Processing device and processing system

Abstract

To make it easy to replace a consumable part.SOLUTION: A part conveyance device for conveying a consumable part comprises a part storage unit, a container, a robot arm, and a movement mechanism. The part storage unit stores a consumable part before use and a consumable part after use. The container has an opening connected to a processor and a gate valve for opening / closing the opening and stores the part storage unit. The robot arm is provided in the container and has an end effector at a tip thereof. The robot arm carries out the consumable part after use from the processor through the opening before storing the consumable part after use in the part storage unit and takes out the consumable part before use from the part storage unit before carrying the consumable part before use into the processor through the opening. The movement mechanism has a power source and moves the part conveyance device.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] Various aspects and embodiments of the present disclosure relate to workpiece handling devices and processing systems. [Background technology]

[0002] Inside a processing apparatus for processing substrates, there are consumable parts that wear out as substrate processing is performed. When the amount of wear of such consumable parts exceeds a predetermined amount of wear, they are replaced with unused consumable parts. When replacing the consumable parts, the processing of substrates in the processing apparatus is stopped, and the container of the processing apparatus is opened to the atmosphere. Then, the used consumable parts are manually removed, and unused consumable parts are installed. Then, the container is closed again, a vacuum is drawn inside the container, and substrate processing is resumed.

[0003] In this way, when replacing consumable parts, the inside of the processing device is exposed to the atmosphere, so the processing device needs to be evacuated after replacing the consumable parts, which lengthens the downtime of processing. In addition, some consumable parts are large, so manual replacement can take a long time.

[0004] In order to avoid this, an exchange station is known that has unused consumable parts and an exchange handler for exchanging the consumable parts (see, for example, Patent Document 1 below). In such an exchange station, the processing device and the exchange station are connected, and after the inside of the exchange station is evacuated, a shutoff valve between the processing device and the exchange station is opened. Then, the exchange handler in the exchange station takes out the used consumable parts from inside the processing device and replaces them with unused consumable parts mounted in the exchange station. This makes it possible to replace the consumable parts without opening the inside of the processing device to the atmosphere, thereby shortening the downtime of processing. Also, since the replacement of the consumable parts is performed by the exchange handler rather than by human hands, the replacement of the consumable parts can be completed in a short time. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2017-85072 A Summary of the Invention [Problem to be solved by the invention]

[0006] The present disclosure provides a part transporter and processing system that can facilitate replacement of consumable parts. [Means for solving the problem]

[0007] One aspect of the present disclosure is a part transporting device for transporting consumable parts, the device including a part storage unit, a container, a robot arm, and a moving mechanism. The part storage unit stores unused consumable parts and used consumable parts. The container has an opening connected to a processing device and a gate valve for opening and closing the opening, and stores the part storage unit. The robot arm is provided in the container, and transports used consumable parts from the processing device through the opening and stores them in the part storage unit, and removes unused consumable parts from the part storage unit and transports them into the processing device through the opening. The moving mechanism has a power source and moves the part transporting device. Effect of the Invention

[0008] Various aspects and embodiments of the present disclosure may facilitate replacement of consumable parts. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a system configuration diagram illustrating an example of a processing system according to an embodiment of the present disclosure. [Diagram 2] FIG. 2 is a diagram illustrating an example of a processing device according to the first embodiment. [Diagram 3] FIG. 3 is a diagram showing an example of the upper surface of the lower electrode. [Figure 4] FIG. 4 is a diagram showing an example of the lower surface of the edge ring. [Diagram 5]FIG. 5 is an enlarged view showing an example of the shape of the opening of the recess. [Figure 6] FIG. 6 is an enlarged cross-sectional view showing an example of the shape of the recesses and protrusions. [Figure 7] FIG. 7 is an enlarged cross-sectional view showing another example of the shape of the recesses and protrusions. [Figure 8] FIG. 8 is an enlarged cross-sectional view showing another example of the shape of the recesses and protrusions. [Figure 9] FIG. 9 is a diagram illustrating an example of a part carrying device according to the first embodiment. [Figure 10] FIG. 10 is a diagram showing an example of a state in which a cassette is removed. [Figure 11] FIG. 11 is an enlarged cross-sectional view showing an example of a connection portion between the processing device and the part carrying device in the first embodiment. [Figure 12] FIG. 12 is an enlarged cross-sectional view showing an example of a connection portion between the processing device and the part carrying device in the first embodiment. [Figure 13] FIG. 13 is a block diagram showing an example of a control device. [Figure 14] FIG. 14 is a diagram illustrating an example of the reservation table. [Figure 15] FIG. 15 is a diagram for explaining an example of the timing for replacing the edge ring. [Figure 16] FIG. 16 is a flow chart showing an example of the process of the control device when moving the part transport device to the position of the processing device that is the target of replacing the consumable part. [Figure 17] FIG. 17 is a flowchart showing an example of the process of the control device when controlling a processing device that is a target for replacing a consumable part and a part transport device connected to that processing device. [Figure 18] FIG. 18 is a flowchart showing an example of a process of the part carrying device. [Figure 19] FIG. 19 is a diagram illustrating an example of a processing device according to the second embodiment. [Figure 20] FIG. 20 is a diagram illustrating an example of a part carrying device according to the second embodiment. [Figure 21]FIG. 21 is an enlarged cross-sectional view showing an example of a connection portion between a processing device and a part conveying device in the second embodiment. [Figure 22] FIG. 22 is a diagram for explaining an example of replacement timing of consumable parts in the third embodiment. [Figure 23] FIG. 23 is a diagram for explaining an example of a method for replacing an edge ring in the fourth embodiment. [Figure 24] FIG. 24 is a diagram illustrating an example of a part conveying device according to the fifth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, embodiments of a part carrying device and a processing system will be described in detail with reference to the drawings. Note that the disclosed part carrying device and processing system are not limited to the following embodiments.

[0011] In the mass production process, substrates are processed by a plurality of processing devices, and consumable parts are replaced in processing devices installed in different locations. Therefore, a replacement station carrying the consumable parts to be used must be moved to the location of the processing device where the consumable parts need to be replaced.

[0012] Some large consumable parts weigh several kilograms. In addition, the robot arm that replaces such large consumable parts may weigh several tens to several hundred kilograms as a whole. Therefore, the weight of the entire replacement station for replacing the consumable parts is thought to be several hundred kilograms or more. It is difficult for an operator to move such a heavy replacement station to the location of the processing equipment where the consumable parts need to be replaced.

[0013] Therefore, the present disclosure provides a technique that can facilitate replacement of consumable parts.

[0014] (First embodiment) [Configuration of processing system 10] 1 is a system configuration diagram showing an example of a processing system 10 according to an embodiment of the present disclosure. In the embodiment, the processing system 10 includes a control device 20, a plurality of processing groups 30, and a plurality of part conveying devices 50. The control device 20 communicates with each of the processing groups 30 and each of the part conveying devices 50, and controls each of the processing groups 30 and each of the part conveying devices 50.

[0015] Each processing group 30 includes a vacuum transfer chamber 31, a plurality of processing devices 40-1 to 40-6, a plurality of load lock chambers 32, and an atmospheric transfer chamber 33. In the following description, the processing devices 40-1 to 40-6 will be collectively referred to as processing device 40 without distinguishing between them.

[0016] A plurality of processing devices 40 and a plurality of load lock chambers 32 are connected to the vacuum transfer chamber 31. In this embodiment, six processing devices 40 are connected to the vacuum transfer chamber 31, but five or fewer processing devices 40 may be connected to the vacuum transfer chamber 31, or seven or more processing devices 40 may be connected to the vacuum transfer chamber 31. In this embodiment, two load lock chambers 32 are connected to the vacuum transfer chamber 31, but one load lock chamber 32 may be connected to the vacuum transfer chamber 31, or three or more load lock chambers 32 may be connected to the vacuum transfer chamber 31.

[0017] Each processing apparatus 40 performs processing such as etching and film formation on a substrate in a low pressure environment. Each processing apparatus 40 is provided with consumable parts that are consumed according to the processing performed on the substrate. Each processing apparatus 40 is separated from the vacuum transfer chamber 31 by a gate valve 400. Each processing apparatus 40 is also provided with a gate valve 401 for carrying out used consumable parts and carrying in used consumable parts. Each processing apparatus 40 may be an apparatus that performs the same process in a manufacturing process, or may be an apparatus that performs different processes.

[0018] Each load lock chamber 32 has gate valves 320 and 321, and switches the internal pressure from a predetermined vacuum pressure to atmospheric pressure or from atmospheric pressure to a predetermined vacuum pressure. The load lock chamber 32 and the vacuum transfer chamber 31 are separated by the gate valve 320. In addition, the load lock chamber 32 and the atmospheric transfer chamber 33 are separated by the gate valve 321.

[0019] A robot arm 310 is disposed in the vacuum transfer chamber 31. The interior of the vacuum transfer chamber 31 is maintained at a predetermined vacuum level. In this embodiment, the robot arm 310 takes out an unprocessed substrate from the load lock chamber 32, which has been depressurized to a predetermined vacuum level, and transfers it into one of the processing devices 40. The robot arm 310 also takes out a processed substrate from the processing device 40 and transfers it into another processing device 40 or the load lock chamber 32.

[0020] An atmospheric transfer chamber 33 is connected to the load lock chamber 32. A robot arm 330 is provided in the atmospheric transfer chamber 33. The atmospheric transfer chamber 33 is also provided with a plurality of load ports 331 to which containers (e.g., FOUP: Front Opening Unified Pod) capable of accommodating a plurality of unprocessed or processed substrates are connected. The robot arm 330 takes out the unprocessed substrate from the container connected to the load port 331 and transfers it into the load lock chamber 32. The robot arm 330 takes out the processed substrate from the load lock chamber 32 and transfers it into the container connected to the load port 331. The atmospheric transfer chamber 33 may be provided with an alignment unit that adjusts the orientation of the substrate taken out of the container connected to the load port 331.

[0021] Each part transport device 50 has a used consumable part and a robot arm inside, and moves to the position of the processing device 40 having the consumable part that needs to be replaced in response to an instruction from the control device 20. The part transport device 50 is connected to the processing device 40 having the consumable part that needs to be replaced via a gate valve 401. After the inside of the part transport device 50 is evacuated to a vacuum, the gate valve 401 is opened and the used consumable part is replaced with a new consumable part by the robot arm.

[0022] [Configuration of processing device 40] 2 is a diagram showing an example of a processing apparatus 40 in the first embodiment. In this embodiment, the processing apparatus 40 includes a chamber 41, a gas supply unit 44, an RF (Radio Frequency) power supply unit 45, and an exhaust system .

