Beam expander for a replication apparatus

Abstract

A system (100, 300) for adapting a diameter of a photon beam (S', S") comprises: a first element (1) which has a curved surface and a first and a second focus (F1, F2). The system can be configured such that the photon beam is focused on the first focus (F1), with the result that the photon beam is focused on the second focus (F2) following a reflection at the surface of the first element (1).

Description

[0001] Beam expander for a replication system

[0002] 1. Technical area

[0003] The present invention relates to a system for adapting a diameter of a photon beam, a projection device and a corresponding method and computer program.

[0004] 2. State of the art

[0005] For various optical applications, it can be helpful to adapt the diameter of an existing photon beam. For example, it can be useful to scale the photon beam to a specific diameter. Adapting the diameter of a photon beam can be used, for example, in an optical magnification system (e.g., a zoom system, a projection device, a replication device, a display device, etc.). Optical magnification systems can usually be implemented using a system of different optical lenses, with the photon beam passing through the lenses to be adjusted to a defined diameter. Adapting the diameter usually requires precise adjustment or fine-tuning of one or more optical elements of the lens system (e.g., via a defined offset of one or more lenses).Depending on the complexity of the optical lens system and the technical requirements for adapting the diameter, this can pose a significant technical challenge. This is further complicated by the fact that optical aberrations are usually unavoidable in lenses, so they must either be accepted or reduced through a complex optical design.

[0006] Furthermore, optical magnification systems that utilize reflective optical elements are also known. The beam path of the photon beam can often exhibit complex deflections relative to an optical axis, since the adaptation of the photon beam diameter in such reflective magnification systems cannot usually take place in a defined manner along an optical axis, as is the case with a lens system. This often results in high technical optical quality even for reflective magnification systems.

[0007] The present invention is therefore based on the object of improving and / or simplifying the adaptation of a diameter of a photon beam.

[0008] 3. Summary of the invention

[0009] This object is at least partially achieved by the various aspects of the present invention.

[0010] A first aspect relates to a system for adapting the diameter of a photon beam. The system comprises a first element with a curved surface, which has a first and a second focus. The system is configured to focus the photon beam into the first focus, so that the photon beam, after reflection from the surface of the first element, is focused onto the second focus.

[0011] The invention thus enables a defined guidance of the photon beam through the system for adapting its diameter, since the photon beam focused on the first focus is always output in a defined manner at the second focus of the first element via its reflection at the first element. The first element can thus be understood as a reflective deflection unit of the photon beam in the system. The deflection of the photon beam can therefore function without active adjustment of the first element, since the system can take advantage of the fact that the photon beam focused at the first focus is always output focused at the second focus. Targeted adjustment or focusing on the position of the second focus can thus be omitted. The invention can therefore make it possible to reduce the complexity in a system for adapting a diameter of a photon beam.At the same time, the optical quality of the photon beam can be ensured during the defined guiding or deflecting, since the first element can be configured such that no (significant) aberration is introduced onto the photon beam upon reflection of the photon beam at the first element. For example, in this respect, the invention can avoid an aberration that is typically associated with passing / transmitting a photon beam through two media (e.g., with a lens). The optical quality of the photon beam focused at the first focus can thus (substantially) correspond to the optical quality of the reflected photon beam at the second focus. In one example, aberration is guided from the first focus to the second focus without the need for (e.g.,complex) adjustment or correction and at the same time the curved surface can be designed in such a way that a numerical aperture of the photon beam is changed upon reflection, so that after collimation a changed output diameter of the photon beam can be established (without requiring a movable collimator).

[0012] This makes it possible to provide a system for adapting the diameter of a photon beam that does not require lenses and thus does not incur significant chromatic aberration. It can thus be used over a wide wavelength range without the occurrence of aberrations. The system can, for example, operate exclusively with reflective elements.

[0013] In one example, the curved surface of the first element can be at least partially concave, whereby the system can be configured such that the photon beam impinges on a concave area. The photon beam can thus impinge on a concave portion of the surface of the first element via focusing on the first focus, which reflects or focuses the photon beam into the second focus of the first element. The curvature of the surface can, for example, be locally different or vary locally.

[0014] The curved surface may, for example, extend in a first plane, with the first element having no curvature along a second plane orthogonal thereto. The incident photon beam may, for example, lie in the first plane. In other examples, the curved surface is also curved in the second plane. The curvature in the second plane may, for example, substantially correspond to the curvature in the first plane.

[0015] In one example, the first element comprises an elliptical mirror. The elliptical mirror can have two focus points, which correspond to the first focus and the second focus of the first element. The elliptical mirror can have a concave region at least along one plane. For example, the elliptical mirror can be described exclusively along one plane via an elliptic curve. In another example, the elliptical mirror can have a concave region along each of two orthogonal planes. For example, the geometry of the surface of the mirror can be mathematically described via an ellipse (e.g., via an elliptic curve and / or an ellipsoidal surface). In one example, the system comprises a first output coupler, which collimates the photon beam to a first output diameter after reflection at the first output coupler.The photon beam collimated by the first output coupler can correspond to the photon beam previously reflected by the first element. The first output coupler can, for example, have a curved surface that receives the photon beam, such that the photon beam is reflected by the curved surface in such a way that the photon beam is collimated to a (defined) first output diameter after this reflection. In one example, the curved surface of the first output coupler can comprise a concave region onto which the incident photon beam falls. The geometry of the curved surface can, for example, be locally different and / or be mathematically described via a parabola (e.g., via a parabolic curve / surface). In one example, the first output coupler comprises a parabolic mirror. The parabolic mirror can have the corresponding curvature at least along one axis. E.g.The parabolic mirror may have a concave region exclusively along one plane. In another example, the parabolic mirror may have a concave region along two orthogonal planes.

[0016] In one example, the output coupler is positioned after the second focus of the first element, so that the photon beam incident on the output coupler has previously been focused to the second focus of the first element. In this case, the photon beam diverging from the second focus can be incident on the output coupler and collimated to the first output diameter.

[0017] In another example, the first output coupler comprises an output coupler that collimates the photon beam to a first output diameter without reflection. In this example, the first output coupler may comprise, for example, a collimating lens, a collimating lens system, and / or a collimator, which does not necessarily have to include reflective elements.

[0018] In one example, the first element and the first output coupler are arranged relative to each other such that a focus of the first output coupler and the second focus of the first element are essentially at the same position. This can enable coordination of the first element with the first output coupler, as this ensures that the photon beam is not only focused into the second focus of the first element, but also that other auxiliary devices are always output in a collimated manner.

[0019] In one example, the first element and the first output coupler can be arranged in a fixed position relative to each other. The first element and the first output coupler can thus be configured to be immobile relative to each other, eliminating the need for local tuning of the two components (e.g., during photon radiation adaptation), thus reducing system complexity.

