Camera and processing device

Abstract

To provide a camera with which it is possible to quickly form a macro image and a micro image without utilizing a drive optical system for changing the imaging magnification.SOLUTION: Provided is a camera comprising: a light source for irradiating a macro-image capturing region with light of a first wavelength and irradiating a micro-image capturing region with light of a second wavelength; an imaging element having a first imaging region and a second imaging region that does not overlap the first imaging region, for performing conversion from the light of the first wavelength in the first imaging region to an electrical signal for forming a macro image indicating the macro-image capturing region and conversion from the light of the second wavelength in the second imaging region to an electrical signal for forming a micro image indicating the micro-image capturing region; and an optical system for guiding the light of the first wavelength having been reflected by the macro-image capturing region to the first imaging region and guiding the light of the second wavelength having been reflected by the micro-image capturing region to the second imaging region.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a camera for separately capturing an image of a macro-imaged area included in a subject and a micro-imaged area that is included in the macro-imaged area and is narrower than the macro-imaged area, and a processing device for processing a workpiece that is the subject captured by the camera. [Background technology]

[0002] Chips of devices such as ICs (Integrated Circuits) are essential components in various electronic devices such as mobile phones and personal computers. Such chips are manufactured, for example, by dividing a workpiece such as a wafer on which multiple devices are formed along the boundaries of the multiple devices.

[0003] The workpiece is divided in a processing device such as a cutting device or a laser processing device. Such a processing device generally includes a holding unit for holding the workpiece, a processing unit for processing the workpiece held in the holding unit, and a camera for capturing an image of the workpiece held in the holding unit.

[0004] This camera is used, for example, to identify the area to be processed of the workpiece (e.g., the boundary between multiple devices, etc.). The number of chips formed on the workpiece becomes enormous as each chip becomes smaller. In this case, the area to be processed of the workpiece often becomes narrower. Therefore, in order to accurately identify the area to be processed of the workpiece, it is necessary to image a narrow area (micro-imaged area) included in the workpiece at a high magnification.

[0005] Moreover, in a workpiece, a huge number of devices are generally arranged regularly (for example, in a matrix), so when only an image showing a micro-imaged region of the workpiece (micro-image) is referred to, it may be difficult to identify an actual region of the workpiece that corresponds to the region shown in the micro-image.

[0006] In other words, in order to accurately identify the area to be processed of the workpiece, etc., it may be necessary to have not only a micro image, but also an image (macro image) that shows a wide area (macro imaged area) contained in the workpiece and that includes the micro imaged area (for example, an area including a notch formed on the outer edge of the workpiece).

[0007] In light of this, it has been proposed to provide a processing device with two types of cameras, specifically, a camera (camera for forming a macro image) for capturing an image of a macro imaged area included in the workpiece at a low magnification to form a macro image, and a camera (camera for forming a micro image) for capturing an image of a micro imaged area included in the macro imaged area at a high magnification to form a micro image (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0008] [Patent Document 1] JP 2005-85973 A Summary of the Invention [Problem to be solved by the invention]

[0009] In a processing device equipped with a macro image forming camera and a micro image forming camera, a macro image and a micro image are formed, for example, as follows, prior to processing of a workpiece. First, the macro image forming camera is positioned at a position suitable for capturing an image of a macro imaged region included in the workpiece. Next, the workpiece is captured by the macro image forming camera.

[0010] Then, a micro image forming camera is positioned at a position suitable for imaging a micro imaged region included in a macro imaged region. Then, the workpiece is imaged by the micro image forming camera. When a macro image and a micro image are formed in this manner, the time required for the formation of the macro image and the micro image is increased, which may result in a low throughput when the workpiece is processed in the processing device.

[0011] In addition, the processing device may be provided with one camera capable of changing the imaging magnification, instead of providing two types of cameras. This camera has an optical system (a driving optical system) that can perform lens switching or the like to change the imaging magnification, for example. However, a camera equipped with such a driving optical system is expensive, and providing a driving optical system may increase the size of the camera, which may limit the design of the processing device.

[0012] In view of these points, an object of the present invention is to provide a camera capable of quickly forming macro images and micro images without using a driving optical system for changing the imaging magnification. [Means for solving the problem]

