Mirror oscillation device and lidar device

Abstract

To provide a mirror oscillation device capable of reducing a body size of a mirror part in an oscillation axial center direction, and increasing a ratio occupied by the mirror part to the body size in the axial direction.SOLUTION: A mirror part 10 has a mirror surface 11 reflecting light. An extension part 20 extends from a rear surface 12 of the mirror part 10 to an opposite side of the mirror surface 11. A shaft 30 is fixed to the extension part 20. A pedestal 40 is provided on a region opposite side to the mirror surface 11, with respect to the mirror part 10. A bearing 50 is provided on the pedestal 40 in an axial center direction of the shaft 30 to the extension part 20, and rotatably supports the shaft 30 to the pedestal 40. The mirror part 10 can oscillate in a prescribed angle range around an axial center CL of the shaft 30, with the shaft 30 and the extension part 20. At least parts of the bearing 50 and the bearing 40 are provided on a region opposite to the mirror surface 11 with respect to the mirror part 10, and in a height range H1 of the mirror part 10 in the axial center direction of the shaft 30.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present disclosure relates to a mirror oscillation device and a LiDAR device including the same. [Background technology]

[0002] Conventionally, a mirror oscillating device is known that is used as one component of LiDAR devices. LiDAR is an abbreviation of Light Detection and Ranging, or Laser Imaging Detection and Ranging. LiDAR is a technology that irradiates a laser beam and measures the distance to an object and the shape of the object based on the information of the reflected light.

[0003] The mirror rocking device described in Patent Document 1 has a configuration in which a shaft is fixed in a hole provided in the center of the mirror in the plate thickness direction, and two bearings, an actuator, and a rotation angle sensor are provided on the portion of the shaft that protrudes from the mirror. In detail, a bearing and an actuator on one side are provided on the portion of the shaft that protrudes from the mirror to one side, and a bearing and a rotation angle sensor on the other side are provided on the portion of the shaft that protrudes from the mirror to the other side. In Patent Document 1, the shaft is called an axis portion, and the actuator is called a drive unit. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2022-30904 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, the mirror rocking device described in Patent Document 1 has an actuator, a bearing on one side, a mirror section, a bearing on the other side, and a rotation angle sensor arranged in series in the direction in which the axis of the shaft extends (hereinafter referred to as the "axis direction"), which makes the size of the mirror rocking device in the axis direction larger. Also, the proportion of the mirror surface of the mirror section to the size of the mirror rocking device in the axis direction is small.

[0006] Therefore, in a LiDAR device using the mirror rocking device described in Patent Document 1, the size of the mirror part in the axial direction of the rocking of the mirror part increases with the size of the mirror rocking device, and the proportion of the mirror surface of the mirror part to the size of the device becomes small. If such a LiDAR device is mounted on the roof of a vehicle, for example, the roof top will have a convex shape that protrudes significantly above the vehicle due to the size of the LiDAR device, which will increase the air resistance when the vehicle is running and cause problems such as a deterioration in fuel efficiency or electricity consumption. Alternatively, the LiDAR device will protrude significantly from the roof into the vehicle interior, causing problems such as a loss of forward visibility for the driver.

[0007] One possible solution to these two problems is to reduce the size of the mirror in the axial direction. However, reducing the size of the mirror will reduce the spot diameter of the laser light, which could result in a deterioration in performance, such as a worsening of the signal-to-noise ratio and a reduced distance measurement range.

[0008] In view of the above, an object of the present disclosure is to reduce the size of a mirror part in an axial direction of oscillation of the mirror part in a mirror oscillation device, and to increase the proportion of the mirror part in the axial direction of the mirror oscillation device. [Means for solving the problem]

[0009] According to one aspect of the present disclosure, a mirror rocking device includes: A mirror portion (10) having a mirror surface (11) that reflects light; an extension portion (20) extending from a surface (12) of the mirror portion opposite the mirror surface to the opposite side to the mirror surface; A shaft (30) fixed to the extension portion; a base (40) provided in an area opposite to the mirror surface of the mirror portion; a bearing (50) provided on the base in the axial direction of the shaft relative to the extension portion and supporting the shaft rotatably relative to the base; The mirror portion can be swung within a predetermined angle range around the axis (CL) of the shaft together with the shaft and the extension portion, At least a part of the bearing and at least a part of the base are provided in a region of the mirror portion opposite the mirror surface and within a height range (H1) of the mirror portion in the axial direction of the shaft.

[0010] According to this, by utilizing the area of ​​the mirror part opposite to the mirror surface to place the bearing and the base, the size of the mirror part in the axial direction of the mirror part's oscillation can be reduced in the mirror oscillation device. Furthermore, the proportion of the mirror surface of the mirror part to the size of the mirror oscillation device in the axial direction can be increased. Therefore, the LiDAR device using this mirror oscillation device can reduce the size of the mirror part in the axial direction, in other words, the size in the direction perpendicular to the direction in which the mirror part oscillates. Therefore, when the LiDAR device is mounted on the roof of a vehicle, for example, it is possible to prevent the roof top from becoming a convex shape that protrudes greatly above the vehicle, or to prevent the LiDAR device from protruding greatly from the roof into the vehicle cabin. Furthermore, the LiDAR device using this mirror oscillation device can increase the spot diameter of the laser light by increasing the size of the mirror surface of the mirror part, thereby improving the signal-to-noise ratio and expanding the distance measurement range.

[0011] According to another aspect of the present disclosure, a LiDAR device includes: A housing (3) having a window (8) that transmits laser light; A mirror rocking device (1) according to the above aspect, which is provided inside a housing; a light source device (4) provided inside the housing and configured to irradiate a laser beam onto a mirror surface of a mirror portion provided in the mirror oscillation device; The laser beam is scanned by the mirror surface of the mirror part of the mirror oscillation device and irradiated to the outside through a window in the housing, and then reflected by an external object, returns through the window in the housing, and is again reflected by the mirror surface of the mirror part. A light receiving device (5) is provided inside the housing.

[0012] According to this, by including the mirror oscillation device described in the one aspect above, the LiDAR device can reduce the size of the LiDAR device in the axial direction of the oscillation of the mirror part, in other words, the size of the LiDAR device in the direction perpendicular to the direction of the oscillation of the mirror part. Therefore, when the LiDAR device is mounted on the roof of a vehicle, for example, it is possible to prevent the roof top from protruding significantly above the vehicle, or to prevent the LiDAR device from protruding significantly from the roof into the vehicle cabin. In addition, by including the mirror oscillation device described in the one aspect above, the LiDAR device can increase the spot diameter of the laser light, thereby improving the signal-to-noise ratio and expanding the distance measurement range.

