Management method and management device for measurement instrument

Abstract

To provide a management method and a management device for measurement instrument that can easily identify a factor affecting a measurement result of a shape measurement with a measurement instrument.SOLUTION: A management device includes: a measurement result acquisition unit (shape measurement control unit 22b) that repeatedly acquires a shape measurement result 36 including a shape measured value of a measuring object (workpiece) measured by a measurement instrument 12 and a shape measurement time; a factor information acquisition unit 24 that repeatedly acquires factor information 38 including a factor measured value as a measured value of a factor and a factor measurement time as a measurement time of the factor measured value for each of a plurality of kinds of factors; a first correspondence information generation unit (data collection processing unit 26) that generates, for each shape measurement result 36, first correspondence information 39 in which the shape measurement result 36 is associated with the factor measured value for each factor corresponding to the shape measurement time of the shape measurement result 36; and an arithmetic unit (correlation coefficient arithmetic unit 40) that calculates a correlation relation with the shape measured value for each factor on the basis of the first correspondence information 39.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a method and apparatus for managing a measuring machine. [Background technology]

[0002] Measuring machines such as three-dimensional coordinate measuring machines that measure the shape (including dimensions) of an object to be measured are known. The measuring machine described in Patent Document 1 repeatedly acquires environmental information such as ambient temperature (the temperature in the room where the measuring machine is installed) and external vibrations when measuring the shape of the object to be measured according to a measurement program, and records this environmental information in chronological order in association with a status log of the measuring machine. Furthermore, the measuring machine described in Patent Document 1 suspends execution of the measurement program, i.e., suspends measurement of the shape of the object to be measured, if the acquired environmental information falls outside a predetermined appropriate range during shape measurement of the object to be measured. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-71029 Summary of the Invention [Problem to be solved by the invention]

[0004] The measuring instrument described in Patent Document 1 correlates and records environmental information in a chronological order, making it possible to identify environmental information (factors) that affect the results of shape measurements made by the measuring instrument. However, this requires the user to analyze the recorded information, which poses problems of requiring tedious work and advanced knowledge. Specifically, there are a huge number of possible combinations of shape measurement results made by the measuring instrument and factors that may affect them, making the task of identifying them tedious. Furthermore, because the measurement environment and measurement method of the measuring instrument differ from user to user, generalized analysis is difficult and requires analysis based on the experience and intuition of on-site personnel, which requires advanced knowledge.

[0005] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a measuring machine management method and management device that can easily identify factors that affect the results of shape measurement by a measuring machine. [Means for solving the problem]

[0006] A measuring instrument management method for achieving the object of the present invention includes a measurement result acquisition step of repeatedly acquiring shape measurement results including shape measurement values, which are actual measurement values ​​of the shape of a measured object measured by the measuring instrument, and shape measurement times, which are the measurement times of the shape measurement values; a factor information acquisition step of repeatedly acquiring factor information, which includes factor measurement values, which are actual measurement values ​​of the factors, and factor measurement times, which are the measurement times of the factor measurement values, for each of a plurality of types of factors that may affect the measurement of the shape measurement values ​​by the measuring instrument; a first correspondence information generation step of generating, for each shape measurement result, first correspondence information that associates the shape measurement results with the factor measurement values ​​for each factor corresponding to the shape measurement times of the shape measurement results, based on the shape measurement results repeatedly acquired in the measurement result acquisition step and the factor information repeatedly acquired in the factor information acquisition step; and a calculation step of calculating a correlation with the shape measurement values ​​for each factor, based on the first correspondence information generated in the first correspondence information generation step.

[0007] According to this measuring machine management method, the correlation between the shape measurement value and the factor measurement values ​​of a plurality of types of factors can be automatically obtained.

[0008] In another aspect of the present invention, the method for managing a measuring device further includes a factor identification step of identifying one or more influencing factors from among a plurality of types of factors based on the calculation processing result of the calculation step, where the influencing factors are factors that affect the measurement of actual shape measurements. This makes it possible to automatically identify the influencing factors from among a plurality of types of factors.

[0009] A measuring device management method according to another aspect of the present invention includes a display control step of displaying the results of the factor identification step on a display unit, thereby allowing a user to understand the correlation between the shape measurement value and the factor measurement value of the influencing factor.

[0010] A measuring device management method according to another aspect of the present invention includes a second correspondence information generating step of generating, for each shape measurement result, second correspondence information that associates the shape measurement result with actual factor values ​​of one or more influencing factors corresponding to the shape measurement time of the shape measurement result, based on the identification results, and a display control step of displaying, on a display unit, an image that represents, as the identification results, a time-series change in the actual shape measurement values ​​and a time-series change in the actual factor values ​​of the one or more influencing factors identified in the factor identification step, based on the second correspondence information generated in the second correspondence information generating step. This allows a user to understand the correlation between the actual shape measurement values ​​and the actual factor values ​​of the influencing factors.

[0011] In a measuring device management method according to another aspect of the present invention, the display control step displays, as images, a first graph showing time-series changes in the shape measurement values ​​and a second graph showing time-series changes in the factor measurement values ​​of one or more influencing factors on the display unit, thereby allowing the user to understand the correlation between the shape measurement values ​​and the factor measurement values ​​of the influencing factors.

