Disk device and method for inspecting disk device

Abstract

To provide a disk device capable of preventing wiring from becoming complicated.SOLUTION: A disk device according to one embodiment includes a housing, a magnetic disk, a circuit board, a first vibrator, and a first adsorption film. The housing has an internal space, the magnetic disk is disposed in the internal space, and the circuit board is attached to the housing outside the internal space. The first vibrator is disposed in the interior space and spaced apart from an electric circuit electrically connected to the circuit board. The first adsorption film is provided on the first vibrator, is exposed to the internal space, and is configured to adsorb a first substance.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] An embodiment of the present invention relates to a disk device and a method for inspecting a disk device. [Background technology]

[0002] A disk device such as a hard disk drive (HDD) has a housing that houses various components. In addition, the disk device may have a sensor that detects a predetermined substance in the internal space of the housing. For example, the disk device can detect by the sensor that a predetermined substance has entered the internal space of the housing or has been generated in the internal space. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2010 / 0007979 Summary of the Invention [Problem to be solved by the invention]

[0004] As an example, in order to monitor the intrusion and generation of a specific substance in the internal space using a sensor, the control device of the disk device is electrically connected to the sensor, and in this case, the wiring in the electric circuit connecting the control device and the sensor becomes complicated.

[0005] One example of a problem to be solved by the present invention is to provide a disk device and a method for inspecting a disk device that can prevent wiring from becoming complicated. [Means for solving the problem]

[0006] A disk device according to one embodiment includes a housing, a magnetic disk, a circuit board, a first vibrator, and a first adsorption film. An internal space is provided in the housing. The magnetic disk is disposed in the internal space. The circuit board is attached to the housing outside the internal space. The first vibrator is disposed in the internal space and is spaced apart from an electric circuit electrically connected to the circuit board. The first adsorption film is provided on the first vibrator, exposed to the internal space, and configured to adsorb a first substance. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is an exemplary plan view showing an HDD according to the first embodiment. [Diagram 2] FIG. 2 is an exemplary cross-sectional view partially showing the HDD of the first embodiment taken along line F2-F2 in FIG. [Diagram 3] FIG. 3 is an exemplary front view illustrating the first gas sensor and the second gas sensor of the first embodiment. [Figure 4] FIG. 4 is an exemplary diagram that illustrates the HDD, the first gas sensor, and an inspection device according to the first embodiment. [Diagram 5] FIG. 5 is an exemplary plan view illustrating an HDD according to the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] (First embodiment) The first embodiment will be described below with reference to FIGS. 1 to 4. In this specification, components according to the embodiment and their descriptions may be described in a number of ways. The components and their descriptions are merely examples and are not limited by the expressions in this specification. The components may be identified by names different from those in this specification. The components may also be described by expressions different from those in this specification.

[0009] In the following description, "suppress" is defined as, for example, preventing the occurrence of an event, action, or influence, or reducing the severity of an event, action, or influence. Also, in the following description, "restrict" is defined as, for example, preventing movement or rotation, or allowing movement or rotation within a predetermined range and preventing movement or rotation beyond the predetermined range.

[0010] Fig. 1 is an exemplary plan view showing a hard disk drive (HDD) 10 according to a first embodiment. Fig. 2 is an exemplary cross-sectional view partially showing the HDD 10 of the first embodiment taken along line F2-F2 in Fig. 1. The HDD 10 is an example of a disk device, and may also be called an electronic device, a storage device, an external storage device, or a magnetic disk device.

[0011] As shown in each drawing, for convenience, an X-axis, a Y-axis, and a Z-axis are defined in this specification. The X-axis, the Y-axis, and the Z-axis are perpendicular to each other. The X-axis is provided along the width of the HDD 10. The Y-axis is provided along the length of the HDD 10. The Z-axis is provided along the thickness of the HDD 10.

[0012] Furthermore, in this specification, an X direction, a Y direction, and a Z direction are defined. The X direction is a direction along the X axis, and includes a +X direction indicated by an arrow on the X axis, and a -X direction opposite to the direction of the X axis arrow. The Y direction is a direction along the Y axis, and includes a +Y direction indicated by an arrow on the Y axis, and a -Y direction opposite to the direction of the Y axis arrow. The Z direction is a direction along the Z axis, and includes a +Z direction indicated by an arrow on the Z axis, and a -Z direction opposite to the direction of the Z axis arrow.

[0013] The HDD 10 includes a housing 11, a plurality of magnetic disks 12, a spindle motor 13, a head stack assembly (HSA) 14, a voice coil motor (VCM) 15, and a ramp load mechanism 16 shown in FIG. 1, and a printed circuit board (PCB) 17 and a breather filter 18 shown in FIG. 2. The magnetic disks 12 may also be called disks or platters. The breather filter 18 is an example of a filter. The PCB 17 is also called a printed circuit board assembly (PCBA) and is an example of a circuit board.

[0014] 2, the housing 11 has a base 21, an inner cover 22, an outer cover 23, and a relay board 24. Note that the housing 11 is not limited to this example. Note that the inner cover 22 and the outer cover 23 are omitted in FIG. 1 for ease of understanding.

[0015] 1, the base 21 is formed in a substantially rectangular box shape that is open in the +Z direction. The base 21 has a bottom wall 25 and side walls 26. The bottom wall 25 is formed in a substantially rectangular (quadrilateral) plate shape that extends substantially perpendicular to the Z direction. The side walls 26 protrude from the edge of the bottom wall 25 in the substantially +Z direction and are formed in a substantially rectangular frame shape.

