system can incorporate an aperture and / or a particle reception area of ​​the detector as spatial filters. The detector system can include a detector with a through-hole. The particle reception area can be recessed around this through-hole. The detector's through-hole can act as a spatial filter for the emitted particles. In this way, the detector can function as an aperture.

[0025] Energy filtering can suppress the detection of emitted particles with kinetic energy outside a predetermined energy range. Detection can also be suppressed relative to the detection of emitted particles with kinetic energy within the predetermined energy range. The predetermined energy range can be a sub-range of the area over which the energy distribution of the emitted particles extends. An energy distribution can be defined as a function of the intensity of the emitted particles as a function of their kinetic energy. The energy distribution can refer to a region of the emitted particle path.

[0026] For example, energy filtering can detect more than 50%, 60%, 70%, 80%, or 90% of the emitted particles that have kinetic energy within the predetermined energy range. Furthermore, energy filtering can detect, for example, less than 50%, 30%, 10%, or 5% of the emitted particles that have kinetic energy outside the predetermined energy range.

[0027] The detector system can include a detector that detects at least some of the filtered emitted particles. The detector can be configured to detect the incoming emitted particles in an energy-selective manner. In other words, the detector can perform a further energy filtering in addition to the energy filtering provided by the spatial filter.

[0028] Embodiments provide a scanning particle beam microscope for examining an object. The scanning particle beam microscope has a particle-optical system which includes an objective for focusing a primary beam of the scanning particle beam microscope onto an object region of the particle-optical system, causing particles to be emitted from the object. Furthermore, the scanning particle beam microscope has a detector system for detecting a fraction of the emitted particles, wherein the detector system includes a particle-optical detector component for generating an electrostatic field in a beam path of the emitted particles. The particle-optical detector component has a field electrode and a counter-electrode arrangement, wherein the field is generated between the field electrode and the counter-electrode arrangement. The field electrode has a through-hole for the passage of the emitted particles.The counter electrode arrangement has a first grid electrode area for the entry of the emitted particles into the field and a second grid electrode area for the exit of the emitted particles from the field.

[0029] This results in a compact detector system that allows for effective energy filtering of the emitted particles. The compact design allows the detector system to be positioned inside the particle optics system.

[0030] The scanning particle beam microscope can be designed so that the emitted particles pass through a principal plane of the objective lens.

[0031] The field electrode and the counter-electrode assembly can each be connected to a voltage source. The field electrode and / or the counter-electrode assembly can be conductive. The potential of the counter-electrode assembly can be constant across its entire surface. The same can be true for the field electrode. The field is generated by the field electrode and the counter-electrode assembly. All field lines can originate from the surface of the field electrode and terminate on the surface of the counter-electrode assembly, or all field lines can originate from the surface of the counter-electrode assembly and terminate on the surface of the field electrode.

[0032] The field can be inhomogeneous. An electric field strength on a surface region of the field electrode facing the path of the emitted particles can be at least twice, or at least five times, or at least seven times, or at least ten times greater than a maximum electric field strength on the first and / or the second grid electrode region. When calculating the field strength, local variations caused by small surface radii at the openings of the grid electrode regions can be averaged. For example, the electric field can be averaged over one or two grid openings.

[0033] The counter electrode assembly can at least partially enclose the field electrode. In one direction along the beam path of the emitted particles, the field electrode can be positioned between two parts of the counter electrode assembly.

[0034] The field electrode can be designed as a ring electrode. The ring electrode can be toroidal or have a torus shape. The axial length of the field electrode, measured along the axis of the aperture or along the path of the emitted particles, can be between 0.5 mm and 20 mm, between 0.5 mm and 10 mm, or between 0.5 mm and 5 mm. The aperture of the field electrode can have a maximum diameter between 0.2 mm and 20 mm, between 0.2 mm and 10 mm, or between 0.2 mm and 5 mm.

[0035] The axial length of the counter electrode arrangement, measured along an axis of the aperture or along the beam path of the emitted particles, may be less than 50 times, or less than 30 times, or less than 20 times, or less than 10 times, or less than 5 times the axial length of the field electrode.

[0036] The first and / or second grid electrode region can have a perforated grid and / or a mesh grid. Each grid electrode region can have a plurality of grid openings. A proportion of the surface area of ​​the grid openings of the grid electrode region can be greater than 50%, or greater than 70%, or greater than 80%, or greater than 90% of the total surface area of ​​the grid electrode region. The grid electrode regions can be permeable to a large proportion of the particles incident upon them.

[0037] The maximum diameter of all grid openings can be less than 20 millimeters, less than 10 millimeters, less than 5 millimeters, less than 3 millimeters, less than 2 millimeters, less than 1 millimeter, or less than 0.5 millimeters. The field electrode can be gridless.

[0038] The potential of the first grid electrode region can be equal to, or matched to, the potential of the second grid electrode region. The potential of the first and / or the second grid electrode region can be matched to an ambient potential or to the potential of a beam guide tube of the particle optical system. The ambient potential can be a potential of neighboring components in a region surrounding the counter electrode assembly.

[0039] The field electrode and / or the counter electrode assembly can each be adapted to a rotationally symmetrical shape or have a rotationally symmetrical shape. The axis of symmetry of the field electrode and / or the axis of symmetry of the counter electrode can be aligned with the axis of the primary beam.

[0040] According to one embodiment, in a section of the particle-optical detector component which extends from a center of the passage opening transversely to a circumferential direction of the passage opening, the first and / or the second grid electrode area is at least partially concave and / or partially convex towards the field electrode.

[0041] The maximum radius of curvature of the convex or concave region of the first and / or second grid electrode region can be less than three times the diameter of the field electrode aperture, less than twice the diameter of the aperture, or less than the diameter of the aperture. The beam path of the emitted particles can penetrate at least a portion of the convex or concave region.

[0042] According to another embodiment, the inner diameter of the passage opening is larger than the axial length of the passage opening.

