Display device, display method, and program

Abstract

To easily grasp the state of substrate processing which was carried out in the past.SOLUTION: A display device is a device for displaying, on a display screen, information related to processing in a substrate processing apparatus for performing predetermined substrate processing on a plurality of substrates. The display device includes a display controller that is capable of displaying, on the display screen, an image based on first imaging data obtained by previously imaging a display target substrate out of the plurality of substrates in the substrate processing device in response to an instruction from a user, and displaying, on the display screen, an image based on second imaging data obtained by previously imaging the display target substrate in the substrate processing device in response to an instruction from the user. The first imaging data is data obtained by imaging at a different timing from that of the second imaging data, or data obtained by imaging a different imaging range from that of the second imaging data.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The present disclosure relates to a display device, a display method, and a storage medium. [Background technology]

[0002] Patent document 1 discloses a semiconductor manufacturing apparatus that includes a display means for displaying a graph related to process data showing the state of processing in a substrate processing unit that processes substrates, and a display control means for controlling the display on the display means. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2014-135362 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a display device, a display method, and a storage medium that enable easy understanding of the state of substrate processing that has been previously performed. [Means for solving the problem]

[0005] A display device according to one aspect of the present disclosure is a device that displays information on processing in a substrate processing apparatus that performs a predetermined substrate processing on a plurality of substrates on a display screen. The display device is capable of displaying, in response to an instruction from a user, an image based on first imaging data obtained by imaging a substrate to be displayed among the plurality of substrates in the substrate processing apparatus in the past on the display screen, and is equipped with a display control unit that is capable of displaying, in response to an instruction from the user, an image based on second imaging data obtained by imaging a substrate to be displayed in the substrate processing apparatus in the past on the display screen. The first imaging data is data obtained by imaging at a timing different from that of the second imaging data, or data obtained by imaging a different imaging range from that of the second imaging data. Effect of the Invention

[0006] According to the present disclosure, there are provided a display device, a display method, and a storage medium that enable easy understanding of the state of substrate processing that has been previously performed. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a schematic diagram illustrating an example of a substrate processing system. [Diagram 2] FIG. 2 is a schematic diagram showing an example of a coating and developing apparatus. [Diagram 3] FIG. 3 is a schematic diagram showing an example of the liquid processing unit and the imaging section. [Figure 4] 4(a) and 4(b) are schematic diagrams showing an example of a moving image based on imaging data. [Diagram 5] FIG. 5 is a diagram illustrating an example of an inspection unit and an example of a functional configuration of a control device. [Figure 6] FIG. 6 is a flowchart showing an example of a substrate processing method. [Figure 7] FIG. 7 is a block diagram illustrating an example of a functional configuration of the display device. [Figure 8] FIG. 8 is a sequence diagram illustrating an example of a processing procedure in the control device and the display device. [Figure 9] FIG. 9 is a schematic diagram showing an example of a display of measurement data and a list image. [Figure 10] FIG. 10 is a schematic diagram showing an example of a display of the processed image. [Figure 11] FIG. 11 is a schematic diagram for explaining an example of a process for accepting output of a moving image being processed. [Figure 12] FIG. 12 is a schematic diagram showing an example of a display of a moving image being processed. [Figure 13] FIG. 13 is a schematic diagram showing an example of a list display. [Figure 14] FIG. 14 is a block diagram showing an example of a hardware configuration of the control device and the display device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Various exemplary embodiments are described below.

[0009] A display device according to an exemplary embodiment is a device that displays information on processing in a substrate processing apparatus that performs a predetermined substrate processing on a plurality of substrates on a display screen. The display device is capable of displaying, in response to an instruction from a user, an image based on first imaging data of a substrate to be displayed among the plurality of substrates and obtained by imaging the substrate in the substrate processing apparatus in the past, on the display screen, and is equipped with a display control unit that is capable of displaying, in response to an instruction from the user, an image based on second imaging data of the substrate to be displayed and obtained by imaging the substrate in the substrate processing apparatus in the past, on the display screen. The first imaging data is data obtained by imaging at a timing different from that of the second imaging data, or data obtained by imaging a different imaging range from that of the second imaging data.

[0010] In this display device, a user can check two types of images of a single substrate, which are different in imaging timing or imaging range, and can easily grasp the state of substrate processing previously performed on the substrate to be displayed without having to check two types of images individually using different devices.

[0011] The display control unit may be capable of displaying on the display screen measurement data related to the substrate processing when the first image data or the second image data was acquired, which is data already obtained by a sensor provided in the substrate processing apparatus for the substrate to be displayed. In this case, data indicating the measurement value by the sensor and an image of the substrate displaying the data can be displayed on the screen. Therefore, the processing result or the processing process that cannot be confirmed by the sensor data alone can be confirmed on one display device. Therefore, the work of understanding the state of the substrate processing performed in the past can be simplified.

[0012] The first imaging data may be still image data obtained by imaging the entire surface of the substrate to be displayed after the substrate processing. The second imaging data may be still image data obtained by imaging the peripheral region of the surface of the substrate to be displayed after the substrate processing. The display control unit may simultaneously display a first still image based on the first imaging data and a second still image based on the second imaging data on the display screen. In this case, the user can check the processing results of the entire surface of the substrate and the processing results of the peripheral region of the substrate on one display screen. As a result, the time required to grasp the processing results of the entire surface and the peripheral region can be shortened.

[0013] The display control unit may display the second still image on the display screen based on the second imaging data such that the horizontal axis represents the circumferential position of the substrate to be displayed and the vertical axis represents the radial position of the substrate to be displayed. In this case, the area for displaying the still image of the peripheral region on the display screen can be reduced.

[0014] The display control unit may further display an auxiliary image showing information different from the first imaging data and the second imaging data on the display screen so as to be aligned horizontally with the first still image. The display control unit may display the second still image on the display screen so as to be aligned vertically with both the first still image and the auxiliary image. In this case, it is possible to effectively utilize the space generated by simultaneously displaying an image of the entire surface and an image of the peripheral region on the display screen.

[0015] The display control unit may execute an enlarged display control for enlarging and displaying a portion of the first still image or the second still image. The display control unit may display, at least during the period in which the enlarged display control is executed, a guide image on the display screen indicating the enlarged position of the still image, the portion of which is enlarged and displayed, relative to the entirety of the still image. In this case, the user can easily grasp which portion is enlarged.

[0016] The display control unit may display an image showing a position where the substrate to be displayed is to be cut, superimposed on the first still image. In this case, it is possible to estimate the effect of the substrate processing on each chip obtained by cutting the substrate.

[0017] The first imaging data may be video data obtained by imaging the substrate to be displayed or the periphery of the substrate during substrate processing of the substrate to be displayed. The second imaging data may be still image data obtained by imaging at least a part of the surface of the substrate to be displayed after the substrate processing. In this case, on one display device, the processing process of one substrate can be confirmed as a video and the processing result can be confirmed as a still image. As a result, it becomes easier to grasp the processing state.

[0018] The first imaging data may be video data obtained by imaging the substrate to be displayed or the periphery of the substrate during substrate processing of the substrate to be displayed. The display control unit may simultaneously display a video based on the video data and another video corresponding to the video of a substrate other than the substrate to be displayed side by side on the display screen. In this case, the processing process can be confirmed by comparing the two different substrates.

[0019] The display control unit may display the video and the other video on the display screen based on a user's instruction indicating the order of the video and the other video. In this case, the user can check the video after understanding the correspondence between the two videos and the individual boards.

[0020] The display control unit may simultaneously start playing the video and the other video when receiving an instruction to start playing from the user. The display control unit may simultaneously stop playing the video and the other video when receiving an instruction to stop playing from the user. In this case, it is possible to simplify the user's instructions when checking the two videos.

[0021] The display control unit may display one video and another video on the display screen such that the execution timings of substrate processing in the displayed video are synchronized with each other. In this case, it is easy to understand the processing process by comparing the videos.

[0022] The display control unit may display a video based on the video data on the display screen so that the entire surface of the substrate to be displayed is not displayed, and a region between the center of the surface of the substrate to be displayed and a part of the periphery is displayed. In this case, the state of the substrate surface in the video can be confirmed with increased resolution.

[0023] The display control unit may be capable of displaying on the display screen a list of information that identifies a plurality of substrates designated by a user and that may be substrates to be displayed. When inspection information indicating the presence or absence of processing abnormality for substrates included in the list is held in the device itself and the inspection information indicates an abnormality, the display control unit may display information indicating that an abnormality has occurred in substrate processing for the substrate indicated by the inspection information as being abnormal, in the list. In this case, the user can immediately identify the substrate in which an abnormality has occurred by checking the list. As a result, the work of identifying the substrate processing state for the substrate in which an abnormality has occurred can be simplified.

[0024] A display method according to an exemplary embodiment is a method for displaying information on a process in a substrate processing apparatus that performs a predetermined substrate process on a plurality of substrates on a display screen. The display method includes displaying, in response to an instruction from a user, an image based on first imaging data obtained by imaging a substrate to be displayed among the plurality of substrates in the substrate processing apparatus in the past on the display screen, and displaying, in response to an instruction from the user, an image based on second imaging data obtained by imaging a substrate to be displayed in the substrate processing apparatus in the past on the display screen. The first imaging data is data obtained by imaging at a different timing from the second imaging data, or data obtained by imaging a different imaging range from the second imaging data. In this display method, as with the above-mentioned display device, it is possible to easily grasp the state of a substrate process previously performed on the substrate to be displayed.

[0025] A storage medium according to one exemplary embodiment is a computer-readable storage medium storing a program for causing an apparatus to execute the above-described display method.

[0026] Hereinafter, an embodiment will be described with reference to the drawings. In the description, the same elements or elements having the same functions are designated by the same reference numerals, and duplicated description will be omitted.

[0027] [Substrate processing system] The substrate processing system 1 shown in FIG. 1 is a system that forms a photosensitive coating on a workpiece W, exposes the photosensitive coating, and develops the photosensitive coating. The workpiece W to be processed is, for example, a substrate, or a substrate on which a film, circuit, or the like has been formed by performing a predetermined process. One example of the substrate is a silicon wafer. The workpiece W (substrate) may be circular. The workpiece W may also be a glass substrate, a mask substrate, or an FPD (Flat Panel Display), etc. The photosensitive coating is, for example, a resist film.

[0028] 1 and 2, a substrate processing system 1 includes a coating and developing apparatus 2 (substrate processing apparatus), an exposure apparatus 3, a control device 100, and a display device 200. In the substrate processing system 1, information related to processing in the coating and developing apparatus 2 is displayed to a user (e.g., an operator) by the display device 200. In the following, first, processing in the coating and developing apparatus 2 will be described.

[0029] The coating and developing apparatus 2 performs a process of coating a resist (chemical solution) on the surface of the workpiece W to form a resist film before the exposure process by the exposure apparatus 3, and performs a development process of the resist film after the exposure process. The exposure apparatus 3 is an apparatus that exposes a resist film (photosensitive coating) formed on the workpiece W (substrate). Specifically, the exposure apparatus 3 irradiates an energy beam onto an exposure target portion of the resist film by a method such as immersion exposure. The coating and developing apparatus 2 includes a carrier block 4, a processing block 5, and an interface block 6.

