Teaching method and substrate processing system

Abstract

To provide a technique that enables stable loading and unloading of consumable parts in a storage module.SOLUTION: A substrate processing system includes a transport device that transports consumable parts, and a storage module in which a cassette capable of storing a plurality of the consumable parts is set. A teaching method which teaches a transport position of the consumable parts in the cassette includes the steps of: (A) recognizing the setting of the cassette in the storage module; and (B), after the step (A), detecting the cassette with a sensor included in the transport device, and calculating three-dimensional coordinates of the cassette on the basis of detection information from the sensor.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present disclosure relates to a teaching method and a substrate processing system. [Background technology]

[0002] Patent Document 1 discloses a substrate processing system in which a storage module that stores consumable parts used during substrate processing is connected to a vacuum transfer module (vacuum transfer chamber). The substrate processing system controls a transfer robot (robot arm) of the vacuum transfer module to unload the consumable parts from the storage module and load the consumable parts into the processing module. The substrate processing system also unloads used consumable parts from the process module by the transfer robot and loads the used consumable parts into the storage module. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2022-2255 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique for stably transporting consumable parts in and out of a storage module. [Means for solving the problem]

[0005] According to one aspect of the present disclosure, there is provided a teaching method for teaching a transport position of a consumable part in a cassette, comprising a conveying device for transporting consumable parts and a storage module in which a cassette capable of storing a plurality of the consumable parts is set, the teaching method including: (A) a step of recognizing the setting of the cassette in the storage module; and (B) after step (A), a step of detecting the cassette using a sensor provided in the conveying device and calculating three-dimensional coordinates of the cassette based on detection information from the sensor. Effect of the Invention

[0006] According to one aspect, the consumable parts can be stably transported in and out of the storage module. [Brief description of the drawings]

[0007] [Figure 1] 1 is a schematic plan view showing an example of the overall configuration of a substrate processing system according to an embodiment; [Diagram 2] FIG. 2 is an enlarged plan view showing the fork and the substrate of the vacuum transport device. [Diagram 3] Fig. 3(A) is a side view for explaining the principle of teaching the transfer position of the vacuum transfer device, and Fig. 3(B) is a plan view for explaining the principle of teaching the transfer position of the vacuum transfer device. [Figure 4] 2 is a side cross-sectional view of a storage module of the substrate processing system. FIG. [Diagram 5] 4 is a flowchart showing a process flow of a teaching method according to the embodiment. [Figure 6] 13 is a flowchart showing a process flow of a cassette position detection step of the teaching method. [Figure 7] Fig. 7(A) is a side view showing the operation of the fork side sensor to detect the bottom plate, Fig. 7(B) is a plan view showing the operation of the fork side sensor to detect the opening of the bottom plate, and Fig. 7(C) is a plan view showing the operation of the fork side sensor to detect the height position of the bottom plate. [Figure 8] Fig. 8(A) is a side view showing the operation of the fork-side sensor to detect the table top, and Fig. 8(B) is a plan view showing the operation of the fork-side sensor to detect the height position of the table top. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and duplicated descriptions may be omitted.

[0009] Fig. 1 is a schematic plan view showing an example of the overall configuration of a substrate processing system 1 according to an embodiment. As shown in Fig. 1, the substrate processing system 1 is a multi-chamber type semiconductor manufacturing apparatus including a plurality of (six) processing modules 10. Each processing module 10 performs substrate processing such as film formation processing, etching processing, cleaning processing, etc. on a substrate W transferred therein. In addition to each processing module 10, the substrate processing system 1 also includes a vacuum transfer module 20, a plurality of load lock modules 30, an atmospheric transfer module 40, a load port 50, a storage module 60, a control unit 90, etc.

[0010] Each processing module 10 carries the substrate W in and out of the vacuum transfer module 20, and performs the above-mentioned substrate processing when the substrate W is in the carried-in state. Of course, the number of processing modules 10 provided in the substrate processing system 1 is not particularly limited. Furthermore, the multiple processing modules 10 may perform the same processing, or some or all of them may perform different processing. The substrate processing system 1 may be configured to perform plasma processing in some or all of the processing modules 10.

[0011] Each processing module 10 has a processing vessel 11 that accommodates a substrate W, and a substrate support 12 on which the substrate W is placed inside the processing vessel 11. The substrate support 12 includes a lifter (not shown) that raises and lowers the substrate W, and receives and delivers the substrate W in cooperation with a vacuum transfer device 22 of a vacuum transfer module 20, which will be described later.

[0012] The substrate processing system 1 also includes a connection unit 15 that connects the processing vessel 11 of each processing module 10 to the vacuum transfer module 20, and a processing module sensor 14 that detects the substrate W. The connection unit 15 has an internal gate valve (not shown) that opens and closes the opening 11a of the processing vessel 11. Each processing module 10 can transfer the substrate W to the processing vessel 11 through the connection unit 15 by opening the gate valve, and can depressurize the inside of the processing vessel 11 to an appropriate vacuum atmosphere by closing the gate valve.

[0013] The processing module side sensor 14 detects the outer edge of the substrate W when the substrate W is transported between each processing module 10 and the vacuum transfer module 20, and transmits the detection information to the control unit 90. The control unit 90 can calculate the center position of the substrate W based on the detection information of each processing module side sensor 14, and can recognize the deviation of the center position of the substrate W being transported to the vacuum transfer device 22. The processing module side sensor 14 is provided, for example, at a position adjacent to the opening 11a of each processing module 10 in the vacuum transfer module 20. The processing module side sensor 14 may be provided inside the connection portion 15, or may be provided at a position adjacent to the opening 11a in the processing module 10.

