Carboxylate, carboxylic acid generator, resist composition, and method for producing resist pattern

Abstract

To provide a carboxylate and the like which allow a resist pattern having a good mask error factor to be produced, and a resist composition containing the same.SOLUTION: There are provided: a carboxylate represented by formula (I) and the like; and a resist composition containing the same. [In the formula, Ar1-Ar3 each represent naphthalene, anthracene or phenanthrene; R1-R3 each represent -O-R10, -O-CO-O-R10 or the like; R10 represents an acid-labile group; R4-R9 each represent a halogen atom, a haloalkyl group or a hydrocarbon group; A1-A3 each represent a hydrocarbon group; and X0 represents an optionally substituted hydrocarbon group.]SELECTED DRAWING: None

Description

[Technical Field]

[0001] The present invention relates to a carboxylic acid salt, a carboxylic acid generator, a resist composition, and a method for producing a resist pattern. [Background technology]

[0002] Patent Document 1 describes resist compositions containing a carboxylic acid salt represented by the following formula as a carboxylic acid generator. JPEG2023160797000001.jpg29144 [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-046662 Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention provides a carboxylate salt that forms a resist pattern with a better mask error factor (MEF) than a resist pattern formed using a resist composition containing the above salt. [Means for solving the problem]

[0005] The present invention includes the following inventions. [1] A carboxylic acid generator containing a carboxylic acid salt represented by formula (I). TIFF2023160797000002.tif55154 [In formula (I), Ar 1 , Ar 2 and Ar 3 each independently represents naphthalene, anthracene, or phenanthrene. R 1 , R 2 and R 3 are each independently -OR 10, -O-CO-OR 10 or -OL 10 -CO-OR 10 Represents. L 10 represents an alkanediyl group having 1 to 6 carbon atoms. R 10 represents an acid labile group. R 4 , R 5 , R 6 , R 7 , R 8 and R 9 each independently represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, and -CH2- contained in the haloalkyl group and the hydrocarbon group optionally being replaced by -O-, -S-, -CO- or -SO2-. A 1 , A 2 and A 3 each independently represents a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. m1 represents an integer of 1 to 5, and when m1 is 2 or greater, the groups in the parentheses may be the same or different. m2 represents an integer of 0 to 5, and when m2 is 2 or greater, the groups in the parentheses may be the same or different. m3 represents an integer of 0 to 5, and when m3 is 2 or greater, the groups in the parentheses may be the same or different. m4 represents an integer of 0 to 7, and when m4 is 2 or more, a plurality of R 4 may be the same or different from each other. m5 represents an integer of 0 to 7, and when m5 is 2 or more, a plurality of R 5 may be the same or different from each other. m6 represents an integer of 0 to 7, and when m6 is 2 or more, a plurality of R 6 may be the same or different from each other. m7 represents an integer of 0 to 4, and when m7 is 2 or more, a plurality of R 7 may be the same or different from each other. m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R 8 may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R 9 may be the same or different from each other. However, 1≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5. X 0 represents a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-.] [2]A 1 But, ***-X 01 -L 01 -or***-L 01 -X 01 - and A 2 But, ***-X 02 -L 02 -or***-L 02 -X 02 - and A 3 But, ***-X 03 -L 03 -or***-L 03 -X 03 - and X 01 , X 02 and X 03 each independently represents -O-, -CO-, -S-, or -SO2-; L 01 , L 02 and L 03 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group optionally having a substituent, and -CH- contained in the hydrocarbon group optionally being replaced by -O-, -CO-, -S- or -SO-; *** is S +

[0023] The carboxylic acid generator according to [1], wherein the carboxylic acid generator is a carboxylic acid generator having a carboxylic acid group bonded to a benzene ring. [3]X 01 , X 02 and X 03 are each independently -O- or -S-. [4]L 01 , L 02 and L 03 are each independently a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). [5]R 10 The carboxylic acid generator according to any one of [1] to [4], wherein the acid labile group is a group represented by formula (1a) or a group represented by formula (2a). TIFF2023160797000003.tif2156 [In formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 are bonded to each other to form, together with the carbon atoms to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms. * denotes a binding site.] TIFF2023160797000004.tif2161 [In formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other and they combine -CX a Together with -, they form a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-. X a represents an oxygen atom or a sulfur atom. * denotes a binding site.] [6]Ar 1 is naphthalene or anthracene, m4 is 0, or m4 is 1, 2, 3, 4 or 5, and R 4 is a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced by -O- or -CO-). [7]Ar 1 , Ar 2 and Ar 3 is naphthalene. [8]X 0 is an aliphatic hydrocarbon group having 1 to 72 carbon atoms which may have a substituent (-CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent, a group represented by formula (aa) or a group represented by formula (bb). TIFF2023160797000005.tif1758[In formula (aa), X a and X b each independently represents -O- or -S-. X 1a represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. X 2a represents a hydrocarbon group having 1 to 48 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * -COO - represents the bonding site with the carbon atom of TIFF2023160797000006.tif1575[In formula (bb), L Arepresents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom, or an aromatic hydrocarbon group having 6 to 14 carbon atoms which may have a halogen atom or a perfluoroalkyl group having 1 to 4 carbon atoms. L B represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -S-, -CO- or -SO2-. R A represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * -COO - represents the bonding site with the carbon atom of [9]X 0 is a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alicyclic hydrocarbon group having 3 to 36 carbon atoms which may have a hydroxy group (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-), a group combining an alicyclic hydrocarbon group having 3 to 36 carbon atoms with a chain hydrocarbon group having 1 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group), an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group, a group represented by formula (aa), or a group represented by formula (bb).

[10] A resist composition comprising the carboxylic acid generator according to any one of [1] to [9] and an acid generator other than the carboxylic acid generator.

[11] The resist composition according to

[10] , further comprising a resin containing a structural unit having an acid labile group, wherein the structural unit having an acid labile group comprises at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), and a structural unit represented by formula (a1-2). TIFF2023160797000007.tif44144 [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or -O-(CH2) k1 represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—. R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these. m1' represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3.

[12] The resist composition according to

[10] or

[11] , further comprising a resin containing a structural unit having a fluorine atom.

[13] (1) A step of applying the resist composition according to any one of

[10] to

[12] onto a substrate; (2) drying the applied composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) A method for producing a resist pattern, comprising the step of developing the composition layer after heating.

[14] A carboxylate represented by the above formula (I).

[15] A 1 But, ***-X 01 -L 01 -or***-L 01 -X 01 - and A 2 But, ***-X 02 -L 02 -or***-L 02 -X 02 - and A 3 But, ***-X 03 -L 03 -or***-L 03 -X 03 - and X 01 , X 02 and X 03 each independently represents -O-, -CO-, -S-, or -SO2-; L 01 , L 02 and L 03 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group optionally having a substituent, and -CH- contained in the hydrocarbon group optionally being replaced by -O-, -CO-, -S- or -SO-; *** is S +

[14] The carboxylate salt according to

[14] , wherein the carboxylate represents a bonding site with the benzene ring.

[16] X 01 , X 02 and X 03 are each independently -O- or -S-.

[17] L 01 , L 02 and L 03are each independently a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-).

[18] R 10 The carboxylate according to any one of

[14] to

[17] , wherein the acid labile group is a group represented by the above formula (1a) or a group represented by the above formula (2a).

[19] Ar 1 is naphthalene or anthracene, m4 is 0, or m4 is 1, 2, 3, 4 or 5, and R 4 is a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced by -O- or -CO-).

[20] Ar 1 , Ar 2 and Ar 3 is naphthalene.

[21] X 0 is an aliphatic hydrocarbon group having 1 to 72 carbon atoms which may have a substituent (-CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent, a group represented by the above formula (aa) or a group represented by the formula (bb).

[22] X 0is a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alicyclic hydrocarbon group having 3 to 36 carbon atoms which may have a hydroxy group (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-), a group combining an alicyclic hydrocarbon group having 3 to 36 carbon atoms with a chain hydrocarbon group having 1 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group), an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group, a group represented by formula (aa), or a group represented by formula (bb). [Effects of the Invention]

[0006] By using a resist composition containing a carboxylate of the present invention, a resist pattern can be produced with a good mask error factor (MEF). DETAILED DESCRIPTION OF THE INVENTION

[0007] In this specification, "(meth)acrylic monomer" means "at least one of an acrylic monomer and a methacrylic monomer." The terms "(meth)acrylate" and "(meth)acrylic acid" have the same meaning. Regarding groups described in this specification, those that can have either a linear or branched structure are acceptable. When -CH2- in a hydrocarbon group or the like is replaced with -O-, -S-, -CO-, or -SO2-, the same examples apply to each group. A "combined group" refers to a group in which two or more of the exemplified groups are bonded, and the valence of these groups may vary depending on the bonding form. "Derived from" or "derived from" refers to a polymerizable C=C bond in the molecule becoming a -CC- group (single bond) through polymerization. When stereoisomers exist, all stereoisomers are included. In this specification, the term "solid content of the resist composition" refers to the sum of all components in the resist composition excluding the solvent (E), which will be described later.

[0008] [Carboxylate represented by formula (I)] The present invention relates to a carboxylate salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)" or "carboxylate (I)"). In the salt (I), the side with a positive charge is sometimes called the "cation (I)" and the side with a negative charge is sometimes called the "anion (I)."

[0009] [Cation (I)] The cation (I) of the salt represented by formula (I) is a cation represented by formula (IC). TIFF2023160797000008.tif55161 [In formula (IC), all symbols have the same meaning as in formula (I)]

[0010] R 1 , R 2 and R 3 L included in 10Examples of the alkanediyl group in the formula (I) include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl; and Examples of branched alkanediyl groups include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. L 10 is preferably an alkanediyl group having 1 to 3 carbon atoms, and more preferably a methylene group.

[0011] R 1 , R 2 and R 3 R included in 10 The acid labile group in R 10 When a leaving group including a group represented by the following formula is eliminated, it forms a carboxy group or a hydroxy group. The acid labile group is preferably a group represented by formula (1a) (hereinafter sometimes referred to as "acid labile group (1a)") or a group represented by formula (2a) (hereinafter sometimes referred to as "acid labile group (2a)"). TIFF2023160797000009.tif2156 [In formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 are bonded to each other to form, together with the carbon atoms to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms. * denotes a binding site.] TIFF2023160797000010.tif2161 [In formula (2a), R aa1’ and Raa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other and they combine -CX a Together with -, they form a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-. X a represents an oxygen atom or a sulfur atom. * denotes a binding site.]

[0012] R aa1 , R aa2 and R aa3 Examples of the alkyl group of R include a methyl group, an ethyl group, a propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, and an n-octyl group. aa1 , R aa2 and R aa3 The alkyl group preferably has 1 to 6 carbon atoms, more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms. R aa1 , R aa2 and R aa3 Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. R aa1 , R aa2 and R aa3 The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (where * indicates a bonding site): aa1 , R aa2 and R aa3The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms, and more preferably 3 to 12 carbon atoms. TIFF2023160797000011.tif9159R aa1 , R aa2 and R aa3 Examples of the aromatic hydrocarbon group of R include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl. aa1 , R aa2 and R aa3 The aromatic hydrocarbon group preferably has 6 to 14 carbon atoms, and more preferably 6 to 10 carbon atoms.

[0013] Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group.

[0014] R aa1 and R aa2 -C(R aa1 )(R aa2 )(R aa3 ) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms, more preferably 3 to 12 carbon atoms. * represents the bonding site with -O-. TIFF2023160797000012.tif30140

[0015] The group represented by formula (1a) is a 1,1,1-trialkyl group (R aa1 , R aa2 and R aa3 is an alkyl group, preferably a tert-butyl group), a 2-alkyladamantan-2-yl group (in formula (1a), R aa1 , R aa2 and the carbon atoms to which they are bonded form an adamantyl group, and R aa3 is an alkyl group) and 1-(adamantan-1-yl)-1,1-dialkyl groups (in formula (1a), R aa1 and R aa2 is an alkyl group, and R aa3 is an adamantyl group).

[0016] R aa1' , R aa2' and R aa3' Examples of the hydrocarbon group include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups. The alkyl group and the alicyclic hydrocarbon group are R aa1 , R aa2 and R aa3 Examples of the groups include the same groups as those listed in 1. Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, a cycloalkylalkyl group or alkylcycloalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group. R aa2' and R aa3' are bonded to each other and the carbon atoms to which they are bonded and X a When forming a heterocyclic group together with -C(R aa1' )(R aa2' )-X a -(R aa3' ) includes the following groups: * represents a binding site. TIFF2023160797000013.tif21143R aa1' and R aa2' At least one of these is preferably a hydrogen atom.

[0017] Specific examples of the acid labile group (1a) include the following groups: * represents a bonding site. TIFF2023160797000014.tif71167

[0018] Specific examples of the acid labile group (2a) include the following groups: * represents a bonding site. TIFF2023160797000015.tif60165R 1 Ar 1 The bonding position to A is not particularly limited. 1 But, Ar 1 When bonded to the 1st or 2nd position of Ar 1It is preferable that A is bonded to the 3-, 4-, 6-, and 7-positions of A 1 But, Ar 1 When R is bonded to the 9-position, it is preferably bonded to the 2-, 3-, or 4-position. 2 and R 3 and A 2 and A 3 Ar 2 and Ar 3 The bonding position to R 1 and A 1 Ar 1 The binding position is the same as that of R 1 , R 2 and R 3 are each independently -OR 10 or -OL 10 -CO-OR 10 It is preferable that:

[0019] R 4 , R 5 , R 6 , R 7 , R 8 and R 9 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 4 , R 5 , R 6 , R 7 , R 8 and R 9The haloalkyl group having 1 to 12 carbon atoms refers to an alkyl group having 1 to 12 carbon atoms and containing a halogen atom, and examples thereof include a fluorinated alkyl group having 1 to 12 carbon atoms, a chlorinated alkyl group having 1 to 12 carbon atoms, a brominated alkyl group having 1 to 12 carbon atoms, and an iodinated alkyl group having 1 to 12 carbon atoms. Examples of the haloalkyl group include a perfluoroalkyl group having 1 to 12 carbon atoms (e.g., a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. R 4 , R 5 , R 6 , R 7 , R 8 and R 9 Examples of the hydrocarbon group having 1 to 36 carbon atoms include chain hydrocarbon groups such as alkyl groups and alkanediyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. The number of carbon atoms in the hydrocarbon group is preferably 1 to 30, more preferably 1 to 24, and even more preferably 1 to 18. The alkyl group is a linear or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The alkanediyl group is a linear or branched alkanediyl group, such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, or a hexane-1,6-diyl group; and Examples of branched alkanediyl groups include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The chain hydrocarbon group preferably has 1 to 18 carbon atoms, more preferably 1 to 12 carbon atoms, even more preferably 1 to 9 carbon atoms, even more preferably 1 to 6 carbon atoms, even more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below: The bonding site may be at any position. TIFF2023160797000016.tif46168Specifically, monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl. Polycyclic alicyclic hydrocarbon groups include polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl; cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane; and spiro rings having a cycloalkyl group bonded to a norbornyl or adamantyl group via a spiro bond.The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0020] Examples of groups formed by combining two or more of chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups include a group combining an aromatic hydrocarbon group and a chain hydrocarbon group (for example, aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*, alkyl group-aromatic hydrocarbon group-alkanediyl group-*, where -CH2- contained in the alkanediyl group and the alkyl group may be replaced by -O-, -CO-, -S-, or -SO2-), a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group (for example, alicyclic hydrocarbon group-alkanediyl group- Examples of such groups include an alkanediyl group-*, an alkyl group-alicyclic hydrocarbon group-*, an alkyl group-alicyclic hydrocarbon group-alkanediyl group-*, where —CH— contained in the alicyclic hydrocarbon group, the alkanediyl group, and the alkyl group may be replaced by —O—, —CO—, —S—, or —SO—, and groups combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (for example, an aromatic hydrocarbon group-alicyclic hydrocarbon group-*, an alicyclic hydrocarbon group-aromatic hydrocarbon group-*, where —CH— contained in the alicyclic hydrocarbon group may be replaced by —O—, —CO—, —S—, or —SO—). * represents a bonding site. The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group. Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as a cyclohexylmethyl group, a cyclohexylethyl group, a 1-(adamantan-1-yl)methyl group, and a 1-(adamantan-1-yl)-1-methylethyl group. Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group. Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenylcyclohexyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include a cyclohexylphenyl group. In addition, in the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. 1 , Ar 2 , Ar 3 Alternatively, it may be bonded to a benzene ring.

[0021] R 4 , R 5 , R 6 , R 7 , R 8 and R 9 When a -CH2- in a haloalkyl group or a hydrocarbon group represented by the formula (I) is replaced with -O-, -CO-, -S-, or -SO2-, the number of carbon atoms before the replacement is the total number of carbon atoms in the haloalkyl group or the hydrocarbon group. The number may be 1 or 2 or more. Examples of haloalkyl groups and groups in which -CH2- in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), and a hydroxyl group (a group in which -CH2- at any position in an alkyl group is replaced by -O-). a group in which -CH2-CH2- is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced by -CO-O-), an alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced by -S-), an alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced by -SO2-), an oxy group (a group in which -CH in a methylene group 2- is replaced by -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), thio group (a group in which -CH2- in a methylene group is replaced by -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced by -SO2-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced by -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced by -O-CO-), a an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -CO-O-), an alkanediylthio group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -S-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -SO2-), a cycloalkoxy group, a cycloalkylalkoxy group,Examples of such groups include an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a haloalkoxy group (a group in which -CH- at any position in a haloalkyl group is replaced with -O-), a haloalkoxycarbonyl group (a group in which -CH-CH- at any position in a haloalkyl group is replaced with -O-CO-), a haloalkylcarbonyl group (a group in which -CH- at any position in a haloalkyl group is replaced with -CO-), a haloalkylcarbonyloxy group (a group in which -CH-CH- at any position in a haloalkyl group is replaced with -CO-O-), and a group in which two or more of these groups are combined. Examples of the alkoxy group include alkoxy groups having 1 to 35 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 35 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 36 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 35 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, even more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. Examples of the alkylthio group include alkylthio groups having 1 to 35 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 35 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 35 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 35 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 36 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 35 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 35 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 35 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 35 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 35 carbon atoms, such as a cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 34 carbon atoms, such as a butoxycarbonyloxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 35 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 36 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 35 carbon atoms, such as a phenyloxy group. Examples of the haloalkoxy group, haloalkoxycarbonyl group, haloalkylcarbonyl group, and haloalkylcarbonyloxy group include haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, and haloalkylcarbonyloxy groups having 2 to 11 carbon atoms, and include groups in which one or more hydrogen atoms of the above-exemplified groups have been replaced with a halogen atom.

[0022] Examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -S-, -SO2-, or -CO- include the groups shown below. Also included are groups in which, among the groups shown below, -O- is replaced with -S- and -CO- is replaced with -SO2-. The bonding site can be at any position. TIFF2023160797000017.tif46168

[0023] R 4 , R 5 , R 6 , R 7 , R 8 and R 9 The substituents that the hydrocarbon group may have include a halogen atom and a cyano group. Examples of the halogen atom include the same groups as those mentioned above. The hydrocarbon group may have one or more substituents.

[0024] A 1 , A 2 and A 3 Examples of the hydrocarbon group include linear or branched chain hydrocarbon groups (e.g., alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be a combination of two or more of these groups. The number of carbon atoms in the hydrocarbon group is preferably 1 to 19, more preferably 1 to 18, even more preferably 1 to 16, still more preferably 1 to 14, and even more preferably 1 to 12. Examples of the chain hydrocarbon group include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl; Examples of branched alkanediyl groups include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below: The bonding site may be at any position. TIFF2023160797000018.tif46168Specifically, monocyclic alicyclic hydrocarbon groups such as monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group; polycyclic alicyclic hydrocarbon groups such as polycyclic cycloalkanediyl groups, such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl; Examples include a cycloalkyl group such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane, and a spiro ring having a cycloalkyl group bonded to a norbornyl group or an adamantyl group via a spiro bond. The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, even more preferably 3 to 12 carbon atoms, and even more preferably 3 to 10 carbon atoms. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0025] Examples of groups formed by combining two or more groups include a group combining an alicyclic hydrocarbon group with an alkanediyl group, a group combining an aromatic hydrocarbon group with an alkanediyl group, and a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group. The combinations may each comprise two or more chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups. Furthermore, any of the groups may be bonded to a benzene ring. Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent aromatic hydrocarbon group-. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-.

[0026] A 1 , A 2 and A 3 In the case where a -CH2- in the hydrocarbon group is replaced with -O-, -CO-, -S-, or -SO2-, the number of carbon atoms before the replacement is taken as the total number of carbon atoms in the hydrocarbon group. The number may be 1 or 2 or more, but is preferably 1 to 3. Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -CO-, -S-, or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced by , -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), oxy group (a group in which -CH2- in a methylene group is replaced with -O- a carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), a thio group (a group in which -CH2- in a methylene group is replaced with -S-), a sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), an alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), an alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-), an alkanediylcarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-), an alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-), an alkanediylcarbonyl group (a group in which an alkanediyl group in which -CH2- at any position is replaced with -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position in an alkanediyl group is replaced with -SO2-), an alkanediylthio group (a group in which -CH2- at any position in an alkanediyl group is replaced with -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group,Examples include an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group formed by combining two or more of these groups. Examples of the alkoxy group include alkoxy groups having 1 to 19 carbon atoms, such as a methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group. Examples of alkoxycarbonyl groups include alkoxycarbonyl groups having 2 to 19 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl. Examples of alkylcarbonyl groups include alkylcarbonyl groups having 2 to 20 carbon atoms, such as acetyl, propionyl, and butyryl. Examples of alkylcarbonyloxy groups include alkylcarbonyloxy groups having 2 to 19 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, even more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. The alkylthio group includes alkylthio groups having 1 to 19 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 19 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 19 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 19 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 20 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 19 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 19 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 19 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 19 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 19 carbon atoms, such as a cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 18 carbon atoms, such as a butoxycarbonyloxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 19 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 20 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 19 carbon atoms, such as a phenyloxy group.