[0013] The reference symbols in parentheses attached to each component indicate an example of the correspondence between the component and specific components described in the embodiments described below. [Brief description of the drawings]

[0014] [Figure 1] FIG. 1 is a perspective view showing the internal configuration of a LiDAR device using a mirror rocking device according to a first embodiment. [Diagram 2] FIG. 1 is a diagram showing an example in which a LiDAR device is mounted on the roof of a vehicle. [Diagram 3] FIG. 13 is a diagram showing another example in which a LiDAR device is mounted on the roof of a vehicle. [Figure 4] 1 is a perspective view of a mirror rocking device according to a first embodiment. [Diagram 5] 5 is a side view of the mirror rocking device as seen from a direction V in FIG. 4. [Figure 6] 6 is a front view of the mirror rocking device as seen from a direction VI in FIG. 4. [Figure 7] 7 is a plan view of the mirror rocking device as seen from a VII direction in FIG. [Figure 8] 8 is a bottom view of the mirror rocking device as viewed from the VIII direction in FIG. 4. [Figure 9] 7 is a cross-sectional view of the mirror rocking device taken along line IX-IX in FIG. 6. [Figure 10] 6 is a cross-sectional view of the mirror rocking device taken along line XX in FIG. 5. [Figure 11] 3 is a rear view of a mirror section and an extension section included in the mirror rocking device according to the first embodiment. FIG. [Figure 12] 12 is a side view of the mirror section and the extending section as viewed from the XII direction in FIG. 11. [Figure 13] 13 is a plan view of the mirror section and the extending section as viewed from the XIII direction in FIG. 11. [Figure 14] FIG. 2 is a plan view for explaining the operation of the mirror rocking device according to the first embodiment. [Figure 15] FIG. 2 is a plan view for explaining the operation of the mirror rocking device according to the first embodiment. [Figure 16] FIG. 2 is a plan view for explaining the operation of the mirror rocking device according to the first embodiment. [Figure 17] FIG. 2 is a plan view for explaining the operation of the mirror rocking device according to the first embodiment when used in a LiDAR device. [Figure 18] FIG. 2 is a plan view for explaining the operation of the mirror rocking device according to the first embodiment when used in a LiDAR device. [Figure 19] FIG. 2 is a plan view for explaining the operation of the mirror rocking device according to the first embodiment when used in a LiDAR device. [Figure 20] FIG. 2 is a plan view for explaining the operation of the mirror rocking device according to the first embodiment when used in a LiDAR device. [Figure 21] 13 is a rear view of a mirror portion, an extension portion, and a counterweight provided in the mirror rocking device according to the second embodiment. FIG. [Figure 22] 22 is a side view of the mirror portion, the extension portion, and the counterweight as viewed from the XXII direction in FIG. 21. [Diagram 23]23 is a plan view of the mirror portion, the extension portion, and the counterweight as viewed from the XXIII direction in FIG. 21. [Figure 24] 13 is a plan view of a mirror portion, an extension portion, and a counterweight provided in a mirror rocking device according to a third embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the following embodiments, the same or equivalent parts are denoted by the same reference numerals, and the description thereof will be omitted.

[0016] (First embodiment) The first embodiment will be described with reference to the drawings. As shown in Fig. 1, a mirror oscillation device 1 of the first embodiment is used in a LiDAR device 2 or the like. Inside a housing 3 provided in the LiDAR device 2, the mirror oscillation device 1, a light source device 4 that irradiates laser light, and a light receiving device 5 that receives the laser light are provided. Note that in Fig. 1, only the outline of the housing 3 is shown so that the inside of the housing 3 can be seen.

[0017] The LiDAR device 2 reflects the laser light emitted from the light source device 4 on the mirror surface 11 of the mirror unit 10 of the mirror oscillation device 1, scans the laser light, and emits it to the outside through the window 8 of the housing 3. The laser light reflected by an external object and returning through the window 8 of the housing 3 is reflected again on the mirror surface 11 of the mirror unit 10 and received by the light receiving device 5. The LiDAR device 2 detects the distance and direction to the object from the time difference between the time the laser light is emitted and the time it is received. The LiDAR device 2 may also detect the moving speed of the object from the change in frequency between the transmitted wave and the received wave.

[0018] Incidentally, in the LiDAR device 2, if the spot diameter 7 where the laser light hits the mirror surface 11 of the mirror unit 10 is small, for example, when raindrops or the like adhere to the window 8 of the housing 3 of the LiDAR device 2, the laser light may be diffused and not irradiated to the outside. In contrast, if the mirror surface 11 of the mirror unit 10 is made larger and the spot diameter 7 of the laser light is accordingly made larger, the spot diameter 7 of the laser light can be made larger than the raindrops or the like, and at least a part of the laser light can be irradiated to the outside. Therefore, the LiDAR device 2 can improve the signal-to-noise ratio by increasing the spot diameter 7 of the laser light.

[0019] As shown in FIG. 2 and FIG. 3, the LiDAR device 2 may be mounted on the roof 6 of a vehicle, for example. In that case, if the size LH of the LiDAR device 2 is increased by using a mirror rocking device such as that of the above-mentioned Patent Document 1, the roof top will have a convex shape that protrudes significantly above the vehicle, as shown in FIG. 2. This causes problems such as increased air resistance during vehicle travel and worsening fuel efficiency or power consumption. Alternatively, as shown in FIG. 3, the LiDAR device 2 protrudes significantly from the roof 6 into the vehicle cabin, causing problems such as impaired forward visibility for the driver. Note that, as shown in FIG. 1, the size LH of the LiDAR device 2 is the size LH in the axial direction of the mirror unit 10 in the LiDAR device 2, in other words, the size LH in the direction perpendicular to the direction in which the mirror unit 10 rocks.

[0020] To solve these problems, if the mirror surface 11 of the mirror unit 10 is made smaller, the spot diameter 7 of the laser light will become smaller, resulting in a deterioration in the signal-to-noise ratio and a decrease in the distance measurement range, which will cause a decrease in performance. Therefore, the mirror rocking device 1 used in the LiDAR device 2 is required to reduce the size of the mirror unit 10 in the axial direction of the rocking and to increase the proportion of the mirror unit 10 in the size. In the following description, the size of the mirror unit 10 in the axial direction of the rocking of the mirror unit 10 in the mirror rocking device 1 may be simply referred to as the "size of the mirror rocking device 1 in the axial direction." By reducing the size of the mirror rocking device 1 in the axial direction, the size LH of the mirror unit 10 in the LiDAR device 2 in the axial direction, in other words, the size LH in the direction perpendicular to the direction in which the mirror unit 10 rocks, can be reduced.

[0021] As shown in FIGS. 4 to 10, the mirror rocking device 1 of the first embodiment of the present disclosure includes a mirror portion 10, an extension portion 20, a shaft 30, a base 40, a bearing 50, an actuator 60, and a sensor .

[0022] The mirror section 10 is formed in a plate shape, and has a mirror surface 11 that reflects light over the entire surface of one surface facing in the thickness direction.

