Biochip and manufacturing method for the same

Abstract

PURPOSE: To provide a biochip and a manufacturing method for the same.SOLUTION: A detection unit of a biochip includes a substrate, a first insulating layer, a semiconductor layer, a second insulating layer, a first metal layer, a second metal layer, and a protection layer. The semiconductor layer includes a reaction region. The second insulating layer is disposed on the semiconductor layer, and includes a first part, a second part, and a first opening part for exposing the reaction region. The first metal layer is disposed on the second part and includes a source, a drain, a gate, and a first wall structure. The second metal layer includes a second wall structure disposed on the first wall structure. The protection layer is disposed on the first metal layer and the second metal layer. The protection layer includes a second opening part, a third opening part, and a fourth opening part, and includes a flat part that defines the second opening part by surrounding it, a first projection part that defines the third opening part by surrounding it, and a second projection part that defines the fourth opening by surrounding it. In a normal direction of the substrate, the first opening part, the second opening part, the third opening part, and the fourth opening part overlap with each other.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a semiconductor chip and a method for manufacturing the same, and more particularly to a biochip and a method for manufacturing the same. [Background technology]

[0002] In general biochips, the space that can accommodate a solution is usually limited by the size of the reaction region, so when there is too much solution or when there is an error in the amount of solution added, the solution is likely to overflow. Summary of the Invention [Problem to be solved by the invention]

[0003] The present invention provides a biochip that can accommodate large amounts of solution while avoiding solution overflow, can improve detection sensitivity, and can simultaneously detect various biological substances without interfering with each other, and a method for manufacturing the same. [Means for solving the problem]

[0004] The biochip of the present invention is used to detect biological substances in solution and includes at least one detection unit. The detection unit includes a substrate, a first insulating layer, a semiconductor layer, a second insulating layer, a first metal layer, a second metal layer, and a protective layer. The first insulating layer is disposed on the substrate. The semiconductor layer is disposed on the first insulating layer and includes multiple reaction regions. The second insulating layer is disposed on the semiconductor layer and includes a first portion, a second portion, and a first opening. The second portion surrounds the first portion. The first opening separates the first and second portions and exposes the multiple reaction regions. The first metal layer is disposed on the second portion and includes a source, drain, gate, and a first wall structure that are separated from each other. The second metal layer includes a second wall structure and a bioelectrode. The second wall structure is disposed on the first wall structure, and the bioelectrode is disposed on the first portion. A protective layer is disposed on the first and second metal layers. The protective layer has a second opening, a third opening, and a fourth opening, and includes a flat portion, a first protruding portion, and a second protruding portion. The flat portion covers the second portion exposed by the first metal layer and surrounds and defines the second opening. The first protruding portion covers the source, drain, and gate and surrounds and defines the third opening. The second protruding portion covers the second wall structure and surrounds and defines the fourth opening. The first opening, second opening, third opening, and fourth opening overlap in the normal direction of the substrate.

[0005] In one embodiment of the present invention, the above-mentioned semiconductor layer further includes a source region and a drain region, the source surrounding the first opening and electrically connected to the source region, the drain surrounding the source and electrically connected to the drain region, the gate surrounding the drain and electrically connected to the substrate, and the first wall structure surrounding the gate.

[0006] In one embodiment of the present invention, the above-mentioned source, drain, gate and first wall structure are the same layer, and the first wall structure electrically insulates the source, drain and gate.

[0007] In one embodiment of the present invention, the above-mentioned solution is disposed in at least the first opening, the second opening, and the third opening, and the solution contacts the bioelectrode and the multiple reaction regions of the semiconductor layer.

[0008] In one embodiment of the present invention, the above-mentioned bioelectrode and second wall structure are the same layer, the bioelectrode and the second wall structure are separated from each other, and the second wall structure electrically insulates the bioelectrode.

[0009] In one embodiment of the present invention, the above-mentioned first protrusion completely surrounds the third opening, and the second protrusion completely surrounds the fourth opening.

[0010] In one embodiment of the present invention, in the normal direction described above, the upper surface of the second protruding portion is higher than the upper surface of the first protruding portion, and the upper surface of the first protruding portion is higher than the upper surface of the flat portion.