[0020] It should be noted that, in another example, the first output coupler can also be finely adjusted to suitably adjust the collimation of the first output diameter or to calibrate the overlap of the second focus of the first element with the focus of the first output coupler (e.g., this can be done by shifting / tilting the first output coupler, e.g., using suitable positioners). It is important, however, to note that calibration can be omitted during normal operation, as the system can be configured so that the optimal position between the first element and the first output coupler does not change, even if, for example, the wavelength and / or magnification of the system is changed.

[0021] In one example, the system is further configured such that the first output diameter is dependent on a numerical aperture of the photon beam focused into the first focus. The system can therefore be specifically designed such that, for a desired first output diameter, a predetermined numerical aperture of the photon beam focused into the first focus can be determined. Accordingly, there can be a direct relationship in the system between the numerical aperture of the photon beam focused into the first focus and the first output diameter. For example, the system can be designed such that a predetermined first output diameter is present, based on a predetermined numerical aperture of the photon beam in the first focus. The defined application of the numerical aperture can, for example,This can be predetermined by the design of various optical elements of the system, which guide the photon beam into the first focus of the first element with a predefined numerical aperture. Examples of this are described below.

[0022] In one example, the system is further configured such that the first output diameter is dependent on an angle of incidence at which the focused photon beam is focused into the first focus. The system can therefore be specifically designed such that a focus of a focused photon beam can be determined. The angle of incidence of the photon beam into the first focus can be defined with respect to a line or a plane of the first element. For example, the angle of incidence can be defined with respect to the line that results from the connection between the first and second focuses of the first element (or the angle of incidence can also relate to a plane that is spanned by the first and second focuses). The angle of incidence can, for example, be defined with respect to a directional ray of the photon beam.

[0023] The inventor has identified a system arrangement with which, even with a (substantially) constant numerical aperture of the photon beam at the first focus, there can be a direct relationship between the angle of incidence of the photon beam at the first focus and the first output diameter. This is based on the fact that, via the system arrangement, the numerical aperture at the first focus (referred to herein as the first numerical aperture) also causes a numerical aperture of the photon beam at the second focus (referred to herein as the second numerical aperture). The system arrangement can be constructed in such a way that, even with a constant first numerical aperture, the angle of incidence at the first focus has a direct relationship with the magnitude of the second numerical aperture. The system can therefore make it possible to modulate a numerical aperture. For example, with a constant first numerical aperture, a variation orthe second numerical aperture can be specifically set at a predetermined angle of incidence. The second numerical aperture can be set differently from the first numerical aperture depending on the angle of incidence (e.g. larger, smaller, or even the same as the first numerical aperture). The system arrangement can make it possible for the dimension of the second numerical aperture to be directly related to the first output diameter. For example, depending on the dimension of the second numerical aperture of the photon beam, the first output coupler can cause a corresponding dimension of the first output diameter. This results in a system in which the angle of incidence at which the focused photon beam is focused into the first focus enables a modulation of the second numerical aperture, whereby the modulation of the second numerical aperture can subsequently define the first output diameter.For example, the system can be designed such that a predetermined first output diameter is present, based on a predetermined angle of incidence of the photon beam at the first focus. The defined application of the angle of incidence can be predetermined, for example, through the design of various optical elements of the system, which guides the focus of the first element. Examples of this are described below.

[0024] In one example, the system further comprises a means for varying the numerical aperture of the photon beam focused into the first focus and / or the angle of incidence at which the focused photon beam is focused into the first focus. As described herein, the dependence of the output diameter of the photon beam on the first numerical aperture and the angle of incidence can therefore not only be static, but can also be used variably in the operation of the system. The variation can comprise that at least two numerical apertures of the photon beam focused into the first focus can be adjusted for the operation of the system. Furthermore, the variation can comprise that at least two angles of incidence at which the focused photon beam is focused into the first focus can be adjusted for the operation of the system. The variation can, for example,include the ability to specifically set a mode in the system that causes a desired output diameter. Thus, the variation can comprise setting at least two output diameters of the photon beam. For example, the angle of incidence (and / or the first numerical aperture) can be set to one of at least two predetermined values. The system can then be operated statically in one mode, for example, so that the photon beam is output with the set (constant) output diameter (for example, no further variation of the first numerical aperture and / or the angle of incidence occurs during output). In a further example, however, it is also conceivable for the variation to occur dynamically during the output of the photon beam. The output diameter (or the first numerical aperture and / or the angle of incidence) can be varied, for example, at a frequency.

[0025] For example, the system may have a user interface that allows the user to specify an output diameter. The system can then automatically adjust the numerical aperture and / or the angle of incidence to provide the specified output diameter.

[0026] In one example, the system further comprises a first coupler. The system can be configured such that the photon beam is received in collimated form at the first coupler having an input diameter. The first coupler can be configured such that, upon collimated reception, it focuses the photon beam onto the first focus (of the first element) by reflection at the first coupler. For example, the first coupler can be configured such that the collimated photon beam with the input diameter can be configured as the input (or input signal) of the first subsystem. The collimated photon beam with the first output diameter can be configured as the output (or output signal) of the first subsystem.

[0027] The first coupler can, for example, have a curved and reflective surface which receives the collimated photon beam with the input diameter, such that the collimated photon beam is reflected by the curved surface of the first coupler in such a way that the photon beam is focused on the first focus. In one example, the curved surface of the first coupler can comprise a (locally different) concave region with respect to the incident collimated photon beam. The geometry of the curved surface can, for example, be mathematically described via a parabola (e.g., via a parabolic curve / surface). In one example, the first coupler comprises a parabolic mirror. The parabolic mirror can have the concave region at least along one plane. For example, the parabolic mirror can have a concave region exclusively along one plane.In another example, the parabolic mirror may have a concave region along each of two orthogonal planes.

[0028] In one example, the first element and the first coupler are arranged relative to each other such that a focus of the first coupler and the first focus of the first element are located at substantially the same position.

[0029] In one example, the first element and the first coupler can be arranged in a fixed position relative to one another. The first element and the first coupler can thus be configured to be immobile relative to one another, thereby reducing the complexity of the adjustment in the system for adapting the photon radiation. This exemplary arrangement can thus enable the photon beam to be precisely redirected to the first focus of the first element and thus also correspondingly precisely to the second focus of the first element, whereby in this example, no adjustment is required to implement this.

[0030] It should be mentioned that in another example the first input coupler can also be finely adjusted in order to suitably adjust the focusing to the first focus or to calibrate the overlap of the second focus of the first element with the focus of the first input coupler (e.g. this can be done by shifting / tilting the first input coupler). Normal operation can be omitted because the system can be set up in such a way that the optimal position between the first element and the first input coupler does not change, even if the wavelength and / or magnification of the system is changed, for example.

[0031] In another example, the system comprises a first coupler, wherein the first coupler is configured to receive the photon beam collimated at an input diameter and to focus the photon beam to the first focus without reflection. In one example, the first coupler may comprise, for example, a focusing lens, a focusing lens system, and / or an optical focusing device.

