Transport device and adapter pendant

Abstract

To utilize compatible smart devices (e.g., smartphones and tablet devices) to achieve teach pendant functionality.SOLUTION: A manufacturing facility FAB is a semiconductor process transport device including a machine controller 110 coupled to a drive section 200 to control at least one motor 200M1, 200M2 that moves an articulated arm 315 from one position to a different position, and an adapter pendant 400 having another interface (wireless connection SDP4) for connecting a compatible smart mobile device SD having predetermined resident user-operable device functional characteristics, the other interface having a connection configuration such that coupling of the compatible smart mobile device with the other interface defines input / output to the machine controller to provide input commands and output signals for motion control of the articulated arm.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This application claims the benefit of U.S. Provisional Patent Application No. 62 / 531,218, filed July 11, 2017, the disclosure of which is incorporated herein by reference in its entirety.

[0002] [Technical field] FIELD Exemplary embodiments relate generally to semiconductor processing equipment, and more particularly to semiconductor process transport apparatus. [Background technology]

[0003] Semiconductor automation robots are specialized components utilized to handle substrates used in the manufacture of semiconductor chips, such as memory chips and processors. As part of the setup of semiconductor tool automation, teach pendants are used to manually command robot movements to teach the robot positions of tool process stations in the robot coordinate system. These teach pendants allow a local operator to manually command robot movements at targeted process station locations, effectively storing the coordinates of each targeted process station.

[0004] Conventional teach pendants are typically dedicated devices with limited screen size and a touchpad keyboard. Conventional teach pendants also typically have multiple navigation steps to accomplish other functional tasks, including, but not limited to, jogging, configuring robot parameters, moving to specific absolute coordinates, and reporting the robot's position. As automation equipment expands in functionality, the functional requirements for teach pendants for semiconductor automation continue to increase in complexity. Conventional teach pendants capable of handling complex tasks are expensive relative to the cost of the automation equipment and are undesirable in the market. For some automation equipment, laptop or desktop computers with graphical user interfaces are used instead of teach pendants (giving up mobility and flexibility in their use), thereby avoiding the additional cost of purchasing expensive teach pendants for automation equipment users. The firmware of conventional teach pendants is also specific to a particular robot / tool, requiring end users to have multiple teach pendants. Upgrades and revisions to teach pendant firmware are difficult to perform on field units, and teach pendant menus are cumbersome to navigate, leading to unnecessary equipment setup time in production environments. Conventional teach pendants also require training to use and have separate product manuals for reference.

[0005] Additionally, to meet the requirements of the 2006 / 42 / EC Machinery Directive, teach pendants with emergency stop and three-position live-man or enable switches may be required for robot servicing activities. Available conventional teach pendants with emergency stop and live-man switch functionality are typically self-contained units that are hardwired to each robot / tool, lack internet access, and offer very little flexibility for functional customization. Summary of the Invention

[0006] The above aspects and other features of the disclosed embodiments are explained in the following description taken in conjunction with the accompanying drawings. [Brief explanation of the drawings]

[0007] [Figure 1A] 1 is a schematic diagram of a processing apparatus incorporating aspects of the disclosed embodiments; [Figure 1B] 1 is a schematic diagram of a processing apparatus incorporating aspects of the disclosed embodiments; [Figure 1C] 1 is a schematic diagram of a processing apparatus incorporating aspects of the disclosed embodiments; [Figure 1D] 1 is a schematic diagram of a processing apparatus incorporating aspects of the disclosed embodiments; [Figure 1E] FIG. 1B is a schematic diagram of a portion of the processing device of FIGS. 1A-1D and 1G-1M. [Figure 1F] FIG. 1B is a schematic diagram of a portion of the processing device of FIGS. 1A-1D and 1G-1M. [Figure 1G] 1 is a schematic diagram of a processing apparatus incorporating aspects of the disclosed embodiments; [Figure 1H] 1 is a schematic diagram of a processing apparatus incorporating aspects of the disclosed embodiments; [Figure 1I] 1 is a schematic diagram of a processing apparatus incorporating aspects of the disclosed embodiments; [Figure 1J] 1 is a schematic diagram of a processing apparatus incorporating aspects of the disclosed embodiments; [Figure 1K] 1 is a schematic diagram of a processing apparatus incorporating aspects of the disclosed embodiments; [Figure 1L] 1 is a schematic diagram of a processing apparatus incorporating aspects of the disclosed embodiments; [Figure 1M] 1 is a schematic diagram of a processing apparatus incorporating aspects of the disclosed embodiments; [Figure 2] 1 is a schematic illustration of a semiconductor process transport apparatus in accordance with aspects of the disclosed embodiment; [Figure 3A] 1 is a schematic illustration of a portion of a semiconductor process transport apparatus in accordance with aspects of the disclosed embodiment; [Figure 3B]1 is a schematic illustration of a portion of a semiconductor process transport apparatus in accordance with aspects of the disclosed embodiment; [Figure 3C] 1 is a schematic illustration of a portion of a semiconductor process transport apparatus in accordance with aspects of the disclosed embodiment; [Figure 3D] 1 is a schematic illustration of a portion of a semiconductor process transport apparatus in accordance with aspects of the disclosed embodiment; [Figure 3E] 1 is a schematic illustration of a portion of a semiconductor process transport apparatus in accordance with aspects of the disclosed embodiment; [Figure 4A] 1 is a schematic illustration of an adapter pendant of a semiconductor process transport apparatus in accordance with aspects of the disclosed embodiment; [Figure 4B] 1 is a schematic illustration of a semiconductor process transport apparatus in accordance with aspects of the disclosed embodiment; [Figure 5A] 1 is a schematic illustration of a portion of a graphical user interface on a compatible smart mobile device enabled by a semiconductor process transport apparatus in accordance with aspects of the disclosed embodiment; [Figure 5B] FIG. 5B is a schematic illustration of a portion of the graphical user interface of FIG. 5A in accordance with aspects of the disclosed embodiment; [Figure 5C] FIG. 5B is a schematic illustration of a portion of the graphical user interface of FIG. 5A in accordance with aspects of the disclosed embodiment; [Figure 5D] FIG. 5B is a schematic illustration of a portion of the graphical user interface of FIG. 5A in accordance with aspects of the disclosed embodiment; [Figure 5E] FIG. 5B is a schematic illustration of a portion of the graphical user interface of FIG. 5A in accordance with aspects of the disclosed embodiment; [Figure 5F] FIG. 5B is a schematic illustration of a portion of the graphical user interface of FIG. 5A in accordance with aspects of the disclosed embodiment; [Figure 5G] FIG. 5B is a schematic illustration of a portion of the graphical user interface of FIG. 5A in accordance with aspects of the disclosed embodiment; [Figure 5H] FIG. 5B is a schematic illustration of a portion of the graphical user interface of FIG. 5A in accordance with aspects of the disclosed embodiment; [Figure 5I]FIG. 5B is a schematic illustration of a portion of the graphical user interface of FIG. 5A in accordance with aspects of the disclosed embodiment; [Figure 6] FIG. 10 is a flow diagram according to aspects of the disclosed embodiment; DETAILED DESCRIPTION OF THE INVENTION

[0008] 1A-1M illustrate an exemplary substrate processing system in accordance with aspects of the disclosed embodiment. While aspects of the disclosed embodiment will be described with reference to the drawings, it should be understood that they may be embodied in many forms. Furthermore, any suitable size, shape, or type of elements or materials may be used. While aspects of the disclosed embodiment are described herein with respect to semiconductor processing systems, it should also be understood that in other aspects the disclosed embodiments may be applied to any suitable industry utilizing automated equipment (e.g., robotic manipulators, automated guided vehicles, etc.) for assembly and / or manufacturing, including, but not limited to, the automotive, aerospace, and maritime industries.

[0009] Aspects of the disclosed embodiments leverage compatible smart devices (e.g., smartphones and tablet devices) to achieve teach pendant functionality. Aspects of the disclosed embodiments not only reduce the cost of producing and / or manufacturing original equipment manufacturer (OEM) hardware (e.g., a traditional professional teach pendant and all of the electronics and hardware associated with a traditional professional teach pendant), but also increase the functionality of the teach pendant to add value to the product and end user.The improved functionality may include, for example, an easy-to-use web-based interface (e.g., a graphical user interface) with a touch screen having highly customizable menus, process stations that teach with minimal navigation via a teach pendant menu, and minimized setup time (e.g., which may result in increased productivity); the ability to query and monitor the robot's health status and fault diagnostics; the ability to perform firmware upgrades and backups from the robot controller; the ability to program and execute test scripts for robot operation and verification; the ability to monitor the temperature of the robot's arm, drive, and chamber to enable thermal expansion compensation; the ability to implement automated teach (referred to as "AutoTeach") algorithms for robot stations (e.g., as described in the patent application entitled "Tool Auto-Teach Methods and Methods for Robotic Systems" filed November 10, 2015). No. 14 / 937,676, entitled "Semiconductor Device Apparatus," which is incorporated herein by reference in its entirety; the ability to provide animation of the robot's motion and position relative to the station for remote monitoring; the ability to provide user access to any suitable information / documentation from the automated device and / or the Internet, including, for example and without limitation, semiconductor device applications (applications SDP1-SDPn installed on a compatible smart mobile device SD), product manuals, command syntax, service bulletins, firmware (or other) upgrade instructions, repair instructions, and troubleshooting guides; and the ability to leverage on-board sensing capabilities embedded in compatible smart devices to assist in teaching and diagnostics, such as robot station leveling, vibration monitoring, and checks for auto-teach.These on-board sensing capabilities allow the robot 104R software to evaluate additional information that can be used for more advanced algorithms for fault diagnosis, health monitoring, automated teaching, advanced control algorithms, and thermal expansion compensation, as a non-exhaustive list of non-limiting examples.

[0010] In addition to the above, by utilizing such a compatible smart mobile device SD, a user or robot software can further connect with external devices ED1-EDn, including, but not limited to, for example, cameras, temperature sensors, accelerometers, humidity sensors, gas flow meters, and vacuum quality gauges (see FIG. 4). The type of connection to such external devices ED1-EDn can be established by leveraging existing capabilities of the compatible smart mobile device SD's interface, such as Bluetooth or Wi-Fi. For example, the external devices ED1-EDn can include any suitable wireless connectivity for communicating with the compatible smart mobile device SD via any suitable wireless connection 497 (FIG. 4) such that data received, sensed, or collected by the external device(s) ED1-EDn is wirelessly communicated from the external device(s) ED1-EDn to the compatible smart mobile device SD.

[0011] The adapter pendant 400 (see FIGS. 2, 4A, and 4B) can also be designed to further supplement its interface for enhanced connectivity with the semiconductor fabrication facility FAB environment, such as operating as a slave device in any suitable network 258 of the fabrication facility FAB, such as an EtherCat® network, where the adapter pendant 400 is configured as an EtherCat® slave. This allows a user to customize information / data from the robot 104R or connected sensors ED1-EDn to be streamed to (or from) the fabrication facility FAB network 258, such as an EtherCat® network, to the adapter pendant 400. In one aspect, the adapter pendant 400 (and a compatible smart mobile device SD coupled thereto) can receive any suitable data from other robots / tools or any other suitable automated equipment of the fabrication facility to provide teaching of the robot 104R to which the adapter pendant 400 is coupled. Another aspect of the disclosed embodiments is that the adapter pendant 400 device can also support a backwards-compatible interface to older robot controllers, such as those with RS-232 serial ports. This allows for the use of a compatible smart mobile device SD so that it can also be used to teach and monitor older or "legacy" products. Note that the above capabilities do not require physical modifications to the compatible smart mobile device SD. Optional hardware "customization" can be implemented as part of the adapter pendant 400. However, this "customization" is not required, as it can be used to enhance or extend the range of interface or connection capabilities of the disclosed embodiments.