[0013] According to one aspect of the present invention, there is provided a camera for separately capturing images of a macro-imaged area included in a subject and a micro-imaged area included in the macro-imaged area and narrower than the macro-imaged area, the camera comprising: a light source for irradiating the macro-imaged area with light of a first wavelength and irradiating the micro-imaged area with light of a second wavelength; an imaging element having a first imaging area and a second imaging area not overlapping with the first imaging area, and for converting the light of the first wavelength in the first imaging area into an electrical signal for forming a macro image showing the macro-imaged area and converting the light of the second wavelength in the second imaging area into an electrical signal for forming a micro image showing the micro-imaged area; and a light source for guiding the light of the first wavelength reflected by or transmitted through the macro-imaged area to the first imaging area and irradiating the light of the second wavelength reflected by or transmitted through the micro-imaged area to the first imaging area. and an optical system for guiding light to the second imaging region, the optical system having a diffractive lens through which the light of the first wavelength and the light of the second wavelength traveling from the subject to the imaging element pass, and a light branching section through which the light of the first wavelength and the light of the second wavelength traveling from the diffractive lens to the imaging element pass, the diffractive lens having a shape for making the diffraction efficiency of m-th order diffracted light (m is an integer other than 0) for the light of the second wavelength greater than the diffraction efficiency of n-th order diffracted light (n is an integer other than m). the optical branching section includes a diffractive surface having a shape such that the diffraction efficiency of p-th order diffracted light (p is an integer other than 0) for one of the light of the first wavelength and the light of the second wavelength is greater than the diffraction efficiency of q-th order diffracted light (q is an integer other than p); and the p-th order diffracted light of one of the light of the first wavelength and the light of the second wavelength diffracted in the optical branching section and the other of the light of the first wavelength and the light of the second wavelength that has passed through the optical branching section are guided to the imaging element.

[0014] Preferably, the optical system further includes a diffractive optical element through which the p-th order diffracted light of one of the first wavelength light and the second wavelength light diffracted in the optical branching unit passes, and the diffractive optical element has a shape for making the diffraction efficiency of the p-th order diffracted light for one of the first wavelength light and the second wavelength light greater than the diffraction efficiency of the q-th order diffracted light. The second wavelength is preferably shorter than the first wavelength. Also, it is preferable that the optical system further includes a first optical filter through which the light of the first wavelength that has passed through the optical branching unit passes and which has a transmittance of the light of the first wavelength greater than that of the light of the second wavelength, and a second optical filter through which the light of the second wavelength that has passed through the optical branching unit passes and which has a transmittance of the light of the second wavelength greater than that of the light of the first wavelength. Furthermore, it is preferable that the optical system further includes an adjustment unit for changing the optical magnification of each of the light of the first wavelength and the light of the second wavelength that are directed from the diffractive lens to the optical branching unit. In addition, it is preferable that the optical system further includes an adjustment section for changing the optical magnification of the light of the second wavelength that has passed through the optical branching section.

[0015] According to another aspect of the present invention, a processing device for processing a workpiece includes a holding unit for holding the workpiece, a processing unit for processing the workpiece held by the holding unit, and a camera for separately capturing images of a macro-imaged region included in the workpiece held by the holding unit and a micro-imaged region included in the macro-imaged region and narrower than the macro-imaged region, and the camera is configured to irradiate the macro-imaged region with light of a first wavelength and to irradiate the micro-imaged region with light of a second wavelength. the light source for irradiating the macro-imaged region with light of a wavelength; an image sensor having a first image capturing region and a second image capturing region not overlapping the first image capturing region, and for converting the light of the first wavelength in the first image capturing region into an electrical signal for forming a macro image showing the macro-imaged region, and converting the light of the second wavelength in the second image capturing region into an electrical signal for forming a micro image showing the micro-imaged region; and and an optical system for guiding the light of the second wavelength reflected by or transmitted through the micro imaged region to the second imaged region, the optical system having a diffractive lens through which the light of the first wavelength and the light of the second wavelength passing from the workpiece to the image sensor, and a light branching section through which the light of the first wavelength and the light of the second wavelength passing from the diffractive lens to the image sensor, the diffractive lens increasing the diffraction efficiency of m-th order diffracted light (m is an integer other than 0) for the light of the second wavelength to n-th order diffracted light (n is an integer other than 0). the optical branching section includes a diffractive surface having a shape for making the diffraction efficiency of p-th order diffracted light (p is an integer other than 0) for one of the light of the first wavelength and the light of the second wavelength greater than the diffraction efficiency of q-th order diffracted light (q is an integer other than p), and the p-th order diffracted light of one of the light of the first wavelength and the light of the second wavelength diffracted in the optical branching section and the other of the light of the first wavelength and the light of the second wavelength that has passed through the optical branching section are guided to the imaging element. Effect of the Invention

[0016] The camera of the present invention has a first imaging area and a second imaging area that does not overlap with the first imaging area, and is equipped with an imaging element for converting light of a first wavelength in the first imaging area into an electrical signal for forming a macro image showing a macro-imaged area, and converting light of a second wavelength in the second imaging area into an electrical signal for forming a micro image showing a micro-imaged area.

