Detector, detection system, propagation member, fixture, program, and storage media

Abstract

To provide a detector, a detection system, a propagation member, a fixture, a program, and a storage media that do not require couplant liquid.SOLUTION: A detector according to an embodiment comprises a detector, a first propagation member, a second propagation member, and a fixture. The detector includes a plural of detection devices that transmit and detect ultrasonic. The first propagation member is attached to the detector and along which the ultrasonic propagates. The second propagation member along which the ultrasonic propagates is softer that the first propagation member. The fixture fixes the second propagation member to the first propagation member in an attachable / detachable manner.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] SUMMARY OF THE INVENTION Embodiments of the present invention relate to a detection device, a detection system, a propagation member, a fixture, a program, and a storage medium. [Background technology]

[0002] There are detection devices that transmit ultrasonic waves to a target and detect the reflected waves. There is a need to develop a detection device that does not require couplant liquid. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-278809 Summary of the Invention [Problem to be solved by the invention]

[0004] The problem to be solved by the present invention is to provide a detection device, a detection system, a transmission member, a fixture, a program, and a storage medium that do not require couplant liquid. [Means for solving the problem]

[0005] A detection device according to an embodiment includes a detector, a first propagation member, a second propagation member, and a fixing device. The detector includes a plurality of detection elements that transmit and detect ultrasonic waves. The first propagation member is attached to the detector and the ultrasonic waves propagate through it. The second propagation member propagates the ultrasonic waves and is softer than the first propagation member. The fixing device detachably fixes the second propagation member to the first propagation member. [Brief explanation of the drawings]

[0006] [Figure 1] 1A and 1B are a perspective view and a front view illustrating a detection device according to an embodiment. [Figure 2] 4A and 4B are a perspective view and a bottom view showing a second propagation member. [Figure 3] FIG. 4 is a side view illustrating a second propagation member. [Figure 4] 2A and 2B are a bottom view and a side view showing a part of the detection device according to the embodiment. [Figure 5] FIG. 1 is a side view illustrating a detection device according to an embodiment. [Figure 6] 2A and 2B are a bottom view and a side view showing a part of the detection device according to the embodiment. [Figure 7] 1A and 1B are a side view and a perspective view illustrating a detection device according to an embodiment. [Figure 8] FIG. 10 is a side view schematically illustrating another fixing device. [Figure 9] FIG. 2 is a side view showing the tip of the detection device according to the embodiment. [Figure 10] FIG. 2 is a perspective view illustrating a tip of the detection device according to the embodiment. [Figure 11] FIG. 2 is a schematic diagram illustrating a three-dimensional detection result obtained by exploration. [Figure 12] FIG. 1 is a schematic diagram illustrating a detection system according to an embodiment. [Figure 13] FIG. 1 is a schematic diagram illustrating another detection system according to an embodiment. [Figure 14] 1A and 1B are schematic diagrams for explaining an inspection method using a detection device according to an embodiment. [Figure 15] FIG. 2 is a schematic diagram illustrating a part of a detection device according to an embodiment. [Figure 16] 10 is a flowchart showing a method for determining soundness. [Figure 17] FIG. 10 is a schematic diagram illustrating second intensity data. [Figure 18] 5A to 5C are schematic diagrams showing units for replacing a second propagation member. [Figure 19] 10A and 10B are schematic diagrams illustrating the operation of each unit for replacing a second propagation member. [Figure 20] 10A and 10B are schematic diagrams illustrating the operation of each unit for replacing a second propagation member. [Figure 21] FIG. 2 is a schematic diagram illustrating a hardware configuration. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In the present specification and the drawings, elements similar to those already explained are given the same reference numerals and detailed explanations will be omitted as appropriate.

[0008] FIG. 1 is a perspective view illustrating a detection device according to an embodiment. As shown in FIG. 1, the detection device 10 according to the embodiment includes a first propagation member 11, a second propagation member 12, a fixture 13, and a detector 15.

[0009] The detector 15 includes an element array 15a. The element array 15a includes a plurality of detection elements. Each detection element transmits an ultrasonic wave. Each detection element detects a reflected wave of the ultrasonic wave. Here, the transmission of the ultrasonic wave and the detection of the reflected wave by the detector 15 are called probing. The sides of the element array 15a are surrounded by a housing 15h of the detector 15. The sides are in a direction that intersects with the transmission direction of the ultrasonic waves.

[0010] The first propagation member 11 is attached to the detector 15 (housing 15h). The first propagation member 11 is capable of propagating ultrasonic waves. For example, the first propagation member 11 is in contact with the detector 15. Alternatively, another member capable of propagating ultrasonic waves may be provided between the first propagation member 11 and the detector 15.

[0011] The second propagation member 12 is attached to the first propagation member 11 by a fixing device 13. The first propagation member 11 is located between the detector 15 and the second propagation member 12. Ultrasonic waves can propagate through the second propagation member 12. The ultrasonic waves propagated through the first propagation member 11 propagate through the second propagation member 12 and are emitted to the outside of the detection device 10.

[0012] The first propagation member 11 is solid. The first propagation member 11 has sufficient hardness so that substantial deformation does not occur even when the detection device 10 is in operation. This makes it possible to suppress damage to the element array 15a. The second propagation member 12 is gel-like, not liquid. The second propagation member 12 is softer than the first propagation member 11. In other words, the hardness of the second propagation member 12 is less than the hardness of the first propagation member 11. Therefore, the second propagation member 12 deforms more easily than the first propagation member 11. The second propagation member 12 has sufficient softness so that it can deform in accordance with the surface shape of the object to be inspected when the detection device 10 is in operation.

[0013] The fixture 13 fixes the second propagation member 12 in a state where the second propagation member 12 is in contact with the first propagation member 11. The fixture 13 fixes the second propagation member 12 to the first propagation member 11 in a detachable manner.

