Ultrasonic bonding device and ultrasonic horn holding device

Abstract

To accurately perform paralleling on an ultrasonic horn side during ultrasonic bonding with a simpler structure.SOLUTION: An ultrasonic bonding device includes: a pressing unit that applies a load to a bonding site; an ultrasonic application unit that includes an ultrasonic horn which transmits ultrasonic vibrations that vary amplitude in a direction orthogonal to an application direction of the load and applies them to the bonding site; a holding unit that holds the ultrasonic application unit; and a pressing member that is disposed between the holding unit and the ultrasonic horn and contacts a portion on a side opposite to an application surface side of the ultrasonic vibrations of the ultrasonic horn and a portion being a node of the ultrasonic vibrations. The portion contacting the pressing member of the ultrasonic horn is a plane parallel to the application surface of the ultrasonic vibrations. The portion contacting the ultrasonic horn of the pressing member is formed to extend in a direction orthogonal to the transmission direction of the ultrasonic vibrations and the application direction of the load, and is a convex surface protruding toward the ultrasonic horn when viewed from the extension direction of the portion contacting the ultrasonic horn of the pressing member.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to an ultrasonic bonding device and an ultrasonic horn holding device. [Background technology]

[0002] Conventionally, an ultrasonic bonding device has been proposed for preventing bending of an ultrasonic horn during ultrasonic bonding (see, for example, Patent Document 1). The ultrasonic bonding device disclosed in Patent Document 1 prevents bending of the ultrasonic horn by providing a nodal rod that presses the node of ultrasonic vibration of the ultrasonic horn from above and a pair of nodal rods that press the node from the left and right. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-090983 Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, in order to achieve high-precision ultrasonic bonding in an ultrasonic bonding device, it is necessary to make the surfaces of the bonding portions of the objects to be bonded parallel to the surface to which the ultrasonic vibration is applied by the ultrasonic horn (hereinafter referred to as "parallelization"). Therefore, in this technical field, there is a demand for the development of a technology that can perform parallelization of the ultrasonic horn side (parallelization of the surface to which the ultrasonic vibration is applied) with high precision during ultrasonic bonding using a simpler configuration.

[0005] The present invention has been made in response to the above demand, and an object of the present invention is to provide an ultrasonic bonding device and an ultrasonic horn holding device that have a simpler configuration and are capable of accurately aligning the ultrasonic horn side during ultrasonic bonding. [Means for solving the problem]

[0006] In order to solve the above problems, the ultrasonic bonding device of the present invention includes a pressure applying section for applying a load to the bonding portion, an ultrasonic application section including an ultrasonic horn for transmitting ultrasonic vibrations whose amplitude fluctuates in a direction perpendicular to the load application direction and applying the ultrasonic vibrations to the bonding portion, a holding section for holding the ultrasonic application section, and a pressing member disposed between the holding section and the ultrasonic horn and contacting a portion of the ultrasonic horn opposite to the ultrasonic vibration application surface side and a portion that becomes a node of the ultrasonic vibration. In the ultrasonic bonding device of the present invention, the portion of the ultrasonic horn that contacts the pressing member is a plane parallel to the ultrasonic vibration application surface, and the portion of the pressing member that contacts the ultrasonic horn is formed extending in a direction perpendicular to the ultrasonic vibration transmission direction and the load application direction, and is a convex surface that protrudes toward the ultrasonic horn when viewed from the extension direction of the portion of the pressing member that contacts the ultrasonic horn.

[0007] In order to solve the above problems, the ultrasonic horn holding device of the present invention includes a holding part to which an ultrasonic application part including an ultrasonic horn that transmits ultrasonic vibrations whose amplitude fluctuates in a direction perpendicular to the direction of the load applied to the joint part and applies the ultrasonic vibrations to the joint part is attached, and a pressing member that can be arranged between the holding part and the ultrasonic horn. In the ultrasonic horn holding device of the present invention, when the ultrasonic application part is attached to the holding part and the pressing member is arranged between the holding part and the ultrasonic horn, the pressing member contacts a plane parallel to the ultrasonic vibration application surface formed on the part opposite to the ultrasonic vibration application surface side of the ultrasonic horn and on the part that becomes the node of the ultrasonic vibration, and the part of the pressing member that contacts the ultrasonic horn is formed extending in a direction perpendicular to the transmission direction of the ultrasonic vibration and the load application direction, and is a convex surface that protrudes toward the ultrasonic horn when viewed from the extension direction of the part of the pressing member that contacts the ultrasonic horn. Effect of the Invention

[0008] According to the present invention having the above-mentioned configuration, it is possible to perform parallel alignment of the ultrasonic horn side during ultrasonic bonding with high accuracy using a simpler configuration. [Brief description of the drawings]

[0009] [Figure 1] 1 is an external perspective view of an ultrasonic bonding device according to a first embodiment of the present invention. [Diagram 2] 1 is an external perspective view of an ultrasonic application unit of an ultrasonic bonding device according to a first embodiment of the present invention. FIG. [Diagram 3] 1 is a front view of an ultrasonic application unit of an ultrasonic bonding device according to a first embodiment of the present invention. [Figure 4] 1 is a side view of an ultrasonic application unit of an ultrasonic bonding device according to a first embodiment of the present invention. [Diagram 5] FIG. 2 is an enlarged side view of the vicinity of a contact area between a nodal block and an ultrasonic horn of the ultrasonic bonding device according to the first embodiment of the present invention. [Figure 6] FIG. 1 is an external perspective view of an ultrasonic horn of an ultrasonic bonding device according to a first embodiment of the present invention. [Figure 7] FIG. 2 is an external view of a nodal block of the ultrasonic bonding device according to the first embodiment of the present invention. [Figure 8] FIG. 4 is a diagram for explaining the mounting operation of the nodal block in the ultrasonic bonding device according to the first embodiment of the present invention. [Figure 9] FIG. 11 is an external perspective view of an ultrasonic application unit of an ultrasonic bonding device according to a second embodiment of the present invention. [Figure 10] FIG. 11 is a perspective view of a nodal block of an ultrasonic bonding device according to a second embodiment of the present invention. [Figure 11] 5A and 5B are a side view and a front view of a nodal block of an ultrasonic bonding device according to a second embodiment of the present invention. [Figure 12] FIG. 11 is an exploded view of a nodal block of an ultrasonic bonding device according to a second embodiment of the present invention. [Figure 13] FIG. 11 is a diagram for explaining the position adjustment of the tip surface by a nodal block of an ultrasonic bonding device according to a second embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, ultrasonic bonding devices and ultrasonic horn holding devices according to various embodiments of the present invention will be specifically described with reference to the drawings.

[0011] 1. First embodiment [Configuration and operation of ultrasonic bonding device] Fig. 1 is an external perspective view of an ultrasonic bonding device according to a first embodiment. As shown in Fig. 1, the ultrasonic bonding device 1 includes an ultrasonic application unit 2, a pressure unit 3 (pressure unit), a base 4 for placing an object to be bonded (not shown), and a pair of holding members 5 and 6 for holding these components. The ultrasonic bonding device 1 shown in Fig. 1 is used as a bonding device for, for example, wire harnesses and the like.

[0012] In FIG. 1, the Z direction is the downward direction on the drawing, that is, the direction in which the ultrasonic wave application unit 2 moves toward the base 4 (indicated by the thick black arrow in the drawing). Also, on the drawing, the extension direction of the ultrasonic wave application unit 2 and the direction toward the head part 10a are defined as the Y direction, and the direction parallel to the mounting surface of the base 4 for the joining target and from the holding member 5 toward the holding member 6 are defined as the X direction. Furthermore, the X direction, the Y direction, and the Z direction are mutually orthogonal. The X direction, the Y direction, and the Z direction shown in FIGS. 2 to 13 described later are also the same as those directions defined in FIG. 1.

[0013] In the ultrasonic bonding device 1, the pressure unit 3 is disposed above the ultrasonic application unit 2, and the base 4 is disposed below the ultrasonic application unit 2. Each of the pair of holding members 5, 6 is formed of a plate-like member, and holds the pressure unit 3 and the base 4 by sandwiching them between the pair of holding members 5, 6. Specifically, an upper region of the holding member 5 is fixed to one side of the pressure unit 3 (a side whose surface direction is the X direction in the figure) by bolt fastening, and a lower region of the holding member 5 is fixed to a side of the base 4 on the same side as the one side of the pressure unit 3 by bolt fastening. In addition, an upper region of the holding member 6 is fixed to the other side of the pressure unit 3 by bolt fastening, and a lower region of the holding member 6 is fixed to a side of the base 4 on the same side as the other side of the pressure unit 3 by bolt fastening.