[0023] As shown in Figs. 5, 9 and 11 to 13, an extension 20 is provided on the surface of mirror section 10 opposite mirror surface 11 (hereinafter referred to as "rear surface 12 of mirror section 10"). Extension 20 extends from rear surface 12 of mirror section 10 to the opposite side of mirror surface 11. When viewed from the direction in which axis CL of shaft 30 extends, extension 20 has a shape in which the area of ​​a portion connected to rear surface 12 of mirror section 10 is large and the area gradually decreases with increasing distance from rear surface 12 of mirror section 10. A hole 21 through which shaft 30 is inserted is provided in extension 20 at a position away from rear surface 12 of mirror section 10.

[0024] The shaft 30 is inserted through a hole 21 in the extension portion 20 and fixed to the extension portion 20. A predetermined distance D1 is provided between the rear surface 12 of the mirror portion 10 and the shaft 30. In the following description, the direction in which the axis CL of the shaft 30 extends is simply referred to as the "axial direction." For ease of description, the upper side of the paper in Figs. 4 to 6, 9, 11, and 12 is referred to as "one side of the axial direction," and the lower side of the paper is referred to as "the other side of the axial direction."

[0025] 4, 8 and 9, the bearings 50 are provided on one side in the axial direction of the extending portion 20 and the other side in the axial direction of the extending portion 20. Of the two bearings 50, the one provided on one side in the axial direction of the extending portion 20 is called the first bearing 51, and the one provided on the other side in the axial direction of the extending portion 20 is called the second bearing 52. Both the first bearing 51 and the second bearing 52 are provided on the base 40, and support the shaft 30 rotatably relative to the base 40. A radial thickness D2 of the bearing 50 is smaller than a distance D1 between the rear surface 12 of the mirror section 10 and the shaft 30. Therefore, the bearing 50 can be provided in a region of the mirror section 10 opposite the mirror surface 11, in a height range H1 of the mirror section 10 in the axial direction. In the following description, the region of the mirror section 10 opposite the mirror surface 11 is referred to as the "rear region of the mirror section 10."

[0026] The base 40 is provided in the rear surface region of the mirror section 10. The base 40 has a first base portion 41 on which a first bearing 51 is provided, a second base portion 42 on which a second bearing 52 is provided, and a connecting portion 43 that connects the first base portion 41 and the second base portion 42. The connecting portion 43 connects a portion of the first base portion 41 opposite the mirror section 10 to a portion of the second base portion 42 opposite the mirror section 10. The connecting portion 43 extends further to one side in the axial direction than the first base portion 41.

[0027] Here, by providing at least a part of the bearing 50 and at least a part of the base 40 in the height range H1 of the mirror section 10 in the axial direction, the size of the mirror rocking device 1 in the axial direction can be made smaller than the configuration of the above-mentioned Patent Document 1. Preferably, as in the first embodiment, by providing the entire bearing 50 and the entire base 40 in the height range H1 of the mirror section 10 in the axial direction, the size of the mirror rocking device 1 in the axial direction can be made more compact. Specifically, with respect to the outer edge 13 on one side of the mirror section 10 in the axial direction, the outer edge 46 on one side of the axial direction of the connecting section 43 of the base 40 and the outer edge 56 on one side of the axial direction of the first bearing 51 are located at the same height or on the other side in the axial direction. Furthermore, the outer edge 47 of the second base portion 42 on the other side in the axial direction and the outer edge 57 of the second bearing 52 on the other side in the axial direction are located at the same height or on one side in the axial direction relative to the outer edge 14 of the mirror portion 10 on the other side in the axial direction. This allows the axial size of the mirror rocking device 1 to be further reduced. In this disclosure, "the same height" includes not only exactly the same height, but also substantially the same height, for example, including manufacturing tolerances.

[0028] As shown in Figures 4, 5, 7, 9 and 10, the actuator 60 is provided in the rear surface region of the mirror section 10. The actuator 60 is a drive device that drives the mirror section 10, together with the shaft 30 and the extension section 20, to oscillate within a predetermined angle range around the axis CL of the shaft 30. The actuator 60 is disposed in an area of ​​the first pedestal section 41 on the opposite side to the second pedestal section 42. This makes it possible to easily assemble the actuator 60 to a sub-assembly in which the pedestal 40, the bearing 50, the shaft 30 and the mirror section 10 are assembled during the manufacturing process of the mirror oscillation device 1.

[0029] The actuator 60 has a magnet 61, a stator 62, and an electromagnetic coil 63. The magnet 61 is formed in an annular shape, and the shaft 30 is inserted into a hole 64 in the center of the magnet 61. The magnet 61 is fixed to the shaft 30. In detail, the magnet 61 is fixed to a portion of the shaft 30 extending from the first bearing 51 to one side in the axial direction. The magnet 61 may be directly fixed to the shaft 30, or may be fixed to the shaft 30 via a holder 73. The magnet 61 is magnetized with S poles and N poles alternately in the circumferential direction about the axis CL of the shaft 30. In the first embodiment, the magnet 61 is magnetized with one S pole and one N pole in the circumferential direction about the axis CL of the shaft 30.

[0030] The stator 62 is made of a magnetic material and constitutes a magnetic circuit between the electromagnetic coil 63 and the magnet 61. The stator 62 has a core portion 65 and a yoke portion 66. The electromagnetic coil 63 is provided on the outside of the core portion 65. The yoke portion 66 connects one end of the core portion 65 to the other end of the core portion 65, and has a hole 67 where the magnet 61 is disposed. The inner wall of the hole 67 in the yoke portion 66 is not in contact with the magnet 61. The yoke portion 66 is fixed to a portion of the connecting portion 43 of the base 40 that extends to one side in the axial direction beyond the first base portion 41.

[0031] When a current is applied to the electromagnetic coil 63, a magnetic field generated in the electromagnetic coil 63 causes a magnetic flux to flow in the stator 62. Specifically, when a current is applied in a predetermined direction to a wiring (not shown) of the electromagnetic coil 63, a magnetic flux flows from one side of the core portion 65 through the yoke portion 66 to the other side of the core portion 65 as shown by solid arrows A and B in Fig. 10, thereby rotating the magnet 61. Note that in Fig. 10, as shown by solid arrow C, the N pole of the magnet 61 rotates toward the part of the yoke portion 66 on the right side in Fig. 10. Therefore, as shown by solid arrow D, the mirror portion 10 swings by a predetermined angle together with the shaft 30.

[0032] On the other hand, when a current is passed through the wiring of the electromagnetic coil 63 in a direction opposite to the predetermined direction, magnetic flux flows from the other side of the core portion 65 through the yoke portion 66 to one side of the core portion 65, as shown by dashed arrows E and F in Fig. 10, causing the magnet 61 to rotate. Note that in Fig. 10, as shown by dashed arrow G, the N pole of the magnet 61 rotates toward the part of the yoke portion 66 on the left side in Fig. 10. Therefore, as shown by dashed arrow H, the mirror portion 10 swings by a predetermined angle together with the shaft 30.

