POLARIMETRIC CAMERA

Abstract

The invention relates to a polarimetric camera (100) comprising an optical system (200) and an image sensor (300). The optical system (i) forms, on the image sensor, N images of a scene to be imaged, with N greater than or equal to 2, N being a number of polarization states, (ii) comprises a polarization splitter (220) deflecting the light beams from the scene according to the N polarization states, and (iii) has N output pupils (231). The image sensor comprises a plurality of pixels (P) distributed into N subsets of pixels. Each subset is associated with an output pupil and receives the incident light beams according to the polarization state of the associated output pupil. The image sensor comprises N angular filters (320), each angular filter transmitting the light beams from the associated output pupil to a subset of pixels and filtering out the other light beams. Figure for the abbreviation: Figure 1

Description

Title of the invention: POLARIMETRIC CAMERA Technical field

[0001] The present description relates generally to imaging systems, and more particularly to so-called polarimetric cameras, adapted to record, for a given scene, information relating to the polarization of the captured light. STATE OF THE PRIOR ART

[0002] Measuring light polarization information during image acquisition can be of interest for many applications. In particular, it allows the implementation of image enhancement processing, adapted according to the application considered. For example, it makes it possible to attenuate or, on the contrary, to exacerbate reflections on an image of any surface causing a specular reflection, such as a window, water or the surface of an eye. It also makes it possible to detect manufactured objects in a natural environment, the latter generally having a polarization signature.Among the applications that can benefit from the measurement of polarization information, we can also cite industrial control applications, biomedical applications, for example applications for detecting cancer cells (the latter polarizing light due to their fibrous nature), contrast enhancement applications for capturing images in a scattering environment (fog, underwater imaging, etc.), or even distance mapping or depth image acquisition applications, in which polarization can provide information on the orientation of the surface of manufactured objects, and thus help 3D reconstruction in addition to another modality such as active illumination by structured light or by time-of-flight measurement.

[0003] To extract the relevant information from a given scene, using a polarimetric camera, a combination of different polarization states is necessary. For this, the polarimetric camera (which conventionally comprises an optical system and an image sensor) must be able to acquire these different polarization states simultaneously and with the same point of view so that the images can be strictly superimposable. The polarizations are therefore separated at the level of the polarimetric camera itself. Two configurations are possible.

[0004] In a first configuration, the separation of the polarizations occurs at the level of the image sensor of the polarimetric camera. The image sensor, having a matrix of detection pixels, is then configured so that each of its pixels is sensitive to only one polarization state, for example by means of polarizing filters. The pixels sensitive to different polarization states are interlaced according to an elementary pattern. For this configuration, the optical system used is a standard optical system and a single image is formed by it on the image sensor.

[0005] One of the limitations of this first configuration is linked to the interlacing of these pixels. This involves the production of polarizing filters at the pixel scale, therefore of very reduced dimension, which leads to a reduction in its performance. Another limitation lies in the fact that, since the pixels sensitive to different polarization states are adjacent in the pixel matrix, polarization crosstalk may appear on the images.

[0006] In a second configuration, the separation of the polarizations occurs this time at the level of the optical system of the polarimetric camera. In this configuration, the optical system is configured to form, on the image sensor, one image per polarization state, each image being spatially offset relative to the others. The optical system comprises for this purpose, for example, a polarization separator (also called a polarization router). For this configuration, the image sensor used is a standard image sensor.

[0007] The articles “Imaging polarimetry through metasurface polarization gratings” by Rubin et al., Optics Express, March 2022, vol. 30, no. 6, pp. 9389-9412, and “Matrix Fourier optics enables a compact full-Stokes polarization camera” by Rubin et al., Science 365, 2019, eaaxl839 DOI: 10.1126 / science.aaxl839, describe the production of metasurface-type polarization separators to be placed in the optical system, these metasurfaces making it possible to form, on the image sensor, four images corresponding to four different polarization states.

[0008] One of the limitations of this second configuration is related to the overlapping of the images. An image corresponding to one polarization state will overlap, at least in part, the image corresponding to another polarization state. It is possible to use a vignetting screen to limit this overlap, however this solution leads to a reduction in the brightness at the edges of the image.