[0016] An internal space S is provided in the base 21. The internal space S is formed (defined, partitioned) by a bottom wall 25 and a side wall 26. The side wall 26 surrounds the internal space S. A plurality of magnetic disks 12, a spindle motor 13, an HSA 14, a VCM 15, a ramp load mechanism 16, and a breathing filter 18 are disposed in the internal space S.

[0017] 2, the inner cover 22 is attached to the base 21. For example, the inner cover 22 is attached to an end of the side wall 26 in the +Z direction by, for example, a screw 28. As a result, the inner cover 22 closes the internal space S.

[0018] An endless gasket 29 is interposed between the inner cover 22 and the side wall 26. The gasket 29 airtightly seals the gap between the inner cover 22 and the side wall 26. The gasket 29 is made of, for example, synthetic rubber that has low helium permeability. The gasket 29 may be made of other materials.

[0019] The outer cover 23 covers the inner cover 22 via a gap and is attached to the base 21. The gap between the inner cover 22 and the outer cover 23 may be filled with, for example, double-sided tape that connects the inner cover 22 and the outer cover 23 together.

[0020] For example, the outer cover 23 is attached by welding to an end of the side wall 26 in the +Z direction. As a result, the inner cover 22 and the outer cover 23 air-tightly seal the internal space S. The outer cover 23 may be omitted.

[0021] An air vent 31 is provided in the inner cover 22. The air vent 31 penetrates the inner cover 22 substantially in the Z direction and communicates with the internal space S. After components are placed in the internal space S and the inner cover 22 is attached to the base 21, air is evacuated from the internal space S through the air vent 31. Furthermore, a gas other than air is filled into the internal space S through the air vent 31.

[0022] The gas filled in the internal space S is, for example, a low-density gas having a density lower than that of air, an inert gas having a low reactivity, or the like. For example, helium is filled in the internal space S. Helium is an example of the first gas. Note that other fluids may be filled in the internal space S.

[0023] The housing 11 further has a seal 32. The seal 32 is, for example, an aluminum seal. The seal 32 airtightly closes the ventilation hole 31. In this way, the seal 32 restricts helium in the internal space S from leaking from the ventilation hole 31 to the outside of the housing 11. Note that a ventilation hole may be further provided in the outer cover 23. In this case, the seal 32 closes the ventilation hole of the outer cover 23 instead of the ventilation hole 31.

[0024] A through hole 35 is provided in the bottom wall 25. The through hole 35 penetrates the bottom wall 25 in approximately the Z direction so as to communicate the internal space S with the outside. The relay board 24 is attached to the bottom wall 25 so as to airtightly close the through hole 35. The relay board 24 has a board 36 and two relay connectors 37, 38.

[0025] The substrate 36 is, for example, a rigid substrate such as a glass epoxy substrate. The substrate 36 covers the through hole 35 and is attached to the bottom wall 25. The substrate 36 airtightly closes the through hole 35. The two relay connectors 37 and 38 are mounted on both sides of the substrate 36 and are electrically connected to each other.

[0026] 1, the multiple magnetic disks 12 are formed into a disk shape that spreads perpendicular to the Z direction. The multiple magnetic disks 12 are arranged at intervals in the Z direction. Magnetic recording layers are provided on both sides of the magnetic disks 12.

[0027] The spindle motor 13 supports a plurality of magnetic disks 12. The plurality of magnetic disks 12 are held on a hub of the spindle motor 13 by, for example, clamp springs.

[0028] The spindle motor 13 rotates the multiple magnetic disks 12 together around a central axis Axd. The central axis Axd is an imaginary axis extending substantially in the Z direction. The central axis Axd is, for example, the center of rotation of the magnetic disks 12 and the spindle motor 13, and is also the central axis of the magnetic disks 12.

[0029] The housing 11 further has a support shaft 41 spaced apart from the magnetic disk 12. The support shaft 41 protrudes, for example, from the bottom wall 25 in approximately the +Z direction. The HSA 14 is supported by the support shaft 41 so as to be rotatable.

[0030] The HSA 14 can rotate around a central axis Axh. The central axis Axh is an imaginary axis extending substantially in the Z direction. The central axis Axh is, for example, the center of rotation of the HSA 14 and is also the central axis of the support shaft 41.

[0031] The HSA 14 has a carriage 45, a plurality of head gimbal assemblies (HGA) 46, a flexible printed circuit board (FPC) 47, a support plate 48, and a relay connector 49 of Fig. 2. As shown in Fig. 1, the carriage 45 has an actuator block 51 and a plurality of arms 52.

[0032] The actuator block 51 is attached to the support shaft 41 via a bearing so as to be rotatable around the central axis Axh, for example. The arms 52 protrude from the actuator block 51 substantially parallel to each other in a direction substantially perpendicular to the central axis Axh.

[0033] Each of the multiple HGAs 46 has a magnetic head 55 and a suspension 56. The magnetic head 55 may also be referred to as a slider. The magnetic head 55 records and reproduces information on a corresponding one of the multiple magnetic disks 12. In other words, the magnetic head 55 reads and writes information from and to the magnetic disk 12. The suspension 56 is attached to the arm 52 and holds the magnetic head 55.