[0014] 1, the pressurizing unit 3 is provided with a drive unit that holds the ultrasonic wave application unit 2 and allows the ultrasonic wave application unit 2 to move in the up and down direction (Z direction in the figure). That is, the ultrasonic wave application unit 2 is movably held by a drive unit (not shown) in the pressurizing unit 3. Also, although not shown, when the objects to be joined are placed on the pedestal 4, a receiving jig called an anvil for positioning the objects to be joined is placed on the pedestal 4, and the objects to be joined are set on the anvil.

[0015] The ultrasonic application unit 2 applies ultrasonic vibration to the contact area with the head portion 10a provided at the tip of the ultrasonic application unit 2 in contact with the objects to be joined. The pressure unit 3 applies a load to the contact area between the head portion 10a of the ultrasonic application unit 2 and the objects to be joined during ultrasonic bonding (hereinafter, this operation is referred to as "applying pressure"). When performing ultrasonic bonding with the ultrasonic bonding device 1, first, the ultrasonic application unit 2 is moved downward to bring the head portion 10a into contact with the objects to be joined (not shown). Thereafter, the contact area is pressurized by the pressure unit 3, and ultrasonic vibration generated by the ultrasonic application unit 2 is applied to the contact area to perform ultrasonic bonding. At this time, the ultrasonic vibration applied by the head portion 10a is ultrasonic vibration (lateral vibration) whose amplitude varies in a direction perpendicular to the pressure direction.

[0016] [Configuration of ultrasonic application unit] Next, the configuration of the ultrasonic wave application unit 2 of this embodiment will be described with reference to Fig. 2 to Fig. 5. Fig. 2 is an external perspective view of the ultrasonic wave application unit 2 of this embodiment. Fig. 3 is a front view of the ultrasonic wave application unit 2 as viewed from the head portion 10a side. Fig. 4 is a side view of the ultrasonic wave application unit 2 as viewed from the holding member 5 side. Fig. 5 is an enlarged side view of the vicinity of a nodal block 40 and an ultrasonic horn 23, which will be described later.

[0017] As shown in Figs. 2 to 5, the ultrasonic application unit 2 includes an ultrasonic device section 20 (ultrasonic application section), a holding block 30 (holding section), a reinforcing member 31, a hanging member 32 (mounting section), fixing brackets 33 and 34, and a nodal block 40 (pressing member). In this embodiment, the holding block 30, the reinforcing member 31, the hanging member 32, and the nodal block 40 form a holding function section (ultrasonic horn holding device) of the ultrasonic application unit 2. Note that the configuration of the holding function section of the ultrasonic application unit 2 is not limited to the examples shown in Figs. 2 to 5, and may be any configuration. The configuration of each section of the ultrasonic application unit 2 will be described below.

[0018] (1) Ultrasound device configuration As shown in Figs. 2 to 5, the ultrasonic device 20 has an ultrasonic generator 21, an ultrasonic cone 22, and an ultrasonic horn 23. The ultrasonic generator 21, the ultrasonic cone 22, and the ultrasonic horn 23 are integrally configured. Specifically, the ultrasonic generator 21 is attached to one end of the ultrasonic cone 22, and the other end of the ultrasonic cone 22 is attached (connected) to the end of the ultrasonic horn 23 opposite to the head portion 10a side. At this time, the ultrasonic horn 23 is attached to the ultrasonic cone 22 so as to be rotatable about the central axis of the ultrasonic horn 23 along its extension direction (transmission direction of ultrasonic vibration: Y direction in the figure).

[0019] Although not shown, the ultrasonic generator 21 has an ultrasonic vibrator, which is connected to one end of the ultrasonic cone 22. The ultrasonic vibrator is made of a piezoelectric material and converts an AC electric signal in the ultrasonic range applied from an ultrasonic oscillator (not shown) into a mechanical signal, i.e., ultrasonic vibration. The ultrasonic vibrator then transmits the generated ultrasonic vibration to the ultrasonic cone 22. Although not shown, a ring-shaped plate member (hereinafter referred to as a "ring-shaped member") is attached to the connection end of the ultrasonic generator 21 on the ultrasonic cone 22 side. When the ultrasonic device unit 20 is attached to the holding block 30, the ring-shaped member is inserted into an opening of an ultrasonic unit attachment portion 30a (described later) of the holding block 30 and attached.

[0020] The ultrasonic cone 22 is a substantially cylindrical member, which amplifies the ultrasonic vibrations generated by the ultrasonic generating unit 21 and transmits them to the ultrasonic horn 23 .

[0021] Ultrasonic horn 23 has two heads 10a and 10b. Head 10b is disposed at a position rotated 180 degrees from head 10a with respect to the central axis of ultrasonic horn 23. Ultrasonic horn 23 is formed of a metal such as iron, aluminum, or brass.

[0022] The ultrasonic horn 23 applies ultrasonic vibrations transmitted from the ultrasonic cone 22 to the head portion currently being used, i.e., the head portion 10a arranged at a position facing the object to be joined (not shown) in Figs. 2 to 5, and the joining portion between the object to be joined. Note that in this embodiment, an example in which the ultrasonic horn 23 is provided with two head portions will be described, but the present invention is not limited to this. The ultrasonic horn 23 may be provided with, for example, three or more head portions. In this case, the head portions are arranged at equal angular intervals in the direction circling the central axis of the ultrasonic horn 23. Also, in this embodiment, the number of head portions of the ultrasonic horn 23 may be, for example, one.

[0023] (2) Ultrasonic horn configuration Here, with reference to Figures 6A and 6B, a specific structure of the ultrasonic horn 23 will be described. Note that Figure 6A is an external perspective view of the ultrasonic horn 23 as viewed from the ultrasonic vibration application surface side of the head portion 10b, and Figure 6B is an external perspective view of the ultrasonic horn 23 as viewed from the ultrasonic vibration application surface side of the head portion 10a.

[0024] As shown in FIGS. 6A and 6B, the ultrasonic horn 23 has a horn tip portion 23a and a horn main body portion 23b formed integrally with the horn tip portion 23a.

[0025] Horn tip 23a has a plate-like shape, and the shape of the surface perpendicular to the tip surface of horn tip 23a and the surface to which ultrasonic vibration is applied of each head portion (the surface perpendicular to the X direction in the figure) is approximately rectangular. Head portion 10a is provided at one end in the long side direction (Z direction in the figure) of the approximately rectangular surface of horn tip 23a, and head portion 10b is provided at the other end. The ultrasonic vibration application surfaces of head portions 10a and 10b are formed of uneven surfaces. Note that the size, uneven surface configuration, etc. of head portion 10a are the same as those of head portion 10b.

[0026] Horn body 23b has a substantially cylindrical shape, with horn tip 23a formed continuously on one end side of horn body 23b, and the other end of horn body 23b attached to ultrasonic cone 22. The area of ​​horn body 23b on the horn tip 23a side is machined to form surface area portions parallel to each of the substantially rectangular faces of horn tip 23a.

[0027] 6A, a groove 23c is formed on the surface of the horn body 23b, extending in the direction (the direction of ultrasonic vibration transmission) of the horn body 23b and in a direction (the X direction in the figure) perpendicular to the direction from the head 10a to the head 10b. The groove 23c is formed at a position that is a nodal point on a line on the surface of the horn body 23b along the extension direction of the horn body 23b (the Y direction in the figure) and on a line rotated 180 degrees from the head 10a with respect to the central axis of the ultrasonic horn 23. The bottom surface of the groove 23c is flat. Therefore, the bottom surface of the groove 23c is parallel to the application surface of the head 10a to which the ultrasonic vibration is applied. The nodal point is a node where the amplitude of the ultrasonic vibration generated in the extension direction of the ultrasonic horn 23 is 0 (minimum).

[0028] The groove 23c is a groove provided for making the head portion 10a parallel. In this embodiment, when the nodal block 40 is attached to the holding block 30, a tip surface 40c (described later) of the nodal block 40 comes into contact with the bottom surface of the groove 23c (see FIG. 5). This places the head portion 10a in a predetermined position, specifically, in a position where the application surface of the head portion 10a to which ultrasonic vibration is applied is parallel to the surface of the joining portion of the joining objects, and makes the ultrasonic horn 23 side parallel.

[0029] In the above-mentioned configuration, even when ultrasonic bonding is performed using the head portion 10a, the nodal block 40 is in contact with the bottom surface of the groove 23c on the surface of the horn body portion 23b. However, since the groove 23c is formed at a nodal point where the ultrasonic vibration is at a minimum, there is almost no adverse effect on the ultrasonic vibration transmitted to the head portion 10a. Therefore, during ultrasonic bonding, the ultrasonic vibration generated by the ultrasonic generator 21 can be effectively applied to the bonding portion via the head portion 10a.

