MEMS device with a connecting element

Abstract

MEMS unit (7), in particular for a MEMS loudspeaker, with at least one cantilever arm (8) for generating and / or detecting a lifting movement of a membrane (2), with a lifting structure (12) which is connected to the membrane (2) during intended use, and with a connecting element (14) that movably connects the cantilever arm (8) to the lifting structure (12), characterized by that the MEMS unit (7) has six cantilever arms (8) which are each connected to the lifting structure (12) via a connecting element (14) and which have a trapezoidal shape tapering towards the lifting structure (12), and / or that the connecting elements (14) with their respective associated cantilever arms (8) extend radially outwards in a star shape from the central lifting structure (12), which is designed as a hexagon.

Description

[0001] The present invention relates to a MEMS device, in particular for sound generation and / or sound detection (preferably audible sound and / or ultrasound), comprising a diaphragm that is deflectable along a stroke axis, and a MEMS unit. The MEMS unit comprises at least one, in particular piezoelectric, cantilever arm for generating and / or detecting a stroke movement of the diaphragm, which is spaced apart from the diaphragm along the stroke axis, so that a cavity is formed between the cantilever arm and the diaphragm, a stroke structure arranged in the cavity and connected to the diaphragm, and a connecting element that movably connects the cantilever arm to the stroke structure. The present invention further relates to a MEMS unit for a corresponding MEMS device.

[0002] From WO 2016 / 034665 A1, a MEMS is known that comprises a membrane, a stroke structure coupled to the membrane, and at least two piezoelectric actuators connected via a plurality of spaced-apart connecting elements to a plurality of spaced-apart contact points of the stroke structure. The at least two piezoelectric actuators are configured to cause a stroke movement of the stroke structure in order to deflect the membrane. Furthermore, each of the at least two piezoelectric actuators is connected via at least two spaced-apart connecting elements to at least two spaced-apart contact points of the stroke structure. It has been found that the connecting elements and the contact points are susceptible to damage due to external forces.

[0003] The object of the present invention is to eliminate the disadvantages known from the prior art, in particular to create a MEMS device and a MEMS unit that is less susceptible to damage due to external forces.

[0004] The problem is solved by a MEMS device and a MEMS unit having the features of the independent claims.

[0005] A MEMS device is proposed, particularly for sound generation and / or sound detection, specifically preferably audible sound and / or ultrasound. The MEMS device is, in particular, a MEMS loudspeaker, a MEMS microphone, and / or a MEMS sensor. The MEMS device comprises a diaphragm that is deflectable along a stroke axis. Furthermore, the MEMS device comprises a MEMS unit. The MEMS unit includes at least one cantilever arm, in particular a piezoelectric one, for generating and / or detecting a stroke movement of the diaphragm. The cantilever arm is spaced apart from the diaphragm along the stroke axis, so that a cavity is formed between the cantilever arm and the diaphragm. The MEMS unit also includes a stroke structure that is arranged in the cavity and connected to the diaphragm. Accordingly, the stroke structure vibrates along the stroke axis together with the diaphragm during intended use.Furthermore, the MEMS unit has a connecting element that movably connects the cantilever arm to the lifting structure.

[0006] It is advantageous if the connecting element is narrowed and / or widened in at least one section in the direction of the lifting structure. Widening the connecting element accordingly allows for the reinforcement of sections subjected to particularly high loads. Additionally or alternatively, areas subjected to lower loads can be narrowed to increase the elasticity and / or flexibility of the connecting element.

[0007] Additionally or alternatively, it is advantageous if the connecting element has at least one recess. This reduces the weight of the connecting element, which in turn reduces the forces acting on it. Furthermore, the elasticity and / or flexibility of the connecting element can be increased in the area where a recess is located. Consequently, for example, a section of the connecting element can be made more robust by widening it. At the same time, the necessary elasticity and / or flexibility can be ensured in this area by a corresponding recess.

[0008] It is advantageous if the cantilever arm is connected to the lifting structure via only a single connecting element. This allows the connecting element to be designed to be very robust, as essentially the entire available installation space can be used for this one element.