[0014] In the example of FIG. 1 , the fixing device 13 includes a plate member 13a and a fastener 13b. The plate member 13a includes a first end E1 and a second end E2. The first end E1 is fastened and fixed to the housing 15h by the fastener 13b. The fastener 13b is, for example, a screw. The plate member 13a extends in a direction from the housing 15h toward the second propagation member 12. The second end E2, which is opposite to the first end E1, is bent so that the second propagation member 12 is positioned between the first propagation member 11. A portion of the second propagation member 12 is sandwiched between the second end E2 and the first propagation member 11.

[0015] The plate member 13a may be an elastic plate spring. An elastic force is generated in the plate member 13a in a direction pressing the second transmission member 12 toward the first transmission member 11. Furthermore, instead of the plate member 13a, the second transmission member 12 may be pressed by a linear member such as a hard steel wire. The specific structure of the fixing device 13 can be changed as appropriate as long as it has one end that can be fixed to the housing 15h and the other end that is provided with a pressing member that can press the second transmission member 12 toward the first transmission member 11.

[0016] For example, the first propagation member 11 and the second propagation member 12 include resin. As a specific example, the first propagation member 11 includes acrylic, and the second propagation member 12 includes segmented polyurethane.

[0017] For example, the detector 10 transmits ultrasonic waves to the bonded body and detects the reflected waves. The acoustic impedance of a typical steel plate used for bonding is 4.5×10 7 (Pa·s / m). In order to allow sufficient propagation of ultrasonic waves between the detection device 10 and the bonded body, the acoustic impedance of each of the first propagation member 11 and the second propagation member 12 is set to 1.0×10 5 (Pa·s / m) is greater than 1.0×10 8 It is preferable that the acoustic impedance is smaller than (Pa·s / m). The acoustic impedance can be measured in accordance with JIS A1405-1 (ISO 10534-1). The acoustic impedance may also be measured in accordance with JIS A 1409 (ISO 354).

[0018] In order to suppress deformation of the first propagation member 11, the Rockwell hardness (M scale) of the first propagation member 11 is preferably greater than 80 and less than 110. The Rockwell hardness can be measured in accordance with JIS Z 2245 (ISO 2039-2). In order to enable easy deformation according to the surface shape of the target, the hardness of the second propagation member 12, measured with an Asker rubber hardness tester type F, is preferably greater than 40 and less than 60.

[0019] Here, the direction from the first propagation member 11 to the second propagation member 12 is defined as the Z direction (first direction). A direction intersecting the Z direction is defined as the X direction (second direction). A direction intersecting the ZX plane is defined as the Y direction (third direction). For example, the X direction, Y direction, and Z direction are perpendicular to each other.

[0020] 2(a) and 2(b) are a perspective view and a bottom view showing the second propagation member. As shown in FIGS. 2(a) and 2(b), the second propagation member 12 includes a first portion 12a and a second portion 12b.

[0021] The first portion 12a is located on the outer periphery of the second propagation member 12 and is held down by a fixture 13. The second portion 12b is surrounded by the first portion 12a. The first portion 12a is located around the second portion 12b along the XY plane. For example, the second portion 12b is located at the center of the second propagation member 12.

[0022] The second portion 12b protrudes further in the Z direction than the first portion 12a. For example, as shown in Fig. 2(a), the thickness T2 of the second portion 12b is greater than the thickness T1 of the first portion 12a. The thickness corresponds to the length in the Z direction.

[0023] 3(a) and 3(b) are side views showing the second propagation member. An example of a specific structure of the second propagation member 12 will be described. As shown in FIG. 3(a), the first portion 12a and the second portion 12b each have a first surface S1 and a second surface S2 that intersect with the Z direction. The first portion 12a and the second portion 12b also have a common third surface S3 that intersects with the Z direction. The third surface S3 is located on the opposite side of the first surface S1 and the second surface S2. For example, the first surface S1, the second surface S2, and the third surface S3 are parallel to one another. The position of the first surface S1 in the Z direction is between the position of the second surface S2 in the Z direction and the position of the third surface S3 in the Z direction.

[0024] As another example, as shown in FIG. 3(b), the first portion 12a and the second portion 12b may each have a third surface S3 and a fourth surface S4 that intersect with the Z direction. The third surface S3 is located on the opposite side of the first surface S1. The fourth surface S4 is located on the opposite side of the second surface S2. For example, the first surface S1, the second surface S2, the third surface S3, and the fourth surface S4 are parallel to one another. The position of the first surface S1 in the Z direction and the position of the fourth surface S4 in the Z direction are between the position of the second surface S2 in the Z direction and the position of the third surface S3 in the Z direction.

[0025] 4(a) and 4(b) are a bottom view and a side view showing a part of the detection device according to the embodiment. 5(a) and 5(b) are side views showing the detection device according to the embodiment. 4(a) and 4(b), the first portion 12a is pressed toward the first propagation member 11 by the fixing device 13. As a result, the second propagation member 12 is in close contact with the first propagation member 11 so that there is no gap between the first propagation member 11 and the second propagation member 12. For example, the first portion 12a is deformed, and its thickness is reduced.

[0026] An opening OP is formed in the second end E2 of the plate member 13a. In the example of Figures 4(a) and 4(b), the opening OP is a hole that penetrates the second end E2 in the thickness direction of the second end E2. The thickness direction of the second end E2 is parallel to the Z direction when the second end E2 presses against the second propagation member 12.

[0027] The fixture 13 fixes the second propagation member 12 so that the second portion 12b protrudes in the Z direction further than the first portion 12a and the second end E2. Specifically, the second portion 12b of the second propagation member 12 is inserted into the opening OP. As a result, when the first portion 12a is pressed against the fixture 13, the second portion 12b protrudes in the Z direction further than the second end E2 of the fixture 13, as shown in FIGS. 4(b), 5(a), and 5(b). That is, as shown in FIG. 4(b), the position of the second end E2 in the Z direction is between the position of the second surface S2 in the Z direction and the position of the third surface S3 in the Z direction.

