Resist composition, method for producing resist pattern, compound, and resin containing structural unit derived from the compound

Abstract

To provide a resist composition, a resin and the like which allow a resist pattern having good line edge roughness to be produced.SOLUTION: The resist composition contains a compound represented by formula (I) or a structural unit represented by formula (IP).SELECTED DRAWING: None

Description

Technical Field

[0001] The present invention relates to a compound, a resin containing a structural unit derived from the compound, a resist composition, a method for producing a resist pattern using the resist composition, and the like.

Background Art

[0002] Patent Document 1 describes resist compositions containing resins having the following structural units. TIFF2025112270000001.tif2720 Patent Document 2 describes a resist composition containing a resin having the following structural unit. TIFF2025112270000002.tif3056 Patent Document 3 describes a resist composition containing a resin having the following structural unit. TIFF2025112270000003.tif3347

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0004] An object of the present invention is to provide a resist composition that forms a resist pattern having better line edge roughness (LER) than a resist pattern formed from the above resist composition.

Means for Solving the Problems

[0005] The present invention includes the following inventions. A resist composition containing a compound represented by formula (I) or a structural unit represented by formula (IP). TIFF2025112270000004.tif68123[In formula (I) and formula (IP), R 0 、R 0A and R 0B each independently represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X 1 、X 1A and X 1B each independently represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR 3 -**, *-NR 3 -CO-O-**, *-O-CO-NR 3 -** or *-Ax-Ph-Ay-**. R 3 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond and a carbonate ester bond. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R 0 、R 0A or R 0B is bonded. L 1 、L 1A and L 1B each independently represent a single bond or a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2-, -NR 7 - or -CO-. R 7 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R 4represents a halogen atom or a hydrocarbon group having 1 to 48 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2-, -NR 7 - or -CO-. R 5 is -X 11 -R 10 or -X 11 -L 10 -X 12 -R 10 represents. X 11 and X 12 each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * represents the bonding site to the benzene ring or L 10 ). L 10 represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2-, -NR 7 - or -CO-. R 10 represents a group represented by formula (IC). m1 represents any integer from 1 to 4. When m1 is 1 or more, the groups within the plurality of parentheses may be the same as or different from each other. m1A represents any integer from 1 to 4. When m1A is 1 or more, the groups within the plurality of parentheses may be the same as or different from each other. m1B represents any integer from 0 to 3. When m1B is 1 or more, the groups within the plurality of parentheses may be the same as or different from each other. m4 represents any integer from 0 to 4. When m4 is 2 or more, the plurality of R 4 may be the same as or different from each other. m5 represents any integer from 1 to 4. When m5 is 2 or more, the plurality of R 5 may be the same as or different from each other. However, 2 ≤ m1 + m4 + m5 ≤ 6 and 2 ≤ m1A + m1B + m4 + m5 ≤ 6. TIFF2025112270000005.tif2571[In formula (IC), R A represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of any one of 0 to 2. When u1 is 2, a plurality of Rs A are the same or different. s1 represents 1 or 2. t1 represents 0 or 1. However, the sum of s1 and t1 is 1 or 2. L 12 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-. * represents a bonding site. ] [2] X 1 , X 1A and X 1B are a single bond or a group represented by any one of formula (X 1 -1) to formula (X 1 -10) in the resist composition according to [1]. TIFF2025112270000006.tif45170[In formula (X 1 -1) to formula (X 1 -10), *, ** are bonding sites, and * represents a bonding site with the carbon atom to which R 0 , R 0A or R 0B is bonded. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of any one of 0 to 4. X 20 represents -O- or -NR 3 -. R 3 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. ] [3] X 1 is a single bond or a group represented by formula (X 1 -1’), formula (X 1 -3’) to formula (X 1-10')。 [1] or [2], wherein the resist composition is a group represented by [1] or [2]. TIFF2025112270000007.tif46125[expression(X 1 -1'), expression (X 1 -3')~expression(X 1 -10') medium, *, ** are binding sites, ** is L 1 , L 1A and L 1B represents the binding site with [4] L 1 , L 1A and L 1B is a single bond, a chain hydrocarbon group having 1 to 4 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms with an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-- or -CO-). [5] X 11 The resist composition according to any one of [1] to [4], wherein *-CO-O- or *-O-CO-. [6] The resist composition according to any one of [1] to [5], wherein m5 is 2 or 3. [7] The resist composition according to any one of [1] to [6], which contains a compound represented by formula (I). [8] The resist composition according to any one of [1] to [7], which contains a compound represented by formula (I) and a resin containing a structural unit represented by formula (a2-A) or a structural unit represented by formula (a2-D). TIFF2025112270000008.tif30128[In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO- or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents any integer from 1 to 5, and when nA2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. na21 represents any integer from 0 to 4, and when na21 is 2 or more, the plurality of R a27 may be the same as or different from each other. mc represents any integer from 0 to 2. TIFF2025112270000009.tif51106[in formula (a2-D), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO- or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R a21 and R a22 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 5. When nD2 is 2 or greater, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R a27 may be the same or different, provided that 1≦nD2+nD22≦5. [9] The resist composition according to any one of [1] to [8], which contains a compound represented by formula (I) and a compound having a phenolic hydroxyl group or a benzoic carboxyl group, or a compound in which the hydroxyl group of the phenolic hydroxyl group or the carboxyl group of the benzoic carboxyl group is protected with an acid labile group.

[10] The resist composition according to any one of [1] to [9], which contains a resin containing a structural unit represented by formula (IP).

[11] The resist composition according to any one of [1] to [9], which contains a resin containing a structural unit represented by formula (IP) and a resin containing a structural unit having an acid labile group.

[12] The resist composition according to any one of [1] to

[11] , wherein the resin further comprises at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). TIFF2025112270000010.tif44144 [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or -O-(CH2)k1 represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—. R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom. m1' represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3. TIFF2025112270000011.tif32118[In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a11represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a18 - may be replaced with R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form, together with the -CO- to which they are bonded, a divalent hydrocarbon group having 2 to 20 carbon atoms, and the hydrocarbon group and the -CH2- contained in the divalent hydrocarbon group may be replaced with -O- or -S-. na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R a17 may be the same or different from each other. mc represents an integer between 0 and 2. TIFF2025112270000012.tif4558[In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom. Z a1 is a single bond or -(CH2) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-. s1 represents an integer of 1 to 3. s1' represents an integer of 0 to 3. TIFF2025112270000013.tif3581[In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a62 , R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached. X a61 is a single bond, -CO-O-* or -CO-NR a65 -*, * represents a bond to Ar, R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 is a single bond, *-OL a61 -or*-CO-OL a62 -, * represents a bond to Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

[13] The resist composition according to any one of [1] to

[12] , which contains a resin including a structural unit represented by formula (IP) and a structural unit represented by formula (a2-A), and a resin including a structural unit having an acid labile group. TIFF2025112270000014.tif30128[In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or greater, the groups in the parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer between 0 and 2.

[14] The resist composition according to any one of [1] to

[13] , further comprising an acid generator, wherein the acid generator comprises a salt represented by formula (B1) or a salt represented by formula (B2). TIFF2025112270000015.tif1395[In formula (B1), L b1 represents a single bond or an (nb1+1)-valent hydrocarbon group which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -SO-, -CO- or -SO2-. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-. Y b1represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2- or -CO-. nb1 represents an integer of 1 to 6. When nb1 is 2 or greater, the groups in the parentheses may be the same or different. Z1 + represents an organic cation. TIFF2025112270000016.tif1292[In formula (B2), A 1 represents a nitrogen atom or a carbon atom. nb5 represents 2 or 3, A 1 When is a nitrogen atom, nb5 is 2 and A 1 When is a carbon atom, nb5 is 3, and the groups in the parentheses may be the same or different. L b2 ' represents a single bond or a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-. Y b1 represents a methyl group or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-, and a plurality of -L b2’ -Y b1’ may be the same or different, and two -SO2-L b2’ -Y b1’ Together they form A 1 may form a ring containing: Z2 + represents an organic cation.

[15] The resist composition according to any one of [1] to

[14] , further comprising a salt that generates an acid that is weaker in acidity than the acid generated from the acid generator.

[16] (1) A step of applying the resist composition according to any one of [1] to

[15] onto a substrate; (2) drying the applied composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising:

[17] A compound represented by the above formula (I).

[18] A resin containing a structural unit represented by the above formula (IP). [Effects of the Invention]

[0006] By using the resist composition of the present invention, a resist pattern with good line edge roughness (LER) can be produced. DETAILED DESCRIPTION OF THE INVENTION

[0007] In this specification, "(meth)acrylic monomer" means "at least one of an acrylic monomer and a methacrylic monomer." The terms "(meth)acrylate" and "(meth)acrylic acid" have the same meaning. In the groups described in this specification, those that can have both a linear structure and a branched structure may have either. When -CH2- contained in a hydrocarbon group or the like is -O-, -S-, -SO-, -CO-, -NR XWhen replaced with - (X is any symbol) or -SO2-, the same examples apply to each group, and the number of carbon atoms before replacement is the number of carbon atoms in the hydrocarbon group, etc. "Combined group" refers to a group in which two or more of the exemplified groups are combined, and the valence of these groups may be changed appropriately depending on the bonding form. "Derived from" or "derived" refers to a polymerizable C=C bond contained in the molecule becoming a single bond (-CC- group) through polymerization. When stereoisomers exist, all stereoisomers are included. "Acid labile group" refers to a group that, upon contact with an acid (e.g., trifluoromethanesulfonic acid, etc.), eliminates the leaving group and forms a hydrophilic group (e.g., a hydroxy group or a carboxy group). "Base labile group" refers to a group that, upon contact with a base (e.g., trimethylamine, tetramethylammonium hydroxide, etc.), eliminates the leaving group and forms a hydrophilic group (e.g., a carboxy group or a hydroxy group). In each group, any position and any number of hydrogen atoms contained in the group may be replaced by bonds depending on the number of substituents, etc. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the substituted group. In this specification, the term "solid content of the resist composition" refers to the sum of all components in the resist composition excluding the solvent (E), which will be described later.

[0008] [Compound represented by formula (I)] The compound represented by formula (I) (hereinafter sometimes referred to as "compound (I)") is represented by the following formula: TIFF2025112270000017.tif2674 [In formula (I), all symbols have the same meanings as defined above.]

[0009] In formula (I), R 0 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, and an n-hexyl group, and are preferably alkyl groups having 1 to 4 carbon atoms, more preferably alkyl groups having 1 to 3 carbon atoms, and even more preferably a methyl group or an ethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. R 0 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 0 Examples of the alkyl group having a halogen atom include an alkyl fluoride, an alkyl chloride, an alkyl bromide, and an alkyl iodide, and specific examples thereof include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a perchloromethyl group, a perbromomethyl group, and a periodomethyl group. R 0 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, even more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0010] R 3 The alkyl group of R 0 Examples of the alkyl group include the same alkyl groups as those exemplified above. In formula (I), X 1 is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025112270000018.tif3351[In formula (X10), Ax is R 0 represents a carbon atom bonded to the carbon atom and a bond type, and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. Ay, L 1 represents a bond type that bonds to the above, and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. Rx represents a halogen atom, a hydroxy group, a C1-6 fluoroalkyl group, a C1-18 alkyl group, or a C1-6 alkoxy group. mx represents any integer from 0 to 4, and when mx is an integer of 2 or more, a plurality of Rx may be the same as or different from each other. When either Ax or Ay is a single bond, the other is preferably at least one selected from the group consisting of an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. When either Ax or Ay is an amide bond, it is preferably a bond represented by -CO-NR 3 -. Among them, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1, or 2. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. X 1 Examples of X include a single bond and groups represented by the following formula (X 1 -1) to formula (X 1 -10). * represents the bonding position to the carbon atom to which -R 0 is bonded. ** represents the bonding position to L 1 . TIFF2025112270000019.tif44162 [In formula (X 1 -1) to formula (X 1 -10), all symbols represent the same meanings as described above respectively. Specific examples of the groups represented by formula (X 1 -1) to formula (X 1 -10) include the following groups. TIFF2025112270000020.tif87163 Among them, X 1 is preferably a single bond or a group represented by formula (X 1 -1’) and formula (X 1 -3’) to formula (X 1 -10’), and preferably a single bond or a group represented by formula (X1 -1'), expression (X 1 -4'), expression (X 1 -5'), expression (X 1 -6') and formula (X 1 -10'), and more preferably a single bond, a group represented by the formula (X 1 -1'), a group represented by the formula (X 1 -5') or a group represented by the formula (X 1 -6') is more preferred.

[0011] L 1 Examples of the hydrocarbon group in include linear or branched chain hydrocarbon groups such as alkanediyl groups, monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may also be groups that combine two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group). Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl groups; Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. The terminal of the branched alkanediyl group may be a methyl group. The chain hydrocarbon group may have 1 to 24 carbon atoms, preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, and even more preferably 1 to 4.

[0012] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following groups: The binding site can be any position. TIFF2025112270000021.tif47169Preferred monocyclic alicyclic hydrocarbon groups are cycloalkanediyl groups such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl. The polycyclic alicyclic hydrocarbon group is preferably a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, or an adamantane-2,6-diyl group. The alicyclic hydrocarbon group may have 3 to 24 carbon atoms, preferably 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The aromatic hydrocarbon group may have 6 to 24 carbon atoms, preferably 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms. Examples of groups combining two or more types include a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group, a group combining an aromatic hydrocarbon group with a chain hydrocarbon group, a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may each be combined. In addition, when any group is X 1 may be bound to Examples of a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - etc.), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group, and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - etc.), and the like. Examples of a group combining an aromatic hydrocarbon group and a chain hydrocarbon group include a group in which an aromatic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - aromatic hydrocarbon group - etc.), a group in which a chain hydrocarbon group is bonded to an aromatic hydrocarbon group (e.g., *-aromatic hydrocarbon group - chain hydrocarbon group - etc.), a group in which an aromatic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - aromatic hydrocarbon group - chain hydrocarbon group - etc.), and the like. Examples of a group combining an alicyclic saturated hydrocarbon group and an aromatic hydrocarbon group include a group in which an aromatic hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - aromatic hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group is bonded to an aromatic hydrocarbon group (e.g., *-aromatic hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are condensed (e.g., the following groups (the bonding site is at an arbitrary position), etc.), and the like. TIFF2025112270000022.tif22166 Examples of groups combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group include groups in which an aromatic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-), and groups in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an aromatic hydrocarbon group (for example, *-aromatic hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-). * is X 1 represents the binding site with

[0013] L 1 -CH2- contained in the hydrocarbon group having 1 to 36 carbon atoms is -O-, -S-, -SO-, -SO2-, -NR 7 It may be replaced by - or -CO-. L 1 The -CH2- contained in the hydrocarbon group having 1 to 36 carbon atoms is -O-, -S-, -SO-, -SO2-, -NR 7 When it is replaced with - or -CO-, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the hydrocarbon group. R 7 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The -CH2- contained in the hydrocarbon group can be -O-, -S-, -SO-, -SO2-, or -NR 7 Examples of the group substituted with - or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR 7-replaced group), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in the methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in the methylene group is replaced by -SO2-), a peptide group (a group in which -CH2-CH2- contained in the ethylene group is replaced by -CO-NR 7 -replaced group), an alkoxy group (a group in which any -CH2- contained in the alkyl group is replaced by -O-), an alkylthio group (a group in which any -CH2 contained in the alkyl group is replaced by -S-), an alkylsulfonyl group (a group in which any -CH2- contained in the alkyl group is replaced by -SO2-), an alkylamino group (a group in which any -CH2- contained in the alkyl group is replaced by -NR 7-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO- replaced with -SO-), alkanediylcarbonyl groups (groups in which -CH- at any position contained in an alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy groups (groups in which -CH-CH- at any position contained in an alkanediyl group is replaced with -CO-O-), alkanediylsulfonyl groups (groups in which -CH- at any position contained in an alkanediyl group is replaced with -SO-), alkanediylthio groups (groups in which -CH- at any position contained in an alkanediyl group is replaced with -S-), cycloalkoxy groups, cycloalkylalkoxy groups, alkoxycarbonyloxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups in which two or more of these groups are combined.

[0014] Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 17 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylamino group include alkylamino groups having 1 to 17 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, etc. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as acetyl, propionyl, and butyryl. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, even more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 17 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 17 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 17 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 17 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 17 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 17 carbon atoms, such as methyleneamino group, ethyleneamino group, dimethyleneamino group, propyleneamino group, butyleneamino group, pentyleneamino group, hexyleneamino group, etc. The number of carbon atoms of the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 17 carbon atoms, such as cyclohexyloxy group, etc. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as cyclohexylmethoxy group, etc. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as butoxycarbonyloxy group, etc. Examples of the aromatic hydrocarbon group-carbonyl-oxy group include aromatic hydrocarbon group-carbonyl-oxy groups having 7 to 17 carbon atoms, such as benzoyloxy group, etc. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 17 carbon atoms, such as benzoyl group, etc. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 16 carbon atoms, such as phenyloxy group, etc.

[0015] In addition, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO-, -NR 7 -, or -SO2- include the following groups, etc. -O- or -CO- in the groups represented below may be replaced by -S-, -SO-, or -SO2- respectively. The bonding site can be at any position. TIFF2025112270000023.tif54168 Examples of the group in which -CH2- contained in the group formed by condensation of an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -SO-, -CO-, -NR 7 -, or -SO2- also include the following groups, etc. The bonding site can be at any position. TIFF2025112270000024.tif38164

[0016] L 1 Examples of the substituent that may be possessed by L include a halogen atom, a cyano group, and a nitro group. 1 In the case of a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, an alkanediyl group can be used as a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. 1 The -CH2- contained in the chain hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 7 - or -SO2-, L 1 can substantially have a substituent such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkylamino group, an amino group, a thiol group, an alkylthio group, or an alkylsulfonyl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 1 The substituent that may be possessed by is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxy group, or a halogen atom, more preferably an alkyl group having 1 to 4 carbon atoms or a halogen atom, and further preferably a methyl group or a fluorine atom.

[0017] L 1represents a single bond, a chain hydrocarbon group of 1 to 18 carbon atoms which may have a substituent (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a cyclic hydrocarbon group of 3 to 24 carbon atoms which may have a substituent (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or a group formed by combining a chain hydrocarbon group of 1 to 10 carbon atoms which may have a substituent and a cyclic hydrocarbon group of 3 to 18 carbon atoms which may have a substituent (provided that -CH2- contained in the chain hydrocarbon group -CH2- contained in the cyclic hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), a single bond, a chain hydrocarbon group of 1 to 8 carbon atoms which may have a substituent (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a cyclic hydrocarbon group of 3 to 18 carbon atoms which may have a substituent (provided that -CH2- contained in the cyclic hydrocarbon group is not replaced by -O-, -S-, -SO2-, -CO-, -NR2- or -NR2-), 7 - or -SO2-) or a group formed by combining a chain hydrocarbon group of 1 to 6 carbon atoms which may have a substituent with a cyclic hydrocarbon group of 3 to 18 carbon atoms which may have a substituent (wherein -CH2- in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2-, -NR 7 - or -CO-), and a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms with an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2-, -NR 7- or -CO-), or a group formed by combining a chain hydrocarbon group of 1 to 6 carbon atoms with an aromatic hydrocarbon group of 6 to 18 carbon atoms which may have a substituent (provided that -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), and a single bond, a chain hydrocarbon group of 1 to 4 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a chain hydrocarbon group of 1 to 4 carbon atoms and an alicyclic hydrocarbon group of 3 to 18 carbon atoms are more preferred. More preferably, it is a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms with an aromatic hydrocarbon group having 6 to 14 carbon atoms, which may have a substituent, (provided that -CH2- in the chain hydrocarbon group may be replaced with -O- or -CO-, and -CH2- in the alicyclic hydrocarbon group may be replaced with -O-- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms with an aromatic hydrocarbon group having 6 to 14 carbon atoms, which may have a substituent, (provided that -CH2- in the chain hydrocarbon group may be replaced with -O- or -CO-).

