Ultrasonic flaw detector

Abstract

To efficiently detect a plurality of defects or the like existing at positions different from one another in a flaw detection area.SOLUTION: An ultrasonic flaw detector includes a first probe, a second probe, a third probe, and a probe holder for holding the plurality of probes. The probe holder includes: a holder body in which the first probe, the second probe, and the third probe are disposed and which has a holder-facing surface capable of facing the surface of the object; and a position adjustment mechanism which, with respect to any one of the three probes disposed in the holder body, is capable of adjusting relative positions of the remaining two probes in an intersecting direction thereof. A scanning direction, which is the direction along the holder-facing surface, is defined in the probe holder. The intersecting direction is the direction along the holder-facing surface and the direction intersecting the scanning direction.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present disclosure relates to an ultrasonic flaw detection device capable of ultrasonically detecting a target flaw region in an object. [Background technology]

[0002] An example of an ultrasonic flaw detection device is the device disclosed in the following Patent Document 1. This ultrasonic flaw detection device includes a probe capable of emitting and receiving ultrasonic waves, a probe holder (supporting part) that holds the probe, a leaf spring for attaching the probe holder to a pipe that is an object, and a mechanism for rotating the probe holder around the pipe. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2021-135107 A Summary of the Invention [Problem to be solved by the invention]

[0004] Assume that the region to be inspected in the object is a region including a weld formed in the object. In general, when forming a weld in a base material, a groove surface is formed in the base material. The weld is formed so as to be in contact with this groove surface. When detecting defects in a region including a weld by ultrasonic inspection, it is desirable to detect defects near the groove surface of the base material as well as defects near the back surface of the base material. These defects include, for example, spherical defects such as blowholes in the weld, planar defects cracked in various directions in the weld, weld dripping on the back surface of the base material, poor penetration of the welding material, and poor fusion near the groove surface.

[0005] Therefore, an object of the present disclosure is to provide an ultrasonic flaw detection device capable of efficiently detecting multiple defects, etc. that exist at different positions within a target area for flaw detection. [Means for solving the problem]

[0006] In order to achieve the above object, an ultrasonic flaw detection apparatus according to one aspect of the present disclosure includes: An ultrasonic inspection device capable of ultrasonically inspecting a region to be inspected in an object includes a first probe, a second probe, a third probe, and a probe holder for holding the first probe, the second probe, and the third probe. The probe holder includes a holder main body on which the first probe, the second probe, and the third probe are arranged and which has a holder facing surface that can face the surface of the object, and a position adjustment mechanism that can adjust the relative position of the remaining two probes in an intersecting direction with respect to any one of the three probes arranged in the holder main body. The probe holder has a scanning direction that is a direction along the holder facing surface. The intersecting direction is a direction along the holder facing surface that intersects with the scanning direction. The first probe is an ultrasonic vertical inspection probe. The second probe is an ultrasonic direct inspection probe. The third probe is an ultrasonic single reflection inspection probe.

[0007] When ultrasonic testing of a region to be inspected in an object is performed using the ultrasonic inspection device of this embodiment, a probe holder in which three probes are arranged is set on the object. At this time, the probe holder is arranged so that the holder facing surface faces the surface of the object, and the first probe, which is an ultrasonic vertical inspection probe, faces the region to be inspected. Furthermore, when the region to be inspected extends in a predetermined direction along the surface of the object, the scanning direction of the probe holder is made to coincide with the direction in which the region to be inspected extends. At this time, the positions of the specific part in the first probe and the region to be inspected coincide with each other in the cross direction. Specifically, in the cross section of the object, the position between the first boundary surface, which is the edge of the first intersecting side, which is one side in the cross direction of the region to be inspected, and the second boundary surface, which is the edge of the second intersecting side, which is the other side in the cross direction of the region to be inspected, coincides with the position of the specific part in the first probe in the cross direction.

[0008] Next, the position adjustment mechanism is operated to adjust the position of the second probe in the crossing direction relative to the first probe so that the specific part in the second probe is located on the second intersection side of the specific part in the first probe, the ultrasonic waves emitted from the second probe are directed toward the first boundary surface of the region to be detected, and the ultrasonic waves reflected at the first boundary surface are directed toward the second probe. Furthermore, the position adjustment mechanism is operated to adjust the position of the third probe in the crossing direction relative to the first probe so that the specific part in the third probe is located on the second intersection side of the specific part in the second probe, the ultrasonic waves emitted from the third probe are directed toward the second boundary surface of the region to be detected after being reflected by the back surface of the object, and the ultrasonic waves reflected at the second boundary surface are directed toward the third probe after being reflected by the back surface of the object.

[0009] In addition, if the thickness of the object, which is the distance between the front and back surfaces of the object, changes as a result of changing the object, if the inclination of the first boundary surface relative to the front or back surface of the object changes, if the inclination of the second boundary surface relative to the front or back surface of the object changes, or if the distance between the first boundary surface and the second boundary surface changes, the positions of the second probe and the third probe in the intersecting direction relative to the first probe are readjusted.

[0010] Then, ultrasonic waves are emitted from the first probe, the second probe, and the third probe.

[0011] The ultrasonic waves emitted from the first probe propagate through the inspection target area in a direction perpendicular to the surface of the object, and are then reflected by the back surface of the object. The first probe receives the ultrasonic waves reflected by the back surface of the object. If a weld is present within the inspection target area and there is a spherical defect such as a blowhole in the weld, a planar defect with a horizontal crack in the weld, weld dripping near the back surface of the object, poor penetration of the welding material, or the like, the first probe receives the ultrasonic waves reflected from these defects. As a result, the first probe can ultrasonically detect the position and shape of the above defects within and around the weld in the inspection target area with high sensitivity.

[0012] The ultrasonic waves emitted from the second probe propagate in a direction perpendicular to the first boundary surface of the inspection target area. If a weld is present in the inspection target area and there is a vertical crack surface shape defect near the first boundary surface in the weld, a fusion defect along the first boundary surface, or the like, the second probe receives ultrasonic waves reflected from these defects. As a result, the second probe can ultrasonically detect the position and shape of such defects near the first boundary surface in the inspection target area with high sensitivity.

[0013] The ultrasonic waves emitted from the third probe are reflected by the back surface of the object and then propagate in a direction perpendicular to the second boundary surface of the inspection target area. If a weld is present in the inspection target area and there is a vertical crack surface shape defect near the second boundary surface in the weld, a fusion defect along the second boundary surface, or the like, the third probe receives ultrasonic waves reflected from these defects. As a result, the third probe can ultrasonically detect the position and shape of such defects near the second boundary surface in the inspection target area with high sensitivity.

