Recording element substrate

Abstract

To provide a technique to suppress the detachment of a deformable flexible member in a configuration in which the deformable flexible member is applied to a recording element substrate for use in a liquid ejection head in order to reduce load.SOLUTION: A recording element substrate includes: a substrate; an orifice plate stacked on the substrate, the orifice plate forming, between itself and the substrate, a liquid chamber that stores liquid, the orifice plate having an ejection port for ejecting the liquid in the liquid chamber; and an energy generation element disposed on the substrate and configured to generate energy for ejecting the liquid stored in the liquid chamber. The orifice plate is provided with an opening different from the ejection port, and a flexible member is disposed so as to seal the opening.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a recording element substrate.

Background Art

[0002] A liquid ejection device using an inkjet method has a configuration in which liquid is ejected from a discharge port of a liquid ejection head and attached to a target medium. At this time, the liquid ejection head ejects liquid by using a pressure wave generated in a pressure chamber by a drive unit, and there are various drive means, such as a method using a piezoelectric element, a method using a heating element, and a method using electrostatic force. When liquid is ejected by these methods, crosstalk may occur and cause ejection failure. Crosstalk refers to the occurrence of pressure fluctuations accompanying the ejection of liquid, and the influence of these pressure fluctuations on the ejection characteristics through the liquid flow path to other pressure chambers.

[0003] In order to reduce the influence of such crosstalk, there are a method using a damper and a method of performing delay control to shift the ejection timing. For example, Patent Document 1 proposes a liquid ejection head having a damper structure. In the liquid ejection head of Patent Document 1, a deformable compliance substrate is formed in a part of the liquid flow path in order to attenuate the pressure wave generated in the pressure chamber. The compliance substrate is composed of a flexible member, a combination of a metal member and a flexible member, etc., because the easier it is to deform, the higher the ability to attenuate the pressure wave.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] When using a damper structure equipped with a deformable compliance substrate as described above, it is necessary to configure the compliance substrate so that it is less likely to peel off from the recording element substrate due to the load, particularly the influence of thermal stress, that occurs repeatedly during ejection. In other words, if there is a difference in the linear expansion coefficient between the compliance substrate and the recording element substrate, a load will be applied due to the influence of thermal stress, and there is a risk that the compliance substrate will peel off.

[0006] The present invention has been made in view of the above-mentioned problems, and aims to provide a technique for preventing peeling of a flexible member in a configuration in which a deformable flexible member is applied to a recording element substrate used in a liquid ejection head to reduce load. [Means for solving the problem]

[0007] The present invention employs the following configuration: A substrate; an orifice plate laminated on the substrate, forming a liquid chamber for storing liquid between the orifice plate and the substrate, the orifice plate having an ejection port for the liquid in the liquid chamber; an energy generating element disposed on the substrate, the energy generating element generating energy for ejecting the liquid contained in the liquid chamber; A recording element substrate comprising: The orifice plate is provided with an opening different from the discharge port, and a flexible member is arranged to close the opening. The recording element substrate is characterized by the above. [Effects of the Invention]

[0008] According to the present invention, in a configuration in which a deformable flexible member is applied to a recording element substrate used in a liquid ejection head to reduce load, it is possible to provide a technique for suppressing peeling of the flexible member. [Brief explanation of the drawings]

[0009]

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Mode for Carrying Out the Invention

[0010] Preferred embodiments of the present invention will be described in detail below with reference to the drawings. However, unless otherwise specified, the dimensions, materials, shapes, relative positions, and the like of the components described in these embodiments are not intended to limit the scope of the present invention. Furthermore, the materials, shapes, and the like of components described once in the following description will remain the same in subsequent descriptions unless otherwise specified. Well-known or publicly known technologies in the relevant technical field can be applied to configurations and processes not specifically illustrated or described. Furthermore, the present invention is not limited to these embodiments, and not all of the combinations of features described in these embodiments are necessarily essential to the solution of the present invention.