[0018] Also, L 1 is a single bond, *-L 12 -or*-L 12 -X 13 -L 13 -(L 12 represents an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms, an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group combining an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms and an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group is selected from -O-, -S-, -SO-, -CO-, -NR 7 - or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-. 1 X represents the binding site. 13 represents **-CO-O-, **-O-CO-, **-O-CO-O- or **-O-, and ** represents L 12 It represents the binding site with L 13represents a linear hydrocarbon group having 1 to 6 carbon atoms which may have a single bond or a substituent, and -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-. It is also preferable that it is). In this case, L 1 is a single bond, a linear hydrocarbon group having 1 to 4 carbon atoms or *-L 4 -CO-O-(L 4 represents a linear hydrocarbon group having 1 to 4 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms or a group combining a cyclic hydrocarbon group having 3 to 18 carbon atoms and a linear hydrocarbon group having 1 to 4 carbon atoms. The cyclic hydrocarbon group may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO-, -NR 7 - or -SO2-, and -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site with X 1 . It is also preferable that it is, and it is preferably a single bond or a methylene group. Here, the combination of the linear hydrocarbon group and the cyclic hydrocarbon group (alicyclic hydrocarbon group or aromatic hydrocarbon group) is, for example, *-linear hydrocarbon group-alicyclic hydrocarbon group or aromatic hydrocarbon group-, *-alicyclic hydrocarbon group or aromatic hydrocarbon group-linear hydrocarbon group-, *-linear hydrocarbon group-alicyclic hydrocarbon group or aromatic hydrocarbon group-linear hydrocarbon group-, etc. * represents the bonding site with X 1 . L 12 、L 13 and L 4 Examples of the cyclic hydrocarbon group and the linear hydrocarbon group in include the same groups as those exemplified above. L 12 is a linear hydrocarbon group having 1 to 6 carbon atoms which may have a substituent (-CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group is -O-, -S-, -CO-, -NR 7- or -SO2-) or a group in which a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent is combined with a chain hydrocarbon group having 1 to 4 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO-, -NR 7 - or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-.) is preferred. L 13 is preferably a single bond or a chain hydrocarbon group having 1 to 4 carbon atoms which may have a substituent. L 4 represents a chain hydrocarbon group having 1 to 3 carbon atoms or a polycyclic cyclic hydrocarbon group having 6 to 12 carbon atoms (the cyclic hydrocarbon group may have a substituent, and -CH2- contained in the cyclic hydrocarbon group is not limited to -O-, -S-, -SO-, -CO-, -NR 7 - or -SO2-), and more preferably a methylene group, an ethylene group, or a polycyclic alicyclic hydrocarbon group having 7 to 11 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), and more preferably a methylene group, a group represented by the following formula (L 4 -1), a group represented by the formula (L 4 -2), a group represented by the formula (L 4 -3), or a group represented by the formula (L 4 It is more preferable that the group is a group represented by the formula (L 4 The group represented by -2) is more preferred. * represents a bonding site. TIFF2025112270000025.tif3099The above formula (L 4 -1), formula (L 4 -2), formula (L 4 -3) or formula (L 4 -4) is a group represented by the following formula (L 4 -1'), formula (L 4 -2'), formula (L 4 -3') or formula (L 4 -4') is more preferred. TIFF2025112270000026.tif3199

[0019] R 4 Examples of the hydrocarbon group having 1 to 48 carbon atoms for R include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. The alkyl group is a linear or branched alkyl group. Examples thereof include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, 2-ethylhexyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group and the like. The number of carbon atoms of the alkyl group is preferably 1 to 12, more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and examples thereof include the groups represented below. The bonding site can be at any position. TIFF2025112270000027.tif46168Specifically, examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclodecyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, spirocyclohexane-1,2’-cyclopentane, spiroadamantane-2,3’-cyclopentane group and the like, and spiro rings having a cycloalkyl group spiro-bonded to each of the norbornyl group or adamantyl group. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. Examples of the aromatic hydrocarbon group include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group and the like. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and still more preferably 6 to 10.

[0020] Examples of the group formed by combination include a group combining an aromatic hydrocarbon group and a chain hydrocarbon group (for example, an aromatic hydrocarbon group - alkane diyl group - *, an alkyl group - aromatic hydrocarbon group - *, where -CH2- contained in the alkane diyl group and the alkyl group may be replaced by -O-, -CO-, -S-, -SO-, -NR 7 - or -SO2-.), a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group (for example, an alicyclic hydrocarbon group - alkane diyl group - *, an alkyl group - alicyclic hydrocarbon group - *, where -CH2- contained in the alkane diyl group and the alkyl group may be replaced by -O-, -CO-, -S-, -SO-, -NR 7 - or -SO2-.), a group combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (for example, an aromatic hydrocarbon group - alicyclic hydrocarbon group - *, an alicyclic hydrocarbon group - aromatic hydrocarbon group - *). * represents a bonding site. Examples of the aromatic hydrocarbon group - alkane diyl group - * include aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group - aromatic hydrocarbon group - * include tolyl group, xylyl group, cumenyl group, etc. Examples of the alicyclic hydrocarbon group - alkane diyl group - * include cycloalkylalkyl groups such as cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl, etc. Examples of the alkyl group - alicyclic hydrocarbon group - * include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, 2-alkyladamantan-2-yl group, etc. Examples of the aromatic hydrocarbon group - alicyclic hydrocarbon group - * include phenylcyclohexyl group, etc. Examples of the alicyclic hydrocarbon group - aromatic hydrocarbon group - * include cyclohexylphenyl group, etc. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may be combined with two or more of each. Also, any group may be bonded to the benzene ring.

[0021] R 4 When -CH2- contained in the hydrocarbon group represented by is replaced by -O-, -CO-, -S-, -SO-, -NR 7 - or -SO2-, the total number of carbon atoms of the hydrocarbon group before replacement is defined as the total carbon number of the hydrocarbon group. Also, the number may be one or two or more. As for the group in which -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -SO-, -SO2-, -NR 7 - or -CO-, examples include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an amino group (a group in which -CH2- contained in a methyl group is replaced by -NR 7 -, an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), a peptide group (a group in which -CH2-CH2- contained in an ethylene group is replaced by -CO-NR 7-replaced group), carboxy group (the -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), alkoxy group (any -CH2- in the alkyl group is replaced by -O-), alkoxycarbonyl group (any -CH2-CH2- in the alkyl group is replaced by -O-CO-), alkylcarbonyl group (any -CH2- in the alkyl group is replaced by -CO-), alkylcarbonyloxy group (any -CH2-CH2- in the alkyl group is replaced by -CO-O-), alkoxycarbonyloxy group (any -CH2-CH2-CH2- in the alkyl group is replaced by -O-CO-O-), alkylthio group (any -CH2- in the alkyl group is replaced by -S-), alkylsulfonyl group (any -CH2- in the alkyl group is replaced by -SO2-), alkanedioxy group (any -CH2- in the alkanedioyl group is replaced by -O-), alkanedioxycarbonyl group (any -CH2-CH2- in the alkanedioyl group is replaced by -O-CO-), alkanedioylcarbonyl group (any -CH2- in the alkanedioyl group is replaced by -CO-), alkanedioylcarbonyloxy group (any -CH2-CH2- in the alkanedioyl group is replaced by -CO-O-), alkanedioylthio group (any -CH2- in the alkanedioyl group is replaced by -S-), alkanedioylsulfonyl group (any -CH2- in the alkanedioyl group is replaced by -SO2-), cycloalkoxy group, cycloalkylalkoxy group, alkoxycarbonyloxy group, aromatic hydrocarbon group-carbonyl-oxy group, aromatic hydrocarbon group-carbonyl group, aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, etc. may be mentioned. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. In addition, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S- or -CO- include the same groups as those exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms.

[0022] R 4 Examples of the substituent that the hydrocarbon group of may have include a halogen atom, a cyano group, a nitro group, and the like. R 4 When R is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and an alkyl group, the alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Further, R 4 When -CH2- contained in the alkyl group contained in R is replaced by -O-, -CO-, -S-, -SO-, -NR 7 -, or -SO2-, R 4 can substantially have substituents such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group, and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 4 When R has a halogen atom as a substituent, R 4 is preferably a haloalkyl group having 1 to 12 carbon atoms. The haloalkyl group having 1 to 12 carbon atoms is an alkyl group having 1 to 12 carbon atoms having a halogen atom, and examples thereof include a fluoroalkyl group having 1 to 12 carbon atoms, a chloroalkyl group having 1 to 12 carbon atoms, a bromoalkyl group having 1 to 12 carbon atoms, and an iodoalkyl group having 1 to 12 carbon atoms. Examples of the haloalkyl group include a perfluoroalkyl group having 1 to 12 carbon atoms (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, and 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, and the like. The number of carbon atoms of the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. . The hydrocarbon group may have one substituent and a phenoxy anion or multiple substituents and a phenoxy anion. R 4 is preferably a halogen atom, an alkyl group having 1 to 6 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), or a haloalkyl group having 1 to 4 carbon atoms, more preferably an iodine atom, a fluorine atom, a hydroxy group, a carboxyl group, or a fluorinated alkyl group having 1 to 4 carbon atoms, more preferably an iodine atom, a fluorine atom, a hydroxy group, a methyl group, a carboxyl group, or a perfluoroalkyl group having 1 to 3 carbon atoms, and still more preferably an iodine atom, a fluorine atom, a hydroxy group, a carboxyl group, or a methyl group. m4 is preferably an integer of 0 to 3, and more preferably 0 or 1.

[0023] R 5 X included in 11 is preferably *-CO-O- or *-O-CO- (* represents the bonding site to the benzene ring). R 5 L included in 10 Examples of the hydrocarbon group in include chain hydrocarbon groups such as alkanediyl groups, monocyclic or polycyclic (including spiro ring) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may also be groups formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and an alkanediyl group). Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl groups; Examples of the branched alkanediyl group include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, and the like. The terminal of the branched alkanediyl group may be a methyl group. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 18, more preferably from 1 to 12, still more preferably from 1 to 9, even more preferably from 1 to 6, and even more preferably from 1 to 4. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following groups and the like. The bonding site can be at any position. TIFF2025112270000028.tif46168Specifically, examples of the alicyclic hydrocarbon group include a monocyclic divalent alicyclic hydrocarbon group which is a cycloalkanediyl group such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, a cyclooctane-1,5-diyl group, and a polycyclic divalent alicyclic hydrocarbon group such as a spiro ring having a cycloalkyl group, a norbornyl group or an adamantyl group each spiro-bonded to a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, a spirocyclohexane-1,2'-cyclopentane, a spiroadamantane-2,3'-cyclopentane group, and the like. The number of carbon atoms in the alicyclic hydrocarbon group is preferably from 3 to 1, more preferably from 3 to 16, and still more preferably from 3 to 12. Examples of the aromatic hydrocarbon group include aromatic hydrocarbon groups such as arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, and the like. The number of carbon atoms in the aromatic hydrocarbon group is preferably from 6 to 18, more preferably from 6 to 14, and still more preferably from 6 to 10. Examples of the group formed by combining two or more of them include a group formed by combining an alicyclic hydrocarbon group and an alkanediyl group, a group formed by combining an aromatic hydrocarbon group and an alkanediyl group, and a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined with each other. Further, any of the groups may be bonded to a carbonyl group or A 1 and may be bonded to A. Examples of the group formed by combining an alicyclic hydrocarbon group and an alkanediyl group include, for example, -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-, and the like. Examples of the group formed by combining an aromatic hydrocarbon group and an alkanediyl group include, for example, -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-, and the like. Examples of the group formed by combining an alicyclic saturated hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-, and the like. L 10 The -CH2- contained in the hydrocarbon group having 1 to 28 carbon atoms in L may be replaced by -O-, -S-, -SO-, -SO2-, -NR 7 -, or -CO-. L 10 When the -CH2- contained in the hydrocarbon group having 1 to 28 carbon atoms in L is replaced by -O-, -S-, -SO-, -SO2-, -NR 7 -, or -CO-, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the hydrocarbon group. When the -CH2- contained in the hydrocarbon group is -O-, -S-, -SO-, -SO2-, -NR 7-or as a group replaced by -CO-, a hydroxy group (a group in which -CH2- contained in the methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in the methyl group is replaced by -S-), an amino group (a group in which -CH2- contained in the methyl group is replaced by -NR 7 -), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in the methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in the methylene group is replaced by -SO2-), a peptide group (a group in which -CH2-CH2- contained in the ethylene group is replaced by -CO-NR 7 -), a carboxy group (a group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), an alkoxy group (a group in which any -CH2- contained in the alkyl group is replaced by -O-), an alkylthio group (a group in which any -CH2- contained in the alkyl is replaced by -S-), an alkylamino group (a group in which any -CH2- contained in the alkyl group is replaced by -NR 7-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO- Examples of such groups include an alkanediyl group in which -CH- at any position in the alkanediyl group is replaced with -CO-, an alkanediylcarbonyloxy group in which -CH-CH- at any position in the alkanediyl group is replaced with -CO-O-, an alkanediylsulfonyl group in which -CH- at any position in the alkanediyl group is replaced with -SO-, an alkanediylthio group in which -CH- at any position in the alkanediyl group is replaced with -S-, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group combining two or more of these groups. These substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. In addition, -CH2- contained in the alicyclic hydrocarbon group can be -O-, -S-, -SO-, -CO-, -NR 7 The group substituted with - or -SO2- includes the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0024] L 10 Examples of the substituent that may be possessed by L include a halogen atom and a cyano group. 10In the case of a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with an alkyl group, the alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Also, L 10 When -CH2- contained in the alkyl group contained in L 7 is replaced by -O-, -CO-, -S-, -SO-, -NR 10 - or -SO2-, L Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 10 The substituent in L is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxy group, or a halogen atom, more preferably an alkyl group having 1 to 4 carbon atoms or a halogen atom, and even more preferably a methyl group or a fluorine atom. 10 L

[0025] R 5 X contained in 11 R is preferably *-CO-O- or *-O-CO- (* represents the bonding site to the benzene ring). X 12 is preferably *-CO-O- (* represents the bonding site to L 10 ). R 5 R contained in 10is a group represented by formula (IC). TIFF2025112270000029.tif2982[In formula (IC), R A represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents any integer from 0 to 2. When u1 is 2, a plurality of R A may be the same or different. s1 represents 1 or 2. t1 represents 0 or 1. However, the sum of s1 and t1 is 1 or 2. L 12 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-. * represents a bonding site.] L 12 Examples of the hydrocarbon group having 1 to 36 carbon atoms for L include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkanediyl groups, alkenediyl groups, alkynediyl groups, and monocyclic or polycyclic alicyclic hydrocarbon groups), aromatic hydrocarbon groups, etc., and hydrocarbon groups formed by combining two or more of these groups may also be used. -CH2- contained in the hydrocarbon group for L 12 may be replaced by -O-, -S-, -SO-, -CO- or -SO2-. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group; branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group include. Examples of the alkenediyl group include an ethenediyl group, a propenediyl group, an isopropenediyl group, a butenediyl group, an isobutenediyl group, a tert-butenediyl group, a pentenediyl group, a hexenediyl group, a heptenediyl group, an octenediyl group, an isooctenediyl group, and a nonenediyl group. Examples of the alkynediyl group include an ethynediyl group, a propynediyl group, an isopropynediyl group, a butynediyl group, an isobutynediyl group, a tert-butynediyl group, a pentynediyl group, a hexynediyl group, an octynediyl group, a nonynediyl group, and the like. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 12, more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0026] L 12 When -CH2- contained in the hydrocarbon group of is replaced by -O-, -CO-, -S-, -SO-, -NR 7 -, or -SO2-, the total number of carbon atoms of the hydrocarbon group before replacement is taken as the total carbon number of the hydrocarbon group of L 12 Moreover, the number may be one or two or more. When -CH2- contained in the alkanediyl group is replaced by -O-, -S-, -SO-, -CO-, -NR 7Examples of groups substituted with - or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2- in an ethyl group is replaced with -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), an alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), an alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO -substituted with -), alkanediylcarbonyl group (a group in which -CH- at any position contained in an alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy group (a group in which -CH-CH- at any position contained in an alkanediyl group is replaced with -CO-O-), alkanediylthio group (a group in which -CH- at any position contained in an alkanediyl group is replaced with -S-), alkanediylsulfonyl group (a group in which -CH- at any position contained in an alkanediyl group is replaced with -SO-), etc. These substituted groups include the same as the groups exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. The substitutions in the alkenediyl group and alkynediyl group may include a carbon-carbon double bond or a carbon-carbon triple bond at any position in the above-mentioned examples of substitutions in the alkanediyl group.

[0027] The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below: The bonding site may be at any position. TIFF2025112270000030.tif46168Specifically, examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclohexene-3,6-diyl group, cyclooctane-1,5-diyl group, etc.; examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, 5-norbornene-2,3-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc.; examples of the cycloalkyl group include spirocyclohexane-1,2'-cyclopentane, spiroadamantane-2,3'-cyclopentane group, etc.; and examples of the spiro ring having a cycloalkyl group bonded spiro to each of the norbornyl group or the adamantyl group. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. In addition, when -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -SO-, -CO-, -NR 7 - or -SO2-, groups similar to those exemplified in this specification are included as long as the upper limit of the number of carbon atoms permits. Examples of the aromatic hydrocarbon group include phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, etc. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and still more preferably 6 to 10. When -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -SO-, -CO-, -NR 7 - or -SO2-, the total number of carbon atoms of the hydrocarbon group before replacement is taken as the total number of carbon atoms of the hydrocarbon group. Also, the number may be one or two or more.

[0028] Examples of the hydrocarbon group formed by combining two or more groups include a group formed by combining an alkanediyl group with an alicyclic hydrocarbon group and / or an aromatic hydrocarbon group. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined with each other. For example, -alicyclic hydrocarbon group-alkane diyl group-, -alkane diyl group-alicyclic hydrocarbon group-, -alkane diyl group-alicyclic hydrocarbon group-alkane diyl group-, -alkane diyl group-aromatic hydrocarbon group-, -aromatic hydrocarbon group-alkane diyl group-, etc. Any of these groups may be bonded to an oxygen atom or a carbonyl group.

[0029] L 12 Examples of the substituent of the hydrocarbon group of L include a halogen atom, a cyano group, a hydroxy group, a carboxy group, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkoxy group having 1 to 12 carbon atoms include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, a dodecyloxy group, etc. The alkoxycarbonyl group having 2 to 13 carbon atoms, the alkylcarbonyl group having 2 to 13 carbon atoms, and the alkylcarbonyloxy group having 2 to 13 carbon atoms represent a group in which a carbonyl group or a carbonyloxy group is bonded to the above-described alkyl group or alkoxy group. Examples of the alkoxycarbonyl group having 2 to 13 carbon atoms include a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group having 2 to 13 carbon atoms include an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group having 2 to 13 carbon atoms include an acetyloxy group, a propionyloxy group, and a butyryloxy group. L 12 The hydrocarbon group in may have one or more substituents.

[0030] L 12 represents a single bond, an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O-, -S-, -SO-, -SO2- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2- or -CO-), or a group combining an alkanediyl group having 1 to 6 carbon atoms with an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2-, -NR 7 - or -CO-), more preferably an alkanediyl group having 1 to 6 carbon atoms, even more preferably an alkanediyl group having 1 to 3 carbon atoms, and even more preferably a methylene group.

[0031] s1 is preferably 1, t1 is preferably 1, and the sum of s1 and t1 is preferably 2. The group represented by formula (IC) is preferably a group represented by the following formula: TIFF2025112270000031.tif2396

[0032] In the group represented by formula (IC), u1 is 1 and R A L 12 The group bonded to the carbon atom adjacent to is represented by the formula: TIFF2025112270000032.tif3144R A Examples of the saturated hydrocarbon group include chain saturated hydrocarbon groups such as alkyl groups, alicyclic saturated hydrocarbon groups, and groups in which two or more of these groups are combined. R A Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, a nonyl group, etc. The number of carbon atoms in the chain saturated hydrocarbon group is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. The alicyclic saturated hydrocarbon group may be any of monocyclic, polycyclic, and spirocyclic. Examples of the alicyclic saturated hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl, and polycyclic cycloalkyl groups such as norbornyl and adamantyl. The number of carbon atoms in the alicyclic saturated hydrocarbon group is preferably 3 to 10, more preferably 3 to 8, and even more preferably 3 to 6. The combined group may be a group in which one alkyl group and one alicyclic saturated hydrocarbon group are combined, or a group in which two or more of either or two or more of both are combined. R 5 are each independently -OR 10 , -CO-OR 10 , -O-CO-OR 10 , -O-CO-R 10 or -OL 10 -CO-OR 10 It is preferable that: m5 is preferably 2 or 3.