[0032] In one example, the means for varying can be configured to direct the received collimated photon beam (within the input diameter) onto different segments of a surface of the first coupler. By directing the received collimated photon beam onto different segments, different angles of incidence of the photon beam onto the first focus can be set. A predetermined segment can be associated with a predetermined angle of incidence. The effect of adjusting the angle of incidence can be achieved during reflection at the first coupler by focusing the received collimated photon radiation into the first focus of the first element, regardless of the irradiated segment. However, the spatial separation of the irradiated segments results in spatially offset starting points of the reflected edge rays of the photon radiation on the surface of the first coupler.By focusing on the first focus, these (initially spatially offset) edge rays all converge at the first focus, resulting in different angles of incidence for differently irradiated segments. The means for varying the beam can, for example, be configured to direct the received collimated photon beam onto different segments of the surface of the first coupler by shifting it (e.g., a parallel shift). This can, for example, be implemented with a movable mirror. The means for varying the beam can comprise means for shifting the received collimated beam (e.g., a movable mirror, e.g., a flat mirror without curvature).The movable mirror (as a means of displacement) can be displaced only along one axis, so that only a parallel displacement of the received collimated photon beam is possible and necessary to irradiate the segments of the first coupler. This allows for particularly simple adjustment and construction, allowing it to be movable and / or pivotable along three axes.

[0033] In one example, the system is further configured such that the first output diameter is greater than or equal to the diameter of the input diameter. The system (as described herein) can therefore be adjusted such that the collimated photon beam undergoes adaptation with the input diameter such that the first output diameter of the photon beam is a certain factor higher than the input diameter. The system can thus be used as a beam expander. For example, this can be made possible by configuring or adjusting the system as described herein such that the second numerical aperture is larger than the first numerical aperture, which can be implemented, for example, via a suitable angle of incidence at the first focus.

[0034] In one example, the system is further configured such that at least two magnifications of the first output diameter can be set with respect to the input diameter. The system can thus be operated in at least two magnification modes, each magnification mode being associated with a specific magnification. The system can be operated in a magnification mode, for example, statically, so that the photon beam is coupled out with the set (constant) magnification (e.g. no further variation in the magnification occurs during coupling out). In a further example, however, it is also conceivable for the magnification to occur dynamically during coupling out of the photon beam. The magnification can, for example, be varied between different values ​​at a frequency.

[0035] In one example, the system is further configured such that the magnification of the first output diameter with respect to the input diameter comprises a factor of at least 1.4, preferably at least 1.7, more preferably at least 2.2, most preferably at least 3.2, or at least 4. For example, the magnification may also comprise at least the mathematical root of two, preferably at least the root of three, more preferably at least the root of five, most preferably at least the root of ten. The system may be configured such that it can vary the magnification in a range from, for example, 1 to at least 3.2, or from, for example, 1 to at least 4, or from 1 to at least 10, within the stated ranges. Alternatively or additionally, it may also be configured such that at least two magnifications can be set as discrete values, e.g.It can be provided that at least one magnification value can be discretely switched to at least one other magnification value, which can, for example, be considerably larger or smaller.

[0036] In one example, the system is further configured such that the first output diameter is smaller than the diameter of the input diameter. The system (as described herein) can therefore be adjusted such that the collimated photon beam undergoes adaptation with the input diameter such that the first output diameter of the photon beam is smaller than the input diameter by a certain factor. The system can thus be used as a beam reducer. For example, this can be made possible by configuring or adjusting the system as described herein such that the second numerical aperture is smaller than the first numerical aperture, which can be implemented, for example, via a suitable angle of incidence at the first focus.

[0037] In one example, the system is further configured such that at least two reductions of the first output diameter can be set with respect to the input diameter. The system can thus be operated in at least two reduction modes, each reduction mode being associated with a specific reduction. The system can be operated in a reduction mode, for example, statically, so that the photon beam is coupled out with the set (constant) reduction (e.g. no further variation in the reduction occurs during coupling out). In a further example, however, it is also conceivable for the reduction to occur dynamically during the coupling out of the photon beam. The reduction can, for example, be varied between different values ​​at a frequency.

[0038] In one example, the system is further configured such that the reduction of the first output diameter with respect to the input diameter comprises a factor of at least 1.4, preferably at least 1.7, more preferably at least 2.2, most preferably at least 3.2, or at least 4. For example, the reduction may also comprise at least the mathematical root of two, preferably at least the root of three, more preferably at least the root of five, most preferably at least the root of ten. The system may vary from 3.2 or from 1 to at least 4, for example, or from 1 to at least 10.

[0039] The system can be configured for continuous variation of the reduction, e.g., within the specified ranges. Alternatively or additionally, it can also be configured so that at least two reductions can be set as discrete values. e.g., it can be provided that a discrete switch can be made from at least one reduction value to at least one other reduction value, which can, for example, be considerably larger or smaller.

[0040] In another example, the first input coupler and the first element and the first output coupler are arranged in a fixed position relative to one another. In one example, this system can be controlled (solely) via the displacement means, which directs the received collimated photon beam with the input diameter onto the first input coupler (as described herein). In one example, the input diameter of the received collimated photon beam can thus be adapted to one or more first output diameters by simply parallel displacement of the displacement means. This eliminates the need to implement complex mechanics for adapting the beam diameter, which can reduce the requirements for control and regulation as well as calibration, thus reducing system complexity while ensuring the optical quality of the photon radiation.

[0041] In one example, the system further comprises a second element with a curved surface, which has a first and a second focus. The system can be configured such that the photon beam reflected at the first element is focused into the first focus of the second element, such that the photon beam, after reflection at the surface of the second element, is focused on the second focus of the second element. This example is to be understood such that the second element receives a photon beam that has already been guided or deflected via the first element (as described herein), i.e. a photon beam that was previously reflected at the first element. This example is also to be understood such that the photon beam could be exposed to further influences or one or more optical elements between the first and the second element (e.g. the first output coupler).The second element can therefore be arranged behind the first element with respect to the beam direction of the photon radiation path. The properties (or features) of the second element can be the opposite here. In one example, the structure of the first and second elements in the system is (substantially) the same. For example, the first and second elements can be constructed in the same way, whereby the same optical properties of the first and second elements can be present. The second element can represent a second deflection unit in the system, which guides or deflects the photon beam from the first focus of the second element to the second focus of the second element. In one example, the photon beam collimated by the first output coupler is focused with the first output diameter into the first focus of the second element, so that it is focused on the second focus of the second element.

[0042] In one example, the system further comprises a second output coupler that collimates the photon beam to a second output diameter after reflection from the second element. The properties (or characteristics) of the second output coupler can correspond to the properties (or characteristics) of the first output coupler described herein (or vice versa). In one example, the structure of the first and second output couplers is (substantially) the same.

[0043] In another example, the second output coupler comprises an output coupler that collimates the photon beam to the second output diameter without reflection. In this example, the second output coupler may comprise, for example, a collimating lens, a collimating lens system, and / or a collimator, which does not necessarily have to include reflective elements.

[0044] In one example, the second element and the second output coupler are arranged relative to each other such that a focus of the second output coupler and the second focus of the second element are located at substantially the same position.

