Position detection device, lens module and imaging device

Abstract

To provide a position detection device capable of exhibiting excellent detection performance.SOLUTION: A position detection device includes: a first magnetic field generating unit for generating a first magnetic field; a driving unit that is disposed opposite the first magnetic field generating unit in a first direction and that generates a driving force to move the first magnetic field generating unit in a second direction parallel to a first plane perpendicular to the first direction; and a magnetic field sensor for detecting a magnetic field component of the first magnetic field that is parallel to the first plane. The first magnetic field generation unit is provided movable in the second direction relative to the drive unit and the magnetic field sensor. The drive unit overlaps with and is spaced apart from a portion of the first magnetic field generating unit in the first direction, and extends across a portion of the first magnetic field generating unit in a third direction that is parallel to the first plane and perpendicular to the second direction. A center position in the third direction of the magnetic field sensor is different from the center position in the third direction of the first magnetic field generation unit.SELECTED DRAWING: Figure 1A

Description

[Technical field]

[0001] The present invention relates to a position detection device, a lens module, and an imaging device that include a magnetic sensor. [Background technology]

[0002] Position detection devices using magnetic sensors have been proposed so far. The applicant has proposed, for example, a camera module equipped with a position detection device (see, for example, Patent Document 1). In this camera module, the position detection device detects the position of a lens that moves when adjusting the focus. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-082445 A [Patent Document 2] International Publication No. 2018 / 051729 Summary of the Invention [Problem to be solved by the invention]

[0004] However, such position detection devices are required to have higher position detection accuracy.

[0005] Therefore, it is desirable to provide a position detection device that can exhibit excellent detection performance. [Means for solving the problem]

[0006] A position detection device according to an embodiment of the present disclosure includes a first magnetic field generating unit that generates a first magnetic field, a driving unit that is disposed opposite the first magnetic field generating unit in a first direction and that generates a driving force to move the first magnetic field generating unit in a second direction parallel to a first plane perpendicular to the first direction, and a magnetic field sensor that detects a magnetic field component of the first magnetic field that is parallel to the first plane. The first magnetic field generating unit is provided so as to be movable in the second direction relative to the driving unit and the magnetic field sensor. The driving unit overlaps a part of the first magnetic field generating unit while being spaced apart from the first direction, and extends across a part of the first magnetic field generating unit in a third direction that is parallel to the first plane and perpendicular to the second direction. The center position of the magnetic field sensor in the third direction is different from the center position of the first magnetic field generating unit in the third direction. Effect of the Invention

[0007] According to the position detection device as one embodiment of the present disclosure, excellent detection performance can be achieved. [Brief description of the drawings]

[0008] [Figure 1A] FIG. 1A is a perspective view illustrating a configuration example of a position detection device according to a first embodiment of the present disclosure. [Figure 1B] FIG. 1B is a cross-sectional view illustrating an example of a cross-sectional configuration of the position detection device illustrated in FIG. 1A. [Figure 1C] FIG. 1C is a plan view of the position detection device shown in FIG. 1A as viewed from above. [Figure 2A] FIG. 2A is a perspective view illustrating the behavior of a magnet in the position detection device shown in FIG. 1A. [Figure 2B] FIG. 2B is a cross-sectional view illustrating the behavior of the magnet in the position detection device shown in FIG. 1A. [Figure 2C] FIG. 2C is a plan view illustrating the behavior of the magnet in the position detection device shown in FIG. 1A. [Diagram 3] FIG. 3 is a circuit diagram illustrating an example of a circuit configuration of a magnetic field sensor in the position detection device shown in FIG. 1A. [Figure 4]FIG. 4 is a characteristic diagram showing an output voltage characteristic obtained from the magnetic field sensor having the circuit configuration example shown in FIG. [Diagram 5] FIG. 5 is a perspective view showing a part of one of the magnetic field detection elements in FIG. [Figure 6A] FIG. 6A is a perspective view illustrating a configuration example of a position detection device according to a second embodiment of the present disclosure. [Figure 6B] FIG. 6B is a cross-sectional view illustrating an example of a cross-sectional configuration of the position detection device illustrated in FIG. 6A. [Figure 6C] FIG. 6C is a plan view of the position detection device shown in FIG. 6A viewed from above. [Figure 7] FIG. 7 is a characteristic diagram illustrating an example of the relationship between the amount of movement of the magnet in the X-axis direction and the angle of the first magnetic field detected by the magnetic field sensor. [Figure 8] FIG. 8 is a characteristic diagram illustrating an example of the relationship between the amount of movement of the magnet in the X-axis direction and the magnetic flux density of the first magnetic field applied to the magnetic field sensor. [Figure 9A] FIG. 9A is a perspective view illustrating a configuration example of a position detection device according to a third embodiment of the present disclosure. [Figure 9B] FIG. 9B is a cross-sectional view illustrating an example of a cross-sectional configuration of the position detection device illustrated in FIG. 9A. [Figure 9C] FIG. 9C is a plan view of the position detection device shown in FIG. 9 as viewed from above. [Figure 10A] FIG. 10A is a perspective view illustrating a configuration example of a position detection device according to a fourth embodiment of the present disclosure. [Figure 10B] FIG. 10B is a cross-sectional view illustrating an example of a cross-sectional configuration of the position detection device illustrated in FIG. 10A. [Figure 11A] FIG. 11A is a perspective view illustrating a configuration example of a position detection device as a modified example of the fourth embodiment of the present disclosure. [Figure 11B] FIG. 11B is a cross-sectional view illustrating an example of a cross-sectional configuration of a position detection device as a modified example shown in FIG. 11A. [Figure 12A] FIG. 12A is a cross-sectional view illustrating an example of a cross-sectional configuration of a position detection device according to a fifth embodiment of the present disclosure. [Figure 12B] FIG. 12B is a plan view of the position detection device shown in FIG. 12A viewed from above. [Figure 13] FIG. 13 is a cross-sectional view illustrating an example of a cross-sectional configuration of a position detection device as a first modified example of the fifth embodiment of the present disclosure. [Figure 14] FIG. 14 is a plan view of a position detection device as a second modified example of the fifth embodiment of the present disclosure, as viewed from above. [Figure 15] FIG. 15 is a plan view of a position detection device as a third modified example of the fifth embodiment of the present disclosure, as viewed from above. [Figure 16] FIG. 16 is a perspective view illustrating a configuration example of a position detection device according to the sixth embodiment of the present disclosure. [Figure 17A] FIG. 17A is a schematic perspective view illustrating an example of an overall configuration of an imaging device according to a sixth embodiment of the present disclosure. [Figure 17B] FIG. 17B is a schematic perspective view illustrating an example of an overall configuration of an imaging device according to a modified example of the sixth embodiment of the present disclosure. [Figure 18] FIG. 18 is a circuit diagram illustrating an example of a circuit configuration of a magnetic field sensor in a position detection device according to a first modified example of the present disclosure. [Figure 19] FIG. 19 is a characteristic diagram showing an output voltage characteristic obtained from the magnetic field sensor having the circuit configuration example shown in FIG. [Figure 20A] FIG. 20A is a schematic perspective view illustrating an example of an overall configuration of a position detection device according to a second modified example of the present disclosure. [Figure 20B] FIG. 20B is a schematic perspective view illustrating an example of an overall configuration of a position detection device according to a third modified example of the present disclosure. [Figure 20C] FIG. 20C is a schematic perspective view illustrating an example of an overall configuration of a position detection device according to a fourth modified example of the present disclosure. [Figure 21] FIG. 21 is a schematic perspective view showing an example of the overall configuration of an angle sensor device equipped with the position detection device shown in FIG. 20A. [Figure 22] FIG. 22 is a schematic plan view illustrating an example of an overall configuration of a position detection device according to a fifth modified example of the present disclosure. [Figure 23A] FIG. 23A is a schematic plan view illustrating an example of an overall configuration of a position detection device according to a sixth modified example of the present disclosure. [Figure 23B] FIG. 23B is a schematic cross-sectional view illustrating an example of the overall configuration of the position detection device as the sixth modified example of the present disclosure shown in FIG. 23A. [Figure 24A] FIG. 24A is a schematic perspective view illustrating an example of an overall configuration of a position detection device according to a seventh modified example of the present disclosure. FIG. [Figure 24B] FIG. 24B is a circuit diagram illustrating an example of a circuit configuration of a magnetic field sensor in the position detection device as the seventh modified example of the present disclosure shown in FIG. 24A. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The description will be given in the following order. 1. First embodiment 13 is an example of a position detection device including a magnet that is movable in a direction in which a first magnetized area and a second magnetized area are adjacent to each other. 2. Second embodiment 13 is an example of a position detection device having a magnet including a third magnetized region between a first magnetized region and a second magnetized region. 3. Third embodiment 13 is an example of a position detection device having a magnet including a non-magnetized region between a first magnetized region and a second magnetized region. 4. Fourth embodiment 1 is an example of a position detector including a magnet having a first magnetized region and a second magnetized region each including opposing surfaces with a chamfer formed thereon. 5. Fifth embodiment A first example of a position detection device with one magnet and two drive coils. 6. Sixth embodiment A second example of a position detector having one magnet and two drive coils. 7. Seventh embodiment A first example of an imaging device equipped with a lens module having a first magnetic field generating unit that generates a first magnetic field and moves integrally with the lens, a second magnetic field generating unit that generates a second magnetic field for driving the lens, and a magnetic sensor for detecting the position of the lens. 8. Eighth embodiment A second example of an imaging device equipped with a lens module having a first magnetic field generating unit that generates a first magnetic field and moves integrally with the lens, a second magnetic field generating unit that generates a second magnetic field for driving the lens, and a magnetic sensor for detecting the position of the lens. 9. Other Modifications