[0027] Examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -CO-, -S-, or -SO2- include the groups shown below. Also included are groups in which, among the groups shown below, -O- is replaced with -S- and -CO- is replaced with -SO2-. The bonding site can be at any position. TIFF2023160797000019.tif47170A 1 , A 2 and A 3 The substituents that the hydrocarbon group may have include R 4 ~R 9 Examples of the substituents include the same groups as those exemplified as the substituents that the hydrocarbon group may have.

[0028] A 1 , A 2 and A 3are each independently a hydrocarbon group having 1 to 20 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-, provided that at least one of -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2-). Specifically, A 1 is***-L 011 -X 01 -L 012 - and A 2 is***-L 021 -X 02 -L 022 - and A 3 is***-L 031 -X 03 -L 032 -is (X 01 , X 02 and X 03 each independently represents -O-, -CO-, -S- or -SO2-. 011 , L 012 , L 021 , L 022 , L 031 and L 032 are each independently a single bond or a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. 011 and L 012 The total number of carbon atoms is 0 to 19, and L 021 and L 022 The total number of carbon atoms is 0 to 19, and L 031 and L 032 The total number of carbon atoms is 0 to 19. + represents the bonding site with the benzene ring to which A is bonded. 1 is ***-X 01 -L 01 -or***-L 01 -X 01 - and A 2 is ***-X 02 -L 02 -or***-L 02 -X02 - and A 3 is ***-X 03 -L 03 -or***-L 03 -X 03 -is (X 01 , X 02 and X 03 each independently represents -O-, -CO-, -S- or -SO2-. 01 , L 02 and L 03 are each independently a single bond or a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. *** is S + represents the bonding site with the benzene ring to which A is bonded. 1 , A 2 and A 3 is preferably one that has no substituents other than substitution with -O-, -CO-, -S- or -SO2-. L 011 , L 012 , L 021 , L 022 , L 031 , L 032 , L 01 , L 02 and L 03 The hydrocarbon group having 1 to 19 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) may be any of the hydrocarbon groups having 1 to 19 carbon atoms, 1 , A 2 and A 3 Examples of the groups include the same groups as those listed in the above. X 01 , X 02 and X 03 are each independently preferably -O- or -S-, more preferably -O-. L 011 , L 012 , L 021 , L 022 , L 031 , L 032 , L01 , L 02 and L 03 are each independently preferably a single bond or a hydrocarbon group having 1 to 18 carbon atoms (-CH2- contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), more preferably a single bond or a hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), and are each independently preferably a single bond or a chain hydrocarbon group having 1 to 9 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-). is more preferable, a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), even more preferable, a single bond or an alkanediyl group having 1 to 4 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), and even more preferable, a single bond or an alkanediyl group having 1 to 3 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-). Among these, a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, a carbonyl group, a carbonyloxy group, a carbonyloxymethylene group, an ethyleneoxy group, an ethyleneoxymethylene group, a methylenecarbonyloxy group, a methylenecarbonyloxymethylene group, or an ethyleneoxycarbonyl group is preferred, and a single bond, a methylene group, or a carbonyl group is more preferred. A 1 , A 2 and A 3 S + The bond positions to the benzene ring to which each is bonded are independently selected from S + The bonding position may be either o-position, m-position or p-position. + More specifically, when m1, m2, and m3 are 1, A 1 , A 2 and A 3are each independently, S + Preferably, the bond is at the p-position or m-position relative to the bonding position of A, and more preferably at the p-position. 1 , A 2 and A 3 are each independently, S + With respect to the bonding positions of A, it is preferred that one is bonded to the o-position or the m-position, and one is bonded to the o-position or the m-position, and it is more preferred that two are bonded to the m-position. 1 , A 2 and A 3 are each independently, S + With respect to the bonding positions of A, it is preferred that two are bonded to the o- or m-position and one is bonded to the p- or m-position, and it is more preferred that two are bonded to the m-position and one is bonded to the p-position. 1 , A 2 and A 3 are each independently, S + With respect to the bonding positions of the above, it is preferred that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position, and it is more preferred that two are bonded to the o-position and two are bonded to the m-position. A 1 Ar 1 The bond position to Ar 1 The 1st, 2nd or 9th position is preferred, and the 1st or 2nd position is more preferred. 2 Ar 2 Binding position to A 3 Ar 3 The bonding position to A 1 Ar 1 The binding position is the same as that of m1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, even more preferably 1 or 2, and even more preferably 1. m2 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, even more preferably 0 or 1, and even more preferably 0. m3 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, even more preferably 0 or 1, and even more preferably 0. m4 is preferably 0, 1, 2, 3, 4 or 5, more preferably 0, 1, 2, 3 or 5, and even more preferably 0, 1, 2 or 3. m5 is preferably 0, 1, 2, 3, 4 or 5, more preferably 0, 1, 2, 3 or 5, and even more preferably 0, 1, 2 or 3. m6 is preferably 0, 1, 2, 3, 4 or 5, more preferably 0, 1, 2, 3 or 5, and even more preferably 0, 1, 2 or 3. m7 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. m8 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. m9 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. R 4 , R 5 and R 6are each independently preferably a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), more preferably a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), still more preferably a fluorine atom, iodine atom, bromine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), and even more preferably a fluorine atom, iodine atom, bromine atom, trifluoromethyl group, hydroxy group, methoxy group, methyl group, or t-butyl group. R 7 , R 8 and R 9 are each independently preferably a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), more preferably a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), still more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), and even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a hydroxy group, a methoxy group, a methyl group, or a t-butyl group. R 4 Ar 1 The bonding position to A is not particularly limited. 1 But, Ar 1 When the aryl group is bonded to the 1st or 2nd position of Ar 1 It is preferable that A is bonded to the 1st, 3rd, 4th, 5th and 7th positions of A 1 But, Ar 1When R is bonded to the 9-position, it is preferable that at least one of R is bonded to the 2-position, 3-position, or 4-position. 5 and R 6 and A 2 and A 3 Ar 2 and Ar 3 The bonding position to R 4 and A 1 Ar 1 The bond position is the same as that of R 4 , R 5 and R 6 Ar 1 , Ar 2 and Ar 3 At least one of the bonding positions to each of R 1 , R 2 and R 3 It is preferable that the .lambda. R 7 , R 8 and R 9 The bonding positions of each of the groups to the benzene ring are independently + In particular, when m7, m8, and m9 are 1, R 7 , R 8 and R 9 are each independently, S + When m7, m8, and m9 are each 2, R 7 , R 8 and R 9 are each independently, S + With respect to the bonding positions of m7, m8, and m9, it is preferred that one is bonded to the o-position or m-position and one is bonded to the p-position or m-position, and it is more preferred that one is bonded to the m-position and one is bonded to the p-position or m-position. 7 , R 8 and R 9 are each independently, S +With respect to the bonding positions of m7, m8, and m9, it is preferable that two of them are bonded to the o-position or m-position and one is bonded to the p-position or m-position, and it is more preferable that two of them are bonded to the m-position and one is bonded to the p-position. 7 , R 8 and R 9 are each independently, S + With respect to the bonding positions of the above, it is preferred that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position, and it is more preferred that two are bonded to the m-position, one is bonded to the o-position and one is bonded to the p-position. In another embodiment, one or more R 4 , R 5 and R 6 At least one of R may contain an acid labile group; 4 , R 5 , R 6 are each independently R 1 , R 2 , R 3 R may be a group similar to 1 -OR 10 In this case, one or two R 4 R 1 Same as -OR 10 Preferably, R 1 Ga-O-CO-OR 10 In this case, one or two R 4 R 1 Same as -O-CO-OR 10 Preferably, R 1 Ga-OL 10 -CO-OR 10 In this case, one or two R 4 R 1 Same as -OL 10 -CO-OR 10 It is preferable that R 2 and R 5 Combination of R 3 and R 6 For each combination of 1 and R 4 The combination is similar to that of

[0029] Ar 1 , Ar 2 and Ar 3 are each preferably independently naphthalene or anthracene. One preferred embodiment of the cation represented by formula (IC) is Ar 1 , Ar 2 and Ar 3 are naphthalene, and examples thereof include a cation represented by formula (IC-1) (hereinafter sometimes referred to as "cation (IC-1)"). TIFF2023160797000020.tif55160[In formula (IC-1), R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 , A 1 , A 2 , A 3 , m1, m2, m3, m4, m5, m6, m7, m8 and m9 have the same meanings as in formula (I).

[0030] Furthermore, the cation represented by formula (IC-1) includes a cation represented by formula (IC-2) (hereinafter, sometimes referred to as "cation (IC-2)"). TIFF2023160797000021.tif52164[Formula (IC-2), R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 , m1, m2, m3, m4, m5, m6, m7, m8 and m9 represent the same as in formula (I) and formula (IC-1). L 01 , L 02 , L 03 , X 01 , X 02 and X03 represents the same as above.] R 1 ~R 9 , m1~m9, A 1 ~A 3 , L 01 ~L 03 and X 01 ~X 03 have the same meanings as above, and examples similar to those mentioned above can be given.

[0031] Other preferred embodiments of the cation represented by formula (IC) include Ar 1 , Ar 2 and Ar 3 are naphthalene or anthracene, respectively, and a cation represented by formula (IC-3) (hereinafter sometimes referred to as "cation (IC-3)") is also included. TIFF2023160797000022.tif60159[In formula (IC-3), R 1 , R 2 , R 3 , R 7 , R 8 , R 9 , m1, m2, m3, m7, m8, m9, A 1 , A 2 and A 3 The symbols represent the same as in formula (I). R 4A , R 5A and R 6A each independently represents a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkyl group may be replaced with -O- or -CO-. m4A, m5A and m6A each independently represent 1, 2, 3, 4 or 5. m10, m11, and m12 each independently represent 0 or 1.] R 1 ~R 3 , R 7 ~R 9 , m1~m3, m7~m9, A 1 ~A 3have the same meanings as above, and examples similar to those mentioned above can be given. R 4A , R 5A and R 6A The halogen atom, the fluorinated alkyl group having 1 to 6 carbon atoms, and the alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced by -O- or -CO-) are the same as those in the above-mentioned R 4 ~R 5 Examples similar to those given above can be cited. m4A, m5A and m6A are each preferably independently 0, 1, 2, 3 or 5, and more preferably 0, 1, 2 or 3.

[0032] Examples of the cation of the salt (I) include cations represented by the following formulae (Ic-1) to (Ic-86). JPEG2023160797000023.jpg218164

[0033] TIFF2023160797000024.tif228158

[0034] TIFF2023160797000025.tif229158

[0035] TIFF2023160797000026.tif250157

[0036] TIFF2023160797000027.tif250162

[0037] JPEG2023160797000028.jpg191157

[0038] [Anion (I)] The anion (I) of the carboxylate represented by formula (I) is X 0 -COO - It is an anion represented by the formula: In formula (I), X 0Examples of the hydrocarbon group represented by the formula include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkyl groups, alkenyl groups, and alkynyl groups, and alicyclic hydrocarbon groups), aromatic hydrocarbon groups, and groups combining these. The -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-. In the hydrocarbon group, CO2 - The atom adjacent to is preferably a carbon atom, and in the aliphatic hydrocarbon group, CO - More preferably, the atom adjacent to is a carbon atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, a nonyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 9, even more preferably 1 to 6, and still more preferably 1 to 4. Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. Examples of the alkynyl group include an ethynyl group, a propynyl group, an isopropynyl group, a butynyl group, an isobutynyl group, a tert-butynyl group, a pentynyl group, a hexynyl group, an octynyl group, and a nonynyl group. Examples of groups in which -CH2- in a chain hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), a carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- in a methylene group is replaced by -S-), Sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (an alkyl alkylthio groups (groups in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl groups (groups in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkanediyloxy groups (groups in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl groups (groups in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO- substituted with -CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH- at any position is replaced with -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH-CH- at any position is replaced with -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which -CH- at any position is replaced with -SO-), and an alkanediylthio group (an alkanediyl group in which -CH- at any position is replaced with -S-). Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, a phenyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. Examples of the alkylthio group include alkylthio groups having 1 to 17 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 17 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. The alkanediyloxy group, alkanediyloxycarbonyl group, alkanediylcarbonyl group, alkanediylcarbonyloxy group, alkanediylsulfonyl group, and alkanediylthio group can be obtained by substituting one hydrogen atom at any position of an alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkylthio group, or alkylsulfonyl group with a bond. The substitution in the alkenyl group or alkynyl group may be any of the substitutions in the alkyl group exemplified above, as long as it contains a carbon-carbon double bond or a carbon-carbon triple bond at any position.

[0039] The alicyclic hydrocarbon group may be any of monocyclic, polycyclic, and spiro rings, and may be any of saturated and unsaturated. Examples of the alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl groups, polycyclic cycloalkyl groups such as norbornyl and adamantyl groups, and spiro rings having a cycloalkyl group, a norbornyl group, or an adamantyl group bonded to each other via a spiro bond. Examples of the alicyclic hydrocarbon group include the following groups: The bonding site can be any position. TIFF2023160797000029.tif77165 The alicyclic hydrocarbon group preferably has 3 to 36 carbon atoms, more preferably 3 to 24 carbon atoms, even more preferably 3 to 18 carbon atoms, still more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. Specific examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include the following groups: The bonding site can be at any position. TIFF2023160797000030.tif105165The alicyclic hydrocarbon group is preferably a group represented by any one of formulas (y1) to (y11), (y44) to (y48), and (y59) to (y61), and more preferably a group represented by formula (y3), (y4), (y9), or (y11). As the group in which -CH2- in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2-, a group represented by any of formulas (y12) to (y20), (y26), (y27), (y30), (y31), (y39) to (y43), and (y49) to (y71) is preferred, and a group represented by any of formulas (y14), (y15), (y16), (y20), (y26), (y27), (y30), (y31), (y39), (y40), (y42), (y43), (y49) to (y58), and (y62) to (y71) is more preferred.

[0040] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 36, more preferably 6 to 24, still more preferably 6 to 18, even more preferably 6 to 14, and still more preferably 6 to 10. In the case of a combined group, the above groups may contain groups with different valences (such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, a cycloalkanediyl group, a cycloalkanetriyl group, or a cycloalkanetetrayl group).

[0041] The combined groups are: a group comprising a combination of an alicyclic hydrocarbon group and a chain hydrocarbon group (wherein —CH— contained in the chain hydrocarbon group or the alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—); a group comprising a combination of a chain hydrocarbon group and an aromatic hydrocarbon group (wherein -CH2- in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), and It represents a group formed by combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-). In addition, in the combination, two or more types of each of the alicyclic hydrocarbon group, the chain hydrocarbon group and the aromatic hydrocarbon group may be combined. Specifically, the combined groups include: Alicyclic hydrocarbon groups such as an adamantylmethylene group and a cyclohexylmethylene group - chain hydrocarbon group-*, (alicyclic hydrocarbon group)2-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), Chain hydrocarbon groups-alicyclic hydrocarbon groups-* such as methyladamantyl group and dimethyladamantyl group, (chain hydrocarbon group)2-alicyclic hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), a chain hydrocarbon group such as a tolyl group or a xylyl group - an aromatic hydrocarbon group -* (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-); chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-* such as a methylcyclohexylmethylene group, (chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), an aromatic hydrocarbon group such as a benzyl group - a chain hydrocarbon group -* (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-); a chain hydrocarbon group such as a tolylmethyl group-aromatic hydrocarbon group-chain hydrocarbon group-* (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-*, such as methyladamantanemethyleneadamantyl group and di(methyladamantanemethylene)adamantyl group, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-alicyclic hydrocarbon group-*, (chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), Alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (alicyclic hydrocarbon group)2-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (alicyclic hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), Here, * indicates the bonding site with the carbon atom of the carbonyl group.

[0042] X 0 When -CH2- in the hydrocarbon group represented by the formula (I) is replaced by -O-, -S-, -CO- or -SO2-, the number of carbon atoms before the replacement is the total number of carbon atoms in the hydrocarbon group. 0When a substituent is bonded to a hydrocarbon group represented by the formula: Figure imgf000012_0001, the number of carbon atoms before substitution is the total number of carbon atoms in the hydrocarbon group. X 0 The hydrocarbon group represented by the formula (I) may have one or more substituents. Examples of the substituent include a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a group combining these. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, and a nonyl group. Examples of the alkoxy group having 1 to 12 carbon atoms include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, and a dodecyloxy group. The alkoxycarbonyl group having 2 to 13 carbon atoms, the alkylcarbonyl group having 2 to 13 carbon atoms, and the alkylcarbonyloxy group having 2 to 13 carbon atoms represent groups in which a carbonyl group or a carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group. Examples of the alkoxycarbonyl group having 2 to 13 carbon atoms include a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group having 2 to 13 carbon atoms include an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group having 2 to 13 carbon atoms include an acetyloxy group, a propionyloxy group, and a butyryloxy group. Examples of the alicyclic hydrocarbon group having 3 to 12 carbon atoms include the groups shown below. ** indicates X 0 represents the binding site with TIFF2023160797000031.tif17162 Examples of aromatic hydrocarbon groups having 6 to 10 carbon atoms include aryl groups such as phenyl and naphthyl groups. Examples of the combined group include a group combining a hydroxy group with an alkyl group having 1 to 12 carbon atoms, a group combining an alkyl group having 1 to 12 carbon atoms with an aromatic hydrocarbon group having 6 to 10 carbon atoms, a group combining an alicyclic hydrocarbon group having 3 to 12 carbon atoms with an aromatic hydrocarbon group having 6 to 10 carbon atoms, and a group combining a halogen atom with an alkyl group having 1 to 12 carbon atoms. Examples of the group combining a hydroxy group with an alkyl group having 1 to 12 carbon atoms include hydroxyalkyl groups having 1 to 12 carbon atoms, such as a hydroxymethyl group and a hydroxyethyl group. Examples of the group combining an alkyl group having 1 to 12 carbon atoms with an aromatic hydrocarbon group having 6 to 10 carbon atoms include aralkyl groups having 7 to 22 carbon atoms such as a benzyl group, and alkylaryl groups having 7 to 22 carbon atoms such as a tolyl group and a xylyl group. Examples of the group formed by combining an alicyclic hydrocarbon group having 3 to 12 carbon atoms with an aromatic hydrocarbon group having 6 to 10 carbon atoms include a cyclohexylphenyl group. Examples of the group in which a halogen atom is combined with an alkyl group having 1 to 12 carbon atoms include perfluoroalkyl groups having 1 to 12 carbon atoms, such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group.

[0043] X 0 The hydrocarbon group represented by formula (aa) is preferably an aliphatic hydrocarbon group having 1 to 72 carbon atoms which may have a substituent (-CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent, a group represented by formula (aa) or a group represented by formula (bb), More preferred are fluorine atoms, alkyl groups having 1 to 4 carbon atoms, perfluoroalkyl groups having 1 to 4 carbon atoms, and alicyclic hydrocarbon groups which may have a hydroxy group (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-), groups combining alicyclic hydrocarbon groups with chain hydrocarbon groups (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group), fluorine atoms, alkyl groups having 1 to 4 carbon atoms, perfluoroalkyl groups having 1 to 4 carbon atoms, or an aromatic hydrocarbon group which may have a hydroxy group, a group represented by formula (aa) or a group represented by formula (bb), More preferably, * represents an alicyclic hydrocarbon group (wherein —CH— contained in the alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—, and the alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group. * represents —COO - represents a bonding site with a carbon atom of the formula (I), *-alicyclic hydrocarbon group-chain hydrocarbon group (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (I), *-chain hydrocarbon group-alicyclic hydrocarbon group (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and the chain hydrocarbon group and the alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group. * represents -COO -represents a bonding site with a carbon atom of the formula (aa), a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or an aromatic hydrocarbon group which may have a hydroxy group, a group represented by formula (aa) or a group represented by formula (bb), More preferably, * represents a polycyclic alicyclic hydrocarbon group (wherein —CH— contained in the polycyclic alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—, and the polycyclic alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group). * represents —COO - represents a bonding site with a carbon atom of the formula (I), *-polycyclic alicyclic hydrocarbon group-chain hydrocarbon group (-CH2- contained in the polycyclic alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the polycyclic alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (I), *-chain hydrocarbon group-polycyclic alicyclic hydrocarbon group (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and -CH2- contained in the polycyclic alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-, and the chain hydrocarbon group and the polycyclic alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (aa), a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or an aromatic hydrocarbon group which may have a hydroxy group, a group represented by formula (aa) or a group represented by formula (bb), Particularly preferred are an adamantyl group, an adamantanone group, a hydroxyadamantyl group, a group combining an adamantyl group with an alkyl group (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), a group represented by formula (Y30F), a phenyl group having a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group, a group represented by formula (aa), or a group represented by formula (bb). In the above groups, the alicyclic hydrocarbon group has preferably 3 to 36 carbon atoms, more preferably 3 to 24, even more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. The chain hydrocarbon group has preferably 1 to 18 carbon atoms, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, and even more preferably 1 to 4. The aromatic hydrocarbon group has preferably 6 to 36 carbon atoms, more preferably 6 to 24, even more preferably 6 to 18, still more preferably 6 to 14, and even more preferably 6 to 10. TIFF2023160797000032.tif27136[In formula (aa), X a and X b each independently represents -O- or -S-. X 1a represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. X 2a represents a hydrocarbon group having 1 to 48 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * -COO - represents the bonding site with the carbon atom of [In formula (bb), L A represents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom, or an aromatic hydrocarbon group having 6 to 14 carbon atoms which may have a halogen atom or a perfluoroalkyl group having 1 to 4 carbon atoms. L B represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -S-, -CO- or -SO2-. R Arepresents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * -COO - represents the bonding site with the carbon atom of

[0044] X a and X b are preferably the same atom, and more preferably both are oxygen atoms.

