Carboxylate, carboxylic acid generator, resin, resist composition, and method for producing resist pattern

Abstract

To produce a resist pattern having good line edge roughness (LER).SOLUTION: A carboxylic acid generator contains a salt represented by a specific structure.SELECTED DRAWING: None

Description

[Technical field]

[0001] The present invention relates to a carboxylate, a carboxylic acid generator, a resin, a resist composition, and a method for producing a resist pattern. [Background technology]

[0002] Patent Document 1 describes a resist composition that contains a resin that includes a structural unit derived from a carboxylate represented by the following formula.

[0003] [ka] [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2011-037834 A Summary of the Invention [Problem to be solved by the invention]

[0005] There is a demand for technology that can produce resist patterns with good line edge roughness (LER). [Means for solving the problem]

[0006] The present invention includes the following inventions. [Invention 1] A carboxylic acid generator comprising a carboxylate represented by formula (I) and at least one structural unit represented by formula (IP).

[0007] [ka]

[0008] [In the formula (I) and the formula (IP), X represents a sulfur atom or an iodine atom. m10 represents 0 or 1. When X is a sulfur atom, m10 is 1, and when X is an iodine atom, m10 is 0.

[0009] R 1A and R 1B are each independently *-X 1 -R 10 or *-X 1 -L 11 -X 2 -R 10 * stands for R 4 is bonded to a benzene ring or R 7 represents the bonding site with the benzene ring to which it is attached.

[0010] X 1 and X 2 are each independently *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (wherein * represents a benzene ring or L 11 It represents the binding site with. 11 represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH 2 -, -O-, -S-, -SO 2 It may be replaced by - or -CO-.

[0011] R 10 -SO 2 - represents a group having the formula: R 4 represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, and the -CH 2 - is -O-, -S-, -CO-, -SO- or -SO 2 It may be replaced with -.

[0012] R 7 , R 8 and R 9 each independently represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, and -CH 2- is -O-, -S-, -CO-, -SO- or -SO 2 When X is a sulfur atom, R 7 and R 8 or R 8 and R 9 Combined, S + The R forming the ring may form a ring containing 7 and R 8 or R 8 and R 9 is S + The —CH 2 - is -O-, -S-, -CO-, -SO- or -SO 2 It may be replaced with -.

[0013] m1A represents an integer of 0 to 5, and when m1A is 2 or more, a plurality of R 1A may be the same or different from each other. m1B represents an integer of 0 to 4, and when m1B is 2 or more, a plurality of R 1B may be the same or different, provided that either m1A or m1B is an integer of at least 1.

[0014] m4 represents an integer of 0 to 5, and when m4 is 2 or more, a plurality of R 4 may be the same or different, and satisfy the relationship 0≦m1A+m4≦5. m7 represents an integer of 0 to 4, and when m7 is 2 or more, a plurality of R 7 may be the same or different, and satisfy the relationship 0≦m1B+m7≦4.

[0015] m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R 8 may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R 9 may be the same or different from each other.

[0016] X0 represents a single bond or a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced.

[0017] R bb1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 10 is a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR 3 -**, *-NR 3 -CO-O-**, *-O-CO-NR 3 -** or *-Ax-Ph-Ay-**.

[0018] R 3 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond.

[0019] * and ** represent binding sites, * represents R bb1 represents the bonding site with the carbon atom to which it is bonded. L 10 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH 2 -, -O-, -S-, -SO 2 - or -CO- may be substituted. [Invention 2] R 10 -SO 2 The carboxylic acid generator according to [Invention 1], wherein the group having - is a group having a ring represented by formula (T1A).

[0020] [ka]

[0021] [In formula (T1A), X 1A represents an oxygen atom, a sulfur atom, -NH-, or a methylene group. R 41A represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms.

[0022] ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41A may be the same or different. The binding site is at any position.] [Invention 3] m1A is an integer from 1 to 3, R 1A is -O-CO-OR 10 Or -OL 11 -CO-OR 10 The carboxylic acid generator according to [Invention 1] or [Invention 2],

[0023] [Invention 4] X 0 represents a single bond, an aliphatic hydrocarbon group having 1 to 72 carbon atoms, or a hydrocarbon group having 6 to 72 carbon atoms including an aromatic hydrocarbon group having 6 to 36 carbon atoms, The aliphatic hydrocarbon group and the —CH 2 - is -O-, -S-, -CO- or -SO 2 The carboxylic acid generator according to any one of [Invention 1] to [Invention 3], wherein the aliphatic hydrocarbon group, the aromatic hydrocarbon group and the hydrocarbon group may have a substituent.

[0024] [Invention 5] X 0represents an open chain hydrocarbon group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, a group in which an open chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 36 carbon atoms are combined, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group in which an aromatic hydrocarbon group having 6 to 36 carbon atoms and an open chain hydrocarbon group having 1 to 18 carbon atoms are combined, The chain hydrocarbon group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, a hydroxy group or a hydroxymethyl group, -CH contained in the chain hydrocarbon group and the alicyclic hydrocarbon group 2 -, -O-, -S-, -SO 2 The carboxylic acid generator according to any one of [Invention 1] to [Invention 4], wherein - may be replaced by -CO-.

[0025] [Invention 6] X 0 teeth, an alkanediyl group having 1 to 6 carbon atoms; A cycloalkanediyl group having 5 to 6 carbon atoms, an adamantanediyl group, a norbornanediyl group, a phenylene group, COO - and a cycloalkanediyl group, adamantanediyl group, norbornanediyl group or phenylene group having 5 to 6 carbon atoms bonded to the alkanediyl group; or COO - a polycyclic alicyclic hydrocarbon group in which a cycloalkanediyl group, adamantanediyl group or norbornanediyl group having 5 to 6 carbon atoms is bonded to a cycloalkanediyl group having 5 to 8 carbon atoms in a spiro bond; The —CH contained in the alkanediyl group, the cycloalkanediyl group, the adamantanediyl group, and the norbornanediyl group 2The carboxylic acid generator according to any one of [Invention 1] to [Invention 5], wherein - may be replaced by -O- or -CO-, and the alkanediyl group, the cycloalkanediyl group, the adamantanediyl group, the norbornanediyl group and the phenylene group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, a hydroxy group or a hydroxymethyl group.

[0026] [Invention 7] X 10 is a single bond or a group of the formula (X 10 -1)~Formula(X 10 -10).

[0027] [ka]

[0028] [Formula(X 10 -1)~Formula(X 10 -10) Medium, *, ** are binding sites, * is R bb1 represents the bonding site with the carbon atom to which it is bonded. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms.

[0029] mx represents an integer of 0 to 4. X 20 is -O- or -NR 3 - represents. R 3 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.] [Invention 8] X 10 is a single bond or a group of the formula (X 10 -1′), formula (X 10 -3′)~Formula(X 10 -8') and formula (X 10 -10′).

[0030] [ka]

[0031] [Formula(X 10 -1′), formula (X 10 -3′)~Formula(X 10 -8') and formula (X 10 -10′) medium, *, ** are binding sites, * is R bb1 represents the bonding site with the carbon atom to which it is attached. [Invention 9] X 10 is a single bond or a group of the formula (X 10 -1′), formula (X 10 -5′), formula (X 10 -6') and formula (X 10 -10′).

[0032] [Invention 10] L 10 represents a single bond, an alkanediyl group having 1 to 6 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, The cyclic hydrocarbon group may have a substituent, and the alkanediyl group and the -CH 2 -, -O-, -S-, -SO 2 The carboxylic acid generator according to any one of [Invention 1] to [Invention 9], which may be replaced by - or -CO-.

[0033] [Invention 11] A resist composition comprising the carboxylic acid generator according to any one of [Invention 1] to [Invention 10].

[0034] [Invention 12] A carboxylate represented by formula (I) and a resin that includes a structural unit (a1) having an acid labile group.

[0035] [Invention 13] Contains a resin containing a structural unit represented by formula (IP), The resist composition according to [Invention 11] or [Invention 12], wherein the resin containing the structural unit represented by formula (IP) further contains a structural unit (a1) having an acid labile group.

[0036] [Invention 14] The resist composition according to [Invention 13], further comprising a carboxylate represented by formula (I).

[0037] [Invention 15] The resist composition according to any one of [Invention 12] to [Invention 14], wherein the structural unit (a1) having an acid labile group includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6).

[0038] [ka]

[0039] [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or *-O-(CH 2 ) k1 represents --CO--O--, k1 represents an integer of 1 to 7, and * represents a bonding site with --CO--.

[0040] R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, and the alkyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom.

[0041] R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom.

[0042] m1′ represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3.

[0043] [ka]

[0044] [In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0045] R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.

[0046] A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH2 - is -O-, -CO- or -NR a18 - may be replaced.

[0047] R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -CO- to which they are bonded, and the -CH 2 - may be replaced by -O- or -S-.

[0048] na1 represents an integer of any one of 1 to 5, and when na1 is 2 or more, the groups in the multiple parentheses may be the same or different. na11 represents an integer of 0 to 4. When na11 is 2 or more, multiple R a17 may be the same or different from each other.

[0049] mc represents an integer from 0 to 2.

[0050] [ka]

[0051] [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom.

[0052] Z a1 is a single bond or *-(CH 2 ) h3 -CO-L 54-, h3 represents an integer of 1 to 4, * represents L 51 represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-.

[0053] s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3.

[0054] [ka]

[0055] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0056] R a62 , R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached.

[0057] X a61 is a single bond, -CO-O-* or -CO-NR 5 -*, where * represents the bonding site with -Ar, and R 5 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. X a62 is a single bond, *-OL a61 -or*-CO-OL a62 -, * represents the bonding site with -Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms.

[0058] Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.] [Invention 16] The resist composition according to any one of [Invention 11] to [Invention 15], wherein the resin containing the structural unit (a1) having an acid labile group further contains a structural unit represented by formula (a2-A).

[0059] [ka]

[0060] [In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0061] R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.

[0062] A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH 2 - is -O-, -CO- or -NR a28 - may be replaced.

[0063] R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5. When nA2 is 2 or more, the groups in the multiple parentheses may be the same or different.

[0064] na21 represents an integer of 0 to 4. When na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer from 0 to 2. [Invention 17] Further containing an acid generator, The resist composition according to any one of [Invention 11] to [Invention 16], wherein the acid generator contains a salt represented by formula (B1).

[0065] [ka]

[0066] [In formula (B1), L b1 represents a single bond or a (nb1+1)-valent hydrocarbon group which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced.

[0067] L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -.

[0068] Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 -, -O-, -S-, -SO 2 It may be replaced by - or -CO-.

[0069] nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the multiple parentheses may be the same or different. Z + represents an organic cation. [Invention 18] (1) A step of applying a resist composition according to any one of [Invention 11] to [Invention 17] onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the heated composition layer; A method for producing a resist pattern comprising the steps of:

[0070] [Invention 19] A carboxylate represented by the above formula (I). [Invention 20] R 10 -SO 2 The carboxylate according to [Invention 19], wherein the group having - is a group having a ring represented by the above formula (T1A).

[0071] [Invention 21] m1A is an integer of 1 to 3, R 1A is -O-CO-OR 10 Or -OL 11 -CO-OR 10 The carboxylate salt according to claim 19 or 20,

[0072] [Invention 22] X 0 represents a single bond, an aliphatic hydrocarbon group having 1 to 72 carbon atoms, or a hydrocarbon group having 6 to 72 carbon atoms including an aromatic hydrocarbon group having 6 to 36 carbon atoms, The aliphatic hydrocarbon group and the —CH 2 - is -O-, -S-, -CO- or -SO 2 The carboxylate according to any one of [Invention 19] to [Invention 21], wherein the aliphatic hydrocarbon group, the aromatic hydrocarbon group and the hydrocarbon group may have a substituent.

[0073] [Invention 23] X 0represents an open chain hydrocarbon group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, a group in which an open chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 36 carbon atoms are combined, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group in which an aromatic hydrocarbon group having 6 to 36 carbon atoms and an open chain hydrocarbon group having 1 to 18 carbon atoms are combined, The chain hydrocarbon group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, a hydroxy group or a hydroxymethyl group, -CH contained in the chain hydrocarbon group and the alicyclic hydrocarbon group 2 -, -O-, -S-, -SO 2 The carboxylate according to any one of [Invention 19] to [Invention 22], which may be replaced by - or -CO-.

[0074] [Invention 24] X 0 teeth, an alkanediyl group having 1 to 6 carbon atoms; A cycloalkanediyl group having 5 to 6 carbon atoms, an adamantanediyl group, a norbornanediyl group, a phenylene group, COO - and a cycloalkanediyl group, adamantanediyl group, norbornanediyl group or phenylene group having 5 to 6 carbon atoms bonded to the alkanediyl group; or COO - a polycyclic alicyclic hydrocarbon group in which a cycloalkanediyl group, adamantanediyl group or norbornanediyl group having 5 to 6 carbon atoms is bonded to a cycloalkanediyl group having 5 to 8 carbon atoms in a spiro bond; The —CH contained in the alkanediyl group, the cycloalkanediyl group, the adamantanediyl group, and the norbornanediyl group 2The carboxylate according to any one of [Invention 19] to [Invention 23], wherein - may be replaced by -O- or -CO-, and the alkanediyl group, the cycloalkanediyl group, the adamantanediyl group, the norbornanediyl group and the phenylene group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, a hydroxy group or a hydroxymethyl group.

[0075] [Invention 25] X 10 is a single bond or the above formula (X 10 -1)~Formula(X 10 -10).

[0076] [Invention 26] X 10 is a single bond or the above formula (X 10 -1′), formula (X 10 -3′)~Formula(X 10 -8') and formula (X 10 -10′).

[0077] [Invention 27] X 10 is a single bond or the above formula (X 10 -1′), formula (X 10 -5′), formula (X 10 -6') and formula (X 10 -10′).

[0078] [Invention 28] L 10 represents a single bond, an alkanediyl group having 1 to 6 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, The cyclic hydrocarbon group may have a substituent, and the alkanediyl group and the -CH 2 -, -O-, -S-, -SO 2The carboxylate according to any one of [Invention 19] to [Invention 27], which may be replaced by - or -CO-.

[0079] [Invention 29] A resin containing a structural unit represented by the above formula (IP). Effect of the Invention

[0080] By using a resist composition that uses a carboxylate of the present invention, a resist pattern with excellent line edge roughness (LER) can be produced. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0081] In this specification, the term "(meth)acrylic monomer" means "at least one of an acrylic monomer and a methacrylic monomer." The terms "(meth)acrylate" and "(meth)acrylic acid" have the same meaning. In the groups described in this specification, those that can have both a straight-chain structure and a branched structure may have either one. -CH contained in a hydrocarbon group, etc. 2 - is -O-, -S-, -CO- or -SO 2When replaced with -, the same example applies to each group, and the number of carbon atoms before replacement is the number of carbon atoms of the hydrocarbon group, etc. "Combined group" means a group in which two or more of the exemplified groups are bonded, and the valence of the group may be appropriately changed depending on the bond form. "Derived from" or "derived from" means that the polymerizable C=C bond contained in the molecule becomes a -CC- group (single bond) by polymerization. When stereoisomers exist, all stereoisomers are included. Each group may have any position and number of hydrogen atoms contained in the group that are substituted for the bond site depending on the number of substituents, etc. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the substituted group. An acid labile group means a group that, when contacted with an acid (e.g., trifluoromethanesulfonic acid, etc.), the leaving group is eliminated to form a hydrophilic group (e.g., a hydroxyl group or a carboxyl group, etc.). By base labile group is meant a group which, upon contact with a base (eg, trimethylamine, etc.), is eliminated to form a hydrophilic group (eg, a carboxy group or a hydroxy group, etc.).

[0082] In this specification, the term "solids content of a resist composition" refers to the sum of the components excluding the solvent (E), which will be described later, from the total amount of the resist composition. [Carboxylic acid salt represented by formula (I)] The present invention relates to a carboxylate represented by formula (I) (hereinafter sometimes referred to as "carboxylate (I)" or "salt (I)").

[0083] In a salt (I), the side having a positive charge is sometimes called a "cation (I)" and the side having a negative charge is sometimes called an "anion (I)". [Cation (I)] The cation (I) of the salt represented by formula (I) is a cation represented by formula (IC).

[0084] [ka]

[0085] [In formula (IC), all symbols have the same meaning as in formula (I)] R 1Aand R 1B X in 1 is preferably *-CO-O-, *-O- or *-O-CO-O- (* represents a bonding site to the benzene ring), and more preferably *-O- or *-O-CO-O-.

[0086] R 1A and R 1B X in 2 is *-CO-O-, *-O-CO- or *-O-CO-O- (* is L 11 It is preferable that the bond is *-CO-O- or *-O-CO-.

[0087] R 1A and R 1B L included in 11 Examples of the hydrocarbon group in include chain hydrocarbon groups such as an alkanediyl group, monocyclic or polycyclic (including spiro ring) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be a group consisting of a combination of two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and an alkanediyl group).

[0088] Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl groups. The terminal of the branched alkanediyl group may be an alkyl group such as a methyl group.

[0089] The chain hydrocarbon group preferably has 1 to 18 carbon atoms, more preferably 1 to 12 carbon atoms, even more preferably 1 to 9 carbon atoms, still more preferably 1 to 6 carbon atoms, and even more preferably 1 to 4 carbon atoms.

[0090] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following groups: The binding site may be any position.

[0091] [ka]

[0092] Specifically, examples of the alicyclic hydrocarbon group include monocyclic divalent alicyclic hydrocarbon groups, such as monocyclic cycloalkanediyl groups, such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, and a cyclooctane-1,5-diyl group; Examples of the divalent alicyclic hydrocarbon group include a cycloalkyl group such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, spirocyclohexane-1,2'-cyclopentane group, and spiroadamantane-2,3'-cyclopentane group, and a polycyclic cycloalkanediyl group such as a spiro ring having a cycloalkyl group bonded to a norbornyl group or an adamantyl group by a spiro bond. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12.

[0093] Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and further preferably 6 to 10.

[0094] Examples of the group combining two or more types include a group combining an alicyclic hydrocarbon group with an alkanediyl group, a group combining an aromatic hydrocarbon group with an alkanediyl group, and a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group. In the combination, two or more types of each of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined. In addition, when any group is X 1 Or X 2 may be bound to

[0095] Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-.

[0096] Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-, and the like.

[0097] Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-.

[0098] L 11 -CH contained in the hydrocarbon group having 1 to 28 carbon atoms 2 -, -O-, -S-, -SO 2 It may be replaced by - or -CO-. L11 -CH contained in the hydrocarbon group having 1 to 28 carbon atoms 2 - is -O-, -S-, -SO 2 When it is replaced by - or -CO-, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the hydrocarbon group.

[0099] -CH contained in the hydrocarbon group 2 -, -O-, -S-, -SO 2 The group substituted for - or -CO- is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), thiol group (-CH 2 - is replaced by -S-), oxy group (-CH 2 - is replaced by -O-), carbonyl group (-CH 2 - is replaced by -CO-), thio group (-CH 2 - is replaced by -S-), sulfonyl group (-CH 2 -But-SO 2 - substituted), alkoxy group (-CH at any position in the alkyl group) 2 - is replaced by -O-), alkylthio group (-CH 2 - is replaced by -S-), alkylsulfonyl group (-CH 2 -But-SO 2 -substituted), alkoxycarbonyl group (a group in which -CH 2 -CH 2 - is replaced by -O-CO-), alkylcarbonyl group (-CH 2 - is replaced by -CO-), alkylcarbonyloxy group (-CH 2 -CH 2- is replaced by -CO-O-), alkanediyloxy group (-CH at any position in the alkanediyl group) 2 - is replaced by -O-), alkanediyloxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH 2 - is replaced by -CO-O-), alkanediylsulfonyl group (-CH at any position contained in the alkanediyl group) 2 -But-SO 2 -), alkanediylthio group (groups in which -CH at any position in the alkanediyl group is replaced with -CH 2 Examples of such groups include a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a combination of two or more of these groups.

[0100] Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0101] The alkylthio group includes an alkylthio group having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0102] Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, further preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.

[0103] Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0104] The alkanediyloxy group includes an alkanediyloxy group having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0105] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, etc. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3.

[0106] The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 27 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0107] The alkanediylthio group includes an alkanediylthio group having 1 to 27 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0108] Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as cyclohexyloxy groups. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as cyclohexylmethoxy groups. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 27 carbon atoms, such as butoxycarbonyloxy groups. Examples of the aromatic hydrocarbon group-carbonyloxy group include aromatic hydrocarbon group-carbonyloxy groups having 7 to 27 carbon atoms, such as benzoyloxy groups. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 28 carbon atoms, such as benzoyl groups. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as phenyloxy groups.

[0109] In addition, -CH contained in alicyclic hydrocarbon groups 2 - is -O-, -S-, -CO- or -SO 2 Examples of the group substituted with - include the following groups. -O- or -CO- in the groups shown below are respectively -S- or -SO 2 The binding site can be at any position.

[0110] [ka]

[0111] L 11 The substituents which may be contained in L include a halogen atom and a cyano group. 11In the case of a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. 11 -CH contained in the alkyl group and other chain hydrocarbon groups contained in 2 - is -O-, -CO-, -S- or -SO 2 - is replaced by L 11 can substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, or an alkylsulfonyl group.

[0112] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 11 The substituent in is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxyl group or a halogen atom, more preferably an alkyl group having 1 to 4 carbon atoms or a halogen atom, and further preferably a methyl group or a fluorine atom.

[0113] L 11 Examples of the alkanediyl group include an alkanediyl group having 1 to 10 carbon atoms (the —CH 2 - may be replaced by -O- or -CO-) or a group combining an alkanediyl group having 1 to 4 carbon atoms with an alicyclic hydrocarbon group having 3 to 12 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-.) is preferable, an alkanediyl group having 1 to 6 carbon atoms is more preferable, an alkanediyl group having 1 to 3 carbon atoms is even more preferable, and a methylene group is even more preferable.