[0010] <1. First embodiment> [Configuration of position detection device 1] First, the configuration of a position detection device 1 according to a first embodiment of the present disclosure will be described with reference to FIGS. 1A to 1C.

[0011] FIG. 1A is a perspective view showing an example of the overall configuration of the position detection device 1. FIG. 1B is a cross-sectional view showing an example of the cross-sectional configuration of the position detection device 1. FIG. 1C is a plan view of the position detection device 1 as viewed from above. Note that FIG. 1B shows a cross section taken along line IB-IB shown in FIG. 1C. Also, the Z-axis direction, the X-axis direction, and the Y-axis direction shown in FIGS. 1A to 1C are specific examples corresponding to the "first direction," the "second direction," and the "third direction" of the present disclosure, respectively. The Z-axis direction, the X-axis direction, and the Y-axis direction are orthogonal to each other.

[0012] 1A to 1C, the position detection device 1 has a magnet 10 as a first magnetic field generating unit, a drive coil 20 which is a drive unit and a second magnetic field generating unit, and a magnetic field sensor 30. In the position detection device 1, the magnet 10 and the drive coil 20 face each other with a space in the Z-axis direction. For convenience, the present embodiment will be described assuming that the magnet 10 is located above the drive coil 20 and the drive coil 20 is located below the magnet 10.

[0013] (Magnet 10) The magnet 10 is a permanent magnet having an appearance of a substantially rectangular parallelepiped shape with the X-axis direction as the longitudinal direction, for example. The magnet 10 generates a first magnetic field MF1 (see FIG. 1B) that reaches the magnetic field sensor 30. The magnet 10 is mainly composed of a ferromagnetic material. Specifically, examples of the ferromagnetic material used for the magnet 10 include neodymium-based magnet materials such as NdFeB and rare earth magnet materials such as SmCo. The magnet 10 is provided so as to be reversibly movable in the X-axis direction relative to the drive coil 20 and the magnetic field sensor 30. The magnet 10 overlaps a portion of the drive coil 20 in the Z-axis direction.

[0014] The magnet 10 includes a first magnetized region 11 and a second magnetized region 12. The first magnetized region 11 and the second magnetized region 12 are aligned in the X-axis direction. The first magnetized region 11 is magnetized in a first direction (+Z direction) along the Z-axis direction. That is, in the first magnetized region 11, the side facing the drive coil 20 is an S pole, and the side opposite the drive coil 20 is an N pole. However, the present disclosure is not limited to the case where the magnetization direction of the first magnetized region 11 strictly coincides with the +Z direction, and also allows the magnetization direction to be inclined by about 5 to 10 degrees with respect to the +Z direction. On the other hand, in the second magnetized region 12, the side facing the drive coil 20 is an N pole, and the side opposite the drive coil 20 is an S pole. However, the present disclosure is not limited to the case where the magnetization direction of the second magnetized region 12 strictly coincides with the -Z direction, and also allows the magnetization direction to be inclined by about 5 to 10 degrees with respect to the -Z direction. Therefore, in the magnet 10, the S pole of the first magnetized region 11 and the N pole of the second magnetized region 12 are adjacent to each other in the X-axis direction, and the N pole of the first magnetized region 11 and the S pole of the second magnetized region 12 are adjacent to each other in the X-axis direction. The first magnetized region 11 and the second magnetized region 12 are in contact with each other. However, in the magnet 10, a neutral zone may exist between the first magnetized region 11 and the second magnetized region 12 in the X-axis direction. The neutral zone is a non-magnetized region that is not magnetized. Also, it is desirable that the shape, size, weight, and magnetic volume of the first magnetized region 11 match those of the second magnetized region 12. However, at least one of the shape, size, weight, and magnetic volume of the first magnetized region 11 may be different from those of the second magnetized region 12.

[0015] (Drive coil 20) The drive coil 20 is, for example, a thin-film coil wound in a spiral shape in a plane parallel to the XY plane perpendicular to the Z-axis direction. The drive coil 20 is formed, for example, on a printed circuit board. Note that in Figs. 1A and 1C, the drive coil 20 is simplified to show its overall shape. The number of turns of the drive coil 20 can be set arbitrarily and is not limited to the number of turns shown in Fig. 1B. The drive coil 20 generates a second magnetic field MF2 (see Fig. 1B) when a current is supplied to the drive coil 20 itself. When the second magnetic field MF2 is applied to the magnet 10, the magnet 10 moves in the X-axis direction parallel to the XY plane.

[0016] The driving coil 20 overlaps with a part of the magnet 10 while being spaced apart in the Z-axis direction, and extends across a part of the magnet 10 in the Y-axis direction. More specifically, a first portion 21 of the driving coil 20 extending in the Y-axis direction overlaps with the first magnetized region 11 while being spaced apart in the Z-axis direction, and a second portion 22 of the driving coil 20 extending in the Y-axis direction overlaps with the second magnetized region 12 while being spaced apart in the Z-axis direction. For example, a current is supplied to the first portion 21 of the driving coil 20 in the +Y direction, and a current is supplied to the second portion 22 of the driving coil 20 in the -Y direction. Therefore, the direction of the second magnetic field MF2 generated by the first portion 21 relative to the first magnetized region 11 is the +X direction, and the direction of the second magnetic field MF2 generated by the second portion 22 relative to the second magnetized region 12 is the -X direction. That is, the direction of the second magnetic field MF2 with respect to the first magnetized region 11 is opposite to the direction of the second magnetic field MF2 with respect to the second magnetized region 12.

[0017] (Magnetic Field Sensor 30) The magnetic field sensor 30 detects the magnetic field component parallel to the XY plane of the first magnetic field MF1 applied to itself, and generates a detection signal corresponding to the direction and magnitude of the first magnetic field MF1. The output signal from the magnetic field sensor 30 changes as the position of the magnet 10 changes between the first position P1 and the second position P2. That is, the magnetic field sensor 30 shows a resistance value according to the relative position of the magnet 10 with respect to the magnetic field sensor 30 in the X-axis direction. Therefore, the magnetic field sensor 30 can detect the position of the magnet 10 in the X-axis direction between the first position P1 and the second position P2. As shown in FIG. 1C, in a plan view seen in the Z-axis direction, the magnetic field sensor 30 is disposed, for example, outside the drive coil 20. Also, at least a part of the magnetic field sensor 30 and at least a part of the drive coil 20 overlap each other in the Y-axis direction. That is, the magnetic field sensor 30 is provided in the same layer as the drive coil 20. Also, the center position CY30 of the magnetic field sensor 30 in the Y-axis direction is different from the center position CY10 of the magnet 10 in the Y-axis direction.

