Method, computer program product and computer system for generating a sample inspection recipe

Abstract

A computer-implemented method for generating a sample inspection recipe for defect inspection of a photolithographic sample for a photolithographic inspection tool, comprising the following steps: providing (21) a design data file for a photolithographic sample, providing a virtual photolithographic inspection tool, simulating (24) at least one virtual image of the photolithographic sample using the virtual photolithographic inspection tool and the design data file, and generating (28) the sample inspection recipe and its corresponding tool parameters that can be used to inspect the photolithographic sample, based on the virtual aerial image (33, 35, 36, 37, 38, 39, 40) of the photolithographic sample.

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