[0028] By having the second portion 12b protrude further than the first portion 12a, the volume of the second portion 12b protruding from the second end E2 of the fixture 13 can be increased. That is, the volume of the second portion 12b that deforms to follow the surface shape of the target can be increased. This makes it easier for the second propagation member 12 to fill the space between the first propagation member 11 and the target.

[0029] 6(a) and 6(b) are bottom views showing a part of the detection device according to the embodiment. As shown in Fig. 6(a), the opening OP may be slit-shaped and extend in one direction. As shown in Fig. 6(b), the plate member 13a may be made of a plurality of wire rods W. The opening OP is formed in a position where no wire rods W are provided.

[0030] 7(a) and 7(b) are a side view and a perspective view showing the detection device according to the embodiment. The fixing device 13 detachably fixes the second propagation member 12 to the first propagation member 11. In other words, by using the fixing device 13, it is possible to switch between a state in which the second propagation member 12 is fixed to the first propagation member 11 and a state in which the second propagation member 12 is not fixed to the first propagation member 11.

[0031] For example, as shown in FIGS. 7(a) and 7(b), the plate member 13a can be removed from the housing 15h by loosening the fastener 13b. When the plate member 13a is removed from the housing 15h, the second end E2 moves away from the first propagation member 11. That is, the distance between the second end E2 and the first propagation member 11 increases. This removes the pressure from the second end E2 to the second propagation member 12. The second propagation member 12 can then be removed and a new, separate second propagation member 12 can be attached.

[0032] Alternatively, the plate member 13a may be a plate spring. In this case, the second end E2 may be moved away from the first propagation member 11 by deforming the plate member 13a. The second end E2 no longer presses against the second propagation member 12, and the second propagation member 12 becomes removable.

[0033] 8(a) to 8(d) are side views schematically showing another fixing tool. Figures 8(a) and 8(b) show a state in which the second propagation member 12 is fixed to the first propagation member 11. Figures 8(c) and 8(d) show a state in which the second propagation member 12 is not fixed to the first propagation member 11. Figures 8(b) and 8(d) show the fixture 13 as viewed from a perspective opposite to that of Figures 8(a) and 8(c), respectively.

[0034] As shown in FIGS. 8(a) to 8(d), a slit S may be provided in the plate member 13a. The slit S extends along the Z direction. When the fastener 13b is loosened, the plate member 13a becomes slidable along the direction in which the slit S extends. When the plate member 13a slides, as shown in FIGS. 8(c) and 8(d), the second end E2 of the plate member 13a moves away from the first propagation member 11. The second end E2 no longer presses against the second propagation member 12, and the second propagation member 12 becomes removable.

[0035] The advantages of the embodiment will be described. When performing an inspection using ultrasound, it is preferable that there is no air between the detection device and the object. This improves the propagation of ultrasound and makes it easier to detect reflected waves. As a result, for example, the accuracy of the inspection is improved. Conventionally, couplant liquid with good acoustic impedance has been used to improve the propagation of ultrasound. By placing the detection device on an object to which couplant liquid has been applied in advance, the space between the detection device and the object is filled with couplant liquid.

[0036] When using couplant liquid, it is necessary to wipe it off after the inspection. If the couplant liquid remains on the object, the surface of the object may be altered (e.g., rusted) or deteriorated. However, wiping off the couplant liquid takes time. To shorten the inspection time, a technology that can eliminate the application and wiping of couplant liquid is needed.

[0037] To address this issue, the detection device 10 according to the embodiment can use a second propagation member 12 instead of couplant liquid. The second propagation member 12 is softer than the first propagation member 11 and can deform in accordance with the surface shape of the target when the detection device 10 is in operation. When the second propagation member 12 deforms and fills the space between the first propagation member 11 and the target, the amount of air between the first propagation member 11 and the target can be reduced.

[0038] On the other hand, the second propagation member 12 is soft and therefore easily scratched. Furthermore, foreign matter (such as metal powder) adhering to the object can easily become lodged in the second propagation member 12. If an abnormality such as damage or the adhesion of foreign matter occurs on the surface of the second propagation member 12, it becomes difficult for ultrasonic waves to propagate between the second propagation member 12 and the object. This reduces the accuracy of ultrasonic wave detection. For this reason, it is preferable that the second propagation member 12 be replaced at an appropriate time. In the detection device 10, the second propagation member 12 is detachably fixed by a fixing device 13. This allows the second propagation member 12 to be easily replaced.

[0039] According to the embodiment, it is possible to provide a detection device 10 in which couplant liquid is not required and the second propagation member 12 can be easily replaced.

[0040] 9(a) and 9(b) are side views showing the tip of the detection device according to the embodiment. 9(a) shows the state before the second propagation member 12 comes into contact with the object O. FIG. 9(b) shows the state after the second propagation member 12 comes into contact with the object O. As shown in FIGS. 9(a) and 9(b), the second portion 12b of the second propagation member 12 is deformed and crushed when it comes into contact with the object O. The thickness of the second portion 12b becomes smaller.

[0041] The second portion 12b deforms so that the fixing device 13 also comes into contact with the object O. The fixing device 13 is harder than the second propagation member 12 and has sufficient rigidity. Therefore, unlike the second propagation member 12, the fixing device 13 does not substantially deform even when it comes into contact with the object O. In addition, the first portion 12a, which is already held down by the fixing device 13, is less likely to deform than the second portion 12b. The fixing device 13 comes into contact with the object O, making it easier to determine the distance D between the first propagation member 11 and the object O. This makes it possible to prevent the distance D from varying depending on the degree of deformation of the second propagation member 12.

[0042] The fixture 13 has a first contact surface C1 that contacts the object O. The first contact surface C1 faces the Z direction. For example, the second end E2 of the plate member 13a includes the first contact surface C1. In this example, the first contact surface C1 is configured as a single surface. The first contact surface C1 may also be configured as multiple lines or multiple points. The first propagation member 11 has a second contact surface C2 that contacts the second propagation member 12. Preferably, the first contact surface C1 is parallel to the second contact surface C2. For example, the first contact surface C1 and the second contact surface C2 are parallel to the X direction and Y direction, which are the arrangement directions of multiple detection elements described below.