[0030] Further, on the surface of the horn body 23b, as shown in FIG. 6B, a groove 23d is formed that extends in a direction (X direction in the figure) perpendicular to the extension direction of the horn body 23b and the direction from the head 10a to the head 10b. The groove 23d is formed at a position that is a nodal point on a line on the surface of the horn body 23b along the extension direction of the horn body 23b (Y direction in the figure) and on a line at a position rotated 180 degrees from the head 10b with respect to the central axis of the ultrasonic horn 23. The bottom surface of the groove 23d is flat. Therefore, the bottom surface of the groove 23d is parallel to the application surface of the head 10b to which the ultrasonic vibration is applied. That is, the groove 23d is a groove formed on the surface of the horn body 23b at a position rotated 180 degrees from the groove 23c with respect to the central axis of the ultrasonic horn 23 and is a groove parallel to the groove 23c.

[0031] Groove 23d is provided for the purpose of aligning head portion 10b in parallel. When head portion 10b is used for ultrasonic bonding, a tip surface 40c (to be described later) of nodal block 40 comes into contact with the bottom surface of groove 23d when nodal block 40 is attached to holding block 30, whereby head portion 10b is positioned in a predetermined position and the ultrasonic horn 23 side is aligned in parallel.

[0032] The configuration (groove width and groove depth) of groove 23c is the same as that of groove 23d. The width and depth of each groove are appropriately set so that when nodal block 40 is attached to holding block 30, a tip surface 40c (to be described later) of nodal block 40 comes into contact with the bottom surface of the groove.

[0033] (3) Configuration of the holding block The holding block 30 is a block member for holding the ultrasonic device section 20. As shown in Figs. 2 to 5, the holding block 30 is composed of an ultrasonic unit mounting section 30a and a nodal block mounting section 30b. The ultrasonic unit mounting section 30a and the nodal block mounting section 30b are integrally formed, and at this time, the ultrasonic unit mounting section 30a and the nodal block mounting section 30b are joined at their joints so that the angle between them is 90 degrees (a right angle). The ultrasonic unit mounting section 30a and the nodal block mounting section 30b are formed of a material that is difficult to deform, such as stainless steel, and that does not resonate with ultrasonic vibrations.

[0034] The ultrasonic unit mounting part 30a is a plate-like member having an opening in the center. The diameter of the opening in the center of the ultrasonic unit mounting part 30a is set to a size that allows the insertion of a ring-like member (not shown) provided at the connection end of the ultrasonic cone 22 side of the ultrasonic generator 21. The side surface of the ultrasonic unit mounting part 30a on the nodal block mounting part 30b side is connected to the approximate center of the extension direction (Y direction in the figure) of the nodal block mounting part 30b, and the corners of the other side surface are chamfered to form a rounded surface.

[0035] The size of the ultrasonic unit mounting portion 30a and the position of the opening are appropriately set so that when the nodal block 40 is attached to the nodal block mounting portion 30b, the tip of the nodal block 40 comes into contact with the bottom surface of the groove (groove 23c or groove 23d) formed in the ultrasonic horn 23.

[0036] The nodal block mounting portion 30b is a plate-like member having a substantially rectangular surface. The nodal block 40 is mounted to the surface of the nodal block mounting portion 30b (the lower surface in Figs. 2 to 5) facing the ultrasonic horn 23. In this embodiment, as described later, the nodal block 40 is manually fixed to the lower surface of the nodal block mounting portion 30b by a worker using bolts (not shown). The mounting position of the nodal block 40 on the lower surface of the nodal block mounting portion 30b is set to a position (see Fig. 5) where the tip of the nodal block 40 comes into contact with the bottom surface of a groove (groove 23c or groove 23d) formed in the nodal point of the ultrasonic horn 23.

[0037] Here, the installation work of the ultrasonic device section 20 to the ultrasonic unit mounting section 30a will be briefly described. The installation work of the ultrasonic device section 20 is performed manually by an operator. When the ultrasonic device section 20 is installed to the ultrasonic unit mounting section 30a, first, a ring-shaped member (not shown) of the ultrasonic device section 20 is inserted into the opening. Then, in this state, a pair of semicircular ring-shaped fixing metal fittings 33 provided on one surface and the other surface near the opening of the ultrasonic unit mounting section 30a are bolted to fix the ultrasonic device section 20 to the ultrasonic unit mounting section 30a. That is, the ring-shaped member of the ultrasonic device section 20 inserted into the opening of the ultrasonic unit mounting section 30a is sandwiched between a pair of fixing metal fittings 33 provided on one surface near the opening of the ultrasonic unit mounting section 30a and a pair of fixing metal fittings 33 provided on the other surface, so that the ultrasonic device section 20 is attached to the ultrasonic unit mounting section 30a.

[0038] (4) Structure of reinforcing member As shown in Figures 2 and 4, the reinforcing member 31 is a plate-shaped member whose surface shape is approximately a right-angled triangle, and similar to the holding block 30, is made of a material that is difficult to deform, such as stainless steel, and that does not resonate with ultrasonic vibrations.

[0039] The reinforcing member 31 is attached between the vicinity of the long side of the surface (the lower surface in Figs. 2 and 4) of the nodal block mounting portion 30b facing the ultrasonic generator 21 and the vicinity of the side of the surface of the ultrasonic unit mounting portion 30a facing the ultrasonic generator 21. At this time, the reinforcing member 31 is first positioned so that the approximately right-angled corner of the reinforcing member 31 contacts the joint corner (90-degree corner) between the nodal block mounting portion 30b and the ultrasonic unit mounting portion 30a. Then, in this state, the reinforcing member 31 is fixed by fastening the contact points between the nodal block mounting portion 30b and the ultrasonic unit mounting portion 30a with bolts.

[0040] Although it is hidden behind the ultrasonic generating unit 21 and cannot be seen in Figures 2 and 4, a reinforcing member 31 made of a plate-like member having a substantially right-angled triangular shape is also attached to the back side of the ultrasonic generating unit 21 in a similar manner, between the nodal block mounting portion 30b and the ultrasonic unit mounting portion 30a.

[0041] (5) Configuration of hanging components The hanging member 32 is a member provided so that when the ultrasonic application unit 2 is attached to the ultrasonic bonding apparatus 1, the ultrasonic application unit 2 can be attached from the outside of the ultrasonic bonding apparatus 1 without disassembling the ultrasonic bonding apparatus 1. The hanging member 32 is a plate-like member having a thickness substantially the same as that of the nodal block attachment portion 30b and a substantially rectangular surface shape. Similarly to the holding block 30, the hanging member 32 is formed of a material that is difficult to deform, such as stainless steel, and does not resonate with ultrasonic vibrations.

[0042] In this embodiment, the length of the long side direction (Y direction in the figure) of the hanging member 32 is set to the length from the tip of the nodal block mounting part 30b on the head part side to a position slightly beyond the connection area with the ultrasound unit mounting part 30a. Also, the width of the short side direction (X direction in the figure) of the hanging member 32 is the same as the width of the nodal block mounting part 30b.

[0043] When attaching the ultrasonic application unit 2 to the ultrasonic bonding device 1 from the outside, first, the hanging member 32 is attached to a drive unit (not shown) in the pressure unit 3. Next, the lower surface of the hanging member 32 is aligned with the surface of the nodal block mounting portion 30b opposite to the mounting surface of the nodal block 40. Next, in this state, each long side portion of the hanging member 32 and the nodal block mounting portion 30b is sandwiched between plate-shaped fixing metal fittings 34 extending in a substantially U-shape. Then, in this state, the fixing metal fittings 34 are bolted to the hanging member 32 and the nodal block mounting portion 30b, and the ultrasonic application unit 2 is attached to the hanging member 32.

[0044] In the above-mentioned mounting step of the ultrasonic application unit 2, when the hanging member 32 is mounted to a drive section (not shown) in the pressurizing unit 3, the fixing metal fittings 34 may be mounted in advance on each long side section of the hanging member 32. The hanging member 32 may be provided as a component of the pressurizing unit 3.

[0045] When the above-mentioned hanging member 32 is provided, the ultrasonic wave application unit 2 can be attached and detached from the outside without disassembling the ultrasonic bonding device 1, which facilitates the attachment and detachment of the heavy ultrasonic wave application unit 2. As a result, the work efficiency of the workers can be improved.

[0046] 2 to 5, in this embodiment, two fixing metal fittings 34 are arranged at a predetermined interval on each long side of the nodal block mounting portion 30b and the hanging member 32. In this case, the predetermined interval is made longer than the width of the short side of the nodal block 40. Also, when viewed from the long side of the nodal block mounting portion 30b, the fixing metal fittings 34 are arranged so that the arrangement area of ​​the nodal block 40 does not overlap with the arrangement area of ​​each fixing metal fitting 34 (see FIGS. 4 and 5). By arranging the fixing metal fittings 34 in this manner, it becomes easier to insert the nodal block 40 into the space between the nodal block mounting portion 30b and the ultrasonic horn 23, and the work of mounting the nodal block 40 becomes easier.