[0023] The chamber 41 has a support 42 and an upper electrode showerhead assembly 43. The support 42 is disposed in a lower region of a processing space 41s in the chamber 41. The upper electrode showerhead assembly 43 is disposed above the support 42 and can function as a part of a top plate of the chamber 41.

[0024] The support 42 is configured to support the substrate W in the processing space 41s. In this embodiment, the support 42 includes a lower electrode 421 and an electrostatic chuck 422. The lower electrode 421 is an example of a base member. The electrostatic chuck 422 is disposed on the lower electrode 421 and configured to support the substrate W on the upper surface of the electrostatic chuck 422. An edge ring 423 is provided on the upper surface of the peripheral portion of the lower electrode 421. The edge ring 423 is disposed on the upper surface of the peripheral portion of the lower electrode 421 so as to surround the electrostatic chuck 422 and the substrate W. The upper surface of the electrostatic chuck 422 is an example of a mounting surface. The support 42 is an example of a mounting table. The edge ring 423 is an example of a consumable part.

[0025] Through holes for passing the lift pins 47 are formed in the bottom of the chamber 41, the lower electrode 421, and the electrostatic chuck 422. The lift pins 47 are raised and lowered by the drive unit 470 when the substrate W is loaded and unloaded. This allows the substrate W loaded into the chamber 41 to be received from the robot arm 310 and placed on the electrostatic chuck 422, and the processed substrate W can be handed over to the robot arm 310 and unloaded from the chamber 41.

[0026] Further, through holes are formed in the bottom of chamber 41 and lower electrode 421 to allow lift pins 48 to pass therethrough. Lift pins 48 are raised and lowered by drive unit 480 when replacing edge ring 423. This allows edge ring 423 after use to be handed over to the robot arm of component conveying device 50 and carried out of chamber 41, and edge ring 423 before use can be received from the robot arm of component conveying device 50 and placed on lower electrode 421.

[0027] 3 is a diagram showing an example of the upper surface of the lower electrode 421. In a region 4210 of the upper surface of the lower electrode 421 (the surface on the side where the electrostatic chuck 422 is arranged), a plurality of through holes 4211 through which the lift pins 47 pass are provided, and the electrostatic chuck 422 is arranged therein. In a region 4212 around the region 4210, a plurality of through holes 4213 through which the lift pins 48 pass and a plurality of protrusions 4214 used for positioning the edge ring 423 are provided, and the edge ring 423 is arranged therein. In this embodiment, the plurality of protrusions 4214 are arranged on a circumference centered on the central axis X of the substrate W placed on the electrostatic chuck 422.

[0028] 4 is a diagram showing an example of the lower surface of the edge ring 423. A plurality of recesses 4230 are provided on the lower surface of the edge ring 423 (the surface in contact with the lower electrode 421). In this embodiment, the plurality of recesses 4230 are arranged on a circumference centered on the central axis X of the substrate W placed on the electrostatic chuck 422. In this embodiment, three recesses 4230 are formed on the lower surface of the edge ring 423. Note that, as long as a plurality of recesses 4230 are formed on the lower surface of the edge ring 423, two recesses 4230 or four or more recesses 4230 may be formed.

[0029] FIG. 5 is an enlarged view showing an example of the shape of the opening of the recess 4230. In this embodiment, the shape of the opening of the recess 4230 is, for example, as shown in FIG. 5, an elongated hole having a width ΔW1 in the circumferential direction of a circle centered on the central axis X and a width ΔW2 in the radial direction of the circle centered on the central axis X. The width ΔW1 is the width of the protrusion 4214 in the circumferential direction of the circle centered on the central axis X plus a design clearance. The width ΔW2 is wider than the width ΔW1. In this embodiment, the recess 4230 is disposed in the edge ring 423 so that the major axis of the shape of the opening is oriented along the radial direction of the circle centered on the central axis X.

[0030] As a result, by placing the edge ring 423 on the lower electrode 421 so that the convex portion 4214 is inserted into the concave portion 4230, it is possible to make the central axis of the edge ring 423 approximately coincident with the central axis X of the substrate W placed on the electrostatic chuck 422. Furthermore, even if the edge ring 423 thermally expands during processing of the substrate W, it is possible to suppress misalignment between the central axis of the edge ring 423 and the central axis X of the substrate W placed on the electrostatic chuck 422.

[0031] The opening of the recess 4230 may be inclined as shown in FIG. 6. FIG. 6 is an enlarged cross-sectional view showing an example of the shape of the recess 4230 and the protrusion 4214. The recess 4230 is provided with a first side wall 4230a extending in the depth direction of the recess 4230 and a first inclined portion 4230b in which the width of the recess 4230 increases as it advances from the first side wall 4230a to the opening of the recess 4230. This allows the edge ring 423 to be placed on the lower electrode 421 so that the protrusion 4214 is inserted into the recess 4230 even if the position of the recess 4230 and the position of the protrusion 4214 are slightly misaligned when the edge ring 423 is placed on the lower electrode 421. Therefore, the center axis of the edge ring 423 can be easily approximately aligned with the center axis X of the substrate W placed on the electrostatic chuck 422.

[0032] The inclination may be formed on the protruding portion 4214 side, for example, as shown in FIG. 7. FIG. 7 is an enlarged cross-sectional view showing another example of the shape of the recessed portion 4230 and the protruding portion 4214. The protruding portion 4214 of the lower electrode 421 is provided with a second side wall portion 4214b extending from the base of the protruding portion 4214 in the protruding direction of the protruding portion 4214, and a second inclined portion 4214a in which the width of the protruding portion 4214 narrows as it advances from the second side wall portion 4214b to the tip of the protruding portion 4214. The inclination may be formed on both the recessed portion 4230 and the protruding portion 4214, for example, as shown in FIG. 8. FIG. 8 is an enlarged cross-sectional view showing another example of the shape of the recessed portion 4230 and the protruding portion 4214.

[0033] In this embodiment, the lower electrode 421 is provided with the convex portion 4214, and the edge ring 423 is provided with the concave portion 4230, but the disclosed technology is not limited to this. As long as a concave portion is provided on one of the lower electrode 421 and the edge ring 423 and a convex portion is provided on the other at opposing positions of the lower electrode 421 and the edge ring 423, the lower electrode 421 may be provided with a concave portion and the edge ring 423 may be provided with a convex portion.

[0034] In the present embodiment, the shape of the opening of the recess 4230 provided in the edge ring 423 is an elongated hole, but the disclosed technology is not limited to this. For example, the shape of the opening of the recess 4230 provided in the edge ring 423 may be a groove extending in the radial direction of a circle centered on the central axis X. In this case, the convex portion 4214 of the lower electrode 421 may be a protrusion extending in the radial direction of a circle centered on the central axis X, and may be a protrusion having a shape corresponding to the shape of the opening of the recess 4230.

[0035] Returning to FIG. 2, the description will be continued. The upper electrode showerhead assembly 43 is configured to supply one or more types of gas from the gas supply unit 44 into the processing space 41s. In this embodiment, the upper electrode showerhead assembly 43 includes an electrode support unit 43d and an upper electrode 43e. The electrode support unit 43d has a gas inlet 43a and a gas diffusion chamber 43b, and supports the upper electrode 43e on its lower surface. The gas supply unit 44 and the gas diffusion chamber 43b are in fluid communication with each other via the gas inlet 43a. The electrode support unit 43d and the upper electrode 43e are formed with a plurality of gas outlets 43c, and the gas diffusion chamber 43b and the processing space 41s are in fluid communication with each other via the plurality of gas outlets 43c. In this embodiment, the upper electrode showerhead assembly 43 is configured to supply one or more types of gas from the gas inlet 43a into the processing space 41s via the gas diffusion chamber 43b and the plurality of gas outlets 43c.

[0036] The gas supply unit 44 includes a plurality of gas sources 440a-440c, a plurality of flow rate controllers 441a-441c, and a plurality of valves 442a-442c. The gas source 440a is, for example, a processing gas source, the gas source 440b is, for example, a cleaning gas source, and the gas source 440c is, for example, an inert gas source. In this embodiment, the inert gas is, for example, nitrogen gas. The flow rate controllers 441a-441c may include, for example, mass flow controllers or pressure-controlled flow rate controllers. The gas supply unit 44 may also include one or more flow rate modulation devices that modulate or pulse the flow rates of one or more processing gases.

[0037] The RF power supply 45 is configured to supply RF power, for example one or more RF powers, to one or more electrodes, such as the lower electrode 421, the upper electrode showerhead assembly 43, or both the lower electrode 421 and the upper electrode showerhead assembly 43. In this embodiment, the RF power supply 45 includes two RF generators 450a, 450b, and two matching circuits 451a, 451b. The RF power supply 45 in this embodiment is configured to supply a first RF power from the RF generator 450a to the lower electrode 421 via the matching circuit 451a. The RF spectrum encompasses a portion of the electromagnetic spectrum in the range of 3 [Hz] to 3000 [GHz]. For electronic material processes such as semiconductor processes, the frequency of the RF spectrum used for plasma generation is preferably a frequency in the range of 100 [kHz] to 3 [GHz], more preferably a frequency in the range of 200 [kHz] to 150 [MHz]. For example, the frequency of the first RF power may be a frequency in the range of 27 [MHz] to 100 [MHz].

[0038] Moreover, the RF power supply unit 45 in this embodiment is configured to supply the second RF power from the RF generating unit 450b to the lower electrode 421 via the matching circuit 451b. For example, the frequency of the second RF power may be within a range of 400 [kHz] to 13.56 [MHz]. Alternatively, the RF power supply unit 45 may have a DC (Direct Current) pulse generating unit instead of the RF generating unit 450b.

[0039] Further, although not shown, other embodiments are contemplated herein. For example, in an alternative embodiment of the RF power supply 45, an RF generator may be configured to supply a first RF power to the lower electrode 421, and another RF generator may be configured to supply a second RF power to the lower electrode 421. Yet another RF generator may be configured to supply a third RF power to the upper electrode showerhead assembly 43. In addition, in other alternative embodiments, a DC voltage may be applied to the upper electrode showerhead assembly 43. Also, in various embodiments, the amplitude of one or more RF powers (i.e., the first RF power, the second RF power, etc.) may be pulsed or modulated. Amplitude modulation may include pulsing the amplitude of the RF power between an on state and an off state, or between multiple different on states. Also, phase matching of the RF powers may be controlled, and phase matching of the amplitude modulation of multiple RF powers may be synchronized or asynchronous.