[0030] The carrier block 4 introduces the workpiece W into the coating and developing apparatus 2 and removes the workpiece W from the coating and developing apparatus 2. For example, the carrier block 4 can support multiple carriers C for the workpiece W and has a built-in transport device A1 including a delivery arm. The carrier C accommodates, for example, multiple circular workpieces W. The transport device A1 removes the workpiece W from the carrier C and delivers it to the processing block 5, and receives the workpiece W from the processing block 5 and returns it to the carrier C. The processing block 5 has processing modules 11, 12, 13, and 14.

[0031] The processing module 11 incorporates a liquid processing unit U1, a heat processing unit U2, and a transport device A3 that transports the workpiece W to these units. The processing module 11 forms an underlayer film on the surface of the workpiece W using the liquid processing unit U1 and the heat processing unit U2. The liquid processing unit U1 applies a processing liquid for forming the underlayer film onto the workpiece W. The heat processing unit U2 performs various heat treatments associated with the formation of the underlayer film.

[0032] The processing module 12 incorporates a liquid processing unit U1, a heat processing unit U2, and a transport device A3 that transports the workpiece W to these units. The processing module 12 forms a resist film on the underlayer film using the liquid processing unit U1 and the heat processing unit U2. The liquid processing unit U1 applies a processing liquid for forming the resist film onto the underlayer film. The heat processing unit U2 performs various heat treatments associated with the formation of the resist film.

[0033] The processing module 13 incorporates a liquid processing unit U1, a heat processing unit U2, and a transport device A3 that transports the workpiece W to these units. The processing module 13 forms an upper layer film on the resist film using the liquid processing unit U1 and the heat processing unit U2. The liquid processing unit U1 applies a processing liquid for forming the upper layer film onto the resist film. The heat processing unit U2 performs various heat treatments associated with the formation of the upper layer film.

[0034] The processing module 14 incorporates a liquid processing unit U1, a heat processing unit U2, and a transport device A3 that transports the workpiece W to these units. The processing module 14 uses the liquid processing unit U1 and the heat processing unit U2 to perform development processing of the resist film that has been subjected to exposure processing and heat processing associated with the development processing. The liquid processing unit U1 applies a developer to the surface of the exposed workpiece W, and then washes it away with a rinsing liquid to perform development processing of the resist film. The heat processing unit U2 performs various heat processing associated with the development processing. Specific examples of heat processing include a heat processing before development (PEB: Post Exposure Bake) and a heat processing after development (PB: Post Bake), etc.

[0035] A shelf unit U10 is provided on the carrier block 4 side in the processing block 5. The shelf unit U10 is divided into multiple cells arranged in the vertical direction. A transport device A7 including a lifting arm is provided near the shelf unit U10. The transport device A7 lifts and lowers the workpiece W between the cells of the shelf unit U10.

[0036] A shelf unit U11 is provided on the interface block 6 side in the processing block 5. The shelf unit U11 is partitioned into a plurality of cells aligned in the vertical direction.

[0037] The interface block 6 transfers the workpiece W to and from the exposure apparatus 3. For example, the interface block 6 has a built-in transport device A8 including a transfer arm, and is connected to the exposure apparatus 3. The transport device A8 transfers the workpiece W placed on the shelf unit U11 to the exposure apparatus 3. The transport device A8 receives the workpiece W from the exposure apparatus 3 and returns it to the shelf unit U11.

[0038] (Liquid processing unit) Next, an example of the liquid processing unit U1 will be described with reference to Fig. 3. The liquid processing unit U1 forms a film of the processing liquid (hereinafter, referred to as a "coating film AF") by applying a processing liquid to the surface Wa of the workpiece W. As shown in Fig. 3, the liquid processing unit U1 has a spin holder 30 and a processing liquid supply unit 40.

[0039] The rotating holding unit 30 holds and rotates the workpiece W. The rotating holding unit 30 has, for example, a holding unit 32 and a rotation drive unit 34. The holding unit 32 holds (supports) the workpiece W. The holding unit 32 supports, for example, the center of the workpiece W arranged horizontally with the surface Wa facing up, and holds the workpiece W by vacuum suction or the like. The rotating drive unit 34 is connected to the holding unit 32 via a shaft.

[0040] The rotation drive unit 34 is an actuator including a power source such as an electric motor, and rotates the holder 32 around a vertical axis Ax. When the holder 32 is rotated by the rotation drive unit 34, the workpiece W held (supported) by the holder 32 rotates. The holder 32 may hold the workpiece W such that a center CP (see FIG. 4(a)) of the workpiece W substantially coincides with the axis Ax.

[0041] The processing liquid supply unit 40 supplies a processing liquid to the surface Wa of the workpiece W. The processing liquid is a solution (e.g., resist) for forming a film such as a resist film. The processing liquid supply unit 40 has, for example, a nozzle 42, a supply source 44, an opening / closing valve 46, and a nozzle drive unit 48. The nozzle 42 ejects the processing liquid onto the surface Wa of the workpiece W held in the holder 32. For example, the nozzle 42 is disposed above the workpiece W (vertically above the center CP of the workpiece W) and ejects the processing liquid downward. The supply source 44 supplies the processing liquid to the nozzle 42.

[0042] The opening / closing valve 46 is provided in the supply path 45 between the nozzle 42 and the supply source 44. The opening / closing valve 46 switches the open / close state of the supply path 45. The nozzle driving unit 48 moves the nozzle 42 between a discharge position above the workpiece W and a retracted position away from the discharge position. The discharge position is, for example, a position vertically above the center of rotation of the workpiece W (a position on the axis Ax). The standby position is, for example, set to a position outside the periphery of the workpiece W. The nozzle driving unit 48 may move the nozzle 42 in the vertical direction (a direction perpendicular to the surface Wa) and also move the nozzle 42 in the horizontal direction (a direction along the surface Wa).

[0043] (Measuring section) The coating and developing apparatus 2 may have a measurement unit 90 that measures data indicating the state of a process on the workpiece W while the process (e.g., liquid processing, etc.) on the workpiece W is being performed. The data indicating the state of the process is data on a physical quantity that affects the result of the process on the workpiece W (e.g., film thickness, etc.). The measurement unit 90 includes at least one sensor that measures data indicating the state of the process. The measurement unit 90 may be provided in the liquid processing unit U1. The measurement unit 90 includes, for example, a temperature sensor 92 that measures the temperature of the processing liquid discharged from the nozzle 42. The temperature sensor 92 may be provided in the supply path 45.

[0044] The data to be measured by the measuring unit 90 is not limited to the temperature of the processing liquid. The measuring unit 90 may have a sensor that measures the flow rate (flow rate per unit time or total flow rate) of the processing liquid discharged from the nozzle 42. The measuring unit 90 may have a sensor that measures the temperature inside a housing (not shown) that houses the spin holder 30 and the nozzle 42 and forms a space in which liquid processing is performed, and may also have a sensor that measures the pressure inside the housing. The flow rate of the processing liquid, the temperature inside the housing, and the pressure inside the housing also affect the results of processing the workpiece W.

[0045] (Imaging unit) The coating and developing apparatus 2 further includes an imaging unit 110 for recording the state of processing during processing (e.g., liquid processing, etc.) on the workpiece W. The imaging unit 110 includes, for example, cameras 112, 114 for generating video data. The cameras 112, 114 are provided inside the liquid processing unit U1 (inside the housing). The cameras 112, 114 are capable of capturing images of different imaging ranges. In other words, the area in the video captured by the camera 112 is different from the area in the video captured by the camera 114.

[0046] In one example, the camera 112 can capture an image of an imaging range PR1 including the surface Wa of the workpiece W and the nozzle 42 when the liquid treatment is performed. FIG. 4(a) shows an example of a moving image MV1 obtained by imaging with the camera 112. The moving image MV1 shown in FIG. 4(a) is a moving image obtained when the imaging range PR1 of the camera 112 is set to include the entire surface Wa of the workpiece W held by the holder 32 and the entire movement path of the nozzle 42 between the discharge position and the standby position. The camera 112 may capture an image of the imaging range PR1 during a period in which the nozzle 42 is moved between the discharge position and the standby position, a period in which the treatment liquid is discharged from the nozzle 42 at the discharge position, and a period in which the workpiece W is rotated to form a coating film AF of the treatment liquid after the discharge of the treatment liquid is stopped.

[0047] In one example, the camera 114 can capture an image of an imaging range PR2 including the periphery of the workpiece W when liquid processing is performed. The camera 114 may be arranged around the workpiece W and capture an image of a member used in liquid processing of the workpiece W. FIG. 4(b) shows an example of a moving image MV2 obtained by imaging by the camera 114. The moving image MV2 shown in FIG. 4(b) is a moving image obtained when the imaging range PR2 of the camera 114 is set to include the entire nozzle 42 arranged above the workpiece W. The imaging range PR2 may include a part of the workpiece W as shown in FIG. 4(b), or may not include the workpiece W. The camera 114 may capture the imaging range PR2 during a period in which the nozzle 42 is discharging the processing liquid after the nozzle 42 is arranged at the discharge position. The above-mentioned imaging ranges PR1 and PR2 may be fixed to a certain range, or may change according to the progress of the processing or the movement of the member.

[0048] Although detailed illustration is omitted, the thermal treatment unit U2 has, for example, a heating section that heats the workpiece W and a cooling section that cools the workpiece W in order to perform thermal treatment on the workpiece W. The coating and developing apparatus 2 may have a measuring section (sensor) that measures data indicating the state of the treatment while the thermal treatment is being performed on the workpiece W. The measuring section may measure the temperature of the heating section that is heating the workpiece W. The coating and developing apparatus 2 may have an imaging section that records the state of the treatment as an image while the thermal treatment is being performed on the workpiece W.

[0049] Hereinafter, the process of forming a predetermined film on the workpiece W and the process of processing the film formed on the workpiece W are each referred to as a "substrate process". Moreover, a process included in the substrate process and performed in one unit is referred to as a "step" or a "unit process". Examples of substrate processes for forming a predetermined film on the workpiece W include a process of forming a lower layer film in the process module 11, a process of forming a resist film in the process module 12, and a process of forming an upper layer film in the process module 13. Each of the processes for forming the lower layer film, the resist film, and the upper layer film includes a process of performing liquid processing in the liquid processing unit U1 and a process of performing heat processing in the heat processing unit U2. Examples of substrate processes for processing a film formed on the workpiece W include a process of forming a resist pattern. The process of forming a resist pattern includes a process of exposing the workpiece W to light, a process of developing the resist film, and a process of performing heat processing associated with the development.