[0045] X 1a and X 2a Examples of the hydrocarbon group represented by the formula (I) include an aliphatic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these. These hydrocarbon groups may have a substituent. Furthermore, -CH2- contained in these hydrocarbon groups may be replaced with -O-, -S-, -CO-, or -SO2-. Here, the number of carbon atoms in the hydrocarbon group refers to the number of carbon atoms in the unsubstituted hydrocarbon group that does not have a substituent.

[0046] X 1a Examples of the aliphatic hydrocarbon group include chain hydrocarbon groups such as alkanetriyl groups, alicyclic hydrocarbon groups, and combinations thereof. Specific examples of the alkanetriyl group include a methine group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, and a dodecanetriyl group.

[0047] The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclobutanetriyl group, a cyclopentanetriyl group, a cyclohexanetriyl group, and a cyclooctanetriyl group. Examples of the polycyclic alicyclic hydrocarbon group include a norbornanetriyl group and an adamantanetriyl group. Examples of the aromatic hydrocarbon group include a benzenetriyl group, a naphthalenetriyl group, and an anthracenetriyl group. In the case of a combined group, the above groups may contain groups with different valences (such as an alkyl group, an alkanediyl group, an alkanetetrayl group, a cycloalkyl group, a cycloalkanediyl group, or a cycloalkanetetrayl group).

[0048] X 1a The hydrocarbon group represented by the formula (I) has 1 to 24 carbon atoms and may further have one or more substituents. Examples of the substituents include a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a group combining these. Examples of the halogen atom, alkyl group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof include the same groups as those described above.

[0049] X 1a The hydrocarbon group represented by the formula (w1-3) is preferably an alkanetriyl group having 1 to 6 carbon atoms which may have a substituent or an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, more preferably an alkanetriyl group having 1 to 6 carbon atoms or a group represented by any of formulas (w1-1) to (w1-11), and even more preferably an alkanetriyl group having 1 to 6 carbon atoms, a polycyclic hydrocarbon group such as a group represented by formula (w1-1) or a group represented by formula (w1-3), or a monocyclic hydrocarbon group such as a group represented by formula (w1-2) or a group represented by formula (w1-6). TIFF2023160797000033.tif49145 [Formula (w1-1) to formula (w1-11), The ring may have a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a combination thereof. * denotes a binding site.]

[0050] X 2a The hydrocarbon group represented by the formula (I) preferably has 2 to 48 carbon atoms, more preferably 4 to 48 carbon atoms, even more preferably 6 to 44 carbon atoms, even more preferably 8 to 40 carbon atoms, and even more preferably 10 to 38 carbon atoms.

[0051] X 2a Examples of the substituent that the hydrocarbon group in the formula (I) may have include a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a group combining these. Examples of the halogen atom, alkyl group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof include the same groups as those described above. X 2a The hydrocarbon group having 1 to 48 carbon atoms represented by the following formula may have one or more substituents. X 2a The substituent that the hydrocarbon group in the formula (I) may have is preferably a fluorine atom, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group.

[0052] X 2aExamples of the hydrocarbon group in include linear or branched chain hydrocarbon groups (for example, alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be a combination of two or more of these groups. Specific examples include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, and an octane-1,8-diyl group; branched alkanediyl groups such as ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl; monocyclic alicyclic hydrocarbon groups such as monocyclic cycloalkanediyl groups, such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; polycyclic alicyclic hydrocarbon groups such as polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl; Examples of the aromatic hydrocarbon groups include a phenylene group, a naphthylene group, a biphenylene group, an anthrylene group, a phenanthrylene group, and a binaphthylene group. In the case of a combined group, the above groups may contain groups with different valences (such as an alkyl group, an alkanetriyl group, an alkanetetrayl group, a cycloalkyl group, a cycloalkanetriyl group, or a cycloalkanetetrayl group). Examples of the combined group include a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are combined, a group in which a chain hydrocarbon group and an aromatic hydrocarbon group are combined, and a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are combined. Specific examples include a group in which one or more alicyclic hydrocarbon groups are bonded to a chain hydrocarbon group (e.g., -chain hydrocarbon group-alicyclic hydrocarbon group, -chain hydrocarbon group-(alicyclic hydrocarbon group)2, etc.), a group in which one or more chain hydrocarbon groups are bonded to an alicyclic hydrocarbon group (e.g., -alicyclic hydrocarbon group-chain hydrocarbon group, -alicyclic hydrocarbon group-(chain hydrocarbon group)2, etc.), and a group in which one or more alicyclic hydrocarbon groups and chain hydrocarbon groups are bonded to a chain hydrocarbon group (e.g., -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group, -chain hydrocarbon group-(alicyclic hydrocarbon group-chain hydrocarbon group)2, etc.).

[0053] X 2a The hydrocarbon group in a chain hydrocarbon group having 2 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent); an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and the alicyclic hydrocarbon group may have a substituent), or It is preferably a group (which may have a substituent) comprising a combination of a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), a chain hydrocarbon group having 4 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent), or It is more preferable that the group is a combination of a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 16 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-) (the group may have a substituent), a chain hydrocarbon group having 6 to 14 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent), or More preferably, it is a group (which may have a substituent) that combines a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) with an alicyclic hydrocarbon group having 5 to 14 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-).

[0054] Specifically, X 2a Examples of the hydrocarbon group in an alkanediyl group having 2 to 18 carbon atoms (-CH- contained in the alkanediyl group may be replaced by -O- or -CO-, and the alkanediyl group may have a substituent); an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and the alicyclic hydrocarbon group may have a substituent); a group consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-) (the group may have a substituent), or It is preferably a group (which may have a substituent) consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), an alkanediyl group having 4 to 18 carbon atoms (-CH- contained in the alkanediyl group may be replaced by -O- or -CO-, and the alkanediyl group may have a substituent); a group consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 16 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-) (the group may have a substituent), or It is more preferable that the alkyl group is an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 16 carbon atoms, and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and the alkyl group may have a substituent. an alkanediyl group having 6 to 14 carbon atoms (wherein —CH— contained in the alkanediyl group may be replaced by —O— or —CO—, and the alkanediyl group may have a substituent); a group consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an adamantanediyl group (-CH2- contained in the adamantanediyl group may be replaced with -O- or -CO-) (the group may have a substituent), or More preferred are groups (which may have a substituent) consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an adamantanediyl group and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-).

[0055] More specifically, X 2a is the formula (X 2 -1), a group represented by the formula (X 2 -2), a group represented by the formula (X 2 -3) or a group represented by the formula (X 2 -4) is preferred. TIFF2023160797000034.tif33158[In the formula, R 1x , R 2x , R 3x , R 4x , R 5x and R 6x each independently represents an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group combining two or more of these groups, and -CH2- contained in the alkyl group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-, and the alkyl group and the alicyclic hydrocarbon group may have a substituent. * is X a and X b represents the binding site with The combined group may be a combination of one alkyl group and one alicyclic hydrocarbon group described above, or two or more of either one or two or more of both. In this case, the number of carbon atoms in the combined group is 39 or less, and preferably 37 or less.

[0056] Among them, R 1x , R 2x , R 3x , R 4x , R 5x and R 6xExamples thereof include an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-, and the alkyl group may have a substituent), an alicyclic hydrocarbon group having 5 to 12 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-, and the alicyclic hydrocarbon group may have a substituent), or a combination of an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 5 to 12 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group and more preferably a group (which may have a substituent) combining a methoxy group, an adamantyl group (wherein —CH— may be replaced by —O— or —CO— and the adamantyl group may have a substituent), or an alkyl group having 1 to 6 carbon atoms (wherein —CH— may be replaced by —O— or —CO—). The group represented by formula (aa) is more preferably a group represented by any one of the following formulas (aa1), (aa2), (aa3) and (aa4). TIFF2023160797000035.tif32155 [Formula (aa1) to formula (aa4), W 1a represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms. X a and X b each independently represents -O- or -S-. R 1x , R 2x , R 3x , R 4x , R 5x , R 6x are each independently a group of the formula (X 2 -1), formula (X 2 -2), formula (X 2 -3) and the formula (X 2 -4) has the same meaning. * -COO - represents the bonding site with the carbon atom of In formulas (aa1) to (aa4), W 1a The alicyclic hydrocarbon group is more preferably a group represented by formula (w1-1) to formula (w1-11), and even more preferably a polycyclic hydrocarbon group such as a group represented by formula (w1-1) or a group represented by formula (w1-3), or a monocyclic hydrocarbon group such as a group represented by formula (w1-2) or a group represented by formula (w1-6).

[0057] In formula (bb), L A and L B Examples of the alkanediyl group having 1 to 6 carbon atoms include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl; and branched alkanediyl groups such as propane-1,2-diyl, 1-methylpropane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 4, and more preferably 1 to 3. Examples of the alkanediyl group which may have a fluorine atom include perfluoroalkanediyl groups such as a difluoromethylene group, a perfluoroethylene group, a perfluoropropanediyl group, a perfluorobutanediyl group, and a perfluoropentanediyl group. When -CH2- in the alkanediyl group is replaced with -O-, -S-, -CO- or -SO2-, the number of carbon atoms before replacement is defined as the total number of carbon atoms in the alkanediyl group. The alkanediyl group includes a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), an alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), an alkylsulfonyl group ( an alkanediyloxy group (an alkanediyl group in which any -CH2- at any position is replaced with -SO2-), an alkanediylthio group (an alkanediyl group in which any -CH2- at any position is replaced with -S-), an alkanediylsulfonyl group (an alkanediyl group in which any -CH2- at any position is replaced with -SO2-), an alkanediyloxy group (an alkanediyl group in which any -CH2- at any position is replaced with -O ...thio group (an alkanediyl group in which any -CH2- at any position is replaced with -S-), an alkanediylsulfonyl group (an alkanediyl group in which any -CH2- at any position is replaced with -SO2-), an alkanediylthio group (an alkanediyl group in which any -CH2- at any position is replaced with -S-), an alkanediylsulfonyl group (an alkanediyl group in which any -CH2- at any position is replaced with -SO2-), an alkanediylthio group (an alkanediylthio group in which any -CH2- at any position is replaced with -S-), an alkanediylsulfonyl group (an alkanediyl group in which any -CH2- at group), an alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -CO-), or an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -CO-O-). Examples of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkylthio group and alkylsulfonyl group are the same as those mentioned above. Examples of the alkanediyloxy group include a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, and a pentanediyloxy group. Examples of the alkanediylthio group include a methylenethio group, an ethylenethio group, a propanediylthio group, a butanediylthio group, and a pentanediylthio group. Examples of the alkanediylsulfonyl group include a methylenesulfonyl group, an ethylenesulfonyl group, a propanediylsulfonyl group, a butanediylsulfonyl group, and a pentanediylsulfonyl group. Examples of the alkanediyloxycarbonyl group include a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. L A Examples of the aromatic hydrocarbon group having 6 to 14 carbon atoms include aromatic hydrocarbon groups such as arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 10, and more preferably 6. L A Examples of the halogen atom that may be contained in include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L A Examples of the perfluoroalkyl group having 1 to 4 carbon atoms that may be contained in the aryloxy group include a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group. L Ais preferably an alkanediyl group having 1 to 4 carbon atoms which may have a fluorine atom, or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a halogen atom or a perfluoroalkyl group having 1 to 4 carbon atoms, and more preferably an alkanediyl group having 1 to 3 carbon atoms which may have a fluorine atom, or a phenylene group which may have a fluorine atom, an iodine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms. L B is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), and more preferably a single bond, a methylene group or an ethylene group.

[0058] R A Examples of the hydrocarbon group in include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkyl groups, alkenyl groups, and alkynyl groups, and alicyclic hydrocarbon groups), aromatic hydrocarbon groups, and groups formed by combining these. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, a 2-ethylhexyl group, an n-octyl group, an n-nonyl group, an n-decyl group, an n-undecyl group, an n-dodecyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, and even more preferably 1 to 4. Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. Examples of the alkynyl group include an ethynyl group, a propynyl group, an isopropynyl group, a butynyl group, an isobutynyl group, a tert-butynyl group, a pentynyl group, a hexynyl group, an octynyl group, and a nonynyl group. Examples of groups in which -CH2- in a chain hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkylsulfonyl group, and an alkylthio group. Examples of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkylsulfonyl group and alkylthio group include an alkoxy group having 1 to 17 carbon atoms, an alkoxycarbonyl group having 2 to 17 carbon atoms, an alkylcarbonyl group having 2 to 18 carbon atoms, an alkylcarbonyloxy group having 2 to 17 carbon atoms, an alkylsulfonyl group having 1 to 17 carbon atoms and an alkylthio group having 1 to 17 carbon atoms, and examples thereof include the same groups as those described above. The alicyclic hydrocarbon group may be monocyclic, polycyclic, or spirocyclic, and may be saturated or unsaturated. Examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl. Specific examples of the alicyclic hydrocarbon group and the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include groups represented by the above formulae (y1) to (y71). The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 36, more preferably 3 to 24, even more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 36, more preferably 6 to 24, still more preferably 6 to 18, even more preferably 6 to 14, and still more preferably 6 to 10. In the case of a combined group, the above groups may contain groups with different valences (such as an alkanediyl group, an alkanetriyl group, a cycloalkanediyl group, or a cycloalkanetriyl group). Groups formed by combination include groups combining an aromatic hydrocarbon group with a chain hydrocarbon group (e.g., aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*), groups combining an alicyclic hydrocarbon group with a chain hydrocarbon group (e.g., alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*), and groups combining an aromatic hydrocarbon group with a alicyclic hydrocarbon group (e.g., aromatic hydrocarbon group-alicyclic hydrocarbon group-*, alicyclic hydrocarbon group-aromatic hydrocarbon group-*). * represents a bonding site. The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group. Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as a cyclohexylmethyl group, a cyclohexylethyl group, a 1-(adamantan-1-yl)methyl group, and a 1-(adamantan-1-yl)-1-methylethyl group. Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group. Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenyladamantyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include an adamantylphenyl group. In the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. B may be bound to In addition to the groups mentioned above, examples of groups in which -CH2- in a hydrocarbon group is replaced with -O-, -S-, -CO-, or -SO2- include cycloalkoxy groups, cycloalkylalkoxy groups, alkoxycarbonyloxy groups, aromatic hydrocarbon group-carbonyloxy groups, and groups in which two or more of these groups are combined. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as a benzoyloxy group. When a -CH2- in a hydrocarbon group is replaced with -O-, -S-, -SO2-, or -CO-, the total number of carbon atoms in the hydrocarbon group is the number of carbon atoms before the replacement, which may be 1 or 2 or more.

[0059] R A Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O-, -S-, -CO- or -SO2-). Examples of the halogen atom include the same groups as those mentioned above. Examples of the alkyl group having 1 to 12 carbon atoms include the same groups as those mentioned above. Examples of groups in which -CH2- in an alkyl group is replaced with -O- or -CO- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, and an alkylcarbonyloxy group. Examples of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group include alkoxy groups having 1 to 11 carbon atoms, alkoxycarbonyl groups having 2 to 11 carbon atoms, alkylcarbonyl groups having 2 to 12 carbon atoms, and alkylcarbonyloxy groups having 2 to 11 carbon atoms, and include, for example, the same groups as those described above. R A The hydrocarbon group in may have one or more substituents.

[0060] R A The hydrocarbon group in is preferably an alkyl group having 1 to 12 carbon atoms which may have a substituent (provided that -CH2- contained in the alkyl group may be replaced with -O-, -S-, -CO- or -SO2-), or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), and is preferably a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-).

[0061] Examples of the cyclic hydrocarbon group include monocyclic or polycyclic alicyclic hydrocarbon groups having 3 to 18 carbon atoms and aromatic hydrocarbon groups having 6 to 18 carbon atoms, as well as combinations of these groups. Examples of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and combined group include the same groups as those described above. In the combination, two or more types of alicyclic hydrocarbon groups and two or more types of aromatic hydrocarbon groups may be combined. B may be bound to

[0062] A cyclic hydrocarbon group having 3 to 18 carbon atoms (the cyclic hydrocarbon group may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-) is an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, or a perfluoroalkyl group having 1 to 4 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-), or It is preferably an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms or a perfluoroalkyl group having 1 to 4 carbon atoms. The group represented by formula (bb) is more preferably a group represented by formula (bb1). TIFF2023160797000036.tif1583[In formula (bb1), L A and L B has the same meaning as formula (bb). W 1a represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, which may have a fluorine atom, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * -COO - represents the bonding site with the carbon atom of In equation (bb1), W 1a is more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms or a perfluoroalkyl group having 1 to 4 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO- or -SO2-). In equation (bb1), W 1aThe alicyclic hydrocarbon group is preferably a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a norbornyl group, an adamantyl group, or the following groups (the bonding site may be at any position): TIFF2023160797000037.tif1687

[0063] Examples of the carboxylate anion in the carboxylate salt represented by formula (I) include the carboxylate anions described below. TIFF2023160797000038.tif211162

[0064] TIFF2023160797000039.tif218162

[0065] TIFF2023160797000040.tif253157

[0066] TIFF2023160797000041.tif91157

[0067] Specific examples of the carboxylate (I) include salts of any combination of the above-mentioned cations and anions. Specific examples of the carboxylate (I) are shown in the table below. In the table below, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation, and "~" indicates that the carboxylate (I) corresponds to the anion (I) or cation (I), respectively. For example, the carboxylate (I-1) is a salt consisting of an anion represented by formula (Ia-1) and a cation represented by formula (Ic-1), the carboxylate (I-2) is a salt consisting of an anion represented by formula (Ia-2) and a cation represented by formula (Ic-1), and the carboxylate (I-101) is a salt consisting of an anion represented by formula (Ia-1) and a cation represented by formula (Ic-2). TIFF2023160797000042.tif5868 [Table 1] TIFF2023160797000044.tif249158

