Deterioration diagnostic device, deterioration diagnostic system, and deterioration diagnostic method

Abstract

To provide a deterioration diagnostic device, a deterioration diagnostic system, and a deterioration diagnostic method, capable of performing deterioration diagnosis for an ozone generator using simple indices.SOLUTION: A deterioration diagnostic device according to the present disclosure includes: a measurement unit that acquires measurement data representing an operating status including a differential pressure between an inlet and an outlet in a gas system of an ozone generator, an inlet pressure or an outlet pressure; and a diagnostic unit that diagnoses a deterioration status of the ozone generator based on the differential pressure, the inlet pressure, or the outlet pressure.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a degradation diagnostic device, a degradation diagnostic system, and a degradation diagnostic method for diagnosing degradation in the performance of an ozone generator using on-site operation data of the silent discharge ozone generator. [Background technology]

[0002] In silent discharge ozone generators, the efficiency of ozone generation often gradually decreases over time. For this reason, it is common to perform maintenance such as open inspection, open cleaning, part replacement, and repair at regular intervals. However, performing maintenance at regular intervals can lead to problems such as unnecessary maintenance being performed more frequently than necessary, or failures that occur due to maintenance not being completed in time. Therefore, a method has been proposed that monitors the performance of the ozone generator and issues an alarm when performance deteriorates, to notify the user of the need for maintenance.

[0003] The ozone generation efficiency, which is used as an index for diagnosing deterioration of an ozone generator, mainly depends on three parameters: the temperature of the cold water used to cool the ozone generator, the ozone concentration, and the power density (discharge power divided by the discharge area in the ozone generator). In order to accurately evaluate the performance of an ozone generator, it is necessary to take into consideration that these parameters change depending on the operating conditions of the ozone generator. In Patent Document 1, an initial value of the power consumption rate (an index similar to the ozone generation efficiency) is calculated in correspondence with the current water temperature, and the initial value of the power consumption rate is compared with the current value, thereby making it possible to detect deterioration in the performance of the ozone generator even if the water temperature is different between the initial operation and the current operation. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 8-217415 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in conventional technology, because the water temperature, ozone concentration, and power density change depending on the operating conditions of the ozone generator on-site, correction for these three parameters is required to accurately diagnose deterioration using the power consumption rate, making it difficult to diagnose deterioration of an ozone generator using simple indices.

[0006] The present disclosure has been made to solve the above-mentioned problems, and has an object to provide a deterioration diagnosis device, a deterioration diagnosis system, and a deterioration diagnosis method that can diagnose the deterioration of an ozone generator using a simple index. [Means for solving the problem]

[0007] The deterioration diagnosis device according to the present disclosure includes a measurement unit that acquires measurement data indicating operating conditions including the differential pressure between the inlet and outlet of the gas system of the ozone generator, the inlet pressure, or the outlet pressure, and a diagnosis unit that diagnoses the deterioration condition of the ozone generator based on the differential pressure, the inlet pressure, or the outlet pressure.

[0008] The deterioration diagnosis system according to the present disclosure includes an ozone generator, a measurement unit that acquires measurement data of operating conditions including a differential pressure between an inlet and an outlet of a gas system of the ozone generator, an inlet pressure, or an outlet pressure, and a diagnosis unit that diagnoses a deterioration state of the ozone generator based on the differential pressure, the inlet pressure, or the outlet pressure.

[0009] The deterioration diagnosis method according to the present disclosure includes a step of acquiring measurement data of the operating conditions including the differential pressure between the inlet and outlet of the gas system of the ozone generator, the inlet pressure, or the outlet pressure, and a step of diagnosing the deterioration condition of the ozone generator based on the differential pressure, the inlet pressure, or the outlet pressure. Effect of the Invention

[0010] According to the deterioration diagnosis device, deterioration diagnosis system, and deterioration diagnosis method disclosed herein, by diagnosing the deterioration state of the ozone generator based on the pressure or differential pressure of the ozone generator, it becomes possible to diagnose the deterioration of the ozone generator using a simple index. [Brief description of the drawings]

[0011] [Figure 1] 1 is a schematic configuration diagram showing a degradation diagnosis system according to a first embodiment of the present disclosure. [Diagram 2] 1 is a schematic configuration diagram showing a hardware configuration of a degradation diagnosis device according to a first embodiment of the present disclosure. [Diagram 3] 4 is a flowchart showing a degradation diagnostic method of the degradation diagnostic device according to the first embodiment of the present disclosure. [Figure 4] 4 is a graph showing an example of a corrected differential pressure and a discharge power of the degradation diagnosis device according to the first embodiment of the present disclosure. [Diagram 5] FIG. 11 is a schematic configuration diagram showing a degradation diagnosis device according to a second embodiment of the present disclosure. [Figure 6] 10 is a graph showing an example of a corrected differential pressure and a discharge power of a degradation diagnosis device according to a second embodiment of the present disclosure. [Figure 7] 13 is a flowchart showing a degradation diagnostic method of a degradation diagnostic device according to a third embodiment of the present disclosure. [Figure 8] 11 is a graph showing an example of a corrected differential pressure magnification and a discharge power of a degradation diagnosis device according to a third embodiment of the present disclosure. [Figure 9] FIG. 11 is a schematic diagram showing the relationship between an ozone generator and pressure in a degradation diagnosis device according to a fourth embodiment of the present disclosure. [Figure 10] FIG. 11 is a schematic diagram showing the relationship between an ozone generator and pressure in a degradation diagnosis device according to a fifth embodiment of the present disclosure.

[0012] Embodiment 1 FIG. 1 is a schematic configuration diagram showing a degradation diagnosis system according to a first embodiment of the present disclosure. As shown in FIG. 1, the degradation diagnosis system 100 includes an ozone generator 10 and a degradation diagnosis device 1. The degradation diagnosis device 1 includes a case-related information acquisition unit 2, a measurement unit 4, and a diagnosis unit 5. In FIG. 1, the degradation diagnosis device 1 includes the case-related information acquisition unit 2 and the case-specific information calculation unit 3, but these do not have to be provided and may be provided outside the degradation diagnosis device 1. The case-specific information calculation unit 3 may be included as a function in the case-related information acquisition unit 2, or may be included as a function in the diagnosis unit 5.