[0047] (6) Nodal block configuration Next, a specific structure of the nodal block 40 will be described with reference to Figures 7A to 7C. Figure 7A is an external perspective view of the nodal block 40 as viewed from the ultrasonic horn 23 side, Figure 7B is a side view of the nodal block 40 as viewed from the short side of the nodal block 40, and Figure 7C is a front view of the nodal block 40 as viewed from the long side of the nodal block 40.

[0048] The nodal block 40 is a pressing member for the ultrasonic horn 23 for parallelizing the ultrasonic horn 23 side during ultrasonic bonding. As shown in Figs. 7A to 7C, the nodal block 40 has a block mounting portion 40a and a tip portion 40b formed integrally with the block mounting portion 40a. Like the holding block 30, the nodal block 40 is made of a material that is difficult to deform, such as stainless steel, and that does not resonate with ultrasonic vibrations. The nodal block 40 may be made of a material different from that of the holding block 30.

[0049] The block mounting portion 40a has a generally plate-like shape, and the shape of the joint surface of the tip portion 40b is rectangular. The block mounting portion 40a is provided with a plurality of bolt insertion holes (four in this embodiment) for mounting the nodal block 40 to the nodal block mounting portion 30b with bolts.

[0050] The tip portion 40b is provided on one surface on which the opening of the bolt insertion hole of the block mounting portion 40a is formed, at approximately the center in the long side direction (X direction in the figure) of the nodal block 40. In the region of the tip portion 40b opposite the block mounting portion 40a side, a plate-shaped region 41 having a substantially rectangular surface shape is formed as shown in Figures 7A to 7C. On the other hand, in the region on the block mounting portion 40a side of the tip portion 40b, a tapered region 42 whose width tapers from the plate-shaped region 41 of the tip portion 40b toward the block mounting portion 40a is formed.

[0051] As shown in FIG. 7B, the tip end 40c of the tip portion 40b (plate-shaped region 41) is formed at the end opposite to the block mounting portion 40a, as viewed from the short side of the nodal block 40. The shape of the curved surface of the tip end 40c viewed from the short side can be, for example, a circle or an ellipse. The shape of the tip end 40c is the same along the long side direction (X direction in the figure) of the plate-shaped region 41 of the tip portion 40b. Therefore, when the nodal block 40 is mounted on the holding block 30, the contact state between the tip end 40c (convex surface) of the nodal block 40 and the bottom surface of the corresponding groove (groove 23c or groove 23d) of the ultrasonic horn 23 can be geometrically a line (convex surface) and a surface (groove bottom surface), i.e., a line contact (see FIG. 5). This makes the contact area larger than in the case of point contact, making it possible to reduce the likelihood of deviation from the parallelism of the surfaces to which ultrasonic vibrations are applied due to pressure being applied to the contact areas during ultrasonic bonding.

[0052] In this embodiment, the length (extension length) of the tip surface 40c in the long side direction (X direction in the figure) of the plate-like region 41 of the tip portion 40b, i.e., the width of the tip portion 40b in the extension direction of the tip surface 40c, is set to be equal to or greater than the length in the extension direction of the groove in contact with the tip surface 40c (see FIG. 3). Note that the present invention is not limited to this, and the width of the tip portion 40b can be set as appropriate, but by setting the width of the tip portion 40b to be equal to or greater than the length in the extension direction of the groove, the line contact area is maximized, and therefore it is possible to further suppress the occurrence of deviation in the parallelism of the application surface of the ultrasonic vibration due to pressure being applied to the contact area during ultrasonic bonding.

[0053] Furthermore, in this embodiment, the sizes of the block mounting portion 40a and the tip portion 40b of the nodal block 40 in the thickness direction (Z direction in the figure) are appropriately set so that when the nodal block 40 is attached to the holding block 30, the tip surface 40c of the nodal block 40 comes into contact with the bottom surface of the groove (groove 23c or groove 23d) of the ultrasonic horn 23.

[0054] [Nodal block installation work] Next, the work of attaching the nodal block 40 in the ultrasonic bonding device 1 of this embodiment will be described. FIG. 8 is a diagram showing a state in which the nodal block 40 is attached to the nodal block attachment portion 30b of the holding block 30. In this embodiment, the nodal block 40 is manually attached to the holding block 30 by an operator in a state in which the ultrasonic device section 20 is held by the holding block 30. The work of attaching the nodal block 40 may be performed in a state in which the holding block 30 is attached to the drive section (not shown) of the pressurizing unit 3 via the hanging member 32, or may be performed before the holding block 30 is attached to the drive section (not shown) of the pressurizing unit 3. In other words, the work of attaching the nodal block 40 can also be performed from outside the ultrasonic bonding device 1.

[0055] In the installation work of the nodal block 40, as shown in FIG. 8, in a state in which the ultrasonic device section 20 is attached to the holding block 30, first, the nodal block 40 is inserted into the space between the nodal block attachment section 30b and the ultrasonic horn 23 (black thick arrow in the figure). At this time, the tip surface 40c of the nodal block 40 is opposed to the ultrasonic horn 23, and the tip surface 40c of the nodal block 40 is inserted while being in contact with the groove 23c (not shown in FIG. 8) of the ultrasonic horn 23. Then, although not shown, the nodal block 40 is placed at a specific position on the surface of the nodal block attachment section 30b, and then fixed to the nodal block attachment section 30b by bolt fastening. After the nodal block 40 is installed, a line contact state is maintained between the tip surface 40c of the nodal block 40 and the bottom surface of the corresponding groove (groove 23c or groove 23d) of the ultrasonic horn 23, as shown in FIG. 4 and FIG. 5.

[0056] As described above, in this embodiment, when the nodal block 40 is inserted into the space between the nodal block mounting portion 30b and the ultrasonic horn 23, the nodal block 40 is inserted while the tip surface 40c of the nodal block 40 is in contact with the bottom surface of the corresponding groove of the ultrasonic horn 23. Therefore, the groove (groove 23c or groove 23d) of the ultrasonic horn 23 also functions as a guide portion when the nodal block 40 is attached to the nodal block mounting portion 30b.

[0057] Furthermore, during the insertion operation of the nodal block 40, the tip surface 40c of the nodal block 40 continues to contact the bottom surface of the groove of the ultrasonic horn 23. Therefore, even if, before the attachment of the nodal block 40, the surface to which the ultrasonic vibrations of the head portion of the ultrasonic horn 23 is applied has rotated to a position slightly deviated from a predetermined position parallel to the surface of the contact portion of the objects to be joined, the head portion of the ultrasonic horn 23 can be automatically positioned in the predetermined position by the insertion operation of the nodal block 40.

[0058] That is, in this embodiment, the attachment of the nodal block 40 to the nodal block attachment portion 30b can essentially achieve parallelization of the ultrasonic vibration application surface of the head portion 10a. Even after the nodal block 40 is attached, the line contact state between the tip surface 40c of the nodal block 40 and the corresponding groove of the ultrasonic horn 23 is maintained, making it difficult for the ultrasonic horn 23 to rotate. Therefore, in this embodiment, parallelization of the ultrasonic horn 23 side during ultrasonic bonding can be performed with high precision, and the reproducibility of the parallelization can also be ensured.

[0059] Then, when ultrasonic bonding is performed after the nodal block 40 is attached, the head portion 10a of the ultrasonic application unit 2 is brought into contact with the objects to be bonded (not shown), and in this state, ultrasonic vibrations are applied while pressure is applied by the pressure unit 3. At this time, the pressure applied by the pressure unit 3 may cause deviation in parallelism of the application surface of the ultrasonic vibrations of the head portion 10a with respect to the contact portion of the objects to be bonded (not shown). However, in this embodiment, the tip surface 40c of the nodal block 40 and the bottom surface of the corresponding groove of the ultrasonic horn 23 are in line contact even during ultrasonic bonding, so that the parallelism of the head portion 10a side is easily maintained, and deviation in parallelism can be suppressed.

[0060] In this embodiment, as described above, the width of the tip portion 40b in the extending direction of the tip surface 40c is set to be equal to or greater than the length in the extending direction of the groove that contacts the tip surface 40c (see FIG. 3). In this configuration, the line contact area between the tip surface 40c of the nodal block 40 and the bottom surface of the corresponding groove of the ultrasonic horn 23 is maximized. Therefore, in this case, the effect of improving the reproducibility of the parallel alignment on the ultrasonic horn 23 side described above and the effect of suppressing deviation in the parallelism of the application surface of the ultrasonic vibration of the head portion 10a are also maximized.

