Transport robot

Abstract

This product is a transport robot used to transport workpieces such as semiconductor wafers to a predetermined location. As shown in the reference perspective view illustrating the names of each part, this product comprises a base, a pedestal, a lifting member, a slider, two arms, and two hands. The pedestal is supported so as to be rotatable about z-direction relative to the base and movable in the y-direction relative to the base. The lifting member is supported on the pedestal. The slider is supported so as to be movable in the z-direction relative to the lifting member. The two arms face each other in the z-direction. Each of the two arms is supported so as to be rotatable about z-direction relative to the slider and is extendable in the x-direction. The two hands are individually supported at the ends of the two arms. When transporting a workpiece with this product, the workpiece is placed on at least one of the two hands.

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