Inspection device, service provision method, and inspection program provision method

Abstract

To improve provision of inspection programs to users that are tailored to the objects to be inspected.SOLUTION: The inspection device that performs an external inspection of an object to be inspected, is equipped with an imaging device that captures the object to be inspected and generates an imaged image, a control device that inspects the object to be inspected by performing image processing on the captured image in accordance with an inspection program, and an input / output unit that accepts access to the inspection device. The control device determines the range of allowable changes to the settings of the inspection program depending on license information of an access source accepted by the input / output unit.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The technology disclosed in this specification relates to an inspection device, a service providing method, and a method for providing an inspection program. [Background technology]

[0002] As disclosed in Patent Document 1, there is known an appearance inspection device that performs automated optical inspection (AOI) of a substrate or the like after components have been mounted. The appearance inspection device performs inspection by generating a captured image of an object to be inspected (such as a substrate) using an imaging device and processing the captured image using an inspection program tailored to the object to be inspected. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2017-207329 Summary of the Invention [Problem to be solved by the invention]

[0004] Inspection programs are composed of a combination of multiple programs that perform individual processes related to image processing and judgment, and include numerous inspection parameters. The accuracy of inspection items is influenced by the combination of programs used and the settings of inspection parameters, but building an appropriate inspection program to suit the object being inspected often requires specialized knowledge and advanced knowledge. When inspection equipment users are unable to achieve sufficient detection accuracy or shorten inspection times by adjusting the inspection program themselves, they may outsource adjustments to the inspection program or development specific to the object being inspected to the inspection equipment manufacturer. However, due to human resource issues, it can take time to improve the inspection program, and improvements are desired.

[0005] The present disclosure has been made in consideration of the above, and aims to improve the provision of inspection programs tailored to inspection targets to users. [Means for solving the problem]

[0006] According to a first aspect of the present invention, there is provided an inspection apparatus for performing an external inspection of an object to be inspected, comprising: an imaging device for imaging the object to be inspected and generating an image; a control device for inspecting the object to be inspected by performing image processing of the image in accordance with an inspection program; and an input / output unit for accepting access to the inspection apparatus, wherein the control device determines the range of allowable changes to settings of the inspection program according to license information of the access source accepted by the input / output unit.

[0007] According to a second aspect of the present invention, there is provided a service provision method for providing a service related to an inspection device that performs visual inspection of an object to be inspected by a computer, the service provision method comprising the steps of: receiving a license generation instruction including license type information; issuing license information according to the type information; receiving access to the inspection device including the license information; and determining the range of permitted setting changes to the inspection program of the inspection device according to the license information received from the access source.

[0008] According to a third aspect of the present invention, there is provided a method for providing an inspection program for an inspection device, wherein the inspection program can be adjusted within a range according to a type of license, and license information is issued by a license management device held by a manufacturer, and the license information is assigned one of the following types of license: a first license held by the manufacturer, a second license held by a partner, or a third license held by a user, and the manufacturer or the partner accesses the inspection device provided to the user and creates an inspection algorithm that combines one or more program templates included in the inspection program according to the authority set for each type of license in the license information. [Effects of the Invention]

[0009] The technology disclosed in this specification can improve the provision of inspection programs to users that are tailored to the objects being inspected. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is an explanatory diagram illustrating an inspection device according to an embodiment and a license issue target related to the inspection device. [Figure 2] FIG. 2 is a diagram schematically illustrating an inspection device according to an embodiment. [Figure 3] FIG. 3 is a hardware configuration diagram showing the control device according to the embodiment. [Figure 4] FIG. 4 is an explanatory diagram illustrating the configuration of the inspection program according to the embodiment. [Figure 5] FIG. 5 is an explanatory diagram showing types of license information. [Figure 6] FIG. 6 is an explanatory diagram illustrating an example of the types of inspection parameters included in a program template. [Figure 7] FIG. 7 is a schematic diagram for explaining a user interface screen of the inspection device. [Figure 8]FIG. 8 is a flowchart showing a service providing method according to the embodiment. [Figure 9] FIG. 9 is a flowchart showing the process related to the test inspection. [Figure 10] FIG. 10 is a flowchart showing the operation status monitoring process. [Figure 11] FIG. 11 is an explanatory diagram illustrating an example of a sales model for an inspection device according to the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0011] (Inspection equipment and license issuance subject) 1 is an explanatory diagram illustrating an inspection device 1 according to an embodiment and a license issuance target related to the inspection device 1. The inspection device 1 is an appearance inspection device that performs an appearance inspection of an inspection target.

[0012] As shown in FIG. 1 , the inspection apparatus 1 according to the embodiment is provided to a user 70 directly from a manufacturer 50 or via a partner 60. The manufacturer 50 is a party that produces and sells the inspection apparatus 1. The partner 60 has a collaborative relationship with the manufacturer 50 and sells the inspection apparatus 1 to the user 70, such as a trading company or an agency. The user 70 is a purchaser of the inspection apparatus 1 and uses the inspection apparatus 1 to produce products. The user 70 has, for example, a production line for electronic devices that mounts electronic components on a substrate P. The production line is composed of the inspection apparatus 1, a mounting apparatus 2, a solder printer and a reflow apparatus (not shown), and the like. The inspection apparatus 1 is installed between processes on the production line and performs various inspections to confirm that the processing in the previous process was appropriate.

[0013] The inspection device 1 provided to the user 70 is connected to a network 3 such as the Internet. A computer 51 owned by the manufacturer 50 and a computer 61 owned by the partner 60 can remotely access the inspection device 1 via the network 3. The inspection device 1 can be directly accessed using an input device 11, which will be described later.

