Compounds, rust-preventive agents, and lubricant compositions

Abstract

To provide compounds excellent in thermal stability and rust prevention and free of metal content.SOLUTION: A compound represented by the general formula (B1) in the figure is provided. [L1 is a C1-10 divalent saturated aliphatic hydrocarbon group; L2 and L3 are each independently a C1-6 alkylene group; and Y1 and Y2 are each independently a methylene group or O.]SELECTED DRAWING: None

Description

[Technical field]

[0001] The present invention relates to a compound, a rust inhibitor, and a lubricant composition. More specifically, the present invention relates to a compound, a rust inhibitor containing the compound, and a lubricant composition containing the compound. [Background technology]

[0002] Ionic liquids are known as base materials used in lubricant compositions that have low viscosity but also excellent lubricating properties and thermal stability. However, compared with mineral oils and synthetic oils, which are base materials commonly used in lubricant compositions, ionic liquids have the disadvantages of being highly corrosive and having poor rust prevention properties. As a method for compensating for this disadvantage, a method is known in which one or more selected from sodium nitrite, sodium molybdate, and sodium sebacate are blended with the ionic liquid (see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2009-249585 A Summary of the Invention [Problem to be solved by the invention]

[0004] In recent years, due to the above-mentioned advantages of ionic liquids, it has become anticipated that lubricant compositions based on ionic liquids will be used in high vacuum and high temperature environments such as vacuum chambers in semiconductor manufacturing equipment. However, in the semiconductor manufacturing process, it is necessary to avoid contamination of semiconductors with metals such as alkali metals and heavy metals, etc. Therefore, it is not possible to improve the rust prevention properties of a lubricant composition by blending sodium nitrite, sodium molybdate, and sodium sebacate with an ionic liquid as described in Patent Document 1.

[0005] Therefore, an object of the present invention is to provide a compound which is excellent in thermal stability and rust prevention properties and does not contain metal components, a rust inhibitor containing the compound, and a lubricant composition containing the compound. [Means for solving the problem]

[0006] The present inventors have conducted extensive research to solve the above problems, and as a result have found that a compound having a specific structure can solve the above problems, thereby completing the present invention.

[0007] That is, the present invention relates to the following [1] to [5]. [1] A compound represented by the following general formula (B1): [ka] [In the general formula (B1), each symbol represents the following.] L 1 represents a divalent saturated aliphatic hydrocarbon group having 1 to 10 carbon atoms. L 2 and L 3 each independently represents an alkylene group having 1 to 6 carbon atoms. Y 1 and Y 2 each independently represents a methylene group or an oxygen atom. n1 and n2 each independently represents 1 or 2. When n1 is 1, m1 is an integer from 0 to 8. When n1 is 2, m1 is an integer from 0 to 10. When n2 is 1, m2 is an integer from 0 to 8. When n2 is 2, m2 is an integer from 0 to 10. R 1 and R 2 each independently represents an alkyl group having 1 to 3 carbon atoms.] [2] A method of using the compound according to the above item [1] as a rust inhibitor. [3] A rust inhibitor containing the compound described in [1] above. [4] A lubricant composition comprising an ionic liquid and the compound described in [1] above. [5] A method for producing a lubricant composition, comprising the step of mixing an ionic liquid with the compound described in [1] above. Effect of the Invention

[0008] According to the present invention, it is possible to provide a compound having excellent thermal stability and rust prevention properties and containing no metal components, a rust inhibitor containing said compound, and a lubricant composition containing said compound. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] The upper and lower limit values ​​of the numerical ranges described in this specification can be combined in any way. For example, when "A to B" and "C to D" are described as numerical ranges, the numerical ranges "A to D" and "C to B" are also included in the scope of the present invention. In addition, unless otherwise specified, a numerical range of "lower limit value to upper limit value" described in this specification means not less than the lower limit value and not more than the upper limit value. In this specification, the numerical values ​​in the examples are numerical values ​​that can be used as upper or lower limits.

[0010] [Compound Aspects] The compound of this embodiment is represented by the following general formula (B1). [ka] [In the general formula (B1), each symbol represents the following.] L 1 represents a divalent saturated aliphatic hydrocarbon group having 1 to 10 carbon atoms. L 2 and L 3 each independently represents an alkylene group having 1 to 6 carbon atoms. Y 1 and Y 2 each independently represents a methylene group or an oxygen atom. n1 and n2 each independently represents 1 or 2. When n1 is 1, m1 is an integer from 0 to 8. When n1 is 2, m1 is an integer from 0 to 10. When n2 is 1, m2 is an integer from 0 to 8. When n2 is 2, m2 is an integer from 0 to 10. R 1 and R 2 each independently represents an alkyl group having 1 to 3 carbon atoms.]

[0011] The present inventors have conducted various investigations to solve the above problems. As a result, the present inventors found that among compounds having a structure in which two betaine structures are present approximately on the left and right sides via a linker, and in which the betaine structure is constituted by a cation of an intramolecular heterocycle having one nitrogen atom as a heteroatom and a carboxy anion, a compound having a specific structure can solve the above-mentioned problem. The mechanism by which the compound of the present embodiment exhibits the effects of the present invention has not been clearly understood, but is presumed to be as follows, for example. That is, (i) the structure in which two betaine structures are present on the left and right sides via a linker contributes to improving the thermal stability of the compound, (ii) the heterocyclic structure constituting the betaine structure contributes to further improving the thermal stability of the compound, (iii) the two carboxy anions at the end of the compound also contribute to further improving the thermal stability and also contribute to rust prevention, and (iv) the linker connecting the two heterocycles and the linker connecting the heterocycle and the carboxy anion are of appropriate length, which is presumed to contribute to thermal stability and rust prevention. And, it is presumed that these contributions work together to form a compound that is excellent in thermal stability and rust prevention. In other words, it can be said that the compound of this embodiment is a compound in which the structure for achieving the effects of the present invention is effectively and efficiently concentrated in one molecule. In addition, the following points are worthy of special mention. That is, compounds containing metals such as alkali metals, such as sodium sebacate, generally tend to have excellent thermal stability. In contrast, the compound of the present embodiment does not contain metals, but has excellent thermal stability due to the structural features (i) to (iv) above. The compound of this embodiment will be described in detail below.

[0012] <L 1 > In the above general formula (B1), L 1 represents a divalent saturated aliphatic hydrocarbon group having 1 to 10 carbon atoms. L 1 When the carbon number of the divalent saturated aliphatic hydrocarbon group that can be selected as L is less than 1, 1 Since L does not exist, the structure of the compound of this embodiment cannot be obtained. 1 If the number of carbon atoms in the divalent saturated aliphatic hydrocarbon group that can be selected for exceeds 10, it becomes difficult to ensure sufficient thermal stability of the compound represented by the above general formula (B1). In addition, L 1 If is a group other than a divalent saturated aliphatic hydrocarbon group, it becomes difficult to synthesize the compound represented by the above general formula (B1), and the effects of the present invention are also difficult to achieve.