[0011] In one embodiment of the present invention, the third opening is larger than the second opening, and the fourth opening is larger than the third opening.

[0012] In one embodiment of the present invention, the third opening includes an addition area and a plurality of detection areas. The addition area is arranged corresponding to the first portion. The plurality of detection areas are connected to the addition area and are arranged corresponding to the plurality of reaction areas.

[0013] A method for manufacturing a biochip of the present invention includes the steps of providing a substrate, forming a first insulating layer on the substrate, forming a semiconductor layer on the first insulating layer, the semiconductor layer including a plurality of reaction regions, forming a second insulating layer on the semiconductor layer, the second insulating layer including a first portion, a second portion, and a first opening, the second portion surrounding the first portion, the first opening separating the first portion and the second portion to expose the plurality of reaction regions, forming a first metal layer on the second portion, the first metal layer including a source, a drain, a gate, and a first wall structure separated from each other, forming a second metal layer, the second metal layer including the second wall structure and a bioelectrode, the second wall structure being disposed on the first wall structure, and the bioelectrode being disposed on the first portion, and forming a protective layer on the first metal layer and the second metal layer, the protective layer having a second opening, a third opening, and a fourth opening, and the protective layer including a flat portion, a first protruding portion, and a second protruding portion. The flat portion covers the second portion exposed by the first metal layer and surrounds and defines the second opening. The first protruding portion covers the source, drain, and gate and surrounds and defines the third opening. The second protruding portion covers the second wall structure and surrounds and defines the fourth opening. The first opening, second opening, third opening, and fourth opening overlap in the normal direction of the substrate. [Effects of the Invention]

[0014] As described above, the biochip and its manufacturing method according to one embodiment of the present invention can detect the same type of biological substance by arranging multiple reaction regions within a single detection unit, thereby accumulating signals detected in the multiple reaction regions and improving detection sensitivity. Compared to a typical biochip, the biochip of this embodiment can accommodate a large amount of solution by providing a fourth opening to increase the volume the biochip can accommodate. This eliminates the need for concerns about cross-contamination due to solution overflow, thereby improving the operational flexibility and convenience of the biochip. Furthermore, the multiple detection units within the biochip of this embodiment can each be used to detect different types of biological substance, eliminating the need for concerns about cross-contamination due to solution overflow between different detection units. This allows the biochip to simultaneously detect various biological substances without interfering with each other.

[0015] In order to make the above features and advantages of the present invention more clearly comprehensible, the following embodiments will be described in detail in conjunction with the accompanying drawings. [Brief explanation of the drawings]

[0016] [Figure 1] 1 is a top view schematic diagram of a biochip according to one embodiment of the present invention. [Figure 2A] 2 is a top schematic view of a method for manufacturing a detection unit in the biochip of FIG. 1. FIG. [Figure 2B] 2 is a top schematic view of a method for manufacturing a detection unit in the biochip of FIG. 1. FIG. [Figure 2C] 2 is a top schematic view of a method for manufacturing a detection unit in the biochip of FIG. 1. FIG. [Figure 3A] 2C is a three-dimensional schematic diagram of a method for manufacturing region R in the biochip. [Figure 3B] 2C is a three-dimensional schematic diagram of a method for manufacturing region R in the biochip. [Figure 3C]2C is a three-dimensional schematic diagram of a method for manufacturing region R in the biochip. [Figure 3D] 2C is a three-dimensional schematic diagram of a method for manufacturing region R in the biochip. [Figure 3E] 2C is a three-dimensional schematic diagram of a method for manufacturing region R in the biochip. [Figure 4] FIG. 2D is a schematic cross-sectional view of the biochip of FIG. 2C taken along section line I-I'. [Figure 5] FIG. 2D is a schematic cross-sectional view of the biochip of FIG. 2C taken along section line 11-11'. [Figure 6] FIG. 10 is a top schematic view of a detection unit in a biochip according to another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0017] FIG. 1 is a top schematic diagram of a biochip according to one embodiment of the present invention. FIGS. 2A to 2C are top schematic diagrams of a method for manufacturing a detection unit in the biochip of FIG. 1. FIGS. 3A to 3E are three-dimensional schematic diagrams of a method for manufacturing a region R in the biochip of FIG. 2C. FIG. 4 is a cross-sectional schematic diagram of the biochip of FIG. 2C taken along the cross-sectional line I-I'. FIG. 5 is a cross-sectional diagram of the biochip of FIG. 2C taken along the cross-sectional line III-III'. For clarity and ease of explanation, FIGS. 2A to 2C omit the illustration of the substrate 110, first insulating layer IL1, second insulating layer 130, insulating layer IL2, and protective layer 160 in the biochip 10.