[0040] The exhaust system 46 is connected to, for example, an exhaust port 41e provided at the bottom of the chamber 41 via a pressure control valve 460. The pressure control valve 460 is an example of a second pressure control unit. The exhaust system 46 may include a vacuum pump such as a pressure valve, a turbomolecular pump, a roughing pump, or a combination of these. A pipe 462 is connected between the pressure control valve 460 and the exhaust system 46 via a valve 461a. The pipe 462 is connected to a space outside the gate valve 401. The gas exhausted by the exhaust system 46 is exhausted from an exhaust port of the exhaust system 46 to an exhaust gas processing system that processes the exhaust gas. The pipe 462 is also connected to an exhaust port of the exhaust system 46 via a valve 461b.

[0041] [Parts transport device 50] FIG. 9 is a diagram showing an example of a part transporting device 50 in the first embodiment. The part transporting device 50 includes a container 51, a cassette 52, a plurality of robot arms 53a to 53b, and a moving mechanism 54. The container 51 has an opening 511 connected to the processing device 40, a gate valve 512 for opening and closing the opening 511, and a lid 510. The container 51 accommodates the cassette 52 and the plurality of robot arms 53a to 53b. The gate valve 512 is an example of an on-off valve. In the following description, the plurality of robot arms 53a to 53b will be collectively referred to as robot arm 53 without distinction between them.

[0042] The cassette 52 accommodates a plurality of edge rings 423 before use. The cassette 52 is an example of a component accommodating section. The cassette 52 also accommodates a used edge ring 423 that has been replaced with the edge ring 423 before use. The cassette 52 is placed on a stage 521, and the stage 521 is raised and lowered by a driving section 522. This allows each robot arm 53 to remove the edge rings 423 that are accommodated in the cassette 52 in a vertically aligned manner from the cassette 52. When all the edge rings 423 in the cassette 52 have become used edge rings 423, for example, as shown in FIG. 10, the cover section 510 is opened, the cassette 52 is removed from the container 51, and the cassette 52 is replaced with a cassette 52 in which a plurality of edge rings 423 before use are accommodated. FIG. 10 is a diagram showing an example of how the cassette 52 is removed.

[0043] The robot arm 53a has an end effector 530a at the tip of the arm, and uses the end effector 530a to remove the edge ring 423 before use from the cassette 52. The robot arm 53b carries the edge ring 423 after use out of the processing device 40 through the opening 511 and stores it in the cassette 52. The robot arm 53a carries the edge ring 423 before use into the processing device 40 through the opening 511. In the following, the end effectors 530a and 530b will be collectively referred to as end effector 530 when they are not distinguished from each other.

[0044] In this manner, in this embodiment, the end effector 530a used for transporting the edge ring 423 before use and the end effector 530b used for transporting the edge ring 423 after use are separately provided. This makes it possible to prevent the edge ring 423 before use from being contaminated by reaction by-products or the like peeled off from the edge ring 423 after use.

[0045] In this embodiment, the end effector 530a used to transport the edge ring 423 before use and the end effector 530b used to transport the edge ring 423 after use are moved by separate robot arms. However, the disclosed technology is not limited to this. As long as the end effector used to transport the edge ring 423 before use and the end effector used to transport the edge ring 423 after use are provided separately, these two end effectors may be provided at the tip of one robot arm.

[0046] In this embodiment, the end effector 530b of the robot arm 53b supports the lower surface of the edge ring 423 when carrying the used edge ring 423 out of the processing device 40. This makes it possible to prevent reaction by-products and the like adhering to the edge ring 423 from adhering to the end effector 530a.

[0047] In this embodiment, the robot arm 53a removes the unused edge rings 423 that are vertically arranged and stored in the cassette 52, starting from the bottom. In this embodiment, the robot arm 53b stores the used edge ring 423 in a storage location of the cassette 52 that has become vacant by removing the unused edge ring 423. As a result, the used edge ring 423 is stored lower than the unused edge ring 423 in the cassette 52. This makes it possible to prevent reaction by-products and the like peeled off from the used edge ring 423 from falling and adhering to the used edge ring 423.

[0048] In addition, in the cassette 52, the space in which the edge ring 423 is accommodated may be partitioned for each edge ring 423 accommodated therein. In this way, regardless of which accommodation location in the cassette 52 the used edge ring 423 is accommodated in, it is possible to prevent reaction by-products and the like peeled off from the used edge ring 423 from dropping and adhering to the edge ring 423 before use.

[0049] The moving mechanism 54 has a main body 540 and wheels 541. A power source such as a battery, a power source, a steering mechanism, and the like are provided inside the main body 540. The wheels 541 rotate by the power source inside the main body 540, and move the part transporting device 50 in a direction controlled by the steering mechanism inside the main body 540. Note that the moving mechanism 54 may move the part transporting device 50 by a method other than the wheels 541, such as a walking type, as long as it can move the part transporting device 50.

[0050] The part carrying device 50 also includes a communication unit 550, a control unit 551, a storage unit 552, a sensor 553, and an exhaust device 554. The exhaust device 554 is an example of a first pressure control unit. The communication unit 550 is, for example, a wireless communication circuit, and performs wireless communication with the control device 20. The sensor 553 senses the surroundings of the part carrying device 50 and outputs the sensing result to the control unit 551. In this embodiment, the sensor 553 is, for example, an image sensor, and captures an image of the surroundings of the part carrying device 50 and outputs it to the control unit 551. The sensor 553 is an example of a first sensor.

[0051] The exhaust device 554 is connected to the space in the container 51 via the valve 556a and the pipe 555. The exhaust device 554 sucks gas in the space in the container 51 via the valve 556a and the pipe 555, and discharges the sucked gas to the outside of the component carrier device 50 via the exhaust port 557. This allows the inside of the container 51 to be depressurized to a predetermined vacuum level, and moisture and the like that adheres to the edge ring 423 before use can be reduced. In addition, since the pressure in the container 51 can be made lower than the pressure in the processing device 40, when the component carrier device 50 is connected to the processing device 40 and the gate valve 512 is opened, a gas flow from the processing device 40 to the container 51 can be generated. This prevents particles in the container 51 from entering the processing device 40.

[0052] Furthermore, the pipe 555 is connected to an exhaust port 557 via a valve 556b. When, for example, the cassette 52 is replaced, the valve 556b is opened and the space within the container 51 is returned to atmospheric pressure.

[0053] The storage unit 552 is a ROM (Read Only Memory), a HDD (Hard Disk Drive), a SSD (Solid State Drive), or the like, and stores data, programs, and the like used by the control unit 551. The control unit 551 is a processor such as a CPU (Central Processing Unit) or a DSP (Digital Signal Processor), and controls the entire part transport device 50 by reading and executing the programs in the storage unit 552.

[0054] The control unit 551 controls the moving mechanism 54 using the sensing result of the sensor 553, for example, to move the part carrying device 50 to the position of the processing device 40 instructed by the control device 20.

[0055] Further, a cleaning unit 56 for cleaning the end effector 530b of the robot arm 53b is provided in the container 51. The cleaning unit 56 cleans the end effector 530b used for transporting the used edge ring 423, for example, by high-pressure gas purging or ice blasting. By cleaning the end effector 530b after transporting the used edge ring 423, it is possible to suppress particles attached to the end effector 530b from the used edge ring 423 from scattering into the space within the container 51.

[0056] Further, a positional deviation detection sensor 57 is provided near the opening 511 of the container 51 to detect a positional deviation of the edge ring 423 when the edge ring 423 before use passes through the opening 511. As another embodiment, the positional deviation detection sensor 57 may be provided near the gate valve 401 of the processing device 40. The positional deviation detection sensor 57 is an example of a second sensor. In this embodiment, the positional deviation detection sensor 57 is, for example, a light-shielding sensor. The amount of deviation of the position of the edge ring 423 detected by the positional deviation detection sensor 57 is output to the control unit 551. The control unit 551 adjusts the position of the edge ring 423 by controlling the robot arm 53a to correct the deviation detected by the positional deviation detection sensor 57. Then, the control unit 551 controls the robot arm 53a to place the edge ring 423 whose position has been adjusted on the lift pins 48 protruding from the lower electrode 421. As a result, when the lift pin 48 is lowered, the convex portion 4214 of the lower electrode 421 can be inserted into the concave portion 4230 of the edge ring 423, and the edge ring 423 can be accurately positioned at a predetermined position within the processing device 40.

[0057] [Connection between processing device 40 and part conveying device 50] 11 and 12 are enlarged cross-sectional views showing an example of a connection portion between the processing device 40 and the part carrying device 50 in the first embodiment. In this embodiment, a convex portion 410 is provided on a side surface of the chamber 41 of the processing device 40 to which the part carrying device 50 is connected. In addition, a concave portion 513 having a shape corresponding to the convex portion 410 is provided on a side surface of the container 51 of the part carrying device 50 to which the processing device 40 is connected. When the processing device 40 and the part carrying device 50 are connected, the convex portion 410 and the concave portion 513 support the alignment of the processing device 40 and the part carrying device 50 by fitting together as shown in FIG. 12, for example.

[0058] Furthermore, a seal member 514 such as an O-ring is disposed on the side surface of the container 51 of the part transport device 50 so as to surround the opening 511. This can increase the airtightness of the space 60 surrounded by the chamber 41, the gate valve 401, the container 51, and the gate valve 512. After the processing device 40 and the part transport device 50 are connected, the gas in the space 60 is exhausted through the pipe 462, so that the space 60 can be depressurized to a predetermined vacuum level. By depressurizing the space 60, the connection between the processing device 40 and the part transport device 50 becomes stronger. When the connection between the processing device 40 and the part transport device 50 is released, the valve 461b of the processing device 40 is opened so that the space 60 is returned to atmospheric pressure.

[0059] It is preferable that the convex portion 410 and the concave portion 513 are provided with an inclined portion like the convex portion 4214 of the lower electrode 421 and the concave portion 4230 of the edge ring 423 .

[0060] [Configuration of control device 20] 13 is a block diagram showing an example of the control device 20. The control device 20 includes a storage unit 21, a control unit 22, a wireless communication unit 23, and a wired communication unit 24. The wireless communication unit 23 is, for example, a wireless communication circuit, and performs wireless communication with each part conveying device 50 via an antenna 25. The wired communication unit 24 is, for example, a NIC (Network Interface Card) or the like, and performs communication with each processing group 30. The control device 20 may perform wireless communication with each processing group 30.

[0061] The storage unit 21 is a ROM, HDD, SSD, or the like, and stores data, programs, and the like used by the control unit 22. In the storage unit 21, a reservation table 210 as shown in FIG.