[0013] Here, in order to easily ensure sufficient rust prevention of the compound represented by the general formula (B1), L 1 The number of carbon atoms of the divalent saturated aliphatic hydrocarbon group that can be selected as L is preferably 2 or more, more preferably 3 or more, and even more preferably 4 or more. From the viewpoint of easily ensuring sufficient thermal stability of the compound represented by the above general formula (B1), L 1 The number of carbon atoms of the divalent saturated aliphatic hydrocarbon group that can be selected as is preferably 8 or less, more preferably 7 or less, and even more preferably 6 or less. The upper and lower limits of these numerical ranges can be arbitrarily combined. Specifically, the range is preferably 2 to 8, more preferably 3 to 7, and even more preferably 4 to 6.

[0014] L 1The divalent saturated aliphatic hydrocarbon group that can be selected as includes acyclic saturated hydrocarbons and cyclic saturated hydrocarbons. Specific examples include an alkylene group having 1 to 10 carbon atoms, a cycloalkylene group having 5 to 10 carbon atoms, an alkylcycloalkylene group having 6 to 10 carbon atoms, an alkylene-cycloalkylene group having 6 to 10 carbon atoms, an alkylene-cycloalkylene-alkylene group having 7 to 10 carbon atoms, an alkylene-alkylcycloalkylene group having 7 to 10 carbon atoms, and an alkylene-alkylcycloalkylene-alkylene group having 8 to 10 carbon atoms.

[0015] The term "alkylene group" refers to a divalent group obtained by removing two hydrogen atoms from an alkane. The alkylene group may be linear or branched, but is preferably linear from the viewpoint of improving the rust prevention properties of the compound represented by the above general formula (B1).

[0016] A "cycloalkylene group" is a divalent group formed by removing two hydrogen atoms from a cycloalkane.

[0017] The term "alkylcycloalkylene group" refers to a cycloalkylene group in which at least one hydrogen atom is substituted with an alkyl group, and examples thereof include a methylcyclohexylene group. The number of carbon atoms in an "alkylcycloalkylene group" is the total number of carbon atoms in the alkyl group and the cycloalkylene group that constitute the alkylcycloalkylene group.

[0018] The term "alkylene-cycloalkylene group" refers to a group in which one of two bonds of an alkylene group is bonded to one of two bonds of a cycloalkylene group, and examples of such groups include a methylene-cyclohexylene group. The number of carbon atoms in an "alkylene-cycloalkylene group" is the total number of carbon atoms in the alkylene group and the cycloalkylene group that constitute the alkylene-cycloalkylene group.

[0019] The term "alkylene-cycloalkylene-alkylene group" refers to a group in which one of two bonds of a first alkylene group is bonded to one of two bonds of a cycloalkylene group, and one of two bonds of a second alkylene group is bonded to the other of two bonds of the cycloalkylene group, and examples of such groups include a methylene-cyclohexylene-methylene group. The number of carbon atoms in an "alkylene-cycloalkylene-alkylene group" is the total number of carbon atoms in the two alkylene groups and the cycloalkylene group that constitute the alkylene-cycloalkylene-alkylene group.

[0020] The term "alkylene-alkylcycloalkylene group" refers to a group in which one of two bonds of an alkylene group is bonded to one of two bonds of an alkylcycloalkylene group, and examples of such groups include a methylene-methylcyclohexylene group. The number of carbon atoms in an "alkylene-alkylcycloalkylene group" is the total number of carbon atoms in the alkylene group and the alkylcycloalkylene group (the alkyl group and the cycloalkylene group) that constitute the alkylene-alkylcycloalkylene group.

[0021] The term "alkylene-alkylcycloalkylene-alkylene group" refers to a group in which one of two bonds of a first alkylene group is bonded to one of two bonds of an alkylcycloalkylene group, and one of two bonds of a second alkylene group is bonded to the other of two bonds of the alkylcycloalkylene group, and examples of such groups include a methylene-methylcyclohexylene-methylene group. The number of carbon atoms in an "alkylene-alkylcycloalkylene-alkylene group" is the total number of carbon atoms in the two alkylene groups and the alkylcycloalkylene group (the alkyl group and the cycloalkylene group) that constitute the alkylene-alkylcycloalkylene-alkylene group.

[0022] Incidentally, the "alkylene groups" constituting the "alkylene-cycloalkylene group", the "alkylene-cycloalkylene-alkylene group", the "alkylene-alkylcycloalkylene group", and the "alkylene-alkylcycloalkylene-alkylene group" may be linear or branched, but are preferably linear from the viewpoint of improving the rust prevention properties of the compound represented by the above general formula (B1).

[0023] Here, from the viewpoint of improving the effects of the present invention and from the viewpoint of ease of synthesis of the compound represented by the above general formula (B1), L 1 is preferably a linear or branched alkylene group having 1 to 10 carbon atoms, more preferably a linear or branched alkylene group having 2 to 8 carbon atoms, even more preferably a linear or branched alkylene group having 3 to 7 carbon atoms, and even more preferably a linear or branched alkylene group having 4 to 6 carbon atoms. From the same viewpoint, the alkylene group is preferably linear.

[0024] <L 2 and L 3 > In the above general formula (B1), L 2 and L 3 each independently represents an alkylene group having 1 to 6 carbon atoms. L 2 and L 3 When the number of carbon atoms in the alkylene group that can be selected as L is less than 1 (in other words, 2 and L 3 is not present), the betaine structure of the compound represented by general formula (B1) cannot be stably maintained, and the effects of the present invention cannot be achieved. Also, L 2 and L 3 When the alkylene group that can be selected for has more than 6 carbon atoms, it becomes difficult to ensure the thermal stability of the compound represented by the above general formula (B1). Here, from the viewpoint of improving the effect of the present invention, L 2 and L 3 The alkylene group that can be selected for has preferably 1 to 3 carbon atoms, more preferably 1 to 2 carbon atoms, and further preferably 1 carbon atom.

[0025] <L 1 The number of carbon atoms and L 2 The number of carbon atoms and L 3 The total number of carbon atoms in In this embodiment, L in the general formula (B1) 1 The number of carbon atoms and L 2 The number of carbon atoms and L 3 The total number of carbon atoms is preferably 3 to 16, more preferably 4 to 16, even more preferably 5 to 14, and still more preferably 6 to 12, from the viewpoint of improving thermal stability and rust prevention.

[0026] <Y 1 and Y 2 And n1 and n2> In the above general formula (B1), Y 1 and Y 2 are each independently a methylene group or an oxygen atom. In the above general formula (B1), n1 and n2 each independently represent 1 or 2. Y 1 and Y 2 When n1 and n2 are each an integer of 0 or 3 or more, the heterocyclic structure in the general formula (B1) becomes unstable, the stability of the compound represented by the general formula (B1) decreases, and it becomes difficult to ensure thermal stability. Examples of the heterocyclic structure in the above general formula (B1) include a pyrrolidinium ring, a piperidinium ring, an oxazolidine ring, and a morpholinium ring. Here, from the viewpoint of improving the effect of the present invention, Y 1 and Y 2 are preferably a methylene group. In other words, the heterocyclic structure in the above general formula (B1) is preferably a pyrrolidinium ring or a piperidinium ring. 1 and Y 2 are each preferably a methylene group, and n1 and n2 are each preferably 1. That is, it is more preferable that the heterocyclic structures in the above general formula (B1) are each a pyrrolidinium ring.