[0012] The capabilities described above (and described in further detail herein) may be provided by or in any suitable application / function (see the embedded functions and / or applications SDP1-SDPn shown in FIG. 2, which may be one or more of the user-operable device functional characteristics SDC1-SDCn shown in FIG. 4B and described herein) downloaded to the compatible smart mobile device SD and executed by any suitable application program interface (API) of the compatible smart mobile device SD. In one aspect, the application / function may be a single application for one or more capabilities or multiple applications / functions for one or more capabilities. The features / capabilities enabled by one or more applications / functions and / or sensors described herein and resident on the compatible smart mobile device SD are tightly coupled to the machine controller 110 of the transfer robot 104R via an adapter pendant 400 (FIGS. 2, 4A, and 4B), as further described below. A tight coupling does not have an intervening robot 104R motion command interface that mediates (to reconfigure or repeat / resend inputs / outputs) between the user-selectable inputs / outputs on the compatible smart mobile device SD, the motion commands / user selections generated therefrom (e.g., motion commands for the robot 104R that inform the robot's motion, initial position (such as one of positions 230A-230C in FIG. 2), other positions (such as one of positions 230A-230C in FIG. 2), all of which are freely selectable depending on the user selection for the input / output), and the machine controller 110.

[0013] According to aspects of the disclosed embodiment, an adapter pendant 400 (FIGS. 2, 4A, and 4B) is provided. The adapter pendant 400 is a portable cradle (e.g., a "smart" cradle) with a universal mount / connection for holding a compatible smart mobile device SD (FIGS. 2 and 4B) (e.g., a smartphone or tablet) having predetermined resident user-operable device functional characteristics SDC1-SDCn (e.g., applications, program modules, at least one sensor, data logging capabilities, graphic display, recording capabilities (e.g., video and / or audio or other data), etc.) resident on the compatible smart mobile device SD (FIG. 4B). In one aspect of the disclosed embodiment, the compatible smart mobile device SD may be a generally compatible device, i.e., one compatible smart mobile device SD may be interchangeable with any other compatible smart mobile device SD. Thus, the compatible smart mobile device 16 is not a dedicated device and does not have the specific inherent structure desired for operation of the semiconductor process transport apparatus 104 as described herein, instead relying on applications downloaded and installed on the compatible smart mobile device SD for operation of the semiconductor process transport apparatus 104. In one aspect, the compatible smart mobile device SD may be used to perform teach pendant functions (such as teaching the position of the robot / substrate holding station as described above) without the need for any special applications installed on the device.In this case, the user utilizes a web-based browser (such as Google Chrome™, Mozilla® Firefox®, Microsoft Internet Explorer®, Apple Safari™, or any other suitable web-based browser, which may be one of the resident user-operable device functionality features SDC1-SDCn) to establish connectivity (as described herein) and connect to the robot controller 110 on which resides a web server application WSA, which is responsible for implementing the control and data collection aspects of the robot 104R of the present disclosure. When a web-based browser is used to connect to the web server application WSA of the controller 110, the web server application WSA may be accessed by the web-based browser via a web address, an Internet Protocol (IP) address, or any other suitable method. The adapter pendant 400, described in more detail below, not only ameliorates the shortcomings of conventional teach pendants discussed above, but also provides the aforementioned advantages of reducing the manufacturing / purchasing costs of the teach pendant and increasing the functionality of the teach pendant, adding value to the product and end user. Aspects of the disclosed embodiments may be used with any suitable processing device, such as processing device 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H, or any other suitable automated device that uses a teach pendant.

[0014] Processing equipment 100A, 100B, 100C, 100D, 100E, 100F, 100G, and 100H, such as semiconductor tool stations, are shown in accordance with aspects of the disclosed embodiments. While semiconductor tool stations are shown in the drawings, aspects of the disclosed embodiments described herein may be applied to any tool station or application utilizing robotic manipulators. In one aspect, processing equipment 100A, 100B, 100C, 100D, 100E, and 100F are shown as having a cluster tool configuration (e.g., having a substrate holding station connected to a central chamber), while in other aspects, the processing equipment may be linearly distributed tools 100G and 100H, as described in U.S. Patent No. 8,398,355, issued March 19, 2013, and entitled "Linearly Distributed Semiconductor Workpiece Processing Tool," the disclosure of which is incorporated herein by reference in its entirety; however, aspects of the disclosed embodiments may be applied to any suitable tool station. The apparatuses 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H generally include an atmospheric front end 101, at least one vacuum load lock 102, 102A, 102B, 102C, and a vacuum back end 103. The at least one vacuum load lock 102, 102A, 102B, 102C may be coupled in any suitable arrangement to any suitable port(s) or opening(s) in the atmospheric front end 101 and / or the vacuum back end 103. For example, in one embodiment, the one or more vacuum load locks 102, 102A, 102B, 102C may be arranged in a side-by-side arrangement in a common horizontal plane, as seen in FIGS. 1B-1D and 1G-1K. In other embodiments, the one or more vacuum load locks may be arranged in a grid such that at least two vacuum load locks 102A, 102B, 102C, 102D are arranged in rows (e.g., having spaced apart horizontal surfaces) and columns (e.g., having spaced apart vertical surfaces), as shown in FIG. 1E.In yet other embodiments, the one or more load locks may be a single in-line load lock 102 as shown in FIG. 1A. In yet other embodiments, at least one vacuum load lock 102, 102E may be arranged in a stacked in-line configuration as shown in FIG. 1F. While the vacuum load lock is illustrated on end 100E1 or face 100F1 of transfer chambers 125A, 125B, 125C, 125D, it should be understood that in other embodiments, one or more load locks may be located on any number of sides 100S1, 100S2, ends 100E1, 100E2, or faces 100F1-100F8 of transfer chambers 125A, 125B, 125C, 125D. Each of the at least one load lock may also include one or more wafer / substrate resting surfaces WRP (FIG. 1F) where substrates are held on suitable supports within the respective vacuum load lock. In other embodiments, the tool station may have any suitable configuration. Each component of the atmospheric front end 101, the at least one load lock 102, 102A, 102B, 102C, and the back end 103 may be connected to a machine controller 110, which may be part of any suitable control architecture, such as, for example, a clustered architecture control. The control system may be a closed-loop controller having a master controller (which may be the machine controller 110 in one embodiment), a cluster controller, and autonomous remote controllers, such as those disclosed in U.S. Patent No. 7,904,182, entitled "Scalable Motion Control System," issued March 8, 2011 (the disclosure of which is incorporated herein by reference in its entirety). In other embodiments, any suitable controller and / or control system may be utilized.The machine controller 110 is operably coupled to the drive section 200 (FIG. 2) of the transport apparatus 104 to control at least one motor 200M1, 20M2 (FIG. 2) to move the articulated arm (such as those described herein) from one position 230A, 230B, 230C (FIG. 2) to a different other position 230A, 230B, 230C, where at least one of the one position 230B, 230C and the other position 230B, 230C is a workpiece holding station in the semiconductor processing equipment 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H, as described herein.

[0015] In one embodiment, the front end 101 generally includes a load port module 105 and a minienvironment 106, such as a front-end equipment module (EFEM). The load port module 105 may be a Box Opener / Loader-to-Tool Standard (BOLTS) interface conforming to SEMI Standards E15.1, E47.1, E62, E19.5, or E1.9 for 300 mm load ports, front-opening or bottom-opening boxes / pods, and cassettes. In other embodiments, the load port module may be configured as a 200 mm wafer / substrate interface, a 450 nm wafer / substrate interface, or any other suitable substrate interface, such as, for example, larger or smaller semiconductor wafers / substrates, flat panels for flat panel displays, solar panels, reticles, or any other suitable object. Although three load port modules 105 are shown in FIGS. 1A-1D, 1J, and 1K, in other aspects, any suitable number of load port modules may be incorporated into the front end 101. The load port modules 105 may be configured to receive substrate carriers or cassettes C from an overhead transport system, an automated guided vehicle, a manned guided vehicle, a tracked vehicle, or any other suitable transport method. The load port modules 105 may interface with the minienvironment 106 via load ports 107. The load ports 107 may enable passage of substrates between the substrate cassettes and the minienvironment 106. The minienvironment 106 generally includes any suitable transfer robot 108, which may incorporate one or more aspects of the disclosed embodiments described herein. In one embodiment, the robot 108 may be a track-mounted robot such as those described in, for example, U.S. Pat. No. 6,002,840, issued December 14, 1999, U.S. Pat. No. 8,419,341, issued April 16, 2013, and U.S. Pat. No. 7,648,327, issued January 19, 2010, the disclosures of which are incorporated herein by reference in their entireties.In other aspects, the robot 108 may be substantially similar to that described herein with respect to the back end 103. The mini-environment 106 may provide a controlled clean zone for substrate transfer between multiple load port modules.

[0016] At least one vacuum load lock 102, 102A, 102B, 102C can be disposed between and connected to the mini-environment 106 and the vacuum back end 103. In other embodiments, the load port 105 can be substantially directly coupled to at least one load lock 102, 102A, 102B, 102C or transfer chamber 125A, 125B, 125C, 125D, 125E, 125F, where the substrate carrier C is pumped to the vacuum of the transfer chamber 125A, 125B, 125C, 125D, and substrates are transferred directly between the substrate carrier C and the vacuum load lock or transfer chamber. In this embodiment, the substrate carrier C can function as a load lock such that the process vacuum of the transfer chamber extends into the substrate carrier C. As can be appreciated, if the substrate carrier C is coupled substantially directly to the load lock via a suitable load port, any suitable transfer device can be provided within the load lock or otherwise have access to the carrier C for transferring substrates to and from the substrate carrier C. It should be noted that the term vacuum as used herein refers to the vacuum within which the substrates are processed. -5This may refer to a high vacuum, such as Torr or below. At least one load lock 102, 102A, 102B, 102C generally includes an atmosphere-to-vacuum slot valve. The slot valves in the load locks 102, 102A, 102B (as well as those for the processing stations 130) may provide environmental isolation utilized to evacuate the load locks after substrates are loaded from the atmospheric front end and to maintain a vacuum in the transfer chamber when venting the locks with an inert gas, such as nitrogen. As described herein, the slot valves of the processing systems 100A, 100B, 100C, 100D, 100E, and 100F (and linear processing systems 100G and 100H) can be arranged in the same plane (as described above with respect to the load ports), in different vertically stacked planes, or a combination thereof, to accommodate the transfer of substrates to and from at least the processing stations 130 and vacuum load locks 102, 102A, 102B, and 102C coupled to the transfer chambers 125A, 125B, 125C, 125D, 125E, and 125F. At least one load lock 102, 102A, 102B, and 102C (and / or the atmospheric front end 101) may also include an aligner or any other suitable substrate measurement device for aligning a substrate fiducial to a desired position for processing. In other aspects, the vacuum load locks can be located in any suitable location in the processing system and have any suitable configuration.