[0018] 2A to 2C are diagrams for explaining the behavior of the magnet 10 in the position detection device 1, and correspond to FIGS. 1A to 1C, respectively. By applying the second magnetic field MF2, which is an induced magnetic field by the driving coil 20, the magnet 10 can move from the initial position P0 in the +X direction to a position P1 and from the initial position P0 in the -X direction to a position P2, as shown in FIGS. 2A to 2C. That is, the edge T11 of the first magnetized region 11, the edge T12 of the second magnetized region 12, and the boundary K between the first magnetized region 11 and the second magnetized region 12 of the magnet 10 can move in the X-axis direction between the position P1 and the position P2. Here, it is preferable that the magnet 10 can move in both the +X direction and the -X direction between the first position P1 and the second position P2 while maintaining a state of overlapping with a part of the driving coil 20 in the Z-axis direction. Specifically, in the position detection device 1, the magnet 10 is preferably configured to be movable within a range in which the first portion 21 does not protrude from the first magnetized region 11 in the X-axis direction, and the second portion 22 does not protrude from the second magnetized region 12 in the X-axis direction. Note that the direction of the current flowing through the drive coil 20 when the magnet 10 is moved in the +X direction with the drive coil 20 and the magnetic field sensor 30 as references is opposite to the direction of the current flowing through the drive coil 20 when the magnet 10 is moved in the -X direction with the drive coil 20 and the magnetic field sensor 30 as references.

[0019] Next, the configuration of the magnetic field sensor 30 will be described with reference to Fig. 3. Fig. 3 is a circuit diagram showing a configuration example of the magnetic field sensor 30. In this embodiment, the magnetic field sensor 30 is configured to generate a detection signal corresponding to the direction of the first magnetic field MF1, which is the magnetic field to be detected, corresponding to the angle that the direction of the first magnetic field MF1 makes with respect to a reference direction.

[0020] As shown in FIG. 3, the magnetic field sensor 30 has a Wheatstone bridge circuit 31. The Wheatstone bridge circuit 31 includes a power supply port V, a ground port G, two output ports E1 and E2, a first resistor unit R1 and a second resistor unit R2 connected in series, and a third resistor unit R3 and a fourth resistor unit R4 connected in series. A first end of the first resistor unit R1 and a first end of the fourth resistor unit R4 are each connected to the power supply port V. A second end of the first resistor unit R1 is each connected to a first end of the second resistor unit R2 and the output port E1. A second end of the fourth resistor unit R4 is each connected to a first end of the third resistor unit R3 and the output port E2. A second end of the second resistor unit R2 and a second end of the third resistor unit R3 are each connected to the ground port G. A power supply voltage of a predetermined magnitude is applied to the power supply port V. The ground port G is connected to ground. Each of the output ports E1 and E2 is connected to an external control unit 40.

[0021] In this embodiment, each of the first to fourth resistance parts R1 to R4 includes a plurality of magnetoresistance effect elements (MR elements) connected in series. Each of the plurality of MR elements may be, for example, a spin-valve type MR element. This spin-valve type MR element has a magnetization pinned layer whose magnetization direction is fixed, a free layer which is a magnetic layer whose magnetization direction changes according to the direction of the magnetic field to be detected, and a non-magnetic layer disposed between the magnetization pinned layer and the free layer. The spin-valve type MR element may be a tunnel magnetoresistance effect element (TMR element) or a giant magnetoresistance effect element (GMR element). In the TMR element, the non-magnetic layer is a tunnel barrier layer. In the GMR element, the non-magnetic layer is a non-magnetic conductive layer. In the spin-valve type MR element, the resistance value changes according to the angle that the magnetization direction of the free layer makes with respect to the magnetization direction of the magnetization pinned layer, and the resistance value is minimum when this angle is 0°, and maximum when the angle is 180°.

[0022] As shown in FIG. 3, the magnetization direction of the magnetization fixed layer in the MR elements included in the first resistor R1 (hereinafter simply referred to as the pin direction PR1 of the first resistor R1) is opposite to the magnetization direction of the magnetization fixed layer in the MR elements included in the second resistor R2 (hereinafter simply referred to as the pin direction PR2 of the second resistor R2). In addition, the magnetization direction of the magnetization fixed layer in the MR elements included in the third resistor R3 (hereinafter simply referred to as the pin direction PR3 of the third resistor R3) is opposite to the magnetization direction of the magnetization fixed layer in the MR elements included in the fourth resistor R4 (hereinafter simply referred to as the pin direction PR4 of the fourth resistor R4). Furthermore, the pin direction PR1 of the first resistor R1 and the pin direction PR2 of the second resistor R2 are substantially perpendicular to the pin direction PR3 of the third resistor R3 and the pin direction PR4 of the fourth resistor R4. Therefore, for example, as shown in FIG. 4, when the voltage Vout1 output to the output port E1 describes a cosine curve that changes according to the angle θ of the first magnetic field MF1 with respect to the reference direction, the voltage Vout2 output to the output port E2 describes a sine curve that changes according to the angle θ. That is, the voltages Vout1 and Vout2 have a phase difference of 90° with respect to the angle θ. The detection signal depends on the potential of the output port E1, the potential of the output port E2, and the potential difference between the output ports E1 and E2. The detection signal changes according to the direction of the first magnetic field MF1, which is the magnetic field to be detected. FIG. 4 is a characteristic diagram showing an example of the output voltage characteristic obtained from the magnetic field sensor 30.

[0023] The magnetization directions of the magnetization pinned layers in the multiple MR elements may be slightly deviated from the above-mentioned directions in terms of the accuracy of manufacturing the MR elements. For example, the angle of the pin direction PR2 of the second resistor R2 relative to the pin direction PR1 of the first resistor R1 and the angle of the pin direction PR4 of the fourth resistor R4 relative to the pin direction PR3 of the third resistor R3 may be in the range of about 180°±15°. Also, the angle of the pin direction PR3 of the third resistor R3 and the pin direction PR4 of the fourth resistor R4 relative to the pin direction PR1 of the first resistor R1 may be in the range of about 90°±15°. Furthermore, the angle of the pin direction PR3 of the third resistor R3 and the pin direction PR4 of the fourth resistor R4 relative to the pin direction PR2 of the second resistor R2 may be in the range of about 90°±15°.

[0024] Here, an example of the configuration of the first to fourth resistance parts R1 to R4 will be described with reference to FIG. 5. FIG. 5 is a perspective view showing a part of one resistance part in the magnetic field sensor 30 shown in FIG. 3. In this example, one magnetic detection element has a plurality of lower electrodes 162, a plurality of magnetoresistance effect (MR) elements 150, and a plurality of upper electrodes 163. The plurality of lower electrodes 162 may be arranged on a substrate. Each of the lower electrodes 162 has an elongated shape. A gap is formed between two lower electrodes 162 adjacent in the longitudinal direction of the lower electrode 162. As shown in FIG. 5, on the upper surface of the lower electrode 162, the MR elements 150 are arranged near both ends in the longitudinal direction. The MR elements 150 include, for example, a magnetization free layer 151, a nonmagnetic layer 152, a magnetization fixed layer 153, and an antiferromagnetic layer 154, which are stacked in this order from the lower electrode 162 side. The magnetization free layer 151 is electrically connected to the lower electrode 162. The antiferromagnetic layer 154 includes an antiferromagnetic material, and generates exchange coupling between the magnetization fixed layer 153 and the magnetization fixed layer 153 to fix the magnetization direction of the magnetization fixed layer 153. The multiple upper electrodes 163 are arranged on the multiple MR elements 150. Each upper electrode 163 has an elongated shape, and is arranged on two lower electrodes 162 adjacent to each other in the longitudinal direction of the lower electrode 162 to electrically connect the antiferromagnetic layers 154 of the two adjacent MR elements 150 to each other. With this configuration, the magnetic detection element shown in FIG. 5 has multiple MR elements 150 connected in series by the multiple lower electrodes 162 and the multiple upper electrodes 163. Note that the arrangement of the magnetization free layer 151, the nonmagnetic layer 152, the magnetization fixed layer 153, and the antiferromagnetic layer 154 in the MR element 150 may be upside down from the arrangement shown in FIG. 5.