[0027] <m1, m2, R 1 and R 2 > In the general formula (B1), when n1 is 1, m1 is an integer from 0 to 8. When n1 is 2, m1 is an integer from 0 to 10. In the general formula (B1), when n2 is 1, m2 is an integer from 0 to 8. When n2 is 2, m2 is an integer from 0 to 10. Also, in the general formula (B1), R 1 and R 2 each independently represents an alkyl group having 1 to 3 carbon atoms. When m1 is 2 or more, the plurality of R 1 may be the same or different. Also, when m2 is 2 or more, the plurality of R 2 may be the same or different. Here, the provisions of m1, m2, and R 1 and R 2 in this embodiment mean that the hydrogen atoms constituting the heterocyclic structure in the general formula (B1) may be substituted with an alkyl group having 1 to 3 carbon atoms. From the viewpoint of improving the effects of the present invention, m1 and m2 are preferably 0. That is, the heterocyclic structure in the general formula (B1) is preferably unsubstituted.

[0028] <Preferred embodiments of the compound> From the viewpoint of more easily improving the effects of the present invention, the compound of this embodiment is preferably in the following embodiments. L 1 is a linear or branched alkylene group having 1 to 10 carbon atoms (the alkylene group is linear or branched, preferably linear). L 2 and L 3 each independently represents an alkylene group having 1 to 3 carbon atoms (the number of carbon atoms of the alkylene group is preferably 1 to 2, more preferably 1). Y 1 and Y 2 are methylene groups. n1 and n2 are 1. m1 and m2 are 0. Moreover, the compound of this embodiment preferably has the following features. L 1 is an alkylene group having 2 to 8 carbon atoms (the alkylene group is linear or branched, and is preferably linear). L 2 and L 3 are each independently an alkylene group having 1 to 3 carbon atoms (the number of carbon atoms in the alkylene group is preferably 1 to 2, and more preferably 1). Y 1 and Y 2 is a methylene group. n1 and n2 are 1. m1 and m2 are 0. Furthermore, the compound of this embodiment preferably has the following features. L 1 is an alkylene group having 3 to 7 carbon atoms (the alkylene group is linear or branched, and is preferably linear). L 2 and L 3 are each independently an alkylene group having 1 to 3 carbon atoms (the number of carbon atoms in the alkylene group is preferably 1 to 2, and more preferably 1). Y 1 and Y 2 is a methylene group. n1 and n2 are 1. m1 and m2 are 0. Further, the compound of this embodiment preferably has the following features. L 1 is an alkylene group having 4 to 6 carbon atoms (the alkylene group is linear or branched, and is preferably linear). L 2 and L 3 are each independently an alkylene group having 1 to 3 carbon atoms (the number of carbon atoms in the alkylene group is preferably 1 to 2, and more preferably 1). Y 1 and Y2 is a methylene group. n1 and n2 are 1. m1 and m2 are 0.

[0029] <Method of compound synthesis> The method for synthesizing the compound of the present embodiment is not particularly limited, but examples thereof include the following synthesis methods. First, the raw material compounds represented by the following general formulas (B1-1) and (B1-2) are reacted with the raw material compound represented by the following general formula (B1-3) to generate the intermediate 1 represented by the following general formula (B1-4). When the raw material compounds represented by the following general formulas (B1-1) and (B1-2) are different from each other, it is preferable to, for example, react one of the raw material compounds represented by the following general formulas (B1-1) and (B1-2) with the raw material compound represented by the following general formula (B1-3) in a solvent to generate a mono-substituted product, and then react the mono-substituted product with the other raw material compound represented by the following general formulas (B1-1) and (B1-2) to synthesize the intermediate 1. [ka] [ka] [ka] [ka] [In the above general formula (B1-1), the above general formula (B1-2), the above general formula (B1-3), and the above general formula (B1-4), each symbol has the same meaning as in the above general formula (B1). In the above general formula (B1-3), A 1 and A 2 are each independently a halogen atom (fluorine, chlorine, bromine, iodine), preferably bromine.

[0030] Next, intermediate 1 is reacted with raw material compounds represented by the following general formula (B1-5) and the following general formula (B1-6) to produce intermediate 2 represented by the following general formula (B1-7). In addition, when the starting compounds represented by the following general formula (B1-5) and the following general formula (B1-6) are different compounds, it is preferable to react one of the starting compounds represented by the following general formula (B1-5) and the following general formula (B1-6) with intermediate 1 in a solvent to produce a mono-substituted product, and then react the mono-substituted product with the other starting compound represented by the following general formula (B1-5) and the following general formula (B1-6) to synthesize intermediate 2. [ka] [ka]

[0031] [ka] [In the above general formulae (B1-5), (B1-6) and (B1-7), each symbol has the same meaning as in the above general formula (B1). In the above general formula (B1-5), the above general formula (B1-6) and the above general formula (B1-7), A 3 and A 4 are each independently a halogen atom (fluorine, chlorine, bromine, iodine), preferably bromine. 11 and R 12 are each independently an alkyl group having 1 to 3 carbon atoms.]

[0032] Next, the intermediate 2 is dissolved in various solvents such as acetonitrile, and then contacted with an ion exchange resin (anion exchange resin) to carry out hydrolysis and ion exchange. The solvent is then removed to obtain the compound of the present embodiment.

[0033] In each reaction process, a suitable solvent may be used. Intermediate 1, Intermediate 2, and the final product may be washed with a suitable solvent.

[0034] <Use of the compound> The compound of the present embodiment has excellent thermal stability. Moreover, it can also exhibit excellent rust prevention properties, so that the rust prevention properties of a lubricant composition based on an ionic liquid can be improved. In addition, the compound of the present embodiment does not contain metal components. Therefore, the compound of this embodiment is suitable for use as a rust inhibitor.In addition, the compound of this embodiment is suitable for use as a rust inhibitor for ionic liquid, which is mixed with ionic liquid.Furthermore, the compound of this embodiment is suitable for use as a rust inhibitor for the lubricant composition used in semiconductor manufacturing equipment. Therefore, according to this embodiment, the following aspects are provided. (1) The compound of the present embodiment is used as a rust inhibitor. (2) The compound of the present embodiment is used as a rust inhibitor for ionic liquids. (3) The compound of the present embodiment is used as a rust inhibitor for a lubricant composition used in semiconductor manufacturing equipment. Furthermore, the compound of the present embodiment provides the following methods of use. (4) A method of using the compound of the present embodiment as a rust inhibitor. (5) A method of using the compound of the present embodiment, comprising mixing the compound with an ionic liquid and using the resulting mixture as a rust inhibitor. (6) A method of using the compound of the present embodiment, comprising blending the compound with a lubricant composition used in semiconductor manufacturing equipment and using the resulting composition as a rust inhibitor. In this embodiment, the term "ionic liquid" refers to an ionic liquid used as a base material for a lubricant composition, and is a concept used to distinguish it from the compound of this embodiment.