[0009] Another limitation, linked to the use of metasurfaces, is the presence, around the optical axis of the optical system, of an unpolarized image corresponding to the zero order of diffraction of these metasurfaces. Although these metasurfaces are configured to limit the intensity of this image to the zero order, it is however not possible to completely eliminate it. Statement of the invention

[0010] The present invention aims to remedy at least in part the drawbacks of the solutions proposed by the prior art, in particular those set out above.

[0011] For this purpose, the object of the invention is a polarimetric camera comprising a optical system and an image sensor: • the optical system, having a main optical axis, being adapted to form on the image sensor at least N spatially distinct images of a scene to be imaged, at the rate of one image per polarization state, with N greater than or equal to 2, N being a predefined number of polarization states, and comprising: • a polarization separator, adapted to deflect the incident light beams coming from the scene to be imaged according to the N polarization states, the optical system then having at least N exit pupils at least partly offset two by two orthogonally to the main optical axis; • the image sensor, comprising a plurality of detection pixels each comprising a photodetector, • the detection pixels being distributed into at least N subsets of pixels, each associated with an exit pupil, and each intended to receive the incident light beams according to the polarization state of the associated exit pupil.

[0012] According to the invention, the image sensor comprises at least N angular filters located between the optical system and the photodetectors, each angular filter being adapted to transmit to a subset of pixels the incident light beams coming from the associated exit pupil, and to filter at least in part the incident light beams coming from the other exit pupil(s).

[0013] Such a polarimetric camera advantageously makes it possible to improve the quality of the N images associated with the N polarization states, in particular thanks to the filtering, by the angular filters, of at least a portion of the parasitic light beams which are not associated with the desired polarization state.

[0014] In addition, such a polarimetric camera advantageously allows, thanks to the association of the angular filters with the polarization separator, the use of a standard image sensor.

[0015] According to particular embodiments, the polarimetric camera may comprise the following characteristics, implemented separately or in each of their technically operational combinations.

[0016] According to particular embodiments, the N angular filters are arranged in a coplanar manner.

[0017] According to particular embodiments, the N angular filters are formed in the same grid having openings sized to transmit to a subset of pixels the incident light beams coming from the associated exit pupil, and to filter at least in part the incident light beams coming from the other exit pupils.

[0018] According to particular embodiments, the image sensor comprises a plurality of microlenses, adapted to focus the incident light beams on the photodetectors of the detection pixels, located between the optical system and the angular filters.

[0019] According to particular embodiments, the polarization separator is a two-dimensional meta-surface.

[0020] According to particular embodiments, the image sensor comprises N polarizing filters located between the optical system and the angular filters, adapted to transmit to a subset of pixels the incident light beams coming from the associated exit pupil and having the associated polarization state, and to filter at least in part the incident light beams coming from the other exit pupils and therefore having other polarization states.

[0021] According to particular embodiments, the N polarizing filters are arranged in a coplanar manner.

[0022] According to particular embodiments, the N polarizing filters (340) are produced in the same metal structure. Brief description of the drawings

[0023] Other aspects, aims, advantages and characteristics of the invention will appear better on reading the following detailed description of preferred embodiments thereof, given by way of non-limiting example, and made with reference to the appended drawings in which:

[0024] [Fig-1] is a schematic and partial view, in perspective and exploded, of an example of polarimetric camera according to one embodiment;

[0025] [Fig.2A] is an example of an optical diagram of a polarimetric camera which does not include an angular filter at the detection pixels;

[0026] [Fig.2B] is an optical diagram of a polarimetric camera according to one embodiment;

[0027] [Fig.3A] illustrates an example of angular response of a detection pixel which is not associated with an angular filter, and that of a detection pixel associated with an angular filter according to one embodiment;

[0028] [Fig.3B] is a schematic and partial view, in section, of a detection pixel of an image sensor of the polarimetric camera according to one embodiment.

[0029] DETAILED DESCRIPTION OF PARTICULAR EMBODIMENTS

[0030] In the figures and in the remainder of the description, the same references represent identical or similar elements. In addition, the different elements are not shown to scale so as to enhance the clarity of the figures. Furthermore, the different embodiments and variants are not mutually exclusive and may be combined with each other. Unless otherwise indicated, the terms "substantially", "approximately", "in the order of" mean to within 10%, and preferably to within 5%. Furthermore, the terms "between ... and ..." and equivalents mean that the limits are included, unless otherwise indicated.