[0018] First, referring simultaneously to FIGS. 1, 2C, 3E, 4, and 5, the biochip 10 of this embodiment can include at least one detection unit 100. (Although FIG. 1 schematically illustrates three detection units 100, the present invention is not limited thereto.) The detection unit 100 includes a substrate 110, a first insulating layer IL1, a semiconductor layer 120, a second insulating layer 130, a first metal layer 140, a second metal layer 150, and a protective layer 160. The first insulating layer IL1 is disposed on the substrate 110. The semiconductor layer 120 is disposed on the first insulating layer IL1 and includes multiple reaction regions 121. The second insulating layer 130 is disposed on the semiconductor layer 120 and includes a first portion 131, a second portion 132, and a first opening O1. The second portion 132 surrounds the first portion 131. The first opening O1 separates the first portion 131 and the second portion 132, exposing the plurality of reaction regions 121. The first metal layer 140 is disposed on the second portion 132 and includes a source 141, a drain 142, a gate 143, and a first wall structure 144, which are separated from one another. The second metal layer 150 includes a second wall structure 152 and a bioelectrode 151. The second wall structure 152 is disposed on the first wall structure 144, and the bioelectrode 151 is disposed on the first portion 131. The protective layer 160 is disposed on the first metal layer 140 and the second metal layer 150. The protective layer 160 has a second opening O2, a third opening O3, and a fourth opening O4, and includes a first protruding portion 161, a second protruding portion 162, and a flat portion 163. The flat portion 163 covers the second portion 132 exposed by the first metal layer 140 and surrounds and defines the second opening O2. The first protruding portion 161 covers the source 141, the drain 142, and the gate 143 and surrounds and defines the third opening O3. The second protruding portion 162 covers the second wall structure 152 and surrounds and defines the fourth opening O4. The first opening O1, the second opening O2, the third opening O3, and the fourth opening O4 overlap in the normal direction Z of the substrate 110. Furthermore, the biochip 10 of this embodiment can be used to detect a biological material 210 in a solution 200.

[0019] A method for manufacturing the biochip 10 of this embodiment will be described below. The method for manufacturing the biochip 10 of this embodiment can include the following steps.

[0020] 2A, 3A, 4, and 5, a substrate 110 is provided, a first insulating layer IL1 is formed on the substrate 110, and a semiconductor layer 120 is formed on the first insulating layer IL1. In this embodiment, the substrate 110 may be a silicon substrate or a silicon wafer. For example, the substrate 110 may be, for example, a P-type silicon substrate, but the present invention is not limited thereto. In this embodiment, the first insulating layer IL1 may be a gate oxide layer, but the present invention is not limited thereto.

[0021] In this embodiment, the semiconductor layer 120 includes multiple reaction regions 121, multiple source regions 122, multiple drain regions 123, and a central opening 124. The source regions 122 and the drain regions 123 are separated from each other. Each reaction region 121 is located between adjacent source regions 122 and drain regions 123, and can connect the source regions 122 and the drain regions 123. Each reaction region 121 can include at least one reaction unit 1211 (although five reaction units 1211 are schematically illustrated in FIG. 2A , the present invention is not limited thereto). The central opening 124 can be surrounded by the multiple reaction regions 121, the multiple source regions 122, and the multiple drain regions 123. In this embodiment, the material of the semiconductor layer 120 can include polysilicon or other suitable semiconductor materials, but the present invention is not limited thereto. In some embodiments, the reaction unit 1211 in the reaction region 121 can be considered as a channel in a transistor structure, so that when the threshold voltage of the channel (reaction unit 1211) is exceeded, the channel (reaction unit 1211) opens and current from the drain 142 can be transmitted to the source 141 through the channel (reaction unit 1211).