[0114] R 1A and R 1B R included in 10 -SO 2 The group having - is -SO 2- or a branched structure having -SO 2 - or in a ring structure (monocyclic and polycyclic), 2 Preferably, the ring structure (monocyclic and polycyclic) has an -SO 2 More preferably, it is a group having the formula -SO 2 It is a group having a cyclic structure (sultone ring) containing -O-.

[0115] The sultone ring may be, for example, a ring represented by the following formula (T 1 Here, the bonding site of the sultone ring may be at any position (hereinafter the same).

[0116] [ka]

[0117] Formula(T 1 In the formula, ring A represents a sultone ring having 2 to 24 carbon atoms. 2 - may be replaced by -O-, -S- or -NH-. R 41A represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms.

[0118] ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41A may be the same or different. The sultone ring may be either monocyclic or polycyclic.

[0119] The number of carbon atoms in the sultone ring is preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 16, still more preferably 3 to 12, and even more preferably 3 to 10.

[0120] The sultone ring of ring A is preferably a sultone ring having 3 to 18 carbon atoms, more preferably a sultone ring having 3 to 10 carbon atoms, and examples thereof include a sultone ring represented by the following formula (T 1 -0), a polycyclic ring represented by the formula (T 1 -3) and the formula (T 1 -4) can be mentioned. Among them, polycyclic rings are preferable. A polycyclic sultone ring is a ring having an atomic group of -SO 2 It means a bridged ring containing -O-, and has the formula (T 1 -1), formula (T 1 -2), formula (T 1 -5) and the formula (T 1 The sultone ring is represented by the formula (T 1 -2), formula (T 1 -5) and the formula (T 1 -6), -SO 2 In addition to -O-, the ring may contain a heteroatom as a constituent atom of the ring. Examples of the heteroatom include an oxygen atom, a sulfur atom, and a nitrogen atom, and an oxygen atom is preferable.

[0121] [ka]

[0122] where X 1A represents an oxygen atom, a sulfur atom, -NH-, or a methylene group. X 1A is preferably an oxygen atom or a methylene group, and more preferably a methylene group.

[0123] R 41A Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group. An alkyl group having 1 to 6 carbon atoms is preferable, an alkyl group having 1 to 4 carbon atoms is more preferable, and a methyl group or an ethyl group is even more preferable.

[0124] Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, and preferably a trifluoromethyl group.

[0125] Examples of the alkyl group having a hydroxy group include a hydroxyalkyl group such as a hydroxymethyl group and a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group.

[0126] Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group.

[0127] Examples of the aralkyl group include a benzyl group, a phenethyl group, a phenylpropyl group, a naphthylmethyl group, and a naphthylethyl group. Examples of the alkoxycarbonyl group include groups in which an alkoxy group, such as a methoxycarbonyl group or an ethoxycarbonyl group, is bonded to a carbonyl group, and preferably, an alkoxycarbonyl group having 6 or less carbon atoms is used, and more preferably, a methoxycarbonyl group is used.

[0128] Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. R 41Ais preferably an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom or a hydroxy group, more preferably an alkyl group having 1 to 4 carbon atoms, further preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0129] ma is preferably an integer of 0 to 7, more preferably an integer of 0 to 4, even more preferably 0 or 1, and even more preferably 0. That is, -SO 2 The group having - is more preferably a group having a sultone ring that has no substituent.

[0130] As the sultone ring, a ring represented by the following formula (T1A) is preferable, and a ring represented by the formula (T1) is more preferable.

[0131] [ka]

[0132] [In formula (T1A) and formula (T1), all symbols have the same meaning as defined above.] Formula(T 1 Examples of the ring represented by formula (T1A), the ring represented by formula (T1), and the ring represented by formula (T1) include the following rings. As described above, the binding site may be any position, but in the following rings, the binding site is preferably the 1st or 3rd position, and more preferably the 1st position.

[0133] [ka]

[0134] m1A is preferably an integer of 0 to 4, more preferably an integer of 0 to 3, even more preferably an integer of 1 to 3, even more preferably 1 or 2, and even more preferably 1.

[0135] m1B is preferably an integer of 0 to 3, more preferably an integer of 0 to 2, even more preferably 0 or 1, and even more preferably 0.

[0136] R 1A The bonding position of to the benzene ring is X + The position may be ortho, meta, or para relative to the bonding position of the benzene ring to which X is bonded. + At least one of the groups is preferably bonded at the ortho position or para position with respect to the bonding position of the benzene ring to which the group is bonded.

[0137] R 1B The bonding position of to the benzene ring is X + The bonding position of X may be ortho, meta, or para. + It is preferable that at least one of the bonds is at the ortho-position or meta-position with respect to the bonding position of the above.

[0138] R 1A and R 1B are each independently: -OR 10 , -CO-OR 10 , -O-CO-R 10 , -O-CO-OR 10 Or -OL 11 -CO-OR 10 is preferably -O-CO-R 10 , -O-CO-OR 10 Or -OL 11 -CO-OR 10 More preferably, it is -O-CO-OR 10 Or -OL 11 -CO-OR 10 More preferably, -OL 11 -CO-OR 10 It is even more preferred that:

[0139] R 4 , R 7 , R 8 and R 9Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 4 , R 7 , R 8 and R 9 Examples of the hydrocarbon group having 1 to 36 carbon atoms include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. The number of carbon atoms in the hydrocarbon group is preferably 1 to 30, more preferably 1 to 24, and even more preferably 1 to 18.

[0140] The alkyl group is a straight-chain or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group.

[0141] The alkanediyl group is a linear or branched alkanediyl group, such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, or a hexane-1,6-diyl group; and Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group.

[0142] The chain hydrocarbon group has preferably 1 to 18 carbon atoms, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0143] The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below. The bonding site may be any position.

[0144] [ka]

[0145] Specifically, the monocyclic alicyclic hydrocarbon group includes monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl. The polycyclic alicyclic hydrocarbon group includes polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl, cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane, and spiro rings having cycloalkyl groups bonded to norbornyl or adamantyl groups via spiro. The carbon number of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12.

[0146] Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and further preferably 6 to 10.

[0147] Among chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, groups formed by combining two or more of these groups include groups formed by combining an aromatic hydrocarbon group with a chain hydrocarbon group (for example, an aromatic hydrocarbon group-alkanediyl group-*, an alkyl group-aromatic hydrocarbon group-*, an alkyl group-aromatic hydrocarbon group-alkanediyl group-*, the -CH 2 - is -O-, -CO-, -S- or -SO 2-), a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group (for example, an alicyclic hydrocarbon group-alkanediyl group-*, an alkyl group-alicyclic hydrocarbon group-*, an alkyl group-alicyclic hydrocarbon group-alkanediyl group-*, -CH contained in the alicyclic hydrocarbon group, the alkanediyl group, and the alkyl group 2 - is -O-, -CO-, -S- or -SO 2 -), a group in which an aromatic hydrocarbon group and an alicyclic hydrocarbon group are combined (for example, an aromatic hydrocarbon group-alicyclic hydrocarbon group-*, an alicyclic hydrocarbon group-aromatic hydrocarbon group-*, -CH 2 - is -O-, -CO-, -S- or -SO 2 - may be substituted. * represents a binding site.

[0148] The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group.

[0149] Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as a cyclohexylmethyl group, a cyclohexylethyl group, a 1-(adamantan-1-yl)methyl group, and a 1-(adamantan-1-yl)-1-methylethyl group.

[0150] Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group.

[0151] Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenylcyclohexyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include a cyclohexylphenyl group.

[0152] In addition, in the group formed by the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined, and any of the groups may be bonded to a benzene ring.

[0153] R 4 , R 7 , R 8 and R 9 The -CH 2 - is -O-, -CO-, -S-, -SO- or -SO 2 When the hydrocarbon group is substituted with -, the number of carbon atoms before the substitution is regarded as the total number of carbon atoms of the hydrocarbon group. The number of substitutions may be one or more.

[0154] -CH contained in the hydrocarbon group 2 - is -O-, -CO-, -S-, -SO- or -SO 2 The group substituted for - is a hydroxy group (-CH 2 - is replaced by -O-), thiol group (-CH 2 - is replaced by -S-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), alkoxy group (-CH 2 - is replaced by -O-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylcarbonyl group (-CH 2 - is replaced by -CO-), alkylcarbonyloxy group (-CH 2 -CH 2 - is replaced by -CO-O-), alkylthio group (-CH 2 - is replaced by -S-), alkylsulfur group (-CH at any position in the alkyl group) 2- is replaced by -SO-), alkylsulfonyl group (-CH 2 -But-SO 2 - substituted), oxy group (-CH contained in methylene group 2 - is replaced by -O-), carbonyl group (-CH 2 - is replaced by -CO-), thio group (-CH 2 - is replaced by -S-), sulfyl group (-CH 2 - is replaced by -SO-), sulfonyl group (-CH 2 -But-SO 2 -), alkanediyloxy group (groups in which -CH at any position in the alkanediyl group is replaced by -), 2 - is replaced by -O-), alkanediyloxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH 2 - is replaced by -CO-O-), alkanediylthio group (-CH at any position in the alkanediyl group) 2 - is replaced by -S-), alkanediylsulfyl group (-CH at any position contained in the alkanediyl group) 2 - is replaced by -SO-), alkanediylsulfonyl group (-CH at any position contained in the alkanediyl group) 2 -But-SO 2 -substituted), cycloalkoxy groups, cycloalkylalkoxy groups, alkoxycarbonyloxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and combinations of two or more of these groups.

[0155] Examples of the alkoxy group include alkoxy groups having 1 to 35 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0156] The alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group represent groups in which a carbonyl group or a carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.

[0157] Examples of the alkoxycarbonyl group include an alkoxycarbonyl group having 2 to 35 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include an alkylcarbonyl group having 2 to 36 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include an alkylcarbonyloxy group having 2 to 35 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, further preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.

[0158] The alkylthio group includes an alkylthio group having 1 to 35 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0159] Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 35 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0160] The alkanediyloxy group includes an alkanediyloxy group having 1 to 35 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0161] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 35 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 36 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, etc. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 35 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3.

[0162] The alkanediylthio group includes an alkanediylthio group having 1 to 35 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0163] The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 35 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0164] Examples of the cycloalkoxy group include a cycloalkoxy group having 3 to 35 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include a cycloalkylalkoxy group having 4 to 35 carbon atoms, such as a cyclohexylmethoxy group. Examples of the alkoxycarbonyloxy group include an alkoxycarbonyloxy group having 2 to 34 carbon atoms, such as a butoxycarbonyloxy group. Examples of the aromatic hydrocarbon group-carbonyloxy group include an aromatic hydrocarbon group-carbonyloxy group having 7 to 35 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include an aromatic hydrocarbon group-carbonyl group having 7 to 36 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include an aromatic hydrocarbon group-oxy group having 6 to 35 carbon atoms, such as a phenyloxy group.

[0165] In addition, -CH contained in alicyclic hydrocarbon groups 2 -, -O-, -S-, -SO 2 Examples of the group replaced with -, -SO- or -CO- include the groups shown below. In addition, among the groups shown below, when -O- is -S-, and -CO- is -SO- or -SO 2 Also included are groups each replaced with -. The binding site may be at any position.

[0166] [ka]

[0167] R 4 , R7 , R 8 and R 9 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, and the like. Examples of the halogen atom include the same groups as those mentioned above.

[0168] R 4 , R 7 , R 8 and R 9 When R is a hydrocarbon group having a halogen atom, 4 , R 7 , R 8 and R 9 Examples of the hydrocarbon group having a halogen atom include a chain hydrocarbon group having a halogen atom (such as a haloalkyl group), an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom.

[0169] Examples of the alkyl group having a halogen include haloalkyl groups having 1 to 12 carbon atoms, such as fluorinated alkyl groups having 1 to 12 carbon atoms, chlorinated alkyl groups having 1 to 12 carbon atoms, brominated alkyl groups having 1 to 12 carbon atoms, and iodinated alkyl groups having 1 to 12 carbon atoms. Examples of the haloalkyl groups include perfluoroalkyl groups having 1 to 12 carbon atoms (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0170] Haloalkyl group contains -CH 2- may be replaced by -O- or -CO-, etc., and examples thereof include a haloalkoxy group, a haloalkoxycarbonyl group, a haloalkylcarbonyl group, a haloalkylcarbonyloxy group, etc. Specific examples thereof include a haloalkoxy group having 1 to 11 carbon atoms, a haloalkoxycarbonyl group having 2 to 11 carbon atoms, a haloalkylcarbonyl group having 2 to 12 carbon atoms, a haloalkylcarbonyloxy group having 2 to 11 carbon atoms, etc., and examples thereof include groups in which one or more hydrogen atoms of the above-exemplified groups are replaced with halogen atoms.

[0171] The hydrocarbon group may have one substituent or multiple substituents. R 4 The bond position of the benzene ring to which X is bonded is + In the benzene ring to which X is attached, + The bonding position of R may be ortho, meta, or para. 4 The benzene ring to which X is attached is + It is preferably bonded at the para or meta position relative to the bonding position of (a), and more preferably bonded at the para position.

[0172] m4 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, and even more preferably 0, 1 or 2. R 4 The bonding position of to the benzene ring is X + may be ortho, meta, or para relative to the bonding position of the benzene ring to which m4 is bonded. When m4 is 1 or 2, at least one R 4 X + is preferably bonded to the para or meta position relative to the bonding position of the benzene ring to which m4 is bonded. 4 X + is preferably bonded at the ortho- or meta-position with respect to the bonding position of the benzene ring to which it is bonded.

[0173] m7 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. R 7 The bonding position of to the benzene ring is X + The ortho, meta or para position may be any of the positions with respect to the bonding position of R. 7 But X + It is preferably bonded at the ortho- or meta-position relative to the bonding position of the above, and more preferably bonded at the meta-position.

[0174] m8 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0175] m9 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0176] When at least one of m8 and m9 is an integer of 1 or more, R 8 and / or R 9 The bonding position of to the benzene ring is X + The ortho, meta or para position may be any of the positions with respect to the bonding position of R. 8 and / or R 9 But X + It is preferably bonded at the meta or para position relative to the bonding position of (I), and more preferably bonded at the para position.

[0177] R 4 is a halogen atom or an alkyl group having 1 to 12 carbon atoms which may have a halogen atom (-CH contained in the alkyl group) 2 - may be replaced by -O- or -CO-.) is preferably a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (the -CH 2- may be replaced by -O- or -CO-.) is more preferred, and a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms or an alkyl group having 1 to 4 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-), and a fluorine atom, a bromine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-.) is more preferable, and a fluorine atom, an iodine atom, a trifluoromethyl group, a hydroxy group, a methoxy group, a methyl group or a t-butyl group is even more preferable.

[0178] R 7 , R 8 and R 9 each independently represents a halogen atom or an alkyl group having 1 to 12 carbon atoms which may have a halogen atom (-CH 2 - may be replaced by -O- or -CO-.) is preferably a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-.) is more preferred, and a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms or an alkyl group having 1 to 4 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-), and a fluorine atom, a bromine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-.) is more preferable, and a fluorine atom, an iodine atom, a trifluoromethyl group, a hydroxy group, a methoxy group, a methyl group or a t-butyl group is even more preferable.

[0179] In another embodiment, R8 or R 9 But -SO 2 Each independently may contain a group having -X 1 -R 10 or -X 1 -L 11 -X 2 -R 10 R 8 or R 9 -SO 2 When R contains a group having the formula - 1A or R 1B Contains -SO 2 It is preferably a group similar to the group having -.

[0180] Specific examples of the cation represented by formula (IC) include cations represented by formula (IC-1) or formula (IC-2) (hereinafter, these may be referred to as "cation (IC-1)" and "cation (IC-2)", respectively).

[0181] [ka]

[0182] [In the formula, all symbols have the same meaning as defined above.] When X is a sulfur atom and m10=1, R 7 and R 8 or R 8 and R 9 Combined, S + In particular, R 8 and R 9 Combined, S + It is preferable that the cation is a cation represented by the formula (IC′).

[0183] [ka]

[0184] [In the formula, X 7The symbols other than the above have the same meanings as above. X 7 is a single bond, -CH 2 -, -O-, -CO-, -SO-, -SO 2 - or -S-.

[0185] m8-1 represents an integer of 0 to 4, and when m8-1 is 2 or more, a plurality of R 8 may be the same or different from each other. m9-1 represents an integer of 0 to 4, and when m9-1 is 2 or more, a plurality of R 8 may be the same or different.] X 7 is a single bond, -CH 2 - or -O- is preferred.

[0186] Examples of the cation of the salt (I) include the cations represented by the following formulae (Ic-1) to (Ic-50).

[0187] [ka]

[0188] [ka]

[0189] [ka]

[0190] The anion (I) of the salt represented by formula (I) is an anion represented by formula (IA).

[0191] [ka]

[0192] [In formula (IA), all symbols have the same meaning as in formula (I)] In formula (IA), X 0 Examples of the hydrocarbon group represented by the formula include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkanediyl groups, alkenediyl groups, and alkynediyl groups, and alicyclic hydrocarbon groups), aromatic hydrocarbon groups, and combinations thereof. 2 - is -O-, -S-, -CO- or -SO 2 In the hydrocarbon group, CO 2 - The atom adjacent to is preferably a carbon atom, and in the aliphatic hydrocarbon group, 2 - More preferably, the atom adjacent to is a carbon atom.

[0193] Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, and a dodecane-1,12-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group.

[0194] Examples of the alkenediyl group include an ethenediyl group, a propenediyl group, an isopropenediyl group, a butenediyl group, an isobutenediyl group, a tert-butenediyl group, a pentenediyl group, a hexenediyl group, a heptenediyl group, an octenediyl group, an isooctenediyl group, and a nonenediyl group.

[0195] Examples of the alkynediyl group include an ethynediyl group, a propynediyl group, an isopropynediyl group, a butynediyl group, an isobutynediyl group, a tert-butynediyl group, a pentynediyl group, a hexynediyl group, an octynediyl group, and a nonynediyl group.

[0196] -CH contained in chain hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 The group substituted for - is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), thiol group (-CH 2 - is replaced by -S-), carbonyl group (-CH 2 - is replaced by -CO-), sulfonyl group (-CH 2 -But-SO 2 - substituted), oxy group (-CH contained in methylene group 2 - is replaced by -O-), alkoxy group (-CH 2 - is replaced by -O-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylcarbonyl group (-CH 2 - is replaced by -CO-), alkylcarbonyloxy group (-CH 2 -CH 2 - is replaced by -CO-O-), alkylthio group (a group in which -CH2- at any position in the alkyl group is replaced by -S-), alkylsulfonyl group (a group in which -CH 2 -But-SO 2 -), alkanediyloxy group (groups in which -CH at any position in the alkanediyl group is replaced by -), 2- is replaced by -O-), alkanediyloxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH 2 - is replaced by -CO-O-), alkanediylsulfonyl group (-CH at any position contained in the alkanediyl group) 2 -But-SO 2 -), alkanediylthio group (groups in which -CH at any position in the alkanediyl group is replaced with -CH 2 - is replaced with -S-.

[0197] Examples of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkylthio group, alkylsulfonyl group, alkanediyloxy group, alkanediyloxycarbonyl group, alkanediylcarbonyl group, alkanediylcarbonyloxy group, alkanediylsulfonyl group, and alkanediylthio group include the same groups as described above.

[0198] The substitution in the alkenediyl group or alkynediyl group may be any of the substitutions in the alkanediyl group exemplified above, as long as it contains a carbon-carbon double bond or a carbon-carbon triple bond at any position.

[0199] The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, even more preferably 1 to 18, still more preferably 1 to 12, even more preferably 1 to 9, even more preferably 1 to 6, and even more preferably 1 to 4.

[0200] The alicyclic hydrocarbon group may be monocyclic, polycyclic, or spirocyclic, and may be saturated or unsaturated. Examples of the divalent alicyclic hydrocarbon group include the groups shown below. The bonding site may be any position.

[0201] [ka]

[0202] Specific examples of the monocyclic divalent alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, a cyclohexene-3,6-diyl group, and a cyclooctane-1,5-diyl group. Examples of the polycyclic divalent alicyclic hydrocarbon group include polycyclic cycloalkanediyl groups such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, a 5-norbornene-2,3-diyl group, an adamantane-1,5-diyl group, and an adamantane-2,6-diyl group.

[0203] The alicyclic hydrocarbon group preferably has 3 to 36 carbon atoms, more preferably 3 to 24 carbon atoms, further preferably 3 to 18 carbon atoms, even further preferably 3 to 16 carbon atoms, and even further preferably 3 to 12 carbon atoms.

[0204] -CH contained in alicyclic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 The group substituted with - may form an ether ring, a ketone ring, a lactone ring, a sultone ring or an acetal ring, and specific examples thereof include the following groups: The bonding site may be at any position.

[0205] [ka]

[0206] The alicyclic hydrocarbon group is preferably a group represented by any one of formulas (y1) to (y11), (y44) to (y48), and (y59) to (y61), and more preferably a group represented by any one of formulas (y3), (y4), (y9), and (y11).

[0207] -CH contained in alicyclic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 The group substituted with - is preferably a group represented by any one of formulas (y12) to (y20), (y26), (y27), (y30), (y31), (y39) to (y43), and (y49) to (y71), and more preferably a group represented by any one of formulas (y14), (y15), (y16), (y20), (y26), (y27), (y30), (y31), (y39), (y40), (y42), (y43), (y49) to (y58), and (y62) to (y71).

[0208] Examples of the aromatic hydrocarbon group include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 36, more preferably 6 to 24, still more preferably 6 to 18, still more preferably 6 to 14, and still more preferably 6 to 10.