[0012] In a measuring device management method according to another aspect of the present invention, the number of scale marks on a first axis corresponding to the shape measurement values ​​of a first graph is the same as the number of scale marks on a second axis corresponding to the factor measurement values ​​of a second graph, and in the display control step, the difference between the upper and lower limit values ​​of the shape measurement values ​​is divided by the number of scale marks to determine the value per scale mark on the first axis and display the first graph, and the difference between the upper and lower limit values ​​of the factor measurement values ​​is divided by the number of scale marks to determine the value per scale mark on the second axis and display the second graph. This allows the user to more intuitively understand the correlation between the shape measurement values ​​and the factor measurement values ​​of the influencing factors.

[0013] In a measuring device management method according to another aspect of the present invention, the display control step causes the display unit to display the first graph and the second graph superimposed on each other, thereby allowing the user to more intuitively understand the correlation between the shape measurement values ​​and the factor measurement values ​​of the influencing factors.

[0014] In a measuring device management method according to another aspect of the present invention, the measurement result acquisition step repeatedly acquires shape measurement results for each of a plurality of types of measurement items, the first correspondence information generation step generates first correspondence information for each measurement item, and the calculation step is executed for each measurement item, thereby automatically obtaining correlations between shape measurement values ​​and factor measurement values ​​of a plurality of types of factors for each measurement item.

[0015] In a measuring device management method according to another aspect of the present invention, the measurement result acquisition step repeatedly acquires shape measurement results from multiple measuring devices, the first correspondence information generation step generates first correspondence information for each measuring device, and the calculation step calculates a correlation for each factor for each measuring device, thereby automatically obtaining correlations between shape measurement values ​​and factor measurement values ​​of multiple types of factors for each measuring device.

[0016] In another aspect of the present invention, in a method for managing a measuring machine, when the measuring machine measures the shape of an object to be measured using a probe, the multiple factors include the ambient temperature of the measuring machine, the drive current value of the electric drive unit of the probe provided in the measuring machine, and the radius of the tip of the probe.

[0017] A measuring instrument management device for achieving the object of the present invention includes a measurement result acquisition unit that repeatedly acquires shape measurement results including shape measurement values, which are actual measurement values ​​of the shape of a measured object measured by the measuring instrument, and shape measurement times, which are the measurement times of the shape measurement values; a factor information acquisition unit that repeatedly acquires factor information, which includes factor measurement values, which are actual measurement values ​​of the factors, and factor measurement times, which are the measurement times of the factor measurement values, for each of a plurality of types of factors that may affect the measurement of the shape measurement values ​​by the measuring instrument; a first correspondence information generation unit that generates, for each shape measurement result, first correspondence information that associates the shape measurement results with the factor measurement values ​​for each factor corresponding to the shape measurement times of the shape measurement results, based on the shape measurement results repeatedly acquired by the measurement result acquisition unit and the factor information repeatedly acquired by the factor information acquisition unit; and a calculation unit that calculates a correlation with the shape measurement values ​​for each factor based on the first correspondence information generated by the first correspondence information generation unit. [Effects of the Invention]

[0018] The present invention makes it possible to easily identify factors that affect the results of shape measurement by a measuring instrument. [Brief explanation of the drawings]

[0019] [Figure 1] 1 is a block diagram showing the configuration of a measurement system for measuring the shape of a workpiece that is a measurement object. [Figure 2] FIG. 10 is a diagram showing an example of a shape measurement result. [Figure 3] FIG. 10 is a diagram illustrating an example of cause information. [Figure 4] 10 is an explanatory diagram for explaining an example of generation of first correspondence information by a data collection processing unit. FIG. [Figure 5] FIG. 10 is a diagram showing an example of first correspondence information generated by a data collection processing unit. [Figure 6] FIG. 10 is an explanatory diagram for explaining a process executed by a correlation coefficient calculation unit before starting a correlation coefficient calculation process. [Figure 7]10 is a flowchart showing a flow of a correlation coefficient calculation process for each measurement item of a workpiece by a correlation coefficient calculation unit, and a flow of a factor identification process for each measurement item of a workpiece by a factor identification unit. [Figure 8] 10A and 10B are diagrams showing results of a factor identification process for each measurement item of a workpiece performed by a factor identification unit. [Figure 9] 10 is a diagram showing an example of second correspondence information generated by a correspondence information generating unit. FIG. [Figure 10] FIG. 10 is a diagram showing a comparative example of the first graph and the second graph corresponding to the measurement item "Hole 1 Radius." [Figure 11] 10 is an explanatory diagram for explaining how the display control unit determines the scale of the vertical axis of the first graph and the scale of the vertical axis of the second graph. FIG. [Figure 12] 10 is an explanatory diagram for explaining the generation of a first graph and a second graph corresponding to the display measurement item "Hole 1 Radius" by the display control unit. FIG. [Figure 13] 10 is a diagram showing a first graph and a second graph corresponding to the displayed measurement item "Hole 1 Radius" superimposed on the display unit. FIG. [Figure 14] 10A and 10B are diagrams showing modified examples of the first graph and the second graph superimposed and displayed on the display unit. [Figure 15] 10 is a flowchart showing the flow of collecting first correspondence information in a method of managing a measuring device by a control device. [Figure 16] 10 is a flowchart showing the flow of a process for identifying influencing factors for each measurement item of a workpiece, in a method for managing a measuring machine by a control device. [Figure 17] FIG. 10 is a block diagram showing the configuration of a measurement system 10 according to a second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0020] [First embodiment] 1 is a block diagram showing the configuration of a measurement system 10 that measures the shape of a workpiece W. The measurement system 10 includes a measuring machine 12, a temperature sensor 14, a display unit 16, an operation unit 18, and a control device 20.