[0009] The lifting structure can be designed as a single piece or in multiple parts. In the case of a multi-part lifting structure, at least two parts of the lifting structure can be directly connected to each other. Alternatively, the at least two parts can also be indirectly connected to each other via an additional element arranged between them. This element can be, for example, the membrane, in particular a rigid stiffening element of the membrane, or an additional coupling element extending between two parts of the lifting structure. The connection between the at least two parts of the lifting structure can be rigid or movable.

[0010] It is advantageous if two opposite longitudinal sides of the connecting element and / or a basic shape of the connecting element taper in a trapezoidal shape towards the lifting structure.

[0011] Likewise, it is advantageous if the connecting element has at least one cantilever section in which the connecting element has at least one cantilever extending in the transverse direction of the connecting element towards one of the two longitudinal sides of the connecting element and / or projecting outwards in the transverse direction of the connecting element.

[0012] It is advantageous if at least one cantilever is aligned perpendicular to a longitudinal axis of the connecting element. Additionally or alternatively, it is advantageous if two opposite longitudinal sides of the cantilever extend parallel to a transverse axis of the connecting element.

[0013] Furthermore, it is advantageous if a free cantilever end of at least one cantilever is chamfered towards the lifting structure. This causes the connecting element to taper in the area of ​​the cantilever section towards the lifting structure.

[0014] It is also advantageous if the cantilever section has two opposing cantilevers, with a first cantilever preferably extending to a first longitudinal side of the connecting element and a second cantilever extending to a second longitudinal side of the connecting element.

[0015] It is also advantageous if the connecting element is axially symmetrical about its longitudinal center axis.

[0016] It is also advantageous if at least one recess extends completely through the connecting element in the direction of the lifting axis. As a result, the recess has two opposing openings, one located on the top and the other on the bottom of the connecting element. Additionally or alternatively, it is advantageous if at least one recess is closed in a ring shape in its circumferential direction.

[0017] It is also advantageous if the recess is designed as a transverse slot extending in the transverse direction of the connecting element. Preferably, the transverse slot is arranged perpendicular to the longitudinal center axis of the connecting element.

[0018] Furthermore, it is advantageous if the at least one recess is arranged in the at least one cantilever section, with the recess preferably extending into the first and / or second cantilever.

[0019] Advantages arise if the connecting element is connected to the cantilever, particularly exclusively, in a first contact area extending transversely to the cantilever, preferably a single contact area. In the prior art, it has been shown that contact points are very prone to breakage under higher loads. In contrast, contact areas extending over a greater width exhibit higher compressive strength.

[0020] It is also advantageous if the cantilever arm is mounted on a support of the MEMS unit, in particular a support substrate, and has a free cantilever arm end facing away from the support.

[0021] It is advantageous if the first contact area is located at the free end of the cantilever arm and / or is narrower than the free end of the cantilever arm in the transverse direction of the cantilever arm.

[0022] It also offers advantages if the connecting element is connected to the lifting structure, in particular exclusively, in a second contact area extending in the transverse direction of the cantilever, preferably a single contact area.

[0023] It also offers advantages if the second contact area is located on a side wall of the lifting structure and / or extends completely across this side wall in the transverse direction of the cantilever arm.

[0024] Furthermore, it is advantageous if the first contact area in the transverse direction of the cantilever is wider than the second contact area.

[0025] It also offers advantages if the connecting element has at least one bridging section, which preferably connects the at least one cantilever section with the first contact area, the second contact area or an adjacent further cantilever section.

[0026] Advantages arise if at least one bridging section is arranged centrally in the transverse direction of the connecting element and / or has a smaller width compared to at least one cantilever section.

[0027] It is also advantageous if the connecting element has several bridging sections spaced apart from each other in the longitudinal direction of the connecting element. In this regard, it is further advantageous if the bridging sections have a smaller width when located closer to each other and closer to the lifting structure, wherein preferably a bridging section on the cantilever side has a greater width in the transverse direction of the connecting element than a bridging section on the lifting structure side.

[0028] It is also advantageous if the connecting element has a Christmas tree-shaped basic form.

[0029] It is also advantageous if the connecting element has several cantilever sections spaced apart from each other in the longitudinal direction of the connecting element, at least one of which is designed according to the preceding description, whereby the aforementioned features may be present individually or in any combination.

[0030] It is also advantageous if the cantilever sections have a smaller width relative to each other and a smaller distance to the lifting structure, with a cantilever section preferably having a greater width in the transverse direction of the connecting element than a cantilever section on the lifting structure side.

