Melt molding apparatus

Abstract

To provide a melt molding apparatus for a vibrator.SOLUTION: A melt molding apparatus includes a stage having a flat mounting surface. The melt molding apparatus includes a melt molding die that is disposed on the placement surface and includes a flat upper surface and a hole formed in a part of the upper surface about a central axis perpendicular to the upper surface. The melt molding apparatus includes a burner disposed above the central axis so as to face the hole and configured to be capable of generating a flame toward the hole. The melt molding apparatus includes an upper surface member disposed on an upper surface of the melt-molding mold and having a first opening corresponding to the hole.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present specification relates to a melt-molding apparatus for a transducer. [Background technology]

[0002] Patent Document 1 discloses a Bird-bath Resonator Gyroscope (BRG) that uses fused silica as a vibrator, as a gyro capable of achieving high accuracy. Specifically, a fusion molding die is prepared with a hole formed in part of its upper surface. The hole is formed in part of the upper surface, centered on a central axis perpendicular to the upper surface of the molding die. A workpiece (e.g., a quartz plate) is placed so as to close the hole, the lower surface of the workpiece is decompressed, and the upper surface of the workpiece is heated with a burner. A hemispherical vibrator can be produced by melting and deforming the workpiece so that it fills the hole. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2018 / 079129 Summary of the Invention [Problem to be solved by the invention]

[0004] To create a vibrator with high symmetry about the central axis of the hole, it is necessary to input heat with a concentric temperature distribution about the central axis of the hole. However, burner flames tend to have low circularity in the cross section perpendicular to the radiation direction. This is because the flame direction and flame diameter at the outer edge of the flame constantly fluctuate (finely pulsate) due to fluctuations in the mixture state and flow rate of the combustion gas. For this reason, it has sometimes been difficult to create a vibrator with high symmetry. [Means for solving the problem]

[0005] The melt-forming apparatus disclosed in this specification includes a stage with a flat mounting surface. The melt-forming apparatus is arranged on the mounting surface and includes a melt-forming mold having a flat upper surface and a hole formed in part of the upper surface centered on a central axis perpendicular to the upper surface. The melt-forming apparatus includes a burner arranged above the central axis facing the hole and configured to generate a flame toward the hole. The melt-forming apparatus is arranged on the upper surface of the melt-forming mold and includes an upper surface member having a first opening corresponding to the hole.

[0006] In the above configuration, an upper surface member having a first opening is placed on the upper surface of the melt-forming mold. Then, a flame is applied to the hole in the melt-forming mold through the first opening. This allows the outer edge of the flame to be blocked by the upper surface member, and only the inner part of the flame to be applied to the hole. Since the influence of the pulsating outer edge of the flame can be suppressed, the flame confined in the first opening can have a highly circular cross section. This improves the asymmetry of the flame temperature distribution with respect to the central axis. Since heat can be input with a concentric temperature distribution with respect to the central axis, it is possible to produce a vibrator with high symmetry. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a schematic cross-sectional view of a melt-molding apparatus 1 of Example 1. FIG. [Figure 2] 1 is a top view of a melt-molding apparatus 1 according to a first embodiment. [Figure 3] FIG. 10 is a flow chart illustrating a manufacturing process of a vibrator. [Figure 4] FIG. 10 is an enlarged cross-sectional view of the vicinity of the hole 20h during the heating process. [Figure 5] FIG. 10 is a cross-sectional view showing a modified example of the first embodiment. [Figure 6] FIG. 10 is a cross-sectional view showing a modified example of the first embodiment. [Figure 7] FIG. 10 is a cross-sectional view showing a modified example of the first embodiment. [Figure 8] FIG. 10 is a cross-sectional side view of a melt-molding apparatus 201 of Example 2. [Figure 9]FIG. 10 is a top view of a melt-molding apparatus 201 according to a second embodiment. [Figure 10] FIG. 10 is a cross-sectional view showing a modified example of the first embodiment. DETAILED DESCRIPTION OF THE INVENTION [Example]

[0008] (Configuration of melt molding device 1) Fig. 1 shows a schematic cross-sectional view of the melt-forming apparatus 1. Fig. 2 shows a top view of the melt-forming apparatus 1. Fig. 1 corresponds to the cross-sectional view taken along line II in Fig. 2. Note that Fig. 2 omits the illustration of the burner 50, the movable mechanism 53, and the electric stage 45.