[0045] In one example, the system further comprises a second input coupler, wherein the second input coupler is configured to receive the photon beam collimated by the first output coupler and to focus it onto the first focus of the second element by reflection at the second input coupler. The properties (or features) of the second input coupler can correspond to the properties (or features) of the first input coupler described herein (and vice versa). In one example, the structure of the first and second input couplers is (essentially) the same. The second input coupler, the second element and the second output coupler can be understood as parts of a second subsystem of the system. The collimated photon beam with the first output diameter can be understood as the input (or input signal) of the second subsystem, for example. The collimated photon beam with the second output diameter can be understood as the output (orOutput signal) of the second subsystem. The output of the second subsystem can function as the output of the system. In one example, the parts of the second subsystem can correspond to the same structure as the parts of the first subsystem.

[0046] The second subsystem (or one or more parts of the second subsystem) can fulfill the functions as described herein for parts of the first subsystem. The second subsystem can thus serve to further adapt the collimated photon beam with the first output diameter according to the mechanisms of the first subsystem. The second subsystem can, for example, further enlarge the first output diameter so that the second output diameter is larger than the first output diameter. The total magnification of the first and second subsystems can, for example, result from multiplying the magnifications of the first subsystem by the magnification of the second subsystem. In a further example, the second subsystem can also be configured merely as a deflection unit without a magnification function.

[0047] Dividing the magnification into two subsystems can, for example, reduce the manufacturing requirements for the first or (possibly identical) second element. For example, smaller curvatures may then be sufficient.

[0048] In one example, the second element may be configured to at least partially compensate for an asymmetric light distribution of the photon beam reflected by the first element. For example, depending on the angle of incidence at the first focus of the first element, a certain asymmetric light distribution of the partial beams of the photon beam reflected by the first element (i.e., the partial beams of the light bundle of the photon beam reflected by the first element) may occur. This may be caused by the different reflection angles of the partial beams of the photon beam at the first element, so that the distances of the partial beams vary across the photon beam after reflection at the first element. E.g.This can occur if the second numerical aperture (at the second focus of the first element) is different from the first numerical aperture. The parasitic effect during the reflection of the photon beam at the first element can be used specifically for compensation if the photon beam with the asymmetric light distribution is refocused and reflected at an element that has similar reflective properties to the first element. According to the invention, the reflection at the second element can be used for this purpose. For this purpose, it can be helpful if the system is set up in such a way that the arrangement of the marginal rays of the photon beam is swapped when focusing on the second element compared to the arrangement of the marginal rays when focusing on the first element. The marginal ray that is closer to the second focus when reflected at the first element can, for example,be further away from the second focus when reflected at the second element. This ensures that the described effect when the photon beam is reflected at the second element drives together the partial beams of the photon beam which are further apart due to the asymmetry. Furthermore, it can also be ensured that the partial beams of the photon beam which are comparatively closer together due to the asymmetry are driven apart. As a result, the light distribution of the photon beam which was reflected at the first and second element can comprise a (substantially) symmetrical light distribution of the partial beams, or the asymmetrical light distribution can be noticeably compensated for to a certain extent. Furthermore, the system can be set up such that the photon beam is directed onto regions of the first or second element.second element, which have a similar curvature, thus optimizing compensation. It should also be noted that if the arrangement of the marginal rays in the system is not reversed, as explained, the asymmetric light distribution caused by reflection from the first element may be further amplified upon reflection from the second element. Using the second element as a means for compensating for the asymmetric light distribution may therefore make it possible to provide a system for adapting the diameter of the photon radiation that does not exhibit appreciable distortion characteristics and yet can be controlled with low complexity.

[0049] In some examples, it may be provided that the elements of the second subsystem are a factor larger than the corresponding elements of the first subsystem, but otherwise have the same shape. The factor may, for example, correspond to an average magnification that can be achieved by the first subsystem. If, for example, the first subsystem can achieve a certain maximum magnification Vmax, then the elements of the second subsystem can, for example, In the first subsystem, the photon beam could then pass identically through the correspondingly enlarged mirror surfaces in the second subsystem (where it is magnified by Vmax / 2), but the shift in the symmetry of the light distribution could be compensated for in a practically identical way.

[0050] In further examples, more than two of the subsystems mentioned may be used. These may increase the size of their corresponding elements if necessary.

[0051] A second aspect relates to a device for projecting with a system according to one of the examples described herein. The device can, for example, comprise a replication system, an exposure system, a printer and / or another type of projection device. The photon beam with the first output diameter and / or the photon beam with the second output diameter can, for example, correspond to a field point or a part of an image which is to be imaged in a plane via the device. For this purpose, the device can have a corresponding light source whose collimated beam can then be adapted in diameter. Alternatively or additionally, the device can have one or more (movable) reflective elements in order to be able to scan the photon beam, for example, along one or two orthogonal directions.The device may also comprise one or more parabolic mirrors to direct the diameter-adapted scanned beam into a desired plane.

[0052] As described herein, the system can avoid aberration typically associated with passing / transmitting a photon beam through two media (e.g., a lens). For example, a corresponding aberration in the projection device comprising the system can thus also be avoided. For example, color aberrations (e.g., chromatic aberration) can be avoided, so that the projection device can function reliably for different wavelengths of photon radiation. For example, a replication system can thus be operated without (significant) color aberrations. For example, freedom from aberrations can be provided substantially over a wavelength range from 400 nm to 800 nm (and / or in another wavelength range as described herein).

[0053] A third aspect relates to a method for adapting a diameter of a

[0054] Photon beam comprising: directing an incident photon beam onto a first element having a second focus. The directing is performed such that the received photon beam is focused into the first focus of the first element, wherein the directed photon beam, after reflection from the surface of the first element, is output in a focused manner at the second focus. The method may further comprise collimating the photon beam reflected from the first element to a first output diameter. The method may be carried out using a system according to one of the examples of the first aspect described herein.

[0055] In one example of the method, the incident photon beam comprises a collimated photon beam having a first input diameter, wherein the directing further comprises: varying a numerical aperture of the photon beam focused into the first focus and / or an angle of incidence at which the focused photon beam is focused into the first focus such that the first output diameter varies.

[0056] A fourth aspect relates to a computer program comprising instructions which, when executed by a computer, a system according to the first aspect and / or a device according to the second aspect, cause the computer, the system or the device to carry out a method according to the third aspect.

[0057] The computer program may alternatively or additionally comprise instructions for executing the further method steps described herein or for executing or implementing the functionalities of devices described herein. For example, the computer program may cause certain optical elements of the system to shift (e.g., components of the means for shifting), resulting in an optical magnification or zoom factor selected in the program for the system or device. The system can thus be controlled based on a computer program and an interface to its optical elements.