[0014] The manufacturer 50 owns a license management device 52 that manages licenses for the inspection device 1. The license management device 52 is a computer system having a processor such as a central processing unit (CPU), a main memory including a nonvolatile memory such as a read-only memory (ROM) and a volatile memory such as a random access memory (RAM), a storage device, and an interface including an input / output circuit. The license management device 52 is connected to a network 3 and can communicate with devices such as the computer 51, the computer 61, and the inspection device 1. The license management device 52 receives a license generation instruction via an input device (not shown) or by communication via the network 3. The license management device 52 issues license information 30 (see FIG. 5 ) in response to the received license generation instruction. The license information 30 is information issued by the manufacturer 50 to a party to whom the manufacturer 50 has granted a license under a contract, and includes information indicating the type of the granted license. For example, the manufacturer 50 grants a partner license to a partner 60 and a user license to a user 70. The manufacturer 50 grants manufacturer licenses to staff members belonging to the manufacturer 50. As will be described later, staff members belonging to the manufacturer 50, partner 60, or user 70 can access the inspection device 1 directly or remotely via the network 3, and adjust the inspection program 20 (see FIG. 4) of the inspection device 1 within the scope of the type of license they own.

[0015] (Inspection equipment) Fig. 2 is a diagram schematically illustrating an inspection device 1 according to an embodiment. In the example shown in Fig. 2, the inspection device 1 inspects the appearance of a substrate P after components C are mounted thereon as an inspection target. The inspection device 1 includes a substrate support member 8 that supports the substrate P after components C are mounted thereon, an imaging device 9 that images the substrate P supported by the substrate support member 8, a control device 10, an input device 11, and a display device 12.

[0016] The imaging device 9 includes a camera 9A, an illumination device 9B, and a moving mechanism 9C that moves an imaging head equipped with the camera 9A and the illumination device 9B.

[0017] The imaging device 9 captures an image of the substrate P as an object to be inspected and generates a captured image. The imaging device 9 is disposed above the substrate support member 8 so as to face the surface of the substrate P. The imaging device 9 captures an image of the substrate P from above after the components C have been mounted thereon. The imaging device 9 captures an image of the surface of the substrate P using a camera 9A while irradiating the surface of the substrate P with illumination light from above using a lighting device 9B. The imaging device 9 performs segmented imaging of a large-sized substrate P by moving the imaging head within a plane (defined as the XY plane) along the substrate P using a movement mechanism 9C. The imaging device 9 captures images of each part, such as the lands and leads of the substrate P. The imaging device 9 outputs the generated captured image to the control device 10.

[0018] The input device 11 and the display device 12 are each connected to the control device 10. The input device 11 generates input data when operated by a staff member. Examples of the input device 11 include a touch sensor, a computer keyboard, or a mouse. The display device 12 displays display data. Examples of the display device 12 include a flat panel display such as a liquid crystal display or an organic EL display. The display device 12 may be a touch screen including a touch sensor.

[0019] FIG. 3 is a hardware configuration diagram showing a control device 10 according to an embodiment. The control device 10 includes a computer system 1000. The control device 10 includes a processor 1001 such as a CPU, a main memory 1002 including a nonvolatile memory such as a ROM and a volatile memory such as a RAM, a storage 1003, and an interface 1004 including an input / output circuit. The functions of the control device 10 are stored in the storage 1003 as a computer program. The processor 1001 reads the computer program from the storage 1003, loads it into the main memory 1002, and executes predetermined processing in accordance with the computer program. The computer program may be distributed to the control device 10 via a network 3. The interface 1004 functions as an input / output unit 13 that accepts access to the inspection device 1. The input / output unit 13 is connected to the input device 11 and the display device 12. The input / output unit 13 accepts direct access to the inspection device 1 (control device 10) via the input device 11. The input / output unit 13 is connected to the network 3. The input / output unit 13 accepts remote access to the inspection device 1 (control device 10) via the network 3.

[0020] The control device 10 inspects the object to be inspected by performing image processing on the captured image in accordance with the inspection program 20. The inspection program 20 is a program for performing a series of image processing operations to extract information necessary for determining the pass / fail of the inspection items from the captured image. The inspection program 20 is stored in the storage 1003. The control device 10 determines the pass / fail of various inspection items for the object to be inspected based on the processing results of the inspection program 20. The inspection items include, for example, missing component C, misalignment of component C, polarity of component C, inversion of component C, non-soldering at the component mounting position, bridges (short circuits), amount of solder, missing inserted component, etc., and may also be other items.

[0021] (Inspection Program) 4 is an explanatory diagram illustrating the configuration of an inspection program 20 according to an embodiment. In the example of FIG. 4, the inspection program 20 includes a plurality of program templates 21 and a plurality of items of inspection parameters 23 included in the program templates 21. The program templates 21 are program units that perform individual processes related to image processing, calculation, and judgment processing. The inspection program 20 is configured as a package that includes a plurality of program templates 21 of various types.

[0022] Each program template 21 includes a main body 22 and one or more test parameters 23. However, there may be a program template 21 that does not include test parameters 23. The main body 22 includes, for example, one or more functions, and determines the content of processing by the program template 21. The test parameters 23 specify coefficients and variables included in the functions of the main body 22.

[0023] The inspection program 20 can create an inspection algorithm that combines multiple program templates 21. An inspection algorithm for inspecting the object to be inspected (substrate P) is created by selecting an appropriate program template 21 that matches the object to be inspected (substrate P) from the multiple program templates 21 and setting appropriate inspection parameters 23. The control device 10 executes the program templates 21 specified in the inspection algorithm created in the inspection program 20 in a specified order and with the specified inspection parameters 23, thereby processing the captured image.