[0031] For the sake of clarity, only the steps and elements useful for understanding the embodiments described have been shown and are detailed. In particular, the photodetectors and the electronic circuits for controlling the image sensors of the polarimetric cameras described have not been detailed, the embodiments described being compatible with the usual embodiments of these elements.

[0032] Furthermore, when reference is made to absolute position qualifiers, such as the terms "top", "bottom", "left", "right", etc., or relative position qualifiers, such as the terms "above", "below", "upper", "lower", etc., or to orientation qualifiers, such as the terms "horizontal", "vertical", etc., reference is made, unless otherwise specified, to the orientation of the figures.

[0033] [Fig.l] illustrates a schematic and partial perspective view of a polarimetric camera 100 according to an exemplary embodiment of the invention. The polarimetric camera 100 comprises at least: - an optical system 200, adapted to form on an image sensor 300 at least N spatially distinct images of a scene to be imaged, at the rate of one image per polarization state, with N greater than or equal to 2, N being a predefined number of polarization states, and having at least N exit pupils 231, one per polarization state, at least partly offset two by two orthogonally to a main optical axis A; - an image sensor 300, comprising a plurality of detection pixels P, which are distributed into at least N subsets of pixels, each associated with an exit pupil 231, and each intended to receive the incident light beams according to the polarization state of the associated exit pupil.

[0034] The optical system 200 comprises a polarization splitter 220, adapted to separate the incident light beams coming from the scene to be imaged according to the N predefined polarization states. N is at least equal to 2 (at least 2 separate polarization states), but may be equal to 3, 4 or even more. The optical system 200 preferably comprises a collimating optic 210 located upstream of the polarization splitter 220, and an imaging optic 230 located downstream of the polarization splitter 220.

[0035] By spatially distinct image, it is meant that the N images formed in the image plane of the optical system 200 are not entirely superimposed two by two in the image plane, but that they are at least partly offset two by two in the plane image, and preferably completely offset (without overlap) in the image plane. Also, the exit pupils 231 are at least partly offset two by two orthogonally to the main optical axis A, and preferably completely offset (without overlap) orthogonally to the main optical axis A.

[0036] According to the invention, the image sensor 300 comprises at least N angular filters 320 located between the optical system 200 and the photodetectors 303 of the image sensor 300, each angular filter 320 being adapted to transmit to a subset of pixels the incident light beams coming from the associated exit pupil 231, and to filter at least in part the incident light beams coming from the other exit pupil(s) 231.

[0037] Preferably, the optical system 200 comprises a collimation optic 210. Said collimation optic is arranged, along the main optical axis A, upstream of the polarization splitter 220, in the direction of propagation of the incident light beams, preferably perpendicular to the main optical axis A.

[0038] The collimation optics 210, for example a lens, is adapted to collect the incident light beams coming from the scene to be imaged and to collimate them towards the polarization separator 220. Thus, the incident light beams arriving at the polarization separator 220 are parallel in themselves.

[0039] The use of such collimation optics 210, upstream of the polarization splitter 220, makes it possible to optimize the operation of the polarization splitter 220, in particular when it is a two-dimensional metasurface. In such a case, the polarization splitter 220 (metasurface) is located in the plane of the entrance pupil 211. Thus, all the light rays from the scene pass through the entrance pupil and cover the entire metasurface. A metasurface is therefore produced with a minimal size, the design of which is simplified. In the case where the metasurface is located upstream or downstream of the entrance pupil 211, a larger metasurface is then required and its design can be more complex.

[0040] The collimation optics 210 here defines an entrance pupil 211 of the optical system 200. By entrance pupil is meant an image of the aperture diaphragm of the optical system 200, seen from the side of the scene to be imaged. Here it may be the opaque edge of the lens 210.

[0041] Note that, in the case of a more complex optical system 200, this may comprise diaphragms arranged to create an entrance pupil 211 in an accessible plane to place the polarization splitter 220 there, and create an exit pupil plane which makes it possible to spatially separate the exit pupils 231 from each other. Note that the polarization splitter 220 (metasurface) may be one of these diaphragms.

[0042] The polarization separator 220 is arranged on the main optical axis A of the optical system 200, preferably perpendicular to the main optical axis A. It implements an optical polarization routing (sorting) function, i.e. a function of deflecting the incident light beams according to their polarization state, the light beams here then being transmitted to the imaging optics 230.