[0022] 2A , the semiconductor layer 120 may include eight reaction regions 121, four source regions 122, four drain regions 123, and one central opening 124. The eight reaction regions 121, four source regions 122, four drain regions 123, and one central opening 124 of the semiconductor layer 120 may be arranged in a hollow circular structure, with each pair of adjacent source and drain regions 122 and 123 occupying approximately 90 degrees of the overall 360-degree circular structure, and each source region 122 (or drain region 123) occupying approximately 45 degrees of the overall 360-degree circular structure, but the present invention is not limited thereto. In other words, the present invention does not limit the number or arrangement of the reaction regions, source regions, drain regions, and central opening, nor does the present invention limit the proportion of the overall circular structure occupied by each pair of adjacent source and drain regions and each source region (or drain region).

[0023] Furthermore, in this embodiment, an identification unit (not shown) may be disposed on the reaction unit 1211 of the reaction region 121 of the semiconductor layer 120 and used to specifically identify and bind to the biological material 210 in the solution 200. Specifically, one end of the identification unit may be connected to and fixed to the reaction region 121, and the other end of the identification unit may be used to identify and bind to the biological material 210. The identification unit may be a chemical molecule or a biological molecule, and for example, the identification unit may be an antibody, an antigen, a nucleic acid, a sugar, or a combination thereof. However, the present invention is not limited thereto, and the identification unit may be any molecule as long as it can specifically identify and bind to the biological material 210.

[0024] 2A, 3B, 4, and 5, a second insulating layer 130 is formed on the semiconductor layer 120. Specifically, the second insulating layer 130 can cover the semiconductor layer 120 and a portion of the first insulating layer IL1. The second insulating layer 130 includes a first portion 131, a second portion 132, a first opening O1, an opening 133, an opening 134, and an opening 135. The first portion 131 is disposed corresponding to the central opening 124. The second portion 132 and the first portion 131 are separated from each other and surround the first portion 131. The first opening O1 separates the first portion 131 and the second portion 132. The first opening O1 can expose multiple reaction regions 121 and a portion of the first insulating layer IL1, the opening 133 can penetrate the second portion 132 to expose a portion of the source region 122, the opening 134 can penetrate the second portion 132 to expose a portion of the drain region 123, and the opening 135 can penetrate the second portion 132 and the first insulating layer IL1 to expose a portion of the substrate 110.

[0025] 2B, 3C, 4, and 5, a first metal layer 140 is formed on the second portion 132 of the second insulating layer 130. Specifically, the first metal layer 140 may expose the first portion 131 and a portion of the second portion 132. The first metal layer 140 includes a source 141, a drain 142, a gate 143, and a first wall structure 144, which are separated from each other. In the normal direction Z of the substrate 110, the source 141 may overlap and correspond to the source region 122, and the drain 142 may overlap and correspond to the drain region 123. The source 141 may be disposed on the second portion 132 and in the opening 133 and electrically connected to the source region 122. The drain 142 may be disposed on the second portion 132 and in the opening 134 and electrically connected to the drain region 123. Furthermore, the gate 143 may be disposed on the second portion 132 and within the opening 135, and may be in contact with and electrically connected to the conductive substrate 110.

[0026] 2B , the source 141, the drain 142, the gate 143, and the first wall structure 144 may be in the same layer. Here, as shown in FIG. 2B , the source 141 may surround the first opening O1 in a substantially annular structure, the drain 142 may surround the source 141 and the first opening O1 in a substantially annular structure, the gate 143 may surround the drain 142, the source 141, and the first opening O1 in a substantially annular structure, and the first wall structure 144 may surround the gate 143, the drain 142, the source 141, and the first opening O1 in a substantially annular structure. The first wall structure 144 may electrically insulate the source 141, the drain 142, and the gate 143.

[0027] Next, referring simultaneously to FIGS. 2C, 3D, 4, and 5, an insulating layer IL2 is formed on the first portion 131 and the first wall structure 144, and a second metal layer 150 is formed on the first portion 131, the first wall structure 144, and the insulating layer IL2. Specifically, the second metal layer 150 includes a bioelectrode 151 and a second wall structure 152. The bioelectrode 151 is disposed on the first portion 131. The second wall structure 152 is disposed on the first wall structure 144. The bioelectrode 151 and the second wall structure 152 may be the same layer, and the bioelectrode 151 and the second wall structure 152 may be separated from each other. As shown in FIG. 2C, the second wall structure 152 may have a substantially annular structure and surround the gate 143, the drain 142, the source 141, and the first opening O1. The second wall structure 152 may electrically insulate the bioelectrode 151.