[0025] [Functions and Effects of Position Detection Device 1] Next, the operation and effect of the position detection device 1 according to the present embodiment will be described. The position detection device 1 according to the present embodiment includes a magnet 10 that generates a first magnetic field MF1, a drive coil 20 that is arranged facing the magnet 10 in the Z-axis direction and moves the magnet 10 in the X-axis direction by generating a second magnetic field MF2, and a magnetic field sensor 30 that detects the magnetic field component of the first magnetic field MF1 that is parallel to the XY plane. Here, the magnet 10 is provided so as to be movable in the X-axis direction relative to the drive coil 20 and the magnetic field sensor 30. In addition, the center position CY30 of the magnetic field sensor 30 in the Y-axis direction is different from the center position CY10 of the magnet 10 in the Y-axis direction. Since the magnetic field sensor 30 detects the magnetic field component parallel to the XY plane, it is not affected by the magnetic field component in the Z-axis direction generated by the drive coil 20. In addition, while the position of the magnet 10 changes with respect to the position of the magnetic field sensor 30, the relative positions of the magnetic field sensor 30 and the drive coil 20 are fixed, so the direction of the second magnetic field MF2 with respect to the magnetic field sensor 30 does not change. Furthermore, the first portion 21 and the second portion 22 of the driving coil 20 overlap with and are spaced apart from the first magnetized region 11 and the second magnetized region 12 of the magnet 10 in the Z-axis direction, and extend across the first magnetized region 11 and the second magnetized region 12 of the magnet 10 in the Y-axis direction. Therefore, the second magnetic field MF2 generated by the driving coil 20 is efficiently and stably applied to the first magnetized region 11 and the second magnetized region 12 of the magnet 10. Therefore, even if the second magnetic field MF2 is minute, the magnet 10 can move accurately, and the change in the first magnetic field MF1 generated by the magnet 10 can be accurately detected by the magnetic field sensor 30.

[0026] <2. Second embodiment> [Configuration of position detection device 2] Next, a configuration of a position detection device 2 according to a second embodiment of the present disclosure will be described with reference to FIGS. 6A to 6C.

[0027] Fig. 6A is a perspective view showing an example of the overall configuration of the position detection device 2. Fig. 6B is a cross-sectional view showing an example of the cross-sectional configuration of the position detection device 2. Fig. 6C is a plan view of the position detection device 2 seen from above. Note that Fig. 6B shows a cross section in the direction of the arrows along line VIB-VIB shown in Fig. 6C. Figs. 6A to 6C respectively correspond to Figs. 1A, 2B, and 2C showing the position detection device 1 of the first embodiment.

[0028] As shown in FIGS. 6A to 6C, the position detection device 2 has a magnet 10A instead of the magnet 10. In the magnet 10A of the position detection device 2, a first magnetized region 11 and a second magnetized region 12 arranged in the X-axis direction are spaced apart from each other. Furthermore, a third magnetized region 13 magnetized in, for example, the -X direction along the X-axis direction is included between the first magnetized region 11 and the second magnetized region 12. Except for these points, the configuration of the position detection device 2 is substantially the same as the configuration of the position detection device 1 of the first embodiment. Note that the first magnetized region 11, the second magnetized region 12, and the third magnetized region 13 are in contact with each other. However, non-magnetized regions may exist between the first magnetized region 11 and the third magnetized region 13 and between the second magnetized region 12 and the third magnetized region 13.

[0029] In the position detector 2, the second magnetic field MF2 is applied, so that the magnet 10A can move from the initial position P0 in the +X direction to a position P1 and from the initial position P0 in the -X direction to a position P2 as shown in Figs. 6B to 6C. That is, the edge T11 of the first magnetized region 11 and the edge T12 of the second magnetized region 12 of the magnet 10A can move in the X-axis direction between the positions P1 and P2. Here, the magnet 10 may be movable in both the +X direction and the -X direction between the first position P1 and the second position P2 while maintaining a state of overlapping with a part of the drive coil 20 in the Z-axis direction. Specifically, in the position detector 2, the magnet 10A may be configured to be movable in the X-axis direction within a range in which the first portion 21 does not protrude from the first magnetized region 11 in the X-axis direction and within a range in which the second portion 22 does not protrude from the second magnetized region 12 in the X-axis direction. However, in the position detection device 2, the third magnetization area 13 is provided between the first magnetization area 11 and the second magnetization area 12, so that the magnet 10A may be configured to be movable in the X-axis direction so that the first portion 21 protrudes from the first magnetization area 11 in the X-axis direction and the second portion 22 protrudes from the second magnetization area 12 in the X-axis direction.

[0030] [Function and effect of position detection device 2] In the position detection device 2 of the present embodiment, the third magnetized region 13 is provided in the magnet 10A, and therefore the linearity of the output with respect to the change in the first magnetic field MF1 can be improved compared to the position detection device 1 of the above-described first embodiment. Also, in the region where the movement amount of the magnet 10A in the X-axis direction is relatively large, the strength of the first magnetic field MF1 applied to the magnetic field sensor 30 can be improved, and the detection sensitivity is improved.

[0031] FIG. 7 is a characteristic diagram showing an example of the relationship between the movement amount of the first magnetic field generating unit (magnet 10A) in the X-axis direction and the angle θ of the first magnetic field MF1 detected by the magnetic field sensor 30. In FIG. 7, the horizontal axis represents the movement amount of the first magnetic field generating unit from the reference position in the X-axis direction, and the vertical axis represents the angle θ of the first magnetic field MF1 detected. Note that, for comparison, FIG. 7 also shows similar characteristics in the position detection device 1 of the first embodiment. Furthermore, FIG. 7 also shows similar characteristics in the position detection device 3 of the third embodiment described later. In FIG. 7, the curve with the symbol C1 represents the position detection device 1, the curve with the symbol C2 represents the position detection device 2, and the curve with the symbol C3 represents the position detection device 3. As shown in FIG. 7, the angle θ of the first magnetic field MF1 changes more linearly with respect to the movement amount of the first magnetic field generating unit in the X-axis direction in the position detection devices 2 and 3 compared to the position detection device 1. Therefore, compared to the position detection device 1, the position detection device 2 can detect the amount of movement of the magnet 10A in the X-axis direction with higher accuracy.

[0032] FIG. 8 is a characteristic diagram that shows an example of the relationship between the amount of movement of the first magnetic field generating unit (magnet 10A) in the X-axis direction and the magnetic flux density B of the first magnetic field MF1 applied to the magnetic field sensor 30. In FIG. 8, the horizontal axis represents the amount of movement of the first magnetic field generating unit from the reference position in the X-axis direction, and the vertical axis represents the magnetic flux density B of the first magnetic field MF1 applied to the magnetic field sensor 30. For comparison, FIG. 8 also shows similar characteristics in the position detection device 1 of the first embodiment. Furthermore, FIG. 8 also shows similar characteristics in the position detection device 3 of the third embodiment described later. In FIG. 8 as well, the curve with the symbol C1 represents the position detection device 1, the curve with the symbol C2 represents the position detection device 2, and the curve with the symbol C3 represents the position detection device 3. As shown in FIG. 8, compared to position detection device 1, position detection device 2 has a lower magnetic flux density in areas where the movement amount of the first magnetic field generating unit (magnet 10A) is small, but has a higher magnetic flux density in areas where the movement amount of the first magnetic field generating unit (magnet 10A) is relatively large.

[0033] <3. Third embodiment> [Configuration of position detection device 3] Next, a configuration of a position detection device 3 according to a third embodiment of the present disclosure will be described with reference to FIGS. 9A to 9C.