[0033] 14 to 16 show the angular range of the mirror section 10. As shown by the arrow I in FIG. 14, the maximum angle at which the mirror section 10 oscillates counterclockwise as viewed from one side of the axial direction is called the first angle. As shown by the arrow J in FIG. 16, the maximum angle at which the mirror section 10 oscillates clockwise is called the second angle. As shown in FIG. 15, the central angle between the first angle and the second angle is called the third angle. In the mirror oscillation device 1 of the first embodiment, the first angle shown in FIG. 14 is, for example, −35 deg, the second angle shown in FIG. 16 is, for example, +35 deg, and the third angle shown in FIG. 15 is, for example, 0 deg. Therefore, the mirror oscillation device 1 of the first embodiment is configured so that the mirror section 10 oscillates in the range from −35 deg to +35 deg.

[0034] As shown in Fig. 4 and Fig. 8, the surfaces 44, 45 of the base 40 facing the mirror unit 10 are inclined from a portion closer to the shaft 30 to a portion farther from the shaft 30, in a direction away from the mirror unit 10 in the state where the mirror unit 10 is at the third angle. This prevents interference between the base 40 and the mirror unit 10 when the actuator 60 drives the mirror unit 10 to swing. Note that the surfaces 44, 45 of the base 40 facing the mirror unit 10 are not limited to flat inclined surfaces as shown in Fig. 4 and Fig. 8, but may be curved inclined surfaces. Note that, although not shown, a magnetic or mechanical stopper may be provided between the inclined surfaces of the base 40 and the back surface 12 of the mirror unit 10.

[0035] 4, 7 and 10, the surface 68 of the stator 62 facing the mirror unit 10 is inclined from a portion closer to the shaft 30 to a portion farther from the shaft 30, in a direction away from the mirror unit 10 at the third angle. This prevents interference between the stator 62 and the mirror unit 10 when the actuator 60 drives the mirror unit 10 to swing. Note that the surface 68 of the stator 62 facing the mirror unit 10 is not limited to a flat inclined surface as shown in FIGS. 4, 7 and 10, and may be a curved inclined surface.

[0036] Here, by providing at least a part of the actuator 60 in the height range H1 of the mirror section 10 in the axial direction, the size of the mirror rocking device 1 in the axial direction can be made smaller than the configuration of the above-mentioned Patent Document 1. Preferably, as in the first embodiment, by providing the entire actuator 60 in the height range H1 of the mirror section 10 in the axial direction, the size of the mirror rocking device 1 in the axial direction can be made smaller. Specifically, the outer edge 601 of the actuator 60 on one side in the axial direction is located at the same height or on the other side in the axial direction with respect to the outer edge 13 on one side in the axial direction of the mirror section 10. Also, the outer edge 602 of the actuator 60 on the other side in the axial direction is located at the same height or on one side in the axial direction with respect to the outer edge 14 on the other side in the axial direction of the mirror section 10. This makes it possible to make the size of the mirror rocking device 1 in the axial direction more compact.

[0037] The sensor 70 is provided in the rear region of the mirror unit 10. The sensor 70 is a rotation angle sensor that detects the angle of the mirror unit 10 with respect to the base 40. In the first embodiment, for example, a rotary encoder is used as the sensor 70. As shown in FIG. 5 and FIG. 9, the rotary encoder has a rotating disk 71 and a detection element 72. The rotating disk 71 is fixed to a holder 73 provided at a portion of the shaft 30 extending from the magnet 61 to one side in the axial direction, and rotates together with the shaft 30 and the holder 73. The detection element 72 is, for example, a photo IC, and is mounted on a substrate 74. The substrate 74 is fixed to a portion of the connecting portion 43 of the base 40 extending further to one side in the axial direction than the first base portion 41. The substrate 74 and the detection element 72 are shown only in FIG. 5 and FIG. 9, and are omitted in other figures.

[0038] Here, by providing at least a part of the sensor 70 in the height range H1 of the mirror section 10 in the axial direction, the size of the mirror rocking device 1 in the axial direction can be made smaller than the configuration of the above-mentioned Patent Document 1. Preferably, as in the first embodiment, by providing the entire sensor 70 in the height range H1 of the mirror section 10 in the axial direction, the size of the mirror rocking device 1 in the axial direction can be made smaller. Specifically, the outer edge 75 of the sensor 70 on one side in the axial direction is located at the same height or on the other side in the axial direction with respect to the outer edge 13 on one side in the axial direction of the mirror section 10. Also, the outer edge 76 of the sensor 70 on the other side in the axial direction is located at the same height or on one side in the axial direction with respect to the outer edge 14 on the other side in the axial direction of the mirror section 10. This makes it possible to make the size of the mirror rocking device 1 in the axial direction more compact.

[0039] As shown in Fig. 17, the LiDAR device 2 using the mirror oscillation device 1 of the first embodiment can irradiate the laser light to the outside while scanning it in a predetermined angle range θ (for example, a maximum range of 140 deg). As shown by the arrow K, the light source device 4 provided in the housing 3 irradiates the laser light to the mirror unit 10 from outside the predetermined angle range in which the laser light is scanned. Note that the controllable range in which the LiDAR device 2 scans the laser light is set to a range smaller than the maximum oscillation range of the mirror unit 10 (for example, 120 deg or less).

[0040] Specifically, as shown by arrows K and L in FIG. 17 and FIG. 18, when the mirror section 10 is at a first angle (e.g., −35 deg), the laser light irradiated from the light source device 4 is reflected at an acute angle by the mirror surface 11 of the mirror section 10 and irradiated to the outside. In addition, in FIG. 18 to FIG. 20, the dashed line O indicates the normal line of the mirror surface 11. As shown by arrows K and M in FIG. 17 and FIG. 19, when the mirror section 10 is at a third angle (e.g., 0 deg), the laser light irradiated from the light source device 4 is reflected at a right angle by the mirror surface 11 of the mirror section 10 and irradiated to the outside. As shown by arrows K and N in FIG. 17 and FIG. 20, when the mirror section 10 is at a second angle (e.g., +35 deg), the laser light irradiated from the light source device 4 is reflected at an obtuse angle by the mirror surface 11 of the mirror section 10 and irradiated to the outside. The mirror portion 10 of the mirror rocking device 1 rocks repeatedly between the first angle, the second angle, and the third angle, and scans the laser light.