[0043] In other words, the polarization splitter 220 is configured to separate the incident light beams according to their polarization state, and direct them onto spatially distinct zones of the imaging optics 230, as illustrated in [Fig.l]. These spatially distinct zones, here of the imaging optics 230, here define the exit pupils 231 of the optical system 200. As indicated previously, the exit pupils 231 are therefore at least partly offset two by two orthogonally to the main optical axis A.

[0044] Note that the exit pupils 231 can obviously be located elsewhere than in the imaging optics 230, in particular when the optical system 200 is an optical system more complex than two lenses. In this case, the exit pupils 231 can then be located upstream of the imaging optics 230, and the entrance pupil 211 may not be confused with the lens 210.

[0045] Exit pupil means an image of the aperture diaphragm by the optical system 200 seen from the side of the image sensor 300. This is a spatially delimited area through which the light passes to reach the image sensor 300.

[0046] In this embodiment, N is equal to 4. Also, the polarization separator 220 is adapted to route the incident light beams according to four different polarization states, noted: PSI, PS2, PS3, PS4. There are thus at least 4 exit pupils 231, each exit pupil 231 being arranged to receive incident light beams according to one of the four polarization states PSI, PS2, PS3, PS4.

[0047] For example, the polarization separator 220 is adapted to deflect the incident light beams according to four different polarization orientations, for example linear polarizations according to four directions respectively forming angles of 0°, 90°, +45°, -45° relative to a reference direction.

[0048] In the case where the polarization separator 220 is a two-dimensional metasurface, the optical system 200 may comprise a 5th exit pupil 231, which is associated with the zero order of diffraction of the metasurface. This exit pupil is not illustrated in [Fig.l], but is shown in [Fig.2A] and [Fig.2B]. The image of the object point A (located on the main optical axis A) is noted A'DOo (DO0, for Diffraction Order 0 in English) and is also located on the main optical axis A.

[0049] As described above, in a preferred embodiment, the polarization splitter 220 is a two-dimensional metasurface, as illustrated in Figures 1, 2A and 2B. The two-dimensional metasurface comprises a two-dimensional array of portions 221 of a first material, laterally surrounded by a filler material of different refractive index. Preferably, the first material has a refractive index higher than that of the filler material. The portions 221 of the two-dimensional metasurface have sub-wavelength lateral dimensions, that is to say that the largest lateral dimension of each portion 221 is less than the main wavelength intended to be measured by the underlying detection pixel P (for example the wavelength for which the quantum efficiency of the pixel P is maximum). For example, for pixels P intended to measure visible or near-infrared radiation, for example radiation with a wavelength of less than 1 pm, the largest dimension of each portion is between 10nm and 500nm (here, half of the maximum wavelength of the detection spectral band, here 1pm), for example between 80nm and 300nm.

[0050] The portions 221 of the two-dimensional metasurface 220 preferably have varied lateral dimensions. The sizing and arrangement of the portions 221 are defined according to the desired optical function. Thus, to achieve the polarization routing function, it is possible to provide portions 221 having, in top view, asymmetrical shapes, for example rectangular or elliptical, it being understood that the portions 221 may have, in top view, any shape. The portions 221 may have vertical sides, oblique sides or staircase-shaped sides, comprising at least one step. Furthermore, each portion 221 may be made of a single material or a stack of layers of different materials.The pattern of the two-dimensional metasurface can be defined by means of an electromagnetic simulation tool, for example by using inverse design methods, for example of the type described in the article entitled “Phase-to-pattern inverse designparadigm forfast realization of functional metasurfaces via transfer leaming” by Zhu, R., Qiu, T., Wang, J. et al. Nat. Commun. 12, 2974 (2021), or in the article entitled “Matrix Fourier optics enables a compact full-Stokes polarization camera” by Rubin et al., SCIENCE, Vol. 365, Issue 6448 - 5 July 2019. .

[0051] The portions 221 of the two-dimensional metasurface preferably all have the same height, for example of the same order of magnitude as the main wavelength intended to be measured by each detection pixel P, for example between 20 nm and 2 pm, preferably between 100 nm and 1000 nm, for radiation with a wavelength of less than 1 pm. The use of portions 221 of constant height makes it possible to simplify the manufacture of the two-dimensional metasurface.