[0043] According to a further embodiment, the inner diameter of the passage opening is greater than twice, or greater than three times, or greater than five times, or greater than ten times the axial length of the passage opening. The inner diameter can be the smallest inner diameter of the passage opening and / or extend transversely to an axial direction of the passage opening. The axial length can be the longest extent of the passage opening along the axial direction.

[0044] According to a further embodiment, the particle-optical detector component is configured to generate a second electrostatic field in the beam path of the emitted particles. The particle-optical detector component can have a second field electrode and a second counter-electrode arrangement, wherein the second field is generated between the second field electrode and the second counter-electrode arrangement. The second field electrode can have a passage opening for the emitted particles to pass through. The second counter-electrode arrangement can have a first grid electrode region for the emitted particles to enter the second field and a second grid electrode region for the emitted particles to exit the second field.

[0045] This makes it possible to carry out more effective energy filtration of the emitted particles.

[0046] The first field can be configured to have a collecting or dispersing particle-optical effect on the emitted particles entering it. The second field can also be configured to have a collecting or dispersing particle-optical effect on the emitted particles entering it. The first field can be positioned upstream or downstream of the second field in the path of the emitted particles. The first field can overlap or not overlap with the second field.

[0047] The potential of the first counter-electrode assembly can be different from or the same as the potential of the second counter-electrode assembly. The potential of the first field electrode can be different from or the same as the potential of the second field electrode. The sign of the potential of the first field electrode relative to the potential of the first or second counter-electrode assembly can be different from the sign of the potential of the second field electrode relative to the potential of the first or second counter-electrode assembly.

[0048] According to another embodiment, the field revolves around an axis of the primary beam and / or the field is adapted to a rotationally symmetric or axially symmetric shape. The rotationally symmetric or axially symmetric shape can define a particle-optical axis of the particle-optical detector component.

[0049] According to another embodiment, the field is configured such that for emitted particles with the same kinetic incident energy, the deflection angle increases with an increasing radial distance from the point of incidence relative to a straight line. This straight line can be the particle-optical axis of the particle-optical detector component.

[0050] The deflection angle of an emitted particle can be defined as the angle between the incident direction of the emitted particle and the direction of its emission. The incident direction, the kinetic energy of the incident particle, and / or the radial distance of the incident particle can refer to the location where the emitted particle enters the field. The emission direction can refer to the location where the emitted particle exits the field.

[0051] The angles between the incident directions of the emitted particles can be less than 20 degrees, less than 10 degrees, less than 5 degrees, less than 3 degrees, or less than 1 degree. The beam path of the emitted particles can be parallel or substantially parallel upon impact with the particle-optical detector component. Alternatively, the beam path of the emitted particles can be convergent or divergent upon impact with the particle-optical detector component.

[0052] According to another embodiment, the scanning particle beam microscope is configured such that the directions of incidence of the emitted particles have an angle with the straight line or with the particle-optical axis of the particle-optical detector component which is less than 10 degrees, or less than 5 degrees, or less than 3 degrees or less than 1 degree.

[0053] According to another embodiment, the field is configured such that for emitted particles of the same kinetic incident energy, the dependence of a deflection angle on a radial incident distance relative to a straight line is adapted to a linearly increasing dependence.

[0054] The linear relationship can pass through the origin. In other words, the linear relationship can exhibit a deflection angle of zero for a radial incidence distance of zero.

[0055] According to one embodiment, for all emitted particles of the same kinetic incident energy, the deviation of the deflection angle from the linearly increasing dependence is less than 30% of the deflection angle, or less than 20%, or less than 10%, or less than 5% of the deflection angle.

[0056] According to another embodiment, the straight line is aligned with an axis of the primary beam and / or with a particle-optical axis of the particle-optical system.

[0057] The straight line can be aligned such that the angle between the straight line and the axis of the primary beam and / or the particle optical system is less than 10 degrees, or less than 5 degrees, or less than 3 degrees, or less than 1 degree.

[0058] According to a further embodiment, the particle-optical detector component generates an energy-dependent focus shift of the beam path of the emitted particles in a direction along the beam path. According to a further embodiment, the particle-optical detector component generates an energy-dependent shift of a scattering region of the beam path of the emitted particles in a direction along the beam path.

[0059] The particle-optical detector component can be configured such that two different energy ranges of the emitted particles' kinetic energy correspond to two different focal regions, which are shifted relative to each other in one direction along the beam path of the emitted particles. This shift can be designed such that spatial filtering of one focal region suppresses the detection of emitted particles from the other focal region. The two energy regions can be complementary energy regions of the energy distribution.

[0060] The particle-optical detector component can be configured such that two different energy ranges of the emitted particles' kinetic energy exhibit two different scattering regions, which are shifted relative to each other in one direction of the emitted particles' beam path. This shift in the scattering regions can cause differential defocusing on a spatial filter. Due to this differential defocusing, the spatial filtering then filters according to kinetic energy.

[0061] According to another embodiment, the particle-optical detector component has at least one electrode which orbits the primary beam.

[0062] The field electrode and / or the counter electrode arrangement can be designed to surround the primary beam.

[0063] According to another embodiment, the particle-optical detector component has a braking field electrode arrangement and / or an accelerating field electrode arrangement.

[0064] This allows for the provision of a particle-optical detector component, whereby the emitted particles have lower kinetic energy when passing through the field than when they strike the braking field electrode arrangement. In particular, this makes it possible to obtain larger deflection angles with an unchanged potential difference between the field electrode and the counter electrode arrangement. This results in more effective energy filtering.

[0065] The braking field electrode arrangement can be configured to reduce the kinetic energy of the emitted particles. Additionally, the braking field electrode arrangement can reflect low-energy particles with a kinetic energy below a predetermined threshold energy, preventing these particles from entering the field generated by the field electrode and the counter electrode arrangement.