[0058] A further aspect relates to the mentioned system and / or device having a memory which comprises the computer program. The system and / or device can further comprise means for executing the computer program. Alternatively, it is also possible for the computer program to be stored elsewhere (e.g. in a cloud) and for the device to merely comprise means for receiving instructions which result from the execution of the program elsewhere. In either case, this can, for example, enable the following to take place. Thus, intervention, e.g. via manual adjustment, can be minimised, so that the complexity of adapting the beam diameter can be reduced.

[0059] The features (and examples) of the method mentioned herein can also be applied or apply accordingly to the system (or device and / or computer program) mentioned. Likewise, the features (and examples) of the system or device mentioned herein can also be applied or apply accordingly to the methods or computer programs described herein.

[0060] 4. Short description of the characters

[0061] In the following detailed description, technical background information and embodiments of the invention are described with reference to the figures, which show the following:

[0062] Fig. 1 schematically illustrates in a side view an exemplary system of the invention for adapting a diameter of a photon radiation.

[0063] Fig. 2 shows schematically the beam distribution of the photon radiation as it passes through an exemplary system of the invention.

[0064] Fig. 3 schematically illustrates in a side view another exemplary system of the invention.

[0065] 5. Detailed description of the figures and possible embodiments

[0066] Fig. 1 schematically illustrates a side view of an exemplary system 100 for adapting a diameter of a photon radiation. The system 100 can be designed to adapt photon radiation with any wavelength. For example, the photon radiation can cover the light range visible to humans. For example, the photon radiation can be in a wavelength range from 400 nm to 800 nm (which includes the RGB color space). However, it is also conceivable that the concepts and features of the system 100 and the invention mentioned herein can also be applied to photon radiation in the (E and / or D) UV range and / or the (near) infrared range. Only a reflectivity of the respective reflective surfaces of the system is required; the photon beam can be provided, for example, as a laser beam. The use of the word beam does not imply that it can be a continuous wave beam.Both a continuous wave photon beam and, for example, a pulsed photon beam can be used.

[0067] The system 100 in Fig. 1 can comprise a first element 1 for adapting the photon radiation. The first element i can have a first focus Fi and a second focus F2. In one example, the first focus Fi and the second focus F2 can be designed such that photon radiation which emerges from one focus and is reflected by the first element 1 then enters the other focus. The photon radiation from one focus can thus be imaged onto the other focus. In one example, the first element i comprises an elliptical mirror, wherein the first focus Fi and the second focus F2 correspond to the two foci of the elliptical mirror. The elliptical mirror can comprise a section of a geometric ellipse, i.e. the ellipse of the elliptical mirror does not have to be completely geometric. This is shown, for example, in Fig.1, wherein the first element 1 represents an elliptical mirror, which is constructed from a partial section of the ellipse shown in dashed lines.

[0068] The system 100 can further comprise a first coupler 11. The first coupler 11 can serve to receive a photon beam and focus it onto the first focus Fi of the first element 1. The photon beam received at the first coupler 11 can also be understood as an input of the system 100. In one example, the first coupler 11 can be configured to receive a collimated photon beam that is collimated to a defined diameter, wherein this diameter can also be referred to as the input diameter. For the description of the system 100, reference is first made, by way of example, to the beam path of the first photon beam S', which is incident on the first coupler 11 with the input diameter. The first photon beam S' can comprise a radiation bundle that includes several partial beams, wherein the edge rays and the directional beam are shown in Fig. 1.The first photon beam S' initially impinges on the first input coupler E1 as a collimated input beam with an input diameter. The first input coupler E1 can, for example, comprise a parabolic mirror (as shown in Fig. i). The parabolic mirror can comprise a section of a geometric parabola, i.e. the parabola of the parabolic mirror does not have to be completely geometric. This can be seen, for example, in Fig. i, where the first input coupler E1 represents a parabolic mirror. For the received photon radiation S', the first input coupler E1 (e.g. the parabolic mirror) can have a focus that is aligned with the first focus Fi of the first element. The position of the focus of the first input coupler E1 can essentially correspond to the position of the first focus Fi of the first element, so that these foci spatially overlap completely (or at least partially).In the case of a parabolic mirror as the first coupler Ei, it should be mentioned that axis-parallel rays, i.e. rays which are incident parallel to the ordinate (or the axis of symmetry or a directrix) of the geometrically / mathematically definable parabola, fall into the focus of the parabolic mirror after reflection at the parabolic mirror. The system 100 can therefore be set up in such a way that the first coupler Ei, when designed as a parabolic mirror, receives the collimated first photon radiation S' with the input diameter in this way parallel to the axis, so that the received photon radiation is (mainly) redirected into the focus of the parabolic mirror. The axis-parallel coupled first photon radiation S' can comprise a planar wavefront. Since the focus of the first coupler Ei (orSince the focus of the parabolic mirror (the focus of its parabolic mirror) is at the same position as the first focus Fi of the first element, the first photon radiation S' with the input diameter is automatically focused onto the first focus Fi of the first element i. This photon radiation can then be reflected off the first element i in order to be focused onto the second focus F2 of the first element i. This defined "refocusing" can therefore be used to redirect photon radiation in the system 100 or a system of the invention.

[0069] The system 100 can further comprise a first output coupler Ai. The first output coupler Ai can, for example, comprise a parabolic mirror (as shown in Fig. i). The parabolic mirror can comprise a section of a geometric parabola, i.e., the parabola of the parabolic mirror does not have to be completely geometric. This can be seen, for example, in Fig. 1, wherein the first output coupler Ai represents a parabolic mirror constructed from a partial section of the parabola shown in dashed lines. The first output coupler Ai can be configured to receive the radiation focused by the first element i at the second focus F2 and to collimate it to a first output diameter. For this purpose, the first output coupler Ai (e.g., constructed as a parabolic mirror) can have a focus that is aligned with the second focus F2 of the first element.The position of the focus of the first outcoupler Ai can essentially correspond to the position of the second focus F2 of the first element, so that these foci spatially overlap completely (or at least partially). In the case of a parabolic mirror as the first outcoupler Ai, it should be mentioned that the incident light from the parabolic mirror is decoupled from the parabolic mirror in an axis-parallel manner after reflection from the parabolic mirror. This axis-parallel outcoupling can thus be ensured by the aforementioned overlap of the second focus F2 and the focus of the first outcoupler Ai. This makes it possible, as can be seen in Fig. 1, to "convert" the first photon beam S' back into a collimated beam and to couple it out as a collimated output beam with a first output diameter. The axis-parallel outcoupled first photon radiation can comprise a planar wavefront.

[0070] In the example in Fig. i, the first output diameter of the first photon beam S' is equal to the input diameter of the photon beam S'. This is achieved by the photon beam S' striking an area around the minor axis of the ellipse of the first element 1 essentially symmetrically.

[0071] It should also be mentioned that, in one example, the parabolic mirror of the first input coupler Ei and the parabolic mirror of the first output coupler Ai can be described by the same parabola, whereby only different sections (e.g., different parabolic branches) of the parabola are used for the first input coupler Ei and the first output coupler Ai. The first input coupler Ei and the first output coupler Ai can be arranged symmetrically with respect to the first element 1. For example, the first input coupler El and the first output coupler can be arranged symmetrically with respect to a minor axis or major axis of the ellipse defined by the elliptical mirror of the first element i.