[0031] It is advantageous if the free cantilever ends of at least two cantilever sections adjacent to each other in the longitudinal direction of the connecting element are aligned.

[0032] Furthermore, it is advantageous if the connecting element, particularly in the bridging section, has at least one lateral incision that extends from one of the two longitudinal sides of the connecting element into the connecting element.

[0033] It is also advantageous if, in the first contact area, a cantilever section or a bridging section of the connecting element is connected to the free end of the cantilever arm. Additionally or alternatively, it is advantageous if, in the second contact area, a cantilever section or a bridging section of the connecting element is connected to the lifting structure.

[0034] It is advantageous if the cantilever arm has an elastic support layer and / or at least a piezo layer.

[0035] Very cost-effective manufacturing is made possible if the support layer of the cantilever, the connecting element and a lifting structure base of the lifting structure, especially in the area of ​​a lifting structure end face facing away from the membrane, are formed from a common, especially monolithic, layer.

[0036] Furthermore, it is advantageous if the cantilever arm has a trapezoidal shape that tapers towards the lifting structure. Additionally or alternatively, it is advantageous if the connecting element continues this trapezoidal shape towards the lifting structure.

[0037] Advantages arise if the MEMS unit has several cantilever arms, in particular six, each of which is connected to the lifting structure via a, preferably single, connecting element, wherein the connecting elements are preferably designed according to the preceding description, wherein the aforementioned features can be present individually or in any combination.

[0038] It is also advantageous if the connecting element narrows and / or widens in at least one section in the direction of the hub structure and / or if the connecting element has at least one recess.

[0039] A MEMS unit is proposed, in particular for a MEMS device according to the preceding description, comprising at least one, in particular piezoelectric, cantilever arm for generating and / or detecting a stroke movement of a membrane, a stroke structure which is connected to the membrane in its intended use, and a connecting element which movably connects the cantilever arm to the stroke structure. It is advantageous if the connecting element narrows and / or widens in at least one section in the direction of the stroke structure. Additionally or alternatively, it is advantageous if the connecting element has at least one recess.

[0040] It is advantageous if the MEMS unit is designed according to the MEMS unit of the MEMS device described above, whereby the aforementioned features can be present individually or in any combination.

[0041] It is proposed to use a MEMS unit as described above in a MEMS device as described above, wherein the aforementioned features may be present individually or in any combination.

[0042] Proposed is an electronic device, in particular a headphone, glasses, mobile phone, tablet and / or a wearable, with a MEMS device according to the preceding description, wherein the aforementioned features may be present individually or in any combination.

[0043] Further advantages of the invention are described in the following exemplary embodiments. These show: Fig. 1. A cross-sectional view of a MEMS device with a MEMS unit, Fig. 2 a top view of the MEMS unit of the in Fig. 1 MEMS device shown, Fig. 3 A cut-out detail view of a single cantilever arm with connecting element and lifting structure of the in Fig. 2 shown MEMS unit and Fig. 4 a non-cropped detail view of the in Fig. 2 MEMS unit shown in the area of ​​the hub structure and the connecting elements.

[0044] In the Fig. Figures 1-4 show an embodiment of the invention with multiple cantilever arms 8. Alternatively, the device can also have only one cantilever arm 8, in which case the following description is to be read analogously.

[0045] Fig. Figure 1 shows a cross-sectional view of a MEMS device 1, in particular for sound generation and / or sound detection. The MEMS device 1 can, in particular, generate and / or detect audible sound and / or ultrasound. The MEMS device 1 is preferably a MEMS loudspeaker, a MEMS microphone, and / or a MEMS sensor. The MEMS device 1 is intended for use with an electronic device (not shown). The electronic device can preferably be designed to be worn on the head or body. In particular, the electronic device is a headphone, glasses, a helmet, a headband, a mobile phone, a tablet, a watch, or a wristband. Alternatively, the electronic device can also be designed to be installed in other devices, such as a vehicle.

[0046] According to Fig. The MEMS device 1 comprises a membrane 2 that can be deflected along a stroke axis 3. The membrane 2 includes an elastic membrane layer 4, which is attached at its edge to a membrane support 5. Furthermore, the membrane 2 has a rigid stiffening element 6, which is indirectly connected to the membrane support 5 via the membrane layer 4.