[0062] FIG. 14 is a diagram showing an example of the reservation table 210. The reservation table 210 stores a part ID, a processing device ID, a replacement date and time, an RF accumulated time, a next replacement time, and a part carrying device ID. The part ID is information for identifying each edge ring 423. The processing device ID is information for identifying a processing device 40 to which an edge ring 423 identified by a corresponding part ID is attached. The replacement date and time is the date and time when the edge ring 423 was replaced. The RF accumulated time is information indicating an accumulated time of processing performed in the processing device 40 using RF power. The next replacement time is the date and time when the edge ring 423 will be next replaced. The part carrying device ID is information for identifying a part carrying device 50 that is reserved to replace an edge ring 423 identified by a corresponding part ID.

[0063] The control unit 22 is a processor such as a CPU or a DSP, and controls the entire control device 20 by reading and executing the programs in the storage unit 21.

[0064] [Timing for replacing consumable parts] 15 is a diagram for explaining an example of the replacement timing of the edge ring 423. The control unit 22 of the control device 20 estimates the replacement time t1 of each edge ring 423, and registers the estimated replacement time t1 in the "next replacement time" field in the reservation table 210. If processing has not yet been performed on the substrate W after the edge ring 423 has been replaced, the control device 20 registers the standard replacement time t1 estimated from the "replacement date and time" of the edge ring 423 in the "next replacement time" field.

[0065] On the other hand, when the substrate W is processed after the edge ring 423 is replaced, the control device 20 registers the replacement time t1 estimated from the "replacement date and time" and "RF accumulated time" of the edge ring 423 in the "next replacement date and time" field. The control unit 22 estimates the date and time at which the "RF accumulated time" will reach a predetermined value from the tendency of change in the "RF accumulated time" from the "replacement date and time", for example, and registers the estimated date and time in the "next replacement date and time" field. The control unit 22 updates the "next replacement date and time" every time the "RF accumulated time" is updated, for example. The process of estimating the replacement date and time of the edge ring 423 is an example of a first estimation process.

[0066] In this embodiment, the control unit 22 estimates the replacement time t1 of the edge ring 423 based on the "RF accumulated time", but the disclosed technology is not limited to this. For example, the control unit 22 may estimate the replacement time t1 of the edge ring 423 based on at least one of the "RF accumulated time", "RF accumulated power", "recipe accumulated time", "change in weight of consumable parts", and "change in dimension of consumable parts". The "RF accumulated power" refers to the multiplication value of the processing time performed in the processing device 40 using RF power and the value of that power, and the "recipe accumulated time" refers to the accumulated time of a specific processing recipe in which the consumption of consumable parts is particularly high.

[0067] Furthermore, the control unit 22 identifies, for each edge ring 423, the timing t2 at which processing of the substrate W in the processing device 40 is finally completed in the period prior to the "next replacement time". In this embodiment, the control unit 22 determines the end of processing for each lot of substrates W. This makes it possible to avoid significant changes in the processing environment within a lot. As another example, the control unit 22 may determine the end of processing for each substrate W.

[0068] After completing the processing at timing t2, the processing device 40 prepares for replacement of the edge ring 423 during a preparation time ΔT1. The preparation time ΔT1 is a time required for replacing the gas in the processing device 40, adjusting the pressure in the processing device 40, stabilizing the temperature of the edge ring 423, and the like. The control unit 22 identifies timing t3, which is the time when the preparation time ΔT1 has elapsed since timing t2, as the timing when the edge ring 423 can be replaced. The process of identifying the replacement possible timing t3 is an example of an identifying process.

[0069] In order for the edge ring 423 to be replaced at the replacement possible timing t3, preparations for replacing the edge ring 423 must be made after the component conveying device 50 is connected to the processing device 40. The preparation time ΔT2 is the time required for the space 60 (see FIG. 12) between the gate valve 401 and the gate valve 512 to be depressurized to a predetermined pressure. The control unit 22 estimates the preparation time ΔT2. The preparation time ΔT2 is an example of a first preparation time. The process of estimating the preparation time ΔT2 is an example of a third estimation process.

[0070] In order to complete preparation for replacing the edge ring 423 at the replacement possible timing t3, the movement of the component transport device 50 to the position of the processing device 40 must be completed at timing t4, which is a preparation time ΔT2 before the replacement possible timing t3. The movement time ΔT3 is the time required for the component transport device 50 to move to the position of the processing device 40 where the edge ring 423 needs to be replaced. The control unit 22 estimates the movement time ΔT3. The movement time ΔT3 is an example of a first movement time. The process of estimating the movement time ΔT3 is an example of a second estimation process. The component transport device 50 may start moving before timing t5, which is a movement time ΔT3 before the timing t4. The control unit 22 manages the positions of the respective processing devices 40 and the respective part transport devices 50, and can estimate the time required for each component transport device 50 to move to the position of each processing device 40.

[0071] The control unit 22 determines whether the replacement time t3 is longer than the timing t5 by the total time of the preparation time ΔT2 and the movement time ΔT3. p The replacement instruction is transmitted to the component conveying device 50, thereby instructing the component conveying device 50 to replace the edge ring 423. The step of transmitting the replacement instruction is an example of a transmitting step.

[0072] In order to replace the edge ring 423 at the replacement possible timing t3, the pressure inside the component carrying device 50 needs to be reduced to a predetermined pressure. The pressure adjustment time ΔT4 is the time required for the pressure inside the container 51 to be reduced to the predetermined pressure. Therefore, the component carrying device 50 needs to start adjusting the pressure inside the component carrying device 50 before timing t6 that is the pressure adjustment time ΔT4 before the replacement possible timing t3.

[0073] Here, immediately after the cassette 52 has been replaced or if the edge ring 423 has not been replaced for some time, the pressure inside the component conveying device 50 is higher than the predetermined pressure, so the pressure adjustment time ΔT4 is long. On the other hand, immediately after the edge ring 423 has been replaced, the pressure inside the component conveying device 50 is close to the predetermined pressure, so the pressure adjustment time ΔT4 is short. Therefore, the relationship between timings t5 and t6 differs depending on the state of the component conveying device 50.

[0074] From the above, it is necessary to instruct the component transport device 50 to replace the edge ring 423 of the processing device 40 before the earlier of the timings t5 and t6 before the replacement time of the edge ring 423. Therefore, the control unit 22 instructs the component transport device 50 to replace the edge ring 423 of the processing device 40 at the timing t p and the timing t is earlier than the timings t5 and t6. p In step S100, the component conveying device 50 is instructed to replace the edge ring 423 of the processing device 40. This makes it possible to shorten the downtime of the processing device 40 for replacing the edge ring 423, and to suppress a decrease in production efficiency due to the replacement of the edge ring 423.

[0075] [Processing of the control device 20] Fig. 16 is a flow chart showing an example of the processing of the control device 20 when the part transporting device 50 is moved to the position of the processing device 40 that is the target of replacing a consumable part. The processing shown in Fig. 16 is realized by the control unit 22 of the control device 20 executing a program read from the storage unit 21. The control device 20 controls the multiple processing devices 40 and the part transporting devices 50.

[0076] First, the control unit 22 refers to the reservation table 210 to identify edge rings 423 for which replacement is not reserved (S100). For example, the control unit 22 identifies an edge ring 423 for which a part ID is not associated with a part transport device ID as an edge ring 423 for which replacement is not reserved. Then, the control unit 22 determines whether or not there is an edge ring 423 for which replacement will arrive within a predetermined time ΔT0 from the current time among the identified edge rings 423 (S101). If there is no edge ring 423 for which replacement will arrive within the time ΔT0 from the current time (S101: No), the control unit 22 executes the process shown in step S100 again.

[0077] On the other hand, if there is an edge ring 423 whose replacement time will arrive within a time ΔT0 from the current time (S101: Yes), the control unit 22 identifies the movement start timing (S102). The movement start timing is the earlier of timing t5 and timing t6.

[0078] Next, the control unit 22 selects one component carrying device 50 located closest to the position of the processing device 40 that requires replacement of the edge ring 423 (S103). In step S103, not only the linear distance between the processing device 40 and the component carrying device 50 but also the length of the path along which the component carrying device 50 moves to the position of the processing device 40 is taken into consideration. Then, the control unit 22 refers to the reservation table 210 in the storage unit 21 and determines whether the component carrying device ID of the component carrying device 50 selected in step S103 is registered in the reservation table 210 (S104).

[0079] If the component carrying device ID is not registered in the reservation table 210 (S104: No), the control unit 22 executes the following process. That is, the control unit 22 registers the component carrying device ID of the selected component carrying device 50 in the reservation table 210 in association with the component ID of the edge ring 423 determined in step S101 to be due for replacement within the time ΔT0 (S106). As a result, the selected component carrying device 50 is reserved for replacement of the edge ring 423 determined in step S101 to be due for replacement within the time ΔT0.

[0080] Next, the control unit 22 transmits an exchange instruction to the selected component transport device 50 to instruct the replacement of the edge ring 423 (S107). The exchange instruction includes information such as the location information of the processing device 40 that requires the replacement of the edge ring 423 and the component ID of the edge ring 423. Then, the control unit 22 executes the process shown in step S100 again.

[0081] On the other hand, if the part carrying device ID has already been registered in the reservation table 210 (S104: Yes), that is, if the part carrying device 50 selected in step S103 has already been reserved, the control unit 22 executes the following process. That is, the control unit 22 extracts the "next replacement time" associated with the part carrying device ID determined to be registered in the reservation table 210 in step S104 from the reservation table 210. If the part carrying device ID is associated with multiple "next replacement times," the control unit 22 extracts the "next replacement time" that is the latest in time among them.

[0082] Then, the control unit 22 judges whether the movement start timing identified in step S102 is later in time than the extracted "next replacement time" (S105). If the movement start timing is later in time than the "next replacement time" (S105: Yes), the component transporting device 50 can replace the current edge ring 423 after the replacement of the edge ring 423 that has already been reserved is completed. Therefore, the control unit 22 executes the process shown in step S106.

[0083] On the other hand, if the movement start timing is earlier than the "next replacement time" (S105: No), the selected component transport device 50 cannot start moving to the processing device 40 having the edge ring 423 that needs to be replaced until replacement of the other edge ring 423 is completed. Therefore, the control unit 22 instructs the component transport device 50 that is next closest to the position of the processing device 40 that needs to replace the edge ring 423, among the other component transport devices 50, to replace the edge ring 423.