[0041] The mirror rocking device 1 of the first embodiment described above provides the following advantages. (1) In the first embodiment, at least a part of the bearing 50 and at least a part of the base 40 are provided in a region of the mirror section 10 opposite the mirror surface 11, in a height range H1 of the mirror section 10 in the axial direction of the shaft 30. According to this, by utilizing the area of ​​the mirror part 10 opposite to the mirror surface 11 to place the bearing 50 and the base 40, the size of the mirror part 10 in the axial direction of the oscillation of the mirror part 10 in the mirror oscillation device 1 can be reduced. Furthermore, the proportion of the mirror surface 11 of the mirror part 10 to the size of the mirror oscillation device 1 in the axial direction can be increased. Therefore, the LiDAR device 2 using this mirror oscillation device 1 can reduce the size LH of the mirror part 10 in the axial direction, in other words, the size LH in the direction perpendicular to the direction in which the mirror part 10 oscillates. Therefore, when the LiDAR device 2 is mounted on the roof 6 of a vehicle, for example, it is possible to prevent the roof top from becoming a convex shape that protrudes greatly above the vehicle, or to prevent the LiDAR device 2 from protruding greatly from the roof 6 into the vehicle cabin. Furthermore, the LiDAR device 2 using this mirror oscillation device 1 can increase the spot diameter 7 of the laser light by increasing the size of the mirror surface 11 of the mirror part 10, thereby improving the signal-to-noise ratio and expanding the distance measurement range.

[0042] (2) In the first embodiment, the outer edge 56 of the bearing 50 on one side in the axial direction and the outer edge 46 of the base 40 on one side in the axial direction are located at the same height in the axial direction or on the other side of the outer edge 13 of the mirror section 10 on one side in the axial direction. In addition, the outer edge 57 of the bearing 50 on the other side in the axial direction and the outer edge 47 of the base 40 on the other side in the axial direction are located at the same height in the axial direction or on one side of the outer edge 14 of the mirror section 10 on the other side in the axial direction. According to this, the bearing 50 and the base 40 are all provided in the region of the mirror section 10 opposite the mirror surface 11, in the height range H1 of the mirror section 10 in the axial direction. This makes it possible to further reduce the size of the mirror rocking device 1 in the axial direction. Furthermore, the proportion of the mirror surface 11 of the mirror section 10 to the size of the mirror rocking device 1 in the axial direction can be made larger. In this disclosure, "the same height" includes not only exactly the same height, but also substantially the same height, for example, taking into account manufacturing tolerances.

[0043] (3) In the first embodiment, at least a part of the actuator 60 is provided in a region of the mirror section 10 on the opposite side to the mirror surface 11, in a height range H1 of the mirror section 10 in the axial direction. According to this, by arranging the actuator 60 by utilizing the area on the opposite side of the mirror section 10 from the mirror surface 11, it is possible to reduce the size of the mirror rocking device 1 including the actuator 60 in the axial direction of the rocking of the mirror section 10. Furthermore, the proportion of the mirror surface 11 of the mirror section 10 to the size of the mirror rocking device 1 in the axial direction can be increased.

[0044] (4) In the first embodiment, an outer edge 601 on one side in the axial direction of the actuator 60 is located at the same height or on the other side in the axial direction as an outer edge 13 on one side in the axial direction of the mirror section 10. An outer edge 602 on the other side in the axial direction of the actuator 60 is located at the same height or on one side in the axial direction as an outer edge 14 on the other side in the axial direction of the mirror section 10. According to this, the actuator 60 is entirely provided in a region of the mirror section 10 opposite the mirror surface 11, in a height range H1 of the mirror section 10 in the axial direction. Therefore, the size of the mirror rocking device 1 including the actuator 60 in the axial direction of the rocking of the mirror section 10 can be made more compact. Furthermore, the proportion of the mirror surface 11 of the mirror section 10 to the size of the mirror rocking device 1 in the axial direction can be made larger.

[0045] (5) In the first embodiment, at least a portion of the sensor 70 is provided in a region of the mirror section 10 on the opposite side to the mirror surface 11, in a height range H1 of the mirror section 10 in the axial direction. According to this, by arranging the sensor 70 by utilizing the area on the opposite side of the mirror section 10 from the mirror surface 11, it is possible to reduce the size of the mirror rocking device 1 equipped with the sensor 70 in the axial direction of the rocking of the mirror section 10. Furthermore, the proportion of the mirror surface 11 of the mirror section 10 to the size of the mirror rocking device 1 in the axial direction can be increased.

[0046] (6) In the first embodiment, outer edge 75 of sensor 70 on one side in the axial direction is located at the same height in the axial direction as outer edge 13 on one side in the axial direction of mirror section 10 or on the other side. Outer edge 76 of sensor 70 on the other side in the axial direction is located at the same height in the axial direction as outer edge 14 of mirror section 10 on the other side in the axial direction or on one side in the axial direction. According to this, the entire sensor 70 is provided in the region of the mirror section 10 opposite the mirror surface 11, in the height range H1 of the mirror section 10 in the axial direction. Therefore, the size of the mirror rocking device 1 including the sensor 70 in the axial direction of the rocking of the mirror section 10 can be made more compact. Furthermore, the proportion of the mirror surface 11 of the mirror section 10 to the size of the mirror rocking device 1 in the axial direction can be made larger.

[0047] (7) In the first embodiment, the sensor 70 is a rotary encoder having a rotating disk 71 that rotates together with the shaft 30 and a detection element 72 that detects the position of the rotating disk 71 with respect to the base 40. According to this, by using a rotary encoder as the sensor 70, the size in the axial direction can be reduced.

[0048] (8) In the first embodiment, surfaces 44, 45 of base 40 facing mirror unit 10 are inclined from a portion closer to shaft 30 to a portion farther from shaft 30, in a direction away from mirror unit 10 at the third angle. Therefore, when actuator 60 drives mirror unit 10 to swing, interference between base 40 and mirror unit 10 is prevented. This ensures a certain angular range for the mirror to oscillate. In addition, the surfaces 44 and 45 of the base 40 facing the mirror unit 10 may be flat inclined surfaces or curved inclined surfaces.

[0049] (9) In the first embodiment, the surface 68 of the stator 62 of the actuator 60 facing the mirror unit 10 is inclined from a portion closer to the shaft 30 to a portion farther from the shaft 30, in a direction away from the mirror unit 10 at the third angle. Therefore, when the actuator 60 drives the mirror unit 10 to swing, interference between the stator 62 and the mirror unit 10 is prevented. This ensures a certain angular range for the mirror to oscillate. The surface 68 of the stator 62 facing the mirror unit 10 may be a flat inclined surface or a curved inclined surface.

[0050] Second embodiment The second embodiment will be described. The second embodiment is different from the first embodiment in that a part of the configuration of the mirror rocking device 1 is changed, and other parts are the same as those of the first embodiment, so only the parts that are different from the first embodiment will be described.

[0051] As shown in Figs. 21 to 23, the mirror rocking device 1 of the second embodiment includes a counterweight 22. The counterweight 22 is provided so as to extend from a portion of the extension portion 20 on the opposite side to the mirror portion 10 to the opposite side to the mirror portion 10. When viewed from the axial direction of the shaft 30, the counterweight 22 is formed in a sector shape centered on the axis CL. The counterweight 22 is formed integrally with the extension portion 20 and the mirror portion 10. The counterweight 22 may be formed of a separate member from the extension portion 20 and fixed to the extension portion 20.

