Sensor array

Abstract

Characterizing a substrate 520 by, for a plurality of measurement locations 510 across an area of interest 530 on the substrate, simultaneously: illuminating the substrate 520; measuring scattered and / or reflected illumination radiation from the substrate 520 to determine a reflectance curve; and providing local measurement data based on the reflectance curve; combining the local measurement data for the plurality of locations on the substrate, and characterizing the substrate based on the combined local measurement data. A relative height or angle offset may be determined through the measurement of a calibration substrate and a reference reflectance curve. The system may be employed during the process of substrate roll-to-roll manufacturing. [Figure 5]