[0035] <Physical properties of compounds> The compound of the present embodiment preferably has the following physical properties.

[0036] (Thermal decomposition start temperature) The compound of this embodiment preferably has a thermal decomposition onset temperature of 200° C. or higher, more preferably 210° C. or higher, and even more preferably 220° C. or higher. The thermal decomposition initiation temperature refers to a value measured by the method described in the Examples section below.

[0037] (Anti-rust properties of compounds) When the compound of this embodiment is evaluated by the method described in the Examples below, it is preferable that no reddish brown or black discoloration (rust) is observed on the surface.

[0038] [Rust inhibitor] The compound represented by the above general formula (B1) has excellent rust prevention properties. Therefore, according to the present embodiment, there is provided a rust inhibitor containing one or more compounds selected from the compounds represented by the above general formula (B1). The rust inhibitor may consist of only one or more compounds selected from the compounds represented by the above general formula (B1), but may or may not contain other components other than the compounds. The content of one or more compounds selected from the compounds represented by the above general formula (B1) in the rust inhibitor is, based on the total amount of the rust inhibitor, preferably 50 mass% to 100 mass%, more preferably 60 mass% to 100 mass%, even more preferably 70 mass% to 100 mass%, still more preferably 80 mass% to 100 mass%, even more preferably 90 mass% to 100 mass%, and even more preferably 95 mass% to 100 mass%. Examples of other components include by-products generated in the synthesis process of the compound of this embodiment, unreacted raw materials remaining in the synthesis process of the compound, and diluents. The rust inhibitor is preferably used together with an ionic liquid.

[0039] [Lubricant composition] The lubricant composition of the present embodiment contains an ionic liquid and a compound represented by the above general formula (B1).

[0040] In the following description, the "ionic liquid" and the "compound represented by the above general formula (B1)" are also referred to as "component (A)" and "component (B)", respectively.

[0041] In the lubricant composition of this embodiment, the total content of component (A) and component (B) is preferably 70 mass % or more, more preferably 80 mass % or more, even more preferably 90 mass % or more, and still more preferably 95 mass % or more, based on the total amount of the lubricant composition. In the lubricant composition of this embodiment, the upper limit of the total content of components (A) and (B) may be 100 mass %. However, when the lubricant composition contains components other than components (A) and (B), the upper limit of the total content of components (A) and (B) may be adjusted in relation to the other components, and may be, for example, less than 100 mass %, 99 mass % or less, or 98 mass % or less.

[0042] In the lubricant composition of this embodiment, the content of the compound represented by general formula (B1) is, from the viewpoint of the solubility of the compound in the ionic liquid and from the viewpoint of improving rust prevention properties, preferably 0.01 mass % to 10 mass %, more preferably 0.1 mass % to 10 mass %, even more preferably 0.1 mass % to 5.0 mass %, still more preferably 1.0 mass % to 3.0 mass %, and even more preferably 1.5 mass % to 2.5 mass %, based on the total amount of the lubricant composition. The compound represented by the general formula (B1) may be used alone or in combination of two or more. When two or more compounds are used, the preferred total content is the same as the above content.

[0043] Each component contained in the lubricant composition of the present embodiment will be described below.

[0044] <Ionic liquid> The lubricant composition of the present embodiment contains an ionic liquid. The ionic liquid is a liquid compound composed of cations and anions, and various compounds that do not contain metals can be used.

[0045] Here, the anion of the ionic liquid preferably contains bis(trifluoromethanesulfonyl)amide.

[0046] The cation of the ionic liquid preferably contains a cation represented by the following general formula (A1). [ka] [In the general formula (A1), each symbol represents the following.] n3 is 1 or 2. X represents a methylene group or an oxygen atom. R A11 and R A12 each independently represents an alkyl group having 1 to 12 carbon atoms which may have one or more groups selected from an ether group, an ester group, a nitrile group, and a silyl group.]

[0047] R in the above general formula (A1) A11 and R A12 The alkyl group preferably has 1 to 6 carbon atoms, and more preferably 1 to 4 carbon atoms, from the viewpoint of reducing the viscosity of the ionic liquid and improving the thermal stability. R A11 As the alkyl group, a methyl group is preferable. A12 As the alkyl group, an n-butyl group and a methoxyethyl group are preferable.

[0048] Examples of the cation represented by the above general formula (A1) include 1-butyl-1-methylpyrrolidinium, 1-pentyl-1-methylpyrrolidinium, 1-hexyl-1-methylpyrrolidinium, 1-heptyl-1-methylpyrrolidinium, 1-octyl-1-methylpyrrolidinium, 1-nonyl-1-methylpyrrolidinium, 1-decyl-1-methylpyrrolidinium, 1-undecyl-1-methylpyrrolidinium, 1-dodecyl-1-methylpyrrolidinium, 1-methoxymethyl-1-methylpyrrolidinium, 1-(2-methoxyethyl)- 1-Methylpyrrolidinium, 1-(2-methoxy-2-oxoethyl)-1-methylpyrrolidinium, 1-cyanomethyl-1-methylpyrrolidinium, 1-trimethylsilylmethyl-1-methylpyrrolidinium, 1-butyl-1-methylpiperidinium, 1-pentyl-1-methylpiperidinium, 1-hexyl-1-methylpiperidinium, 1-heptyl-1-methylpiperidinium, 1-octyl-1-methylpiperidinium, 1-nonyl-1-methylpiperidinium, 1-decyl-1-methylpiperidinium, 1-undecyl-1 -methylpiperidinium, 1-dodecyl-1-methylpiperidinium, 1-methoxymethyl-1-methylpiperidinium, 1-(2-methoxyethyl)-1-methylpiperidinium, 1-(2-methoxy-2-oxoethyl)-1-methylpiperidinium, 1-cyanomethyl-1-methylpiperidinium, 1-trimethylsilylmethyl-1-methylpiperidinium, 1-butyl-1-methylmorpholinium, 1-pentyl-1-methylmorpholinium, 1-hexyl-1-methylmorpholinium, 1-heptyl-1-methylmorpholinium morpholinium, 1-octyl-1-methylmorpholinium, 1-nonyl-1-methylmorpholinium, 1-decyl-1-methylmorpholinium, 1-undecyl-1-methylmorpholinium, 1-dodecyl-1-methylmorpholinium, 1-(2-methoxyethyl)-1-methylmorpholinium, 1-methoxymethyl-1-methylmorpholinium, 1-(2-methoxy-2-oxoethyl)-1-methylmorpholinium, 1-cyanomethyl-1-methylmorpholinium, 1-trimethylsilylmethyl-1-methylmorpholinium, and the like. Among these, from the viewpoint of reducing the viscosity of the ionic liquid and improving the thermal stability, preferred are 1-butyl-1-methylpyrrolidinium, 1-pentyl-1-methylpyrrolidinium, 1-hexyl-1-methylpyrrolidinium, 1-(2-methoxyethyl)-1-methylpyrrolidinium, 1-butyl-1-methylpiperidinium, 1-(2-methoxyethyl)-1-methylpiperidinium, and 1-(2-methoxyethyl)-1-methylmorpholinium, more preferred are 1-butyl-1-methylpyrrolidinium, 1-(2-methoxyethyl)-1-methylpyrrolidinium, and 1-(2-methoxyethyl)-1-methylpiperidinium, and even more preferred are 1-butyl-1-methylpyrrolidinium and 1-(2-methoxyethyl)-1-methylpyrrolidinium.