[0011] Fig. 1 is a schematic perspective view showing an example of a recording element substrate 1. The recording element substrate 1 of the present invention shown in Fig. 1 has a configuration in which an orifice plate 2 is laminated on a substrate 5. The orifice plate 2 has ejection ports 3 used to eject a liquid such as ink. In addition, an electrical connection portion 4 is formed on the substrate 5 for connection to an electrical wiring board.

[0012] Figure 2(a) is an enlarged view of the upper part of the substrate in the A-A' cross section of a conventional printing element substrate, and Figure 2(b) ) is a top view of the recording element substrate. Energy generating elements 6 that generate energy for ejecting liquid are provided on the surface of the substrate 5. The energy generating elements 6 include, for example, electrothermal conversion elements or piezoelectric elements. The surface of the substrate 5 may also include wiring (not shown) for driving the energy generating elements 6. The energy generating elements 6 and pressure chambers 14 are formed to correspond to the positions of the ejection ports 3.

[0013] The orifice plate 2 is composed of a first resin layer 8 and a second resin layer 9, and has liquid flow paths 11 that communicate with the ejection ports 3. The first resin layer 8 stands on the substrate 5 and forms a side wall. The second resin layer 9 is supported by the first resin layer 8 and faces the substrate 5, forming the top surface on which the ejection ports 3 are formed. The substrate 5 has a liquid supply port 7 for supplying ink or the like to the liquid flow paths 11. Liquid first flows from an external tank or the like through the liquid supply port 7 into the liquid flow paths 11. After being supplied, the liquid is supplied from the liquid flow paths 11 to the individual pressure chambers 14. The pressure chambers 14 are spaces that are formed corresponding to the individual ejection ports 3 (and energy generating elements 6) and are capable of containing liquid, and are also called liquid chambers. The ejection ports 3 are provided above the pressure chambers 14 in the drawing, that is, on the surface of the orifice plate 2 opposite to the surface facing the substrate 5.

[0014] (First embodiment) 3(a) and 3(b) show the possible layer directions of the orifice plate 2 of the first embodiment. 3A and 3B are diagrams illustrating the positional pattern of the flexible member 10. FIG. 3A is an enlarged view of the upper portion of the substrate, and FIG. 3B is a top view of the substrate. Energy generating elements 6 are provided on the surface of the substrate 5. These energy generating elements 6 generate energy for ejecting liquid contained in pressure chambers 14 from the ejection ports 3. The energy generating elements 6 include, for example, electrothermal transducers or piezoelectric elements. The surface of the substrate 5 may also include wiring (not shown) for driving the energy generating elements 6. The energy generating elements 6 and the pressure chambers 14 are formed to correspond to the positions of the ejection ports 3. The orifice plate 2 is composed of a first resin layer 8 and a second resin layer 9, and is provided with liquid flow paths 11 that communicate with the ejection ports 3. The substrate 5 is provided with liquid supply ports 7 for supplying ink or the like to the liquid flow paths 11. In the illustrated example, a first row of liquid supply ports and a second row of liquid supply ports are provided on either side of the row of energy generating elements 6. The two liquid supply ports 7 provided in the liquid chamber may be used as an inlet to the liquid chamber and an outlet from the liquid chamber, respectively.

[0015] Furthermore, in this embodiment, as shown in FIG. 3(a), openings 13 are provided in the second resin layer 9 so as to correspond to the liquid supply ports 7. A flexible member 10 is disposed at a position overlapping the opening 13 in the stacking direction of the substrate 5 and the orifice plate 2. As shown in FIG. 3(b), the flexible member 10 is formed so as to straddle the opening 13 along the arrangement direction of the ejection ports 3. Note that when the flexible member 10 overlaps the liquid supply ports 7 in the stacking direction, it is not necessary for the flexible member 10 to cover the entire liquid supply ports 7, but it is sufficient for the flexible member 10 to cover at least a portion of the liquid supply ports 7. In the illustrated example, a first strip-shaped flexible member is provided so as to correspond to the row of first liquid supply ports, and a second strip-shaped flexible member is provided so as to correspond to the row of second liquid supply ports.