[0017] The vacuum backend 103 generally includes transfer chambers 125A, 125B, 125C, 125D, 125E, and 125F; one or more processing stations or modules 130; and any suitable number of semiconductor process transport apparatuses 104 (referred to herein as transport apparatuses 104) including one or more transfer robots 104R (each having a drive section 200 with at least one motor 200M1, 200M2, as described below, and at least one articulated arm coupled to the drive section 200 for driving articulation of the articulated arm—see FIG. 2 ), which may include one or more aspects of the disclosed embodiments described herein. The transfer chambers 125A, 125B, 125C, 125D, 125E, and 125F may have any suitable shape and size, for example, conforming to SEMI Standard E72 guidelines. The transport apparatus(es) 104 and one or more transport robots 104R (which may be substantially similar to those robots described herein), as described below, may be disposed at least partially within the transport chambers 125A, 125B, 125C, 125D, 125E, 125F for transporting substrates between the load locks 102, 102A, 102B, 120C (or cassettes C located in the load ports) and the various processing stations 130. In one aspect, the transport apparatus 104 may be removable from the transport chambers 125A, 125B, 125C, 125D, 125E, 125F as a modular unit to comply with SEMI Standard E72 guidelines.

[0018] The processing stations 130 may operate on the substrate through various deposition, etching, or other types of processes to form electrical circuits or other desired structures on the substrate. Typical processes include, but are not limited to, plasma etching or other etching processes, thin film processes using vacuum such as chemical vapor deposition (CVD), plasma deposition (PVD), implantation such as ion implantation, metrology, rapid thermal processing (RTP), dry strip atomic layer deposition (ALD), oxidation / diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonder, and deposition or other thin film processes using vacuum pressure. The processing stations 130 are communicatively connected to the transport chambers 125A, 125B, 125C, 125D, 125E, and 125F in any suitable manner, such as via slot valves SV, to allow substrates to pass from the transport chambers 125A, 125B, 125C, 125D, 125E, and 125F to the processing stations 130, and conversely, from the processing stations 130 to the transport chambers 125A, 125B, 125C, 125D, 125E, and 125F. The slot valves SV of the transfer chambers 125A, 125B, 125C, 125D, 125E, 125F may be arranged to allow connection of twin (e.g., multiple substrate processing chambers arranged in a common housing) or parallel process stations 130T1-130T8, a single process station 130S, and / or stacked process modules / load locks (Figures 1E and 1F).

[0019] It should be noted that transfer of substrates to and from processing stations 130, load locks 102, 102A, 102B, 102C (or cassettes C) coupled to transfer chambers 125A, 125B, 125C, 125D, 125E, 125F may occur when one or more arms of the transport apparatus 104 are aligned with a given processing station 130 along axis R of extension and retraction of the transport apparatus 104. In accordance with aspects of the disclosed embodiment, one or more substrates may be transferred to each given processing station 130 individually or substantially simultaneously (e.g., when substrates are removed from / placed in parallel or serial processing stations, as shown in FIGS. 1B, 1C, 1D, and 1G-1K). In one embodiment, the transport apparatus 104 may be mounted on a boom arm 143 (see, for example, Figures 1D and 1G-1I), where the boom arm 143 has a single boom link or multiple boom links 121, 122, or a linear carriage 144 as described in U.S. Provisional Patent Application No. 61 / 892,849, entitled "Processing Apparatus," filed October 18, 2013, U.S. Provisional Patent Application No. 61 / 904,908, entitled "Processing Apparatus," filed November 15, 2013, and International Patent Application No. PCT / US2013 / 025513, entitled "Substrate Processing Apparatus," filed February 11, 2013 (the disclosures of which are incorporated herein by reference in their entireties).

[0020] 1L, a schematic plan view of a linear wafer processing system 100G is shown in which a tool interface section 2012 is attached to a transport chamber module 3018 such that the interface section 2012 faces generally toward (e.g., inwardly from) the longitudinal axis X of the transport chamber 3018, but is offset from the longitudinal axis X. The transport chamber module 3018 can be extended in any suitable direction by attaching other transport chamber modules 3018A, 3018I, 3018J to interfaces 2050, 2060, 2070, as described in U.S. Pat. No. 8,398,355 (previously incorporated by reference herein). Each transport chamber module 3018, 3018A, 3018I, 3018J includes any suitable wafer transport 2080, which can include one or more aspects of the disclosed embodiments described herein, for transporting wafers through the processing system 100G, for example, to and from a processing module PM. As can be appreciated, each chamber module may be capable of holding an isolated or controlled atmosphere (eg, N2, clean air, vacuum).

[0021] Referring to FIG. 1M, a schematic elevation view of an exemplary processing tool 100H, such as that taken along the longitudinal axis X of the linear transport chamber 416, is shown. In the disclosed embodiment shown in FIG. 1M, the tool interface section 12 may typically be connected to the transport chamber 416. In this aspect, the interface section 12 may define one end of the tool transport chamber 416. As seen in FIG. 1M, the transport chamber 416 may have another workpiece entry / exit station 412, for example, at the end opposite the interface station 12. In other aspects, other entry / exit stations for inserting / removing workpieces from the transport chamber may be provided. In one aspect, the interface section 12 and the entry / exit station 412 may enable loading and unloading of workpieces from the tool. In other aspects, workpieces may be loaded into the tool from one end and removed from the other end. In one aspect, the transport chamber 416 may have one or more transport chamber modules 18B, 18i. Each chamber module may be capable of holding an isolated or controlled atmosphere (e.g., N2, clean air, vacuum). As previously mentioned, the configuration / arrangement of the transfer chamber modules 18B, 18i, load lock modules 56A, 56B, and workpiece stations forming the transfer chamber 416 shown in FIG. 1M is merely exemplary; in other embodiments, the transfer chamber may have more or fewer modules arranged in any desired modular arrangement. In the illustrated embodiment, station 412 may be a load lock. In other embodiments, a load lock module may be located between end entry / exit stations (similar to station 412), or an adjacent transfer chamber module (similar to module 18i) may be configured to operate as a load lock.

[0022] Also, as previously mentioned, the transfer chamber modules 18B, 18i have one or more corresponding transfer robots 26B, 26i disposed therein, which may include one or more aspects of the disclosed embodiments described herein. The transfer robots 26B, 26i of each transfer chamber module 18B, 18i may cooperate to provide a linearly distributed workpiece transport system 420 within the transfer chamber. In this aspect, the transfer robot 26B may have a typical SCARA arm configuration (although in other aspects, the transfer arms may have any other desired arrangement, as described below).

[0023] In the aspect of the disclosed embodiment shown in FIG. 1M, the arms and / or end effectors of the transfer robot 26B may be arranged to provide what may be referred to as a fast-swap configuration, enabling rapid wafer swap transfer from a pick / place position. The transfer arm 26B may have any suitable drive section 200 (e.g., coaxially arranged drive shafts, parallel drive shafts, horizontally adjacent motors, vertically stacked motors, etc.—see FIG. 2 ) to provide each arm with any suitable number of degrees of freedom (e.g., independent rotation about shoulder and elbow joints with Z-axis motion, etc.). As seen in FIG. 1M , in this aspect, modules 56A, 56B, 30i may be positioned in the gaps between the transfer chamber modules 18B, 18i to define appropriate processing module(s), load lock(s), buffer station(s), metrology station(s), or any other desired station(s). For example, gap modules such as load locks 56A, 56B and workpiece station 30i each have fixed workpiece supports / shelves 56S, 56S1, 56S2, 30S1, 30S2 that cooperate with the transport arms to enable transport of workpieces or workpieces along the length of the transport chamber along the linear axis X of the transport chamber. As an example, workpiece(s) may be loaded into transport chamber 416 by interface section 12. Workpiece(s) may be placed on support(s) of load lock module 56A with transport arm 15 of the interface section. Workpiece(s) in load lock module 56A may be moved between load lock module 56A and load lock module 56 by transport arm 26B in module 18B, and in a similar and sequential manner between load lock 56 and workstation 30i using arm 26i (in module 18i), and between station 30i and station 412 using arm 26i in module 18i.This process may be reversed in whole or in part to move the workpiece(s) in the opposite direction. Thus, in one embodiment, workpieces can be moved in any direction along axis X and to any location along the transport chamber, and loaded and unloaded from any desired (processing or other) module in communication with the transport chamber. In other embodiments, gap transport chamber modules with fixed workpiece supports or shelves may not be provided between the transport chamber modules 18B, 18i. In such embodiments, the transport arms of adjacent transport chamber modules may pass workpieces through the transport chamber, either directly to the end effector or from one transport arm to the end effector of another transport arm. Processing station modules may operate on wafers via various deposition, etching, or other types of processes to form electrical circuits or other desired structures on the wafers. Processing station modules may be connected to the transport chamber modules to allow wafers to be transferred from the transport chamber to the processing stations, and vice versa. A suitable example of a processing tool having general features similar to the processing device depicted in FIG. 1D is described in U.S. Pat. No. 8,398,355, previously incorporated by reference in its entirety.

[0024] 2 and 3A-3E, the boom arm 143 and / or transport apparatus 104 may include any suitable arm linkage(s). Suitable examples of arm linkages are described, for example, in U.S. Pat. No. 7,578,649 issued on August 25, 2009, U.S. Pat. No. 5,794,487 issued on August 18, 1998, U.S. Pat. No. 7,946,800 issued on May 24, 2011, U.S. Pat. No. 6,485,250 issued on November 26, 2002, U.S. Pat. No. 7,891,935 issued on February 22, 2011, U.S. Pat. No. 8,419,341 issued on April 16, 2013, and U.S. patent application Ser. No. 13 / 293,717, entitled "Dual Arm Robot," filed on November 10, 2011, and U.S. patent application Ser. No. 13 / 293,717, entitled "Linear Vacuum Robot with Z Motion and Articulated Arm," filed on September 5, 2013. No. 13 / 861,693, entitled "Robot Arm," the disclosures of which are all incorporated herein by reference in their entireties. In aspects of the disclosed embodiment, at least one transport arm, boom arm 143, and / or linear slide 144 of each transport apparatus 104 may be of a conventional SCARA arm 315 (Selectively Compliant Articulated Robotic Arm) (FIG. 3C) type design, including an upper arm 315U, a band-driven forearm 315F, and a band-constrained end effector 315E, or any other suitable arm design, such as a telescoping arm or a Cartesian linear slide arm 314 (FIG. 3B). Suitable examples of transport arms can be found, for example, in U.S. patent application Ser. No. 12 / 117,415, filed May 8, 2008, entitled "Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism," and U.S. Patent No. 7,648,327, issued January 19, 2010, the disclosures of which are incorporated herein by reference in their entireties.The movement of the transport arms may be independent of one another (e.g., extension / retraction of each arm is independent of the other arms), may be operated via lost motion switches, or may be operably linked in any suitable manner such that the arms share at least one common drive axis. In still other embodiments, the transport arms may have any other desirable configuration, such as a frog leg arm 316 (FIG. 3A) configuration, a leap frog arm 317 (FIG. 3E) configuration, a symmetric arm 318 (FIG. 3D) configuration, etc. Suitable examples of transfer arms are disclosed in U.S. Patent No. 6,231,297 issued May 15, 2001, U.S. Patent No. 5,180,276 issued January 19, 1993, U.S. Patent No. 6,464,448 issued October 15, 2002, U.S. Patent No. 6,224,319 issued May 1, 2001, U.S. Patent No. 5,447,409 issued September 5, 1995, U.S. Patent No. 5,447,409 issued August 25, 2009, U.S. Patent No. 5,447,409 issued August 25, 2009, U.S. Patent No. 5,447,409 issued September 5, 1995, U.S. Patent No. 5,447,409 issued August 25, 2009, U.S. Patent No. 5,447,409 issued September 25, 2009 ... No. 7,578,649 issued on May 18, 1998; U.S. Pat. No. 5,794,487 issued on August 18, 1998; U.S. Pat. No. 7,946,800 issued on May 24, 2011; U.S. Pat. No. 6,485,250 issued on November 26, 2002; U.S. Pat. No. 7,891,935 issued on February 22, 2011; and U.S. patent application Ser. No. 13 / 293,717 entitled "Dual Arm Robot," filed on November 10, 2011, and U.S. patent application Ser. No. 13 / 270,844 entitled "Coaxial Drive Vacuum Robot," filed on October 11, 2011, the disclosures of all of which are incorporated herein by reference in their entireties. It should be noted that the boom arm 143 may have a configuration substantially similar to the transport arms 314, 315, 316, 317, and 318, where the transport device 104 is attached to the boom arm instead of the end effectors 315E, 316E, 317E1, 317E1, 318E1, and 318E2.