[0052] The shape and weight of the counterweight 22 are set so that the center of gravity of the integrated part including the mirror unit 10, the extension unit 20, and the counterweight 22 approaches or coincides with the axis CL of the shaft 30. It is preferable that the center of gravity of the integrated part including the mirror unit 10, the extension unit 20, and the counterweight 22 coincides with the axis CL of the shaft 30. In this disclosure, the term "coincidence" includes not only perfect coincidence but also substantial coincidence, for example, with manufacturing tolerances.

[0053] The mirror rocking device 1 of the second embodiment described above includes the counterweight 22, which makes it possible to reduce the moment of inertia when driving the mirror section 10 to rock, and thus to reduce the generation of vibrations and abnormal noise.

[0054] Third embodiment The third embodiment will be described. The third embodiment is different from the second embodiment in that the configuration of the counterweight 22 is changed, and other aspects are the same as those of the second embodiment, so only the differences from the second embodiment will be described.

[0055] As shown in Fig. 24, the counterweight 22 included in the mirror rocking device 1 of the third embodiment has a resin body 23 and a weight portion 24. The resin body 23 is made of resin, and is integrally formed with the extension portion 20 and the mirror portion 10. The resin body 23 may be made of a separate member from the extension portion 20 and fixed to the extension portion 20. The weight portion 24 is made of a material having a specific weight greater than that of the resin body 23, and is fixed to the resin body 23. Specifically, the weight portion 24 is made of, for example, a metal, and is molded into the resin body 23.

[0056] In the mirror rocking device 1 of the third embodiment described above, the counterweight 22 is made up of the resin body 23 and the weight portion 24, so that the size of the counterweight 22 can be reduced. In addition, the amount of expensive resin used can be reduced, and the manufacturing cost can be reduced.

[0057] (Other embodiments) (1) In each of the above embodiments, the mirror oscillation device 1 has been described as being used in a LiDAR device 2. However, the present invention is not limited to this and may be used in various optical scanning devices, such as a multifunction peripheral or a laser beam printer.

[0058] (2) In each of the above embodiments, the LiDAR device 2 using the mirror rocking device 1 has been described as being mounted on the roof 6 of a vehicle, but the LiDAR device 2 may be mounted, for example, on the back side of a bumper or a grill of a vehicle. Alternatively, the LiDAR device 2 may be mounted on something other than a vehicle.

[0059] (3) In the above embodiments, at least a portion of each of the base 40, the bearing 50, the actuator 60, and the sensor 70 is described as being provided within the height range H1 of the mirror unit 10, but this is not limited to the above. For example, a configuration may be adopted in which at least a portion of the base 40 and at least a portion of the bearing 50 are provided within the height range H1 of the mirror unit 10, and the actuator 60 and the sensor 70 are not provided within the height range H1 of the mirror unit 10.

[0060] Alternatively, for example, at least a part of the base 40, at least a part of the bearing 50, and at least a part of the actuator 60 may be provided in the height range H1 of the mirror section 10, and the sensor 70 may not be provided in the height range H1 of the mirror section 10.

[0061] Alternatively, for example, at least a part of the base 40, at least a part of the bearing 50, and at least a part of the sensor 70 may be provided in the height range H1 of the mirror section 10, and the actuator 60 may not be provided in the height range H1 of the mirror section 10.

[0062] (3) In the above embodiments, the base 40, bearing 50, actuator 60, and sensor 70 are preferably all provided within the height range H1 of the mirror unit 10, but this is not limited thereto. For example, it is sufficient that a portion of each of the base 40, bearing 50, actuator 60, and sensor 70 is within the height range of the mirror unit 10, and other portions may protrude from the height range H1 of the mirror unit 10. In the configuration described in Patent Document 1, the entire first and second pedestals, the entire bearings, the entire actuators, and the entire sensors protrude beyond the height range of the mirror unit. Compared to the configuration in Patent Document 1, the mirror rocking device 1 of the present disclosure can reduce the size of the mirror unit 10 in the axial direction. Furthermore, compared to the configuration in Patent Document 1, the mirror rocking device 1 of the present disclosure can increase the proportion of the mirror surface 11 of the mirror unit 10 to the size of the mirror rocking device 1 in the axial direction.

[0063] (4) In each of the above embodiments, the mirror rocking device 1 has been described as including the actuator 60, but is not limited thereto, and may be configured, for example, without including the actuator 60. In that case, for example, the mirror rocking device 1 may be configured to rock the mirror unit 10 by the actuator 60 installed in the housing 3 of the LiDAR device 2 or the like.

[0064] (5) In each of the above embodiments, the actuator 60 is disposed in a region on the opposite side of the first base portion 41 from the second base portion 42, but this is not limited thereto. For example, the actuator 60 may be disposed between the first base portion 41 and the second base portion 42.

[0065] (6) In each of the above embodiments, the mirror rocking device 1 has been described as including the sensor 70 that detects the angle of the mirror unit 10, but this is not limiting, and for example, the mirror rocking device 1 may be configured not to include the sensor 70. In that case, for example, the angle of the mirror unit 10 may be detected by the sensor 70 installed in the housing 3 of the LiDAR device 2.

[0066] (7) In each of the above embodiments, a rotary encoder was used as an example of the sensor 70 provided in the mirror oscillation device 1. However, this is not limited to this, and various non-contact or contact sensors such as a Hall IC, a magnetic resistance element, or an inductive sensor may also be used.

[0067] (8) In each of the above embodiments, the counterweight 22 is fixed to the extension portion 20 . However, the present invention is not limited to this. For example, the counterweight 22 may be fixed to the shaft 30 .

[0068] (9) In the above embodiments, the shaft 30, the extension 20, and the mirror 10 are supported swingably on the base 40 via the bearings 50. However, the present invention is not limited to this. For example, the base 40 and the shaft 30 may be fixed, and the extension 20 and the mirror 10 may be supported swingably on the shaft 30 via the bearings 50.

[0069] The present disclosure is not limited to the above-mentioned embodiments, and can be appropriately modified within the scope of the claims. In addition, the above-mentioned embodiments and parts thereof are not unrelated to each other, and can be appropriately combined except when the combination is clearly impossible. In addition, in each of the above-mentioned embodiments, it goes without saying that the elements constituting the embodiment are not necessarily essential, except when it is specifically stated that they are essential or when it is clearly considered to be essential in principle. In addition, in each of the above-mentioned embodiments, when the numbers, values, amounts, ranges, etc. of the components of the embodiment are mentioned, they are not limited to the specific numbers, except when it is specifically stated that they are essential or when it is clearly limited to a specific number in principle. In addition, in each of the above-mentioned embodiments, when the shape, positional relationship, etc. of the components are mentioned, they are not limited to the shape, positional relationship, etc., except when it is specifically stated that they are essential or when it is clearly limited to a specific shape, positional relationship, etc. in principle.