[0017] Therefore, in this camera, it is possible to generate electrical signals for forming a macro image and electrical signals for forming a micro image in parallel (for example, simultaneously), and as a result, in this camera, it is possible to quickly form macro images and micro images without using a driving optical system for changing the imaging magnification. [Brief description of the drawings]

[0018] [Figure 1] FIG. 1 is a diagram illustrating an example of a camera. [Diagram 2] FIG. 2(A) is a schematic diagram showing how light of a first wavelength reflected at a macro imaged area travels in the camera shown in FIG. 1, and FIG. 2(B) is a schematic diagram showing how light of a second wavelength reflected at a micro imaged area travels in the camera shown in FIG. 1. [Diagram 3] FIG. 3 is a diagram illustrating another example of a camera. [Figure 4] FIG. 4(A) is a schematic diagram showing how light of a first wavelength reflected at a macro imaged area travels in the camera shown in FIG. 3, and FIG. 2(B) is a schematic diagram showing how light of a second wavelength reflected at a micro imaged area travels in the camera shown in FIG. 3. [Diagram 5] FIG. 5 is a perspective view that illustrates an example of a processing device including the camera illustrated in FIG. 1 or FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] The embodiments of the present invention will be described with reference to the accompanying drawings. Note that the accompanying drawings are for the purpose of facilitating understanding of the present invention and do not necessarily accurately reflect the objects and / or methods in which the present invention is embodied.

[0020] Fig. 1 is a diagram showing an example of a camera. The camera 2 shown in Fig. 1 is used to separately capture images of a macro imaged region 11a included in a subject 11 and a micro imaged region 11b that is included in the macro imaged region 11a and is narrower than the macro imaged region 11a.

[0021] The subject 11 is, for example, a wafer or the like on which a huge number of devices are regularly arranged (for example, in a matrix) and made of a semiconductor material such as silicon, and Fig. 1 shows a longitudinal section of the subject 11. The camera 2 images, for example, the macro imaged region 11a at a low magnification (for example, 0.75 times) and the micro imaged region 11b at a high magnification (for example, 7.5 times).

[0022] For example, camera 2 forms a square macro image with each side being 6 mm long that represents macro-imaged area 11a, which is a square region with each side being 8 mm long in a planar view, and forms a square micro image with each side being 6 mm long that represents micro-imaged area 11b, which is a square region with each side being 0.8 mm long in a planar view.

[0023] The camera 2 has a light source 4 for irradiating the macro imaged region 11a with light of a first wavelength and for irradiating the micro imaged region 11b with light of a second wavelength. The light source 4 is, for example, a photodiode (LED) or a halogen lamp that emits a light beam (for example, a white light beam) composed of multi-wavelength light including the light of the first wavelength and the light of the second wavelength.

[0024] In the camera 2, for example, the light of the first wavelength is used to capture the macro imaged region 11a at a low magnification, and the light of the second wavelength is used to capture the micro imaged region 11b at a high magnification. Therefore, it is preferable that the second wavelength is shorter than the first wavelength. For example, the first wavelength and the second wavelength are set to 650 nm and 460 nm, respectively.

[0025] Furthermore, the camera 2 includes an image sensor 6 for converting light of a first wavelength into an electrical signal for forming a macro image (the former conversion) and converting light of a second wavelength into an electrical signal for forming a micro image (the latter conversion). The former conversion and the latter conversion are performed in a first image sensor 6 and a second image sensor 6b that does not overlap with the first image sensor 6, respectively.

[0026] In addition, the camera 2 is equipped with an optical system 8 for guiding light of a first wavelength emitted from the light source 4 to the macro imaged area 11a and guiding the light of the first wavelength reflected in the macro imaged area 11a to the first imaging area 6a, and for guiding light of a second wavelength emitted from the light source 4 to the micro imaged area 11b and guiding the light of the second wavelength reflected in the micro imaged area 11b to the second imaging area 6b.

[0027] The optical system 8 has a polarizing beam splitter (PBS) 10 toward which the light beam emitted from the light source 4 is directed. The PBS 10 is, for example, a cube-shaped PBS made up of two glued-together right-angle prisms, and is arranged so that the inclined surfaces of the right-angle prisms are inclined at 45° with respect to the traveling direction of the light beam emitted from the light source 4. Then, a part of the light beam (specifically, s-polarized light) is reflected by the PBS 10.

[0028] The light reflected by the PBS 10 travels toward the diffractive lens 12. The diffractive lens 12 is a diffractive optical element having a shape such that the surface (diffractive surface) on the incident side (specifically, on the PBS 10 side) diffracts the light of the second wavelength so as to converge.

[0029] Specifically, the diffractive surface of the diffractive lens 12 has a shape for making the diffraction efficiency of m-th order diffracted light (m is an integer other than 0) (e.g., 1st order diffracted light) for light of the second wavelength greater than the diffraction efficiency of n-th order diffracted light (n is an integer other than m) (e.g., 0th order diffracted light).

[0030] For example, the diffractive lens 12 is made of quartz glass with a refractive index of 1.465 for light with a wavelength of 460 nm, and is a disk-shaped lens with a radius of 4 mm. The diffractive surface of the diffractive lens 12 has a shape similar to the surface shape of a Fresnel lens, for example. Specifically, the diffractive surface has a grating pitch that gradually decreases with increasing distance from the optical axis center, and the grating height is 990 nm. For example, the grating pitch is about 8 nm in a region about 0.8 mm from the optical axis center, and is 2 nm in a region about 3.9 mm from the optical axis center. The designed order is the first order.