[0061] [Various effects] As described above, in the ultrasonic bonding device 1 of this embodiment, the tip surface 40c of the nodal block 40 attached to the holding block 30 is brought into line contact with the bottom surface of the groove formed in the nodal point of the ultrasonic horn 23, thereby achieving parallelism on the ultrasonic horn 23 (head portion) side. In this embodiment, it is sufficient to provide only one nodal block 40. Therefore, in this embodiment, it is possible to accurately achieve parallelism on the ultrasonic horn 23 side with a simpler configuration than in the conventional technology in which, for example, three nodal rods are used as the pressing members for the ultrasonic horn.

[0062] As described above, in the ultrasonic bonding device 1 of this embodiment, the work of attaching the nodal block 40 to the holding block 30 can substantially perform parallel alignment on the ultrasonic horn 23 side. In addition, even after the nodal block 40 is attached, the line contact state between the tip surface 40c of the nodal block 40 and the corresponding groove of the ultrasonic horn 23 is maintained. Therefore, in this embodiment, it is possible to ensure the reproducibility of parallel alignment on the ultrasonic horn 23 side for each ultrasonic bonding operation. In this case, the work time for parallel alignment on the ultrasonic horn 23 side can be significantly shortened, and the operation of the ultrasonic bonding device 1 is also simplified.

[0063] Furthermore, as described above, in this embodiment, even during ultrasonic bonding, a line contact state is maintained between the tip surface 40c of the nodal block 40 and the bottom surface of the corresponding groove in the ultrasonic horn 23. Therefore, for example, since the contact area is larger than when a nodal rod is used as a pressing member for the ultrasonic horn (when point contact is made), deviation in the parallelism of the application surface of the ultrasonic vibration of the head portion due to pressure during ultrasonic bonding is less likely to occur. That is, in this embodiment, high-precision ultrasonic bonding is possible with a simple configuration.

[0064] 2. Second embodiment In the ultrasonic bonding device 1 of the first embodiment, for example, due to the influence of the machining accuracy of each part constituting the ultrasonic application unit 2, a gap may occur between the tip surface 40c of the nodal block 40 and the bottom surface of the corresponding groove in the ultrasonic horn 23, or the nodal block 40 may not be able to be inserted into the space between the nodal block mounting portion 30b and the ultrasonic horn 23 when mounting the nodal block 40. That is, in the configuration of the first embodiment, for example, due to the influence of the machining accuracy of each part of the ultrasonic application unit 2, a situation may occur in which line contact is not obtained between the tip surface 40c of the nodal block 40 and the bottom surface of the corresponding groove in the ultrasonic horn 23.

[0065] In the second embodiment, a configuration example of the ultrasonic bonding device 1 that can solve this problem will be described. Note that the overall configuration of the ultrasonic bonding device 1 of the second embodiment is similar to that of the first embodiment shown in Fig. 1, so the description thereof will be omitted here.

[0066] [Configuration of ultrasonic application unit] 9 is an external perspective view of the ultrasonic application unit 102 included in the ultrasonic bonding device 1 of the second embodiment. Among the components of the ultrasonic application unit 102 of this embodiment, the same components as those of the ultrasonic application unit 2 of the first embodiment (FIG. 2) are denoted by the same reference numerals.

[0067] As shown in Fig. 9, the ultrasonic application unit 102 includes an ultrasonic device section 20 (ultrasonic application section), a holding block 30 (holding section), a reinforcing member 31, a hanging member 32 (mounting section), fixing brackets 33 and 34, and a nodal block 140 (pressing member). As is clear from a comparison between Fig. 9 and Fig. 2, the ultrasonic application unit 102 of this embodiment is obtained by modifying the configuration of the nodal block in the ultrasonic application unit 2 of the first embodiment. Therefore, only the configuration, function, and mounting mode of the nodal block 140 of the ultrasonic application unit 102 will be described here, and descriptions of the other components will be omitted.

[0068] [Nodal block configuration] A specific structure of the nodal block 140 of this embodiment will be described with reference to Figures 10A, 10B, 11A, 11B, and 12. Note that Figure 10A is a perspective view of the nodal block 140 as viewed from the ultrasonic horn 23 side, and Figure 10B is a perspective view of the nodal block 140 as viewed from the nodal block mounting portion 30b side. Figure 11A is a side view of the nodal block 140 as viewed from the short side of the nodal block 140, and Figure 11B is a front view of the nodal block 140 as viewed from the long side of the nodal block 140. Also, Figure 12 is an exploded view of the nodal block 140.

[0069] 10A, 10B, 11A, 11B and 12, the nodal block 140 has a first block mounting portion 140a, a tip portion 140b formed integrally with the first block mounting portion 140a, and a second block mounting portion 140d provided separately from the first block mounting portion 140a. When the nodal block 140 is mounted to the nodal block mounting portion 30b (see FIG. 9), the first block mounting portion 140a and the second block mounting portion 140d are arranged so that a surface 140f of the first block mounting portion 140a contacts a surface 140h of the second block mounting portion 140d.

[0070] Similarly to the holding block 30, the nodal block 140 is made of a material that is difficult to deform, such as stainless steel, and that does not resonate with ultrasonic vibrations. The nodal block 140 may be made of a material different from that of the holding block 30.

[0071] The first block mounting portion 140a has a substantially plate-like shape, and the shape of the joint surface 140e of the tip portion 140b is rectangular. On the other hand, the surface 140f of the first block mounting portion 140a opposite to the joint surface 140e (the surface in contact with the second block mounting portion 140d) is a rectangular flat surface. As shown in FIG. 12, the surface 140f of the first block mounting portion 140a is a flat surface inclined along its long side direction (X direction in the figure) so that the thickness of the first block mounting portion 140a changes continuously from one end to the other end. That is, the surface 140f of the first block mounting portion 140a is a flat surface inclined at a predetermined angle with respect to the joint surface 140e (hereinafter referred to as the "inclined surface 140f"). The inclination angle of the inclined surface 140f with respect to the joint surface 140e of the first block mounting portion 140a can be, for example, 5°±1°. Since the joint surface 140e is parallel to the surface to which the ultrasonic vibration is applied, the inclined surface 140f of the first block mounting portion 140a is also a surface inclined at a predetermined angle with respect to the surface to which the ultrasonic vibration is applied.

[0072] 10A, the first block mounting portion 140a is provided with a plurality of bolt insertion holes 143 (two in this embodiment) for mounting the nodal block 140 to the nodal block mounting portion 30b with bolts. Note that each of the insertion holes 143 has the same shape and size.

[0073] The opening shape of the insertion hole 143 is an ellipse extending along the long side direction (X direction in the figure) of the nodal block 140. The reason for making the opening shape of the insertion hole 143 an ellipse is as follows. As described later, in the installation work of the nodal block 140 of this embodiment, before the nodal block 140 is bolted (fixed) to the nodal block mounting portion 30b, the nodal block 140 is temporarily fixed to the nodal block mounting portion 30b with the bolt inserted into the insertion hole 143. Then, in this state, the first block mounting portion 140a is slid relative to the second block mounting portion 140d to adjust the position of the tip surface 140c of the nodal block 140. Therefore, in order to make the first block mounting portion 140a slidable relative to the second block mounting portion 140d with the nodal block 140 temporarily fixed, the opening shape of the insertion hole 143 is made an ellipse. The opening shape of the insertion hole 143 may be any shape that allows the first block attachment portion 140a to slide relative to the second block attachment portion 140d, and may be, for example, rectangular.

[0074] The size of the opening of the insertion hole 143 in the longitudinal direction (X direction in the figure) is appropriately set according to the maximum sliding amount of the first block mounting part 140a relative to the second block mounting part 140d. The size of the opening of the insertion hole 143 in the lateral direction (Y direction in the figure) is set to be slightly larger than the diameter of the bolt.

[0075] The tip portion 140b has a configuration similar to that of the tip portion 40b of the nodal block 40 of the first embodiment described above, and has a plate-shaped region 41 and a tapered region 142 whose width tapers from the plate-shaped region 141 toward the joining surface 140e of the first block mounting portion 140a.

[0076] 11A, a tip surface 140c is formed on the end of the tip portion 140b (plate-shaped region 141) opposite to the first block mounting portion 140a side, which is configured as a curved surface (convex surface) protruding outward (Z direction in the figure) when viewed from the short side of the nodal block 140. When the nodal block 140 is mounted on the nodal block mounting portion 30b, the tip surface 140c of the nodal block 140 comes into line contact with the bottom surface of the corresponding groove (groove 23c or groove 23d) of the ultrasonic horn 23 (see FIG. 9). The configuration of the tip surface 140c of the nodal block 140 in this embodiment can be the same as the configuration of the tip surface 40c of the nodal block 40 in the first embodiment.