[0033] Examples of Compound (I) include the following compounds: TIFF2025112270000033.tif228160

[0034] TIFF2025112270000034.tif245166

[0035] TIFF2025112270000035.tif245163In the compounds represented by formula (I-1) to formula (I-50), R 0 Specific examples of compound (I) include compounds in which the methyl group corresponding to formula (I) is replaced with a hydrogen atom or the like, or the hydrogen atom is replaced with a methyl group, etc. Among these, the compounds represented by formulas (I-1) to (I-12) and formulas (I-21) to (I-50) are preferred.

[0036] <Structural unit represented by formula (IP)> The structural unit represented by formula (IP) (hereinafter sometimes referred to as "structural unit (IP)") is a structural unit derived from compound (I) and is represented by the following formula. TIFF2025112270000036.tif39123 [wherein all symbols have the same meanings as defined above.] The structural unit (IP) is at least one CH2=CR contained in the compound (I). 0 This shows the state in which the double bond is cleaved. R 0A and R 0B are each independently R in formula (I). 0 The same groups as those shown below can be mentioned. X 1A and X 1B are each independently X in formula (I). 1 The same groups as those shown below can be mentioned. L 1A and L 1B each independently represents L in formula (I). 1 The same groups as those shown below can be mentioned. R 4 and R 5 respectively represent R in formula (I). 4 and R 5 The same groups as those shown below can be mentioned. Examples of m4 and m5 include the same groups as m4 and m5 in formula (I), respectively. m1A is preferably 1 to 3, and m1B is preferably 0 to 3, and more preferably 0.

[0037] Examples of the structural unit (IP) include the following structural units. TIFF2025112270000037.tif107155

[0038] TIFF2025112270000038.tif254156

[0039] TIFF2025112270000039.tif238145

[0040] TIFF2025112270000040.tif139152

[0041] In the structural units represented by Formula (IP-1) to Formula (IP-50), the methyl group corresponding to R in Formula (IP) 0 Structural units in which the methyl group is replaced by a hydrogen atom or the like, or the hydrogen atom is replaced by a methyl group or the like can also be cited as specific examples of the structural unit (IP). Among them, the structural units represented by Formula (IP-1) to Formula (IP-12) and Formula (IP-21) to Formula (IP-50) are preferred.

[0042] <Compound containing structural unit (IP)> The compound containing the structural unit (IP) may be an oligomer in which 2 to 100 structural units (IP) are bonded, or a polymer in which 101 or more structural units (IP) are bonded. The polymer containing the structural unit (IP) may be a homopolymer containing one type of structural unit (IP), or a copolymer containing two or more types of structural units (IP). Furthermore, the homopolymer or copolymer containing the structural unit (IP) may be a copolymer containing one or more structural units other than the structural unit (IP) in addition to the structural unit (IP). In the polymer or copolymer containing the structural unit (IP), the content of the structural unit (IP) can be 1 mol% or more, preferably 5 mol% or more, more preferably 10 mol% or more, and even more preferably 15 mol% or more. It can also be 100 mol% or less. Specifically, it can be 1 to 100 mol%, preferably 5 to 100 mol%, more preferably 10 to 100 mol%, and even more preferably 15 to 100 mol%.

[0043] <Method for producing compound (I)> Compound (I) can be produced, for example, by reacting a compound represented by formula (Ia) with a compound represented by formula (I-b1) and / or a compound represented by formula (I-b2) in a solvent in the presence of a catalyst. TIFF2025112270000041.tif30160 (wherein all symbols have the same meanings as defined above, n5 represents an integer of 0 to 4, and two COOH may combine to form an anhydride.) Examples of the catalyst include potassium carbonate, potassium iodide, pyridine, diethylaminopyridine, triethylamine, and carbonyldiimidazole. Examples of the solvent include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, and water. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0044] Examples of compounds represented by formula (Ia) include the compounds represented below, which are readily available on the market and can also be easily produced by known production methods. TIFF2025112270000042.tif74163

[0045] Examples of compounds represented by formula (I-b1) include the compounds represented by the following formulas, which are readily available on the market and can also be easily produced by known production methods. The compound represented by formula (I-b2), such as the compounds represented below, can be easily obtained from the market and can also be easily produced by known production methods. TIFF2025112270000044.tif17165

[0046] [Resist composition] The resist composition of the present invention contains compound (I) and / or structural unit (IP). That is, the resist composition of the present invention is (a) A resist composition containing compound (I); (b) A resist composition containing compound (I) and a resin containing a structural unit represented by formula (a2-A) or a structural unit represented by formula (a2-D); (c) A resist composition containing compound (I) and a compound having a phenolic hydroxyl group or a benzoic acid carboxyl group, or a compound in which the hydroxyl group of the phenolic hydroxyl group or the carboxyl group of the benzoic acid carboxyl group is protected by an acid-labile group; (d) A resist composition containing a resin containing structural unit (IP) (hereinafter sometimes referred to as "resin (A)"). (e) Examples thereof include a resist composition containing a resin containing structural unit (IP) and a resin containing a structural unit having an acid-labile group (hereinafter sometimes referred to as "structural unit (a1)"). (f) A resist composition containing structural unit (IP), a resin containing a structural unit represented by formula (a2-A) (however, it may not contain a structural unit having an acid-labile group), and a resin containing a structural unit having an acid-labile group (however, it may not contain structural unit (IP)). These resist compositions may further contain an additional resin, regardless of the presence or absence of compound (I) and / or structural unit (IP). The resist composition of the present invention preferably further contains an acid generator (B) (hereinafter may be referred to as "acid generator (B)"). The resist composition of the present invention also preferably contains a quencher (hereinafter may be referred to as "quencher (C)"), such as a salt that generates an acid with a weaker acidity than the acid generated from the acid generator (B), and preferably contains a solvent (hereinafter may be referred to as "solvent (E)").

[0047] <Resin> The resin contained in the resist composition of the present invention is (g) When the resist composition of the present invention does not contain compound (I), it is a resin (A) containing the structural unit (IP) as described above, (h) When the resist composition of the present invention contains compound (I), it may be a resin that does not contain the above-mentioned structural unit (IP) (a resin that does not contain the structural unit (IP) may be referred to as “resin (AX)”).

[0039] Examples of resins contained in the resist composition of the present invention include a resin (A0) containing only the structural unit (IP), a resin containing the structural unit (IP) and further containing the structural unit (a1) (hereinafter, this may be referred to as "resin (A1)"), and a resin containing the structural unit (IP) and further containing a structural unit that does not contain the structural unit (a1), has a hydroxy group or a carboxy group, and is free of an acid labile group (hereinafter, this may be referred to as "structural unit (a2)"). In the resin (A), the content of the structural unit (IP) relative to all structural units is 1 mol% or more, preferably 5 mol% or more, more preferably 10 mol% or more, and even more preferably 15 mol% or more. It may also be 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and even more preferably 50 mol% or less. Specifically, it may be 1 to 100 mol%, preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 10 to 60 mol%, and even more preferably 15 to 50 mol%. In another embodiment, the resin contained in the resist composition of the present invention may contain structural units other than the structural units (a1) and (a2), regardless of the presence or absence of the structural unit (IP). Examples of structural units other than the structural units (a1) and (a2) include a structural unit having a lactone ring and no acid labile group (hereinafter sometimes referred to as "structural unit (a3)"), a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), and other structural units derived from monomers known in the art. Examples of the resin (AX) contained in the resist composition of the present invention include a resin (AX1) that does not contain the structural unit (IP) but contains the structural unit (a1), and a resin (AX2) that does not contain the structural unit (IP) or the structural unit (a1) but contains the structural unit (a2).

[0048] <Structural unit (a1)> The structural unit (a1) is derived from a monomer having an acid labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid labile group contained in the resin is preferably a group represented by formula (1) (hereinafter also referred to as group (1)) and / or a group represented by formula (2) (hereinafter also referred to as group (2)). TIFF2025112270000045.tif2298[In formula (1), R a1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining any of these; or R a1 and R a2 are bonded to each other to form, together with the carbon atoms to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * denotes a binding site.] TIFF2025112270000046.tif2278[In formula (2), R a1’ and R a2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form, together with the carbon atom to which they are bonded and X, a heterocyclic group having 3 to 20 carbon atoms. The -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na’ represents 0 or 1. * represents a bonding site.]

[0049] R a1 、R a2 and R a3 Examples of the alkyl group for R 、R a1 、R a2 and R a3 include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, and the like. R a1 、R a2 and R a3 The alicyclic hydrocarbon group for R a1 、R a2 and R a3 may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following group (* represents a bonding site.). The carbon number of the alicyclic hydrocarbon group for R TIFF2025112270000047.tif10159R a1 and R a2 and R a3 Examples of the aromatic hydrocarbon group in a3 include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, and phenanthryl group. Examples of the combined group include a group formed by combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkyl cycloalkyl group or cycloalkyl alkyl group such as methyl cyclohexyl group, dimethyl cyclohexyl group, methyl norbornyl group, cyclohexyl methyl group, adamantyl methyl group, adamantyl dimethyl group, norbornyl ethyl group, etc.), aralkyl group such as benzyl group, aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon group having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl group such as phenyl cyclohexyl group, etc. Preferably, ma is 0 and na is 1. R a1 and R a2 When a1 and a2 are bonded to each other to form an alicyclic hydrocarbon group, examples of -C(R a1 )(R a2 )(R a3 ) include the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents a bond to -O-. TIFF2025112270000048.tif27138

[0050] R a1’ and R a2’ and R a3’ Examples of the hydrocarbon group in a1’ , a2’ and a3’ include alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group formed by combining these. The alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and the group formed by combining these are R a1 and R a2 and Ra3 Those similar to the groups mentioned above can be mentioned. R a2’ and R a3’ When R and R are bonded to each other to form a heterocyclic ring together with the carbon atom to which they are bonded and X, -C(R a1’ )(R a2’ )-X-R a3’ Examples of this include the following groups. * represents a bond. TIFF2025112270000049.tif19124R a1’ and R a2’ Among them, at least one is preferably a hydrogen atom. na’ is preferably 0.

[0051] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 are alkyl groups, ma = 0, and na = 1. A tert-butoxycarbonyl group is preferred as this group. In formula (1), R a1 , R a2 together with the carbon atom to which they are bonded form an adamantyl group, R a3 is an alkyl group, ma = 0, and na = 1. In formula (1), R a1 and R a2 are each independently an alkyl group, R a3 is an adamantyl group, ma = 0, and na = 1. Specific examples of the group (1) include the following groups. * represents a bond. TIFF2025112270000050.tif151166

[0052] Specific examples of the group (2) include the following groups. * represents a bond. TIFF2025112270000051.tif55153

[0053] The monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid labile group. Of the (meth)acrylic monomers having an acid labile group, preferred are those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. When a resin having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group is used in a resist composition, the resolution of the resist pattern can be improved.

[0054] Examples of structural units derived from a (meth)acrylic monomer having group (1) include a structural unit represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter sometimes referred to as structural unit (a1-2)). Preferably, at least one structural unit selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2) is used, and more preferably at least one or two structural units selected from the group consisting of structural unit (a1-1) and structural unit (a1-2). These may be used alone or in combination of two or more. TIFF2025112270000052.tif43144 [In formula (a1-0), formula (a1-1) and formula (a1-2), all symbols have the same meanings as defined above.]

[0055] R a01 , R a4 , R a5 The halogen atom in the formula (I) may be a fluorine atom, a chlorine atom, a bromine atom or an iodine atom. R a01 , R a4 , R a5Examples of the alkyl group which may have a halogen atom include chloromethyl group, bromomethyl group, iodomethyl group, trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, and perfluorohexyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group. R a01 , R a4 and R a5 are preferably a hydrogen atom or a methyl group, and more preferably a methyl group. L a01 , L a1 and L a2 are preferably an oxygen atom or *-O-(CH2) k01 -CO-O- (wherein k01 is preferably any integer from 1 to 4, and more preferably 1), and more preferably an oxygen atom. R a02 , R a03 and R a04 Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group and the group formed by combining these in R a1 , R a2 and R a3 include the same groups as those exemplified for R R a6 and R a7 Examples of the alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group and the group formed by combining these in R a1 , R a2 and R a3 include the same groups as those exemplified for R R a02 , Ra03 , and R a04 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a6 and R a7 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a6 and R a7 The alkenyl group in the formula (I) is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group. R a02 , R a03 , R a04 , R a6 and R a7 The alicyclic hydrocarbon group preferably has 5 to 12 carbon atoms, and more preferably 5 to 10 carbon atoms. R a02 , R a03 , R a04 , R a6 and R a7 The aromatic hydrocarbon group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms. In the group in which an alkyl group and an alicyclic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the alicyclic hydrocarbon group is preferably 18 or less. In the group in which an alkyl group and an aromatic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the aromatic hydrocarbon group is preferably 18 or less. R a02 and R a03 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, phenyl group or naphthyl group which may have a halogen atom. R a04is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group which may have a halogen atom. R a6 and R a7 are preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group, a phenyl group or a naphthyl group which may have a halogen atom, still more preferably an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group or a phenyl group which may have a halogen atom. m1’ is preferably any integer from 0 to 3, more preferably 0 or 1. n1 is preferably any integer from 0 to 3, more preferably 0 or 1. n1’ is preferably 0 or 1.

[0056] Examples of the structural unit (a1-0) include structural units represented by any of formulae (a1-0-1) to (a1-0-24) and structural units in which the methyl group corresponding to R a01 in the structural unit (a1-0) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group, and structural units represented by any of formulae (a1-0-1) to (a1-0-10), formula (a1-0-13), formula (a1-0-14), formulae (a1-0-19) to (a1-0-24) are preferred. TIFF2025112270000053.tif120160

[0057] Examples of the structural unit (a1-1) include structural units derived from the monomers described in JP-A-2010-204646. Among them, structural units represented by any of formulae (a1-1-1) to (a1-1-7) and R a4A structural unit in which the methyl group corresponding to the formula (a1-1-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group is preferred, and a structural unit represented by any one of formulas (a1-1-1) to (a1-1-4) is more preferred. TIFF2025112270000054.tif38168

[0058] The structural unit (a1-2) includes a structural unit represented by any one of formulas (a1-2-1) to (a1-2-20) and R a5 and structural units in which the methyl group corresponding to the formula (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20) are substituted with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. TIFF2025112270000055.tif92164

[0059] When the resin contains the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these, based on the total structural units of the resin, can be 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. Also, the total content can be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the total content is 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, even more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%. When the resin contains the structural unit (a1-0), the content is 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, still more preferably 20 mol% or more, even more preferably 25 mol% or more, even still more preferably 30 mol% or more, and even more preferably 35 mol% or more, based on all the structural units of the resin and the like. Also, it is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less. Specifically, 5 to 80 mol% is mentioned, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%. When the resin contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, even still more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of the resin. Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, even still more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, 10 to 90 mol% is mentioned, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, still more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and even still more preferably 20 to 70 mol%.

[0060] Examples of the structural unit having the group (2) in the structural unit (a1) include the structural unit represented by the formula (a1-4) (hereinafter sometimes referred to as "structural unit (a1-4)"). TIFF2025112270000056.tif32118[In the formula (a1-4), all the symbols have the same meanings as described above.]

[0061] Ra1 and R a17 Examples of the halogen atom in a17 include a fluorine atom, a chlorine atom, a bromine atom, etc. R a1 and R a17 Examples of the C1-C6 alkyl group which may have a halogen atom in a17 include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, an iodomethyl group. The number of carbon atoms of the alkyl group is preferably 1-4, more preferably 1-3, still more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a1 is preferably a hydrogen atom or a C1-C4 alkyl group, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. R a17 Examples of the alkoxy group in a17 include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, a hexyloxy group. The alkoxy group is preferably a C1-C4 alkoxy group, more preferably a C1-C3 alkoxy group, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a17Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably an alkoxyalkyl group having 2 to 4 carbon atoms, still more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. R a17 Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably an alkoxyalkoxy group having 2 to 4 carbon atoms, and still more preferably a methoxyethoxy group or an ethoxyethoxy group. R a17 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 4 carbon atoms, more preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and still more preferably an acetyl group. R a17 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 4 carbon atoms, more preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and still more preferably an acetyloxy group. R a17is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0062] A a11 Examples of the alkanediyl group of A a11 include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms of the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, even still more preferably 1 to 3, and even more preferably 1 or 2. R a18 Examples of the alkyl group of R a18 include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group and tert-butyl group. A a11 When -CH2- contained in the alkanediyl group of A a11 is replaced by -O-, -CO- or -NR a18 -, the number of carbon atoms before replacement is taken as the number of carbon atoms of the alkanediyl group. A a11 When -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO- or -NRa18 - The groups that replace it include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), an amino group (a group in which -CH2- contained in a methyl group is replaced by -NR a18 - (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), an alkylamino group (a group in which -CH2- at any position contained in an alkyl group is replaced by -NR a18 - (a group in which -CH2- at any position contained in an alkylene group is replaced by -O-), a peptide group (a group in which -CH2-CH2- contained in an ethylene group is replaced by -CO-NR a18 - (a group in which -CH2- at any position contained in an alkylene group is replaced by -O-), an alkanedioxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -SO2-), an alkanediylthio group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -S-), an alkanediylamino group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -NR a18 - (a group in which -CH2- at any position contained in an alkylene group is replaced by -O-), etc. These replaced groups include those similar to those exemplified in this specification within the range permitted by the upper limit of the number of carbon atoms. Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as methylamino group, ethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, and octylamino group. The number of carbon atoms of the alkylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as methyleneamino group, ethyleneamino group, and propyleneamino group. The number of carbon atoms of the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. For example, A a11 Examples of the group in which -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO-, or -NR a18 - include *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a12 -CO-O-, *-O-CO-A a12 -O-, *-O-A a12 -CO-O-, *-CO-O-A a12 -O-CO-, *-O-CO-A a12 -O-CO-, *-CO-NR a18 - are included. Among them, *-CO-O-, *-CO-O-A a12 -CO-O-, *-O-A a12 -CO-O-, *-CO-NR a18 - are preferred. Here, A a12 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a1 is bonded. The alkanediyl group of A includes alkanediyl groups similar to A a12 within the range where the upper limit of the number of carbon atoms permits. a11 A a11 is a single bond, *-CO-O-, or *-CO-O-A a12-CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred. na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. mc is preferably 0 or 1.

[0063] R a34 , R a35 and R a36 Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which these groups are combined. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site): TIFF2025112270000057.tif10151 Examples of aromatic hydrocarbon groups include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group formed by combining the above-described alkyl group and alicyclic hydrocarbon group (e.g., an alkylcycloalkyl group or cycloalkylalkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornil group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), an aralkyl group such as benzyl group, an aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), an aryl-cycloalkyl group such as phenylcyclohexyl group, etc. In particular, R a36 Examples of R include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these. R a35 and R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms formed by R and R bonding to each other together with the -C-O- to which they are bonded include the following groups. * represents the bonding site, and one side is the bonding site with R a34 and the other side is the bonding site with R. TIFF2025112270000058.tif15105

[0064] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group of R is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. R a36The alkyl group and alicyclic hydrocarbon group in are preferably unsubstituted. R a36 The aromatic hydrocarbon group in preferably has an aromatic ring having an aryloxy group with 6 to 10 carbon atoms.