[0043] When the second portion 12b comes into contact with the target O and is crushed, the first contact surface C1 of the fixing device 13 comes into contact with the target O. When the first contact surface C1 and the second contact surface C2 are parallel, the distance D is determined by the thickness T3 of the deformed first portion 12a and the thickness T4 of the second end E2. For example, the distance D can be set to a predetermined value by pressing the detection device 10 toward the target O until the first contact surface C1 comes into surface contact with the target O. Furthermore, the variation in the distance D at each point in the XY plane can be reduced. This reduces the variation in the reflected wave intensity between each probe and also reduces the variation in the reflected wave intensity at each point in the XY plane.

[0044] Note that "parallel" does not necessarily mean strict parallelism, but may also include variations in the manufacturing process, for example. There may be a tilt between the first contact surface C1, the second contact surface C2, and the arrangement direction, as long as it does not cause problems in detection. For example, if the angle between any two of the first contact surface C1, the second contact surface C2, and the arrangement direction is greater than -5 degrees and less than +5 degrees, the two can be considered to be substantially parallel.

[0045] In the following, the structure of the detector 15, the detection system including the detection device 10, the inspection using ultrasonic waves, and the determination of the soundness of the detection device 10 will be specifically described.

[0046] (Detector structure) FIG. 10 is a perspective view illustrating the tip of the detection device according to the embodiment. As shown in Fig. 10, an element array 15a is provided inside the detector 15. The element array 15a includes a plurality of detection elements 15b. The detection elements 15b are, for example, transducers that emit ultrasonic waves at a frequency of 1 MHz or more and 100 MHz or less. The plurality of detection elements 15b are arranged along the X and Y directions.

[0047] 10 shows how a bonded structure 50 is inspected. The bonded structure 50 is produced by spot welding a metal member 51 (first member) and a metal member 52 (second member) at a weld 53. At the weld 53, a part of the metal member 51 and a part of the metal member 52 melt, mix, and solidify to form a solidified portion 54. Each detecting element 15b transmits ultrasonic waves US toward the bonded structure 50 and receives reflected waves RW from the bonded structure 50.

[0048] As a more specific example, as shown in FIG. 10, one detection element 15b transmits ultrasonic waves US toward the welded portion 53. A portion of the ultrasonic waves US is reflected by the upper or lower surface of the bonded body 50. Each of the multiple detection elements 15b receives (detects) this reflected wave RW. Each detection element 15b transmits ultrasonic waves US in sequence, and each reflected wave RW is detected by the multiple detection elements 15b. As a result, a detection result of the reflected wave indicating the state of the vicinity of the welded portion 53 is obtained.

[0049] FIG. 11 is a schematic diagram illustrating a three-dimensional detection result obtained by the exploration. In the scanning, as described above, each detector element 15b sequentially transmits ultrasonic waves, and the reflected waves are detected by the other detector elements 15b. In the specific example shown in FIG. 11, 8 × 8 = 64 detector elements 15b are provided. In this case, the 64 detector elements 15b sequentially transmit ultrasonic waves. Each detector element 15b repeatedly detects the reflected waves 64 times. Each detector element 15b outputs 64 detection results of the reflected wave intensity distribution in the Z direction. The 64 reflected wave intensity distributions output from one detector element 15b are summed. The summed intensity distribution becomes the intensity distribution at the coordinates where one detector element 15b is provided for one scanning. Similar processing is performed on the detection results from each of the 64 detector elements 15b. As a result, the intensity distribution of the reflected waves in the Z direction is generated at each point in the XY plane. FIG. 11 shows an image of this three-dimensional intensity distribution. In Figure 11, areas with high brightness are areas where the reflected ultrasonic wave intensity is high. Three-dimensional intensity distribution data is used for the inspection.

[0050] (Detection System) FIG. 12 is a schematic diagram illustrating a detection system according to an embodiment. The detection system 1a includes a detection device 10 and a processing device 90. In the detection system 1a, the detection device 10 has a shape that can be held by hand. An inspector holding the detection device 10 brings the second propagation member 12 at the tip of the detection device 10 into contact with the welded portion 53 to inspect the welded portion 53. At this time, the inspector presses the second propagation member 12 against the joined body 50 so that the second propagation member 12 deforms to follow the shape of the welded portion 53. For example, the inspector presses the second propagation member 12 against the joined body 50 until the first contact surface C1 of the fixture 13 comes into contact with the joined body 50. With the detection device 10 in contact with the welded portion 53, the inspector performs an inspection.

[0051] The processing device 90 controls the element array 15a. During the exploration, the processing device 90 transmits an electric signal to each of the detection elements 15b, and each of the detection elements 15b transmits an ultrasonic wave. Each of the detection elements 15b outputs an electric signal in response to the detection of a reflected wave. The magnitude of the electric signal corresponds to the intensity of the reflected wave. Each of the detection elements 15b transmits intensity data indicating the intensity of the detected reflected wave to the processing device 90. The processing device 90 performs various processes based on the intensity data.

[0052] FIG. 13 is a schematic diagram illustrating another detection system according to an embodiment. 13 includes a robot 20 and a processing device 90. The robot 20 includes a manipulator 21 and a control device 22.

[0053] 13, the manipulator 21 is a vertical articulated type. The manipulator 21 may be a horizontal articulated type or a parallel link type. The control device 22 controls the operation of the manipulator 21. The control device 22 is a so-called robot controller.

[0054] 13, a detection device 10 and an imaging device 25 are provided at the tip of the manipulator 21. The imaging device 25 photographs the welded members and acquires an image. A processing device 90 extracts weld marks from the acquired image and detects the position of the welded portion 53. A control device 22 operates the manipulator 21 so that the tip of the detection device 10 comes into contact with the welded portion 53.

[0055] (inspection) FIG. 14 is a schematic diagram for explaining an inspection method using the detection device according to the embodiment. The detection results (intensity data) of the reflected waves obtained by the detection system 1a or 1b shown in Fig. 12 or 13 can be applied to the inspection of the welded portion 53. The processing device 90 may use the intensity data to perform the following processes.