[0084] For example, the control unit 22 determines whether there is another unselected component transport device 50 (S108). If there is another unselected component transport device 50 (S108: Yes), the control unit 22 selects the component transport device 50 that is next closest to the position of the processing device 40 that requires replacement of the edge ring 423 (S109). Then, the control unit 22 executes the process shown in step S104 again.

[0085] On the other hand, if all of the component transport devices 50 have been selected (S108: No), the control unit 22 refers to the reservation table 210 and selects the component transport device 50 that will finish replacing the edge ring 423 earliest (S110). Then, the control unit 22 executes the process shown in step S106.

[0086] FIG. 17 is a flowchart showing an example of the processing of the control device 20 when controlling a processing device 40 for which a consumable part is to be replaced and a part transport device 50 connected to the processing device 40. FIG. 17 illustrates the processing of the control device 20 when controlling one processing device 40 for which a consumable part is to be replaced and one part transport device 50 connected to the processing device 40. The processing of the control device 20 when controlling another processing device 40 for which a consumable part is to be replaced and another part transport device 50 connected to the processing device 40 is also executed in the same manner as the flowchart illustrated in FIG. 17. The processing shown in FIG. 17 is realized by the control unit 22 of the control device 20 executing a program read from the storage unit 21. The control device 20 controls a plurality of processing devices 40 and part transport devices 50.

[0087] First, the control unit 22 determines whether or not a process using RF power has been executed in the processing device 40 (S120). If a process using RF power has not been executed (S120: No), the control unit 22 executes the process shown in step S120 again.

[0088] On the other hand, if a process using RF power has been performed (S120: Yes), the control unit 22 updates the "RF accumulated time" associated with the processing device ID of the processing device 40 in which the process using RF power has been performed in the reservation table 210 (S121). Then, the control unit 22 estimates the "next replacement time" for the edge ring 423 whose "RF accumulated time" has been updated, and updates the "next replacement time" associated with the "component ID" of the edge ring 423 with the estimated "next replacement time" (S122). As a result, the "next replacement time" for the edge ring 423 is updated according to the actual processing time using RF power.

[0089] Next, the control unit 22 determines whether or not the processing of the last lot before the replacement time of the consumable part is completed based on the updated "next replacement time" (S123). If the processing of the last lot before the replacement time of the consumable part is not completed in the processing device 40 (S123: No), the control unit 22 executes the processing shown in step S120 again.

[0090] On the other hand, when the processing of the last lot before the replacement timing of the consumable parts is completed in the processing device 40 (S123: Yes), the control unit 22 causes the processing device 40 that has completed the processing of the lot to perform cleaning inside the chamber 41 (S124). This removes reaction by-products and the like adhering to the edge ring 423 after use, and makes it possible to suppress scattering of reaction by-products and the like when the edge ring 423 is carried out.

[0091] Note that the cleaning in step S124 may be performed after the edge ring 423 is moved away from the lower electrode 421 to which the edge ring 423 was attached by lifting the edge ring 423 with the lift pins 48. This makes it possible to remove reaction by-products and the like attached not only to the upper surface of the edge ring 423 but also to the side surfaces of the edge ring 423 and the upper surface of the lower electrode 421 to which the edge ring 423 was provided.

[0092] Next, the pressure in chamber 41 of processing device 40 where the processing of the lot has been completed is adjusted (S125). In step S125, the gas in chamber 41 is exhausted, and an inert gas is supplied into chamber 41. Then, the pressure in chamber 41 is controlled to a predetermined pressure P1.

[0093] Next, the control unit 22 determines whether or not a connection notification has been received from the part transporting device 50 (S126). Note that, by the process illustrated in Fig. 16, one part transporting device 50 moves to the position of the processing device 40 that is the target of replacing a consumable part. If a connection notification has not been received from the part transporting device 50 (S126: No), the control unit 22 executes the process illustrated in step S126 again.

[0094] On the other hand, when a connection notification is received from the component carrying device 50 (S126: Yes), the control unit 22 controls the exhaust system 46 and the valve 461a of the processing device 40 so as to exhaust gas in the space 60 at the connection portion between the processing device 40 and the component carrying device 50 (S127). This reduces the pressure in the space 60 at the connection portion between the processing device 40 and the component carrying device 50 to a predetermined pressure P2. In this embodiment, the pressure P2 is lower than the pressure P1. Then, the control unit 22 transmits a gate open request to the component carrying device 50 that has sent the connection notification, requesting that the gate valve 512 of the component carrying device 50 be opened (S128).

[0095] Next, the control unit 22 determines whether or not a gate open notification indicating that the gate valve 512 has been opened has been received from the part conveying device 50 (S129). If the gate open notification has not been received (S129: No), the control unit 22 executes the process shown in step S129 again.

[0096] On the other hand, if a gate open notification has been received (S129: Yes), the control unit 22 controls the processing device 40 to lift the edge ring 423 with the lift pins 48 and open the gate valve 401 (S130). Then, the control unit 22 transmits an exchange start instruction to the component transport device 50 to instruct the start of exchange of the edge ring 423 (S131).

[0097] After the replacement start instruction is transmitted in step S131, the component transport device 50 replaces the edge ring 423. At this time, the control unit 22 may control the processing device 40 to clean the inside of the chamber 41 of the processing device 40 during the period from when the used edge ring 423 is carried out until the unused edge ring 423 is carried in. This allows reaction by-products and the like that peel off from the edge ring 423 and fall into the processing device 40 when the used edge ring 423 is carried out to be removed before the unused edge ring 423 is carried in.

[0098] Next, the control unit 22 determines whether or not an exchange completion notification has been received from the part carrying device 50 (S132). If an exchange completion notification has not been received from the part carrying device 50 (S132: No), the control unit 22 executes the process shown in step S132 again.

[0099] On the other hand, when a replacement completion notice is received from the part carrying device 50 (S132: Yes), the control unit 22 controls the processing device 40 to close the gate valve 401 (S133). Then, the control unit 22 transmits a replacement confirmation notice to the part carrying device 50 (S134). Then, the control unit 22 controls the exhaust system 46 and the valve 461a of the processing device 40 to stop exhausting gas from within the space 60 at the connection portion between the processing device 40 and the part carrying device 50 (S135). Then, the control unit 22 opens the valve 461b of the processing device 40 to return the pressure in the space 60 at the connection portion between the processing device 40 and the part carrying device 50 to atmospheric pressure.

[0100] Next, the control unit 22 deletes the record including the "part ID" of the replaced edge ring 423 after use in the reservation table 210. Then, the control unit 22 creates a new record including the "part ID" of the used edge ring 423 and the replaced edge ring 423 before use in the reservation table 210 (S136). In the newly created record, the identification information of the processing device 40 in which the edge ring 423 has been replaced is registered in the "processing device ID" field, the current date and time is registered in the "replacement date and time" field, and 0 is registered in the "RF accumulated time" field. The "parts transporting device ID" field is left blank.

[0101] Then, the control unit 22 estimates the replacement time of the replaced edge ring 423 before use, and registers the estimated replacement time in “next RF integrated time” of the newly created record (S137). Then, the control unit 22 executes the process shown in step S120 again.

[0102] [Processing of parts transport device 50] Fig. 18 is a flowchart showing an example of the processing of part conveying device 50. The processing shown in Fig. 18 is realized by control unit 551 executing a program read from storage unit 552. Note that, apart from the processing exemplified in Fig. 18, control unit 551 receives an exchange instruction via communication unit 550 and stores the received exchange instruction in storage unit 552.

[0103] First, control unit 551 refers to storage unit 552 and determines whether or not there is an unprocessed exchange instruction (S200). If there is no unprocessed exchange instruction (S200: No), control unit 551 executes the process shown in step S200 again.

[0104] If there is an unprocessed replacement instruction (S200: Yes), the control unit 551 starts moving the part transporting device 50 to the position of the processing device 40 corresponding to the position information included in the replacement instruction (S201). Step S201 is an example of a starting step. The control unit 551 controls the moving mechanism 54 using, for example, a sensing result by the sensor 553, to move the part transporting device 50 to the position of the processing device 40 corresponding to the position information included in the replacement instruction. The control unit 551 also controls the exhaust device 554 and the valve 556 to start exhausting gas from the container 51 of the part transporting device 50, thereby starting adjustment of the pressure in the container 51 (S202).

[0105] Next, the control unit 551 determines whether or not the part carrying device 50 is connected to the processing device 40 based on the sensing result by the sensor 553 (S203). If the part carrying device 50 is not connected to the processing device 40 (S203: No), the control unit 551 executes the process shown in step S203 again.

[0106] On the other hand, when the component transport device 50 is connected to the processing device 40 (S203: Yes), the control unit 551 transmits a connection notification to the control device 20 via the communication unit 550 (S204). Then, the control unit 551 controls the robot arm 53a to take out the unused edge ring 423 from the cassette 52 (S205).

[0107] Next, the control unit 551 determines whether or not a gate opening request has been received from the control device 20 via the communication unit 550 (S206). If a gate opening request has not been received (S206: No), the control unit 551 executes the process shown in step S206 again.

[0108] On the other hand, when a gate opening request is received (S206: Yes), the control unit 551 judges whether the pressure P in the container 51 of the part conveying device 50 has reached a predetermined pressure P2 (S207). The pressure P2 is the same as the pressure P2 in the space 60 (see FIG. 12) of the connection portion that is adjusted after the processing device 40 and the part conveying device 50 are connected. When the pressure P has not reached the pressure P2 (S207: No), the control unit 551 executes the process shown in step S207 again. Step S207 is an example of a preparation process.

[0109] Here, when replacing edge ring 423, the pressure inside chamber 41 of processing device 40 is controlled to P1, and the pressure inside space 60 at the connection portion between processing device 40 and component carrier 50 and inside container 51 of component carrier 50 are controlled to P2 lower than pressure P1. As a result, when gate valve 401 of processing device 40 and gate valve 512 of component carrier 50 are opened, a gas flow occurs from inside chamber 41 of processing device 40 to inside container 51 of component carrier 50. Therefore, intrusion of particles inside component carrier 50 into processing device 40 is suppressed.

[0110] If the difference between pressure P1 inside processing device 40 and pressure P2 at the connection between processing device 40 and component transport device 50 and inside component transport device 50 is too small, particles inside component transport device 50 may enter processing device 40. On the other hand, if the difference between pressure P1 and pressure P2 is too large, particles may be stirred up inside component transport device 50. For this reason, the difference between pressure P1 and pressure P2 is set to, for example, 10 Pa or more and 10 4 It is preferable that the thickness is less than [Pa].