[0014] As described above, the ultrasonic inspection device of this embodiment can ultrasonically inspect the above-mentioned defects near the back surface in the area to be inspected, the above-mentioned defects near the first boundary surface in the area to be inspected, and the above-mentioned defects near the second boundary surface in the area to be inspected with high sensitivity. Therefore, the ultrasonic inspection device of this embodiment can efficiently detect multiple defects that exist at different positions in the area to be inspected without missing them.

[0015] In addition, when the area to be inspected extends in a predetermined direction along the surface of the object, the probe holder is moved in the scanning direction together with the multiple probes, and ultrasonic inspection is performed with each of the three probes in the same manner as described above at the position after the movement. Effect of the Invention

[0016] In one aspect of the present disclosure, multiple defects and the like that exist at different positions within a target area for flaw detection can be efficiently detected. [Brief description of the drawings]

[0017] [Figure 1] FIG. 1 is a perspective view of an object in one embodiment according to the present disclosure. [Diagram 2] 1 is a front view of an ultrasonic flaw detection device according to an embodiment of the present disclosure attached to an object. [Diagram 3] 1 is an exploded view of an ultrasonic inspection device according to an embodiment of the present disclosure. FIG. [Figure 4] FIG. 13 is an exploded view of a probe holder in one embodiment according to the present disclosure. [Diagram 5] 4A to 4C are diagrams showing cross sections taken along lines Va-Va, Vb-Vb, and Vc-Vc in FIG. [Figure 6] 1 is an explanatory diagram showing ultrasonic propagation paths and ultrasonic inspection regions for each of a plurality of probes in an embodiment according to the present disclosure. FIG. [Figure 7] 13 is a timing chart showing drive timings for each of a plurality of probes and drive timings for a moving mechanism in an embodiment according to the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] Hereinafter, an embodiment of an ultrasonic flaw detection device according to the present disclosure will be described in detail with reference to the drawings.

[0019] As shown in Fig. 1, the object to be inspected by the ultrasonic inspection device X in this embodiment is a cylindrical pipe 10. Here, the direction in which the central axis Ac of the cylindrical pipe 10 extends is defined as an axial direction Da, and the circumferential direction with respect to the central axis Ac is simply defined as a circumferential direction Dcir. The pipe 10 has two pipe bodies (base materials) 10a, 10b and a welded portion 13 that joins the two pipe bodies 10a, 10b to each other. The welded portion 13 extends in the circumferential direction Dcir of the pipe 10 and is formed 360° around the central axis Ac.

[0020] As shown in FIG. 5, the welded portion 13 has a bead 14 protruding from the surface of the pipe 10. Groove faces 15a and 15b are formed on the end faces of the two pipe bodies 10a and 10b joined by the welded portion 13. The first groove face 15a, which is the groove face of the first pipe body 10a of the two pipe bodies 10a and 10b, is inclined with respect to the surface 11 and the inner surface 12 of the first pipe body 10a. The second groove face 15b, which is the groove face of the second pipe body 10b of the two pipe bodies 10a and 10b, is also inclined with respect to the surface 11 and the inner surface 12 of the second pipe body 10b. The first pipe body 10a and the second pipe body 10b are arranged so that the first groove face 15a of the first pipe body 10a and the second groove face 15b of the second pipe body 10b face each other, and molten welding material is poured between the two groove faces 15a and 15b. The welded portion 13 is a portion that combines two groove surfaces 15a, 15b and a portion between the two groove surfaces 15a, 15b. That is, the welded portion 13 exists in a part of the axial direction Da of the pipe 10, and an edge of a first axial side Da1, which is one side of the welded portion 13 in the axial direction Da, forms a first groove surface 15a, and an edge of a second axial side Da2, which is the other side of the welded portion 13 in the axial direction Da, forms a second groove surface 15b. The inspection target region R in the pipe 10, which is the target object, includes the welded portion 13.

[0021] The configuration of the ultrasonic flaw detector X in this embodiment will be described with reference to Fig. 2 and Fig. 3. Fig. 2 is a front view of the ultrasonic flaw detector X attached to a pipe 10, which is an object, as viewed from an axial direction Da. Fig. 3 is a development view of the ultrasonic flaw detector X developed in a circumferential direction Dcir.

[0022] This ultrasonic flaw detection device X includes three probes 20, a probe holder 30 that holds the three probes 20, a mounting member 50 for attaching the probe holder 30 to the pipe 10, a probe driving device 60 that drives each of the three probes 20, a moving device 70 that moves the probe holder 30 relative to the target pipe 10, and a control device 80 that controls the probe driving device 60 and the moving device 70.

[0023] As shown in Figures 2 to 4, the probe holder 30 has a holder body 31 in which three probes 20 are arranged, and a position adjustment mechanism 40 that can adjust the relative positions of the remaining two probes 20 with respect to any one of the three probes 20 arranged in the holder body 31.

[0024] The holder body 31 has a first holder plate 32, a second holder plate 33, a connecting portion 35, a first frame 37a, a second frame 37b, and a third frame 37c.

[0025] The first holder plate 32 and the second holder plate 33 each have a holder facing surface 34 (see FIG. 2) that can face the surface 11 of the pipe 10. Therefore, the first holder plate 32 and the second holder plate 33 are curved in an arc shape to match the shape of the surface 11 of the pipe 10. In this probe holder 30, a scanning direction Ds along the holder facing surface 34 of the first holder plate 32 and the holder facing surface 34 of the second holder plate 33 is determined. In the following, a direction along the holder facing surface 34 of the first holder plate 32 and the holder facing surface 34 of the second holder plate 33 and intersecting with the scanning direction Ds is referred to as a cross direction Dcro. In addition, one side of both sides of the scanning direction Ds is referred to as a first scanning side Ds1, and the other side is referred to as a second scanning side Ds2. In addition, one side of both sides of the cross direction Dcro is referred to as a first cross side Dcro1, and the other side is referred to as a second cross side Dcro2. The second holder plate 33 is disposed on the second scanning side Ds2 relative to the first holder plate 32. The first holder plate 32 is provided with a first frame 37a. The second holder plate 33 is provided with a second frame 37b and a third frame 37c. The third frame 37c is provided in the second holder plate 33 on the second scanning side Ds2 relative to the second frame 37b. Therefore, the first frame 37a, the second frame 37b, and the third frame 37c are arranged in this order toward the second scanning side Ds2. In addition, the second frame 37b is shifted to the second intersecting side Dcro2 of the first frame 37a, and the third frame 37c is shifted to the second intersecting side Dcro2 of the second frame 37b. Therefore, the positional deviation amount of the third frame 37c in the intersecting direction Dcro relative to the first frame 37a is larger than the positional deviation amount of the second frame 37b in the intersecting direction Dcro relative to the first frame 37a. The first frame 37a and the second frame 37b partially overlap in the cross direction Dcro, and the second frame 37b and the third frame 37c partially overlap in the cross direction Dcro.