[0050] (Inspection unit) Each of the processing modules 11, 12, 13, and 14 may further include an inspection unit U3. The inspection unit U3 images the surface Wa of the workpiece W after the substrate processing (after the liquid processing and the heat processing) in order to inspect the processing state of the surface Wa of the workpiece W. More specifically, the inspection unit U3 images the surface Wa of the workpiece W after the substrate processing is performed and before the next substrate processing is started. The above-mentioned imaging section 110 generates video data, whereas the inspection unit U3 generates still image data. For example, as shown in FIG. 5, the inspection unit U3 has a housing 50, a rotating and holding subunit 60, a surface imaging subunit 70, and a peripheral imaging subunit 80. These subunits are arranged in the housing 50. An inlet / outlet 52 for carrying the workpiece W into the housing 50 and carrying it out of the housing 50 is formed on one end wall of the housing 50.

[0051] The rotation holding subunit 60 includes a holding table 62, actuators 64 and 66, and a guide rail 68. The holding table 62 is, for example, a suction chuck that holds the workpiece W substantially horizontally by suction or the like.

[0052] The actuator 64 is, for example, an electric motor, and rotates the holding table 62. That is, the actuator 64 rotates the workpiece W held on the holding table 62. The actuator 64 may include an encoder for detecting the rotational position (rotation angle) of the holding table 62. In this case, the imaging positions of each surface of the workpiece W by each imaging subunit can be associated with the rotational position. When the workpiece W has a cutout, the posture of the workpiece W can be identified based on the cutout determined by each imaging subunit and the rotational position detected by the encoder.

[0053] The actuator 66 is, for example, a linear actuator, and moves the holder 62 along the guide rail 68. That is, the actuator 66 transports the workpiece W held on the holder 62 between one end side and the other end side of the guide rail 68. The guide rail 68 extends linearly (for example, straight) within the housing 50.

[0054] The surface imaging subunit 70 includes a camera 72 and an illumination module 74. The camera 72 includes a lens and one imaging element (for example, a CCD image sensor, a CMOS image sensor, or the like). The camera 72 faces the illumination module 74.

[0055] The lighting module 74 includes a light source 74a and a half mirror 74b. The half mirror 74b is disposed in the housing 50 in a state inclined at approximately 45° with respect to the horizontal direction. The half mirror 74b is located above the middle part of the guide rail 68 so as to intersect with the extending direction of the guide rail 68 when viewed from above. The half mirror 74b has a rectangular shape when viewed from above. The length of the half mirror 74b in the longitudinal direction (the direction intersecting the guide rail 68 and the vertical direction) is greater than the diameter of the workpiece W.

[0056] The light source 74a is located above the half mirror 74b. The light emitted from the light source 74a passes through the half mirror 74b as a whole and is irradiated downward. The light that passes through the half mirror 74b is reflected by an object located below the half mirror 74b, then reflected again by the half mirror 74b, passes through the lens of the camera 72, and enters the image sensor of the camera 72. That is, the camera 72 can image an object present in the irradiation area of ​​the light source 74a through the half mirror 74b. For example, when the holding table 62 that holds the workpiece W moves along the guide rail 68 by the actuator 66, the camera 72 can image the surface Wa of the workpiece W passing through the irradiation area of ​​the light source 74a. As a result, still image data in which the entire surface Wa of the workpiece W is imaged is generated. The still image data imaged by the camera 72 is transmitted to the control device 100.

[0057] The peripheral imaging subunit 80 includes a camera 82, an illumination module 84, and a mirror member 86. The camera 82 includes a lens and one imaging element (e.g., a CCD image sensor, a CMOS image sensor, or the like). The camera 82 faces the illumination module 84.

[0058] The lighting module 84 is disposed above the workpiece W held on the holding table 62. The lighting module 84 includes a light source 84a and a half mirror 84b. The half mirror 84b is disposed at an angle of approximately 45° with respect to the horizontal direction. The mirror member 86 is disposed below the lighting module 84. The mirror member 86 includes a main body formed of, for example, an aluminum block, and a reflective surface.

[0059] The reflective surface of the mirror member 86 faces the end face and the peripheral area of ​​the back surface of the workpiece W held on the holding table 62 when the workpiece W held on the holding table 62 is located at the end farther from the load / unload port 52 of the guide rail 68. The reflective surface of the mirror member 86 is inclined with respect to the rotation axis of the holding table 62. The reflective surface of the mirror member 86 may be a curved surface recessed toward the side away from the end face of the workpiece W held on the holding table 62.

[0060] In the illumination module 84, light emitted from the light source 84a passes through the half mirror 84b as a whole and is irradiated downward. The light that has passed through the half mirror 84b is reflected by the reflective surface of the mirror member 86 located below the half mirror 84b. When the workpiece W held on the holding table 62 is located at the end of the guide rail 68 farther from the carry-in / out port 52, the light that has passed through the half mirror 84b is reflected by the reflective surface of the mirror member 86 and is irradiated mainly onto the end face of the workpiece W and the peripheral region of the front surface Wa.

[0061] The light reflected from the peripheral region of the surface Wa of the workpiece W is directly incident on the half mirror 84b without heading toward the reflective surface of the mirror member 86. This reflected light then enters the imaging element of the camera 82. Meanwhile, the light reflected from the end face of the workpiece W heads toward the reflective surface of the mirror member 86. This reflected light is sequentially reflected by the reflective surface of the mirror member 86 and the half mirror 84b, and then enters the imaging element of the camera 82. In this way, the light reflected from the peripheral region of the surface Wa of the workpiece W and the light reflected from the end face of the workpiece W enter the imaging element of the camera 82 via different optical paths.

[0062] As described above, both light from the peripheral region of the surface Wa of the workpiece W and light from the end face of the workpiece W are input to the imaging element of the camera 82. That is, the camera 82 is configured to capture images of both the peripheral region of the surface Wa of the workpiece W and the end face of the workpiece W, and generate still image data of the peripheral region of the surface Wa and the end face of the workpiece W. The camera 82 may generate still image data of a state in which the peripheral region of the surface Wa and the end face of the workpiece W are connected. The still image data captured by the camera 82 is transmitted to the control device 100.

[0063] (Control device) The control device 100 controls the coating and developing apparatus 2. The control device 100 controls the coating and developing apparatus 2 so that a plurality of substrate processes are performed on each of a plurality of workpieces W. As shown in Fig. 5, the control device 100 has, as functional configurations (hereinafter referred to as "functional modules"), for example, a process control unit 122, a process data acquisition unit 124, an abnormality determination unit 126, a data recording unit 128, and a data storage unit 132. The processes executed by these functional modules correspond to the processes executed by the control device 100.

[0064] The process control unit 122 controls the coating and developing apparatus 2 so that multiple substrate processes are performed on each workpiece W. The process control unit 122 controls each unit in the coating and developing apparatus 2 according to process information that defines the workpiece W to be processed, the process unit used for the substrate process, and process conditions such as execution timing of the substrate process. The process data acquisition unit 124 acquires measurement data from the sensor of the measurement unit 90 and acquires video data from the imaging unit 110 (cameras 112, 114) while performing the substrate process on each workpiece W. In addition, the process data acquisition unit 124 acquires still image data from each of the multiple inspection units U3 for each workpiece W. The abnormality determination unit 126 determines the presence or absence of an abnormality for each of the multiple substrate processes for each workpiece W based on the various data acquired by the process data acquisition unit 124.

[0065] The data recording unit 128 associates, for each workpiece W, individual information (e.g., an identification number) capable of identifying (identifying) the individual workpiece W with image data (moving image data and still image data) obtained for each substrate processing, and records the associated information in the data storage unit 132. The data recording unit 128 may associate the image data obtained by the processing data acquisition unit 124 with each workpiece W based on processing information obtained when the substrate processing is performed by the processing control unit 122. The data recording unit 128 may further associate at least one of information on the date and time when the substrate processing was performed, individual information of the processing unit that performed the substrate processing, information indicating the project (lot), and measurement data from the measurement unit 90 with the individual information of the workpiece W, and record the associated information in the data storage unit 132.

[0066] The data storage unit 132 stores, for each of the multiple workpieces W, individual information of the workpiece W and image data and the like associated with the individual information. In response to a request for data transmission from the display device 200, the details of which will be described later, the data storage unit 132 may transmit the requested image data and the like to the display device 200.

[0067] The specific configuration of the substrate processing apparatus is not limited to the above-described configuration of the coating and developing apparatus 2. The substrate processing apparatus may be any type as long as it includes a processing section that performs a predetermined substrate processing on the workpiece W, a measurement section that acquires image data during or after the substrate processing on the workpiece W, and a control section that can control these.

[0068] (Substrate processing method) Next, a coating and developing process performed in the coating and developing apparatus 2 will be described as an example of a substrate processing method with reference to Fig. 6. Fig. 6 is a flow chart showing the procedure of processes performed in sequence on one workpiece W. First, the control device 100 controls the transport device A1 to transport the workpiece W in the carrier C to the shelf unit U10, and controls the transport device A7 to place the workpiece W in a cell for the processing module 11.

[0069] Next, the control device 100 controls the coating and developing device 2 to perform substrate processing to form an underlayer film on the surface Wa of the workpiece W (step S01). In step S01, for example, the control device 100 controls the transport device A3 to transport the workpiece W on the shelf unit U10 to the liquid processing unit U1 in the processing module 11. Then, the processing control unit 122 of the control device 100 controls the liquid processing unit U1 to form a coating film AF of a processing liquid for forming an underlayer film on the surface Wa of the workpiece W.

[0070] In parallel with the process of forming the coating film AF (liquid processing), the processing data acquisition unit 124 acquires two types of video data from the cameras 112, 114 of the imaging unit 110, and acquires measurement data from the sensor of the measurement unit 90. Thereafter, the processing control unit 122 controls the transport device A3 to transport the workpiece W having the coating film AF of the processing liquid for forming the underlayer film formed thereon to the heat processing unit U2, and controls the heat processing unit U2 to form an underlayer film on the surface Wa of the workpiece W. The data recording unit 128 associates the date and time of completion of the processing of forming the underlayer film, the individual information of the liquid processing unit U1 and the heat processing unit U2, the above measurement data, and the two types of video data with the individual information of the workpiece W, and records them in the data storage unit 132.

[0071] Next, the control device 100 acquires still image data of the surface Wa of the workpiece W with the underlayer film formed thereon (step S02). In step S02, for example, the control device 100 controls the transport device A3 to transport the workpiece W with the underlayer film formed thereon to the inspection unit U3 in the processing module 11. Then, the processing data acquisition unit 124 acquires still image data of the entire surface Wa of the workpiece W and still image data of the peripheral region (peripheral region and end face) of the surface Wa from the cameras 72, 82 of the inspection unit U3.

[0072] The data recording unit 128 associates these two types of still image data with the individual information of the workpiece W, and records them in the data storage unit 132. This also associates the two types of still image data with the measurement data obtained in step S01. Thereafter, the control device 100 controls the transport device A3 to return the workpiece W on which the underlayer film has been formed to the shelf unit U10, and controls the transport device A7 to place this workpiece W in a cell for the processing module 12.