[0013] The measurement unit 4 acquires measurement data 14 of the operating status including the pressure difference between the inlet and the outlet of the gas system of the ozone generator 10 (hereinafter, the pressure difference). The inlet of the ozone generator 10 refers to the part where the raw material gas is introduced. The outlet of the ozone generator 10 refers to the part where the ozone-containing gas is discharged. Hereinafter, in this application, unless otherwise specified, all pressures (inlet pressure, outlet pressure, or pressure difference) refer to those of the gas system. Hereinafter, the pressure is preferably measured close to the ozone generator 10, but if the pressure loss in the piping from the ozone generator 10 to the measurement position is negligible, the measurement position may be distant. The operating status of the ozone generator 10 indicates the transition of each data during the operation of the ozone generator 10 from the past to the present, for example, from the initial value to the current value of the data that can be obtained during the operation of the ozone generator 10. The diagnosis unit 5 diagnoses the deterioration status of the ozone generator based on the pressure difference of the ozone generator. The deterioration state indicates the deterioration degree of the performance of the ozone generator 10 and the change over time. In the following, as an example, a case will be described in which the measurement unit 4 acquires the differential pressure of the ozone generator 10 and the diagnosis unit 5 diagnoses the deterioration state of the ozone generator 10 based on the differential pressure.

[0014] The case-related information acquisition unit 2 acquires case-related information 12 including information on certain operating conditions of the ozone generator 10. The certain operating conditions of the ozone generator 10 are conditions that are uniquely determined when the ozone generator 10 is installed, and are, for example, predetermined values ​​of one or more items such as the rated source gas flow rate, rated ozone concentration, rated water temperature, rated inlet pressure, rated outlet pressure, and rated differential pressure of the ozone generator 10. The case-specific information calculation unit 3 calculates case-specific information 13 based on the case-related information 12.

[0015] The ozone generator 10 is, for example, a general silent discharge type ozone generator. When a raw material gas containing oxygen is input into the ozone generator 10, power is supplied to the ozone generator 10 from a power supply device (not shown). This causes silent discharge inside the ozone generator 10, and ozone is generated from the oxygen in the raw material gas, which is then discharged as an ozone-containing gas. Since heat is generated by the discharge at this time, cold water for cooling the ozone generator 10 passes through the ozone generator 10. In general, the cold water flow rate is set for the ozone generator 10 so that the cold water outlet temperature is about 3 to 5° C. higher than the cold water inlet temperature.

[0016] The amount of ozone generated is expressed as the product of the ozone concentration and the raw material gas flow rate. The rated ozone generation amount is the highest amount of ozone generated that is expected in the operation of the ozone generator 10. Hereinafter, the ozone concentration and raw material gas flow rate required to obtain the rated ozone generation amount are referred to as the rated ozone concentration and the rated raw material gas flow rate.

[0017] In normal operation, the ozone generator 10 is often operated with the ozone generation rate lower than the rated ozone generation rate. Hereinafter, such operation will be called partial load operation. There are two types of control methods for partial load operation: constant concentration / variable raw material flow rate method and constant raw material flow rate / variable concentration method.

[0018] The constant concentration / varying feed flow rate method is a method of lowering the feed gas flow rate while keeping the ozone concentration at the rated ozone concentration. This method is often used when liquid oxygen is used as the feedstock, as it can save on the feed gas flow rate.

[0019] The constant raw material flow rate / varying concentration method is a method for lowering the ozone concentration while keeping the raw material gas flow rate at the rated raw material gas flow rate. This method is often adopted when the raw material gas cost (including the electricity cost for production) is relatively cheap and reducing the raw material gas flow rate does not contribute much to reducing the raw material gas cost, or when the raw material supply device is structurally difficult to follow arbitrary changes in the raw material gas flow rate. Specifically, this applies when the raw material gas for the ozone generator 100 is air raw material or a PSA raw material. When the raw material gas is a VPSA raw material, both the constant concentration / varying raw material flow rate and the constant raw material flow rate / varying concentration are adopted.

[0020] In the first embodiment, a case will be described in which partial load operation is performed using a control method in which the concentration is constant and the raw material flow rate is changed.

[0021] FIG. 2 is a schematic diagram showing a hardware configuration of the degradation diagnosis device according to the first embodiment of the present disclosure. The computer 22 includes, for example, a CPU (Central Processing Unit) 23, a main storage device 24, and an auxiliary storage device 25. For example, the main storage device 24 may be a RAM, and the auxiliary storage device 25 may be a storage medium such as a hard disk. An input device 21 and an output device 28 are provided outside the computer 22. The input device 21 may be, for example, a mouse or a keyboard. The output device 28 may be, for example, a display monitor that displays an output result from the computer 22. As shown in FIG. 2, the computer 22 is connected to an external storage device 27 via a network 26, and obtains information required for calculation from an external recording medium. The computer 22 may be configured to store the calculation result in an external storage medium.

[0022] The case-related information acquisition unit 2, the case-specific information calculation unit 3, the measurement unit 4 and the diagnosis unit 5 are realized by the CPU 23 and the main storage device 24 as internal calculation processes of the computer 22. That is, each process in the diagnosis unit 5 etc. is realized by the CPU 23, which is a processor, executing a program deployed on the main storage device 24, which is a memory. The CPU 23 reads data on the main storage device 24, performs each process, and stores the results in the main storage device 24.

[0023] Fig. 3 is a flowchart showing a degradation diagnosis method of the degradation diagnosis device according to the first embodiment of the present disclosure. A method for the degradation diagnosis device 1 to diagnose degradation of the ozone generator 10 will be described below with reference to Fig. 3. Note that, although Fig. 3 shows that the case-related information 12 is acquired in step S101 and the case-specific information 13 is calculated in step S102, these steps do not have to be included. Also, although the differential pressure is corrected in step S104, the differential pressure obtained from the measurement data 14 may be used directly for the degradation diagnosis of the ozone generator 10 without correction.

[0024] First, in step S101, the project-related information acquisition unit 2 executes a process of acquiring project-related information 12. The project-related information 12 is, for example, a certain operating condition of the ozone generator 10 used in the target project to which the degradation diagnosis system is applied. The project-related information is uniquely determined once the target project is determined. Projects do not need to be limited to those determined for each plant or each construction project. For example, if there are two types of ozone generators A and B in a project called A Water Purification Plant B Phase Construction, there may be two projects called A Water Purification Plant B Phase Construction A and A Water Purification Plant B Phase Construction B.

[0025] The case-related information 12 includes, for example, the raw material type, the rated ozone generation rate Gr [kg / h], the rated ozone concentration Cr and its unit (the unit is [g / m 3 The rated chilled water temperature includes the maximum discharge power Emax [kW], the rated differential pressure Pr [Pa], etc. The feedstock type includes, for example, air feedstock, liquid oxygen feedstock, (V)PSA feedstock, etc. The rated chilled water temperature is the temperature at the feedstock inlet of the ozone generator.

[0026] Next, in step S102, the case-specific information calculation unit 3 executes a process of calculating case-specific information 13 based on the case-related information 12. The case-specific information 13 is, for example, a rated feed gas flow rate fr[m 3 / h(N)], etc. Note that, although an example has been shown in which the case-specific information 13 is calculated from the case-related information 12, the case-specific information 13 may be input in advance as the case-related information 12.