[0026] The connecting portion 35 connects the first holder plate 32 and the second holder plate 33 together such that the second holder plate 33 can swing relative to the first holder plate 32 about a swing axis 36 extending in the cross direction Dcro.

[0027] A first probe 20a of the three probes 20 is disposed within a first frame 37a. A second probe 20b of the three probes 20 is disposed within a second frame 37b. A third probe 20c of the three probes 20 is disposed within a third frame 37c.

[0028] The position adjustment mechanism 40 has a first position adjustment mechanism 41a and a second position adjustment mechanism 41b. The first position adjustment mechanism 41a can adjust any one of the positions of the first probe 20a in the first frame 37a in the cross direction Dcro, the position of the second probe 20b in the second frame 37b in the cross direction Dcro, and the position of the third probe 20c in the third frame 37c in the cross direction Dcro. The second position adjustment mechanism 41b can adjust the other of the positions of the first probe 20a in the first frame 37a in the cross direction Dcro, the position of the second probe 20b in the second frame 37b in the cross direction Dcro, and the position of the third probe 20c in the third frame 37c in the cross direction Dcro. The first position adjustment mechanism 41a in this embodiment can adjust the position of the second probe 20b in the second frame 37b in the cross direction Dcro. Further, the second position adjustment mechanism 41b in this embodiment is capable of adjusting the position of the third probe 20c in the third frame 37c in the cross direction Dcro.

[0029] Each of the first position adjustment mechanism 41a and the second position adjustment mechanism 41b has two position adjustment screws 42 and two probe contact plates 43. One of the two position adjustment screws 42 and one of the two probe contact plates 43 form a pair and are arranged on the first crossing side Dcro1 with respect to the probe 20. This one probe contact plate 43 can contact the surface of the probe 20 arranged in the frame facing the first crossing side Dcro1. In addition, one position adjustment screw 42 is attached to a part of the first crossing side Dcro1 in the frame so that the amount of protrusion into the frame can be adjusted. By adjusting the amount of protrusion into the frame by operating one position adjustment screw 42, the tip of one position adjustment screw 42 comes into contact with one probe contact plate 43, and the probe 20 in the frame can be pushed toward the second crossing side Dcro2 together with this probe contact plate 43. The other of the two position adjustment screws 42 and the other of the two probe contact plates 43 form a pair and are arranged on the second crossing side Dcro2 with respect to the probe 20. This other probe contact plate 43 can contact the surface of the probe 20 arranged in the frame facing the second crossing side Dcro2. The other position adjustment screw 42 is attached to the part of the frame on the second crossing side Dcro2 so that the amount of protrusion into the frame can be adjusted. By adjusting the amount of protrusion into the frame by operating the other position adjustment screw 42, the tip of the other position adjustment screw 42 comes into contact with the other probe contact plate 43, and the probe 20 in the frame can be pushed to the first crossing side Dcro1 together with this probe contact plate 43. Therefore, by appropriately operating one position adjustment screw 42 and the other position adjustment screw 42, the position of the probe 20 in the frame in the crossing direction Dcro can be adjusted.

[0030] The mounting member 50 for mounting the probe holder 30 to the pipe 10 has a first mounting portion 51a attached to an end of the first scanning side Ds1 of the probe holder 30 and a second mounting portion 51b attached to an end of the second scanning side Ds2 of the probe holder 30, as shown in Figs. 2 and 3. The first mounting portion 51a and the second mounting portion 51b each have a contact end 52 capable of contacting the surface 11 of the pipe 10 and a leaf spring 55 capable of generating an elastic force on the side pressing the contact end 52 against the surface 11 of the pipe 10. The leaf spring 55 of the first mounting portion 51a is attached to the end of the first scanning side Ds1 of the probe holder 30 and extends to the first scanning side Ds1. The contact end 52 of the first mounting portion 51a is provided at the end of the first scanning side Ds1 of the leaf spring 55 of the first mounting portion 51a. The leaf spring 55 of the second mounting portion 51b is attached to an end of the second scanning side Ds2 of the probe holder 30 and extends to the second scanning side Ds2. The contact end 52 of the second mounting portion 51b is provided at the end position of the second scanning side Ds2 of the leaf spring 55 of the second mounting portion 51b. The contact end 52 of the first mounting portion 51a and the contact end 52 of the second mounting portion 51b each have a contact ball 53 that can contact the surface 11 of the pipe 10 and a seat 54 that supports the contact ball 53 rotatably around the center of the contact ball 53. The seat 54 is fixed to the end position of the leaf spring 55.

[0031] When the probe holder 30 is attached to the pipe 10 by the attachment member 50, the scanning direction Ds with respect to the probe holder 30 becomes the circumferential direction Dcir of the pipe 10. At this time, the cross direction Dcro with respect to the probe holder 30 becomes the axial direction Da of the pipe 10. Therefore, the scanning direction Ds with respect to the probe holder 30 becomes the direction in which the welded portion 13 extends in the pipe 10. Also, the cross direction Dcro which is the position adjustment direction of the second probe 20b in the first position adjustment mechanism 41a, and the cross direction Dcro which is the position adjustment direction of the third probe 20c in the second position adjustment mechanism 41b become the axial direction Da of the pipe 10.

[0032] With the probe holder 30 attached to the pipe 10, the moving device 70 moves the probe holder 30 in the scanning direction Ds, i.e., in the circumferential direction Dcir of the pipe 10 along which the weld 13 extends. In other words, the moving device 70 rotates the probe holder 30 around the pipe 10.

[0033] The first probe 20a is an ultrasonic vertical flaw detection probe, the second probe 20b is an ultrasonic direct flaw detection probe, and the third probe 20c is an ultrasonic single reflection flaw detection probe.

[0034] As shown in FIG. 5, each probe 20 has an element array 21 capable of transmitting and receiving ultrasonic waves, an array holding frame 23 for holding the element array 21, and a matching layer 25. The element array 21 is configured by arranging a plurality of elements such as piezoelectric elements side by side. The element array 21 has an emission surface 22 capable of transmitting and receiving ultrasonic waves. The array holding frame 23 has a probe facing surface 24 capable of facing the surface 11 of the pipe 10, which is the object. The probe facing surface 24 is substantially parallel to the holder facing surface 34 of the probe holder 30. The array holding frame 23 also has a damper member for suppressing the propagation of ultrasonic waves to the rear of the element array 21. The matching layer 25 is disposed between the element array 21 and the surface 11 of the pipe 10, which is the object, and is attached to the array holding frame 23 so as to be substantially flush with the probe facing surface 24 of the array holding frame 23. The matching layer 25 serves to reduce the difference in acoustic impedance between the element array 21 and the target, thereby allowing ultrasonic waves from the element array 21 to propagate efficiently to the target.