[0021] The measuring machine 12 is, for example, a three-dimensional coordinate measuring machine that measures the shape (including dimensions) of the workpiece W. The measuring machine 12 includes a probe 12a and an electric drive unit 12b (actuator) that displaces the position and posture of the probe 12a.

[0022] Under the control of the control device 20, which will be described later, the measuring machine 12 drives the electric drive unit 12b to bring the tip (contactor) of the probe 12a into contact with the workpiece W, thereby performing shape measurement of various measurement items such as the dimensions and shapes of various measurement elements (e.g., circular holes, flat surfaces, spheres, etc.) of the workpiece W. Note that the detailed configuration of the measuring machine 12 (three-dimensional coordinate measuring machine) and the specific method for measuring the shape of the workpiece W using this measuring machine 12 are well known technologies, so a detailed description thereof will be omitted here.

[0023] The measuring machine 12 is also provided with a current measuring unit 12c (current sensor). The current measuring unit 12c measures a motor current value, which is the drive current value of a motor (not shown) that constitutes the electric drive unit 12b. This current measuring unit 12c is a publicly known technology (see Patent Document 1 above), so a detailed description thereof will be omitted here. The current measuring unit 12c repeatedly measures the motor current value of the electric drive unit 12b at least while the measuring machine 12 is measuring the shape of the workpiece W, and repeatedly outputs the measurement results of the motor current value and the measurement time. This allows the time-series change in the motor current value during shape measurement of the workpiece W to be obtained.

[0024] The temperature sensor 14 measures the room temperature (corresponding to the installation environment temperature of the present invention), which is the temperature inside the room where the measuring device 12 is installed. This temperature sensor 14 repeatedly measures the room temperature at least while the measuring device 12 is measuring the shape of the workpiece W, and repeatedly outputs the measurement results of the room temperature and the measurement time. This allows the time-series change in the room temperature during the shape measurement of the workpiece W to be obtained.

[0025] A known monitor such as a liquid crystal display is used as the display unit 16. The display unit 16 displays, for example, a setting screen and operation information of the measuring device 12, and the shape measurement of the workpiece W by the measuring device 12. Furthermore, the display unit 16, which will be described in detail later, displays a first graph 50 and a second graph 52 superimposed on each other for each measurement item of the shape measurement of the workpiece W under the control of the control device 20, as shown in Fig. 13 described later.

[0026] The operation unit 18 is configured with known input devices such as a keyboard and mouse (a touch panel is also acceptable), not shown, and accepts various input operations by the user. The various input operations include, in addition to a setting operation for the measuring device 12 and an operation for starting shape measurement of the workpiece W by the measuring device 12, a factor identification start operation for starting identification of factors that affect the shape measurement of the workpiece W, and a display selection operation for selecting the types of first graph 50 and second graph 52 (types of measurement items of the workpiece W) to be displayed on the display unit 16, which will be described in detail later.

[0027] The control device 20 corresponds to the management device of the present invention, and uses a known arithmetic device such as a personal computer. The measuring machine 12 described above is connected to this control device 20 via a known communication line such as a LAN (Local Area Network) line. The temperature sensor 14 and operation unit 18 described above are also connected to the control device 20. The control device 20 controls the shape measurement of the workpiece W by the measuring machine 12, and also collects information necessary to identify factors that affect the shape measurement of the workpiece W, and identifies the factors that affect the shape measurement of the workpiece W.

[0028] The control device 20 includes an arithmetic circuit configured with various processors, memories, etc. The various processors include a central processing unit (CPU), a graphics processing unit (GPU), an application specific integrated circuit (ASIC), and a programmable logic device (e.g., simple programmable logic device (SPLD), complex programmable logic device (CPLD), and field programmable gate array (FPGA)). The various functions of the control device 20 may be realized by a single processor, or may be realized by multiple processors of the same or different types.

[0029] The control device 20 executes a control program read from a memory (not shown) to function as a measuring device control unit 22, a factor information acquisition unit 24, a data collection processing unit 26, a data processing unit 28, and a display control unit 30. The control device 20 also has a database 32. The database 32 may be provided separately from the control device 20.

[0030] The measuring machine control unit 22 controls the operation of the measuring machine 12. The measuring machine control unit 22 includes a calibration control unit 22a and a shape measurement control unit 22b.

[0031] The calibration control unit 22a controls the measurement of calibration data of the probe 12a by the measuring instrument 12. The calibration control unit 22a drives the electric drive unit 12b based on a calibration program (not shown) to perform a probing process (calibration work) on a calibration jig such as a calibration sphere by the probe 12a. The calibration control unit 22a then measures the calibration data of the probe 12a using a known method based on the probing data acquired in the probing process on the calibration jig. Note that the method of measuring calibration data is a known technique, and therefore a detailed description thereof will be omitted here.

[0032] The calibration data of the probe 12a includes at least the "probe radius value," which is the radius of the tip (contact) of the probe 12a. The calibration control unit 22a periodically measures the calibration data of the probe 12a and repeatedly outputs the calibration data and the measurement time. This allows the time-series changes in the calibration data (probe radius value) to be obtained.