[0034] The suspension 56 has a base plate 57, a load beam 58, and a flexure 59. The base plate 57 is attached to the tip of the arm 52. The load beam 58 is formed in a plate shape that is thinner than the base plate 57. The load beam 58 is attached to the base plate 57 so as to extend from the base plate 57.

[0035] The flexure 59 is a type of flexible printed wiring board formed in a long and narrow strip shape. The flexure 59 has, for example, a metal backing plate, an insulating base layer, a conductive layer, and an insulating cover layer.

[0036] The flexure 59 extends along the arm 52, the base plate 57, and the load beam 58. A rotatable gimbal portion is provided at one end 59a of the flexure 59. The magnetic head 55 is attached to the gimbal portion of the flexure 59.

[0037] One end 47a of the FPC 47 is attached to the actuator block 51. The other ends 59b of the multiple flexures 59 are connected to the end 47a of the FPC 47. Therefore, the flexures 59 electrically connect the magnetic head 55 and the FPC 47.

[0038] The other end 47b of the FPC 47 is attached to a support plate 48. The support plate 48 is made of, for example, metal or synthetic resin. The rigidity of the support plate 48 is higher than the rigidity of the FPC 47. The support plate 48 has an attachment portion 61 and an upright portion 62.

[0039] 2, the mounting portion 61 is disposed along the bottom wall 25 of the base 21 and is attached to the bottom wall 25 by, for example, screws.

[0040] The relay connector 49 is mounted on the end portion 47b. The attachment portion 61 reinforces the end portion 47b of the FPC 47 on which the relay connector 49 is mounted. The relay connector 49 is connected to the relay connector 37 of the relay board 24.

[0041] The standing portion 62 extends from the attachment portion 61 in approximately the Z direction. The standing portion 62 supports the FPC 47 such that the width of the FPC 47 between the two ends 47a, 47b approximately coincides with the Z direction. The standing portion 62 is disposed along the XZ plane, for example. Note that the standing portion 62 is not limited to this example.

[0042] 1 includes a voice coil, a pair of yokes, and a magnet attached to the yokes. The voice coil is held by an actuator block 51. The VCM 15 moves a magnetic head 55 to a desired position by rotating a carriage 45 around a central axis Axh.

[0043] When the magnetic head 55 moves to the outer edge of the magnetic disk 12 due to the rotation of the HSA 14 by the VCM 15 , the ramp load mechanism 16 holds the magnetic head 55 at a position separated from the magnetic disk 12 .

[0044] 2, the PCB 17 is disposed outside the internal space S and is attached to the bottom wall 25 by, for example, a screw. In other words, the PCB 17 is attached to the housing 11 outside the internal space S.

[0045] The PCB 17 includes a printed wiring board (PWB) 71, a relay connector 72, an interface (I / F) connector 73, and a plurality of electronic components 74. The PCB 17 may further include other components.

[0046] The PWB 71 is, for example, a rigid board such as a glass epoxy board, and is a multi-layer board or a build-up board, etc. The relay connector 72, the I / F connector 73, and a plurality of electronic components 74 are mounted on the PWB 71.

[0047] The relay connector 72 is connected to the relay connector 38 of the relay board 24. As a result, the PCB 17 is electrically connected to the VCM 15 through the relay board 24 and the FPC 47, and is also electrically connected to the magnetic head 55 through the relay board 24, the FPC 47, and the flexure 59. Furthermore, the PCB 17 is electrically connected to the spindle motor 13, for example, through another FPC. That is, an electric circuit EC electrically connected to the PCB 17 is provided in the internal space S.

[0048] The electric circuit EC is one component or a group of components that is electrically connected to the PCB 17 and forms at least one electric circuit together with at least a part of the PCB 17. The electric circuit EC includes, for example, the spindle motor 13, the VCM 15, the relay board 24, the FPC 47, the magnetic head 55, and the flexure 59. Note that the electric circuit EC is not limited to this example.

[0049] The I / F connector 73 is, for example, a serial ATA (SATA) connector, and is connected to a host computer. The HDD 10 receives power from the host computer through the I / F connector 73 and communicates with the host computer.

[0050] The electronic components 74 include, for example, a processor 74a, memory 74b such as ROM, RAM, and flash memory, and various other components. The processor 74a may also be referred to as a controller.

[0051] The processor 74a controls the entire HDD 10 based on, for example, a program read from the memory 74b. For example, the processor 74a controls the spindle motor 13 through the PWB 71. Furthermore, the processor 74a controls the VCM 15 and the magnetic head 55 through the PWB 71, the relay board 24, the FPC 47, and the flexure 59. The processor 74a may obtain information from, for example, various sensors arranged inside the housing 11.

[0052] The processor 74a may control the entire HDD 10 in cooperation with the wiring of the PWB 71 and the other electronic components 74. That is, the entire PCB 17 including the PWB 71 and the multiple electronic components 74 can be a control device for the HDD 10.

[0053] The breathing filter 18 has, for example, a case 81, an adsorbent 82, and a membrane filter 83. The case 81 is made of, for example, a synthetic resin or metal with low helium permeability. The case 81 is attached to the inner cover 22 so as to cover the ventilation hole 31. Inside the case 81, a storage chamber 85 communicating with the ventilation hole 31 and the internal space S is provided.

[0054] The adsorbent 82 is disposed in the storage chamber 85. The adsorbent 82 is a gas collector such as activated carbon, and adsorbs various organic substances including gases. The adsorbent 82 may adsorb other substances. The membrane filter 83 is attached to the case 81 so as to cover the storage chamber 85.