[0049] Here, the ionic liquid preferably contains at least one selected from a compound represented by the following general formula (A2) and a compound represented by the following general formula (A3).

[0050] [ka] [In the general formula (A2), each symbol represents the following.] n4 is 1 or 2. X represents a methylene group or an oxygen atom. R A21 represents an alkyl group having 2 to 12 carbon atoms.]

[0051] [ka] [In the above general formula (A3), n5 is 1 or 2, X is a methylene group or oxygen, and R A31 represents an alkylene group having 1 to 5 carbon atoms, R A32 represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms.]

[0052] In the general formula (A2), R A21 The number of carbon atoms in R is preferably 2 to 8, and more preferably 3 to 6.A21 When the carbon number of R is 2 or more, the side chain can move freely and the symmetry is low, so that crystallization is suppressed and the function as an ionic liquid can be improved. A21 When the number of carbon atoms is 12 or less, the side chain does not become too large and the compound as a whole has high ionicity, making it easy to suppress oxidative deterioration.

[0053] In the general formula (A3), R A31 The number of carbon atoms in R is preferably 1 to 3, and more preferably 1 to 2. A32 The number of carbon atoms in R is preferably 1 to 2. A31 When the carbon number of R is 1 or more, the side chain can move freely and the symmetry is low, so that crystallization is suppressed and the function as an ionic liquid can be improved. A31 or R A32 When the number of carbon atoms is 3 or less, the side chain does not become too large and the compound as a whole has high ionicity, making it easy to suppress oxidative deterioration.

[0054] The content of the compound represented by general formula (A2) in the ionic liquid is preferably 60% by mass to 100% by mass, more preferably 70% by mass to 100% by mass, and even more preferably 80% by mass to 100% by mass, based on the total amount of the ionic liquid. The content of the compound represented by general formula (A3) in the ionic liquid is preferably 60% by mass to 100% by mass, more preferably 70% by mass to 100% by mass, and even more preferably 80% by mass to 100% by mass, based on the total amount of the ionic liquid. As the ionic liquid, one or more types selected from the compounds represented by the above general formula (A2) may be used, one or more types selected from the compounds represented by the above general formula (A3) may be used, or one or more types selected from the compounds represented by the above general formula (A2) may be used in combination with one or more types selected from the compounds represented by the above general formula (A3).

[0055] (Physical properties of ionic liquids) The kinetic viscosity of the ionic liquid at 40°C is preferably 2.0 mm from the viewpoint of low evaporation and suppression of power loss due to viscous resistance. 2 / s~100.0mm 2 / s, more preferably 10.0 mm 2 / s~70.0mm 2 / s, and more preferably 20.0 mm 2 / s~40.0mm 2 / s. The kinetic viscosity of the ionic liquid at 100°C is preferably 1.0 mm from the viewpoint of low volatility and suppression of power loss due to viscous resistance. 2 / s~20.0mm 2 / s, more preferably 2.0 mm 2 / s~10.0mm 2 / s, more preferably 3.0 mm 2 / s~7.0mm 2 / s. The viscosity index of the ionic liquid is preferably 100 or more, more preferably 120 or more, and even more preferably 140 or more, from the viewpoint of minimizing viscosity changes even when used in a space environment where the temperature range changes greatly between low and high temperatures. The 40° C. kinematic viscosity, the 100° C. kinematic viscosity, and the viscosity index can be measured or calculated in accordance with JIS K 2283:2000. Furthermore, when the ionic liquid is a mixture of two or more types of ionic liquids, it is preferable that the kinematic viscosity and viscosity index of the mixture are within the above ranges.

[0056] The pour point of the ionic liquid is preferably 0° C. or lower, more preferably −10° C. or lower, and even more preferably −20° C. or lower, from the viewpoint of suppressing an increase in viscous resistance at low temperatures. The pour point of the ionic liquid can be measured in accordance with JIS K 2269:1987.

[0057] From the viewpoint of rust prevention, the acid value of the ionic liquid is preferably 1 mgKOH / g or less, more preferably 0.5 mgKOH / g or less, and even more preferably 0.3 mgKOH / g or less.

[0058] From the viewpoint of low volatility, the flash point of the ionic liquid is preferably 200° C. or higher, more preferably 250° C. or higher, and even more preferably 300° C. or higher.

[0059] The ion concentration of the ionic liquid measured at 15° C. is preferably 1.0 mol / dm 3 More preferably, 1.5 mol / dm 3 More preferably, 2.0 mol / dm 3 That's all. Here, the ion concentration is defined as the density (g / cm) measured at 15°C in the ionic liquid. 3 ) / molecular weight Mw (g / mol)] × 1000. 3 If the content is more than this, low volatility and thermal stability can be further improved.

[0060] The molecular weight of the ionic liquid is preferably from 410 to 570, more preferably from 410 to 470, and even more preferably from 420 to 440. When the molecular weight of the ionic liquid is within the above range, the charge density and the alkyl chain length of the cation fall within appropriate ranges, and the viscosity of the ionic liquid can be reduced and the thermal stability can be improved.

[0061] In the lubricant composition of this embodiment, the content of the ionic liquid is not particularly limited, but from the viewpoint of improving the effects of the present invention, the content is preferably 50 mass % or more, more preferably 60 mass % or more, and even more preferably 70 mass % or more, based on the total amount (100 mass %) of the lubricant composition. The upper limit of the ionic liquid content is appropriately set depending on the amount of components other than the ionic liquid added, and is preferably 99.5 mass % or less, more preferably 99.0 mass % or less, and even more preferably 98.5 mass % or less. The upper and lower limits of these numerical ranges can be arbitrarily combined. Specifically, the content is preferably 50% by mass to 99.5% by mass, more preferably 60% by mass to 99.0% by mass, and even more preferably 70% by mass to 98.5% by mass.

[0062] In the lubricant composition of this embodiment, the base material may contain a base material component other than the above-mentioned ionic liquid (component (A)) (for example, a base material component that does not fall under the category of an ionic liquid, such as ethyl acetate). From the viewpoint of improving the effects of the present invention, the content of the above-mentioned ionic liquid (component (A)) is preferably 50 mass % or more, more preferably 70 mass % or more, even more preferably 90 mass % or more, and still more preferably 100 mass % based on the total amount of the base material.

[0063] The ratio (B / A) of the content of the compound (component (B)) represented by the above general formula (B1) to the content of the ionic liquid (component (A)) is preferably 0.0005 or more and 0.15 or less, more preferably 0.001 or more and 0.111 or less, and even more preferably 0.005 or more and 0.08 or less, in terms of mass ratio. When (B / A) is 0.0005 or more, sufficient rust prevention is easily achieved. When (B / A) is 0.15 or less, the solubility of the compound represented by the above general formula (B1) in the ionic liquid is easily sufficient.