[0033] The shape measurement control unit 22b corresponds to the measurement result acquisition unit of the present invention, and controls the shape measurement of the workpiece W by the measuring machine 12. The shape measurement control unit 22b drives the electric drive unit 12b based on a measurement program (not shown), and executes a probing process in which, for each measurement item on the workpiece W, the probe 12a is brought into contact in order with all measurement points on the workpiece W that correspond to the measurement item.

[0034] Next, the shape measurement control unit 22b calculates the actual shape measurement values ​​(radius, position, roundness, etc.) of the workpiece W for each measurement item of the workpiece W based on the coordinate values ​​of each measurement point obtained by the probing process and the latest calibration data measured by the calibration control unit 22a. Note that the specific method of calculating the shape for each measurement item of the workpiece W is a publicly known technique, so a detailed explanation will be omitted here. Then, the shape measurement control unit 22b outputs a shape measurement result 36 including the actual shape measurement values ​​for each measurement item of the workpiece W and the shape measurement time, which is the measurement time.

[0035] Fig. 2 is a diagram showing an example of the shape measurement results 36. As shown in Fig. 2, the shape measurement control unit 22b repeatedly executes the probing process on the workpiece W by the measuring machine 12 for each measurement item of the workpiece W, and also repeatedly executes the calculation of the shape measurement results 36 and the output to the data collection processing unit 26. As a result, a time-series change in the actual shape measurement value is obtained for each measurement item of the workpiece W.

[0036] Returning to Fig. 1, the factor information acquisition unit 24 acquires factor information 38 (see Fig. 3) for each of a plurality of types of factors that may affect the measurement of the actual shape values ​​for each measurement item of the workpiece W by the measuring device 12. Here, factors (external factors) that may affect the measurement of the actual shape values ​​include, for example, the room temperature, the probe radius value, and the motor current value, as already mentioned.

[0037] The factor information acquisition unit 24 repeatedly acquires the indoor temperature measurement result and the measurement time from the temperature sensor 14 each time the temperature sensor 14 measures the indoor temperature. Furthermore, the factor information acquisition unit 24 repeatedly acquires the probe radius measurement result and the measurement time from the calibration control unit 22a each time the calibration control unit 22a measures the calibration data. Furthermore, the factor information acquisition unit 24 repeatedly acquires the motor current measurement result and the measurement time from the current measurement unit 12c each time the current measurement unit 12c measures the motor current value.

[0038] 3 is a diagram showing an example of the factor information 38. As shown in FIG. 3, the factor information acquisition unit 24 repeatedly acquires, for each type of factor, factor information 38 including actual factor measurement values ​​(here, room temperature, probe radius value, and motor current value) that are actual measurement values ​​of the factors and factor measurement times that are the measurement times. In addition, the factor information acquisition unit 24 repeatedly outputs newly acquired factor information 38 to the data collection processing unit 26.

[0039] 1, the data collection processing unit 26, although not shown, repeatedly stores (or may temporarily store) the shape measurement results 36 repeatedly output from the shape measurement control unit 22b and the cause information 38 repeatedly output from the cause information acquisition unit 24 in the database 32. Then, every time a new shape measurement result 36 is stored in the database 32 or every fixed time (period), the data collection processing unit 26 generates first correspondence information 39 based on the shape measurement results 36 and cause information 38 in the database 32 and stores the first correspondence information 39 in the database 32. In this case, the data collection processing unit 26 functions as the first correspondence information generation unit of the present invention.

[0040] Fig. 4 is an explanatory diagram for explaining an example of generation of first correspondence information 39 by the data collection processing unit 26. Fig. 5 is a diagram showing an example of first correspondence information 39 generated by the data collection processing unit 26.

[0041] As shown in FIG. 4, based on the shape measurement time of the first shape measurement result 36 (shown by hatching in FIG. 4), the data collection processing unit 26 selects from the factor information 38 the actual factor measurement values ​​(room temperature, probe radius value, motor current value) for each factor corresponding to this shape measurement time, and associates them with the first shape measurement result 36.

[0042] Here, the "actual factor measurement value corresponding to the shape measurement time" refers to a factor measurement value measured at a factor measurement time that matches the shape measurement time if such a value exists. If no actual factor measurement value measured at a factor measurement time that matches the shape measurement time exists, the "actual factor measurement value corresponding to the shape measurement time" refers to the factor measurement value measured at the most recent factor measurement time before the shape measurement time.

[0043] Similarly, for each of the second and subsequent shape measurement results 36, the data collection processing unit 26 repeatedly selects from the factor information 38 the factor actual measurement values ​​(room temperature, probe radius value, motor current value) for each factor corresponding to the shape measurement time and associates them with the shape measurement result 36. In this way, the data collection processing unit 26 generates first correspondence information 39 (see FIG. 5).

[0044] 5, the first correspondence information 39 is information that associates (links) the shape measurement results 36 (shape measurement time and shape actual measurement value) with the factor actual measurement value for each factor corresponding to the shape measurement time, for each shape measurement result 36 of each measurement item of the workpiece W. The data collection processing unit 26 stores the first correspondence information 39 in the database 32. Then, the data collection processing unit 26 repeatedly generates new first correspondence information 39 and updates the first correspondence information 39 in the database 32 every time it acquires new shape measurement results 36 from the shape measurement control unit 22b or at regular intervals.