[0066] The braking field electrode arrangement can be positioned upstream of the field electrode and the counter electrode arrangement in the beam path of the emitted particles. The accelerating field electrode arrangement can be positioned downstream of the counter electrode arrangement and the field electrode in the beam path of the emitted particles. Character description

[0067] The foregoing and other advantageous features will become even clearer through the following description of exemplary embodiments with reference to the accompanying drawings. It is emphasized that not all possible embodiments necessarily achieve all or some of the advantages stated here. Fig. Figure 1 shows a schematic representation of a scanning particle beam microscope according to a first embodiment; Fig. Figure 2 shows a schematic representation of a detector system of the scanning particle beam microscope according to the one described in the Fig. 1 first embodiment shown; Fig. Figure 3 shows a schematic representation of a particle optical system of the type in the Fig. 2 detector system of the first embodiment shown; Fig. 4A and Fig. Figure 4B shows the field strength vectors and the equipotential lines of the electrostatic field in the Fig. 3 particle-optical component of the first embodiment shown; Fig. 5A and Fig. Figure 5B schematically shows the operation of the particle-optical detector component of the first embodiment with collecting particle-optical effect; Fig. 5C and Fig. Figure 5D schematically shows the operation of the particle-optical detector component of the first embodiment with scattering particle-optical effect; Fig. Figure 6 schematically shows a particle-optical detector component of a second embodiment; Fig. Figure 7 schematically shows a detector system of a third embodiment; Fig. Figure 8 schematically shows a detector system of a fourth embodiment; and Fig. Figure 9 schematically shows a detector system of a fifth embodiment. Presentation of exemplary implementation examples

[0068] The Fig. Figure 1 is a schematic sectional view of a scanning particle beam microscope 1 according to a first embodiment. The Fig. The scanning particle beam microscope 1 shown is a scanning electron microscope. However, it is also conceivable that the scanning particle beam microscope is a focused ion beam microscope, such as a helium ion microscope. The scanning particle beam microscope 1 has a particle optical system 2. The particle optical system 2 has a source 3, a condenser system 4, and an objective 7.

[0069] Source 3 has a cathode 30. The cathode 30 can, for example, be a Schottky field emitter. Source 3 also has a suppressor electrode 31 and an extraction electrode 32. After leaving source 3, the primary beam 6 passes through an anode 81, which accelerates the particles of the primary beam 6. After passing through the anode 81, the primary beam passes through the condenser system 4 and the objective lens 7.

[0070] The condenser system 4 is designed as a magnetic condenser system. The objective 7 generates an objective field that has both an electric and a magnetic field. The objective field is configured to focus the primary beam 6 exiting the condenser system 4 onto an object area OR of the particle optical system 2. The particle optical system 2 also includes a deflection unit comprising two scan coils 76. The deflection unit is configured to scan the primary beam 6 within the object area OR. To generate a microscopic image, the surface of an object 9 is positioned within the object area OR, and the primary beam 6 is scanned across the object area OR.

[0071] After passing through the anode 81, the primary beam 6 enters a beam guide tube 8 of the particle optical system 2. The beam guide tube 8 is connected to a power supply (not shown) and is set to a positive potential relative to the cathode 30. The particles of the primary beam 6 are thus guided through at least a section of the particle optical system 2 with high kinetic energy, for example, in the range of 10 kV. This reduces spherical and chromatic aberrations of the primary beam 6 and / or the influence of stray fields. The beam guide tube 8 is also referred to as a "beam booster." A source-side end 83 of the beam guide tube 8 is connected to the anode 81.An axial position of an object-side end 82 of the beam guide tube 8 is located between an axial position of an end section 75 of an object-side polarizing shoe 71 of the objective 7 and an axial position of an end section 77 of a source-side polarizing shoe 70 of the objective 7. The axial positions are relative to a particle-optical axis OA of the particle-optical system 2.

[0072] The source-side pole shoe 70 and the object-side pole shoe 71 are excited by an excitation coil 72 of the objective 7 and generate the magnetic field of the objective field. The electric field of the objective field is formed between the object-side end 82 of the beam guide tube 8 and the end section 75 of the object-side pole shoe 71. The electric field of the objective field decelerates the particles of the primary beam 6 to an impact energy with which the particles of the primary beam 6 strike the object region OR.

[0073] Emitted particles 60, 61 are emitted from an interaction area 91 of the primary beam 6 with the object 9. The emitted particles 60, 61 are drawn into the beam guide tube 8 by the electric field of the objective field and directed onto a detector system 11. The emitted particles pass through a principal plane PP of the objective 7. The detector system 11 is arranged inside the beam guide tube 8. The detector system 11 is configured to filter the emitted particles 60, 61 according to their kinetic energy and to detect a filtered fraction.

[0074] The detector system 11 has a particle-optical detector component 12, which is arranged in the beam path of the emitted particles in front of an aperture 17 and a detector 18 of the detector system 11. The aperture 17 acts as a spatial filter. Additionally, the particle receiving area 20 can also act as a spatial filter.

[0075] Alternatively, the detector system can be designed such that spatial filtering occurs independently of apertures. For example, spatial filtering can be achieved solely by the particle reception area 20. This allows, for instance, the detector system to be apertureless, or an aperture of the detector system to have no effect on spatial filtering.

[0076] Alternatively, the detector system can include a detector with an aperture for the beam path of the emitted particles. The detector can thus act as an aperture. The aperture can be designed such that the primary beam 6 passes through it.

[0077] The particle-optical detector component 12 is designed such that spatial filtering filters the emitted particles according to their kinetic energy. This energy filtering suppresses the detection of emitted particles with kinetic energy outside a predetermined energy range, compared to those particles whose kinetic energy lies within the predetermined energy range.

[0078] The structure of detector system 11 of the in the Fig. The particle beam microscope shown in 1 is schematically depicted in the Fig. 2 shown.