[0027] Rated feed gas flow rate fr (unit: [m 3 / h (N)] or [kg / h]) is calculated by dividing the rated ozone generation rate Gr [kg / h] and the rated ozone concentration Cr (unit: [g / m 3 (N)] or [wt%]) as shown in formula (1) or formula (2).

[0028]

number

[0029] As shown in equation (2), if the unit of the rated ozone concentration is selected as [wt%], the rated feed gas flow rate is considered to be in [kg / h]. In that case, the feed gas flow meter at the site is in [kg / h], and the measurement data is also in [kg / h].

[0030] Next, in step S103, the measurement unit 4 acquires measurement data 14, which is the operating status including the pressure difference of the ozone generator 10. The measurement data 14 includes, for example, discharge power E (output power of the power supply device) [kW], ozone concentration C (unit: [wt%] or [g / m 3 (N)]), raw gas flow rate f (unit: [wt%] or [m 3 / h(N)]), the pressure [Pa] of the ozone generator 10, etc. The pressure of the ozone generator 10 includes the inlet pressure Pi [Pa], the outlet pressure Po [Pa], or the differential pressure P between the inlet and the outlet [Pa]. When obtaining the differential pressure P, the differential pressure of the ozone generator 10 may be directly measured using a differential pressure gauge, or the differential pressure may be obtained by measuring the inlet pressure Pi and the outlet pressure Po and subtracting them. Since the data does not have to be continuous (discrete data is also acceptable), when the differential pressure is obtained by subtraction, one pressure gauge may be used and the inlet pressure Pi and the outlet pressure Po may be alternately measured by switching the ports, etc.

[0031] The measurement data 14 at this time may be data of the smallest unit of sampling of on-site measurement data, or may be thinned out appropriately, or an average value of several seconds, several minutes, or an hour may be calculated to obtain one set of data every several seconds, several minutes, or an hour. The measurement data 14 is inputted from the first data of the target evaluation period, and a loop up to step S107 described later is repeated to input data up to the last data of the target evaluation period. The evaluation period, etc. may be determined in advance by being input separately, etc.

[0032] Next, in step S104, the diagnosis unit 5 calculates a corrected differential pressure by correcting the differential pressure based on the case-specific information 13 and the measurement data 14. Since the differential pressure of the measurement data 14 cannot be compared when the raw material gas flow rates are different, the differential pressure can be compared by correcting it to a value assuming that the raw material gas flow rate is at the rated condition. The corrected differential pressure P' [Pa] is expressed by, for example, formula (3) using the differential pressure P, the rated raw material gas flow rate fr of the case-specific information 13, and the raw material gas flow rate f of the measurement data 14.

number

[0033] In addition, in formula (3), the rated source gas flow rate fr and the source gas flow rate f must have the same unit. In addition, since the gas flow in the discharge gap of the ozone generator is laminar, in formula (3), the gas flow rate and the differential pressure are proportional, but they may be corrected more precisely. In addition, the source gas flow rate and the ozone-containing gas flow rate are the same when they are in kg / h, but are expressed in m 3 There are some differences when the unit is / h(N). In this embodiment, the left side of formula (1) is the rated raw material gas flow rate for simplification, but more accurately, the left side of formula (1) is the rated ozone-containing gas flow rate. To convert from the ozone-containing gas flow rate to the raw material gas flow rate, it is sufficient to multiply by a coefficient according to the ozone concentration. Since this coefficient is close to 1, it is omitted in this embodiment. Also, when the ozone-containing gas flow rate is measured instead of the raw material gas flow rate, it is also possible to correct the differential pressure using the rated value and measured value of the ozone-containing gas flow rate.

[0034] Next, in step S105, it is determined whether input and calculation are complete up to the last data of the target evaluation period. Steps S103 to S104 are repeated for data at each instant until completion. Note that the calculation results, etc. are appropriately stored.

[0035] FIG. 4 is a graph showing an example of the corrected differential pressure and discharge power of the degradation diagnosis device according to the first embodiment of the present disclosure. In step S106, the diagnosis unit 5 plots a graph with the horizontal axis representing time (date) and the vertical axis representing the corrected differential pressure as shown in FIG. 4, for example, and outputs the graph to a screen such as the output device 28. The horizontal axis represents time (date), and the vertical axis represents the corrected differential pressure and discharge power (measurement data). The corrected differential pressure is the first axis (left vertical axis), and the discharge power is the second axis (right vertical axis). In FIG. 4, for example, at the present time (the rightmost point in the graph), the corrected differential pressure is about 15 kPa, which is 1.5 times higher than the initial value. Here, we have found that the ozone generation efficiency decreases when the differential pressure (the difference between the raw material gas inlet pressure and the ozone-containing gas outlet pressure) of the gas flow passage in the ozone generator 10 increases. Therefore, in the example of FIG. 4, it can be seen that the ozone generator 10 is deteriorated. In this way, by using the differential pressure of the ozone generator 10, the deterioration state of the ozone generator 10 can be diagnosed.

[0036] In this embodiment, an example is shown that includes the case-related information acquisition unit 2 and the case-specific information calculation unit 3, but the deterioration diagnosis device 1 may be composed of a measurement unit 4 and a diagnosis unit 5. In that case, the measurement unit 4 acquires measurement data 14 of the operating status including the differential pressure of the ozone generator 10, and the diagnosis unit 5 diagnoses the deterioration state of the ozone generator 10 based on the differential pressure of the ozone generator 10 in the measurement data 14.

[0037] Furthermore, in this embodiment, an example has been shown in which the differential pressure is used when diagnosing the deterioration of the ozone generator 10, but the measurement unit 4 may acquire measurement data of the operating conditions including at least one of the inlet pressure and the outlet pressure of the ozone generator 10, and the diagnosis unit 5 may diagnose the deterioration state of the ozone generator based on at least one of the inlet pressure and the outlet pressure of the ozone generator 10. An example in which at least one of the inlet pressure and the outlet pressure is used will also be described in a later embodiment.

[0038] As described above, the deterioration diagnosis device 1 of the present embodiment includes the measurement unit 4 that acquires measurement data of the operating state including the pressure difference of the ozone generator 10, and the diagnosis unit 5 that diagnoses the deterioration state of the ozone generator 10 based on the pressure difference, thereby diagnosing the deterioration of the ozone generator 10. The deterioration diagnosis system 100 includes the ozone generator 10 and the deterioration diagnosis device 1. In this case, the deterioration diagnosis system 100 may include a monitoring control device (not shown) that monitors the operating state of the ozone generator 10 and controls the ozone generator 10. Alternatively, the deterioration diagnosis device 1 or the deterioration diagnosis system 100 may be incorporated into a monitoring control device that monitors and controls the entire ozone system, or may be incorporated into a monitoring control system that monitors and controls the entire water purification plant, factory, etc. On the other hand, the deterioration diagnosis device 1 may be located at a place far away from the ozone generator 10, and in that case, the measurement data of the ozone generator 10 may be exchanged online or offline.