[0056] 14(a), part of the ultrasonic waves US is reflected by the upper surface 51a of the metal member 51 or the upper surface 53a of the welded portion 53. Another part of the ultrasonic waves US enters the bonded body 50 and is reflected by the lower surface 51b of the metal member 51 or the lower surface 53b of the welded portion 53.

[0057] The positions of the upper surface 51a, the lower surface 51b, the upper surface 53a, and the lower surface 53b in the Z direction are different from one another. That is, the distances in the Z direction between these surfaces and the detection element 15b are different from one another. When the detection element 15b detects the waves reflected from these surfaces, peaks of the intensity of the reflected waves are detected. By calculating the time from transmitting the ultrasonic waves US until each peak is detected, it is possible to determine from which surface the ultrasonic waves US are being reflected.

[0058] 14(b) and 14(c) are graphs illustrating the relationship between the time after transmission of ultrasonic waves US and the intensity of the reflected waves RW. Here, the intensity of the reflected waves RW is expressed as an absolute value. The graph in FIG. 14(b) illustrates the detection results of the reflected waves RW from the upper surface 51a and the lower surface 51b of the metal member 51. The graph in FIG. 14(c) illustrates the detection results of the reflected waves RW from the upper surface 53a and the lower surface 53b of the welded portion 53.

[0059] 14(b) and 14(c), peak Pe10 is based on the reflected waves RW from the first propagation member 11 and the second propagation member 12. Peak Pe11 is based on the reflected waves RW from the upper surface 51a. Peak Pe12 is based on the reflected waves RW from the lower surface 51b. The times from the transmission of the ultrasonic waves US to the detection of peaks Pe11 and Pe12 correspond to the positions of the upper surface 51a and lower surface 51b of the metal member 51 in the Z direction, respectively.

[0060] Similarly, peak Pe13 is based on the wave RW reflected from the upper surface 53a. Peak Pe14 is based on the wave RW reflected from the lower surface 53b. The times from the transmission of the ultrasonic waves US to the detection of peaks Pe13 and Pe14 correspond to the positions of the upper surface 53a and lower surface 53b of the welded portion 53 in the Z direction, respectively.

[0061] The processing device 90 determines whether a peak Pe12 exists in the reflected wave intensity distribution in the Z direction at each point within the first plane. The first plane is parallel to the X and Y directions. As a specific example, the processing device 90 detects peaks within a predetermined range in the Z direction within which the peak Pe12 can be detected. The predetermined range is set in advance depending on the length of the first propagation member 11 in the Z direction, the distance between the first propagation member 11 and the metal member 51, and other factors. The processing device 90 compares the intensity of the peak with a predetermined threshold. If the peak exceeds the threshold, the processing device 90 determines that the peak is peak Pe12. The presence of peak Pe12 indicates that the lower surface 51b is present at the peak position, and that the metal members 51 and 52 are not joined. The processing device 90 determines that the point at which peak Pe12 is detected is not joined. The processing device 90 sequentially determines whether each point within the first plane is joined. A set of points determined to be joined corresponds to the weld 53. For example, the inspection checks whether the welded portion 53 is formed. The inspection also checks the diameter of the welded portion 53, whether the diameter is sufficient, and so on.

[0062] The intensity of the reflected wave may be expressed in any manner. For example, the reflected wave intensity output from detection element 15b includes positive and negative values depending on the phase. Various processes may be performed based on the reflected wave intensity, including positive and negative values. The reflected wave intensity, including positive and negative values, may be converted to an absolute value. The average value of the reflected wave intensity may be subtracted from the reflected wave intensity at each time. Alternatively, a weighted average value, weighted moving average value, or the like of the reflected wave intensity may be subtracted from the reflected wave intensity at each time. Even when the results of performing these processes on the reflected wave intensity are used, the various processes described herein can be performed.

[0063] (Soundness determination) The processing device 90 may also determine the soundness of the detection device 10. Specifically, the processing device 90 appropriately determines whether the reflected wave is properly detected. If the second propagation member 12 is improperly fixed by the fixture 13, or if there is a scratch or foreign matter on the surface (second surface S2) of the second propagation member 12, the reflected wave will not be properly detected. Improper detection of the reflected wave can cause erroneous inspection results.

[0064] FIG. 15 is a schematic diagram illustrating a part of the detection device according to the embodiment. When the detection device 10 is brought into contact with the object of inspection, a foreign substance F may adhere to the second propagation member 12, as shown in FIG. 15 . The foreign substance F is, for example, a fine metal particle. When the foreign substance F adheres to the second propagation member 12, the ultrasonic wave US is scattered by the foreign substance F on the surface of the second propagation member 12. The reflected wave RW traveling toward the element array 15a decreases, and the intensity of the reflected wave detected by the element array 15a decreases. If a scratch is present on the surface in addition to the foreign substance F, the ultrasonic wave US is also scattered by the scratch. If an abnormality such as a foreign substance or a scratch is present on the surface, the intensity of the detected reflected wave decreases. If the detection result obtained at this time is used to inspect the weld 53, an appropriate inspection result for the weld 53 cannot be obtained. In determining the soundness, the processing device 90 determines whether there is an abnormality on the surface of the second propagation member 12.

[0065] FIG. 16 is a flowchart showing a method for determining the soundness. The detection device 10 performs an inspection (step St1). Through the inspection, a plurality of first intensity data are acquired by the plurality of detection elements 15b, respectively. The inspection may be performed on an object to be inspected, or on a sample (test piece) for determining soundness. The processing device 90 receives the plurality of first intensity data. The processing device 90 generates second intensity data using at least some of the plurality of first intensity data (step St2). The second intensity data is a sum of at least some of the plurality of intensity data. The second intensity data may be an average or weighted average of at least some of the plurality of intensity data.