[0014] The processing module side sensor 14 has two detectors 141, 142 for detecting the presence or absence of the substrate W. For example, each detector 141, 142 includes a light-emitting section that emits light for measurement and a light-receiving section that receives the light from the light-emitting section across the path through which the substrate W passes (both not shown), and detects the presence of the substrate W when the light for measurement is blocked based on the passage of the substrate W. The two detectors 141, 142 are aligned in a direction parallel to the opening 11a and are arranged such that the distance between them is shorter than the diameter of the substrate W. The method for detecting the position of the substrate W by the processing module side sensor 14 is substantially the same as the method for detecting the position of the substrate W by the fork side sensor 227 of the vacuum transfer device 22 described below.

[0015] The vacuum transfer module 20 of the substrate processing system 1 includes a transfer container 21 connected to each processing module 10 and each load lock module 30, and a vacuum transfer device 22 that transfers the substrate W provided in the transfer container 21. The vacuum transfer module 20 may include a plurality of transfer regions (or transfer containers 21) each having the vacuum transfer device 22, and a pass region connecting each transfer region, and may be configured to transfer the substrate W from one transfer region to another transfer region via the pass region.

[0016] The transfer container 21 is formed in a rectangular shape in a plan view, and has a transfer space 21s that is airtightly closed from the outside. The transfer space 21s is depressurized to a vacuum atmosphere by a vacuum suction device (not shown). The substrate processing system 1 according to the embodiment has three processing modules 10 connected to each of a pair of long sides of the transfer container 21. In addition, the substrate processing system 1 has two load lock modules 30 connected to one short side of the transfer container 21.

[0017] The vacuum transfer device 22 moves within the transfer space 21s under the control of the control unit 90 to transfer the substrate W. For example, the vacuum transfer device 22 transfers the substrate W from an appropriate load lock module 30 to an appropriate processing module 10. Also, under the control of the control unit 90, the vacuum transfer device 22 transfers the substrate W from an appropriate processing module 10 to an appropriate load lock module 30. Furthermore, the vacuum transfer device 22 may transfer the substrate W between two processing modules 10.

[0018] In addition to the substrate W, the vacuum transfer device 22 transfers consumable members used in the processing module 10. In the embodiment, the consumable member transferred by the vacuum transfer device 22 is a ring R arranged on the substrate support portion 12 of the processing module 10. The ring R may be, for example, an edge ring (or a focus ring) arranged around the outer edge of the substrate W, or a cover ring arranged around the edge ring (or focus ring). However, the consumable member transferred by the vacuum transfer device 22 is not limited to the ring R, and may be, for example, an upper electrode of the processing module 10 that is consumed in plasma processing, or a member inside the processing vessel 11.

[0019] The vacuum transfer device 22 has a base 221 that is movable in the longitudinal direction of the transfer container 21, a plurality of arms 222 that can rotate, expand, and contract, and move up and down relative to the base 221, and a fork (end effector) 223 provided on the arm 222 on the distal end side. Note that, although Fig. 1 illustrates the vacuum transfer device 22 equipped with two forks 223, the present invention is not limited thereto, and the vacuum transfer device 22 may have a configuration equipped with one or three or more forks 223.

[0020] Fig. 2 is an enlarged plan view showing the fork 223 and the substrate W of the vacuum transfer device 22. As shown in Fig. 2, the vacuum transfer device 22 supports the substrate W on the upper surface of the fork 223, and transfers the substrate W by appropriately operating the base 221 and each arm 222 shown in Fig. 1. Note that when transferring the ring R, the vacuum transfer device 22 supports the ring R on the upper surface of the fork 223 as well.

[0021] The fork 223 includes a base plate 224 connected to the arm 222 on the distal end side, and a pair of support plates 225 extending from the base plate 224 in two branches. The base plate 224 and the pair of support plates 225 are integrally formed with each other and are continuous in the horizontal direction, forming a U-shape in plan view. The pair of support plates 225 are formed parallel to each other and have the same length. The fork 223 has a recessed space 223s surrounded by the base plate 224 and the pair of support plates 225. This recessed space 223s is open at the tips (extending ends) of the pair of support plates 225.

[0022] Furthermore, the fork 223 includes a plurality of pads 226 on the upper surfaces of the base plate portion 224 and the support plate portion 225. For example, the plurality of pads 226 are provided at a widthwise intermediate position of the base plate portion 224 and at the tip side of the pair of support plate portions 225, thereby directly supporting three portions of the substrate W. The plurality of pads 226 may be formed of a material such as an elastomer having appropriate frictional force and elasticity. Furthermore, the fork 223 may be configured to include a holding means such as a suction mechanism, an electrostatic adsorption mechanism, or a mechanical locking mechanism that utilizes the plurality of pads 226 (or in place of the plurality of pads 226) to hold the substrate W.

[0023] When supporting the substrate W with the forks 223, the vacuum transfer device 22 moves the forks 223 so that the center position Wo of the substrate W is aligned with a reference position 223o preset on the forks 223. The position to which the forks 223 of the vacuum transfer device 22 move to place or receive the substrate W corresponds to the "transfer position" of the substrate W. The vacuum transfer device 22 moves the forks 223 so that the reference position 223o is aligned with the transfer position designated in the control. This makes it possible to support the substrate W so that the reference position 223o of the forks 223 and the center position Wo of the substrate W are aligned, and also to transport the supported substrate W to the target transfer position.