[0039] According to the deterioration diagnosis device 1, deterioration diagnosis system 100, and deterioration diagnosis method of the present disclosure, by diagnosing the deterioration state of the ozone generator 10 based on the differential pressure of the ozone generator 10, it is possible to perform accurate deterioration diagnosis of the ozone generator 10 using a simple index.

[0040] Furthermore, according to the degradation diagnosis device 1, degradation diagnosis system 100, and degradation diagnosis method of the present disclosure, the differential pressure is corrected to a value assumed when the raw material gas flow rate is at the rated condition, so that even in an operating method in which the raw material gas flow rate is constantly changing, it is possible to evaluate the differential pressure under the same conditions, and there is an effect that degradation diagnosis of the ozone generator 10 can be performed accurately without being influenced by the local situation. Note that, in the first embodiment of the present disclosure, the differential pressure is corrected to a value assumed when the raw material gas flow rate is at the rated condition, but the inlet pressure or outlet pressure of the ozone generator 10 may be corrected to diagnose the degradation state.

[0041] In addition, in this embodiment, the raw material gas flow rate was corrected because an example of constant concentration / varying raw material flow rate operation was shown, but if the raw material flow rate is constant / varying concentration operation, it is not necessarily necessary to correct the raw material gas flow rate. However, even in the case of constant raw material flow rate / varying concentration operation, the raw material gas flow rate may deviate from the rated value (initial setting value) over time, so a correction may be made. In addition, by measuring the ozone generator cold water temperature or the ozone generator pressure instead of only correcting the raw material gas flow rate, a more accurate evaluation can be made by adding corrections for temperature and pressure.

[0042] Embodiment 2 In the second embodiment, the same components as those in the first embodiment of the present disclosure are designated by the same reference numerals, and the description of the same or corresponding parts is omitted. Hereinafter, a degradation diagnosis device 1b and a degradation diagnosis system 100b according to the second embodiment will be described with reference to the drawings.

[0043] 5 is a schematic configuration diagram showing a degradation diagnostic device according to embodiment 2 of the present disclosure. As shown in FIG. 5, degradation diagnostic device 1b includes a determination unit 6 in addition to the configuration of degradation diagnostic device 1.

[0044] The determination unit 6 determines the timing of maintenance of the ozone generator 10 using the differential pressure or the corrected differential pressure calculated by the diagnosis unit 5. For example, in the graph of Fig. 4, a threshold value indicating when maintenance is required is set, and the corrected differential pressure is compared with this threshold value, etc., to determine the timing of maintenance. Specifically, if the threshold value of the corrected differential pressure is 15 [kPa], it can be determined that maintenance is necessary when the graph of Fig. 4 reaches 15 [kPa]. Here, the maintenance work in this disclosure refers to open inspection, open cleaning, part replacement, repair, etc. of the ozone generator 10.

[0045] The determination unit 6 may also have a function of determining the timing of maintenance of the ozone generator 10 by using the differential pressure or the corrected differential pressure and a load level, which is information indicating the load condition of the ozone generator 10. The load level includes the discharge power, the input power to the power supply device, the output command value of the power supply device, etc. When viewed from the power supply device, the discharge power E [kW], which corresponds to the output power, the input power Ei [kW] to the power supply device, and the power supply efficiency er [%] have the relationship of the following formula (4).

[0046]

number

[0047] According to formula (4), for example, when the input power is obtained as the value of the measurement data 14, the input power can be regarded as the load level. If this load level is large, the load is high, and if it is small, the load is low. By simultaneously displaying such an index representing the load, it is highly possible to find a tendency that, for example, the differential pressure increases faster during a period of relatively high load than during a period of low load, although this is not shown in the figure. Therefore, by observing the aging change in performance degradation including the load, it is possible to make judgments such as "high load is expected in the future, so early maintenance is necessary even if the performance degradation threshold has not been reached at present" or "low load is expected in the future, so the performance degradation threshold has been reached but maintenance is not necessary immediately". Such advanced judgments can be easily made by a human by looking at a graph (such as FIG. 4) displayed by the diagnosis unit 5, for example, or can be made automatically by the diagnosis unit 6 using AI (artificial intelligence) or the like. In addition, by using a value obtained by accumulating the load level, it is possible to grasp the past usage status closer to the actual situation than a simple accumulated value of the operating time.

[0048] FIG. 6 is a graph showing an example of the corrected differential pressure and discharge power of the degradation diagnosis device according to the second embodiment of the present disclosure. The judgment unit 6 predicts the future differential pressure or corrected differential pressure of the ozone generator 10 based on the value of the corrected differential pressure or the performance degradation index according to the operating condition, and judges the timing of maintenance of the ozone generator 10. For example, as shown in FIG. 6, the judgment unit 6 first adds an approximation curve to the graph showing the aging change of the corrected differential pressure up to the present time in FIG. 4. The approximation curve is selected from linear approximation, quadratic function, cubic function, ..., etc., and the cubic function is selected here. Next, in FIG. 6, the future corrected differential pressure is predicted by extending the approximation curve showing the trend of the corrected differential pressure up to the present time. Therefore, it is possible to make a future prediction assuming that the performance degradation trend will continue. Therefore, for example, in a case where the next maintenance time is determined, it is possible to predict how much the performance will deteriorate by the next maintenance time by extending the approximation curve to that time.

[0049] In order to set the approximation curve correctly, for example, during periods when operation was stopped, in other words, periods during which the corrected differential pressure could not be calculated, the values ​​are left blank instead of being set to zero. Furthermore, in Fig. 6, for example, if the graph shows the entire period from the start of operation, the approximation curve is also set by approximating the entire period of the graph. However, the trend of differential pressure increase is not necessarily the same over the entire period. For example, if there is no increase in differential pressure for about two years from the start of operation (the point at the left end of the graph), and a trend of increasing differential pressure is observed after two years have passed, a more accurate future prediction can be made by setting the approximation curve only for the second year onwards. This kind of judgment is easy if a person looks at the graph and makes the judgment, and it is possible to use AI (artificial intelligence) to make it automatically by the system.

[0050] As described above, the deterioration diagnosis device 1b of the present embodiment includes the measurement unit 4 that acquires measurement data on the operating conditions including the pressure difference of the ozone generator 10, and the diagnosis unit 5 that diagnoses the deterioration state of the ozone generator 10 based on the pressure difference of the ozone generator 10, thereby diagnosing the deterioration of the ozone generator 10. Moreover, the deterioration diagnosis system 100b includes the ozone generator 10 and the deterioration diagnosis device 1b. Therefore, similar to the first embodiment, the deterioration diagnosis device 1b and the deterioration diagnosis system 100b of the present embodiment are also capable of diagnosing the deterioration of the ozone generator with a simple index.