[0031] When the subject 11 is imaged by the camera 2, the light of the first wavelength that passes through the diffractive lens 12 is reflected in the macro-imaged area 11a, and the m-th order diffracted light of the light of the second wavelength diffracted by the diffractive lens 12 is reflected in the micro-imaged area 11b.

[0032] Fig. 2(A) is a diagram showing a schematic diagram of a state in which light L1 of a first wavelength reflected from the macro imaged region 11a travels in the camera 2. Fig. 2(B) is a diagram showing a schematic diagram of a state in which light L2 of a second wavelength reflected from the micro imaged region 11b travels in the camera 2.

[0033] The first wavelength light L1 and the second wavelength light L2 reflected by the subject 11 pass through the diffractive lens 12 and the PBS 10, and head toward an adjustment unit 14 for changing their optical magnifications. The adjustment unit 14 includes a plano-concave lens 14a having a flat surface on its incident side (specifically, the PBS 10 side), and a convex lens 14b toward which the first wavelength light L1 and the second wavelength light L2 that have passed through the plano-concave lens 14a are headed.

[0034] The plano-concave lens 14a is a lens for increasing the optical magnification of the first wavelength light L1 and the second wavelength light L2, and has a focal length of, for example, -22 mm. The convex lens 14b is a lens for decreasing the optical magnification of the first wavelength light L1 and the second wavelength light L2, and has a focal length of, for example, 36 mm.

[0035] The light L1 of the first wavelength and the light L2 of the second wavelength that have passed through the adjustment unit 14 proceed to the light branching unit 16. The light branching unit 16 is a diffractive optical element whose surface (diffraction surface) on the output side (specifically, the side farther from the adjustment unit 14) has a shape for branching the optical path of the light L1 of the first wavelength and the optical path of the light L2 of the second wavelength.

[0036] Specifically, the diffractive surface of the optical branching section 16 has a shape for making the diffraction efficiency of p-th order diffracted light (p is an integer other than 0) (e.g., 1st order diffracted light) for the first wavelength light L1 greater than the diffraction efficiency of q-th order diffracted light (q is an integer other than p) (e.g., 0th order diffracted light).

[0037] For example, the optical branching unit 16 is a diffractive optical element made of quartz glass with a refractive index of 1.457 for light with a wavelength of 650 nm. The diffractive surface of the optical branching unit 16 has a grating pitch of 9.8 μm, a grating height of 1.42 μm, and a designed diffraction order of 1.

[0038] The p-th order diffracted light of the first wavelength light L1 diffracted in the optical branching unit 16 travels toward the diffractive optical element 18. The diffractive optical element 18 has a shape such that the surface (diffraction surface) on the incident side (specifically, on the optical branching unit 16 side) thereof is shaped to return the traveling direction of the p-th order diffracted light of the first wavelength light L1 that has been changed in the optical branching unit 16 to its original direction.

[0039] Specifically, the diffractive surface of the diffractive optical element 18 has a shape for making the diffraction efficiency of the p-th order diffracted light for the first wavelength light L1 greater than the diffraction efficiency of the q-th order diffracted light. For example, the diffractive optical element 18 has a similar structure to the light branching unit 16, except that the incident surface, rather than the exit surface, is the diffractive surface.

[0040] The p-th order diffracted light of the first wavelength light L1 diffracted by the diffractive optical element 18 travels toward a first optical filter 20 having a higher transmittance for the first wavelength light L1 than for the second wavelength light L2. The first optical filter 20 is a filter for reducing the proportion of stray light (e.g., the second wavelength light L2) guided to the first imaging region 6a of the imaging element 6.

[0041] The light L2 of the second wavelength that has passed through the optical branching unit 16 (for example, the zeroth-order diffracted light of the light L2 of the second wavelength that has passed through the optical branching unit 16) travels to an adjustment unit 22 for increasing its optical magnification. The adjustment unit 22 is, for example, a plano-concave lens 22a whose incident side (specifically, the optical branching unit 16 side) has a flat surface, and its focal length is, for example, −5 mm.

[0042] The light L2 of the second wavelength that has passed through the adjustment unit 22 travels toward the second optical filter 24, which has a higher transmittance for the light L2 of the second wavelength than for the light L1 of the first wavelength. The second optical filter 24 is a filter for reducing the proportion of stray light (for example, the light L1 of the first wavelength) guided to the second imaging region 6b of the imaging element 6.

[0043] When the light L1 of the first wavelength and the light L2 of the second wavelength are guided to the first imaging area 6a and the second imaging area 6b, respectively, of the image sensor 6, the light L1 of the first wavelength in the first imaging area 6a is converted into an electrical signal for forming a macro image showing the macro-imaged area 11a, and the light L2 of the second wavelength in the second imaging area 6b is converted into an electrical signal for forming a micro image showing the micro-imaged area 11b.