[0047] Furthermore, the MEMS device 1 includes according to Fig. 1. A MEMS unit 7. This unit has at least one, in particular piezoelectric, cantilever arm 8 with which a stroke movement of the membrane 2 along the stroke axis 3 can be generated and / or detected. The term "cantilever arm" is understood to mean a flexible element supported at one end, which has a deflectable free end. Furthermore, the MEMS unit 7 comprises a support 10, in particular a support substrate, on which the at least one cantilever arm 8 is supported. Consequently, the cantilever arm 8 has a free cantilever end 11 facing away from the support 10, which can be deflected along the stroke axis 3.

[0048] The cantilever arm 8 is spaced apart from the membrane 2 along the lifting axis 3, so that a cavity 9 is formed between the cantilever arm 8 and the membrane 2. In this case, the cavity 9 is at least partially formed in or bounded by the support 10.

[0049] As from Fig. As shown in Figure 1, the MEMS unit 7 also comprises a lifting structure 12, which is at least partially arranged in the cavity 9. The lifting structure 12 is connected to the membrane 2. According to the present embodiment, the lifting structure 12 is bonded to the stiffening element 6 of the membrane 2 using an adhesive 13. Due to manufacturing requirements, the lifting structure 12 and the support 10 are preferably made of the same material, in particular silicon. The lifting structure 12 can be formed in one piece or in multiple parts. In the case of a multi-part lifting structure 12, at least two parts of the lifting structure 12 can be directly connected to each other. Alternatively, the at least two parts can also be indirectly connected to each other via an additional element arranged between them.This could be, for example, the membrane 2, in particular the rigid stiffening element 6 of the membrane 2, or an additional coupling element (not shown) extending between two parts of the lifting structure 12. The connection between the at least two parts of the lifting structure 12 can be rigid or movable.

[0050] At least one cantilever arm 8 is movably connected to the lifting structure 12 indirectly via a connecting element 14. The design of this connecting element 14 is described in the following sections. Fig. 2, Fig. 3 and Fig. 4 is shown and described in detail. In intended use, the free cantilever end 11 is deflected in the direction of the lifting axis 3. To prevent the lifting structure 12 and / or the membrane 2 from tilting during this curved deflection of the cantilever end 11, the cantilever 8 is indirectly connected to the lifting structure 12 via the connecting element 14 in the area of ​​its free cantilever end 11. The connecting element 14 is designed to be elastic and / or flexible for this purpose.

[0051] The cantilever end 11 of the cantilever 8 is connected to the connecting element 14 in a first contact area 15. Furthermore, the lifting structure 12 is connected to the connecting element 14 in a second contact area 16. As can be seen in particular from Fig. As can be seen from Figure 1, the connecting element 14 is connected to a side wall 17 of the lifting structure 12.

[0052] The cantilever arm 8 is designed as a multilayer structure. It comprises an elastic support layer 18. Furthermore, the cantilever arm 8 has a piezoelectric layer 19. The piezoelectric layer 19 is arranged between two electron layers not shown here. The piezoelectric layer 19 can orient itself as in Fig. 1 shown below the carrier layer 18. Alternatively, it can also be arranged on the carrier layer 18 as shown in the illustration.

[0053] In the present embodiment, the MEMS unit 7 comprises several cantilever arms 8, each connected to the lifting structure 12 via a single connecting element 14. For clarity, only one of these cantilever arms 8 and its corresponding connecting element 14 are fully labeled. To ensure cost-effective and rapid manufacturing, it is advantageous if the support layer 18 of the cantilever arms 8, the connecting elements 14, and a lifting structure base 20 of the lifting structure 12 are formed from a common, preferably monolithic, layer. The lifting structure base 20 is preferably arranged in the region of a lifting structure end face 21 facing away from the membrane 2.

[0054] The MEMS device 1 comprises according to Fig. 1. Furthermore, a printed circuit board 22 on which the MEMS unit 7 is arranged. The printed circuit board 22 has a circuit board cavity 23 which adjoins the cavity 9 of the MEMS unit 7. Consequently, the cavity 9 of the MEMS unit 7 and the circuit board cavity 23 form a common acoustic cavity of the MEMS device 1. The cantilever arms 8 and the lifting structure 12 can move into the circuit board cavity 23 along the lifting axis 3. In addition to the MEMS unit 7, the membrane carrier 5 is also attached to the printed circuit board 22.