[0209] Examples of the hydrocarbon group combining two or more types include a group combining an alkanediyl group with an alicyclic hydrocarbon group and / or an aromatic hydrocarbon group, such as -alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-aromatic hydrocarbon group-, -aromatic hydrocarbon group-alkanediyl group-, etc. In addition, in the case of a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with an alkanediyl group, the terminal of the alkanediyl group may be an alkyl group such as a methyl group.

[0210] X 0The -CH 2 - is -O-, -S-, -CO- or -SO 2 When X is replaced with -, the number of carbon atoms before the replacement is the total number of carbon atoms in the hydrocarbon group. 0 When a substituent is bonded to a hydrocarbon group represented by the following formula (I), the number of carbon atoms before substitution is regarded as the total number of carbon atoms in the hydrocarbon group.

[0211] X 0 The hydrocarbon group represented by the following formula may have one or more substituents. X 0 Examples of the substituent that may be substituted include a hydroxy group, a halogen atom, a cyano group, and a nitro group.

[0212] X 0 When X contains an alicyclic hydrocarbon group or a group in which an aromatic hydrocarbon group and a chain hydrocarbon group are combined, 0 The chain hydrocarbon group bonded to the alicyclic hydrocarbon group or aromatic hydrocarbon group contained in X is substantially 0 In addition, X can be regarded as a substituent. 0 -CH contained in the hydrocarbon group 2 - is -O-, -S-, -SO 2 By the group replacing - or -CO-, X 0 can substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkylthio group, or an alkylsulfonyl group.

[0213] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. X 0 The hydrocarbon group represented by the formula (I) is preferably an aliphatic hydrocarbon group having 1 to 72 carbon atoms which may have a substituent (-CH 2 - is -O-, -S-, -CO- or -SO 2 -) or a hydrocarbon group having 6 to 72 carbon atoms including an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent, More preferably, it is a chain hydrocarbon group having 1 to 18 carbon atoms which may have a substituent (-CH 2 - may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 36 carbon atoms which may have a substituent (the -CH 2 - is -O-, -S-, -CO- or -SO 2 -), a group obtained by combining an alicyclic hydrocarbon group having 3 to 36 carbon atoms which may have a substituent with a chain hydrocarbon group having 1 to 18 carbon atoms which may have a substituent (the -CH contained in the alicyclic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced by -, and -CH 2 - may be replaced by -O- or -CO-), a group consisting of an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent, or a combination of an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent and a chain hydrocarbon group having 1 to 18 carbon atoms which may have a substituent (-CH contained in the chain hydrocarbon group). 2 - may be replaced by -O- or -CO-; More preferred are *-chain hydrocarbon group-, *-alicyclic hydrocarbon group-, a group combining *-alicyclic hydrocarbon group and chain hydrocarbon group-, *-alicyclic hydrocarbon group-chain hydrocarbon group-, *-chain hydrocarbon group-alicyclic hydrocarbon group-, a group combining *-alicyclic hydrocarbon group and chain hydrocarbon group-chain hydrocarbon group-, *-chain hydrocarbon group-alicyclic hydrocarbon group-, a group combining *-alicyclic hydrocarbon group and chain hydrocarbon group-chain hydrocarbon group-, *-chain hydrocarbon group-a group combining alicyclic hydrocarbon group and chain hydrocarbon group-, *-aromatic hydrocarbon group-, *-chain hydrocarbon group-aromatic hydrocarbon group-, *-aromatic hydrocarbon group-chain hydrocarbon group-, *-alicyclic hydrocarbon group-chain hydrocarbon group. a group consisting of a chain hydrocarbon group-alicyclic hydrocarbon group-, a *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, a group consisting of a combination of a *-alicyclic hydrocarbon group and a chain hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, a group consisting of a combination of a *-chain hydrocarbon group-alicyclic hydrocarbon group and a chain hydrocarbon group-chain hydrocarbon group-, a *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, or a group consisting of a combination of a *-chain hydrocarbon group-alicyclic hydrocarbon group and a chain hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-(wherein -CH contained in the alicyclic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced by -, and -CH 2 - may be replaced by -O- or -CO-, and the alicyclic hydrocarbon group, the aromatic hydrocarbon group and the chain hydrocarbon group may have a substituent. * is -COO - ) and More preferably, it is an *-alicyclic hydrocarbon group-, an *-alicyclic hydrocarbon group-chain hydrocarbon group-, an *-chain hydrocarbon group-alicyclic hydrocarbon group-, an *-aromatic hydrocarbon group- or an *-chain hydrocarbon group-aromatic hydrocarbon group-; Even more preferred are *-monocyclic alicyclic hydrocarbon group-, *-polycyclic alicyclic hydrocarbon group-, *-polycyclic alicyclic hydrocarbon group-chain hydrocarbon group-, *-chain hydrocarbon group-polycyclic alicyclic hydrocarbon group-, *-aromatic hydrocarbon group- or *-chain hydrocarbon group-aromatic hydrocarbon group-.

[0214] In the above group, the -CH2 - is -O-, -S-, -CO- or -SO 2 - may be replaced by -, and -CH 2 - may be replaced by -O- or -CO-, and the alicyclic hydrocarbon group, the aromatic hydrocarbon group and the chain hydrocarbon group may have a substituent. * is -COO - represents the bonding site with the carbon atom of

[0215] In the above groups, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 36, more preferably 3 to 24, even more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, and even more preferably 1 to 4. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 36, more preferably 6 to 24, even more preferably 6 to 18, still more preferably 6 to 14, and even more preferably 6 to 10.

[0216] In the above group, the alicyclic hydrocarbon group or aromatic hydrocarbon group is an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the —CH 2 - is -O-, -S-, -CO- or -SO 2 -), more preferably a group represented by any one of formulas (w1-1) to (w1-28), even more preferably a group represented by any one of formulas (w1-1) to (w1-6) and (w1-12) to (w1-26), and even more preferably a group represented by any one of formulas (w1-1) to (w1-3), (w1-6), (w1-15) to (w1-17), (w1-22) and (w1-25).

[0217] [ka]

[0218] [In formulas (w1-1) to (w1-28), The —CH 2 - is -O-, -S-, -CO- or -SO 2 - may be substituted. The binding site may be at any position. More specifically, the monocyclic alicyclic hydrocarbon group is a cycloalkanediyl group having 5 or 6 carbon atoms (the -CH 2 The above polycyclic alicyclic hydrocarbon group is preferably an adamantanediyl group, a norbornanediyl group, an adamantanelactonediyl group, a norbornanelactonediyl group, or an adamantanediyl group or a norbornanediyl group and a cycloalkanediyl group having 5 or 6 carbon atoms bonded to the adamantanediyl group or the norbornanediyl group via a spiro bond (the —CH contained in the adamantanediyl group, norbornanediyl group, and cycloalkanediyl group). 2 The -CH 2 -CH 3 -CH 4 -CH 5 -CH 6 -CH 7 -CH 8 -CH 9 -CH 10 -CH 11 -CH 12 -CH 13 -CH 14 -CH 15 -CH 16 -CH 17 -CH 18 -CH 19 -CH 20 -CH 31 -CH 19 -CH 21 -CH 32 -CH 16 -CH 17 -CH 22 -CH 33 -CH 19 -CH 23 -CH 34 -CH 19 -CH 25 -CH 35 -CH 18 -CH 36 -CH 19 -CH 26 -CH 37 -CH 19 -CH 27 -CH 38 -CH 39 -CH 40 -CH 50 -CH 39 -CH 41 -CH 51 -CH 22 -CH 35 -CH 42 -CH 52 -CH 36 -CH 2 -CH 2 - may be replaced by -O-CO-, and the cycloalkanediyl group may be an acetal ring.

[0219] In the above group, the chain hydrocarbon group is a chain hydrocarbon group having 1 to 12 carbon atoms (the —CH 2 - may be replaced by -O- or -CO-.) is preferably a chain hydrocarbon group having 1 to 8 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-.) is more preferred, and an alkanediyl group having 1 to 6 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-.) It is more preferable that the alkyl group has a fluorine atom.

[0220] In the above chain hydrocarbon group and alicyclic hydrocarbon group, the substituent is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or a combination of these, and more preferably a fluorine atom, a hydroxy group, or a perfluoroalkyl group having 1 to 4 carbon atoms.

[0221] In the above aromatic hydrocarbon group, the substituent is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or a combination of these, and more preferably a fluorine atom, an iodine atom, a hydroxy group, or a perfluoroalkyl group having 1 to 4 carbon atoms.

[0222] More specifically, X 0 is preferably a single bond or an aliphatic hydrocarbon group having 1 to 72 carbon atoms which may have a substituent (-CH contained in the aliphatic hydrocarbon group). 2 - is -O-, -S-, -CO- or -SO 2 -) or a hydrocarbon group having 6 to 72 carbon atoms including an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent (the -CH 2 - is -O-, -S-, -CO- or -SO 2 -, and the aromatic hydrocarbon group and the hydrocarbon group may have a substituent, More preferably, it is a single bond, a chain hydrocarbon group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, a group in which a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 36 carbon atoms are combined, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group in which an aromatic hydrocarbon group having 6 to 36 carbon atoms and a chain hydrocarbon group having 1 to 18 carbon atoms are combined, and even more preferably, it is a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, a group in which an alicyclic hydrocarbon group having 3 to 18 carbon atoms and a chain hydrocarbon group having 1 to 8 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group in which an aromatic hydrocarbon group having 6 to 18 carbon atoms and a chain hydrocarbon group having 1 to 8 carbon atoms are combined. However, the chain hydrocarbon group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, a hydroxy group or a hydroxymethyl group, and the -CH 2 - may be replaced by -O- or -CO-.

[0223] X 0 More preferably, it is a single bond, an alkanediyl group having 1 to 6 carbon atoms, a cycloalkanediyl group having 5 to 6 carbon atoms, a norbornanediyl group, an adamantanediyl group, a phenylene group, or a COO - a group consisting of an alkanediyl group having 1 to 6 carbon atoms bonded to the alkanediyl group, and a cycloalkanediyl group, adamantanediyl group, norbornanediyl group or phenylene group having 5 to 6 carbon atoms bonded to the alkanediyl group, or - and a cycloalkanediyl group having 5 to 8 carbon atoms bonded in a spiro bond; and the -CH 2- may be replaced by -O- or -CO-, and the alkanediyl group, the cycloalkanediyl group, the adamantanediyl group, the norbornanediyl group and the phenylene group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, a hydroxy group or a hydroxymethyl group.

[0224] X 0 In the formula, -CH contained in the cycloalkanediyl group 2 When - is replaced by -O-, an acetal ring may be formed, and the -CH contained in the cycloalkanediyl group, the adamantanediyl group, and the norbornanediyl group may be used. 2 When - is replaced by -O- or -CO-, -CH- contained in a cycloalkanediyl group, an adamantanediyl group, or a norbornanediyl group is 2 CH 2 - may be replaced by -O-CO- or -CO-O- to form a lactone ring.

[0225] R bb1 The halogen atoms in R 4 ~R 9 The same halogen atoms as those listed in R are included. bb1 The alkyl group which may have a halogen atom is, as far as the upper limit of the carbon number allows, R 4 ~R 9 Examples of the alkyl group and the haloalkyl group include the same alkyl group and the haloalkyl group as those exemplified above.

[0226] R bb1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, even more preferably a hydrogen atom or a methyl group, and even more preferably a methyl group.

[0227] R 3 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, even more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0228] X 10 is a group represented by the formula *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10).

[0229] [ka]

[0230] In formula (X10), Ax is R bb1 represents a bond type bonding to the carbon atom to which is bonded, and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond.

[0231] Ay is L 10 , X 0 Or COO - and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond.

[0232] Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4, and when mx is an integer of 2 or more, multiple Rx's may be the same or different. When either Ax or Ay is a single bond, the other is preferably one or more bonds selected from the group consisting of an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond.

[0233] When either Ax or Ay is an amide bond, -CO-NR 3 A bond represented by - is preferred. Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group or an ethyl group.

[0234] mx is preferably 0, 1 or 2. The bonding position of Ay in the phenylene group is preferably the meta or para position relative to the bonding position of Ax, and more preferably the para position.

[0235] X 10 For example, the following formula (X 10 -1)~Formula(X 10 -10) is a group represented by *. bb1 represents the bonding site with the carbon atom to which L is bonded. 10 , X 0 Or COO - It represents the binding site with

[0236] [ka]

[0237] [Formula(X 10 -1)~Formula(X 10 -10) Medium, *, ** are binding sites, * is R bb1 represents the bonding site with the carbon atom to which it is bonded. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms.

[0238] mx represents an integer of 0 to 4. X 20 is -O- or -NR 3 - represents. R 3 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.] Expression(X 10 -1)~Formula(X 10 Specific examples of the group represented by -10) include the following groups.

[0239] [ka]

[0240] Among them, X 10 is a single bond or a group of the formula (X 10 -1') and formula (X 10 -3′)~Formula(X 10 -10'), a single bond or a group represented by the formula (X 10 -1′), formula (X 10 -4′), formula (X 10 -5′), formula (X 10 -6') and formula (X 10 -10') is more preferably a single bond, a group represented by the formula (X 10 -1'), a group represented by the formula (X 10 -5') or a group represented by the formula (X 10 -6') is more preferable.

[0241] L 10 Examples of the hydrocarbon group having 1 to 36 carbon atoms include aliphatic hydrocarbon groups (chain hydrocarbon groups and alicyclic hydrocarbon groups such as alkanediyl groups, alkenediyl groups, and alkynediyl groups), aromatic hydrocarbon groups, and the like, and may be a hydrocarbon group formed by combining two or more of these groups.

[0242] Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, and a dodecane-1,12-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl groups. The terminal of the branched alkanediyl group may be a methyl group.

[0243] Examples of the alkenediyl group include an ethenediyl group, a propenediyl group, an isopropenediyl group, a butenediyl group, an isobutenediyl group, a tert-butenediyl group, a pentenediyl group, a hexenediyl group, a heptenediyl group, an octenediyl group, an isooctenediyl group, and a nonenediyl group.

[0244] Examples of the alkynediyl group include an ethynediyl group, a propynediyl group, an isopropynediyl group, a butynediyl group, an isobutynediyl group, a tert-butynediyl group, a pentynediyl group, a hexynediyl group, an octynediyl group, and a nonynediyl group.

[0245] The chain hydrocarbon group preferably has 1 to 12 carbon atoms, more preferably 1 to 9 carbon atoms, even more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.

[0246] The divalent alicyclic hydrocarbon group may be any of monocyclic, polycyclic, and spirocyclic. Examples of the divalent alicyclic hydrocarbon group include the groups shown below. The bonding site can be any position.

[0247] [ka]

[0248] Specific examples of the monocyclic divalent alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, a cyclohexene-3,6-diyl group, and a cyclooctane-1,5-diyl group. Examples of the polycyclic divalent alicyclic hydrocarbon group include polycyclic cycloalkanediyl groups such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, a 5-norbornene-2,3-diyl group, an adamantane-1,5-diyl group, and an adamantane-2,6-diyl group.

[0249] The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and further preferably 3 to 12 carbon atoms. Examples of the divalent aromatic hydrocarbon group include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and further preferably 6 to 10 carbon atoms.

[0250] Examples of the hydrocarbon group combining two or more types include a group combining an alkanediyl group with an alicyclic hydrocarbon group and / or an aromatic hydrocarbon group, such as -alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-aromatic hydrocarbon group-, -aromatic hydrocarbon group-alkanediyl group-, etc. In addition, in the case of a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with an alkanediyl group, the terminal of the alkanediyl group may be an alkyl group such as a methyl group.

[0251] L 10 -CH contained in the hydrocarbon group having 1 to 36 carbon atoms 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced. L 10 When the hydrocarbon group having 1 to 36 carbon atoms has a substituent, or when the hydrocarbon group contains -CH 2 - is -O-, -S-, -CO- or -SO 2 When it is replaced with -, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the hydrocarbon group.

[0252] -CH contained in the hydrocarbon group 2 -, -O-, -S-, -SO 2 The group substituted for - or -CO- is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2- is replaced by -O-CO-), thiol group (-CH 2 - is replaced by -S-), carbonyl group (-CH 2 - is replaced by -CO-), sulfonyl group (-CH 2 -But-SO 2 - substituted), oxy group (-CH contained in methylene group 2 - is replaced by -O-), thio group (-CH 2 - is replaced by -S-), alkoxy group (-CH 2 - is replaced by -O-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylcarbonyl group (-CH 2 - is replaced by -CO-), alkylcarbonyloxy group (-CH 2 -CH 2 - is replaced by -CO-O-), alkanediyloxy group (-CH at any position in the alkanediyl group) 2 - is replaced by -O-), alkanediyloxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH 2 - is replaced by -CO-O-), alkylthio group (-CH 2 - is replaced by -S-), alkylsulfonyl group (-CH 2 -But-SO 2-), alkanediylsulfonyl group (a group in which -CH at any position in the alkanediyl group is replaced by -), 2 -But-SO 2 -), alkanediylthio group (groups in which -CH at any position in the alkanediyl group is replaced with -CH 2 Examples of such groups include a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a combination of two or more of these groups.

[0253] Examples of the alkoxy group include alkoxy groups having 1 to 35 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0254] Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 35 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 36 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 35 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. The number of carbon atoms in the alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 to 3.

[0255] The alkanediyloxy group includes an alkanediyloxy group having 1 to 35 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0256] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 35 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 36 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, etc. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 35 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. The alkanediyloxycarbonyl group, alkanediylcarbonyl group, and alkanediylcarbonyloxy group preferably have 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, further preferably 2 to 4 carbon atoms, and even more preferably 2 to 3 carbon atoms.

[0257] The alkylthio group includes an alkylthio group having 1 to 35 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0258] The alkylsulfonyl group includes alkylsulfonyl groups having 1 to 35 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0259] The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 35 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0260] The alkanediylthio group includes an alkanediylthio group having 1 to 35 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0261] Examples of the cycloalkoxy group include a cycloalkoxy group having 3 to 35 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include a cycloalkylalkoxy group having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of the alkoxycarbonyloxy group include an alkoxycarbonyloxy group having 2 to 34 carbon atoms, such as a butoxycarbonyloxy group. The number of carbon atoms in the cycloalkoxy group and the cycloalkylalkoxy group is preferably 3 to 11, more preferably 3 to 6. The number of carbon atoms in the alkoxycarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 to 3. Examples of the aromatic hydrocarbon group-carbonyloxy group include an aromatic hydrocarbon group-carbonyloxy group having 7 to 35 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include an aromatic hydrocarbon group-carbonyl group having 7 to 36 carbon atoms, such as a benzoyl group. The aromatic hydrocarbon group-oxy group includes an aromatic hydrocarbon group-oxy group having 6 to 35 carbon atoms, such as a phenyloxy group.

[0262] In addition, -CH contained in alicyclic hydrocarbon groups 2 - is -O-, -S-, -CO- or -SO 2 Examples of the group substituted with - include the groups shown below. -O- or -CO- in the groups shown below can be replaced with -S- or -SO 2 The binding site may be at any position.

[0263] [ka]

[0264] L 10 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, and the like. L 10contains a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group such as an alkanediyl group, the chain hydrocarbon group such as an alkanediyl group bonded to the alicyclic hydrocarbon group or aromatic hydrocarbon group (the terminal of the alkanediyl group may be an alkyl group such as a methyl group) can be regarded as substantially a substituent of the alicyclic hydrocarbon group or aromatic hydrocarbon group. 10 -CH contained in the hydrocarbon group 2 - is replaced by -O- or -CO-, etc., 10 can substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, or an alkylcarbonyloxy group.

[0265] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 10 The hydrocarbon group having 1 to 36 carbon atoms may have one or more substituents.

[0266] L 10 represents a single bond, an alkanediyl group having 1 to 6 carbon atoms (provided that the -CH 2 - may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms (however, the cyclic hydrocarbon group may have a substituent, and the -CH 2 -, -O-, -S-, -SO 2 - or -CO- may be substituted.) or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms with a cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the cyclic hydrocarbon group may have a substituent, and the -CH 2 - may be replaced by -O- or -CO-, and -CH contained in the cyclic hydrocarbon group 2 -, -O-, -S-, -SO 2 - or -CO-) is preferable, and a single bond, an alkanediyl group having 1 to 4 carbon atoms (with the proviso that the -CH 2may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the -CH 2 -, -O-, -S-, -SO 2 - or -CO-), an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (with the proviso that -CH 2 - may be replaced by -O- or -CO-, and -CH contained in the alicyclic hydrocarbon group 2 -, -O-, -S-, -SO 2 - or -CO-) or a group formed by combining an alkanediyl group having 1 to 4 carbon atoms with an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent (with the proviso that the -CH 2 - may be replaced by -O- or -CO-.) is more preferred, and a single bond, an alkanediyl group having 1 to 4 carbon atoms (with the proviso that -CH 2 may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the -CH 2 - may be replaced by -O- or -CO-), a phenylene group which may have a substituent, a group formed by combining an alkanediyl group having 1 to 4 carbon atoms with an alicyclic hydrocarbon group having 3 to 18 carbon atoms (with the proviso that -CH 2 - may be replaced by -O- or -CO-, and -CH contained in the alicyclic hydrocarbon group 2 - may be replaced by -O- or -CO-; or a group formed by combining an alkanediyl group having 1 to 4 carbon atoms with a phenylene group which may have a substituent (provided that the -CH 2 - may be replaced by -O- or -CO-.) is more preferable, and a single bond or an alkanediyl group having 1 to 4 carbon atoms (with the proviso that -CH 2- may be replaced by -O- or -CO-.