[0025] As can be appreciated, the (one or more) transport arms 314, 315, 316, 317, 318 are operably coupled to their respective drive sections 200 in any suitable manner so as to effect articulation of the transport arms 314, 315, 316, 317, 318 relative to a frame, such as frame 200F or any suitable frame of processing tools 100A-100H, between a first arm position 230A (e.g., a retracted position of the transport arms, etc. - see FIG. 2) and a second arm position 230B or 230C (e.g., an extended position of the transport arms, etc. - see FIG. 2) different from the first arm position 230A, in a transport space TSP (see FIG. 2) defined by articulation of the transport arms 314, 315, 316, 317, 318 along at least one axis of motion (e.g., at least one of R, θ, Z) relative to frame 200F. Suitable examples of drive sections can be found in the patent applications and publications mentioned above, as well as, for example, U.S. Patent Nos. 6,845,250, 5,899,658, 5,813,823, and 5,720,590, the disclosures of which are incorporated herein by reference in their entireties. Any suitable controller, such as controller 110, is coupled to drive section 200 in any suitable manner to drive drive section 200 to effect articulation of transport arms 314, 315, 316, 317, 318.

[0026] 2, 4A, and 4B, the adapter pendant 400 may be included with or be a part of any suitable semiconductor transport apparatus 104, for example, to be operably coupled to the machine controller 110 for input / output I / O. In one aspect, the adapter pendant 400 may be hardwired 499 to the robot 104R (and machine controller 110) in any suitable manner (e.g., via a Universal Serial Bus (USB) connection, a FireWire™ connection, a Thunderbolt™ connection, a serial interface (e.g., RS-232, etc.), Safety over EtherCat™, etc.), while in other aspects, the adapter pendant may be wirelessly connected 498 to the robot 104R (and machine controller 110) in any suitable manner via any suitable wireless communication protocol (e.g., including, but not limited to, Bluetooth™, Zigbee™, Z-Wave™, wireless local area network IEEE 802.11 standard, etc.). In one aspect, the adapter pendant 400 is configured to be backward compatible with existing / legacy processing equipment / robots. For example, the communication protocol used between the adapter pendant 400 and, for example, an existing / legacy robot may be a standard RS-232 communication protocol implemented via a wired 499 connection, where a compatible smart mobile device SD can communicate with the existing / legacy robot using the driver and adapter module 440 integrated within the adapter pendant 400. Here, legacy commands may be supported (e.g., via the adapter pendant 400 and the compatible smart mobile device SD) to allow older products / equipment to benefit from aspects of the disclosed embodiments.

[0027] The adapter pendant 400 includes a frame 401 that forms a cradle or other universal mount 410 for any suitable compatible smart mobile device SD. The universal mount 410 can be a recess into which a compatible smart mobile device SD is inserted and held, or any suitable bracket to which a compatible smart mobile device SD can be secured. The following describes the communication interface between the compatible smart mobile device SD and the adapter pendant 400.

[0028] The adapter pendant 400 may include what is generally referred to as a mode selector switch 429 ( FIG. 2 ) configured to change the operating mode of the robot 104R and / or the semiconductor process transport apparatus 104. In one embodiment, the mode selector switch 429 includes one or more of a liveman switch 430, an E-stop switch 450, and an operation selector switch 460. In one embodiment, the liveman switch 430 or its equivalent is coupled to the frame 401 in any suitable manner (so as to be integral with the adapter pendant 400) to enable operation of the robot 104R while using the adapter pendant 400. For example, the liveman switch 430 may be a three-position liveman (or enable) switch 430 or any other suitable functionally equivalent switch. For illustrative purposes, the three-position liveman switch is a three-position switch (OFF-ON-OFF, corresponding sequentially to the first, second, and third positions 430P1, 430P2, and 430P3 of the switch) that allows movement of the robot 104R only when lightly depressed and held in the second position 430P2 ("ON" or second position). The three-position liveman switch disables movement of the robot 104R when in the first and third positions 430P1, 430P3, such as when released ("OFF" or first position) or fully depressed ("OFF" or third position). The liveman switch 430 may be adapted to stop movement of the robot 104R (as described herein) in accordance with any appropriate industry standard (including those described herein with respect to the E-stop switch 450) covering the application in which the adapter pendant 400 is utilized (e.g., automated robotics or other applications for any industry, such as semiconductor, automotive, manufacturing, assembly, etc.). In one aspect, where applicable, the liveman switch 430 may be implemented via the compatible smart mobile device SD, such as via a graphical user interface GUI displayed on a display 477 of the compatible smart mobile device SD.For example, the graphical user interface GUI may include a liveman icon 599 (such as the "GO" icon in FIG. 5A) that enables movement of the robot 104R, but requires the user to maintain physical contact with the liveman icon 599 (e.g., with the user's finger) for movement of the robot 104R (e.g., to enable movement), and breaking physical contact between the user and the liveman icon 599 stops the robot movement in a manner similar to that described herein with respect to the liveman switch 430. Additionally, a touchscreen (e.g., the display 477 of a compatible smart mobile device SD with pressure-sensitive features (e.g., a pressure-sensitive touchscreen)) may function to provide the off-on-off functionality of a conventional three-position liveman switch, such that the robot stops when the user breaks contact with the liveman icon 599 or when the user presses the liveman icon 599 too hard.

[0029] The adapter pendant 400 may also include one or more of an emergency stop switch, an emergency mechanical stop switch / emergency shutoff (EMO), an electronic shutoff (ESO), an emergency system off switch, and / or other suitable switches (generally referred to as E-stop switches 450, as illustrated in Figures 2, 4A and 4B) coupled to the frame 401 in any suitable manner so as to be integral with the adapter pendant 400. The E-stop switch 450 may comply with any applicable industrial standard covering the application in which the adapter pendant 400 is used (e.g., automated robotics or other applications for any industry, such as semiconductor, automotive, manufacturing, assembly, etc.), including, but not limited to, the SEMIS2-93 standard; the ANSI (American National Standards Institute) B11, Electrical and Mechanical Equipment Guidelines standard; and / or the ANSI / NFPA (National Fire Protection Association) 79, electrical standards for industrial machinery standards for at least Stop Category 0 (immediate removal of power to the machine or mechanical disconnection (declutching) of the hazardous element) and Stop Category 1 (controlled stop with power available to stop the machine, then removing power when stop is achieved). In one aspect, where applicable, the E-stop switch 450 may be implemented via a compatible smart mobile device SD, such as via a graphical user interface GUI of the compatible smart mobile device SD. For example, the graphical user interface GUI may include an emergency stop icon 598 (such as the "STOP!" icon in FIG. 5A) that disables operation of the robot 104R, such that when the emergency stop icon is pressed / touched by a user, robot operation stops in a manner similar to that described with respect to the E-stop switch 450.

[0030] The adapter pendant 400 may also include an operation selection switch 460. The operation selection switch 460 is configured to switch the operation mode of the robot 104R, for example, to which the adapter pendant 400 is coupled. The operation modes of the robot 104R may include an automatic operation mode, a manual operation mode, and / or a teach operation mode. In one embodiment, selection of the operation mode of the robot 104R may be enabled via software of the compatible smart mobile device SD and / or hardware of the adapter pendant 400. For example, the compatible smart mobile device SD and the adapter pendant 400 may be configured such that coupling of the compatible smart mobile device SD to the adapter pendant enables at least a manual operation mode and a teach operation mode (any of which may then be selected via a graphical user interface GUI of the compatible smart mobile device SD). In one embodiment, coupling of the compatible smart mobile device SD to the adapter pendant enables an automatic operation mode, a manual operation mode, and a teach operation mode (any of which may then be selected via a graphical user interface GUI of the compatible smart mobile device SD). In one aspect, removing or disconnecting the compatible smart mobile device SD from the adapter pendant 400 may preclude operation of the robot 104R in manual and teach operating modes (e.g., the robot 104R may only operate in automatic operating mode with the compatible smart mobile device SD removed / disconnected from the adapter pendant 400).

[0031] In one aspect, the adapter pendant 400 may include a physical mode changeover switch 473 coupled to the frame 401 in any suitable manner. The mode changeover switch 473 may be operably coupled to a compatible smart mobile device SD via interface 410 such that when the mode changeover switch 473 is switched between automatic, manual, and teach modes, the graphical user interface GUI of the compatible smart mobile device SD automatically changes, e.g., the smart device is configured to automatically display different operational screens (such as those described below) to the user depending on the position of the mode changeover switch 473.

[0032] 2, 4A, and 4B, as described above, the adapter pendant 400 is operably coupled to both the compatible smart mobile device SD and the robot 104R. In one aspect, the movement of the robot 104R can be kinematically constrained (e.g., velocity, acceleration, jerk, torque, etc.) to be within any appropriate teaching parameters when the compatible smart mobile device SD is operably coupled to the adapter pendant 400. To facilitate operably coupling both the compatible smart mobile device SD and the robot 104R, the adapter pendant 400 includes a machine controller interface 405 and another interface 410. The machine controller interface 405 operably couples the adapter pendant 400 to the machine controller 110 for input / output I / O in the manner described above, using a wired 499 or wireless 498 connection. The another interface 410 is distinct from the machine controller interface 405 and is configured to operably connect with the compatible smart mobile device SD.

[0033] As described above, the compatible smart mobile device SD has predetermined resident user-operable device functional characteristics SDC1-SDCn resident on the compatible smart mobile device SD. The further interface 410 has a connection configuration 410C such that coupling of the compatible smart mobile device SD with the further interface 410 automatically enables configuration of at least one of the resident user-operable device functional characteristics SDC1-SDCn of the compatible smart mobile device SD to define input / output I / O to the machine controller 110 via the adapter pendant 400 to provide input commands and output signals for controlling movement of the articulated arm 315 of the robot 104R from one position 230A, 230B, 230C (FIG. 2) to another position 230A, 230B, 230C (FIG. 2). In one aspect, the other interface 410 has a connection configuration such that coupling of the compatible smart mobile device SD to the other interface 410 enables close coupling of at least one of the user-operable functional characteristics SDC1-SDCn of the compatible smart mobile device SD coupled to the machine controller 110 via the adapter pendant 400, whereby at least one of the user-operable device functional characteristics SDC1-SDCn of the compatible smart mobile device SD coupled to the other interface SD defines a closely coupled user-selectable input / output 498CC, 499CC of the semiconductor process transport apparatus 104 (see FIG. 4B ).It should be noted that the close coupling 498CC, 499CC of at least one of the user operable functional characteristics SDC1-SDCn of the compatible smart mobile device SD does not have an intervening robot 104R motion command interface that intervenes (to reconfigure or repeat / resend the input / output) between the user selectable input / output on the compatible smart mobile device SD, the motion commands / user selections generated therefrom (e.g., the motion commands of the robot 104R that inform the robot's motion, initial position (such as one of positions 230A-230C - FIG. 2), other positions (such as one of positions 230A-230C - FIG. 2), all of which are freely selectable depending on the user selection for the input / output) and the machine controller 110.