[0055] Fig. Figure 2 shows a top view of the MEMS unit 7. This shows that the support 10 is designed as a closed and / or polygonal ring. The cantilever arms 8 are arranged circumferentially around the support 10 and extend radially inwards. The lifting structure 12 is located centrally. The lifting structure 12 has a shape corresponding to the support 10, namely, in this case, a polygonal shape. Consequently, the lifting structure 12 has several side walls 17, each associated with one of the cantilever arms 8. The cantilever arms 8 have a trapezoidal shape that tapers towards the lifting structure 12. This trapezoidal shape is continued towards the lifting structure 12 by the respective connecting element 14, so that the connecting elements 14 also have a trapezoidal basic shape.

[0056] Fig. Figure 3 shows a cut-out detail view of the in Fig. Figure 2 shows the MEMS unit 7 of the MEMS device 1 in the area of ​​a cantilever end 11 of one of the cantilever arms 8. An embodiment with only a single cantilever arm 8 could be designed analogously. As already mentioned above, the free cantilever end 11 of the respective cantilever arm 8 is movably connected to the lifting structure 12 via a respective connecting element 14. As shown in Figure 2, the cantilever end 11 of the respective cantilever arm 8 is movably connected to the lifting structure 12. Fig. As can be seen from Figure 3, the cantilever arm 8 is connected to the lifting structure 12 via only a single connecting element 14. Advantageously, the available installation space for this single connecting element 14 can thus be used in the best possible way.

[0057] The connecting element 14 narrows according to the in Fig. The connecting element 14 is shown in the top view in the direction of the lifting structure 12 in at least one section. Furthermore, the connecting element 14 widens in at least one section. By widening the connecting element 14 accordingly, sections subjected to particularly high loads can be reinforced. In addition, sections subjected to lower loads can be narrowed to increase the elasticity and / or flexibility of the connecting element 14.

[0058] Furthermore, the connecting element 14 has at least one recess 24, 25. This reduces the weight of the connecting element 14, which in turn reduces the forces acting on it. Additionally, the elasticity and / or flexibility of the connecting element 14 can be increased in the area where a recess 24, 25 is located. Consequently, for example, a section of the connecting element 14 can be made more robust by widening it. At the same time, the necessary elasticity and / or flexibility can be ensured in this area by a corresponding recess 24, 25.

[0059] The at least one recess 24, 25 extends completely through the connecting element 14 in the direction of the lifting axis 3. Consequently, the recess 24, 25 has two openings arranged on two opposite sides of the connecting element 14. Furthermore, the at least one recess 24, 25 is closed in an annular shape in its longitudinal direction. This ensures very high stability. According to the present embodiment, the recesses 24, 25 are designed as transverse slots extending in the transverse direction of the connecting element 14.

[0060] According to the in Fig. In the top view shown in Figure 3, two opposite longitudinal sides 26, 27 of the connecting element 14 taper towards the lifting structure 12. The connecting element 14 is connected to the cantilever arm 8 exclusively in the single first contact area 15. The first contact area 15 is located at the free end 11 of the cantilever arm. As shown in Figure 3, the connecting element 14 is connected to the cantilever arm 8 only in the single first contact area 15. Fig. As can be seen from 3, the first contact area 15 in the transverse direction of the cantilever arm 8 is narrower than the free end of the cantilever arm 11.

[0061] With the hub structure 12, the connecting element 14 is according to Fig. 3 are connected exclusively in the single second contact area 16. The second contact area 16 extends in the transverse direction of the cantilever arm 8. As already mentioned above, the second contact area 16 is formed on one of the side walls 17 of the lifting structure 12. In order to ensure the most robust connection possible, the second contact area 16 extends, as shown in Fig. 3 shown, over more than half the width of the corresponding side wall 17 of the lifting structure 12. The first contact area 15 is wider in the transverse direction of the cantilever arm 8 than the second contact area 16.