[0055] 1, the HDD 10 further includes a first gas sensor 91 and a second gas sensor 92. Each of the first gas sensor 91 and the second gas sensor 92 is a quartz crystal microbalance (QCM) sensor. The first gas sensor 91 and the second gas sensor 92 are disposed in the internal space S.

[0056] 3 is an exemplary front view showing a first gas sensor 91 and a second gas sensor 92 according to the first embodiment. The first gas sensor 91 has an oscillator 101 and an adsorption film 102. The oscillator 101 is an example of a first oscillator. The adsorption film 102 is an example of a first adsorption film.

[0057] The oscillator 101 is, for example, a crystal oscillator, but may be another type of oscillator or resonator such as a ceramic resonator.

[0058] The transducer 101 has a piezoelectric body 105, two electrodes 106 and 107, and two lead wires 108 and 109. The electrode 106 is an example of a first electrode. The electrode 107 is an example of a second electrode. The lead wire 108 is an example of a first lead. The lead wire 109 is an example of a second lead.

[0059] The piezoelectric body 105 is, for example, quartz crystal. The piezoelectric body 105 is formed in a substantially disk shape. The piezoelectric body 105 has two surfaces 105a and 105b. The surface 105a is an example of a first surface. The surface 105b is an example of a second surface.

[0060] Each of the surfaces 105a and 105b is formed in a substantially circular shape. The surface 105a faces the magnetic disks 12, the FPC 47, the arms 52, and the HGAs 46. The surface 105b is located on the opposite side to the surface 105a.

[0061] The electrode 106 is a metal film provided on the surface 105a. The electrode 106 has a circular portion 106a and a connection portion 106b. The circular portion 106a is formed concentrically with the surface 105a and is smaller than the surface 105a. The connection portion 106b protrudes from the edge of the circular portion 106a along the surface 105a.

[0062] The circular portion 106a has an outer surface 106c. The outer surface 106c is formed in a substantially circular shape. As shown in FIG. 1, the outer surface 106c faces the magnetic disks 12, the FPC 47, the arms 52, and the HGAs 46.

[0063] The electrode 107 in FIG. 3 is a metal film provided on the surface 105b. The electrode 107 has a circular portion 107a and a connection portion 107b. The circular portion 107a is formed concentrically with the surface 105b and is smaller than the surface 105b. The piezoelectric body 105 is located between the circular portion 106a of the electrode 106 and the circular portion 107a of the electrode 107. The connection portion 107b protrudes from the edge of the circular portion 107a along the surface 105b. The direction in which the connection portion 106b protrudes and the direction in which the connection portion 107b protrudes are different from each other.

[0064] The lead wire 108 is connected to a connection portion 106b of the electrode 106. The lead wire 109 is connected to a connection portion 107b of the electrode 107. The lead wires 108 and 109 extend substantially parallel to each other. Note that the lead wires 108 and 109 may extend in different directions from each other or may be bent.

[0065] The adsorption film 102 is provided on the outer surface 106c of the electrode 106. The adsorption film 102 may be provided on other parts of the transducer 101. The adsorption film 102 is, for example, a carbon film, and adsorbs various organic substances including gases.

[0066] In this embodiment, the adsorption film 102 adsorbs the outgas. The outgas is an example of the first substance and the second gas. The outgas is a gas different from the helium filled in the internal space S.

[0067] The outgas is, for example, a volatile organic compound (VOC). In the following description, the outgas includes not only VOCs emitted from components of the HDD 10, but also VOCs that have entered the internal space S from the outside. In other words, the outgas in the following description is a gas that is adsorbed by the adsorption film 102.

[0068] The adsorption film 102 is exposed in the internal space S. In other words, the adsorption film 102 is exposed to a gas, such as helium, present in the internal space S. Note that the adsorption film 102 may be partially covered.

[0069] The second gas sensor 92 has substantially the same configuration as the first gas sensor 91. The second gas sensor 92 has an oscillator 111 and an adsorption film 112. The oscillator 111 is an example of a second oscillator. The adsorption film 112 is an example of a second adsorption film.

[0070] The oscillator 111 is a quartz oscillator, like the oscillator 101 of the first gas sensor 91. The oscillator 111 has a piezoelectric body 115, two electrodes 116 and 117, and two lead wires 118 and 119.

[0071] The piezoelectric body 115 is formed in a substantially disk shape. The piezoelectric body 115 has two surfaces 115a and 115b. Each of the surfaces 115a and 115b is formed in a substantially circular shape. The surface 115a faces the multiple magnetic disks 12, the FPC 47, the multiple arms 52, and the multiple HGAs 46. The surface 115b is located on the opposite side to the surface 115a.

[0072] The electrode 116 is a metal film provided on the surface 115a. The electrode 116 has a circular portion 116a and a connection portion 116b. The circular portion 116a is formed concentrically with the surface 115a and is smaller than the surface 115a. The connection portion 116b protrudes from the edge of the circular portion 116a along the surface 115a.

[0073] The circular portion 116a has an outer surface 116c. The outer surface 116c is formed in a substantially circular shape. As shown in FIG. 1, the outer surface 116c faces the magnetic disks 12, the FPC 47, the arms 52, and the HGAs 46.