[0044] Therefore, in the camera 2, it is possible to generate an electrical signal for forming a macro image and an electrical signal for forming a micro image in parallel (for example, simultaneously). As a result, in this camera 2, it is possible to quickly form a macro image and a micro image without using a driving optical system for changing the imaging magnification.

[0045] The above is one aspect of the present invention, and the present invention is not limited to the above. For example, in the camera of the present invention, instead of the first wavelength light L1 and the second wavelength light L2 reflected by the subject 11, the first wavelength light L1 and the second wavelength light L2 transmitted through the subject 11 may be used to image the macro imaged region 11a and the micro imaged region 11b, respectively. In this case, the light source 4 and the optical system 8 are provided so as to sandwich the subject 11 therebetween, and the optical system 8 does not need to be provided with the PBS 10.

[0046] Furthermore, in the camera of the present invention, at least one of the adjustment unit 14, the diffractive optical element 18, the first optical filter 20, the adjustment unit 22, or the second optical filter 24 may not be provided. Furthermore, in the adjustment unit 14, another optical element may be provided instead of or in addition to the plano-concave lens 14a or the convex lens 14b. Similarly, in the adjustment unit 22, another optical element may be provided instead of or in addition to the plano-concave lens 22a.

[0047] Furthermore, in the camera of the present invention, an optical branching section for diffracting light L2 of a second wavelength may be provided instead of the optical branching section 16 for diffracting light L1 of the first wavelength. Figure 3 is a diagram showing a schematic diagram of an example of such a camera.

[0048] The camera 26 shown in Fig. 3 includes the above-mentioned light source 4 and image sensor 6. However, in the camera 26 shown in Fig. 3, the positions of the first image sensing area 6a and the second image sensing area 6b in the image sensor 6 are swapped compared to the camera 2 shown in Fig. 1.

[0049] In addition, the camera 26 is equipped with an optical system 28 for guiding light of a first wavelength emitted from the light source 4 to the macro imaged area 11a and guiding the light of the first wavelength reflected in the macro imaged area 11a to the first imaging area 6a, and for guiding light of a second wavelength emitted from the light source 4 to the micro imaged area 11b and guiding the light of the second wavelength reflected in the micro imaged area 11b to the second imaging area 6b.

[0050] In short, the optical system 28 has a configuration similar to that of the optical system 8 shown in FIG. 1, except that the optical branching section 16 and the diffractive optical element 18 described above are replaced with an optical branching section 30 and a diffractive optical element 32, respectively, and the positions of the first optical filter 20, the adjustment section 22 and the second optical filter 24 described above are changed.

[0051] Specifically, the optical system 28 has the above-mentioned PBS 10 and the diffractive lens 12. When the subject 11 is imaged by the camera 26, the light of the first wavelength that has passed through the diffractive lens 12 is reflected at the macro-imaged region 11a, and the m-th order diffracted light of the light of the second wavelength diffracted by the diffractive lens 12 is reflected at the micro-imaged region 11b.

[0052] Fig. 4(A) is a diagram showing a schematic diagram of a state in which light L1 of a first wavelength reflected at the macro imaged region 11a travels in the camera 26. Fig. 4(B) is a diagram showing a schematic diagram of a state in which light L2 of a second wavelength reflected at the micro imaged region 11b travels in the camera 26.

[0053] Each of the light L1 of the first wavelength and the light L2 of the second wavelength reflected by the subject 11 passes through the diffractive lens 12, the PBS 10, and the above-mentioned adjustment unit 14, and proceeds to the light branching unit 30. The light branching unit 30 is a diffractive optical element whose surface (diffraction surface) on the emission side (specifically, the side farther from the adjustment unit 14) has a shape for branching the optical path of the light L1 of the first wavelength and the optical path of the light L2 of the second wavelength.

[0054] Specifically, the diffractive surface of the optical branching section 30 has a shape for making the diffraction efficiency of p-th order diffracted light (e.g., 1st order diffracted light) for the second wavelength light L2 greater than the diffraction efficiency of q-th order diffracted light (e.g., 0th order diffracted light).

[0055] For example, the optical branching unit 30 is a diffractive optical element made of quartz glass with a refractive index of 1.465 for light with a wavelength of 460 nm. The diffractive surface of the optical branching unit 30 has a grating pitch of 6.9 μm, a grating height of 990 nm, and a designed order of 1.

[0056] The light L1 of the first wavelength that has passed through the optical branching section 30 (for example, the zeroth-order diffracted light of the light L1 of the first wavelength that has been transmitted through the optical branching section 30) passes through the first optical filter 20 described above and is guided to the first imaging region 6a of the image sensor 6.

[0057] The p-th order diffracted light of the second wavelength light L2 diffracted in the optical branching unit 30 travels toward the diffractive optical element 32. The diffractive optical element 32 has a shape such that the surface (diffraction surface) on the incident side (specifically, the optical branching unit 30 side) thereof is shaped to return the traveling direction of the p-th order diffracted light of the second wavelength light L2 that has been changed in the optical branching unit 30 to its original direction.