[0073] The measurement data obtained in step S01 is obtained during the period in which the process of forming the coating film AF (substrate processing for forming an underlayer film) is being performed, and indicates the state of processing of the workpiece W in that process. In this manner, the measurement data obtained in step S01 is data related to the substrate processing at the time when the video data or still image data was acquired. In relation to the video data in the above example, the measurement data is obtained during the substrate processing that was being performed when the video data was acquired. In relation to the still image data, the measurement data is obtained during the substrate processing that was performed immediately before the still image data was acquired.

[0074] Next, the control device 100 controls the coating and developing device 2 to perform substrate processing to form a resist film on the underlying film of the workpiece W (step S03). In step S03, for example, the control device 100 controls the transport device A3 to transport the workpiece W on the shelf unit U10 to the liquid processing unit U1 in the processing module 12. Then, the processing control unit 122 controls the liquid processing unit U1 to form a coating film AF of a processing liquid for forming a resist film on the surface Wa of the workpiece W.

[0075] Thereafter, the control device 100 controls the transport device A3 to transport the workpiece W with the coating film AF of the processing liquid for forming a resist film formed thereon to the heat treatment unit U2, and controls the heat treatment unit U2 to form a resist film on the surface Wa of the workpiece W. The processing data acquisition unit 124 and the data recording unit 128 acquire video data and measurement data in the same manner as in the acquisition and recording of data in step S02, and record the acquired video data and measurement data in the data storage unit 132 after associating them with the individual information of the workpiece W.

[0076] Next, the control device 100 acquires still image data of the surface Wa of the workpiece W on which the resist film has been formed (step S04). In step S04, for example, the control device 100 controls the transport device A3 to transport the workpiece W on which the resist film has been formed to the inspection unit U3 in the processing module 12. Then, the processing data acquisition unit 124 and the data recording unit 128 acquire still image data of the entire surface Wa of the workpiece W and the peripheral area thereof, as in step S02, and record the acquired still image data in the data storage unit 132 after associating it with the individual information of the workpiece W. Thereafter, the control device 100 controls the transport device A3 to return the workpiece W on which the resist film has been formed to the shelf unit U10, and controls the transport device A7 to place the workpiece W in a cell for the processing module 12.

[0077] Next, the control device 100 controls the coating and developing device 2 to execute substrate processing for forming an upper layer film on the resist film of the workpiece W (step S05). In step S05, for example, the control device 100 controls the transport device A3 to transport the workpiece W on the shelf unit U10 to the liquid processing unit U1 in the processing module 13. Then, the processing control unit 122 controls the liquid processing unit U1 to form a coating film AF of a processing liquid for forming an upper layer film on the surface Wa of the workpiece W.

[0078] Thereafter, the control device 100 controls the transport device A3 to transport the workpiece W having the coating film AF of the treatment liquid for forming the upper layer film formed thereon to the heat treatment unit U2, and controls the heat treatment unit U2 to form a resist film on the surface Wa of the workpiece W. The processing data acquisition unit 124 and the data recording unit 128 acquire video data and measurement data in the same manner as in the acquisition and recording of data in step S02, and record the acquired video data and measurement data in the data storage unit 132 after associating them with the individual information of the workpiece W.

[0079] Next, the control device 100 acquires still image data of the surface Wa of the workpiece W on which the upper layer film has been formed (step S06). In step S06, for example, the control device 100 controls the transport device A3 to transport the workpiece W on which the resist film has been formed to the inspection unit U3 in the processing module 13. Then, the processing data acquisition unit 124 and the data recording unit 128 acquire still image data of the entire surface Wa of the workpiece W and the peripheral region thereof, as in step S02, and record the acquired still image data in the data storage unit 132 after associating it with the individual information of the workpiece W. Thereafter, the control device 100 controls the transport device A3 to place the workpiece W on which the upper layer film has been formed in any one of the cells of the shelf unit U11.

[0080] Next, the control device 100 controls the coating and developing device 2 to perform a substrate processing for forming a resist pattern (step S07). In step S07, for example, the control device 100 controls the transport device A8 to transport the workpiece W in the shelf unit U11 to the exposure device 3, and controls the transport device A3 to return the workpiece W that has been subjected to the exposure processing to the shelf unit U11. Then, the control device 100 controls the transport device A3 to transport the workpiece W in the shelf unit U11 to the heat processing unit U2 in the processing module 14, and controls the heat processing unit U2 to perform a heat processing before the development processing on the workpiece W. Thereafter, the control device 100 controls the transport device A3 to transport the workpiece W that has been subjected to the heat processing before the development to the liquid processing unit U1 in the processing module 14, and controls the liquid processing unit U1 to perform a development processing of the resist film.

[0081] Next, the control device 100 controls the transport device A3 to transport the workpiece W that has been subjected to the development process to the heat treatment unit U2 in the processing module 14, and controls the heat treatment unit U2 to perform heat treatment after the development process on the workpiece W. The processing data acquisition unit 124 and the data recording unit 128 acquire video data, etc., similar to the acquisition and recording of data in step S02, and record the acquired video data, etc. in the data storage unit 132 after correlating it with the individual information of the workpiece W.

[0082] Next, the control device 100 acquires still image data of the surface Wa of the workpiece W on which the resist film has been developed (step S08). In step S08, for example, the control device 100 controls the transport device A3 to transport the workpiece W on which the resist film has been developed to the inspection unit U3 in the processing module 14. Then, the processing data acquisition unit 124 and the data recording unit 128 acquire still image data of the entire surface Wa of the workpiece W and the peripheral area thereof, as in step S02, and record the acquired still image data in the data storage unit 132 after associating it with the individual information of the workpiece W. Thereafter, the control device 100 controls the transport device A3 to return the workpiece W to the shelf unit U10, and controls the transport devices A7 and A1 to return the workpiece W into the carrier C.

[0083] Next, the control device 100 judges whether or not there is an abnormality in each of the substrate processing steps S01, S03, S05, and S07 (step S09). In step S09, for example, the abnormality judgment unit 126 judges whether or not there is an abnormality in the substrate processing for forming a film by comparing still image data (still images) before and after forming a film of one layer (e.g., a resist film). Alternatively, the abnormality judgment unit 126 may calculate a film thickness or a pattern width from the still image data and then judge whether or not there is an abnormality.

[0084] The abnormality determination unit 126 may determine the presence or absence of an abnormality in the substrate processing based on video data obtained during the execution of the substrate processing. Examples of abnormality determination based on video data include the presence or absence of an abnormality when the nozzle 42 is moved between the discharge position and the standby position, the presence or absence of an abnormality when the processing liquid is discharged from the nozzle 42, and the presence or absence of an abnormality when the workpiece W is rotated after completion of discharge to form the coating film AF. Examples of abnormality determination when the nozzle 42 is moved include determination of whether dripping occurs at the nozzle 42 during the movement, whether droplets fall from the nozzle 42 during the movement, etc.

[0085] The targets for abnormality determination while the treatment liquid is being discharged from the nozzle 42 include determination as to whether splashing of the treatment liquid discharged from the nozzle 42 occurs, whether bubbles occur in the treatment liquid inside the nozzle 42 during discharge, whether droplets fall from the nozzle 42 immediately after discharge is completed, and whether the position of the nozzle 42 is appropriate. The targets for abnormality determination while the coating film AF is being formed (drying) include determination as to whether the coating spreads appropriately, and whether the drying of the coating progresses appropriately. The abnormality determination unit 126 may use the above-mentioned two types of video data depending on the target for abnormality determination.

[0086] When it is determined from the still image data that an abnormality has occurred in the substrate processing, the abnormality determination unit 126 may identify the location where the abnormality has occurred. When it is determined from the video data that an abnormality has occurred in the substrate processing, the abnormality determination unit 126 may identify the timing at which the abnormality has occurred. The data recording unit 128 may store the abnormality determination result by the abnormality determination unit 126 in the data storage unit 132 in association with the individual information of the workpiece W. The abnormality determination result may include, in addition to information indicating the presence or absence of an abnormality, information indicating the location where the abnormality has occurred on the front surface Wa and information indicating the timing of the abnormality occurrence (the number of frames on the video data, or the time based on the image capture start time).

[0087] This completes the coating and developing process for one workpiece W. The control device 100 controls the coating and developing apparatus 2 to perform the coating and developing process similar to that described above for each of the subsequent multiple workpieces W. As a result, multiple types of substrate processing are performed on each of the multiple workpieces W, and information related to the processing for the multiple workpieces W is stored (accumulated) in the data storage unit 132.

[0088] [Display device] Next, the display device 200 will be described in detail. The display device 200 shown in Fig. 2 is a device that displays information related to processing in the coating and developing apparatus 2 on a display screen. The display device 200 is used by a user such as an operator to check the state of processing previously performed in the coating and developing apparatus 2. The display device 200 may be used to analyze the cause of a defect or the like that occurs in the workpiece W produced in the coating and developing apparatus 2, and may be used to adjust the setting values ​​of various processing conditions in the substrate processing of the workpiece W.

[0089] The display device 200 is a computer that executes a predetermined process for displaying various information related to substrate processing. The display device 200 is configured to execute at least the following: displaying, on the display screen, an image based on first imaging data previously captured in the coating and developing apparatus 2 of one of the workpieces W on which the above-mentioned coating and developing process has already been performed, in response to an instruction from a user; and displaying, on the display screen, an image based on second imaging data previously captured in the coating and developing apparatus 2 of the one workpiece W, in response to an instruction from a user. The display device 200 has, for example, a main body 202, an input device 204, and a monitor 206. The main body 202 is the main body of a computer.

[0090] The input device 204 is a device for inputting information (more specifically, input information indicating an instruction from a user) to the main body 202. The input device 204 may be any device capable of inputting desired information, and specific examples thereof include a keyboard, an operation panel, and a mouse. The monitor 206 is a device for displaying information output from the main body 202. The monitor 206 may be any device capable of displaying information on a screen, and specific examples thereof include a liquid crystal panel. The input device 204 and the monitor 206 may be integrated as a touch panel. For example, the main body 202, the input device 204, and the monitor 206 may be integrated as in a tablet computer.

[0091] 7, the main body 202 of the display device 200 has, as functional modules, for example, a board designation information acquisition section 212, a measurement data acquisition section 214, an image display instruction acquisition section 216, an imaging data acquisition section 218, a display condition acquisition section 222, a reproduction instruction acquisition section 224, an inspection information acquisition section 228, and a display control section 230. The processes executed by these functional modules correspond to the processes executed by the main body 202 of the display device 200.

[0092] The substrate designation information acquisition unit 212 is a functional module that acquires information identifying the work W designated by the user via the input device 204. The user designates one or more work W to be displayed on the display device 200. When designating multiple work W, the work W may be identified by individual information, or a range of processing dates and times may be designated to identify multiple work W included in that range. Alternatively, when designating multiple work W, a project (lot) to be displayed may be designated to identify multiple work W included in that project.