[0066] FIG. 17 is a schematic diagram illustrating the second intensity data. In Figure 17, the horizontal axis represents the time that has elapsed since the ultrasonic wave was transmitted. The elapsed time corresponds to the position in the Z direction. The vertical axis represents the intensity of the reflected wave at each time. In Figure 17, the intensity is represented as an absolute value.

[0067] As a specific example, each time one detecting element 15b shown in FIG. 10 transmits an ultrasonic wave US, 64 detecting elements 15b detect the reflected wave RW. When each of the 64 detecting elements 15b transmits an ultrasonic wave US, a total of 4096 detection results (first intensity data) are obtained. The processing device 90 sums the intensity distributions of the 4096 pieces of first intensity data in the Z direction. This generates second intensity data.

[0068] The processing device 90 detects the intensity of a portion of the reflected wave in the second intensity data (step St3). For example, as shown in FIG. 17, a range Ra in the Z direction in which the reflected wave from the second surface S2 can be detected is set in advance. The processing device 90 compares the intensity of the reflected wave in the range Ra with a preset threshold value (step St4). If the intensity is equal to or greater than the threshold value, the processing device 90 determines that the second propagation member 12 is normal. If the intensity is less than the threshold value, the processing device 90 determines that the second propagation member 12 is abnormal.

[0069] As a specific example, the processing device 90 detects the peak Pe with the greatest intensity within the range Ra, as shown in FIG. 17. The processing device 90 compares the intensity of the peak Pe with a threshold value Th. When the intensity of the peak Pe is equal to or greater than the threshold value Th, the processing device 90 determines that the second propagation member 12 is normal. When the intensity of the peak Pe is less than the threshold value Th, the processing device 90 determines that the second propagation member 12 is abnormal. In addition to the peak intensity, the processing device 90 may compare the integrated value or average value of the intensity within the range Ra with the threshold value Th to determine the state of the second propagation member 12.

[0070] If the second propagation member 12 is determined to be abnormal, the processing device 90 transmits first information (step St5). The first information indicates that the second propagation member 12 is abnormal. By transmitting the first information, the inspector can be prompted to replace the second propagation member 12 or inspect the detection device 10. After transmitting the first information, or when the second propagation member 12 is normal, the processing device 90 ends the determination.

[0071] The specific details of the determination process can be changed as appropriate. For example, when the second propagation member 12 is determined to be normal, the processing device 90 may transmit information indicating that there is no abnormality in the second propagation member 12. The second intensity data may also be generated using only a portion of the multiple first intensity data. For example, if the foreign matter F mainly adheres to the outer periphery of the second surface S2, the second intensity data may be generated using the first intensity data from the detection elements 15b located on the outer periphery of the element array 15a.

[0072] The range Ra is set based on the length of the first propagation member 11 in the Z direction and the distance between the first propagation member 11 and the assembly 50. The threshold value Th is set based on the intensity of the reflected wave from the second surface S2 when the second propagation member 12 is in a normal state and the variance in the detection results of the reflected wave intensity. As shown in FIG. 9, by determining the distance D between the first propagation member 11 and the object O, peaks of the reflected wave from the second surface S2 tend to appear in the range Ra. This improves the accuracy of the soundness determination.

[0073] When the first information is transmitted from the processing device 90, the user replaces the second propagation member 12. The detection system 1a or 1b may perform a health determination after the second propagation member 12 has been replaced and before the inspection. This allows the replaced second propagation member 12 to be checked for any abnormalities. The processing device 90 may determine the health at a predetermined time, when a predetermined period of time has elapsed since the last inspection, or when the inspection is performed.

[0074] The second propagation member 12 may be replaced automatically. Each unit for automatically replacing the second propagation member 12 will be described below.

[0075] FIG. 18 is a schematic diagram showing each unit for replacing the second propagation member 12. As shown in FIG. The detection system 1a or 1b includes a release unit 31, a pushing unit 32, and a conveying unit 33, as shown in FIG.

[0076] The release unit 31 includes a bar 31a, a drive unit 31x, and a drive unit 31y. The bar 31a is a member extending in a direction intersecting the Z direction. The drive unit 31x moves the bar 31a in the X direction. The drive unit 31y moves the bar 31a and the drive unit 31x in the Y direction along a guide 31g. The bar 31a is hooked onto the plate member 13a and deforms the plate member 13a. This releases the second transmission member 12 from the fixing device 13. The specific shape of the bar 31a is arbitrary as long as it extends in one direction. For example, the tip of the bar 31a may be curved and hook-shaped.

[0077] The pushing unit 32 includes a bar 32a, a pushing portion 32b, a driving portion 32x, and a driving portion 32z. The bar 32a is a member extending in a direction intersecting the Z direction. The pushing portion 32b is attached to the tip of the bar 32a via the driving portion 32z. The driving portion 32z moves the pushing portion 32b in the Z direction. The driving portion 32x moves the bar 32a in the X direction.

[0078] With the pushing portion 32b positioned below the second propagation member 12 placed on the second end E2, the pushing portion 32b moves in the Z direction. The pushing portion 32b comes into contact with the second propagation member 12. The second propagation member 12 is pushed out by the pushing portion 32b and lifts up from the second end E2. This makes it possible to remove the second propagation member 12 from the second end E2.

[0079] The transport unit 33 includes a holder 33a, a drive unit 33x, and a drive unit 33z. The holder 33a extends in a direction intersecting the Z direction. The tip of the holder 33a has a structure capable of holding the second propagation member 12. In the example of FIG. 18, a claw is provided at the tip of the holder 33a. The holder 33a holds the second propagation member 12 by hooking the second propagation member 12 onto the claw. An air intake port may be provided at the tip of the holder 33a, and the second propagation member 12 may be held by vacuum suction.

[0080] The driver 33x moves the holder 33a in the X direction. The driver 33z moves the driver 33x and the holder 33a in the Z direction. The transport unit 33 holds and transports the second propagation member 12. The transport unit 33 transports one new second propagation member 12 from the placement location where the new second propagation member 12 is placed to the second end E2.