[0267] Examples of the anion (I) include the following anions:

[0268] [ka]

[0269] [ka]

[0270] Specific examples of the carboxylate (I) include salts of any combination of the above-mentioned cations and anions. Specific examples of the salt (I) are shown in the table below. In the following table, each symbol represents the symbol attached to the structure representing the above-mentioned anion and cation, and "~" indicates that the salt (I) corresponds to the anion (I). For example, the carboxylate salt (I-1) is a salt consisting of the anion represented by the formula (Ia-1) and the cation represented by the formula (Ic-1), the salt (I-2) is a salt consisting of the anion represented by the formula (Ia-2) and the cation represented by the formula (Ic-1), and the salt (I-41) is a salt consisting of the anion represented by the formula (Ia-1) and the cation represented by the formula (Ic-2).

[0271] [ka]

[0272] [Table 1] JPEG2025071078000039.jpg37170

[0273] Among these, the carboxylate (I) is preferably a salt obtained by combining an anion represented by any one of formulas (Ia-1) to (Ia-12), and (Ia-31) to (Ia-40), and a cation represented by any one of formulas (Ic-1) to (Ic-50).

[0274] <Method for producing carboxylate (I)> The carboxylate (I) can be produced by reacting a salt represented by the formula (Ia) with a salt represented by the formula (Ib) in a solvent.

[0275] [ka]

[0276] [In the formula, all symbols have the same meaning as defined above.] Examples of the solvent used in this reaction include chloroform, acetonitrile, and ion-exchanged water.

[0277] The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours. The salt represented by formula (Ib) can be produced by reacting the compound represented by formula (I-b1) with silver oxide in a solvent.

[0278] [ka]

[0279] [In the formula, all symbols have the same meaning as defined above.] Solvents for this reaction include chloroform, acetonitrile, and the like. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0280] Examples of the compound represented by formula (I-b1) include compounds represented by the following formulas: These compounds are easily available on the market, or can be easily produced by known methods.

[0281] [ka]

[0282] In the salt (Ic), R 1A But *-OL 11 -CO-OR 10 The salt represented by formula (I-c1) can be produced by reacting a salt represented by formula (Ie) with a compound represented by formula (If) in a solvent in the presence of a base catalyst.

[0283] [ka]

[0284] [In the formula, all symbols have the same meaning as defined above.] The base includes potassium carbonate, potassium iodide, pyridine, triethylamine and the like.

[0285] Examples of the solvent include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, and water. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0286] Examples of the compound represented by formula (If) include the compounds represented by the following formulas, which are readily available on the market and can also be readily produced by known methods.

[0287] [ka]

[0288] The salt represented by formula (Ie) can be produced by passing the salt represented by formula (Ie') through an ion exchange resin.

[0289] [ka]

[0290] [In the formula, all symbols have the same meaning as defined above.] The ion exchange resin may be, for example, ion exchange resin (No. 6, 100-200 mesh, manufactured by Wako Pure Chemical Industries, Ltd.).

[0291] The solvent may be methanol or the like. When X is a sulfur atom, the salt represented by formula (Ie′) can be produced by reacting a compound represented by formula (Ig) with a compound represented by formula (Ih) in the presence of trifluoroacetic anhydride and trifluoromethanesulfonic acid in a solvent, followed by treating with a base.

[0292] [ka]

[0293] [In the formula, all symbols have the same meaning as defined above.] Examples of the solvent include chloroform, monochlorobenzene, and acetonitrile.

[0294] The reaction temperature is usually 15° C. to 100° C., and the reaction time is usually 0.5 to 24 hours. Examples of the compound represented by formula (Ig) include compounds represented by the following formula, and are readily available on the market.

[0295] [ka]

[0296] Examples of the compound represented by formula (Ih) include compounds represented by the following formula, and are readily available on the market.

[0297] [ka]

[0298] When X is an iodine atom, the salt represented by formula (Ie) can be produced by reacting a compound represented by formula (Ii) with a compound represented by formula (Ih) in the presence of potassium peroxymonosulfate and sulfuric acid in a solvent, followed by treatment with hydrochloric acid.

[0299] [ka]

[0300] [In the formula, all symbols have the same meaning as defined above.] Examples of the solvent include chloroform, monochlorobenzene, and acetonitrile.

[0301] The reaction temperature is usually 15° C. to 100° C., and the reaction time is usually 0.5 to 24 hours. Examples of the compound represented by formula (Ii) include compounds represented by the following formula, and are readily available on the market.

[0302] [ka]

[0303] In the salt (Ic), R 1A But *-OR 10 The salt represented by formula (I-c2) can be produced by reacting a salt represented by formula (Ie) with a compound represented by formula (I-f1) in a solvent in the presence of a base catalyst.

[0304] [ka]

[0305] [In the formula, all symbols have the same meanings as defined above. X X represents a hydroxy group or a chlorine atom. Examples of the catalyst include carbonyldiimidazole, potassium carbonate, potassium iodide, pyridine, triethylamine, potassium hydroxide, and sodium hydroxide.

[0306] Examples of the solvent include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, and water. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0307] Examples of the compound represented by formula (I-f1) include the compounds represented by the following formulas, which are readily available on the market or can be readily produced by known methods.

[0308] [ka]

[0309] In the salt (Ic), R 1A But, *-O-CO-OR 10 The salt represented by formula (I-c3) can be produced by reacting a salt represented by formula (Ie) with a compound represented by formula (I-f2) in a solvent in the presence of carbonyldiimidazole.

[0310] [ka]

[0311] [In the formula, all symbols have the same meaning as defined above.] Examples of the solvent include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, and water.

[0312] The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours. The compound represented by formula (I-f2) includes corresponding compounds among the compounds represented by formula (I-f1), and is easily available on the market, and can also be easily produced by known production methods.

[0313] In the salt (Ic), R 1A But, *-O-CO-R 10 The salt represented by formula (I-c4) can also be produced by reacting a salt represented by formula (Ie) with a catalyst represented by formula (I-f3) in a solvent.

[0314] [ka]

[0315] [In the formula, all symbols have the same meaning as defined above.] Examples of the catalyst include carbonyldiimidazole, potassium carbonate, potassium iodide, pyridine, triethylamine, potassium hydroxide, and sodium hydroxide.

[0316] Examples of the solvent include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, and water. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0317] Examples of the compound represented by formula (I-f3) include the compounds represented by the following formulas, and are readily available on the market.

[0318] [ka]

[0319] In the salt (Ic), R 1B But *-OL11 -CO-OR 10 , *-OR 10 OR*-O-CO-OR 10 and a salt R 1A and R 1B But *-OL 11 -CO-OR 10 , *-OR 10 OR*-O-CO-OR 10 The salts each having the formula R 1A Ga*-OL 11 -CO-OR 10 , *-OR 10 OR*-O-CO-OR 10 In the reaction scheme used in the example of the production method of the salt, the salt represented by formula (1-e) can be replaced with a salt represented by the following formula (Ie'') or formula (Ie''').

[0320] [ka]

[0321] [In the formula, all symbols have the same meaning as defined above.] [Structural unit derived from a carboxylate represented by formula (I)] The structural unit derived from the carboxylate represented by formula (I) is a structural unit represented by formula (IP) (hereinafter sometimes referred to as "structural unit (IP)").

[0322] [ka]

[0323] [In the formula, all symbols have the same meaning as defined above.] The structural unit (IP) is the CH 2 =CR bb1 This shows the state in which the double bond is cleaved.

[0324] Such a structural unit (IP) functions as a carboxylic acid generator like the carboxylate (I), and also functions as a structural unit constituting a compound or resin. [Resin containing structural unit (IP) derived from carboxylate represented by formula (I)] The resin of the present invention is a resin containing a structural unit (IP) derived from a carboxylate represented by formula (I) (hereinafter, may be referred to as "resin (Ap)").

[0325] The resin (Ap) may be a homopolymer containing one type of structural unit (IP) or a copolymer containing two or more types of structural units (IP). The resin (Ap) may also contain a structural unit other than the structural unit (IP). As the structural unit other than the structural unit (IP), as described below, there may be mentioned a structural unit having an acid labile group (hereinafter, sometimes referred to as "structural unit (a1)") and a structural unit other than the structural unit (a1). As the structural unit other than the structural unit (a1), there may be mentioned a structural unit not having an acid labile group (hereinafter, sometimes referred to as "structural unit (s)") and a structural unit known in the art. Here, the "acid labile group" means a group having a leaving group, which is released by contact with an acid, and the structural unit is converted into a structural unit having a hydrophilic group (e.g., a hydroxyl group or a carboxyl group).

[0326] The content of the structural unit (IP) is 0.1 mol% or more, preferably 0.5 mol% or more, more preferably 0.8 mol% or more, and even more preferably 1 mol% or more, based on the total structural units of the resin (Ap). Also, it is 100 mol% or less, preferably 50 mol% or less, more preferably 30 mol% or less, and even more preferably 10 mol% or less. Specifically, it is 0.1 to 100 mol%, preferably 0.5 to 50 mol%, more preferably 0.8 to 30 mol%, and even more preferably 1 to 10 mol%.

[0327] In particular, when the resin (Ap) is used in a resist composition, as described below, it is preferable that the resin (Ap) further contains the structural unit (a1) in addition to the structural unit (IP). Furthermore, as described below, when the resin (Ap) is used in a resist composition, regardless of whether it contains the structural unit (a1), it may be used in combination with a resin containing the structural unit (a1) (hereinafter sometimes referred to as "resin (A)"). Hereinafter, the resin (Ap) and / or the resin (A) may be referred to as "resin (A), etc."

[0328] The resin (Ap) and the resin (A) preferably further contain a structural unit other than the structural unit (a1). <Structural unit (a1)> The structural unit (a1) is derived from a monomer having an acid labile group (hereinafter sometimes referred to as "monomer (a1)").

[0329] The acid labile group contained in the resin (A) etc. is preferably a group represented by formula (1) (hereinafter also referred to as group (1)) and / or a group represented by formula (2) (hereinafter also referred to as group (2)).

[0330] [ka]

[0331] [In formula (1), R a1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, or R a1 and R a2 are bonded to each other to form, together with the carbon atom to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom.

[0332] ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * denotes a binding site.]

[0333] [ka]

[0334] [In formula (2), R a1′ and R a2′ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a3′ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2′ and R a3′ are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded and X, and the —CH 2 - may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom.

[0335] X represents an oxygen atom or a sulfur atom. na ′ represents 0 or 1. * denotes a binding site.] R a1 , R a2 and R a3 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group.

[0336] R a1 , R a2 and R a3 Examples of the alkenyl group in include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group.

[0337] R a1 , R a2 and R a3The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site). R a1 , R a2 and R a3 The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms.

[0338] [ka]

[0339] R a1 , R a2 and R a3 Examples of the aromatic hydrocarbon group in include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and an alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or a cycloalkylalkyl group such as a methylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group.

[0340] Preferably, ma is 0 and na is 1. R a1 and R a2 When they are bonded to each other to form an alicyclic hydrocarbon group, -C(R a1)(R a2 )(R a3 ) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-.

[0341] [ka]

[0342] R a1′ , R a2′ and R a3′ Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups.

[0343] Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups are R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above. R a2′ and R a3′ When they are bonded to each other to form a heterocyclic group together with the carbon atom to which they are bonded and X, -C(R a1′ )(R a2′ )-XR a3′ Examples of the group include the following: * represents a binding site.

[0344] [ka]

[0345] R a1 , R a2 , R a3 , R a1 , R a2′ and R a3′ The halogen atom which may be contained includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a1′ and R a2′ At least one of these is preferably a hydrogen atom.

[0346] na' is preferably 0. Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 is an alkyl group, ma = 0, and na = 1. As the group, a tert-butoxycarbonyl group is preferable.

[0347] In formula (1), R a1 , R a2 together with the carbon atom to which they are attached form an adamantyl group, R a3 is an alkyl group, ma=0, and na=1. In formula (1), R a1 and R a2 are each independently an alkyl group; R a3 is an adamantyl group, ma=0, and na=1.

[0348] Specific examples of the group (1) include the following groups: * represents a binding site.

[0349] [ka]

[0350] [ka]

[0351] Specific examples of the group (2) include the following groups: * represents a bonding site.

[0352] [ka]

[0353] The monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid labile group. Of the (meth)acrylic monomers having an acid labile group, preferred are those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. By using a resin (A) or the like having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group in a resist composition, the resolution of the resist pattern can be improved.

[0354] Examples of the structural unit derived from the (meth)acrylic monomer having the group (1) include a structural unit represented by formula (a1-0) (hereinafter, sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter, sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter, sometimes referred to as structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1) and the structural unit (a1-2), more preferably at least one structural unit selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2). These may be used alone or in combination of two or more.

[0355] [ka]

[0356] [In formulae (a1-0), (a1-1) and (a1-2), all symbols have the same meaning as defined above.] R a01 , R a4 , R a5 The halogen atom in the formula (I) includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

[0357] R a01 , R a4 , R a5Examples of the alkyl group which may have a halogen atom in the above formula include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group.

[0358] R a01 , R a4 and R a5 is preferably a hydrogen atom or a methyl group, and more preferably a methyl group. L a01 , L a1 and L a2 is preferably an oxygen atom or -O-(CH 2 ) k01 It is -CO-O- (wherein k01 is preferably an integer of any one of 1 to 4, more preferably 1), and more preferably an oxygen atom.

[0359] R a02 , R a03 and R a04 The alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group and combinations thereof in the formula (1) are R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above.

[0360] R a6 and R a7 The alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof in the formula (1) include Ra1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above.

[0361] R a02 , R a03 , and R a04 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0362] R a6 and R a7 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group.

[0363] R a6 and R a7 The alkenyl group in is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group.

[0364] R a02 , R a03 , R a04 , R a6 and R a7 The alicyclic hydrocarbon group preferably has 5 to 12 carbon atoms, and more preferably 5 to 10 carbon atoms. R a02 , R a03 , R a04 , R a6 and R a7 The aromatic hydrocarbon group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms.

[0365] In the group in which an alkyl group and an alicyclic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the alicyclic hydrocarbon group is preferably 18 or less. In the group in which an alkyl group and an aromatic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the aromatic hydrocarbon group is preferably 18 or less.

[0366] R a02 and R a03 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, phenyl group or naphthyl group which may have a halogen atom.

[0367] R a04 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, cyclohexyl group or adamantyl group which may have a halogen atom.

[0368] R a6 and R a7 are each independently preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom, or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group or naphthyl group which may have a halogen atom, and even more preferably an ethyl group, isopropyl group, t-butyl group, ethenyl group or phenyl group which may have a halogen atom.

[0369] m1' is preferably an integer of 0 to 3, and more preferably 0 or 1. n1 is preferably an integer of 0 to 3, and more preferably 0 or 1.

[0370] n1' is preferably 0 or 1. Examples of the structural unit (a1-0) include a structural unit represented by any one of formulas (a1-0-1) to (a1-0-24) and R a01and structural units in which the methyl group corresponding to the formula (a1-0-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom) or another alkyl group. Structural units represented by any of formulas (a1-0-1) to (a1-0-10), (a1-0-13), (a1-0-14) and (a1-0-19) to (a1-0-24) are preferred.

[0371] [ka]

[0372] Examples of the structural unit (a1-1) include structural units derived from monomers described in JP 2010-204646 A. Among them, structural units represented by any one of formulas (a1-1-1) to (a1-1-7) and R in the structural unit (a1-1) are a4 In the above formula (a1-1-1), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-2), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-3), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-4), a structural unit is more preferred.

[0373] [ka]

[0374] The structural unit (a1-2) includes a structural unit represented by any one of formulas (a1-2-1) to (a1-2-20) and R a5 and structural units in which a methyl group corresponding to the formula (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20) are replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group.

[0375] [ka]

[0376] When the resin (A) etc. contains the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these units is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total structural units of the resin (A) etc. Also, 95 mol% or less is mentioned, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, 10 to 95 mol% is mentioned, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, even more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%.

[0377] When the resin (A) or the like contains the structural unit (a1-0), the content thereof is 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, even more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, and even more preferably 35 mol% or more, based on the total structural units of the resin (A) or the like. Also, the content is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, and even more preferably 60 mol% or less. Specifically, the content is 5 to 80 mol%, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%.

[0378] When the resin (A) etc. contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these units is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total structural units of the resin (A) etc. Also, 95 mol% or less is included, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, 10 to 90 mol% is included, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, even more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and even more preferably 20 to 70 mol%.

[0379] An example of the structural unit (a1) having a group (2) is a structural unit represented by formula (a1-4) (hereinafter, sometimes referred to as "structural unit (a1-4)").

[0380] [ka]

[0381] [In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0382] R a17represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.

[0383] A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH 2 - is -O-, -CO- or -NR a18 - may be replaced.

[0384] R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -CO- to which they are bonded, and the -CH 2 - may be replaced by -O- or -S-.

[0385] na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the multiple parentheses may be the same or different. na11 represents an integer of 0 to 4. When na11 is 2 or more, multiple R a17 may be the same or different from each other.

[0386] mc represents an integer from 0 to 2. R a1 and R a17Examples of the halogen atom in include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom.

[0387] R a1 and R a17 Examples of the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, further preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0388] R a1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and further preferably a hydrogen atom or a methyl group. R a17 Examples of the alkoxy group in include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and further preferably a methoxy group.

[0389] R a17In the above, examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group may be an alkoxyalkyl group having 2 to 8 carbon atoms, preferably an alkoxyalkyl group having 2 to 4 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and further preferably a methoxymethyl group.

[0390] R a17 Examples of the alkoxyalkoxy group in include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group may be an alkoxyalkoxy group having 2 to 8 carbon atoms, preferably an alkoxyalkoxy group having 2 to 4 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group.

[0391] R a17 Examples of the alkylcarbonyl group in include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group may be an alkylcarbonyl group having 2 to 4 carbon atoms, preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group.

[0392] R a17 In the above formula, examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group may be an alkylcarbonyloxy group having 2 to 4 carbon atoms, preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group.

[0393] R a17is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0394] A a11 Examples of the alkanediyl group include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl groups. and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, decane-1,9-diyl, and undecane-1,10-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2.

[0395] R a18 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a11 -CH contained in the alkanediyl group 2 - is -O-, -CO- or -NR a18 When it is replaced with -, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the alkanediyl group.

[0396] A a11 -CH contained in the alkanediyl group 2 - is -O-, -CO- or -NR a18 The group substituted for - is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), carbonyl group (-CH 2 - is replaced by -CO-), oxy group (-CH 2 - is replaced by -O-), amino group (-CH 2 -But -NR a18 - substituted), alkoxy group (-CH at any position in the alkyl group) 2 - is replaced by -O-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylcarbonyl group (-CH 2 - is replaced by -CO-), alkylamino group (-CH at any position in the alkyl group) 2 -But -NR a18 -substituted group), peptide group (-CH contained in ethylene group) 2 -CH 2 -But-CO-NR a18 -), alkanediyloxy group (groups in which -CH at any position in the alkanediyl group is replaced by -), 2 - is replaced by -O-), alkanediyloxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH2 - is replaced by -CO-O-), alkanediylsulfonyl group (-CH at any position contained in the alkanediyl group) 2 -But-SO 2 -), alkanediylthio group (groups in which -CH at any position in the alkanediyl group is replaced with -CH 2 - is replaced by -S-), alkanediylamino group (-CH at any position contained in the alkanediyl group) 2 -But -NR a18 These substituted groups include those exemplified in this specification, within the range permitted by the upper limit of the carbon number.

[0397] The alkylamino group includes alkylamino groups having 1 to 11 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, and an octylamino group. The number of carbon atoms in the alkylamino group is preferably 1 to 8, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0398] The alkanediylamino group includes an alkanediylamino group having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0399] For example, A a11 -CH contained in the alkanediyl group 2 - is -O-, -CO- or -NR a18 Groups substituted with - include *-O-, *-CO-O-, *-O-CO-, *-CO-OA a12 -CO-O-, *-O-CO-A a12 -O-, *-OA a12 -CO-O-, *-CO-OA a12 -O-CO-, *-O-CO-A a12-O-CO-, *-CO-NR a18 Among them, *-CO-O- and *-CO-OA a12 -CO-O-, *-OA a12 -CO-O-, *-CO-NR a18 - is preferred, where A a12 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a1 A represents the bonding site with the carbon atom to which it is attached. a12 The alkanediyl group of A is as follows, within the upper limit of the carbon number. a11 Examples of the alkanediyl groups include those shown above.

[0400] A a11 is a single bond, *-CO-O- or *-CO-OA a12 -CO-O- is preferred, and a single bond, *-CO-O- or *-CO-O-CH 2 It is more preferably -CO-O-, and further preferably a single bond or *-CO-O-.

[0401] na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and further preferably 0 or 1.

[0402] mc is preferably 0 or 1. R a34 , R a35 and R a36 Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group consisting of a combination thereof.

[0403] Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site):

[0404] [ka]

[0405] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (e.g., alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, and norbornylethyl group), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. In particular, R a36 Examples of the alkyl group include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these groups.

[0406] R a35 and R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms that is formed by bonding together with the -CO- to which they are bonded include the following groups. * represents a bonding site, and one of the groups is R a34 This is the binding site for

[0407] [ka]

[0408] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group.

[0409] R a36 The hydrocarbon group in R is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. a36 The alkyl group and the alicyclic hydrocarbon group in R are preferably unsubstituted. a36 The aromatic hydrocarbon group in is preferably an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0410] -OC(R a34 )(R a35 )-OR a36 is eliminated on contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxy group or a carboxy group.

[0411] -X a1 -OC(R a34 )(R a35 )-OR a36 In the case of a benzene ring, A a11 It is preferable that at least one of them is bonded to the o-position or the m-position, and more preferable that it is bonded to the p-position. In the case of a naphthalene ring, A a11 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions.a11 When the bonding position of A is the 2-position, it may be bonded to any of the 1-position and the 3-8-positions. a11 When the bonding position of A is the 1st position, at least one of them is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. a11 When the bonding position is the 2-position, it is preferably bonded to the 4- to 7-positions, and more preferably bonded to the 5- or 6-position.