[0028] Next, referring to FIGS. 2C, 3E, 4, and 5, a protective layer 160 is formed on the first metal layer 140 and the second metal layer 150. Specifically, the protective layer 160 has a second opening O2, a third opening O3, and a fourth opening O4, and includes a flat portion 163, a first protruding portion 161, and a second protruding portion 162. Here, the flat portion 163 may cover the second portion 132 exposed by the first metal layer 140 and may be defined to surround the second opening O2. The first protruding portion 161 may cover the source 141, the drain 142, and the gate 143 and may be defined to surround the third opening O3. The second protruding portion 162 may cover the second wall structure 152 and may be defined to surround the fourth opening O4.

[0029] In this embodiment, the flat portion 163 has an upper surface 163a away from the second insulating layer 130, the first protruding portion 161 has an upper surface 161a away from the second insulating layer 130, and the second protruding portion 162 has an upper surface 162a away from the second insulating layer 130. In the normal direction Z of the substrate 110, the upper surface 161a of the first protruding portion 161 is higher than the upper surface 163a of the flat portion 163, and the upper surface 162a of the second protruding portion 162 is higher than the upper surface 161a of the first protruding portion 161.

[0030] In this embodiment, due to the arrangement of the first metal layer 140 and the second metal layer 150, the first protrusion 161 and the second protrusion 162 can be formed simultaneously in the step of forming the protective layer 160, so there is no need to perform additional processing steps (e.g., increasing the number of masks or increasing the number of layers) to manufacture the first protrusion 161 for forming the third opening O3 and the second protrusion 162 for forming the fourth opening O4, which has the effect of simplifying the process.

[0031] In this embodiment, the first opening O1, the second opening O2, the third opening O3, and the fourth opening O4 may overlap in the normal direction Z of the substrate 110. The second opening O2 may connect the first opening O1 to the third opening O3, and the third opening O3 may connect the second opening O2 to the fourth opening O4. The size of the second opening O2 may be substantially similar to the size of the first opening O1. The size of the third opening O3 may be larger than the size of the second opening O2. The size of the fourth opening O4 may be larger than the size of the third opening O3.

[0032] In this embodiment, the third opening O3 may include an addition region O31 and multiple detection regions O32. The addition region O31 may be a region where the solution 200 is added to the biochip 10, and the detection region O32 may be a region for guiding and storing the solution 200, thereby preventing the solution 200 from overflowing. Specifically, the addition region O31 may be arranged corresponding to the central opening 124, the first portion 131, and the bioelectrode 151. The multiple detection regions O32 may be arranged corresponding to the multiple reaction regions 121. The multiple detection regions O32 may be connected to the addition region O31 or may be arranged radially around the addition region O31, thereby shortening the time it takes for the solution 200 to flow into the detection region O32 and making the distribution of the solution 200 more uniform.

[0033] In this embodiment, the solution 200 is first dropped into the application region O31 in the form of a droplet and then flows into the multiple detection regions O32 arranged radially from the application region O31. By making the diameter (or width) of the application region O31 larger than the diameter of the droplet, overflow of the solution 200 due to misalignment (or mismatch) during application can be prevented. By designing the contour shape of the application region O31 to be circular to match the shape of the droplet, the surface tension of the liquid can be used to prevent overflow of the solution 200 when the amount of solution 200 is too large and is likely to overflow. In other words, this embodiment utilizes the "self-limiting structure" of the tangent formation of the biochip itself to increase the alignment tolerance and accommodate a larger amount of solution 200. In this embodiment, the diameter (or width) of the application region O31 is, for example, approximately 10 micrometers (μm) to 100 micrometers, and the width of the detection region O32 is, for example, approximately 3 micrometers, but the present invention is not limited thereto. In some embodiments, the diameter (or width) of the addition region O31 can be adjusted according to the diameter of the droplet, and the length of the detection region O32 can be adjusted according to the number of reaction units 1211.