[0051] Furthermore, in this embodiment, the determination unit 6 determines the time for maintenance of the ozone generator 10 by comparing the differential pressure or the corrected differential pressure with a threshold value, which has the effect of making it possible to determine the correct time for maintenance based on a definite trend of performance degradation, without being influenced by abnormal data or temporary fluctuations.

[0052] Furthermore, in this embodiment, the judgment unit 6 has a function of judging the timing of maintenance of the ozone generator 10 by using the load level, which is information indicating the load condition of the ozone generator 10, as well as the differential pressure or corrected differential pressure of the ozone generator 10, thereby achieving an effect of enabling judgment that is more suited to actual conditions.

[0053] Furthermore, in the diagnosis unit 5, deterioration diagnosis of the ozone generator 10 may be performed using a load level, which is information indicating the load condition of the ozone generator 10, together with the differential pressure or corrected differential pressure of the ozone generator 10. In this case as well, an effect of being able to make a judgment that is more appropriate to the actual situation can be obtained.

[0054] Furthermore, in this embodiment, the judgment unit 6 predicts the future corrected differential pressure of the ozone generator 10 based on the value of the corrected differential pressure or the performance degradation index according to the operating state, and judges the timing of maintenance of the ozone generator 10, thereby making it possible to judge the future deterioration state, the timing when maintenance is required, etc.

[0055] Embodiment 3 In the third embodiment, the same components as those in the first embodiment of the present disclosure are designated by the same reference numerals, and the description of the same or corresponding parts will be omitted. Hereinafter, a degradation diagnosis device 1c and a degradation diagnosis system 100c according to the third embodiment will be described with reference to the drawings.

[0056] The degradation diagnosis apparatus 1c and degradation diagnosis system of this embodiment include a case-related information acquisition unit 2, a case-specific information calculation unit 3, a measurement unit 4, and a diagnosis unit 5, similarly to the first embodiment.

[0057] Fig. 7 is a flowchart showing a degradation diagnosis method for a degradation diagnosis device according to embodiment 3 of the present disclosure. Fig. 7 is the same as the flowchart in Fig. 3 except that steps S301 and S302 have been added. First, in step S301, the diagnosis unit 5 calculates a corrected differential pressure magnification p, which is a ratio to the differential pressure under a certain operating condition, based on the case-related information 12 and the corrected differential pressure. This corrected differential pressure magnification p is expressed using the corrected differential pressure P' and the rated differential pressure Pr, as shown in equation (5).

[0058]

number

[0059] Here, the rated differential pressure may be a measured value of the gas system differential pressure of the ozone generator under rated operating conditions during factory testing or on-site adjustment, or a value (design value) based on design calculations. Here, an example is shown in which the rated differential pressure is input in step S101, but this is not limiting. As long as it can be standardized according to a certain standard, an average value for a certain period of time after the start of operation may be used as an initial value instead of the rated differential pressure.

[0060] Next, in step S302, the diagnosis unit 5 obtains a performance degradation index indicating the performance degradation of the ozone generator by the corrected differential pressure magnification, and diagnoses the deterioration state of the ozone generator using the performance degradation index. This performance degradation index α is determined by the corrected differential pressure magnification p, as shown in equation (6). In equation (6), the coefficients a, b, and c are constants.

[0061]

number

[0062] FIG. 8 is a graph showing an example of the performance degradation index, the corrected differential pressure magnification, and the discharge power of the degradation diagnosis device according to the third embodiment of the present disclosure. In FIG. 8, the performance degradation index is plotted when a=0, b=20, and c=−20. By comparing the performance degradation index, the corrected differential pressure magnification, and the discharge power, it is easy to understand how much the differential pressure has increased relative to the rated value or the initial value, and since there is no difference in the value itself depending on the case, as occurs when the corrected differential pressure is used as is, even when a threshold value is set to determine the maintenance timing, for example, it is possible to set a constant value regardless of the case. Furthermore, when converted into a performance degradation index, the performance degradation is zero at the beginning and can be treated as an index in which the performance degradation gradually increases, so that it can be matched with the image of the actual performance degradation of the ozone generator 10. Furthermore, since the value of the above example is a linear function, the degree of performance degradation is proportional to the increase in the corrected differential pressure magnification, but a quadratic function or a cubic function may be used to further emphasize the increase in the corrected differential pressure. By defining the performance degradation index in this manner, it can be treated as an index in which the change in the performance degradation index becomes significant as the corrected differential pressure increases, and therefore it can be set in accordance with the manufacturer's know-how.

[0063] As described above, the deterioration diagnosis device 1c of the present embodiment includes the measurement unit 4 that acquires measurement data on the operating conditions including the pressure difference of the ozone generator 10, and the diagnosis unit 5 that diagnoses the deterioration state of the ozone generator 10 based on the pressure difference of the ozone generator 10, thereby diagnosing the deterioration of the ozone generator 10. Moreover, the deterioration diagnosis system 100c includes the ozone generator 10 and the deterioration diagnosis device 1c. Therefore, similar to the first embodiment, the deterioration diagnosis device 1c and the deterioration diagnosis system 100c of the present embodiment are also capable of diagnosing the deterioration of the ozone generator with a simple index.

[0064] Furthermore, in the deterioration diagnosis device 1c of this embodiment, the diagnosis unit standardizes the differential pressure by a design value or an initial value, and the deterioration state of the ozone generator can be diagnosed using the standardized differential pressure. By diagnosing in this manner, the same effect as the corrected differential pressure is achieved, and the value itself does not differ depending on the case. Therefore, for example, even when a threshold value for determining the maintenance timing is set, it is possible to set the value to a constant value regardless of the case. Furthermore, by converting the corrected differential pressure into a performance degradation index by a function, it is possible to make it an index that matches the actual state of performance degradation. In this embodiment, the deterioration diagnosis of the ozone generator 10 using the performance evaluation index has been described, but the diagnosis unit 5 may diagnose the deterioration state of the ozone generator 10 using the corrected differential pressure magnification. Furthermore, in the third embodiment of the present disclosure, the case where the differential pressure is standardized by a design value or an initial value and the standardized differential pressure is used to diagnose the deterioration state of the ozone generator 10 has been shown, but the deterioration state of the ozone generator 10 may be diagnosed by standardizing the inlet pressure or the outlet pressure.

[0065] Furthermore, the degradation diagnosis device 1c of this embodiment may include the determination unit 6, as in the case of embodiment 2. In that case, by providing a function for determining a prediction using an approximation curve or a threshold value for the performance degradation index or the corrected differential pressure magnification, it becomes possible to determine the timing for maintenance of the ozone generator 10.