[0412] Examples of the structural unit (a1-4) include structural units derived from monomers described in JP 2010-204646 A. Preferably, the structural units represented by formulas (a1-4-1) to (a1-4-42) and R in the structural unit (a1-4) are a1 and more preferably, the structural units represented by formulae (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20), respectively.

[0413] [ka]

[0414] When the resin (A) contains the structural unit (a1-4), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total of all structural units in the resin (A). Also, the content is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the content is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and even more preferably 20 to 60 mol%.

[0415] Examples of the structural unit derived from a (meth)acrylic monomer having the group (2) include a structural unit represented by formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)").

[0416] [ka]

[0417] [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom.

[0418] Z a1 is a single bond or *-(CH 2 ) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 It represents the binding site with L 51 , L 52 , L 53 and L 54each independently represents -O- or -S-.

[0419] s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3. R a8 Examples of the halogen atom in include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Of these, a fluorine atom is preferred.

[0420] R a8 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in the formula (I) include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, and a perfluorohexyl group.

[0421] In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group, or a trifluoromethyl group. L 51 is preferably an oxygen atom.

[0422] L 52 and L 53 Of these, it is preferred that one is -O- and the other is -S-. It is preferable that s1 is 1. s1' is preferably an integer of 0 to 2.

[0423] Z a1 is a single bond or -CH 2 -CO-O- is preferred. Examples of the structural unit (a1-5) include structural units derived from monomers described in JP 2010-61117 A. Among them, the structural units represented by formulae (a1-5-1) to (a1-5-4) are preferred, and the structural unit represented by formula (a1-5-1) or (a1-5-2) is more preferred.

[0424] [ka]

[0425] When the resin (A) or the like contains the structural unit (a1-5), the content thereof is 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, even more preferably 10 mol% or more, even more preferably 20 mol% or more, and even more preferably 25 mol% or more, based on the total structural units of the resin (A) or the like. Also, the content is 80 mol% or less, preferably 70 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, even more preferably 40 mol% or less, and even more preferably 30 mol% or less. Specifically, the content is preferably 1 to 50 mol%, more preferably 3 to 45 mol%, even more preferably 5 to 40 mol%, and even more preferably 5 to 30 mol%.

[0426] An example of the structural unit (a1) having a group (1) is a structural unit represented by formula (a1-6) (hereinafter, sometimes referred to as "structural unit (a1-6)").

[0427] [ka]

[0428] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0429] R a62 , R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached.

[0430] X a61 is a single bond, -CO-O-* or -CO-NR 5 -*, where * represents the bonding site with -Ar, and R 5 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. X a62 is a single bond, *-OL a61 -or*-CO-OL a62 -, * represents the bonding site with -Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms.

[0431] Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.] R a61 Examples of the halogen atom in include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Of these, a fluorine atom is preferred.

[0432] R a61 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in the formula (I) include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, and a perfluorohexyl group.

[0433] R a61 is preferably a hydrogen atom, a methyl group, or a trifluoromethyl group. R a62 , R a63 and R a64 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, etc. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and further preferably a methyl group or an ethyl group.

[0434] R a62 , R a63 and R a64 The cyclic hydrocarbon group in the formula (I) includes an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, and a norbornyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12.

[0435] Examples of the aromatic hydrocarbon group include a phenylene group and a naphthylene group. Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.

[0436] R a62 and R a63 Examples of the ring formed by bonding with each other include an adamantane ring, a cyclopentane ring, and a cyclohexane ring. a62 and R a63 When they are bonded to each other to form a ring, -C(Ra62 )(R a63 )(R a64 ) includes the following groups. * represents a bonding site with an oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, and more preferably 3 to 12.

[0437] [ka]

[0438] L a61 and L a62 Examples of the alkanediyl group having 1 to 4 carbon atoms include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group.

[0439] L a61 and L a62 is preferably each independently a methylene group or an ethylene group. X a61 is preferably a single bond or -CO-O-*, and more preferably a single bond.

[0440] X a62 is preferably a single bond or *-OL a61 -, and more preferably a single bond. Examples of the aromatic hydrocarbon group having 6 to 20 carbon atoms for Ar include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group.

[0441] Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.

[0442] Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and further preferably a methyl group.

[0443] Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and further preferably a methoxy group.

[0444] Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and further preferably a methoxymethyl group.

[0445] Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group.

[0446] Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group.

[0447] Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group.

[0448] The substituent is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0449] Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxy group. Examples of the structural unit (a1-6) include structural units represented by formulas (a1-6-1) to (a1-6-44), preferably structural units represented by formulas (a1-6-1) to (a1-6-9), more preferably structural units represented by formulas (a1-6-1), (a1-6-2), (a1-6-4), (a1-6-5), (a1-6-7) or (a1-6-8), and still more preferably structural units represented by formulas (a1-6-1) or (a1-6-2).

[0450] [ka]

[0451] [ka]

[0452] In the structural units represented by formulae (a1-6-1) to (a1-6-9), (a1-6-16) to (a1-6-21), (a1-6-28) to (a1-6-30), and (a1-6-37) to (a1-6-44), R a61 In the structural units represented by formulae (a1-6-10) to (a1-6-15), (a1-6-22) to (a1-6-27), and (a1-6-31) to (a1-6-36), R a61 The structural unit (a1-6) also includes a structural unit in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or the like.

[0453] When the resin (A) contains the structural unit (a1-6), the content thereof is 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, even more preferably 10 mol% or more, still more preferably 20 mol% or more, even more preferably 30 mol% or more, and even more preferably 40 mol% or more, based on the total structural units of the resin (A). Also, the content is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the content is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 7 to 70 mol%, even more preferably 7 to 65 mol%, and particularly preferably 10 to 65 mol%.

[0454] Further, examples of the structural unit (a1) include the following structural units.

[0455] [ka]

[0456] When the resin (A) etc. contains the structural units represented by the formulas (a1-7-1) to (a1-7-7), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total structural units of the resin (A) etc. Also, the content is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 95 mol% is preferred, 15 to 90 mol% is more preferred, 20 to 85 mol% is even more preferred, 20 to 70 mol% is even more preferred, and 20 to 60 mol% is particularly preferred.

[0457] Further, examples of the structural unit (a1) include the following structural units.

[0458] [ka]

[0459] When the resin (A) etc. contains the structural units represented by the formulas (a1-8-1) to (a1-8-3), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total structural units of the resin (A) etc. Also, the content is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 60 mol% is preferred, 15 to 55 mol% is more preferred, 20 to 50 mol% is even more preferred, 20 to 45 mol% is even more preferred, and 20 to 40 mol% is particularly preferred.

[0460] Structural unit(s) The structural unit (s) is derived from a monomer having no acid labile group (hereinafter, may be referred to as "monomer (s)"). As the monomer from which the structural unit (s) is derived, a monomer having no acid labile group known in the resist field can be used.

[0461] The structural unit (s) preferably has a hydroxy group, a carboxy group, or a lactone ring. If a resin containing a structural unit having a hydroxy group or a carboxy group and no acid labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and no acid labile group (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, the resolution of the resist pattern and adhesion to the substrate can be improved. In addition to the above-mentioned structural units, the structural unit (s) may also include a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), a structural unit having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), or a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)").

[0462] <Structural unit (a2)> The structural unit (a2) is a structural unit represented by formula (a2) and has an alcoholic hydroxy group, a phenolic hydroxy group, or a carboxy group.

[0463] [ka]

[0464] [In formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0465] A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH 2 - is -O-, -CO- or -NR a28 - may be replaced.

[0466] R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group optionally having a substituent, and the -CH 2 - is -O-, -CO-, -S- or -SO 2 - may be replaced.

[0467] L a22 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms which may have a fluorine atom, and -CH 2 - may be replaced by -O- or -CO-.

[0468] na2 represents an integer of 1 to 5. When na2 is 2 or more, a plurality of L a22 may be the same or different. R a2 Examples of the halogen atom in include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom.

[0469] R a2 Examples of the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2.

[0470] R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and further preferably a hydrogen atom or a methyl group. A a21Examples of the alkanediyl group include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl groups. and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, decane-1,9-diyl, and undecane-1,10-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2.

[0471] R a28 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a21 -CH contained in the alkanediyl group 2 - is -O-, -CO- or -NR a28 When it is replaced with -, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the alkanediyl group.

[0472] A a21 -CH contained in the alkanediyl group 2 - is -O-, -CO- or -NR a28 The group substituted for - is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), carbonyl group (-CH 2- is replaced by -CO-), oxy group (-CH 2 - is replaced by -O-), amino group (-CH 2 -But -NR a28 - substituted), alkoxy group (-CH at any position in the alkyl group) 2 - is replaced by -O-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylcarbonyl group (-CH 2 - is replaced by -CO-), alkylamino group (-CH at any position in the alkyl group) 2 -But -NR a28 -substituted group), peptide group (-CH contained in ethylene group) 2 -CH 2 -But-CO-NR a18 -), alkanediyloxy group (groups in which -CH at any position in the alkanediyl group is replaced by -), 2 - is replaced by -O-), alkanediyloxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH 2 - is replaced by -CO-O-), alkanediylsulfonyl group (-CH at any position contained in the alkanediyl group) 2 -But-SO 2 -), alkanediylthio group (groups in which -CH at any position in the alkanediyl group is replaced with -CH 2 - is replaced by -S-), alkanediylamino group (-CH at any position contained in the alkanediyl group) 2 -But -NR a28These substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0473] Among them, A a21 -CH contained in the alkanediyl group 2 - is -O-, -CO- or -NR a28 Groups substituted with - include *-O-, *-CO-O-, *-O-CO-, *-CO-OA a22 -CO-O-, *-O-CO-A a22 -O-, *-OA a22 -CO-O-, *-CO-OA a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 Among them, *-CO-O- and *-CO-OA a22 -CO-O-, *-OA a22 -CO-O-, *-CO-NR a28 - is preferred, where A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a2 A represents the bonding site with the carbon atom to which it is attached. a22 The alkanediyl group of A is as follows, within the upper limit of the carbon number. a21 Examples of the alkanediyl groups include those shown above.

[0474] A a21 is a single bond, *-CO-O- or *-CO-OA a22 -CO-O- is preferred, and a single bond, *-CO-O- or *-CO-O-CH 2 It is more preferably -CO-O-, and further preferably a single bond or *-CO-O-.

[0475] L a21The hydrocarbon group in is a (na2+1)-valent hydrocarbon group, and examples of such cyclic hydrocarbon groups include linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings or bridged rings) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be groups formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group).

[0476] L a21 Examples of the chain hydrocarbon group include divalent to hexavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, an alkanepentyl group, and an alkanehexyl group.

[0477] Examples of the alkanediyl group include A a21 Examples of the alkanediyl groups include those shown above. Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, and a heptadecanetriyl group.

[0478] Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, and a heptadecanetetrayl group.

[0479] Examples of the alkanol groups include a methane pentaylene group, an ethane pentaylene group, a propane pentaylene group, a butane pentaylene group, a pentane pentaylene group, and a hexane pentaylene group.

[0480] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4.

[0481] L a21 Examples of the monocyclic and polycyclic alicyclic hydrocarbon groups in the formula (I) include the following alicyclic hydrocarbon groups: The binding site may be any position.

[0482] [ka]

[0483] For example, there can be mentioned divalent to hexavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, a cycloalkanepentyl group, and a cycloalkanehexyl group.

[0484] Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, and cyclodecanetetrayl group; Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, and bicyclo[3.3.0]octanetetrayl group.

[0485] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The alicyclic hydrocarbon group has preferably 3 to 20 carbon atoms, more preferably 3 to 18, even more preferably 3 to 16, still more preferably 3 to 12, still more preferably 6 to 12, and particularly preferably 6 to 10.

[0486] L a21 Examples of the aromatic hydrocarbon group in include divalent to hexavalent aromatic hydrocarbon groups such as an arylene group, an arenetriyl group, an arenettetrayl group, an arenetyl group, and an arenethexyl group.

[0487] Specific examples thereof include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, and a phenanthrenetetrayl group.

[0488] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The aromatic hydrocarbon group preferably has 6-20 carbon atoms, more preferably 6-18 carbon atoms, further preferably 6-14 carbon atoms, even further preferably 6-12 carbon atoms, and even further preferably 6-10 carbon atoms.

[0489] Examples of groups that combine two or more of these groups include a group that combines an alicyclic hydrocarbon group with a chain hydrocarbon group, a group that combines an aromatic hydrocarbon group with a chain hydrocarbon group, a group that combines an alicyclic hydrocarbon group with an aromatic hydrocarbon group, and a group that combines an alicyclic hydrocarbon group with a chain hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more of each of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined. In addition, when any of the groups is A a21 and L a22 may be bound to

[0490] -CH contained in the hydrocarbon group 2 -, -O-, -S-, -SO 2 The group substituted for - or -CO- is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), thiol group (-CH 2 - is replaced by -S-), alkoxy group (-CH 2 - is replaced by -O-), alkylthio group (-CH 2 - is replaced by -S-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylsulfonyl group (-CH at any position in the alkyl group) 2 -But-SO 2 - substituted), alkylcarbonyl group (-CH at any position in the alkyl group) 2 - is replaced by -CO-), alkylcarbonyloxy group (-CH 2 -CH 2 - is replaced by -CO-O-), oxy group (-CH 2- is replaced by -O-), carbonyl group (-CH 2 - is replaced by -CO-), thio group (-CH 2 - is replaced by -S-), sulfonyl group (-CH 2 -But-SO 2 -), alkanediyloxy group (groups in which -CH at any position in the alkanediyl group is replaced by -), 2 - is replaced by -O-), alkanediyloxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH 2 - is replaced by -CO-O-), alkanediylsulfonyl group (-CH at any position contained in the alkanediyl group) 2 -But-SO 2 -), alkanediylthio group (groups in which -CH at any position in the alkanediyl group is replaced with -CH 2 Examples of the alkyl group include a cycloalkyl group, an alkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a combination of two or more of these groups. Examples also include groups in which one or more of the hydrogen atoms of these groups are replaced with a bonding site.

[0491] Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3.

[0492] The alkylthio group includes an alkylthio group having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3.

[0493] Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, further preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.

[0494] The alkylsulfonyl group includes alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3.

[0495] The alkanediyloxy group includes an alkanediyloxy group having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3.

[0496] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, etc. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3.

[0497] The alkanediylthio group includes an alkanediylthio group having 1 to 27 carbon atoms, such as a methylenethio group, an ethylenethio group, a propanediylthio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0498] The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 27 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3.

[0499] Examples of the cycloalkoxy group include a cycloalkoxy group having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include a cycloalkylalkoxy group having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of the alkoxycarbonyloxy group include an alkoxycarbonyloxy group having 2 to 26 carbon atoms, such as a butoxycarbonyloxy group. Examples of the aromatic hydrocarbon group-carbonyloxy group include an aromatic hydrocarbon group-carbonyloxy group having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include an aromatic hydrocarbon group-carbonyl group having 7 to 28 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include an aromatic hydrocarbon group-oxy group having 6 to 27 carbon atoms, such as a phenyloxy group.

[0500] In addition, -CH contained in alicyclic hydrocarbon groups 2 - is -O-, -S-, -CO- or -SO 2 Examples of the group replaced with - include the following groups. In addition, among the groups shown below, -O- is -S-, -CO- is -SO 2 Also included are groups each replaced with -. The binding site may be at any position.

[0501] [ka]

[0502] -CH in the combined group 2- is -O-, -S-, -CO- or -SO 2 Examples of groups substituted with - include the following groups: The binding site may be at any position.

[0503] [ka]

[0504] L a21 The hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, an alkyl group having 1 to 16 carbon atoms (including the —CH 2 - may be replaced by -O- or -CO-), an acryloyloxy group or a methacryloyloxy group.

[0505] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a21 The hydrocarbon group in the formula (I) can have a halogen atom as a substituent, and thus can have a substituent such as a haloalkyl group. Examples of the haloalkyl group include a fluorinated alkyl group, a chlorinated alkyl group, a brominated alkyl group, and an iodinated alkyl group, and examples thereof include a chloromethyl group, a bromomethyl group, an iodomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, and a perfluorobutyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0506] L a21 The hydrocarbon group of L a21can substantially have a substituent such as an alkyl group. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 10, still more preferably 1 to 8, still more preferably 1 to 6, still more preferably 1 to 4, and still more preferably 1 to 3.

[0507] L a21 -CH contained in the hydrocarbon group 2 - is replaced by -O- or -CO-, etc., a21 can substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, a thiol group, a sulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxyalkyl group, an alkoxyalkoxy group, an acryloyloxy group, or a methacryloyloxy group. The number of carbon atoms in the alkoxy group is preferably 1 to 12, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms in the alkoxycarbonyl group, the alkylcarbonyl group, or the alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 to 3. The number of carbon atoms in the alkoxyalkyl group or the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 8, even more preferably 2 to 6, and even more preferably 2 to 4.

[0508] The above groups also include the same groups as those exemplified in this specification. L a21 The substituent that the hydrocarbon group in the formula (I) may have is, for example, a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (including —CH 2is preferably a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (-CH2- contained in the alkyl group may be replaced by -O- or -CO-), more preferably a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, still more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and still more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, or an ethoxyethoxy group.

[0509] Also, L a21 In the case where the alkanediyl group is replaced by -O- or -CO-, for example, *-L a23 -X a21 -(L a23 represents an alkanediyl group having 1 to 8 carbon atoms; X a21 represents -O-, -O-CO-, -CO-O-, or -O-CO-O-, and * represents A a21 It is also preferred that the bond is

[0510] L a21 represents a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -) or a group formed by combining a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent and a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (with the proviso that the -CH 2 - may be replaced by -O- or -CO-, and -CH contained in the cyclic hydrocarbon group 2 -, -O-, -S-, -SO 2- or -CO-), and a chain hydrocarbon group having 1 to 10 carbon atoms which may have a substituent (with the proviso that the -CH 2 - may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (provided that -CH 2 - is -O-, -S-, -CO- or -SO 2 -) or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (with the proviso that the -CH 2 - may be replaced by -O- or -CO-, and -CH contained in the cyclic hydrocarbon group 2 -, -O-, -S-, -SO 2 - or -CO- may be substituted.) is more preferable.

[0511] L a22 Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, and dodecane-1,12-diyl group. Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, 1-methylpropane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-dimethylpropane-1,3-diyl, pentane-2,4-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl groups. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4.

[0512] -CH contained in chain hydrocarbon group 2 Examples of the group in which - is replaced by -O- or -CO- include the same as those exemplified in this specification. L a22 may have one fluorine atom or two or more fluorine atoms.

[0513] na2 is preferably an integer of 1 to 4, and more preferably an integer of 1 to 3. L a21 In the case where R is a single bond or a chain hydrocarbon group, examples of the structural unit (a2) include the following structural units. a2 In the same manner as the following structural unit, a structural unit in which a methyl group corresponding to the following formula is replaced with a hydrogen atom or the like is also a suitable structural unit of the structural unit (a2).

[0514] [ka]

[0515] When a resist pattern is produced from the resist composition of the present invention, when a high energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) is used as an exposure light source, the structural unit (a2) having a phenolic hydroxyl group is preferable, and the structural unit (a2-A) described below is more preferable. When an ArF excimer laser (193 nm) or the like is used, the structural unit (a2) having an alcoholic hydroxyl group is preferable, and the structural unit (a2-1) described below is more preferable. The structural unit (a2) may contain one type alone or two or more types.

[0516] In the structural unit (a2), L a21 is a cyclic hydrocarbon group, and an example of a structural unit having a phenolic hydroxy group or a carboxy group is a structural unit represented by formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)").

[0517] [ka]

[0518] [In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0519] R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.

[0520] A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH 2 - is -O-, -CO- or -NR a28 - may be replaced.

[0521] R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or greater, the groups in the multiple parentheses may be the same or different.

[0522] na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer from 0 to 2. R a2 and A a21 The groups include the same groups as those exemplified in formula (a2).

[0523] R a27 Examples of the halogen atom include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a27 Examples of the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, further preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0524] R a27 Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, further preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group.

[0525] R a27 Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and further preferably a methoxymethyl group.

[0526] R a27Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group.

[0527] R a27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group.

[0528] R a27 The alkylcarbonyloxy group includes an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group.

[0529] R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0530] nA2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na21 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and further preferably 0 or 1.

[0531] mc is preferably 0 or 1. -X a2 -OH is a benzene ring, Aa21 It is preferable that at least one of them is bonded to the m-position or p-position, and more preferable that it is bonded to the m-position. In the case of a naphthalene ring, A a21 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a21 When the bonding position of A is the 2-position, it may be bonded to any of the 1-position and the 3-8-positions. a21 When the bonding position of A is the 1st position, at least one of them is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. a21 When the bonding position is the 2-position, it is preferably bonded to the 4- to 7-positions, and more preferably bonded to the 5- or 6-position.

[0532] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577. The structural unit (a2-A) includes structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), and structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), and R in the structural unit (a2-A) a2 and the like, in which the methyl group corresponding to the following formula (I) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group.

[0533] [ka]

[0534] [ka]

[0535] When the structural unit (a2-A) is contained in the resin (A), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on the total structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, even more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%.

[0536] The structural unit (a2-A) may be a compound from which the structural unit (a2-A) is derived (e.g., the -CH 2 -C(-R a2 )- is the CH of the double bond before cleavage. 2 =C(-R a2 ) can be polymerized to incorporate the structural unit (a2-A') into the resin (A). Alternatively, for example, structural unit (a1-4) can be polymerized, followed by treatment with an acid such as p-toluenesulfonic acid, to incorporate the structural unit (a2-A) into the resin (A). Alternatively, structural unit (a2-A) can be polymerized, followed by treatment with an alkali such as tetramethylammonium hydroxide, to incorporate the structural unit (a2-A) into the resin (A).