[0077] The second block mounting portion 140d has a substantially plate-like shape, and a surface 140g (hereinafter referred to as "mounting surface 140g") on the side in contact with the nodal block mounting portion 30b is rectangular. The sizes of the mounting surface 140g of the second block mounting portion 140d in the long side direction (X direction in the figure) and short side direction (Y direction in the figure) are the same as the sizes of the first block mounting portion 140a in the long side direction and short side direction, respectively. The sizes of the first block mounting portion 140a and the second block mounting portion 140d in the long side direction (X direction in the figure) are set to be smaller than the size of the nodal block mounting portion 30b in the short side direction (X direction in the figure) as shown in FIG. 9.

[0078] On the other hand, the surface 140h of the second block mounting portion 140d opposite to the mounting surface 140g (the surface in contact with the inclined surface 140f of the first block mounting portion 140a) is a rectangular flat surface. As shown in FIG. 12, the surface 140h of the second block mounting portion 140d is a flat surface inclined along its long side direction (X direction in the figure) so that the thickness of the second block mounting portion 140d changes continuously from one end to the other end. That is, the surface 140h of the second block mounting portion 140d is a flat surface inclined at a predetermined angle with respect to the mounting surface 140g (hereinafter referred to as the "inclined surface 140h"). The inclination angle of the inclined surface 140h with respect to the mounting surface 140g of the second block mounting portion 140d is the same as the inclination angle of the inclined surface 140f of the first block mounting portion 140a, and can be, for example, 5°±1°. Since the mounting surface 140g is parallel to the surface to which the ultrasonic vibration is applied, the inclined surface 140h of the second block mounting portion 140d is also a surface inclined at a predetermined angle with respect to the surface to which the ultrasonic vibration is applied.

[0079] 10B, the second block mounting portion 140d is provided with a plurality of bolt insertion holes 144 (two in this embodiment) for mounting the nodal block 140 to the nodal block mounting portion 30b with bolts. The opening shape of the insertion holes 144 is circular, and the opening size is set to be slightly larger than the diameter of the bolt. The insertion holes 144 have the same shape and size. The insertion holes 144 are formed at positions such that they pass through the insertion holes 143 of the first block mounting portion 140a when the first block mounting portion 140a and the second block mounting portion 140d are arranged in contact with each other.

[0080] In the arrangement of the first block mounting portion 140a and the second block mounting portion 140d when the nodal block 140 is mounted to the nodal block mounting portion 30b, the first block mounting portion 140a and the second block mounting portion 140d are brought into contact with each other so that a region of the inclined surface 140f on the short side where the thickness of the first block mounting portion 140a is the thinnest faces a region of the inclined surface 140h on the short side where the thickness of the second block mounting portion 140d is the thickest, as shown in Figures 9, 10A, 10B, 11A, and 11B. That is, the inclined surface 140f of the first block mounting portion 140a and the inclined surface 140h of the second block mounting portion 140d are brought into contact with each other so that the direction in which the thickness of the first block mounting portion 140a becomes thinner (or thicker) and the direction in which the thickness of the second block mounting portion 140d becomes thinner (or thicker) are opposite to each other. At this time, both block mounting portions are arranged so that the side surface on the long side of the first block mounting portion 140a and the side surface on the corresponding long side of the second block mounting portion 140d are flush with each other.

[0081] Furthermore, in the above-mentioned arrangement of the first block mounting portion 140a and the second block mounting portion 140d, for example, when the short side end of the inclined surface 140f of the first block mounting portion 140a is aligned with the short side end of the inclined surface 140h of the second block mounting portion 140d corresponding thereto, as shown in Figures 10A, 10B, 11A, and 11B, the side surface of the short side of the first block mounting portion 140a and the side surface of the corresponding short side of the second block mounting portion 140d are flush with each other. In this case, the central axis of the insertion hole 143 of the first block mounting portion 140a and the central axis of the insertion hole 144 of the second block mounting portion 140d are aligned with each other, as shown in Figure 11B.

[0082] [Nodal block tip position adjustment and installation work] In the nodal block 140 of this embodiment, the position of the tip surface 140c of the nodal block 140 in the pressure direction (Z direction in the figure) can be adjusted (finely adjusted) by sliding the first block mounting portion 140a relative to the second block mounting portion 140d along the inclination direction of the contact surface between the first block mounting portion 140a and the second block mounting portion 140d (X direction in the figure). That is, in this embodiment, the position of the tip surface 140c of the nodal block 140 relative to the mounting surface 140g of the second block mounting portion 140d can be changed by sliding the first block mounting portion 140a relative to the second block mounting portion 140d along the long side direction of the nodal block 140 (X direction in the figure). FIG. 13 is a diagram showing the relationship between the sliding direction of the first block mounting portion 140a relative to the second block mounting portion 140d and the change in the position of the tip surface 140c of the nodal block 140 (tip portion 140b) in the pressure direction.

[0083] The state (S0) shown in the center of Figure 13 is a state in which the first block mounting portion 140a and the second block mounting portion 140d are positioned so that the long side and short side of the first block mounting portion 140a are flush with the long side and short side of the corresponding second block mounting portion 140d.

[0084] 13A and 13B show a state (S1) in which the first block mounting portion 140a is slid relative to the second block mounting portion 140d in the direction of the long side of the nodal block 140 from the state (S0) in a direction in which the thickness of the second block mounting portion 140d becomes thinner (the direction of the bold black arrow in the figure: −X direction). In this case, the position of the tip surface 140c of the nodal block 140 in the pressurizing direction in the state (S1) moves upward (the direction of the hollow arrow in the figure: −Z direction) from the position of the tip surface 140c in the state (S0). That is, in the state (S1), the distance (height) from the mounting surface 140g of the second block mounting portion 140d to the tip surface 140c of the nodal block 140 becomes shorter (lower) than in the state (S0).

[0085] In the position adjustment mode of the tip surface 140c shown in state (S1), the position of the tip surface 140c of the nodal block 140 is changed to an adjustment amount corresponding to a preset maximum sliding amount of the first block mounting portion 140a, so it is preferable that the short side end portion where the thickness of the first block mounting portion 140a is the thickest does not come into contact with the nodal block mounting portion 30b before the sliding amount of the first block mounting portion 140a relative to the second block mounting portion 140d becomes maximum. Therefore, in this embodiment, in the position adjustment mode shown in state (S1), for example, the thinnest value of the thickness of the second block mounting portion 140d is appropriately set so that the first block mounting portion 140a and the nodal block mounting portion 30b do not come into contact with each other before the sliding amount of the first block mounting portion 140a relative to the second block mounting portion 140d becomes maximum.

[0086] On the other hand, the state (S2) shown in the lower part of Fig. 13 is a state when the first block mounting portion 140a is slid relative to the second block mounting portion 140d from the state (S0) in the direction of the long side of the second block mounting portion 140d in a direction in which the thickness of the second block mounting portion 140d becomes thicker (the direction of the bold black arrow in the figure: +X direction). In this case, the position of the tip surface 140c of the nodal block 140 in the pressurizing direction in the state (S2) moves downward (the direction of the hollow arrow in the figure: +Z direction) from the position of the tip surface 140c in the state (S0). That is, in the state (S2), the distance (height) from the mounting surface 140g of the second block mounting portion 140d to the tip surface 140c of the nodal block 140 becomes longer (higher) than in the state (S0).

[0087] In this embodiment, when the nodal block 140 is attached to the holding block 30, the position of the tip surface 140c is adjusted by the above-mentioned adjustment method described in Fig. 13, and the tip surface 140c of the first block attachment portion 140a is brought into line contact with the bottom surface of the corresponding groove of the ultrasonic horn 23. Note that in this embodiment, as in the first embodiment, the nodal block 140 is manually attached to the holding block 30 by an operator while the ultrasonic device section 20 is held by the holding block 30. Specifically, the attachment work of the nodal block 140 in this embodiment is performed, for example, in the following procedure.

[0088] First, similarly to the first embodiment, the nodal block 140 is inserted into the space between the nodal block mounting portion 30b and the ultrasonic horn 23. At this time, the nodal block 140 is inserted so that the tip surface 140c of the nodal block 140 faces the ultrasonic horn 23 and so that the tip surface 140c of the nodal block 140 does not come into contact with the groove 23c of the ultrasonic horn 23. Also, at this time, for example, if the arrangement state of the first block mounting portion 140a and the second block mounting portion 140d can be set to the state (S0) in FIG. 13 and insertion is possible, the nodal block 140 in the state (S0) is inserted into the space between the nodal block mounting portion 30b and the ultrasonic horn 23. On the other hand, if the nodal block 140 cannot be inserted in the state (S0) in FIG. 13, the arrangement of the first block mounting portion 140a and the second block mounting portion 140d is set to the state (S1) in FIG. 13, that is, the distance (height) from the mounting surface 140g of the second block mounting portion 140d to the tip surface 140c is shortened (lowered), and the nodal block 140 is inserted into the space between the nodal block mounting portion 30b and the ultrasonic horn 23.