[0062] According to Fig. 3 The connecting element 14 has at least one cantilever section 28, 29, 30, wherein the connecting element 14 has three cantilever sections 28, 29, 30 in the present embodiment. In this at least one cantilever section 28, 29, 30, the connecting element 14 has at least one projection 31, 32. The at least one projection 31, 32 extends transversely to one of the two longitudinal sides 26, 27 of the connecting element 14. Consequently, the at least one projection 31, 32 projects outwards transversely to the connecting element 14. The at least one projection 31, 32 is oriented perpendicular to a longitudinal axis of the connecting element 14. According to the Fig. In the top view shown in Figure 3, the cantilever 31, 32 has two opposing longitudinal sides 33, 34. The two longitudinal sides 33, 34 of the at least one cantilever 31, 32 are aligned parallel to each other and / or extend parallel to a transverse axis of the connecting element 14. The at least one cantilever 31, 32 has a free cantilever end 35. The free cantilever end 35 of the at least one cantilever 31, 32 is chamfered. The chamfer is designed such that the connecting element 14 tapers towards the lifting structure 12. Furthermore, it is aligned with a longitudinal side 36, 37 of the cantilever arm 8.

[0063] In the present embodiment, the at least one cantilever section 28, 29, 30 has two opposing cantilevers 31, 32. The first cantilever 31 extends transversely to the first longitudinal side 26 of the connecting element 14. The second cantilever 32 is oriented opposite to the first cantilever 31. Accordingly, the second cantilever 32 extends to the second longitudinal side 27 of the connecting element 14.

[0064] The at least one recess 24, 25 is, as particularly in Fig. Figure 3 shows that at least one cantilever section 28, 29 is arranged. The recess 24, 25 associated with the cantilever section 28, 29 extends into the first and second cantilevers 31, 32 of the cantilever section 28, 29. Advantageously, at least one of the cantilever sections 28, 29 is designed as a closed ring.

[0065] In the Fig. In the embodiment shown in Figure 3, the connecting element 14 comprises a first and a second cantilever section 28, 29, which are designed according to the preceding description. Accordingly, the first cantilever section 28 and the second cantilever section 29 each have two opposing projections 31, 32. Furthermore, the first cantilever section 28 has a first recess 24 and the second cantilever section 29 has a second recess 25. The first cantilever section 28 on the cantilever arm side has a greater width in the transverse direction compared to the second cantilever section 29 on the lift structure side. Consequently, the cantilever sections 28, 29, 30 have a smaller width with increasing distance from the free cantilever end 11. As shown in Figure 3, the first cantilever section 28 has a greater width in the transverse direction than the second cantilever section 29 on the lift structure side. Fig. As can also be seen from Figure 3, the free cantilever ends 35 of the first and second cantilever sections 28, 29 are aligned with each other. Furthermore, they are also aligned with the respective associated longitudinal sides 36, 37 of the cantilever arm 8. Consequently, the two cantilever sections 28, 29 of the connecting element 14, together with the longitudinal sides 36, 37 of the cantilever arm 8, have a trapezoidal basic shape that tapers towards the lifting structure 12.

[0066] Furthermore, the connecting element 14 exhibits, according to the Fig. In the embodiment shown in Figure 3, a third cantilever section 30 is included. This third cantilever section 30 also comprises two projections 31, 32, each extending towards one of the two longitudinal sides 26, 27 of the connecting element 14. In contrast to the first and second cantilever sections 28, 29, this one widens in the direction of the lifting structure 12. Since the second contact area 16 is formed between the third cantilever section 30 and the lifting structure 12, a very large width of the second contact area 16 can be achieved. Another difference between the third cantilever section 30 adjacent to the lifting structure 12 and the other cantilever sections 28, 29 is that the third cantilever section 30 does not have a recess, but is instead completely closed.This in turn can increase the stability of the third cantilever section 30, which is directly adjacent to the lifting structure 12.

[0067] According to Fig. 3 The connecting element 14 has at least one bridging section 38, 39, 40. This bridging section 38, 39, 40 connects one of the cantilever sections 28, 29, 30 to the first contact area 15 on the cantilever arm side or to a longitudinally adjacent cantilever section 28, 29, 30. The bridging section 38, 39, 40 is arranged centrally in the transverse direction of the connecting element 14. Furthermore, it has a smaller width compared to the adjacent cantilever section 28, 29, 30. The bridging section 38, 39, 40 preferably has concavely curved longitudinal sides.