[0066] Embodiment 4 In the fourth embodiment, the same components as those in the first embodiment of the present disclosure are designated by the same reference numerals, and the description of the same or corresponding parts will be omitted. Hereinafter, a degradation diagnosis device 1d and a degradation diagnosis system 100d according to the fourth embodiment will be described with reference to the drawings.

[0067] As in the first embodiment, the degradation diagnosis apparatus 1d and degradation diagnosis system 100d of the present embodiment include a case-related information acquisition unit 2, a case-specific information calculation unit 3, a measurement unit 4, and a diagnosis unit 5. Note that the degradation diagnosis apparatus 1d and degradation diagnosis system 100d of the present embodiment are an example in which degradation diagnosis is performed using a pressure other than the differential pressure (inlet pressure or outlet pressure) when the raw material gas flow rate is constant. The following description focuses on the outlet pressure of the ozone generator 10, but the inlet pressure may also be used.

[0068] FIG. 9 is a schematic diagram showing the relationship between the ozone generator and pressure in the deterioration diagnosis device according to the fourth embodiment of the present disclosure. The compressor 41 draws in the atmosphere and turns it into high-pressure compressed air. The oxygen production device 42 is a pressure swing type called PSA that removes nitrogen from the compressed air and generates oxygen gas with an oxygen concentration of about 90% to 93%. The pressure reducing valve 43 reduces the pressure to make it almost constant. The pressure gauge 45 measures the gas pressure on the outlet side of the ozone generator. The flowmeter 46 measures the flow rate of the ozone-containing gas. The manual flow rate adjustment valve 47 allows the flow rate to be manually adjusted.

[0069] Next, the operation will be described with a focus on the pressure of this system. Since this is an ozone generation system for PSA feedstock, operation is performed with the feedstock flow rate constant and the concentration variable. First, the manual flow control valve 47 is adjusted so that a specified gas flow rate is generated by on-site adjustment at the start of operation, and thereafter operation is continued while maintaining this state. The feedstock gas flow rate is kept constant, and the generated ozone concentration is controlled by adjusting the power to the ozone generator 10 from the power supply device (not shown). The pressure profile of the system at this time is diagrammatically shown in the lower diagram of FIG. 9.

[0070] The positions (distances) on the horizontal axis correspond to the devices in the upper part of FIG. 9, as indicated by the dashed lines. As the name suggests, the pressure reducing valve 43 reduces the pressure significantly, and the secondary side, i.e., the pressure after pressure reduction, is kept almost constant. Although there is some pressure loss in the piping, this can be ignored compared to the pressure loss in the devices, so in this figure the piping is shown as being at a constant pressure, i.e., horizontal. There is also a slight pressure loss in the ozone generator 10 and the flowmeter 46, so the pressure drops, and the pressure is greatly reduced by the manual flow control valve 47 and supplied to the subsequent stage. The initial pressure is indicated by a solid line, and in principle this pressure profile does not change much even during subsequent operation, since the raw material gas flow rate is constant. However, if the pressure loss in the ozone generator 10 increases due to aging, the flow rate decreases slightly and the pressure profile changes as indicated by the dashed line in the figure.

[0071] Here, an example is shown in which the pressure loss of the ozone generator 10 is more than doubled per unit flow rate. In terms of the pressure loss of the entire system, the increase in pressure loss is slight, so the decrease in flow rate is slight. In the ozone generator 10, the pressure loss is more than doubled per unit flow rate, but since the flow rate is slightly reduced, the actual pressure loss is doubled. The pressure drop in the flowmeter 46 and the manual flow control valve 47 is reduced by the amount of the decrease in flow rate. In addition, the supply pressure (discharge pressure) to the subsequent stage depends on the usage form of the subsequent stage, but is the sum of the head pressure, etc. (constant pressure loss independent of the flow rate) and the pressure loss of the equipment, etc. (pressure loss dependent on the flow rate), and an example is shown in which it is slightly decreased. From the above, an increase in the pressure loss (differential pressure) of the ozone generator 10 appears as a decrease in the outlet pressure. Therefore, by measuring the outlet pressure of the ozone generator 10, the diagnostic unit 5 can diagnose the degree of increase in pressure loss (differential pressure) of the ozone generator 10, in other words, the degree of deterioration of the ozone generator 10, based on the outlet pressure of the ozone generator 10.

[0072] As described above, the deterioration diagnosis device 1d of the present embodiment includes the measurement unit 4 that acquires measurement data on the operating conditions including the outlet pressure of the ozone generator 10, and the diagnosis unit 5 that diagnoses the deterioration state of the ozone generator 10 based on the outlet pressure of the ozone generator 10, thereby diagnosing the deterioration of the ozone generator 10. In addition, the deterioration diagnosis system 100d includes the ozone generator 10 and the deterioration diagnosis device 1c. Therefore, similar to the first embodiment, the deterioration diagnosis device 1d and the deterioration diagnosis system 100d of the present embodiment are also capable of diagnosing the deterioration of the ozone generator with a simple index.

[0073] Furthermore, in the case of operation with the raw material flow rate constant and the concentration changing, if the pressure on the inlet side of the ozone generator 10 is kept almost constant, an increase in the differential pressure of the ozone generator appears in the outlet pressure, so that a decrease in the outlet pressure can be considered to be almost an increase in the differential pressure. Therefore, by measuring the outlet pressure of the ozone generator 10, the deterioration state of the ozone generator 10 can be diagnosed by the diagnosis unit 5 based on the outlet pressure of the ozone generator 10. In the deterioration diagnosis device and deterioration diagnosis system of this embodiment, as in the second and third embodiments, it can also be determined that it is time for maintenance if the pressure drops by, for example, a certain value or more. In addition, in this embodiment, there is an effect of reducing costs because it is not necessary to use a differential pressure gauge, which is relatively expensive.

[0074] In the above embodiment, an example using the outlet pressure has been shown, but the present invention is not limited to this. For example, in an operation in which the raw material flow rate is constant and the concentration is variable, when the outlet pressure is kept constant regardless of the flow rate, such as when the pressure loss on the outlet side is almost only the head pressure, in other words, when a manual flow control valve is provided on the inlet side and the initial flow rate adjustment is performed on the inlet side, when the pressure loss of the ozone generator increases, the pressure on the inlet side of the ozone generator increases by the amount of the decrease in the flow rate. Therefore, the same effect can be achieved by focusing on the increase in the inlet pressure of the ozone generator.

[0075] Embodiment 5. In the fifth embodiment, the same components as those in the first embodiment of the present disclosure are designated by the same reference numerals, and the description of the same or corresponding parts is omitted. Hereinafter, a degradation diagnosis device 1e and a degradation diagnosis system 100e according to the fifth embodiment will be described with reference to the drawings.