[0009] Motorized stage 45 is configured to be movable in the x and y directions (horizontal direction). Motorized stage 45 has a flat mounting surface 45s. Forming die 20 is mounted on mounting surface 45s via heat sink 40 and plate 10.

[0010] Heat sink 40 is disposed between motorized stage 45 and forming mold 20. Heat sink 40 is in contact with lower surface 10r of plate 10. Circulation piping 41 is disposed inside heat sink 40. Circulation piping 41 is connected to chiller equipment 42. A heat medium maintained at a constant temperature (e.g., 35°C) by chiller equipment 42 circulates through circulation piping 41. This allows heat sink 40 to maintain a constant temperature during processing.

[0011] The plate 10 is placed on the heat sink 40. The plate 10 is a stainless steel base on which the forming die 20 is placed. The plate 10 has the function of cooling the forming die 20. A first communication hole 10c1 is formed in the surface 10s of the plate 10. The first communication hole 10c1 is located at a position corresponding to the through hole 20e and is connected to the through hole 20e. The first communication hole 10c1 is connected to a negative pressure generating means 81 via a first communication path 10p1. The negative pressure generating means 81 is a means capable of generating a negative pressure in the hole portion 20h. The negative pressure generating means 81 may be, for example, a vacuum pump.

[0012] The forming die 20 is disposed on the surface 10s of the plate 10. The forming die 20 is a die for melting and deforming the quartz plate 30 to form a hemispherical vibrator. The material of the forming die 20 is graphite. In this embodiment, the forming die 20 is in the shape of a disk with a central axis CA. The forming die 20 has a lower surface 20r, an upper surface 20s, a hole 20h, a support 20p, and a through-hole 20e. The lower surface 20r and the upper surface 20s are flat surfaces perpendicular to the central axis CA. A hole 20h is formed in a part of the upper surface 20s. The hole 20h is a deformation space for the quartz plate 30 to melt and deform. In this embodiment, the hole 20h has a shape hollowed out into a hemispherical shape centered on the central axis CA. The hole 20h has a bottom surface 20b. A support pillar 20p is disposed in the center of the hole 20h, extending vertically upward from the bottom surface 20b. The support pillar 20p is a cylinder with a central axis CA. A plurality of through holes 20e are formed in the bottom surface 20b, penetrating to the lower surface 20r. The through holes 20e communicate with the first communication holes 10c1.

[0013] The top surface member 60 is disposed on the top surface 20s of the forming die 20. The bottom surface 60r of the top surface member 60 is in contact with the top surface 20s of the forming die 20. Various heat-resistant materials can be used for the top surface member 60. In this embodiment, stainless steel is used. The top surface member 60 has an opening 60h corresponding to the hole 20h of the forming die 20. As shown in FIG. 2, the opening 60h is circular about the central axis CA. This allows the flame confined in the opening 60h to have a highly circular cross section, as described below. The inner diameter D1 of the opening 60h is larger than the diameter D0 of the hole 20h.

[0014] An engagement portion 20c is provided on the upper surface 20s of the molding die 20. The engagement portion 20c is a portion for fixing the relative positions of the molding die 20 and the upper surface member 60 by engaging them with each other. Specifically, the engagement portion 20c has a ring shape centered on the central axis CA and is disposed on the outermost periphery of the molding die 20. The engagement portion 20c also protrudes upward from the upper surface 20s. The engagement portion 20c may be formed integrally with the molding die 20. The inner peripheral surface of the engagement portion 20c contacts the outer peripheral surface of the upper surface member 60. That is, the upper surface member 60 is fitted into the engagement portion 20c. When the relative positions of the molding die 20 and the upper surface member 60 are fixed, the centers of the hole portion 20h and the opening portion 60h coincide with the central axis CA. That is, the centers of the hole portion 20h and the opening portion 60h coincide with each other.