[0068] Among these, the carboxylate (I) is preferably a salt obtained by combining an anion represented by any one of formulas (Ia-1) to (Ia-5), (Ia-10) to (Ia-21), and (Ia-57) to (Ia-66) with a cation represented by any one of formulas (Ic-1) to (Ic-86). Specifically, carboxylate (I-1) to (I-5), carboxylate (I-10) to (I-21), carboxylate (I-57) to (I-66), carboxylate (I-101) to (I-105), carboxylate (I-106) to (I-107), carboxylate (I-108) to (I-109), carboxylate (I-110) to (I-1110), carboxylate (I-111) to (I-112) and carboxylate (I-113) are preferred. Carboxylate (I-110) to Carboxylate (I-121), Carboxylate (I-157) to Carboxylate (I-166), Carboxylate (I-201) to Carboxylate (I-205), Carboxylate (I-210) to Carboxylate (I-221), Carboxylate (I-257) to Carboxylate (I-266), Carboxylate (I-301) to Carboxylate (I-305), Carboxylate (I-310) to Carboxylate (I-321), Carboxylate (I-357) to Carboxylate (I-366), Carboxylate (I-401) to Carboxylate Salt (I-405), Carboxylate (I-410) to Carboxylate (I-421), Carboxylate (I-457) to Carboxylate (I-466), Carboxylate (I-501) to Carboxylate (I-505), Carboxylate (I-510) to Carboxylate (I-521), Carboxylate (I-557) to Carboxylate (I-566), Carboxylate (I-601) to Carboxylate (I-605), Carboxylate (I-610) to Carboxylate (I-621), Carboxylate (I-657) to Carboxylate (I-666), Carboxylate (I- 701) ~ Carboxylic Acid Salt (I-705), Carboxylic Acid Salt (I-710) ~ Carboxylic Acid Salt (I-721), Carboxylic Acid Salt (I-757) ~ Carboxylic Acid Salt (I-766), Carboxylic Acid Salt (I-801) ~ Carboxylic Acid Salt (I-805), Carboxylic Acid Salt (I-810) ~ Carboxylic Acid Salt (I-821), Carboxylic Acid Salt (I-857) ~ Carboxylic Acid Salt (I-866), Carboxylic Acid Salt (I-901) ~ Carboxylic Acid Salt (I-905), Carboxylic Acid Salt (I-910) ~ Carboxylic Acid Salt (I-921), Carboxylic Acid Salt (I-957) ~ Carboxylic Acid Salt (I-966),Carboxylate (I-1001) ~ Carboxylate (I-1005), Carboxylate (I-1010) ~ Carboxylate (I-1021), Carboxylate (I-1057) ~ Carboxylate (I-1066), Carboxylate (I-1101) ~ Carboxylate (I-1105), Carboxylate (I-1110) ~ Carboxylate (I-1121), Carboxylate (I-1157) ~ Carboxylate (I-1166), Carboxylate (I-1201) ~ Carboxylate (I-1205), Carboxylate (I-1210) ~ Carboxylate (I-1221), Carboxylate ( I-1257) ~ Carboxylate (I-1266), I-1301) ~ Carboxylate (I-1305), I-1310) ~ Carboxylate (I-1321), I-1357 ~ Carboxylate (I-1366), I-1401) ~ Carboxylate (I-1405), I-1410) ~ Carboxylate (I-1421), I-1457 ~ Carboxylate (I-1466), I-1501) ~ Carboxylate (I-1505), I-1510 ~ Carboxylate (I-1521), Carboxylate (I-1557) to Carboxylate (I-1566), Carboxylate (I-1601) to Carboxylate (I-1605), Carboxylate (I-1610) to Carboxylate (I-1621), Carboxylate (I-1657) to Carboxylate (I-1666), Carboxylate (I-1701) to Carboxylate (I-1705), Carboxylate (I-1710) to Carboxylate (I-1721), Carboxylate (I-1757) to Carboxylate (I-1766), Carboxylate (I-1801) to Carboxylate ( I-1805, Carboxylate (I-1810) ~ Carboxylate (I-1821), Carboxylate (I-1857) ~ Carboxylate (I-1866), Carboxylate (I-1901) ~ Carboxylate (I-1905), Carboxylate (I-1910) ~ Carboxylate (I-1921), Carboxylate (I-1957) ~ Carboxylate (I-1966), Carboxylate (I-2001) ~ Carboxylate (I-2005), Carboxylate (I-2010) ~ Carboxylate (I-2021), Carboxylate (I-2057) ~ Carboxylate (I-2066),Carboxylate (I-2101) ~ Carboxylate (I-2105), Carboxylate (I-2110) ~ Carboxylate (I-2121), Carboxylate (I-2157) ~ Carboxylate (I-2166), Carboxylate (I-2201) ~ Carboxylate (I-2205), Carboxylate (I-2210) ~ Carboxylate (I-2221), Carboxylate (I-2257) ~ Carboxylate (I-2266), Carboxylate (I-2301) ~ Carboxylate (I-2305), Carboxylate (I-2310) ~ Carboxylate (I-2321), Carboxylate ( Carboxylate (I-2357) ~ Carboxylate (I-2366), Carboxylate (I-2401) ~ Carboxylate (I-2405), Carboxylate (I-2410) ~ Carboxylate (I-2421), Carboxylate (I-2457) ~ Carboxylate (I-2466), Carboxylate (I-2501) ~ Carboxylate (I-2505), Carboxylate (I-2510) ~ Carboxylate (I-2521), Carboxylate (I-2557) ~ Carboxylate (I-2566), Carboxylate (I-2601) ~ Carboxylate (I-2605), Carboxylate (I-2610) ~ Carboxylate (I-2621), Carboxylate (I-2657) to Carboxylate (I-2666), Carboxylate (I-2701) to Carboxylate (I-2705), Carboxylate (I-2710) to Carboxylate (I-2721), Carboxylate (I-2757) to Carboxylate (I-2766), Carboxylate (I-2801) to Carboxylate (I-2805), Carboxylate (I-2810) to Carboxylate (I-2821), Carboxylate (I-2857) to Carboxylate (I-2866), Carboxylate (I-2901) to Carboxylate ( I-2905, Carboxylate (I-2910) ~ Carboxylate (I-2921), Carboxylate (I-2957) ~ Carboxylate (I-2966), Carboxylate (I-3001) ~ Carboxylate (I-3005), Carboxylate (I-3010) ~ Carboxylate (I-3021), Carboxylate (I-3057) ~ Carboxylate (I-3066), Carboxylate (I-3101) ~ Carboxylate (I-3105), Carboxylate (I-3110) ~ Carboxylate (I-3121), Carboxylate (I-3157) ~ Carboxylate (I-3166),Carboxylate (I-3201) to Carboxylate (I-3205), Carboxylate (I-3210) to Carboxylate (I-3221), Carboxylate (I-3257) to Carboxylate (I-3266), Carboxylate (I-3301) to Carboxylate (I-3305), Carboxylate (I-3310) to Carboxylate (I-3321), Carboxylate (I-3357) to Carboxylate (I-3366), Carboxylate (I-3401) to Carboxylate (I-3405), Carboxylate (I-3410) to Carboxylate (I-3421), Carboxylate ( I-3457) ~ Carboxylic Acid Salt (I-3466), I-3501) ~ Carboxylic Acid Salt (I-3505), I-3510) ~ Carboxylic Acid Salt (I-3521), I-3557) ~ Carboxylic Acid Salt (I-3566), I-3601) ~ Carboxylic Acid Salt (I-3605), I-3610) ~ Carboxylic Acid Salt (I-3621), I-3657) ~ Carboxylic Acid Salt (I-3666), I-3701) ~ Carboxylic Acid Salt (I-3705), I-3710) ~ Carboxylate (I-3721), Carboxylate (I-3757) to Carboxylate (I-3766), Carboxylate (I-3801) to Carboxylate (I-3805), Carboxylate (I-3810) to Carboxylate (I-3821), Carboxylate (I-3857) to Carboxylate (I-3866), Carboxylate (I-3901) to Carboxylate (I-3905), Carboxylate (I-3910) to Carboxylate (I-3921), Carboxylate (I-3957) to Carboxylate (I-3966), Carboxylate (I-4001) to Carboxylate ( I-4005), Carboxylic Acid Salt (I-4010) ~ Carboxylic Acid Salt (I-4021), Carboxylic Acid Salt (I-4057) ~ Carboxylic Acid Salt (I-4066), Carboxylic Acid Salt (I-4101) ~ Carboxylic Acid Salt (I-4105), Carboxylic Acid Salt (I-4110) ~ Carboxylic Acid Salt (I-4121), Carboxylic Acid Salt (I-4157) ~ Carboxylic Acid Salt (I-4166), Carboxylic Acid Salt (I-4201) ~ Carboxylic Acid Salt (I-4205), Carboxylic Acid Salt (I-4210) ~ Carboxylic Acid Salt (I-4221), Carboxylic Acid Salt (I-4257) ~ Carboxylic Acid Salt (I-4266),Carboxylate (I-4301) ~ Carboxylate (I-4305), Carboxylate (I-4310) ~ Carboxylate (I-4321), Carboxylate (I-4357) ~ Carboxylate (I-4366), Carboxylate (I-4401) ~ Carboxylate (I-4405), Carboxylate (I-4410) ~ Carboxylate (I-4421), Carboxylate (I-4457) ~ Carboxylate (I-4466), Carboxylate (I-4501) ~ Carboxylate (I-4505), Carboxylate (I-4510) ~ Carboxylate (I-4521), Carboxylate ( Carboxylate (I-4557) ~ Carboxylate (I-4566), Carboxylate (I-4601) ~ Carboxylate (I-4605), Carboxylate (I-4610) ~ Carboxylate (I-4621), Carboxylate (I-4657) ~ Carboxylate (I-4666), Carboxylate (I-4701) ~ Carboxylate (I-4705), Carboxylate (I-4710) ~ Carboxylate (I-4721), Carboxylate (I-4757) ~ Carboxylate (I-4766), Carboxylate (I-4801) ~ Carboxylate (I-4805), Carboxylate (I-4810) ~ Carboxylate (I-4821), Carboxylate (I-4857) to Carboxylate (I-4866), Carboxylate (I-4901) to Carboxylate (I-4905), Carboxylate (I-4910) to Carboxylate (I-4921), Carboxylate (I-4957) to Carboxylate (I-4966), Carboxylate (I-5001) to Carboxylate (I-5005), Carboxylate (I-5010) to Carboxylate (I-5021), Carboxylate (I-5057) to Carboxylate (I-5066), Carboxylate (I-5101) to Carboxylate ( I-5105, Carboxylate (I-5110) ~ Carboxylate (I-5121), Carboxylate (I-5157) ~ Carboxylate (I-5166), Carboxylate (I-5201) ~ Carboxylate (I-5205), Carboxylate (I-5210) ~ Carboxylate (I-5221), Carboxylate (I-5257) ~ Carboxylate (I-5266), Carboxylate (I-5301) ~ Carboxylate (I-5305), Carboxylate (I-5310) ~ Carboxylate (I-5321), Carboxylate (I-5357) ~ Carboxylate (I-5366),Carboxylate (I-5401) ~ Carboxylate (I-5405), Carboxylate (I-5410) ~ Carboxylate (I-5421), Carboxylate (I-5457) ~ Carboxylate (I-5466), Carboxylate (I-5501) ~ Carboxylate (I-5505), Carboxylate (I-5510) ~ Carboxylate (I-5521), Carboxylate (I-5557) ~ Carboxylate (I-5566), Carbo, Carboxylate (I-5601) ~ Carboxylate (I-5605), Carboxylate (I-5610) ~ Carboxylate (I-5621), Carboxylate (I-5657) ~ Carboxylate (I-5666), Carboxylate (I-5701) ~ Carboxylate (I-5705), Carboxylate (I-5710) ~ Carboxylate (I-5721), Carboxylate (I-5757) ~ Carboxylate (I-5766), Carboxylate (I-5801) ~ Carboxylate (I-5805), Carboxylate (I-5810) ~ Carboxylate (I-5821), Carboxylate (I- 5857) ~ Carboxylic Acid Salt (I-5866), Carboxylic Acid Salt (I-5901) ~ Carboxylic Acid Salt (I-5905), Carboxylic Acid Salt (I-5910) ~ Carboxylic Acid Salt (I-5921), Carboxylic Acid Salt (I-5957) ~ Carboxylic Acid Salt (I-5966), Carboxylic Acid Salt (I-6001) ~ Carboxylic Acid Salt (I-6005), Carboxylic Acid Salt (I-6010) ~ Carboxylic Acid Salt (I-6021), Carboxylic Acid Salt (I-6057) ~ Carboxylic Acid Salt (I-6066), Carboxylic Acid Salt (I-6101) ~ Carboxylic Acid Salt (I-6105), Carboxylic Acid Salt (I-6110) ~ Carboxylic Acid Carboxylate (I-6121), Carboxylate (I-6157) to Carboxylate (I-6166), Carboxylate (I-6201) to Carboxylate (I-6205), Carboxylate (I-6210) to Carboxylate (I-6221), Carboxylate (I-6257) to Carboxylate (I-6266), Carboxylate (I-6301) to Carboxylate (I-6305), Carboxylate (I-6310) to Carboxylate (I-6321), Carboxylate (I-6357) to Carboxylate (I-6366), Carboxylate (I-6401) to Carboxylate (I -6405), Carboxylate (I-6410) ~ Carboxylate (I-6421), Carboxylate (I-6457) ~ Carboxylate (I-6466), Carboxylate (I-6501) ~ Carboxylate (I-6505), Carboxylate (I-6510) ~ Carboxylate (I-6521), Carboxylate (I-6557) ~ Carboxylate (I-6566), Carboxylate (I-6601) ~ Carboxylate (I-6605), Carboxylate (I-6610) ~ Carboxylate (I-6621), Carboxylate (I-6657) ~ Carboxylate (I-6666),Carboxylate (I-6701) ~ Carboxylate (I-6705), Carboxylate (I-6710) ~ Carboxylate (I-6721), Carboxylate (I-6757) ~ Carboxylate (I-6766), Carboxylate (I-6801) ~ Carboxylate (I-6805), Carboxylate (I-6810) ~ Carboxylate (I-6821), Carboxylate (I-6857) ~ Carboxylate (I-6866), Carboxylate (I-6901) ~ Carboxylate (I-6905), Carboxylate (I-6910) ~ Carboxylate (I-6921), Carboxylate ( Carboxylic Acid Salt (I-6957) ~ Carboxylic Acid Salt (I-6966), Carboxylic Acid Salt (I-7001) ~ Carboxylic Acid Salt (I-7005), Carboxylic Acid Salt (I-7010) ~ Carboxylic Acid Salt (I-7021), Carboxylic Acid Salt (I-7057) ~ Carboxylic Acid Salt (I-7066), Carboxylic Acid Salt (I-7101) ~ Carboxylic Acid Salt (I-7105), Carboxylic Acid Salt (I-7110) ~ Carboxylic Acid Salt (I-7121), Carboxylic Acid Salt (I-7157) ~ Carboxylic Acid Salt (I-7166), Carboxylic Acid Salt (I-7201) ~ Carboxylic Acid Salt (I-7205), Carboxylic Acid Salt (I-7210) ~ Carboxylate (I-7221), Carboxylate (I-7257) to Carboxylate (I-7266), Carboxylate (I-7301) to Carboxylate (I-7305), Carboxylate (I-7310) to Carboxylate (I-7321), Carboxylate (I-7357) to Carboxylate (I-7366), Carboxylate (I-7401) to Carboxylate (I-7405), Carboxylate (I-7410) to Carboxylate (I-7421), Carboxylate (I-7457) to Carboxylate (I-7466), Carboxylate (I-7501) to Carboxylate ( I-7505, Carboxylate (I-7510) ~ Carboxylate (I-7521), Carboxylate (I-7557) ~ Carboxylate (I-7566), Carboxylate (I-7601) ~ Carboxylate (I-7605), Carboxylate (I-7610) ~ Carboxylate (I-7621), Carboxylate (I-7657) ~ Carboxylate (I-7666), Carboxylate (I-7701) ~ Carboxylate (I-7705), Carboxylate (I-7710) ~ Carboxylate (I-7721), Carboxylate (I-7757) ~ Carboxylate (I-7766),Carboxylate (I-7801) to Carboxylate (I-7805), Carboxylate (I-7810) to Carboxylate (I-7821), Carboxylate (I-7857) to Carboxylate (I-7866), Carboxylate (I-7901) to Carboxylate (I-7905), Carboxylate (I-7910) to Carboxylate (I-7921), Carboxylate (I-7957) to Carboxylate (I-7966), Carboxylate (I-8001) to Carboxylate (I-8005), Carboxylate (I-8010) to Carboxylate (I-8021), Carboxylate (I-8057) to Carboxylate (I-8066), Carboxylate (I-8101) to Carboxylate (I-8105), Carboxylate (I-8110) to Carboxylate Carboxylate (I-8121), carboxylate (I-8157) to carboxylate (I-8166), carboxylate (I-8201) to carboxylate (I-8205), carboxylate (I-8210) to carboxylate (I-8221), carboxylate (I-8257) to carboxylate (I-8266), carboxylate (I-8301) to carboxylate (I-8305), carboxylate (I-8310) to carboxylate (I-8321), carboxylate (I-8357) to carboxylate (I-8366), carboxylate (I-8401) to carboxylate (I-8405), carboxylate (I-8410) to carboxylate (I-8421), and carboxylate (I-8457) to carboxylate (I-8466) are preferred.

[0069] <Method for producing salt (I)> The salt (I) can be produced by reacting a salt represented by formula (Ia) with a salt represented by formula (Ib) in a solvent. TIFF2023160797000045.tif101155[where, Ar 1 , Ar 2 , Ar 3 , R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9, m1, m2, m3, m4, m5, m6, m7, m8, m9, A 1 , A 2 , A 3 , X 0 have the same meanings as above. R A , R B and R C each independently represents a hydrocarbon group having 1 to 12 carbon atoms, or R A , R B and R C may combine to form an aromatic ring. D represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms.] Examples of solvents used in this reaction include chloroform, acetonitrile, and ion-exchanged water. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0070] The salt represented by formula (Ib) can be synthesized with reference to the methods described in JP-A Nos. 2011-39502 and 2014-88367, and examples thereof include salts represented by the following formulas. TIFF2023160797000046.tif149164

[0071] In the salt (Ia), R 1 , R 2 and R 3 However, *-OL 10 -CO-OR 10 The salt represented by formula (I-a1) can be produced by reacting a salt represented by formula (Ic) with a compound represented by formula (Id) in a solvent in the presence of a base catalyst. TIFF2023160797000047.tif115156 [In the formula, all symbols have the same meanings as defined above. In formula (I), R 4 , R 5 and R 6 When R in formula (Ic) contains an acid labile group, 4 , R 5 and R 6 may be replaced by -OH. Examples of the base include potassium carbonate, potassium iodide, pyridine, and triethylamine. Examples of the solvent include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, and water. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0072] Examples of compounds represented by formula (Id) include the compounds represented below, which are readily available on the market and can also be easily produced by known production methods. TIFF2023160797000048.tif15166

[0073] The salt represented by formula (Ic) can be produced by reacting the salt represented by formula (Ie), a compound represented by formula (I-f1), a compound represented by formula (I-f2), and a compound represented by formula (I-f3) in a solvent in the presence of a catalyst. TIFF2023160797000049.tif122158 [In the formula, all symbols have the same meanings as defined above. In formula (I), R 4 , R 5 and R 6 When R in formula (Ic) contains an acid labile group, 4 , R 5 and R 6 may be replaced by -OH. Examples of the catalyst include potassium carbonate and sodium hydride. Examples of the solvent include chloroform, monochlorobenzene, acetonitrile, and water. The reaction temperature is usually 15° C. to 100° C., and the reaction time is usually 0.5 to 24 hours.

[0074] Examples of the salt represented by formula (Ie) include salts represented by the following formula, which are readily available on the market. TIFF2023160797000050.tif35168

[0075] Examples of the compound represented by formula (I-f1), the compound represented by formula (I-f2), and the compound represented by formula (I-f3) include the compounds represented below, which are easily available on the market. TIFF2023160797000051.tif99164

[0076] The salt represented by formula (Ic) can also be produced by reacting the salt represented by formula (Ie), a compound represented by formula (I-f4), a compound represented by formula (I-f5), and a compound represented by formula (I-f6) in a solvent in the presence of potassium carbonate, followed by acid treatment. TIFF2023160797000052.tif124163 [wherein all symbols have the same meanings as defined above.] R ac represents an acid labile group. 4 , R 5 and R 6 When R in formula (Ic) contains an acid labile group, 4 , R 5 and R 6 may be replaced by -OH. Examples of the solvent include chloroform, monochlorobenzene, acetonitrile, and water. The reaction temperature is usually 15° C. to 100° C., and the reaction time is usually 0.5 to 24 hours. The acid includes p-toluenesulfonic acid, hydrochloric acid, and the like.

[0077] Examples of the compound represented by formula (I-f4), the compound represented by formula (I-f5), and the compound represented by formula (I-f6) include the compounds represented below, which are easily available on the market. TIFF2023160797000053.tif125162

[0078] In the salt (Ia), R 1 , R 2 and R 3 But *-OR 10The salt represented by formula (I-a2) can be produced by reacting a salt represented by formula (Ic) with a compound represented by formula (I-d2) in a solvent in the presence of a base catalyst. TIFF2023160797000054.tif110163 [In the formula, all symbols have the same meanings as defined above. In formula (I), R 4 , R 5 and R 6 When R in formula (Ic) contains an acid labile group, 4 , R 5 and R 6 may be replaced by -OH. Examples of the base include sodium hydroxide and potassium hydroxide. Examples of the solvent include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, and water. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0079] Examples of compounds represented by formula (I-d2) include the compounds represented by the following formulas, which are readily available on the market and can also be easily produced by known production methods. TIFF2023160797000055.tif17124

[0080] In the salt (Ia), R 1 , R 2 and R 3 But *-O-CO-OR 10 The salt represented by formula (I-a3) can be produced by reacting a salt represented by formula (Ic) with a compound represented by formula (I-d2) in a solvent in the presence of carbonyldiimidazole. TIFF2023160797000056.tif102150 [In the formula, all symbols have the same meanings as defined above. In formula (I), R 4 , R 5 and R 6 When R in formula (Ic) contains an acid labile group, 4 , R5 and R 6 may be replaced by -OH. Examples of the solvent include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, and water. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0081] The salt represented by formula (Ic) can also be produced by reacting a compound represented by formula (I-f1), a compound represented by formula (I-f2), and a compound represented by formula (I-f3) with carbonyldiimidazole in a solvent, and then further reacting the resulting mixture with a salt represented by formula (Ig). TIFF2023160797000057.tif113150 [In the formula, all symbols have the same meanings as defined above. In formula (I), R 4 , R 5 and R 6 When R in formula (Ic) contains an acid labile group, 4 , R 5 and R 6 may be replaced by -OH. Examples of the solvent include chloroform, monochlorobenzene, and acetonitrile. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0082] Examples of the salt represented by formula (Ie) include salts represented by the following formula, which are readily available on the market. TIFF2023160797000058.tif36135

[0083] [Carboxylic Acid Generator] The carboxylic acid generator of the present invention is an acid generator containing a carboxylic acid salt (I). The carboxylic acid salt (I) of the present invention can act as an acid generator in a resist composition. When the carboxylic acid salt (I) is used as an acid generator in a resist composition, the acid generator may contain only one type of carboxylic acid salt (I) or two or more types of carboxylic acid salts (I). Furthermore, as will be described later, the acid generator of the present invention may further contain an acid generator other than the carboxylate (I) that is known in the resist field (hereinafter, sometimes referred to as "acid generator (B)") and / or a carboxylic acid generator other than the carboxylate (I) that is known in the resist field. The acid generator (B) may be used alone or in combination of two or more kinds. When the carboxylic acid generator of the present invention contains an acid generator (B) or the like, the ratio of the content of the carboxylic acid salt (I) to the content of the acid generator (B) or the like (mass ratio; carboxylic acid salt (I):acid generator (B)) or the like is usually 1:99 to 100:0, preferably 1:99 to 99:1, more preferably 2:98 to 98:2, and even more preferably 5:95 to 95:5.

[0084] [Resist Composition] The resist composition of the present invention contains a carboxylic acid generator containing the carboxylate (I) of the present invention and an acid generator (B) other than the carboxylate (I). The resist composition of the present invention preferably further contains a resin (hereinafter sometimes referred to as "resin (A)") containing a structural unit having an acid labile group. The "acid labile group" here refers to a group that has a leaving group and that is eliminated by contact with an acid to form a hydrophilic group (e.g., a hydroxy group or a carboxy group). The resist composition preferably further contains a quencher (hereinafter sometimes referred to as "quencher (C)") and / or a solvent (hereinafter sometimes referred to as "solvent (E)"). In the resist composition of the present invention, the content of the carboxylate (I) is preferably from 0.1 to 35% by mass, more preferably from 0.5 to 30% by mass, and even more preferably from 1 to 25% by mass, relative to the solid content of the resist composition.

[0085] <Acid generator (B)> The acid generator (B) may be either nonionic or ionic. Nonionic acid generators include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxyketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), etc. Ionic acid generators include onium salts containing onium cations (e.g., diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Anions of onium salts include sulfonate anions, sulfonylimide anions, sulfonylmethide anions, and carboxylate anions.

[0086] The acid generator (B) may be a compound that generates an acid when exposed to radiation, as described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Pat. No. 3,779,778, U.S. Pat. No. 3,849,137, German Patent No. 3,914,407, or European Patent No. 126,712. Compounds produced by known methods may also be used. Two or more types of acid generator (B) may be used in combination.