[0064] <Other ingredients> The lubricant composition of the present embodiment may contain other components besides the above-mentioned components, as necessary, within the range that does not impair the effects of the present invention. Examples of the other components include a viscosity index improver and a thickener. These may be used alone or in combination of two or more.

[0065] (Viscosity index improver) By including a viscosity index improver in the lubricant composition of the present embodiment, the viscosity index of the lubricant composition can be improved, and thus the change in viscosity can be reduced even when the lubricant composition is used in a space environment where the temperature range changes greatly between low and high temperatures.

[0066] Examples of the viscosity index improver include polymers such as non-dispersed poly(meth)acrylate and dispersed poly(meth)acrylate, which are soluble in the ionic liquid. These may be used alone or in combination of two or more. The mass average molecular weight (Mw) of these viscosity index improvers is usually 5,000 to 1,000,000, preferably 6,000 to 100,000, and more preferably 10,000 to 50,000, but is appropriately set depending on the type of polymer. In this specification, the mass average molecular weight (Mw) of each component is a value calculated in terms of standard polystyrene as measured by gel permeation chromatography (GPC). The content of the viscosity index improver, calculated as the resin content, can be appropriately adjusted within a range that does not impair the effects of the present invention, but is usually 0.001 mass % to 15 mass %, preferably 0.005 mass % to 10 mass %, more preferably 0.01 mass % to 7 mass %, and even more preferably 0.03 mass % to 5 mass %, based on the total amount of the lubricant composition.

[0067] (Thickener) The lubricant composition of the present embodiment may be in the form of a grease composition by containing a thickener. Examples of thickeners include urea compounds such as diurea compounds and polyurea compounds, fluorine-based resins such as tetrafluoroethylene (PTFE) resin, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA) resin, and tetrafluoroethylene-hexafluoropropylene copolymer (FEP) resin, and non-fluorine-based resins such as polyester and polyamide. These may be used alone or in combination of two or more. When the lubricant composition of the present embodiment contains a thickener (in other words, when the lubricant composition of the present embodiment is a grease composition), the content of the thickener is preferably 5 mass % to 50 mass %, more preferably 5 mass % to 40 mass %, and even more preferably 5 mass % to 35 mass %, based on the total amount of the lubricant composition. When the lubricant composition of the present embodiment contains a thickener (in other words, when the lubricant composition of the present embodiment is a grease composition), the content of the ionic liquid is preferably 50 mass % or more, more preferably 60 mass % or more, and even more preferably 70 mass % or more, based on the total amount of the lubricant composition, and is preferably 95 mass % or less, more preferably 90 mass % or less, and even more preferably 85 mass % or less. The upper and lower limits of these numerical ranges can be arbitrarily combined. Specifically, the content is preferably 50% by mass to 95% by mass, more preferably 60% by mass to 90% by mass, and even more preferably 70% by mass to 85% by mass.

[0068] In this specification, the additives as the other components may be mixed with other components in the form of a solution diluted and dissolved in a part of the ionic liquid, taking into consideration handling properties, solubility in the ionic liquid, etc. In such a case, in this specification, the content of the additives as the other components means the content in terms of active ingredients (resin content) excluding the diluent.

[0069] [Physical properties of lubricant composition] <Kinematic viscosity at 40°C, kinematic viscosity at 100°C, and viscosity index> The 40° C. kinetic viscosity of the lubricant composition of this embodiment is preferably 2.0 mm from the viewpoint of low volatility and suppression of power loss due to viscous resistance. 2 / s~200.0mm 2 / s, more preferably 10.0 mm 2 / s~150.0mm 2 / s, and more preferably 20.0 mm 2 / s~100.0mm 2 / s. The 100°C kinetic viscosity of the lubricant composition of this embodiment is preferably 1.0 mm from the viewpoint of low volatility and suppression of power loss due to viscous resistance. 2 / s~40.0mm 2 / s, more preferably 2.0 mm 2 / s~30.0mm 2 / s, more preferably 3.0 mm 2 / s~20.0mm2 / s. The viscosity index of the lubricant composition of this embodiment is preferably 100 or more, more preferably 120 or more, and even more preferably 140 or more, from the viewpoint of minimizing viscosity changes due to temperature changes in the usage environment. The 40° C. kinematic viscosity, the 100° C. kinematic viscosity, and the viscosity index of the lubricant composition are values ​​measured or calculated in accordance with JIS K 2283:2000.

[0070] <Metal content> The lubricant composition of the present embodiment preferably contains substantially no metal components. Specifically, the lubricant composition of this embodiment preferably has a metal content (metal element) of less than 0.1 mass %, more preferably less than 0.01 mass %, based on the total amount of the lubricant composition, and even more preferably contains no metal content (metal element).

[0071] <Rust prevention> When the lubricant composition of this embodiment is evaluated by the method described in the examples below, it is preferable that no reddish brown or black discoloration (rust) is observed on the surface.

[0072] [Method of manufacturing lubricant composition] The method for producing the lubricant composition of the present embodiment is not particularly limited, but for example, the lubricant composition is produced by a production method including a step of mixing an ionic liquid with a compound represented by the following general formula (B1). [ka] [In the general formula (B1), each symbol represents the following.] L 1 represents a divalent saturated aliphatic hydrocarbon group having 1 to 10 carbon atoms. L 2 and L 3 each independently represents an alkylene group having 1 to 6 carbon atoms. Y 1 and Y 2 each independently represents a methylene group or an oxygen atom. n1 and n2 each independently represents 1 or 2. When n1 is 1, m1 is an integer from 0 to 8. When n1 is 2, m1 is an integer from 0 to 10. When n2 is 1, m2 is an integer from 0 to 8. When n2 is 2, m2 is an integer from 0 to 10. R 1 and R 2 each independently represents an alkyl group having 1 to 3 carbon atoms.] The method for mixing the above components is not particularly limited, but examples include a method in which the compound represented by the general formula (B1) is blended with the ionic liquid and then mixed. The manufacturing method of this embodiment may further include a step of adding the other components described above.

[0073] [Uses of lubricant composition] The lubricant composition of the present embodiment has excellent thermal stability and rust prevention properties, and contains no metal components. Therefore, the lubricant composition of this embodiment can be suitably used in semiconductor manufacturing equipment. In particular, the lubricant composition of this embodiment can be suitably used to lubricate a moving part in a high vacuum and high temperature environment such as a vacuum chamber in a semiconductor manufacturing equipment. Examples of the moving part include a reducer and a speed increaser, but are not necessarily limited thereto. Examples of semiconductor manufacturing equipment include equipment that performs physical vapor deposition (PVD) and equipment that performs chemical vapor deposition (CVD). Examples of physical vapor deposition include vacuum vapor deposition, sputtering, ion plating, and ion bombardment using various ion guns. Examples of vacuum vapor deposition include general resistance heating vapor deposition, electron beam vapor deposition, ion-assisted electron beam vapor deposition, and arc vapor deposition. These physical vapor depositions may be used in appropriate combination. Examples of chemical vapor deposition include thermal CVD, plasma CVD, photo CVD, epitaxial CVD, and atomic layer CVD. These chemical vapor deposition methods may be used in appropriate combination, and may be used in appropriate combination with physical vapor deposition.