[0076] As in the first embodiment, the degradation diagnosis apparatus 1e and degradation diagnosis system 100e of the present embodiment include a case-related information acquisition unit 2, a case-specific information calculation unit 3, a measurement unit 4, and a diagnosis unit 5. Note that the degradation diagnosis apparatus 1e and degradation diagnosis system 100e of the present embodiment are an example in which degradation diagnosis is performed using something other than the differential pressure (inlet pressure or outlet pressure) in a configuration capable of controlling the source gas flow rate. The following description focuses on the inlet pressure of the ozone generator 10, but the outlet pressure may also be used.

[0077] Fig. 10 is a schematic diagram showing the relationship between the ozone generator and pressure in the degradation diagnosis device according to the fifth embodiment of the present disclosure. The automatic flow rate control valve 51 automatically adjusts the flow rate so that the indicated value of the flow meter 46 becomes a predetermined value. The pressure gauge 52 measures the inlet pressure of the raw material gas to the ozone generator. The back pressure control valve 53 operates to always keep the outlet pressure of the ozone generator 10 constant, and is, for example, a mechanical back pressure valve or an electronic back pressure control valve. Note that explanations of configurations that overlap with those in Fig. 9 will be omitted.

[0078] Next, the operation will be described with a focus on the pressure of this system. Here, for simplicity, the case of constant raw material flow rate and variable concentration control is described, but the control method during operation of the ozone generator 10 is not limited to this, and the raw material gas flow rate may be changed. During operation, the pressure on the outlet side of the ozone generator 10 is always kept constant by the back pressure regulating valve. Here, the case is shown in which the pressure loss in the subsequent stages is only the head pressure that does not depend on the gas flow rate, so the pressures after the outlet side of the ozone generator 10 are all kept the same regardless of the flow rate. Note that if the pressure loss in the subsequent stages is only the head pressure that does not depend on the gas flow rate and if the head pressure equivalent to the operating pressure of the ozone generator 10 is always applied, the back pressure regulating valve 53 is not necessary. However, here, the back pressure regulating valve 53 is provided to keep the outlet pressure of the ozone generator 10 at an appropriate value equal to or higher than the head pressure. At the beginning of operation, the pressure profile is, for example, as shown by the solid line. On the other hand, if the pressure loss, i.e., the differential pressure, of the ozone generator increases after a long period of operation, the gas flow rate starts to decrease, and so the automatic flow control valve 51 opens wider to prevent this, allowing the same flow rate to flow. As a result, the pressure drop at the automatic flow control valve 51 becomes smaller, resulting in a pressure profile as shown by the dashed line in the figure, and the inlet pressure of the ozone generator 10 increases. In other words, since an increase in the pressure loss (differential pressure) of the ozone generator 10 appears as an increase in the inlet pressure, by measuring the inlet pressure of the ozone generator 10, the diagnostic unit 5 can diagnose the degree of increase in the pressure loss (differential pressure) of the ozone generator 10, in other words, the degree of deterioration of the ozone generator 10, from the inlet pressure of the ozone generator 10.

[0079] As described above, the deterioration diagnosis device 1e of the present embodiment includes the measurement unit 4 that acquires measurement data on the operating conditions including the inlet pressure of the ozone generator 10, and the diagnosis unit 5 that diagnoses the deterioration state of the ozone generator 10 based on the inlet pressure of the ozone generator 10, thereby diagnosing the deterioration of the ozone generator 10. In addition, the deterioration diagnosis system 100e includes the ozone generator 10 and the deterioration diagnosis device 1c. Therefore, similar to the first embodiment, the deterioration diagnosis device 1e and the deterioration diagnosis system 100e of the present embodiment are capable of diagnosing the deterioration of the ozone generator with a simple index.

[0080] Furthermore, in the degradation diagnosis device 1e and degradation diagnosis system 100e of the present embodiment, an increase in the inlet pressure of the ozone generator 10 results in an increase in the differential pressure, so by measuring the inlet pressure of the ozone generator 10, the diagnosis unit 5 can diagnose the degradation state of the ozone generator 10 based on the inlet pressure of the ozone generator 10. In the degradation diagnosis device and degradation diagnosis system of the present embodiment, as in the second and third embodiments, it can also be determined that it is time for maintenance when the ozone generator 10 has deteriorated by, for example, a certain value or more. In addition, in the present embodiment, there is an effect of reducing costs because there is no need to use a differential pressure gauge, which is relatively expensive.

[0081] In addition, in this embodiment, the case of constant raw material flow rate / variable concentration control has been described, but in a system in which control can be performed to automatically set the flow rate to an arbitrary value using an automatic flow control valve, the same effect as monitoring the differential pressure of the ozone generator can be obtained by simply monitoring the inlet pressure of the ozone generator even in the case of constant concentration / variable raw material flow rate control. In this case, since the differential pressure of the ozone generator changes depending on the flow rate and the inlet pressure of the ozone generator also changes, if a concept such as the correction of the differential pressure described in embodiment 1 is introduced, the inlet pressure of the ozone generator 10 can be estimated assuming that the rated flow rate is reached at an arbitrary flow rate.

[0082] Furthermore, in this embodiment, an example in which the automatic flow rate control valve is located upstream of the ozone generator has been shown, but it may be located downstream of the ozone generator. For example, if a pressure reducing valve is located upstream of the ozone generator and the inlet pressure of the ozone generator is kept almost constant by this pressure reducing valve even if the raw material gas flow rate changes, an increase in the pressure loss (differential pressure) of the ozone generator appears as a decrease in the outlet pressure of the ozone generator, so that deterioration diagnosis can also be performed by measuring the outlet pressure. However, when the raw material gas flow rate changes, it is preferable to introduce a concept such as the correction of the differential pressure described in the first embodiment, as in the case of using the inlet pressure.

[0083] Further, the deterioration of the ozone generator 10 in the present disclosure is not necessarily irreversible, but also includes cases where the deterioration can be restored by maintenance such as cleaning or part replacement.

[0084] In addition, this disclosure basically focuses on the change in the performance evaluation index over time. Although it is not specifically stated, the concept of time is included here, and the cumulative time during the operation period also has an impact.

[0085] Furthermore, generally, diagnosis often includes judgment, but in this disclosure, diagnosis is distinguished from judgment and is used as data processing, data output, etc. for judgment.

[0086] In the above first to fifth embodiments, the differential pressure, inlet pressure, or outlet pressure of the ozone generator is combined with an index related to the load of the ozone generator to diagnose deterioration and determine the timing of maintenance. However, it may be combined with an index that indicates a performance completely different from the pressure relationship, such as ozone generation efficiency or power consumption. The configurations shown in the above embodiments are examples of the contents of the present disclosure, and may be combined with other known techniques. Furthermore, part of the configuration may be omitted or modified without departing from the gist of the present disclosure.