[0070] (In view of the present disclosure) The present disclosure described above can be understood from the following viewpoints, for example. [First viewpoint] In the mirror rocking device, A mirror portion (10) having a mirror surface (11) that reflects light; an extension portion (20) extending from a surface (12) of the mirror portion opposite the mirror surface to a side opposite the mirror surface; A shaft (30) fixed to the extension portion; a base (40) provided in an area of ​​the mirror portion opposite the mirror surface; a bearing (50) provided on the base in an axial direction of the shaft relative to the extension portion, the bearing supporting the shaft rotatably relative to the base; the mirror portion is capable of swinging together with the shaft and the extension portion within a predetermined angle range around an axis (CL) of the shaft, A mirror oscillation device, wherein at least a portion of the bearing and at least a portion of the base are provided in an area of ​​the mirror portion opposite the mirror surface, within a height range (H1) of the mirror portion in the axial direction of the shaft. [Second viewpoint] an outer edge (56) of the bearing on one side in the axial direction and an outer edge (46) of the base on one side in the axial direction are located at the same height or on the other side in the axial direction with respect to an outer edge (13) of the mirror part on one side in the axial direction; A mirror oscillation device as described in a first aspect, wherein an outer edge (57) of the bearing on the other side in the axial direction and an outer edge (47) of the base on the other side in the axial direction are located at the same height or on one side in the axial direction relative to an outer edge (14) of the mirror portion on the other side in the axial direction. [Third Perspective] The present invention further includes an actuator (60) that drives the mirror portion, together with the shaft and the extension portion, to swing within a predetermined angle range around the axis of the shaft, A mirror oscillation device as described in the first or second aspect, wherein at least a part of the actuator is provided in an area of ​​the mirror portion opposite the mirror surface, within a height range of the mirror portion in the axial direction of the shaft. [Fourth viewpoint] an outer edge (601) on one side of the actuator in the axial direction is located at the same height or on the other side of an outer edge of the mirror section in the axial direction; A mirror oscillation device as described in a third aspect, wherein an outer edge (602) of the actuator on the other axial side is located at the same height or on one side in the axial direction as an outer edge of the mirror portion on the other axial side. [Fifth viewpoint] The mirror unit further includes a sensor (70) for detecting an angle of the mirror unit relative to the base. A mirror oscillation device described in any one of the first to fourth aspects, wherein at least a part of the sensor is provided in an area on the opposite side of the mirror portion from the mirror surface, within a height range of the mirror portion in the axial direction of the shaft. [Sixth viewpoint] an outer edge (75) of the sensor on one side in the axial direction is located at the same height or on the other side in the axial direction with respect to an outer edge of the mirror part on one side in the axial direction; A mirror oscillation device as described in a fifth aspect, wherein an outer edge (76) of the sensor on the other axial side is located at the same height or on one side in the axial direction as an outer edge of the mirror portion on the other axial side. [Seventh viewpoint] an actuator that drives the mirror section together with the shaft and the extension section to swing within a predetermined angle range around an axis of the shaft; and a sensor that detects an angle of the mirror section with respect to the base, A mirror oscillation device as described in the first or second aspect, wherein at least a part of the actuator and at least a part of the sensor are provided in an area of ​​the mirror portion opposite the mirror surface, within a height range of the mirror portion in the axial direction of the shaft. [Eighth viewpoint] an outer edge of the actuator on one side in an axial direction and an outer edge of the sensor on one side in an axial direction are located at the same height or on the other side in the axial direction with respect to an outer edge of the mirror on one side in the axial direction; A mirror oscillation device as described in a seventh aspect, wherein an outer edge of the actuator on the other side in the axial direction and an outer edge of the sensor on the other side in the axial direction are located at the same height or to one side in the axial direction relative to an outer edge of the mirror section on the other side in the axial direction. [Ninth viewpoint] The mirror oscillation device according to any one of the fifth to eighth aspects, wherein the sensor is a rotary encoder having a rotating disk (71) that rotates together with the shaft and a detection element (72) that detects the position of the rotating disk relative to the base. [10th viewpoint] When the maximum angle at which the mirror portion oscillates counterclockwise as viewed from one side in the axial direction is called a first angle, the maximum angle at which the mirror portion oscillates clockwise as viewed from one side in the axial direction is called a second angle, and the angle midway between the first angle and the second angle is called a third angle, A mirror oscillation device according to the third, fourth, seventh or eighth aspect, wherein a surface (44, 45) of the base facing the mirror portion is inclined from a portion closer to the shaft to a portion farther from the shaft, in a direction away from the mirror portion in the third angle state, thereby preventing interference between the base and the mirror portion when the actuator drives the mirror portion to oscillate. [Eleventh viewpoint] The actuator comprises: A magnet (61) fixed to the shaft; an electromagnetic coil (63) that generates a magnetic field when energized; a stator (62) that forms a magnetic circuit between the electromagnetic coil and the magnet and causes magnetic flux generated by the electromagnetic coil to flow around the magnet, When the maximum angle at which the mirror portion oscillates counterclockwise as viewed from one side in the axial direction is called a first angle, the maximum angle at which the mirror portion oscillates clockwise as viewed from one side in the axial direction is called a second angle, and the angle midway between the first angle and the second angle is called a third angle, A mirror oscillation device according to the third, fourth, seventh, eighth or tenth aspect, wherein a surface (68) of the stator facing the mirror portion is inclined from a portion closer to the shaft to a portion farther from the shaft, in a direction away from the mirror portion in the third angle state, thereby preventing interference between the stator and the mirror portion when the actuator drives the mirror portion to oscillate. [12th viewpoint] The mirror rocking device according to any one of the first to eleventh aspects, further comprising a counterweight (22) provided on the opposite side of the axis from the mirror portion and fixed to the extension portion or the shaft. [13th viewpoint] The counterweight is A resin body (23) fixed to the extension portion or the shaft; The mirror oscillation device according to a twelfth aspect, further comprising a weight portion (24) formed of a material having a specific weight greater than that of the resin body and fixed to the resin body. [14th viewpoint] A mirror rocking device according to a twelfth or thirteenth aspect, wherein a center of gravity of a part in which the mirror portion, the extension portion and the counterweight are integrated coincides with an axis of the shaft. [15th viewpoint] A LiDAR device, A housing (3) having a window (8) that transmits laser light; The mirror rocking device (1) according to any one of the first to fourteenth aspects, which is provided inside the housing; a light source device (4) provided inside the housing and configured to irradiate a laser beam onto the mirror surface of the mirror portion provided in the mirror oscillation device; a light receiving device (5) that is provided inside the housing, scans with the mirror surface of the mirror part provided in the mirror rocking device, irradiates the laser light from the window of the housing to the outside, reflects off an external object, returns from the window of the housing, and receives the laser light reflected again by the mirror surface of the mirror part. [Explanation of symbols]