[0079] The particle-optical detector component 12 is configured to generate an energy-dependent focus shift of the emitted particles 60a, 60b, 60c, 61a, 61b, 61c in a direction along the beam path of the emitted particles. This energy-dependent focus shift concentrates emitted particles of a first kinetic energy 60a, 60b, 60c into a first focus region R1 and emitted particles of a second kinetic energy 61a, 61b, 61c into a second focus region R2. The first and second focus regions R1, R2 are arranged along the beam path of the emitted particles 60a, 60b, 60c, 61a, 61b, 61c and are shifted relative to each other. Therefore, the particle-optical detector component 12 generates an energy-dependent focus shift along the beam path of the emitted particles.The first focus area R1 is located at least partially in or near the aperture 50 of the aperture 17, so that a large proportion of the emitted particles with the first kinetic energy 60a, 60b, 60c strike the particle receiving area 20 of the detector 18. The second focus area R2 is located upstream of the aperture 17 in the beam path of the emitted particles, so that the emitted particles with the second kinetic energy 61a, 61b, 61c are strongly defocused in the plane of the aperture 17. Therefore, detection of the emitted particles with the second kinetic energy 61a, 61b, 61c is suppressed.

[0080] The particle-optical detector component 12 is configured to generate an electrostatic field. The field is generated between a field electrode 14 and a counter electrode arrangement 29. The counter electrode arrangement 29 at least partially surrounds the field electrode 14. The counter electrode arrangement 29 has a first grid electrode region 15 and a second grid electrode region 16. The emitted particles enter the field through the first grid electrode region 15. The emitted particles exit the field through the second grid electrode region 16.

[0081] The field electrode 14 and the counter electrode assembly 29 are each adapted to a rotationally symmetric shape. A common axis of rotation of the rotationally symmetric shape of the field electrode 14 and the rotationally symmetric shape of the counter electrode assembly 29 forms a particle-optical axis A of the particle-optical detector component 12. The particle-optical axis A of the particle-optical detector component 12 is aligned with an axis PA of the primary beam 6. The primary beam 6 passes through the aperture 50 and through a through-hole 24 of the detector.

[0082] The particle-optical detector component 12 has a shielding tube 19 through which the primary beam 6 passes. The shielding tube 19 shields the primary beam 6 from stray fields of the particle-optical detector component 12. Part of the shielding tube 19 is part of the counter-electrode assembly 29. The potential of the counter-electrode assembly 29 is matched to the potential of the shielding tube 19. These two potentials are, in turn, matched to the potential of the beam guide tube 8. The field electrode 14 is at a negative potential relative to the counter-electrode assembly 29. As described below, it is also conceivable that the field electrode 14 is at a positive potential relative to the counter-electrode assembly 29.

[0083] The Fig. Figure 3 is a further schematic representation of the particle-optical detector component 12, which describes its geometric properties. The field electrode 14 has a through-hole through which the emitted particles pass. The through-hole has an inner diameter ID. The inner diameter ID is larger than the axial length AL of the field electrode 14. The field electrode 14 is designed as a ring electrode and has the shape of a torus.

[0084] Upon impact with the particle-optical detector component, the emitted particles each have an incidence direction which forms an angle with the particle-optical axis A of the particle-optical detector component 12 that is less than 20 degrees, less than 10 degrees, or less than 5 degrees, or less than 3 degrees, or less than 1 degree.

[0085] The field is configured such that for emitted particles of the same kinetic energy 60a, 60b, a deflection angle α is obtained with an increasing radial distance r from the point of incidence. E relative to the particle-optical axis A of the particle-optical component 12, the angle increases. This causes the emitted particles to be focused in a focal region Rl. The radial incidence distance r E is measured at a location P1 where the emitted particle enters the field.

[0086] In the Fig. 4A and Fig. Figure 4B shows sections through the particle-optical detector component, originating from the center of the aperture of the field electrode 14 and oriented perpendicular to a circumferential direction of the field electrode 14. Fig. refer to different geometric configurations of the field electrode 14, as well as the counter electrode arrangement 29.

[0087] In this section, the field electrode 14 has a circular shape. The circle can have a diameter ranging from 1 millimeter to 10 millimeters. Furthermore, in this section, the first and second grid electrode regions 15, 16 each exhibit a concave shape in some areas towards the field electrode 14. The concave shape enables effective focusing of the emitted particles into the focal region R1.

[0088] In the Fig. Figure 4A shows the field strength vectors of the field. Fig. Figure 4B shows equipotential lines of the field. All components of the counter-electrode arrangement 29 are conductive and electrically connected to each other, so that, neglecting minor fluctuations through the openings of the grid electrode regions 15, 16, the surface of the counter-electrode arrangement 29 forms an equipotential surface.

[0089] In section perpendicular to the circumferential direction, a surface of the field electrode 14, which points towards the beam path of the emitted particles, has a greater curvature than the concave areas of the first and second grid electrode regions 15, 16. Therefore, higher field strengths occur on this surface of the field electrode 14 than on the concave areas of the counter electrode arrangement 29.

[0090] The sine of the deflection angle α of an emitted particle (shown in the Fig. 3) is approximately proportional to an integral of the radial component of the electric field along the trajectory of the emitted particle divided by the kinetic energy along the trajectory: sin(α(rE))∝∫Er(r,z)Ekin(r,z)dx→ where E r(r, z) is the radial component of the electrostatic field, with the coordinates r and z of a cylindrical coordinate system 92 relative to the particle-optical axis A of the particle-optical system. E kin (r, z) denotes the kinetic energy of the emitted particle at coordinates r and z. α(r E ) denotes the deflection angle after exiting the field. The deflection angle α(r) E ) depends on the radial incidence distance r E of the particle.