[0087] The acid generator (B) is preferably a salt represented by formula (B1) (hereinafter sometimes referred to as "acid generator (B1)", excluding salt (I)) or a salt represented by formula (B2) (hereinafter sometimes referred to as "acid generator (B2)", excluding salt (I)). TIFF2023160797000059.tif2962[In formula (B1), Q b1 and Q b2 each independently represents a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms. L b1represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, in which -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-, and in which a hydrogen atom contained in the saturated hydrocarbon group may be replaced by a fluorine atom or a hydroxy group. Y represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, and one -CH2- in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. Z1 + represents an organic cation.

[0088] Q b1 and Q b2 Examples of the perfluoroalkyl group include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, and a perfluorohexyl group. Q b1 and Q b2 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The acid generator (B) is preferably a fluorine-containing acid generator, and Q b1 and Q b2 Q b1 and Q b2 Preferably, at least one of them contains a fluorine atom or a perfluoroalkyl group, more preferably each independently is a fluorine atom or a perfluoroalkyl group, further preferably is a fluorine atom or a trifluoromethyl group, and even more preferably is both a fluorine atom.

[0089] L b1 Examples of the divalent saturated hydrocarbon group in include a linear alkanediyl group, a branched alkanediyl group, and a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and may also be a group formed by combining two or more of these groups. Specific examples include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; branched alkanediyl groups such as ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl; monocyclic divalent alicyclic saturated hydrocarbon groups such as cycloalkanediyl groups, such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; Examples include polycyclic divalent alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group.

[0090] L b1 Examples of the divalent saturated hydrocarbon group represented by the formula (b1-1) in which one -CH2- is replaced with -O- or -CO- include groups represented by any of formulas (b1-1) to (b1-3). In the groups represented by formulas (b1-1) to (b1-3) and specific examples thereof, groups represented by formulas (b1-4) to (b1-11), * and ** represent bonding sites, and * represents the bonding site to -Y.

[0091] TIFF2023160797000060.tif26117[In formula (b1-1), L b2represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom. L b3 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and -CH2- contained in the saturated hydrocarbon group may be substituted with -O- or -CO-. However, L b2 and L b3 The total number of carbon atoms is 22 or less. In formula (b1-2), L b4 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom. L b5 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and -CH2- contained in the saturated hydrocarbon group may be substituted with -O- or -CO-. However, L b4 and L b5 The total number of carbon atoms is 22 or less. In formula (b1-3), L b6 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. L b7 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and -CH2- contained in the saturated hydrocarbon group may be substituted with -O- or -CO-. However, L b6 and L b7 The total number of carbon atoms is 23 or less.

[0092] In the groups represented by formulae (b1-1) to (b1-3), when -CH2- contained in the saturated hydrocarbon group is replaced with -O- or -CO-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the saturated hydrocarbon group. As the divalent saturated hydrocarbon group, L b1 Examples of the divalent saturated hydrocarbon group include the same as the divalent saturated hydrocarbon group.

[0093] L b2 is preferably a single bond, a methylene group, —CH(CF3)— or —C(CF3)2—. L b3 is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b4 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom, and is more preferably a methylene group, -CH(CF3)-, or -C(CF3)2-. L b5 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b6 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom. L b7 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and -CH2- contained in the divalent saturated hydrocarbon group may be substituted with -O- or -CO-.

[0094] L b1 As the divalent saturated hydrocarbon group represented by the formula (b1-1) or (b1-3), in which one --CH.sub.2-- contained in the group is replaced by --O-- or --CO--, a group represented by the formula (b1-1) or (b1-3) is preferred.

[0095] Examples of the group represented by formula (b1-1) include groups represented by formulas (b1-4) to (b1-8). TIFF2023160797000061.tif44130[In formula (b1-4), L b8 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. In formula (b1-5), L b9 represents a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. L b10 represents a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. However, L b9 and L b10 The total number of carbon atoms is 20 or less. In formula (b1-6), L b11 represents a divalent saturated hydrocarbon group having 1 to 21 carbon atoms. L b12 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. However, L b11 and L b12 The total number of carbon atoms is 21 or less. In formula (b1-7), L b13 represents a divalent saturated hydrocarbon group having 1 to 19 carbon atoms. L b14 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. L b15 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. However, L b13 ~L b15 The total number of carbon atoms is 19 or less. In formula (b1-8), L b16 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. L b17 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms. L b18 represents a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. However, L b16 ~L b18 The total number of carbon atoms is 19 or less.

[0096] L b8 is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b9 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b10 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b11 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b12 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b13 is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms. L b14 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 6 carbon atoms. L b15 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b16 is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms. L b17 is preferably a divalent saturated hydrocarbon group having 1 to 6 carbon atoms. L b18 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms.

[0097] Examples of the group represented by formula (b1-3) include groups represented by formulas (b1-9) to (b1-11). TIFF2023160797000062.tif23140[In formula (b1-9), L b19 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom. L b20 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom, a hydroxy group, or an alkylcarbonyloxy group. -CH2- contained in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and a hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group. However, L b19 and L b20 The total number of carbon atoms is 23 or less. In formula (b1-10), L b21 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom. L b22 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms. L b23 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom, a hydroxy group, or an alkylcarbonyloxy group. -CH2- contained in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and a hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group. However, L b21, L b22 and L b23 The total number of carbon atoms is 21 or less. In formula (b1-11), L b24 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom. L b25 represents a divalent saturated hydrocarbon group having 1 to 21 carbon atoms. L b26 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom, a hydroxy group, or an alkylcarbonyloxy group. -CH2- contained in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and a hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group. However, L b24 , L b25 and L b26 The total number of carbon atoms is 21 or less.

[0098] In addition, in the groups represented by formulae (b1-9) to (b1-11), when a hydrogen atom contained in the saturated hydrocarbon group is substituted with an alkylcarbonyloxy group, the number of carbon atoms before substitution is regarded as the number of carbon atoms of the saturated hydrocarbon group.

[0099] Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, a butyryloxy group, a cyclohexylcarbonyloxy group, and an adamantylcarbonyloxy group.

[0100] Examples of the group represented by formula (b1-4) include the following. TIFF2023160797000063.tif14133

[0101] Examples of the group represented by formula (b1-5) include the following. TIFF2023160797000064.tif60150

[0102] Examples of the group represented by formula (b1-6) include the following. TIFF2023160797000065.tif29165

[0103] Examples of the group represented by formula (b1-7) include the following. TIFF2023160797000066.tif41169

[0104] Examples of the group represented by formula (b1-8) include the following. TIFF2023160797000067.tif20123

[0105] Examples of the group represented by formula (b1-2) include the following. TIFF2023160797000068.tif31161

[0106] Examples of the group represented by formula (b1-9) include the following. TIFF2023160797000069.tif34152

[0107] Examples of the group represented by formula (b1-10) include the following. TIFF2023160797000070.tif80165

[0108] Examples of the group represented by formula (b1-11) include the following. TIFF2023160797000071.tif66153

[0109] Examples of the cyclic hydrocarbon group represented by Y include alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are combined.

[0110] Examples of the alicyclic hydrocarbon group represented by Y in which -CH2- is not replaced by -O-, -S-, -SO2-, or -CO- include groups represented by formulae (Y1) to (Y11) and formulae (Y36) to (Y38). When -CH2- contained in the alicyclic hydrocarbon group represented by Y is replaced by -O-, -S-, -SO2- or -CO-, the number may be one or more. Examples of such groups include groups represented by formulae (Y12) to (Y35) and formulae (Y39) to (Y43). -O- or -CO- in the groups represented by formulae (Y12) to (Y35) and formulae (Y39) to (Y43) may be replaced by -S- or -SO2-. * represents L b1 represents the binding site with The alicyclic hydrocarbon group represented by JPEG2023160797000072.jpg84166Y is preferably a group represented by any one of formulas (Y1) to (Y20), (Y26), (Y27), (Y30), (Y31), and (Y39) to (Y43), and more preferably a group represented by formula (Y11), (Y15), (Y16), (Y20), or (Y43). Preferred are groups represented by formula (Y11), formula (Y15), formula (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42), or formula (Y43), and more preferred are groups represented by formula (Y11), formula (Y15), formula (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42), or formula (Y43). When the alicyclic hydrocarbon group represented by Y is a spiro ring having an oxygen atom such as those of formulae (Y28) to (Y35), (Y39), (Y40), (Y42), and (Y43), the alkanediyl group between the two oxygen atoms preferably has one or more fluorine atoms. Furthermore, among the alkanediyl groups contained in the ketal structure, it is preferred that the methylene group adjacent to the oxygen atom is not substituted with a fluorine atom. The alicyclic hydrocarbon group preferably has 3 to 24 carbon atoms, more preferably 3 to 20 carbon atoms, even more preferably 3 to 18 carbon atoms, and even more preferably 3 to 16 carbon atoms.

[0111] Examples of aromatic hydrocarbon groups represented by Y include phenyl, naphthyl, biphenyl, anthryl, phenanthryl, and binaphthyl groups. The aromatic hydrocarbon group preferably has 6 to 24 carbon atoms, more preferably 6 to 20 carbon atoms, even more preferably 6 to 18 carbon atoms, still more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0112] The substituent of the methyl group represented by Y is a halogen atom, a hydroxy group, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, a glycidyloxy group, -(CH2) ja -CO-OR b1 group or -(CH2) ja -O-CO-R b1 group (in the formula, R b1 represents an alkyl group having 1 to 16 carbon atoms, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof. ja represents an integer of 0 to 4. -CH2- contained in the alkyl group and the alicyclic hydrocarbon group may be replaced by -O-, -SO2-, or -CO-, and a hydrogen atom contained in the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may be replaced by a hydroxy group or a fluorine atom. Substituents for the cyclic hydrocarbon group represented by Y include a halogen atom, a hydroxy group, an alkyl group having 1 to 16 carbon atoms which may be substituted with a hydroxy group (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, an aralkyl group having 7 to 21 carbon atoms, a glycidyloxy group, -(CH2) ja -CO-OR b1 group or -(CH2) ja -O-CO-R b1 group (in the formula, R b1represents an alkyl group having 1 to 16 carbon atoms, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof. ja represents an integer of 0 to 4. -CH2- contained in the alkyl group and the alicyclic hydrocarbon group may be replaced by -O-, -SO2-, or -CO-, and a hydrogen atom contained in the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may be replaced by a hydroxy group or a fluorine atom.

[0113] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a methylcyclohexyl group, a dimethylcyclohexyl group, a cycloheptyl group, a cyclooctyl group, a norbornyl group, and an adamantyl group. The alicyclic hydrocarbon group may have a chain hydrocarbon group, such as a methylcyclohexyl group or a dimethylcyclohexyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 12, and more preferably 3 to 10. Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group. Examples of aromatic hydrocarbon groups having a chain hydrocarbon group include tolyl, xylyl, cumenyl, mesityl, p-ethylphenyl, p-tert-butylphenyl, 2,6-diethylphenyl, and 2-methyl-6-ethylphenyl. Examples of aromatic hydrocarbon groups having an alicyclic hydrocarbon group include p-cyclohexylphenyl and p-adamantylphenyl. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14, and more preferably 6 to 10. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 6, and even more preferably 1 to 4. Examples of the alkyl group substituted with a hydroxy group include hydroxyalkyl groups such as a hydroxymethyl group and a hydroxyethyl group. Examples of the aralkyl group include a benzyl group, a phenethyl group, a phenylpropyl group, a naphthylmethyl group, and a naphthylethyl group. Examples of groups in which -CH2- in an alkyl group is replaced by -O-, -SO2-, -CO-, etc. include an alkoxy group, an alkylsulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, or a combination thereof. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. The number of carbon atoms in the alkoxy group is preferably 1 to 12, more preferably 1 to 6, and even more preferably 1 to 4. Examples of the alkylsulfonyl group include a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The alkylsulfonyl group preferably has 1 to 12 carbon atoms, more preferably 1 to 6 carbon atoms, and even more preferably 1 to 4 carbon atoms. Examples of the alkoxycarbonyl group include a methoxycarbonyl group, an ethoxycarbonyl group, a butoxycarbonyl group, etc. The alkoxycarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and even more preferably 2 to 4 carbon atoms. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and even more preferably 2 to 4 carbon atoms. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, a butyryloxy group, etc. The alkylcarbonyloxy group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and even more preferably 2 to 4 carbon atoms. Examples of the combined group include a group combining an alkoxy group and an alkyl group, a group combining an alkoxy group and an alkoxy group, a group combining an alkoxy group and an alkylcarbonyl group, and a group combining an alkoxy group and an alkylcarbonyloxy group. Examples of the group combining an alkoxy group and an alkyl group include alkoxyalkyl groups such as a methoxymethyl group, a methoxyethyl group, an ethoxyethyl group, an ethoxymethyl group, etc. The number of carbon atoms in the alkoxyalkyl group is preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4. Examples of a group formed by combining an alkoxy group with another alkoxy group include alkoxyalkoxy groups such as a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, etc. The number of carbon atoms in the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4. Examples of the group combining an alkoxy group and an alkylcarbonyl group include alkoxyalkylcarbonyl groups such as a methoxyacetyl group, a methoxypropionyl group, an ethoxyacetyl group, an ethoxypropionyl group, etc. The number of carbon atoms in the alkoxyalkylcarbonyl group is preferably 3 to 13, more preferably 3 to 7, and even more preferably 3 to 5. Examples of the group combining an alkoxy group and an alkylcarbonyloxy group include alkoxyalkylcarbonyloxy groups such as a methoxyacetyloxy group, a methoxypropionyloxy group, an ethoxyacetyloxy group, an ethoxypropionyloxy group, etc. The number of carbon atoms in the alkoxyalkylcarbonyloxy group is preferably 3 to 13, more preferably 3 to 7, and even more preferably 3 to 5. Examples of the group in which -CH2- in the alicyclic hydrocarbon group is replaced by -O-, -SO2-, -CO- or the like include groups represented by formulae (Y12) to (Y35) and formulae (Y39) to (Y43).

[0114] Y is preferably an alicyclic hydrocarbon group of 3 to 24 carbon atoms which may have a substituent or an aromatic hydrocarbon group of 6 to 24 carbon atoms which may have a substituent, more preferably an alicyclic hydrocarbon group of 3 to 20 carbon atoms which may have a substituent or an aromatic hydrocarbon group of 6 to 20 carbon atoms which may have a substituent, even more preferably an alicyclic hydrocarbon group of 3 to 18 carbon atoms which may have a substituent or an aromatic hydrocarbon group of 6 to 18 carbon atoms which may have a substituent, and even more preferably an adamantyl group which may have a substituent, a norbornyl group which may have a substituent, or a phenyl group which may have a substituent, wherein -CH2- constituting the alicyclic hydrocarbon group, adamantyl group, or norbornyl group may be replaced by -O-, -S-, -SO2-, or -CO-. Specific examples include the following. TIFF2023160797000073.tif116158

[0115] TIFF2023160797000074.tif54155 Among these, Y is preferably an adamantyl group, a hydroxyadamantyl group, an oxoadamantyl group, a norbornane lactone group, a phenyl group, a group containing these, or a group represented by formula (Y42), formula (Y100) to formula (Y114), or formula (Y134) to formula (Y139), and particularly preferably a hydroxyadamantyl group, an oxoadamantyl group, a group containing these, or a group represented by formula (Y42), formula (Y100) to formula (Y114), or formula (Y134) to formula (Y139).

[0116] The anion in the salt represented by formula (B1) is preferably an anion represented by formula (B1-A-1) to formula (B1-A-85) (hereinafter, sometimes referred to as "anion (B1-A-1)" depending on the formula number).), and more preferably an anion represented by any of formula (B1-A-1) to formula (B1-A-4), formula (B1-A-9), formula (B1-A-10), formula (B1-A-24) to formula (B1-A-33), formula (B1-A-36) to formula (B1-A-40), and formula (B1-A-47) to formula (B1-A-81). JPEG2023160797000075.jpg238165

[0117] TIFF2023160797000076.tif247157

[0118] TIFF2023160797000077.tif253164

[0119] TIFF2023160797000078.tif36163

[0120] where R i2 ~R i7 are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. i8 is, for example, a chain hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. A4 Q is a single bond or an alkanediyl group having 1 to 4 carbon atoms. b1 and Q b2 has the same meaning as above. Specific examples of the anion in the salt represented by formula (B1) include the anions described in JP-A-2010-204646.

[0121] Preferred anions in the salt represented by formula (B1) include the anions represented by formulas (B1a-1) to (B1a-65). TIFF2023160797000079.tif247167

[0122] TIFF2023160797000080.tif245167

[0123] Among these, anions represented by any one of formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), and (B1a-35) to (B1a-55) are preferred.

[0124] TIFF2023160797000081.tif3190[In formula (B2), m21 represents an integer of 1 to 5, and when m21 is 2 or greater, the groups in the parentheses may be the same or different. R 21 represents a hydrocarbon group having 3 to 48 carbon atoms, including a cyclic hydrocarbon group having 3 to 18 carbon atoms, the cyclic hydrocarbon group optionally having a substituent, and -CH2- contained in the hydrocarbon group optionally being replaced by -O-, -S-, -SO2- or -CO-. R 22 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and one --CH.sub.2-- contained in the alkyl group may be replaced with --O-- or --CO--. m22 represents an integer of 0 to 4, and when m22 is 2 or more, a plurality of R 22 may be the same or different from each other. Z1 + represents an organic cation.

[0125] R 21 Examples of the hydrocarbon group containing a cyclic hydrocarbon group in R include cyclic hydrocarbon groups such as monocyclic or polycyclic alicyclic hydrocarbon groups and aromatic hydrocarbon groups, or groups combining these, and groups combining cyclic hydrocarbon groups such as monocyclic or polycyclic alicyclic hydrocarbon groups and aromatic hydrocarbon groups with chain hydrocarbon groups (alkyl groups, alkenyl groups, alkynyl groups, etc.). 21The number of carbon atoms in the cyclic hydrocarbon group in R is, for example, 3 to 24, preferably 3 to 20, more preferably 3 to 18, even more preferably 3 to 16, and even more preferably 5 to 16. 21 The total number of carbon atoms in the hydrocarbon groups including the cyclic hydrocarbon group is, for example, 3 to 48, preferably 3 to 40, more preferably 3 to 36, even more preferably 3 to 30, still more preferably 3 to 24, even more preferably 3 to 18, and even more preferably 3 to 16.

[0126] The alicyclic hydrocarbon group may be monocyclic, polycyclic, or spirocyclic, and may be saturated or unsaturated. Examples of the alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl, and polycyclic cycloalkyl groups such as decahydronaphthyl, norbornyl, and adamantyl. Specific examples of the alicyclic hydrocarbon group include the groups shown below: The bonding site can be at any position. TIFF2023160797000082.tif46168 More specifically, examples of the alicyclic hydrocarbon group include the groups shown below, where * represents a binding site. The alicyclic hydrocarbon group preferably has 3 to 24 carbon atoms, more preferably 3 to 18 carbon atoms, even more preferably 3 to 16 carbon atoms, and even more preferably 5 to 16 carbon atoms. Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The aromatic hydrocarbon group preferably has 6 to 24 carbon atoms, more preferably 6 to 18 carbon atoms, even more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0127] Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. Examples of the alkynyl group include an ethynyl group, a propynyl group, an isopropynyl group, a butynyl group, an isobutynyl group, a tert-butynyl group, a pentynyl group, a hexynyl group, an octynyl group, and a nonynyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 24, more preferably 1 to 18, even more preferably 1 to 12, still more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0128] The combined groups are: Examples of such groups include a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group, a group combining an alicyclic hydrocarbon group with an open-chain hydrocarbon group, a group combining an aromatic hydrocarbon group with an open-chain hydrocarbon group, and a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group and an open-chain hydrocarbon group, etc. Here, -CH2- in the combined group may be replaced by -O-, -S-, -CO- or -SO2-. In addition, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Any of the groups may be bonded to an oxygen atom. The above groups may also contain groups with different valences (e.g., alkanediyl groups, alkanetriyl groups, cycloalkanediyl groups, cycloalkanetriyl groups).

[0129] Specific examples of combined groups include: Alicyclic hydrocarbon group-chain hydrocarbon group-* such as an adamantylmethyl group, an adamantylethyl group, a cyclohexylmethyl group, or a cyclohexylethyl group (-CH2- contained in the chain hydrocarbon group or the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-), A chain hydrocarbon group-alicyclic hydrocarbon group-* such as a methyladamantyl group, a methylcyclohexyl group, or a dimethylcyclohexyl group (-CH2- contained in the chain hydrocarbon group or the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-), a chain hydrocarbon group-aromatic hydrocarbon group-* (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), such as a tolyl group or a xylyl group; A chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), such as a methylcyclohexylmethyl group; an aromatic hydrocarbon group-chain hydrocarbon group-* (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), such as a benzyl group or a phenethyl group; a chain hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-* (wherein —CH— contained in the chain hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—), such as a tolylmethyl group; an aromatic hydrocarbon group-alicyclic hydrocarbon group-* (wherein —CH— contained in the alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—), such as a phenyladamantyl group; an alicyclic hydrocarbon group-aromatic hydrocarbon group-* (wherein —CH— contained in the alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—), such as a cyclohexylphenyl group or an adamantylphenyl group; A chain hydrocarbon group-alicyclic hydrocarbon group-aromatic hydrocarbon group-* such as a methylcyclohexylphenyl group or a dimethylcyclohexylphenyl group (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), A chain hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-* such as a methylphenylcyclohexyl group or a dimethylphenylcyclohexyl group (-CH2- contained in the chain hydrocarbon group or the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), an alicyclic hydrocarbon group-chain hydrocarbon group-aromatic hydrocarbon group-* such as a cyclohexylmethylphenyl group or a cyclohexylethylphenyl group (wherein —CH— contained in the chain hydrocarbon group or the alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—); an aromatic hydrocarbon group-a chain hydrocarbon group-an alicyclic hydrocarbon group* such as a phenylmethylcyclohexyl group or a phenylethylcyclohexyl group (wherein —CH— contained in the chain hydrocarbon group or the alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—); an alicyclic hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-* such as a cyclohexylphenylmethyl group or a cyclohexylphenylethyl group (wherein —CH— contained in the chain hydrocarbon group or the alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—); an aromatic hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group* such as a phenylcyclohexylmethyl group or a phenylcyclohexylethyl group (wherein —CH— contained in the chain hydrocarbon group or the alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—); Here, * indicates the bonding site with the oxygen atom.