[0016] Furthermore, the method of bonding the second resin layer 9 and the flexible member 10 is not limited, and they may be joined using an adhesive, for example. The opening 13 is an opening different from the discharge port 3, and is formed so as to penetrate the orifice plate 2. In order to prevent the liquid from leaking out of the opening 13, the flexible member 10 needs to be fixed and positioned so as to close the opening 13.

[0017] In this configuration, when the energy generating element 6 is driven to eject liquid, a pressure wave is generated centered on the energy generating element 6. As this pressure wave spreads from the pressure chamber 14 to other regions, the flexible member 10 provided at the opening 13 deforms, which is expected to attenuate the pressure wave. At this time, if the flexible member 10 has a high strength, it will be difficult to deform, which could cause the orifice plate 2, which is necessary for functionality, to vibrate and affect the ejection characteristics. For this reason, it is preferable to reduce the strength of the flexible member 10 to facilitate deformation, and a material with a smaller Young's modulus than the first resin layer 8 and the second resin layer 9 is selected. Furthermore, the thickness of the orifice plate 2 in the layer direction is also smaller than the first resin layer 8 and the second resin layer 9. In this way, by making the strength of the flexible member 10 smaller than the strength of the orifice plate 2, it is expected that the deformation of the flexible member 10 will be promoted.

[0018] Furthermore, a resin layer is used as the flexible member 10 in order to suppress the generation of stress when each member expands and contracts due to a thermal load. Examples of materials constituting the resin layer of the flexible member 10 include, but are not limited to, polyimide resin and epoxy resin. In addition, it is preferable that the linear expansion coefficient of the flexible member 10 is close to the linear expansion coefficients of the first resin layer 8 and the second resin layer 9. Specifically, the linear expansion coefficients of the flexible member 10 and the first resin layer 8 and the second resin layer 9 are close to each other. The difference in expansion coefficient is 15 x 10 -6 For example, the first resin layer 8 and the second resin layer 9 are preferably 55×10 -6 If you select an epoxy resin with a linear expansion coefficient of 40 to 70 × 10, use a similar epoxy resin or -6 It is preferable to select a resin having a linear expansion coefficient of 1. By adopting such a configuration, it is possible to provide a recording element substrate that is highly effective in suppressing vibration and in which peeling of the flexible member 10 is suppressed.

[0019] (different form) Another embodiment is shown in Figures 4(a) and 4(b). Figure 4(a) is an enlarged view of the upper part of the substrate, and Figure 4(b) is a top view of the substrate. In this configuration, a portion of the flexible member 10 is fixed so as to be sandwiched between the first resin layer 8 and the second resin layer 9. A portion of the flexible member 10 is formed so as to cover the first resin layer 8.

[0020] In the above-described configuration, when the substrate is deformed in a concave direction, compressive stress is generated, so there is no concern about adhesion between the flexible member 10 and the orifice plate 2, but when the substrate is deformed in a convex direction, tensile stress is generated, which raises concerns about adhesion. Therefore, by sandwiching the flexible member 10 between the first resin layer 8 and the second resin layer 9 as shown in this figure, the flexible member 10 becomes resistant to deformation in both the concave and convex directions, and peeling of the flexible member 10 can be suppressed.

[0021] 4(c), a configuration in which a through hole 15 is provided in the flexible member 10 is also suitable. By adopting such a configuration, the first resin layer 8 and the second resin layer 9 are bonded to each other via the through hole 15, thereby further improving adhesion.

[0022] (Second Embodiment) Regarding the second embodiment, the parts different from the first embodiment will be mainly described. FIGS. 5(a) and 5(b) are diagrams showing the position pattern of the flexible member 10 in the planar direction of the recording element substrate 1 of this embodiment. FIG. 5(a) is an enlarged view of the upper part of the substrate, and FIG. 5(b) is a top view of the substrate. In the first embodiment, the flexible member 10 is formed on the opening of the liquid supply port 7, but in this embodiment, as shown in FIGS. 5(a) and 5(b), the flexible member 10 is formed on the region overlapping the pressure chamber 14 in the stacking direction. Here, when liquid is ejected, a large pressure wave is generated around the energy generating element 6. Therefore, by providing the flexible member 10 near the pressure chamber 14, it can be expected to attenuate the large pressure wave. In this embodiment, the flexible member 10 may be formed on the region overlapping the passage (exit or inlet) from the liquid flow path 11 to the pressure chamber 14 in the stacking direction.