[0071] 1 Mirror rocking device 10 Mirror section 11 Mirror surface 12 Back side 20 Stretching section 30 Shaft 40 Pedestal 50 Bearings CL axis center H1 Mirror height range

Claims

1. In the mirror rocking device, A mirror portion (10) having a mirror surface (11) that reflects light; an extension portion (20) extending from a surface (12) of the mirror portion opposite the mirror surface to a side opposite the mirror surface; A shaft (30) fixed to the extension; A base (40) provided in an area of ​​the mirror portion opposite the mirror surface; a bearing (50) provided on the base in an axial direction of the shaft relative to the extension portion, the bearing supporting the shaft rotatably relative to the base; the mirror portion is capable of swinging together with the shaft and the extension portion within a predetermined angle range around an axis (CL) of the shaft, A mirror rocking device, wherein at least a portion of the bearing and at least a portion of the base are provided in an area of ​​the mirror portion opposite the mirror surface, within a height range (H1) of the mirror portion in the axial direction of the shaft.

2. an outer edge (56) of the bearing on one side in the axial direction and an outer edge (46) of the base on one side in the axial direction are located at the same height or on the other side in the axial direction with respect to an outer edge (13) of the mirror part on one side in the axial direction; 2. A mirror rocking device as described in claim 1, wherein an outer edge (57) of the bearing on the other side in the axial direction and an outer edge (47) of the base on the other side in the axial direction are located at the same height or on one side in the axial direction with respect to an outer edge (14) of the mirror portion on the other side in the axial direction.

3. The actuator (60) drives the mirror portion, together with the shaft and the extension portion, to swing within a predetermined angle range around the axis of the shaft, 3. The mirror rocking device according to claim 1, wherein at least a part of the actuator is provided in a region of the mirror section opposite to the mirror surface, within a height range of the mirror section in the axial direction of the shaft.

4. An outer edge (601) on one side of the actuator in the axial direction is located at the same height or on the other side in the axial direction with respect to an outer edge on one side of the mirror portion in the axial direction, 4. The mirror rocking device according to claim 3, wherein an outer edge (602) of the actuator on the other side in the axial direction is located at the same height or on one side in the axial direction with respect to an outer edge of the mirror portion on the other side in the axial direction.

5. The mirror unit further includes a sensor (70) for detecting an angle of the mirror unit relative to the base.

3. The mirror rocking device according to claim 1, wherein at least a part of the sensor is provided in an area of ​​the mirror portion opposite to the mirror surface, within a height range of the mirror portion in the axial direction of the shaft.

6. An outer edge (75) of the sensor on one side in the axial direction is located at the same height or on the other side in the axial direction with respect to an outer edge of the mirror part on one side in the axial direction, 6. The mirror rocking device according to claim 5, wherein an outer edge (76) of the sensor on the other side in the axial direction is located at the same height or on one side in the axial direction with respect to an outer edge of the mirror portion on the other side in the axial direction.

7. an actuator that drives the mirror section together with the shaft and the extension section to swing within a predetermined angle range around an axis of the shaft; and a sensor that detects an angle of the mirror section with respect to the base, 3. The mirror rocking device according to claim 1, wherein at least a portion of the actuator and at least a portion of the sensor are provided in an area of ​​the mirror portion opposite the mirror surface, within a height range of the mirror portion in the axial direction of the shaft.

8. an outer edge of the actuator on one side in an axial direction and an outer edge of the sensor on one side in an axial direction are located at the same height as or on the other side of an outer edge of the mirror on one side in the axial direction, 8. The mirror rocking device of claim 7, wherein an outer edge of the actuator on the other side in the axial direction and an outer edge of the sensor on the other side in the axial direction are located at the same height or on one side in the axial direction relative to an outer edge of the mirror portion on the other side in the axial direction.

9. 6. The mirror oscillation device according to claim 5, wherein the sensor is a rotary encoder having a rotating disk (71) that rotates together with the shaft and a detection element (72) that detects the position of the rotating disk with respect to the base.

10. When the maximum angle at which the mirror portion oscillates counterclockwise as viewed from one side in the axial direction is called a first angle, the maximum angle at which the mirror portion oscillates clockwise as viewed from one side in the axial direction is called a second angle, and the angle midway between the first angle and the second angle is called a third angle, 4. The mirror oscillation device of claim 3, wherein a surface (44, 45) of the base facing the mirror portion is inclined from a portion closer to the shaft to a portion farther from the shaft, in a direction away from the mirror portion in the third angle state, thereby preventing interference between the base and the mirror portion when the actuator drives the mirror portion to oscillate.

11. The actuator comprises: A magnet (61) fixed to the shaft; An electromagnetic coil (63) that generates a magnetic field when energized; a stator (62) that forms a magnetic circuit between the electromagnetic coil and the magnet and causes a magnetic flux generated by the electromagnetic coil to flow around the magnet, When the maximum angle at which the mirror portion oscillates counterclockwise as viewed from one side in the axial direction is called a first angle, the maximum angle at which the mirror portion oscillates clockwise as viewed from one side in the axial direction is called a second angle, and the angle midway between the first angle and the second angle is called a third angle, 4. The mirror oscillation device of claim 3, wherein a surface (68) of the stator facing the mirror portion is inclined from a portion closer to the shaft to a portion farther from the shaft, in a direction away from the mirror portion when the mirror portion is at the third angle, thereby preventing interference between the stator and the mirror portion when the actuator drives the mirror portion to oscillate.

12. 3. The mirror rocking device according to claim 1, further comprising a counterweight (22) provided on the opposite side of the axis from the mirror portion and fixed to the extension portion or the shaft.

13. The counterweight is A resin body (23) fixed to the extension portion or the shaft; 13. The mirror rocking device according to claim 12, further comprising a weight portion (24) formed of a material having a specific weight greater than that of said resin body and fixed to said resin body.

14. 13. The mirror rocking device according to claim 12, wherein a center of gravity of a part in which the mirror portion, the extension portion and the counterweight are integrated coincides with an axis of the shaft.

15. A LiDAR device, A housing (3) having a window (8) that transmits laser light; The mirror rocking device (1) according to claim 1, which is provided inside the housing; a light source device (4) provided inside the housing and configured to irradiate a laser beam onto the mirror surface of the mirror portion provided in the mirror oscillation device; The LiDAR device includes a light receiving device (5) that is provided inside the housing, scans the mirror surface of the mirror section provided in the mirror oscillating device, and is irradiated to the outside through the window of the housing, and then receives the laser light that is reflected by an external object, returns through the window of the housing, and is again reflected by the mirror surface of the mirror section.

Images