[0035] An emission surface 22 of the element array 21 in the first probe 20a, which is an ultrasonic vertical flaw detection probe, is substantially parallel to a probe facing surface 24 of the first probe 20a and a holder facing surface 34 of the probe holder 30. The first frame 37a has a gel arrangement space 38 in which a gel G can be arranged between the first probe 20a, which is an ultrasonic vertical flaw detection probe, and the surface 11 of the pipe 10, which is the target.

[0036] The transmission surface 22 of the element array 21 in the second probe 20b, which is an ultrasonic direct inspection probe, is inclined with respect to the probe facing surface 24 of the second probe 20b. Specifically, the transmission surface 22 has a first end 22a which is an end of the first intersection side Dcro1 which is the side closer to the element array 21 of the first probe 20a in the cross direction Dcro, and a second end 22b which is an end of the second intersection side Dcro2 which is the side farther from the element array 21 of the first probe 20a in the cross direction Dcro. The transmission surface 22 is inclined with respect to the probe facing surface 24 so that the distance from the probe facing surface 24 to the first end 22a is greater than the distance from the probe facing surface 24 to the second end 22b.

[0037] The transmission surface 22 of the element array 21 in the third probe 20c, which is an ultrasonic single reflection inspection probe, is also inclined with respect to the probe facing surface 24 of the third probe 20c. Specifically, the transmission surface 22 has a first end 22a which is an end of the first intersection side Dcro1 which is the side closer to the element array 21 of the first probe 20a in the cross direction Dcro, and a second end 22b which is an end of the second intersection side Dcro2 which is the side farther from the element array 21 of the first probe 20a in the cross direction Dcro. The transmission surface 22 is inclined with respect to the probe facing surface 24 so that the distance from the probe facing surface 24 to the first end 22a is greater than the distance from the probe facing surface 24 to the second end 22b.

[0038] Next, a procedure for ultrasonic inspection of a target region R in an object using the ultrasonic inspection device X described above will be described.

[0039] When ultrasonically inspecting an object using the ultrasonic inspection device X in this embodiment, a gel G is placed in the gel placement space 38 of the first frame 37a. Next, the probe holder 30 in which the three probes 20 are arranged is attached to the pipe 10, which is the object, by the mounting member 50. At this time, as shown in FIG. 3 and FIG. 5, the probe holder 30 is arranged so that the holder facing surface 34 faces the surface 11 of the pipe 10, and the first probe 20a, which is an ultrasonic vertical inspection probe, and the gel G in the first frame 37a face the inspection target area R including the welded part 13. Furthermore, the scanning direction Ds of the probe holder 30 is made to coincide with the circumferential direction Dcir in which the inspection target area R extends, and the cross direction Dcro of the probe holder 30 is made to coincide with the axial direction Da of the pipe 10. Furthermore, the cross first side Dcro1 in the cross direction Dcro becomes the axial first side Da1 in the axial direction Da, and the cross second side Dcro2 in the cross direction Dcro becomes the axial second side Da2 in the axial direction Da.

[0040] At this time, the position between the first groove surface (first boundary surface) 15a and the second groove surface (second boundary surface) 15b of the welded portion 13 coincides with the position of the first probe 20a in the cross direction Dcro in the element array 21. In addition, the cross direction Dcro which is the position adjustment direction of the second probe 20b in the first position adjustment mechanism 41a and the cross direction Dcro which is the position adjustment direction of the third probe 20c in the second position adjustment mechanism 41b become the axial direction Da of the pipe 10.

[0041] Furthermore, at this time, the contact end 52 of the first mounting portion 51a is pushed toward the central axis of the pipe 10 by the elastic force generated by the leaf spring 55 of the first mounting portion 51a, and the contact ball 53 of this contact end 52 comes into contact with the surface 11 of the pipe 10. Also, the contact end 52 of the second mounting portion 51b is pushed toward the central axis of the pipe 10 by the elastic force generated by the leaf spring 55 of the first mounting portion 51a, and the contact ball 53 of this contact end 52 comes into contact with the surface 11 of the pipe 10. Therefore, the probe holder 30 is firmly attached to the pipe 10.

[0042] Next, by operating the first position adjustment mechanism 41a, the position of the second probe 20b in the cross direction Dcro relative to the first probe 20a is adjusted so that, as shown in Figure 6, the element array 21 of the second probe 20b is positioned on the second intersection side Dcro2 further than the element array 21 of the first probe 20a, the ultrasonic waves emitted from the second probe 20b are directed toward the first groove surface (first boundary surface) 15a of the welded portion 13, and the ultrasonic waves reflected by the first groove surface 15a are directed toward the second probe 20b. Furthermore, by operating the second position adjustment mechanism 41b, the position of the third probe 20c in the cross direction Dcro relative to the first probe 20a is adjusted so that the element array 21 of the third probe 20c is positioned on the second intersection side Dcro2 further than the element array 21 of the second probe 20b, and the ultrasonic waves emitted from the third probe 20c are reflected by the inner surface (rear surface of the target object) 12 of the pipe 10 and then head toward the second groove surface (second boundary surface) 15b of the welded portion 13, and the ultrasonic waves reflected by the second groove surface 15b of the welded portion 13 are reflected by the inner surface 12 of the pipe 10 and then head toward the third probe 20c.

[0043] In addition, if the thickness of the pipe 10, which is the distance between the surface 11 and the inner surface 12 of the pipe 10, changes as a result of changing the pipe 10 as the object, if the inclination of the first groove surface (first boundary surface) 15a relative to the surface 11 or the inner surface 12 of the pipe 10 changes, if the inclination of the second groove surface (second boundary surface) 15b relative to the surface 11 or the inner surface 12 of the pipe 10 changes, or further if the distance between the first groove surface (first boundary surface) 15a and the second groove surface (second boundary surface) 15b changes, the positions of the second probe 20b and the third probe 20c in the intersecting direction Dcro relative to the first probe 20a are readjusted.

[0044] Thereafter, the probe driver 60 sequentially drives the first probe 20a, the second probe 20b, and the third probe 20c to emit ultrasonic waves from these probes 20. At this time, as shown in Fig. 7, the probe driver 60 drives the first probe 20a, the second probe 20b, and the third probe 20c so that time t1 for driving the first probe 20a, time t2 for driving the second probe 20b, and time t3 for driving the third probe 20c do not overlap with each other.