[0074] [One aspect of the present invention provided] In one embodiment of the present invention, the following [1] to

[11] are provided. [1] A compound represented by the following general formula (B1): [ka] [In the general formula (B1), each symbol represents the following.] L 1 represents a divalent saturated aliphatic hydrocarbon group having 1 to 10 carbon atoms. L 2 and L 3 each independently represents an alkylene group having 1 to 6 carbon atoms. Y 1 and Y 2 each independently represents a methylene group or an oxygen atom. n1 and n2 each independently represents 1 or 2. When n1 is 1, m1 is an integer from 0 to 8. When n1 is 2, m1 is an integer from 0 to 10. When n2 is 1, m2 is an integer from 0 to 8. When n2 is 2, m2 is an integer from 0 to 10. R 1 and R 2 each independently represents an alkyl group having 1 to 3 carbon atoms.] [2] L 1 The number of carbon atoms and L 2 The number of carbon atoms and L 3 and the total number of carbon atoms is 3 to 16. [3] The compound according to [1] or [2] above, which is used as a rust inhibitor. [4] A method of using the compound according to the above [1] or [2] as a rust inhibitor. [5] A rust inhibitor containing the compound according to [1] or [2] above. [6] The rust inhibitor according to the above [5], which is used together with an ionic liquid. [7] A lubricant composition comprising an ionic liquid and the compound according to [1] or [2] above. [8] The lubricant composition according to the above [7], wherein the ionic liquid contains a cation represented by the following general formula (A1): [ka] [In the general formula (A1), each symbol represents the following.] n3 is 1 or 2. X represents a methylene group or an oxygen atom. R A11 and R A12 each independently represents an alkyl group having 1 to 12 carbon atoms which may have one or more groups selected from an ether group, an ester group, a nitrile group, and a silyl group.] [9] The lubricant composition according to [7] or [8] above, wherein the ionic liquid comprises at least one selected from the group consisting of a compound represented by the following general formula (A2) and a compound represented by the following general formula (A3): [ka] [In the general formula (A2), each symbol represents the following.] n4 is 1 or 2. X represents a methylene group or an oxygen atom. R A21 represents an alkyl group having 2 to 12 carbon atoms.] [ka] [In the general formula (A3), each symbol represents the following. n5 is 1 or 2. X represents a methylene group or an oxygen atom. R A31 represents an alkylene group having 1 to 5 carbon atoms. R A32 represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms.]

[10] The lubricant composition according to any one of the above [7] to [9], for use in semiconductor manufacturing equipment.

[11] A method for producing a lubricant composition, comprising the step of mixing an ionic liquid with the compound according to [1] or [2] above. EXAMPLES

[0075] The present invention will be described in more detail with reference to the following examples, although the present invention is not limited to the following examples.

[0076] [Production Examples 1-2, Comparative Production Examples 1-3, Comparative Compound 4] Various compounds were synthesized by the methods shown in Production Examples 1-2 and Comparative Production Examples 1-3. In addition, comparative compound 4 was prepared.

[0077] <Production Example 1: Synthesis of Compound 1> A stirrer, thermometer, condenser, and dropping funnel were attached to a four-neck flask purged with N2, and 11 g (150 mmol) of pyrrolidine was added. While stirring, 4.9 g (20 mmol) of 1,6-dibromohexane was added dropwise. The reaction was terminated by heating at an internal temperature of 60°C for 2 hours using an oil bath, and then the excess amount of pyrrolidine was removed using an evaporator. 30 mL of ethyl acetate was added to the resulting reaction product, which was then washed three times with 30 mL of ion-exchanged water to obtain 4.0 g (18 mmol) of 1,1'-hexamethylenedipyrrolidine as a transparent liquid. The obtained 1,1'-hexamethylenedipyrrolidine was added to a four-neck flask substituted with N2, and a stirrer, thermometer, cooling tube, and dropping funnel were attached, and 20 mL of tetrahydrofuran was added as a solvent. 6.4 g (37 mmol) of ethyl bromoacetate was added while stirring, and the mixture was heated at an internal temperature of 60°C for 2 hours using an oil bath to terminate the reaction. The obtained hexamethylene N,N'-ethyl diethyl pyrrolidinium bromide was washed with a mixture of acetonitrile and ethyl acetate, and obtained as a white solid. The obtained hexamethylene N,N'-ethyl diethyl pyrrolidinium bromide was placed in a recovery flask with a stirrer and dissolved in 20 mL of acetonitrile. After complete dissolution, the mixture was washed with an ion exchange resin (Organo Corporation, Amberlite (registered trademark) 400 OH). - After stirring for 2 hours, the ion exchange resin was removed by filtration, and the solvent was removed by an evaporator to obtain 5.1 g (15 mmol) of compound 1.

[0078] The structural formula of compound 1 is shown below. [ka] Compound 1 is a compound in which the symbols in the above general formula (B1) represent the following. L 1 represents a linear alkylene group having 6 carbon atoms (n-hexylene group). L 2 and L 3 represents an alkylene group having one carbon atom (methylene group). Y 1 and Y 2 indicates a methylene group. n1 and n2 are 1. m1 and m2 are 0. In addition, L 1 The number of carbon atoms and L 2 The number of carbon atoms and L 3 The total number of carbon atoms is 8.

[0079] <Production Example 2: Synthesis of Compound 2> The 1,6-dibromohexane in Production Example 1 was changed to 4.3 g (20 mmol) of 1,4-dibromobutane, and the rest was synthesized in the same manner as in Production Example 1. The final compound 2 was obtained in an amount of 4.7 g (15 mmol).

[0080] The structural formula of compound 2 is shown below. [ka] Compound 2 is a compound in which the symbols in the above general formula (B1) represent the following. L 1 represents a linear alkylene group having 4 carbon atoms (n-butylene group). L 2 and L 3 represents an alkylene group having one carbon atom (methylene group). Y 1 and Y 2 indicates a methylene group. n1 and n2 are 1. m1 and m2 are 0. In addition, L 1 The number of carbon atoms and L 2 The number of carbon atoms and L 3 The total number of carbon atoms is 6.

[0081] <Comparative Production Example 1: Synthesis of Comparative Compound 1> 20 g of 10 wt% aqueous solution of tetramethylammonium hydroxide (tetramethylammonium hydroxide: 2.0 g, 22 mmol) and 4.4 g (22 mmol) of sebacic acid were added to a recovery flask and stirred at room temperature for 1 hour. After removing water, the resulting white solid was collected, and 5.4 g (2.1 mmol) of comparative compound 2 was obtained as a white solid.