[0074] Electrode 117 in FIG. 3 is a metal film provided on surface 115b. Electrode 117 has circular portion 117a and connection portion 117b. Circular portion 117a is formed concentrically with surface 115b and is smaller than surface 115b. Connection portion 117b protrudes from the edge of circular portion 117a along surface 115b. The direction in which connection portion 116b protrudes and the direction in which connection portion 117b protrudes are different from each other.

[0075] The lead wire 118 is connected to a connection portion 116b of the electrode 116. The lead wire 119 is connected to a connection portion 117b of the electrode 117. The lead wires 118 and 119 extend substantially in parallel.

[0076] The adsorption film 112 is provided on an outer surface 116c of the electrode 116. The adsorption film 112 is exposed in the internal space S. The adsorption film 112 is, for example, silicon dioxide or Y-type zeolite, and adsorbs siloxane. That is, the adsorption film 112 adsorbs a substance different from the outgas adsorbed by the adsorption film 102. Siloxane is an example of the second substance.

[0077] The adsorption films 102 and 112 are not limited to the above examples. For example, the adsorption film 102 or the adsorption film 112 may be a silver film that adsorbs inorganic gases such as sulfur dioxide and chlorine, or may be other adsorption films. In addition, the adsorption films 102 and 112 may be capable of adsorbing solids or liquids, not limited to gases.

[0078] The housing 11 further includes a holder 121. The holder 121 is an example of a holder. The holder 121 is disposed in the internal space S, and is attached to the bottom wall 25. The holder 121 may be formed integrally with the base 21.

[0079] The support base 121 has an upper surface 121a. The upper surface 121a is, for example, formed to be substantially flat and faces substantially in the +Z direction. The support base 121 is provided with a plurality of holes 125, 126, 127, and 128 that open to the upper surface 121a.

[0080] The lead wire 108 of the first gas sensor 91 is inserted into the hole 125, and the lead wire 109 is inserted into the hole 126. Furthermore, the lead wire 118 of the second gas sensor 92 is inserted into the hole 127, and the lead wire 119 is inserted into the hole 128.

[0081] An O-ring 129 is attached to each of the lead wires 108, 109, 118, and 119. The O-ring 129 fills the gap between the holder 121 and the lead wires 108, 109, 118, and 119 inside the holes 125, 126, 127, and 128. In this way, the holder 121 removably holds the lead wires 108, 109, 118, and 119 via the O-ring 129.

[0082] The leads 108, 109, 118, and 119 may be held in the housing 11 by other methods. For example, the leads 108, 109, 118, and 119 may be held by clips or attached to the housing 11 by adhesive.

[0083] 2, in this embodiment, the holder 121 is located between the intermediate substrate 24 and the side wall 26. The holder 121, the first gas sensor 91, and the second gas sensor 92 are farther away from the magnetic disk 12 than the breathing filter 18, the intermediate substrate 24, and the FPC 47. Note that the positions of the holder 121, the first gas sensor 91, and the second gas sensor 92 are not limited to this example.

[0084] The holder 121 is made of an insulating material or has a surface covered with an insulating substance. The holder 121 is not electrically connected to the electric circuit EC. Therefore, the lead wires 108, 109, 118, and 119 are not electrically connected to the electric circuit EC. Furthermore, the vibrators 101 and 111 are separated from components other than the holder 121 and the O-ring 129. Therefore, the vibrators 101 and 111 are separated from the electric circuit EC. In other words, the vibrators 101 and 111 are electrically separated from the electric circuit EC. The vibrators 101 and 111 and the electric circuit EC may be connected to a common ground.

[0085] The vibrators 101 and 111 may be mounted on a substrate independent of the electric circuit EC. In this case, the substrate may be electrically connected to the vibrators 101 and 111. However, the substrate is electrically separated from the electric circuit EC and does not receive power from the host computer via the I / F connector 73.

[0086] Since the oscillators 101, 111 are separated from the electric circuit EC, the PCB 17 does not cause the oscillators 101, 111 to oscillate while the HDD 10 is in operation. However, even if the oscillators 101, 111 do not oscillate, the adsorption film 102 adsorbs the outgas in the internal space S, and the adsorption film 112 adsorbs the siloxane in the internal space S.

[0087] Below, some examples of the manufacturing method of the HDD 10 will be described. Note that the manufacturing method of the HDD 10 is not limited to the following method, and other methods may be used. First, the initial value of the oscillation frequency of the vibrators 101 and 111 is recorded in, for example, the memory 74b. Note that the initial value may be recorded in the storage area of ​​the magnetic disk 12.

[0088] As described above, the memory 74b or the storage area of ​​the magnetic disk 12 stores the initial values ​​of the oscillation frequencies of the vibrators 101, 111. The memory 74b or the storage area of ​​the magnetic disk 12 is an example of a storage unit.

[0089] The initial value of the oscillation frequency of the vibrators 101 and 111 is, for example, the oscillation frequency (resonant frequency) of the vibrators 101 and 111 measured before the manufacturing process. Note that the initial value may be provided by the manufacturer of the vibrators 101 and 111.

[0090] Next, a plurality of magnetic disks 12, a spindle motor 13, an HSA 14, a VCM 15, and a ramp load mechanism 16 are housed in the internal space S. The magnetic disks 12, the spindle motor 13, the HSA 14, the VCM 15, and the ramp load mechanism 16 are assembled together to be operable as an HDD 10.