[0045] The ultrasonic waves emitted from the first probe 20a propagate in a direction perpendicular to the surface 11 of the pipe 10, and are then reflected by the inner surface (back surface) 12 of the pipe 10. The first probe 20a receives the ultrasonic waves reflected by the inner surface 12 of the pipe 10. If there are spherical defects such as blowholes in the welded portion 13, planar defects with horizontal cracks in the welded portion 13, weld dripping near the inner surface 12 of the pipe 10, poor penetration of the welding material, etc., the first probe 20a receives the ultrasonic waves reflected from these defects. As a result, the first probe 20a can ultrasonically detect the positions and shapes of the above defects in and around the welded portion 13 with high sensitivity.

[0046] As described above, the welded portion 13 in this embodiment has the excess metal 14 protruding from the surface 11 of the pipe 10. However, in this embodiment, even if the first probe 20a is opposed to the welded portion 13, the gel G is disposed between the first probe 20a and the welded portion 13, so that the welded portion 13 having the excess metal 14 can be ultrasonically inspected by the first probe 20a.

[0047] The ultrasonic waves emitted from the second probe 20b propagate perpendicularly to the first groove surface (first boundary surface) 15a. If there is a surface shape defect such as a vertical crack near the first groove surface 15a in the welded portion 13, or a fusion defect along the first groove surface 15a, the second probe 20b receives ultrasonic waves reflected from these defects. As a result, the second probe 20b can ultrasonically detect the position and shape of such defects near the first groove surface (first boundary surface) 15a in the welded portion 13 with high sensitivity.

[0048] The ultrasonic waves emitted from the third probe 20c are reflected by the inner surface (back surface of the target object) 12 of the pipe 10 and then propagate in a direction perpendicular to the second groove surface (second boundary surface) 15b. If there is a surface shape defect such as a vertical crack near the second groove surface 15b in the welded portion 13, or a fusion defect along the second groove surface 15b, the third probe 20c receives the ultrasonic waves reflected from these defects. As a result, the third probe 20c can ultrasonically detect the position and shape of such defects near the second groove surface (second boundary surface) 15b in the welded portion 13 with high sensitivity.

[0049] The results of ultrasonic inspection by each probe 20 are sent from each probe 20 to a control device 80, where they are subjected to predetermined processing and then displayed.

[0050] As described above, the ultrasonic flaw detection device X in this embodiment can ultrasonically detect the above-mentioned defects in the vicinity of the inner surface (rear surface of the target object) 12 of the pipe 10 in the welded portion 13, the above-mentioned defects in the vicinity of the first groove surface (first boundary surface) 15a in the welded portion 13, and the above-mentioned defects in the vicinity of the second groove surface (second boundary surface) 15b in the welded portion 13. Therefore, the ultrasonic flaw detection device X in this embodiment can efficiently detect multiple defects and the like that exist at different positions in the inspection target region R without missing them.

[0051] Suppose that the time t1 for driving the first probe 20a, the time t2 for driving the second probe 20b, and the time t3 for driving the third probe 20c overlap with each other. In this case, ultrasonic waves transmitted from one of the three probes 20 may be received by the other probes 20. In this case, data obtained by driving the other probes 20 becomes unreliable data. In this embodiment, the first probe 20a, the second probe 20b, and the third probe 20c are driven so that the time t1 for driving the first probe 20a, the time t2 for driving the second probe 20b, and the time t3 for driving the third probe 20c do not overlap with each other. Therefore, in this embodiment, the reliability of data obtained by each probe 20 can be improved.

[0052] Next, the moving device 70 is driven to slightly move the probe holder 30 and the mounting member 50 provided on the probe holder 30 in the circumferential direction Dcir of the pipe 10 , in other words, in the scanning direction Ds of the probe holder 30 .

[0053] In this embodiment, when the probe holder 30 is attached to the pipe 10 by the attachment member 50, the contact ball 53 which is a part of the first attachment portion 51a and the contact ball 53 which is a part of the second attachment portion 51b are in contact with the surface 11 of the pipe 10 as described above. In this state, when the moving device 70 is driven to move the attachment member 50 together with the probe holder 30, the contact ball 53 of the first attachment portion 51a and the contact ball 53 of the second attachment portion 51b rotate. Therefore, in this embodiment, the contact resistance between the attachment member 50 and the pipe 10 is reduced, the probe holder 30 can be moved smoothly, and the load on the moving device 70 can be reduced.

[0054] Then, after the probe holder 30 has stopped, as described above, the first probe 20a, the second probe 20b, and the third probe 20c are driven sequentially by the probe driving device 60, ultrasonic waves are emitted from these probes 20, and ultrasonic flaw detection is performed by each probe 20.

[0055] Thereafter, the movement of the probe holder 30 in the circumferential direction Dcir (scanning direction Ds) and the ultrasonic inspection at the position after the movement are repeated using the three probes 20. That is, as shown in Fig. 7, a stop time period Ts of the probe holder 30 and a movement time period Tm of the probe 20 are repeated, and during the stop time period Ts, the three probes 20 are driven sequentially to perform ultrasonic inspection using the three probes 20.

[0056] When ultrasonic testing has been completed for all areas within the test target area R extending in the circumferential direction Dcir, the first holder plate 32 is swung relative to the second holder plate 33 around the swing axis 36 of the connecting part 35, as shown in Figure 2, to remove the probe holder 30 from the pipe 10.

[0057] As described above, in this embodiment, in the process of scanning the target pipe 10 with the ultrasonic flaw detection device X, multiple defects, etc. that exist at different positions within the flaw detection target area R at each scanning position can be efficiently detected.

[0058] "Variations" The position adjustment mechanism 40 in this embodiment is a mechanism having a position adjustment screw 42 and a probe contact plate 43. However, the position adjustment mechanism 40 may have another configuration as long as it can adjust the position of the probe 20 in the frame in the cross direction Dcro.

[0059] In this embodiment, the probes 20 are driven in the order of the first probe 20a, the second probe 20b, and the third probe 20c. However, the probes 20 may be driven in a different order.

[0060] The target object may be a cylindrical member other than the pipe 10, or a flat plate-like member.

[0061] Furthermore, the present disclosure is not limited to the embodiment and the modified examples described above. Various additions, modifications, substitutions, partial deletions, etc. are possible within the scope of the conceptual idea and intent of the present invention derived from the contents defined in the claims and their equivalents.

[0062] "Additional Notes" The ultrasonic flaw detection device X in the above embodiment and modified examples can be understood, for example, as follows.