[0537] In the structural unit (a2), L a21 is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include a structural unit represented by formula (a2-B) (hereinafter may be referred to as "structural unit (a2-B)"), a structural unit represented by formula (a2-C) (hereinafter may be referred to as "structural unit (a2-C)"), and a structural unit represented by formula (a2-D) (hereinafter may be referred to as "structural unit (a2-D)").

[0538] [ka]

[0539] [In formula (a2-B) and formula (a2-C), R a2 has the same meaning as formula (a2). R a27 has the same meaning as formula (a2-A).

[0540] L a25 is -O- or *-O-(CH 2 ) k2 represents -CO-O-, k2 represents an integer of any one of 1 to 7. * represents a bonding site with -CO-. X a2 represents a single bond or -CO-.

[0541] R a25 and R a26 each independently represents a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer of 1 to 5. When nB2 is 2 or more, a plurality of X a2 may be the same or different from each other.

[0542] nB22 represents an integer of 0 to 8. When nB22 is 2 or more, a plurality of R a27 may be the same or different from each other. nC22 represents an integer of 0 to 10. When nC22 is 2 or more, multiple R a27 may be the same or different. L a25 is preferably -O-, -O-(CH 2 ) f1 It is -CO-O- (wherein f1 represents an integer of 1 to 4), and more preferably -O-.

[0543] R a2 is preferably a methyl group. X a2is preferably a single bond. R a25 is preferably a hydrogen atom.

[0544] R a26 is preferably a hydrogen atom or a hydroxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0545] nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably an integer of 0 to 3, more preferably 0, 1 or 2, and further preferably 0 or 1.

[0546] nC22 is preferably an integer of 0 to 6, more preferably an integer of 0 to 3, and further preferably 0 or 1. Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from monomers described in JP-A-2010-204646, the following structural units, and R a2 In particular, structural units represented by any one of formulae (a2-B-1) to (a2-B-5) and formulae (a2-C-1) to (a2-C-9) are preferred.

[0547] [ka]

[0548] When the resin (A) contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on the total structural units of the resin (A). Also, the content is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, the content is 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and even more preferably 1 to 10 mol%.

[0549] [ka]

[0550] [In formula (a2-D), R a2 and A a21 have the same meaning as in formula (a2). R a27 has the same meaning as formula (a2-A).

[0551] R a21 and R a22 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom.

[0552] nD2 represents an integer of 1 to 5. When nD2 is 2 or more, the groups in the multiple parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R a27 may be the same or different from each other.

[0553] However, 1≦nD2+nD22≦5. R a21 and R a22Examples of the fluorinated alkyl groups are each independently a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, and the like.

[0554] R a21 and R a22 As the alkyl group, a trifluoromethyl group is preferable. L a24 Examples of the alkanediyl group include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group.

[0555] L a24 is preferably a single bond or a methylene group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0556] nD2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, even more preferably 1 or 2, and even more preferably 1. Also preferably, nD2 is 1 and the group in parentheses is bonded to the para position.

[0557] nD22 is preferably an integer of 0 to 3, more preferably an integer of 0 to 2, further preferably 0 or 1, and even more preferably 0. The structural unit (a2-D) is more preferably a structural unit represented by the following formula (a2-D1) (hereinafter, sometimes referred to as "structural unit (a2-D1)").

[0558] [ka]

[0559] [In formula (a2-D1), R a2 , A a21 , R a27 , nD2 and nD22 have the same meaning as in formula (a2-D). In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group.

[0560] A a21 is preferably a single bond. Examples of the structural unit (a2-D) include the structural units shown below.

[0561] [ka]

[0562] In the structural units represented by formulae (a2-D-1) to (a2-D-8), R a2 In the structural units represented by formulae (a2-D-9) to (a2-D-16), the hydrogen atom corresponding to R a2 Specific examples of the structural unit (a2-D) include structural units in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, etc. Among these, the structural units represented by formulae (a2-D-1) to (a2-D-8) are preferred, the structural units represented by formulae (a2-D-1) to (a2-D-4) are more preferred, and the structural unit represented by formula (a2-D-1) is even more preferred.

[0563] When the resin (A) contains the structural unit (a2-D), the content thereof is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin (A). Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0564] <Structural unit (a3)> The lactone ring of the structural unit (a3) ​​may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring and another ring. Preferred examples include a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0565] The structural unit (a3) ​​is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3) or formula (a3-4). One of these may be contained alone, or two or more of them may be contained.

[0566] [ka]

[0567] [In the formulas (a3-1), (a3-2), (a3-3) and (a3-4), L a4 , L a5 and L a6 are each independently -O- or *-O-(CH 2 ) k3 It represents a group represented by -CO-O- (k3 represents an integer of any of 1 to 7).

[0568] L a7 , -O-, *-OL a8-O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O-.

[0569] L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * indicates the bonding site with the carbonyl group. R a18 , R a19 , R a20 and R a24 each independently represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom.

[0570] X a3 -CH 2 - or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms.

[0571] p1 represents an integer of 0 to 5. q1 represents an integer of 0 to 3. r1 represents an integer of 0 to 3.

[0572] w1 represents an integer of 0 to 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 may be the same or different.] R a21 , R a22 , R a23 and R a25Examples of the aliphatic hydrocarbon group in include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, and a tert-butyl group.

[0573] R a18 , R a19 , R a20 and R a24 Examples of the halogen atom in include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. R a18 , R a19 , R a20 and R a24 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group, and preferably an alkyl group having 1 to 4 carbon atoms, and more preferably a methyl group or an ethyl group.

[0574] R a18 , R a19 , R a20 and R a24 Examples of the alkyl group having a halogen atom in the formula (I) include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group.

[0575] L a8 and L a9 Examples of the alkanediyl group in the formula (I) include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group.

[0576] In formulas (a3-1) to (a3-3), L a4 ~L a6 are each independently preferably -O- or *-O-(CH 2 ) k3 In the -CO-O- group, k3 is an integer of 1 to 4, and more preferably -O- and *-O-CH 2 It is preferably an oxygen atom.

[0577] R a18 ~R a21 is preferably a methyl group. R a22 and R a23 are each independently preferably a carboxy group, a cyano group, or a methyl group.

[0578] p1, q1 and r1 each independently represent an integer of preferably 0 to 2, and more preferably 0 or 1. In formula (a3-4), R a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0579] R a25 is preferably a carboxy group, a cyano group or a methyl group. L a7 is preferably -O- or *-OL a8 -CO-O-, more preferably -O-, -O-CH 2 -CO-O- or -OC 2 H 4 -CO-O-.

[0580] w1 is preferably an integer of 0 to 2, and more preferably 0 or 1. In particular, the formula (a3-4) is preferably the formula (a3-4)'.

[0581] [ka]

[0582] (In the formula, R a24 , L a7 has the same meaning as above.) Examples of the structural unit (a3) ​​include structural units derived from monomers described in JP 2010-204646 A, JP 2000-122294 A, and JP 2012-41274 A. Examples of the structural unit (a3) ​​include structural units represented by any one of formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the structural unit, R in formulas (a3-1) to (a3-4) a18 , R a19 , R a20 and R a24 A structural unit in which a methyl group corresponding to the following formula is replaced with a hydrogen atom is preferred.

[0583] [ka]

[0584] When the resin (A) or the like contains the structural unit (a3), the total content thereof is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin (A) or the like. Also, 70 mol% or less is mentioned, preferably 65 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, 1 to 70 mol% is mentioned, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, even more preferably 5 to 65 mol%, even more preferably 5 to 60 mol%, and even more preferably 10 to 60 mol%.

[0585] The content of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3) or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin (A). It is also preferably 60 mol% or less, more preferably 55 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it is preferably 1 to 60 mol%, more preferably 3 to 60 mol%, even more preferably 3 to 55 mol%, even more preferably 5 to 55 mol%, even more preferably 5 to 50 mol%, and even more preferably 10 to 50 mol%.

[0586] <Structural unit (a4)> The structural unit represented by formula (a4) is shown below.

[0587] [ka]

[0588] [In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents a saturated hydrocarbon group having 1 to 24 carbon atoms and containing a halogen atom, and the -CH 2 - may be replaced by -O- or -CO-. R 42 Examples of the saturated hydrocarbon group represented by the formula (I) include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups.

[0589] Examples of the chain saturated hydrocarbon group include linear alkyl groups such as a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a decyl group, a dodecyl group, a pentadecyl group, a hexadecyl group, a heptadecyl group, and an octadecyl group, and branched alkyl groups such as an isopropyl group and an isobutyl group.

[0590] Examples of the monocyclic or polycyclic alicyclic saturated hydrocarbon group include monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkyl groups, such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group; and polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkyl groups, such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups (* represents a bonding site):

[0591] [ka]

[0592] Examples of groups formed by combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group-alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic saturated hydrocarbon group-alkyl group.

[0593] Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl groups, and branched alkanediyl groups such as propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl groups. The terminal of the branched alkanediyl group may be a methyl group.

[0594] R 42Examples of the halogen atom contained in the saturated hydrocarbon group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 42 -CH of saturated hydrocarbon groups contained in 2 Examples of groups in which - is replaced by -O- or -CO- include a hydroxy group (-CH contained in a methyl group). 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), carbonyl group (-CH 2 - is replaced by -CO-), oxy group (-CH 2 - is replaced by -O-), alkoxy group (-CH 2 - is replaced by -O-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylcarbonyl group (-CH 2 - is replaced by -CO-), alkylcarbonyloxy group (-CH 2 -CH 2 - is replaced by -CO-O-), alkanediyloxy group (-CH at any position in the alkanediyl group) 2 - is replaced by -O-), alkanediyloxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH 2Examples of the substituted groups include a group in which - is replaced by -CO-O-, a cycloalkoxy group, a cycloalkylalkoxy group, and a group in which two or more of these groups are combined. Examples of these substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0595] The structural unit (a4) is R 42 is preferably a saturated hydrocarbon group having a fluorine atom, and R 42 However, examples of the structural unit (a4) which is a saturated hydrocarbon group having a fluorine atom include a structural unit represented by formula (a4-1) (hereinafter may be referred to as "structural unit (a4-1)"), a structural unit represented by formula (a4-2) (hereinafter may be referred to as "structural unit (a4-2)"), and a structural unit represented by formula (a4-3) (hereinafter may be referred to as "structural unit (a4-3)").

[0596] The structural unit represented by formula (a4-1) is a structural unit shown below.

[0597] [ka]

[0598] [In formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms.

[0599] L 42f represents a fluorine atom-containing alkanediyl group having 1 to 8 carbon atoms or a fluorine atom-containing cycloalkanediyl group having 3 to 12 carbon atoms. R 42f represents a hydrogen atom or a fluorine atom. L 41Examples of the alkanediyl group in the formula (I) include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, and butane-1,4-diyl, and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, and 2-methylpropane-1,2-diyl. The terminal of the branched alkanediyl group may be a methyl group.

[0600] L 42f Examples of the alkanediyl group having a fluorine atom in the formula (I) include linear alkanediyl groups having a fluorine atom, such as a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, and an octane-1,8-diyl group having a fluorine atom; Examples of branched alkanediyl groups having fluorine atoms include ethane-1,1-diyl groups having fluorine atoms, propane-1,1-diyl groups having fluorine atoms, propane-1,2-diyl groups having fluorine atoms, propane-2,2-diyl groups having fluorine atoms, pentane-2,4-diyl groups having fluorine atoms, 2-methylpropane-1,3-diyl groups having fluorine atoms, 2-methylpropane-1,2-diyl groups having fluorine atoms, pentane-1,4-diyl groups having fluorine atoms, and 2-methylbutane-1,4-diyl groups having fluorine atoms. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom.

[0601] L 42fExamples of the cycloalkanediyl group having a fluorine atom in the formula (I) include monocyclic cycloalkanediyl groups having a fluorine atom, such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, a cycloheptane-1,4-diyl group having a fluorine atom, and a cyclooctane-1,5-diyl group having a fluorine atom; Examples of polycyclic cycloalkanediyl groups having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, and an adamantane-2,6-diyl group having a fluorine atom.

[0602] L 42f The number of fluorine atoms contained in the alkanediyl group and cycloalkanediyl group having a fluorine atom in the above formula may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group and cycloalkanediyl group having a fluorine atom in the above formula (I) are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0603] L 42fExamples of the perfluoroalkanediyl group in the formula (I) include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3 ,3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group.

[0604] L 42f Examples of the perfluorocycloalkanediyl group in the formula (I) include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, and a perfluoroadamantanediyl group.

[0605] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group, or an ethylene group, and even more preferably a single bond or a methylene group.

[0606] L 42f is preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and even more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0607] The structural unit (a4-1) may be any of the structural units shown below and R in the structural unit (a4-1) in the structural unit shown below. 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom.

[0608] [ka]

[0609] The structural unit represented by formula (a4-2) is a structural unit shown below.

[0610] [ka]

[0611] [In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - may be replaced by -O- or -CO-.

[0612] R 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - may be replaced by -O- or -CO-. However, L 43f and R 43f At least one of L has a fluorine atom. 43f and R 43f The total number of carbon atoms in the molecule is limited to 21. L 43f and R 43f Examples of the saturated hydrocarbon group in include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. 43f and R 43f Examples of saturated hydrocarbon groups in the formula are L 43fand R 43f As long as the upper limit of the total number of carbon atoms in 42 Examples of the saturated hydrocarbon group include the same groups as the exemplified saturated hydrocarbon groups.

[0613] L 43f The saturated hydrocarbon group is preferably an alkanediyl group having 1 to 6 carbon atoms or a group represented by the formula (L43f-1).

[0614] [ka]

[0615] [In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represents a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom.

[0616] L 47f represents a single bond or a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. X 46f and X 47f each independently represents -O-, -CO-, -CO-O- or -O-CO-.

[0617] However, L 45f , L 46f , L 47f , X 46f and X 47f The total number of carbon atoms is 7 or less. * and ** are binding sites, ** is -O-CO-R 43f This is the binding site for L in the group represented by formula (L43f-1) 45f , L 46f and L 47fExamples of the divalent saturated hydrocarbon group represented by include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and a divalent saturated hydrocarbon group formed by combining an alkanediyl group and a divalent alicyclic saturated hydrocarbon group, etc. Specific examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, etc.

[0618] It is preferred that s is 0. Examples of the group represented by formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** represents -O-CO-R 43f This is the binding site for

[0619] [ka]

[0620] R 43f is preferably a saturated hydrocarbon group having a fluorine atom. In this case, examples of the structural unit represented by formula (a4-2) include structural units represented by formula (a4-2A) or (a4-2B).

[0621] [ka]

[0622] [In formula (a4-2A) and formula (a4-2B), R 41 and L 43f represents the same as in formula (a4-2). R 43fA represents a saturated hydrocarbon group having 1 to 20 carbon atoms and containing a fluorine atom.

[0623] A 43frepresents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH 2 - may be replaced by -O- or -CO-.

[0624] X 43 represents **-O-CO- or **-CO-O-, and ** represents A 43f It represents the binding site with R 43fB represents a saturated hydrocarbon group having 1 to 17 carbon atoms which may contain a fluorine atom.

[0625] However, in formula (a4-2A), L 43f and R 43fA The total number of carbon atoms in formula (a4-2B) is 21 or less, and in formula (a4-2B), L 43f , A 43f , X 43 and R 43fB The total number of carbon atoms in A is 21 or less. 43f and R 43fB At least one of them has at least one fluorine atom. R 43fA The saturated hydrocarbon group of R is as long as the upper limit of the carbon number permits. 42 Examples of the saturated hydrocarbon groups include the saturated hydrocarbon groups exemplified by the above.

[0626] R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and containing a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and containing a fluorine atom, or a group combining these, and *-(CF 2 ) n43f -R 42′ (* represents the bonding site with the carbonyl group. n43f represents an integer of 1 to 6. R 42′ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable.

[0627] A 43f and R 43fB The saturated hydrocarbon group represented by R in formula (a4) is as large as possible within the upper limit of the number of carbon atoms. 42Examples of the saturated hydrocarbon groups include the saturated hydrocarbon groups exemplified by the above. A 43f is preferably a divalent chain saturated hydrocarbon group which may have a fluorine atom, a divalent alicyclic saturated hydrocarbon group, or a combination thereof, more preferably a divalent chain saturated hydrocarbon group which has a fluorine atom, and further preferably a fluorinated alkanediyl group having 1 to 6 carbon atoms.

[0628] R 43fB The saturated hydrocarbon group which may have a fluorine atom is preferably a chain saturated hydrocarbon group which may have a fluorine atom, an alicyclic saturated hydrocarbon group or a group combining these, more preferably an alkyl group having 1 to 12 carbon atoms which may have a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms or a group combining these, and more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4- More preferred are fluorinated alkyl groups such as an octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a heptyl group, a perfluoroheptyl group, an octyl group, and a perfluorooctyl group; a cyclopropylmethyl group, a cyclopropyl group, a cyclobutylmethyl group, a cyclopentyl group, a cyclohexyl group, a perfluorocyclohexyl group, an adamantyl group, an adamantylmethyl group, an adamantyldimethyl group, a norbornyl group, a norbornylmethyl group, a perfluoroadamantyl group, and a perfluoroadamantylmethyl group.

[0629] In formula (a4-2B), *-A f43 -X 43 -R f43B An example of a structure that the group represented by the formula (I) can take is the following structure (* indicates the bonding site with the carbonyl group).

[0630] [ka]

[0631] The structural unit represented by formula (a4-2A) includes the structural units shown below and R in the structural unit represented by formula (a4-2A) in the structural units shown below. 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom.

[0632] [ka]

[0633] The structural unit represented by formula (a4-2B) includes the structural units shown below and R in the structural unit represented by formula (a4-2B) in the structural units shown below. 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom.

[0634] [ka]

[0635] The structural unit (a4) also includes a structural unit represented by formula (a4-3).

[0636] [ka]

[0637] [In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - may be replaced by -O- or -CO-.

[0638] R 44frepresents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - may be replaced by -O- or -CO-. However, L 44f and R 44f At least one of L has a fluorine atom. 44f and R 44f The total number of carbon atoms in the molecule is limited to 21. L 44f and R 44f Examples of the saturated hydrocarbon group in include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. 44f and R 44f Examples of saturated hydrocarbon groups in the formula are L 44f and R 44f As long as the upper limit of the total number of carbon atoms in 42 Examples of the saturated hydrocarbon group include the same groups as the exemplified saturated hydrocarbon groups.

[0639] L 44f is an alkanediyl group having 1 to 14 carbon atoms (the —CH 2 - may be replaced by -O- or -CO-.) is preferred, and -(CH 2 ) j1 -, -(CH 2 ) j2 -O-(CH 2 ) j3 -or-(CH 2 ) j4 -CO-O-(CH 2 ) j5 - (j1 to j5 each independently represent an integer of 1 to 6). 2 - may be replaced by -O-, and one -CH 2 -CH 2 It is further preferred that - may be replaced by -CO-O- or -O-CO-.

[0640] R 44f is preferably a saturated hydrocarbon group having 1 to 10 carbon atoms and having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom, an alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms and having a fluorine atom, or a group combining these, further preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom, and even more preferably an alkyl group having 1 to 6 carbon atoms and having a fluorine atom.

[0641] Examples of the structural unit represented by formula (a4-3) include the following structural units and structural units represented by the following formulas: 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom.

[0642] [ka]

[0643] The structural unit (a4) also includes a structural unit represented by the formula (a4-A).

[0644] [ka]

[0645] [In formula (a4-A), R 1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0646] X 11 represents a single bond or *-CO-O-. * represents R 1 represents the bonding site with the carbon atom to which it is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH 2 -, -O-, -S-, -SO 2 It may be replaced by - or -CO-.

[0647] R 2 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group is L 1 may be bonded to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and the -CH 2 - may be replaced by -O-.

[0648] mi represents an integer of 1 to 4. When mi is 2 or more, the groups in the parentheses may be the same or different. R 1 Examples of the alkyl group having 1 to 6 carbon atoms in the formula include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group.

[0649] R 1 Examples of the halogen atom in include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 1 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group.

[0650] R 1is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0651] L 1 Examples of the aliphatic hydrocarbon group in include chain hydrocarbon groups and monocyclic or polycyclic (including spiro rings, fused rings, bridged rings, etc.) alicyclic hydrocarbon groups, and may be groups combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group).

[0652] Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanpentyl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group.

[0653] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4.

[0654] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups: The binding site may be any position.

[0655] [ka]

[0656] For example, there can be mentioned divalent to pentavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, and a cycloalkanepentyl group. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, etc. Examples of such groups include cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, spirocyclohexane-1,2'-cyclopentane-diyl group, and spiroadamantane-2,3'-cyclopentane-diyl group, and polycyclic alicyclic hydrocarbon groups such as spiro rings having a cycloalkanediyl group bonded to a norbornanediyl group or an adamantanediyl group via a spiro bond.

[0657] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, further preferably 3 to 16 carbon atoms, and further preferably 3 to 12 carbon atoms.

[0658] Examples of groups that combine two or more types include a group that combines an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups and chain hydrocarbon groups may be combined. In addition, when any group is X 11 may be bound to

[0659] Examples of groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), Examples of such an alkyl group include a group in which a hydroxyl group is bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group- etc.), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an chain hydrocarbon group (for example, *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group- etc.), and a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group- etc.).

[0660] * is X 11 represents the binding site with Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. L 1 -CH contained in an aliphatic hydrocarbon group having 1 to 28 carbon atoms 2 -, -O-, -S-, -SO 2 It may be replaced by - or -CO-.