[0024] The fork 223 is provided with a fork-side sensor 227 for detecting the substrate W, which is a transported object, on a surface (lower surface) opposite to the surface supporting the substrate W. The fork-side sensor 227 according to the embodiment has a plurality of detectors 227a, 227b (two in FIG. 2). Each detector 227a, 227b is provided near the extending end (tips of the fork 223) of the pair of support plate portions 225, and detects an object present (facing) below the fork 223 in the vertical direction. The fork-side sensor 227 is communicatively connected to the control unit 90, performs detection under the control of the control unit 90, and transmits the detection information to the control unit 90.

[0025] For example, fork-side sensor 227 may be a displacement sensor that optically measures the distance from fork 223 to an object. In this case, each detector 227a, 227b of fork-side sensor 227 has a light-emitting unit and a light-receiving unit, and measures the distance to the object based on the light intensity or wavelength of the detection light projected by the light-emitting unit and reflected by the object. Alternatively, each detector 227a, 227b may be configured to detect a change in the height of the object using an on / off signal based on the light intensity.

[0026] FIG. 3(A) is a side view for explaining the principle of teaching the transport position of the vacuum transport device 22. FIG. 3(B) is a plan view for explaining the principle of teaching the transport position of the vacuum transport device 22. As shown in FIG. 3(A) and FIG. 3(B), in the teaching method, the fork side sensor 227 of the vacuum transport device 22 is used to detect a plurality of positions of the outer edge of the substrate W, and the center position Wo of the substrate W can be calculated from the positions of the plurality of outer edges. Specifically, the control unit 90 detects (scans) the substrate W by the fork side sensor 227 while sliding the vacuum transport device 22 horizontally and linearly above the vertical direction of the substrate W. At this time, the vacuum transport device 22 is controlled in linear movement so that the reference position 223o of the fork 223 passes through a preset design position.

[0027] The fork-side sensor 227 provided near the tip of each support plate 225 of the vacuum transfer device 22 detects the outer edge of the substrate W by passing above the substrate W. When passing above the substrate W, each detector 227a, 227b of the fork-side sensor 227 transmits to the control unit 90 the timing at which the distance changes from a long distance to a short distance and the timing at which the distance changes from a short distance to a long distance. In addition, the control unit 90 recognizes the position of the fork 223, in other words the positions (three-dimensional coordinates) of each detector 227a, 227b, based on the operation of each arm 222 of the vacuum transfer device 22 during scanning of the vacuum transfer device 22. The control unit 90 can recognize four positions Wd (see white stars in FIG. 5(B)) on the outer edge of the substrate W by linking the timing of the detection information of the fork-side sensor 227 with the recognized positions of each detector 227a, 227b.

[0028] The fork side sensor 227 is not limited to detecting the outer edge of the substrate W, which is the transported object, based on the amount of displacement detected by the optical displacement sensor. For example, the fork side sensor 227 may detect the edge of the transported object by capturing a change in light intensity (the intensity of light irradiated from the fork side sensor 227 to a target and reflected). In short, in the teaching method, a location where the height of the transported object changes can be detected based on a change in the measurement value of the sensor applied to the fork side sensor 227 (for example, a change in light intensity). The type of the fork side sensor 227 is not particularly limited, and an on-off sensor that detects the transported object based on the transmission or blocking of detection light, a capacitance sensor that detects a change in capacitance when the transported object passes above, etc. may be applied. Alternatively, an infrared sensor, an ultrasonic sensor, a radar, a camera, etc. may be applied to the fork side sensor 227. The substrate processing system 1 is also not particularly limited to the position of the fork side sensor 227 or the number of detectors. For example, if one camera is applied to the fork side sensor 227 to capture an image of the transported object, the center position of the transported object can be calculated.

[0029] Then, the control unit 90 calculates the center position Wo of the substrate W (see the black stars in FIG. 3(B)) using the positions of the four points Wd detected by the fork side sensor 227. For example, the control unit 90 can calculate normal lines extending radially inward from each of the detected four points Wd, and calculate the point where the normal lines intersect with each other as the center position Wo of the substrate W.

[0030] Returning to FIG. 1, the two load lock modules 30 of the substrate processing system 1 are provided between the vacuum transfer module 20 and the atmospheric transfer module 40, and switch the interior between an atmospheric atmosphere and a vacuum atmosphere. Specifically, each load lock module 30 includes a container 31 for accommodating the substrate W, and a mounting table 32 for mounting the substrate W inside the container 31. For example, the mounting table 32 includes a groove (not shown) into which the fork 223 of the vacuum transfer device 22 and the fork 423 of the atmospheric transfer device 42 described below can enter, and the substrate W is received and transferred by the advancement and retreat and elevation of the forks 223, 423. The mounting table 32 may be configured to include a lifter, similar to the substrate support unit 12 of the processing module 10.

[0031] Each load lock module 30 has a connection part 33 on the vacuum transfer module 20 side and a connection part 35 on the atmospheric transfer module 40 side. The connection parts 33 and 35 have gate valves (not shown) therein for opening and closing the opening of the container 31. Each load lock module 30 communicates with the vacuum transfer module 20 by opening the gate valve of the connection part 33 in a vacuum atmosphere state. Each load lock module 30 also communicates with the atmospheric transfer module 40 by opening the gate valve of the connection part 35 in an atmospheric atmosphere state.