[0034] In one aspect, the connection configuration is a plug-and-play connection configuration, and is at least one of a short-range or near-field radio frequency connection (as described above) and a universal serial bus port connection (or other wired connection as described above). In one aspect, configuration of at least one of the resident user-operable device functional characteristics SDC1-SDCn is automatically enabled upon user initialization of a compatible smart mobile device SD coupled to the adapter pendant 400. For example, in one aspect, a graphical user interface GUI (and machine controller 110) for interfacing with the robot 104R is automatically “activated” or initialized and visually displayed on the compatible smart mobile device SD (e.g., opened so that the user can control the articulated arm 315 of the robot 104R), while in other aspects, a user may need to actively select at least one of the resident user-operable device functional characteristics SDC1-SDCn for interfacing with the controller 110 and the robot 104R, whereby a graphical user interface GUI is displayed on the compatible smart mobile device SD.

[0035] In one aspect, the connection configuration 410C of the other interface 410 is configured to initialize a lockout (or limited access / function) of at least another predetermined resident user-operable functional characteristic SDCL on the compatible smart mobile device SD upon coupling of the compatible smart mobile device SD with the other interface 410. Note that the at least another predetermined resident user-operable functional characteristic SDCL may be one or more of the predetermined resident user-operable functional characteristics SDC1-SDCn. Here, the compatible smart mobile device SD may have an unrestricted operation mode (e.g., when the compatible smart mobile device SD is not logged in to the machine controller 110 and / or not coupled to the adapter pendant 400) and a restricted operation mode (e.g., when the compatible smart mobile device SD is logged in to the machine controller 110 and / or coupled to the adapter pendant 400). When in the restricted operation mode, the compatible smart mobile device SD may have one or more functional characteristics SDC1-SDCn disabled and unavailable compared to the unrestricted operation mode. For example, in one aspect, machine controller 110 may be configured to remotely manage and control user-operable device functional characteristics SDCL, SDC1-SDCn of compatible smart mobile devices SD according to any suitable predetermined system rules or standards that may prevent and / or allow access to one or more of the predetermined resident user-operable functional characteristics SDC1-SDCn. In one aspect, machine controller 110 may be configured to enable access to a graphical user interface GUI (see FIGS. 4B and 5A-5I) for controlling transfer robot 104 and restrict one or more of the other predetermined resident user-operable functional characteristics SDC1-SDCn that may communicate with machine controller 110.

[0036] For example, when a compatible smart mobile device SD is coupled to the adapter pendant 400, control of access to the transport robot 104 via the compatible smart mobile device SD may be limited by a "login" function of the user-operable device functionality characteristic SDCL (e.g., the compatible smart mobile device SD transitions between an unrestricted mode of operation and a restricted mode of operation with the login function). In other aspects, the user-operable device functionality characteristic SDCL for controlling the transport robot 104 may be limited (e.g., inaccessible) unless a compatible smart mobile device SD is connected to the adapter pendant 400. In yet another aspect, a user of a compatible smart mobile device SD may be required to “log in” to the user-operable device functional characteristics SDC1-SDCn for controlling the transport robot 104 before entering a manufacturing assembly base (FAB) in which the transport robot 104 is located, and upon login, one or more user-operable device functional characteristics SDC1-SDCn of the compatible smart mobile device SD (e.g., video recorder, audio recorder, sensors, etc., which may limit the data of the compatible smart mobile device SD) are locked and inaccessible, while the compatible smart mobile device SD is placed within the FAB, where, by coupling the compatible smart mobile device SD to the adapter pendant 400, at least the graphical user interface GUI (see FIGS. 4B-5I) becomes accessible for controlling the transport robot 104. Connection to the adapter pendant 400 may also provide limited access to data recording, such as enabling the use of a camera to teach the substrate holding station positions 230B, 230C (see Figure 2) of the transport robot 104, or the use of accelerometer data for vibration analysis.

[0037] The computer network and / or internet access of the compatible smart mobile device SD may also be restricted. For example, when a compatible smart mobile device SD is coupled to the adapter pendant 400, internet access may be provided only to predetermined web pages (e.g., an equipment manufacturer's website for downloading firmware updates and online troubleshooting). As another example, access to the FAB computer network may be restricted to predetermined areas of the FAB computer network (e.g., to predetermined servers / files) by the machine controller 110 and / or via any suitable "login" of the user-operable device functional characteristic SDCL for controlling the transfer robot 104.

[0038] In one embodiment, the machine controller 110 includes a login database 110DB (see FIGS. 2 and 4B) containing information related to user logins, personalized settings and data, and any other appropriate credentials. The login database 110DB may be part of an automatic login system, in which the machine controller 110 detects coupling of a compatible smart mobile device SD with the adapter pendant 400, automatically obtains predetermined credentials from the compatible smart mobile device SD, and, according to the credentials, provides the compatible smart mobile device SD with predetermined functionality (e.g., access to a graphical user interface GUI for controlling the transfer robot 104) while restricting other operational device functionality characteristics (e.g., restricting Internet access to predetermined web pages, restricting data recording, restricting camera use, restricting text (SMS) messages, etc.). In one embodiment, the phone function of the compatible smart mobile device SD may remain active to allow the user or others to access, for example, the equipment manufacturer's technical service by phone. In other aspects, the telephone functionality of the compatible smart mobile device SD may be limited to receiving incoming calls, where outgoing calls are limited to only predetermined phone numbers (e.g., the equipment manufacturer's technical service and other predetermined phone numbers, etc.) In other aspects, the functionality of the compatible smart mobile device SD may be limited in any suitable manner via hardware (e.g., the adapter pendant 400 and / or the controller 110C) and / or software (e.g., an application resident on the compatible smart mobile device SD) to, for example, prevent unwanted data capture and / or machine tampering by the compatible smart mobile device SD while at the manufacturing facility where the transfer robot 104 is installed.

[0039] As described above, the further interface 410 has a connection configuration 410C such that coupling of a compatible smart mobile device SD with the further interface 410 automatically enables configuration of at least one of the resident user-operable device functional characteristics SDC1-SDCn of the compatible smart mobile device SD to define input / output I / O to the machine controller 110. The input / output I / O defined by at least one of the resident user-operable device functional characteristics SDC1-SDCn has a configuration embodying motion teach control (see FIGS. 5A-5I) to effect teaching of machine controller 110 motion control of the articulated arm 315 of the robot 104R from one position 230A, 230B, 230C (FIG. 2) to another position 230A, 230B, 230C (FIG. 2). For example, the resident user-operable device functional characteristics SDC1-SDCn include a graphical user interface GUI of a compatible smart mobile device SD configured to define a motion teach control input / output interface 500 for effecting teaching of the machine controller 110 motion control of the articulated arm 315 from one position 230A, 230B, 230C (FIG. 2) to another position 230A, 230B, 230C (FIG. 2). The input / output interface 500 is illustrated on the compatible smart mobile device SD in FIG. 4B for illustrative purposes.

[0040] 5A-5I, an exemplary graphical user interface GUI of a compatible smart mobile device SD configured to define a motor teach control input / output interface 500 is described. In one aspect, the motor teach control input / output interface 500 includes a home page or home screen 500P. In the manner described above, the home page 500P may be automatically displayed on the graphical user interface GUI upon user initialization of the compatible smart mobile device SD coupled to the adapter pendant 400, while in other aspects, the motor teach control input / output interface 500 may be manually selected from the graphical user interface GUI so that the home page 500P is displayed. The home page 500P may include links to other “pages” of the motor teach control input / output interface 500 that enable a user to control the articulated arm 315 of the robot 104R in various ways. For example, the home page 500P may include links or icons 501-506 that, when activated by, for example, touching the corresponding icon on the graphical user interface GUI, open the respective page of the motor teach control input / output interface 500. For example, the home page 500P may include a homing icon 501, a configuration icon 502, a diagnostics icon 503, a teach icon 504, a script icon 505, a data collection icon 506, and / or any other suitable icons for guiding a user to control the motion teach control input / output interface 500 for interfacing with the robot 104R and the controller 110 in any suitable manner. Any one or more pages of the motion teach control input / output interface 500 may also include, where appropriate, the liveman icon 599 and emergency stop icon 598 described above.

[0041] 5B is an example illustration of a homing page 501P displayed on the graphical user interface GUI when the homing icon 501 is activated. The homing page 501P may include any suitable functionality for moving the articulated arm 315 of the robot 104R to a predetermined calibrated home position of the articulated arm 315 (e.g., where the end effector 315E is moved to a position corresponding to a 0° orientation along the rotation axis θ, a 0 (zero) position along the extension axis R, a 0 (zero) height along the mounted Z axis, etc., where the home position is the position from which all movements of the articulated arm 315 are measured). For example, the homing page 501P may include a home axis 509 category of functions 510-513. These functions 510-513 may include one or more of a home all function 510 that returns all of the R, θ, and Z axes to their home positions, a home R function 511 that returns the extension axis R to its home position, a home T function 512 that returns the rotation axis θ to its home position, and a home Z function 513 that returns the Z axis to its home position. The homing page 501 may also include information related to the operation of the robot 104R (as obtained from the controller 110), such as a robot type 514 and a homed status 515 of each of the axes R, θ, and Z. In one aspect, the home page 500P (or at least a home page icon) may be always present on the graphical user interface (see FIGS. 5D and 5E), allowing the user to easily switch between different pages 502P, 503P, 504P, 505P, 506P (corresponding to icons 502-506) of the movement teaching control input / output interface 500 with a single selection step. In other aspects, each of the pages 502P, 503P, 504P, 505P, 506P corresponding to the icons 502-506 may include a "Back to Home Page" icon 597 that redisplays the home page 500P on the graphical user interface GUI for switching between the different pages 502P, 503P, 504P, 505P, 506P corresponding to the icons 502-506.

[0042] 5C is an exemplary illustration of a teach page 504P displayed on a graphical user interface GUI (displayed on a display 477 of a compatible smart mobile device SD—FIG. 2) when a teach icon 504 is activated. Here, the display 477 is configured to visually display at least one user-selectable teach parameter for teaching articulated arm movement of the articulated arm 315 (FIG. 2). Here, the selectable teach parameter may be any suitable teach parameter, including, but not limited to, an articulated arm position (R, θ, Z) 517, a number of substrate-holding stations 571, a number of pans 572 of the articulated arm 315, a number of slots at a substrate-holding station 573, a pitch between substrate-holding slots 574, an incremental movement step distance 575, or any other suitable teach parameter. The teach page 504P may include any suitable functionality for moving the articulated arm 315 of the robot 104R to teach the robot 104 and robot controller 110 the placement of station positions, such as positions 230B and 230C. The teach page 504P may include one or more of a jog control 516 for manually moving the articulated arm 315, a position indicator 517 for displaying the position of the articulated arm, and station teach status information 518. The jog control 516 may include an icon 516S for selecting an axis R, θ, or Z to be manually moved. The jog control 516 may also include a toggle icon 516M for moving the articulated arm 315 along a selected axis R, θ, or Z. The position indicator 517 may indicate the position of the articulated arm 315 when the arm is moved using the toggle icon 516M. The station teach status information 518 may identify the substrate holding station (STN—positions 230B, 230C, etc.) and provide an indication (STATUS) of whether a particular robot move for the station (such as a STEP—take-out move, place move, and / or extend move along a particular axis) is being taught, and the operating mode of the robot move for the identified substrate holding station (STN).