[0045] Returning to Fig. 1, the data processing unit 28 operates in response to a factor identification operation input to the operation unit 18. This data processing unit 28 identifies, for each measurement item of the workpiece W, from among the multiple types of factors described above, influencing factors that actually affect the measurement of the actual shape measurement values ​​by the measuring device 12, based on the first correspondence information 39 in the database 32. Furthermore, the data processing unit 28 generates second correspondence information 46 (see Fig. 9), which will be described later, for each measurement item of the shape measurement of the workpiece W, based on the identification results of the influencing factors for each measurement item of the workpiece W.

[0046] The data processing unit 28 functions as a correlation coefficient calculation unit 40, a factor identification unit 42, and a correspondence information generation unit 44.

[0047] The correlation coefficient calculation unit 40 corresponds to the calculation unit of the present invention, and executes correlation coefficient calculation processing for each measurement item of the workpiece W based on the first correspondence information 39 in the database 32. The correlation coefficient calculation processing is processing for calculating a correlation coefficient, which is an index showing the correlation between the actual shape measurement value of the measurement item and each of multiple types of factors.

[0048] The factor identification unit 42 performs a factor identification process to identify, for each measurement item of the work W, the factor with the highest correlation coefficient from among multiple types of factors as an influencing factor, based on the correlation coefficient calculation process results for each measurement item of the work W by the correlation coefficient calculation unit 40.

[0049] Fig. 6 is an explanatory diagram for explaining the processing executed by the correlation coefficient calculation unit 40 before the start of the correlation coefficient calculation processing. Fig. 7 is a flowchart showing the flow of the correlation coefficient calculation processing for each measurement item of the work W by the correlation coefficient calculation unit 40 and the factor identification processing for each measurement item of the work W by the factor identification unit 42. Fig. 8 is a diagram showing the results of the factor identification processing for each measurement item of the work W by the factor identification unit 42.

[0050] As shown in FIG. 6, the correlation coefficient calculation unit 40 first detects the number of measurement items N, which is the number of types of measurement items, and the number of factors M, which is the number of types of factors, based on the first correspondence information 39 in the database 32.

[0051] Next, as shown in FIG. 7, the correlation coefficient calculation unit 40 starts the correlation coefficient calculation process for each measurement item of the workpiece W. Here, "i" in FIG. 7 is the index of the measurement item (a number assigned to each type of measurement item) and is a natural number from 1 to M. "j" in FIG. 7 is the index of the factor (a number assigned to each type of factor) and is a natural number from 1 to N. "Coff" in FIG. 7 is the absolute value of the correlation coefficient between the shape measurement value of measurement item (i) and the factor measurement value of factor (j). "tempCoff" in FIG. 7 is the provisional value of the absolute value of the correlation coefficient. (i max, j max) in FIG. 7 indicates the pair of measurement item (i) and factor (j) for which the absolute value of the correlation coefficient is maximum.

[0052] The correlation coefficient calculation unit 40 sets i=1, j=1, and the temporary value tempCoff to 0, and then calculates the absolute value Coff of the correlation coefficient between the shape measurement value corresponding to the measurement item (1) and the factor measurement value of factor (1) based on the first correspondence information 39 in the database 32 (step S1 to step S1, NO in step S2, steps S3 and S4).

[0053] Then, the correlation coefficient calculation unit 40 compares the absolute value Coff of the correlation coefficient with the provisional value tempCoff, and if the "absolute value Coff" > the "provisional value tempCoff", it sets the "absolute value Coff" to the "provisional value tempCoff" (step S6), and conversely, if the "absolute value Coff" ≦ the "provisional value tempCoff", it proceeds to step S7.

[0054] Next, the correlation coefficient calculation unit 40 sets j=2 and calculates the absolute value Coff of the correlation coefficient between the shape measurement value corresponding to the measurement item (1) and the factor measurement value of factor (2) (step S7, NO in step S8, step S4). The correlation coefficient calculation unit 40 compares the newly calculated absolute value Coff of the correlation coefficient with the current provisional value tempCoff, and if "absolute value Coff" > "provisional value tempCoff", sets the new "absolute value Coff" to the "provisional value tempCoff" (step S6), and conversely, if "absolute value Coff" ≦ "provisional value tempCoff", proceeds to step S7.

[0055] Thereafter, the correlation coefficient calculation unit 40 repeatedly executes the processes from step S4 to step S7 until j = M (NO in step S8). This causes the absolute value Coff of the correlation coefficient between the actual shape measurement value of measurement item (1) and the actual factor measurement value of each factor (room temperature, probe radius, motor current value) for j = 1 to M to be calculated in a round-robin manner, completing the correlation coefficient calculation process for measurement item (1). At this time, the absolute value Coff of the correlation coefficient corresponding to the factor (any of j = 1 to M) with the highest correlation with the actual shape measurement value of measurement item (1) is set as the provisional value tempCoff. Therefore, the factor identification unit 42 executes a factor identification process to identify the influencing factor (j max) that has the greatest influence on the measurement of the actual shape measurement value of measurement item (1) based on the provisional value tempCoff. As a result, the pair (i max, j max) of measurement item (1) and factor (j) with the largest absolute value of the correlation coefficient is identified.