[0034] Fig. 9A is a perspective view showing an example of the overall configuration of the position detection device 3. Fig. 9B is a cross-sectional view showing an example of the cross-sectional configuration of the position detection device 3. Fig. 9C is a plan view of the position detection device 3 seen from above. Fig. 9B shows a cross section taken along line IXB-IXB shown in Fig. 9C. Figs. 9A to 9C respectively correspond to Figs. 1A, 2B, and 2C showing the position detection device 1 of the first embodiment.

[0035] 9A to 9C, the position detection device 3 has a magnet 10B instead of the magnet 10. In the magnet 10B of the position detection device 3, a first magnetized region 11 and a second magnetized region 12 aligned in the X-axis direction are spaced apart from each other. Furthermore, a non-magnetized region 14 is included between the first magnetized region 11 and the second magnetized region 12. Except for these points, the configuration of the position detection device 3 is substantially the same as the configuration of the position detection device 1 of the above-described first embodiment.

[0036] In the position detector 3, the second magnetic field MF2 is applied, so that the magnet 10B can move from the initial position P0 in the +X direction to a position P1 and from the initial position P0 in the -X direction to a position P2 as shown in Figs. 9B to 9C. That is, the edge T11 of the first magnetized region 11 and the edge T12 of the second magnetized region 12 of the magnet 10B can move in the X-axis direction between the positions P1 and P2. Here, the magnet 10B may be movable in both the +X direction and the -X direction between the first position P1 and the second position P2 while maintaining a state of overlapping with a part of the drive coil 20 in the Z-axis direction. Specifically, in the position detector 2, the magnet 10B may be configured to be movable within a range in which the first portion 21 does not protrude from the first magnetized region 11 in the X-axis direction and the second portion 22 does not protrude from the second magnetized region 12 in the X-axis direction.

[0037] [Function and effect of position detection device 3] In the position detection device 3 of the present embodiment, since the magnet 10B is provided with the non-magnetized region 14, as shown in Fig. 7, the linearity of the output with respect to the change in the first magnetic field MF1 can be improved compared to the position detection device 1. Therefore, compared to the position detection device 1, the position detection device 3 can detect the amount of movement of the magnet 10B in the X-axis direction with higher accuracy.

[0038] <4. Fourth embodiment> [Configuration of position detection device 4] Next, a configuration of a position detection device 4 according to a fourth embodiment of the present disclosure will be described with reference to FIGS. 10A and 10B.

[0039] Fig. 10A is a perspective view illustrating an example of the overall configuration of the position detection device 4. Fig. 10B is a cross-sectional view illustrating an example of the cross-sectional configuration of the position detection device 4. Figs. 10A and 10B correspond to Figs. 1A and 2B, respectively, illustrating the position detection device 1 of the first embodiment.

[0040] As shown in FIGS. 10A and 10B, the position detection device 4 has a magnet 10C instead of the magnet 10. In the magnet 10C of the position detection device 4, a first magnetized region 11 and a second magnetized region 12 arranged in the X-axis direction are spaced apart from each other. A space V is provided between the first magnetized region 11 and the second magnetized region 12. Furthermore, the first magnetized region 11 includes a facing surface 11S facing the second magnetized region 12, and a part of the facing surface 11S is chamfered to form an inclined surface 11SS. Similarly, the second magnetized region 12 includes a facing surface 12S facing the first magnetized region 11, and a part of the facing surface 12S is chamfered to form an inclined surface 12SS. The inclined surface 11SS and the inclined surface 12SS are parallel to the Y-axis direction and inclined with respect to the XY plane. Except for these points, the configuration of the position detection device 2 is substantially the same as the configuration of the position detection device 1 of the first embodiment. Incidentally, the entire opposing surface 11S may be an inclined surface 11SS, or the entire opposing surface 12S may be an inclined surface 12SS.

[0041] In the position detector 4, the second magnetic field MF2 is applied, so that the magnet 10C can move from the initial position P0 in the +X direction to a position P1 and from the initial position P0 in the -X direction to a position P2 as shown in FIG. 10B. That is, the edge T11 of the first magnetized region 11 and the edge T12 of the second magnetized region 12 of the magnet 10C can move in the X-axis direction between the positions P1 and P2. Here, the magnet 10C may be movable in both the +X direction and the -X direction between the first position P1 and the second position P2 while maintaining a state of overlapping with a part of the drive coil 20 in the Z-axis direction. Specifically, in the position detector 2, the magnet 10C may be configured to be movable within a range in which the first portion 21 does not protrude from the first magnetized region 11 in the X-axis direction and the second portion 22 does not protrude from the second magnetized region 12 in the X-axis direction.

[0042] [Effects of the position detection device 4] In the position detector 4 of the present embodiment, the first magnetized region 11 and the second magnetized region 12 are spaced apart from each other, the first magnetized region 11 and the first portion 21 overlap in the Z-axis direction, and the second magnetized region 12 and the second portion 22 overlap in the Z-axis direction. Furthermore, a part of the facing surface 11S has an inclined surface 11SS, and a part of the facing surface 12S has an inclined surface 12SS. Therefore, the position detector 4 can improve the linearity of the output with respect to the change in the first magnetic field MF1 compared to the position detector 1 and the position detector 3. Therefore, the position detector 4 can detect the movement amount of the magnet 10D in the X-axis direction with higher accuracy.

[0043] (Modification of the fourth embodiment) In the position detection device 4, a part of the facing surface 11S of the first magnetized region 11 is a flat inclined surface 11SS, and a part of the facing surface 12S of the second magnetized region 12 is a flat inclined surface 12SS. However, the present disclosure is not limited thereto. For example, as in a position detection device 4A as a modified example shown in FIG. 11A and FIG. 11B, a part of the facing surface 11S of the first magnetized region 11 may be a curved surface 11SR, and a part of the facing surface 12S of the second magnetized region 12 may be a curved surface 12SR. Note that in the position detection device 4A, the entire facing surface 11S of the first magnetized region 11 may be a curved surface 11SR, and the entire facing surface 12S of the second magnetized region 12 may be a curved surface 12SR.

[0044] <5. Fifth embodiment> [Configuration of position detection device 5] Next, a configuration of a position detection device 5 according to a fifth embodiment of the present disclosure will be described with reference to FIGS. 12A and 12B.

[0045] Fig. 12A is a cross-sectional view illustrating an example of a cross-sectional configuration of the position detection device 5. Fig. 12B is a plan view of the position detection device 5 viewed from above. Figs. 12A and 12B correspond to Figs. 1B and 1C illustrating the position detection device 1 of the first embodiment, respectively.

[0046] The position detection device 5 includes two drive coils 20A and 20B as a second magnetic field generating unit. A first portion 21, which is a part of the drive coil 20A, overlaps with the first magnetized region 11 while being spaced apart in the Z-axis direction, and a second portion 22, which is a part of the drive coil 20B, overlaps with the second magnetized region 12 while being spaced apart in the Z-axis direction. In the position detection device 5, the magnet 10 is reversibly moved in the X-axis direction by both the magnetic field generated by the drive coil 20A and the magnetic field generated by the drive coil 20B. The magnetic field sensor 30 is located between the drive coil 20A and the drive coil 20B in the X-axis direction, for example. As shown in FIG. 12A, the magnetic field sensor 30 is provided in the same layer as the layer in which the drive coil 20A and the drive coil 20B are formed. In addition, at least a part of the drive coil 20A and at least a part of the drive coil 20B overlap with at least a part of the magnetic field sensor 30 in the X-axis direction.

[0047] [Effects of the position detection device 5] The position detection device 5 of this embodiment also provides the same operational effects as the position detection device 1 of the first embodiment.

[0048] (First modified example of the fifth embodiment) 13 is a cross-sectional view illustrating a configuration of a position detection device 5A as a first modified example of the fifth embodiment of the present disclosure. In the present disclosure, like the position detection device 5A, the magnetic field sensor 30 may be provided in a level L2 different from the level L1 in which the driving coils 20A and 20B are provided in the Z-axis direction.