[0024] The inspection device 1 can perform highly accurate visual inspections of objects of various specifications by setting an appropriate program template 21 and appropriate inspection parameters 23 according to various conditions, such as the shape and structure of the object to be inspected, the components C to be mounted, and the type of inspection item. Such settings for the inspection program 20 can be performed by staff belonging to the manufacturer 50, partner 60, or user 70, either directly accessing the inspection device 1 (control device 10) or remotely via the network 3. In this embodiment, the inspection program 20 can be adjusted within a range according to the type of license. That is, the control device 10 determines the range within which the settings of the inspection program 20 can be changed according to the license information 30 of the access source received by the input / output unit 13.

[0025] (License Information) 5 is an explanatory diagram showing types of license information 30. In the example of FIG. 5, three types of licenses are shown: a first license 31, a second license 32, and a third license 33. Therefore, the license information 30 of the access source to the inspection device 1 includes information indicating any one of the first license 31, the second license 32, and the third license 33.

[0026] The first license 31 is a license for the manufacturer 50 that has the highest level of permission to change settings. The first license 31 is granted to staff belonging to the manufacturer 50 or to a person (corporation or individual) engaged in the development of the inspection program 20 on behalf of the manufacturer 50. The control device 10 allows the first license 31 to change the inspection parameters 23 and the contents of the program template 21 for all items included in the inspection program 20. The control device 10 also allows the first license 31 to change the contents of a user interface (UI) screen 25 (see FIG. 7).

[0027] Changing the settings of the inspection parameters 23 includes changing the values of the individual inspection parameters 23 included in the program template 21. Changing the content of the program template 21 includes changing the main body 22 of the program template 21. Changing the content of the user interface screen 25 includes changing the items displayed on the user interface screen 25, as will be described later.

[0028] The second license 32 is a license for the partner 60 that has the second highest authority to change settings. The second license 32 is granted to staff members or the like who belong to the partner 60 that is affiliated with the manufacturer 50. The control device 10 allows the second license 32 to change the inspection parameters 23 of each item of the inspection parameters 23 except for the first part 24A.

[0029] FIG. 6 is an explanatory diagram illustrating an example of the types of inspection parameters 23 included in the program template 21. In the example shown in FIG. 6, the program template 21 includes six items of inspection parameters 23: “inspection parameter A,” “inspection parameter B,” “inspection parameter C,” “inspection parameter D,” “inspection parameter E,” and “inspection parameter F.” Of the six items of inspection parameters 23, “inspection parameter A” and “inspection parameter B” belong to the first part 24A. For example, “inspection parameter A” and “inspection parameter B” of the items in the first part 24A require a change to the contents of the main body 22, or changing the setting value has little effect without changing the contents of the main body 22. The control device 10 permits the second license 32, which does not have the authority to change the contents of the main body 22, to change four items other than the first part 24A: “inspection parameter C,” “inspection parameter D,” “inspection parameter E,” and “inspection parameter F.” The control device 10 prevents the second license 32 from changing the inspection parameters 23 of the items belonging to the first part 24A. As described above, the first license 31 allows all six items of the inspection parameters 23 to be changed.

[0030] The third license 33 is a license for the user 70, with more limited authority to change settings than the first license 31 and the second license 32. The third license 33 is granted to a staff member or the like who belongs to the user 70. The control device 10 allows the third license 33 to change the inspection parameters 23 of items excluding the second part 24B that includes the first part 24A.

[0031] As shown in FIG. 6 , the second part 24B includes the inspection parameters 23 ("inspection parameter A" and "inspection parameter B") belonging to the first part 24A, and further includes other inspection parameters 23 ("inspection parameter C" and "inspection parameter D") not belonging to the first part 24A. The "inspection parameter C" and "inspection parameter D" belonging to the second part 24B are adjustment items that are recommended to be adjusted after a thorough understanding of the content of the parameters, the content of the processing executed by the program template 21, the specifications of the inspection device 1, etc. Therefore, the "inspection parameter C" and "inspection parameter D" are limited to adjustments by the holder of the first license 31 or the holder of the second license 32 belonging to a partner 60 that has received technical information through a partnership with the manufacturer 50. The control device 10 permits the third license 33 to change two items, "inspection parameter E" and "inspection parameter F," belonging to the third part 24C other than the second part 24B. The control device 10 makes it impossible to change the inspection parameters 23 of the items belonging to the second part 24B for the third license 33. Hereinafter, the items "inspection parameter E" and "inspection parameter F" whose settings are allowed to be changed for the third license 33 will be referred to as general adjustment items.

[0032] With this configuration, in this embodiment, the control device 10 determines the range of items that can be changed among the multiple items of the inspection parameters 23 in accordance with the license information 30.

[0033] (User interface screen) 7 is a schematic diagram for explaining a user interface screen 25 of the inspection device 1. The control device 10 outputs the user interface screen 25 of the inspection program 20 via the input / output unit 13. The control device 10 causes the display device 12 to display the user interface screen 25 shown in FIG. 7 via the input / output unit 13. In response to remote access from the computer 51 or the computer 61 shown in FIG. 1 via the network 3, the control device 10 transmits data of the user interface screen 25 to the access source via the input / output unit 13 and displays it.

[0034] The user interface screen 25 includes an image display area 26 and an item display area 27. The image display area 26 displays a captured image IM of the object to be inspected (substrate P) captured by the imaging device 9. The item display area 27 displays various inspection parameters 23 of the program template 21. The control device 10 accepts adjustment of the inspection parameters 23 based on an operation input to a predetermined position in the item display area 27. Specifically, the operator can adjust the inspection parameters 23 by selecting an input field 27A in the item display area 27 and inputting a value for the inspection parameter 23 or by moving a slider 27B. The operator can perform input operations in the item display area 27 by remote access from the computer 51 or computer 61 shown in FIG. 1 or by direct access using the input device 11.