[0111] If the pressure P is equal to the pressure P2 (S207: Yes), the control unit 551 opens the gate valve 512 (S208). Then, the control unit 551 determines whether or not an exchange start instruction has been received from the control device 20 via the communication unit 550 (S209). If an exchange start instruction has not been received (S209: No), the control unit 551 executes the process shown in step S209 again.

[0112] On the other hand, when an exchange start instruction has been received (S209: Yes), the control unit 551 controls the robot arm 53b to insert the end effector 530b into the processing device 40 and receive the used edge ring 423 lifted by the lift pins 48 (S210). Then, the control unit 551 controls the robot arm 53b to retreat the end effector 530b into the component transport device 50 and store the used edge ring 423 in the cassette 52. Step S210 is an example of a storing step.

[0113] Next, the control unit 551 inserts the end effector 530a on which the unused edge ring 423 is placed into the processing device 40, and controls the robot arm 53a to transfer the unused edge ring 423 to the lift pins 48 (S211). Then, the control unit 551 controls the robot arm 53a to retract the end effector 530a into the component transporting device 50. The unused edge ring 423 is placed on the lower electrode 421 by lowering the lift pins 48. Step S211 is an example of a loading step.

[0114] Next, the control unit 551 closes the gate valve 512 (S212). Step S212 is an example of a closing step. Then, the control unit 551 transmits a replacement completion notification to the control device 20 via the communication unit 550 (S213).

[0115] Next, the control unit 551 controls the robot arm 53b so that the end effector 530b moves to the vicinity of the cleaning unit 56, and controls the cleaning unit 56 so as to clean the end effector 530b (S214).

[0116] Next, the control unit 551 determines whether or not a replacement confirmation notification has been received from the control device 20 via the communication unit 550 (S215). If a replacement confirmation notification has not been received (S215: No), the control unit 551 executes the process shown in step S215 again.

[0117] On the other hand, when a replacement confirmation notification is received (S215: Yes), the control unit 551 determines whether or not an unused edge ring 423 remains in the cassette 52 (S216). The control unit 551 determines whether or not an unused edge ring 423 remains in the cassette 52 based on, for example, the number of edge rings 423 contained in the cassette 52 and the number of replacements.

[0118] If an unused edge ring 423 remains in the cassette 52 (S216: Yes), the control unit 551 executes the process shown in step S200 again. On the other hand, if an unused edge ring 423 does not remain in the cassette 52 (S216: No), the control unit 551 controls the moving mechanism 54 to move the component transport device 50 to a cassette 52 replacement location. Then, the cassette 52 in the component transport device 50 is replaced with the cassette 52 containing the unused edge ring 423 (S217). Then, the control unit 551 executes the process shown in step S200 again.

[0119] In this embodiment, when there is no unused edge ring 423 remaining in the cassette 52, the component transport device 50 moves to a replacement location for the cassette 52 and replaces the cassette 52, but the disclosed technology is not limited to this. For example, an AGV (Automated Guided Vehicle) or the like may transport the cassette 52 containing the unused edge ring 423 to the location of the component transport device 50 and replace the cassette 52.

[0120] Furthermore, when the cassette 52 is replaced, the pressure inside 51 of the component transport device 50 becomes atmospheric pressure, and it takes time to reduce the pressure to the pressure P2 at the time of replacing the edge ring 423. Therefore, when the cassette 52 is replaced, it is preferable that the control unit 551 controls the exhaust device 554 to exhaust the gas inside the container 51 and reduce the pressure inside the container 51 to the pressure P2 at the time of replacing the edge ring 423. This allows the component transport device 50 to start replacing the edge ring 423 more quickly when a replacement instruction is received from the control device 20.

[0121] The first embodiment has been described above. As described above, the part transport device 50 in this embodiment includes the container 51, the cassette 52, the robot arm 53, and the moving mechanism 54. The cassette 52 stores consumable parts before and after use. The container 51 has an opening 511 connected to the processing device 40 and a gate valve 512 for opening and closing the opening 511, and stores the cassette 52. The robot arm 53 is provided in the container 51, has an end effector 530 at its tip, and carries out used consumable parts from the processing device 40 through the opening 511 and stores them in the cassette 52. The robot arm 53 also takes out used consumable parts from the cassette 52 and carries them into the processing device 40 through the opening 511. The moving mechanism 54 has a power source and moves the part transport device 50. This makes it easier to replace the edge ring 423.

[0122] Moreover, part carrying device 50 in the above embodiment includes communication unit 550, control unit 551, and sensor 553. Communication unit 550 wirelessly communicates with control device 20 that controls part carrying device 50. Sensor 553 senses the surroundings of part carrying device 50. Control unit 551 controls movement mechanism 54 using the sensing result by sensor 553, thereby moving part carrying device 50 to the position of processing device 40 instructed by control device 20. This makes it possible to easily move part carrying device 50.

[0123] In the above embodiment, two end effectors, 530a and 530b, are provided at the tip of the robot arm 53. One end effector, 530a, is used to transport consumable parts before use, and the other end effector, 530b, is used to transport consumable parts after use. This makes it possible to prevent the consumable parts before use from being contaminated by reaction by-products peeled off from the consumable parts after use.

[0124] In the above embodiment, the consumable part is the edge ring 423, and the end effector 530b supports the lower surface of the edge ring 423 after use to transport the edge ring 423. This makes it possible to prevent reaction by-products adhering to the edge ring 423 from adhering to the end effector 530a.

[0125] In the above embodiment, a cleaning unit 56 for cleaning the end effector 530b is provided in the container 51. This makes it possible to prevent reaction by-products attached to the end effector 530b from scattering into the component conveying device 50 as particles.

[0126] In the above embodiment, the cassette 52 contains a plurality of unused and used consumable parts arranged vertically, and the used consumable parts are contained below the unused consumable parts, which makes it possible to prevent reaction by-products peeled off from the used consumable parts from falling and adhering to the unused consumable parts.

[0127] In the above embodiment, the cassette 52 can be removed from the container 51 of the part transport device 50 while still containing the consumable parts. This allows the cassette 52 containing unused consumable parts to be easily replaced with the cassette 52 containing used consumable parts.

[0128] In the above embodiment, the opening 511 of the part transport device 50 is provided with a positional deviation detection sensor 57 that detects a positional deviation of the used consumable part when the used consumable part passes through the opening 511. The robot arm 53a carries the used consumable part into the processing device 40 so as to correct the positional deviation of the used consumable part detected by the positional deviation detection sensor 57. This allows the robot arm 53a to place the used consumable part at a predetermined position in the processing device 40 with high accuracy.

[0129] Moreover, the part transporting device 50 in the above embodiment is provided with an exhaust device 554 that exhausts gas from inside the container 51. This allows the inside of the container 51 to be depressurized to a predetermined vacuum level, and reduces moisture and other substances adhering to consumable parts before use.

[0130] The processing system 10 in the above embodiment includes a processing device 40 having consumable parts and processing a substrate W, a part transport device 50 transporting the consumable parts, and a control device 20 controlling the processing device 40 and the part transport device 50. The part transport device 50 includes a container 51, a cassette 52, a robot arm 53, and a moving mechanism 54. The cassette 52 stores consumable parts before use and consumable parts after use. The container 51 has an opening 511 connected to the processing device 40 and a gate valve 512 for opening and closing the opening 511, and stores the cassette 52. The robot arm 53 is provided in the container 51, and carries out used consumable parts from the processing device 40 through the opening 511 and stores them in the cassette 52. The robot arm 53 also takes out used consumable parts from the cassette 52 and carries them into the processing device 40 through the opening 511. The moving mechanism 54 has a power source and moves the part transport device 50. This makes it easy to replace consumable parts in the processing device 40.

[0131] In the above embodiment, the processing apparatus 40 has a support 42 having a mounting surface on which the substrate W is placed. The consumable part is an edge ring 423 provided on the upper surface of the support 42 so as to surround the mounting surface. At least one of the upper surface of the support 42 and the lower surface of the edge ring 423 is provided with a recess 4230, and at least the other of the upper surface of the support 42 and the lower surface of the edge ring 423 is provided with a protrusion 4214 to be inserted into the recess 4230. Thus, by placing the edge ring 423 on the lower electrode 421 so that the protrusion 4214 of the lower electrode 421 is inserted into the recess 4230 of the edge ring 423, the lower electrode 421 and the edge ring 423 can be aligned with high accuracy.

[0132] In the above embodiment, the recess 4230 is provided with a first side wall 4230a extending in the depth direction of the recess 4230, and a first inclined portion 4230b in which the width of the recess 4230 increases as it advances from the first side wall 4230a to the opening of the recess 4230. As a result, when the edge ring 423 is placed on the lower electrode 421, even if the position of the recess 4230 of the edge ring 423 and the position of the protrusion 4214 of the lower electrode 421 are slightly misaligned, the protrusion 4214 is inserted into the recess 4230.

[0133] In the above embodiment, the convex portion 4214 is provided with a second side wall portion 4214b extending from the base of the convex portion 4214 in the protruding direction, and a second inclined portion 4214a in which the width of the convex portion 4214 narrows as it progresses from the second side wall portion 4214b to the tip of the convex portion 4214. As a result, when the edge ring 423 is placed on the lower electrode 421, the convex portion 4214 is inserted into the recessed portion 4230 even if the position of the recessed portion 4230 of the edge ring 423 and the position of the convex portion 4214 of the lower electrode 421 are slightly misaligned.

[0134] In the above embodiment, the total number of recesses 4230 provided on at least one of the upper surface of the support 42 and the lower surface of the edge ring 423 is two or more. The shape of the opening of the recess 4230 is an elongated hole having a major axis along the radial direction of a circle centered on the central axis X of the substantially disc-shaped substrate W placed on the support 42. As a result, when the edge ring 423 is placed on the lower electrode 421, the convex portion 4214 of the lower electrode 421 is inserted into the recess 4230 of the edge ring 423. Then, the central axis of the edge ring 423 and the central axis X of the substrate W placed on the electrostatic chuck 422 can be made to substantially coincide with each other.

[0135] Second embodiment In the first embodiment, an exhaust device 554 is provided in the part carrying device 50, and the gas in the part carrying device 50 is exhausted to the outside of the part carrying device 50 by the exhaust device 554, thereby reducing the pressure in the part carrying device 50. In contrast, in the present embodiment, the gas in the part carrying device 50 is exhausted by the exhaust system 46 of the processing device 40 when the part carrying device 50 is connected to the processing device 40. This makes it unnecessary to provide the exhaust device 554 in the part carrying device 50, and the part carrying device 50 can be made smaller in size. Note that the system configuration of the processing system 10 in this embodiment is similar to the system configuration of the processing system 10 in the first embodiment described with reference to FIG. 1, and therefore a description thereof will be omitted.