[0032] The atmospheric transfer module 40 of the substrate processing system 1 maintains an atmospheric atmosphere inside. The atmospheric transfer module 40 includes a transfer container 41 connected to each load lock module 30, and an atmospheric transfer device 42 that transfers the substrate W in the transfer container 41. The atmospheric transfer module 40 may form a downflow of clean air inside the transfer container 41. The atmospheric transfer module 40 also includes an aligner 43 on its side that adjusts the positional deviation and circumferential attitude of the substrate W.

[0033] Furthermore, a plurality of load ports 50 are provided on the wall surface of the atmospheric transfer module 40. A carrier C housing a substrate W or an empty carrier C is attached to each load port 50. For example, a FOUP (Front Opening Unified Pod) or the like can be used as the carrier C. Furthermore, a carrier C housing a ring R, which is an example of a transported object, may be attached to each load port 50.

[0034] The atmospheric transfer device 42, like the vacuum transfer device 22, has a base 421 movable in the longitudinal direction of the transfer container 41, a plurality of arms 422 that can rotate, expand and contract, and move up and down relative to the base 421, and a fork (end effector) 423 provided on the arm 422 at the distal end. The atmospheric transfer device 42 supports the substrate W on the upper surface of the fork 423, and transfers the substrate W by appropriately operating the base 421 and each arm 422. Note that, although FIG. 1 illustrates an atmospheric transfer device 42 having two forks 423, the present invention is not limited thereto, and the atmospheric transfer device 42 may have a configuration including one or three or more forks 423.

[0035] The atmospheric transfer device 42 transfers the substrate W between each load lock module 30 and the atmospheric transfer module 40 in response to opening and closing of the gate valves of each connection part 35. The atmospheric transfer device 42 also transfers the substrate W between the aligner 43 and the atmospheric transfer module 40. Furthermore, the atmospheric transfer device 42 transfers the substrate W between each carrier C attached to each load port 50 and the atmospheric transfer module 40.

[0036] The control unit 90 is a computer having a processor 91, a memory 92, and an input / output interface and a communication interface (not shown). The processor 91 is a combination of one or more of a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), a circuit made of a plurality of discrete semiconductors, and executes and processes a program stored in the memory 92. The memory 92 includes a main storage device made of a semiconductor memory or the like, and an auxiliary storage device made of a disk, a drive, a semiconductor memory (flash memory), and the like.

[0037] For example, the control unit 90 transports the unprocessed substrate W of the carrier C attached to the load port 50 to the aligner 43 by the atmospheric transport device 42 to adjust the positional deviation and attitude, and further transports the substrate W of the aligner 43 to one of the load lock modules 30. Then, the control unit 90 reduces the pressure of the load lock module 30 containing the substrate W, and then removes the substrate W by the vacuum transport device 22 and transports the substrate W into one of the processing modules 10 via the vacuum transport module 20. Thereafter, the control unit 90 performs substrate processing in each processing module 10 into which the substrate W has been carried. After the substrate processing, the control unit 90 transports the substrate W from one processing module 10 to the carrier C for accommodating the processed substrate W by reversing the above procedure.

[0038] In addition, in the substrate processing system 1 according to the embodiment, a storage module 60 that stores a plurality of rings R, which are consumable members, is connected to the vacuum transfer module 20. The storage module 60 includes a storage housing 61 and a connection part 62 that connects between the storage housing 61 and the vacuum transfer module 20. The connection part 62 has a passage 62s (see FIG. 4) that communicates with the space of the storage housing 61, and includes a gate valve (not shown) for opening and closing the passage 62s. The storage module 60 can transport the rings R through the connection part 62 by opening the gate valve, while the storage module 60 can reduce the pressure inside the storage housing 61 to an appropriate vacuum atmosphere by closing the gate valve. In FIG. 1, the storage module 60 is installed at the end of the vacuum transfer module 20 in the longitudinal direction (the end opposite to each load lock module 30), but is not limited thereto, and may be installed in place of any of the plurality of processing modules 10 in the lateral direction, for example.

[0039] The substrate processing system 1 uses the vacuum transfer device 22 to transfer the ring R out of the storage module 60, transfers the ring R into an appropriate processing module 10, and delivers the ring R to the substrate support part 12. When the ring R in the processing module 10 is consumed due to substrate processing, the substrate processing system 1 causes the vacuum transfer device 22 to enter the processing module 10 to receive the used ring R, transfers the ring R to the storage module 60, and stores it in an empty tray.

[0040] FIG. 4 is a side cross-sectional view showing the storage module 60 of the substrate processing system 1. As shown in FIG. 4, the storage module 60 has a storage housing 61 installed on a frame 63, and a sub-housing 64 on the upper part of the storage housing 61. The storage module 60 may also have a gas supply unit that supplies an inert gas such as N2 gas and an exhaust unit that exhausts the gas outside the storage housing 61 (both not shown). The storage module 60 can adjust the inside to an appropriate pressure by exhausting the gas in the storage housing 61 by the exhaust unit while supplying the inert gas by the gas supply unit. The space between the storage housing 61 and the sub-housing 64 is airtightly closed. Therefore, the sub-housing 64 may be in an atmospheric air.

[0041] A cassette 70 that stores a plurality of rings R is set inside the storage housing 61. The storage housing 61 includes a basket 65 in which the cassette 70 is set, and an aligner 66 installed on the upper part of the basket 65. The basket 65 has a bottom 651 that supports the cassette 70, a ceiling 652 that supports the aligner 66 above the bottom 651, and a sidewall 653 that extends vertically upward from the bottom 651 and supports the ceiling 652. The space surrounded by the bottom 651, the ceiling 652, and the sidewall 653 forms a storage space 65s that stores the cassette 70.