[0082] The structural formula of comparative compound 1 is shown below. [ka]

[0083] <Comparative Production Example 2: Synthesis of Comparative Compound 2> 3.4g (20mmol) of N,N,N',N'-tetramethyl-1,6-diaminohexane was added to a four-neck flask with N2 replacement, and a stirrer, thermometer, cooling tube, and dropping funnel were attached, and 20mL of tetrahydrofuran was added as a solvent. 8.6g (44mmol) of ethyl bromoacetate was added while stirring, and the reaction was terminated by heating for 2 hours at an internal temperature of 60°C using an oil bath. The obtained hexamethylene-N,N,N',N'-tetramethylene N,N'-ethyl diethyl acetate pyrrolidinium bromide was washed with a mixture of acetonitrile and ethyl acetate, and obtained as a white solid. The obtained hexamethylene N,N'-ethyl diethyl acetate pyrrolidinium bromide was taken in a recovery flask with a stirrer and dissolved in 20mL of acetonitrile. After complete dissolution, the mixture was washed with an ion exchange resin (Organo Corporation, Amberlite (registered trademark) 400 OH). - After stirring for 2 hours, the ion exchange resin was removed by filtration, and the solvent was removed by an evaporator to obtain 4.4 g (15 mmol) of Comparative Compound 1.

[0084] The structural formula of comparative compound 2 is shown below. [ka]

[0085] <Comparative Production Example 3: Synthesis of Comparative Compound 3> 10 g of 25 wt % hexamethonium aqueous solution (hexamethonium: 2.5 g, 11 mmol) and 2.1 g (11 mmol) of sebacic acid were stirred in a round-bottom flask at room temperature for 1 hour. After removing water, the resulting white solid was collected, and 3.8 g (9.5 mmol) of comparative compound 3 was obtained.

[0086] The structural formula of comparative compound 3 is shown below. [ka]

[0087] <Preparation of Comparative Compound 4> A reagent sold by Wako Pure Chemical Industries was used as comparative compound 4.

[0088] The structural formula of comparative compound 4 is shown below. [ka]

[0089] [evaluation] Compounds 1 and 2 and comparative compounds 1 to 4 were evaluated as described below.

[0090] <Evaluation 1: Evaluation of thermal decomposition onset temperature (evaluation of single compound)> The thermal decomposition onset temperatures of compounds 1 to 2 and comparative compounds 1 to 4 were measured at a heating rate of 10°C / min using a simultaneous thermogravimetry / differential thermal analyzer (product name: TG / DTA6200, manufactured by SII Nano Technology Co., Ltd. (now Hitachi High-Tech Science Co., Ltd.)). The results are shown in Table 1.

[0091] [Table 1]

[0092] The results shown in Table 1 show that both Compounds 1 and 2 have a thermal decomposition onset temperature of 200° C. or higher and are excellent in thermal stability. On the other hand, the comparative compounds 1 to 3 all had thermal decomposition starting temperatures of less than 200° C., indicating that they were poor in thermal stability. Although Comparative Compound 4 has a thermal decomposition starting temperature of 200° C. or higher and is excellent in thermal stability, it cannot be used for semiconductor manufacturing equipment applications because it contains sodium, which is an alkali metal.

[0093] [Examples 1-2, Comparative Examples 1-4] The ionic liquid used was N-butyl-N-methylpyrrolidinium-bis(trifluoromethane)sulfonylimide. Lubricant compositions were prepared according to the formulations shown in Table 2 and subjected to the following Evaluation 2. In addition, N-butyl-N-methylpyrrolidinium-bis(trifluoromethane)sulfonylimide is a compound represented by the above general formula (A2), where n4=1, X is a methylene group, and R A21 is a butyl group.

[0094] <Evaluation 2: Evaluation of rust prevention> A SUS440C plate cut into a rectangular shape was immersed in a solution prepared by mixing 10 g of distilled water and 10 g of each lubricant composition. The temperature of the solution was set to 60°C, and the SUS440C plate was immersed for 7 days, after which the appearance of the SUS440C plate was observed. The rust prevention properties were evaluated as follows. A: No reddish brown or black discoloration (rust) was observed on the surface. B: Reddish brown or black discoloration (rust) was observed on the surface.

[0095] [Table 2]

[0096] From Table 2, we can see the following: From the results shown in Examples 1 and 2, it is understood that the lubricant composition containing Compounds 1 and 2 has excellent rust prevention properties. As described above, Compounds 1 and 2 have high thermal decomposition starting temperatures and excellent thermal stability. Furthermore, Compounds 1 and 2 do not contain metal components. In contrast, the results shown in Comparative Examples 1 to 4 show that the lubricating oil compositions containing Comparative Compounds 1 to 4 all have excellent rust prevention properties, but as mentioned above, Comparative Compounds 1 to 3 have low thermal decomposition onset temperatures and poor thermal stability. Comparative Compound 4 has a high thermal decomposition onset temperature and excellent thermal stability, but contains metal components and cannot be used in semiconductor manufacturing equipment applications.

Claims

1. A compound represented by the following general formula (B1): 【Chemistry 1】 In the general formula (B1), each symbol represents the following. L １ represents a divalent saturated aliphatic hydrocarbon group having 1 to 10 carbon atoms. L ２ and L ３ each independently represents an alkylene group having 1 to 6 carbon atoms. Y １ and Y ２ each independently represents a methylene group or an oxygen atom. n1 and n2 each independently represents 1 or 2. When n1 is 1, m1 is an integer from 0 to 8. When n1 is 2, m1 is an integer from 0 to 10. When n2 is 1, m2 is an integer from 0 to 8. When n2 is 2, m2 is an integer from 0 to 10. R １ and R ２ each independently represents an alkyl group having 1 to 3 carbon atoms.

2. L １ The number of carbon atoms and L ２ The number of carbon atoms and L ３ and the total number of carbon atoms is 3 to 16.

3. 3. The compound according to claim 1 or 2, for use as a rust inhibitor.

4. 3. Use of the compound according to claim 1 or 2 as a rust inhibitor.

5. A rust inhibitor comprising the compound according to claim 1 or 2.

6. The rust inhibitor according to claim 5 , which is used together with an ionic liquid.

7. A lubricant composition comprising an ionic liquid and the compound according to claim 1 or 2.

8. The lubricant composition according to claim 7, wherein the ionic liquid contains a cation represented by the following general formula (A1): 【Chemistry 2】 In the general formula (A1), each symbol represents the following. n3 is 1 or 2. X represents a methylene group or an oxygen atom. R Ａ１１ and R Ａ１２ each independently represents an alkyl group having 1 to 12 carbon atoms which may have one or more groups selected from an ether group, an ester group, a nitrile group, and a silyl group.

9. The lubricant composition according to claim 7, wherein the ionic liquid comprises at least one selected from the group consisting of a compound represented by the following general formula (A2) and a compound represented by the following general formula (A3): 【Chemistry 3】 [In the general formula (A2), each symbol represents the following. n4 is 1 or 2. X represents a methylene group or an oxygen atom. R Ａ２１ represents an alkyl group having 2 to 12 carbon atoms. 【Chemistry 4】 [In the general formula (A3), each symbol represents the following. n5 is 1 or 2. X represents a methylene group or an oxygen atom. R Ａ３１ represents an alkylene group having 1 to 5 carbon atoms. R Ａ３２ represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms.

10. The lubricant composition according to claim 7, which is used in a semiconductor manufacturing device.

11. A method for producing a lubricant composition, comprising the step of mixing an ionic liquid with a compound according to claim 1 or 2.

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