[0093] The measurement data acquisition unit 214 is a functional module that acquires, from the data storage unit 132 of the control device 100, measurement data that has already been obtained by the measuring unit 90 (sensor) provided in the coating and developing apparatus 2 during the period in which substrate processing is being performed on the designated workpiece W. The image display instruction acquisition unit 216 is a functional module that acquires an instruction to display an image from the user via the input device 204, and information that identifies the workpiece W selected by the user as the target for which an image is to be displayed from among the multiple designated workpieces W. Since the user selects the workpiece W for which an image is to be displayed from among the initially designated workpieces W (e.g., multiple workpieces W), the initially designated workpiece W becomes a candidate for the target for which an image is to be displayed.

[0094] The imaging data acquisition unit 218 is a functional module that acquires imaging data previously captured in the coating and developing apparatus 2 for a workpiece W (hereinafter referred to as a "workpiece W to be displayed") whose image is to be displayed, from the data storage unit 132. The display condition acquisition unit 222 is a functional module that acquires an instruction for the image display conditions from a user via the input device 204. The playback instruction acquisition unit 224 is a functional module that acquires an instruction to start playing a moving image and an instruction to stop playing the moving image from the user via the input device 204 when a moving image is to be displayed as an image based on imaging data. The inspection information acquisition unit 228 is a functional module that acquires information indicating the presence or absence of an abnormality in substrate processing for the workpiece W (workpiece W that is a candidate for image display) first specified by the user, from the data storage unit 132.

[0095] The display control unit 230 is a functional module capable of displaying an image based on one imaging data of the workpiece W to be displayed on the display screen of the monitor 206 in response to an instruction from the user via the input device 204, and capable of displaying an image based on imaging data different from the one imaging data of the workpiece W to be displayed on the display screen of the monitor 206 in response to an instruction from the user. In the following description, the one imaging data is referred to as "first imaging data" and the other imaging data different from the one imaging data is referred to as "second imaging data". In addition, in the present disclosure, an image based on imaging data refers to either a still image or a video.

[0096] The first imaging data and the second imaging data for one workpiece W to be displayed are, for example, data obtained by imaging at different timings for one substrate processing. Specific examples of the timing for obtaining imaging data include before the substrate processing is performed, after the substrate processing is performed (and before the next substrate processing is performed), during any of the steps included in the substrate processing, and after one step included in the substrate processing and before the other step is performed. In one example, the first imaging data is video data obtained by imaging during the substrate processing (during one of the steps), and the second imaging data is still image data obtained by imaging after the substrate processing and before the next substrate processing.

[0097] The first imaging data and the second imaging data for one display target workpiece W are, for example, data obtained by imaging different imaging ranges for one substrate processing. In this case, imaging for acquiring the first imaging data and the second imaging data may be performed at any timing in the above-mentioned examples. In one example, the first imaging data and the second imaging data are still image data obtained by imaging different imaging ranges after one substrate processing and before the next substrate processing. The first imaging data and the second imaging data may be video data obtained by imaging different imaging ranges during the execution of one substrate processing.

[0098] As described above, the first imaging data is data obtained by imaging one substrate processing at a different timing than the second imaging data, or data obtained by imaging a different imaging range than the second imaging data. Note that the first imaging data may be data obtained by imaging one substrate processing at a different timing than the second imaging data and in a different imaging range than the second imaging data. In the present disclosure, being able to display an image based on the first imaging data and an image based on the second imaging data on a display screen means that an image based on the first imaging data and an image based on the second imaging data can be displayed on a display screen at different timings (individually) or simultaneously.

[0099] [Display method] Next, as an example of a display method, a process executed in the substrate processing system 1 including the display device 200 will be described with reference to Fig. 8 to Fig. 13. In this display method, first, the control device 100 accumulates measurement data from the measurement unit 90, imaging data from the imaging unit 110, and imaging data from the inspection unit U3 for a plurality of workpieces W in the data storage unit 132 (step S21). The control device 100 repeatedly executes a series of processes shown in Fig. 6 as the process of step S21, for example.

[0100] After step S21 is executed, when an instruction to start processing is received from the user, the display device 200 starts processing related to display. In this processing, first, the display device 200 acquires information identifying the multiple workpieces W designated by the user (step S22). In step S22, for example, the substrate designation information acquisition unit 212 acquires information identifying the multiple workpieces W designated by the user based on information indicating the instruction from the user input via the input device 204. When designating the multiple workpieces W, the user may designate a range of dates and times when a series of substrate processing was performed by the coating and developing apparatus 2. In this case, the multiple workpieces W that were subjected to a series of substrate processing during the dates and times within that range are designated. The user may further designate the type of substrate processing and the individual processing units in order to narrow down the designated targets.

[0101] Next, the display device 200 acquires measurement data for multiple workpieces W (hereinafter simply referred to as "designated workpieces W") designated by the user (step S23). In step S23, for example, the measurement data acquisition unit 214 requests the data storage unit 132 of the control device 100 to transmit measurement data for each of the designated workpieces W. The data storage unit 132 that has received the request transmits to the measurement data acquisition unit 214, for each of the designated workpieces W, measurement data obtained by the measuring unit 90 (sensor) provided in the coating and developing apparatus 2 during the period in which the substrate processing is being performed on each of the workpieces W. If a type of substrate processing is designated, the measurement data acquisition unit 214 acquires measurement data related to the substrate processing, and if an individual processing unit is designated, acquires measurement data for the processing unit.

[0102] Next, the display device 200 displays information related to the measurement data for the designated workpieces W and information identifying the designated workpieces W on the display screen 300 (step S24). In step S24, for example, the display control unit 230 causes the display screen 300 to display the measurement data obtained by each sensor of the measurement unit 90 during the period when the substrate processing (any process) is being performed on each designated workpiece W. The display control unit 230 may also cause the display screen 300 to display a list including information identifying the designated workpieces W.

[0103] 9 shows an example of the display of the measurement data and the list on the display screen 300. The display control unit 230 may display a graph 302 based on the measurement data on the display screen 300. The graph 302 may be a graph that displays the measurement data in chronological order for a specific substrate process or a specific processing unit, or may be a graph that shows statistical values ​​of the measurement data. A plurality of selection buttons 304 for selecting a range of the measurement data included in the graph 302 may be displayed near the graph 302 on the display screen 300. The display control unit 230 may change the range of the measurement data included in the graph 302 in response to a user's operation on the selection button 304 (e.g., a click with a mouse).

[0104] The display control unit 230 may display a list 306 on the display screen 300 as information for identifying a specified workpiece W. In this list 306, information relating to one substrate processing for one workpiece W is displayed for each row. In the list 306 shown in FIG. 9, "apparatus ID" indicates individual information of the coating and developing apparatus 2 that performed a series of substrate processing on the specified (displayed) workpiece W. "Processing unit A" and "processing unit B" indicate the type and name (information indicating the individual) of the processing unit that performed the one substrate processing. For example, processing unit A corresponds to liquid processing unit U1, and processing unit B corresponds to heat processing unit U2.

[0105] "Sensor measurement value" indicates the measurement value (numerical value) obtained from the sensor of the measuring unit 90 provided in the coating and developing apparatus 2. Unlike the display example of FIG. 9, multiple columns may be provided to indicate measurement values ​​from multiple sensors. The sensor measurement values ​​displayed in the list 306 may be included in the measurement data displayed as the graph 302. "PJ ID" indicates information that identifies the project (lot) to which the specified work W belongs. "Wafer ID" indicates individual information for identifying each specified work W. "Processing date and time" indicates the date and time when the substrate processing to be displayed was performed on the work W to be analyzed.

[0106] In the list 306, link buttons 308a to 308c for displaying the image data are displayed for each row (for each workpiece W). The link button 308a located in the field indicated by "Imaging result 1 (after processing)" is a button for receiving an instruction to display the image captured after the substrate processing. The link button 308b located in the field indicated by "Imaging result 2 (during processing)" is a button for receiving an instruction to display the image captured during the substrate processing. The link button 308c located in the field indicated by "Imaging result 2 (during processing) another viewpoint" is a button for receiving an instruction to display the image captured from a viewpoint (imaging range) different from the imaging result 2 during the substrate processing. The user can operate the link buttons 308a to 308c in the row in which the workpiece W for which the image is to be displayed is located in the list 306. That is, the user selects one workpiece W to be displayed (workpiece W to be displayed) from among the specified multiple workpieces W (workpieces W that can be the target of image display).

[0107] In the display screen 300, a narrowing down button 312 for further narrowing down the user's designated range may be displayed near the list 306. The narrowing down button 312 may be a button that can be selected in a pull-down style, and for example, it is possible to further narrow down the list 306 to the project, the type of substrate processing, the individual information of the workpiece W, and the processing date and time. When the user operates the narrowing down button 312, the display control unit 230 may display the list 306 after further narrowing down the designated range (the displayed multiple workpieces W). In the display screen 300, instruction buttons 314 and 316 may be displayed near the list 306. For example, the instruction button 314 is a button for displaying more detailed information about the selected row. The instruction button 316 may be a button for displaying the measurement data of the workpiece W and the substrate processing displayed in the selected row as a graph 302.

[0108] 8, after execution of step S24, when the display device 200 receives an instruction to output a processed image from the user (step S25), it acquires image data corresponding to the instruction (step S26). In step S25, for example, the image display instruction acquisition unit 216 receives an instruction to display an image in response to a user's operation on any of the link buttons 308a, and acquires information indicating the workpiece W to be displayed.

[0109] In step S26, for example, the imaging data acquisition unit 218 acquires still image data obtained by imaging the workpiece W to be displayed after one substrate processing (substrate processing to be the subject of image display) for the workpiece W to be displayed. The imaging data acquisition unit 218 may request the data storage unit 132 to transmit data, and acquire the still image data for the workpiece W to be displayed from the data storage unit 132. In one example, the imaging data acquisition unit 218 acquires from the data storage unit 132 still image data (first imaging data) obtained by imaging the entire surface Wa of the workpiece W in a state in which a predetermined film such as a resist film is formed, and still image data (second imaging data) obtained by imaging the peripheral region of the surface Wa of the workpiece W in a state in which the predetermined film is formed, for the workpiece W to be displayed.

[0110] Next, the display device 200 displays the two types of still image data acquired in step S26 (step S27). In step S27, for example, the display control unit 230 causes the display screen 300 to simultaneously display a still image (hereinafter referred to as a "first still image") based on still image data obtained by imaging the entire surface Wa of the workpiece W to be displayed after the substrate processing, and a still image (hereinafter referred to as a "second still image") based on still image data obtained by imaging the peripheral region of the surface Wa of the workpiece W to be displayed.

[0111] FIG. 10 shows an example of a first still image and a second still image displayed on the display screen 300. The display control unit 230 may display the first still image 322 and the second still image 332 side by side in the vertical direction (vertical direction on the screen) on the display screen 300. The display control unit 230 may display the rectangular second still image 332 on the display screen 300 so that the position in the circumferential direction of the workpiece W is the horizontal axis and the position in the radial direction of the workpiece W is the vertical axis, based on still image data obtained by imaging the peripheral area of ​​the surface Wa of the workpiece W to be displayed. The horizontal axis corresponds to the horizontal direction on the screen, and the vertical axis corresponds to the vertical direction on the screen. The horizontal axis is perpendicular to the vertical axis.