[0065] -O-C(R a34 )(R a35 )-O-R a36 in the structural unit (a1-4) is eliminated upon contact with an acid (for example, p-toluenesulfonic acid) to form a hydroxy group or a carboxy group. -X a1 -O-C(R a34 )(R a35 )-O-R a36 in the case of a benzene ring may be bonded to any of the o-position, m-position or p-position with respect to the bonding position of A a11 . Among them, at least one is preferably bonded to the o-position or p-position, and more preferably bonded to the p-position. In the case of a naphthalene ring, when the bonding position of A a11 is at the 1-position, it may be bonded to any of the 2nd to 8th positions, and when the bonding position of A a11 is at the 2nd position, it may be bonded to any of the 1st and 3rd to 8th positions. Among them, when the bonding position of A a11 is at the 1st position, at least one is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. When the bonding position of A a11 is at the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0066] Examples of the structural unit (a1-4) include structural units derived from the monomers described in JP-A-2010-204646. Preferably, the structural units represented by the formulas (a1-4-1) to (a1-4-42) and R in the structural unit (a1-4) a1and more preferably, the structural units represented by formulae (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20). TIFF2025112270000059.tif229165

[0067] When the resin contains the structural unit (a1-4), the content thereof, based on the total of all structural units in the resin, can be 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. It can also be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0068] Examples of the structural unit derived from a (meth)acrylic monomer having the group (2) include a structural unit represented by formula (a1-5) (hereinafter, sometimes referred to as "structural unit (a1-5)"). TIFF2025112270000060.tif4558 [In formula (a1-5), all symbols have the same meanings as defined above.]

[0069] In formula (a1-5), R a8 is the R in formula (a1-0) a01 Among them, R a8is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L 53 among them, it is preferable that one is -O- and the other is -S-. For s1, 1 is preferable. For s1', any integer from 0 to 2 is preferable. Z a1 is preferably a single bond or *-CH2-CO-O-.

[0070] Examples of the structural unit (a1-5) include structural units derived from the monomers described in JP-A-2010-61117. Among them, the structural units represented by formula (a1-5-1) to formula (a1-5-4) are preferable, and the structural unit represented by formula (a1-5-1) or formula (a1-5-2) is more preferable. TIFF2025112270000061.tif33133

[0071] When the resin contains the structural unit (a1-5), the content thereof is 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, even more preferably 10 mol% or more, still even more preferably 20 mol% or more, and even more preferably 25 mol% or more, based on all the structural units of the resin. Also, 80 mol% or less, preferably 70 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 45 mol% or less, still even more preferably 40 mol% or less, and even more preferably 30 mol% or less can be mentioned. Specifically, 1 to 50 mol% is preferable, 3 to 45 mol% is more preferable, 5 to 40 mol% is still more preferable, and 5 to 30 mol% is even more preferable.

[0072] Examples of the structural unit having the group (1) in the structural unit (a1) include the structural unit represented by formula (a1-6) (hereinafter sometimes referred to as "structural unit (a1-6)"). TIFF2025112270000062.tif3581[In formula (a1-6), all the symbols have the same meanings as described above.] R a61 is the same group as exemplified in R of formula (a1-0). a01 Among others, R a61 is the same group as exemplified in R of formula (a1-0). a01 Among others, R a61 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. R a62 , R a63 and R a64 Examples of the alkyl group in R R a62 , R a63 and R a64 include a methyl group, an ethyl group, a propyl group, a butyl group, a heptyl group, a hexyl group and the like. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and even more preferably a methyl group or an ethyl group. Examples of the cyclic hydrocarbon group in R include an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group and the like. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12. R a62 and Ra63 The rings formed by the combination of them include adamantane ring, cyclopentane ring, cyclohexane ring, etc. Specifically, R a62 and R a63 When they are combined with each other to form a ring, examples of -C(R a62 )(R a63 )(R a64 ) include the following groups. * represents the bonding site with the oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, more preferably 3 to 12 carbon atoms. TIFF2025112270000063.tif33109

[0073] L a61 and L a62 Examples of the C1-C4 alkanediyl group in L a61 and L a62 include methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, etc. L X a61 is preferably a single bond or -CO-O-*, more preferably a single bond. X a62 is preferably a single bond or *-O-L 1 -, more preferably a single bond.

[0074] Examples of the C6-C20 aromatic hydrocarbon group of Ar include phenylene group, 1-naphthylene group, 2-naphthylene group, 1-anthrylene group, 9-anthrylene group, biphenylene group, 1-phenanthrylene group, 2-phenanthrylene group, etc. Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.

[0075] Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group having 1 to 6 carbon atoms that may have a halogen atom include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, and a perfluorohexyl group. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group preferably has 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group preferably has 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. Preferred substituents include a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms. More preferred are a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group. Even more preferred are a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxy group.

[0076] Examples of the structural unit (a1-6) include structural units represented by Formula (a1-6-1) to Formula (a1-6-43). Among them, the structural units represented by Formula (a1-6-1) to Formula (a1-6-9) are preferred, the structural units represented by Formula (a1-6-1), Formula (a1-6-2), Formula (a1-6-4), Formula (a1-6-5), Formula (a1-6-7) or Formula (a1-6-8) are more preferred, and the structural units represented by Formula (a1-6-1) or Formula (a1-6-2) are even more preferred. In the following structural units, the hydrogen atom corresponding to R a61 replaced by a methyl group or the like, and in the following structural units, the methyl group corresponding to R a61 replaced by a hydrogen atom are also included as the structural unit (a1-6). TIFF2025112270000064.tif241163

[0077] When the resin contains the structural unit (a1-6), its content is 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, even more preferably 10 mol% or more, still more preferably 20 mol% or more, yet more preferably 30 mol% or more, and even more preferably 40 mol% or more, based on all the structural units of the resin. Also, it is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 7 to 70 mol%, still more preferably 7 to 65 mol%, and particularly preferably 10 to 60 mol%.

[0078] Examples of the structural unit (a1) also include the following structural units. TIFF2025112270000065.tif33167

[0079] When the resin contains structural units represented by formulas (a1-7-1) to (a1-7-7), the content of these structural units relative to the total structural units of the resin is preferably 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. The content may also be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, the content is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0080] Further, examples of the structural unit (a1) include the following structural units. When the resin contains structural units represented by formulas (a1-8-1) to (a1-8-3), the content of these structural units relative to the total structural units of the resin is 10 mol % or more, preferably 15 mol % or more, more preferably 20 mol % or more, even more preferably 25 mol % or more, even more preferably 30 mol % or more, even more preferably 40 mol % or more, and even more preferably 50 mol % or more. The content may also be 95 mol % or less, preferably 90 mol % or less, more preferably 85 mol % or less, even more preferably 80 mol % or less, even more preferably 75 mol % or less, even more preferably 70 mol % or less, and even more preferably 60 mol % or less. Specifically, it is preferably 10 to 60 mol %, more preferably 15 to 55 mol %, even more preferably 20 to 50 mol %, even more preferably 20 to 45 mol %, and particularly preferably 20 to 40 mol %.

[0081] <Structural unit(s)> The structural unit(s) is / are derived from monomers having no acid-labile group (hereinafter sometimes referred to as "monomer(s)"). As the monomer(s) from which the structural unit(s) is / are derived, monomers having no acid-labile group known in the resist field can be used. As the structural unit(s), those having a hydroxy group, a carboxy group or a lactone ring are preferable. By using a resin having a structural unit having a hydroxy group or a carboxy group and no acid-labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and no acid-labile group (hereinafter sometimes referred to as "structural unit (a3)") in the resist composition of the present invention, the resolution of the resist pattern and the adhesion to the substrate can be improved. In addition to the above-described structural units, the structural unit(s) includes a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), a structural unit having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), or a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"), and the like.

[0082] 〈Structural unit (a2)〉 The structural unit (a2) is a structural unit represented by the formula (a2) and has an alcoholic hydroxy group, a phenolic hydroxy group, a saturated fatty acid carboxy group or an unsaturated fatty acid carboxy group. TIFF2025112270000067.tif4092[In the formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO- or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. L a21represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO- or -SO2-. L a22 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms which may have a fluorine atom, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-. na2 represents any integer from 1 to 4. When na2 is 2 or more, a plurality of Ls a22 may be the same as or different from each other. R a2 Examples of the halogen atom in R include a fluorine atom, an iodine atom, a chlorine atom, a bromine atom and the like. R a2 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, an iodomethyl group. R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0083] A a21Examples of the alkanediyl group include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, and the like. Among them, A a21 is preferably a methylene group or an ethylene group. The number of carbon atoms of the alkanediyl group is preferably 1 to 6, more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2. R a28 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a21 Examples of the group in which -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO-, or -NR a28 - include, as described above, a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group, a peptide group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediyl-carbonyl group, an alkanediyl-carbonyl-oxy group, an alkanediyl-sulfonyl group, an alkanediyl-thio group, an alkanediyl-amino group, and the like. These replaced groups include those similar to those exemplified herein within the range where the upper limit of the number of carbon atoms permits. For example, examples of the group in which -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO-, or -NR a21 - include *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a28 -CO-O-, *-O-CO-A a22 -O-, *-O-A a22 -CO-O-, *-CO-O-A a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a22 -O-CO-, *-CO-NR a28- can be mentioned. Among them, *-CO-O-, *-CO-O-A a22 -CO-O- or *-O-A a22 -CO-O-, *-CO-NR a28 - is preferable. Here, A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site bonded to the carbon atom to which R a2 is bonded. The alkanediyl group of A a22 can be the same alkanediyl group as A a21 within the range allowed by the upper limit of the number of carbon atoms. A a21 is preferably a single bond, *-CO-O- or *-CO-O-A a22 -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-.

[0084] L a21 The hydrocarbon group in is a (na2 + 1)-valent hydrocarbon group, and examples thereof include a chain hydrocarbon group, an alicyclic hydrocarbon group of a monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.), and a cyclic hydrocarbon group such as an aromatic hydrocarbon group. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) may also be used. L a21 Examples of the chain hydrocarbon group of include divalent to hexavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, an alkanpentail group, and an alkanhexail group. L a21 Examples of the alkanediyl group of include, for example, A a21 the same alkanediyl group as. L a21 ​Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, and a heptadecanetriyl group. Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, and a heptadecanetetrayl group. Examples of the alkanepentayl group include a methanepentayl group, an ethanepentayl group, a propanepentayl group, a butanepentayl group, a pentanepentayl group, and a hexanepentayl group. L a21 The number of carbon atoms of the chain hydrocarbon group of L is preferably from 1 to 18, more preferably from 1 to 12, still more preferably from 1 to 10, even more preferably from 1 to 9, still even more preferably from 1 to 8, still more preferably from 1 to 6, still even more preferably from 1 to 5, and particularly preferably from 1 to 4. L a21 Examples of the monocyclic and polycyclic divalent alicyclic hydrocarbon groups in L include the following alicyclic hydrocarbon groups. The bonding site can be at any position. TIFF2025112270000068.tif45167 For example, divalent to hexavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, a cycloalkanepentayl group, and a cycloalkanhexayl group. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, cyclodecanetetrayl group, and polycyclic alicyclic hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, bicyclo[3.3.0]octanetetrayl group can be mentioned. In addition, groups in which one or more hydrogen atoms of the above-mentioned groups are replaced by bonding sites can also be mentioned. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. L a21 Examples of the aromatic hydrocarbon group in L include divalent to hexavalent aromatic hydrocarbon groups such as arylene group, arenetriyl group, arenetetrayl group, arenepentayl group, arenexayl group. Specifically, aromatic hydrocarbon groups such as phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, benzenetriyl group, naphthalenetriyl group, anthracenetriyl group, biphenylenetriyl group, phenanthrenetriyl group, benzenetetrayl group, naphthalenetetrayl group, anthracenetetrayl group, biphenylenetetrayl group, phenanthrenetetrayl group can be mentioned. In addition, groups in which one or more of the hydrogen atoms of the above-described base are replaced with bonding sites can also be mentioned. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, still more preferably 6 to 14, and even more preferably 6 to 10. Examples of the trivalent to pentavalent alicyclic hydrocarbon group and aromatic hydrocarbon group include groups in which 1 to 3 hydrogen atoms are removed from the above-described divalent group to form a bond. Examples of the group combined with two or more types include a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may each be combined with two or more types. Also, any group may be A a21 and L a22 and may be bonded thereto. Examples of groups in which -CH2- contained in a hydrocarbon group is replaced by -O-, -S-, -SO-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2- at any position contained in an alkyl group is replaced by -S-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-O-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkanedioxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -SO2-),Examples thereof include an alkanediylthio group (a group in which any -CH2- in the alkanediyl group is replaced by -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, and the like. Also included are groups in which one or more hydrogen atoms of these groups are replaced at the bonding site, and the like. Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, and the like. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as butoxycarbonyloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 27 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanedioxy group, butanedioxy group, pentanedioxy group and the like. The number of carbon atoms of the alkanedioxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 27 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 28 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyloxy group include alkanediyl-carbonyloxy groups having 2 to 27 carbon atoms, such as a methylene-carbonyloxy group, an ethylene-carbonyloxy group, a propanediyl-carbonyloxy group, and a butanediyl-carbonyloxy group. The number of carbon atoms of the alkanediyl-oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl-carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl-carbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-thio group include alkanediyl-thio groups having 1 to 27 carbon atoms, such as a methylene-thio group, an ethylene-thio group, and a propanediyl-thio group. The number of carbon atoms of the alkanediyl-thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-sulfonyl group include alkanediyl-sulfonyl groups having 1 to 27 carbon atoms, such as a methylene-sulfonyl group, an ethylene-sulfonyl group, and a propylene-sulfonyl group. The number of carbon atoms of the alkanediyl-sulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0085] Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyl oxy group include aromatic hydrocarbon group-carbonyl oxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 28 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0086] Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -SO-, -CO- or -SO2- include the following groups. Among the groups represented below, groups in which -O- is replaced by -S-, -SO-, -CO- is replaced by -SO2- respectively, etc. are also included. The bonding site can be at any position. Examples of the group in which -CH2- contained in the combined group is replaced by -O-, -S-, -SO-, -CO- or -SO2- also include the following groups. The bonding site can be at any position. TIFF2025112270000070.tif27164L a21 The hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 12 carbon atoms (the -CH2- contained in the haloalkyl group and the alkyl group may be replaced by -O-, -CO-, -S-, -SO- or -SO2-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L a21The hydrocarbon group in can have a substituent such as a haloalkyl group by having a halogen atom as a substituent. Examples of the haloalkyl group include a chloromethyl group, a bromomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl, etc., and a haloalkyl group having 1 to 4 carbon atoms is preferable, and a haloalkyl group having 1 to 3 carbon atoms is more preferable. L a21 The hydrocarbon group of can have a substituent such as an alkyl group by including a branched structure. a21 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms of the alkyl group is preferably 1 to 12, more preferably 1 to 10, still more preferably 1 to 8, even more preferably 1 to 6, still even more preferably 1 to 4, and even more preferably 1 to 3. L a21 When -CH2- contained in the hydrocarbon group of is replaced by a group such as -O-, -CO-, -S-, -SO- or -SO2-, a21 L can have a substituent such as a hydroxy group, a carboxy group, a thiol group, a sulfonyl group, an alkoxy group, an alkoxyalkyl group, an alkoxyalkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group. The number of carbon atoms of the alkoxy group is preferably 1 to 12, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms of the alkoxycarbonyl group, the alkylcarbonyl group, and the alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. The number of carbon atoms of the alkoxyalkyl group and the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 8, still more preferably 2 to 6, and even more preferably 2 to 4. Examples of the above-described group include the same groups as those exemplified in the present specification. L a21 Examples of the substituent that the hydrocarbon group in a21 may have include a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). Preferred are a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). More preferred are a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). Even more preferred are a fluorine atom, an iodine atom, a haloalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). Even more preferred are a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group. L a21is a single bond, an optionally substituted linear hydrocarbon group having 1 to 12 carbon atoms (provided that -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-), or a group formed by combining an optionally substituted linear hydrocarbon group having 1 to 8 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2- or -CO-), preferably, an optionally substituted linear hydrocarbon group having 1 to 10 carbon atoms (provided that -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-), or a group formed by combining an optionally substituted linear hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2- or -CO-), more preferably.

[0087] L a22Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-dimethylpropane-1,3-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, and even more preferably 1 to 4. L a22 The fluorine atom(s) that [L] a22 has may be one or two or more. na2 is preferably any integer from 1 to 3, and more preferably 1 or 2. L a21 Examples of the structural unit (a2) when [L] a21 is a single bond or a chain hydrocarbon group include, for example, the following structural units. Among the following structural units, the structural units in which the methyl group corresponding to R a2 is replaced by a hydrogen atom or the like are also suitable structural units of the structural unit (a2) in the same manner as the following structural units. TIFF2025112270000071.tif65164

[0088] When producing a resist pattern from the resist composition of the present invention, when using a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) as an exposure light source, as the structural unit (a2), a structural unit (a2) having a phenolic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-A) described later. When using an ArF excimer laser (193 nm) or the like, as the structural unit (a2), a structural unit (a2) having an alcoholic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-1) described later. The structural unit (a2) may be included alone by 1 type, or may be included by 2 or more types.

[0089] In the structural unit (a2), L a21 In the case where is a cyclic hydrocarbon group, examples of the structural unit having a phenolic hydroxy group or a carboxy group include a structural unit represented by the formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)"). TIFF2025112270000072.tif30128 [In the formula (a2-A), all the symbols have the same meanings as described above.]

[0090] R a2 and A a21 are each the same groups as those exemplified by the formula (a2). R a27 Examples of the halogen atom of include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a27Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, chloromethyl group, bromomethyl group, iodomethyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, still more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a27 Examples of the alkoxy group of include methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, tert-butoxy group. The number of carbon atoms of the alkoxy group is preferably 1 to 4, more preferably 1 to 3, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a27 Examples of the alkoxyalkyl group of include methoxymethyl group, ethoxyethyl group, propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxymethyl group, tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and still more preferably a methoxymethyl group. R a27 Examples of the alkoxyalkoxy group of include methoxymethoxy group, methoxyethoxy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isopropoxymethoxy group, butoxymethoxy group, sec-butoxymethoxy group, tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group. Ra27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. R a27 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a27 is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxy methoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nA2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, and even more preferably 1 or 2. na21 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH, in the case of a benzene ring, may be bonded to any of the o-position, m-position, or p-position with respect to the bonding position of A a21 . Among them, at least one is preferably bonded to the m-position or p-position, and more preferably bonded to the m-position. In the case of a naphthalene ring, when the bonding position of A a21 is at the 1-position, it may be bonded to any of the 2nd to 8th positions, and when the bonding position of A a21 is at the 2nd position, it may be bonded to any of the 1st and 3rd to 8th positions. Among them, when the bonding position of A a21 is at the 1st position, at least one is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. When the bonding position of A a21 is at the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0091] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577. Examples of the structural unit (a2-A) include structural units represented by formula (a2-2-1) to formula (a2-2-32), formula (a2-3-1) to formula (a2-3-24), and in the structural units represented by formula (a2-2-1) to formula (a2-2-32), formula (a2-3-1) to formula (a2-3-24), the R a2 in the structural unit (a2-A) corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. TIFF2025112270000073.tif107170

[0092] When the resin contains the structural unit (a2-A), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on all the structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, even more preferably 20 to 65 mol%, even more preferably 60 mol% or less, still more preferably 50 mol% or less, still more preferably 45 mol% or less, and even more preferably 40 mol% or less. The structural unit (a2-A) is a compound that induces the structural unit (a2-A) (for example, the -CH2-C(-R a2 )- in the structural unit (a2-A) is the CH2=C(-R of the double bond before cleavage a2By polymerizing a compound (such as (a2-A’)) in the state of ), it can be incorporated into the resin. Further, for example, after polymerization using the structural unit (a1-4), it can be incorporated into the resin by treating with an acid such as p-toluenesulfonic acid. Also, after polymerization using acetoxystyrene or the like, the structural unit (a2-A) can be incorporated into the resin by treating with an alkali such as tetramethylammonium hydroxide.