[0661] L 1 -CH contained in an aliphatic hydrocarbon group having 1 to 28 carbon atoms 2 - is -O-, -S-, -SO 2When it is replaced by - or -CO-, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the aliphatic hydrocarbon group.

[0662] -CH contained in aliphatic hydrocarbon groups 2 -, -O-, -S-, -SO 2 The group substituted for - or -CO- is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), thiol group (-CH 2 - is replaced by -S-), alkoxy group (-CH 2 - is replaced by -O-), alkylthio group (-CH 2 - is replaced by -S-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylsulfonyl group (-CH at any position in the alkyl group) 2 -But-SO 2 - substituted), alkylcarbonyl group (-CH at any position in the alkyl group) 2 - is replaced by -CO-), alkylcarbonyloxy group (-CH 2 -CH 2 - is replaced by -CO-O-), oxy group (-CH 2 - is replaced by -O-), carbonyl group (-CH 2 - is replaced by -CO-), thio group (-CH 2 - is replaced by -S-), sulfonyl group (-CH 2 -But-SO 2 -), alkanediyloxy group (groups in which -CH at any position in the alkanediyl group is replaced by -), 2- is replaced by -O-), alkanediyloxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH 2 - is replaced by -CO-O-), alkanediylsulfonyl group (-CH at any position contained in the alkanediyl group) 2 -But-SO 2 -), alkanediylthio group (groups in which -CH at any position in the alkanediyl group is replaced with -CH 2 Examples of the alkoxy group include a group in which - is replaced with -S-, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, and a group in which two or more of these groups are combined.

[0663] Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0664] The alkylthio group includes an alkylthio group having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0665] Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. The number of carbon atoms in the alkoxycarbonyl group may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group may be 2 to 18, preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group may have 2 to 17 carbon atoms, preferably 2 to 11, more preferably 2 to 6, further preferably 2 to 4, and even more preferably 2 or 3 carbon atoms.

[0666] Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0667] The alkanediyloxy group includes an alkanediyloxy group having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0668] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, etc. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group may be 2 to 18, preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3.

[0669] The alkanediylthio group includes an alkanediylthio group having 1 to 27 carbon atoms, such as a methylenethio group, an ethylenethio group, a propanediylthio group, etc. The number of carbon atoms in the alkanediylthio group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0670] The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 27 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0671] Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as a butoxycarbonyloxy group.

[0672] In addition, -CH contained in alicyclic hydrocarbon groups 2 - is -O-, -S-, -CO- or -SO 2 Examples of the group substituted with - include the following groups. -O- or -CO- in the groups shown below can be replaced with -S- or -SO 2 The binding site can be at any position.

[0673] [ka]

[0674] L 1The aliphatic hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the —CH contained in the alkyl group or the alicyclic hydrocarbon group). 2 - may be replaced by -O- or -CO-.)

[0675] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the haloalkyl group having 1 to 4 carbon atoms include a fluorinated alkyl group having 1 to 4 carbon atoms, a chlorinated alkyl group having 1 to 4 carbon atoms, a brominated alkyl group having 1 to 4 carbon atoms, and an iodinated alkyl group having 1 to 4 carbon atoms. Examples of the haloalkyl group include a perfluoroalkyl group having 1 to 4 carbon atoms (such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 3, and more preferably 1 or 2.

[0676] Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 9, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0677] Examples of the alicyclic hydrocarbon group having 3 to 18 carbon atoms include monocyclic cycloalkyl groups such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, and a cyclodecyl group, and polycyclic cycloalkyl groups such as a decahydronaphthyl group, an adamantyl group, and a norbornyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12, and further preferably 3 to 10.

[0678] Examples of the aromatic hydrocarbon group having 6 to 18 carbon atoms include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14, more preferably 6 to 12, and further preferably 6 to 10.

[0679] -CH in the alkyl group 2 When - is replaced by -O- or -CO-, the number of carbon atoms before the replacement is the total number of carbon atoms in the alkyl group. 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), alkoxy group (-CH 2 - is replaced by -O-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylcarbonyl group (-CH 2 - is replaced by -CO-), alkylcarbonyloxy group (-CH 2 -CH 2 - is replaced with -CO-O-.

[0680] Examples of the alkoxy group include alkoxy groups having 1 to 11 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 9, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3.

[0681] Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 11 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 12 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 11 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 9, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 10, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 9 carbon atoms, more preferably 2 to 6 carbon atoms, further preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.

[0682] In addition, -CH contained in alicyclic hydrocarbon groups 2 Examples of the group in which - is replaced by -O- or -CO- include the same groups as those exemplified in this specification, within the upper limit of the carbon number permitted.

[0683] L 1Examples of the substituent that the aliphatic hydrocarbon group in the formula (I) may have include a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or an aromatic hydrocarbon group having 6 to 10 carbon atoms (the —CH 2 - may be replaced by -O- or -CO-), and a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-.) is more preferred, and a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxyl group or a methoxy group is even more preferred.

[0684] L 1 is R 3 When the fluorinated alkyl group does not form an alicyclic hydrocarbon group, the chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (the —CH 2 - may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - may be replaced by -O- or -CO-) or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - may be replaced by -O- or -CO-, and -CH contained in the alicyclic hydrocarbon group 2 - may be replaced by -O- or -CO-.) is preferably a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (the -CH 2 - may be replaced by -O- or -CO-), a group formed by combining an optionally substituted alicyclic hydrocarbon group having 3 to 12 carbon atoms or an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH contained in the chain hydrocarbon group 2- may be replaced by -O- or -CO-.) is more preferred, and a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (-CH contained in the chain hydrocarbon group is more preferred). 2 - may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms with an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (-CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-) or a group formed by combining an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a chain hydrocarbon group having 1 to 6 carbon atoms, and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (-CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-.

[0685] R 2Examples of the fluorinated alkyl group having 1 to 8 carbon atoms in the formula (I) include a difluoromethyl group, a trifluoromethyl group, a 1,1-difluoroethyl group, a 2,2-difluoroethyl group, a 2,2,2-trifluoroethyl group, a perfluoroethyl group, a 1,1,2,2-tetrafluoropropyl group, a 1,1,2,2,3,3-hexafluoropropyl group, a perfluoroethylmethyl group, a 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 1,1,2,2-tetrafluorobutyl group, a 1,1,2,2,3,3-hexafluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluorobutyl group, a 1,1-bis(trifluoro)methyl group, Examples of the fluorinated alkyl group include -2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, and perfluorooctyl group. The number of carbon atoms of the fluorinated alkyl group is preferably 1 to 6, more preferably 1 to 5, even more preferably 1 to 4, and even more preferably 1 to 3.

[0686] R 3 The fluorinated alkyl group having 1 to 6 carbon atoms in R is as long as the upper limit of the carbon number allows. 2 The same examples of the fluorinated alkyl groups having 1 to 6 carbon atoms as those given as examples of the fluorinated alkyl groups above are also included. R 2 is R 3When is a fluorinated alkyl group having 1 to 6 carbon atoms, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 3 carbon atoms, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group.

[0687] R 2 is R 3 When is a hydrogen atom, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 5 carbon atoms, and even more preferably a fluorinated alkyl group having 3 to 5 carbon atoms.

[0688] R 3 L 1 When R is bonded to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, 3 L 1 Examples of the group formed by bonding with include groups represented by the following formulas: In the following formulas, * and ** represent bonding sites, and one of the two ** represents a bonding site with a hydroxy group and the other represents a bonding site with R 2 represents the binding site with L 1A L 1 R is a part of a hydrocarbon group and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. 3 L 1 The alicyclic hydrocarbon group formed by bonding with the above preferably has 3 to 10 carbon atoms, more preferably 3 to 8 carbon atoms, and further preferably 3 to 6 carbon atoms.

[0689] [ka]

[0690] R 3 is preferably a hydrogen atom or a fluorinated alkyl group having 1 to 3 carbon atoms. mi is preferably an integer of 1 to 3, more preferably 1 or 2, and even more preferably 1.

[0691] Examples of the structural unit (a4-A) include the following structural units.

[0692] [ka]

[0693] [ka]

[0694] [ka]

[0695] In the above structural unit, R 1 and R 1 Specific examples of the structural unit (a4-A) include structural units in which a hydrogen atom corresponding to the following is replaced with a halogen atom, a haloalkyl group or an alkyl group.

[0696] When the resin (A) or the like contains the structural unit (a4), the content thereof is preferably 1 to 20 mol %, more preferably 2 to 15 mol %, and even more preferably 3 to 10 mol %, based on all structural units in the resin (A) or the like.

[0697] <Structural unit (a5)> The structural unit (a5) has a non-eliminating hydrocarbon group. Examples of the non-eliminating hydrocarbon group contained in the structural unit (a5) include groups having a linear, branched, or cyclic hydrocarbon group. Among these, the structural unit (a5) is preferably a group having an alicyclic hydrocarbon group.

[0698] An example of the structural unit (a5) is a structural unit represented by the formula (a5-1).

[0699] [ka]

[0700] [In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms.

[0701] L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the -CH 2 - may be replaced by -O- or -CO-. R 52 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group, a norbornyl group, and the like.

[0702] Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, and a 2-ethylhexyl group.

[0703] An example of the alicyclic hydrocarbon group having a substituent is a 3-methyladamantyl group. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and more preferably an adamantyl group, a norbornyl group, or a cyclohexyl group.

[0704] L 55 Examples of the divalent saturated hydrocarbon group in include a divalent chain saturated hydrocarbon group and a divalent alicyclic saturated hydrocarbon group, and a divalent chain saturated hydrocarbon group is preferred. Examples of the divalent chain saturated hydrocarbon group include alkanediyl groups such as a methylene group, an ethylene group, a propanediyl group, a butanediyl group, and a pentanediyl group.

[0705] The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic saturated hydrocarbon group include cycloalkanediyl groups such as cyclopentanediyl and cyclohexanediyl. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include adamantanediyl and norbornanediyl.

[0706] L 55 -CH contained in the divalent saturated hydrocarbon group represented by 2 Examples of the group in which - is replaced by -O- or -CO- include groups represented by formulae (L1-1) to (L1-4). In the following formulae, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom.

[0707] [ka]

[0708] [In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents L x1 ) which represents the binding site with

[0709] L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, L x1 and L x2 The total number of carbon atoms is 16 or less.

[0710] In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms.

[0711] However, L x3 and L x4 The total number of carbon atoms is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms.

[0712] L x6 and L x7 each independently represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, L x5 , L x6 and L x7 The total number of carbon atoms is 15 or less.

[0713] In formula (L1-4), L x8 and L x9 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms.

[0714] W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, L x8 , L x9 and W x1 The total number of carbon atoms is 15 or less. L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group.

[0715] L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms.

[0716] L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group.

[0717] L x6 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms.

[0718] L x8 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a single bond or a methylene group.

[0719] W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, and more preferably a cyclohexanediyl group or an adamantanediyl group. Examples of the group represented by formula (L1-1) include the divalent groups shown below.

[0720] [ka]

[0721] Examples of the group represented by formula (L1-2) include the divalent groups shown below.

[0722] [ka]

[0723] Examples of the group represented by formula (L1-3) include the divalent groups shown below.

[0724] [ka]

[0725] Examples of the group represented by formula (L1-4) include the divalent groups shown below.

[0726] [ka]

[0727] L 55 is preferably a single bond or a group represented by formula (L1-1). The structural unit (a5-1) may be any of the structural units shown below and R in the structural unit (a5-1) in the structural unit shown below. 51 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom.

[0728] [ka]

[0729] When the resin (A) or the like contains the structural unit (a5), the content thereof is preferably 1 to 30 mol %, more preferably 2 to 20 mol %, and further preferably 3 to 15 mol %, based on all structural units in the resin (A) or the like.

[0730] <Structural unit (a6)> The structural unit (a6) is -SO 2 - group, -SO 2 It is preferred that the compound has a - group on the side chain.

[0731] -SO 2 The structural unit having a - group is -SO 2 - groups, or may have a linear structure having -SO 2 - groups, or may have a branched structure having -SO 2 It may have a cyclic structure (monocyclic or polycyclic structure) having a - group. 2A structural unit having a cyclic structure having a - group, more preferably, -SO 2 It is a structural unit having a ring structure (sultone ring) containing -O-.

[0732] The sultone ring may be represented by the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and the formula (T 1 The binding site can be any position. The sultone ring may be monocyclic, but is preferably polycyclic. A polycyclic sultone ring is one in which the atomic group constituting the ring is -SO 2 It means a bridged ring containing -O-, and has the formula (T 1 -1) and the formula (T 1 The sultone ring is represented by the formula (T 1 -2) The ring is made up of -SO 2 In addition to -O-, the ring may further contain a heteroatom, such as an oxygen atom, a sulfur atom, or a nitrogen atom, and preferably an oxygen atom.

[0733] [ka]

[0734] The sultone ring may have a substituent. Examples of the substituent include an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms.

[0735] Examples of halogen atoms include fluorine, chlorine, bromine and iodine atoms. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group, and preferably an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group.

[0736] Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, and preferably a trifluoromethyl group.

[0737] Examples of the alkyl group having a hydroxy group include a hydroxymethyl group and a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group.

[0738] Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group.

[0739] Aralkyl groups include benzyl, phenethyl, phenylpropyl, naphthylmethyl and naphthylethyl groups. Examples of the alkoxycarbonyl group include groups in which an alkoxy group, such as a methoxycarbonyl group or an ethoxycarbonyl group, is bonded to a carbonyl group, and preferably, an alkoxycarbonyl group having 6 or less carbon atoms is used, and more preferably, a methoxycarbonyl group is used.

[0740] Alkylcarbonyl groups include acetyl, propionyl and butyryl groups. From the viewpoint of ease of production of the monomer from which the structural unit (a6) is derived, a sultone ring having no substituent is preferred.

[0741] The sultone ring is preferably a ring represented by the following formula (T1').

[0742] [ka]

[0743] [In formula (T1′), X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms.

[0744] ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41 may be the same or different. The binding site is at any position.] X 11 is preferably an oxygen atom or a methylene group, and more preferably a methylene group.

[0745] R 41 Examples of the substituent include the same ones as the substituents on the sultone ring, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxyl group is preferred. ma is preferably 0 or 1, and more preferably 0.

[0746] Examples of the ring represented by formula (T1') include the following rings. The binding site may be any position. Among them, the binding site is preferably the 1st or 3rd position.

[0747] [ka]

[0748] -SO 2 The structural unit having a - group preferably further has a group derived from a polymerizable group, such as a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, or a methacryloylthio group.

[0749] Among these, the monomer from which the structural unit (a6) is derived is preferably a monomer having an ethylenically unsaturated bond, and more preferably a (meth)acrylic monomer. The structural unit (a6) is preferably a structural unit represented by the formula (a6-0).

[0750] [ka]

[0751] [In formula (a6-0), R x represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom.

[0752] A xx is an oxygen atom, -N(R c )- or a sulfur atom. A x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the -CH 2 - is -O-, -CO- or -N(R d )- may also be replaced.

[0753] X11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms.

[0754] ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41 may be the same or different. R c and R d each independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.] R x Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom.

[0755] R x Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, and an n-hexyl group. An alkyl group having 1 to 4 carbon atoms is preferred, and a methyl group or an ethyl group is more preferred.

[0756] R x Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group.

[0757] R xis preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. A x Examples of the divalent saturated hydrocarbon group include a linear alkanediyl group, a branched alkanediyl group, and a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and may be a combination of two or more of these groups.

[0758] Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, linear alkanediyl groups such as a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, a heptadecane-1,17-diyl group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group; branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl; monocyclic divalent alicyclic saturated hydrocarbon groups such as cycloalkanediyl groups, such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; Examples of the polycyclic divalent alicyclic saturated hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group.

[0759] A x The bonding position of to the sultone ring may be any position, but is preferably the 1-position. Examples of the structural unit (a6-0) include the following structural units.

[0760] [ka]

[0761] Of these, structural units represented by formulae (a6-1), (a6-2), (a6-6), (a6-7), (a6-8) and (a6-12) are preferred, and structural units represented by formulae (a6-1), (a6-2), (a6-7) and (a6-8) are more preferred.

[0762] When the resin (A) or the like contains the structural unit (a6), the content thereof is preferably 1 to 50 mol %, more preferably 2 to 40 mol %, and even more preferably 3 to 30 mol %, based on all structural units in the resin (A) or the like.

[0763] <Structural unit (a7)> The resin (A) etc. may further contain a structural unit (hereinafter, sometimes referred to as "structural unit (a7)") other than the structural unit (I) that decomposes upon exposure to generate an acid. Specific examples of the structural unit (a7) include structural units described in JP 2016-79235 A, and it is preferable that the structural unit (a7) is a structural unit having a sulfonate group or a carboxylate group and an organic cation in a side chain, or a structural unit having a sulfonio group and an organic anion in a side chain.

[0764] The structural unit having a sulfonate group or carboxylate group and an organic cation in the side chain is preferably a structural unit represented by formula (a7-A).

[0765] [ka]

[0766] [In formula (a7-A), R a7 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0767] X a71 is a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR a71 -**, *-NR a71 -CO-O-**, *-O-CO-NR a71 -** or *-Ax-Ph-Ay-**.

[0768] R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond.

[0769] * and ** represent binding sites, * represents R a7 represents the bonding site with the carbon atom to which it is bonded. L a71 and L a72 each independently represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced.

[0770] X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, and *** represents L a71 It represents the binding site with na7 represents an integer of 0 to 2. When na7 is 2, the groups in the parentheses may be the same or different.

[0771] RA - represents a sulfonate anion or a carboxyl anion. Z.A. + represents an organic cation. R a7 and R a71Examples of the alkyl group having 1 to 6 carbon atoms in the formula include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group.

[0772] R a7 Examples of the halogen atom in include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a7 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group.

[0773] R a7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0774] X a71 is a group represented by the formula *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10).

[0775] [ka]

[0776] [In formula (X10), Ax is R a7represents a bond type bonded to the carbon atom to which is bonded, and represents one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond.

[0777] Ay is L a71 represents a bond type that bonds with, and represents one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond.

[0778] Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4, and when mx is an integer of 2 or more, multiple Rx's may be the same or different. When either Ax or Ay is a single bond, the other is preferably one selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond.

[0779] When either Ax or Ay is an amide bond, -CO-NR a71 A bond represented by - is preferred. The bonding position of Ay in the phenylene group is preferably the m-position or p-position relative to the bonding position of Ax, and more preferably the p-position.

[0780] Among these, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group or an ethyl group. mx is preferably 0, 1 or 2.

[0781] X a71 Examples of the substituent include a single bond and a substituent represented by the following formula (X 10 -1)~Formula(X 10 -10) is a group represented by * -R a7 represents the bonding site with the carbon atom to which L is bonded. a71 It represents the binding site with X 20is -O- or -NR a71 - represents.

[0782] [ka]

[0783] Expression(X 10 -1)~Formula(X 10 Specific examples of the group represented by -10) include the following groups.

[0784] [ka]

[0785] Among them, X a71 is a single bond and the formula (X 10 -1′), formula (X 10 -3′)~Formula(X 10 -9′), which is preferably a single bond or a group represented by the formula (X 10 -1′), formula (X 10 -4′), formula (X 10 -5′), formula (X 10 -6') and formula (X 10 -9') is more preferably a single bond, a group represented by the formula (X 10 -1'), a group represented by the formula (X 10 -5′), a group represented by the formula (X 10 -6') or formula (X 10 -9') is more preferable.

[0786] L a71 The hydrocarbon group is a group formed by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, to form X. a71 and X a72 Also, L a72 The hydrocarbon group is a group formed by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, to form X. a72 and R.A.- Examples of such groups include groups that bond to the

[0787] L a71 and L a72 Examples of the chain hydrocarbon group include a group in which one hydrogen atom has been removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentanedecyl group, and a heptadecyl group. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group.

[0788] The chain hydrocarbon group preferably has 1 to 20 carbon atoms, more preferably 1 to 18 carbon atoms, and even more preferably 1 to 10 carbon atoms. L a71 and L a72 Examples of the alicyclic hydrocarbon group include a group in which one hydrogen atom has been removed from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cycloheptyl group, a cyclohexyl group, a cyclopentyl group, and a cyclooctyl group.

[0789] L a71 and L a72Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a bridged structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are bonded by a spiro bond. Examples of the cycloalkyl group having a bridged structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are bonded by a spiro bond include a spirocyclic cycloalkyl group in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is bonded by a spiro bond to a cycloalkyl group having 5 to 8 carbon atoms. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include the following formula:

[0790] [ka]

[0791] When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 12, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the alicyclic hydrocarbon group preferably has 6 to 18 carbon atoms, and more preferably 7 to 12.

[0792] L a71 and L a72 The aromatic hydrocarbon group may be a group in which one hydrogen atom has been removed from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. The number of carbon atoms in the aromatic hydrocarbon group is preferably 5 to 14, more preferably 6 to 14, and further preferably 6 to 10.

[0793] L a71 and L a72-CH contained in the hydrocarbon group 2 - is -O-, -CO-, -S- or -SO 2 When it is replaced with -, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the hydrocarbon group.