[0063] (1) In a first aspect, an ultrasonic flaw detection device is The ultrasonic inspection device X capable of ultrasonically inspecting a region R to be inspected in an object 10 includes a first probe 20a, a second probe 20b, a third probe 20c, and a probe holder 30 for holding the first probe 20a, the second probe 20b, and the third probe 20c. The probe holder 30 includes a holder body 31 on which the first probe 20a, the second probe 20b, and the third probe 20c are arranged and which has a holder facing surface 34 that can face the surface 11 of the object 10, and a position adjustment mechanism 40 capable of adjusting the relative position of the remaining two probes 20 in the cross direction Dcro with respect to any one of the three probes 20 arranged in the holder body 31. A scanning direction Ds that is a direction along the holder facing surface 34 is determined for the probe holder 30. The cross direction Dcro is a direction along the holder facing surface 34 and intersects with the scanning direction Ds. The first probe 20a is an ultrasonic vertical flaw detection probe, the second probe 20b is an ultrasonic direct flaw detection probe, and the third probe 20c is an ultrasonic single reflection flaw detection probe.

[0064] When ultrasonic testing of the inspection target area R in the object 10 is performed using the ultrasonic inspection device X of this embodiment, the probe holder 30 in which the three probes 20 are arranged is set on the object 10. At this time, the probe holder 30 is arranged so that the holder facing surface 34 faces the surface 11 of the object 10 and the first probe 20a, which is an ultrasonic vertical inspection probe, faces the inspection target area R. Furthermore, when the inspection target area R extends in a predetermined direction along the surface 11 of the object 10, the scanning direction Ds of the probe holder 30 is made to coincide with the direction in which the inspection target area R extends. At this time, the position of the specific part in the first probe 20a and the inspection target area R coincide with each other in the cross direction Dcro. Specifically, in the cross section of the object 10, the position between the first boundary surface 15a, which is the edge of the first intersecting side Dcro1, which is one side in the cross direction Dcro of the area to be detected R, and the second boundary surface 15b, which is the edge of the second intersecting side Dcro2, which is the other side in the cross direction Dcro of the area to be detected R, coincides with the position in the cross direction Dcro of a specific portion in the first probe 20a.

[0065] Next, the position adjustment mechanism 40 is operated to adjust the position of the second probe 20b in the cross direction Dcro relative to the first probe 20a so that the specific part in the second probe 20b is located on the second cross side Dcro2 from the specific part in the first probe 20a, the ultrasonic waves emitted from the second probe 20b head toward the first boundary surface 15a of the region R to be inspected, and the ultrasonic waves reflected at the first boundary surface 15a head toward the second probe 20b. Furthermore, the position adjustment mechanism 40 is operated to adjust the position of the third probe 20c in the cross direction Dcro relative to the first probe 20a so that the specific part in the third probe 20c is located on the second cross side Dcro2 from the specific part in the second probe 20b, the ultrasonic waves emitted from the third probe 20c head toward the second boundary surface 15b of the region R to be inspected after being reflected at the back surface 12 of the object 10, and the ultrasonic waves reflected at the second boundary surface 15b head toward the third probe 20c after being reflected at the back surface 12 of the object 10.

[0066] In addition, if the thickness of the object 10, which is the distance between the front surface 11 and the back surface 12 of the object 10, changes as a result of changing the object 10, if the inclination of the first boundary surface 15a with respect to the front surface 11 or the back surface 12 of the object 10 changes, if the inclination of the second boundary surface 15b with respect to the front surface 11 or the back surface 12 of the object 10 changes, or if the distance between the first boundary surface 15a and the second boundary surface 15b changes, the positions of the second probe 20b and the third probe 20c in the cross direction Dcro relative to the first probe 20a are readjusted.

[0067] Thereafter, ultrasonic waves are emitted from the first probe 20a, the second probe 20b, and the third probe 20c.

[0068] The ultrasonic waves emitted from the first probe 20a propagate through the inspection target area R in a direction perpendicular to the front surface 11 of the object 10, and are then reflected by the back surface 12 of the object 10. The first probe 20a receives the ultrasonic waves reflected by the back surface 12 of the object 10. If a weld 13 is present within the inspection target area R and there is a spherical defect such as a blowhole in the weld 13, a planar defect cracked in the lateral direction in the weld 13, a weld drip near the back surface 12 of the object 10, a poor penetration of the welding material, or the like, the first probe 20a receives the ultrasonic waves reflected from these defects. As a result, the first probe 20a can ultrasonically detect the positions and shapes of the above defects in and around the weld 13 with high sensitivity.

[0069] The ultrasonic waves emitted from the second probe 20b propagate in a direction perpendicular to the first boundary surface 15a. If a weld 13 is present within the inspection target area R, and there is a vertical cracked surface shape defect near the first boundary surface 15a in the weld 13, a fusion defect along the first boundary surface 15a, or the like, the second probe 20b receives ultrasonic waves reflected from these defects. As a result, the second probe 20b can ultrasonically inspect the position and shape of such defects near the first boundary surface 15a in the weld 13 with high sensitivity.

[0070] The ultrasonic waves emitted from the third probe 20c are reflected by the rear surface 12 of the object 10 and then propagate in a direction perpendicular to the second boundary surface 15b. If a weld 13 is present in the inspection target area R and there is a vertical crack surface shape defect near the second boundary surface 15b in the weld 13, a fusion defect along the second boundary surface 15b, or the like, the third probe 20c receives the ultrasonic waves reflected from these defects. As a result, the third probe 20c can ultrasonically inspect the position and shape of such defects near the second boundary surface 15b in the weld 13 with high sensitivity.

[0071] As described above, the ultrasonic flaw detection device X in this embodiment can ultrasonically detect the above-mentioned defects in the vicinity of the back surface 12 in the region to be detected R, the above-mentioned defects in the vicinity of the first boundary surface 15a in the region to be detected R, and the above-mentioned defects in the vicinity of the second boundary surface 15b in the region to be detected R. Therefore, the ultrasonic flaw detection device X in this embodiment can efficiently detect multiple defects and the like that exist at different positions in the region to be detected R without missing them.

[0072] In addition, when the inspection target area R extends in a predetermined direction along the surface 11 of the object 10, the probe holder 30 is moved in the scanning direction Ds together with the multiple probes 20, and ultrasonic inspection is performed with each of the three probes 20 in the same manner as described above at the position after the movement.