[0058] Specifically, the diffractive surface of the diffractive optical element 32 has a shape for making the diffraction efficiency of the p-th order diffracted light for the second wavelength light L2 greater than the diffraction efficiency of the q-th order diffracted light. For example, the diffractive optical element 32 has a similar structure to the light branching unit 30, except that the incident surface, rather than the exit surface, is the diffractive surface.

[0059] The p-th order diffracted light of the second wavelength light L2 diffracted by the diffractive optical element 32 passes through the above-mentioned adjustment unit 22 and the second optical filter 24, and is guided to the second imaging region 6b of the imaging element 6. [Industrial Applicability]

[0060] The above-mentioned cameras 2, 26 are mounted, for example, on a processing device for processing a workpiece, and are used, for example, to identify the processing target area of ​​the workpiece (for example, the boundaries of multiple devices formed on the workpiece, etc.).

[0061] Fig. 5 is a perspective view showing a schematic example of a processing device equipped with the above-mentioned cameras 2 and 26. Note that the X-axis direction and the Y-axis direction shown in Fig. 5 are directions perpendicular to each other on a horizontal plane, and the Z-axis direction is a direction (vertical direction) perpendicular to the X-axis direction and the Y-axis direction. Also, in Fig. 5, some components of the processing device are shown as blocks.

[0062] 5 has a base 36 that supports each of the components. A horizontal movement mechanism 38 is provided on the upper surface of the base 36. The horizontal movement mechanism 38 is fixed to the upper surface of the base 36 and has a pair of Y-axis guide rails 40 that extend along the Y-axis direction.

[0063] A Y-axis moving plate 42 is connected to the upper part of the pair of Y-axis guide rails 40 in a manner that allows it to slide along the pair of Y-axis guide rails 40. A screw shaft 44 extending along the Y-axis direction is disposed between the pair of Y-axis guide rails 40. A motor 46 for rotating the screw shaft 44 is connected to one end of the screw shaft 44.

[0064] A nut (not shown) that accommodates balls that roll on the surface of the rotating screw shaft 44 is provided on the surface of the screw shaft 44 on which the helical groove is formed, thereby forming a ball screw. That is, when the screw shaft 44 rotates, the balls circulate inside the nut, and the nut moves along the Y-axis direction.

[0065] Moreover, this nut is fixed to the underside of the Y-axis moving plate 42. Therefore, when the screw shaft 44 is rotated by the motor 46, the Y-axis moving plate 42 moves along the Y-axis direction together with the nut.

[0066] A pair of X-axis guide rails 48 extending along the X-axis direction are fixed to the upper surface of the Y-axis moving plate 42. An X-axis moving plate 50 is connected to the upper part of the pair of X-axis guide rails 48 in a manner that allows it to slide along the pair of X-axis guide rails 48.

[0067] A screw shaft 52 extending along the X-axis direction is disposed between the pair of X-axis guide rails 48. A motor 54 for rotating the screw shaft 52 is coupled to one end of the screw shaft 52.

[0068] A nut (not shown) that accommodates balls that roll on the surface of the rotating screw shaft 52 is provided on the surface of the screw shaft 52 on which the helical groove is formed, thereby forming a ball screw. That is, when the screw shaft 52 rotates, the balls circulate inside the nut, and the nut moves along the X-axis direction.

[0069] Moreover, this nut is fixed to the underside of the X-axis moving plate 50. Therefore, when the screw shaft 52 is rotated by the motor 54, the X-axis moving plate 50 moves along the X-axis direction together with the nut.

[0070] A cylindrical table base 56 is provided on the upper surface side of the X-axis moving plate 50. A holding unit 58 for holding a workpiece such as a wafer on which a plurality of devices are formed is provided on the upper part of the table base 56. This holding unit 58 has a generally flat circular upper surface (holding surface), and a porous plate 58a is exposed on this holding surface.

[0071] Furthermore, the porous plate 58a communicates with a suction source (not shown) such as an ejector through a communication passage formed inside the holding unit 58. When the suction source is operated, a suction force acts on the space near the holding surface of the holding unit 58. Therefore, when the suction source is operated with a workpiece placed on the holding surface, the workpiece is held on the holding surface of the holding unit 58.

[0072] Furthermore, the holding unit 58 is connected to a rotation mechanism including a pulley, a motor, etc. When this rotation mechanism is operated, the holding unit 58 rotates about a rotation axis that passes through the center of the holding surface of the holding unit 58 and is aligned in the Z-axis direction.

[0073] A support structure 60 having a side surface generally parallel to the Y-axis direction is provided near the horizontal movement mechanism 38. A vertical movement mechanism 62 is provided on the side surface of this support structure 60. The vertical movement mechanism 62 is fixed to the side surface of the support structure 60 and has a pair of Z-axis guide rails 64 extending along the Z-axis direction.