[0056] When the correlation coefficient calculation process for measurement item (1) is completed (YES in step S8), the correlation coefficient calculation unit 40 sets i to 2 and executes the correlation coefficient calculation process for measurement item (2) (step S9, YES in step S2, steps S3 to S8). As a result, the absolute value Coff of the correlation coefficient between the actual shape measurement value of measurement item (2) and the actual factor measurement value of each factor j = 1 to M is calculated in a round-robin manner, and the absolute value Coff of the correlation coefficient corresponding to the factor (j = 1 to M) with the highest correlation with the actual shape measurement value of measurement item (2) is set as the provisional value tempCoff. Next, the factor identification unit 42 executes a factor identification process to identify the influencing factor (j max) that has the greatest influence on the measurement of the actual shape measurement value of measurement item (2) based on the provisional value tempCoff. As a result, the pair (i max, j max) of measurement item (2) and factor (j) that produces the largest absolute value of the correlation coefficient is identified.

[0057] Similarly, the correlation coefficient calculation process by the correlation coefficient calculation unit 40 and the factor identification process by the factor identification unit 42 are repeatedly executed for the remaining measurement items i=3 to N, until the correlation coefficient calculation process and the factor identification process are completed (NO in step S2). As a result, as shown in Fig. 8, the absolute value Coff of the correlation coefficient is calculated for all combinations (N x M combinations) of measurement item (i) and factor (j), and influencing factors are identified for each measurement item.

[0058] 9 is a diagram showing an example of second correspondence information 46 generated by the correspondence information generation unit 44. As shown in FIG. 9 and the above-described FIG. 1, the correspondence information generation unit 44 generates second correspondence information 46 for each measurement item of the work W based on the first correspondence information 39 and the factor identification process result for each measurement item of the work W by the factor identification unit 42. Note that FIG. 9 shows an example of the second correspondence information 46 when the measurement item is "hole 1 radius" and the influencing factor on this "hole 1 radius" is "room temperature."

[0059] The second correspondence information 46 is information that associates (links) the shape measurement result 36 (shape measurement time, shape actual measurement value) with the factor actual measurement value of the influencing factor corresponding to the shape measurement time of the shape measurement result 36 for each shape measurement result 36 of each measurement item of the workpiece W. Here, the definition of the "factor actual measurement value corresponding to the shape measurement time" is the same as that when the above-mentioned first correspondence information 39 was generated (see FIG. 4). Therefore, the second correspondence information 46 is information that represents the time series change of the shape actual measurement value of the measurement item of the workpiece W (radius value in FIG. 9) and the time series change of the factor actual measurement value of the influencing factor (room temperature in FIG. 9) on the same time axis.

[0060] The target period of the second correspondence information 46 generated by the correspondence information generating unit 44 can be freely specified by the user by operating the operation unit 18.

[0061] The correspondence information generating unit 44 similarly generates second correspondence information 46 corresponding to measurement items other than "hole 1 radius." Then, the correspondence information generating unit 44 outputs the second correspondence information 46 generated for each measurement item of the workpiece W to the display control unit 30.

[0062] When a display selection operation to select a measurement item of the workpiece W is input to the operation unit 18, the display control unit 30 causes a first graph 50 and a second graph 52 to be superimposed on the display unit 16 based on second correspondence information 46 corresponding to the measurement item (hereinafter referred to as the display measurement item) selected by the display selection operation from among the measurement items, as shown in FIG. 13 described below. The first graph 50 shows the time series change in the shape measurement value corresponding to the display measurement item for each shape measurement time. The second graph 52 shows the time series change in the factor measurement value of the influencing factor for the display measurement item for each shape measurement time. The vertical axes of the first graph 50 and the second graph 52 represent the measurement value (shape measurement value, factor measurement value), and the horizontal axes represent the shape measurement time. Furthermore, the number of divisions on the vertical axes of the first graph 50 and the second graph 52 are the same.

[0063] 10 is a diagram showing a comparative example of first graph 50 and second graph 52 corresponding to the measurement item "Hole 1 Radius." As shown in the comparative example of FIG. 10, when first graph 50 and second graph 52 are superimposed on display unit 16, if the numerical values ​​per division on the vertical axis (radius) of first graph 50 and the numerical values ​​per division on the vertical axis (room temperature) of second graph 52 are the same, one of first graph 50 and second graph 52 may become flat. In this case, it becomes difficult to intuitively understand from first graph 50 and second graph 52 the correlation between the shape measurement value of "Hole 1 Radius" and the factor measurement value of "Room Temperature," which is an influencing factor.

[0064] Therefore, the display control unit 30 of this embodiment unifies the scale of the vertical axis of the first graph 50 (corresponding to the first axis of the present invention) and the scale of the vertical axis of the second graph 52 (corresponding to the second axis of the present invention) (see Figures 11 to 13).

[0065] 11 is an explanatory diagram for explaining how the display control unit 30 determines the scale of the vertical axis of the first graph 50 and the scale of the vertical axis of the second graph 52. Note that the explanation will be given here using an example in which the displayed measurement item is "Hole 1 Radius" and the influencing factor on this "Hole 1 Radius" is "Indoor Temperature."

[0066] As shown in Figure 11, the display control unit 30 generates graph setting data 48 that defines the upper limit (G_max), lower limit (G_min) and numerical value per scale for each of the first graph 50 (hole 1 radius) and the second graph 52 (room temperature) based on the second correspondence information 46 corresponding to the display measurement item "hole 1 radius."