[0093] In the structural unit (a2), when L a21 is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include a structural unit represented by the formula (a2-B) (hereinafter sometimes referred to as “structural unit (a2-B)”) or a structural unit represented by the formula (a2-C) (hereinafter sometimes referred to as “structural unit (a2-C)”). TIFF2025112270000075.tif45100[In the formulas (a2-B) and (a2-C), R a2 represents the same meaning as in the formula (a2). R a27 represents the same meaning as in the formula (a2-A). L a25 is -O- or *-O-(CH2) k2 -CO-O- represents, and k2 represents an integer of any one of 1 to 7. * represents the bonding position with -CO-. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represent a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer of any one of 1 to 5. When nB2 is 2 or more, a plurality of X a2 may be the same as or different from each other. nB22 represents an integer of any one of 0 to 8. When nB22 is 2 or more, a plurality of R a27 may be the same as or different from each other. nC22 represents an integer of any one of 0 to 10. When nC22 is 2 or more, a plurality of R a27may be the same as or different from each other. L a25 is preferably -O-, -O-(CH2) f1 -CO-O- (where f1 represents any integer from 1 to 4), more preferably -O-. R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an optionally halogenated alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nB2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, even more preferably 1 or 2. nB22 is preferably any integer from 0 to 3, more preferably 0, 1, or 2, even more preferably 0 or 1. nC22 is preferably any integer from 0 to 6, more preferably any integer from 0 to 3, even more preferably 0 or 1.

[0094] As the structural unit (a2-B) and the structural unit (a2-C), for example, structural units derived from the monomers described in JP-A-2010-204646, the following structural units, and R in the following structural units a2Examples of structural units in which the methyl group or hydrogen atom corresponding thereto is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Among these, structural units represented by any of formula (a2-B-1) to formula (a2-B-5) and formula (a2-C-1) to formula (a2-C-9) are preferable. When the resin contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on all the structural units of the resin. Further, it is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, still more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, 1 to 45 mol% is mentioned, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, still more preferably 1 to 20 mol% or 2 to 20 mol%, and even more preferably 1 to 10 mol% or 2 to 10 mol%.

[0095] Examples of the structural unit having an alcoholic hydroxy group in the structural unit (a2) include a structural unit represented by formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). TIFF2025112270000077.tif51106[In formula (a2-D), all symbols have the same meanings as described above.] R a21 and R a22 Examples of the fluoroalkyl groups of R and R each independently include a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, and the like. R a21 and R a22 Preferably, R and R are each a trifluoromethyl group. L a24 Examples of the alkanediyl group of L include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, and the like. L a24 Preferably, L is a single bond or a methylene group. Ra27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nD2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, even more preferably 1 or 2, and even more preferably 1. Further, preferably, nD2 is 1 and the group in parentheses is bonded to the para position. nD22 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, even more preferably 0 or 1, and even more preferably 0.

[0096] As the structural unit (a2-D), a structural unit represented by the following formula (a2-D1) (hereinafter sometimes referred to as "structural unit (a2-D1)") is more preferable. TIFF2025112270000078.tif51108[In formula (a2-D1), R a2 、A a21 、R a27 、nD2 and nD22 represent the same meanings as in formula (a2-D).] In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0097] Examples of the structural unit (a2-D) include the structural units described below. TIFF2025112270000079.tif62167

[0098] In the structural units represented by formulas (a2-D-1) to (a2-D-8), R a2A structural unit in which a hydrogen atom corresponding to is replaced by a methyl group or the like, and in the structural units represented by Formula (a2-D-9) to Formula (a2-D-16), R a2 Structural units in which the methyl group corresponding to is replaced by a hydrogen atom or the like can also be cited as specific examples of the structural unit (a2-D). Among them, the structural units represented by Formula (a2-D-1) to Formula (a2-D-8) are preferable, the structural units represented by Formula (a2-D-1) to Formula (a2-D-4) are more preferable, and the structural unit represented by Formula (a2-D-1) is even more preferable.

[0099] When the resin contains the structural unit (a2-D), its content is preferably 3 mol% or more, more preferably 5 mol% or more, still more preferably 10 mol% or more, based on all the structural units of the resin. Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, still more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, still more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0100] 〈Structural unit (a3)〉 The lactone ring contained in the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring and another ring. Preferably, a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, the structural unit represented by the following Formula (a3-2)) can be cited.

[0101] The structural unit (a3) is preferably a structural unit represented by Formula (a3-1), Formula (a3-2), Formula (a3-3), or Formula (a3-4). These may be contained alone, or two or more of them may be contained. TIFF2025112270000080.tif48155[In Formula (a3-1), Formula (a3-2), Formula (a3-3), and Formula (a3-4), L a4 、L a5 and La6 each independently represents a group represented by -O- or *-O-(CH2) k3 -CO-O- (where k3 represents an integer from 1 to 7). L a7 represents -O-, *-O-L a8 -O-, *-O-L a8 -CO-O-, *-O-L a8 -CO-O-L a9 -CO-O- or *-O-L a8 -O-CO-L a9 -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * represents the bonding position to the carbonyl group. R a18 R a19 R a20 and R a24 each independently represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer from 0 to 5. q1 represents an integer from 0 to 3. r1 represents an integer from 0 to 3. w1 represents an integer from 0 to 8. When p1, q1, r1, and / or w1 is 2 or more, the plurality of R a21 R a22 R a23 and / or R a25 may be the same as or different from each other.]

[0102] R a21 R a22 Ra23 and R a25 Examples of the aliphatic hydrocarbon group in a25 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, and tert-butyl group. R a18 、R a19 、R a20 and R a24 Examples of the halogen atom and the alkyl group which may have a halogen atom in a24 include R of formula (a1-0) to formula (a1-2), a01 、R a4 and R a5 and those similar to those exemplified by a5 can be mentioned. L a8 and L a9 Examples of the alkanediyl group in a9 include methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group, etc. L a4 、L a5 and L a6 are each independently preferably -O- or, in *-O-(CH2) k3 -CO-O-, a group in which k3 is any integer from 1 to 4, more preferably -O- and, *-O-CH2-CO-O-, even more preferably an oxygen atom. L a7 is preferably -O- or *-O-L a8 -CO-O-, and more preferably -O-, -O-CH2-CO-O- or -O-C2H4-CO-O-. R a18 、R a19 、R a20 and R a24 are preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a21is preferably a methyl group. R a22 , R a23 and R a25 are each independently preferably a carboxy group, a cyano group or a methyl group. p1, q1 and r1 are each independently preferably an integer of any one of 0 to 2, more preferably 0 or 1. w1 is preferably an integer of any one of 0 to 2, more preferably 0 or 1. In particular, formula (a3-4) is preferably formula (a3-4)’. TIFF2025112270000081.tif3848 (wherein R a24 , L a7 represents the same meaning as described above.)

[0103] Examples of the structural unit (a3) include structural units derived from the monomers described in JP-A-2010-204646, the monomers described in JP-A-2000-122294, and the monomers described in JP-A-2012-41274. Examples of the structural unit (a3) include structural units represented by any of formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2), formula (a3-3-1), formula (a3-3-2) and formula (a3-4-1) to formula (a3-4-12), and, in the above structural units, structural units in which the methyl groups corresponding to R a18 , R a19 , R a20 and R a24 are replaced with hydrogen atoms are preferred. TIFF2025112270000082.tif108164

[0104] When the resin contains the structural unit (a3), the total content is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, still more preferably 10 mol% or more, based on all the structural units of the resin. Also, it is 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it is 1 to 70 mol%, preferably 1 to 65 mol%, more preferably 1 to 60 mol%, still more preferably 3 to 60 mol%. Also, the content of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on all the structural units of the resin. Also, it is preferably 60 mol% or less, more preferably 55 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, 1 to 60 mol% is preferable, 3 to 50 mol% is more preferable, and 5 to 50 mol% is still more preferable.

[0105] 〈Structural unit (a4)〉 The structural unit represented by the formula (a4) is shown below. TIFF2025112270000083.tif2870[In the formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents an aliphatic hydrocarbon group having a halogen atom with 1 to 48 carbon atoms, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-.]

[0106] R42 The aliphatic hydrocarbon group represented by includes linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these, etc. Examples of the chain hydrocarbon group include linear alkyl groups such as methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group, and octadecyl group; and branched alkyl groups such as isopropyl group and isobutyl group. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include monocyclic alicyclic hydrocarbon groups which are monocyclic cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, and cyclooctyl group; and polycyclic alicyclic hydrocarbon groups which are polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, and the following group (* represents the bonding site). Examples of the group formed by the combination in include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, -alkanediyl group-alicyclic hydrocarbon group-alkyl group, etc. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, and hexane-1,6-diyl group; and branched alkanediyl groups such as propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom contained in in the aliphatic hydrocarbon group include fluorine atom, chlorine atom, bromine atom, or iodine atom. R 42Examples of the group in which -CH2- of the aliphatic hydrocarbon group contained in [the relevant compound] is replaced by -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, a cycloalkoxy group, a cycloalkylalkoxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include the same groups as those exemplified in this specification within the range where the upper limit of the number of carbon atoms permits.

[0107] As the structural unit (a4), R 42 is preferably an aliphatic hydrocarbon group having a fluorine atom, and R 42 Examples of the structural unit (a4) in which is an aliphatic hydrocarbon group having a fluorine atom include a structural unit represented by the formula (a4-1) (hereinafter sometimes referred to as "structural unit (a4-1)"), a structural unit represented by the formula (a4-2) (hereinafter sometimes referred to as "structural unit (a4-2)"), a structural unit represented by the formula (a4-3) (hereinafter sometimes referred to as "structural unit (a4-3)"), and a structural unit represented by the formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)"). The structural unit represented by the formula (a4-1) is the structural unit shown below. TIFF2025112270000085.tif3092[In the formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents an alkanediyl group having 1 to 8 carbon atoms and having a fluorine atom or a cycloalkanediyl group having 3 to 12 carbon atoms and having a fluorine atom. R 42f represents a hydrogen atom or a fluorine atom.]

[0108] L 41Examples of the alkanediyl group in [context] include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, etc., and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, and 2-methylpropane-1,2-diyl group. The terminal of the branched alkanediyl group may be a methyl group. L 42f Examples of the alkanediyl group having a fluorine atom in [context] include linear alkanediyl groups having a fluorine atom such as methylene group having a fluorine atom, ethylene group having a fluorine atom, propane-1,3-diyl group having a fluorine atom, butane-1,4-diyl group having a fluorine atom, pentane-1,5-diyl group having a fluorine atom, hexane-1,6-diyl group having a fluorine atom, heptane-1,7-diyl group having a fluorine atom, octane-1,8-diyl group having a fluorine atom, etc.; branched alkanediyl groups having a fluorine atom such as ethane-1,1-diyl group having a fluorine atom, propane-1,1-diyl group having a fluorine atom, propane-1,2-diyl group having a fluorine atom, propane-2,2-diyl group having a fluorine atom, pentane-2,4-diyl group having a fluorine atom, 2-methylpropane-1,3-diyl group having a fluorine atom, 2-methylpropane-1,2-diyl group having a fluorine atom, pentane-1,4-diyl group having a fluorine atom, 2-methylbutane-1,4-diyl group having a fluorine atom. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42f Examples of the cycloalkanediyl group having a fluorine atom in [context] include monocyclic cycloalkanediyl groups having a fluorine atom such as cyclobutane-1,3-diyl group having a fluorine atom, cyclopentane-1,3-diyl group having a fluorine atom, cyclohexane-1,4-diyl group having a fluorine atom, cyclohexene-3,6-diyl group having a fluorine atom, cycloheptane-1,4-diyl group having a fluorine atom, cyclooctane-1,5-diyl group having a fluorine atom, etc., Examples of the polycyclic cycloalkanediyl group having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, an adamantane-2,6-diyl group having a fluorine atom, and the like. L 42f The number of fluorine atoms in the alkanediyl group having a fluorine atom and the cycloalkanediyl group having a fluorine atom in 42f may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group having a fluorine atom and the cycloalkanediyl group having a fluorine atom in 42f are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0109] L 42f Examples of the perfluoroalkanediyl group in 42f include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3,3-diyl group, a perfluorohexane-1,6-diyl group, a perfluorohexane-2,2-diyl group, a perfluorohexane-3,3-diyl group, a perfluoroheptane-1,7-diyl group, a perfluoroheptane-2,2-diyl group, a perfluoroheptane-3,4-diyl group, a perfluoroheptane-4,4-diyl group, a perfluorooctane-1,8-diyl group, a perfluorooctane-2,2-diyl group, a perfluorooctane-3,3-diyl group, a perfluorooctane-4,4-diyl group, and the like. L 42fExamples of the perfluorocycloalkanediyl group in [compound name] include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, a perfluoroadamantanediyl group, and the like.

[0110] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group. L 42f is preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and even more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0111] Examples of the structural unit (a4-1) include the structural units shown below and the structural units in the following structural units where the methyl group corresponding to R in the structural unit (a4-1) is replaced by a hydrogen atom. 41 The structural unit represented by formula (a4-2) is the structural unit shown below. TIFF2025112270000087.tif33101[In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. R 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. However, at least one of L 43f and R 43f has a fluorine atom, and at least one of L 43f and R 43fThe upper limit of the total carbon number is 21.

[0112] L 43f and R 43f Examples of the aliphatic hydrocarbon group in L 43f and R 43f include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these. 43f and R 43f As long as the upper limit of the total carbon number of L 42 and R 43f allows, examples of the aliphatic hydrocarbon group of R in formula (a4) include the same groups as the aliphatic hydrocarbon groups exemplified above.

[0113] Examples of the aliphatic hydrocarbon group of L TIFF2025112270000088.tif13120 [In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represent a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. L 47f represents a single bond or a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. X 46f and X 47f each independently represent -O-, -CO-, -CO-O- or -O-CO-. However, the total carbon number of L 45f , L 46f , L 47f , X 46f and X 47f is 7 or less. * and ** are bonding sites, and ** is the bonding site with -O-CO-R 43f and.

[0114] In the group represented by formula (L43f-1), L 45f , L 46f and L47f Examples of the divalent aliphatic hydrocarbon group represented by [group represented by (a4-2)] include linear or branched alkanediyl groups, monocyclic or polycyclic divalent alicyclic hydrocarbon groups, and divalent aliphatic hydrocarbon groups formed by combining an alkanediyl group and a divalent alicyclic hydrocarbon group. Specifically, examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, and the like. s is preferably 0.

[0115] Examples of the group represented by formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** is the bonding site with -O-CO-R 43f and. TIFF2025112270000089.tif47140

[0116] R 43f is preferably an aliphatic hydrocarbon group having a fluorine atom. Examples of the structural unit represented by formula (a4-2) in this case include the structural units represented by formula (a4-2A) or (formula a4-2B). TIFF2025112270000090.tif41157[In formula (a4-2A) and formula (a4-2B), R 41 and L 43f represent the same as those in formula (a4-2). R 43fA represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms and having a fluorine atom. A 43f represents a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** represents the bonding site with A 43f and. R 43fBrepresents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom. However, in formula (a4-2A), L 43f and R 43fA have a total carbon number of 21 or less. In formula (a4-2B), L 43f , A 43f , X 43 and R 43fB have a total carbon number of 21 or less. Among A 43f and R 43fB , at least one has at least one fluorine atom. The aliphatic hydrocarbon group of R 43fA , as long as the upper limit of the carbon number permits, includes the same aliphatic hydrocarbon groups as those exemplified by R 42 . R 43fA is preferably an alkyl group having 1 to 13 carbon atoms with a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms with a fluorine atom, or a combination thereof, *-(CF2) n43f -R 42’ (* represents the bonding site to the carbonyl group. n43f represents any integer from 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable. A 43f and R 43fB , as long as the upper limit of the carbon number permits, includes the same aliphatic hydrocarbon groups as those exemplified by R 42 in formula (a4). A 43f is preferably a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group which may have a fluorine atom, or a combination thereof, more preferably a divalent chain hydrocarbon group having a fluorine atom, and even more preferably a fluoroalkanediyl group having 1 to 6 carbon atoms. R 43fBThe aliphatic hydrocarbon group which may have a fluorine atom is preferably a chain hydrocarbon group, an alicyclic hydrocarbon group or a combination thereof which may have a fluorine atom, more preferably an alkyl group having 1 to 12 carbon atoms, a cycloalkyl group having 3 to 12 carbon atoms or a combination thereof which may have a fluorine atom, and trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, heptyl group, perfluoroheptyl group, octyl group, perfluorooctyl group and other alkyl fluoride groups, cyclopropylmethyl group, cyclopropyl group, cyclobutylmethyl group, cyclopentyl group, cyclohexyl group, perfluorocyclohexyl group, adamantyl group, adamantylmethyl group, adamantyldimethyl group, norbornyl group, norbornylmethyl group, perfluoroadamantyl group, perfluoroadamantylmethyl group and the like are more preferable.

[0117] In formula (a4-2B), *-A f43 -X 43 -R f43B An example of the structure that the group represented by can take is the following structure (* is the bonding site with the carbonyl group). TIFF2025112270000091.tif15170

[0118] Examples of the structural unit represented by formula (a4-2A) include the following structural units and the structural units in which the methyl group corresponding to R in the structural unit represented by formula (a4-2A) below is replaced by a hydrogen atom. 41 are mentioned. TIFF2025112270000092.tif99167

[0119] Examples of the structural unit represented by formula (a4-2B) include the following structural units and structural units in which the methyl group corresponding to R in the following structural units is replaced by a hydrogen atom. 41 Examples include structural units in which the methyl group corresponding to R in the following structural units is replaced by a hydrogen atom. TIFF2025112270000093.tif111164

[0120] Examples of the structural unit (a4) also include the structural unit represented by formula (a4-3). TIFF2025112270000094.tif3689 [In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. R 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. However, at least one of 44f L 44f and 44f R 44f has a fluorine atom, and the upper limit of the total number of carbon atoms of

[0121] L 44f and 44f R 44f and 44f R 44f and 44f R 42 is 21. Examples of the aliphatic hydrocarbon group in L 44fis preferably an alkanediyl group having 1 to 14 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and -(CH2) j1 -, -(CH2) j2 -O-(CH2) j3 - or -(CH2) j4 -CO-O-(CH2) j5 - (where j1 to j5 each independently represent an integer of 1 to 6). More preferably, it is an alkanediyl group having 1 to 4 carbon atoms (where one -CH2- contained in the alkanediyl group may be replaced by -O-, and one -CH2-CH2- contained in the alkanediyl group may be replaced by -CO-O- or -O-CO-). R 44f is preferably an aliphatic hydrocarbon group having 1 to 10 carbon atoms having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, an alicyclic hydrocarbon group having 3 to 10 carbon atoms having a fluorine atom, or a group combining them, further preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, and still more preferably an alkyl group having 1 to 6 carbon atoms having a fluorine atom.

[0122] Examples of the structural unit represented by the formula (a4-3) include the following structural units and the structural units represented by the following formulas, in which the methyl group corresponding to R in the structural unit (a4-3) is replaced by a hydrogen atom. 41 TIFF2025112270000095.tif85170

[0123] Examples of the structural unit (a4) also include the structural unit represented by the formula (a4-A). TIFF2025112270000096.tif3686 [In the formula (a4-A), R 1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 11 represents a single bond or *-CO-O-. * is R​1 represents the bonding site with the carbon atom to which it is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO- or -CO-. R 2 represents an alkyl fluoride group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or an alkyl fluoride group having 1 to 6 carbon atoms, and the alkyl fluoride group may combine with L 1 to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-. mi represents any integer from 1 to 4. When mi is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other.

[0124] R 1 Examples of the alkyl group having 1 to 6 carbon atoms in R include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R 1 Examples of the halogen atom in R include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 1 Examples of the alkyl group having 1 to 6 carbon atoms having a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group. R 1is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0125] L 1 Examples of the aliphatic hydrocarbon group in L include a chain hydrocarbon group, an alicyclic hydrocarbon group which is monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.), and a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) may also be used. Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanepentayl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group, and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. Also, groups in which one or more hydrogen atoms of the above-described groups are replaced with a bonding site and the like are also included. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 18, more preferably from 1 to 12, still more preferably from 1 to 10, even more preferably from 1 to 9, still even more preferably from 1 to 8, still more preferably from 1 to 6, still even more preferably from 1 to 5, and particularly preferably from 1 to 4.