[0073] (2) In the second aspect, the ultrasonic inspection device is In the ultrasonic inspection device X in the first embodiment, the holder body 31 has a first frame 37a in which the first probe 20a is arranged, a second frame 37b in which the second probe 20b is arranged, and a third frame 37c in which the third probe 20c is arranged, and connects the first frame 37a, the second frame 37b, and the third frame 37c to each other. The position adjustment mechanism 40 has a first position adjustment mechanism 41a capable of adjusting any one of the positions of the first probe 20a in the first frame 37a in the cross direction Dcro, the position of the second probe 20b in the second frame 37b in the cross direction Dcro, and the position of the third probe 20c in the third frame 37c in the cross direction Dcro, and a second position adjustment mechanism 41b capable of adjusting the other one of the positions.

[0074] (3) In the third aspect, the ultrasonic inspection device is In the ultrasonic flaw detection device X in the second embodiment, the second frame 37b is shifted in the cross direction Dcro with respect to the first frame 37a. The third frame 37c is shifted in the cross direction Dcro with respect to the first frame 37a. The amount of positional deviation of the third frame 37c from the first frame 37a in the cross direction Dcro is larger than the amount of positional deviation of the second frame 37b from the first frame 37a in the cross direction Dcro.

[0075] In this embodiment, it is possible to set within an appropriate range the relative positions between the multiple probes 20. Therefore, in this embodiment, it is possible to reduce the effort required for the position adjustment mechanism 40 to adjust the relative positions between the multiple probes 20.

[0076] (4) In a fourth aspect, the ultrasonic inspection device comprises: In the ultrasonic flaw detection device X in the second or third embodiment, the first frame 37a has a gel arrangement space 38 between the first probe 20a and the surface 11 of the object 10, in which gel G can be arranged.

[0077] The inspection target region R may include a welded portion 13. This welded portion 13 may have a reinforcement 14 protruding from the surface 11 of the object 10. In this embodiment, in such a case, gel G is placed in the gel placement space 38 of the first frame 37a before the probe holder 30 is set on the object 10. Therefore, in this embodiment, the first probe 20a is placed opposite the welded portion 13, and the inspection target region R including the welded portion 13 can be ultrasonically inspected by the first probe 20a.

[0078] (5) In a fifth aspect, an ultrasonic flaw detector includes: In the ultrasonic flaw detection device X in any one of the first to fourth aspects, the first probe 20a, the second probe 20b, and the third probe 20c each have an element array 21 capable of transmitting and receiving ultrasonic waves, and an array holding frame 23 that holds the element array 21. The array holding frame 23 has a probe facing surface 24 that can face the surface 11 of the object 10. The element array 21 has an emission surface 22 that can transmit ultrasonic waves and receive ultrasonic waves. The emission surface 22 in the element array 21 of the second probe 20b and the emission surface 22 in the element array 21 of the third probe 20c each have a first end 22a that is an end of a first crossing side Dcro1 that is closer to the element array 21 of the first probe 20a in the crossing direction Dcro, and a second end 22b that is an end of a second crossing side Dcro2 that is farther from the element array 21 of the first probe 20a in the crossing direction Dcro. The transmission surface 22 in the second probe 20b is inclined with respect to the probe-facing surface 24 in the second probe 20b such that the distance from the probe-facing surface 24 in the second probe 20b to the second end 22b of the transmission surface 22 in the second probe 20b is greater than the distance from the probe-facing surface 24 in the second probe 20b to the first end 22a of the transmission surface 22 in the second probe 20b. The transmission surface 22 in the third probe 20c is inclined with respect to the probe-facing surface 24 in the third probe 20c such that the distance from the probe-facing surface 24 in the third probe 20c to the second end 22b of the transmission surface 22 in the third probe 20c is greater than the distance from the probe-facing surface 24 in the third probe 20c to the first end 22a of the transmission surface 22 in the third probe 20c.

[0079] (6) In a sixth aspect, the ultrasonic inspection device comprises: The ultrasonic flaw detection device X in any one of the first to fifth embodiments includes a probe driving device 60 that drives each of the first probe 20a, the second probe 20b, and the third probe 20c. The probe driving device 60 drives the first probe 20a, the second probe 20b, and the third probe 20c such that a time t1 for driving the first probe 20a, a time t2 for driving the second probe 20b, and a time t3 for driving the third probe 20c do not overlap with each other.

[0080] When the time t1 for driving the first probe 20a, the time t2 for driving the second probe 20b, and the time t3 for driving the third probe 20c overlap with each other, ultrasonic waves transmitted from one of the three probes 20 may be received by the other probes 20. In this case, data obtained by driving the other probes 20 becomes unreliable. In this embodiment, the first probe 20a, the second probe 20b, and the third probe 20c are driven so that the time t1 for driving the first probe 20a, the time t2 for driving the second probe 20b, and the time t3 for driving the third probe 20c do not overlap with each other. Therefore, in this embodiment, the reliability of data obtained by each probe 20 can be improved.

[0081] (7) In a seventh aspect, the ultrasonic flaw detector comprises: The ultrasonic flaw detection apparatus X in any one of the first to sixth aspects includes a moving device 70 capable of moving the probe holder 30 in the scanning direction Ds relative to the object 10.

[0082] In this embodiment, the effort required to move the probe holder 30 in the scanning direction Ds can be reduced.

[0083] (8) In an eighth aspect, an ultrasonic flaw detection device includes: In the ultrasonic inspection device X according to any one of the first to seventh aspects, the object 10 is cylindrical. An attachment member 50 for attaching the probe holder 30 to the object 10 is provided. When the probe holder 30 is attached to the object 10, the scanning direction Ds of the probe holder 30 becomes a circumferential direction Dcir of the cylindrical object 10. The attachment member 50 has a first attachment portion 51a attached to an end of the first side of the probe holder 30 and extending to the first side, and a second attachment portion 51b attached to an end of the second side of the probe holder 30 and extending to the second side, among a first side and a second side in the circumferential direction Dcir.

[0084] In this embodiment, even if the object 10 is cylindrical, the probe holder 30 can be set on the object 10.

[0085] (9) In a ninth aspect, the ultrasonic flaw detector comprises: In the ultrasonic flaw detection device X in the eighth embodiment, the first mounting portion 51a and the second mounting portion 51b each have a contact end 52 that can contact the surface 11 of the object 10, and a leaf spring 55 that can generate an elastic force on the side of the contact end 52 that approaches the central axis of the cylindrical object 10.

[0086] (10) In a tenth aspect, an ultrasonic flaw detector includes: In the ultrasonic flaw detection device X in the ninth aspect, the contact end 52 has a contact ball 53 that can contact the surface 11 of the object 10, and a seat 54 that supports the contact ball 53 rotatably around the center of the contact ball 53.