[0091] For a particle-optical detector component in which the kinetic energy E kin Since the particle's energy within the field remains approximately constant, the dependence of the sine of the deflection angle α on the kinetic energy E can be determined. kin and the radial component of the electric field E r can be expressed approximately by sin(α(rE))∝1Ekin∫Er(r,z)dx→

[0092] In the Fig. Figure 5A shows data points which determine the deflection angles α for particles with the same kinetic incident energy as a function of the radial incident distance r. E as stated in the Fig. As shown in Figure 5B, the field electrode 14 is set to a negative potential relative to the counter electrode arrangement 29.

[0093] How the data points in the Fig. Figure 5A shows the dependence of the deflection angle α on the radial incidence distance r. E For a given kinetic energy of impact, the relationship is adapted to a linearly increasing dependency that passes through the origin. This linearly increasing dependency is represented as straight line 51 in the Fig. 5A is shown. For each deflection angle α, a deviation from the linearly increasing dependence is less than 30% of the respective deflection angle, or less than 20%, or less than 10%, or less than 5% of the respective deflection angle.

[0094] The particle-optical detector component acts as a converging lens, focusing emitted particles of the same kinetic energy into a focal region R3. This is achieved by adjusting the dependence of the deflection angle α on the radial incident distance r. E The linear dependence of the point of arrival results in a small extent of the focus area R3. The dependence of the distance d, measured between the focus area R3 and the field electrode 14, on the deflection angle α and the radial distance of incidence r E can be expressed approximately as follows: d≈rEsinα

[0095] The distance d depends on the potential of the field electrode 14. With a kinetic incident energy of 8 keV and a field electrode potential of -4 keV relative to the counter electrode arrangement 29, the distance d is approximately 5 centimeters.

[0096] Using equations (1) and (3), the dependence of the distance d on the kinetic energy can be expressed by the following equation: d∝rE∫Er(r,z)Ekin(r,z)dx⇀

[0097] Due to the energy dependence of the distance d, an energy-dependent focus shift occurs along the beam path of the emitted particles. Therefore, by appropriately arranging a spatial filter, the emitted particles can be filtered according to their kinetic energy.

[0098] The Fig. 5C and Fig. 5D images show the particle-optical effect of a particle-optical detector component with the same geometric configuration as in the Fig. 5A and Fig. 5B. However, the field electrode 14 is set to a positive potential relative to the counter electrode arrangement 29. In this case, the particle-optical detector component exhibits a scattering particle-optical effect.

[0099] As in the Fig. As shown in Figure 5C, the deflection angle α also depends on the radial incidence distance r in this case. E For emitted particles with the same kinetic incident energy, the relationship is adapted to a linearly increasing dependency that passes through the origin. This linearly increasing dependency is represented as a straight line (52) in the... Fig. 5C is shown. For each deflection angle α, a deviation from the linearly increasing dependence is less than 30% of the respective deflection angle, or less than 20%, or less than 10%, or less than 5% of the respective deflection angle.

[0100] A backward extension of the trajectories of particles of the same kinetic energy results in a common scattering region R4, which has a distance g from the field electrode 14.

[0101] Equation (4) can be applied analogously to the distance g of the scattering region R4 from the field electrode 14. Therefore, the distance g of the scattering region R4 depends on the kinetic energy of the emitted particles. Consequently, the field generates an energy-dependent displacement of the scattering region R4 along the beam path of the emitted particles. Due to this energy-dependent displacement of the scattering region, electrons on a particle receiving surface of a detector can be defocused to varying degrees depending on their kinetic energy. This can, for example, deflect electrons with low kinetic energy so strongly that they do not strike the particle receiving surface of the detector. This allows for filtering based on the kinetic energy of the electrons.

[0102] The Fig. Figure 6 shows a particle-optical detector component 12a of a detector system according to a second embodiment. The component shown in the Fig. The second embodiment shown in Figure 6 has components that are analogous to the components of the first embodiment shown in the preceding figures. Therefore, the components of the second embodiment are provided with similar reference numerals, which, however, include the prefix "a".

[0103] The particle-optical detector component 12a comprises a braking field electrode arrangement 27a and an accelerating field electrode arrangement 28a. The braking field electrode arrangement 27a is configured to decrease the kinetic energy of the emitted particles before they enter the field generated by the field electrode 14a and the counter electrode arrangement 29a. The accelerating field electrode arrangement 28a is configured to increase the kinetic energy of the emitted particles after they leave the field generated by the field electrode 14a and the counter electrode arrangement 29a.

[0104] The braking field electrode arrangement 27a is arranged in the beam path of the emitted particles upstream of the field electrode 14a and the counter electrode arrangement 29a. The accelerating electrode arrangement 28a is arranged in the beam path of the emitted particles downstream of the field electrode 14a and the counter electrode arrangement 29a. In the Fig. Figure 6 schematically shows the field lines of the braking field 25a and the acceleration field 26a. The acceleration field 26a and the braking field 25a are each homogeneous or essentially homogeneous.

[0105] In the Fig. In the second embodiment shown in Figure 6, the braking field electrode arrangement 27a has an object-side and a detector-side grid electrode 20a, 21a, each of which is connected to a voltage source (not shown). The object-side grid electrode 20a is connected to the potential of the beam guide tube 8 (shown in Figure 6). Fig. 1) placed. The detector-side grid electrode 21a is connected to the potential of the counter-electrode arrangement 29a.

[0106] Accordingly, the acceleration field electrode arrangement 28a has an object-side and a detector-side grid electrode 22a, 23a, each of which is connected to a voltage source (not shown). The object-side grid electrode 22a is at the potential of the counter-electrode arrangement 29a. The detector-side grid electrode 23a is at the potential of the beam guide tube 8.

[0107] A potential difference between the grid electrodes 20a, 21a of the braking field electrode arrangement 27a and the grid electrodes 22a, 23a of the acceleration field electrode arrangement 28a can each be, for example, 4 kV.