[0023] (Another Form) Also, FIGS. 6(a) and 6(b) show another form. FIG. 6(a) is an enlarged view of the upper part of the substrate, and FIG. 6(b) is a top view of the substrate. As shown in the figure, when taking the row of the ejection ports 3 as the axis, the flexible member 10 may be arranged only on one side of the liquid supply port 7. Here, for example, in a configuration where the liquid circulates with a certain flow, the influence of the pressure wave may be concentrated at a specific location. In that case, by forming the flexible member 10 only at the location where the influence is observed, a sufficient vibration suppression effect can also be expected.

[0024] (Third Embodiment) Figs. 7(a) and 7(b) are diagrams showing the shape pattern of the flexible member 10 of the present embodiment. Fig. 7(a) is an enlarged view of the upper part of the substrate, and Fig. 7(b) is a top view of the substrate. In the first embodiment, as shown in Figs. 3(a) and 3(b), since the discharge ports 3 are arranged in a row, the liquid supply ports 7 are also formed in a row. And the flexible member 10 is formed in a strip shape along the row of the liquid supply ports 7. In the configuration of such a first embodiment, when there is a heat load, the influence of expansion and contraction becomes large, and the stress may become high. Therefore, in the present embodiment, as shown in Figs. 7(a) and 7(b), the flexible member 10 is formed individually according to the opening 13 of the second resin layer 9 and formed individually.

[0025] (Alternative form) Also, Figs. 8(a) and 8(b) show the configuration of the flexible member 10 in an alternative form. Fig. 8(a) is an enlarged view of the upper part of the substrate, and Fig. 8(b) is a top view of the substrate. In this configuration, two flexible members 10 arranged opposite to each other with the row of the discharge ports 3 as the axis are joined together by a flexible member for connection. For example, when the strength of the flexible member 10 and the orifice plate 2, particularly the second resin layer 9, is similar, there is a concern that both may be deformed by the influence of the pressure wave. In such a case, by adopting a configuration in which the flexible members 10 are joined together, the strength of the orifice plate 2 can be increased.

[0026] (Fourth embodiment) Figs. 9(a) and 9(b) are diagrams showing an example of the combination pattern of the flexible members 10. Fig. 9(a) is an enlarged view of the upper part of the substrate, and Fig. 9(b) is a top view of the substrate. In this example, the flexible member 10 on the right side of the drawing is arranged so as to overlap the liquid supply port 7 in the stacking direction of the substrate 5 and the orifice plate 2. On the other hand, the flexible member 10 on the left side of the drawing is arranged above the inlet and outlet of the pressure chamber 14 in the stacking direction. Thus, the arrangement methods of the flexible members 10 of the above embodiments may be arbitrarily combined for each location.

[0027] (Example 1) This example describes the manufacturing process of the recording element substrate 1. Figures 10(a) to 11(d) show the manufacturing process of the recording element substrate 1 shown in Figures 3(a) and 3(b) of the first embodiment.

[0028] First, as shown in FIG. 10(a), a substrate 5 equipped with energy generating elements 6 was subjected to silicon etching using photoresist as an etching mask to form a liquid supply port 7. Next, a first resin layer 8 was formed by lamination. The first resin layer 8 was made of a negative photosensitive epoxy resin and had a thickness of 15 μm. Next, as shown in FIG. 10(b), the first resin layer 8 was exposed to light to pattern the area that defines the liquid flow path 11.

[0029] Next, as shown in FIG. 10(c), a second resin layer 9 was formed on the first resin layer 8 to a thickness of 10 μm. The second resin layer 9 was made of a negative photosensitive epoxy resin, which had a sensitivity difference from the first resin layer 8. The second resin layer 9 can be formed by laminating or spin coating, but is not limited to the above methods. Then, as shown in FIG. 10(d), the second resin layer 9 was exposed to light to pattern the areas defining the liquid flow path 11, the ejection port 3, and the opening 13. After exposure, the unexposed first resin layer 8 and second resin layer 9 were removed, completing the patterning (FIG. 11(a)).