[0049] (Second modified example of the fifth embodiment) 14 is a plan view illustrating a configuration of a position detection device 5B as a second modified example of the fifth embodiment of the present disclosure. In the present disclosure, as in the position detection device 5B, the magnetic field sensor 30 may be provided at a position that is shifted in the Y-axis direction from the position between the driving coils 20A and 20B in a plan view.

[0050] (Third modified example of the fifth embodiment) 15 is a plan view illustrating a configuration of a position detection device 5C as a third modified example of the fifth embodiment of the present disclosure. In the present disclosure, as in the position detection device 5C, the magnetic field sensor 30 may be provided at a position overlapping the magnet 10 in the Z-axis direction in a plan view.

[0051] <6. Sixth embodiment> [Configuration of position detection device 6] Next, a configuration of a position detection device 6 according to a sixth embodiment of the present disclosure will be described with reference to Fig. 16. Fig. 16 is a perspective view illustrating an example of the overall configuration of the position detection device 6. Fig. 16 corresponds to Fig. 1A illustrating the position detection device 1 according to the first embodiment.

[0052] The position detector 6 includes two drive coils 20A and 20B as a second magnetic field generating unit, similar to the position detector 5 described in the fifth embodiment. However, the position detector 6 includes a magnet 10D instead of the magnet 10 as a first magnetic field generating unit. As shown in FIG. 16, the magnet 10D has an area magnetized in the +Z direction as a whole. However, the whole does not exclude the inclusion of a non-magnetized area or an area magnetized in the -Z direction in a part of the magnet 10D. In addition, the present disclosure is not limited to the case where the magnetization direction strictly coincides with the +Z direction, but also allows the case where the magnetization direction is inclined by about 5 to 10 degrees with respect to the +Z direction. In the position detector 6, the first portion 21, which is a part of the drive coil 20A, and the second portion 22, which is a part of the drive coil 20B, overlap with the magnet 10D while being spaced apart in the Z-axis direction. In the position detection device 6, the magnet 10 is reversibly moved in the X-axis direction by both the magnetic field generated by the drive coil 20A and the magnetic field generated by the drive coil 20B. The magnetic field sensor 30 is located, for example, between the drive coil 20A and the drive coil 20B in the X-axis direction. The magnetic field sensor 30 may be provided, for example, in the same layer as the layer in which the drive coil 20A and the drive coil 20B are formed, or in a layer different from the layer in which the drive coil 20A and the drive coil 20B are formed.

[0053] [Function and effect of position detection device 6] The position detection device 6 of this embodiment also provides the same operational effects as the position detection device 1 of the first embodiment. Moreover, the position detection device 6 uses a two-pole magnet 10D instead of the four-pole magnet 10 used in the position detection device 1 of the first embodiment, so magnetization of the magnet 10D is easier than that of the magnet 10, and the manufacture of the magnet 10D is also easier.

[0054] <7. Seventh embodiment> [Configuration of imaging device 100] Next, a configuration of the imaging device 100 according to the seventh embodiment of the present disclosure will be described with reference to FIG. 17A.

[0055] Fig. 17A is a perspective view showing an example of the overall configuration of the imaging device 100. Note that the imaging device 100 shown in Fig. 17A is merely an example, and in this embodiment, the components constituting the imaging device 100 and their dimensions, shapes, and arrangement positions are not limited to those shown in Fig. 17A.

[0056] The imaging device 100 constitutes, for example, a part of a camera for a smartphone equipped with an autofocus mechanism. The imaging device 100 includes, for example, an image sensor 200 that acquires an image using a CMOS or the like, and a lens module 300 that guides light from a subject to the image sensor 200.

[0057] [Configuration of lens module 300] The lens module 300 includes the position detection device 1 described in the first embodiment, the lens 305, the housing 306, the base 307, and the holding member 314. The position detection device 1 is a magnetic position detection device, and is a mechanism for detecting the position of the lens 305 when automatically focusing the incident light so that the light incident from the subject (hereinafter, simply the incident light) is imaged on the imaging surface of the image sensor 200. The position detection device 1 also serves as a driving device for moving the lens 305 to focus the incident light, for example. The housing 306 is adapted to house the position detection device 1 and the like and to protect them. In the imaging device 100 of FIG. 17A, the position detection device 1 is provided in a position in which the magnet 10 moves in the x-axis direction. In the imaging device 100 of FIG. 17A, the magnet 10 and the lens 305 are moved in the x-axis direction, and the positions of the magnet 10 and the lens 305 in the x-axis direction are detected.

[0058] Lens 305 is disposed above base 307 in such a position that the direction of its optical axis coincides with the x-axis. Base 307 also has an opening that passes light that has passed through lens 305. Lens module 300 and image sensor 200 are aligned so that light from a subject that has passed through lens 305 and the opening of base 307 in that order is incident on image sensor 200.

[0059] The holding member 314 is a member that holds the magnet 10 of the position detection device 1 and the lens 305 together. The holding member 314 has, for example, a cylindrical shape configured so that the lens 305 can be attached therein. The holding member 314 is provided so as to be reversibly movable along the optical axis direction of the lens 305, i.e., the x-axis direction, relative to the base 307. The base 307 supports the holding member 314 via biasing members such as a plurality of springs so that the holding member 314 can move in the x-axis direction relative to the base 307.

[0060] [Operation of the imaging device 100] The operation of the imaging device 100 is controlled by a control unit 40 provided outside the imaging device 100. The control unit 40 has a circuit configured with, for example, a CPU (Central Processing Unit) which is an arithmetic processing device, a ROM (Read Only Memory) which is a storage element for storing programs and arithmetic parameters used by the CPU, and a RAM (Random Access Memory) which is a storage element for temporarily storing parameters that change appropriately during execution of the CPU.

[0061] The autofocus mechanism is configured to detect a state in which a subject is in focus by, for example, the image sensor 200 or an autofocus sensor. The control unit 40 changes the relative position of the lens 305 with respect to the substrate 7 along the x-axis by the position detection device 1 so that the subject is in focus. Specifically, this allows automatic focusing on the subject.

[0062] [Functions and Effects of the Imaging Device 100] Since the imaging device 100 includes the position detection device 1 of the first embodiment, it can accurately detect the position (amount of displacement) of the magnet 10 that moves together with the lens 305. This allows the imaging device 100 to perform highly accurate focusing.

[0063] (Modification of the seventh embodiment) FIG. 17B is a schematic perspective view showing an example of the overall configuration of an imaging device 100A as a modified example of the seventh embodiment of the present disclosure. The present disclosure may include an optical image stabilization mechanism, like the imaging device 100A. The imaging device 100A has two position detection devices 1-1 and 1-2 instead of the position detection device 1. The position detection devices 1-1 and 1-2 each have substantially the same configuration as the position detection device 1 described in the first embodiment. However, the position detection device 1-1 is provided so that the magnet 10 moves in the y-axis direction together with the lens 305, and detects the positions of the magnet 10 and the lens 305 in the y-axis direction. The position detection device 1-2 is provided so that the magnet 10 moves in the z-axis direction together with the lens 305, and detects the positions of the magnet 10 and the lens 305 in the z-axis direction. The configuration of the imaging device 100A shown in FIG. 17B is substantially the same as the configuration of the imaging device 100 shown in FIG. 17A, except that the imaging device 100A is provided with an optical image stabilization mechanism instead of an autofocus mechanism.

[0064] The optical image stabilization mechanism is configured to detect camera shake using, for example, a gyro sensor. The gyro sensor or other sensor may be provided outside the imaging device 100A. When the optical image stabilization mechanism detects camera shake, the control unit 40 controls the position detection devices 1-1 and 1-2 so that the relative position of the lens 305 with respect to the base 307 changes according to the type of camera shake. In the position detection devices 1-1 and 1-2, when a current of a predetermined magnitude and direction is supplied to the driving coil 20 according to a command from the control unit 40, the magnet 10 moves together with the lens 305 in a predetermined direction (for example, the y-axis direction or the z-axis direction perpendicular to the direction of the optical axis of the lens 305). This stabilizes the absolute position of the lens 305, thereby reducing the effect of camera shake. The relative position of the lens 305 with respect to the base 307 changes in a direction parallel to the y-axis or the z-axis according to the type of camera shake.