[0043] 5D is an exemplary diagram of teaching page 504P, where home page 500P is always present on the GUI and the functionality of homing page 501P is included in / combined with the functionality of teaching page 504P. FIG. 5E is another exemplary diagram of teaching page 504P, where homing page 500P is always present on the GUI. However, teaching page 504P in FIG. 5E lacks the functionality of homing page 501P.

[0044] 5F is an example illustration of a configuration page 502P displayed on the graphical user interface GUI when the configuration icon 502 is activated. The configuration page 502P may include any suitable functionality for configuring one or more of communications between the compatible smart mobile device SD and the robot 104R / controller 110 (see robot I / O icon 512), network communications (see network I / O icon 522), robot applications (see robot application icon 520), and station options (see station options icon 523). The robot I / O icon 521 may enable a user to configure the communication protocols used between the compatible smart mobile device SD and the robot 104R / controller 110 in any suitable manner. The network I / O icon 522 may enable a user to configure any suitable network settings, such as providing the compatible smart mobile device SD with access to the Internet and / or the computer network of the fabrication equipment base (FAB) in which the semiconductor process tool 104 is installed. The network configuration functionality provided by the network I / O icon may be password / key protected so that the fab owner (as opposed to a regular user of the adapter pendant 400) can restrict internet access to certain web pages or restrict computer network access to certain information on the computer network. The robot application icon 520 may provide functionality for selecting the number of motors 200M1, 200M2 that the drive section 200 of the robot 104R includes, the number of arm links, the type of end effector 315E, and / or any other suitable configurable options for the robot 104R. The station options icon 523 may provide functionality for setting the number of substrate holding stations, the type of substrate holding station (e.g., cassette, aligner, process station, etc.), the number of substrate holding slots in the substrate holding station, and / or any other suitable options that may be present in the substrate holding station(s).Note that the settings / configurations entered on the configuration page 502P may affect which icons appear on other pages. For example, if the configuration page 502P specifies that the robot 104R includes an extension axis R and a rotation axis θ, but not a Z axis, the homing page 501P (and / or other pages, such as the teach page 504P) may not include an icon related to the Z axis.

[0045] FIG. 5G is an example diagram of a script page 505P displayed on the graphical user interface GUI when the script icon 505 is activated. The script page 505P may include any suitable functionality for creating new scripts or modifying existing scripts for the robot 104R's functions. For example, the script page 505P may include a script interface 530 that displays scripts of the robot 104R's operations to the user. The script interface 530 may include functionality for running, pausing, and / or stopping the script (see the run, pause, and stop icons). The script page 505P may also include a command line interface 531 that, when selected by the user, displays the alphanumeric keyboard KB of the compatible smart mobile device SD on the graphical user interface GUI to allow the user to enter new scripts or modify the scripts displayed in the script interface 530. The user-operable device function characteristics SDC1-SDCn of the compatible smart mobile device SD may also provide animation functions for the robot 104R. For example, script page 505P may include display area 530D configured to display, for example, an animation of robot 104R corresponding to a script entered into script interface 530.

[0046] FIG. 5H is an example diagram of a diagnostics page 503P displayed on the graphical user interface GUI when the diagnostics icon 503 is activated. The diagnostics page 503P may include any suitable functionality for indicating to a user, via the graphical user interface GUI, the operational status of any suitable component of the semiconductor process transport apparatus 104. For example, there may be status indicators 540 for motor operation, encoder operation, processor utilization (of the controller 110), network utilization, vibration levels, and energy consumption. There may be a color-coded legend 550 displayed on the diagnostics page 503P that color-coordinates the operational status. For example, green may indicate normal operation, yellow may indicate a warning condition, and red may indicate a failure of a monitored component. Each status indicator 540 may change color to indicate the operational status of the respective monitored component(s) (e.g., motor, encoder, processor, etc.).

[0047] FIG. 5I is an example diagram of a data collection page 506P displayed on the graphical user interface GUI when the data collection icon 506 is activated. The data collection page 506P may include any suitable functionality for collecting and viewing data regarding any suitable component of the semiconductor process transport apparatus 104. For example, the data collection page 506P may include parameter settings 560 configured to enable a user to set a sampling period, number of samples, a trigger type (e.g., when sampling begins), a trigger delay, whether to display sampled data continuously on a display 563, or any other suitable data collection parameter. Here, the display 563 (which may be all or a portion of the display 477 of the compatible smart mobile device SD) is configured to visually display a time record of at least one recorded arm motion parameter (e.g., motor feedforward torque or any other suitable parameter) of the articulation of the articulated arm 315. The data collection page 506P may also include a variable selection setting 561 configured to enable a user to select any suitable parameter corresponding to the monitored component for data collection. For example, parameters may include motor torque, motor current, motor power, motor tracking error, end effector tracking error, etc. Control icons 562 are also provided on the data collection page 506P and are configured for user selection to start data collection, stop data collection, save the collected data (e.g., to any suitable memory of the controller 110 in a compatible smart mobile device SD or any other suitable storage location on the FAB computer network to which the adapter pendant is coupled), or, for example, simulate data collection based on selected parameter settings 560 and / or variable selection settings 561. The collected data may be displayed visually or in any other suitable manner on a display 563 of the data collection page 506P.

[0048] 2, the built-in functionality and / or applications SDP1-SDPn of a compatible smart mobile device SD (which may be one or more of the user-operable device functional characteristics SDC1-SDCn described herein) may be leveraged to make semiconductor process tool setup more efficient and reduce machine downtime using adapter pendant 400. For example, a compatible smart mobile device SD may include any suitable built-in functionality and / or applications SDP1-SDPn, which may include a level (e.g., tilt from horizontal) indicator / sensor SDP1, an accelerometer SDP2, a camera SDP3, a temperature sensor SDP8, wireless connectivity SDP4, internet access SDP5, microphone(s) SDP7, and / or any other suitable software / hardware functionality.

[0049] Level indicator SDP1 may be used to measure the level (e.g., deviation from horizontal) of end effector 315E, processing station / substrate holding station 230B, 230C, and / or any other suitable feature(s) of processing equipment 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H. For example, adapter pendant 400 with a compatible smart mobile device SD coupled thereto may be placed / seated on end effector 315E (see FIG. 2) or other suitable structural feature of transfer robot 104R or substrate station to detect the level / tilt of transfer arm 315 or substrate holding station (for illustrative purposes, adapter pendant 400 is illustrated as seated on substrate station surface 230CS of substrate holding station / position 230C).

[0050] In one aspect, the accelerometer SDP2 of the compatible smart mobile device SD may be used to detect, measure, and / or otherwise monitor vibration VIB generated by the transfer arm 315 and / or any other suitable feature of the processing equipment 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H. For example, the compatible smart mobile device SD may be wirelessly coupled to the adapter pendant 400 so that the movement of the transfer robot 104R can be programmed, for example, via script page 505P, for a delayed movement (e.g., beginning articulation movement of the articulated arm 315 after a predetermined period of time has elapsed), and the compatible smart mobile device SD is positioned / seated on the end effector 315E (see FIG. 2 ) or other suitable structural feature of the transfer robot 104R or substrate station to detect vibration VIB with the accelerometer SDP2 during the delayed movement of the articulated arm 315. After the programmed joint movement of the articulated arm 315 has stopped, the compatible smart mobile device SD may be removed and reinserted into the adapter pendant 400. In other embodiments, the accelerometer of the external device ED1 (see FIG. 2 ) may be used to detect, measure, and / or otherwise monitor vibrations VIB generated by the transport arm 315 and / or any other suitable feature of the processing units 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H. For example, the accelerometer of the external device ED1 may be wirelessly coupled to a compatible smart mobile device SD located on the adapter pendant 400 to wirelessly transmit accelerometer data to the compatible smart mobile device.

[0051] A microphone SDP7M (e.g., associated with any suitable audio data recording application SDP7) may also be used to detect vibrations, for example, during movement of the articulated arm 315. Note that detected vibrations VIB (either from the microphone SDP7M / audio data recording application SDP7 or the accelerometer SDP2) may be displayed on the display 563 in a manner similar to that shown and described in connection with FIG. 5I.

[0052] The camera(s) of a compatible smart mobile device SD may be used (in one embodiment, with limited access) to automatically teach the transport robot 104 the position of the substrate holding stations 230B, 230C and / or for inspection of the substrate S (see, for example, FIG. 3A).

[0053] In one embodiment, the temperature sensor may be temperature sensor SDP8 of the compatible smart mobile device SD, or in other embodiments, may be a wireless temperature sensor, such as temperature sensor ED2 (FIG. 2), which may be one of the external devices ED1-EDn described above. Temperature sensor ED2 and / or temperature sensor SDP8 can be read by the compatible smart mobile device SD to provide feedback for health monitoring or thermal compensation for the robot positioning algorithm to improve accuracy and repeatability. For example, one or more arm links 315F, 315U, 315E may include a respective temperature sensor to determine thermal effects on each arm link 315F, 315U, 315E to provide thermal compensation, and / or one or more motors of drive section 200 may have a respective temperature sensor to monitor the temperature of each motor to detect motor failure.

[0054] A wireless connection SDP4 (such as Bluetooth®) may be used to establish communication between a compatible smart mobile device SD and the adapter pendant 400.

[0055] The compatible smart mobile device SD's internet access SDP5 (which may be limited in any suitable manner, as described herein) may provide, for example, software / firmware downloads to the transfer robot 104, the adapter pendant 400, or any other suitable feature of the processing equipment 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H. The compatible smart mobile device SD's internet access SDP5 may also provide user access to any suitable information / documentation from the automation equipment and / or the internet, including, for example, but not limited to, semiconductor equipment applications (such as applications SDP1-SDPn installed on the compatible smart mobile device SD), product manuals, command syntax, service bulletins, firmware (or other) upgrade instructions, repair instructions, and troubleshooting guides. The internet access SDP5 (and / or wireless connection SDP4) may also result in the compatible smart mobile device SD receiving automation status email notifications from the end user's FAB computer network. Applications SDP1-SDP6 may collect any suitable data from the automation and analyze the collected data (in combination with controller 110C or alone) to facilitate integrated data collection and diagnostic analysis for automated machine components using a compatible smart mobile device SD (see FIG. 5I and data collection page 506P described herein).

[0056] A compatible smart mobile device SD also has the ability to download, store, and execute applications or programs (this functionality and associated applications / programs may also be one or more of the user-operable device functional characteristics SDC1-SDCn). Aspects of the disclosed embodiments allow an automation supplier (such as a supplier of the transport robot 104) the flexibility to provide applications or programs for a compatible smart mobile device SD that can be downloaded to a compatible smart mobile device SD for use with an automated device (such as the transport robot 104). For example, the automation supplier may provide an application SDP6 to be downloaded to a compatible smart mobile device SD. The application SDP6 may be configured to provide a single point of control for at least a portion of the processing equipment 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H (such as the transport apparatus 104). For example, the application SDP6 may be configured with a graphical user interface GUI, as described herein, whereby, upon user interaction, the transport apparatus 104 is controlled in any suitable manner.