[0052] In the example illustrated in [Fig.l], the polarization splitter 220 comprises a single two-dimensional metasurface. Alternatively, the polarization splitter of the optical system could include several two-dimensional metasurfaces, arranged coplanarly or not.

[0053] In another embodiment of the polarization splitter, said polarization splitter may be a Wollaston prism. The Wollaston prism is suitable for separating the incident light beams according to two orthogonal polarization states. The Wollaston prism is generally made up of two prisms made of birefringent materials joined together, for example calcite or quartz, whose optical axes are orthogonal to each other. The advantage of using a Wollaston prism is the absence of a zero order of diffraction and therefore the absence, around the optical axis of the optical system, of an unpolarized image corresponding to this zero order of diffraction.

[0054] The polarization splitter 220 may comprise a single Wollaston prism. Alternatively, the polarization splitter 220 of the optical system 200 may comprise several Wollaston prisms, each prism separating the incident light beams according to 2 different orthogonal polarization states.

[0055] In a preferred embodiment, notably illustrated in the figures, the imaging optics 230 is a focusing lens, adapted to focus the incident light beams on the plane of the image sensor 300. The imaging optics 230 is configured on the one hand to receive the incident light beams distributed spatially according to their polarization state and on the other hand to focus these incident light beams according to the N polarization states on the N corresponding zones of the image sensor 300, to thus form N images of the scene on said image sensor, the N images being spatially offset from each other, as illustrated in [Fig.l]. Note that an additional image, associated with the zero order of diffraction of the two-dimensional metasurface 220 can also be formed on the image sensor 300. Here, the exit pupils 231 are located at the level of the imaging optics 230.

[0056] [Fig.2A] illustrates an example of an optical diagram of a polarimetric camera 100, similar to that of the invention, but which would not include angular filters 320 described below. In this example, the polarization separator 220 is a two-dimensional metasurface.

[0057] A point A is placed in the object plane of the optical system 200, on the main optical axis A. Light beams coming from the point A are collected by the collimating optics 210, which transmits them, collimated (parallel to each other and to the main optical axis A), towards the polarization separator 220.

[0058] The polarization separator 220 ensures the deflection of the light beams according to, here, two different polarization states PSI and PS2. Note that the light beams associated with the zero order of diffraction of the polarization separator 220 do not are not deflected. The light beams associated with the polarization states PSI and PS2 are thus directed towards the imaging optics 230 in a manner offset two by two relative to the main optical axis A (above and below the main optical axis A, according to the orientation of [Fig.2A]), at a distance from the main optical axis A. This gives an exit pupil 23lPSi associated with the PSI state, an exit pupil 231Ps2 associated with the PS2 state, and an exit pupil associated with the zero diffraction order. These exit pupils are offset two by two orthogonally to the main optical axis A, and therefore do not completely overlap.

[0059] The imaging optics 230 then focuses the incident light beams onto the image plane of the optical system 200, in distinct zones of the image sensor 300, thus forming several distinct images. Thus, the image of point A associated with the PSI state is denoted A'PSi, and the image of point A associated with the PS2 state is denoted A'PS2. The image of point A associated with the zero diffraction order of the polarization splitter 220 is also denoted A'DOo. The optical axes associated with these three exit pupils are distinct from one another, and the three image points are also spatially distinct from one another. Two distinct images associated with the two polarization states PSI and PS2 are thus obtained, and one image associated with the zero diffraction order which is also distinct from the other two.

[0060] However, it can be seen that the image B' of a point B of the scene, located outside the optical axis and not shown in FIGS. 2A and 2B, associated with the zero order of diffraction, can be detected by the detection pixel which receives the image point A'PSi. Similarly, the image B” of another point of the scene, associated with the zero order of diffraction, can be detected by the detection pixel which receives the image point A'PS2. Furthermore, it is also possible for an image point associated with the polarization state PS2 to be detected by the subset of pixels associated with the polarization state PSI, and vice versa.

[0061] [Fig.2B] illustrates an example of an optical diagram of a polarimetric camera 100 according to one embodiment, which comprises angular filters 320. In this example also, the polarization splitter 220 is a two-dimensional metasurface.

[0062] As indicated above, at least N angular filters 320 are located between the optical system 200 and the photodetectors 303 of the image sensor 300. Each angular filter 320 is adapted to transmit to a subset of pixels the incident light beams coming from the associated exit pupil 231, and to filter at least in part the incident light beams coming from the other exit pupil(s) 231.