[0065] [Functions and Effects of the Imaging Device 100A] Since the imaging device 100A includes position detection devices 1-1 and 1-2 having substantially the same configuration as the position detection device 1 of the first embodiment, it can accurately detect the position (amount of displacement) of the magnet 10 that moves integrally with the lens 305. Therefore, the imaging device 100 can perform highly accurate optical image stabilization.

[0066] The imaging device 100A may also include an autofocus mechanism of the imaging device 100. In this case, the imaging device 100A can perform highly accurate optical image stabilization and highly accurate focusing.

[0067] <7. Other Modifications> Although the present disclosure has been described above with reference to several embodiments, the present disclosure is not limited to the several embodiments, and various modifications are possible. For example, in the above embodiment, the magnetic field sensor forms a half-bridge circuit using four resistance parts (including two resistance parts whose output voltage changes with respect to the angle θ form a sine curve and two resistance parts whose output voltage changes with respect to the angle θ form a cosine curve), but in the present disclosure, a full-bridge circuit may be formed using a total of eight resistance parts, including four resistance parts whose output voltage changes with respect to the angle θ form a sine curve and four resistance parts whose output voltage changes with respect to the angle θ form a cosine curve. In addition, the shapes and dimensions of the multiple magnetoresistance effect elements included in each resistance part may be the same as or different from each other. In addition, the magnetic detection element in the resistance part may be an element having a function of detecting a magnetic field, and is not limited to a spin-valve type MR element, but may also include an anisotropic magnetoresistance effect element (AMR element) and a Hall element (for example, a planar Hall element or a vertical Hall element). In addition, the dimensions of each component and the layout of each component are merely examples and are not limited thereto.

[0068] The configuration of the Wheatstone bridge circuit 31 shown in FIG. 3 is an example, and the magnetic field sensor 30 of the present embodiment is not limited to that shown in FIG. 3. The magnetic field sensor 30 may have, for example, the Wheatstone bridge circuit 31A shown in FIG. 18. In the Wheatstone bridge circuit 31A, the pin direction PR1 of the first resistor R1 and the pin direction PR2 of the second resistor R2 are opposite to each other, and the pin direction PR3 of the third resistor R3 and the pin direction PR4 of the fourth resistor R4 are opposite to each other. Also, the pin direction PR1 of the first resistor R1 and the pin direction PR3 of the third resistor R3 are the same direction, and the pin direction PR2 of the second resistor R2 and the pin direction PR4 of the fourth resistor R4 are the same direction. Therefore, in the Wheatstone bridge circuit 31A shown in FIG. 18, as shown in FIG. 19, for example, the curve showing the change in voltage Vout1 output to the output port E1 and the curve showing the change in voltage Vout2 output to the output port E2 have a phase difference of 180° with respect to the angle θ.

[0069] Furthermore, the position detection device of the present disclosure is not limited to a device for detecting the position of a lens, but may be a device for detecting the spatial position of an object other than a lens.

[0070] In the above embodiment, the magnet 10 has an approximately rectangular parallelepiped appearance, but the first magnetic field generating unit of the present disclosure is not limited thereto. For example, as in the magnets 10E to 10G of the position detection devices 7A to 7C shown in Figs. 20A to 20C, the magnet may include the first magnetized region 11 and the second magnetized region 12 each having an appearance of a curved shape forming a part of a ring. The magnet 10E has a space V between the first magnetized region 11 and the second magnetized region 12. The magnet 10F has a third magnetized region 13 between the first magnetized region 11 and the second magnetized region 12. In the magnet 10G, the first magnetized region 11 and the second magnetized region 12 are adjacent to each other. The magnets 10D to 10F rotate in the direction of the arrow R in the XZ plane around a rotation axis along the Y-axis direction. However, the magnets 10E-10G rotate within a range in which the first magnetized region 11 and the second magnetized region 12 each overlap in the Z-axis direction with a part of the drive coil 20. According to such position detection devices 7A-7C, the rotation angles of the magnets 10E-10G can be detected with high accuracy.

[0071] The position detectors 7A to 7C shown in Figs. 20A to 20C are applicable to, for example, an angle sensor device. Fig. 21 shows an example of the overall configuration of an angle sensor device 500 equipped with the position detector 7A as an example. The angle sensor device 500 includes a substantially disk-shaped rotor 50 and a position detector 7A. The rotor 50 is configured to be rotatable in the +R direction and the -R direction around a rotation axis J500 parallel to the Z-axis direction. The magnet 10E shown in Fig. 20A is attached to the rotor 50. The magnet 10E rotates in the +R direction and the -R direction together with the rotor 50 due to the second magnetic field generated by the drive coil 20. The magnetic field sensor 30 can detect the rotation angle of the rotor 50 with high accuracy by detecting the change in the magnetic field component parallel to the XY plane perpendicular to the radial direction (Z-axis direction) of the rotor 50 out of the first magnetic field generated by the magnet 10E. The angle sensor device 500 may be equipped with the position detection device 7B or the position detection device 7C instead of the position detection device 7A.

[0072] 22, in a plan view seen in the Z-axis direction, the magnetic field sensor 30 may be disposed, for example, inside the drive coil 20. In the position detection device 1A, the magnetic field sensor 30 may be disposed in the same layer as the layer in which the drive coil 20 is disposed, or in a layer different from the layer in which the drive coil 20 is disposed.

[0073] In the present disclosure, the magnetic field sensor 30 may be provided at a position overlapping a part of the drive coil 20 in the Z-axis direction, as in the position detection device 1B shown in Figures 23A and 23B. In the position detection device 1B, as shown in Figure 23B, the magnetic field sensor 30 is provided on a level L2 different from the level L1 on which the drive coil 20 is provided.

[0074] In addition, in the above-mentioned embodiments and modifications, the position detection device having one magnetic field sensor has been described as an example, but the present disclosure is not limited thereto. For example, as in the position detection device 2A shown in FIG. 24A and FIG. 24B, two magnetic field sensors 30A and 30B may be provided for one magnet 10A. FIG. 24A is a schematic perspective view showing an example of the overall configuration of the position detection device 2A as another seventh modification of the present disclosure. FIG. 24B is a circuit diagram showing an example of the circuit configuration of the magnetic field sensors 30A and 30B in the position detection device 2A. The magnetic field sensor 30A and the magnetic field sensor 30B each have a Wheatstone bridge circuit 31 and are connected to each other. The magnetic field sensor 30A and the magnetic field sensor 30B are arranged, for example, in the X-axis direction in which the magnet 10A moves. Note that the number of magnetic field sensors provided in the position detection device of the present disclosure is not limited to two, and three or more magnetic field sensors may be provided. In such a position detection device 2A, the same effect as that of the position detection device 2 described in the above-mentioned second embodiment can also be obtained. Note that the position detection devices of some embodiments other than the second embodiment and some modified examples of the position detection devices may also be provided with a plurality of magnetic field sensors.

[0075] Furthermore, in the above-mentioned embodiments and modifications, the coil that generates the second magnetic field is described as an example of the driving unit, but the present disclosure is not limited to this. Instead of a coil, other devices that generate a driving force to drive the first magnetic field generating unit, such as various motors and actuators, may be used as the driving unit. [Explanation of symbols]

[0076] 1-5...position detection device, 10, 10A...magnet, 11...first magnetized area, 12...second magnetized area, 13...third magnetized area, 14...non-magnetized area, 20...drive coil, 21...first part, 22...second part, 30...magnetic field sensor, 40...control unit, 100...imaging device, 500...angle sensor device, MF1...first magnetic field, MF2...second magnetic field.