[0089] Next, after placing the nodal block 140 in a predetermined position, bolts are inserted into the insertion holes 143 of the first block mounting portion 140a and the insertion holes 144 of the second block mounting portion 140d, and the bolts are tightened to temporarily fix the nodal block 140 to the nodal block mounting portion 30b. At this time, the bolts are tightened to such an extent that the first block mounting portion 140a can slide relative to the second block mounting portion 140d, and the nodal block 140 is temporarily fixed.

[0090] Next, the first block mounting portion 140a is slid relative to the second block mounting portion 140d along the long side direction of the first block mounting portion 140a to adjust the position of the tip surface 140c of the nodal block 140, and the tip surface 140c of the nodal block 140 is brought into line contact with the bottom surface of the corresponding groove of the ultrasonic horn 23. Note that in the mounting work of this example, when the nodal block 140 is temporarily fixed to the nodal block mounting portion 30b, the tip surface 140c of the nodal block 140 is not in line contact with the bottom surface of the corresponding groove of the ultrasonic horn 23, so the sliding direction of the first block mounting portion 140a is the direction (+Z direction in the figure) that lengthens (increases) the distance (height) from the mounting surface 140g of the second block mounting portion 140d to the tip surface 140c. That is, after temporarily fixing the nodal block 140, the first block mounting portion 140a is slid in the sliding direction shown in state (S2) in FIG. 13, so that the tip surface 140c of the nodal block 140 is brought into line contact with the bottom surface of the corresponding groove in the ultrasonic horn 23.

[0091] Then, with the tip surface 140c of the nodal block 140 in line contact with the bottom surface of the corresponding groove in the ultrasonic horn 23, the bolts are further tightened to fix the nodal block 140 to the holding block 30. Note that the above-mentioned method of attaching the nodal block 140 is only an example, and other methods may be adopted. However, whichever method is adopted, the common point is that the first block mounting portion 140a is slid relative to the second block mounting portion 140d along the long side direction of the first block mounting portion 140a (the position of the tip surface 140c is adjusted) in order to bring the tip surface 140c of the nodal block 140 into line contact with the bottom surface of the corresponding groove in the ultrasonic horn 23.

[0092] [Various effects] In the nodal block 140 of the present embodiment described above, when the nodal block 140 is attached, the position of the tip surface 140c of the nodal block 140 in the pressure direction can be adjusted so that the tip surface 140c can be brought into line contact with the bottom surface of the corresponding groove of the ultrasonic horn 23. Therefore, in this embodiment, even if a situation occurs in which the tip surface 140c of the nodal block 140 and the bottom surface of the corresponding groove of the ultrasonic horn 23 do not come into line contact when the nodal block 140 is inserted into the space between the nodal block attachment portion 30b and the ultrasonic horn 23 due to the influence of, for example, the machining accuracy of each part constituting the ultrasonic application unit 102, a line contact state between the two can be reliably generated.

[0093] Furthermore, in the nodal block 140 of this embodiment, the position of the tip surface 140c of the nodal block 140 in the pressure direction can be adjusted. Therefore, even if the width of the space between the nodal block attachment portion 30b and the ultrasonic horn 23 becomes narrower than the design value due to the influence of the machining accuracy of each part constituting the ultrasonic application unit 102, for example, the nodal block 140 can be easily inserted into the space, and the tip surface 140c of the nodal block 140 can be reliably brought into line contact with the bottom surface of the corresponding groove in the ultrasonic horn 23.

[0094] In addition, in this embodiment, since the position of the tip surface 140c of the nodal block 140 can be adjusted when the nodal block 140 is attached so that the tip surface 140c can be brought into line contact with the bottom surface of the corresponding groove of the ultrasonic horn 23, there is no need to provide strict dimensional tolerances for the machining accuracy of each part constituting the ultrasonic application unit 102. Therefore, in this embodiment, it is possible to reduce manufacturing costs.

[0095] Furthermore, in this embodiment, as in the first embodiment, a line contact state is maintained between the tip surface 140c of the nodal block 140 and the bottom surface of the corresponding groove in the ultrasonic horn 23 even during ultrasonic bonding, so that various effects similar to those of the first embodiment can be obtained.

[0096] 3. Various modified examples and application examples In the above-mentioned first and second embodiments, the configuration of the device is described in detail and specifically in order to explain the present invention in an easy-to-understand manner, and the present invention is not necessarily limited to the configuration having all of the described configurations. Furthermore, the present invention may take various other modified and applied examples without departing from the gist of the present invention described in the claims. For example, the following modified and applied examples are conceivable.

[0097] In the above first and second embodiments, an example has been described in which the entire area in the extending direction of the tip surface 40c, 140c (convex surface) of the nodal block 40, 140 is in line contact with the bottom surface of the corresponding groove of the ultrasonic horn 23, but the present invention is not limited to this. For example, one or more slit structures may be provided in the extending area of ​​the tip surface 40c, 140c of the nodal block 40, 140. In this case, multiple line contact areas are formed between the tip surface 40c, 140c and the bottom surface of the groove of the ultrasonic horn 23.

[0098] In the above first and second embodiments, the shape of the tip surface 40c, 140c (convex surface) of the nodal block 40, 140 is a curved surface protruding outward (Z direction in the figure) when viewed from the extension direction, but the present invention is not limited to this. For example, the shape of the tip surface 40c, 140c (convex surface) of the nodal block 40, 140 may be an angular shape toward the outside (Z direction in the figure) when viewed from the extension direction. However, in this case, it is considered that there is a higher possibility that the head side will lose parallelism due to pressure during ultrasonic bonding, compared to when the tip surface 40c, 140c (convex surface) is a curved surface. Therefore, from this point of view, it is advantageous to make the tip surface 40c, 140c of the nodal block 40, 140 a curved surface.

[0099] In the above first and second embodiments, examples have been described in which both ends of the tip faces 40c, 140c (convex faces) of the nodal blocks 40, 140 in the extension direction are angular (right-angled) (see Figs. 7A, 7C, 10A, and 11B), but the present invention is not limited to this. For example, both ends of the tip faces 40c, 140c in the extension direction may be chamfered to form R- or C-faces. In this case, the work of inserting the nodal blocks 40, 140 into the space between the nodal block mounting portion 30b and the ultrasonic horn 23 can be performed more smoothly. In addition, in this case, the occurrence of an event in which the ultrasonic horn 23 is damaged during the mounting work of the nodal blocks 40, 140 can be suppressed.

[0100] In the above first embodiment, an example has been described in which the groove of the ultrasonic horn 23 acts as a guide for the attachment work when attaching the nodal block 40 to the holding block 30, but the present invention is not limited to this. To make the attachment work of the nodal block 40 easier, for example, the holding block 30 may be provided with a separate guide member for use when attaching the nodal block 40.

[0101] In the above second embodiment, a configuration example has been described in which the inclined surface 140f of the first block mounting portion 140a and the inclined surface 140h of the second block mounting portion 140d are planes whose thickness changes continuously from one end to the other end along the long side direction (X direction in the figure) of the nodal block 140, but the present invention is not limited to this. For example, the inclined surface 140f of the first block mounting portion 140a and the inclined surface 140h of the second block mounting portion 140d may be planes whose thickness changes continuously from one end to the other end along the short side direction (Y direction in the figure) of the nodal block 140. In this case, the sliding direction of the first block mounting portion 140a relative to the second block mounting portion 140d is also the direction along the short side direction (Y direction in the figure) of the nodal block 140.

[0102] In the second embodiment, a configuration example (see Figs. 10A, 10B, 11A, and 11B) has been described in which the sizes of the long side direction (X direction in the figures) and the short side direction (Y direction in the figures) of the second block mounting portion 140d are the same as those of the first block mounting portion 140a, but the present invention is not limited to this. For example, at least one of the sizes of the long side direction and the short side direction of the second block mounting portion 140d may be larger than that of the first block mounting portion 140a.

[0103] In the second embodiment, the first block mounting portion 140a is slidably connected to the second block mounting portion 140d. However, the present invention is not limited to this. Any configuration may be used as long as one of the first block mounting portion 140a and the second block mounting portion 140d is slidably connected to the other. For example, the second block mounting portion 140d may be slidably connected to the first block mounting portion 140a, or both the first block mounting portion 140a and the second block mounting portion 140d may be slidably connected to each other. When the second block mounting portion 140d is slidably connected to the first block mounting portion 140a, the opening shape of the insertion hole 144 of the second block mounting portion 140d is also slidably connected to the insertion hole 143 of the first block mounting portion 140a in the second embodiment. For example, the opening shape of the insertion hole 144 of the second block mounting portion 140d is slidably connected to the insertion hole 143 of the first block mounting portion 140a in the second embodiment.