[0126] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups and the like. The bonding site can be at any position. TIFF2025112270000097.tif45164For example, divalent to pentavalent alicyclic hydrocarbon groups such as cycloalkanediyl group, cycloalkanetriyl group, cycloalkanetetrayl group, cycloalkanepentayl group and the like can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group and Polycyclic alicyclic hydrocarbon groups such as spiro rings having a cycloalkanediyl group, norbornanediyl group or adamantanediyl group and a cycloalkanediyl group spiro-bonded thereto, respectively, such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, spirocyclohexane-1,2'-cyclopentane-diyl group, spiroadamantane-2,3'-cyclopentane-diyl group can be mentioned. Also, groups in which one or more hydrogen atoms of the above-described groups are replaced by a bonding site and the like can be mentioned. The number of carbon atoms in the alicyclic hydrocarbon group is preferably from 3 to 20, more preferably from 3 to 18, still more preferably from 3 to 16, and even more preferably from 3 to 12.

[0127] Examples of a group formed by combining two or more groups include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more alicyclic hydrocarbon groups and two or more chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to X 11 . Examples of a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group, and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), etc. * represents the bonding site to X 11 . Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site, etc.

[0128] L 1 The -CH2- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms of may be replaced with -O-, -S-, -SO-, -SO2- or -CO-. L 1 When the -CH2- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms of is replaced with -O-, -S-, -SO-, -SO2- or -CO-, the carbon number before replacement is regarded as the carbon number of the aliphatic hydrocarbon group. Examples of the group in which -CH2- contained in the aliphatic hydrocarbon group is replaced by -O-, -S-, -SO2-, -SO- or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, and a group formed by combining two or more of these groups. These replaced groups include those similar to the groups exemplified in this specification as long as the upper limit of the number of carbon atoms permits. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced by a bonding site. Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include those similar to the groups exemplified in this specification as long as the upper limit of the number of carbon atoms permits.

[0129] L 1 The aliphatic hydrocarbon group in L may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the -CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. The haloalkyl groups having 1 to 4 carbon atoms include fluoroalkyl groups having 1 to 4 carbon atoms, chloroalkyl groups having 1 to 4 carbon atoms, bromoalkyl groups having 1 to 4 carbon atoms, iodoalkyl groups having 1 to 4 carbon atoms, and the like. Examples of the haloalkyl group include perfluoroalkyl groups having 1 to 4 carbon atoms (such as trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, and the like. The number of carbon atoms of the haloalkyl group is preferably 1 to 3, more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, and the like. The number of carbon atoms of the alkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alicyclic hydrocarbon group having 3 to 18 carbon atoms include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclodecyl group, and polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, and the like. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12, and still more preferably 3 to 10. Examples of the aromatic hydrocarbon group having 6 to 18 carbon atoms include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group, and the like. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 14, more preferably 6 to 12, and still more preferably 6 to 10. When -CH2- contained in an alkyl group is replaced by -O- or -CO-, the total number of carbon atoms before replacement is defined as the total carbon number of the alkyl group. Examples of the replaced group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, etc. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the carbon number allows. In addition, examples of the group in which -CH2- contained in an alicyclic hydrocarbon group is replaced by -O- or -CO- include those similar to the groups exemplified in this specification within the range where the upper limit of the carbon number allows. L 1 Examples of the substituent that the aliphatic hydrocarbon group in L may have include a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or an aromatic hydrocarbon group having 6 to 10 carbon atoms (wherein -CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). A fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-) is more preferable, and a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group is even more preferable. L 1 is R 3When it does not form an alkyl fluoride group and an alicyclic hydrocarbon group, it may have a substituent and have a chain hydrocarbon group having 1 to 12 carbon atoms (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), and it is preferably a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and it is more preferably a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining an alicyclic hydrocarbon group having 5 to 12 carbon atoms, a chain hydrocarbon group having 1 to 6 carbon atoms, and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and it is even more preferably such a group.

[0130] R 2Examples of the C1-C8 fluoroalkyl group in [reference] include difluoromethyl group, trifluoromethyl group, 1,1-difluoroethyl group, 2,2-difluoroethyl group, 2,2,2-trifluoroethyl group, perfluoroethyl group, 1,1,2,2-tetrafluoropropyl group, 1,1,2,2,3,3-hexafluoropropyl group, perfluoroethylmethyl group, 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, perfluoropropyl group, 1,1,2,2-tetrafluorobutyl group, 1,1,2,2,3,3-hexafluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, perfluorobutyl group, 1,1-bis(trifluoro)methyl-2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, perfluorooctyl group. The carbon number of the fluoroalkyl group is preferably 1-6, more preferably 1-5, still more preferably 1-4, and even more preferably 1-3. R 3 In [reference], the C1-C6 fluoroalkyl group is, as long as the upper limit of the carbon number permits, the C1-C6 fluoroalkyl group exemplified in the examples of the fluoroalkyl group of R 2 is similarly exemplified. R 2 is, when R 3 is a C1-C6 fluoroalkyl group, preferably a C1-C6 fluoroalkyl group, more preferably a C1-C3 fluoroalkyl group, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group. R2 is, when R 3 is a hydrogen atom, preferably an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 5 carbon atoms, and still more preferably an alkyl fluoride group having 3 to 5 carbon atoms. R 3 is L 1 and combines to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, R 3 is L 1 Examples of the group formed by the combination with L 2 include, for example, the groups represented by the following formulas. In the following formulas, * and ** represent bonding sites, and two ** represent that one represents the bonding site with a hydroxy group and the other represents the bonding site with R 2 include, for example, the groups represented by the following formulas. In the following formulas, * and ** represent bonding sites, and two ** represent that one represents the bonding site with a hydroxy group and the other represents the bonding site with R 1A is, L 1 is a part of the hydrocarbon group of L 1 is a part of the hydrocarbon group of L 3 is L 1 and combines to form an alicyclic hydrocarbon group having preferably 3 to 10 carbon atoms, more preferably 3 to 8 carbon atoms, and still more preferably 3 to 6 carbon atoms. TIFF2025112270000098.tif22138R 3 is preferably a hydrogen atom or an alkyl fluoride group having 1 to 3 carbon atoms. mi is preferably any integer from 1 to 3, more preferably 1 or 2, and still more preferably 1.

[0131] Examples of the structural unit (a4-A) include the following structural units and the like. In the following structural units, the methyl group corresponding to R 1 replaced by a hydrogen atom, a halogen atom, a haloalkyl group or an alkyl group other than a methyl group and the structural unit in which the hydrogen atom corresponding to R 1 is replaced by a halogen atom, a haloalkyl group or an alkyl group can also be cited as specific examples of the structural unit (a4-A). TIFF2025112270000099.tif192166

[0132] When the resin has the structural unit (a4), its content is preferably 1 to 97 mol%, more preferably 2 to 95 mol%, and even more preferably 3 to 90 mol% based on all the structural units of the resin.

[0133] 〈Structural unit (a5)〉 Examples of the non-detachable hydrocarbon group in the structural unit (a5) include groups having a linear, branched or cyclic hydrocarbon group. Among them, the structural unit (a5) preferably has a group having an alicyclic hydrocarbon group. Examples of the structural unit (a5) include, for example, a structural unit represented by the formula (a5-1). TIFF2025112270000100.tif3351[In the formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the hydrogen atoms contained in the alicyclic hydrocarbon group may be substituted with aliphatic hydrocarbon groups having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.]

[0134] R 52 The alicyclic hydrocarbon group in R may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group and a norbornyl group. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group and a 2-ethylhexyl group. Examples of the alicyclic hydrocarbon group having a substituent include a 3-methyladamantyl group. R 52is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, more preferably an adamantyl group, a norbornyl group or a cyclohexyl group.

[0135] L 55 Examples of the divalent saturated hydrocarbon group in include a divalent chain saturated hydrocarbon group and a divalent alicyclic saturated hydrocarbon group, preferably a divalent chain saturated hydrocarbon group. Examples of the divalent chain saturated hydrocarbon group include alkane diyl groups such as a methylene group, an ethylene group, a propane diyl group, a butane diyl group and a pentane diyl group. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic saturated hydrocarbon group include cycloalkane diyl groups such as a cyclopentane diyl group and a cyclohexane diyl group. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include an adamantane diyl group and a norbornane diyl group.

[0136] L 55 Examples of the group in which -CH2- contained in the divalent saturated hydrocarbon group represented by is replaced with -O- or -CO- include groups represented by formula (L1-1) to formula (L1-4). In the following formulas, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom. TIFF2025112270000101.tif18164[In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents a bonding site with L x1 .). L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, the total number of carbon atoms of L x1 and L x2 is 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, the total number of carbon atoms in L x3 and L x4 is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. L x6 and L x7 each independently represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, the total number of carbon atoms in L x5 , L x6 and L x7 is 15 or less. In formula (L1-4), L x8 and L x9 each represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, the total number of carbon atoms in L x8 , L x9 and W x1 is 15 or less.

[0137] L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

[0138] Examples of the group represented by the formula (L1-1) include the following divalent groups. TIFF2025112270000102.tif37148 Examples of the group represented by the formula (L1-2) include the following divalent groups. TIFF2025112270000103.tif23130 Examples of the group represented by the formula (L1-3) include the following divalent groups. TIFF2025112270000104.tif16147 Examples of the group represented by the formula (L1-4) include the following divalent groups. TIFF2025112270000105.tif13168L 55 is preferably a single bond or a group represented by the formula (L1-1).

[0139] Examples of the structural unit (a5-1) include the following structural units and the structural units in which the methyl group corresponding to R in the following structural units of the structural unit (a5-1) is replaced by a hydrogen atom. 51 are mentioned. When the resin has the structural unit (a5), its content is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, and still more preferably 3 to 15 mol% based on all the structural units of the resin.

[0140] 〈Structural unit (a6)〉 The structural unit (a6) is a structural unit having a -SO2- group, and preferably has a -SO2- group in the side chain. The structural unit having a -SO2- group may have a linear structure having a -SO2- group, a branched structure having a -SO2- group, or a cyclic structure (monocyclic and polycyclic structures) having a -SO2- group. Preferably, it is a structural unit having a cyclic structure having a -SO2- group, and more preferably, it is a structural unit having a cyclic structure (sultone ring) containing -SO2-O-. Examples of the sultone ring include the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula (T 1 -4). The bonding site can be at any position. The sultone ring may be monocyclic, but is preferably polycyclic. The polycyclic sultone ring means a bridged ring containing -SO2-O- as an atomic group constituting the ring, and examples include the rings represented by formula (T 1 -1) and formula (T 1 -2). The sultone ring may further contain a heteroatom in addition to -SO2-O- as an atomic group constituting the ring, like the ring represented by formula (T 1 -2). Examples of the heteroatom include an oxygen atom, a sulfur atom or a nitrogen atom, and preferably an oxygen atom. TIFF2025112270000107.tif3077 The sultone ring may have a substituent, and examples of the substituent include an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group, preferably an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group. Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, preferably a trifluoromethyl group. Examples of the alkyl group having a hydroxy group include a hydroxymethyl group and a hydroxyalkyl group such as a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. Examples of the aralkyl group include a benzyl group, a phenethyl group, a phenylpropyl group, a naphthylmethyl group, and a naphthylethyl group. Examples of the alkoxycarbonyl group include a group in which an alkoxy group such as a methoxycarbonyl group or an ethoxycarbonyl group is bonded to a carbonyl group, preferably an alkoxycarbonyl group having 6 or fewer carbon atoms, more preferably a methoxycarbonyl group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. From the viewpoint of easy production of the monomer leading to the structural unit (a6), a sultone ring having no substituent is preferred.

[0141] As the sultone ring, a ring represented by the following formula (T1') is preferred. TIFF2025112270000108.tif2666[In the formula (T1'), X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. The bonding site is at an arbitrary position.] X 11 is preferably an oxygen atom or a methylene group, more preferably a methylene group. R 41 Examples of R are the same as those of the substituent of the sultone ring, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group is preferred. ma is preferably 0 or 1, more preferably 0. Examples of the ring represented by the formula (T1') include the following rings. The bonding site is at an arbitrary position. Among them, those in which the bonding site is at the 1-position or the 3-position are preferred. TIFF2025112270000109.tif45147

[0142] The structural unit having a -SO2- group preferably further has a group derived from a polymerizable group. Examples of the polymerizable group include a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, a methacryloylthio group, and the like. Among them, the monomer that leads to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, and more preferably a (meth)acrylic monomer.

[0143] The structural unit (a6) is preferably a structural unit represented by the formula (a6-0). TIFF2025112270000110.tif3878[In the formula (a6-0), R x represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. A xx represents an oxygen atom, -N(R c )- or a sulfur atom. A x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O-, -CO- or -N(R d )-. X 11 represents an oxygen atom, a sulfur atom or a methylene group. R 41 represents the same group as described above. ma represents an integer of 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. R c and R d each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.] R x Examples of the halogen atom of R include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. Rx Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, etc., preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group. R x Examples of the alkyl group having a halogen atom of R include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, a triiodomethyl group, etc. R x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. A x Examples of the divalent saturated hydrocarbon group of A include a linear alkanediyl group, a branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and those obtained by combining two or more of these groups may also be used. Specifically, linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, a heptadecane-1,17-diyl group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group; Branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; Monocyclic divalent alicyclic saturated hydrocarbon groups which are cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; Polycyclic divalent alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group and the like can be mentioned. A x The bonding position to the sultone ring of can be at any position, but the one at the 1-position is preferred.

[0144] Examples of the structural unit (a6-0) include the following structural units. TIFF2025112270000111.tif78129

[0145] Among them, the structural units represented by formula (a6-1), formula (a6-2), formula (a6-6), formula (a6-7), formula (a6-8) and formula (a6-12) are preferred, and the structural units represented by formula (a6-1), formula (a6-2), formula (a6-7) and (a6-8) are more preferred. When the resin has the structural unit (a6), its content is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, and even more preferably 3 to 30 mol% based on all the structural units of the resin.

[0146] <Structural unit (a7)> The resin may further contain a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"). Specific examples of the structural unit (a7) include the structural units described in JP-A-2016-79235, and it is preferably a structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain or a structural unit having a sulfonio group and an organic anion in the side chain.

[0147] The structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain is preferably a structural unit represented by the formula (a7-A). TIFF2025112270000112.tif26124[In the formula (a7-A), R a7 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a71 represents a single bond, *-O-, *-CO-O-, *-O-CO-O-**, *-CO-NR a71 -**, *-NR a71 -CO-O-**, *-O-CO-NR a71 -** or *-Ax-Ph-Ay-**. R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R a7 is bonded. L a71 and L a72 each independently represent a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-. X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, and *** represents the bonding site with L a71 . na7 represents an integer of 0 to 2. When na7 is 2, the groups in the plurality of parentheses may be the same or different from each other. RA - represents a sulfonate anion or a carboxylate anion. ZA +represents an organic cation.

[0148] R a7 and R a71 The alkyl group having 1 to 6 carbon atoms in R includes a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R a7 Examples of the halogen atom in R include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a7 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group. R a7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0149] X a71 When X is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025112270000113.tif3351[In the formula (X10), Ax represents the bonding species that binds to the carbon atom to which R a7 is bonded, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. Ay is L a71Represents a bonding type that binds to, and represents one or more bonding types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond. Rx represents a halogen atom, a hydroxy group, a C1-C6 fluoroalkyl group, a C1-C18 alkyl group, or a C1-C6 alkoxy group. mx represents any integer from 0 to 4. When mx is an integer of 2 or more, the plurality of Rx may be the same as or different from each other. When either Ax or Ay is a single bond, the other is preferably one or more selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond. When either Ax or Ay is an amide bond, it is preferably a bond represented by -CO-NR a71 -. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. Among them, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1, or 2. X a71 Examples of X include, for example, a single bond and groups represented by the following formula (X 10 -1) to formula (X 10 -10). * represents the bonding site with the carbon atom to which -R a7 is bonded. ** represents the bonding site with L a71 . X 20 represents -O- or -NR a71 -. TIFF2025112270000114.tif43162 Examples of the groups represented by formula (X 10 -1) to formula (X 10 -10) include the following groups. TIFF2025112270000115.tif87162 Among them, X a71 is a single bond and formula (X 10 -1’), formula (X 10 -3’) to formula (X10 It is preferably a group represented by any one of -9’), and is a single bond or formula (X 10 -1’), formula (X 10 -4’), formula (X 10 -5’), formula (X 10 -6’) and formula (X 10 -9’), more preferably a single bond, a group represented by formula (X 10 -1’), a group represented by formula (X 10 -5’), a group represented by formula (X 10 -6’) or a group represented by formula (X 10 -9’).

[0150] L a71 Examples of the hydrocarbon group of include a group obtained by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, and combining with X a71 and X a72 . Further, examples of the hydrocarbon group of L a72 include a group obtained by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, and combining with X a72 and RA - . L a71 and L a72 Examples of the chain hydrocarbon group of include a group obtained by removing one hydrogen atom from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specifically includes a methyl group, an ethyl group, a propyl group, an iso-propyl group, an n-butyl group, a sec-butyl group, an iso-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decanyl group, an undecanyl group, a dodecanyl group, a tridecanyl group, a tetradecanyl group, a pentadecanyl group, a heptadecanyl group, etc. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, a nonenyl group. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 36, more preferably from 1 to 20, and even more preferably from 1 to 10. L a71 and L a72 Examples of the alicyclic hydrocarbon group of L and L include groups obtained by removing one hydrogen atom from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cyclopentyl group, a cyclooctyl group, and the like. L a71 and L a72 Examples of the polycyclic cycloalkyl group of L and L include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group, an adamantyl group, and the like. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4.4.0]decanyl group, a steroid group (steroid skeleton), and the like. Examples of the ring in which two rings are spiro-bonded include a spirocycloalkyl group in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, the alicyclic hydrocarbon groups represented by the following formulas can be mentioned. TIFF2025112270000116.tif28158 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably from 3 to 12, more preferably from 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably from 7 to 12. L a71 and L a72Examples of the aromatic hydrocarbon group include an aryl group with one hydrogen atom removed. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, a fluorene group, and the like. The number of carbon atoms in the aromatic hydrocarbon group is preferably 5 to 14, and more preferably 5 to 10. L a71 and L a72 When -CH2- contained in the hydrocarbon group of L and L is replaced by -O-, -CO-, -S- or -SO2-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the hydrocarbon group. L a71 and L a72Among the hydrocarbon groups, examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S-, -SO- or -SO2- include a hydroxy group (a group in which -CH2- contained in the methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position contained in the alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -CO-O-), an alkanedioxy group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkanediyl group is replaced by -CO-O-), and the like. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms is allowed. L a71 and L a72 Among the hydrocarbon groups, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S-, -SO- or -SO2- include a cyclic ether, a cyclic ketone, a cyclic ester (lactone), a cyclic thioether, a cyclic acetal, a cyclic sultone, and the like. Specifically, alicyclic hydrocarbon groups represented by the following formulas can be mentioned. The bonding position of the alicyclic hydrocarbon groups mentioned in the following formulas can be any position. TIFF2025112270000117.tif46146La71 and L a72 Among the hydrocarbon groups of and L, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include a furan ring and a thiophene ring, respectively. L a71 and L a72 Examples of the group formed by combining two or more of the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group of and L include the group formed by combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, the group formed by combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, the group formed by combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and the group formed by combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. Examples of the combined group include those mentioned above. The group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be a condensed ring. L a71 and L a72 Examples of the substituent that the hydrocarbon group of and L may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L a71 and L a72 When and L are a group formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, the chain hydrocarbon group may be substantially regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Also, L a71 and L a72 By replacing -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of and L with -O-, -CO-, -S-, -SO-, or -SO2-, the hydrocarbon group of L a71 and L a72 can substantially have substituents such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group, etc. na7 is preferably 0 or 1. ZA in formula (a7-A) +Examples thereof include the same as the cation in the salt represented by the formula (B1).