[0074] A Z-axis moving plate 66 is connected to the side of the pair of Z-axis guide rails 64 that is farther from the support structure 60 in a manner that allows it to slide along the pair of Z-axis guide rails 64. A screw shaft (not shown) extending along the Z-axis direction is disposed between the pair of Z-axis guide rails 64. A motor 68 for rotating the screw shaft is connected to one end of the screw shaft.

[0075] A nut (not shown) that accommodates balls that roll on the surface of the rotating screw shaft is provided on the surface of the screw shaft where the helical grooves are formed, forming a ball screw. That is, when the screw shaft rotates, the balls circulate inside the nut, causing the nut to move along the Z-axis direction.

[0076] In addition, this nut is fixed to the side surface of the Z-axis moving plate 66 that is closer to the support structure 60. Therefore, when the screw shaft is rotated by the motor 68, the Z-axis moving plate 66 moves along the Z-axis direction together with the nut.

[0077] A support 70 is fixed to the side surface of the Z-axis moving plate 66 away from the support structure 60. The support 70 is connected to a laser beam irradiation unit (processing unit) 72 for performing laser processing on the workpiece held by the holding unit 58.

[0078] The laser beam irradiation unit 72 includes, for example, a laser oscillator (not shown) fixed to the base 36, a cylindrical housing 74 whose base end is supported by a support 70 and extends along the Y-axis direction, and a head 76 provided at the tip of the housing 74.

[0079] The laser oscillator fixed to the base 36 has a laser medium, such as Nd:YAG, suitable for laser oscillation. This laser oscillator emits a pulsed laser beam having a wavelength that is absorbed by the material of the workpiece (e.g., 355 nm) or transmitted by the material (e.g., 1064 nm or 1342 nm).

[0080] The housing 74 houses a part of the optical system constituting the laser beam application unit 72, for example, an optical system for guiding the laser beam emitted from the laser oscillator to the head 76. The head 76 houses another part of the optical system constituting the laser beam application unit 72, for example, an optical system for irradiating the focused laser beam onto the workpiece held by the holding unit 58.

[0081] Furthermore, the above-mentioned cameras 2 and 26 are provided at positions adjacent to the head 76 in the X-axis direction. The base 36 is also provided with a cover (not shown) that covers the above-mentioned components, and a touch panel 78 serving as a user interface is provided on one surface of this cover.

[0082] The touch panel 78 is configured by, for example, an input device such as a capacitive touch sensor or a resistive touch sensor, and a display device such as a liquid crystal display or an organic EL (Electro Luminescence) display.

[0083] The operations of the components of the processing device 34 described above are controlled by a controller 80 built into the processing device 34. The controller 80 includes a processor 80a and a memory 80b.

[0084] The processor 80a is configured, for example, by a CPU (Central Processing Unit) etc. The memory 80b is configured, for example, by a volatile memory such as a DRAM (Dynamic Random Access Memory) or an SRAM (Static Random Access Memory) and a non-volatile memory such as an SSD (Solid State Drive) (NAND type flash memory) or an HDD (Hard Disk Drive) (magnetic storage device).

[0085] The memory 80b stores various information (specifically, data, programs, etc.) used by the processor 80a. The processor 80a also controls the components of the processing device 34 to read out from the memory 80b and execute a program for processing a workpiece using a laser beam, for example.

[0086] In addition, in the processing apparatus of the present invention, a cutting unit for cutting a workpiece or a grinding unit for grinding a workpiece may be provided instead of or in addition to the laser beam irradiation unit 72. That is, the processing apparatus of the present invention is not limited to a laser processing apparatus for laser processing a workpiece, but may be a cutting apparatus for cutting a workpiece or a grinding apparatus for grinding a workpiece.

[0087] In addition, the structures and methods according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention. [Explanation of symbols]

[0088] 2: Camera 4:Light source 6: imaging element (6a: first imaging area, 6b: second imaging area) 8:Optical system 10: Polarizing beam splitter (PBS) 11: subject (11a: macro imaged area, 11b: micro imaged area) 12: Diffractive lens 14: Adjustment unit (14a: plano-concave lens, 14b: convex lens) 16: Optical branching section 18: Diffractive optical element 20: First optical filter 22: Adjustment section (22a: Plano-concave lens) 24: Second optical filter 26: Camera 28:Optical system 30: Optical branching section 32: Diffractive optical element 34: Processing equipment 36: Foundation 38: Horizontal movement mechanism 40: Y-axis guide rail 42: Y-axis moving plate 44: Screw shaft 46: Motor 48: X-axis guide rail 50: X-axis moving plate 52: Screw shaft 54: Motor 56: Table base 58: Holding unit (58a: Porous plate) 60:Support structure 62: Vertical movement mechanism 64: Z-axis guide rail 66: Z-axis moving plate 68: Motor 70: Support 72: Laser beam irradiation unit (processing unit) 74: Housing 76: Head 78: Touch panel 80: controller (80a: processor, 80b: memory)