[0035] The inspection parameters 23 that are always displayed on the user interface screen 25 are parameters (parameters corresponding to "inspection parameter E" and "inspection parameter F" in FIG. 6) whose settings are permitted to be changed for the third license 33. In other words, the inspection parameters 23 that are normally displayed in the item display area 27 are general adjustment items whose settings can be changed by any holder of the first license 31, the second license 32, or the third license 33.

[0036] In one example, the control device 10 displays the detailed setting screen 28 by accepting a selection input to a predetermined portion of the item display area 27. For example, in FIG. 7 , when the control device 10 accepts a selection input to the brightness histogram display area 27C in the program template 21 that performs binarization processing (threshold processing) of the captured image IM, the control device 10 displays the detailed setting screen 28 in a window separate from the user interface screen 25. The detailed setting screen 28 displays the program template 21. When the control device 10 accepts a selection input of an item displayed on the detailed setting screen 28, the control device 10 displays an adjustment screen (not shown) for the inspection parameters 23 belonging to the first portion 24A and the second portion 24B of the program template 21.

[0037] In this embodiment, the control device 10 changes the display mode of the detailed setting screen 28 depending on the license information 30 of the access source to the inspection device 1 (control device 10). The control device 10 does not display the detailed setting screen 28 when accessed by the owner of the third license 33. This makes it impossible for the third license 33 to change the inspection parameters 23 belonging to the second part 24B.

[0038] When accessed by the owner of the second license 32, the control device 10 displays the detailed setting screen 28, but makes items including the test parameters 23 belonging to the first part 24A unselectable. The method for making items unselectable is arbitrary, but in the example of Fig. 7, the control device 10 displays the unselectable items 28A as blank (empty) and does not accept any selection input. The item names may also be displayed differently from selectable items, such as by graying out, so as not to accept any selection input.

[0039] When accessed by the owner of the first license 31, the control device 10 displays the detailed setting screen 28 in a state where all items are selectable. Therefore, when accessed by the owner of the first license 31, the item 28A that is not selectable in the case of the second license 32 is also displayed as selectable.

[0040] The owner of the first license 31 can change the contents of the main body 22 of the program template 21 and add new inspection parameter 23 items that are added as a result of the changes via the user interface screen 25 and the detailed setting screen 28. Furthermore, the owner of the first license 31 can change the items displayed on the user interface screen 25. For example, the owner of the first license 31 can add newly added inspection parameters 23 or inspection parameters 23 belonging to the second part 24B to the item display area 27 of the user interface screen 25. The control device 10 removes the inspection parameters 23 added to the item display area 27 from the second part 24B, making the settings changeable even through access from the third license 33. As a result of changing the settings of the inspection program 20 in this way, the user 70 can optimize the added inspection parameters 23 on the user interface screen 25 while performing a test inspection of the inspection target object.

[0041] 8 is a flowchart showing a service providing method according to the embodiment. The service providing method according to the embodiment is a service providing method in which a computer (computer 51, computer 61, computer system 1000) provides a service related to an inspection device 1 that performs a visual inspection of an object to be inspected.

[0042] (Service provision method) As shown in Figure 8, the service provision method includes step S10 of receiving a license generation instruction including license type information, step S11 of issuing license information 30 according to the type information, step S12 of receiving access to the inspection device 1 including the license information 30, step S13 of determining the range of allowable setting changes to the inspection program 20 of the inspection device 1 according to the received license information 30 from the access source, and step S14 of creating an inspection algorithm.

[0043] The license management device 52 receives a license generation instruction via an input device (not shown) or by communication via the network 3 (step S10). The license generation instruction is input based on a contract between the manufacturer 50, who is the licensor, and the partner 60 or user 70, who is the licensee. For a staff member belonging to the manufacturer 50, a person in charge at the manufacturer 50 inputs a license generation instruction for that staff member into the license management device 52. The license generation instruction includes license type information, i.e., information indicating one of the first license 31, the second license 32, and the third license 33.

[0044] The license management device 52 issues the license information 30 to the licensee according to the license type information included in the license generation instruction (step S11). The license information 30 includes information indicating any one of the first license 31, the second license 32, and the third license 33.

[0045] The inspection device 1 (control device 10) accepts access from licensees directly or remotely via the network 3 (step S12). Licensees belonging to the manufacturer 50 can access the inspection device 1 via the network 3 using a computer 51. Licensees belonging to the partner 60 can access the inspection device 1 via the network 3 using a computer 61. Each of the licensees, namely, the manufacturer 50, the partner 60, and the user 70, can directly access the inspection device 1 via the input device 11 at the installation location of the inspection device 1 owned by the user 70. When accepting access, the control device 10 acquires license information 30 including license type information.

[0046] The control device 10 determines the range of settings changes allowed for the inspection program 20 according to the content of the acquired license information 30 (step S13). First, the inspection device 1 (control device 10) determines from the acquired license information 30 whether the type of license from the access source is the first license 31, the second license 32, or the third license 33. The control device 10 determines the range of settings changes allowed for the inspection program 20 according to the setting change classification for each license type shown in FIG. 5. As a result, the range of settings changes allowed for the inspection program 20 via the user interface screen 25 is changed according to the license type, as shown in FIG. 7.

[0047] The control device 10 creates an inspection algorithm that combines one or more program templates 21 included in the inspection program 20 based on a direct or remote operation input from the access source (step S14). The control device 10 performs processing to combine the program templates 21 and change the inspection parameters 23 and the contents of the program templates 21 within the allowable range determined in step S13 in accordance with the authority set for each license type in the license information 30 (see FIG. 5).