[0072] As described, the system 100 can therefore enable the photon radiation to be redirected in a targeted manner by converting a beam from a collimated to a focused state, subsequently focusing it at a different location, and then returning it to a defined collimated state without the need for complex adjustment. The implementation of this deflection unit via reflective elements (e.g., with the elliptical mirror as the first element i, the parabolic mirror as the first input coupler Ei, and / or the parabolic mirror as the first output coupler Ai) can further enable light transmission of the photon radiation to be avoided during its deflection in the system 100 through two media, so that a corresponding aberration is also avoided (e.g., monochromatic and / or chromatic aberrations associated with lenses can be avoided). Photon radiation in the system 100 is explained. The system 100 can, for example,be set up or used in such a way that the first output diameter of the photon beam coupled out at the first output coupler is larger than the input diameter of the photon beam coupled in at the first input coupler E1. For this magnification effect, reference is now made to the beam path of the second photon beam S" shown in Fig. i, in which the magnification effect occurs in contrast to the first photon beam S'. The second photon beam S" can comprise a radiation bundle which includes several partial beams, wherein the first marginal beam S1, the second marginal beam S2 and the directional beam S3 are marked in Fig. i. The second photon beam S", which is axially parallel to the parabolic mirror of the first input coupler, radiates onto a segment of the surface of the parabolic mirror of the first input coupler E1, so that the second photon beam S" is focused at a specific angle of incidence α onto the first focus Fi of the first element.The irradiated segment of the first coupler Ei is different for the second photon beam S" from the irradiated segment for the first photon beam S'. For the second photon beam S", this results in a specific angle of incidence α which is different from the angle of incidence of the first photon beam S', at which no magnification effect occurs. In this example, the angle of incidence can be defined as the angle between the directional ray of a photon beam and the line connecting the first and second focus of the first element (i.e. the major axis of the ellipse, although other definitions are also possible). The angle of incidence α results in a beam path which is further defined by the reflection of the second photon beam S" at the first element 1 and the focusing onto the second focus F2.Due to the magnitude of the angle of incidence and the boundary conditions during reflection at the first element 1, the numerical aperture NA2" of the second photon beam S" at the second focus F2 is larger than the numerical aperture NA1" of the second photon beam S" at the first focus F1. This larger second numerical aperture NA2" then falls onto the surface of the first output coupler. The first output coupler Ai then collimates the second photon beam S" to the first output diameter. By increasing the numerical aperture NA2" at the second focus, the overall result in this example is that the collimated output beam of the second photon beam S" has a larger diameter than its collimated input beam.

[0073] In comparison, it should be noted that with the first photon beam S', no magnification effect occurs in the system 100, since there is no change in the numerical aperture upon reflection at the first element 1. The first (axis-parallel) photon beam S' does have a different segment of the parabolic mirror of the first coupler Ei, resulting in a different angle of incidence at the first focus Fi, which precisely does not cause any change in the numerical aperture at the second focus. For the first photon beam S', the numerical aperture NA1' at the first focus Fi is therefore equal to the numerical aperture NA2' at the second focus F2. It should be noted that for the first photon beam S', the angle of incidence is selected such that the directional beam S3 of the second photon beam S" falls on a vertex of the minor axis of the ellipse formed by the elliptical mirror of the first element 1.The resulting beam path of the first photon beam S' is thus symmetrical with respect to the two foci Fi and F2 (or the minor axis), so that there is no change in the numerical aperture at the foci Fi and F2. Furthermore, it should be noted that in the example of Fig. 1, the first input coupler Ei and the first output coupler Ai are arranged symmetrically with respect to the minor axis of the ellipse, so that with the same numerical aperture NA1' and NA2' of the first photon beam S', its input diameter is directly transferred to the first output diameter. In other words, the magnification effect is caused by the "oblique" incidence of the second photon beam into the first element 1, so that the beam path is no longer symmetrical along the minor axis of the ellipse.The resulting change in the numerical aperture at the focuses Fi and F2 can thus be used to increase the output diameter of the photon beam with respect to the input diameter.

[0074] By “parallel shifting” the incoming photon beam (e.g. by means of a mirror moving along an axis), the magnification of the system can be varied.

[0075] It should be noted that a zoom system is typically defined by a magnification of i / m to m. The zoom factor can be defined as: T = m m ax / m m in = m 2 , where m ma x and m mtypically represent the longest and shortest focal lengths of a zoom lens. The magnification of the system 100 can, in one example, reach values ​​that exceed the root of 10, e.g., greater than 4 (as already described herein). Using the typical definition of a zoom lens, this corresponds to a magnification m of greater than root of 10 (i.e., m at least 3.16), where the zoom factor m 2 then at least m 2 = 10. In other examples, the zoom factor of the system 100 is at least 2, 3, 5, or at least 20.

[0076] As indicated in Fig. 1, the magnification of the second photon beam S" leads to an asymmetrical light distribution of the partial beams Si, S2, S3. This indicates that they have a greater magnification than the partial beams Si and S2. In system 100, the second photon beam S' is therefore magnified, but this introduces an asymmetrical light distribution of the partial beams, which can, for example, represent a distortion. It should be mentioned that different reflection angles are present at the first element 1 for the partial beams Si, S2, S3. For example, the marginal ray S2, after reflection at the first element 1, has the shortest distance of the partial beams to the second focus F2 and is therefore focused "most strongly" on the second focus F2. The marginal ray Si, after reflection at the first element 1, has the longest distance of the partial beams to the second focus and is therefore focused "most weakly" on the second focus F2.

[0077] The effect of the asymmetric light distribution upon magnification is shown in more detail in Fig. 2. Fig. 2 schematically shows the beam distribution of the photon radiation as it travels through the exemplary system 100 of the invention. The beam distribution or arrangement of the partial beams of the second photon beam S" is schematically illustrated based on simulation results. Shown here is, on the one hand, the input beam distribution 201 of the collimated input beam of the second photon beam S" before coupling into the system 100. The input beam distribution 201 is shown in the x and y directions, while next to it the path of the partial beams in the system 100 is shown in the z and y directions. The input beam distribution 201 can, for example, correspond to the beam distribution of a homogeneous light source which is used as the source for the second photon beam S".In this example, the input diameter of the collimated input beam is 3.2 mm, with the beam cross-section being circular. Any other shape of the beam cross-section is also conceivable (e.g., rectangular, square, elliptical, etc.), as is any other (largest) input diameter (e.g., at least 0.5 mm, at least 1 mm, at least 2 mm, at least 5 mm, and / or less than 10 mm, less than 5 mm, less than 2 mm, etc.). The output beam distribution 202 of the collimated output beam of the second photon beam S" after passing through the system 100 with the first element 1, input coupler Ei, and output coupler Ai (which can be configured as described with reference to Fig. 1) is shown in the x- and y-directions. It can be seen that the first output diameter is approximately 30 mm, with the beam cross-section being circular, analogous to the input beam.This therefore indicates that the magnification in the system 100 has taken place, for example, in both the x- and y-direction. In the example in Fig. 2, the coupling (as described herein) has taken place in such a way that a magnification factor of approximately ten occurs. In an alternative example, the magnification can also take place only along one axis, e.g., the y-axis. For this purpose, the mirrors of the first input coupler E1, the first element 1 and / or the first output coupler Ai can be manufactured curved in only one dimension, so that the light can only be magnified in one dimension, e.g., the y-axis. For example, the output beam in the x-direction would be just as wide as the input beam in the x-direction, whereby the diameter of the output beam in the y-direction would be, for example, approximately ten times as large as the diameter of the input beam in the y-direction (with a magnification factor of the system 100 of approximately ten).In this regard, reference is also made in advance to beam distribution 302 in Fig. 3, which represents a corresponding beam distribution in which the magnification has occurred only along one axis. It can be seen that the enveloping shape of beam distribution 302 essentially represents an ellipse. Even in a system such as that in Fig. 2, by limiting the magnification along one axis (e.g., the y-axis), an output beam distribution can be generated whose envelope essentially represents an ellipse.