[0108] The potential of the counter-electrode arrangement 29a differs from the potential of the beam guide tube 8. Therefore, a second shield tube 24a is arranged inside the shield tube 19a, which is at the potential of the beam guide tube and through which the primary beam 6 passes. This prevents deflection of the primary beam 6.

[0109] The braking field electrode arrangement 27a enables the reduction of the kinetic energy of the emitted particles as they pass through the field generated by the field electrode 14a and the counter electrode arrangement 29a. According to equation (4), this allows the difference between the distances of two focus areas with two different kinetic energies to be changed. This enables more effective energy filtering.

[0110] By additionally varying the potential difference between the field electrode 14a and the counter electrode arrangement 29a, it is possible, for example, to keep the distance of a focus area of ​​a first kinetic energy essentially constant and to vary the distance of a focus area of ​​a second, higher kinetic energy. This allows for flexible modification of the filtered energy range.

[0111] The Fig. Figure 7 shows a detector system 11b according to a third embodiment. The one in the Fig. The third embodiment shown in section 7 has components which correspond to those described in the Fig. The components of the first embodiment shown in Figures 1 to 3 are analogous. Therefore, the components of the third embodiment are provided with similar reference numerals, which, however, have the accompanying symbol “b”.

[0112] The detector system 11b comprises a first detector component 101b and a second detector component 102b, which is arranged downstream of the first detector component 101b. The first and the second detector components 101b, 102b each have a passage opening 107b, 108b for the passage of the primary beam 6b.

[0113] The detector system 11b is designed such that a large proportion of the emitted particles detected by the first detector component 101b are backscattered electrons, and a large proportion of the emitted particles detected by the second detector component 102b are secondary electrons.

[0114] Through the interaction of the primary beam 6b with the object, secondary electrons and backscattered electrons are emitted from the interaction region. A large proportion of the secondary electrons have an emission energy up to 50 eV. A large proportion of the backscattered electrons have an emission energy between 50 eV and the impact energy of the primary electrons on the object. The beam guide tube 8 (shown in the Fig. 1) The beam guide tube is at a positive potential relative to the sample. Therefore, the emitted electrons are drawn into the beam guide tube and thereby acquire additional energy, which corresponds to the potential difference between the beam guide tube and the object. For example, the beam guide tube is at a potential of 8 kV relative to the object. Then, a large proportion of the secondary electrons have a kinetic energy of 8 keV to 8.05 keV upon impact with the particle-optical detector component 12b; and a large proportion of the backscattered electrons have a kinetic energy of 8.05 keV to 8 keV + E a on, whereby E a The impact energy of the primary electrons on the object.

[0115] The particle-optical detector component 12b is configured to have a collecting particle-optical effect. For this purpose, the field electrode 14b is at a negative potential relative to the counter-electrode arrangement 29b. The first detector component 101b is arranged relative to the particle-optical detector component 12b such that the focus area R a for emitted electrons that leave the object surface with an emission energy of up to 50 eV, at least partially in or near aperture 107b. The focus area R b For electrons with an emission energy greater than 50 eV, the point is therefore downstream of aperture 107b. The beam path of the electrons with an emission energy greater than 50 eV is therefore strongly defocused in the plane of the first detector component 101b, so that the majority of these electrons strike one of the particle receiving surfaces 103b, 104b of the first detector component 101b.

[0116] The first and second detector components 101b and 102b each have several detectors, each with a particle reception area. Each detector is designed to separately detect particles that strike its respective particle reception area.

[0117] A particle receiving surface can be, for example, a sensitive surface or a combination of sensitive surfaces of a semiconductor detector, a multichannel plate and / or a scintillation detector.

[0118] The first particle receiving surface 106b of the second detector component 102b is ring-shaped and surrounds the particle optical axis OA of the particle optical system.

[0119] The first particle receiving surface 106b of the second detector component 102b primarily detects those secondary electrons emitted from the surface with a comparatively small emission angle and / or a comparatively high emission energy. The emission angle of an emitted particle can be defined as the angle between the emission direction of the emitted particle and the particle-optical axis OA of the particle-optical system. Secondary electrons with a small emission angle exhibit a trajectory that runs at a small radial distance from the particle-optical axis OA of the particle-optical system.

[0120] The particle intensity of those secondary electrons emitted with a small emission angle is comparatively highly dependent on the atomic number of the atoms in the interaction region. Depending on the particle intensity of the first particle reception area 106b, a material contrast image of the surface can therefore be generated.

[0121] The second detector component 102b further comprises a plurality of sector particle receiving surfaces 105b, each of which has the shape of a ring sector and which are arranged circumferentially around the particle-optical axis OA of the particle-optical system. The sector particle receiving surfaces 105b are arranged at a greater radial distance relative to the particle-optical axis OA of the particle-optical system than the first particle receiving surface 106b.

[0122] Therefore, the sector particle receiving surfaces 105b predominantly detect those secondary electrons that are emitted with a large emission angle and / or a low emission energy. Furthermore, the proportion of backscattered electrons in the particle intensities of the second sector particle receiving surface 105b is also lower than in the particle intensity of the first particle receiving surface 106b.

[0123] The sector particle receiving surfaces 105b detect the secondary electron emission separately in different solid angle regions, whereby the solid angle regions are arranged distributed around the particle optical axis OA of the particle optical system and detect electrons which have a comparatively large emission angle.

[0124] The detected particle intensities of the individual sector particle receiving surfaces 105a are therefore highly dependent on the surface topography of the object. It is therefore possible to generate a topographic contrast image of the surface based on the particle intensities of the sector particle receiving surfaces 105b of the second detector component 102b.

[0125] The first detector component 101b has a first particle receiving surface 104b and a second particle receiving surface 103b, each in the form of a ring that surrounds the particle-optical axis OA of the particle-optical system. The second particle receiving surface 103b has a larger radial distance relative to the particle-optical axis OA of the particle-optical system than the first particle receiving surface 104b.