[0794] L a71 and L a72 Among the hydrocarbon groups, -CH 2 - is -O-, -CO-, -S- or -SO 2 The group substituted for - is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), thiol group (-CH 2 - is replaced by -S-), carbonyl group (-CH 2 - is replaced by -CO-), oxy group (-CH 2 - is replaced by -O-), thio group (-CH 2 - is replaced by -S-), sulfonyl group (-CH 2 -But-SO 2 - substituted), alkoxy group (-CH at any position in the alkyl group) 2 - is replaced by -O-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylcarbonyl group (-CH 2 - is replaced by -CO-), alkylcarbonyloxy group (-CH 2 -CH 2 - is replaced by -CO-O-), alkanediyloxy group (-CH at any position in the alkanediyl group) 2- is replaced by -O-), alkanediyloxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH 2 Examples of these substituted groups include those similar to the groups exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0795] L a71 and L a72 Among the hydrocarbon groups, -CH contained in alicyclic hydrocarbon groups 2 - is -O-, -CO-, -S- or -SO 2 Examples of the group substituted with - include groups containing a cyclic ether, cyclic ketone, cyclic ester (lactone), cyclic thioether, cyclic acetal, and cyclic sulfonate ester (sultone) structure. Specific examples include alicyclic hydrocarbon groups represented by the following formula. The bonding position of the alicyclic hydrocarbon groups represented by the following formula may be any position.

[0796] [ka]

[0797] L a71 and L a72 Among the hydrocarbon groups, -CH contained in aromatic hydrocarbon groups 2 - may be replaced by -O- or -S-, -CH 2 Examples of the group in which - is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively.

[0798] L a71 and L a72Examples of the group in which two or more of the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group are combined include a group in which the chain hydrocarbon group and the alicyclic hydrocarbon group are combined, a group in which the chain hydrocarbon group and the aromatic hydrocarbon group are combined, a group in which the alicyclic hydrocarbon group and the aromatic hydrocarbon group are combined, and a group in which the chain hydrocarbon group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group are combined. The group in which the alicyclic hydrocarbon group and the aromatic hydrocarbon group are combined may be a condensed ring.

[0799] L a71 and L a72 The substituents which the hydrocarbon group may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

[0800] L a71 and L a72 When L is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. a71 and L a72 The -CH chain hydrocarbon group contained in the hydrocarbon group 2 - is -O-, -CO-, -S- or -SO 2 - is replaced by L a71 and L a72 The hydrocarbon group may substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group.

[0801] na7 is preferably 0 or 1. ZA in formula (a7-A) + Examples of the cation include the same as the cation in the salt represented by formula (B1) etc.

[0802] In formula (a7-A), L a71 and L a72When the hydrocarbon group is a saturated hydrocarbon group, in the formula (a7-B) described later, b7 The divalent linking group may include the same groups as those exemplified above.

[0803] Examples of the structural unit represented by formula (a7-A) include a structural unit represented by formula (a7-A1).

[0804] [ka]

[0805] [In formula (a7-A1), R a7 , X a71 , L a71 , X a72 , na7, R.A. - and Z.A. + has the same meaning as above.

[0806] z7 represents an integer of 0 to 6. Q a7 , Q b7 , R z71 and R z72 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms; when z7 is 2 or more, z71 and R z72 may be the same or different.] Q a7 , Q b7 , R z71 and R z72 As the perfluoroalkyl group having 1 to 6 carbon atoms or the alkyl group having 1 to 6 carbon atoms in R a7 Examples of the groups include the same groups as those exemplified in the above.

[0807] Examples of the structural unit represented by formula (a7-A) include the following structural units, R a7Examples of the structural units include those in which the group corresponding to the methyl group in the above formula (I) is replaced with a hydrogen atom, a halogen atom (e.g., a fluorine atom) or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (e.g., a trifluoromethyl group, etc.), and the structural units described in WO 2012 / 050015. + represents an organic cation.

[0808] [ka]

[0809] [ka]

[0810] The structural unit having a sulfonio group and an organic anion on the side chain is preferably a structural unit represented by formula (a7-B).

[0811] [ka]

[0812] [In formula (a7-B), R a7 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0813] A b7 represents a single bond or a divalent linking group. R b71 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R b72 and R b73 each independently represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent; R b72 and R b73 may be bonded to each other to form a ring together with the sulfur atom to which they are attached.

[0814] A - represents an organic anion. R a7 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a7-A) include the same halogen atom and the alkyl group which may have a halogen atom as in the formula (a7-A).

[0815] R b71 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represente...

Claims

1. A carboxylic acid generator comprising a carboxylate represented by formula (I) and at least one structural unit represented by formula (IP). 【Chemistry 1】 [In formula (I) and formula (IP), X represents a sulfur atom or an iodine atom. m10 represents 0 or 1, and when X is a sulfur atom, m10 is 1, and when X is an iodine atom, m10 is 0. R １Ａ and R １Ｂ are each independently *-X １ -R １０ Or *-X １ -L １１ -X ２ -R １０ represents R ４ is bonded to a benzene ring or R ７ represents the bonding site with the benzene ring to which it is attached. X １ and X ２ are each independently *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (wherein * represents a benzene ring or L １１ represents a binding site with １１ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R １０ is -SO ２ Represents a group having -. R ４ represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, and the —CH ２ - is -O-, -S-, -CO-, -SO- or -SO ２ It may be replaced by -. R ７ , R ８ and R ９ each independently represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, ２ - is -O-, -S-, -CO-, -SO- or -SO ２ When X is a sulfur atom, R ７ and R ８ Or R ８ and R ９ is bonded to S ＋ The R forming the ring may form a ring containing ７ and R ８ Or R ８ and R ９ , S ＋ The —CH ２ - is -O-, -S-, -CO-, -SO- or -SO ２ It may be replaced with -. m1A represents an integer of 0 to 5, and when m1A is 2 or more, a plurality of R １Ａ may be the same or different from each other. m1B represents an integer of 0 to 4, and when m1B is 2 or more, a plurality of R １Ｂ may be the same or different, provided that either m1A or m1B is an integer of at least 1. m4 represents an integer of 0 to 5, and when m4 is 2 or more, a plurality of R ４ may be the same or different, and satisfy 0≦m1A+m4≦5. m7 represents an integer of 0 to 4, and when m7 is 2 or more, a plurality of R ７ may be the same or different, and satisfy 0≦m1B+m7≦4. m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R ８ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. X ０ represents a single bond or a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. R ｂｂ１ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３ -**, *-NR ３ -CO-O-**, *-O-CO-NR ３ -** or *-Ax-Ph-Ay-**. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R ｂｂ１ represents the bonding site with the carbon atom to which it is bonded. L １０ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -SO ２ - or -CO- may be substituted.]

2. R １０ NO-SO ２ The carboxylic acid generator according to claim 1, wherein the group having - is a group having a ring represented by formula (T1A). 【Chemistry 2】 [In formula (T1A), X １Ａ represents an oxygen atom, a sulfur atom, -NH-, or a methylene group. R ４１Ａ represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents an integer of 0 to 9. When ma is 2 or more, multiple R ４１Ａ may be the same or different. The binding site is at any position.]

3. m1A is an integer from 1 to 3, R １Ａ is -O-CO-OR １０ Or -O-L １１ -C-O-R １０ The carboxylic acid generator according to claim 1,

4. X ０ represents a single bond, an aliphatic hydrocarbon group having 1 to 72 carbon atoms, or a hydrocarbon group having 6 to 72 carbon atoms, including an aromatic hydrocarbon group having 6 to 36 carbon atoms, The aliphatic hydrocarbon group and the —CH ２ - is -O-, -S-, -CO- or -SO ２ 2. The carboxylic acid generator according to claim 1, wherein the aliphatic hydrocarbon group, the aromatic hydrocarbon group and the hydrocarbon group each may have a substituent.

5. X ０ represents an open chain hydrocarbon group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, a group in which an open chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 36 carbon atoms are combined, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group in which an aromatic hydrocarbon group having 6 to 36 carbon atoms and an open chain hydrocarbon group having 1 to 18 carbon atoms are combined, the chain hydrocarbon group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, a hydroxy group or a hydroxymethyl group; The —CH group contained in the chain hydrocarbon group and the alicyclic hydrocarbon group ２ - is -O-, -S-, -SO ２ The carboxylic acid generator according to claim 1, which may be replaced by - or -CO-.

6. X ０ teeth, an alkanediyl group having 1 to 6 carbon atoms; a cycloalkanediyl group having 5 to 6 carbon atoms, an adamantanediyl group, a norbornanediyl group, a phenylene group, COO － and a cycloalkanediyl group, adamantanediyl group, norbornanediyl group or phenylene group having 5 to 6 carbon atoms bonded to the alkanediyl group; or COO － a polycyclic alicyclic hydrocarbon group in which a cycloalkanediyl group, adamantanediyl group or norbornanediyl group having 5 to 6 carbon atoms bonded to a cycloalkanediyl group having 5 to 8 carbon atoms is bonded in a spiro structure; The —CH contained in the alkanediyl group, the cycloalkanediyl group, the adamantanediyl group, and the norbornanediyl group ２ The carboxylic acid generator according to claim 1, wherein - may be replaced by -O- or -CO-, and the alkanediyl group, the cycloalkanediyl group, the adamantanediyl group, the norbornanediyl group and the phenylene group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, a hydroxy group or a hydroxymethyl group.

7. X １０ is a single bond or a group of the formula (X １０ -1) ~Formula (X １０ 2. The carboxylic acid generator according to claim 1, wherein the carboxylic acid generator is a group represented by any one of the following formulas: 【Chemistry 3】 [Formula (X １０ -1) ~ type (X １０ -10) *, ** are binding sites, * is R ｂｂ１ represents the bonding site with the carbon atom to which it is bonded. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4. X ２０ is -O- or -NR ３ Represents -. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

8. X １０ is a single bond or a group of the formula (X １０ -1'), formula (X １０ -3') ~Formula (X １０ -8') and formula (X １０ 2. The carboxylic acid generator according to claim 1, wherein the carboxylic acid generator is a group represented by any one of the following formulas: 【Chemistry 4】 [Formula (X １０ -1'), formula (X １０ -3') ~Formula (X １０ -8') and formula (X １０ -10′), *, ** are binding sites, * is R ｂｂ１ represents the bonding site with the carbon atom to which is bonded.

9. X １０ is a single bond or a group of the formula (X １０ -1'), formula (X １０ -5'), formula (X １０ -6') and formula (X １０ 9. The carboxylic acid generator according to claim 8, wherein the carboxylic acid generator is a group represented by any one of the following formulas:

10. L １０ represents a single bond, an alkanediyl group having 1 to 6 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, The cyclic hydrocarbon group may have a substituent, and the alkanediyl group and the -CH ２ - is -O-, -S-, -SO ２ The carboxylic acid generator according to claim 1, which may be replaced by - or -CO-.

11. A resist composition comprising the carboxylic acid generator according to any one of claims 1 to 10.

12. A carboxylate represented by formula (I) The resist composition according to claim 11, further comprising a resin that contains a structural unit (a1) having an acid labile group.

13. Contains a resin containing a structural unit represented by formula (IP), The resist composition according to claim 11, wherein the resin containing the structural unit represented by formula (IP) further contains a structural unit (a1) having an acid labile group.

14. The resist composition according to claim 13, further comprising a carboxylate represented by formula (I).

15. The resist composition according to claim 12, wherein the structural unit (a1) having an acid labile group includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). 【Chemistry 5】 [In formula (a1-0), formula (a1-1) and formula (a1-2), L ａ０１ , L ａ１ and L ａ２ are each independently -O- or *-O-(CH ２ ) ｋ１ represents --CO--O--, k1 represents an integer of 1 to 7, and * represents the bonding site with --CO--. R ａ０１ , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ０２ , R ａ０３ and R ａ０４ each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, and the alkyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may contain a halogen atom. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom. m1′ represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3. 【Chemistry 6】 [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ１８ May be replaced with -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R ａ３４ and R ａ３５ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R ａ３６ represents a hydrocarbon group having 1 to 20 carbon atoms, or R ａ３５ and R ａ３６ are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and the hydrocarbon group and the -CH ２ - may be replaced by -O- or -S-. na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R ａ１７ may be the same or different from each other. mc represents an integer of 0 to 2. 【Chemistry 7】 [In formula (a1-5), R ａ８ represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z ａ１ is a single bond or *-(CH ２ ) ｈ３ -CO-L ５４ -, h3 represents an integer of 1 to 4, * represents L ５１ represents the binding site with L ５１ , L ５２ , L ５３ and L ５４ each independently represents --O-- or --S--. s1 represents an integer of 1 to 3. s1' represents an integer of 0 to 3. 【Chemistry 8】 [In formula (a1-6), R ａ６１ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ６２ , R ａ６３ and R ａ６４ each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R ａ６２ and R ａ６３ are bonded to each other to form, together with the carbon atoms to which they are attached, a ring having 3 to 20 carbon atoms. X ａ６１ is a single bond, -CO-O-* or -CO-NR ５ - represents *, * represents a bonding site with Ar, R ５ represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. X ａ６２ is a single bond, *-O-L ａ６１ - or *-CO-OL ａ６２ -, * represents a bonding site with Ar, L ａ６１ and L ａ６２ each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

16. 13. The resist composition according to claim 12, wherein the resin containing the structural unit (a1) having an acid labile group further contains a structural unit represented by formula (a2-A). 【Chemistry 9】 [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5. When nA2 is 2 or more, the groups in the parentheses may be the same or different. na21 represents an integer of 0 to 4. When na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer of 0 to 2.

17. Further containing an acid generator, The resist composition according to claim 11, wherein the acid generator comprises a salt represented by formula (B1). 【Chemistry 10】 [In formula (B1), L ｂ１ represents a single bond or a (nb1+1)-valent hydrocarbon group which may have a substituent, and —CH ２ - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. L ｂ２ represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH ２ - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. Y ｂ１ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the parentheses may be the same or different. Z ＋ represents an organic cation.

18. (1) A step of applying the resist composition according to claim 11 onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising the steps of:

19. A carboxylate represented by formula (I): 【Chemistry 11】 [In formula (I), X represents a sulfur atom or an iodine atom. m10 represents 0 or 1, and when X is a sulfur atom, m10 is 1, and when X is an iodine atom, m10 is 0. R １Ａ and R １Ｂ are each independently *-X １ -R １０ Or *-X １ -L １１ -X ２ -R １０ represents R ４ is bonded to a benzene ring or R ７ represents the bonding site with the benzene ring to which it is attached. X １ and X ２ are each independently *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (wherein * represents a benzene ring or L １１ represents a binding site with １１ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the —CH ２ - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R １０ is -SO ２ Represents a group having -. R ４ represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, and the —CH ２ - is -O-, -S-, -CO-, -SO- or -SO ２ It may be replaced with -. R ７ , R ８ and R ９ each independently represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, ２ - is -O-, -S-, -CO-, -SO- or -SO ２ When X is a sulfur atom, R ７ and R ８ Or R ８ and R ９ is bonded to S ＋ The R forming the ring may form a ring containing ７ and R ８ Or R ８ and R ９ , S ＋ The —CH ２ - is -O-, -S-, -CO-, -SO- or -SO ２ It may be replaced by -. m1A represents an integer of 0 to 5, and when m1A is 2 or more, a plurality of R １Ａ may be the same or different from each other. m1B represents an integer of 0 to 4, and when m1B is 2 or more, a plurality of R １Ｂ may be the same or different, provided that either m1A or m1B is an integer of at least 1. m4 represents an integer of 0 to 5, and when m4 is 2 or more, a plurality of R ４ may be the same or different, and satisfy 0≦m1A+m4≦5. m7 represents an integer of 0 to 4, and when m7 is 2 or more, a plurality of R ７ may be the same or different, and satisfy 0≦m1B+m7≦4. m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R ８ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. X ０ represents a single bond or a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. R ｂｂ１ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３ -**, *-NR ３ -CO-O-**, *-O-CO-NR ３ -** or *-Ax-Ph-Ay-**. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R ｂｂ１ represents the bonding site with the carbon atom to which it is bonded. L １０ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -SO ２ - or -CO- may be substituted.]

20. R １０ NO-SO ２ The carboxylate according to claim 19, wherein the group having - is a group having a ring represented by formula (T1A). 【Chemistry 12】 [In formula (T1A), X １Ａ represents an oxygen atom, a sulfur atom, -NH-, or a methylene group. R ４１Ａ represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents an integer of 0 to 9. When ma is 2 or more, multiple R ４１Ａ may be the same or different. The binding site is at any position.]

21. m1A is an integer from 1 to 3, R １Ａ is -O-CO-OR １０ Or -O-L １１ -C-O-R １０ 21. The carboxylate according to claim 19 or 20,

22. X ０ represents a single bond, an aliphatic hydrocarbon group having 1 to 72 carbon atoms, or a hydrocarbon group having 6 to 72 carbon atoms, including an aromatic hydrocarbon group having 6 to 36 carbon atoms, The aliphatic hydrocarbon group and the —CH ２ - is -O-, -S-, -CO- or -SO ２ The carboxylate according to claim 19 or 20, wherein the aliphatic hydrocarbon group, the aromatic hydrocarbon group and the hydrocarbon group each optionally have a substituent.

23. X ０ represents an open chain hydrocarbon group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, a group in which an open chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 36 carbon atoms are combined, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group in which an aromatic hydrocarbon group having 6 to 36 carbon atoms and an open chain hydrocarbon group having 1 to 18 carbon atoms are combined, the chain hydrocarbon group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, a hydroxy group or a hydroxymethyl group; The —CH group contained in the chain hydrocarbon group and the alicyclic hydrocarbon group ２ - is -O-, -S-, -SO ２ The carboxylate according to claim 19 or 20, which may be replaced by - or -CO-.

24. X ０ teeth, an alkanediyl group having 1 to 6 carbon atoms; a cycloalkanediyl group having 5 to 6 carbon atoms, an adamantanediyl group, a norbornanediyl group, a phenylene group, COO － and a cycloalkanediyl group, adamantanediyl group, norbornanediyl group or phenylene group having 5 to 6 carbon atoms bonded to the alkanediyl group; or COO － a polycyclic alicyclic hydrocarbon group in which a cycloalkanediyl group, adamantanediyl group or norbornanediyl group having 5 to 6 carbon atoms bonded to a cycloalkanediyl group having 5 to 8 carbon atoms is bonded in a spiro structure; The —CH contained in the alkanediyl group, the cycloalkanediyl group, the adamantanediyl group, and the norbornanediyl group ２ The carboxylate according to claim 19 or 20, wherein - may be replaced by -O- or -CO-, and the alkanediyl group, the cycloalkanediyl group, the adamantanediyl group, the norbornanediyl group and the phenylene group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, a hydroxy group or a hydroxymethyl group.

25. X １０ is a single bond or a group of the formula (X １０ -1) ~Formula (X １０ The carboxylate according to claim 19 or 20, wherein the carboxylate is a group represented by any one of the following formulas: 【Chemistry 13】 [Formula (X １０ -1) ~ type (X １０ -10) *, ** are binding sites, * is R ｂｂ１ represents the bonding site with the carbon atom to which it is bonded. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4. X ２０ is -O- or -NR ３ Represents -. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

26. X １０ is a single bond or a group of the formula (X １０ -1'), formula (X １０ -3') ~Formula (X １０ -8') and formula (X １０ 21. The carboxylate according to claim 19, wherein the carboxylate is a group represented by any one of the following formulas: 【Chemistry 14】 [Formula (X １０ -1'), formula (X １０ -3') ~Formula (X １０ -8') and formula (X １０ -10′), *, ** are binding sites, * is R ｂｂ１ represents the bonding site with the carbon atom to which it is bonded.

27. X １０ is a single bond or a group of the formula (X １０ -1'), formula (X １０ -5'), formula (X １０ -6') and formula (X １０ The carboxylate according to claim 26, wherein the carboxylate is a group represented by any one of the following formulas:

28. L １０ represents a single bond, an alkanediyl group having 1 to 6 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, The cyclic hydrocarbon group may have a substituent, and the alkanediyl group and the -CH ２ - is -O-, -S-, -SO ２ The carboxylate according to claim 19 or 20, which may be replaced by - or -CO-.

29. A resin containing a structural unit represented by formula (IP): 【Chemistry 15】 [In the formula (IP), X represents a sulfur atom or an iodine atom. m10 represents 0 or 1, and when X is a sulfur atom, m10 is 1, and when X is an iodine atom, m10 is 0. R １Ａ and R １Ｂ are each independently *-X １ -R １０ Or *-X １ -L １１ -X ２ -R １０ represents R ４ is bonded to a benzene ring or R ７ represents the bonding site with the benzene ring to which it is attached. X １ and X ２ are each independently *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (wherein * represents a benzene ring or L １１ ) represents the binding site with L １１ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ R may be replaced by - or -CO-. １０ is -SO ２ Represents a group having -. R ４ represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, and the —CH ２ - is -O-, -S-, -CO-, -SO- or -SO ２ It may be replaced by -. R ７ , R ８ and R ９ each independently represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, ２ - is -O-, -S-, -CO-, -SO- or -SO ２ When X is a sulfur atom, R ７ and R ８ Or R ８ and R ９ is bonded to S ＋ The R forming the ring may form a ring containing ７ and R ８ Or R ８ and R ９ , S ＋ The —CH ２ - is -O-, -S-, -CO-, -SO- or -SO ２ It may be replaced with -. m1A represents an integer of 0 to 5, and when m1A is 2 or more, a plurality of R １Ａ may be the same or different from each other. m1B represents an integer of 0 to 4, and when m1B is 2 or more, a plurality of R １Ｂ may be the same or different, provided that either m1A or m1B is an integer of at least 1. m4 represents an integer of 0 to 5, and when m4 is 2 or more, a plurality of R ４ may be the same or different, and satisfy 0≦m1A+m4≦5. m7 represents an integer of 0 to 4, and when m7 is 2 or more, a plurality of R ７ may be the same or different, and satisfy 0≦m1B+m7≦4. m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R ８ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. X ０ represents a single bond or a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. R ｂｂ１ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３ -**, *-NR ３ -CO-O-**, *-O-CO-NR ３ -** or *-Ax-Ph-Ay-**. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R ｂｂ１ represents the bonding site with the carbon atom to which it is bonded. L １０ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -SO ２ - or -CO- may be substituted.]

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