[0015] A quartz plate 30 is placed on the upper surface 20s of the mold 20 so as to cover the hole 20h. The quartz plate 30 is a material to be processed for forming the vibrator. The quartz plate 30 is made of fused silica. The thickness of the quartz plate 30 is, for example, 100 μm. In this embodiment, the quartz plate 30 is square, but it may also be circular or regular hexagonal. As shown in FIG. 2, the entire outer periphery of the quartz plate 30 is contained within the opening 60h. In other words, the upper surface member 60 and the quartz plate 30 do not overlap.

[0016] The burner 50 is disposed above a central axis CA. The burner 50 includes a premixing chamber 50c, a tube 50t, and a burner tip 50s. A fuel gas G1 (e.g., propane) and oxygen gas G2 are supplied to the premixing chamber 50c from a gas flow regulator 52. The gas flow regulator 52 includes a mass flow controller (not shown) and is capable of controlling and monitoring the flow rates of the fuel gas G1 and oxygen gas G2. The tube 50t extends downward from the premixing chamber 50c. The tube 50t is a cylindrical member having a burner central axis BA extending in the vertical direction. A burner tip 50s facing the hole 20h is disposed at the lower end of the tube 50t. A flame is generated from the burner tip 50s toward the hole 20h, thereby heating the quartz plate 30.

[0017] The burner 50 is fixed to a movable mechanism 53. The movable mechanism 53 is a mechanism that is movable in the vertical direction (±z direction) and in the xy plane direction parallel to the upper surface 20s. The movable mechanism 53 can move the burner tip 50s up and down along the central axis CA. The movable mechanism 53 can also move the position of the burner tip 50s within the two-dimensional xy plane while maintaining a substantially constant distance between the burner tip 50s and the upper surface 20s.

[0018] The radiation thermometer 80 is disposed at a position above the upper surface 20s by a fixing mechanism (not shown). The radiation thermometer 80 is a non-contact temperature sensor. The focus of the radiation thermometer 80 passes through the transparent quartz plate 30 and is aligned with the upper surface of the support 20p. This allows the temperature of the upper surface of the support 20p to be measured without contact. This makes it possible to indirectly measure the temperature of the quartz plate 30.

[0019] The control unit 70 is connected to the motorized stage 45, the movable mechanism 53, the gas flow regulator 52, the radiation thermometer 80, and the negative pressure generating means 81. The control unit 70 acquires various information from these devices and controls these devices. The control unit 70 may be, for example, a PC.

[0020] (Vibrator manufacturing process) The manufacturing process of the vibrator will be described using the flow diagram in Fig. 3. In step S10, a heat medium is constantly circulated from a chiller facility 42 through a circulation pipe 41 to keep the heat sink 40 at a constant temperature. A forming die 20 is placed on the surface 10s of the plate 10.

[0021] In step S20, top surface member 60 is placed on top surface 20s of forming mold 20. Specifically, forming mold 20 and top surface member 60 are engaged with each other by engaging portion 20c. This allows automatic positioning so that the centers of hole portion 20h and opening portion 60h coincide with each other.

[0022] In step S30, quartz plate 30 is placed on top surface 20s of forming mold 20 within opening 60h of top surface member 60. At this time, it is positioned so that central axis CA and the center of quartz plate 30 coincide. In step S40, negative pressure generating means 81 evacuates first communication hole 10c1. As a result, hole portion 20h is also evacuated via through-hole 20e, and quartz plate 30 is adsorbed and fixed to top surface 20s of forming mold 20. This results in the state shown in FIGS. 1 and 2.

[0023] In step S50, the control unit 70 ignites the burner 50. The ignition is performed at a retracted position where the burner tip 50s is sufficiently separated from the surface of the quartz plate 30.