[0030] After patterning, the flexible member 10 was formed as shown in FIG. 11(b). The flexible member 10 was made of polyimide resin and formed to a thickness of 3 μm by lamination. Next, as shown in FIG. 11(c), a mask resist 12 was formed and patterned to match the opening 13. Finally, the mask resist 12 was dry etched, followed by wet processing to complete the patterning of the flexible member 10 (FIG. 11(d)). Note that, although patterning was performed by dry etching in Example 1, a negative photosensitive resin may be applied to the flexible member 10 and patterning may be performed by photolithography.

[0031] The recording element substrate 1 created as described above is able to attenuate pressure waves generated when liquid is ejected, and also has improved durability under thermal load. The present invention makes it possible to provide a highly reliable liquid ejection head with a high vibration suppression effect.

[0032] Example 2 12(a) to 12(d) are diagrams showing the manufacturing process of the recording element substrate 1 of Fig. 4(a) and Fig. 4(b), which is another embodiment of the first embodiment. In Example 2, only the parts that are different from Example 1 will be described.

[0033] First, as shown in FIG. 12(a), the first resin layer 8 was exposed to light to pattern the areas defining the liquid flow paths 11. Then, as shown in FIG. 12(b), a flexible member 10 was laminated onto the first resin layer 8, and the areas defining the liquid flow paths 11 and the ejection ports 3 were exposed to light. Next, as shown in FIG. 12(c), a second resin layer 9 was laminated onto the flexible member 10, and the areas defining the ejection ports 3 and the openings 13 were exposed to light. Finally, as shown in FIG. 12(d), the unexposed first resin layer 8, second resin layer 9, and flexible member 10 were removed to complete the patterning.

[0034] The recording element substrate 1 produced as described above has further improved durability under thermal load. The present invention makes it possible to provide a liquid ejection head with high vibration suppression effect and high reliability. When manufacturing the recording element substrate 1 according to other embodiments, it is also possible to manufacture a recording element substrate 1 with good characteristics by combining known methods according to the respective configurations.

[0035] [Application example] An example in which the recording element substrate 1 according to the above embodiment is applied to a liquid ejection head or a liquid ejection device will be described. Fig. 13 is a schematic diagram showing an example of an inkjet type liquid ejection device 150 (recording device). The liquid ejection device 150 includes a liquid ejection head 250 (recording head), a carriage 260, and a controller 270 that is a control unit that controls the driving of these components.

[0036] The liquid ejection head 250 includes a plurality of ejection ports 3 (nozzles) for ejecting a liquid such as ink, and a substrate (recording element substrate 1) provided with a plurality of energy generating elements corresponding thereto. When the liquid ejection head 250 drives each heating element based on a control signal from the controller 270, the liquid in the pressure chamber 14 is heated and ejected from the ejection port 3. In this way, recording (image formation) on a recording medium P such as paper is executed.

[0037] The carriage 260 that supports the liquid ejection head 250 is reciprocated in the direction of arrow d1 along the guide 280 based on a control signal from the controller 270. The recording medium P is conveyed in the direction d2 by a conveyance mechanism included in the liquid ejection apparatus 150. The controller 270 can record a desired image on the recording medium P by performing drive control of the liquid ejection head 250 while reciprocating the carriage 260.

[0038] The recording element substrate 1 described in each embodiment can be mounted on the liquid ejection head 250 to manufacture the liquid ejection apparatus 150. By using such a liquid ejection head 250 and liquid ejection apparatus 150, high vibration suppression effect and highly reliable recording can be realized.