[0151] In the formula (a7-A), L a71 and L a72 When the hydrocarbon group is a saturated hydrocarbon group, in the formula (a7-B) described later, A b7 may contain a group similar to the group exemplified as the divalent linking group of. Examples of the structural unit represented by the formula (a7-A) include the structural unit represented by the formula (a7-A1). TIFF2025112270000118.tif30138[In the formula (a7-A1), R a7 , X a71 , L a71 , X a72 , na7, RA - and ZA + represent the same meaning as above. z7 represents any integer from 0 to 6. Q a7 , Q b7 , R z71 and R z72 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. When z7 is 2 or more, a plurality of R z71 and R z72 may be the same as or different from each other.] Q a7 , Q b7 , R z71 and R z72 Examples of the perfluoroalkyl group having 1 to 6 carbon atoms or the alkyl group having 1 to 6 carbon atoms in include the same groups as those exemplified for R a7 .

[0152] Examples of the structural unit represented by the formula (a7-A) include, for example, the following structural unit, R a7A structural unit in which the group corresponding to the methyl group is replaced with a hydrogen atom, a halogen atom (for example, a fluorine atom), or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (for example, a trifluoromethyl group), and the structural unit described in International Publication No. 2012 / 050015 can be mentioned. ZA + represents an organic cation. TIFF2025112270000119.tif244164

[0153] TIFF2025112270000120.tif131157

[0154] The structural unit having a sulfonio group and an organic anion in the side chain is preferably a structural unit represented by the formula (a7-B). TIFF2025112270000121.tif27104[In the formula (a7-B), R a7 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A b7 represents a single bond or a divalent linking group. R b71 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R b72 and R b73 each independently represent a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and R b72 and R b73 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded. A - represents an organic anion. ] R a7 Examples of the halogen atom and the alkyl group which may have a halogen atom of R include the same halogen atoms and alkyl groups which may have a halogen atom as those in the formula (a7-A). R b71 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by R include a phenylene group and a naphthylene group. R b72 and R b73Examples of the hydrocarbon group represented by include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups. Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group formed by combining these groups are the same as those described above. A b7 Examples of the divalent linking group represented by include a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced by -O-, -S-, or -CO-. Examples of the divalent saturated hydrocarbon group include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, or a combination thereof. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group; branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; divalent polycyclic alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. are included. Examples of the group in which -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S-, or -CO- include divalent groups represented by formula (X1) to formula (X53). However, the carbon number before -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S-, or -CO- is 17 or less, respectively. In the following formula, * and ** represent bonding sites, and * is RII2 represents a binding site with TIFF2025112270000122.tif124162[wherein, X 3 represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms. X 4 represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms. X 5 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms. X 6 represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 7 represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 8 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.]

[0155] Examples of the structural unit containing the cation in formula (a7-B) include the structural unit represented below and the group corresponding to the methyl group of R a7 in which the hydrogen atom, halogen atom (for example, fluorine atom) or alkyl group having 1 to 6 carbon atoms which may have a halogen atom (for example, trifluoromethyl group, etc.) is replaced, and the like. JPEG2025112270000123.jpg72163

[0156] A - Examples of the organic anion represented by A - include sulfonate anions, sulfonylimide anions, sulfonylmethide anions, and the like. The organic anion represented by A

[0157] Examples of the structural unit represented by formula (a7-B) include the structural unit represented below and the like. TIFF2025112270000124.tif95157

[0158] When the resin contains the structural unit (a7), the structural unit (a7) may be contained alone or in two or more kinds. The total content ratio of the structural unit (a7) is preferably 1 to 30 mol%, more preferably 1 to 25 mol%, still more preferably 2 to 20 mol%, even more preferably 3 to 15 mol%, and even more preferably 3 to 10 mol% with respect to all the structural units of the resin (A1).

[0159] One embodiment of the resist composition of the present invention is that among two or more resins contained in the resist composition, one resin contains both the structural unit (IP) and the structural unit (a2-A), and the other resin is a resin containing the structural unit (a1). The resin containing the structural unit (IP) and the structural unit (a2-A) is preferably a resin composed of the structural unit (IP) and the structural unit (a2-A), a resin composed of the structural unit (IP), the structural unit (a2-A), and the structural unit (a1), a resin composed of the structural unit (IP), the structural unit (a2-A), and the structural unit (a2) and / or the structural unit (a3), a resin composed of the structural unit (IP), the structural unit (a2-A), the structural unit (a1), the structural unit (a2) and / or the structural unit (a3), a resin composed of the structural unit (IP), the structural unit (a2-A), the structural unit (a1), the structural unit (a2) and / or the structural unit (a3), the structural unit (a4) and / or the structural unit (a5), a resin composed of the structural unit (IP) and the structural unit (a2-A), or a resin composed of the structural unit (IP), the structural unit (a2-A), and the structural unit (a4). More preferably, it is a resin composed of the structural unit (IP), the structural unit (a2-A), the structural unit (a1), the structural unit (a2) and / or the structural unit (a3), or a resin composed of the structural unit (IP), the structural unit (a2-A), and the structural unit (a2) and / or the structural unit (a3).

[0160] The resin containing both the structural unit (IP) and the structural unit (a2-A) has a content of the structural unit (IP) of 1 mol% or more, preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, based on all the structural units. Also, it is 90 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less. Specifically, it is 1 to 90 mol%, preferably 5 to 80 mol%, more preferably 10 to 80 mol%, still more preferably 15 to 70 mol%, and even more preferably 15 to 60 mol%. The content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on all the structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The total content of the structural unit (IP) and the structural unit (a2-A) is preferably 6 mol% or more, more preferably 15 mol% or more, still more preferably 20 mol% or more, and even more preferably 30 mol% or more, based on all the structural units. Also, it is 100 mol% or less, preferably 95 mol% or less, more preferably 85 mol% or less, still more preferably 75 mol% or less. Specifically, it is preferably 6 to 100 mol%, more preferably 15 to 95 mol%, still more preferably 20 to 95 mol%, even more preferably 30 to 95 mol%, still even more preferably 30 to 85 mol%, and still even more preferably 30 to 75 mol%. Also, the ratio of the structural unit (IP) to the structural unit (a2-A) in the resin is preferably 5:95 to 95:5.

[0161] Another embodiment of the resist composition of the present invention is such that, among two or more resins contained in the resist composition, one resin is a resin containing a structural unit represented by formula (IP), and the other resin is a resin containing a structural unit represented by formula (a2-A). The resin having the structural unit represented by formula (IP) is preferably a resin composed of structural unit (IP) and structural unit (a2), a resin composed of structural unit (IP) and structural unit (a1), a resin composed of structural unit (IP) and structural unit (a2) and / or structural unit (a3), a resin composed of structural unit (IP), structural unit (a1), structural unit (a2) and / or structural unit (a3), a resin composed of structural unit (IP), structural unit (a1), structural unit (a2) and / or structural unit (a3), structural unit (a4) and / or structural unit (a5), a resin composed of structural unit (I), or a resin composed of only structural unit (I) and structural unit (a4). More preferably, it is a resin composed of structural unit (IP), structural unit (a1), structural unit (a2) and / or structural unit (a3), a resin composed of structural unit (IP) and structural unit (a2) and / or structural unit (a3), or a resin composed of structural unit (IP). The resin having the structural unit represented by formula (a2-A) is preferably a resin composed of structural unit (a2-A) and structural unit (a1), a resin composed of structural unit (a2-A) and structural unit (a2) and / or structural unit (a3), a resin composed of structural unit (a2-A), structural unit (a1), structural unit (a2) and / or structural unit (a3), a resin composed of structural unit (a2-A), structural unit (a1), structural unit (a2) and / or structural unit (a3), structural unit (a4) and / or structural unit (a5), or a resin composed of only structural unit (a2-A) and structural unit (a4). More preferably, it is a resin composed of structural unit (a2-A), structural unit (a1), structural unit (a2) and / or structural unit (a3). Here, structural unit (a1) is preferably at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). In the case of a resist composition containing a resin containing a structural unit represented by formula (IP) and a resin containing a structural unit represented by formula (a2-A), in the resin containing the structural unit represented by formula (IP), with respect to all the structural units, the content of the structural unit (IP) is preferably 10 mol% or more, more preferably 30 mol% or more, still more preferably 50 mol% or more, and even more preferably 70 mol% or more. Also, 100 mol% or less may be mentioned. Specifically, it is preferably from 10 mol% to 100 mol%, more preferably from 30 mol% to 100 mol%, still more preferably from 50 mol% to 100 mol%, and even more preferably from 70 mol% to 100 mol%. In the resin containing the structural unit represented by formula (a2-A), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more with respect to all the structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less. Specifically, it is preferably from 5 to 80 mol%, more preferably from 10 to 70 mol%, still more preferably from 15 to 65 mol%, and even more preferably from 20 to 65 mol%.

[0162] Another embodiment of the resist composition of the present invention is that among two or more resins contained in the resist composition, one resin is a resin containing a structural unit represented by formula (IP), and the other resin is a structural unit represented by formula (a2-A) and at least one structural unit selected from the group consisting of a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6).

[0163] Another embodiment of the resist composition of the present invention is that among one or more resins contained in the resist composition, one resin contains a structural unit represented by formula (IP), a structural unit represented by formula (a2-A), and a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6), and is a resin containing at least one structural unit selected from the group consisting of these structural units. Here, the structural unit (a2) is preferably the structural unit (a2-A) or the structural unit (a2-1). The structural unit (a3) is preferably at least one selected from the group consisting of the structural unit represented by formula (a3-1), the structural unit represented by formula (a3-2), and the structural unit represented by formula (a3-4), and more preferably the structural unit represented by formula (a3-4).

[0164] Another embodiment of the resist composition of the present invention is that among two or more resins contained in the resist composition, one resin is a resin containing a structural unit represented by formula (IP), and the other resin contains a structural unit represented by formula (a2-A), and at least one structural unit selected from the group consisting of the structural unit represented by formula (a1-0), the structural unit represented by formula (a1-1), and the structural unit represented by formula (a1-2), a structural unit represented by formula (a2-1), and at least one structural unit selected from the group consisting of the structural unit represented by formula (a3-1), the structural unit represented by formula (a3-2), the structural unit represented by formula (a3-3), and the structural unit represented by formula (a3-4).

[0165] Another embodiment of the resist composition of the present invention is that among one or more resins contained in the resist composition, one resin has a structural unit represented by formula (IP), a structural unit represented by formula (a2-A), and a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). At least one structural unit selected from the group consisting of a structural unit represented by formula (a2-1), a structural unit represented by formula (a3-1), a structural unit represented by formula (a3-2), a structural unit represented by formula (a3-3), and a structural unit represented by formula (a3-4). It is a resin containing at least one structural unit selected from the group consisting of

[0166] The weight average molecular weight of these resins is preferably 2,000 or more (more preferably 2,500 or more, still more preferably 3,000 or more) and 50,000 or less (more preferably 30,000 or less, still more preferably 15,000 or less), but may contain oligomers having a weight average molecular weight smaller than this. In this specification, the weight average molecular weight is a value determined by gel permeation chromatography under the conditions described in the examples.

[0167] 〔Synthesis method of resin〕 The resin contained in the resist composition of the present invention can be produced by a known polymerization method (for example, radical polymerization method) using only one or a combination of two or more monomers that lead to each structural unit constituting the resin. The content ratio of each structural unit possessed by the resin can be adjusted by the amount of monomers used in the polymerization. Each monomer may be synthesized by a conventionally known method or obtained on the market. In addition, a desired structural unit may be incorporated into the resin by treating the resin synthesized by a polymerization reaction with an acid or an alkali. For example, the structural unit (a2-A) can be incorporated into the resin (A) by treating, after polymerization using, for example, the structural unit (a1-4), with an acid such as p-toluenesulfonic acid. Also, after polymerization using acetoxystyrene or the like, the structural unit (a2-A) can be incorporated into the resin by treating with an alkali such as tetramethylammonium hydroxide.

[0168] <Resins other than the resins described above> The resist composition of the present invention may contain a resin that does not contain the structural unit (IP) and / or the structural unit (a2-A). Examples of such a resin include a resin composed only of the structural unit (a4) and a resin composed of the structural unit (a4) and the structural unit (a5) (hereinafter, the resin composed only of the structural unit (a4) and the resin composed of the structural unit (a4) and the structural unit (a5) may be collectively referred to as the resin (X)). As the resin (X), a resin containing the structural unit (a4) is preferable, and examples include a resin composed only of the structural unit (a4) or a resin containing the structural unit (a4) and the structural unit (a5). Structural units that the resin (X) may further have include the structural unit (a2), the structural unit (a3), and structural units derived from other known monomers. When the resin (X) contains the structural unit (a4), in the resin (X), the content of the structural unit (a4) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Further, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. When the resin (X) contains the structural unit (a5), the content of the structural unit (a5) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Further, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. Further, when the resin (X) contains the structural unit (a4) and the structural unit (a5), the total content of the structural unit (a4) and the structural unit (a5) is 40 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, and still more preferably 80 mol% or more, based on the total of all the structural units of the resin (X). Further, it is 100 mol% or less. Specifically, it is 40 to 100 mol%, preferably 60 to 100 mol%, more preferably 70 to 100 mol%, and still more preferably 80 to 100 mol%. The resin (X) can be produced by a known polymerization method (for example, radical polymerization method) using only one kind or a combination of two or more kinds of monomers that induce each structural unit constituting the resin (X). The content of each structural unit possessed by the resin (X) can be adjusted by the amount of the monomers used in the polymerization. The weight average molecular weight of resin (X) is preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less), but may contain oligomers having a weight average molecular weight smaller than this. The measuring means for the weight average molecular weight of resin (X) is the same as that for resin (A). When the resist composition contains resin (X), its content is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, still more preferably 1 to 40 parts by mass, even more preferably 1 to 30 parts by mass, and even still more preferably 1 to 8 parts by mass with respect to 100 parts by mass of resin (A).

[0169] The content ratio of the resin containing structural unit (IP) and / or structural unit (a2-A) in the resist composition is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less with respect to the solid content of the resist composition. When containing a resin not containing structural unit (I) and / or structural unit (a2-A), the total content ratio of all resins is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less with respect to the solid content of the resist composition. The solid content of the resist composition and the content ratio of the resin with respect thereto can be measured by known analytical means such as liquid chromatography or gas chromatography.

[0170] One aspect of the resist composition of the present invention may not contain a resin, and is a resist composition containing compound (I), and preferably contains compound (I), acid generator (B), and quencher (C). As the resist composition not containing a resin, it is preferable to further contain a compound having a phenolic hydroxyl group or a benzoic acid carboxyl group or a compound in which the hydroxyl group of the phenolic hydroxyl group or the carboxyl group of the benzoic acid carboxyl group is protected by an acid-labile group (hereinafter, may be referred to as "compound (L0)").

[0171] <Compound (L0)> The resist composition of the present invention preferably further contains, as the compound (L), a compound having a phenolic hydroxyl group or a benzoic acid carboxy group and / or a compound in which the hydroxyl group of the phenolic hydroxyl group or the carboxy group of the benzoic acid carboxy group is protected with an acid-labile group. The compound (L) contains one or more structures represented by the formula (L0) as partial structures. TIFF2025112270000125.tif247 "In the formula (L0), Ar lk represents an aromatic hydrocarbon ring having 6 to 18 carbon atoms which may have a substituent. X lk represents a single bond or a carbonyl group. R lk represents a hydrogen atom or an acid-labile group. lk represents an integer of 1 or more, and when lk is 2 or more, the groups in a plurality of parentheses may be the same as or different from each other. * represents a bonding site. lo represents an integer of 1 or more.] Ar lk Examples of the aromatic hydrocarbon ring of Ar include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring and the like. Ar lk Examples of the substituent that the aromatic hydrocarbon ring of Ar may have include the same groups as those exemplified by R lk11 and R lk22 and the like. Ar lk is preferably a benzene ring or a naphthalene ring which may have a substituent, and more preferably a benzene ring which may have a substituent. R lk Examples of the acid-labile group of R include the groups represented by the formula (1) and the formula (2) of the structural unit (a1). Among them, a group in which ma and na are 0 in the formula (1), and a group in which na' is 0 in the formula (2) and the carbon atom to which R a1’ and R a2’ are bonded is the bonding site are preferred. For example, the following groups can be mentioned. TIFF2025112270000126.tif60162

[0172] TIFF2025112270000127.tif58148

[0173] lk may be any integer of 2 or more. Further, lk may be, for example, any integer of 13 or less. Among them, lk is preferably any integer of 1 to 11, more preferably any integer of 1 to 9, still more preferably any integer of 1 to 7, even more preferably any integer of 1 to 6, even more preferably any integer of 1 to 5, and even more preferably any integer of 1 to 4. lo may be any integer of 2 or more. Further, lo may be, for example, any integer of 13 or less. Among them, lo is preferably any integer of 1 to 11, more preferably any integer of 1 to 9, still more preferably any integer of 1 to 7, even more preferably any integer of 1 to 6, even more preferably any integer of 1 to 5, and even more preferably any integer of 1 to 4.

[0174] Examples of the compound (L0) include a compound represented by the formula (LX) (hereinafter sometimes referred to as "compound (LX)"). TIFF2025112270000128.tif23130[In the formula (LX), Ar k1 and Ar k2 each independently represents an aromatic hydrocarbon ring having 6 to 18 carbon atoms. X lk1 and X lk2 each independently represents a single bond or a carbonyl group. R lk1 and R lk2 each independently represents a hydrogen atom or an acid-labile group. Lx represents a hydrocarbon group having 1 to 80 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. R lk11 and R lk22each independently represents a hydrocarbon group having 1 to 20 carbon atoms which may have a halogen atom or a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-, R lk11 and R lk22 , R lk11 and Lx or R lk22 and Lx may each be bonded to form a ring, the ring may have a substituent, and -CH2- contained in the ring may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. lx2 represents any integer from 1 to 6, and when lx2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk1’ represents any integer from 1 to 13, and when lk1’ is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk11’ represents any integer from 0 to 12, and when lk11’ is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk2’ represents any integer from 1 to 13, and when lk2’ is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk22’ represents any integer from 0 to 12, and when lk22’ is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other.] Ar k1 and Ar k2 Examples of the aromatic hydrocarbon ring of are the same groups as those exemplified for the group of the aromatic hydrocarbon ring of Ar lk R lk1 and R lk2 Examples of the acid-labile group of are the same groups as those exemplified for the acid-labile group of R lk ​​Examples of the hydrocarbon group for Lx include a chain hydrocarbon group, an alicyclic hydrocarbon group which is monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.), and an aromatic hydrocarbon group. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) may also be used. The hydrocarbon group for Lx is a (lx2 + 1)-valent hydrocarbon group, and depending on lx2, it can be a 2- to 7-valent hydrocarbon group. The number of carbon atoms in the hydrocarbon group is preferably 1 to 72, more preferably 1 to 60, still more preferably 1 to 48, even more preferably 1 to 36, and even still more preferably 1 to 24. Examples of the chain hydrocarbon group include an alkanediyl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. Note that the terminal of the branched alkanediyl group may be a methyl group. In addition, examples of the chain hydrocarbon group also include a group in which one or more hydrogen atoms of the above-described groups are replaced by a bonding site. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, even still more preferably 1 to 6, and even still even more preferably 1 to 4. Examples of the alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, spirocyclic alicyclic hydrocarbon groups such as spirocyclohexane-1,2′-cyclopentane group, spiroadamantane-2,3′-cyclopentane group, and spiro rings having a cycloalkyl group bonded spiro to a norbornyl group or an adamantyl group respectively. In addition, examples of the alicyclic hydrocarbon group also include groups in which one or more hydrogen atoms of the above-described groups are replaced at the bonding site. Examples of the alicyclic hydrocarbon group include the following groups, etc. The bonding site can be at any position. TIFF2025112270000129.tif45163 The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 72, may be 3 to 60, preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include arylene groups such as phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, etc. In addition, examples of the aromatic hydrocarbon group also include groups in which one or more hydrogen atoms of the above-described groups are replaced at the bonding site. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 72, may be 6 to 60, preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 14, and even more preferably 6 to 10. Examples of the group formed by combining two or more groups include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, and a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to Ar k1 or Ar k2 . Examples of the group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include, for example, -alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-, etc. Examples of the group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group include, for example, -aromatic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-aromatic hydrocarbon group-, etc. Examples of the group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-, etc. Also, examples of the combined group include a group in which one or more hydrogen atoms of the above-described group are replaced by a bonding site. -CH2- contained in the hydrocarbon group of Lx may be replaced by -O-, -S-, -SO2- or -CO-. As the group in which -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO-, as described above, there are a hydroxy group, a carboxy group, a thiol group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkoxy group, an alkylthio group, an alkylsulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms is permitted. In addition, as the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, those similar to the groups exemplified in this specification are included within the range where the upper limit of the number of carbon atoms is permitted. As the group in which -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO-, there is also a group in which one or more hydrogen atoms of the above-described groups are replaced at the bonding site. Examples of the substituent that Lx may have include a halogen atom, a cyano group, and the like. When Lx is a group formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. When -CH2- contained in the chain hydrocarbon group such as an alkyl group contained in Lx is replaced by -O-, -CO-, -S- or -SO2-, Lx can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, and a sulfonyl group. Examples of the substituent that Lx may have include R described below lk11 and Rlk22 Groups similar to the groups exemplified by etc. are also included.