[0042] In the storage module 60, a worker sets the cassette 70 in the storage space 65s of the basket 65. A door (not shown) for carrying in and carrying out the cassette 70 from the outside is provided at an appropriate position of the storage housing 61. In addition, a movable body 671 of a ball screw mechanism 67 is connected to a bottom 651 of the basket 65.

[0043] The ball screw mechanism 67 extends vertically (in the Z-axis direction) between the upper and lower surfaces of the storage housing 61, and penetrates the ceiling of the storage housing 61 to be connected to a motor 68 in the sub-housing 64. The ball screw mechanism 67 rotates under the drive of the motor 68, thereby moving the basket 65 vertically via the movable body 671.

[0044] The aligner 66 has a mounting table 661 on which the ring R is mounted, and a detection unit 662 that detects the ring R on the mounting table 661. For example, the mounting table 661 has a rotation mechanism (not shown) that rotates the mounted ring R clockwise or counterclockwise. For example, an optical sensor that combines a light emitting unit and a light receiving unit can be used as the detection unit 662.

[0045] While rotating the mounting table 661, the aligner 66 detects an orientation flat (OF) or notch of the ring R using a detection unit 662, and transmits the detection information to the control unit 90. The control unit 90 recognizes the orientation flat of the ring R by utilizing the fact that the amount of light in the detected detection information changes depending on the presence or absence of an orientation flat. Note that the detection unit 662 may use other optical sensors such as a camera. When a camera is used, the control unit 90 calculates position information of the ring R by applying a known image processing technique to the image captured by the camera.

[0046] The control unit 90 controls the aligner 66 and the vacuum transfer device 22 based on the detected position and circumferential orientation of the ring R (the direction of the orientation flat) to adjust the position and orientation of the ring R and hold it on the vacuum transfer device 22. This allows the vacuum transfer device 22 to hold the ring R with high precision and transfer it to the processing module 10.

[0047] The cassette 70 set in the storage space 65s of the basket 65 is a storage container that is open on one side and can store a plurality of rings R along the vertical direction. The cassette 70 is set in the basket 65 by an operator so that the open side faces the connection portion 62 of the storage module 60.

[0048] The cassette 70 according to the embodiment is assembled by stacking a plurality of trays 71 vertically, each of which supports a ring R. The plurality of trays 71 have the same thickness, and the rings R can be arranged at equal intervals vertically. Each tray 71 has, for example, a U-shaped support plate that supports the lower surface and both sides in the width direction of the ring R, and the fork 223 of the vacuum transport device 22 is inserted into the space inside the support plate to support the ring R on the upper surface of the fork 223.

[0049] The cassette 70 also has a bottom plate 72 that supports the lowermost tray 71. A circular opening 72h (see also FIG. 7(B)) is formed in the center of the bottom plate 72. For example, the opening 72h has a diameter that is larger than the width of the pair of support plate portions 225 of the fork 223, but smaller than the inner diameter of the ring R. The cassette 70 also has a top plate 73 that is placed on the upper surface of the uppermost tray 71 to cover the ring R. The top plate 73 is a flat plate that does not have an opening.

[0050] The cassette 70 is set in the basket 65 by an operator, guided by positioning means (not shown), such as a low protrusion or shallow groove provided on the bottom 651 of the basket 65. However, such positioning means has a slight gap between the cassette 70 and the positioning means, and it is not always possible to position the cassette 70 with high precision relative to the basket 65. In other words, there is a possibility that the storage module 60 will be set in the basket 65 with the entire cassette 70 misaligned.

[0051] Therefore, the substrate processing system 1 according to the embodiment is configured to perform a teaching method for teaching the vacuum transfer device 22 the transfer position of the cassette 70 under the control of the control unit 90 every time the cassette 70 is set in the storage module 60. This teaching method will be described below with reference to Figs. 5 and 6. Fig. 5 is a flowchart showing a process flow of the teaching method according to the embodiment. Fig. 6 is a flowchart showing a process flow of a cassette position detection step of the teaching method.

[0052] 5, in the teaching method, the control unit 90 performs an aligner position detection step (step S1) for detecting the position of the aligner 66 of the storage module 60 when starting up the system or when performing maintenance on the storage module 60. In the teaching method, this aligner position detection step is performed only once and is not performed when replacing the cassette 70, etc. This can speed up the work of replacing the cassette 70.

[0053] In the aligner position detection process, the control unit 90 detects the outer edge of the mounting table 661 of the aligner 66 at multiple locations (four locations) using the fork side sensor 227 described above while moving the vacuum transport device 22 above the aligner 66 of the storage module 60 (see also FIG. 3(B)). The control unit 90 recognizes each of the multiple locations based on the detection timing of the outer edge by the fork side sensor 227 and the positions of the forks 223 of the vacuum transport device 22 recognized within the control unit 90. Then, the control unit 90 calculates the center position (X coordinate, Y coordinate) of the mounting table 661 using each of the recognized positions of the outer edge of the mounting table 661.

[0054] Furthermore, when the vacuum transport device 22 enters, the control unit 90 performs distance measurement using the fork-side sensor 227 (displacement sensor) at multiple (four) positions facing the mounting surface of the mounting table 661. The control unit 90 calculates the height of the mounting surface of the mounting table 661 based on the result of the distance measurement by the fork-side sensor 227 and the position of the fork 223 of the vacuum transport device 22 recognized within the control unit 90. At this time, the control unit 90 calculates the average value of the calculated heights at the multiple positions, and sets this average value as the height (Z coordinate) of the aligner 66. This allows the control unit 90 to set the calculated three-dimensional coordinates of the aligner 66 as the reference position of the storage module 60.