Claims

1. A camera for separately capturing an image of a macro imaged region included in a subject and a micro imaged region included in the macro imaged region and narrower than the macro imaged region, a light source for irradiating the macro-imaged region with light of a first wavelength and for irradiating the micro-imaged region with light of a second wavelength; an imaging element having a first imaging area and a second imaging area not overlapping the first imaging area, and for converting light having a first wavelength in the first imaging area into an electrical signal for forming a macro image showing the macro imaged area, and converting light having a second wavelength in the second imaging area into an electrical signal for forming a micro image showing the micro imaged area; an optical system for guiding the light of the first wavelength reflected by or transmitted through the macro-imaged region to the first imaging region, and guiding the light of the second wavelength reflected by or transmitted through the micro-imaged region to the second imaging region; the optical system includes a diffractive lens through which the light of the first wavelength and the light of the second wavelength traveling from the subject to the image sensor pass, and a light branching section through which the light of the first wavelength and the light of the second wavelength traveling from the diffractive lens to the image sensor pass, the diffractive lens includes a diffractive surface having a shape for making a diffraction efficiency of an m-th order diffracted light (m is an integer other than 0) for light of the second wavelength greater than a diffraction efficiency of an n-th order diffracted light (n is an integer other than m); the optical branching unit includes a diffractive surface having a shape for making a diffraction efficiency of a p-th order diffracted light (p is an integer other than 0) for one of the light of the first wavelength and the light of the second wavelength greater than a diffraction efficiency of a q-th order diffracted light (q is an integer other than p); A camera in which p-th order diffracted light of one of the first wavelength light and the second wavelength light diffracted in the optical branching section, and the other of the first wavelength light and the second wavelength light that has passed through the optical branching section, are guided to the imaging element.

2. the optical system further includes a diffractive optical element through which a p-th order diffracted light of one of the light of the first wavelength and the light of the second wavelength diffracted by the light branching unit passes; 2. The camera of claim 1, wherein the diffractive optical element includes a diffractive surface having a shape for making the diffraction efficiency of p-th order diffracted light for one of the light of the first wavelength and the light of the second wavelength greater than the diffraction efficiency of q-th order diffracted light.

3. 3. The camera of claim 1 or claim 2, wherein the second wavelength is shorter than the first wavelength.

4. The optical system includes a first optical filter through which the light of the first wavelength that has passed through the optical branching unit passes and which has a transmittance for the light of the first wavelength greater than a transmittance for the light of the second wavelength; 3. The camera according to claim 1, further comprising: a second optical filter through which the light of the second wavelength that has passed through the optical branching section passes and which has a transmittance for the light of the second wavelength greater than a transmittance for the light of the first wavelength.

5. 3. The camera according to claim 1, wherein the optical system further comprises an adjustment unit for changing an optical magnification of each of the light of the first wavelength and the light of the second wavelength traveling from the diffractive lens to the light branching unit.

6. 3. The camera according to claim 1, wherein the optical system further comprises an adjustment section for changing an optical magnification of the light of the second wavelength that has passed through the optical branching section.

7. A processing device for processing a workpiece, comprising: A holding unit for holding the workpiece; a processing unit for processing the workpiece held by the holding unit; a camera for separately capturing an image of a macro imaged region included in the workpiece held by the holding unit and a micro imaged region included in the macro imaged region and narrower than the macro imaged region; The camera includes: a light source for irradiating the macro-imaged region with light of a first wavelength and for irradiating the micro-imaged region with light of a second wavelength; an imaging element having a first imaging area and a second imaging area not overlapping the first imaging area, and for converting light having a first wavelength in the first imaging area into an electrical signal for forming a macro image showing the macro imaged area, and converting light having a second wavelength in the second imaging area into an electrical signal for forming a micro image showing the micro imaged area; an optical system for guiding the light of the first wavelength reflected by or transmitted through the macro-imaged region to the first imaging region, and guiding the light of the second wavelength reflected by or transmitted through the micro-imaged region to the second imaging region; the optical system includes a diffractive lens through which the light of the first wavelength and the light of the second wavelength traveling from the workpiece to the image sensor pass, and a light branching section through which the light of the first wavelength and the light of the second wavelength traveling from the diffractive lens to the image sensor pass, the diffractive lens includes a diffractive surface having a shape for making a diffraction efficiency of an m-th order diffracted light (m is an integer other than 0) for light of the second wavelength greater than a diffraction efficiency of an n-th order diffracted light (n is an integer other than m); the optical branching unit includes a diffractive surface having a shape for making a diffraction efficiency of a p-th order diffracted light (p is an integer other than 0) for one of the light of the first wavelength and the light of the second wavelength greater than a diffraction efficiency of a q-th order diffracted light (q is an integer other than p); A processing device in which p-th order diffracted light of one of the light of the first wavelength and the light of the second wavelength diffracted in the light branching section, and the other of the light of the first wavelength and the light of the second wavelength that has passed through the light branching section, are guided to the imaging element.

Images