Semiconductor device inspection images

JP1806614SActive Publication Date: 2025-08-21HAMAMATSU PHOTONICS KK
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Patent Information

Application Number
JP2024014291D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2024-07-11
Publication Date
2025-08-21
Estimated Expiration
2049-07-11

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Abstract

The image of the present design is used to inspect a semiconductor device to be analyzed. When multiple block areas consisting of multiple chips are formed on a semiconductor device, the image is used to inspect each block area. The image reads the chips, automatically sets the block areas, and automatically displays a roughly rectangular selection area covering each block area, as shown in the "image diagram." The roughly rectangular selection area can be deselected, allowing users to select only the block areas they want to analyze.
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