[0087] Various aspects of the present disclosure are summarized below as appendices. (Appendix 1) A measurement unit for acquiring measurement data representing an operating condition including a differential pressure between an inlet and an outlet of a gas system of the ozone generator, an inlet pressure, or an outlet pressure; and a diagnosis unit that diagnoses a deterioration state of the ozone generator based on the differential pressure, the inlet pressure, or the outlet pressure. (Appendix 2) a case-related information acquisition unit that acquires case-related information including information on a certain operating condition of the ozone generator; 2. The deterioration diagnosis device according to claim 1, wherein the diagnosis unit corrects the measurement data of the differential pressure, the inlet pressure or the outlet pressure to a value assumed to be under rated conditions based on the case-related information and the measurement data, and diagnoses a deterioration state of the ozone generator using this corrected differential pressure, inlet pressure or outlet pressure. (Appendix 3) 3. The deterioration diagnosis device according to claim 1, wherein the diagnosis unit normalizes the measurement data of the differential pressure, the inlet pressure, or the outlet pressure by a design value or an initial value, and diagnoses a deterioration state of the ozone generator using the normalized differential pressure, inlet pressure, or outlet pressure. (Appendix 4) 4. The degradation diagnosis device according to claim 1, wherein the diagnosis unit determines a performance degradation index indicating a performance degradation of the ozone generator from the measurement data of the differential pressure, the inlet pressure, or the outlet pressure, and diagnoses a degradation state of the ozone generator using the performance degradation index. (Appendix 5) 5. The degradation diagnosis device according to claim 1, further comprising: a diagnostic unit that outputs a load level, which is information indicating a load status of the ozone generator. (Appendix 6) and a determination unit that determines a time for maintenance of the ozone generator using the differential pressure, the inlet pressure, or the outlet pressure. (Appendix 7) 7. The deterioration diagnosis device according to claim 6, wherein the judgment unit predicts a future differential pressure, inlet pressure, or outlet pressure of the ozone generator based on a value of the differential pressure, the inlet pressure, or the outlet pressure according to the operating status, and judges a timing for the maintenance of the ozone generator. (Appendix 8) 8. The deterioration diagnosis device according to claim 6, wherein the judgment unit judges the timing of the maintenance of the ozone generator using the differential pressure, the inlet pressure, or the outlet pressure, and a load level which is information indicating a load condition of the ozone generator. (Appendix 9) An ozone generator; a measurement unit for acquiring measurement data of an operating condition including a differential pressure between an inlet and an outlet of a gas system of the ozone generator, an inlet pressure, or an outlet pressure; a diagnosis unit that diagnoses a deterioration state of the ozone generator based on the differential pressure, the inlet pressure, or the outlet pressure. (Appendix 10) 10. The deterioration diagnosis system according to claim 9, further comprising a monitor and control device that monitors an operating status of an item in which the ozone generator is used and controls the ozone generator. (Appendix 11) Obtaining measurement data of operating conditions including a pressure difference between an inlet and an outlet of a gas system of the ozone generator, an inlet pressure, or an outlet pressure; and diagnosing a deterioration state of the ozone generator based on the differential pressure, the inlet pressure, or the outlet pressure. [Explanation of symbols]

[0088] 1 1b 1c 1d 1e Deterioration diagnosis device, 2 case-related information acquisition unit, 3 case-specific information calculation unit, 4 measurement unit, 5 diagnosis unit, 6 judgment unit, 10 ozone generator, 12 case-related information, 13 case-specific information, 14 measurement data, 21 input device, 22 computer, 23 CPU, 24 main memory device, 25 auxiliary memory device, 26 network, 27 external memory device, 28 output device, 41 compressor, 42 oxygen production device, 43 pressure reducing valve, 45 52 pressure gauge, 46 flow meter, 47 manual flow control valve, 51 automatic flow control valve, 53 back pressure control valve, 100 100b 100c 100d 100e Deterioration diagnosis system

Claims

1. A measurement unit for acquiring measurement data representing an operating condition including a differential pressure between an inlet and an outlet of a gas system of the ozone generator, an inlet pressure, or an outlet pressure; a diagnosis unit that diagnoses a deterioration state of the ozone generator based on the differential pressure, the inlet pressure, or the outlet pressure.

2. a case-related information acquisition unit that acquires case-related information including information on a certain operating condition of the ozone generator; 2. The degradation diagnosis device according to claim 1, wherein the diagnosis unit corrects the measurement data of the differential pressure, the inlet pressure or the outlet pressure to a value assumed to be a rated condition based on the case-related information and the measurement data, and diagnoses a degradation state of the ozone generator using the corrected differential pressure, inlet pressure or outlet pressure.

3. 3. The deterioration diagnosis device according to claim 1, wherein the diagnosis unit normalizes the measurement data of the differential pressure, the inlet pressure, or the outlet pressure by a design value or an initial value, and diagnoses a deterioration state of the ozone generator using the normalized differential pressure, inlet pressure, or outlet pressure.

4. 3. The degradation diagnosis device according to claim 1, wherein the diagnosis unit determines a performance degradation index indicating a performance degradation of the ozone generator from the measurement data of the differential pressure, the inlet pressure, or the outlet pressure, and diagnoses a degradation state of the ozone generator using the performance degradation index.

5. 3. The deterioration diagnosis device according to claim 1, further comprising: a diagnostic unit that outputs a load level, which is information indicating a load state of the ozone generator.

6. 3. The deterioration diagnosis device according to claim 1, further comprising a determination unit that determines a time for maintenance of the ozone generator using the differential pressure, the inlet pressure, or the outlet pressure.

7. 7. The deterioration diagnosis device according to claim 6, wherein the determination unit predicts a future differential pressure, inlet pressure, or outlet pressure of the ozone generator based on a value of the differential pressure, the inlet pressure, or the outlet pressure according to the operating condition, and determines a timing for the maintenance of the ozone generator.

8. 7. The deterioration diagnosis device according to claim 6, wherein the determination unit determines the timing for maintenance of the ozone generator by using the differential pressure, the inlet pressure, or the outlet pressure, and a load level which is information indicating a load condition of the ozone generator.

9. An ozone generator; a measurement unit for acquiring measurement data of an operating condition including a differential pressure between an inlet and an outlet of a gas system of the ozone generator, an inlet pressure, or an outlet pressure; a diagnosis unit that diagnoses a deterioration state of the ozone generator based on the differential pressure, the inlet pressure, or the outlet pressure.

10. The deterioration diagnosis system according to claim 9 , further comprising a monitoring and control device that monitors an operating condition of a project in which the ozone generator is used and controls the ozone generator.

11. Obtaining measurement data of operating conditions including a pressure difference between an inlet and an outlet of a gas system of the ozone generator, an inlet pressure, or an outlet pressure; and diagnosing a deterioration state of the ozone generator based on the differential pressure, the inlet pressure, or the outlet pressure.

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