[0048] For example, when the user 70 adjusts the inspection parameters 23 in the item display area 27 to inspect a special object for which sufficient inspection accuracy cannot be achieved, the user 70 requests the partner 60 to make adjustments. The partner 60, who is the owner of the second license 32, adjusts the inspection parameters 23 via the detailed settings screen 28, thereby improving the inspection accuracy of the inspection algorithm. If the partner 60 is unable to handle the problem, the user 70 or the partner 60 requests the manufacturer 50 to change the settings of the inspection program 20. The manufacturer 50, who is the owner of the first license 31, adjusts the detailed inspection parameters 23 and changes the contents of the program template 21, thereby achieving the inspection accuracy required for the inspection algorithm. By receiving inspection program 20 adjustment service directly or remotely from the partner 60 who was directly involved in the purchase of the inspection device 1, the user 70 is more likely to quickly achieve his or her goal of obtaining the desired inspection accuracy. By having the partner 60 handle the setting changes of the inspection program 20 that the partner 60 can also handle, the manufacturer 50 can focus on making more specialized setting changes to the inspection program 20 and developing additional program templates 21.

[0049] (How to provide the inspection program) A method for providing the inspection program 20 according to this embodiment will be described. As shown in FIG. 8, in this embodiment, a method for providing the inspection program 20 for the inspection device 1 is implemented. In the method for providing the inspection program 20, the inspection program 20 can be adjusted within a range according to the type of license. The method for providing the inspection program 20 includes step S11 in which license management device 52 owned by manufacturer 50 issues license information 30. The license information 30 is assigned one of the following license types: a first license 31 owned by the manufacturer 50, a second license 32 owned by a partner 60, and a third license 33 owned by a user 70. The method for providing the inspection program 20 also includes step S14 in which the manufacturer 50 or the partner 60 accesses the inspection device 1 provided to the user 70 (see step S12) and creates an inspection algorithm that combines one or more program templates 21 included in the inspection program 20 according to the authority set for each license type in the license information 30.

[0050] (Test inspection) Changing or modifying the settings of the inspection program 20 is often necessary to obtain the desired inspection accuracy in the appearance inspection of a special inspection object (substrate P). For example, before a user 70 introduces the inspection device 1 into their own production line, the manufacturer 50 can perform a test inspection of a test product of the inspection object.

[0051] Fig. 9 is a flowchart showing processing related to test inspection. In the example shown in Fig. 9, the service providing method further includes step S20 of receiving an instruction to perform a test inspection on a test item of an inspection target, step S21 of performing the test inspection using the inspection device 1 in accordance with the execution instruction, and step S22 of outputting guidance information related to the inspection program 20 in accordance with the result of the test inspection.

[0052] As shown in FIG. 1, a manufacturer 50 is equipped with test equipment 53 including an inspection device 1A. A user 70 provides a test sample of a substrate P to be produced to the manufacturer 50 and commissions the manufacturer 50 to carry out a test inspection. A staff member of the manufacturer 50 inputs an instruction to carry out a test inspection of the test sample, which is an object to be inspected, to the control device 10 of the inspection device 1A via the input device 11. As a result, the control device 10 of the inspection device 1A accepts the instruction to carry out the test inspection of the test sample, which is an object to be inspected (step S20). The test samples include a plurality of NG products, non-defective products, etc. for the inspection items specified in advance by the user 70.

[0053] The control device 10 of the inspection device 1A performs a test inspection on a test item that is an inspection object. The control device 10 acquires an image IM of the test item using the imaging device 9 and performs image processing of the image in accordance with the inspection program 20, thereby inspecting the inspection object. The control device 10 outputs inspection results for inspection items designated in advance by the user 70. The inspection results to be output for the designated inspection items are already known for the test item. Therefore, information regarding inspection accuracy (the accuracy rate of pass / fail judgment) can be calculated from the test inspection results output from the control device 10.

[0054] The control device 10 outputs guidance information regarding the inspection program 20 according to the results of the test inspection (step S22). If the results of the test inspection show that the standard inspection program 20 cannot achieve the desired inspection accuracy, the control device 10 outputs first guidance information suggesting that the inspection program 20 be modified in advance (modified using the first license 31) to become a program dedicated to the object to be inspected provided as a test product. If the results of the test inspection show that the standard inspection program 20 can achieve the desired inspection accuracy, the control device 10 outputs second guidance information suggesting that the standard inspection program 20 be introduced without modifying the inspection program 20. For example, the control device 10 outputs the first guidance information when the accuracy rate of the pass / fail judgment based on the results of the test inspection is less than a predetermined threshold, and outputs the second guidance information when the accuracy rate of the pass / fail judgment is equal to or greater than the predetermined threshold.

[0055] The manufacturer 50 notifies the user 70 of the output guidance information. When the user 70 needs to improve the inspection accuracy of the inspection object, the user 70 can request the manufacturer 50 to create a dedicated program based on the first guidance information. As a result, sufficient inspection accuracy can be obtained immediately after the introduction of the inspection device 1.

[0056] (Monitoring the operation status of inspection equipment) Next, a description will be given of the provision of services by monitoring the operational status of the inspection device 1. FIG. 10 is a flowchart showing the operational status monitoring process. The manufacturer 50 can grant a license for the operational status monitoring service of the inspection device 1 to the inspection device 1 owned by the user 70. The inspection device 1 of the user 70 who has subscribed to the monitoring service is identified by the license information 30 issued by the license management device 52.

[0057] 1, the manufacturer 50 monitors the operational status of the inspection device 1 using a monitoring server 54 that collects operational information about the inspection device 1. The monitoring server 54 is a computer system having a processor such as a CPU (Central Processing Unit), a main memory including a nonvolatile memory such as a ROM (Read Only Memory) and a volatile memory such as a RAM (Random Access Memory), a storage, and an interface including an input / output circuit. The monitoring server 54 may be a facility owned by the manufacturer 50, or a hardware resource operated by a business operator other than the manufacturer 50 may be used as the monitoring server 54 on behalf of the manufacturer 50.