[0091] Next, the lead wires 108, 109, 118, and 119 of the first gas sensor 91 and the second gas sensor 92 are inserted into the holes 125, 126, 127, and 128. In this way, the lead wires 108, 109, 118, and 119 are held by the holding base 121.

[0092] When the first gas sensor 91 and the second gas sensor 92 are disposed in the internal space S, they are temporarily covered by, for example, a cover CV shown imaginarily by a two-dot chain line in Fig. 2. The cover CV is made of an insulating material such as synthetic rubber.

[0093] The cover CV covers the adsorption films 102, 112. In this way, the cover CV can prevent the adsorption films 102, 112 from being contaminated during the manufacturing process of the HDD 10. An operator or a mounter holds the first gas sensor 91 or the second gas sensor 92 through the cover CV. When the first gas sensor 91 and the second gas sensor 92 are placed in the internal space S, the cover CV is removed.

[0094] Next, the inner cover 22 is attached to the base 21 by, for example, the screws 28. Next, air is evacuated from the internal space S through the membrane filter 83, the adsorbent 82, and the ventilation hole 31. Furthermore, helium is filled into the internal space S through the ventilation hole 31, the adsorbent 82, and the membrane filter 83. Note that air may be discharged from the internal space S by filling the internal space S with helium.

[0095] When outgas is contained in the helium flowing into the internal space S through the ventilation opening 31, the adsorbent 82 adsorbs the outgas. The outgas may be collected by the membrane filter 83. In this manner, the breathing filter 18 collects the outgas from the airflow passing through the ventilation opening 31.

[0096] Next, the seal 32 is attached to the inner cover 22. As a result, the vent hole 31 is sealed by the seal 32. The vent hole 31 is air-tightly sealed by the seal 32. Furthermore, the gap between the base 21 and the inner cover 22 is air-tightly sealed by the gasket 29. This prevents helium from leaking from the internal space S, at least temporarily.

[0097] Next, the outer cover 23 is joined to the side wall 26 of the base 21 by, for example, welding. As a result, the outer cover 23 covering the inner cover 22 is fixed to the base 21. This completes the manufacture of the HDD 10. Note that before the outer cover 23 is attached to the base 21, the operation of the HDD 10 and the leakage of helium may be inspected.

[0098] When the magnetic disk 12 and the HSA 14 rotate in the internal space S of the HDD 10, an airflow is generated. The adsorptive films 102, 112 of the first gas sensor 91 and the second gas sensor 92 are exposed to the generated airflow. The adsorptive films 102, 112 adsorb a predetermined substance from the airflow.

[0099] On the other hand, if a malfunction occurs in the HDD 10, the cause may be analyzed. For example, outgassing emitted from components in the internal space S or outside air entering the internal space S from the outside may be the cause of the malfunction of the HDD 10.

[0100] 4 is an exemplary diagram illustrating the HDD 10, the first gas sensor 91, and the inspection device 130 according to the first embodiment. The inspection device 130 can analyze the cause of a defect in the HDD 10. As shown in FIG. 4, the inspection device 130 includes, for example, an information processing device 131 and a frequency measuring instrument 132. Note that the inspection device 130 is not limited to this example.

[0101] The information processing device 131 is, for example, a general computer. The information processing device 131 includes a control device 131a such as a CPU, a storage device such as a ROM or a RAM, an external storage device such as a HDD or a CD drive, a display device such as a display device, and an input device such as a keyboard or a mouse.

[0102] The control device 131a is electrically connected to a frequency measuring device 132 through an interface (I / F) 131b. Furthermore, the control device 131a is electrically connected to the HDD 10 to be inspected through an I / F 131c.

[0103] The following is an example of a part of the method for inspecting the HDD 10. Note that the method for inspecting the HDD 10 is not limited to the following method, and other methods may be used. First, the control device 131a obtains an initial value of the oscillation frequency of the vibrator 101 from the memory 74b of the HDD 10.

[0104] The memory 74b stores various information as well as the initial value of the oscillation frequency of the vibrator 101. The control device 131a further acquires, for example, the operating time of the HDD 10 and the temperature transition of the internal space S from the memory 74b.

[0105] Next, the first gas sensor 91 and the second gas sensor 92 are removed from the internal space S of the HDD 10. For example, the outer cover 23 is opened, the inner cover 22 is removed from the base 21, and the leads 108, 109, 118, and 119 are pulled out from the holes 125, 126, 127, and 128.

[0106] Next, the frequency measuring device 132 applies a voltage to the oscillator 101 of the first gas sensor 91. Specifically, the frequency measuring device 132 passes an AC current through the lead wires 108 and 109 of the oscillator 101. This causes the oscillator 101 to vibrate.

[0107] The frequency measuring device 132 measures the oscillation frequency (resonance frequency) of the vibrator 101. The frequency measuring device 132 is, for example, a network analyzer or a frequency counter. The control device 131a acquires the measured oscillation frequency of the vibrator 101 from the frequency measuring device 132.

[0108] Next, the control device 131a calculates the difference between the measured value and the initial value of the oscillation frequency of the vibrator 101. Next, the control device 131a determines whether or not outgas is present in the internal space S based on the difference.

[0109] The oscillation frequency (resonant frequency) of the oscillator 101 changes depending on the mass of the substance adsorbed by the adsorption film 102. Therefore, when the internal space S is contaminated by outgas, the adsorption film 102 adsorbs the outgas, and the oscillation frequency of the oscillator 101 changes from the initial value.