[0024] In step S60, the control unit 70 controls the movable mechanism 53 to lower the burner 50, thereby reducing the distance between the burner tip 50s and the quartz plate 30. This starts the process of heating the quartz plate 30 with the flame.

[0025] The timing to start the descent and the distance between the burner tip 50s and the quartz plate 30 can be controlled in various ways. For example, the descent may start when a preset time has elapsed since the burner 50 was ignited in step S50, and may stop when the burner tip 50s and the quartz plate 30 approach a predetermined distance. Also, for example, the temperature of the support 20p may be measured by a radiation thermometer 80, and the descent timing and the distance between the burner tip 50s and the quartz plate 30 may be determined by temperature feedback control.

[0026] FIG. 4 shows an enlarged cross-sectional view of the vicinity of the hole 20h during the heating process. Note that the heat sink 40 and the motorized stage 45 are omitted in FIG. 4, and only the vicinity of the burner tip 50s is shown. During the heating process, the flame FL is directed toward the quartz plate 30 through the opening 60h. Here, the diameter of the outer flame edge FLe of the flame FL on the upper surface 60s of the upper surface member 60 is designated as the flame diameter D2. In the technology described herein, the state of the flame FL and the position of the burner tip 50s are controlled so that the flame diameter D2 is larger than the inner diameter D1 of the opening 60h. This allows the outer flame edge FLe to be blocked by the upper surface member 60, and only the interior of the flame FL can be directed toward the quartz plate 30. In other words, by confining a portion of the flame FL within the opening 60h, the cross-sectional shape of the flame FL perpendicular to the central axis CA can be forcibly limited to the cross-sectional shape of the opening 60h.

[0027] In the initial heating state, a gap is formed between the upper surface of the support 20p and the lower surface of the quartz plate 30, and they are not in contact. Therefore, no heat conduction path is formed from the quartz plate 30 to the support 20p. As a result, the temperature distribution of the quartz plate 30 is highest in the region near the support 20p at the center, and decreases as the temperature moves away from the support 20p toward the periphery. The center of the quartz plate 30 reaches the softening temperature (approximately 1600°C) first, and melting and deformation begins. A distributed load is applied to the quartz plate 30 due to the pressure difference between atmospheric pressure and the negative pressure inside the hole 20h. Therefore, as the quartz plate 30 is heated to its softening temperature, it can be melted and deformed so as to enter the hole 20h.

[0028] In step S70, if it is determined that the melting and deformation of the quartz plate 30 is completed (S70: YES), the process proceeds to step S80. Various methods for detecting the end point of processing may be used. For example, the end point of processing may be detected in response to the lapse of a predetermined processing time after the burner 50 is lowered in step S60.

[0029] In step S80, the control unit 70 controls the movable mechanism 53 to raise the burner 50. Then, when the burner 50 moves to the retracted position, the raising is stopped and the flame is extinguished.

[0030] In step S90, the control unit 70 waits for the cooling to be completed. Once the cooling is completed, the control unit 70 stops the negative pressure generating means 81. This opens the hole 20h to the atmosphere. In step S100, the fused and molded quartz plate 30 is removed from the forming mold 20. The unmolded area on the periphery of the quartz plate 30 is removed by a method such as CMP or laser cutting, thereby completing the vibrator.

[0031] (effect) In the technology of this embodiment, the flame outer edge FLe is blocked by the upper surface member 60, and only the inside of the flame FL can be applied to the quartz plate 30. Because the influence of the pulsating flame outer edge FLe can be suppressed, the flame confined in the opening 60h can have a highly circular cross section. This can improve the asymmetry of the flame temperature distribution with respect to the central axis CA. Because heat can be input with a concentric temperature distribution with respect to the central axis CA, it is possible to create a vibrator with high symmetry.