[0058] In the example shown in Figure 10, the service provision method further includes step S30 of collecting operation information of the inspection device 1 according to the license information 30, step S31 of detecting the occurrence of a notification event based on the operation information, and step S32 of notifying the occurrence of the detected notification event.

[0059] Specifically, the monitoring server 54 establishes communication with the inspection device 1 (control device 10) identified by the license information 30 via the network 3. The monitoring server 54 collects operation information from the control device 10 of the inspection device 1 to which a monitoring service license has been granted in accordance with the license information 30 (step S30). The operation information includes, for example, the current value and brightness setting value of the lighting device 9B, and the position information and imaging position setting value of the moving mechanism 9C. The monitoring server 54 sequentially acquires operation information generated in conjunction with the operation of the inspection device 1. The monitoring server 54 monitors for abnormalities in the current value based on the current value and brightness setting value of the lighting device 9B. The current value of the lighting device 9B is, for example, a measurement value of a current sensor provided in the lighting device 9B. The monitoring server 54 monitors for abnormalities in the position accuracy of the moving mechanism 9C based on the position information and imaging position setting value of the moving mechanism 9C. The position information of the moving mechanism 9C is, for example, a measurement value of an encoder provided in the moving mechanism 9C.

[0060] The monitoring server 54 detects the occurrence of a preset notification event based on the operation information of the inspection device 1 (step S31). For example, the monitoring server 54 determines whether the current value of the lighting device 9B exceeds a judgment threshold corresponding to the brightness setting value, and if the current value exceeds the judgment threshold, detects the occurrence of a notification event of an abnormal current value. If the current value is equal to or less than the judgment threshold, the monitoring server 54 determines that a notification event of an abnormal current value has not occurred. For example, the monitoring server 54 determines whether the error between the position information of the moving mechanism 9C and the setting value of the imaging position has exceeded a judgment threshold, and if the error exceeds the judgment threshold, detects the occurrence of a notification event of an abnormal position accuracy. If the error is equal to or less than the judgment threshold, the monitoring server 54 determines that a notification event of an abnormal position accuracy has not occurred. If the monitoring server 54 determines that a notification event has not occurred, it terminates the process.

[0061] When the monitoring server 54 determines that a notification event has occurred, it notifies the notification destination set in accordance with the license information 30 of the occurrence of the notification event (step S32). The monitoring server 54 performs the notification, for example, by sending a message to the control device 10 of the inspection device 1 and displaying the message on the display device 12 via the control device 10. The monitoring server 54 performs the notification, for example, by email to an address specified by a user 70 who has subscribed to the monitoring service. The monitoring server 54 notifies the user 70 who has subscribed to the monitoring service of the occurrence of a notification event that recommends, for example, the performance of maintenance or the replacement of parts. This allows maintenance or part replacement to be performed in a timely manner depending on the operating status of the inspection device 1.

[0062] (Inspection equipment sales model) FIG. 11 is an explanatory diagram illustrating an example of a sales model of the inspection device 1 according to the present invention.

[0063] As shown in FIG. 11, a manufacturer 50 produces and owns an inspection device 1. The manufacturer 50 sells the inspection device 1 to multiple partners 60 (partner 60A, partner 60B, partner 60C). The manufacturer 50 also provides each partner 60 with skills (skill A, skill B, skill C) including technical elements necessary to customize the inspection device 1. The skills that the manufacturer 50 provides to partners 60A, 60B, and 60C relate to techniques involved in modifying the inspection device 1, and enable the inspection device 1 to be adjusted to suit, for example, an object to be inspected, in response to a request from a user 70. Each skill is assigned to each partner 60, and the authority assigned to each partner 60 differs.

[0064] Partner 60 sells inspection devices 1 to users 70. The inspection devices 1 are customized by partner 60 for each user 70 (customization A1, customization A2, customization B1, customization B2, customization C1, customization C2) and provided as inspection devices 1A1, 1A2, 1B1, 1B2, 1C1, and 1C2. Partner 60 also provides each user 70 with technical elements related to each inspection device 1 (skills A1, A2, B1, B2, C1, and C2).

[0065] An example is shown in Figure 11. A manufacturer 50 sells an inspection device 1 to a partner 60A. The manufacturer 50 provides the partner 60A with technology (skill A) related to the inspection device 1, including some technology for customizing the inspection device 1.

[0066] Partner 60A customizes inspection device 1 based on the provided skill A (customization A1) and sells inspection device 1A1 to user 70A1. Partner 60A provides user 70A1 with technical elements (skill A1) related to inspection device 1A1.

[0067] Furthermore, the partner 60A customizes the inspection device 1A based on the provided skill A (customization A2) and sells the inspection device 1A2 to the user 70A2. The partner 60A provides the user 70A2 with a technical element (skill A2) related to the inspection device 1A2.

[0068] The manufacturer 50 has a management system 100, and can manage provided information such as skills and information on each inspection device 1 using partners 60 and users 70, manufacturing numbers, unique IDs, and the like.

[0069] 11, the manufacturer 50 and the partner 60 sell the inspection device 1 in turn, but the manufacturer 50 can also sell a customized inspection device 1 to the user 70. If the inspection device 1 of the user 70 requires customization beyond the skill of the partner 60, the manufacturer 50 can also customize the inspection device 1 on behalf of the partner 60.

[0070] 11 functions as the license management device 52 in this embodiment. In this embodiment, the authority to use each skill is granted as a license, and the inspection program 20 of the inspection device 1 is adjusted within the range according to the type of license it has (the range of each skill).