[0136] [Configuration of processing device 40] Fig. 19 is a diagram illustrating an example of a processing device 40 in the second embodiment. Note that, except for the points described below, components in Fig. 19 denoted with the same reference numerals as those in Fig. 2 have the same or similar functions as those in Fig. 2, and therefore descriptions thereof will be omitted.

[0137] A pipe 462 connected between the pressure control valve 460 and the exhaust system 46 branches into a pipe 462a and a pipe 462b. When the valve 461a is opened, the gas can be exhausted by the exhaust system 46 through the pipes 462a and 462b.

[0138] Furthermore, a pipe 443 is provided on the side of chamber 41 on which gate valve 401 is provided. Pipe 443 is connected to valves 442a to 442c via valve 442d. By closing valves 442a and 442b and opening valves 442c and 442d, it is possible to supply an inert gas into pipe 443 at a flow rate controlled by flow rate controller 441c.

[0139] [Configuration of part transport device 50] Fig. 20 is a diagram showing an example of a part conveying device 50 in the second embodiment. Note that, except for the points described below, components in Fig. 20 denoted with the same reference numerals as those in Fig. 9 have the same or similar functions as those in Fig. 9, and therefore descriptions thereof will be omitted.

[0140] The pipe 555 is disposed between the side surface of the container 51 on which the gate valve 512 is provided and the space within the container 51, and the pipe 555 is provided with a valve 556. In this embodiment, the exhaust device 554 is not provided within the component conveying device 50. The pipe 555 is an example of an exhaust port.

[0141] Furthermore, a pipe 560 is provided on the side surface of the container 51 on the side where the gate valve 512 is provided. The pipe 560 is connected to a cleaning unit 56. The pipe 560 is provided with a valve 561.

[0142] [Connection between processing device 40 and part conveying device 50] Fig. 21 is an enlarged cross-sectional view showing an example of a connection portion between the processing device 40 and the part conveying device 50 in the second embodiment. Note that, except for the points described below, components in Fig. 21 denoted with the same reference numerals as those in Fig. 11 have the same or similar functions as those in Fig. 11, and therefore descriptions thereof will be omitted.

[0143] Opening 462c of pipe 462b and opening 555a of pipe 555 are formed at positions that face each other when processing device 40 and component transport device 50 are connected. Furthermore, a seal member 516 such as an O-ring is disposed on the side surface of container 51 of component transport device 50 so as to surround opening 555a. This allows pipe 462b and pipe 555 to communicate airtightly when processing device 40 and component transport device 50 are connected.

[0144] After the processing device 40 and the component carrying device 50 are connected, the valve 461a of the processing device 40 is opened and the gas is exhausted by the exhaust system 46, so that the gas in the container 51 of the component carrying device 50 can be exhausted via the pipes 462b and 555. This makes it possible to reduce the pressure in the container 51 without providing an exhaust device 554 in the component carrying device 50, and therefore the component carrying device 50 can be made smaller in size.

[0145] Moreover, opening 443a of pipe 443 and opening 560a of pipe 560 are formed at positions that face each other when processing device 40 and component transport device 50 are connected. Moreover, a seal member 515 such as an O-ring is arranged on the side surface of container 51 of component transport device 50 so as to surround opening 560a. Thereby, when processing device 40 and component transport device 50 are connected, pipe 443 and pipe 560 communicate airtightly.

[0146] After the replacement of the edge ring 423 is completed, the valves 442a and 442b of the processing device 40 are closed, the valves 442c and 442d are opened, and the valve 561 of the component conveying device 50 is opened while the processing device 40 and the component conveying device 50 are connected to each other. This causes an inert gas to be supplied to the cleaning unit 56 of the component conveying device 50. The cleaning unit 56 cleans the end effector 530b by high-pressure gas purging using the inert gas supplied via the piping 560. This eliminates the need to provide an inert gas supply source within the component conveying device 50, and therefore the component conveying device 50 can be made smaller in size.

[0147] The second embodiment has been described above. As described above, the component conveying device 50 in this embodiment includes the piping 560 for introducing a purge gas for cleaning the end effector 530a by purging into the cleaning unit 56. When the component conveying device 50 is connected to the processing device 40, the piping 560 is connected to the gas supply unit 44 of the processing device 40. This eliminates the need to provide a purge gas supply source within the component conveying device 50, and allows the component conveying device 50 to be made smaller in size.

[0148] Furthermore, the component transporting device 50 in the above embodiment includes a pipe 555 for exhausting gas from inside the container 51, which is connected to the exhaust system 46 of the processing device 40 when the component transporting device 50 is connected to the processing device 40. This allows the pressure inside the container 51 to be reduced without providing an exhaust device 554 inside the component transporting device 50, so that the component transporting device 50 can be made smaller in size.

[0149] (Third embodiment) The component transport device 50 in the first and second embodiments replaces one type of consumable part, the edge ring 423. In contrast, the component transport device 50 in the present embodiment replaces multiple types of consumable parts. Examples of the multiple types of consumable parts include the edge ring 423 and the upper electrode 43e.

[0150] The cassette 52 stores both unused and used consumable parts for a plurality of types of consumable parts. In this embodiment, the space in the cassette 52 in which the consumable parts are stored is partitioned for each type of consumable part. This makes it possible to prevent reaction by-products and the like adhering to used consumable parts of a particular type from falling onto unused consumable parts of other types in the cassette 52, even when a particular type of consumable part is frequently replaced. Note that the consumable parts may be stored in separate cassettes 52 for each type, and separate cassettes 52 for each type may be stored in the part transport device 50.

[0151] Here, different types of consumable parts may have different replacement periods. Therefore, the replacement times of different types of consumable parts often do not coincide. When the replacement times do not coincide, a process may be stopped to replace a consumable part, and after the process is resumed, the process may be stopped again in a short time to replace another consumable part. In this case, if the replacement times of multiple consumable parts are close, replacing the multiple consumable parts while the process is stopped can shorten the process downtime and improve production efficiency.

[0152] 22 is a diagram for explaining an example of the timing of replacing consumable parts in the third embodiment. In this embodiment, the short replacement period LT short Replacement time for the first consumable part t s and long replacement cycle LT long Replacement time for the second consumable part t l The time difference ΔLT is the replacement period LT short If it is shorter than t, it is time to replace it. s Both the first consumable part and the second consumable part are replaced at the replacement period LT short is an example of the first replacement period, and the replacement period LT long is an example of the second replacement period.

[0153] For example, the control device 20 may determine the replacement time t s and the replacement time for the second consumable part t l The time difference ΔLT between short If the replacement time for the first consumable part is shorter than t s In the replacement instruction based on the above, the replacement of the second consumable part is also instructed. This makes it possible to shorten the downtime of the process and improve production efficiency.

[0154] When replacing different types of consumable parts during one processing stop period, it is preferable to replace the consumable part installed at a higher position before the consumable part installed at a lower position. For example, the control device 20 instructs the part transport device 50 to replace the first consumable part or the second consumable part, whichever is installed at a higher position in the processing device 40, first. This makes it possible to prevent reaction by-products and the like peeled off from the used consumable part from falling onto the previously replaced consumable part when carrying out the used consumable part.

[0155] (Fourth embodiment) The part transport device 50 in the first to third embodiments is connected to a processing device 40 that requires replacement of consumable parts, and replaces the consumable parts in that processing device 40. In contrast, the part transport device 50 in this embodiment, when the time to replace consumable parts in multiple processing devices 40 is approaching, replaces the consumable parts in the other processing devices 40 via the vacuum transfer chamber 31 while remaining connected to one processing device 40. This makes it possible to shorten the downtime of the processing system 10 due to replacement of consumable parts.

[0156] Fig. 23 is a diagram for explaining an example of a method for replacing the edge ring 423 in the fourth embodiment. Fig. 23 shows an example in which the edge ring 423 of the processing device 40-1 and the edge ring 423 of the processing device 40-2 are replaced via the processing device 40-1. The processing device 40-1 is an example of a first processing device, and the processing device 40-2 is an example of a second processing device.

[0157] In this embodiment, the control device 20 estimates the travel time required for the part conveying device 50 to move from the position of the processing device 40-1 to the position of the processing device 40-2 based on the position information of the processing device 40-1 and information on the route that the part conveying device 50 can move. The travel time required for the part conveying device 50 to move from the position of the processing device 40-1 to the position of the processing device 40-2 is an example of the second travel time.

[0158] The control device 20 also estimates a preparation time required for the component transport device 50, which has moved to the position of the processing device 40-2, to be ready to replace the edge ring 423 in the processing device 40-2. The preparation time required for the component transport device 50, which has moved to the position of the processing device 40-2, to be ready to replace the edge ring 423 in the processing device 40-2 is an example of the second preparation time.

[0159] Furthermore, the control device 20 estimates the replacement time required to replace the edge ring 423 in the processing device 40-2 via the processing device 40-1 and the vacuum transfer chamber 31. Then, when the total time of the estimated movement time and the preparation time is longer than the estimated replacement time, the control device 20 instructs the part transport device 50 to replace the edge ring 423 in the processing device 40-2 via the processing device 40-1 and the vacuum transfer chamber 31. This makes it possible to shorten the downtime of the processing system 10 associated with the replacement of consumable parts.

[0160] 23, edge ring 423 in processing device 40-2, which is located opposite processing device 40-1 across vacuum transfer chamber 31, is replaced via processing device 40-1 and vacuum transfer chamber 31, but the disclosed technology is not limited to this. For example, processing device 40 in which edge ring 423 is replaced via processing device 40-1 and vacuum transfer chamber 31 may be a processing device 40 other than processing device 40-2, such as processing device 40-4.

[0161] In addition, when the edge ring 423 of another processing device 40 is replaced via the processing device 40, it is preferable that the edge ring 423 of the other processing device 40 is replaced before the edge ring 423 of the processing device 40 to which the component carrying device 50 is connected. For example, when the total time of the estimated moving time and the preparation time is longer than the estimated replacement time, the control device 20 instructs the component carrying device 50 to replace the edge ring 423 in the processing device 40-2 before the edge ring 423 in the processing device 40-1. This makes it possible to prevent reaction by-products and the like peeled off from the used edge ring 423 carried out from the other processing device 40 from falling onto the unused edge ring 423 attached to the processing device 40 to which the component carrying device 50 is connected.