[0063] Thus, as shown in the figure, the detection pixels associated with the exit pupil 23lPSi transmit the light beams having the polarization state PSI, but filter at least in part those associated with the polarization state PS2 like those associated with the zero order of diffraction. Similarly, the detection pixels associated with the 231PS2 exit pupil transmit light beams having the PS2 polarization state, but at least partially filter those associated with the PSI polarization state as well as those associated with the zero order of diffraction.

[0064] A polarimetric camera is thus obtained having improved performance, insofar as the quality of the two images associated with the polarization states PS 1 and PS2 is improved, by filtering at least in part the light beams that can be described as parasitic, that is to say those which are not associated with the desired polarization state. In addition, the association of the angular filters 320 with the polarization separator 220 makes it possible to use standard photodetectors.

[0065] [Fig.3A] illustrates an example of angular response of a detection pixel P of the image sensor 300 of the polarimetric camera 100 according to one embodiment. This is the amplitude of the measurement signal of the detection pixel, for a given incident light flux, as a function of the angle of incidence of the detected light beams.

[0066] Here we consider a detection pixel dedicated to the polarization state PSI. Light beams associated with the polarization state PS2, which form parasitic beams, are likely to reach this detection pixel.

[0067] A continuous line represents the angular response of a detection pixel of a polarimetric camera similar to that of [Fig.2A], i.e. without angular filter 320, and a dotted line represents that of a detection pixel of a polarimetric camera according to an embodiment of the invention, i.e. with angular filter 320.

[0068] The light beams associated with the polarization state PSI are incident on the detection pixel in an angular cone denoted A0PSi. The integral of the response I in the angular amplitude A0PSi participates in forming the measurement signal.

[0069] However, it is noted that light beams associated with the polarization state PS2 are also incident on the detection pixel in an angular cone denoted A0 PS2* In the case of a polarimetric camera not comprising an angular filter 320, these light beams also participate in forming the measurement signal, which degrades the performance of the polarimetric camera.

[0070] On the other hand, the angular response of a detection pixel associated with an angular filter (dotted line) shows reduced sensitivity to light beams located outside the angular amplitude A0PSi. In other words, the angular filter makes it possible to filter light beams which are not associated with the expected polarization state (and therefore which do not come from the exit pupil associated with the detection pixel). The performance of the polarimetric camera according to the invention is therefore improved.

[0071] Let us return to [Fig.l]. The image sensor 300 is located in the image plane of the optical system 200. It comprises a plurality of detection pixels P. Each detection pixel P comprises a photodetector 303. As indicated previously, the detection pixels are grouped into subsets, each subset being associated with an exit pupil. We therefore have at least N subsets of detection pixels, for N exit pupils associated with the N polarization states. A subset of detection pixels, centered on the principal optical axis A, can be associated with the exit pupil linked to the zero order of diffraction of the polarization separator 220 (in the case of a two-dimensional metasurface).

[0072] [Fig.3B] is a schematic and partial view, in cross-section, of an image sensor 300 of a polarimetric camera according to one embodiment.

[0073] The photodetectors 303 of the detection pixels are formed in a semiconductor substrate 310. The semiconductor substrate 310 is made for example of a monocrystalline semiconductor material, for example silicon.

[0074] Isolation trenches or walls 302, extending vertically in the semiconductor substrate 301, laterally, electrically and / or optically separate the photodetectors 303 of the detection pixels from each other, so as to limit crosstalk. The isolation walls 302 are for example made of a dielectric material, for example silicon oxide.

[0075] In the example of [Fig.3B], the image sensor 100 is a back-side illumination sensor, also called a BSI (Back Side Illumination) sensor, i.e. the light beams coming from the scene to be imaged illuminate the semiconductor substrate via one face, called the back face 304. The back face 304 of the semiconductor substrate 310 of the image sensor is arranged in the image plane of the optical system 200.

[0076] The image sensor 300 further comprises, on the side of the front face 305, corresponding to the lower face of the semiconductor substrate 101, a stack (not shown in the figures) of insulating and conductive layers (for example metallic), commonly called an interconnection stack, in which interconnection elements of the detection pixels P of the image sensor 300 are formed.