[0057] 2, 4A, 4B, and 6, exemplary operations according to aspects of the disclosed embodiment are described. For example, operations include providing an articulated arm 315 coupled to a drive section 200 for driving articulation of the articulated arm 315 (FIG. 6, block 600). As described herein, the drive section 200 has at least one motor 200M1, 200M2. The machine controller 110 is operably coupled to the drive section 200 to control the at least one motor 200M1, 200M2 to move the articulated arm 315 from one position 230B, 230C to another different position 230B, 230C (FIG. 6, block 605). The adapter pendant 400 is operably coupled for input / output to the machine controller 110 via the machine controller interface 405 of the adapter pendant 400 (FIG. 6, block 610). As described herein, the adapter pendant 400, distinct from the machine controller interface 405, has another interface 410 configured for operative connection with a compatible smart mobile device SD (FIG. 6, block 615), the compatible smart mobile device SD having predetermined resident user-operable device functional characteristics SDCL, SDC1-SDCn resident thereon. As described herein, the another interface 410 has a connection configuration such that coupling of the compatible smart mobile device SD enables configuration of at least one of the resident user-operable device functional characteristics SDLC, SDC1-SDCn of the compatible smart mobile device to define input / output to the machine controller via the adapter pendant to provide input commands and output signals for motion control of the articulated arm from one position to another (FIG. 6, block 620). For example, in one aspect, configuration of at least one of the resident user-operable device functional characteristics SDCL, SDC1-SDCn is automatically enabled upon user initialization of the compatible smart mobile device SD coupled to the adapter pendant 400.In one aspect, the further interface 410 has a connection configuration such that coupling of the compatible smart mobile device SD with the further interface 410 results in close coupling of at least one of the user operable device functional characteristics SDC1-SDCn of the compatible smart mobile device SD coupled to the machine controller 110 via the adapter pendant 400 (FIG. 6, block 621) such that at least one of the user operable device functional characteristics SDC1-SDCn of the compatible smart mobile device SD coupled to the further interface 410 defines a closely coupled user selectable input / output 498CC, 499CC of the semiconductor process transport apparatus 104. In one aspect, the connection configuration of the further interface 410 is arranged such that coupling of the compatible smart mobile device SD with the further interface 410 initializes a lockout (or limited access / functionality) of at least another predetermined user operable functional characteristic SDCL, SDC1-SDCn on the compatible smart mobile device SD (FIG. 6, block 625).

[0058] As described herein, aspects of the disclosed embodiments allow automation suppliers the flexibility to provide applications for compatible smart mobile device SDs (such as smartphones and tablets) that can be downloaded to compatible smart mobile device SDs (such as compatible smart mobile devices carried by service personnel or other users of the automation equipment) for use with automation equipment produced / provided by the automation supplier. According to aspects of the disclosed embodiments, a user attaches the compatible smart mobile device SD to the adapter pendant 400 and establishes a connection between the adapter pendant 400 and the compatible smart mobile device SD via either a wireless or wired connection. Once the connection is established, the user can select an appropriate application SDP1-SDP6 (which may be one or more resident user-operable functional characteristics SDCL, SDC1-SDCn), or the appropriate application can be automatically launched / activated when a connection is established between the adapter pendant 400 and the compatible smart mobile device SD. The application(s) running on the adapter pendant 400 and the compatible smart mobile device SD provide a single point of control for the automation equipment.

[0059] As described herein, the adapter pendant 400 establishes an electromechanical interface with an automated device such as a transfer robot 104. In one embodiment, the adapter pendant 400 may include any suitable mode changeover switch 429, including one or more E-stop switches 450, liveman switches 430, and other suitable switches described herein, although in other embodiments, where appropriate, the E-stop switches 450, liveman switches 430, and other suitable switches (see FIGS. 2, 4A, and 4B) may be provided by user-operable device functionality characteristics SDLC, SDC1-SDCn via a graphical user interface GUI (see FIG. 5A).

[0060] In accordance with one or more aspects of the disclosed embodiment, a semiconductor process transport apparatus includes:

[0061] a drive section having at least one motor;

[0062] an articulated arm connected to a drive section for driving articulation of the articulated arm;

[0063] a machine controller operatively coupled to the drive section to control at least one motor to move the articulated arm from one position to another different position;

[0064] an adapter pendant having a machine controller interface operatively coupling the adapter pendant with a machine controller for input / output, the adapter pendant having another interface distinct from the machine controller interface and configured to operatively connect with a compatible smart mobile device, the compatible smart mobile device having predetermined resident user-operable device functional characteristics resident on the compatible smart mobile device;

[0065] The other interface has a connection configuration such that coupling of the compatible smart mobile device with the other interface automatically enables configuration of at least one of the resident user-operable device functional characteristics of the compatible smart mobile device to define inputs / outputs to the machine controller via the adapter pendant to provide input commands and output signals for motion control of the articulated arm from one position to another.

[0066] In accordance with one or more aspects of the disclosed embodiments, configuration of at least one of the resident user-operable device functionality features is automatically enabled upon user initialization of a compatible smart mobile device coupled to the adapter pendant.

[0067] In accordance with one or more aspects of the disclosed embodiment, the connection configuration is a plug-and-play connection configuration and is at least one of a short-range or near-field radio frequency coupling and a universal serial bus port coupling.

[0068] In accordance with one or more aspects of the disclosed embodiment, the input / output defined by at least one of the resident user-operable device functional characteristics has a configuration embodying a motion teach control for effecting teaching of motion control of the machine controller of the articulated arm from one position to another position.

[0069] In accordance with one or more aspects of the disclosed embodiment, the resident user-operable device functionality features include a graphical user interface of a compatible smart mobile device configured to define a motion teach control input / output interface for effecting teaching of motion control of a machine controller of an articulated arm from one position to another.

[0070] In accordance with one or more aspects of the disclosed embodiment the adapter pendant includes one or more of an integrated emergency stop switch, an emergency machine stop switch, or an emergency system off switch.

[0071] In accordance with one or more aspects of the disclosed embodiment the adapter pendant has an integral liveman switch.

[0072] In accordance with one or more aspects of the disclosed embodiments, the connection configuration of the other interface is arranged to initialize a lockout (or limited access / functionality) of at least another predetermined resident user-operable functional feature on the compatible smart mobile device upon coupling of the compatible smart mobile device with the other interface.

[0073] In accordance with one or more aspects of the disclosed embodiment, at least one of the one location and the other location is a workpiece holding station in a semiconductor processing equipment.

[0074] In accordance with one or more aspects of the disclosed embodiment the adapter pendant includes an integral mode selection switch.

[0075] In accordance with one or more aspects of the disclosed embodiment a method includes:

[0076] providing an articulated arm coupled to a drive section for driving articulation of the articulated arm, the drive section having at least one motor;

[0077] operatively coupling a machine controller to the drive section to control at least one motor to move the articulated arm from one position to another different position;

[0078] operatively coupling the adapter pendant to the machine controller for input / output via a machine controller interface of the adapter pendant, the adapter pendant having another interface distinct from the machine controller interface and configured to operatively connect with a compatible smart mobile device, the compatible smart mobile device having predetermined resident user-operable device functional characteristics resident on the compatible smart mobile device;

[0079] The other interface has a connection configuration such that coupling of the compatible smart mobile device with the other interface automatically enables configuration of at least one of the resident user-operable device functional characteristics of the compatible smart mobile device to define inputs / outputs to the machine controller via the adapter pendant to provide input commands and output signals for motion control of the articulated arm from one position to another.

[0080] In accordance with one or more aspects of the disclosed embodiment, the method further includes automatically enabling configuration of at least one of the resident user-operable device functionality characteristics upon user initialization of a compatible smart mobile device coupled to the adapter pendant.

[0081] In accordance with one or more aspects of the disclosed embodiment, the connection configuration is a plug-and-play connection configuration and is at least one of a short-range or near-field radio frequency coupling and a universal serial bus port coupling.

[0082] In accordance with one or more aspects of the disclosed embodiment, the input / output defined by at least one of the resident user-operable device functional characteristics has a configuration embodying a motion teach control for effecting teaching of motion control of the machine controller of the articulated arm from one position to another position.

[0083] In accordance with one or more aspects of the disclosed embodiment, the resident user operable device functionality feature includes a graphical user interface of a compatible smart mobile device, and the method further includes defining, via the graphical user interface, a motion teach control input / output interface for effecting teaching of motion control of the machine controller of the articulated arm from one position to another position.

[0084] In accordance with one or more aspects of the disclosed embodiment the adapter pendant includes one or more of an integrated emergency stop switch, an emergency machine stop switch, and an emergency system off switch.

[0085] In accordance with one or more aspects of the disclosed embodiment the adapter pendant has an integral liveman switch.

[0086] In accordance with one or more aspects of the disclosed embodiments, the connection configuration of the other interface is arranged to initiate a lockout (or limited access / functionality) of at least another predetermined user-operable functional feature on the compatible smart mobile device upon coupling of the compatible smart mobile device with the other interface.

[0087] In accordance with one or more aspects of the disclosed embodiment, at least one of the one location and the other location is a workpiece holding station in a semiconductor processing equipment.

[0088] In accordance with one or more aspects of the disclosed embodiment the adapter pendant includes an integral mode selection switch.

[0089] In accordance with one or more aspects of the disclosed embodiment, a semiconductor process transport apparatus includes:

[0090] a drive section having at least one motor;

[0091] an articulated arm connected to a drive section for driving articulation of the articulated arm;

[0092] a machine controller operatively coupled to the drive section to control at least one motor to move the articulated arm from one position to another different position;

[0093] an adapter pendant having a machine controller interface operatively coupling the adapter pendant with a machine controller for input / output, the adapter pendant having another interface distinct from the machine controller interface and configured to operatively connect with a compatible smart mobile device, the compatible smart mobile device having predetermined user-operable device functional characteristics resident on the compatible smart mobile device;

[0094] The other interface has a connection configuration such that coupling of the compatible smart mobile device to the other interface results in close coupling of at least one of the user-operable device functional characteristics of the compatible smart mobile device coupled to the machine controller via the adapter pendant such that at least one of the user-operable device functional characteristics of the compatible smart mobile device coupled to the other interface defines a closely coupled user-selectable input / output of the semiconductor process transport apparatus.

[0095] In accordance with one or more aspects of the disclosed embodiments, at least one of the user-operable device functional features is a graphical user interface of a compatible smart mobile device that is closely coupled to the machine controller via an adapter pendant to provide a closely coupled user interface of the transport apparatus.

[0096] In accordance with one or more aspects of the disclosed embodiment, at least one of the user-operable device functional characteristics is at least one sensor resident on the compatible smart mobile device.

[0097] In accordance with one or more aspects of the disclosed embodiment, at least one of the user-operable device functionality features is a data logging functionality resident on a compatible smart mobile device.

[0098] In accordance with one or more aspects of the disclosed embodiments, at least one of the user-operable device functionality features is a graphical display function on a compatible smart mobile device configured to visually display at least one user-selectable teaching parameter for teaching articulation of the articulated arm.

[0099] In accordance with one or more aspects of the disclosed embodiments, at least one of the user-operable device functional characteristics is at least one recording function resident on the compatible smart mobile device and at least one graphic display function on the compatible smart mobile device configured to visually display a time record of at least one recorded arm motion parameter of articulation of the articulated arm.

[0100] In accordance with one or more aspects of the disclosed embodiments, configuration of at least one of the user-operable device functionality characteristics is automatically enabled upon user initialization of a compatible smart mobile device coupled to the adapter pendant.