[0055] Then, after starting up the system or after maintenance of the storage module 60, the control unit 90 monitors the setting of the cassette 70 in the storage module 60 (step S2). The worker opens the door of the storage module 60 and sets the cassette 70 in the storage space 65s of the basket 65. The control unit 90 may be configured to detect and recognize that the cassette 70 has been set using a sensor (not shown) or the like provided in the basket 65, or may be configured to recognize that the cassette 70 has been set by an operation performed by the worker to indicate that the cassette 70 has been set.

[0056] When the controller 90 recognizes that the cassette 70 has been set in the storage module 60 (step S2: YES), the controller 90 automatically starts a cassette position detection process (step S3) for detecting the position of the cassette 70. In the cassette position detection process, the controller 90 controls each component of the vacuum transport device 22 and the storage module 60 to sequentially execute the process flow of steps S101 to S110 shown in FIG.

[0057] Specifically, the control unit 90 first operates the ball screw mechanism 67 to raise the basket 65 and place the bottommost tray 71 of the cassette 70 in a position facing the connection unit 62 (step S101). At this time, the control unit 90 controls the movement of the basket 65 by utilizing the reference position of the aligner 66 acquired in the aligner position detection process (step S1 in FIG. 5). In other words, since the control unit 90 knows the reference position of the aligner 66 and the size of the basket 65, it can calculate the reference position of the bottommost tray 71 of the cassette 70 set in the basket 65. Therefore, the control unit 90 can move the basket 65 based on the reference position of the bottommost tray 71.

[0058] Next, the control unit 90 causes the fork 223 of the vacuum transport device 22 to enter the storage housing 61, and detects the position of the inner edge constituting the opening 72h in the bottom plate 72 of the cassette 70 (step S102). The inner edge of the opening 72h can be detected by applying the above-mentioned scanning method using the fork side sensor 227.

[0059] FIG. 7(A) is a side view showing the operation of detecting the bottom plate 72 by the fork side sensor 227. FIG. 7(B) is a plan view showing the operation of detecting the opening 72h of the bottom plate 72 by the fork side sensor 227. FIG. 7(C) is a plan view showing the operation of detecting the height position of the bottom plate 72 by the fork side sensor 227. As shown in FIG. 7(A) and FIG. 7(B), the control unit 90 slides the fork 223 in the horizontal direction and scans the fork side sensor 227. The control unit 90 recognizes the positions of the four points Cd of the inner edge based on the timing of detection of the inner edge of the opening 72h by the fork side sensor 227 and the position of the fork 223 of the vacuum conveying device 22 recognized in the control unit 90 (see the white stars in FIG. 7(B)). This makes it possible for the control unit 90 to calculate the coordinates (X coordinate, Y coordinate) of the center position Co of the opening 72h using the recognized positions of the four points Cd of the inner edge of the opening 72h (see the black star in FIG. 7(B)).

[0060] The control unit 90 also detects the height position of the bottom plate 72 of the cassette 70 when the forks 223 of the vacuum transport device 22 are retracted (step S103). The height position of the bottom plate 72 is detected by measuring the distance by the fork side sensor 227 at four points Cp facing the upper surface of the bottom plate 72 (see the white stars in FIG. 7(C)). The control unit 90 calculates the height position of the bottom plate 72 based on the result of the distance measurement by the fork side sensor 227 and the position of the forks 223 of the vacuum transport device 22 recognized in the control unit 90. The four points Cp of the bottom plate 72 are preferably set at two points on the inner side of the opening 72h in the approach direction and two points on the front side of the opening 72h in the approach direction. The control unit 90 calculates the average value of the height positions of the calculated four points Cp, and sets this average value as the coordinate (Z coordinate) of the height position of the bottom plate 72.

[0061] Then, after the fork 223 of the vacuum transport device 22 is retracted from the storage housing 61, the control unit 90 operates the ball screw mechanism 67 to lower the basket 65 so that the top plate 73 of the cassette 70 faces the connection unit 62 (step S104). At this time, too, the control unit 90 controls the movement of the basket 65 by utilizing the reference position of the aligner 66 acquired in the aligner position detection step (step S1 in FIG. 5).

[0062] Thereafter, the control unit 90 causes the fork 223 of the vacuum transport device 22 to enter the storage housing 61 again, and detects the height position of the top plate 73 of the cassette 70 (step S102). As shown in FIG. 8(A) and FIG. 8(B), there is a possibility that there is no gap between the ceiling part 652 of the basket 65 and the top plate 73 of the cassette 70 through which the fork 223 can enter sufficiently. Therefore, in detecting the height position of the top plate 73, the control unit 90 does not cause the fork 223 to enter between the ceiling part 652 and the top plate 73, and performs distance measurement by the fork side sensor 227 to two points Tp of the top plate 73 exposed on the front side in the direction of entry of the fork 223. The control unit 90 calculates the height position of the top plate 73 based on the result of the distance measurement by the fork side sensor 227 and the position of the fork 223 of the vacuum transport device 22 recognized within the control unit 90. The control unit 90 calculates the average value of the calculated height positions of the two points Tp, and sets this average value as the height (Z coordinate) of the tabletop 73.