[0112] In the second still image 332, the position of a pixel in the horizontal direction corresponds to the position in the circumferential direction of the workpiece W (the angle from a reference position in the circumferential direction of the workpiece W), and the position of a pixel in the vertical direction corresponds to the position in the radial direction of the workpiece W. When an image capturing the peripheral region of the surface Wa of the workpiece W and the end face of the workpiece W is displayed as the second still image 332, in the region corresponding to the end face of the workpiece W, the position in the thickness direction of the workpiece W is the vertical axis.

[0113] The display control unit 230 may simultaneously display information different from the first still image 322 and the second still image 332 on the display screen 300. For example, the display control unit 230 displays an auxiliary image 342 including information on a processing abnormality and information indicating a method of displaying the still images, as the different information, together with the first still image 322 and the second still image 332 on the display screen 300. The display control unit 230 may display these images on the display screen 300 such that the auxiliary image 342 is aligned horizontally with respect to the first still image 322. In this case, the first still image 322 and the auxiliary image 342 are displayed on the display screen 300 so as to be adjacent to each other in the horizontal direction on the screen.

[0114] The display control unit 230 may display the first still image 322 and the auxiliary image 342 on the display screen 300 so that the second still image 332 is aligned vertically with respect to both of these images. In this case, the first still image 322 (auxiliary image 342) and the second still image 332 are displayed on the display screen 300 so as to be adjacent to each other vertically on the screen. In the example shown in FIG. 10, the second still image 332 is located below the first still image 322 on the screen, but the first still image 322 and the second still image 332 may be displayed on the display screen 300 so that the second still image 332 is located above the first still image 322. As shown in FIG. 10, the width of the second still image 332 may be longer than the width of the first still image 322 (auxiliary image 342), or may be approximately equal to the sum of the width of the first still image 322 and the width of the auxiliary image 342.

[0115] The display control unit 230 may execute control to enlarge and display a part of the first still image 322 (hereinafter, referred to as "enlarged display control"). The display control unit 230 may display a guide image 324 indicating an enlarged position of the first still image 322 on the display screen 300 at least during the period during which the enlarged display control is executed (during a period overlapping with at least a part of the execution period of the enlarged display control). For example, the guide image 324 may display a frame 326 corresponding to the outer edge of the displayed part of the first still image 322. Note that in FIG. 10, the first still image 322 is not enlarged, and the display position of the frame 326 does not correspond. In FIG. 10, the position of the frame 326 illustrates a case in which the center part of the workpiece W is enlarged and displayed in the first still image 322.

[0116] The display control unit 230 may execute enlarged display control for enlarging and displaying a portion of the second still image 332, similar to the first still image 322. The display control unit 230 may display a guide image 334 indicating an enlarged position relative to the entire second still image 332 on the display screen 300 at least during the period during which the enlarged display control is executed (during a period overlapping with at least a portion of the execution period of the enlarged display control). For example, the guide image 334 may display an arc 336 corresponding to the displayed portion of the second still image 332.

[0117] The display control unit 230 may superimpose and display an image 346 indicating a peculiar region on the surface Wa of the workpiece W to be displayed. An example of a peculiar region is a location (region) where it is determined that an abnormality has occurred on the surface Wa of the workpiece W. When such a display is performed, in step S26, the inspection information acquisition unit 228 may acquire information indicating the presence or absence of an abnormality in the workpiece W to be displayed and information indicating the region where the abnormality has occurred from the data storage unit 132 of the control device 100.

[0118] The display control unit 230 may superimpose an image 328 indicating a position where the workpiece W to be displayed is to be cut on the first still image 322. More specifically, the image 328 indicates a planned cutting position (line) that is a separation line for dividing the workpiece W after a series of substrate processes are performed in the coating and developing apparatus 2 and a circuit or the like is formed on the surface Wa of the workpiece W. Information on the cutting position indicated by the image 328 is stored in advance in the display device 200, for example. In addition, the display control unit 230 may superimpose the above-mentioned unique region on the first still image 322 together with the planned cutting position. In this case, the divided portion (divided portion) overlapping with the unique region is visualized, and the general yield (the ratio of normal divided portions to the whole) can be easily recognized by a visual image.

[0119] 8, when the display device 200 receives an instruction to output a moving image during processing from the user (step S28), it acquires moving image data according to the instruction (step S29). In step S28, for example, the image display instruction acquisition unit 216 receives an instruction to display an image (display a moving image) in response to a user's operation on either of the link buttons 308b or 308c, and acquires information indicating the workpiece W to be displayed.

[0120] In step S29, for example, the imaging data acquisition unit 218 acquires video data obtained by imaging the workpiece W or the periphery of the workpiece W during one substrate processing (substrate processing that is the subject of the video display) for the workpiece W to be displayed. In one example, when the link button 308b is operated, the imaging data acquisition unit 218 acquires video data (first imaging data) obtained by imaging the above-mentioned imaging range PR1 (see FIG. 4(a)) for the workpiece W to be displayed during the substrate processing. When the link button 308c is operated, the imaging data acquisition unit 218 acquires video data (second imaging data) obtained by imaging the above-mentioned imaging range PR2 (see FIG. 4(b)) for the workpiece W to be displayed during the substrate processing.

[0121] Next, the display device 200 displays on the display screen 300 a video based on the video data acquired in step S29 (step S30). In step S30, for example, if the link button 308b is operated in step S28, the display control unit 230 causes the display screen 300 to display a video based on the video data obtained by imaging the imaging range PR1. Also, if the link button 308c is operated in step S28, the display control unit 230 causes the display screen 300 to display a video based on the video data obtained by imaging the imaging range PR2. Regardless of whether the link button 308b or the link button 308c is operated, a video based on the video data may be displayed in the same manner. An example of a method of displaying a video when the link button 308b is operated will be described below.

[0122] The display control unit 230 may display one video based on video data about the workpiece W to be displayed on the display screen 300. Alternatively, the display control unit 230 may display another video about a workpiece W other than the workpiece W to be displayed (hereinafter referred to as "another workpiece W to be displayed") on the display screen 300, in addition to the video based on video data about the workpiece W to be displayed. The display control unit 230, for example, simultaneously displays a video 350a about the workpiece W to be displayed and another video 350b about the other workpiece W to be displayed side by side on the display screen 300 (see FIG. 12). The video 350a and the video 350b are the same type of video.

[0123] The display control unit 230 may display the videos 350a and 350b on the display screen 300 based on a user instruction indicating the order of the video 350a and another video 350b. When the display control unit 230 receives an instruction from the user to start playback, the display control unit 230 may simultaneously start playback of the videos 350a and 350b. Furthermore, when the display control unit 230 receives an instruction from the user to stop playback, the display control unit 230 may simultaneously stop playback of the videos 350a and 350b.

[0124] In one example, as shown in FIG. 11, when the link button 308b located in any row is operated by the user, the display control unit 230 displays a display position selection screen 348a on the display screen 300. At this time, the image display instruction acquisition unit 216 determines that a specific work W shown in the row is to be displayed. In one example, the display position selection screen 348a displays "Left" and "Right" representing left and right positions, and includes a selection button for selecting a display position. Then, when the user selects the left and right display positions for the video 350a of the work W to be displayed, the display condition acquisition unit 222 acquires information indicating the position (display condition) to display the video 350a.

[0125] When the user operates the link button 308b located in a row different from the workpiece W to be displayed, the display control unit 230 displays a display position selection screen 348b on the display screen 300. At this time, the image display instruction acquisition unit 216 determines that the specific workpiece W shown in the different row is another display target. The display position selection screen 348b displays the same content as the display position selection screen 348a. Then, when the user selects the left or right display position for the video 350b of the workpiece W to be displayed, the display condition acquisition unit 222 acquires information indicating the position to display the video 350b. As a result, the display condition acquisition unit 222 acquires information indicating the order of the videos 350a and 350b.

[0126] Thereafter, when the user operates a button indicated by "View" included in either of the display position selection screens 348a, 348b, the display control unit 230 transitions to a display for playing the moving images shown in Fig. 12. For example, the display control unit 230 displays the moving images 350a and 350b side by side on the display screen 300 according to the display conditions (order) acquired by the display condition acquisition unit 222. The display control unit 230 may wait without playing the moving images until an instruction to play the moving images is received.

[0127] In addition to the videos 350a and 350b, the display control unit 230 may display various operation buttons for instructing playback of the videos and an image showing the playback state on the display screen 300. For example, the display control unit 230 may display a play button 362 for the user to instruct the start of playback of the videos 350a and 350b and a stop button 364 for the user to instruct the stop of playback of the videos 350a and 350b on the display screen 300. The display control unit 230 may display a rewind button 366 for rewinding the videos 350a and 350b simultaneously and a fast-forward button 368 for fast-forwarding the videos 350a and 350b simultaneously on the display screen 300. These operation buttons may be disposed approximately in the center of the range in which the videos 350a and 350b are displayed side by side.

[0128] When the play button 362 is operated by the user, the play instruction acquisition unit 224 acquires information indicating an instruction to start playing the video (hereinafter referred to as "start instruction information"), and when the stop button 364 is operated by the user, the play instruction acquisition unit 224 acquires information indicating an instruction to stop playing the video (hereinafter referred to as "stop instruction information"). When the play instruction acquisition unit 224 acquires the start instruction information, the display control unit 230 starts playing the videos 350a and 350b simultaneously. When the play instruction acquisition unit 224 acquires the stop instruction information, the display control unit 230 stops playing the videos 350a and 350b simultaneously.

[0129] The display control unit 230 may display, as images indicating the playback states, an image 354a indicating the current playback position of the video 350a and an image 354b indicating the current playback position of the video 350b on the display screen 300. For example, each of the images 354a and 354b displays a numerical value and an indicator indicating the time point of the current playback position within the entire period (total number of frames) of the corresponding video.

[0130] The display control unit 230 may display the videos 350a and 350b on the display screen 300 so that the execution timings of the substrate processing (e.g., the start timings of the processing) in the videos 350a and 350b match each other. For example, imaging may be performed in the coating and developing apparatus 2 so that the acquisition start timing of the video data is constant for each substrate processing. Alternatively, each video data may be associated with information indicating the frame number corresponding to the start timing of the processing (information indicating in which frame the substrate processing started), and then recorded in the data storage unit 132.

[0131] The display control unit 230 may enlarge a part of the imaging range PR1 and then display the videos 350a and 350b. For example, the display control unit 230 may display the videos 350a and 350b on the display screen 300 based on the video data so that the entire surface Wa of the workpiece W to be displayed is not displayed, and the area between the center CP of the surface Wa of the workpiece W and a part of the periphery Wb is displayed. A part of the periphery Wb included in the display screen 300 (for example, about 1 / 2 to 1 / 4 of the entire periphery Wb) may be a part close to the camera 112 among the entire circumference of the periphery Wb. The imaging range of the camera 112 may be set in advance so that the entire surface Wa of the workpiece W is not included, and the area between the center CP of the surface Wa of the workpiece W and a part of the periphery Wb is included. The display control unit 230 may display only the above-mentioned area on the display screen 300 when displaying a video of a process performed while rotating the workpiece W (for example, discharging a processing liquid or forming a coating film AF after discharging).