[0104] In the second embodiment, a configuration example has been described in which the nodal block 140 is attached (fixed) to the nodal block mounting portion 30b by bolting, but the present invention is not limited to this. For example, the following mounting mode (hereinafter referred to as a "modified mounting mode") may be adopted in which the nodal block 140 is not fixed to the nodal block mounting portion 30b by bolts.

[0105] In the modified mounting mode, first, in the same manner as in the second embodiment, the nodal block 140 is inserted into the space between the nodal block mounting portion 30b and the ultrasonic horn 23, and the first block mounting portion 140a is slid relative to the second block mounting portion 140d to bring the tip surface 140c of the nodal block 140 into line contact with the bottom surface of the corresponding groove of the ultrasonic horn 23. Then, a force is applied to the first block mounting portion 140a in the sliding direction of the first block mounting portion 140a corresponding to the direction in which the contact pressure between the tip surface 140c and the bottom surface of the groove increases. Then, with the contact pressure between the tip surface 140c and the bottom surface of the groove increased to a certain degree, the first block mounting portion 140a is fixed to the second block mounting portion 140d, for example, by bolt fastening. In this fixing operation, the first block mounting portion 140a is fixed to the second block mounting portion 140d but not to the nodal block mounting portion 30b.

[0106] In this modified mounting mode, by increasing the contact pressure between the tip face 140c and the bottom face of the groove, pressure is applied from the tip face 140c of the nodal block 140 toward the bottom face of the groove, and pressure is also applied from the mounting face 140g of the nodal block 140 toward the nodal block mounting portion 30b. In other words, a pressure is generated that pushes the nodal block 140 toward its external contact parts (the bottom face of the groove and the nodal block mounting portion 30b). As a result, the nodal block 140 can be fixed between the nodal block mounting portion 30b and the ultrasonic horn 23 without being fixed to the nodal block mounting portion 30b with bolts.

[0107] In addition, when the above-mentioned modified mounting mode is adopted, for example, the insertion hole 144 of the second block mounting portion 140d is configured as a screw hole that fits with a bolt. Then, the bolt is inserted into the insertion hole 144 (screw hole) of the second block mounting portion 140d through the insertion hole 143 of the first block mounting portion 140a and tightened, thereby fixing the first block mounting portion 140a to the second block mounting portion 140d. In this case, the length of the fixing bolt is set to a length that the tip of the bolt does not reach the nodal block mounting portion 30b when fixed. Therefore, in the above-mentioned modified mounting mode, the insertion hole 144 (screw hole) of the second block mounting portion 140d does not need to be a through hole. In the above-mentioned modified mounting mode, the insertion hole 144 of the second block mounting portion 140d may be a through hole as in the above-mentioned second embodiment.

[0108] In the above first and second embodiments, an example was described in which a groove is formed at the position of the nodal point where the tip faces 40c, 140c of the nodal blocks 40, 140 come into contact in the surface region of the cylindrical ultrasonic horn 23, but the present invention is not limited to this. For example, a flat region parallel to the application surface of the ultrasonic vibration may be formed over the entire surface of the ultrasonic horn 23 on the side where the tip faces 40c, 140c of the nodal blocks 40, 140 come into contact.

[0109] In addition, the holding function part (ultrasonic horn holding device) of the ultrasonic application unit 2, 102 composed of at least the holding block 30 and the nodal block 40, 140 in the first and second embodiments can be applied to a conventional ultrasonic bonding device of a type that applies ultrasonic vibration (lateral vibration) whose amplitude varies in a direction perpendicular to the pressure direction during ultrasonic bonding. For example, in a conventional ultrasonic bonding device, if a groove or a flat surface is formed on the surface opposite to the head part side of the ultrasonic horn and at the position of the nodal point of the ultrasonic vibration, the same effect as the effect of the present invention described above can be obtained by simply replacing the holding function part of the ultrasonic unit including the ultrasonic horn of the device with the holding function part of the present embodiment described above. Therefore, in such an application example, the same effect as the effect of the present invention described above can be obtained at low cost. [Explanation of symbols]

[0110] 1...ultrasonic bonding device, 2,102...ultrasonic application unit, 3...pressure unit, 4...base, 5,6...holding member, 10a,10b...head portion, 20...ultrasonic device portion, 21...ultrasonic generator portion, 22...ultrasonic cone, 23...ultrasonic horn, 23a...horn tip portion, 23b...horn body portion, 23c,23d...groove, 30...holding block, 30a...ultrasonic unit mounting portion, 30b...nodal block mounting portion, 32...hanging member, 40,140...nodal block, 40a...block mounting portion, 40b,140b...tip portion, 40c,140c...tip surface, 140a...first block mounting portion, 140d...second block mounting portion, 140f,140h...inclined surface

Claims

1. a pressure applying part for applying a load to the joining part; an ultrasonic application unit including an ultrasonic horn that transmits ultrasonic vibrations whose amplitude fluctuates in a direction perpendicular to the load application direction and applies the ultrasonic vibrations to the joining portion; A holder for holding the ultrasonic wave application unit; a pressing member that is disposed between the holding portion and the ultrasonic horn and that contacts a portion of the ultrasonic horn opposite to the ultrasonic vibration application surface side and that serves as a node of the ultrasonic vibration; a portion of the ultrasonic horn that comes into contact with the pressing member is a plane parallel to the surface to which the ultrasonic vibration is applied; The portion of the pressing member that comes into contact with the ultrasonic horn is formed to extend in a direction perpendicular to the direction of transmission of the ultrasonic vibration and the direction of application of the load, and is a convex surface that protrudes toward the ultrasonic horn when viewed from the extension direction of the portion of the pressing member that comes into contact with the ultrasonic horn.

1. An ultrasonic bonding device comprising:

2. The convex surface is a curved surface.

2. The ultrasonic bonding apparatus according to claim 1 .

3. A groove is formed in the portion of the ultrasonic horn that contacts the pressing member, and the bottom surface of the groove contacts the pressing member.

3. The ultrasonic bonding apparatus according to claim 2.

4. The length of the surface of the pressing member that contacts the ultrasonic horn in the extension direction is equal to or greater than the length of the flat surface of the ultrasonic horn in the extension direction.

4. The ultrasonic bonding device according to claim 1, wherein the ultrasonic bonding device is a bonding member.

5. The pressing member can be externally disposed between the holding portion and the ultrasonic horn in a state in which the ultrasonic application portion is held by the holding portion.

2. The ultrasonic bonding apparatus according to claim 1 .

6. The ultrasonic wave application unit is further provided with an attachment unit capable of attaching the holding unit to the outside.

2. The ultrasonic bonding apparatus according to claim 1 .

7. the pressing member has a first pressing member portion on which the convex surface is formed, and a second pressing member portion disposed between the first pressing member and the holding portion and in contact with the first pressing member portion, a surface of the first pressing member portion that comes into contact with the second pressing member portion is a plane that is inclined at a predetermined angle with respect to the ultrasonic vibration application surface, a surface of the second pressing member portion in contact with the first pressing member portion is a plane inclined at the predetermined angle with respect to the ultrasonic vibration application surface, The first pressing member portion is in contact with the second pressing member portion such that a direction in which the thickness of the first pressing member portion becomes thinner and a direction in which the thickness of the second pressing member portion becomes thinner are opposite to each other.

2. The ultrasonic bonding apparatus according to claim 1 .

8. The first pressing member part is slid relative to the second pressing member part in a tilt direction of a contact surface between the first pressing member part and the second pressing member part, thereby adjusting a position of the convex surface of the first pressing member part in the load application direction.

8. The ultrasonic bonding apparatus according to claim 7.

9. a holding section to which an ultrasonic application section including an ultrasonic horn can be attached, the ultrasonic horn transmitting ultrasonic vibrations whose amplitude fluctuates in a direction perpendicular to the direction of the load applied to the joint section and applying the ultrasonic vibrations to the joint section; a pressing member that can be disposed between the holding portion and the ultrasonic horn, In a state in which the ultrasonic application unit is attached to the holding unit and the pressing member is disposed between the holding unit and the ultrasonic horn, the pressing member is in contact with a plane parallel to the ultrasonic vibration application surface, the plane being formed on a portion of the ultrasonic horn opposite to the ultrasonic vibration application surface side and at a portion that becomes a node of the ultrasonic vibration; The portion of the pressing member that comes into contact with the ultrasonic horn is formed to extend in a direction perpendicular to the direction of transmission of the ultrasonic vibration and the direction of application of the load, and is a convex surface that protrudes toward the ultrasonic horn when viewed from the extension direction of the portion of the pressing member that comes into contact with the ultrasonic horn. An ultrasonic horn holding device characterized by the above.

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