[0162] Fifth embodiment In the part transport device 50 in the first to fourth embodiments, when replacing consumable parts, the gas in the container 51 housing the cassette 52 and the robot arm 53 is exhausted and the pressure is reduced. In contrast, in the present embodiment, the space housing the robot arm 53 and the space housing the cassette 52 are airtightly separated by a gate valve within the container 51, and the gas in the space housing the robot arm 53 is exhausted. This makes it possible to reduce the space that is depressurized when replacing consumable parts, and shorten the time required to depressurize to a predetermined pressure.

[0163] Fig. 24 is a diagram showing an example of a part conveying device 50 in the fifth embodiment. Note that, except for the points described below, components in Fig. 24 denoted with the same reference numerals as those in Fig. 9 have the same or similar functions as those in Fig. 9, and therefore descriptions thereof will be omitted.

[0164] In the container 51, a space 51a in which the robot arms 53a and 53b are accommodated and a space 51b in which the cassette 52 is accommodated are airtightly separated by a gate valve 517. When the edge ring 423 is replaced, the gate valve 517 is opened, and the edge ring 423 before use is taken out of the cassette 52 by the robot arm 53a. Then, the gate valve 517 is closed after the robot arm 53a retreats into the space 51a. Then, the gas in the space 51a is exhausted by the exhaust device 554. By closing the gate valve 517, the space exhausted by the exhaust device 554 becomes smaller, and the time required to reduce the pressure to a predetermined level can be shortened. In the container 51, the space 51a separated by the gate valve 512 and the gate valve 517 is an example of a load lock chamber.

[0165] Then, after the pressure inside space 51a is reduced to a predetermined pressure, gate valve 512 is opened and replacement of edge ring 423 is performed. After replacement of edge ring 423 is completed and gate valve 512 is closed, pressure inside space 51a is returned to atmospheric pressure and gate valve 517 is opened. Then, the used edge ring 423 is stored in cassette 52 by robot arm 53b.

[0166] Then, after the robot arm 53b retreats into the space 51a, the gate valve 517 is closed again. Then, the gas in the space 51a is exhausted by the exhaust device 554, and the end effector 530b is cleaned by the cleaning unit 56. Since the gate valve 517 is closed while the end effector 530b is being cleaned, it is possible to prevent particles scattered by the cleaning from adhering to the edge ring 423 before use that is accommodated in the cassette 52.

[0167] [others] It should be noted that the technology disclosed in the present application is not limited to the above-described embodiment, and various modifications are possible within the scope of the gist thereof.

[0168] For example, in the first and third to fifth embodiments described above, the part carrying device 50 starts evacuating the container 51 after receiving a replacement instruction from the control device 20, but the disclosed technology is not limited to this. For example, the part carrying device 50 may control the pressure in the container 51 to a predetermined pressure P2 even before receiving a replacement instruction. This allows the part carrying device 50 to start replacing the consumable part more quickly when receiving a replacement instruction from the control device 20.

[0169] In the first and third to fifth embodiments described above, the gas exhausted by the exhaust device 554 is discharged to the outside of the component carrying device 50 through the exhaust port 557, but the disclosed technology is not limited to this. For example, the exhaust port 557 and a device for treating the exhaust gas provided outside the component carrying device 50 may be connected by a flexible hose. This promotes recycling of the gas exhausted from the component carrying device 50.

[0170] In the first and third to fifth embodiments described above, the inside of container 51 of component carrying device 50 may be connected via a flexible hose to an exhaust device provided outside component carrying device 50, and the gas inside container 51 may be exhausted by the exhaust device. This eliminates the need to provide exhaust device 554 inside component carrying device 50, and allows component carrying device 50 to be made smaller in size.

[0171] In the second embodiment described above, the gas in the container 51 of the part transporting device 50 is exhausted by the exhaust system 46 of the processing device 40, but the disclosed technology is not limited to this. For example, when the processing device 40 and the part transporting device 50 are connected, the exhaust port 557 of the part transporting device 50 may be connected to the exhaust port of the exhaust system 46. In this case, the gas exhausted by the exhaust device 554 of the part transporting device 50 is exhausted to the exhaust port of the exhaust system 46. This promotes recycling of the gas exhausted from the part transporting device 50.

[0172] In addition, in the above-mentioned fifth embodiment, the gas in the space 51a separated by the gate valves 512 and 517 may be exhausted by the exhaust system 46 in the processing device 40 after the processing device 40 and the part conveying device 50 are connected, as in the second embodiment, for example.

[0173] In addition, in each of the above-described embodiments, the control device 20 controls each processing device 40 and each part transport device 50 with respect to the replacement of consumable parts, but the disclosed technology is not limited to this. For example, the control function related to the replacement of consumable parts may be realized by having one of the multiple part transport devices 50 serve as a representative part transport device 50. In this case, the representative part transport device 50 controls each processing device 40 with respect to the replacement of consumable parts, manages its status, etc., via the control device 20. In addition, the representative part transport device 50 may control each of the other part transport devices 50, manage its status, etc., by directly communicating with each of the other part transport devices 50 without going through the control device 20.

[0174] In the above embodiment, the same part transport device 50 transports used consumable parts out of the processing device 40 and transports unused consumable parts into the processing device 40. However, the disclosed technology is not limited to this. For example, a part transport device 50 that transports used consumable parts out of the processing device 40 and a part transport device 50 that transports used consumable parts into the processing device 40 may be separately prepared. In this way, both used and unused consumable parts are not stored in the part transport device 50, so that it is possible to prevent the used edge ring 423 from being contaminated by reaction by-products peeled off from the used edge ring 423.

[0175] In this case, the part transport device 50 that transports the unused consumable parts into the processing device 40 may be connected to the vacuum transport chamber 31 or the atmospheric transport chamber 33. The part transport device 50 connected to the vacuum transport chamber 31 delivers the unused consumable parts to the robot arm 310 in the vacuum transport chamber 31. The robot arm 310 transports the received unused consumable parts into the processing device 40 in which the consumable parts need to be replaced. The part transport device 50 connected to the atmospheric transport chamber 33 delivers the unused consumable parts to the robot arm 330 in the atmospheric transport chamber 33. The robot arm 330 transports the unused consumable parts into the load lock chamber 32. The unused consumable parts transported into the load lock chamber 32 are transported by the robot arm 310 in the vacuum transport chamber 31 into the processing device 40 in which the consumable parts need to be replaced. When the part transport device 50 is connected to the atmospheric transport chamber 33, it is not necessary to provide an exhaust device in the part transport device 50 that transports the unused consumable parts, and the part transport device 50 can be made smaller in size.

[0176] Furthermore, in each of the above-described embodiments, when the part transport device 50 is connected to the processing device 40 , the battery in the movement mechanism 54 may be charged by power supply from the processing device 40 .

[0177] Furthermore, in each of the above-described embodiments, the part carrying device 50 controls the moving mechanism 54 using the sensing result by the sensor 553, thereby autonomously moving the part carrying device 50 to the position of the processing device 40 instructed by the control device 20. However, the disclosed technology is not limited to this. For example, the part carrying device 50 may be moved by the user's operation. In this case, the part carrying device 50 may notify the user of the position of the processing device 40 instructed by the control device 20 and the movement route thereof by displaying it on a display device or the like.

[0178] It should be noted that the embodiments disclosed herein are illustrative in all respects and should not be construed as limiting. Indeed, the above-described embodiments may be embodied in various forms. Furthermore, the above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0179] W substrate 10 Processing System 20 Control device 210 Reserved Table 30 Processing Groups 31 Vacuum Transfer Chamber 32 Load Lock Chamber 33 Atmospheric Transfer Chamber 40 Processing equipment 41 Chamber 42 Support part 421 Lower Electrode 4214 Convex 422 Electrostatic Chuck 423 Edge Ring 4230 Recess 43 Upper electrode showerhead assembly 44 Gas Supply Section 45 RF power supply section 46 Exhaust System 50 Parts transport device 51 Container 52 Cassette 53 Robot Arm 530 End Effector 54 Moving mechanism 553 Sensor 554 Exhaust system 56 Cleaning unit 57 Position deviation detection sensor

Claims

1. A chamber having an opening that is detachably connected to a part carrying device; a gate valve configured to open and close the opening; an exhaust system connected to the chamber; having The chamber comprises: a first passage communicating with a space formed between the gate valve and the component carrying device when the component carrying device is connected to the opening of the chamber; the first passage is fluidly connected to the exhaust system. Processing unit.

2. The processing device of claim 1, having an alignment portion that engages with a side wall of the part conveying device.

3. The processing device described in claim 2, wherein the alignment portion includes a protrusion portion.

4. A processing device as described in claim 3, wherein the protrusion portion of the alignment portion engages with a recess in a side wall of the part conveying device.

5. A processing apparatus as described in any one of claims 1 to 4, wherein when the part conveying device is connected to the opening of the chamber, the space is maintained airtight by a sealing member.

6. A processing device described in any one of claims 1 to 5, further comprising a pressure control valve disposed between the space within the chamber and the exhaust system.

7. The chamber comprises:

7. The processing apparatus of claim 1, further comprising a second passageway connected to an opening of the passageway of the part-carrying device that communicates with a space within a container of the part-carrying device.

8. A processing device as described in claim 7, wherein the second passage is connected to the first passage.

9. A processing apparatus as described in claim 7 or 8, wherein when the part conveying device is connected to the opening of the chamber, the connection between the second passage and the passage of the part conveying device is maintained airtight by a sealing member.

10. The exhaust system including an exhaust port for discharging exhaust gases to an exhaust gas treatment system; The processing apparatus according to claim 1 , wherein the first passage is branched into two passages, one of which is connected to an exhaust port via a valve.

11. A processing device according to any one of claims 1 to 10, The part conveying device; A processing system comprising:

12. A processing system comprising: A processing device and a part conveying device, The processing device includes: a chamber having an opening that is removably connected to the part carrying device; a gate valve configured to open and close the opening; an exhaust system connected to the chamber; having The part conveying device is A container; a transfer robot disposed within the container and configured to transfer a part; having The container comprises: A first interior space; a first passageway communicating with the first interior space; Including, The chamber comprises: a second passageway communicating with the first passageway when the part carrying device is connected to the opening of the chamber; the second passage is fluidly connected to the exhaust system. Processing system.

13. The processing system of claim 12, wherein the processing device has an alignment portion that engages with a side wall of the part conveying device.

14. The processing system of claim 13, wherein the alignment portion includes a protrusion portion.

15. A processing system as described in claim 14, wherein the protrusion portion of the alignment portion engages with a recess in a side wall of the part conveying device.

16. A processing system described in any one of claims 12 to 15, wherein when the part conveying device is connected to the opening of the chamber, the connection between the first passage and the second passage is maintained airtight by a sealing member.

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