[0032] (Modification of Example 1) An engagement portion that engages the molding die 20 and the top surface member 60 with each other may be disposed on the molding die 20. In this case, the position of the engagement portion is not limited to the outer periphery of the molding die 20 (see FIGS. 1 and 2). For example, as shown in engagement portion 20c1 in FIG. 5, the engagement portion may be disposed on the inner periphery of the molding die 20. FIG. 5 is a cross-sectional view similar to FIG. 4. Engagement portion 20c1 has a cylindrical shape centered on central axis CA. The outer periphery of engagement portion 20c1 contacts inner periphery 60i of top surface member 60. In other words, engagement portion 20c1 is fitted into the interior of opening 60h.

[0033] The engaging portion may also be disposed on the top surface member 60. FIG. 6 shows an example of an engaging portion 60c disposed on the top surface member 60. The engaging portion 60c has a ring shape centered on the central axis CA, and is disposed on the outermost periphery of the top surface member 60. The engaging portion 60c also protrudes downward from the lower surface 60r. The engaging portion 60c may be formed integrally with the top surface member 60. The inner peripheral surface of the engaging portion 60c is in contact with the outer peripheral surface of the forming die 20. In other words, the forming die 20 is fitted inside the engaging portion 60c.

[0034] Alternatively, the engagement portion may be disposed on both the molding die 20 and the top surface member 60. FIG. 7 shows an example of the engagement portion 20c2 of the molding die 20 and the engagement portion 60c2 of the top surface member 60. The engagement portion 20c2 is a ring-shaped groove centered on the central axis CA and is formed on the top surface 20s. The engagement portion 60c is a ring-shaped protrusion centered on the central axis CA and protrudes downward from the bottom surface 60r. The diameter and width of the engagement portion 20c2 are the same as those of the engagement portion 60c. The engagement portion 60c is fitted into the interior of the engagement portion 20c2. The diameter and width shared by the engagement portion 20c2 and the engagement portion 60c can have various values. [Example]

[0035] (Configuration of melt molding device 201) Fig. 8 shows a cross-sectional side view of the melt-forming apparatus 201 of Example 2. Fig. 9 shows a top view of the melt-forming apparatus 201 of Example 2. Fig. 8 corresponds to the cross-sectional view taken along line VIII-VIII in Fig. 9. Note that Fig. 8 omits illustration of the burner 50, the movable mechanism 53, and the electric stage 45. Example 2 differs from Example 1 in that it includes a frame 90. Components common to the melt-forming apparatus 1 of Example 1 are designated by the same reference numerals, and description thereof will be omitted.

[0036] The frame 90 is a disk-shaped member centered on the central axis CA and has an outer diameter D3. The frame 90 is disposed between the upper surface 20s of the forming die 20 and the lower surface 60r of the upper surface member 60. The lower surface 90r of the frame 90 is in contact with the upper surface 20s of the forming die 20. The upper surface 90s of the frame 90 is in contact with the lower surface 60r of the upper surface member 60. Various materials can be used for the frame 90 as long as they are heat-resistant. In this example, stainless steel was used.

[0037] The frame 90 has an opening 90h corresponding to the quartz plate 30. As shown in FIG. 9, the opening 90h has a rectangular shape corresponding to the quartz plate 30. That is, the opening shape of the opening 90h and the outer peripheral contour shape of the quartz plate 30 match. The opening 90h is configured so that the quartz plate 30 can be placed inside so as to cover the hole 20h. When viewed from the direction of the central axis CA (i.e., the +z direction), the opening 90h is entirely contained within the opening 60h. In other words, the outer peripheral contour of the quartz plate 30 is contained within the opening 60h. Furthermore, the hole 20h is entirely contained within the opening 90h.

[0038] The thickness T1 of the frame 90 is preferably equal to or less than the thickness of the quartz plate 30. This makes it possible to further improve the symmetry of the vibrator.

[0039] An engagement portion 20c is provided on the upper surface 20s of the forming die 20. The engagement portion 20c is a portion for fixing the relative positions of the forming die 20 and the frame 90 by engaging them with each other. The inner peripheral surface of the engagement portion 20c contacts the outer peripheral surface of the frame 90 and the outer peripheral surface of the top surface member 60. In other words, the frame 90 and the top surface member 60 are fitted inside the engagement portion 20c. When the relative positions of the forming die 20 and the frame 90 are fixed, the centers of the hole 20h and the opening 90h coincide with the central axis CA. In other words, the centers of the hole 20h, the opening 90h, and the opening 60h all coincide.