[0071] (effect) As described above, the inspection device 1 according to this embodiment performs a visual inspection of an object to be inspected. The inspection device 1 includes an imaging device 9 that captures an image of the object to be inspected and generates a captured image; a control device 10 that inspects the object by processing the captured image according to an inspection program 20; and an input / output unit 13 that accepts access to the inspection device 1. The control device 10 determines the range of settings changes allowed for the inspection program 20 based on the license information 30 of the access source accepted by the input / output unit 13. This allows the licensee to change the settings of the inspection program 20 by granting a license from the manufacturer 50. By granting a license to a partner 60 that sells the inspection device 1 to a user 70, as in the above embodiment, the inspection program 20 can be quickly provided with settings changed to suit the object to be inspected. As a result, the inspection program 20 tailored to the object to be inspected can be provided to the user more quickly. This effect is particularly useful when communication between the manufacturer 50 and the user 70 takes time, for example, when the development center of the manufacturer 50 is located in a different country from the locations of the partner 60 and the user 70.

[0072] In the inspection device 1 according to this embodiment, the inspection program 20 includes a plurality of program templates 21 and a plurality of inspection parameters 23 included in the program templates 21, and the control device 10 determines the range of items that can be changed among the plurality of inspection parameters 23 in accordance with the license information 30. This allows the inspection accuracy to be improved to suit the object being inspected by adjusting the inspection parameters 23. Furthermore, inspection parameters 23 that would actually worsen the inspection accuracy if adjusted carelessly can be set to be unchangeable in accordance with the license. By differentiating the range of items that can be changed in the inspection parameters 23 between the user 70 and the partner 60 using the license information 30, the partner 60 can provide a high-level parameter adjustment service that is tailored to the object being inspected.

[0073] In the inspection device 1 according to this embodiment, the license information 30 includes information indicating one of a first license 31, a second license 32, and a third license 33. The control device 10 allows the first license 31 to modify the inspection parameters 23 for all items included in the inspection program 20 and the contents of the program template 21. The second license 32 allows the control device 10 to modify the inspection parameters 23 for all items of the inspection parameters 23 except for the first portion 24A. The third license 33 allows the control device 10 to modify the inspection parameters 23 for all items except for the second portion 24B, which includes the first portion 24A. By granting the second license 32 to a partner 60, it is possible to improve inspection accuracy by adjusting parameters more precisely than with general adjustment items, for example, for the inspection of special inspection objects for which inspection accuracy is difficult to achieve. Since a manufacturer 50 who holds the first license 31 can perform adjustments that involve modifying the contents of the program template 21, a more advanced inspection program 20 can be provided.

[0074] In the inspection device 1 according to this embodiment, the control device 10 outputs a user interface screen 25 of the inspection program 20 via the input / output unit 13, and the control device 10 allows the first license 31 to change the content of the user interface screen 25. This makes it possible to provide a dedicated inspection program 20 equipped with a user interface suitable for inspecting special inspection objects.

[0075] The service providing method according to this embodiment is a computer-implemented service providing method for providing a service related to an inspection apparatus 1 that performs visual inspection of an object to be inspected. The method includes the steps of: receiving a license generation instruction (S10) including license type information; issuing license information 30 according to the license type information; receiving access to the inspection apparatus 1 including the license information 30; and determining the permitted range of setting changes for the inspection program 20 of the inspection apparatus 1 according to the received license information 30 from the access source (S13). This allows the manufacturer 50 to grant a license, enabling the licensee to change the settings of the inspection program 20. By granting a license to a partner 60 that sells the inspection apparatus 1 to a user 70, as in the above embodiment, the inspection program 20 can be quickly provided with settings changed to suit the object to be inspected. This improves the provision of the inspection program 20 tailored to the object to be inspected to the user.

[0076] The service providing method according to this embodiment further includes step S20 of receiving an instruction to perform a test inspection on a test product as an inspection target, step S21 of performing the test inspection using the inspection device 1 in accordance with the execution instruction, and step S22 of outputting guidance information related to the inspection program 20 in accordance with the results of the test inspection. This allows a user 70 who is planning to install the inspection device 1 to be guided to the provision of an inspection program 20 whose settings have been changed to suit the inspection target in accordance with the results of the test inspection. As a result, a dedicated inspection program 20 tailored to the inspection target can be provided to the user 70 in accordance with their needs from the time of installing the inspection device 1.

[0077] The service providing method according to this embodiment further includes step S30 of collecting operation information of the inspection device 1 in accordance with the license information 30, step S31 of detecting the occurrence of a notification event based on the operation information, and step S32 of notifying the occurrence of the detected notification event. This makes it possible to provide services by monitoring the status of the inspection device 1 in addition to the inspection program 20 tailored to the object to be inspected. In addition to improving the inspection accuracy by adjusting the inspection program 20, monitoring the status of the inspection device 1 makes it possible to maintain inspection accuracy and respond quickly when an abnormality occurs.

[0078] The inspection program providing method according to this embodiment provides an inspection program 20 for an inspection device 1, in which the inspection program 20 can be adjusted within a range according to the license type. License information 30 is issued by a license management device 52 owned by a manufacturer 50. The license information 30 is assigned one of the following license types: a first license 31 owned by the manufacturer 50, a second license 32 owned by a partner 60, or a third license 33 owned by a user 70. The manufacturer 50 or the partner 60 accesses the inspection device 1 provided to the user 70 and creates an inspection algorithm that combines one or more program templates 21 included in the inspection program 20 according to the authority set for each license type in the license information 30. This allows the partner 60 to quickly provide the user 70 with an inspection program 20 having an inspection algorithm that can achieve the desired inspection accuracy for the object being inspected. By having the partner 60 handle setting changes to the inspection program 20 that the partner 60 can also handle, the manufacturer 50 can focus on developing more specialized setting changes to the inspection program 20 and additional program templates 21. As a result, the inspection program 20 tailored to the object to be inspected can be provided to the user in an improved manner.