[0130] R 21When -CH2- in the hydrocarbon group represented by the formula (I) is replaced with -O-, -S-, -CO-, or -SO2-, the number of carbon atoms before the replacement is counted as the total number of carbon atoms in the hydrocarbon group. The number may be 1 or 2 or more. Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), and an alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced by -S-). a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), an alkoxycarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), an alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), an oxy group (a group in which -CH2- in a methylene group is replaced with -O-), an alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), an alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), an alkylcarbonyloxy group (a group in which -CH2- a carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), a thio group (a group in which -CH2- in a methylene group is replaced with -S-), a sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), an alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), an alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-), an alkanediylcarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-), an alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-), an alkanediylcarbonyl group (a group in which an alkanediyl group in which -CH2- at any position is replaced with -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -CO-O-), an alkanediylthio group (a group in which -CH2- at any position in an alkanediyl group is replaced with -S-), an alkanediylsulfonyl group (a group in which -CH2- at any position in an alkanediyl group is replaced with -SO2-), a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group,Examples include an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group formed by combining two or more of these groups. Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 17 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. The alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as acetyl, propionyl, and butyryl. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, even more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 17 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 17 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 17 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 17 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 17 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 18 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 17 carbon atoms, such as a phenyloxy group. Examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include the groups shown below. -O- or -CO- in the groups shown below may be replaced with -S- or -SO2-. The bonding site may be at any position. TIFF2023160797000084.tif46170More specifically, examples of groups in which —CH2— in an alicyclic hydrocarbon group is replaced with —O—, —S—, —CO— or —SO2— include the groups shown below, where * represents a bonding site. TIFF2023160797000085.tif54153

[0131] Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a cyano group, and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O-, -S-, -CO-, or -SO2-). When the cyclic hydrocarbon group has a substituent, the substituent is selected from the group represented by R 21 is not included in the total number of carbon atoms of the hydrocarbon group including the cyclic hydrocarbon group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, a nonyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 10, more preferably 1 to 9, even more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. When -CH- in an alkyl group is replaced with -O-, -S-, -CO-, or -SO- as a substituent, the number of carbon atoms before the replacement is counted as the total number of carbon atoms in the alkyl group. Examples of the replaced group include a hydroxy group (a group in which a -CH- in a methyl group is replaced with -O-), a carboxy group (a group in which a -CH- in an ethyl group is replaced with -O-CO-), an alkoxy group (a group in which a -CH- at any position in an alkyl group is replaced with -O-), an alkoxycarbonyl group (a group in which a -CH- at any position in an alkyl group is replaced with -O-CO-), an alkylcarbonyl group (a group in which a -CH- at any position in an alkyl group is replaced with -CO-), an alkylcarbonyloxy group (a group in which a -CH-CH- at any position in an alkyl group is replaced with -CO-O-), and a group combining two or more of these groups. Examples of the alkoxy group include alkoxy groups having 1 to 11 carbon atoms. Examples include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, and an undecyloxy group. The number of carbon atoms in the alkoxy group is preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. The alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 11 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 12 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 11 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 6, more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 6, more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 6, more preferably 2 to 4, and even more preferably 2 or 3. The cyclic hydrocarbon group may have one or more substituents. The substituent that the cyclic hydrocarbon group may have is preferably a halogen atom or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O-, -S-, -CO- or -SO2-), more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O-, -S-, -CO- or -SO2-), still more preferably a fluorine atom, an iodine atom, a hydroxy group, an alkoxy group having 1 to 3 carbon atoms or an alkyl group having 1 to 4 carbon atoms, and still more preferably a fluorine atom, an iodine atom, a hydroxy group or an alkyl group having 1 to 4 carbon atoms.

[0132] The cyclic hydrocarbon group (which may have a substituent, and in which -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-) is It is preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group may have a substituent, and —CH— contained in the alicyclic hydrocarbon group may be replaced by —O—, —S—, —SO— or —CO—), or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group may have a substituent), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom, and -CH- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2-, or -CO-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom); It is more preferably an alicyclic hydrocarbon group having 5 to 16 carbon atoms (the alicyclic hydrocarbon group may have one or more atoms selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2-, or -CO-).

[0133] R 21 Examples of the hydrocarbon group having 3 to 48 carbon atoms containing a cyclic hydrocarbon group represented by the formula (the cyclic hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-) include: Preferably, it is a hydrocarbon group having 3 to 48 carbon atoms, including an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group may have a substituent, and -CH2- included in the hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-), or a hydrocarbon group having 6 to 48 carbon atoms, including an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group may have a substituent, and -CH2- included in the hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-), More preferably, it is a hydrocarbon group having 3 to 48 carbon atoms containing an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group may have one or more groups selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -SO2-, or -CO-), or a hydrocarbon group having 6 to 48 carbon atoms containing an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group may have one or more groups selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -SO2-, or -CO-), More preferred are alicyclic hydrocarbon groups having 3 to 18 carbon atoms (the alicyclic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2-, or -CO-), and groups in which an alicyclic hydrocarbon group having 3 to 18 carbon atoms is combined with a chain hydrocarbon group having 1 to 6 carbon atoms (the alicyclic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom, and -CH2- contained in the combined group is replaced with -O-, -S-, an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom), or a group in combination of an aromatic hydrocarbon group having 6 to 18 carbon atoms and a chain hydrocarbon group having 1 to 6 carbon atoms (the aromatic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom, and -CH2- in the combined group may be replaced by -O-, -S-, -SO2-, or -CO-); Even more preferably, it is an alicyclic hydrocarbon group having 5 to 16 carbon atoms (the alicyclic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2-, or -CO-), or a group formed by combining an alicyclic hydrocarbon group having 5 to 16 carbon atoms with a chain hydrocarbon group having 1 to 4 carbon atoms (the alicyclic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom, and -CH2- contained in the combined group may be replaced with -O-, -S-, -SO2-, or -CO-). Also, R 21 Examples of the hydrocarbon group having 3 to 48 carbon atoms containing a cyclic hydrocarbon group represented by the formula (the cyclic hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-) include: W 21 -L 21 -*(W 21 represents a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. 21 represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. * represents a bonding site with an oxygen atom. ) is also preferred. W 21 cyclic hydrocarbon group, W 21 the substituents which may be present on L 21 Examples of the chain hydrocarbon group include the same groups as those mentioned above. W 21is preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group may have a substituent, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group may have a substituent), and is preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom and a fluorine atom, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or and -CO-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom), and even more preferably an alicyclic hydrocarbon group having 5 to 16 carbon atoms (the alicyclic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2-, or -CO-). L 21 is preferably a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), more preferably a single bond or a chain hydrocarbon group having 1 to 4 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), and even more preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms. m21 is an integer of 1 to 5, preferably an integer of 1 to 4, more preferably an integer of 1 to 3, even more preferably 1 or 2, and even more preferably 2. When m21 is 1 or 2, SO3 - is preferably the following structure, which is m-substituted with respect to TIFF2023160797000086.tif31102In the above formula, R 21’ is the above-mentioned R 21 has the same definition as R21 may be the same as or different from.

[0134] R 22 Examples of the alkyl group having 1 to 6 carbon atoms include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 4, and more preferably 1 to 3. R 22 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 22 are each independently preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), and further preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group or a methyl group. m22 is an integer of 0 to 4, preferably an integer of 0 to 3, and more preferably an integer of 0 to 2. In one embodiment, m22 is preferably 0. In another embodiment, m22 is preferably 1 or 2. When m22 is 1, R 22 is preferably a halogen atom, and R 22 is more preferably a fluorine atom or an iodine atom. When m22 is 2, R 22 Preferably, one of R is a halogen atom and the other is a halogen atom or an alkyl group having 1 to 4 carbon atoms, 22 It is more preferable that one of the groups is a fluorine atom or an iodine atom, and the other is a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0135] Examples of the anion in the salt represented by formula (B2) include the following anions. Among them, anions represented by formulas (B2-B-1) to (B2-B-20) are preferred, and anions represented by formulas (B2-B-1) to (B2-B-11) and (B2-B-16) to (B2-B-20) are more preferred. TIFF2023160797000087.tif163162

[0136] In addition, in another embodiment of the acid generator (B), a salt in which the anion in the salt represented by formula (B1) or the like is replaced with a sulfonylimide anion, a sulfonylmethide anion, a carboxylate anion, or the like can also be suitably used as the acid generator (B). Examples of sulfonylimide anions include the following: TIFF2023160797000088.tif26140 Examples of sulfonylmethide anions include the following: TIFF2023160797000089.tif26133Carboxylate anions include the following: TIFF2023160797000090.tif43155

[0137] Z1 + Examples of the organic cation include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations are more preferred. Specific examples include cations represented by any of formulas (b2-1) to (b2-4) (hereinafter, sometimes referred to as "cation (b2-1)" depending on the formula number). TIFF2023160797000091.tif46165 [Formula (b2-1) to formula (b2-4), R b4 ~R b6each independently represent a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, a hydrogen atom contained in the chain hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 and may be bonded to each other to form a ring together with the sulfur atom to which they are attached, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer of 0 to 5; When m2 is 2 or more, multiple R b7 may be the same or different, and when n2 is 2 or more, multiple R b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 and may be bonded to each other to form a ring together with the sulfur atom to which they are attached, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b11represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 may be bonded to each other to form a ring including the -CH-CO- to which they are bonded, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b13 ~R b18 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are attached, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. L b31 represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer of 0 to 5. q2 and r2 each independently represent an integer of 0 to 4; u2 represents 0 or 1. When o2 is 2 or more, multiple R b13 are the same or different, and when p2 is 2 or more, multiple R b14 are the same or different, and when q2 is 2 or more, multiple R b15 are the same or different, and when r2 is 2 or more, multiple R b16 are the same or different, and when s2 is 2 or more, multiple R b17 are the same or different, and when t2 is 2 or more, multiple Rb18 are the same or different.] When u2 is 0, any one of o2, p2, q2, and r2 is 1 or more, and R b13 ~R b16 At least one of o2, p2, s2, t2, q2 and r2 is preferably a halogen atom, and when u2 is 1, any one of o2, p2, s2, t2, q2 and r2 is 1 or more, and R b13 ~R b18 At least one of these is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. When u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom. The aliphatic hydrocarbon group refers to a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl. In particular, R b9 ~R b12 The chain hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups: TIFF2023160797000092.tif10159 In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, and more preferably has 4 to 12 carbon atoms. Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include a methylcyclohexyl group, a dimethylcyclohexyl group, a 2-methyladamantan-2-yl group, a 2-ethyladamantan-2-yl group, a 2-isopropyladamantan-2-yl group, a methylnorbornyl group, an isobornyl group, etc. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. The fluorinated alkyl group refers to an alkyl group having 1 to 12 carbon atoms and a fluorine atom, and examples thereof include a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, biphenyl, naphthyl, and phenanthryl. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and examples include aromatic hydrocarbon groups having a chain hydrocarbon group with 1 to 18 carbon atoms (such as tolyl, xylyl, cumenyl, mesityl, p-ethylphenyl, p-tert-butylphenyl, 2,6-diethylphenyl, and 2-methyl-6-ethylphenyl), and aromatic hydrocarbon groups having an alicyclic hydrocarbon group with 3 to 18 carbon atoms (such as p-cyclohexylphenyl and p-adamantylphenyl). When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms are preferred. Examples of aromatic hydrocarbon groups in which hydrogen atoms are substituted with alkoxy groups include p-methoxyphenyl groups. Examples of the chain hydrocarbon group in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as a benzyl group, a phenethyl group, a phenylpropyl group, a trityl group, a naphthylmethyl group, and a naphthylethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkylcarbonyloxy group include a methylcarbonyloxy group, an ethylcarbonyloxy group, a propylcarbonyloxy group, an isopropylcarbonyloxy group, a butylcarbonyloxy group, a sec-butylcarbonyloxy group, a tert-butylcarbonyloxy group, a pentylcarbonyloxy group, a hexylcarbonyloxy group, an octylcarbonyloxy group, and a 2-ethylhexylcarbonyloxy group. R b4 and R b5 and bond to each other together with the sulfur atom to which they are bonded to form a ring which may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may be a ring having 3 to 18 carbon atoms, preferably a ring having 4 to 18 carbon atoms. The ring containing a sulfur atom may be a 3- to 12-membered ring, preferably a 3- to 7-membered ring, for example, the following rings. * represents a bonding site. TIFF2023160797000093.tif23144R b9 and R b10 The ring formed by these together may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. This ring may be a 3- to 12-membered ring, preferably a 3- to 7-membered ring. Examples thereof include a thiolan-1-ium ring (tetrahydrothiophenium ring), a thian-1-ium ring, and a 1,4-oxathian-4-ium ring. R b11 and R b12The ring formed by combining these may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include a 3- to 12-membered ring, and preferably a 3- to 7-membered ring. Examples include an oxocycloheptane ring, an oxocyclohexane ring, an oxonorbornane ring, and an oxoadamantane ring.

[0138] Among the cations (b2-1) to (b2-4), the cation (b2-1) is preferred. Examples of the cation (b2-1) include the following cations. JPEG2023160797000094.jpg160163Examples of the cation (b2-2) include the following cations. TIFF2023160797000095.tif18153Examples of the cation (b2-3) include the following cations. TIFF2023160797000096.tif24126 Examples of the cation (b2-4) include the following cations. TIFF2023160797000097.tif144155

[0139] The acid generator (B) is a combination of the above-mentioned anion and the above-mentioned organic cation, and these can be combined arbitrarily. Preferred examples of the acid generator (B) include a combination of an anion represented by any of formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), (B1a-35) to (B1a-55), and (B2-B-1) to (B2-B-20) with a cation (b2-1), (b2-2), (b2-3), or (b2-4).

[0140] Preferred examples of the acid generator (B) include those represented by formulae (B1-1) to (B1-105) and (B2-1) to (B2-20). Among these, those containing an arylsulfonium cation are preferred, and those represented by formulae (B1-1) to (B1-3), (B1-5) to (B1-7), (B1-11) to (B1-14), (B1-20) to (B1-26), (B1-29), (B1-31) to (B1-72), and (B2-1) to (B2-20) are particularly preferred. TIFF2023160797000098.tif247168

[0141] TIFF2023160797000099.tif243160

[0142] TIFF2023160797000100.tif250163

[0143] TIFF2023160797000101.tif248163

[0144] TIFF2023160797000102.tif233163

[0145] TIFF2023160797000103.tif228168

[0146] In the resist composition of the present invention, the content of the acid generator (B) is preferably from 1 to 45% by mass, more preferably from 1 to 40% by mass, and even more preferably from 3 to 35% by mass, based on the solid content of the resist composition. Furthermore, the content of the acid generator (B) is preferably from 1 to 45 parts by mass, more preferably from 1 to 40 parts by mass, and even more preferably from 3 to 35 parts by mass, based on 100 parts by mass of the resin (A) described below. The resist composition of the present invention may contain one type of acid generator (B) alone, or may contain multiple types.

[0147] <Resin (A)> Resin (A) contains a structural unit having an acid labile group (hereinafter sometimes referred to as "structural unit (a1)"). Resin (A) preferably further contains a structural unit other than structural unit (a1). Examples of structural units other than structural unit (a1) include a structural unit not having an acid labile group (hereinafter sometimes referred to as "structural unit (s)"), structural units other than structural unit (a1) and structural unit (s) (for example, a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)") described below, a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)") described below, and other structural units derived from monomers known in the art.

[0148] <Structural unit (a1)> The structural unit (a1) is derived from a monomer having an acid labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid labile group contained in the resin (A) is preferably a group represented by formula (1) (hereinafter also referred to as group (1)) and / or a group represented by formula (2) (hereinafter also referred to as group (2)). TIFF2023160797000104.tif2298[In formula (1), R a1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining any of these; or R a1 and R a2 are bonded to each other to form, together with the carbon atoms to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * denotes a binding site.] TIFF2023160797000105.tif2278[In formula (2), R a1’ and R a2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’are bonded to each other to form, together with the carbon atom to which they are bonded and X, a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-. X represents an oxygen atom or a sulfur atom. na' represents 0 or 1. * denotes a binding site.]

[0149] R a1 , R a2 and R a3 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. R a1 , R a2 and R a3 Examples of the alkenyl group in the formula (I) include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. R a1 , R a2 and R a3 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site): a1 , R a2 and R a3 The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms. TIFF2023160797000106.tif10159R a1 , R a2 and R a3 Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group. Preferably, ma is 0 and na is 1. R a1 and R a2 -C(R a1 )(R a2 )(R a3 ) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-. TIFF2023160797000107.tif35157

[0150] R a1’ , R a2’ and R a3’ Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups. The alkyl group and the alicyclic hydrocarbon group are R a1 , R a2 and R a3 Examples of the groups include the same as those listed in the above. Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group. R a2’ and R a3’ When they are bonded to each other to form a heterocyclic group together with the carbon atoms to which they are bonded and X, -C(R a1’ )(R a2’ )-XR a3’ Examples of the groups include the following: * represents a binding site. TIFF2023160797000108.tif19124R a1’ and R a2’ At least one of these is preferably a hydrogen atom. na' is preferably 0.

[0151] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 is an alkyl group, ma=0, and na=1. The group is preferably a tert-butoxycarbonyl group. In formula (1), R a1 , R a2 together with the carbon atom to which they are attached form an adamantyl group, and R a3 is an alkyl group, ma=0, and na=1. In formula (1), R a1 and R a2are each independently an alkyl group, and R a3 is an adamantyl group, ma=0, and na=1. Specific examples of the group (1) include the following: * represents a binding site. TIFF2023160797000109.tif130165

[0152] Specific examples of group (2) include the following groups: * represents a binding site. TIFF2023160797000110.tif55153

[0153] The monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid labile group.

[0154] Of the (meth)acrylic monomers having an acid labile group, preferred are those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. When a resin (A) having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group is used in a resist composition, the resolution of the resist pattern can be improved.

[0155] Examples of structural units derived from a (meth)acrylic monomer having group (1) include a structural unit represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter sometimes referred to as structural unit (a1-2)). Preferably, at least one structural unit selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2) is used, and more preferably at least one or two structural units selected from the group consisting of structural unit (a1-1) and structural unit (a1-2). These may be used alone or in combination of two or more. TIFF2023160797000111.tif44144 [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or -O-(CH2) k1 represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—. R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these. m1' represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3.

[0156] R a01 , R a4 and R a5 is preferably a hydrogen atom or a methyl group, more preferably a methyl group. L a01 , L a1 and L a2 is preferably an oxygen atom or —O—(CH2) k01 It is —CO—O— (wherein k01 is preferably an integer of any one of 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 , R a03 , R a04 , R a6 and R a7The alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group and combinations thereof in the formula (1) include R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above. R a02 , R a03 , and R a04 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a6 and R a7 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a6 and R a7 The alkenyl group in the formula (I) is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group. R a02 , R a03 , R a04 , R a6 and R a7 The alicyclic hydrocarbon group preferably has 5 to 12 carbon atoms, and more preferably 5 to 10 carbon atoms. R a02 , R a03 , R a04 , R a6 and R a7 The aromatic hydrocarbon group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms. In the group in which an alkyl group and an alicyclic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the alicyclic hydrocarbon group is preferably 18 or less. In the group in which an alkyl group and an aromatic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the aromatic hydrocarbon group is preferably 18 or less. R a02 and R a03is preferably an alkyl group having 1 to 6 carbon atoms or an aromatic hydrocarbon group having 6 to 12 carbon atoms, and more preferably a methyl group, an ethyl group, a phenyl group or a naphthyl group. R a04 is preferably an alkyl group having 1 to 6 carbon atoms or an alicyclic hydrocarbon group having 5 to 12 carbon atoms, and more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group. R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms, an alkenyl group having 2 to 6 carbon atoms, or an aromatic hydrocarbon group having 6 to 12 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group, a phenyl group, or a naphthyl group, and even more preferably an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group, or a phenyl group. m1' is preferably an integer of 0 to 3, and more preferably 0 or 1. n1 is preferably an integer of 0 to 3, and more preferably 0 or 1. n1' is preferably 0 or 1.

[0157] Examples of the structural unit (a1-0) include structural units represented by any one of formulas (a1-0-1) to (a1-0-18) and R a01 and structural units in which the methyl group corresponding to the formula (a1-0-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom) or another alkyl group, and structural units represented by any of formulas (a1-0-1) to (a1-0-10), (a1-0-13) and (a1-0-14) are preferred. JPEG2023160797000112.jpg101162

[0158] Examples of the structural unit (a1-1) include structural units derived from monomers described in JP-A-2010-204646. Among these, structural units represented by any one of formulas (a1-1-1) to (a1-1-7) and R in the structural unit (a1-1) are preferred. a4A structural unit in which the methyl group corresponding to the formula (a1-1-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group is preferred, and a structural unit represented by any one of formulas (a1-1-1) to (a1-1-4) is more preferred. TIFF2023160797000113.tif39170

[0159] The structural unit (a1-2) includes a structural unit represented by any one of formulas (a1-2-1) to (a1-2-14) and R a5 and structural units in which the methyl group corresponding to the formula (a1-2-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group, and structural units represented by any of formulas (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-14) are preferred. TIFF2023160797000114.tif67163

[0160] When the resin (A) contains the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these, based on the total structural units of the resin (A), can be 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, and even more preferably 30 mol% or more. It can also be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, and even more preferably 70 mol% or less. Specifically, it can be 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, even more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%. When the resin (A) contains the structural unit (a1-0), the content thereof is 5 mol% or more, preferably 10 mol% or more, based on the total structural units of the resin (A). Also, the content is 80 mol% or less, preferably 75 mol% or less, and more preferably 70 mol% or less. Specifically, the content is 5 to 80 mol%, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%. When the resin (A) contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these structural units, based on all structural units in the resin (A), can be 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, and even more preferably 30 mol% or more. It can also be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, still more preferably 75 mol% or less, and even more preferably 70 mol% or less. Specifically, it can be 10 to 90 mol%, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, even more preferably 20 to 80 mol%, and even more preferably 20 to 75 mol%.