[0034] 4 and 5, in this embodiment, the solution 200 may be disposed in at least the first opening O1, the second opening O2, and the third opening O3, and the solution 200 can cover at least the upper surface 163a of the flat portion 163, so that the solution 200 can simultaneously contact the bioelectrode 151 and the reaction unit 1211 in the reaction region 121. In some embodiments, when the amount of the solution 200 is large, the solution 200 can be disposed in the first opening O1, the second opening O2, the third opening O3, and the fourth opening O4, so that the solution 200 can cover the upper surface 163a of the flat portion 163 and the upper surface 161a of the first protrusion 161.

[0035] While typical biochips use externally connected probe electrodes (e.g., silver / silver chloride electrodes) to detect biological substances, this embodiment integrates the bioelectrode 151 into the biochip 10, thereby significantly reducing the overall volume of the biochip 10 and thereby reducing the complexity and cost of subsequent process steps (e.g., there is no need to separately fabricate externally connected probe electrodes).

[0036] In this embodiment, the solution 200 may include, for example, a bodily fluid such as serum, and the biological material 210 may include, for example, a microorganism or a biological molecule, but the invention is not limited thereto. By way of example, the microorganism may include, for example, a bacterium, a virus, or a combination thereof, and the biological molecule may include, for example, a nucleic acid (including deoxyribonucleic acid, ribonucleic acid, or a combination thereof), a nucleotide, a protein, a carbohydrate, a lipid, or a combination thereof, but the invention is not limited thereto.

[0037] In this embodiment, the working principle of the biochip 10 can include a test before adding the solution 200 and a detection after adding the solution 200. Specifically, in the test before adding the solution 200, the gate 143 is first opened, and a voltage provided from the gate 143 is allowed to control (open / close) the reaction unit 1211 in the reaction region 121 across the first insulating layer IL1 via the conductive substrate 110. Then, the current amount (i.e., the first current amount) of the drain 142 is measured to test whether the reaction unit 1211 is normally conductive and allows the current from the source 141 to pass through. In the detection after the addition of the solution 200, when the solution 200 can simultaneously contact the bioelectrode 151 and the reaction units 1211 in the reaction regions 121, the bioelectrode 151 is first opened to allow the voltage provided from the bioelectrode 151 to control (open / close) the reaction units 1211 in the reaction regions 121 across the solution 200. Then, the current amount (i.e., the second current amount) of the drain 142 is measured and compared with the first current amount to detect the biological material 210 in the solution 200. In this embodiment, the gate 143 may be closed or open during the detection after the addition of the solution 200. When the gate 143 is open, the voltage provided from the gate 143 can be used, for example, to enhance the reaction between the biological material 210 and the reaction units 1211.

[0038] In this embodiment, multiple reaction areas 121 in one detection unit 100 of the biochip 10 can be used to detect the same type of biological material 210, thereby allowing signals detected in multiple reaction areas 121 to be accumulated to improve detection sensitivity.

[0039] In this embodiment, the first protrusion 161 can completely surround the third opening O3, and the second protrusion 162 can completely surround the fourth opening O4. In more detail, the source 141, the drain 142, and the gate 143 can surround the first opening O1 in a substantially annular structure, so that the first protrusion 161 disposed above the source 141, the drain 142, and the gate 143 has a closed shape that completely surrounds the first opening O1, the second opening O2, and the third opening O3, thereby confining the solution 200 within the third opening O3 and preventing the solution 200 from overflowing outside the third opening O3. Furthermore, since the second wall structure 152 is disposed on the first wall structure 144 and the second wall structure 152 can surround the first opening O1 in a substantially annular structure, as shown in Figures 4 and 5, the second protrusion 162 disposed on the second wall structure 152 forms a closed shape that completely surrounds the first opening O1, the second opening O2, the third opening O3, and the fourth opening O4, thereby restricting the solution 200 within the fourth opening O4 and preventing the solution 200 from overflowing outside the fourth opening O4.