[0063] When the detection of the bottom plate 72 and the top plate 73 of the cassette 70 is completed, the control unit 90 calculates the horizontal center position of the cassette 70 based on each detection result, and calculates the height position of the cassette 70 (step S106). For example, the control unit 90 uses the center position of the opening 72h of the bottom plate 72 as is for the horizontal position. In addition, the control unit 90 calculates the height position of the cassette 70 in an equal division using the recognized height positions of the bottom plate 72 and the top plate 73.

[0064] Then, the control unit 90 compares the calculated three-dimensional coordinates of the cassette 70 with the reference position of the cassette 70 held therein, and calculates the amount and direction of correction for the set cassette 70 (step S107). The reference position of the cassette 70 can be obtained in advance, for example, by using the reference position of the aligner 66 acquired in the aligner position detection process.

[0065] Furthermore, the control unit 90 judges whether the calculated correction amount is within an allowable range (step S108). If the correction amount is outside the allowable range, it can be said that the cassette 70 was placed significantly misaligned with respect to the target set position in the basket 65. Therefore, if the correction amount is outside the allowable range (step S108: NO), the control unit 90 notifies an error that the cassette 70 is misaligned via the connected user interface (step S109).

[0066] On the other hand, if the correction amount is within the allowable range, it can be said that the cassette 70 is set appropriately (within a range where the ring R can be held with high precision even if there is some misalignment) with respect to the basket 65. Therefore, if the correction amount is within the allowable range (step S108: YES), the control unit 90 sets the calculated correction amount for the cassette 70 (step S110).

[0067] By carrying out the above teaching method, the substrate processing system 1 can control the vacuum transport device 22 by taking into account the correction amount and correction direction of the cassette 70 taught with respect to the reference position of the cassette 70 when transporting the ring R, which is a consumable member, by the vacuum transport device 22. This allows the vacuum transport device 22 to hold the ring R with high precision, and for example, makes it possible to carry the ring R in and out while avoiding interference between the ring R and the storage module 60. Furthermore, the vacuum transport device 22 can place the ring R on the target processing module 10 with high precision. Note that, when carrying the ring R in and out of the storage module 60, the substrate processing system 1 may raise and lower the cage 65 of the storage module 60 in the vertical direction (Z-axis direction) based on the calculated correction amount. That is, the substrate processing system 1 can carry the ring R in and out with high precision by carrying out correction in the horizontal direction (X-axis direction, Y-axis direction) in the vacuum transport device 22 and also by carrying out correction in the vertical direction in the storage module 60.

[0068] The teaching method and the substrate processing system 1 according to the present disclosure are not limited to the above embodiment, and various modifications are possible. For example, in the above embodiment, the teaching method for transporting the ring R by the vacuum transport device 22 has been described. However, the teaching method according to the present disclosure can also be applied to a case where the cassette 70 containing the ring R is set in the atmospheric transport module 40 and the ring R is transported. In this case, the atmospheric transport module 40 in which the cassette 70 is set corresponds to the storage module.

[0069] In the teaching method according to the embodiment, a plurality of different positions (bottom plate 72, top plate 73) in the height direction of the cassette 70 are detected by the fork-side sensor 227, and the transport position of the cassette 70 is calculated. However, the teaching method may detect one location of the cassette 70 by the fork-side sensor 227, and calculate the transport position of the cassette 70. This allows the teaching method to be completed in a short time.

[0070] Furthermore, in the teaching method according to the embodiment, the fork-side sensor 227 detects the bottom plate 72 and the top plate 73 of the cassette 70. However, the teaching method may also detect other parts of the cassette 70 with the fork-side sensor 227. An example of other parts of the cassette 70 is detecting the tray 71 of the cassette 70 (such as an end of a U-shaped support). Alternatively, the cassette 70 may have a protrusion or the like protruding toward the connection portion 62 for detection by the fork-side sensor 227.

[0071] The technical ideas and effects of the present disclosure explained in the above embodiments will be described below.

[0072] A first aspect of the present disclosure is a teaching method for teaching a transport position of a consumable part in the cassette 70, comprising a transport device (vacuum transport device 22) for transporting a consumable part (ring R) and a storage module 60 in which a cassette 70 capable of storing a plurality of consumable parts is set, the teaching method including: (A) a step of recognizing the setting of the cassette 70 in the storage module 60; and (B) after step (A), a step of detecting the cassette 70 by a sensor (fork side sensor 227) provided in the transport device, and calculating the three-dimensional coordinates of the cassette 70 based on the detection information of the sensor.

[0073] As described above, the teaching method can use the sensor (fork side sensor 227) of the transport device (vacuum transport device 22) to efficiently and accurately teach the transport position of the cassette 70 set in the storage module 60. In particular, the teaching method teaches the transport position of the cassette 70 every time the cassette 70 is set in the storage module 60, making it possible to easily absorb errors when setting the cassette 70 and machine differences of the cassette 70 itself. Then, by using the taught transport position, the transport device can accurately hold the consumable member (ring R) and stably transport the consumable member in and out of the storage module 60.

[0074] Furthermore, the transport device (vacuum transport device 22) has a fork 223 that supports a consumable member (ring R), and a sensor (fork side sensor 227) is provided at the tip of the fork 223, and in step (B), the fork 223 advances relative to the cassette 70, thereby directly detecting the position of the cassette 70 with the sensor. This allows the teaching method to move the fork 223 and directly detect the position of the cassette 70 with the sensor, further improving the accuracy of teaching the transport position.