[0077] It is clear that the embodiments described also apply to front side illumination sensors or FSI sensors (from the English “Front Side Illumination”), that is to say sensors in which the semiconductor substrate is intended to be illuminated by its face in contact with the interconnection stack.

[0078] The detection pixels P of the image sensor 300 are preferably arranged in a matrix according to rows and columns, as illustrated in [Fig.l]. The detection pixels P are preferably all identical, apart from manufacturing dispersions, or similar.

[0079] The detection pixels P of the image sensor are divided into N subsets of pixels. Each subset of detection pixels P comprises a set of adjacent pixels. The N subsets of pixels are distinct from each other. Thus, each detection pixel P belongs to only one subset.

[0080] In the example of [Fig.l], the detection pixels P are divided into four subsets of pixels. Each subset of detection pixels P is intended to receive incident light beams, coming from its associated exit pupil, according to one of the four polarization states PSI, PS2, PS3, PS4.

[0081] Furthermore, the image sensor 300 further comprises N angular filters 320. They are located between the optical system 200 and the photodetectors 303. As indicated previously, each angular filter 320 is adapted to transmit to a subset of pixels the incident light beams coming from the associated exit pupil 231, and to filter at least in part the incident light beams coming from the other exit pupil(s) 231.

[0082] Each angular filter 320 is therefore associated respectively with a subset of detection pixels and with the associated exit pupil 231. Thus, in the example of [Fig.l] where the polarization splitter 220 ensures the deflection of the light beams according to the four polarization states PSI, PS2, PS3 and PS4, the polarization state PSI is associated with the exit pupil (denoted here 23lPSi) then with the angular filter (denoted here 320 psi) and with the subset of detection pixels (denoted here EPPSi), the polarization state PS2 is associated with the exit pupil 231PS2 then with the angular filter 320PS2 and with the subset EPPs2 of detection pixels, and so on.

[0083] In the example of [Fig.3B], the angular filters 320 are opaque structures comprising through openings 321, each through opening 321 being arranged opposite the photodetector 303 of a detection pixel P. The transverse dimensions of the through openings 321 are defined to allow the transmission of the light beams coming from the associated exit pupil, and to filter at least in part those coming from the other exit pupils.

[0084] For example, the opaque structures are made of a material, for example metallic, such as aluminum, copper or tungsten, among others. Preferably, the N angular filters are arranged in a coplanar manner. Preferably, the N angular filters 320 are made in the same opaque structure.

[0085] Thus, as shown in [Fig.3B], the light beams coming from the associated exit pupil (solid lines) are transmitted by the angular filter 320, while those coming from the other exit pupils (dotted lines) are at least partly filtered, and here entirely filtered.

[0086] In one embodiment, the image sensor 300 may comprise a plurality of microlenses 330. The microlenses 330 are preferably arranged between the optical system 200 and the angular filters 320. They ensure focusing of the incident light beams on the detection pixel associated with the microlens 330. In the case where the image sensor 300 does not include microlenses 330, it may include an angular filter similar to that of the filters 320 to provide an angular selection function similar to that of the microlenses 330.

[0087] In an exemplary embodiment, but not limiting, and as illustrated in [Fig.l], each microlens 330 extends, in dimension, opposite a pixel. In other words, there are thus as many microlenses as there are pixels in the image sensor. Note that the microlenses 330 can be offset transversely to the facing pixel to take into account the main angle through which the light beams intended to be captured by this pixel arrive. The microlenses 330, the polarizing filters 340 and the through openings 321 of the angular filters 320 are then offset according to the value of this angle of incidence.

[0088] In one embodiment, as illustrated in [Fig.3B], the image sensor may comprise, in addition to the N angular filters, N polarizing filters 340. The N polarizing filters 340 are arranged here between the microlenses 330 and the angular filters 320, but they could be located between the angular filters 320 and the photodetectors 303.

[0089] Each polarizing filter 340 is associated respectively with a subset of pixels, and therefore with an exit pupil 231 of the optical system 200.

[0090] Each polarizing filter 340 is adapted to transmit the incident light beams according to a predefined polarization state and to block the incident light beams according to the other polarization states.

[0091] Thus, the image sensor 300 comprises N polarizing filters 340 each having different polarization orientations and are thus each adapted to transmit only the incident light beams according to a given polarization state, more particularly the incident light beams coming respectively from the associated exit pupil.