[0087] In this embodiment, when the probe holder 30 is attached to the object 10 by the attachment member 50, the contact ball 53 which is a part of the first attachment portion 51a and the contact ball 53 which is a part of the second attachment portion 51b are in contact with the surface 11 of the object 10. In this state, when the moving device 70 is driven to move the attachment member 50 together with the probe holder 30, the contact ball 53 of the first attachment portion 51a and the contact ball 53 of the second attachment portion 51b rotate. Therefore, in this embodiment, the contact resistance between the attachment member 50 and the object 10 is reduced, the probe holder 30 can be moved smoothly, and the load on the moving device 70 can be reduced. [Explanation of symbols]

[0088] 10: Pipe (object) 10a: First pipe body 10b: Second pipe body 11: Surface 12: Inner surface (back surface of object) 13: Welded section 14:Yamori 15a: First groove surface (first boundary surface) 15b: Second groove surface (second boundary surface) 20: Probe 20a: First probe 20b: Second probe 20c: Third probe 21: Element array 22: Outgoing page 22a: First end 22b: Second end 23: Array holding frame 24: Probe facing surface 25: Matching layer 30: Probe holder 31: Holder body 32: First holder plate 33: Second holder plate 34: Holder facing surface 35:Connection part 36: Swing axis 37a: First slot 38: Gel arrangement space 37b: Second slot 37c: Third slot 40:Position adjustment mechanism 41a: First position adjustment mechanism 41b:Second position adjustment mechanism 42: Position adjustment screw 43: Probe contact plate 50: Mounting material 51a: First mounting part 51b: Second mounting part 52: Contact end 53: Contact ball 54: catch seat 55: Leaf spring 60: Probe drive device 70: Mobile device 80: Control device X: Ultrasonic flaw detection device G: Gel R: Area R to be inspected Ac: central axis Da; axial direction Da1: Shaft first side Da2: Axis second side Dcir: Circumferential direction Dcro: Cross direction Dcro1: First side of intersection Dcro2: Second side of intersection Ds: Scanning direction Ds1: First scanning side Ds2: Scanning side 2 Tm: Travel time Ts: Stop time t1: Time to drive the first probe t2: Time to drive the second probe t3: Time to drive the third probe

Claims

1. In an ultrasonic inspection device capable of ultrasonically inspecting a target area in an object, A first probe; A second probe; and A third probe; and a probe holder for holding the first probe, the second probe, and the third probe; Equipped with The probe holder includes: a holder main body in which the first probe, the second probe, and the third probe are arranged and which has a holder facing surface capable of facing a surface of the object; a position adjustment mechanism capable of adjusting a relative position of the remaining two probes in an intersecting direction with respect to any one of the three probes arranged on the holder body; having A scanning direction is defined in the probe holder, the scanning direction being a direction along the holder facing surface, the intersecting direction is a direction along the holder facing surface and intersecting the scanning direction, The first probe is an ultrasonic vertical flaw detection probe, The second probe is an ultrasonic direct inspection probe, The third probe is an ultrasonic single reflection flaw detection probe. Ultrasonic flaw detection equipment.

2. The ultrasonic flaw detector according to claim 1, the holder body has a first frame in which the first probe is disposed, a second frame in which the second probe is disposed, and a third frame in which the third probe is disposed, the first frame, the second frame, and the third frame being connected to one another; the position adjustment mechanism includes a first position adjustment mechanism capable of adjusting any one of a position of the first probe in the first frame in the intersecting direction, a position of the second probe in the second frame in the intersecting direction, and a position of the third probe in the third frame in the intersecting direction, and a second position adjustment mechanism capable of adjusting the other one of the positions; Ultrasonic flaw detection equipment.

3. The ultrasonic flaw detector according to claim 2, the second frame is shifted in the intersecting direction relative to the first frame, the third frame is shifted in the intersecting direction relative to the first frame, a positional deviation amount of the third frame relative to the first frame in the intersecting direction is greater than a positional deviation amount of the second frame relative to the first frame in the intersecting direction; Ultrasonic flaw detection equipment.

4. The ultrasonic flaw detector according to claim 2, the first frame has a gel arrangement space between the first probe and the surface of the object, in which a gel can be arranged; Ultrasonic flaw detection equipment.

5. The ultrasonic flaw detector according to claim 1, each of the first probe, the second probe, and the third probe has an element array capable of transmitting and receiving ultrasonic waves, and an array holding frame that holds the element array; the array holding frame has a probe facing surface capable of facing a surface of the object; The element array has an emission surface capable of emitting ultrasonic waves and receiving ultrasonic waves, an emission surface in the element array of the second probe and an emission surface in the element array of the third probe each have a first end which is an end on a first intersection side which is a side of the first probe closer to the element array in the intersecting direction, and a second end which is an end on a second intersection side which is a side of the first probe farther from the element array in the intersecting direction, the transmission surface of the second probe is inclined with respect to the probe-facing surface of the second probe such that a distance from the probe-facing surface of the second probe to the second end of the transmission surface of the second probe is greater than a distance from the probe-facing surface of the second probe to the first end of the transmission surface of the second probe; the transmission surface of the third probe is inclined with respect to the probe-facing surface of the third probe such that a distance from the probe-facing surface of the third probe to the second end of the transmission surface of the third probe is greater than a distance from the probe-facing surface of the third probe to the first end of the transmission surface of the third probe. Ultrasonic flaw detection equipment.

6. The ultrasonic flaw detector according to any one of claims 1 to 5, a probe driving device that drives each of the first probe, the second probe, and the third probe; the probe driving device drives the first probe, the second probe, and the third probe such that a time for driving the first probe, a time for driving the second probe, and a time for driving the third probe do not overlap with each other. Ultrasonic flaw detection equipment.

7. The ultrasonic flaw detector according to any one of claims 1 to 5, a moving device capable of moving the probe holder in the scanning direction relative to the object; Ultrasonic flaw detection equipment.

8. The ultrasonic flaw detector according to any one of claims 1 to 5, The object has a cylindrical shape, a mounting member for mounting the probe holder to the object; When the probe holder is attached to the object, the scanning direction of the probe holder becomes a circumferential direction of the cylindrical object, The mounting member is a first attachment portion attached to an end portion of the probe holder on the first side in the circumferential direction and extending to the first side; a second mounting portion attached to the second end of the probe holder and extending to the second side; having Ultrasonic flaw detection equipment.

9. The ultrasonic flaw detector according to claim 8, Each of the first mounting portion and the second mounting portion has a contact end capable of contacting a surface of the object, and a leaf spring capable of generating an elastic force on the contact end toward a side approaching a central axis of the cylindrical object. Ultrasonic flaw detection equipment.

10. The ultrasonic flaw detector according to claim 9, The contact end has a contact ball capable of contacting the surface of the object, and a seat that rotatably supports the contact ball around a center of the contact ball. Ultrasonic flaw detection equipment.

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