[0175] R lk11 and R lk22 Examples of the halogen atom of and R include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. R lk11 and R lk22 Examples of the hydrocarbon group of and R include chain hydrocarbon groups such as an alkyl group and an alkanediyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. The alkyl group is a linear or branched alkyl group. For example, it includes a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The alkanediyl group is a linear or branched alkanediyl group. Examples of the linear alkanediyl group include a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group. Examples of the branched alkanediyl group include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, etc. The terminal of the branched alkanediyl group may be a methyl group. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 12, more preferably from 1 to 9, still more preferably from 1 to 6, even more preferably from 1 to 4, and even still more preferably from 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the alicyclic hydrocarbon group include the groups represented below. The bonding site can be at any position. TIFF2025112270000130.tif43163Specifically, examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclononyl group, cyclodecyl group, cyclododecyl group, etc. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, etc. Examples of the spirocyclic alicyclic hydrocarbon group include cycloalkyl groups such as spirocyclohexane-1,2′-cyclopentane group, spiroadamantane-2,3’-cyclopentane group, etc., and spiro rings having a cycloalkyl group spiro-bonded to a norbornyl group or an adamantyl group respectively. The number of carbon atoms in the alicyclic hydrocarbon group is preferably from 3 to 18, more preferably from 3 to 16, and still more preferably from 3 to 12. Examples of the aromatic hydrocarbon group include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably from 6 to 18, more preferably from 6 to 14, and still more preferably from 6 to 10. Examples of groups formed by combining two or more groups include groups combining an aromatic hydrocarbon group and an aliphatic hydrocarbon group (e.g., aromatic hydrocarbon group - alkane diyl group - *, alkyl group - aromatic hydrocarbon group - *, alkyl group - aromatic hydrocarbon group - alkane diyl group - *, where the -CH2- contained in the alkane diyl group and the alkyl group may be replaced by -O-, -CO-, -S- or -SO2-), groups combining an alicyclic hydrocarbon group and an aliphatic hydrocarbon group (e.g., alicyclic hydrocarbon group - alkane diyl group - *, alkyl group - alicyclic hydrocarbon group - *, alkyl group - alicyclic hydrocarbon group - alkane diyl group - *, where the -CH2- contained in the alicyclic hydrocarbon group, the alkane diyl group and the alkyl group may be replaced by -O-, -CO-, -S- or -SO2-), and groups combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (e.g., aromatic hydrocarbon group - alicyclic hydrocarbon group - *, alicyclic hydrocarbon group - aromatic hydrocarbon group - *, where the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2). * represents a bonding site. Examples of aromatic hydrocarbon group - alkane diyl group - * include aralkyl groups such as benzyl group and phenethyl group. Examples of alkyl group - aromatic hydrocarbon group - * include tolyl group, xylyl group, cumenyl group and the like. Examples of alicyclic hydrocarbon group - alkane diyl group - * include cycloalkylalkyl groups such as cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl group and the like. Examples of alkyl group - alicyclic hydrocarbon group - * include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, 2-alkyladamantan-2-yl group and the like. Examples of aromatic hydrocarbon group - alicyclic hydrocarbon group - * include phenylcyclohexyl group and the like. Examples of alicyclic hydrocarbon group - aromatic hydrocarbon group - * include cyclohexylphenyl group and the like. In the combination, the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may each be combined with two or more kinds. Also, any of the groups may be bonded to the benzene ring. R lk11 and R lk22 When -CH2- contained in the hydrocarbon group represented by is replaced by -O-, -CO-, -S- or -SO2-, the carbon number before replacement is taken as the total carbon number of the hydrocarbon group. Also, the number may be one or two or more. Examples of the group in which -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include the same groups as those exemplified by Lx within the range allowed by the upper limit of the carbon number. R lk11 and R lk22 Examples of the substituent that the hydrocarbon group of may have include a halogen atom, a cyano group, etc. R lk11 and R lk22 When is a hydrocarbon group having a halogen atom, lk11 and R lk22 Examples of the hydrocarbon group having a halogen atom of include a chain hydrocarbon group having a halogen atom such as a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom. The haloalkyl group represents an alkyl group having a halogen atom. Examples of the haloalkyl group include haloalkyl groups having 1 to 12 carbon atoms such as alkyl fluoride groups having 1 to 12 carbon atoms, alkyl chloride groups having 1 to 12 carbon atoms, alkyl bromide groups having 1 to 12 carbon atoms, and alkyl iodide groups having 1 to 12 carbon atoms. Specific examples of the haloalkyl group include perfluoroalkyl groups having 1 to 12 carbon atoms (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, etc. The number of carbon atoms of the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. -CH2- contained in the haloalkyl group may be replaced by -O- or -CO- or the like. Examples of such groups include haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, haloalkylcarbonyloxy groups, etc. Specifically, haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, haloalkylcarbonyloxy groups having 2 to 11 carbon atoms, etc. are included. For example, groups in which one or more hydrogen atoms of the groups exemplified above are replaced by halogen atoms are included. The hydrocarbon group may have one substituent or a plurality of substituents.

[0176] Examples of the compound (LX) include a compound represented by the formula (LX-0) (hereinafter sometimes referred to as "compound (LX-0)"). As the compound (LX-0), a compound represented by the formula (LX-1) (hereinafter sometimes referred to as "compound (LX-1)") is preferable. TIFF2025112270000131.tif23125[In the formula (LX-0), symbols other than the following have the same meanings as described above. lk1 represents any integer from 1 to 5. When lk1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk11 represents any integer from 0 to 4, satisfies 1 ≦ lk1 + lk11 ≦ 5, and when lk11 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk2 represents any integer from 1 to 5, and when lk2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk22 represents any integer from 0 to 4, satisfies 1 ≦ lk2 + lk22 ≦ 5, and when lk22 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. TIFF2025112270000132.tif42147 [In formula (LX-1), symbols other than the following represent the same meaning as described above. X lk3 represents a single bond or a carbonyl group. R lk3 represents a hydrogen atom or an acid-labile group. Lx1 and Lx2 each independently represent a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. R lk33 represents a halogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. lx3 represents any integer from 0 to 6, and when lx3 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk3 represents any integer from 1 to 4, and when lk3 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk33 represents any integer from 0 to 3, satisfies 1 ≦ lk3 + lk33 ≦ 4, and when lk33 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. The hydrocarbon group which may have substituents Lx1 and Lx2 (wherein -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-,...

Claims

1. A resist composition containing a compound represented by formula (I) or a structural unit represented by formula (IP). [In formula (I) and formula (IP), R ０ , R ０Ａ and R ０Ｂ each independently represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X １ , X １Ａ and X １Ｂ are each independently a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３ -**, *-NR ３ -CO-O-**, *-O-CO-NR ３ -** or *-Ax-Ph-Ay-**. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay are each independently selected from the group consisting of one or more bond types selected from a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond * and ** represent binding sites, and * represents a binding site with a carbon atom to which R ０ , R ０Ａ or R ０Ｂ is attached. L １ 、 L １Ａ and L １Ｂ each independently represents a hydrocarbon group having 1 to 28 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO ２ 2-, -NR ７ - or -CO-. R ７ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ４ represents a halogen atom or a hydrocarbon group having 1 to 48 carbon atoms, and the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO ２ -, -NR ７ - or -CO-. R ５ is -X １１ -R １０ or -X １１ -L １０ -X １２ -R １０ represents. X １１ and X １２ each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * represents the bonding site with the benzene ring or L １０ .). L １０ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO ２ -, -NR ７ - or -CO-. R １０ represents a group represented by the formula (IC). m1 represents an integer of any one of 1 to 4. When m1 is 1 or more, the groups in a plurality of parentheses may be the same as or different from each other. m1A represents an integer of any one of 1 to 4. When m1A is 1 or more, the groups in a plurality of parentheses may be the same as or different from each other. m1B represents an integer of any one of 0 to 3. When m1B is 1 or more, the groups in a plurality of parentheses may be the same as or different from each other. m4 represents any integer from 0 to 4, and when m4 is 2 or more, the plurality of Rs ４ may be the same as or different from each other. m5 represents any integer from 1 to 4. When m5 is 2 or more, the plurality of Rs ５ may be the same as or different from each other. However, 2 ≤ m1 + m4 + m5 ≤ 6 and 2 ≤ m1A + m1B + m4 + m5 ≤ 6.] [In formula (IC), R Ａ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents any integer from 0 to 2. When u1 is 2, the plurality of Rs Ａ are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1. However, the sum of s1 and t1 is 1 or 2. L １２ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a single bond or a substituent, and the -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO ２ -. * represents a bonding site. ]

2. X １ , X １Ａ and X １Ｂ is a single bond or a group represented by any of the groups represented by formula (X １ -1) to formula (X １ -10): The resist composition according to claim 1. [Formula (X １ -1) to Formula (X １ -10), *, ** are binding sites, * is R ０ , R ０Ａ or R ０Ｂ represents the binding site with the carbon atom to which it is attached. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of any one of 0 to 4. X ２０ represents -O- or -NR ３ -. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.]

3. X １ is a single bond or a group represented by formula (X １ -1'), formula (X １ -3') to formula (X １ -10') according to claim 2 of the resist composition. [Formula (X １ -1'), Formula (X １ -3') to Formula (X １ -10'), among them, *, ** are binding sites, and ** is L 1 , L １Ａ and L １Ｂ represent the binding sites with.]

4. L １ , L １Ａ and L １Ｂ is a single bond, a chain hydrocarbon group having 1 to 4 carbon atoms (wherein -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH 2 - contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-). The resist composition according to claim 1 or 2.

5. X １１ The resist composition according to claim 1 or 2, wherein X is *-CO-O- or *-O-CO-

6. The resist composition according to claim 1 or 2, wherein m5 is 2 or 3.

7. The resist composition according to claim 1 or 2, containing a compound represented by formula (I).

8. The resist composition according to claim 1 or 2, containing a compound represented by formula (I) and a resin containing a structural unit represented by formula (a2-A) or a structural unit represented by formula (a2-D). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH ２ - in the alkanediyl group may be replaced by -O-, -CO- or -NR ａ２８ -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents an integer of any one of 1 to 5. When nA2 is 2 or more, the groups in a plurality of parentheses may be the same as or different from each other. na21 represents any integer from 0 to 4, and when na21 is 2 or more, a plurality of Rs ａ２７ may be the same as or different from each other. mc represents an integer of any one of 0 to 2. ] [In formula (a2-D), R ａ２ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH ２ - in the alkanediyl group may be replaced by -O-, -CO- or -NR ａ２８ -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ａ２１ and R ａ２２ each independently represents an alkyl fluoride group having 1 to 4 carbon atoms. L ａ２４ represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of any one of 1 to 5. When nD2 is 2 or more, the groups in a plurality of parentheses may be the same as or different from each other. nD22 represents any integer from 0 to 4. When nD22 is 2 or more, a plurality of Rs ａ２７ may be the same as or different from each other. However, 1 ≦ nD2 + nD22 ≦ 5.]

9. A compound represented by formula (I) and a compound having a phenolic hydroxy group or a benzoic acid carboxy group, or a compound in which the hydroxy group of the phenolic hydroxy group or the carboxy group of the benzoic acid carboxy group is protected by an acid-labile group. The resist composition according to claim 1 or 2.

10. The resist composition according to claim 1 or 2, containing a resin including a structural unit represented by formula (IP).

11. The resist composition according to claim 1 or 2, containing a resin including a structural unit represented by formula (IP) and a resin including a structural unit having an acid-labile group.

12. The resist composition according to claim 1 or 2, wherein the resin further includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). [In formula (a1-0), formula (a1-1), and formula (a1-2), L a01 , L ａ１ and L ａ２ each independently represents -O- or *-O-(CH ２ ) ｋ１ -CO-O-, k1 represents any integer from 1 to 7, and * represents the bonding site with -CO-. R a01 , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. m1' represents any integer from 0 to 14. n1 represents any integer from 0 to 10. n1' represents any integer from 0 to 3. ] [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH ２ - in the alkanediyl group may be replaced by -O-, -CO- or -NR ａ１８ -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and -CH 2 - in the hydrocarbon group and the divalent hydrocarbon group may be replaced by -O- or -S-. na1 represents any integer from 1 to 5, and when na1 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. na11 represents any integer from 0 to 4, and when na11 is 2 or more, a plurality of Rs ａ１７ may be the same as or different from each other. mc represents any integer from 0 to 2. ] [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 represents a single bond or *-(CH 2 ) h3 -CO-L 54 -, h3 represents an integer from 1 to 4, and * represents the bonding site with 51 L. L 51 、 L 52 、 L 53 and L 54 each independently represents -O- or -S-. s1 represents any integer from 1 to 3. s1' represents any integer from 0 to 3. ] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a6２ 、R a63 and R a6４ each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a6２ and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atom to which they are bonded. X a61 represents a single bond, -CO-O-*, or -CO-NR a6５ -*, where * represents a bond to Ar, and R a6５ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 represents a single bond, *-O-L a61 - or *-CO-O-L a62 -, where * represents a bond to Ar, and L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent. ]

13. The resist composition according to claim 1 or 2, containing a resin including a structural unit represented by formula (IP) and a structural unit represented by formula (a2-A), and a resin including a structural unit having an acid-labile group. [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH ２ - in the alkanediyl group may be replaced by -O-, -CO- or -NR ａ２８ -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents any integer from 1 to 5, and when nA2 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. na21 represents any integer from 0 to 4, and when na21 is 2 or more, a plurality of Rs ａ２７ may be the same as or different from each other. mc represents any integer from 0 to 2. ]

14. Furthermore, it contains an acid generator, The resist composition according to claim 1 or 2, wherein the acid generator includes a salt represented by formula (B1) or a salt represented by formula (B2). [In formula (B1), L b1 represents a (nb1 + 1)-valent hydrocarbon group which may have a single bond or substituents, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO 2 -. L b2 represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO 2 -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO 2 - or -CO-. nb1 represents any integer from 1 to 6. When nb1 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. Z1 ＋ represents an organic cation.] [In formula (B2), A １ represents a nitrogen atom or a carbon atom. nb5 represents 2 or 3, and A １ When A is a nitrogen atom, nb5 is 2, and A １ When A is a carbon atom, nb5 is 3, and the groups within the plurality of parentheses may be the same as or different from each other. L b2 ' represents a hydrocarbon group having 1 to 24 carbon atoms which may have a single bond or a substituent, and -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -S-, -SO-, -CO- or -SO 2 - may be replaced by. Y b1 ' represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms, and -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -SO-, -CO- or -SO 2 - and a plurality of -L b2’ -Y b1’ may be the same as or different from each other, and two -SO 2 -L ｂ２’ -Y ｂ１’ may combine together to form a ring containing A １ . Z2 ＋ represents an organic cation.]

15. The resist composition according to claim 1 or 2, further containing a salt that generates an acid having a lower acidity than the acid generated from the acid generator.

16. (1) A step of applying the resist composition according to claim 1 or 2 onto a substrate, Step of drying the composition after coating to form a composition layer, Step of exposing the composition layer, Step of heating the composition layer after exposure, and Step of developing the composition layer after heating, A method for manufacturing a resist pattern including these steps.

17. A compound represented by formula (I). [In formula (I), R ０ represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X １ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３ -**, *-NR ３ -CO-O-**, *-O-CO-NR ３ -** or *-Ax-Ph-Ay-**. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, and * represents the binding site with the carbon atom to which R ０ is bound. L １ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a single bond or a substituent, and the -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO ２ -, -NR ７ - or -CO-. R ７ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ４ represents a halogen atom or a hydrocarbon group having 1 to 48 carbon atoms, and the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO ２ -, -NR ７ - or -CO-. R ５ is -X １１ -R １０ or -X １１ -L １０ -X １２ -R １０ represents. X １１ and X １２ each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * represents the binding site to the benzene ring or L １０ .). L １０ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO ２ -, -NR ７ - or -CO-. R １０ represents a group represented by formula (IC). m1 represents an integer of any one of 1 to 4. When m1 is 1 or more, the groups within a plurality of parentheses may be the same as or different from each other. m4 represents any integer from 0 to 4, and when m4 is 2 or more, the plurality of Rs ４ may be the same as or different from each other. m5 represents any integer from 1 to 4. When m5 is 2 or more, a plurality of Rs ５ may be the same as or different from each other. However, 2 ≤ m1 + m4 + m5 ≤ 6.] [In formula (IC), R Ａ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents any integer from 0 to 2. When u1 is 2, the plurality of Rs Ａ are the same or different. s1 represents 1 or 2. t1 represents 0 or 1. However, the sum of s1 and t1 is 1 or 2. L １２ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO ２ -. * represents a bonding site. ]

18. A resin containing a structural unit represented by formula (IP). [In formula (IP), R ０Ａ and R ０Ｂ each independently represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X １Ａ and X １Ｂ each independently represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３ -**, *-NR ３ -CO-O-**, *-O-CO-NR ３ -** or *-Ax-Ph-Ay-**. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, and * represents the binding site with the carbon atom to which R ０Ａ or R ０Ｂ is attached. L １Ａ and L １Ｂ each independently represents a hydrocarbon group having 1 to 28 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO ２ -, -NR ７ - or -CO-. R ７ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ４ represents a halogen atom or a hydrocarbon group having 1 to 48 carbon atoms, and the hydrocarbon group may have a substituent, and -CH 2 - in it may be replaced by -O-, -S-, -SO-, -SO ２ -, -NR ７ - or -CO-. R ５ is -X １１ -R １０ or -X １１ -L １０ -X １２ -R １０ represents. X １１ and X １２ each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * represents the bonding site with the benzene ring or L １０ .). L １０ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO ２ -, -NR ７ - or -CO-. R １０ represents a group represented by formula (IC). m1A represents an integer of any one of 1 to 4. When m1A is 1 or more, the groups within a plurality of parentheses may be the same as or different from each other. m1B represents an integer of any one of 0 to 3. When m1B is 1 or more, the groups within a plurality of parentheses may be the same as or different from each other. m4 represents any integer from 0 to 4, and when m4 is 2 or more, the plurality of Rs ４ may be the same as or different from each other. m5 represents any integer from 1 to 4. When m5 is 2 or more, the plurality of Rs ５ may be the same as or different from each other. However, 2 ≦ m1A + m1B + m4 + m5 ≦ 6.] [In formula (IC), R Ａ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents any integer from 0 to 2. When u1 is 2, the plurality of Rs Ａ are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1. However, the sum of s1 and t1 is 1 or 2. L １２ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a single bond or a substituent, and the -CH 2 - in it may be replaced by -O-, -S-, -SO-, -CO- or -SO ２ -. * represents a bonding site. ]

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