[0078] It should be noted that, according to the disclosure, a (substantially) symmetric beam magnification can be generated (e.g., with equal magnification along the x- and y-axes). Likewise, according to the disclosure, a (substantially) asymmetric beam magnification can be generated (e.g., with magnification only along the y-axis).

[0079] For certain applications, it may be necessary to generate a symmetric beam magnification. For example, it may be technically required that the output beam be magnified symmetrically (as described herein). For example, if the input beam has a (substantially) circular envelope of the intensity distribution, it may be required that the output beam also has a (substantially) circular envelope.

[0080] For certain applications, however, it may also be necessary to generate an asymmetric beam magnification. In this case, it may be technically required, for example, that the output beam is magnified asymmetrically (as described herein). For example, if the input beam has a (substantially) circular envelope of the intensity distribution, it may be required, for example, that the output beam has a (substantially) elliptical envelope. For example, this can ensure a higher light intensity of the output radiation, since the radiation is (comparatively) distributed over a smaller area. Asymmetric magnification can be advantageous when using the system in a projection device, whereby, for example, the elliptical output radiation can be further manipulated via the projection device. For example, the elliptical output radiation can be rasterized along a line from the projection direction.

[0081] From Fig. 2, the asymmetric light distribution of the partial beams can also be seen (for symmetrical magnification along the x- and y-axes), as can be seen from the larger distances between the partial beams at higher y-values ​​and the smaller distances between the partial beams at lower y-values. Furthermore, the beam distribution in the y-z plane for ten partial beams is shown, in which the asymmetry of the distances between the partial beams is also schematically visible. Along the x-axis, no significant asymmetry is discernible (due to the optical design). This can be ensured, for example, by ensuring that the beam path is symmetrical to the yz plane.

[0082] Fig. 3 schematically illustrates, in a side view, another exemplary system 300 of the invention that can compensate for or minimize the asymmetry described with reference to Fig. 2. The system 100 described herein can be included as a subsystem in the system 300. Fig. 3 initially shows a photon beam input Si, which is redirected via a first deflection mirror Mi to a first translation mirror M2. The first translation mirror M2 can be translated along the y-axis shown. The first translation mirror M2 can serve to guide the photon beam input SI in a defined manner into a first subsystem Gl, which can correspond to the system 100 in terms of structure and function.In this example, the first movable mirror M2 can introduce the photon beam input Si into the first subsystem Gl in such a way that the first photon radiation S' as well as the second photon radiation S" can be generated, depending on the position of the first movable mirror M2. The movable mirror can therefore be understood as a means for variation, whereby more than two positions of the first movable mirror M2 are conceivable, whereby different photon radiations with different angles of incidence and thus magnifications for the first subsystem Gl can be set. In this regard, Fig. 3 shows the first input coupler Ei, the first element 1 and the first output coupler Ai of the first subsystem Gl (analogous to system 100). The photon beam S' (with asymmetric light distribution) with the first output diameter can therefore be output from the first subsystem Gl.

[0083] In the example from Fig. 3, this decoupled photon radiation is then redirected via a second deflection mirror M3 to a second shifting mirror M4. The second shifting mirror M4 can be used to guide the photon radiation decoupled from the first subsystem G1 in a defined manner into a second subsystem G2 of the system 300. The second subsystem G2 can correspond in structure and function to the system 100. In this regard, Fig. 3 shows a second input coupler E2, a second element 2, and a second output coupler A2 of the second subsystem G2 (analogous to the system 100 or the subsystem G1).In particular, the second translation mirror M4 can also adapt the radiation coupled out by the first subsystem G1 such that it falls on different segments of the surface of the second input coupler E2, so that different angles of incidence and the associated magnifications can be introduced onto the photon radiation in the system 300 (as described herein). In one example, the second translation mirror M4 and the first translation mirror M2 can be coupled to one another. The coupling can be designed such that the first and second translation mirrors M2, M4 cause the same magnification for each subsystem G1, G2. In the example shown in Fig. 3, the coupling can be such that the second translation mirror M4 always moves in the same direction as the first translation mirror M2, e.g.so that the photon beam is directed onto a segment of the second coupler E2 that corresponds to the segment of the first coupler E1 onto which the photon beam was directed. However, the second shifting mirror M4 can cover a distance many times greater than that of the first shifting mirror M2 (as indicated in Fig. 3, the shifting mirror M4 is shifted further for the photon beam S" than the shifting mirror M2, with respect to the mirror position in order to redirect the photon beam S'). For example, when the first shifting mirror M2 is shifted, the second shifting mirror M4 can cover a distance that is a certain multiplicative factor greater than the distance covered by the first shifting mirror M2.The zoom factor of the System 300 can therefore be adjusted via a single degree of freedom and yet can be varied over a wide range (at almost any wavelength) essentially without aberration.

[0084] The total magnification of system 300 can thus result from multiplying the magnification applied to the first subsystem G1 by the magnification applied to the second subsystem G2. The second subsystem G2 can thus comprise at least 5, at least 10, or at least 20, although higher total magnifications would also be conceivable. Furthermore, it is also conceivable for system 300 to comprise a zoom factor of at least 2, preferably at least 10, more preferably at least 50, and most preferably at least 100.