[0079] In the method for providing an inspection program according to this embodiment, the program template 21 includes one or more inspection parameters 23. This makes it possible to improve the inspection accuracy suited to the object being inspected by adjusting the inspection parameters 23. Furthermore, inspection parameters 23 that would worsen the inspection accuracy if adjusted carelessly can be set to be unchangeable according to the license.

[0080] In the inspection program provision method according to this embodiment, the first license 31 allows modification of the inspection parameters 23 and the program template 21 for all items included in the inspection program 20. The second license 32 allows modification of the inspection parameters 23 for all items of the inspection parameters 23 except for the first portion 24A. The third license 33 allows modification of the inspection parameters 23 for all items except for the second portion 24B, which includes the first portion 24A. This allows a partner 60 holding the second license 32 to adjust parameters more precisely than general adjustment items (items excluding the second portion 24B), thereby improving inspection accuracy, for example, when inspecting special inspection objects. A manufacturer 50 holding the first license 31 can perform adjustments that involve modifying the program template 21, enabling the provision of a more advanced inspection program 20.

[0081] In the method for providing an inspection program according to this embodiment, the manufacturer 50 or partner 60 accesses the inspection device 1 directly or remotely via the network 3. This allows staff of the manufacturer 50 or partner 60 to set and adjust the inspection algorithm by remote access via the network 3, rather than simply visiting the installation location of the inspection device 1 owned by the user 70. As a result, the inspection program 20 can be provided more flexibly and quickly. [Explanation of symbols]

[0082] 1, 1A, 1A1, 1A2, 1B1, 1B2, 1C1, 1C2...inspection device, 2...mounting device, 3...network, 8...substrate support member, 9...imaging device, 9A...camera, 9B...lighting device, 9C...movement mechanism, 10...control device, 11...input device, 12...display device, 13...input / output unit, 20...inspection program, 21...program template, 22...main body, 23...inspection parameters, 24A...first part, 24B...second part, 24C...third part, 25...user interface screen, 26...image display area, 27...item display area, 27A...input field, 27B...slider, 27C...display area, 28...detailed settings Screen, 28A...item, 30...license information, 31...first license, 32...second license, 33...third license, 50...manufacturer, 51...computer, 52...license management device, 53...test equipment, 54...monitoring server, 60, 60A, 60B, 60C...partner, 61...computer, 70, 70A1, 70A2, 70B1, 70B2, 70C1, 70C2...user, 100...management system, 1000...computer system, 1001...processor, 1002...main memory, 1003...storage, 1004...interface, C...component, IM...captured image, P...board.

Claims

1. An inspection device for performing a visual inspection of an object to be inspected, an imaging device that captures an image of the inspection object and generates a captured image; a control device that inspects the inspection object by performing image processing of the captured image in accordance with an inspection program; an input / output unit that accepts access to the inspection device, the control device determines a range in which setting changes of the inspection program are permitted in accordance with the license information of the access source received by the input / output unit. Inspection equipment.

2. the inspection program includes a plurality of program templates and a plurality of items of inspection parameters included in the program templates; the control device determines a range of changeable items among the plurality of items of the inspection parameters in accordance with the license information; The inspection device according to claim 1 .

3. the license information includes information indicating one of a first license, a second license, and a third license; The control device The first license allows the inspection parameters of all items included in the inspection program and the contents of the program template to be changed; the second license allows the inspection parameters of the items excluding the first part of the inspection parameters to be changed; the third license allows the inspection parameters of items excluding the second part that includes the first part to be changed; The inspection device according to claim 2 .

4. the control device outputs a user interface screen of the inspection program via the input / output unit; the control device allows the content of the user interface screen to be changed for the first license. The inspection device according to claim 3 .

5. A service providing method for providing a service related to an inspection device that performs a visual inspection of an object to be inspected by a computer, comprising: receiving a license generation instruction including license type information; issuing license information according to the type information; receiving access to the inspection device including the license information; and determining a range of permitted changes to the settings of the inspection program of the inspection device according to the license information of the received access source. Service delivery methods.

6. receiving an instruction to perform a test inspection on the test item of the inspection object; performing the test inspection by the inspection device in response to an execution instruction; and outputting guidance information regarding the test program according to the result of the test test. The service providing method according to claim 5 .

7. collecting operation information of the inspection device according to the license information; detecting an occurrence of a notification event based on the operation information; and notifying the occurrence of the detected notification event.

7. The service providing method according to claim 5 or 6.

8. A method for providing an inspection program for an inspection device, comprising: The inspection program can be adjusted within a range depending on the type of license, License information is issued by the manufacturer's license management device, The license information includes the following license types: The first license held by the manufacturer, A second license held by a partner, Either a third license held by the user or The manufacturer or the partner accesses the inspection device provided to the user, and creates an inspection algorithm that combines one or more program templates included in the inspection program in accordance with the authority set for each license type in the license information. A method for providing an inspection program.

9. the program template includes one or more inspection parameters; 9. The method for providing an inspection program according to claim 8.

10. The first license allows modification of the inspection parameters of all items included in the inspection program and the contents of the program template, the second license allows modification of the inspection parameters of items excluding the first part among the items of the inspection parameters, The third license allows modification of the inspection parameters of items excluding the second part, which includes the first part.

10. The method for providing an inspection program according to claim 9.

11. The manufacturer or the partner accesses the inspection device directly or remotely via a network.

9. The method for providing an inspection program according to claim 8.

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