[0126] A smaller proportion of secondary electrons strikes the second particle receiving surface 103b than the first particle receiving surface 104b. Therefore, a material contrast image can be generated depending on the intensity of the second particle receiving surface 103b.

[0127] It is conceivable that the detector system 101b has an aperture instead of the first detector component 101b, which is arranged relative to the particle-optical detector component 12b such that the focus area R a for emitted electrons that leave the object surface with an emission energy of up to 50 eV, at least partially in or near the aperture.

[0128] The Fig. Figure 8 shows a fourth embodiment of a detector system 11c. The one described in the Fig. The fourth embodiment shown in Figure 8 has components which are components of the one described in the Fig. The components of the fourth embodiment are analogous to those of the third embodiment shown in section 7. Therefore, the components of the fourth embodiment are provided with similar reference numerals, which, however, have the accompanying symbol “c”.

[0129] In contrast to detector system 11b (shown in the Fig. 7) is in detector system 11c (shown in the Fig. 8) In the fourth embodiment, the first detector component 101c, configured for the detection of backscattered electrons, is arranged downstream of the second detector component 102c, configured for the detection of secondary electrons. The design of the first detector component 101c corresponds to the design of the first detector component 101b of the third embodiment, with the geometry of the particle receiving surfaces being adapted to the modified beam path. The same applies to the second detector component 102c.

[0130] The detector system 11c is designed such that the focus area Rb The electrons with an emission energy greater than 50 eV are at least partially located in or near the opening of the second detector component 102c. Therefore, the electrons passing through the opening 108c of the second detector component 102c are largely backscattered electrons. The focus area R a The electrons with an emission energy up to 50 eV are located upstream of aperture 108c in the beam path of the emitted electrons, between the particle-optical system 12c and the second detector component 102c. The secondary electrons are therefore strongly defocused in the plane of the second detector component 102c, and only a small fraction of the secondary electrons pass through aperture 108c. The majority of the electrons detected by the second detector component 102c are therefore secondary electrons.

[0131] The changed positions of the focus areas R a , R bof the fourth embodiment (shown in the Fig. 8) compared to the third embodiment (shown in the Fig. 7) can be achieved in particular by a stronger negative potential of the field electrode 14c relative to the opposing field electrode 29c. When using a particle-optical detector component according to the second embodiment, a change in the arrangement of the focus areas R is possible. a , R b along the beam path, this can also be achieved by varying the braking field and / or the acceleration field.

[0132] The Fig. Figure 9 shows a particle-optical detector component of a detector system according to a fifth embodiment. The component shown in the Fig. The fifth embodiment shown in Figure 9 has components which are components of the one described in the Fig. The components of the fifth embodiment are analogous to those of the third embodiment shown in Figure 6. Therefore, the components of the fifth embodiment are provided with similar reference numerals, which, however, have the accompanying symbol “d”.

[0133] The particle optical detector component 12d has a second field electrode 108d and a second counter electrode arrangement 109d to generate a second field.

[0134] The braking field electrode arrangement 27d is arranged upstream of the first and second field electrodes 14d, 108d and the first and second counter-electrode arrangements 29d, 109d in the beam path of the emitted particles. The accelerating field electrode arrangement 28d is arranged downstream of the first and second field electrodes 14d, 108d and the first and second counter-electrode arrangements 29d, 109d in the beam path of the emitted particles. It is conceivable that the fifth embodiment is configured without a braking field electrode arrangement 27d and / or without an accelerating field electrode arrangement 28d. The first and second field electrodes 14d, 108d can have different geometries, or their geometries can be similar to each other. The same applies to the first and second counter-electrode arrangements 29d, 109d.

[0135] The one in Fig. The detector system shown in the fifth embodiment (9) allows the first and second fields to be configured such that one of the fields has a collecting particle-optical effect, and the other of the fields has a dispersing particle-optical effect. In the [description shown in the] Fig. In the fifth embodiment shown in Figure 9, the first field has a scattering particle-optical effect and the second field has a collecting particle-optical effect.

[0136] However, it is also conceivable that both fields have a scattering particle-optical effect, or that both fields have a collecting particle-optical effect.

[0137] By combining a scattering and a focusing particle optical effect, it is possible to modify the energy-dependent focus shift. In particular, it is possible to invert the energy-dependent focus shift. This makes it possible to obtain an energy-dependent focus shift in which the focus region of emitted particles with higher kinetic energy is located downstream of the focus region of emitted particles with lower kinetic energy.

[0138] This allows the positions of the focus areas to be better optimized with regard to a compact detector system and efficient energy filtering.