[0110] The control device 131a judges whether the difference between the measured value and the initial value is greater than a predetermined threshold value. Depending on the operating time, a small amount of outgas that does not cause a problem may accumulate in the adsorption film 102. Taking this accumulation into consideration, the threshold value is set to increase according to the operating time. The control device 131a sets the threshold value based on the operating time of the HDD 10 read from the memory 74b.

[0111] When the difference between the measured value and the initial value is greater than the threshold value, the control device 131a determines that outgassing is present in the internal space S and that the internal space S has been contaminated by the outgassing. In other words, the inspection device 130 determines that the defect in the HDD 10 is caused by contamination by the outgassing.

[0112] On the other hand, if the difference is smaller than the threshold value, the control device 131a determines that the internal space S is not contaminated by outgassing. In other words, the inspection device 130 determines that the defect in the HDD 10 is not caused by outgassing.

[0113] When the internal space S is contaminated by outgassing, for example, the outgassing adsorbed in the adsorption film 102 is measured by gas chromatography mass spectrometry (GC-MS) or time of flight secondary ion mass spectrometry (TOF-SIMS), thereby identifying the components of the outgassing.

[0114] When the internal space S is not contaminated by outgassing, the first gas sensor 91 is removed from the frequency measuring device 132, and the second gas sensor 92 is connected to the frequency measuring device 132. The frequency measuring device 132 applies a voltage to the oscillator 111 of the second gas sensor 92. This causes the oscillator 111 to vibrate. The frequency measuring device 132 measures the oscillation frequency of the oscillator 111. The control device 131a obtains the measured oscillation frequency of the oscillator 111 from the frequency measuring device 132.

[0115] Next, the control device 131a calculates the difference between the measured value of the oscillation frequency of the oscillator 111 and the initial value. Next, the control device 131a determines whether or not siloxane is present in the internal space S based on the difference. If the internal space S is contaminated with siloxane, the adsorption film 112 adsorbs the siloxane, and the oscillation frequency of the oscillator 111 changes from the initial value.

[0116] When the difference between the measured value and the initial value is greater than the threshold value, the control device 131a determines that siloxane is present in the internal space S and that the internal space S has been contaminated by the siloxane. On the other hand, when the difference is smaller than the threshold value, the control device 131a determines that the internal space S is not contaminated by siloxane.

[0117] As described above, the inspection device 130 of the present embodiment determines whether the internal space S is contaminated by outgassing or siloxane. This allows the inspection device 130 to determine whether the cause of the malfunction of the HDD 10 is contamination of the internal space S.

[0118] In the HDD 10 according to the first embodiment described above, an internal space S is provided in the housing 11. The magnetic disk 12 is disposed in the internal space S. The PCB 17 is attached to the housing 11 outside the internal space S. The vibrator 101 is disposed in the internal space S and is spaced apart from the electric circuit EC electrically connected to the PCB 17. The adsorption film 102 is provided on the vibrator 101, exposed to the internal space S, and configured to adsorb outgassing.

[0119] The resonant frequency of the oscillator 101 changes depending on the mass of the outgas adsorbed by the adsorption film 102. Therefore, the HDD 10 of this embodiment can inspect whether the internal space S has been contaminated by outgassing, based on the oscillation frequency of the oscillator 101. Since the oscillator 101 is separated from the electric circuit EC, the HDD 10 of this embodiment can prevent the wiring of the electric circuit EC (e.g., FPC 47) from becoming complicated. The oscillator 101 can be easily inspected by being removed from the internal space S and attached to an inspection device 130.

[0120] The internal space S is filled with helium, which is a gas different from air. The HDD 10 of this embodiment makes it possible to inspect whether the internal space S filled with a gas such as helium has been contaminated by outgassing.

[0121] The adsorption film 102 adsorbs outgas, which is a gas other than helium. The HDD 10 of this embodiment can inspect whether the internal space S filled with a gas such as helium has been contaminated by outgas, which is another gas.

[0122] The vibrator 101 has an outer surface 106c facing the magnetic disk 12. The adsorption film 102 is provided on the outer surface 106c. As a result, the adsorption film 102 provided on the outer surface 106c is exposed to an airflow generated by the rotation of the magnetic disk 12. When the airflow contains outgas, the outgas collides with the adsorption film 102. Therefore, the adsorption film 102 can efficiently adsorb the outgas in the internal space S.

[0123] The breathing filter 18 is disposed in the internal space S. The housing 11 is provided with an air vent 31 communicating with the internal space S. The breathing filter 18 captures outgas from the airflow passing through the air vent 31. For example, helium is filled into the internal space S through the air vent 31. At this time, outgas is captured from the helium. However, outgas may flow into the internal space S through a gap other than the air vent 31, or outgas may be generated in the internal space S. Since the adsorption film 102 adsorbs such outgas, the HDD 10 of this embodiment makes it possible to inspect whether the internal space S has been contaminated by outgas.

[0124] The vibrator 101 has a piezoelectric body 105, electrodes 106 and 107, and lead wires 108 and 109. The electrode 106 is provided on a surface 105a of the piezoelectric body 105. The electrode 107 is provided on a surface 105b of the piezoelectric body 105 located opposite the surface 105a. The lead wire 108 is connected to the electrode 106. The lead wire 109 is connected to the electrode 107. The housing 11 has a holder 121 that holds the lead wires 108 and 109. As a result, the HDD 10 of this embodiment can suppress damage to the piezoelectric body 105 compared to a case in which the piezoelectric body 105 is held.