[0040] For example, when the solution 200 added to the third opening O3 overflows, the second protrusion 162 can restrict the solution 200 to the fourth opening O4, preventing the solution 200 from overflowing. This prevents the solution from overflowing into another adjacent detection unit 100 and interfering with the detection results of another biological substance. Compared to a typical biochip, the biochip 10 of this embodiment can accommodate a large amount of solution 200 by providing the fourth opening O4, thereby improving the operational flexibility and convenience of the biochip 10. Therefore, the multiple detection units 100 in the biochip 10 of this embodiment can be used simultaneously to detect different types of biological substances, eliminating the need to worry about cross-contamination between different detection units 100 due to solution overflow. This allows the biochip 10 to simultaneously detect a variety of biological substances.

[0041] Other embodiments will be described below. It should be noted that the component numbers and some of the content of the above-described embodiment will continue to be used in the following embodiments. The same or similar components are indicated by the same numbers, but the same technical content will not be described again. The above-described embodiment can be referred to for the description of the omitted parts, and therefore, the following embodiments will not repeat the description.

[0042] 6 is a schematic top view of a detection unit in a biochip according to another embodiment of the present invention. Referring to FIG. 6 and FIG. 2C simultaneously, the biochip 10a of this embodiment is similar to the biochip 10 of FIG. 2C, but the main difference between the two is that the detection unit 100a of the biochip 10a of this embodiment includes a semiconductor layer 120a with more reaction regions 121a, source regions 122a, and drain regions 123a.

[0043] 6, the semiconductor layer 120a may include 12 reaction regions 121a, six source regions 122a, six drain regions 123a, and one central opening 124. Here, each pair of adjacent source and drain regions 122a and 123a may occupy approximately 60 degrees of the overall 360-degree circular structure, and each source region 122a (or drain region 123a) may occupy approximately 30 degrees of the overall 360-degree circular structure. This allows the detection unit 100a to accumulate signals detected in more reaction regions 121a (or reaction units 1211) to further improve detection sensitivity.

[0044] In some embodiments, more reaction units can be added by adjusting the length of the reaction area (detection area length) within the detection unit, thereby allowing the detection unit to accumulate signals detected in more reaction units and further improve detection sensitivity.

[0045] As described above, in one embodiment of the biochip and its manufacturing method of the present invention, the diameter (or width) of the addition region is larger than the diameter of the droplet, thereby preventing overflow due to misalignment (or mismatch) of the solution during addition. By designing the contour shape of the addition region to be circular to match the shape of the droplet, the surface tension of the liquid can be used to prevent overflow when the amount of solution is too large and is likely to overflow. In other words, this embodiment utilizes the "self-limiting structure" of the tangent formation of the biochip itself to increase the alignment tolerance and accommodate more solution. By arranging multiple reaction regions within a single detection unit to detect the same type of biological substance, signals detected in multiple reaction regions can be accumulated to improve detection sensitivity. Compared to conventional biochips, the biochip of this embodiment can accommodate large amounts of solution by providing a fourth opening to increase the volume of the solution that the biochip can accommodate, eliminating the need to worry about cross-contamination issues due to solution overflow, thereby improving the operational flexibility and convenience of the biochip. In addition, the multiple detection units in the biochip of this embodiment can each be used to detect different types of biological substances, and there is no need to worry about cross-contamination issues due to solution overflow between different detection units, so the biochip has the advantage of being able to simultaneously detect various biological substances without interfering with each other. In addition, in some embodiments, by increasing the number of reaction regions in the detection unit or adjusting the length of the reaction region (detection region length) in the detection unit to increase the number of reaction units, the detection unit can accumulate signals detected from more reaction units, further improving detection sensitivity.

[0046] As described above, the present invention has been disclosed by way of embodiments, but these are not used to limit the present invention. Those skilled in the art can make some changes and modifications without departing from the spirit and scope of the present invention, and therefore the scope of protection of this invention should be determined based on the scope of the appended claims. [Industrial Applicability]

[0047] The biochip and its manufacturing method of the present invention can accommodate large amounts of solution while avoiding solution overflow, can improve detection sensitivity, and can simultaneously detect various biological substances without interfering with each other. [Explanation of symbols]

