Semiconductor device inspection images
JP1806614SActive Publication Date: 2025-08-21HAMAMATSU PHOTONICS KK
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Patent Information
- Application Number
- JP2024014291D
- Authority / Receiving Office
- JP · JP
- Patent Type
- Designs
- Current Assignee / Owner
- Filing Date
- 2024-07-11
- Publication Date
- 2025-08-21
- Estimated Expiration
- 2049-07-11
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Abstract
The image of the present design is used to inspect a semiconductor device to be analyzed. When multiple block areas consisting of multiple chips are formed on a semiconductor device, the image is used to inspect each block area. The image reads the chips, automatically sets the block areas, and automatically displays a roughly rectangular selection area covering each block area, as shown in the "image diagram." The roughly rectangular selection area can be deselected, allowing users to select only the block areas they want to analyze.
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