[0125] The holder 121 removably holds the lead wires 108 and 109. This allows the transducer 101 to be easily removed from the internal space S and inspected by, for example, an external inspection device 130.

[0126] The oscillator 111 is disposed in the internal space S and is spaced apart from the electric circuit EC electrically connected to the PCB 17. The adsorption film 112 is provided on the oscillator 111 and exposed to the internal space S. The adsorption film 112 is configured to adsorb siloxane, which is different from outgassing. This makes it possible for the HDD 10 of this embodiment to inspect whether the internal space S has been contaminated by multiple substances.

[0127] The memory 74b stores an initial value of the oscillation frequency of the oscillator 101. Therefore, by comparing the initial value of the oscillation frequency of the oscillator 101 stored in advance in the memory 74b with the measured value of the oscillation frequency of the oscillator 101 at the time of inspection, it is possible to easily inspect whether the internal space S has been contaminated by outgassing. In addition, because the memory 74b of each HDD 10 stores the initial value of the oscillation frequency of the oscillator 101 in that HDD 10, it is possible to inspect whether the internal space S has been contaminated by outgassing regardless of individual differences between HDDs 10.

[0128] The inspection device 130 applies a voltage to the vibrator 101 of the HDD 10. Then, the inspection device 130 measures the oscillation frequency of the vibrator 101. The inspection device 130 obtains an initial value of the oscillation frequency from the memory 74b. The inspection device 130 calculates the difference between the measured value of the oscillation frequency of the vibrator 101 and the initial value. The inspection device 130 determines whether or not outgassing is present in the internal space S based on the difference. This allows the inspection device 130 to easily inspect whether or not the internal space S has been contaminated by outgassing.

[0129] Second embodiment The second embodiment will be described below with reference to Fig. 5. In the following description of the embodiment, components having the same functions as components already described are given the same reference numerals as the components already described, and further description may be omitted. In addition, multiple components given the same reference numerals do not necessarily have all the same functions and properties, and may have different functions and properties according to each embodiment.

[0130] 5 is an exemplary plan view showing an HDD 200 according to the second embodiment. The HDD 200 of the second embodiment is substantially the same as the HDD 10 of the first embodiment, except for the points described below.

[0131] In the HDD 200, the holder 121, the first gas sensor 91, and the second gas sensor 92 are positioned between the magnetic disk 12 and the FPC 47. On the other hand, the breathing filter 18 is spaced apart from the magnetic disk 12 by the standing portion 62 of the support plate 48.

[0132] In both the first and second embodiments, the first gas sensor 91 and the second gas sensor 92 are located farther away from the magnetic disk 12 than the ramp load mechanism 16. Therefore, the first gas sensor 91 and the second gas sensor 92 can be prevented from interfering with the rotating HSA 14.

[0133] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0134] 10,200...hard disk drive (HDD), 11...casing, 12...magnetic disk, 17...printed circuit board (PCB), 18...breathing filter, 31...ventilation port, 74b...memory, 101,111...vibrator, 102,112...adsorption film, 105,115...piezoelectric body, 106,107,116,117...electrode, 106c,116c...outer surface, 108,109,118,119...lead wire, 121...holding stand, 130...inspection device, S...internal space, EC...electrical circuit.

Claims

1. A housing having an internal space; a magnetic disk disposed in the internal space; a circuit board attached to the housing outside the interior space; a first transducer disposed in the interior space and spaced apart from an electric circuit electrically connected to the circuit board; a first adsorption film provided on the first oscillator, exposed to the internal space, and configured to adsorb a first substance; A disk device comprising:

2. The internal space is filled with a first gas other than air.

2. The disk device according to claim 1.

3. The first substance includes a second gas different from the first gas.

3. The disk device according to claim 2.

4. the first vibrator has an outer surface facing the magnetic disk; The first adsorption film is provided on the outer surface.

4. The disk device according to claim 3.

5. A filter disposed in the interior space; Further comprising: The housing is provided with a vent hole communicating with the internal space, the filter collects the first substance from the airflow passing through the vent; 3. The disk device according to claim 2.

6. the first vibrator has a piezoelectric body, a first electrode provided on a first surface of the piezoelectric body, a second electrode provided on a second surface of the piezoelectric body located opposite to the first surface, a first lead connected to the first electrode, and a second lead connected to the second electrode; the housing has a holding portion that holds the first lead and the second lead; 2. The disk device according to claim 1.

7. the holding portion removably holds the first lead and the second lead; 7. The disk device according to claim 6.

8. a second transducer disposed in the interior space and spaced apart from an electric circuit electrically connected to the circuit board; a second adsorption film provided on the second oscillator, exposed to the internal space, and configured to adsorb a second substance different from the first substance; 2. The disk drive of claim 1, further comprising:

9. A storage unit that stores an initial value of an oscillation frequency of the first vibrator; 2. The disk drive of claim 1, further comprising:

10. an inspection device applying a voltage to the first vibrator of the disk device of claim 9; the inspection device measures an oscillation frequency of the first vibrator; The inspection device acquires the initial value from the storage unit; The inspection device calculates a difference between a measured value of an oscillation frequency of the first vibrator and the initial value; determining whether the first substance is present in the internal space based on the difference by the inspection device; A method for inspecting a disk device comprising the steps of:

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