Vacuum feedthrough and vacuum system

Abstract

A vacuum feedthrough 10 providing an electrical connection from ambient pressure into a vacuum chamber 18 comprises: a first wall (12a, Fig. 1) at least partially connected to or part of the vacuum ch

Claims

1. Vacuum feedthrough in particular to provide an electrical connection from ambient pressure into a vacuum chamber, comprisinga first wail to be at least partially connected to or part of the vacuum chamber,a second wall, wherein the first wall and the second wall are connected by one or more sidewalls, wherein by the first wall, the second wall and the one or more sidewalls an internal volume is created,a first electrical feedthrough arranged in the first wall providing one or more electrical connection through the first wall in a vacuum tight manner,a second electrical feedthrough arranged in the second wall providing one or more electrical connection through the second wall in a vacuum tight manner,wherein one or more of the electrical connections of the first electrical feedthrough are connected with respective electrical connections of the second electrical feedthrough,wherein in the internal volume is a vacuum.

2. Vacuum feedthrough according to claim 1, wherein the volume of internal volume is between 100cm3 and 2000cm3 and preferably between 300cm3 and 700cm3.

3. Vacuum feedthrough according to claim 1 or 2, wherein the internal volume is independent from the vacuum chamber.

4. Vacuum feedthrough according to any of claims 1 to 3, wherein the pressure in the internal volume is higher than in the vacuum chamber,5. Vacuum feedthrough according to any of claims 1 to 4, wherein a maximum pressure in the internal volume is lOOmbar or higher and preferably lOmbar or higher.

6. Vacuum feedthrough according to any of claims 1 to 5, wherein in the first electrical feedthrough and / or the second electrical feedthrough are connecting elements embedded in molten glass or ceramic.

7. Vacuum feedthrough according to any of claims 1 to 6, wherein an inner surface of one or more of the first wall, the second wall and one or more of the sidewalls is covered by an NEG material.

8. Vacuum feedthrough according to any of claims 1 to 7, wherein an NEG material is disposed in the internal volume.

9. Vacuum feedthrough according to any of claims 1 to 8, wherein the interna! volume is connected to a vacuum pump,10. Vacuum feedthrough according to any of claims 1 to 8, wherein the internal volume comprises a vacuum connection comprising a valve, wherein a vacuum pump is connectable to the vacuum connection.

11. Vacuum feedthrough according to any of claims 1 to 10, wherein the first wall and / or the second wall is connected to the one or more sidewalls by a flange.

12. Vacuum system comprising a vacuum chamber having a chamber wall and being connected to a first vacuum pump to create a vacuum in the vacuum chamber, and a vacuum feedthrough according to any of ciaims 1 to 11, wherein the first wail or the second wall is connected to or integral with the chamber wall.

13. Method for operating a vacuum system according to claim 12 includingthe steps of:generating a vacuum in the internal volume of the vacuum feedthrough continuously or in intervals.21

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