[0068] In the Fig. In the embodiment shown in Figure 3, the connecting element 14 has lateral incisions 41. These extend from one of the two longitudinal sides 26, 27 of the connecting element 14 into the connecting element 14. The incisions 41 are arranged longitudinally along the connecting element 14 in the area of ​​the bridging sections 38, 39, 40. Accordingly, the bridging sections 38, 39, 40 each have an adjacent incision 41 on their two longitudinal sides.

[0069] In the present embodiment, the connecting element 14 comprises a first bridging section 38 which is arranged longitudinally along the connecting element 14 between the free cantilever end 11 and the first cantilever section 28. The connecting element 14 is thus connected to the free cantilever end 11 via the first bridging section 38. Consequently, the first contact area 15 is formed between the free cantilever end 11 and the first bridging section 38. The first bridging section 38 has a narrower width in the transverse direction of the connecting element 14 compared to the free cantilever end 11.

[0070] A second bridging section 39 is formed between the first and second cantilever sections 28, 29. Consequently, the first and second cantilever sections 28, 29 are spaced apart from each other longitudinally along the connecting element 14 and connected to each other via the second bridging section 39. The second bridging section 39, which is closer to the lifting structure 12, has a narrower width in the transverse direction of the connecting element 14 compared to the first bridging section 38. Furthermore, the connecting element 14 has a third bridging section 40. This is arranged longitudinally along the connecting element 14 between the second cantilever section 29 and the third cantilever section 30. Consequently, the second cantilever section 29 is also spaced apart from the third cantilever section 30 longitudinally along the connecting element 14 and connected to it via the third bridging section 40.The third bridging section 40 has a narrower width in the transverse direction of the connecting element 14 compared to the second bridging section 39. Therefore, the width of bridging sections 38, 39, and 40 decreases with increasing distance from the free cantilever end 11.

[0071] In summary, it can be stated that the width of the connecting element 14 decreases iteratively in the bridging sections 38, 39, 40 and increases in the cantilever sections 28, 29, 30. As a result, the connecting element 14 has a fir-tree-shaped basic form, which preferably tapers in the longitudinal direction of the connecting element 14 towards the lifting structure 12.

[0072] Fig. 4 shows a non-cropped detail view of the in Fig.The MEMS unit 7 shown in Figure 2 is located in the area of ​​the lifting structure 12, which is connected to the respective cantilever arms 8 via a connecting element 14. The top view shows that the connecting elements 14, with their respective associated cantilever arms 8, extend radially outwards from the central lifting structure 12, which is hexagonal in this case, in a star-like pattern. Each cantilever arm 8 is associated with only one connecting element 14. Furthermore, each connecting element 14 has only one first contact area 15 with its associated cantilever arm 8. Likewise, each connecting element 14 has only one second contact area 16 with the lifting structure 12. The connecting elements 14 and the cantilever arms 8 are spaced apart from each other by a slot 42, so that there is no connection between them.

[0073] The present invention is not limited to the embodiments shown and described. Modifications within the scope of the claims are possible, as is a combination of the features, even if these are shown and described in different embodiments. Reference symbol list 1 MEMS device 2 Membran 3 lifting axle 4 membrane layer 5 membrane carriers 6 stiffening element 7 MEMS units 8 cantilever 9 Cavity 10 carriers 11 free cantilever end 12 Hub structure 13 glue 14 Connecting element 15 first contact area 16 second contact area 17 Side wall of the lifting structure 18 Carrier layer 19 Piezo layer 20 Hub structure base 21 Hub structure front 22 Circuit board 23 Circuit board cavity 24 first recess 25 second recess 26 first longitudinal sides of the connecting element 27 second longitudinal sides of the connecting element 28 first cantilever section 29 second cantilever section 30 third cantilever section 31 first cantilever 32 second cantilever 33 first long side of the cantilever 34 second long side of the cantilever 35 End of cantilever 36 first long side of the cantilever 37 second long side of the cantilever 38 first bridging section 39 second bridging section 40 third bridging section 41 Incision 42 slots QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] WO 2016 / 034665 A1

[0002]