[0101] In accordance with one or more aspects of the disclosed embodiment, the connection configuration is a plug-and-play connection configuration and is at least one of a short-range or near-field radio frequency coupling and a universal serial bus port coupling.

[0102] In accordance with one or more aspects of the disclosed embodiment, the input / output defined by at least one of the user-operable device functional characteristics has a configuration embodying a motion teach control for effecting teaching of motion control of the machine controller of the articulated arm from one position to another position.

[0103] In accordance with one or more aspects of the disclosed embodiment, the user-operable device functionality features include a graphical user interface of a compatible smart mobile device configured to define a motion teach control input / output interface for effecting teaching of motion control of the machine controller of the articulated arm from one position to another.

[0104] In accordance with one or more aspects of the disclosed embodiment the adapter pendant includes one or more of an integrated emergency stop switch, an emergency machine stop switch, and an emergency system off switch.

[0105] In accordance with one or more aspects of the disclosed embodiment the adapter pendant has an integral liveman switch.

[0106] In accordance with one or more aspects of the disclosed embodiments, the connection configuration of the other interface is arranged to initiate a lockout (or limited access / functionality) of at least another predetermined user-operable functional feature on the compatible smart mobile device upon coupling of the compatible smart mobile device with the other interface.

[0107] In accordance with one or more aspects of the disclosed embodiment, at least one of the one location and the other location is a workpiece holding station in a semiconductor processing equipment.

[0108] In accordance with one or more aspects of the disclosed embodiment the adapter pendant includes an integral mode selection switch.

[0109] In accordance with one or more aspects of the disclosed embodiment a method includes:

[0110] providing an articulated arm coupled to a drive section for driving articulation of the articulated arm, the drive section having at least one motor;

[0111] operatively coupling a machine controller to the drive section to control at least one motor to move the articulated arm from one position to another different position;

[0112] operably coupling the adapter pendant to the machine controller for input / output via a machine controller interface of the adapter pendant, the adapter pendant having another interface distinct from the machine controller interface and configured to operably connect with a compatible smart mobile device, the compatible smart mobile device having predetermined user-operable device functional characteristics resident on the compatible smart mobile device;

[0113] The other interface has a connection configuration such that coupling of the compatible smart mobile device to the other interface results in close coupling of at least one of the user-operable device functional characteristics of the compatible smart mobile device coupled to the machine controller via the adapter pendant such that at least one of the user-operable device functional characteristics of the compatible smart mobile device coupled to the other interface defines a closely coupled user-selectable input / output of the semiconductor process transport apparatus.

[0114] In accordance with one or more aspects of the disclosed embodiments, at least one of the user-operable device functional features is a graphical user interface of a compatible smart mobile device that is closely coupled to the machine controller via an adapter pendant to provide a closely coupled user interface of the transport apparatus.

[0115] In accordance with one or more aspects of the disclosed embodiment, at least one of the user-operable device functional characteristics is at least one sensor resident on the compatible smart mobile device.

[0116] In accordance with one or more aspects of the disclosed embodiment, at least one of the user-operable device functionality features is a data logging functionality resident on a compatible smart mobile device.

[0117] In accordance with one or more aspects of the disclosed embodiments, at least one of the user-operable device functionality features is a graphical display function on a compatible smart mobile device configured to visually display at least one user-selectable teaching parameter for teaching articulation of the articulated arm.

[0118] In accordance with one or more aspects of the disclosed embodiments, at least one of the user-operable device functional characteristics is at least one recording function resident on the compatible smart mobile device and at least one graphic display function on the compatible smart mobile device configured to visually display a time record of at least one recorded arm motion parameter of articulation of the articulated arm.

[0119] In accordance with one or more aspects of the disclosed embodiment, the method further includes automatically enabling configuration of at least one of the user-operable device functionality characteristics upon user initialization of a compatible smart mobile device coupled to the adapter pendant.

[0120] In accordance with one or more aspects of the disclosed embodiment, the connection configuration is a plug-and-play connection configuration and is at least one of a short-range or near-field radio frequency coupling and a universal serial bus port coupling.

[0121] In accordance with one or more aspects of the disclosed embodiment, the input / output defined by at least one of the user-operable device functional characteristics has a configuration embodying a motion teach control for effecting teaching of motion control of the machine controller of the articulated arm from one position to another position.

[0122] In accordance with one or more aspects of the disclosed embodiment, the user-operable device functionality characteristic includes a graphical user interface of a compatible smart mobile device, and the method further includes defining, via the graphical user interface, a motion teach control input / output interface for effecting teaching of motion control of the machine controller of the articulated arm from one position to another position.

[0123] In accordance with one or more aspects of the disclosed embodiment the adapter pendant includes one or more of an integrated emergency stop switch, an emergency machine stop switch, and an emergency system off switch.

[0124] In accordance with one or more aspects of the disclosed embodiment the adapter pendant has an integral liveman switch.

[0125] In accordance with one or more aspects of the disclosed embodiments, the connection configuration of the other interface is arranged to initiate a lockout (or limited access / functionality) of at least another predetermined user-operable functional feature on the compatible smart mobile device upon coupling of the compatible smart mobile device with the other interface.

[0126] In accordance with one or more aspects of the disclosed embodiment, at least one of the one location and the other location is a workpiece holding station in a semiconductor processing equipment.

[0127] In accordance with one or more aspects of the disclosed embodiment the adapter pendant includes an integral mode selection switch.

[0128] It should be understood that the foregoing description is merely illustrative of aspects of the disclosed embodiments. Various alternatives and modifications may be devised by those skilled in the art without departing from the aspects of the disclosed embodiments. Accordingly, the aspects of the disclosed embodiments are intended to embrace all such alternatives, modifications, and variations that fall within the scope of the appended claims. Furthermore, the mere fact that different features are recited in mutually different dependent or independent claims does not indicate that combinations of these features cannot be advantageously used, such as combinations that are within the scope of the aspects of the disclosed embodiments.

Claims

1. A semiconductor process transport device, comprising: a drive section having at least one motor; an articulated arm connected to the drive section for driving articulation of the articulated arm; a machine controller operatively coupled to the drive section to control the at least one motor to move the articulated arm from one position to another different position; an adapter pendant having a plurality of interfaces including a machine controller interface and another interface, the machine controller interface operatively coupling the adapter pendant to the machine controller for input / output, the other interface of the plurality of interfaces being different from the machine controller interface and configured to operatively connect with a compatible smart mobile device, the compatible smart mobile device having predetermined user-operable device functional characteristics resident on the compatible smart mobile device; Equipped with the other interface has a connection configuration such that coupling of the compatible smart mobile device to the other interface results in a tight coupling of at least one of the user-operable device functional characteristics of the compatible smart mobile device via the adapter pendant, such that at least one of the user-operable device functional characteristics of the compatible smart mobile device coupled to the other interface defines a tightly coupled user-selectable input / output of the semiconductor process transport apparatus; The semiconductor process transport device, wherein the machine controller interface of the adapter pendant is configured as both an RS232 and a TTL communication interface.

2. 2. The semiconductor process transport apparatus of claim 1, wherein at least one of the user-operable device functional characteristics is a graphical user interface of the compatible smart mobile device that is closely coupled to the machine controller via the adapter pendant to provide a closely coupled user interface of the transport apparatus.

3. The semiconductor process transport apparatus of claim 1 , wherein at least one of said user-operable device functional characteristics is at least one sensor resident on said compatible smart mobile device.

4. The semiconductor process transport apparatus of claim 1 , wherein at least one of said user-operable device functionality features is a data logging function resident on said compatible smart mobile device.

5. 10. The semiconductor process transport apparatus of claim 1, wherein at least one of the user-operable device functional characteristics is a graphic display function on the compatible smart mobile device configured to visually display at least one user-selectable teaching parameter for teaching articulation of the articulated arm.

6. 10. The semiconductor process transport apparatus of claim 1, wherein at least one of the user-operable device functional characteristics is at least one of a recording function resident on the compatible smart mobile device and at least one of a graphic display function on the compatible smart mobile device configured to visually display a time record of at least one recorded arm motion parameter of articulation of the articulated arm.

7. 2. The semiconductor process transport device of claim 1, wherein the input / output defined by at least one of the user-operable device functional characteristics has a configuration embodying motion teaching control for providing teaching of motion control of the machine controller of the articulated arm from the one position to the other position.

8. 2. The semiconductor process transport apparatus of claim 1, wherein the user-operable device functional characteristics include a graphical user interface of the compatible smart mobile device configured to define a motion teach control input / output interface for providing teaching of motion control of the machine controller of the articulated arm from the one position to the other position.

9. The semiconductor process transport apparatus of claim 1 , wherein the adapter pendant includes one or more of an integrated emergency stop switch, an emergency machine stop switch, and an emergency system off switch.

10. 2. The semiconductor process transport apparatus of claim 1, wherein at least one of said one location and said other location is a workpiece holding station in a semiconductor processing equipment.

11. 2. The semiconductor process transport apparatus of claim 1, wherein said adapter pendant includes an integral mode selector switch.

12. providing an articulated arm coupled to a drive section for driving articulation of the articulated arm, the drive section having at least one motor; operatively coupling a machine controller to the drive section to control the at least one motor to move the articulated arm from one position to another different position; operatively coupling an adapter pendant to the machine controller for input / output, the adapter pendant having a plurality of interfaces including a machine controller interface of the adapter pendant and another interface, the other interface of the plurality of interfaces being different from the machine controller interface and configured to operatively connect with a compatible smart mobile device, the compatible smart mobile device having predetermined user-operable device functional characteristics resident on the compatible smart mobile device; A method comprising: the other interface has a connection configuration such that coupling of the compatible smart mobile device with the other interface results in a close coupling of at least one of the user-operable device functional characteristics of the compatible smart mobile device via the adapter pendant, such that at least one of the user-operable device functional characteristics of the compatible smart mobile device coupled to the other interface defines a close coupled user-selectable input / output of the articulated arm; The method wherein the machine controller interface of the adapter pendant is configured as both an RS232 and a TTL communication interface.

13. The method of claim 12 , wherein at least one of the user-operable device functional characteristics is a graphical user interface of the compatible smart mobile device that is closely coupled to the machine controller via the adapter pendant to provide a closely coupled user interface of the articulated arm.

14. The method of claim 12 , wherein at least one of the user-operable device functional characteristics is at least one sensor resident on the compatible smart mobile device.

15. The method of claim 12 , wherein at least one of the user-operable device functionality features is a data logging function resident on the compatible smart mobile device.

16. 13. The method of claim 12, wherein at least one of the user-operable device functionality features is a graphics display functionality on the compatible smart mobile device configured to visually display at least one user-selectable teach parameter for teaching articulation of the articulated arm.

17. 13. The method of claim 12, wherein the input / output defined by at least one of the user-operable device functional characteristics has a configuration embodying a motion teach control for effecting teaching of motion control of the machine controller of the articulated arm from the one position to the other position.

18. 13. The method of claim 12, wherein the user-operable device functionality characteristics include a graphical user interface of the compatible smart mobile device, and the method further comprises defining, via the graphical user interface, a motion teach control input / output interface for providing teaching of motion control of the machine controller of the articulated arm from the one position to the other position.

19. The method of claim 12 , wherein the adapter pendant includes one or more of an integrated emergency stop switch, an emergency machine stop switch, and an emergency system off switch.

20. The method of claim 12 , wherein at least one of the one location and the other location is a workpiece holding station in a semiconductor processing equipment.

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