[0075] Moreover, the cassette 70 includes a bottom plate 72 having an opening 72h, and in step (B), a sensor (fork-side sensor 227) detects multiple positions of the inner edge of the bottom plate 72 that constitutes the opening 72h, and calculates the center position Co of the opening 72h based on the multiple positions of the inner edge of the bottom plate 72. In this way, in the teaching method, the horizontal position of the cassette 70 can be easily obtained by detecting the inner edge of the opening 72h of the bottom plate 72 with a sensor.

[0076] In step (B), the height position of the bottom plate 72 of the cassette 70 is detected by a sensor (fork-side sensor 227). This allows the teaching method to easily measure the height position of the cassette 70. In particular, by combining the teaching method with a step of detecting the opening 72h of the bottom plate 72 of the cassette 70, the three-dimensional coordinates of the cassette 70 can be quickly obtained.

[0077] In step (B), the height position of the top plate 73 of the cassette 70 is detected by a sensor (the fork side sensor 227). This makes it possible for the teaching method to easily obtain the height position of the cassette 70.

[0078] In step (B), a sensor (the fork-side sensor 227) detects a plurality of different positions in the height direction of the cassette 70. This enables the teaching method to calculate the height direction position of the cassette 70 with even greater accuracy.

[0079] The storage module 60 also has an aligner 66 that adjusts the positional deviation and / or the attitude in the rotational direction of the consumable member (ring R), and before step (A), a reference position of the aligner 66 is detected by a sensor (fork side sensor 227) of the transport device (vacuum transport device 22), and in step (B), the positions of the transport device and the cassette 70 are adjusted based on the reference position of the aligner 66. By using the reference position of the aligner 66 in this way, the transport device or the cassette 70 can be moved with high precision in the teaching method, and interference between the transport device and the cassette 70 can be avoided.

[0080] In addition, the sensor (fork side sensor 227) is a displacement sensor that measures the distance from the conveying device (vacuum conveying device 22) to the opposing object. This allows the teaching method to smoothly detect both the horizontal position and the vertical position of the cassette 70.

[0081] The consumable member is a ring R that is disposed around the substrate W during substrate processing. This makes it possible for the teaching method to accurately hold the ring R by controlling the transfer device (vacuum transfer device 22) based on the taught transfer position.

[0082] A second aspect of the present disclosure is a substrate processing system 1 including a transport device (vacuum transport device 22) that transports consumable parts (rings R), a storage module 60 in which a cassette 70 capable of storing a plurality of consumable parts is set, and a control unit 90, in which the control unit 90 performs the steps of (A) recognizing the setting of the cassette 70 in the storage module 60, and (B) after step (A), detecting the cassette 70 with a sensor (fork side sensor 227) included in the transport device and calculating three-dimensional coordinates of the cassette 70 based on detection information from the sensor, and recognizes the transport position of the consumable part in the cassette 70 based on the three-dimensional coordinates of the cassette 70. Even in this case, the substrate processing system 1 can stably transport consumable parts in and out of the storage module.

[0083] The teaching method and the substrate processing system 1 according to the embodiments disclosed herein are illustrative and not restrictive in all respects. The embodiments can be modified and improved in various forms without departing from the spirit and scope of the appended claims. The matters described in the above embodiments can be configured in other ways without any contradiction, and can be combined without any contradiction. [Explanation of symbols]

[0084] 1. Substrate Processing System 22 Vacuum transport device 227 Fork side sensor 60 Storage Module 70 Cassettes 90 Control section

Claims

1. A conveying device that conveys consumable parts; a storage module in which a cassette capable of storing a plurality of the consumable components is set, the method including: (A) recognizing the placement of the cassette in the storage module; (B) after the step (A), detecting the cassette using a sensor included in the transport device, and calculating three-dimensional coordinates of the cassette based on detection information from the sensor. Teaching methods.

2. the conveying device has a fork for supporting the consumable member, The sensor is provided at the tip of the fork, In the step (B), the fork is advanced relative to the cassette, and the position of the cassette is directly detected by the sensor. The teaching method according to claim 1 .

3. the cassette includes a bottom plate having an opening; In the step (B), a plurality of positions of an inner edge of the bottom plate constituting the opening are detected by the sensor, and a center position of the opening is calculated based on the plurality of positions of the inner edge of the bottom plate. The teaching method according to claim 2 .

4. In the step (B), a height position of a bottom plate of the cassette is detected by the sensor. The teaching method according to claim 2 .

5. In the step (B), a height position of a top plate of the cassette is detected by the sensor. The teaching method according to claim 2 .

6. In the step (B), a plurality of different positions in a height direction of the cassette are detected by the sensor. The teaching method according to claim 2 .

7. the storage module has an aligner that adjusts the positional deviation and / or the attitude in the rotational direction of the consumable member; Before the step (A), a reference position of the aligner is detected by the sensor of the transport device; In the step (B), positions of the conveying device and the cassette are adjusted based on a reference position of the aligner. The teaching method according to any one of claims 1 to 6.

8. The sensor is a displacement sensor that measures a distance from the conveying device to an opposing object. The teaching method according to any one of claims 1 to 6.

9. the consumable member is a ring that is placed around the substrate during substrate processing; The teaching method according to any one of claims 1 to 6.

10. A conveying device that conveys consumable parts; a storage module in which a cassette capable of storing a plurality of the consumable components is set; A substrate processing system comprising: The control unit is (A) recognizing the placement of the cassette in the storage module; (B) after the step (A), detecting the cassette using a sensor provided in the transport device, and calculating three-dimensional coordinates of the cassette based on detection information from the sensor; recognizing a transport position of the consumable component in the cassette based on three-dimensional coordinates of the cassette; Substrate processing system.

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