[0132] After step S30 is completed, the display device 200 ends the processing related to the display, for example, in response to an instruction from the user via the input device 204. Note that the above-described processing is an example and can be modified as appropriate. Depending on the instruction from the user, the display device 200 may execute the processing of steps S25 to S27 after executing the processing of steps S28 to S30. Depending on the instruction from the user, the display device 200 may repeatedly execute the processing of steps S28 to S30 or the processing of steps S25 to S27 after changing the work W to be displayed.

[0133] In the above-mentioned step S24, the display control unit 230 displays a list 306 on the display screen 300 as a list of information that identifies multiple workpieces W designated by the user and that can be the workpieces W to be displayed (candidates for the workpieces W to be displayed). When inspection information indicating the presence or absence of a processing abnormality is held for the workpieces W included in the list (e.g., the list) in the display device 200 and the inspection information indicates an abnormality, the display control unit 230 may display, in the list, information indicating that an abnormality has occurred in the substrate processing for the workpieces W for which an abnormality has been indicated by the inspection information.

[0134] 13, instead of list 306 on display screen 300. List 306A shows a list of multiple workpieces W to be analyzed, similar to list 306. List 306A shows information on each substrate process for each workpiece W in list 306, whereas list 306A shows information on multiple substrate processes for each workpiece W together.

[0135] In the list 306A, individual information of the workpiece W and a link button for displaying an image for each of a plurality of substrate processes are displayed for each row. The display control unit 230 displays the link buttons 352a to 352g for each row. In the example shown in FIG. 13, "Process 1", "Process 2", and "Process 3" indicate different types of substrate processes. Process 1 may be a process for forming an underlayer film, process 2 may be a process for forming a resist film, and process 3 may be a process for forming an upper layer film or a process for developing a resist film. The link button 352a in the "After Completion of Process 1" column, the link button 352d in the "After Completion of Process 2" column, and the link button 352g in the "After Completion of Process 3" column correspond to the above-mentioned link button 308a for displaying a still image.

[0136] The link button 352b in the "Process 2" column and the link button 352e in the "Process 3" column correspond to the above-mentioned link button 308b for displaying the first moving image data. The link button 352c in the "Process 2 (another range)" column and the link button 352f in the "Process 3 (another range)" column correspond to the above-mentioned link button 308c for displaying the second moving image data. The user operates the link buttons 352a to 352g corresponding to the substrate processing for which the image is to be displayed in the row in which the workpiece W for which the image is to be displayed is located in the list 306A. In response to the operation (instruction), the display control unit 230 causes the display screen 300 to display an image of the workpiece W in the selected substrate processing.

[0137] In step S23, the inspection information acquisition unit 228 may acquire information regarding abnormalities in processing for each of the workpieces W to be analyzed (hereinafter referred to as "inspection information") from the data storage unit 132 of the control device 100. The inspection information may include information indicating abnormalities in processing for each workpiece W. In step S24, when the inspection information for any of the workpieces W indicates an abnormality in processing, the display control unit 230 may display information indicating that an abnormality has occurred in the substrate processing of that workpiece W in the list 306A.

[0138] For example, the display control unit 230 may display a mark image 354 in a column (cell) corresponding to the workpiece W and substrate processing in which a processing abnormality has been detected. Alternatively, the display control unit 230 may make the background color of the column corresponding to the workpiece W and substrate processing in which a processing abnormality has been detected in the list 306A different from the surroundings. The workpiece W in which a processing abnormality has been detected may be selected as the workpiece W to be displayed by a user operation. Note that the display control unit 230 may also display information indicating that an abnormality has occurred in the list 306 shown in FIG. 9.

[0139] Information indicating the time (frame number) at which the processing abnormality was detected may be associated with video data about the workpiece W in which a processing abnormality was detected and stored in the data storage unit 132. In this case, the display control unit 230 may display a skip button 372 on the display screen 300 to skip to the time (frame) at which the processing abnormality was detected when displaying the videos 350a and 350b, as shown in FIG.

[0140] 14 is a block diagram showing an example of a hardware configuration of the control device 100 and the display device 200. The control device 100 is configured by one or more computers. For example, the control device 100 has a circuit 150. The circuit 150 has one or more processors 152, a memory 154, a storage 156, an input / output port 158, a timer 162, and a communication port 164. The storage 156 has a computer-readable storage medium such as a hard disk. The storage medium stores a program for causing the control device 100 to execute the substrate processing method. The storage medium may be a removable medium such as a non-volatile semiconductor memory, a magnetic disk, or an optical disk.

[0141] The memory 154 temporarily stores the programs loaded from the storage medium of the storage 156 and the results of calculations by the processor 152. The processor 152 executes the above programs in cooperation with the memory 154 to configure each functional module of the control device 100. The input / output port 158 ​​inputs and outputs electrical signals between the liquid processing unit U1, the heat processing unit U2, the inspection unit U3, the measurement unit 90, the imaging unit 110, and the like of the coating and developing apparatus 2 in accordance with instructions from the processor 152. The timer 162 measures the elapsed time by counting, for example, a reference pulse at a constant period. The communication port 164 communicates with the display device 200 wirelessly, via a wire, or via a network line, etc., in accordance with instructions from the processor 152.

[0142] When the control device 100 is configured with a plurality of computers, each functional module may be realized by an individual computer. The control device 100 may be configured with a control computer including functional modules for performing various substrate processing by the coating and developing apparatus 2, and a data server including a functional module (data storage unit 132) for storing image data and measurement data. Alternatively, each of these functional modules may be realized by a combination of two or more computers. In these cases, the multiple computers may be connected to each other so as to be able to communicate with each other and cooperate to execute the above-mentioned substrate processing method.

[0143] The display device 200 includes, for example, a circuit 250. The circuit 250 includes one or more processors 252, a memory 254, a storage 256, an input / output port 258, a timer 262, and a communication port 264. The storage 256 includes a computer-readable storage medium, such as a hard disk. The storage medium stores a program for causing the display device 200 to execute the above-described display method. The storage medium may be a removable medium, such as a non-volatile semiconductor memory, a magnetic disk, or an optical disk.

[0144] The memory 254 temporarily stores the programs loaded from the storage medium of the storage 256 and the results of calculations by the processor 252. The processor 252 executes the above programs in cooperation with the memory 254 to configure each functional module of the display device 200. The input / output port 258 inputs and outputs electrical signals between the input device 204 and the monitor 206, etc., in accordance with instructions from the processor 252. The timer 262 measures the elapsed time by, for example, counting reference pulses at a constant period. The communication port 264 communicates with the control device 100 (the above-mentioned communication port 164) wirelessly, via a wired line, a network line, or the like, in accordance with instructions from the processor 252.

[0145] The display device 200 may be configured with a plurality of computers, similar to the control device 100. In this case, each functional module may be realized by an individual computer. Alternatively, each functional module may be realized by a combination of two or more computers. In these cases, the plurality of display computers may execute the above-mentioned display method in cooperation with each other while being connected to each other so as to be able to communicate with each other.

[0146] The hardware configuration of the control device 100 and the display device 200 is not necessarily limited to configuring each functional module by a program. For example, each functional module of the control device 100 and the display device 200 may be configured by a dedicated logic circuit or an ASIC (Application Specific Integrated Circuit) that integrates the dedicated logic circuit.

[0147] [Effects of the embodiment] The display device 200 described above is a device that displays, on a display screen 300, information about processing in the coating and developing apparatus 2 that performs a predetermined substrate processing on a plurality of workpieces W. The display device 200 is capable of displaying, on the display screen 300, an image based on first imaging data obtained by imaging a workpiece W to be displayed among the plurality of workpieces W in the coating and developing apparatus 2 in the past in response to an instruction from a user, and is equipped with a display control unit 230 that is capable of displaying, on the display screen 300, an image based on second imaging data obtained by imaging a workpiece W to be displayed in the past in the coating and developing apparatus 2 in response to an instruction from a user. The first imaging data is data obtained by imaging at a timing different from that of the second imaging data, or data obtained by imaging a different imaging range from that of the second imaging data.

[0148] In this display device 200, the user can check two types of images with different imaging timings or imaging ranges for one workpiece W that is the display target. Therefore, there is no need to check two types of images individually using different devices, and the state of substrate processing previously performed on the workpiece W that is the display target can be easily understood.

[0149] The display control unit 230 may be capable of displaying on the display screen 300 measurement data related to the substrate processing when the first image data or the second image data was acquired, which is data already obtained about the workpiece W to be displayed by a sensor provided in the coating and developing apparatus 2. In this case, data indicating the measurement value by the sensor and an image of the workpiece W displaying the data can be displayed on the screen. Therefore, the processing result or the processing process that cannot be confirmed only by the sensor data can be confirmed on one display device without referring to data from another device. Therefore, the work of understanding the state of the substrate processing performed in the past can be simplified.

[0150] The first imaging data may be still image data obtained by imaging the entire surface Wa of the workpiece W to be displayed after the substrate processing. The second imaging data may be still image data obtained by imaging the peripheral area of ​​the surface Wa of the workpiece W to be displayed after the substrate processing. The display control unit 230 may simultaneously display a first still image 322 based on the first imaging data and a second still image 332 based on the second imaging data on the display screen 300. In this case, the user can check the processing result of the entire surface Wa of the workpiece W and the processing result of the peripheral area of ​​the surface Wa of the workpiece W on one display screen 300. As a result, the time required to grasp the processing results of the entire surface and the peripheral area can be shortened.

[0151] The display control unit 230 may display the second still image 332 on the display screen 300 based on the second captured image data such that the circumferential position of the workpiece W to be displayed is the horizontal axis and the radial position of the workpiece W to be displayed is the vertical axis. In this case, the area for displaying the still image of the peripheral region within the display screen 300 can be reduced compared to the case where the still image of the peripheral region is displayed according to the actual shape.

[0152] The display control unit 230 may further display an auxiliary image 342 showing information different from the first imaging data and the second imaging data on the display screen 300 so as to be aligned horizontally with the first still image 322. The display control unit 230 may display the second still image 332 on the display screen 300 so as to be aligned vertically with both the first still image 322 and the auxiliary image 342. In this case, the space generated by simultaneously displaying the entire image of the surface Wa and the image of the peripheral region on the display screen 300 can be effectively utilized. For example, when the image of the peripheral region is converted into an orthogonal coordinate system and then displayed, the image of the peripheral region tends to be longer in the horizontal direction than the entire image of the surface Wa. In the above configuration, the space generated due to the difference in the horizontal length can be effectively utilized.

[0153] The display control unit 230 may execute an enlarged display control for enlarging and displaying a part of the first still image 322 or the second still image 332. At least during the period in which the enlarged display control is being executed, the display control unit 230 may display guide images 324, 334 on the display screen 300, which indicate the enlarged position of the still image, the part of which is being enlarged and displayed, relative to the entirety of the still image. In this case, by referring to the guide images, the user can easily understand which part is enlarged.