[0161] An example of the structural unit (a1) having the group (2) is a structural unit represented by formula (a1-4) (hereinafter, sometimes referred to as "structural unit (a1-4)"). TIFF2023160797000115.tif4563[In formula (a1-4), R a32 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a33 represents a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a30 is a single bond or *-X a31 -(A a32 -X a32 ) nc - represents -R a32 represents the bonding site with the carbon atom to which it is bonded. A a32 represents an alkanediyl group having 1 to 8 carbon atoms. X a31 and Xa32 each independently represents -O-, -CO-O- or -O-CO-. nc represents 0 or 1. la represents an integer of 0 to 4. When la is an integer of 2 or more, a plurality of R a33 may be the same or different from each other. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form, together with the -CO- to which they are bonded, a divalent hydrocarbon group having 2 to 20 carbon atoms, and the hydrocarbon group and the -CH2- contained in the divalent hydrocarbon group may be replaced with -O- or -S-.]

[0162] R a32 and R a33 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, and a bromine atom. R a32 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, and a perfluorohexyl group. R a32 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a33Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a33 Examples of the alkoxy group in include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a33 Examples of the alkoxyalkyl group in the formula (I) include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. R a33 Examples of the alkoxyalkoxy group in include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. R a33 Examples of the alkylcarbonyl group in the formula (I) include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. R a33Examples of the alkylcarbonyloxy group in the formula (I) include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a33 is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0163] *-X a31 -(A a32 -X a32 ) nc -Examples include *-O-, *-CO-O-, *-O-CO-, *-CO-OA a32 -CO-O-, *-O-CO-A a32 -O-, *-OA a32 -CO-O-, *-CO-OA a32 -O-CO-, *-O-CO-A a32 -O-CO-, and *-CO-O- and *-CO-OA are particularly mentioned. a32 -CO-O- or *-OA a32 -CO-O- is preferred. A a32 Examples of the alkanediyl group in the formula (I) include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. A a32 is preferably a methylene group or an ethylene group. A a30 is a single bond, *-CO-O- or *-CO-OA a32-CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0164] la is preferably 0, 1 or 2, more preferably 0 or 1, and even more preferably 0. R a34 , R a35 and R a36 Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which these groups are combined. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site): TIFF2023160797000116.tif10151 Examples of aromatic hydrocarbon groups include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group. In particular, R a36 Examples of the group include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these.

[0165] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group in R is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. a36 The alkyl group and alicyclic hydrocarbon group in R are preferably unsubstituted. a36 The aromatic hydrocarbon group in is preferably an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0166] -OC(R a34 )(R a35 )-ORa36 is eliminated on contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxy group. -OC(R a34 )(R a35 )-OR a36 is preferably bonded to the o- or p-position of the benzene ring, more preferably to the p-position.

[0167] Examples of the structural unit (a1-4) include structural units derived from monomers described in JP-A-2010-204646. Preferred are structural units represented by formulas (a1-4-1) to (a1-4-24) and R in the structural unit (a1-4). a32 and more preferably, the structural units represented by formulae (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20). TIFF2023160797000117.tif127160

[0168] When the resin (A) contains the structural unit (a1-4), the content thereof is preferably 10 to 95 mol %, more preferably 15 to 90 mol %, even more preferably 20 to 85 mol %, still more preferably 20 to 70 mol %, and even more preferably 20 to 60 mol %, based on the total of all structural units in the resin (A).

[0169] Examples of the structural unit derived from a (meth)acrylic monomer having the group (2) include a structural unit represented by formula (a1-5) (hereinafter, sometimes referred to as "structural unit (a1-5)"). TIFF2023160797000118.tif4253[In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom. Z a1is a single bond or -(CH2) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-. s1 represents an integer of 1 to 3. s1' represents an integer of 0 to 3.

[0170] Examples of halogen atoms include fluorine atoms and chlorine atoms, with fluorine atoms being preferred. Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a fluoromethyl group, and a trifluoromethyl group. In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L 53 Among these, it is preferred that one is —O— and the other is —S—. s1 is preferably 1. s1' is preferably an integer of 0 to 2. Z a1 is preferably a single bond or —CH2—CO—O—.

[0171] Examples of the structural unit (a1-5) include structural units derived from monomers described in JP-A-2010-61117. Among these, the structural units represented by formulas (a1-5-1) to (a1-5-4) are preferred, and the structural unit represented by formula (a1-5-1) or (a1-5-2) is more preferred. TIFF2023160797000119.tif31130

[0172] When the resin (A) contains the structural unit (a1-5), the content thereof is preferably 1 to 50 mol %, more preferably 3 to 45 mol %, even more preferably 5 to 40 mol %, and even more preferably 5 to 30 mol %, based on the total structural units of the resin (A).

[0173] Further, examples of the structural unit (a1) include the following structural units. TIFF2023160797000120.tif27161

[0174] When the resin (A) contains structural units such as (a1-3-1) to (a1-3-7), the content thereof is preferably 10 to 95 mol %, more preferably 15 to 90 mol %, even more preferably 20 to 85 mol %, even more preferably 20 to 70 mol %, and particularly preferably 20 to 60 mol %, based on the total structural units of the resin (A).

[0175] <Structural unit(s)> The structural unit (s) is derived from a monomer (hereinafter sometimes referred to as "monomer (s)") that does not have an acid labile group. As the monomer from which the structural unit (s) is derived, a monomer that does not have an acid labile group known in the resist field can be used. The structural unit (s) preferably has a hydroxy group or a lactone ring. The use of a resin containing a structural unit having a hydroxy group but no acid labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring but no acid labile group (hereinafter sometimes referred to as "structural unit (a3)") in the resist composition of the present invention can improve the resolution of the resist pattern and the adhesion to the substrate.

[0176] <Structural unit (a2)> The structural unit (a2) is a structural unit represented by formula (a2) and has an alcoholic hydroxy group or a phenolic hydroxy group. TIFF2023160797000121.tif3095[In formula (a2), R a50represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a50 is a single bond or *-X a51 -(A a52 -X a52 ) nb - represents -R a50 represents the bonding site with the carbon atom to which it is bonded. A a52 represents an alkanediyl group having 1 to 8 carbon atoms. X a51 and X a52 each independently represents -O-, -CO-O- or -O-CO-. nb represents 0 or 1. W a50 represents a cyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent. L a50 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms which may contain a fluorine atom. ma50 represents an integer of 1 to 5. R a50 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, and a bromine atom. R a50 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, and a perfluorohexyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. R a50is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0177] A a50 A in a52 Examples of the alkanediyl group include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The number of carbon atoms in the alkanediyl group is preferably 1 to 6, more preferably 1 to 4, even more preferably 1 to 3, and even more preferably 1 or 2. A a52 is preferably a methylene group or an ethylene group. *-X a51 -(A a52 -X a52 ) nb -Examples include *-O-, *-CO-O-, *-O-CO-, *-CO-OA a52 -CO-O-, *-O-CO-A a52 -O-, *-OA a52 -CO-O-, *-CO-OA a52 -O-CO-, *-O-CO-A a52 -O-CO-, and *-CO-O- and *-CO-OA are particularly mentioned. a52 -CO-O- or *-OA a52 -CO-O- is preferred. A a50 is a single bond, *-CO-O- or *-CO-OA a52 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0178] W a50Examples of the cyclic hydrocarbon group include a divalent alicyclic hydrocarbon group and a divalent aromatic hydrocarbon group. W a50 In the above, examples of the monocyclic divalent alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl. Examples of the polycyclic divalent alicyclic hydrocarbon group include polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 12, and more preferably 6 to 10. W a50 The divalent aromatic hydrocarbon group in the formula (I) may be a phenylene group or a naphthylene group. The aromatic hydrocarbon group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms. W a50 Examples of the substituent that the cyclic hydrocarbon group having 5 to 12 carbon atoms may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 12 carbon atoms, a haloalkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. a50 The number of substituents that may be present may be one or two or more. Examples of the halogen atom include a fluorine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The number of carbon atoms in the alkyl group is preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. Examples of haloalkyl groups include trifluoromethyl, difluoromethyl, perfluoroethyl, 2,2,2-trifluoroethyl, 1,1,2,2-tetrafluoroethyl, perfluoropropyl, 2,2,3,3,3-pentafluoropropyl, perfluorobutyl, 1,1,2,2,3,3,4,4-octafluorobutyl, perfluoropentyl, 2,2,3,3,4,4,5,5,5-nonafluoropentyl, perfluorohexyl, chloromethyl, bromomethyl, and iodomethyl. The number of carbon atoms in the haloalkyl group is preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. The number of carbon atoms in the alkoxy group is preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. W a50 The substituent of the cyclic hydrocarbon group is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0179] L a50 Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl; ethane-1,1-diyl; propane-1,1 Examples of branched alkanediyl groups include a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a 1-dimethylpropane-1,3-diyl group, a pentane-2,4-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, a pentane-2,4-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The chain hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, even more preferably 1 to 6 carbon atoms, and even more preferably 1 to 4 carbon atoms. L a50 may have one or more fluorine atoms. ma50 is preferably an integer of 1 to 4, and more preferably an integer of 1 to 3.

[0180] When producing a resist pattern from the resist composition of the present invention, if a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet) is used as an exposure light source, the structural unit (a2) preferably has a phenolic hydroxy group, and more preferably the structural unit (a2-A) described below. Furthermore, if an ArF excimer laser (193 nm) or the like is used, the structural unit (a2) preferably has an alcoholic hydroxy group, and more preferably the structural unit (a2-1) described below. The structural unit (a2) may contain one type alone or two or more types.

[0181] In the structural unit (a2), an example of a structural unit having a phenolic hydroxy group is a structural unit represented by formula (a2-A) (hereinafter, sometimes referred to as "structural unit (a2-A)"). TIFF2023160797000122.tif4753[In formula (a2-A), R a50 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a51 represents a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a50 is a single bond or *-X a51 -(A a52 -X a52 ) nb - represents -R a50 represents the bonding site with the carbon atom to which it is bonded. A a52 represents an alkanediyl group having 1 to 8 carbon atoms. X a51 and X a52 each independently represents -O-, -CO-O- or -O-CO-. nb represents 0 or 1. mb represents an integer of 0 to 4. When mb is an integer of 2 or more, a plurality of R a51 may be the same or different from each other.

[0182] R a50 and A a50 The groups include the same groups as those exemplified in formula (a2). R a51 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, and a bromine atom. R a51 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a51 Examples of the alkoxy group in include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a51 Examples of the alkoxyalkyl group in the formula (I) include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. R a51Examples of the alkoxyalkoxy group in include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. R a51 Examples of the alkylcarbonyl group in the formula (I) include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. R a51 Examples of the alkylcarbonyloxy group in the formula (I) include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a51 is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0183] mb is preferably 0, 1 or 2, and more preferably 0 or 1. At least one hydroxy group is preferably bonded to the meta or para position of the benzene ring, more preferably to the meta position. When two hydroxy groups are bonded to a phenyl group, the hydroxy groups are preferably bonded to the meta and para positions, respectively.

[0184] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A Nos. 2010-204634 and 2012-12577. The structural unit (a2-A) includes structural units represented by formulae (a2-2-1) to (a2-2-24) and R in the structural unit (a2-A) in the structural units represented by formulae (a2-2-1) to (a2-2-24). a50 The structural unit (a2-A) includes structural units represented by formulas (a2-2-1) to (a2-2-4), (a2-2-6), (a2-2-8), (a2-2-12) to (a2-2-18), and structural units represented by formulas (a2-2-1) to (a2-2-4), (a2-2-6), (a2-2-8), (a2-2-12) to (a2-2-18), in which R in the structural unit (a2-A) is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. a50 In the structural units represented by formulae (a2-2-3), (a2-2-4), (a2-2-8), (a2-2-12) to (a2-2-14), and (a2-2-18) and the structural units represented by formulae (a2-2-3), (a2-2-4), (a2-2-8), (a2-2-12) to (a2-2-14), and (a2-2-18), R in the structural unit (a2-A) is preferably a50 In the structural units represented by formulae (a2-2-3), (a2-2-4), and (a2-2-8) and the structural units represented by formulae (a2-2-3), (a2-2-4), and (a2-2-8), R in the structural unit (a2-A) is more preferably a structural unit in which a methyl group corresponding to a50 More preferably, the structural unit is a structural unit in which a methyl group corresponding to the following formula is replaced with a hydrogen atom: TIFF2023160797000123.tif79169

[0185] When the structural unit (a2-A) is contained in the resin (A), the content of the structural unit (a2-A) relative to all structural units is preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, and still more preferably 20 mol% or more. It is also preferably 80 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) can be incorporated into the resin (A) by, for example, polymerizing the structural unit (a1-4) and then treating with an acid such as p-toluenesulfonic acid. Alternatively, the structural unit (a2-A) can be incorporated into the resin (A) by polymerizing the structural unit (a1-4) and then treating with an alkali such as tetramethylammonium hydroxide.

[0186] Examples of the structural unit (a2-A) include a structural unit represented by the following formula (a2-A1) (hereinafter sometimes referred to as "structural unit (a2-A1)") and a structural unit represented by the following formula (a2-A2) (hereinafter sometimes referred to as "structural unit (a2-A2)"). TIFF2023160797000124.tif52136 [In formula (a2-A1) and formula (a2-A2), R a50 and A a50 have the same meaning as in formula (a2). mb1 represents an integer of 0 to 4. R a52 represents a halogen atom. R a53 represents an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. mb2 and mb3 each independently represent an integer of 0 to 4, and when mb2 is 2 or more, a plurality of R a52 may be the same or different, and when mb3 is 2 or more, multiple R a53 may be the same or different, and satisfy 1≦mb2+mb3≦4. R a52 The halogen atoms in a50 The substituents of the cyclic hydrocarbon group and R a51 The halogen atoms in R are the same as those in R. a52 The halogen atom is preferably a fluorine atom or an iodine atom. R a53 The alkyl group having 1 to 6 carbon atoms, the alkoxy group having 1 to 6 carbon atoms, the alkoxyalkyl group having 2 to 12 carbon atoms, the alkoxyalkoxy group having 2 to 12 carbon atoms, the alkylcarbonyl group having 2 to 4 carbon atoms, the alkylcarbonyloxy group having 2 to 4 carbon atoms, the acryloyloxy group or the methacryloyloxy group is, respectively, W a50 The substituents of the cyclic hydrocarbon group and R a51 Examples thereof include the same as the alkyl group, alkoxy group, alkoxyalkyl group, alkoxyalkoxy group, alkylcarbonyl group, alkylcarbonyloxy group, acroyloxy group and methacryloyloxy group in the above formula (I), more preferably a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a methoxy group or an ethoxyethoxy group. mb1 is preferably an integer of 0 to 3, more preferably an integer of 0 to 2, and further preferably 0 or 1. mb2 is preferably an integer of 0 to 3, more preferably an integer of 1 to 3, and further preferably 1 or 2. mb3 is preferably an integer of 0 to 3, more preferably an integer of 0 to 2, and further preferably 0 or 1.

[0187] An example of the structural unit (a2) having an alcoholic hydroxy group is a structural unit represented by formula (a2-1) (hereinafter, sometimes referred to as "structural unit (a2-1)"). TIFF2023160797000125.tif4258[In formula (a2-1), L a3 is -O- or *-O-(CH2) k2 represents -CO-O-, k2 represents an integer of 1 to 7. * represents the bonding site with —CO—. R a14 represents a hydrogen atom or a methyl group. R a15 and R a16 each independently represents a hydrogen atom, a methyl group, or a hydroxy group. o1 represents an integer between 0 and 10.

[0188] In equation (a2-1), L a3 is preferably -O-, -O-(CH2) f1 It is —CO—O— (wherein f1 represents an integer of 1 to 4), and more preferably —O—. R a14 is preferably a methyl group. R a15 is preferably a hydrogen atom. R a16 is preferably a hydrogen atom or a hydroxy group. o1 is preferably an integer of 0 to 3, and more preferably 0 or 1.

[0189] Examples of the structural unit (a2-1) include structural units derived from monomers described in JP 2010-204646 A. A structural unit represented by any one of formulas (a2-1-1) to (a2-1-6) is preferred, a structural unit represented by any one of formulas (a2-1-1) to (a2-1-4) is more preferred, and a structural unit represented by formula (a2-1-1) or formula (a2-1-3) is even more preferred. When the resin (A) contains the structural unit (a2-1), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on the total structural units of the resin (A). Alternatively, the content may be 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, the content may be 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and even more preferably 1 to 10 mol%.

[0190] An example of the structural unit (a2) having an alcoholic hydroxy group is a structural unit represented by formula (a2-B) (hereinafter, sometimes referred to as "structural unit (a2-B)"). TIFF2023160797000127.tif50104[In formula (a2-B), R a50 and A a50 have the same meaning as in formula (a2). R a54 and R a55 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a51 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. R a56 represents a halogen atom, a hydroxy group, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkyl group may be replaced by -O- or -CO-. mb4 represents an integer of 1 to 3, and when mb4 is 2 or more, multiple R a54 , R a55 and L a51 may be the same or different from each other. mb5 represents an integer from 0 to 4, and when mb5 is 2 or more, multiple R a56may be the same or different, provided that 1≦mb4+mb5≦5.

[0191] R a54 and R a55 Examples of the fluorinated alkyl groups having 1 to 4 carbon atoms in R each independently include a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, and a 4,4,4-trifluorobutyl group. a54 and R a55 As the aryl group, a trifluoromethyl group is preferred. L a51 Examples of the alkanediyl group having 1 to 3 carbon atoms include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group. a51 is preferably a single bond or a methylene group. R a56 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a56 The haloalkyl group having 1 to 4 carbon atoms represents an alkyl group having 1 to 4 carbon atoms and a halogen atom, and examples thereof include a chloromethyl group, a bromomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, and a perfluorobutyl group. R a56 Examples of the alkyl group having 1 to 12 carbon atoms in the formula include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, octyl group, nonyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. R a56 When -CH2- in the alkyl group represented by R is replaced with -O- or -CO-, the number of carbon atoms before the replacement is the total number of carbon atoms in the alkyl group. a56may have a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxyl group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), an alkoxy group having 1 to 11 carbon atoms (a group in which -CH2- in an alkyl group having 2 to 12 carbon atoms is replaced with -O-), an alkoxycarbonyl group having 2 to 11 carbon atoms (a group in which -CH2-CH2- in an alkyl group having 3 to 12 carbon atoms is replaced with -O-CO-), an alkylcarbonyl group having 2 to 12 carbon atoms (a group in which -CH2- in an alkyl group having 2 to 12 carbon atoms is replaced with -CO-), or an alkylcarbonyloxy group having 2 to 11 carbon atoms (a group in which -CH2-CH2- in an alkyl group having 3 to 12 carbon atoms is replaced with -CO-O-). R a56 Among these, a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced by -O- or -CO-) is preferred. mb4 is preferably 1 or 2, and more preferably 1. Even more preferably, mb4 is 1 and the group in parentheses is bonded to the para position. mb5 is preferably an integer of 0 to 2, more preferably 0 or 1, and even more preferably 0.

[0192] The structural unit (a2-B) is more preferably a structural unit represented by the following formula (a2-B1) (hereinafter, sometimes referred to as "structural unit (a2-B1)"). TIFF2023160797000128.tif4787[In formula (a2-B1), R a57 represents a hydrogen atom or a methyl group. A a53 represents a single bond or *-CO-O-, and * represents -R a57 represents the bonding site with the carbon atom to which it is bonded. R a56 , mb4 and mb5 have the same meanings as in formula (a2-B).

[0193] In formula (a2-B1), R a57 is preferably a hydrogen atom. A a53 is preferably a single bond.

[0194] Examples of the structural unit (a2-B) include the structural units shown below. TIFF2023160797000129.tif62168

[0195] In the structural units represented by formulae (a2-B-1) to (a2-B-8), R a57 In the structural units represented by formulae (a2-B-9) to (a2-B-16), the structural unit in which the hydrogen atom corresponding to R is replaced with a methyl group is also a57 Specific examples of the structural unit (a2-B) include structural units in which a methyl group corresponding to the following formula is replaced with a hydrogen atom. Among these, structural units represented by formulas (a2-B-1) to (a2-B-8) are preferred, structural units represented by formulas (a2-B-1) to (a2-B-4) are more preferred, and structural unit represented by formula (a2-B-1) is even more preferred.

[0196] When the resin (A) contains the structural unit (a2-B), its content is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin (A). It is also preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0197] <Structural unit (a3)> The lactone ring contained in the structural unit (a3) ​​may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or a condensed ring of a monocyclic lactone ring with another ring. Preferred examples include a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0198] The structural unit (a3) ​​is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3), or formula (a3-4). One of these may be contained alone, or two or more may be contained. TIFF2023160797000130.tif50161 [In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 , L a5 and L a6 are each independently -O- or -O-(CH2) k3 It represents a group represented by —CO—O— (k3 represents an integer of 1 to 7). L a7 -O-, *-OL a8 -O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * indicates the bonding site with the carbonyl group. R a18 , R a19 , R a20 and R a24 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer of 0 to 5. q1 represents an integer of 0 to 3. r1 represents an integer of 0 to 3. w1 represents an integer of 0 to 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 may be the same as or different from each other.