[0067] Specifically, the display control unit 30 extracts the maximum (Num_max) and minimum (Num_min) values ​​of both the shape measurement value of "Hole 1 Radius" and the factor measurement value of "Room Temperature" within the target period from the second correspondence information 46. Next, when the number of scales (D) on the vertical axis of both the first graph 50 (Hole 1 Radius) and the second graph 52 (Room Temperature) is set to "10," the display control unit 30 determines the difference between the maximum and minimum values ​​of the shape measurement value divided by the number of scales as the margin (E) in the graphical display of the first graph 50. Furthermore, the display control unit 30 determines the difference between the maximum and minimum values ​​of the factor measurement value divided by the number of scales as the margin (E) in the graphical display of the second graph 52.

[0068] After calculating the margin (E), the display control unit 30 sets the upper limit (G_max) of both the first graph 50 and the second graph 52 to "Num_max+E" and sets the lower limit (G_min) of both to "Num_min-E." The display control unit 30 then divides the difference between the upper limit and lower limit of the first graph 50 by the number of scale marks to determine the value per scale mark of the first graph 50. The display control unit 30 also divides the difference between the upper limit and lower limit of the second graph 52 by the number of scale marks to determine the value per scale mark of the second graph 52.

[0069] This completes the generation of graph setting data 48 corresponding to the measurement item "Hole 1 Radius" by the display control unit 30. Similarly, when a measurement item other than "Hole 1 Radius" is selected as the display measurement item, the display control unit 30 generates graph setting data 48 corresponding to the display measurement item selected in the display selection operation.

[0070] Fig. 12 is an explanatory diagram for explaining the generation of a first graph 50 and a second graph 52 corresponding to the display measurement item "Hole 1 Radius" by the display control unit 30. Fig. 13 is a diagram showing a first graph 50 and a second graph 52 corresponding to the display measurement item "Hole 1 Radius" superimposed on the display unit 16.

[0071] As shown in FIG. 12, the display control unit 30 generates a first graph 50 showing time-series changes in the shape measurement values ​​of the display measurement item "Hole 1 Radius" and a second graph 52 showing time-series changes in the factor measurement values ​​of the influencing factor "Room Temperature" based on second correspondence information 46 corresponding to the display measurement item "Hole 1 Radius" and graph setting data 48. Then, as shown in FIG. 13, the display control unit 30 displays the first graph 50 and the second graph 52 superimposed on each other on the display unit 16. In this case, by unifying the scale of the vertical axis of the first graph 50 and the scale of the vertical axis of the second graph 52 (here, the numerical values ​​per vertical axis of the first graph 50 and the second graph 52 are individually set according to the graph setting data 48), the correlation between the shape measurement values ​​of "Hole 1 Radius" and the factor measurement values ​​of "Room Temperature" can be intuitively understood.

[0072] The display control unit 30 can also superimpose on the display unit 16 the first graph 50 and the second graph 52 corresponding to the display measurement items other than "Hole 1 Radius." Furthermore, when a display selection operation for multiple measurement items is input to the operation unit 18, the display control unit 30 generates graph setting data 48 for each of the multiple display measurement items and causes multiple sets of first graphs 50 and second graphs 52 corresponding to the multiple display measurement items to be superimposed on the display unit 16.

[0073] 14 is a diagram showing a modified example of the first graph 50 and the second graph 52 superimposed on the display unit 16. As shown in FIG. 14, when the display control unit 30 causes the first graph 50 and the second graph 52 to be superimposed on the display unit 16, the display unit 16 may simultaneously display the operating status of the measuring device 12 together with the first graph 50 and the second graph 52.

[0074] In addition, instead of superimposing the first graph 50 and the second graph 52 on the display unit 16, the display control unit 30 may display the first graph 50 and the second graph 52 individually on the display unit 16 as shown in the above-mentioned Figure 12.

[0075] Fig. 15 is a flowchart showing the flow of collecting the first correspondence information 39 in the method of managing the measuring device 12 by the control device 20 having the above configuration. Fig. 16 is a flowchart showing the flow of identifying the influencing factors for each measurement item of the workpiece W in the method of managing the measuring device 12 by the control device 20 having the above configuration.

[0076] 15, when performing shape measurement of the workpiece W, the shape measurement control unit 22b of the measuring machine control unit 22 of the control device 20 drives the electric drive unit 12b based on a measurement program (not shown) to perform probing processing using the probe 12a for each measurement item of the workpiece W. In addition, the shape measurement control unit 22b calculates actual shape measurement values ​​of the workpiece W for each measurement item of the workpiece W based on the coordinate values ​​of each measurement point obtained by the probing processing and the latest calibration data previously acquired by the calibration control unit 22a (step S10).

[0077] Then, the shape measurement control unit 22b outputs shape measurement results 36 including the actual shape measurement values ​​for each measurement item of the workpiece W and the shape measurement time, which is the measurement time. Thereafter, while the measuring device 12 is performing shape measurement for each measurement item of the workpiece W, the shape measurement control unit 22b repeatedly outputs the shape measurement results 36 for each measurement item of the workpiece W. As a result, the data collection processing unit 26 acquires the shape measurement results 36 repeatedly output from the shape measurement control unit 22b and stores them in the database 32 (step S11). Note that steps S10 and S11 correspond to the measurement result acquisition step of the present invention.