[0085] In addition, the second subsystem G2 can also (simultaneously) compensate for the asymmetry of the light distribution, which can occur when the photon beam is enlarged in the first subsystem G1 (as described herein). It should be noted that for this purpose, the components in system 300 should be configured for a beam path in which the arrangement of the marginal rays Si, S2 in the second subsystem G2 is interchanged with respect to the arrangement of the marginal rays Si, S2 in the first subsystem G1. The arrangement of the marginal rays can be considered interchanged with respect to the coupling of the marginal rays into the respective subsystem. This is schematically illustrated in Fig. 3, where the marginal rays Si and S2 are marked.In the first subsystem Gl, the marginal ray Si is located in the section between the focus of the first coupler Ei and its reflection point on the first element 1 on the side of the photon beam S", which faces the first element 1. In the second subsystem G2, on the other hand, the marginal ray S2 is located in the section between the focus of the second coupler E2 and its reflection point on the second element 2 on the side of the photon beam S", which faces the second element 2. This interchanging of the marginal rays Si, S2 upon incidence into the second subsystem G2 can be explained, for example, by the fact that the photon radiation enters the second subsystem G2 in a mirrored manner due to the beam path of the system 300, compared to the incidence of the photon radiation into the first subsystem Gl.This type of configuration can allow the effect of the asymmetric light distribution of the first subsystem G1 to be (at least partially) compensated for by the second subsystem G2. This can be explained by the fact that the effect causing the asymmetry in the distribution of the partial beams acts in the opposite direction in the second subsystem G2 due to the reflection of the photon radiation, so that the asymmetry in the distribution of the partial beams is minimized after passing through the second subsystem G2. If the aforementioned compensation is not performed, the parasitic effect described here will further amplify the asymmetry of the light distribution.

[0086] The system 300 further comprises, after the second subsystem G2, a third

[0087] A shifting mirror M5, which is shiftable along the z-direction, adjusts the third photon beam on a plane. The photon beam output by system 300 can also be referred to as the photon beam output SO. For example, the third shifting mirror M5 can assume a position depending on the magnification provided by system 300, so that the photon beam output SO emitted by system 300 appears centered on a point, regardless of the magnification.

[0088] The possible photon beam output SO of the system 300 is given as an example with the beam distribution 301 and the beam distribution 302.

[0089] Beam distribution 301 specifies the beam distribution when the photon beam input SI is magnified and compensated via system 300 in the x- and y-directions. Thus, beam distribution 301 exhibits a symmetrical beam magnification (as described herein). Symmetrical beam magnification can, for example, be present in both subsystems, resulting in a symmetrical beam magnification at the photon beam output SO.

[0090] Beam distribution 302 indicates the beam distribution when the photon beam input SI is magnified and compensated across the system only in the y-direction. Thus, beam distribution 302 exhibits an asymmetric beam magnification (as described herein). It can be seen that the envelope of beam distribution 302 has an elliptical shape (in contrast to the circular distribution of the radiation from the photon beam input SI, which is indicated in a darker color). The asymmetric beam magnification can, for example, be present in both subsystems, so that the photon beam output SO exhibits an asymmetric beam magnification.

Claims

Claims: System (too, 300) for adapting the diameter of a photon beam (S', S"), comprising: a first element (1) with a curved surface, which has a first and a second focus (Fi, F2); wherein the system is configured such that the photon beam is focused into the first focus (Fi) so that, after reflection at the surface of the first element (1), the photon beam is focused onto the second focus (F2). System according to claim 1, wherein the system further comprises a first output coupler (Ai) which collimates the photon beam to a first output diameter after reflection at the first output coupler. System according to claim 2, wherein the first element and the first output coupler are arranged relative to each other such that a focus of the first output coupler (Ai) and the second focus (F2) of the first element (1) are located at substantially the same position.System according to claim 2 or 3, wherein the first element (1) and the first coupler (Ai) are arranged in a positionally fixed relative to each other. System according to any one of claims 2-4, wherein the system is further configured such that the first output diameter depends on a numerical aperture (NA1', NA1") of the photon beam (S', S") focused into the first focus (Fi). System according to any one of claims 2-5, wherein the system is further configured such that the first output diameter depends on an angle of incidence (o) at which the focused photon beam (S") is focused into the first focus (Fi). - System according to claim 5 or 6, wherein the system further comprises a means for varying the numerical aperture of the photon beam focused into the first focus and / or the angle of incidence at which the focused photon beam is focused into the first focus. - System according to any one of claims 1-7, further comprising a first coupler (El), wherein the first coupler is configured to focus the photon beam, upon collimated reception with an input diameter, onto the first focus (Fi) by reflection at the first coupler. - System according to claim 8, wherein the system is configured such that the received collimated photon beam can be directed onto different segments of a surface of the first coupler. - System according to claim 8 or 9, referring backward to any one of claims 2-7, wherein the system is further configured such that the first output diameter is larger than the input diameter.

1. System according to claim 10, wherein the system is further configured such that at least two enlargements of the first output diameter relative to the input diameter can be set.

2. System according to claim 10 or 11, wherein the system is further configured such that an enlargement of the first output diameter relative to the input diameter comprises a factor of at least 1.4, preferably at least 1.7, more preferably at least 2.2, most preferably at least 3.

2.

3. System according to any one of claims 8-12, wherein the first element (1) and the first coupler (El) are arranged in a positionally fixed manner relative to each other. - System according to any one of claims 1-13, wherein the first element (1) comprises an elliptical mirror. System (300) according to any one of claims 1-14, wherein the system further comprises a second element (2) having a curved surface, which has a first and a second focus; wherein the system is configured such that the photon beam reflected at the first element (1) is focused into the first focus of the second element (2), so that the photon beam, after reflection at the surface of the second element, is focused onto the second focus of the second element. System according to claim 15, wherein the system further comprises a second output coupler (A2) which collimates the photon beam, after reflection at the second element, onto a second output diameter.System according to claim 16, wherein the second element (2) and the second outcoupler (A2) are arranged relative to each other such that a focus of the second outcoupler and the second focus of the second element are located at substantially the same position. System according to any one of claims 15-17, wherein the system further comprises a second incoupler (E2), the second incoupler being configured to receive the photon beam collimated by the first outcoupler (Ai) and to focus it by reflection at the second incoupler (E2) onto the first focus of the second element (2). System according to any one of claims 15-18, wherein the second element (2) is configured to at least partially compensate for an asymmetrical light distribution of the photon beam reflected by the first element (1). Device (400) for projecting with a system (100, 300) according to any one of claims 1-19. Methods for adapting the diameter of a photon beam comprising: Directing an incident photon beam onto a first element (i) comprising a curved surface, wherein the first element has a first and a second focus (Fi, F2); wherein the directing is performed such that the received photon beam is focused into the first focus (Fi) of the first element, and the directed photon beam is emitted focused at the second focus (F2) after reflection at the surface of the first element. The method of claim 21, further comprising: Collimating the photon beam reflected from the first element (1) onto a first output diameter; wherein the incident photon beam comprises a collimated photon beam with a first input diameter, and wherein the collimating further comprises: Varying a numerical aperture (NA1', NA1") of the photon beam focused into the first focus (Fi) and / or an angle of incidence (a) at which the focused photon beam is focused into the first focus, such that the first output diameter varies. A computer program comprising instructions which, when executed by a computer, a system (100, 300) according to any one of claims 1-19 and / or a device (400) according to claim 20, cause the computer, the system and / or the device to execute a method according to any one of claims 21 or 22.

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