[0199] R a21 , R a22 , R a23 and R a25 Examples of the aliphatic hydrocarbon group in include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, and a tert-butyl group. R a18 , R a19 , R a20 and R a24 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a18 , R a19 , R a20 and R a24 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group, and preferably an alkyl group having 1 to 4 carbon atoms, and more preferably a methyl group or an ethyl group. R a18 , R a19 , R a20 and R a24Examples of the alkyl group having a halogen atom in the formula (I) include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group. L a8 and L a9 Examples of the alkanediyl group in the formula (I) include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group.

[0200] In formulas (a3-1) to (a3-3), L a4 ~L a6 are each independently preferably -O- or -O-(CH2) k3 In -CO-O-, k3 is a group in which k3 is any integer of 1 to 4, more preferably -O- and *-O-CH2-CO-O-, and even more preferably an oxygen atom. R a18 ~R a21 is preferably a methyl group. R a22 and R a23 are each independently preferably a carboxy group, a cyano group, or a methyl group. p1, q1 and r1 each independently represent an integer of preferably 0 to 2, and more preferably 0 or 1.

[0201] In formula (a3-4), R a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a25is preferably a carboxy group, a cyano group or a methyl group. L a7 is preferably -O- or *-OL a8 It is —CO—O—, and more preferably —O—, —O—CH 2 —CO—O— or —O—C 2 H 4 —CO—O—. w1 is preferably an integer of 0 to 2, and more preferably 0 or 1. In particular, the formula (a3-4) is preferably the formula (a3-4)'. TIFF2023160797000131.tif4051 (in the formula, R a24 , L a7 has the same meaning as above.)

[0202] Examples of the structural unit (a3) ​​include structural units derived from monomers described in JP 2010-204646 A, JP 2000-122294 A, and JP 2012-41274 A. Examples of the structural unit (a3) ​​include structural units represented by any of formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the structural units, R in formulas (a3-1) to (a3-4) a18 , R a19 , R a20 and R a24 A structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom is preferred.

[0203] When the resin (A) contains the structural unit (a3), the total content thereof, based on all structural units in the resin (A), can be 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more. It can also be 70 mol% or less, preferably 65 mol% or less, and more preferably 60 mol% or less. Specifically, it can be 1 to 70 mol%, preferably 3 to 65 mol%, and more preferably 5 to 60 mol%. Furthermore, the content of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, and even more preferably 5 mol% or more, based on the total structural units of the resin (A). It is also preferably 60 mol% or less, more preferably 55 mol% or less, and even more preferably 50 mol% or less. Specifically, it is preferably 1 to 60 mol%, more preferably 3 to 55 mol%, and even more preferably 5 to 50 mol%.

[0204] <Structural unit (a4)> Examples of the structural unit (a4) include the following structural units. TIFF2023160797000133.tif3066[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents a saturated hydrocarbon group having 1 to 24 carbon atoms and containing a halogen atom, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-.] R 42 Examples of the saturated hydrocarbon group represented by the formula (I) include chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these groups.

[0205] Examples of the chain hydrocarbon group include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl, and octadecyl groups. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups; decahydronaphthyl, adamantyl, norbornyl, and polycyclic alicyclic hydrocarbon groups such as the following groups (* indicates a bonding site): TIFF2023160797000134.tif11159 Examples of groups formed by combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic hydrocarbon group-alkyl group.

[0206] The structural unit (a4) is preferably a structural unit having a fluorine atom, and examples thereof include structural units represented by at least one selected from the group consisting of formulae (a4-0), (a4-1), (a4-2), (a4-3), and (a4-4). TIFF2023160797000135.tif4652[In formula (a4-0), R 5 represents a hydrogen atom or a methyl group. L 4a represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 4 carbon atoms. L 3a represents a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms. R 6 represents a hydrogen atom or a fluorine atom.

[0207] L 4a Examples of the divalent aliphatic saturated hydrocarbon group in the formula (I) include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, and a butane-1,4-diyl group, and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,2-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. L 3aExamples of the perfluoroalkanediyl group in the formula (I) include a difluoromethylene group, a perfluoroethylene group, a perfluoropropane-1,1-diyl group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3 ,3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group. L 3a Examples of the perfluorocycloalkanediyl group in the formula (I) include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, and a perfluoroadamantanediyl group.

[0208] L 4a is preferably a single bond, a methylene group, or an ethylene group, and more preferably a single bond or a methylene group. L 3a is preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0209] The structural unit (a4-0) includes the structural units shown below and R in the structural unit (a4-0) in the structural units shown below. 5 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example. TIFF2023160797000136.tif99169

[0210] TIFF2023160797000137.tif4670[In formula (a4-1), R a41 represents a hydrogen atom or a methyl group. R a42 represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. A a41 represents an alkanediyl group having 1 to 6 carbon atoms which may have a substituent or a group represented by formula (a-g1), a41 and R a42 At least one of the groups has a halogen atom (preferably a fluorine atom) as a substituent. TIFF2023160797000138.tif1384 [In formula (a-g1), s represents 0 or 1. A a42 and A a44 each independently represents a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may have a substituent. A a43 represents a single bond or a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may have a substituent. X a41 and X a42 each independently represents -O-, -CO-, -CO-O- or -O-CO-. However, A a42 , A a43 , A a44 , X a41 and X a42 The total number of carbon atoms is 7 or less. * indicates the binding site, and the * on the right is -O-CO-R a42 ]

[0211] R a42 Examples of the saturated hydrocarbon group in include a chain saturated hydrocarbon group, a monocyclic or polycyclic alicyclic saturated hydrocarbon group, and groups formed by combining these groups. Examples of the chain saturated hydrocarbon group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a decyl group, a dodecyl group, a pentadecyl group, a hexadecyl group, a heptadecyl group, and an octadecyl group. Examples of the monocyclic or polycyclic alicyclic saturated hydrocarbon group include cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group; and polycyclic alicyclic saturated hydrocarbon groups such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups (* indicates a bonding site): TIFF2023160797000139.tif11159 Examples of groups formed by this combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group-alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic saturated hydrocarbon group-alkyl group.

[0212] R a42 Examples of the substituent that may be possessed by include at least one selected from a halogen atom and a group represented by formula (a-g3): Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, and a fluorine atom is preferred. TIFF2023160797000140.tif965[In formula (a-g3), X a43 represents an oxygen atom, a carbonyl group, *-O-CO- or *-CO-O-. A a45 represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom. * represents R a42 represents the binding site with However, R a42 -X a43 -A a45 In R a42 If A does not have a halogen atom, a45 represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms and at least one halogen atom.

[0213] A a45 Examples of the aliphatic hydrocarbon group in the formula (I) include alkyl groups such as a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a decyl group, a dodecyl group, a pentadecyl group, a hexadecyl group, a heptadecyl group, and an octadecyl group; Examples include monocyclic alicyclic hydrocarbon groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups; and polycyclic alicyclic hydrocarbon groups such as decahydronaphthyl, adamantyl, and norbornyl groups, and the following groups (* indicates a bonding site): TIFF2023160797000141.tif11159 Examples of groups formed by combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic hydrocarbon group-alkyl group.

[0214] R a42 is preferably an aliphatic hydrocarbon group which may have a halogen atom, and more preferably an aliphatic hydrocarbon group having an alkyl group having a halogen atom and / or a group represented by formula (a-g3). R a42 When is an aliphatic hydrocarbon group having a halogen atom, it is preferably an aliphatic hydrocarbon group having a fluorine atom, more preferably a perfluoroalkyl group or a perfluorocycloalkyl group, still more preferably a perfluoroalkyl group having 1 to 6 carbon atoms, and particularly preferably a perfluoroalkyl group having 1 to 3 carbon atoms. Examples of perfluoroalkyl groups include perfluoromethyl group, perfluoroethyl group, perfluoropropyl group, perfluorobutyl group, perfluoropentyl group, perfluorohexyl group, perfluoroheptyl group, and perfluorooctyl group. Examples of perfluorocycloalkyl groups include perfluorocyclohexyl group. R a42is an aliphatic hydrocarbon group having a group represented by formula (a-g3), the number of carbon atoms contained in the group represented by formula (a-g3) is a42 The total number of carbon atoms is preferably 15 or less, more preferably 12 or less. When the group represented by formula (a-g3) is contained as a substituent, the number thereof is preferably 1.

[0215] R a42 is an aliphatic hydrocarbon group having a group represented by formula (a-g3), R a42 is more preferably a group represented by formula (a-g2). TIFF2023160797000142.tif879[In formula (a-g2), A a46 represents a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom. X a44 represents **-O-CO- or **-CO-O- (** represents A a46 (representing the binding site with A a47 represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom. However, A a46 , A a47 and X a44 The total number of carbon atoms in A is 18 or less. a46 and A a47 At least one of the groups has at least one halogen atom. * indicates the bonding site with the carbonyl group.]

[0216] A a46 The aliphatic hydrocarbon group preferably has 1 to 6 carbon atoms, and more preferably 1 to 3 carbon atoms. A a47 The aliphatic hydrocarbon group preferably has 4 to 15 carbon atoms, more preferably 5 to 12 carbon atoms, and A a47 is more preferably a cyclohexyl group or an adamantyl group.

[0217] A preferred structure of the group represented by formula (a-g2) is the following structure (* indicates the bonding site with the carbonyl group): JPEG2023160797000143.jpg13161

[0218] A a41 Examples of the alkanediyl group in the formula (I) include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl; and branched alkanediyl groups such as propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl. A a41 Examples of the substituent in the alkanediyl group include a hydroxy group and an alkoxy group having 1 to 6 carbon atoms. A a41 is preferably an alkanediyl group having 1 to 4 carbon atoms, more preferably an alkanediyl group having 2 to 4 carbon atoms, and even more preferably an ethylene group.

[0219] A in the group represented by formula (a-g1) a42 , A a43 and A a44 Examples of the divalent saturated hydrocarbon group represented by include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic hydrocarbon group, and a group formed by combining an alkanediyl group with a divalent alicyclic hydrocarbon group. Specific examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. A a42 , A a43 and A a44 Examples of the substituent of the divalent saturated hydrocarbon group represented by the formula include a hydroxy group and an alkoxy group having 1 to 6 carbon atoms. Preferably, s is 0.

[0220] In the group represented by formula (a-g1), X a42In the following examples, * and ** each represent a bonding site, and ** represents -O-CO-R a42 This is the binding site for TIFF2023160797000144.tif45143

[0221] The structural unit represented by formula (a4-1) includes the structural units shown below and R in the structural unit represented by formula (a4-1) in the structural units shown below. a41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example. TIFF2023160797000145.tif172167

[0222] The structural unit represented by formula (a4-1) is preferably a structural unit represented by formula (a4-2). TIFF2023160797000146.tif4365[In formula (a4-2), R f5 represents a hydrogen atom or a methyl group. L 44 represents an alkanediyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-. R f6 represents a saturated hydrocarbon group having 1 to 20 carbon atoms and containing a fluorine atom. However, L 44 and R f6 The maximum total carbon number is 21.]

[0223] L 44 The alkanediyl group having 1 to 6 carbon atoms is A a41 Examples of the alkanediyl group include the same groups as those exemplified as the alkanediyl group in the above. R f6 The saturated hydrocarbon group of R a42 Examples of the groups include the same groups as those exemplified in L 44 As the alkanediyl group ha...

Claims

1. A carboxylic acid generator containing a carboxylic acid salt represented by formula (I): [In formula (I), Ar １ , Ar ２ and Ar ３ each independently represents naphthalene, anthracene, or phenanthrene. R １ , R ２ and R ３ are each independently -O-R １０ , -O-CO-OR １０ or -OL １０ -CO-O-R １０ Represents. L １０ represents an alkanediyl group having 1 to 6 carbon atoms. R １０ represents an acid labile group. R ４ , R ５ , R ６ , R ７ , R ８ and R ９ each independently represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 36 carbon atoms, and the hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. A １ , A ２ and A ３ each independently represents a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent. 2 - represents -O-, -CO-, -S- or -SO ２ It may be replaced with -. m1 represents an integer of 1 to 5, and when m1 is 2 or more, the groups in the parentheses may be the same or different. m2 represents an integer of 0 to 5, and when m2 is 2 or more, the groups in the parentheses may be the same or different. m3 represents an integer of 0 to 5, and when m3 is 2 or more, the groups in the parentheses may be the same or different. m4 represents an integer of 0 to 7, and when m4 is 2 or more, a plurality of R ４ may be the same or different from each other. m5 represents an integer of 0 to 7, and when m5 is 2 or more, a plurality of R ５ may be the same or different from each other. m6 represents an integer of 0 to 7, and when m6 is 2 or more, a plurality of R ６ may be the same or different from each other. m7 represents an integer of 0 to 4, and when m7 is 2 or more, a plurality of R ７ may be the same or different from each other. m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R ８ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. However, 1≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5. X ０ represents a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ - may be replaced by .

2. A １ But, ***-X ０１ -L ０１ - or ***-L ０１ -X ０１ - and A ２ But, ***-X ０２ -L ０２ - or ***-L ０２ -X ０２ - and A ３ But, ***-X ０３ -L ０３ - or ***-L ０３ -X ０３ - and X ０１ , X ０２ and X ０３ each independently represents —O—, —CO—, —S—, or —SO ２ represents -, L ０１ , L ０２ and L ０３ each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. 2 - represents -O-, -CO-, -S- or -SO ２ - may be replaced by *** is S ＋ The carboxylic acid generator according to claim 1 , wherein the carboxylic acid generator is a carboxylic acid generator having a carboxylic acid group bonded to a benzene ring.

3. X ０１ , X ０２ and X ０３ The carboxylic acid generator according to claim 2, wherein each of the groups independently represents —O— or —S—.

4. L ０１ , L ０２ and L ０３ each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH 2 3. The carboxylic acid generator according to claim 2, wherein - may be replaced by -O- or -CO-.

5. R １０ 2. The carboxylic acid generator according to claim 1, wherein the acid labile group is a group represented by formula (1a) or a group represented by formula (2a). [In formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these groups, or R aa1 and R aa2 are bonded to each other to form, together with the carbon atoms to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms. * indicates a binding site.] [In formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other and bonded to -C-X ａ Together with —, it forms a heterocyclic group having 3 to 20 carbon atoms, and —CH contained in the hydrocarbon group and the heterocyclic group ２ - may be replaced by -O- or -S-. X a represents an oxygen atom or a sulfur atom. * indicates a binding site.]

6. Ar １ is naphthalene or anthracene, m4 is 0, or m4 is 1, 2, 3, 4 or 5, and R ４ is a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH 2 2. The carboxylic acid generator according to claim 1, wherein - may be replaced by -O- or -CO-.

7. Ar １ , Ar ２ and Ar ３ The carboxylic acid generator according to claim 1, wherein is naphthalene.

8. X ０ is an aliphatic hydrocarbon group having 1 to 72 carbon atoms which may have a substituent (-CH contained in the aliphatic hydrocarbon group). 2 - is -O-, -S-, -CO- or -SO ２ -), an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent, a group represented by formula (aa) or a group represented by formula (bb). [In formula (aa), X a and X b each independently represents —O— or —S—. X １ａ represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. X ２ａ represents a hydrocarbon group having 1 to 48 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. * indicates -COO － represents the bonding site with the carbon atom of [In formula (bb), L Ａ represents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom, or an aromatic hydrocarbon group having 6 to 14 carbon atoms which may have a halogen atom or a perfluoroalkyl group having 1 to 4 carbon atoms. L Ｂ represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. R Ａ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. * indicates -COO － represents the bonding site with the carbon atom of

9. X ０ is a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alicyclic hydrocarbon group having 3 to 36 carbon atoms which may have a hydroxy group (the —CH 2 - is -O-, -S-, -CO- or -SO ２ -), a group in which an alicyclic hydrocarbon group having 3 to 36 carbon atoms is combined with a chain hydrocarbon group having 1 to 18 carbon atoms (the -CH contained in the alicyclic hydrocarbon group may be replaced with -), 2 - is -O-, -S-, -CO- or -SO ２ may be replaced by -, and -CH contained in the chain hydrocarbon group 2 The carboxylic acid generator according to claim 8, which is an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group, a group represented by formula (aa), or a group represented by formula (bb).

10. 10. A resist composition comprising the carboxylic acid generator according to claim 1 and an acid generator other than said carboxylic acid generator.

11. further containing a resin containing a structural unit having an acid labile group, 11. The resist composition according to claim 10, wherein the structural unit having an acid labile group comprises at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), and a structural unit represented by formula (a1-2): [In formula (a1-0), formula (a1-1) and formula (a1-2), L ａ０１ , L ａ１ and L ａ２ are each independently —O— or *—O—(CH ２ ) ｋ１ represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—. R ａ０１ , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ０２ , R ａ０３ and R ａ０４ each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these. m1' represents an integer of 0 to 14; n1 represents an integer of 0 to 10. n1′ represents an integer of 0 to 3.]

12. 11. The resist composition according to claim 10, further comprising a resin containing a structural unit having a fluorine atom.

13. (1) a step of applying the resist composition according to claim 10 onto a substrate; (2) a step of drying the applied composition to form a composition layer; (3) exposing the composition layer to light; (4) a step of heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising:

14. A carboxylic acid salt represented by formula (I): [In formula (I), Ar １ , Ar ２ and Ar ３ each independently represents naphthalene, anthracene, or phenanthrene. R １ , R ２ and R ３ are each independently -O-R １０ , -O-CO-OR １０ or -OL １０ -CO-O-R １０ Represents. L １０ represents an alkanediyl group having 1 to 6 carbon atoms. R １０ represents an acid labile group. R ４ , R ５ , R ６ , R ７ , R ８ and R ９ each independently represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 36 carbon atoms, and the hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. A １ , A ２ and A ３ each independently represents a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent. 2 - represents -O-, -CO-, -S- or -SO ２ It may be replaced with -. m1 represents an integer of 1 to 5, and when m1 is 2 or more, the groups in the parentheses may be the same or different. m2 represents an integer of 0 to 5, and when m2 is 2 or more, the groups in the parentheses may be the same or different. m3 represents an integer of 0 to 5, and when m3 is 2 or more, the groups in the parentheses may be the same or different. m4 represents an integer of 0 to 7, and when m4 is 2 or more, a plurality of R ４ may be the same or different from each other. m5 represents an integer of 0 to 7, and when m5 is 2 or more, a plurality of R ５ may be the same or different from each other. m6 represents an integer of 0 to 7, and when m6 is 2 or more, a plurality of R ６ may be the same or different from each other 。 m7 represents an integer of 0 to 4, and when m7 is 2 or more, a plurality of R ７ may be the same or different from each other. stomach. m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R ８ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. However, 1≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5. X ０ represents a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ May be replaced with - 。］

15. A １ But, ***-X ０１ -L ０１ - or ***-L ０１ -X ０１ - and A ２ But, ***-X ０２ -L ０２ - or ***-L ０２ -X ０２ - and A ３ But, ***-X ０３ -L ０３ - or ***-L ０３ -X ０３ - and X ０１ , X ０２ and X ０３ each independently represents —O—, —CO—, —S—, or —SO ２ represents -, L ０１ , L ０２ and L ０３ each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. 2 - represents -O-, -CO-, -S- or -SO ２ - may be replaced by *** is S ＋ The carboxylate salt according to claim 14, wherein the benzene ring is bonded to the

16. X ０１ , X ０２ and X ０３ are each independently —O— or —S—.

17. L ０１ , L ０２ and L ０３ each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH 2 17. The carboxylate according to claim 15 or 16, wherein - may be replaced by -O- or -CO-.

18. R １０ 16. The carboxylate salt according to claim 14 or 15, wherein the acid labile group is a group represented by formula (1a) or a group represented by formula (2a): [In formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 are bonded to each other to form, together with the carbon atoms to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms. * indicates a binding site.] [In formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other and bonded to -C-X ａ Together with —, it forms a heterocyclic group having 3 to 20 carbon atoms, and —CH contained in the hydrocarbon group and the heterocyclic group ２ - may be replaced by -O- or -S-. X a represents an oxygen atom or a sulfur atom. * indicates a binding site.]

19. Ar １ is naphthalene or anthracene, m4 is 0, or m4 is 1, 2, 3, 4 or 5, and R ４ is a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH 2 The carboxylate according to claim 14 or 15, wherein - may be replaced by -O- or -CO-.

20. Ar １ , Ar ２ and Ar ３ The carboxylate according to claim 14 or 15, wherein is naphthalene.

21. X ０ is an aliphatic hydrocarbon group having 1 to 72 carbon atoms which may have a substituent (-CH contained in the aliphatic hydrocarbon group). 2 - is -O-, -S-, -CO- or -SO ２ -), an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent, a group represented by formula (aa), or a group represented by formula (bb). [In formula (aa), X a and X b each independently represents —O— or —S—. X １ａ represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. X ２ａ represents a hydrocarbon group having 1 to 48 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. * indicates -COO － represents the bonding site with the carbon atom of [In formula (bb), L Ａ represents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom, or an aromatic hydrocarbon group having 6 to 14 carbon atoms which may have a halogen atom or a perfluoroalkyl group having 1 to 4 carbon atoms. L Ｂ represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. R Ａ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. * indicates -COO － represents the bonding site with the carbon atom of

22. X ０ is a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alicyclic hydrocarbon group having 3 to 36 carbon atoms which may have a hydroxy group (the —CH 2 - is -O-, -S-, -CO- or -SO ２ -), a group in which an alicyclic hydrocarbon group having 3 to 36 carbon atoms is combined with a chain hydrocarbon group having 1 to 18 carbon atoms (the -CH contained in the alicyclic hydrocarbon group may be replaced with -), 2 - is -O-, -S-, -CO- or -SO ２ may be replaced by -, and -CH contained in the chain hydrocarbon group 2 The carboxylate according to claim 21, which is an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group; a group represented by formula (aa); or a group represented by formula (bb).

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