[0081] For example, the driving units 31x, 32x, and 33x include air cylinders, and the driving units 31y, 32z, and 33z include motors.

[0082] 18, the release unit 31, the push-out unit 32, and the transport unit 33 may be configured as a single exchange device 30. Alternatively, the release unit 31, the push-out unit 32, and the transport unit 33 may be provided independently of each other. In this case, the movement directions of the bar 31a, the bar 32a, and the holder 33a may be different from each other.

[0083] 19(a) to 19(d) and 20(a) to 20(d) are schematic diagrams showing the operation of each unit for replacing the second propagation member. As shown in FIG. 19(a), the bar 31a of the release unit 31 is inserted between the first propagation member 11 and the plate member 13a. As shown in FIG. 19(b), the release unit 31 moves the bar 31a in a direction away from the first propagation member 11. This deforms the plate member 13a, and the second propagation member 12 is released from its fixed position. The second propagation member 12 moves away from the first propagation member 11. The push-out unit 32 positions the tip of the push-out portion 32b below the second end E2 and raises it. As a result, the second propagation member 12 is pushed out from the second end E2, as shown in FIG. 19(c).

[0084] 19(d), the conveying unit 33 clamps the second portion 12b with the holding portion 33a and holds the extruded second propagation member 12. When the opening OP of the second end E2 is slit-shaped as shown in FIG. 6(a), the amount of extrusion of the second propagation member 12 by the extrusion unit 32 may be smaller than the example shown in FIG. 19(b). This is because the second propagation member 12 can be removed from the second end E2 by sliding the second propagation member 12 along the direction in which the opening OP extends.

[0085] As shown in FIG. 20(a), the transport unit 33 transports the second propagation member 12 it is holding to another location. As shown in FIG. 20(b), the transport unit 33 transports a new, separate second propagation member 12 onto the second end E2. The new second propagation member 12 is placed on the pusher 32b. As shown in FIG. 20(c), the pusher unit 32 lowers the pusher 32b and places the second propagation member 12 onto the second end E2. As shown in FIG. 20(d), the release unit 31 brings the bar 31a closer to the first propagation member 11 to release the deformation of the plate member 13a. Through the above operations, the second propagation member 12 is replaced.

[0086] The processing device 90 controls the operations of the release unit 31, the push-out unit 32, and the transport unit 33. For example, when the processing device 90 determines that the second propagation member 12 is abnormal, it causes each unit to replace the second propagation member 12. This makes it possible to obtain more appropriate detection results of the reflected wave.

[0087] FIG. 21 is a schematic diagram showing the hardware configuration. 21 can be used as the processing device 90. The computer 90a includes a CPU 91, a ROM 92, a RAM 93, a storage device 94, an input interface 95, an output interface 96, and a communication interface 97.

[0088] The ROM 92 stores a program that controls the operation of the computer 90a. The ROM 92 stores programs necessary for the computer 90a to perform each of the above-mentioned processes. The RAM 93 functions as a storage area in which the programs stored in the ROM 92 are expanded.

[0089] The CPU 91 includes a processing circuit. The CPU 91 uses a RAM 93 as a work memory and executes a program stored in at least one of a ROM 92 and a storage device 94. During program execution, the CPU 91 controls each component via a system bus 98 and executes various processes.

[0090] The storage device 94 stores data necessary for executing the program and data obtained by executing the program.

[0091] The input interface (I / F) 95 connects the processing device 90 and the input device 95a. The input I / F 95 is, for example, a serial bus interface such as USB. The CPU 91 can read various data from the input device 95a via the input I / F 95.

[0092] The output interface (I / F) 96 connects the processing device 90 and the output device 96a. The output I / F 96 is, for example, a video output interface such as a Digital Visual Interface (DVI) or a High-Definition Multimedia Interface (HDMI (registered trademark)). The CPU 91 can transmit data to the output device 96a via the output I / F 96 and cause the output device 96a to display an image.

[0093] The communication interface (I / F) 97 connects the processing device 90 to a server 97a external to the processing device 90. The communication I / F 97 is, for example, a network card such as a LAN card. The CPU 91 can read various data from the server 97a via the communication I / F 97.

[0094] The storage device 94 includes one or more selected from a hard disk drive (HDD) and a solid state drive (SSD). The input device 95a includes one or more selected from a mouse, a keyboard, a microphone (voice input), and a touchpad. The output device 96a includes one or more selected from a monitor and a projector. A device having the functions of both the input device 95a and the output device 96a, such as a touch panel, may also be used.

[0095] The various data processing operations described above may be recorded as a computer-executable program on a magnetic disk (such as a flexible disk or hard disk), an optical disk (such as a CD-ROM, CD-R, CD-RW, DVD-ROM, DVD±R, or DVD±RW), a semiconductor memory, or other non-transitory computer-readable storage medium.

[0096] For example, information recorded on a recording medium can be read by a computer (or an embedded system). The recording medium may have any recording format (storage format). For example, a computer reads a program from the recording medium and causes a CPU to execute instructions written in the program based on the program. The computer may acquire (or read) the program via a network.

[0097] According to the detection device 10, detection system 1a, or detection system 1b described above, couplant liquid is not required, and the second propagation member 12 can be easily replaced. By using the second propagation member 12 or the fixing device 13 according to the embodiment, couplant liquid is not required. The second propagation member 12 according to the embodiment is easily replaced. Furthermore, by using a program that causes a computer to replace the second propagation member 12, more appropriate detection results can be obtained.