[0154] The display control unit 230 may superimpose an image showing the planned position where the workpiece W to be displayed is to be cut on the first still image. In this case, it is possible to estimate the effect of the result of the substrate processing on each chip obtained by cutting the workpiece W into individual pieces. For example, when the location where an abnormality has occurred is also displayed on the first still image, it is possible to predict the yield rate of one workpiece W.

[0155] The first imaging data may be video data obtained by imaging the workpiece W to be displayed or the periphery of the workpiece W during substrate processing of the workpiece W to be displayed. The second imaging data may be still image data obtained by imaging at least a part of the surface Wa of the workpiece W to be displayed after the substrate processing. In this case, on one display device, the processing process of one workpiece W can be confirmed by video and the processing result can be confirmed by still images. As a result, it becomes easier to grasp the processing state. For example, when an abnormality is found in a still image, the cause of the abnormality can be identified by checking the video of the workpiece W.

[0156] The first imaging data may be video data obtained by imaging the workpiece W to be displayed or the periphery of the workpiece W during substrate processing of the workpiece W to be displayed. The display control unit 230 may simultaneously display a video 350a based on the video data and another video 350b corresponding to the video of a workpiece W other than the workpiece W to be displayed side by side on the display screen 300. In this case, the processing process can be confirmed by comparing two different workpieces W. For example, by comparing the videos, an abnormality in the processing of one of the workpieces W can be easily found.

[0157] The display control unit 230 may display the video 350a and the video 350b on the display screen 300 based on an instruction from a user indicating the order of the video 350a and the video 350b. In this case, the user can check the videos after understanding the correspondence between the two videos and the individual pieces of the workpiece W.

[0158] When receiving an instruction to start playback from a user, the display control unit 230 may simultaneously start playback of the video 350a and the video 350b. When receiving an instruction to stop playback from a user, the display control unit 230 may simultaneously stop playback of the video 350a and the video 350b. In this case, it is possible to simplify the instruction from the user (for example, an operation by the input device 204) when comparing the two videos.

[0159] The display control unit 230 may display the moving images 350a and 350b on the display screen 300 so that the execution timings of the substrate processing are aligned in the displayed moving images. In this case, it is easy to understand the processing process by comparing the moving images.

[0160] The display control unit 230 may display the moving images 350a, 350b based on the moving image data on the display screen 300 so that the entire surface Wa of the workpiece W to be displayed is not displayed, and the area between the center of the surface Wa of the workpiece W to be displayed and a part of the periphery Wb is displayed. In this case, the state of the surface Wa of the workpiece W in the moving image can be confirmed with increased resolution. For example, when the workpiece W is rotating during substrate processing, the processing process of the entire surface of the workpiece W can be confirmed with increased resolution.

[0161] The display control unit 230 may be capable of displaying on the display screen 300 a list of information that identifies a plurality of workpieces W that can be designated by the user and that can be the workpieces W to be displayed. When the display device 200 holds inspection information indicating the presence or absence of abnormality in processing for the workpieces W included in the list, and the inspection information indicates an abnormality, the display control unit 230 may display information indicating that an abnormality has occurred in the substrate processing for the workpieces W that have been indicated to be abnormal by the inspection information, in the list. In this case, the user can immediately identify the workpieces W that have an abnormality by checking the list. Therefore, the user can also identify which workpieces W have an abnormality on the display device 200, which simplifies the work of identifying the state of substrate processing for the workpieces W that have an abnormality.

[0162] [Variations] In the above-mentioned embodiment, as the combination of the first imaging data and the second imaging data, still image data having different imaging ranges after the substrate processing and video data having different imaging ranges during the substrate processing are exemplified. In addition, as the combination of the first imaging data and the second imaging data, still image data and video data having different imaging timings during one substrate processing are exemplified. The combination of the first imaging data and the second imaging data is not limited to these examples. The first imaging data may be still image data obtained by imaging during the substrate processing (during the execution of any process), and the second imaging data may be either still image data or video data obtained by imaging after the substrate processing (after all processes in the substrate processing).

[0163] The first imaging data may be still image data obtained by imaging during substrate processing, and the second imaging data may be still image data obtained by imaging in an imaging range different from that of the first imaging data during substrate processing. The second imaging data may be either still image data or video data obtained by imaging for a substrate processing different from that for which the first imaging data was obtained (e.g., during or after that substrate processing). When the first imaging data and the second imaging data are obtained in different substrate processing, the image type and imaging range may be the same or different from each other.

[0164] In the above-mentioned embodiment, the process of forming a film and the process of performing a predetermined processing on the film have been described as substrate processing, but examples of substrate processing are not limited to these. Other examples of substrate processing include a process of cleaning the workpiece W, a process of performing localized exposure, a process of adjusting the temperature of the workpiece W, a process of irradiating light onto the workpiece W, and a process of removing a part or all of a film on the workpiece W. Furthermore, a process (unit processing) performed in each unit may correspond to one substrate processing. For example, each of the liquid processing in the liquid processing unit U1 (a process of forming a coating film or a process of performing development) and the process of performing heat processing in the heat processing unit U2 may correspond to one substrate processing.

[0165] In the above example, the control device 100, which is an external device to the display device 200, stores the measurement data and the imaging data, but the display device may include a data storage unit that stores the measurement data and the imaging data. In this case, the imaging data acquisition unit 218, etc. may acquire various data from a data storage unit in the display device itself.

[0166] In the substrate processing system 1, one display device 200 may be provided for one coating and developing apparatus 2, or one display device 200 may be provided for a plurality of coating and developing apparatuses 2. The places (rooms or buildings) in which the coating and developing apparatuses 2, the control apparatus 100, and the display device 200 are installed may be the same or different from each other.

[0167] Various embodiments of the present disclosure have been described herein for purposes of illustration, and various modifications may be made without departing from the scope and spirit of the present disclosure. Accordingly, the various embodiments disclosed herein are not intended to be limiting, with the true scope and spirit being indicated by the appended claims. [Explanation of symbols]

[0168] 1...substrate processing system, 2...coating and developing apparatus, 90...measuring section, 110...imaging section, U3...inspection unit, 100...control device, 200...display device, 222...display condition acquisition section, 224...play instruction acquisition section, 230...display control section, 300...display screen, 322...first still image, 332...second still image, 350a, 350b...moving image.

Claims

1. A display device that displays information on a display screen regarding a process in a substrate processing apparatus that performs a predetermined substrate process on a plurality of substrates, a display control unit capable of displaying, on the display screen, an image based on first imaging data obtained by imaging a substrate to be displayed of the plurality of substrates in the substrate processing apparatus in the past in response to an instruction from a user, and displaying, on the display screen, an image based on second imaging data obtained by imaging a substrate to be displayed in the substrate processing apparatus in the past in response to an instruction from the user, A display device, wherein the first imaging data is data obtained by imaging at a timing different from that of the second imaging data, or data obtained by imaging a different imaging range from that of the second imaging data.

2. The display device according to claim 1, wherein the display control unit is capable of displaying on the display screen measurement data related to the substrate processing at the time the first imaging data or the second imaging data was acquired, the measurement data being data already obtained about the substrate to be displayed by a sensor provided in the substrate processing apparatus.

3. the first imaging data is still image data obtained by imaging an entire surface of the substrate to be displayed after the substrate processing, the second imaging data is still image data obtained by imaging a peripheral region of a surface of the substrate to be displayed after the substrate processing; The display device according to claim 1 , wherein the display control unit causes a first still image based on the first imaging data and a second still image based on the second imaging data to be simultaneously displayed on the display screen.

4. The display device according to claim 3, wherein the display control unit displays the second still image on the display screen based on the second imaging data so that the circumferential position of the substrate to be displayed is the horizontal axis and the radial position of the substrate to be displayed is the vertical axis.

5. The display control unit is further displaying an auxiliary image showing information different from the first imaging data and the second imaging data on the display screen so as to be aligned horizontally with the first still image; The display device according to claim 4 , wherein the second still image is displayed on the display screen so as to be aligned vertically with both the first still image and the auxiliary image.

6. The display control unit is Executing an enlarged display control for enlarging and displaying a part of the first still image or the second still image; A display device according to any one of claims 3 to 5, wherein, at least during the period during which the enlarged display control is being executed, a guide image indicating the enlarged position of a still image, a portion of which is being enlarged and displayed, is displayed on the display screen.

7. The display device according to any one of claims 3 to 6, wherein the display control unit causes an image indicating a position where the substrate to be displayed is planned to be cut to be superimposed on the first still image.

8. the first imaging data is video data obtained by imaging the substrate to be displayed or a periphery of the substrate during execution of the substrate processing on the substrate to be displayed, The display device according to claim 1 , wherein the second imaging data is still image data obtained by imaging at least a part of a surface of the substrate to be displayed after the substrate processing.

9. the first imaging data is video data obtained by imaging the substrate to be displayed or a periphery of the substrate during execution of the substrate processing on the substrate to be displayed, The display device according to claim 1 or 2, wherein the display control unit simultaneously displays a video based on the video data and another video corresponding to the video of a substrate other than the substrate to be displayed, side by side on the display screen.

10. The display device according to claim 9 , wherein the display control unit causes the video and the different video to be displayed on the display screen based on an instruction from a user indicating an order of arrangement of the video and the different video.

11. The display control unit is when receiving an instruction to start playback from a user, simultaneously starting playback of the video and the other video; The display device according to claim 9 , further comprising: a display unit configured to simultaneously stop playback of the video and the different video when a user instructs the display unit to stop playback.

12. A display device according to any one of claims 9 to 11, wherein the display control unit displays the video and the other video on the display screen so that the execution timings of the substrate processing are consistent with each other within the displayed video.

13. A display device as described in any one of claims 8 to 12, wherein the display control unit displays a video based on the video data on the display screen so that the entire surface of the substrate to be displayed is not displayed, and an area between the center and a part of the periphery of the surface of the substrate to be displayed is displayed.

14. The display control unit is A list of information that identifies a plurality of substrates that can be the substrate to be displayed, which is specified by a user, can be displayed on the display screen; A display device according to any one of claims 1 to 13, wherein inspection information indicating the presence or absence of processing abnormalities for substrates included in the list is held in the device, and when the inspection information indicates an abnormality, information indicating that an abnormality has occurred in the substrate processing for the substrate indicated to be abnormal by the inspection information is displayed in the list.

15. 1. A display method for displaying information on a display screen regarding a substrate processing apparatus that performs a predetermined substrate processing on a plurality of substrates, comprising: displaying, on the display screen, an image based on first imaging data previously captured in the substrate processing apparatus for a substrate to be displayed among the plurality of substrates in response to an instruction from a user; and displaying, on the display screen, an image based on second imaging data previously captured in the substrate processing apparatus for the substrate to be displayed in response to an instruction from a user; A display method, wherein the first imaging data is data obtained by imaging at a timing different from that of the second imaging data, or data obtained by imaging a different imaging range from that of the second imaging data.

16. A computer-readable storage medium storing a program for causing an apparatus to execute the display method according to claim 15.

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