Magnetic sensor, manufacturing method of magnetic sensor, and sensing element assembly
JP2024005740A5Pending Publication Date: 2025-04-14RESONAC CORP
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Patent Information
- Application Number
- JP2022106078
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2022-06-30
- Publication Date
- 2025-04-14
AI Technical Summary
Technical Problem
Existing magnetic sensors formed by laminating soft magnetic layers on a substrate often exhibit variations in magnetic properties due to differences in position on the substrate, leading to inconsistent performance among multiple sensing sections or sensors.
Method used
The introduction of a sub-soft magnetic layer with higher saturation magnetization than the soft magnetic layer, laminated between the substrate and the soft magnetic layer, along with uniaxial magnetic anisotropy and a conductive layer, helps stabilize magnetic properties and reduce variations.
Benefits of technology
This configuration reduces differences in magnetic properties among multiple sensing elements or sensors, enhancing their consistency and sensitivity to magnetic fields.
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Abstract
To provide a magnetic sensor capable of reducing the difference in magnetic properties among multiple sensing parts formed from the same substrate or multiple magnetic sensors.SOLUTION: The magnetic sensor includes: a substrate; and a sensing part formed on the substrate and having a longitudinal direction and a transverse direction, which senses magnetic fields due to the magnetic impedance effect. The sensing part has a soft magnetic layer made of a soft magnetic material that has uniaxial magnetic anisotropy in the direction intersecting the longitudinal direction and which senses magnetic fields, and a sub-soft magnetic layer made of a soft magnetic material with a higher saturation magnetization than the soft magnetic layer, which is laminated between the substrate and the soft magnetic layer.SELECTED DRAWING: Figure 2
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