[0092] In a preferred embodiment, the polarizing filters 240 are metallic structures comprising through openings and transmitting mainly the incident light beams according to a predefined polarization state, that is to say the incident light beams coming only from the associated exit pupil, and absorbing or reflecting the radiation according to the other polarization states.

[0093] By way of non-limiting example, the metal structures of the polarizing filters are made of aluminum, tungsten or even copper. Preferably, the N polarizing filters are arranged in a coplanar manner. In one exemplary embodiment, the N polarizing filters are made in the same metal structure.

[0094] A filler layer 350 may be disposed between the angular filters 320 and the polarizing filters 340. Similarly, a filler layer 360 may be disposed between the polarizing filters 340 and the microlenses 330.

[0095] Alternatively, the angular filters 320 and the polarizing filters 340 may be made in the same layer: the opaque part of the layer 320 remains unchanged, and the polarizing filters 340 are located in the through openings 321.

[0096] The filling layer(s) 350, 360 may for example be made of a dielectric material, transparent to the wavelengths to be detected, such as silicon oxide, silicon nitride, alumina, or tantalum oxide.

[0097] Similarly, the openings of metallic structures of the angular filters 320 and the polarizing filters 340 can be filled with a dielectric material, transparent to the wavelengths to be detected, such as a silicon oxide, a silicon nitride, alumina, or a tantalum oxide, among others.

[0098] Alternatively, the openings in the metal structures of the angular filters and the polarizing filters may be left empty or filled with air.

[0099] The above description clearly illustrates that, through its various characteristics and their advantages, the present invention achieves the set objectives. In particular, the present invention provides a polarimetric camera which makes it possible to block parasitic incident light beams linked to the overlapping of the images on the image sensor and those from the zero order generated by the polarization separator, when the latter is a two-dimensional metasurface.

Claims

1.

2.

3. Claims Polarimetric camera (100), comprising an optical system (200) and an image sensor (300): • the optical system (200), having a main optical axis (A), being adapted to form on the image sensor (300) at least N spatially distinct images of a scene to be imaged, at the rate of one image per polarization state, with N greater than or equal to 2, N being a predefined number of polarization states, and comprising: • a polarization separator (220), adapted to deflect the incident light beams coming from the scene to be imaged according to the N polarization states, the optical system then having at least N exit pupils (231) at least partly offset two by two orthogonally to the main optical axis (A); • the image sensor (300), comprising a plurality of detection pixels (P) each comprising a photodetector (303), • the detection pixels (P) being distributed into at least N subsets of pixels, each associated with an exit pupil (231), and each intended to receive the incident light beams according to the polarization state of the associated exit pupil; • characterized in that the image sensor (300) comprises at least N angular filters (320) located between the optical system (200) and the photodetectors (303), each angular filter (320) being adapted to transmit to a subset of pixels the incident light beams coming from the associated exit pupil (231), and to filter at least in part the incident light beams coming from the other exit pupil(s) (231). The polarimetric camera (100) of claim 1, wherein the N angular filters (320) are arranged coplanarly. Polarimetric camera (100) according to claim 1 or 2, in which the N angular filters (320) are formed in a same grid having openings sized to transmit to a sub-

4.

5.

6.

7.

8. set of pixels the incident light beams coming from the associated exit pupil, and to filter at least in part the incident light beams coming from the other exit pupils. Polarimetric camera (100) according to any one of the preceding claims, wherein the image sensor (300) comprises a plurality of microlenses (330), adapted to focus the incident light beams on the photodetectors of the detection pixels (P), located between the optical system (200) and the angular filters (320). A polarimetric camera (100) according to any preceding claim, wherein the polarization splitter (220) is a two-dimensional metasurface. Polarimetric camera (100) according to any one of the preceding claims, in which the image sensor (300) comprises N polarizing filters (340) located between the optical system (200) and the angular filters (320), adapted to transmit to a subset of pixels the incident light beams coming from the associated exit pupil and having the associated polarization state, and to filter at least in part the incident light beams coming from the other exit pupils and therefore having other polarization states. The polarimetric camera (100) of claim 6, wherein the N polarizing filters (340) are arranged coplanarly. Polarimetric camera (100) according to any one of claims 6 or 7, in which the N polarizing filters (340) are made in the same metallic structure.

Images