[0040] (Vibrator manufacturing process) The vibrator manufacturing process of Example 2 will be described. In the flow of FIG. 3, only the parts that are different from Example 1 will be described. In step S20, a frame 90 is placed on the upper surface 20s of the molding die 20. Specifically, the molding die 20 and the frame 90 are engaged with each other by the engaging portions 20c. This allows automatic positioning so that the centers of the holes 20h and the openings 90h coincide with each other. Next, an upper surface member 60 is placed on the upper surface 90s of the frame 90. Specifically, the molding die 20 and the upper surface member 60 are engaged with each other by the engaging portions 20c.

[0041] In step S30, the quartz plate 30 is placed in the opening 90h of the frame 90. This allows automatic positioning so that the center of the hole 20h coincides with the center of the opening 90h. The process from step S40 onwards is the same as in the first embodiment.

[0042] (effect) In the melt-molding apparatus 201 of the second embodiment, by providing the frame 90, it is possible to realize a function of automatically aligning the center of the quartz plate 30 with the center of the hole 20h. It is possible to manufacture a vibrator with high symmetry.

[0043] In the melt-molding apparatus 201 of Example 2, the opening 90h is rectangular. This allows the use of a rectangular quartz plate 30. The rectangular quartz plate 30 is the least expensive compared to other shapes such as a circle. This is because a rectangular shape can be easily cut out by dicing, but other shapes must be cut out using a laser or the like. This makes it possible to reduce the manufacturing cost of the vibrator.

[0044] (Modification of Example 2) An engagement portion that engages the forming die 20 and the frame 90 with each other may be disposed on the frame 90. Fig. 10 shows an example of an engagement portion 90c disposed on the frame 90. The engagement portion 90c is a ring-shaped protrusion centered on the central axis CA, and protrudes downward from the lower surface 90r. The engagement portion 20c2 is a ring-shaped groove centered on the central axis CA, and is formed on the upper surface 20s. The engagement portion 90c is fitted into the interior of the engagement portion 20c2.

[0045] Although specific examples of the present invention have been described above in detail, these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and alterations of the specific examples exemplified above.

[0046] (Other variations) In this embodiment, the inner wall surface of the opening 60h of the upper surface member 60 is perpendicular to the upper surface 60s, but this is not limiting. The inner wall surface may have a tapered shape such that the opening area decreases downward. Furthermore, the tapered shape is not limited to a straight line and may include a curve. This allows the lower outlet of the opening 60h to be smaller than the upper inlet. The flame input to the upper inlet can be concentrated and output from the lower outlet, thereby improving thermal efficiency.

[0047] Although the opening 60h has been described as being circular, the present invention is not limited to this. For example, the opening 60h may have a polygonal shape that is rotationally symmetric about the central axis CA.

[0048] The material of the mold 20 is not limited to graphite. Various materials, such as boron nitride, can be used as long as they have the required thermal shock resistance and thermal conductivity. Furthermore, the material of the vibrator is not limited to fused silica. Any dielectric material that melts and deforms can be used.

[0049] Furthermore, the technical elements described in this specification or drawings may exhibit technical utility alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. Furthermore, the technologies illustrated in this specification or drawings may achieve multiple objectives simultaneously, and achieving one of those objectives alone is technically useful.

[0050] The engaging portion 20c is an example of a first engaging portion and a second engaging portion.