Claims

MEMS unit (7), in particular for a MEMS loudspeaker, with at least one cantilever arm (8) for generating and / or detecting a stroke movement of a diaphragm (2), with a stroke structure (12) which is connected to the diaphragm (2) in its intended use, and with a connecting element (14) which movably connects the cantilever arm (8) to the stroke structure (12), characterized in that the MEMS unit (7) has six cantilever arms (8), each of which is connected to the stroke structure (12) via a connecting element (14) and which have a trapezoidal shape tapering towards the stroke structure (12), and / or that the connecting elements (14) with the respective associated cantilever arm (8) extend radially outwards from the central stroke structure (12), which is designed as a hexagon, in a star-shaped manner. MEMS unit according to the previous claim, characterized in that the connecting element (14) narrows in the direction of the hub structure (12) in at least one section and / or widens in at least one section and / or that the connecting element (14) has at least one recess (24, 25). MEMS unit according to one of the preceding claims, characterized in that the cantilever arm (8) is connected to the lifting structure (12) via only a single connecting element (14). MEMS unit according to one of the preceding claims, characterized in that two opposite longitudinal sides (26, 27) of the connecting element (14) and / or a basic shape of the connecting element (14) taper in a trapezoidal direction towards the lifting structure (12). MEMS unit according to one of the preceding claims, characterized in that the connecting element (14) has at least one cantilever section (28, 29, 30) in which the connecting element (14) has at least one cantilever (31, 32) extending in the transverse direction of the connecting element (14) to one of the two longitudinal sides (26, 27) of the connecting element (14). MEMS unit according to one of the preceding claims, characterized in that the cantilever section (28, 29, 30) has two opposing cantilevers (31, 32), wherein preferably a first cantilever (31) extends to a first longitudinal side (26) of the connecting element (14) and a second cantilever (32) extends to a second longitudinal side (27) of the connecting element (14). MEMS unit according to one of the preceding claims, characterized in that the at least one recess (24, 25) extends completely through the connecting element (14) in the direction of the lifting axis (3), that the at least one recess (24, 25) is closed in a ring shape in its circumferential direction and / or that the at least one recess (24, 25) is arranged in the at least one cantilever section (28, 29) and preferably extends into the first and / or second cantilever (31, 32). MEMS unit according to one of the preceding claims, characterized in that the connecting element (14) is connected to the cantilever arm (8), in particular exclusively, in a first contact area (15) extending in the transverse direction of the cantilever arm (8), preferably a single, first contact area. MEMS unit according to one of the preceding claims, characterized in that the cantilever arm (8) has a free cantilever arm end (11) facing away from a support (10) of the MEMS unit (7) and / or that the first contact area (15) is arranged at the free cantilever arm end (11) and / or is narrower in the transverse direction of the cantilever arm (8) than the free cantilever arm end (11). MEMS unit according to one of the preceding claims, characterized in that the connecting element (14) is connected to the lifting structure (12), in particular exclusively, in a second contact area (16) extending in the transverse direction of the cantilever arm (8), preferably a single, second contact area. MEMS unit according to one of the preceding claims, characterized in that the first contact area (15) in the transverse direction of the cantilever arm (8) is wider than the second contact area (16). MEMS unit according to one of the preceding claims, characterized in that the connecting element (14) has at least one bridging section (38, 39, 40) which preferably connects the at least one cantilever section (28, 29, 30) with the first contact area (15), the second contact area (16) or an adjacent further cantilever section (28, 29, 30). MEMS unit according to one of the preceding claims, characterized in that the at least one bridging section (38, 39, 40) is arranged centrally in the transverse direction of the connecting element (14) and / or has a smaller width compared to the at least one cantilever section (28, 29, 30). MEMS unit according to one of the preceding claims, characterized in that the connecting element (14) has a fir tree-shaped basic form and / or that the connecting element (14) has several cantilever sections (28, 29, 30) spaced apart from each other in the longitudinal direction of the connecting element (14), at least one of which is designed according to one or more of the preceding claims. MEMS unit according to one of the preceding claims, characterized in that the cantilever sections (28, 29, 30) have a smaller width relative to each other and are located at a smaller distance from the lifting structure (12). MEMS unit according to one of the preceding claims, characterized in that the connecting element (14), in particular in the bridging section (38, 39, 40), has at least one lateral incision (41) which extends from one of the two longitudinal sides (26, 27) of the connecting element (14) into the connecting element (14). MEMS unit according to one of the preceding claims, characterized in that the connecting element (14) continues this trapezoidal shape in the direction of the lifting structure (12).

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