Claims

[1] Scanning particle beam microscope (1) for examining an object (9), comprising a particle-optical system (2) comprising an objective (7) for focusing a primary beam (6) of the scanning particle beam microscope (1) onto an object region (OR) of the particle-optical system (2), such that particles are emitted from the object (9) and pass through a principal plane (PP) of the objective (7); and a detector system (11) comprising a particle-optical detector component (12) for generating an electrostatic field in a beam path of the emitted particles; wherein the field is arranged at least partially outside an objective field of the objective (7) and exerts a collecting particle-optical effect on the emitted particles; wherein the detector system (11) is configured to spatially filter the emitted particles after passing through the field and to detect a proportion of the filtered emitted particles; wherein the particle-optical detector component (12) is designed such that the spatial filtering filters the emitted particles according to a kinetic energy of the emitted particles, characterized by , that the field of the detector system is axially symmetric. [2] Scanning particle beam microscope (1) for examining an object (9), comprising a particle-optical system (2) comprising an objective (7) for focusing a primary beam (6) of the scanning particle beam microscope (1) onto an object region (OR) of the particle-optical system (2), such that particles are emitted from the object (9) and pass through a principal plane (PP) of the objective (7); and a detector system (11) comprising a particle-optical detector component (12) for generating an electrostatic field in a beam path of the emitted particles; wherein the field is arranged at least partially outside an objective field of the objective (7) and exerts a scattering particle-optical effect on the emitted particles; wherein the detector system (11) is configured to spatially filter the emitted particles on which the scattering particle-optical effect has been exerted after a passage through the field and to detect a proportion of the filtered emitted particles; wherein the particle-optical detector component (12) is designed such that the spatial filtering filters the emitted particles according to a kinetic energy of the emitted particles. [3] Scanning particle beam microscope (1) according to claim 1 or 2, wherein the particle-optical detector component (12) comprises a field electrode (14) and a counter electrode arrangement (29), wherein the field is generated between the field electrode (14) and the counter electrode arrangement (29); wherein the field electrode (14) has a passage opening for the passage of the emitted particles; and wherein the counter electrode arrangement (29) has a first grid electrode region (15) for the entry of the emitted particles into the field and a second grid electrode region (16) for the exit of the emitted particles from the field. [4] Scanning particle beam microscope (1) for examining an object (9), comprising a particle-optical system (2) comprising an objective (7) for focusing a primary beam (6) of the scanning particle beam microscope (1) onto an object region (OR) of the particle-optical system (2) such that particles are emitted from the object (9); and a detector system (11) for detecting a proportion of the emitted particles, wherein the detector system (11) has a particle-optical detector component (12) for generating an electrostatic field in a beam path of the emitted particles; wherein the particle-optical detector component (12) comprises a field electrode (14) and a counter-electrode arrangement (29), wherein the field is generated between the field electrode (14) and the counter-electrode arrangement (29); wherein the field electrode (14) is gridless and has a passage opening for the passage of the emitted particles; and wherein the counter electrode arrangement (29) has a first grid electrode area (15) for the entry of the emitted particles into the field and a second grid electrode area (16) for the exit of the emitted particles from the field. [5] Scanning particle beam microscope (1) according to claim 3 or 4, wherein the aperture is the only aperture of the field electrode (14) for the passage of the emitted particles. [6] Scanning particle beam microscope (1) according to one of claims 3 to 5, wherein the field electrode (14) is designed as a ring electrode. [7] Scanning particle beam microscope (1) according to any one of claims 3 to 6, wherein an electric field strength of the field on a surface region of the field electrode (14) which is directed towards the beam path of the emitted particles is at least twice as large, or at least five times as large, as a maximum electric field strength of the field on the first and / or the second grid electrode region (15, 16). [8] Scanning particle beam microscope (1) according to any one of claims 3 to 7, wherein the field electrode (14) surrounds the primary beam (6). [9] Scanning particle beam microscope (1) according to one of claims 3 to 8, wherein in a section of the particle-optical detector component (12) which extends from a center of the passage opening transversely to a circumferential direction of the passage opening, the first and / or the second grating electrode region (15, 16) is formed at least partially concave and / or partially convex towards the field electrode (14). [10] Scanning particle beam microscope (1) according to one of the preceding claims, wherein the field is inhomogeneous. [11] Scanning particle beam microscope (1) for examining an object (9), comprising a particle-optical system (2) comprising an objective (7) for focusing a primary beam (6) of the scanning particle beam microscope (1) onto an object region (OR) of the particle-optical system (2) such that particles are emitted from the object (9); and a detector system (11) for detecting a proportion of the emitted particles, wherein the detector system (11) has a particle-optical detector component (12) for generating an electrostatic field in a beam path of the emitted particles; wherein the particle-optical detector component (12) comprises a field electrode (14) and a counter electrode arrangement (29), wherein the field is generated between the field electrode (14) and the counter electrode arrangement (29); wherein the field electrode (14) has a passage opening for the passage of the emitted particles; wherein the counter electrode arrangement (29) has a first grid electrode region (15) for the entry of the emitted particles into the field and a second grid electrode region (16) for the exit of the emitted particles from the field; and wherein in a section of the particle-optical detector component (12) which extends from a center of the passage opening transversely to a circumferential direction of the passage opening, the first and / or the second grid electrode region (15, 16) towards the field electrode (14) is at least partially concave and / or partially convex. [12] Scanning particle beam microscope (1) according to any one of claims 2 to 11, wherein the field revolves around an axis of the primary beam (6); and / or wherein the field is adapted to an axis-symmetric shape. [13] Scanning particle beam microscope (1) according to one of the preceding claims, wherein the field is configured such that for emitted particles of the same kinetic incident energy a deflection angle (α) increases with an increasing radial incident distance (r) E ) relative to a straight line. [14] Scanning particle beam microscope (1) according to one of the preceding claims, wherein the field is configured such that for emitted particles of the same kinetic incident energy there is a dependence of a deflection angle on a radial incident distance (r) E ) relative to a straight line, the relationship is adjusted to a linearly increasing dependence. [15] Scanning particle beam microscope (1) according to claim 14, wherein for all emitted particles of the same kinetic incident energy, the deviation of the deflection angle from the linearly increasing dependence is less than 30% of the deflection angle, or less than 20%, or less than 10%, or less than 5% of the deflection angle. [16] Scanning particle beam microscope (1) according to one of claims 13 to 15, wherein the straight line is aligned with an axis of the primary beam (6). [17] Scanning particle beam microscope (1) according to one of the preceding claims, wherein the particle-optical detector component (12) generates an energy-dependent focus shift of the beam path in a direction along the beam path; and / or wherein the particle-optical detector component generates an energy-dependent shift of a dispersion region of the beam path in a direction along the beam path. [18] Scanning particle beam microscope (1) according to one of the preceding claims, wherein the particle-optical detector component (12) is configured such that two different energy ranges of a kinetic energy of the emitted particles have two different focus regions which are shifted relative to each other in a direction along the beam path of the emitted particles; and / or wherein the particle-optical detector component (12) is configured such that the two different energy ranges have two different scattering regions which are shifted relative to each other in the direction along the beam path of the emitted particles.

Images