[0051] Aspects of the present technology are listed below. [Aspect 1] a stage having a flat mounting surface; a melt-forming mold disposed on the mounting surface and including a flat upper surface and a hole formed in a part of the upper surface with a central axis perpendicular to the upper surface as a center; a burner disposed above the central axis and facing the hole, the burner being configured to generate a flame toward the hole; an upper surface member disposed on the upper surface of the melt-forming mold and having a first opening corresponding to the hole; A melt-molding device comprising: [Aspect 2] the first opening is circular about the central axis, 2. The melt-molding apparatus according to claim 1, wherein the first opening has a larger diameter than the hole. [Aspect 3] a first engagement portion disposed on at least one of the melt-forming mold and the upper surface member; the first engaging portion is configured to be able to fix the relative position between the melt-forming mold and the upper surface member, 3. The melt-molding apparatus according to claim 1, wherein the center of the hole and the center of the first opening coincide with each other when the relative positions of the melt-molding mold and the upper surface member are fixed. [Aspect 4] The method further includes a plate-shaped frame body disposed between the upper surface of the melt-molding mold and the lower surface of the upper surface member, The frame has a second opening, The second opening is configured so that a plate-shaped workpiece can be placed inside the second opening so as to cover the hole, A melt-molding apparatus according to any one of aspects 1-3, wherein, when viewed from the central axis direction, at least a portion of the second opening is contained within the first opening, and the entire hole is contained within the second opening. [Aspect 5] Aspect 5. The melt-molding device according to aspect 4, wherein the second opening is entirely contained within the first opening when viewed from the central axis direction. [Aspect 6] Aspect 6. The melt-molding apparatus according to aspect 4 or 5, wherein the second opening has a rectangular shape when viewed from the direction of the central axis. [Aspect 7] a second engaging portion disposed on the melt-molding mold; the second engaging portion is configured to be able to fix the relative position between the melt-forming mold and the frame, The melt-forming device according to any one of aspects 4 to 6, wherein the center of the hole and the center of the second opening coincide with each other when the relative positions of the melt-forming mold and the frame are fixed. [Aspect 8] Aspect 8. The melt-molding apparatus according to any one of Aspects 1 to 7, wherein the inner wall surface of the first opening has a tapered shape. [Explanation of symbols]

[0052] 1: Melt forming device 10: Plate 20: Mold 20h: Hole 20p: Support 20s: Upper surface 30: Quartz plate 50: Burner 60: Upper surface member 60h: Opening CA: Central axis

Claims

1. a stage having a flat mounting surface; a melt-forming mold disposed on the mounting surface and including a flat upper surface and a hole formed in a part of the upper surface with a central axis perpendicular to the upper surface as a center; a burner disposed above the central axis and facing the hole, the burner being configured to generate a flame toward the hole; an upper surface member disposed on the upper surface of the melt-molding mold and having a first opening corresponding to the hole; A melt-molding device comprising:

2. the first opening has a circular shape centered on the central axis, The melt-molding device according to claim 1 , wherein the diameter of the first opening is larger than the diameter of the hole.

3. a first engaging portion disposed on at least one of the melt-forming mold and the upper surface member; the first engaging portion is configured to be able to fix the relative position between the melt-forming mold and the upper surface member, The melt-molding device according to claim 2 , wherein the center of the hole and the center of the first opening coincide with each other when the relative positions of the melt-molding mold and the upper surface member are fixed.

4. The method further includes a plate-shaped frame body disposed between the upper surface of the melt-molding mold and the lower surface of the upper surface member, The frame has a second opening, a plate-shaped workpiece can be placed inside the second opening so as to cover the hole, When viewed from the central axis direction, at least a portion of the second opening is included inside the first opening, and the entire hole is included inside the second opening. The melt molding device according to any one of claims 1 to 3.

5. The melt-molding device according to claim 4 , wherein the second opening is entirely contained within the first opening when viewed from the central axis direction.

6. The melt-molding device according to claim 5 , wherein the second opening has a rectangular shape when viewed from the direction of the central axis.

7. a second engaging portion disposed on the melt-molding mold; the second engaging portion is configured to be able to fix the relative position between the melt-forming mold and the frame, The melt-molding device according to claim 6 , wherein the center of the hole and the center of the second opening coincide with each other when the relative positions of the melt-molding mold and the frame are fixed.

8. The melt-molding device according to claim 1 , wherein an inner wall surface of the first opening has a tapered shape.

Images