[0039] [Configuration 1] A substrate, An orifice plate laminated on the substrate and having a liquid chamber for accommodating a liquid formed therebetween, the orifice plate being provided with an ejection port for the liquid in the liquid chamber, An energy generating element disposed on the substrate for generating energy for ejecting the liquid accommodated in the liquid chamber, A recording element substrate comprising: The orifice plate is provided with an opening different from the ejection port, and a flexible member is disposed so as to block the opening thereof. A recording element substrate characterized by the above. [Configuration 2] The flexible member is configured to have a lower strength than the orifice plate. The recording element substrate according to Configuration 1, characterized in that... [Configuration 3] The flexible member is composed of a member thinner than the orifice plate. The recording element substrate according to Configuration 1 or 2, characterized in that... [Configuration 4] The flexible member is composed of a member having a smaller Young's modulus than the orifice plate. The recording element substrate according to any one of Configurations 1 to 3, characterized in that... [Configuration 5] The difference in the linear expansion coefficients of the flexible member and the orifice plate is within 15×10 ―6 ... The recording element substrate according to any one of Configurations 1 to 4, characterized in that... [Configuration 6] A liquid supply port for supplying the liquid from the outside is provided on the substrate, A liquid flow path for supplying the liquid supplied from the liquid supply port to the liquid chamber is provided between the substrate and the orifice plate. The recording element substrate according to any one of Configurations 1 to 5, characterized in that... [Configuration 7] The flexible member is disposed at a position overlapping the liquid supply port in the stacking direction of the substrate and the orifice plate. The recording element substrate according to Configuration 6, characterized in that... [Configuration 8] A plurality of the discharge ports are provided in a row on the orifice plate, and a plurality of the liquid supply ports are provided in a row on the substrate so as to correspond to each of the plurality of the discharge ports, The flexible member is formed in a strip shape so as to correspond to the row of the liquid supply ports. The recording element substrate according to Configuration 7, characterized in that... [Configuration 9] A plurality of the energy generating elements are provided in a row at a position corresponding to the row of the discharge ports in the stacking direction on the substrate, On the substrate, a row of first liquid supply ports and a row of second liquid supply ports are provided with the rows of the energy generating elements therebetween. The flexible member includes a first strip-shaped flexible member provided at a position corresponding to the row of the first liquid supply ports and a second strip-shaped flexible member provided at a position corresponding to the row of the second liquid supply ports. The recording element substrate according to Configuration 8, characterized in that. [Configuration 10] The first strip-shaped flexible member and the second strip-shaped flexible member are joined together by a flexible member for connection. The recording element substrate according to Configuration 9, characterized in that. [Configuration 11] The orifice plate is provided with a plurality of the discharge ports, and the substrate is provided with a plurality of the liquid supply ports so as to correspond to the plurality of discharge ports respectively. The flexible member is individually formed for each of the plurality of liquid supply ports. The recording element substrate according to Configuration 7, characterized in that. [Configuration 12] The flexible member is disposed at a position overlapping the passage of the liquid from the liquid flow path to the liquid chamber in the stacking direction of the substrate and the orifice plate. The recording element substrate according to Configuration 6, characterized in that. [Configuration 13] The orifice plate is provided with a plurality of the discharge ports in a row, and a plurality of the liquid chambers are provided between the substrate and the orifice plate so as to correspond to the plurality of discharge ports respectively. The flexible member is formed in a strip shape so as to correspond to the plurality of liquid chambers. The recording element substrate according to Configuration 12, characterized in that. [Configuration 14] The orifice plate is composed of a first resin layer standing on the substrate to form a side wall and a second resin layer supported by the first resin layer and facing the substrate with the discharge ports provided therein. The recording element substrate according to any one of Configurations 1 to 13, characterized in that. [Configuration 15] The flexible member is fixed on the second resin layer. The recording element substrate according to Configuration 14, characterized in that. [Configuration 16] The flexible member is sandwiched and fixed between the first resin layer and the second resin layer. The recording element substrate according to Configuration 14, characterized in that. [Configuration 17] A through hole is provided in a portion of the flexible member sandwiched between the first resin layer and the second resin layer. The recording element substrate according to Configuration 16, characterized in that. [Configuration 18] A liquid ejection device that performs recording on a recording medium by ejecting a liquid using the recording element substrate according to any one of Configurations 1 to 17.