[0098] Although several embodiments of the present invention have been described above, these embodiments are presented by way of example only and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, modifications, etc. can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, as well as within the scope of the invention and its equivalents as set forth in the claims. Furthermore, the above-described embodiments can be implemented in combination with each other. [Explanation of symbols]

[0099] 1a, 1b: detection system, 10: detection device, 11: first transmission member, 12: second transmission member, 12a: first part, 12b: second part, 13: fixture, 13a: plate member, 13b: fastener, 15: detector, 15a: element array, 15b: detection element, 15h: housing, 20: robot, 21: manipulator, 22: control device, 25: imaging device, 30: exchange device, 31: release unit, 31a: bar, 31g: guide, 31x: drive unit, 31y: drive unit, 32: push-out unit, 32a: bar, 32b: push-out unit, 32x: drive unit, 32z: drive unit, 33: transport unit, 33a: holding unit, 33x: drive unit, 33z: driving unit, 50: joined body, 51: metal member, 51a: upper surface, 51b: lower surface, 52: metal member, 53: welded portion, 53a: upper surface, 53b: lower surface, 54: solidified portion, 90: processing device, 90a: computer, 91: CPU, 92: ROM, 93: RAM, 94: storage device, 95: input interface, 95a: input device, 96: output interface, 96a: output device, 97: communication interface, 97a: server, 98: system bus, 223: propagation unit, C1: first contact surface, C2: second contact surface, D: distance, E1: first end, E2: second end, F: foreign object, H: hole, O: object, Pe: peak, Pe10 to Pe14: peaks, RW: reflected wave, Ra: range, S: slit, S1: first surface, S2: second surface, S3: third surface, S4: fourth surface, T1 to T4: thickness, Th: threshold, US: ultrasonic

Claims

1. A detector comprising multiple detection elements configured to transmit ultrasonic waves toward a target and detect reflected waves, A first propagation member attached to the detector and configured to propagate the ultrasonic waves, A second propagation member through which the ultrasonic waves propagate and which is softer than the first propagation member, A fixing device configured to detachably fix the second propagation member to the first propagation member, Equipped with, A portion of the second propagation member protrudes beyond the fixing device in a first direction from the first propagation member toward the second propagation member, The fixing device includes a first contact surface configured to contact the object, The first propagation member includes a second contact surface configured to contact the second propagation member when the second propagation member is fixed by the fastener, A detection device wherein, when a portion of the second propagation member comes into contact with the object, the portion of the second propagation member deforms to conform to the surface shape of the object, reducing its thickness in the first direction, so that the first contact surface comes into contact with the surface of the object in a state where it is substantially parallel to the second contact surface.

2. A detector comprising a plurality of detection elements configured to transmit ultrasonic waves toward an object and detect reflected waves, A first propagation member attached to the detector and configured to propagate the ultrasonic waves, A second propagation member through which the ultrasonic waves propagate, which is softer than the first propagation member, and whose hardness, as measured by an Asker rubber hardness tester type F, is greater than 40 and less than 60, A fixing device configured to detachably fix the second propagation member to the first propagation member, Equipped with, A portion of the second propagation member protrudes beyond the fixing device in a first direction from the first propagation member toward the second propagation member, The fixing device includes a first contact surface configured to contact the object, A detection device wherein, when a portion of the second propagation member comes into contact with the object, the portion of the second propagation member deforms to conform to the surface shape of the object, reducing its thickness in the first direction, thereby causing the first contact surface to come into contact with the surface of the object.

3. The first propagation member includes a second contact surface configured to contact the second propagation member, The detection device according to claim 2, wherein the first contact surface contacts the surface of the target in a manner substantially parallel to the second contact surface.

4. The second propagation member is The first part is held in place by the aforementioned fixing device, A second portion surrounded by the first portion, protruding beyond the first portion and in contact with the object, Includes, The detection device according to any one of claims 1 to 3, wherein the second part deforms to conform to the surface shape of the object when it comes into contact with the object, thereby reducing its thickness.

5. The detector includes a housing that houses the plurality of detection elements, The detection device according to any one of claims 1 to 4, wherein the fixing device includes a pressing member, one end of which is fixable to the housing and the other end of which presses the second propagation member toward the first propagation member.

6. The detection device according to claim 5, wherein the fixing device is detachable from the housing.

7. The detection device according to claim 5 or 6, wherein the fixing device can move in the first direction relative to the first propagation member to increase the distance between the pressing member and the first propagation member.

8. The detection device according to claim 5 or 6, wherein the fixing device can increase the distance between the pressing member and the first propagation member by rotating the fixing device around one end of the pressing member.

9. The detection device according to any one of claims 1 to 8, wherein the acoustic impedance of the second propagation member is greater than 1.0 × 10⁵ (Pa·s / m) and less than 1.0 × 10⁸ (Pa·s / m).

10. The detection device according to any one of claims 1 to 9, wherein the target is a welded joint formed by welding a plurality of members.

11. A detection device according to any one of claims 1 to 10, A processing device configured to determine an abnormality in the second propagation member based on intensity data indicating the intensity of the reflected wave detected by the plurality of detection elements, A detection system equipped with [the following features].

12. A detection device according to any one of claims 1 to 10, A robot including a manipulator, The detection device is a detection system provided at the tip of the manipulator.

13. The detection system according to claim 11 or 12, further comprising an exchange device configured to remove the second propagation member from the fixing device and to supply another second propagation member.

14. A release unit configured to release the fixing of the second propagation member by the fixing device, An extrusion unit configured to push out the second propagation member placed on the fixing device, A transport unit configured to transport the second propagation member, The detection system according to claim 11 or 12, further comprising the above.

15. A detector including a plurality of detection elements that transmit ultrasonic waves and detect reflected waves, A first propagation member attached to the detector, through which the ultrasonic waves propagate, and A second propagation member is attached to the first propagation member, through which the ultrasonic waves propagate, and is softer than the first propagation member. A detection device including, A replacement device configured to replace the second propagation member, A processing device configured to determine an abnormality in the second propagation member based on intensity data indicating the intensity of the reflected wave detected by the plurality of detection elements, A detection system equipped with [the following features].

16. The detection system according to claim 15, wherein the detection device includes a fixing device configured to detachably fix the second propagation member to the first propagation member.

17. A release unit configured to release the fixing of the second propagation member by the fixing device, An extrusion unit configured to push out the second propagation member placed on the fixing device, A transport unit configured to transport the second propagation member, The detection system according to claim 16, further comprising the above.

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