Claims

1. a first magnetic field generating unit that generates a first magnetic field; a driving unit that is disposed to face the first magnetic field generating unit in a first direction and moves the first magnetic field generating unit in a second direction parallel to a first plane orthogonal to the first direction by generating a driving force; a magnetic field sensor that detects a magnetic field component parallel to the first plane in the first magnetic field; comprising; the first magnetic field generating unit is provided so as to be movable in the second direction with respect to the driving unit and the magnetic field sensor; the driving unit overlaps a part of the first magnetic field generating unit while being separated from the first magnetic field generating unit in the first direction, and extends across a part of the first magnetic field generating unit in a third direction that is parallel to the first plane and orthogonal to the second direction; a central position of the magnetic field sensor in the third direction is different from a central position of the first magnetic field generating unit in the third direction a position detection device.

2. the first magnetic field generating unit is movable along the second direction between a first position and a second position while maintaining a state of overlapping a part of the driving unit in the first direction; the position detection device according to Claim 1.

3. the driving unit is a second magnetic field generating unit that generates a second magnetic field as the driving force; the position detection device according to Claim 1.

4. the first magnetic field generating unit a first magnetized region magnetized in a first direction along the first direction; a second magnetized region magnetized in a second direction opposite to the first direction along the first direction including; the position detection device according to Claim 1.

5. the first magnetized region and the second magnetized region are arranged side by side in the second direction; the position detection device according to Claim 4.

6. the first magnetized region includes a first S pole and a first N pole arranged in the first direction; the second magnetized region includes a second S pole and a second N pole arranged in the second direction; the position detection device according to Claim 5.

7. the first magnetized region and the second magnetized region are in contact with each other; the position detection device according to Claim 5.

8. the first magnetic field generating unit includes a first magnetized region magnetized in a first direction along the first direction and a second magnetized region magnetized in a second direction opposite to the first direction along the first direction; the second magnetic field generating unit includes a first portion that overlaps the first magnetized region while being separated from the first magnetized region in the first direction and a second portion that overlaps the second magnetized region while being separated from the second magnetized region in the first direction; The first magnetic field generation unit is movable along the second direction between a first position and a second position while maintaining a state in which the first magnetization region and the first portion overlap and a state in which the second magnetization region and the second portion overlap. The position detection device according to claim 3.

9. The drive unit is a coil wound in a plane parallel to the first plane. The direction of the second magnetic field with respect to the first magnetization region generated by the first portion is opposite to the direction of the second magnetic field with respect to the second magnetization region generated by the second portion. The position detection device according to claim 8.

10. The first magnetization region and the second magnetization region are spaced apart from each other. The first magnetic field generation unit further includes a third magnetization region magnetized in a third direction along the second direction between the first magnetization region and the second magnetization region. The position detection device according to claim 5.

11. The first magnetization region and the second magnetization region are spaced apart from each other. A space or a non-magnetized region is provided between the first magnetization region and the second magnetization region. The position detection device according to claim 5.

12. The first magnetization region and the second magnetization region are spaced apart from each other. The first magnetization region includes a first opposing surface facing the second magnetization region. The second magnetization region includes a second opposing surface facing the first magnetization region. Part or all of each of the first opposing surface and the second opposing surface is an inclined surface or a curved surface parallel to the third direction and inclined with respect to the first plane. The position detection device according to claim 5.

13. The second magnetic field generation unit is a coil wound in a plane parallel to the first plane. In a plan view seen in the first direction, the magnetic field sensor is disposed inside the coil. The position detection device according to claim 3.

14. The second magnetic field generation unit is a coil wound in a plane parallel to the first plane. In a plan view seen in the first direction, the magnetic field sensor is disposed outside the coil. The position detection device according to claim 3.

15. At least a part of the coil and at least a part of the magnetic field sensor overlap each other in the third direction. The position detection device according to claim 13 or claim 14.

16. The coil is provided in a first layer parallel to the first plane. The magnetic field sensor is in a second layer that is parallel to the first surface and different from the first layer. The position detection device according to claim 13 or claim 14.

17. The drive unit is a second magnetic field generation unit that generates a second magnetic field as the driving force, The second magnetic field generation unit includes a first coil and a second coil that are arranged apart from each other, A part of the first coil faces the first magnetization region in the first direction, A part of the second coil faces the second magnetization region in the first direction, The magnetic field sensor is located between the first coil and the second coil in the second direction. The position detection device according to claim 5.

18. The first coil, the second coil, and the magnetic field sensor overlap each other in the second direction. The position detection device according to claim 17.

19. The first coil and the second coil are provided in a first layer parallel to the first surface, The magnetic field sensor is in a second layer that is parallel to the first surface and different from the first layer. The position detection device according to claim 17.

20. The first magnetic field generation unit has a magnetization region including an S pole and an N pole arranged along the first direction, The second magnetic field generation unit includes a first coil and a second coil that are arranged apart from each other, Each of a part of the first coil and a part of the second coil faces the magnetization region in the first direction, The magnetic field sensor is located between the first coil and the second coil in the second direction. The position detection device according to claim 3.

21. Having a plurality of the magnetic field sensors arranged in the second direction The position detection device according to claim 1.

22. A first magnetic field generation unit that generates a first magnetic field, A drive unit that is arranged to face the first magnetic field generation unit in the first direction and moves the first magnetic field generation unit in a second direction parallel to a first surface orthogonal to the first direction by generating a driving force, A magnetic field sensor that detects a magnetic field component parallel to the first surface in the first magnetic field, A lens And having The first magnetic field generation unit and the lens are provided so as to be integrally movable in the second direction with respect to the drive unit and the magnetic field sensor. The driving unit overlaps with a part of the first magnetic field generating unit while being spaced apart from the part of the first magnetic field generating unit in the first direction, and extends across a part of the first magnetic field generating unit in a third direction that is parallel to the first plane and orthogonal to the second direction. The central position of the magnetic field sensor in the third direction is different from the central position of the first magnetic field generating unit in the third direction. Lens module.

23. An imaging element, A lens module are provided, The lens module has a first magnetic field generating unit that generates a first magnetic field, a driving unit that is disposed to face the first magnetic field generating unit in the first direction and generates a driving force to move the first magnetic field generating unit in a second direction parallel to a first plane orthogonal to the first direction, a magnetic field sensor that detects a magnetic field component parallel to the first plane in the first magnetic field, and a lens and has, the first magnetic field generating unit and the lens are provided so as to be integrally movable in the second direction with respect to the driving unit and the magnetic field sensor, The driving unit overlaps with a part of the first magnetic field generating unit while being spaced apart from the part of the first magnetic field generating unit in the first direction, and extends across a part of the first magnetic field generating unit in a third direction that is parallel to the first plane and orthogonal to the second direction. The central position of the magnetic field sensor in the third direction is different from the central position of the first magnetic field generating unit in the third direction. Imaging device.

24. further includes a control unit, the lens has an optical axis along the second direction, the control unit generates the driving force in the driving unit and moves the first magnetic field generating unit and the lens along the direction of the optical axis to perform focusing on a subject. The imaging device according to claim 23.

25. further includes a control unit, the lens has an optical axis along the second direction, the control unit generates the driving force in the driving unit and moves the first magnetic field generating unit and the lens along a plane orthogonal to the direction of the optical axis to perform focusing on a subject. The imaging device according to claim 23.

26. A rotating body, a position detection device are provided, The position detection device is provided on the rotating body and has a first magnetic field generating unit that generates a first magnetic field, a driving unit that is disposed to face the first magnetic field generating unit in the first direction and generates a driving force to rotate the first magnetic field generating unit and the rotating body in a second direction parallel to a first plane orthogonal to the first direction. A magnetic field sensor that detects a magnetic field component parallel to the first surface in the first magnetic field; having; the first magnetic field generating unit and the rotating body are provided so as to be rotatable in the second direction with respect to the driving unit and the magnetic field sensor; the driving unit overlaps a part of the first magnetic field generating unit while being separated from the part of the first magnetic field generating unit in the first direction, and extends across the part of the first magnetic field generating unit in a third direction that is parallel to the first surface and orthogonal to the second direction; a central position of the magnetic field sensor in the third direction is different from a central position of the first magnetic field generating unit in the third direction an angle sensor device.

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