[0048] 10, 10a Biochip 100, 100a detection unit 110 Substrate 120, 120a semiconductor layer 121, 121a Reaction region 1211 Reaction Unit 122, 122a Source region 123, 123a drain region 124 Central opening 130 Second insulating layer 131 Part 1 132 Part 2 133, 134, 135 aperture 140 1st metal layer 141 Source 142 Drain Gate 143 144 1st wall structure 150 2nd metal layer 151 Bioelectrodes 152 Second wall structure 160 protective layer 161 1st protrusion 161a, 162a, 163a Upper surface 162 Second protrusion 163 Flat area 200 solution 210 Biological materials IL1 First insulating layer IL2 insulating layer O1 First opening O2 2nd opening O3 Third opening O31 addition area O32 detection area O4 4th opening R region Z normal direction

Claims

1. A biochip for detecting a biological substance in a solution, comprising at least one detection unit, said at least one detection unit comprising: A substrate; a first insulating layer disposed on the substrate; a semiconductor layer disposed on the first insulating layer and including a plurality of reaction regions; disposed on the semiconductor layer, A first part; and a second portion surrounding the first portion; a first opening separating the first portion and the second portion and exposing the plurality of reaction regions; a second insulating layer comprising: a first metal layer disposed on the second portion, the first metal layer including a source, a drain, a gate, and a first wall structure, the source, drain, and gate being spaced apart from one another; a second wall structure disposed on the first wall structure; a bioelectrode disposed on the first portion; the second metal layer, including a second opening, a third opening, and a fourth opening disposed on the first metal layer and the second metal layer; a flat portion covering the second portion exposed by the first metal layer and surrounding and defining the second opening; a first protrusion covering the source, the drain, and the gate and surrounding and defining the third opening; a protective layer comprising: a second protrusion covering the second wall structure and surrounding and defining the fourth opening; wherein the first opening, the second opening, the third opening, and the fourth opening overlap each other in a normal direction of the substrate.

2. 2. The biochip of claim 1, wherein the semiconductor layer further includes a source region and a drain region, the source surrounding the first opening and electrically connected to the source region, the drain surrounding the source and electrically connected to the drain region, the gate surrounding the drain and electrically connected to the substrate, and the first wall structure surrounding the gate.

3. The biochip of claim 2 , wherein the source, the drain, the gate, and the first wall structure are in the same layer, and the first wall structure electrically insulates the source, the drain, and the gate.

4. 2. The biochip of claim 1, wherein the solution is disposed in at least the first opening, the second opening, and the third opening, and the solution contacts the bioelectrodes and the plurality of reaction regions of the semiconductor layer.

5. 5. The biochip of claim 4, wherein the bioelectrode and the second wall structure are in the same layer, the bioelectrode and the second wall structure are separated from each other, and the second wall structure electrically insulates the bioelectrode.

6. 2. The biochip of claim 1, wherein the first protrusion completely surrounds the third opening, and the second protrusion completely surrounds the fourth opening.

7. The biochip according to claim 1 , wherein an upper surface of the second protruding portion is higher than an upper surface of the first protruding portion in the normal direction, and the upper surface of the first protruding portion is higher than an upper surface of the flat portion.

8. 2. The biochip according to claim 1, wherein the third opening is larger than the second opening, and the fourth opening is larger than the third opening.

9. The third opening is an addition region disposed corresponding to the first portion; a plurality of detection regions connected to the addition region and arranged corresponding to the plurality of reaction regions; The biochip of claim 1 , comprising:

10. Providing a substrate; forming a first insulating layer on the substrate; forming a semiconductor layer on the first insulating layer, the semiconductor layer including a plurality of reaction regions; forming a second insulating layer on the semiconductor layer, the second insulating layer comprising: A first part; and a second portion surrounding the first portion; a first opening separating the first portion and the second portion and exposing the plurality of reaction regions; and forming a first metal layer on the second portion, the first metal layer including a source, a drain, a gate, and a first wall structure separated from one another; forming a second metal layer, the second metal layer comprising: a second wall structure disposed on the first wall structure; a bioelectrode disposed on the first portion; and forming a protective layer on the first metal layer and the second metal layer, the protective layer having a second opening, a third opening, and a fourth opening; a flat portion covering the second portion exposed by the first metal layer and surrounding and defining the second opening; a first protrusion covering the source, the drain, and the gate and surrounding and defining the third opening; a second protrusion covering the second wall structure and surrounding and defining the fourth opening; and wherein the first opening, the second opening, the third opening, and the fourth opening overlap each other in a normal direction of the substrate.

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