Description of Reference Numerals

[0040] 1: Recording element substrate, 2: Orifice plate, 3: Ejection port, 5: Substrate, 10: Flexible member, 13: Opening, 14: Pressure chamber

Claims

1. A substrate, An orifice plate laminated on the substrate and having a liquid chamber formed therebetween for accommodating a liquid, the orifice plate being provided with a discharge port for the liquid in the liquid chamber, An energy generating element disposed on the substrate for generating energy for discharging the liquid accommodated in the liquid chamber, A recording element substrate comprising: The orifice plate is provided with an opening different from the discharge port, and a flexible member is disposed so as to close the opening. A recording element substrate characterized by the above.

2. The flexible member is configured to have a lower strength than the orifice plate. The recording element substrate according to claim 1, characterized by the above.

3. The flexible member is composed of a member thinner than the orifice plate. The recording element substrate according to claim 1 or 2, characterized by the above.

4. The flexible member is composed of a member having a smaller Young's modulus than the orifice plate. The recording element substrate according to claim 1 or 2, characterized by the above.

5. The difference in the linear expansion coefficients of the flexible member and the orifice plate is 15×10 ―６ or less The recording element substrate according to claim 1 or 2, characterized by the above.

6. The substrate is provided with a liquid supply port for supplying the liquid from the outside, A liquid flow path for supplying the liquid supplied from the liquid supply port to the liquid chamber is provided between the substrate and the orifice plate. The recording element substrate according to claim 1 or 2, characterized by the above.

7. The flexible member is disposed at a position overlapping the liquid supply port in the stacking direction of the substrate and the orifice plate. The recording element substrate according to claim 6, characterized by the above.

8. A plurality of the discharge ports are provided in a row on the orifice plate, and a plurality of the liquid supply ports are provided in a row on the substrate so as to correspond to each of the plurality of the discharge ports, The flexible member is formed in a strip shape so as to correspond to the row of the liquid supply ports. The recording element substrate according to claim 7, characterized by the above.

9. A plurality of the energy generating elements are provided in a row on the substrate at a position corresponding to the row of the discharge ports in the stacking direction, On the substrate, a row of first liquid supply ports and a row of second liquid supply ports are provided with the row of the energy generating elements interposed therebetween. The flexible member includes a first strip-shaped flexible member provided at a position corresponding to the row of the first liquid supply ports, and a second strip-shaped flexible member provided at a position corresponding to the row of the second liquid supply ports. The recording element substrate according to claim 8, characterized in that.

10. The first strip-shaped flexible member and the second strip-shaped flexible member are joined together by a flexible member for connection. The recording element substrate according to claim 9, characterized in that.

11. The orifice plate is provided with a plurality of the discharge ports, and the substrate is provided with a plurality of the liquid supply ports so as to correspond to the plurality of discharge ports respectively. The flexible member is individually formed for each of the plurality of liquid supply ports. The recording element substrate according to claim 7, characterized in that.

12. The flexible member is disposed at a position overlapping the passage of the liquid from the liquid flow path to the liquid chamber in the stacking direction of the substrate and the orifice plate. The recording element substrate according to claim 6, characterized in that.

13. The orifice plate is provided with a plurality of the discharge ports in a row, and a plurality of the liquid chambers are provided between the substrate and the orifice plate so as to correspond to each of the plurality of discharge ports. The flexible member is formed in a strip shape so as to correspond to the plurality of liquid chambers. The recording element substrate according to claim 12, characterized in that.

14. The orifice plate is composed of a first resin layer standing on the substrate to form a side wall, and a second resin layer supported by the first resin layer and facing the substrate, on which the discharge ports are provided. The recording element substrate according to claim 1 or 2, characterized in that.

15. The flexible member is fixed on the second resin layer. The recording element substrate according to claim 14, characterized in that.

16. The flexible member is sandwiched and fixed between the first resin layer and the second resin layer. The recording element substrate according to claim 14, characterized in that.

17. A through hole is provided in a portion of the flexible member sandwiched between the first resin layer and the second resin layer. The recording element substrate according to claim 16, characterized in that.

18. A liquid discharge device that performs recording on a recording medium by discharging a liquid using the recording element substrate according to claim 1 or 2.

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