[0078] Furthermore, the measurement of the room temperature by the temperature sensor 14, the measurement of the calibration data by the calibration control unit 22a, and the measurement of the motor current value by the current measurement unit 12c are each repeatedly performed at a predetermined timing (step S12). As a result, the measurement of the factor measurement values ​​(room temperature, probe radius value, motor current value) of multiple types of factors that may affect the measurement of the shape measurement value is repeatedly performed.

[0079] The factor information acquisition unit 24 of the control device 20 repeatedly acquires the indoor temperature measurement results and the measurement times from the temperature sensor 14, repeatedly acquires the calibration data (probe radius value) measurement results and the measurement times from the calibration control unit 22a, and repeatedly acquires the motor current measurement results and the measurement times from the current measurement unit 12c. The factor information acquisition unit 24 then repeatedly outputs factor information 38 including the actual factor measurement value and the factor measurement time for each factor. As a result, the data collection processing unit 26 acquires the factor information 38 repeatedly output from the factor information acquisition unit 24 and stores it in the database 32 (step S13). Steps S12 and S13 correspond to the factor information acquisition step of the present invention.

[0080] The data collection processing unit 26 generates first correspondence information 39 as described above with reference to FIGS. 4 and 5 based on the shape measurement results 36 and factor information 38 stored in the database 32 each time a new shape measurement result 36 is stored in the database 32, or at regular intervals, and stores the information in the database 32 (step S14). Step S14 corresponds to the first correspondence information generating step of the present invention. As a result, even if the shape measurement results 36 and factor information 38 are acquired at different times and frequencies, time-series changes in the shape measurement values ​​for each measurement item of the workpiece W and time-series changes in the factor measurement values ​​for each factor can be obtained. As a result, it becomes possible to identify the influencing factors for each measurement item.

[0081] Thereafter, while the measuring machine 12 is measuring the shape of the workpiece W, the processes from step S10 to step S14 are repeatedly executed (step S15).

[0082] 16, when identifying influencing factors for each measurement item of the work W, the user inputs a factor identification operation to the operation unit 18. In response to the input of this factor identification operation, the data processing unit 28 of the control device 20 functions as a correlation coefficient calculation unit 40, a factor identification unit 42, and a correspondence information generation unit 44, and starts identifying influencing factors for each measurement item of the work W (step S20).

[0083] First, the correlation coefficient calculation unit 40 refers to the first correspondence information 39 in the database 32 (step S21). Then, as explained in Fig. 6 and Fig. 7, the correlation coefficient calculation unit 40 performs a correlation coefficient calculation process for each measurement item of the work W based on the first correspondence information 39, and the factor identification unit 42 performs a factor identification process to identify an influencing factor for each measurement item of the work W (step S22). Note that steps S21 and S22 correspond to the calculation step and factor identification step of the present invention. As a result, an influencing factor is automatically identified for each measurement item of the work W, as shown in Fig. 8.

[0084] When the factor identification process is completed, the correspondence information generation unit 44 generates second correspondence information 46 for each measurement item of the work W based on the first correspondence information 39 and the factor identification process result for each measurement item of the work W by the factor identification unit 42, as shown in Fig. 9 above, and outputs it to the display control unit 30 (step S23, corresponding to the second correspondence information generation step of the present invention). As a result, time-series changes in the shape measurement values ​​and the factor measurement values ​​of the influencing factors can be obtained for each measurement item of the work W.

[0085] When the user inputs a display selection operation for the measurement items of the work W into the operation unit 18, the display control unit 30 generates graph setting data 48 as shown in Figure 11 described above based on the second correspondence information 46 corresponding to the display measurement items selected by this display selection operation.

[0086] Next, the display control unit 30 generates a first graph 50 of the shape measurement values ​​and a second graph 52 of the factor measurement values ​​based on the second correspondence information 46 corresponding to the display measurement items and the graph setting data 48, as shown in Figures 12 to 14, and displays them superimposed on the display unit 16 (step S24, corresponding to the display control step of the present invention). At this time, the scale of the vertical axis of the first graph 50 and the scale of the vertical axis of the second graph 52 are unified (see Figure 11), so the user can intuitively understand the correlation between the display measurement items (shape measurement values) and the influencing factors (factor measurement values).

[0087] As described above, in the first embodiment, the control device 20 generates (collects) first correspondence information 39 and stores it in the database 32 while the shape measurement of the workpiece W is being performed by the measuring machine 12, so that the control device 20 can easily identify the influencing factors for each measurement item of the workpiece W based on the first correspondence information 39.

[0088] [Second embodiment] 17 is a block diagram showing the configuration of a measurement system 10 according to the second embodiment. While the measurement system 10 according to the first embodiment includes one measuring machine 12, the measurement system 10 according to the second embodiment includes multiple (two or more) measuring machines 12.

[0089] 17, the measurement system 10 of the second embodiment has basically the same configuration as the measurement system 10 of the first embodiment, except that it includes a plurality of measuring machines 12 and a LAN line 60, and that it includes a plurality of first control devices 20A and one second control device 20B instead of the control device 20 of the first embodiment. Therefore, components that are the same in function or configuration as those of the first embodiment are given the same reference numerals, and their description will be omitted.

[0090] In the second embodiment, a temperature sensor 14 is provided for each measuring device 12, but if all of the measuring devices 12 are installed in the same room, the number of temperature sensors 14 may be one. Also, in order to avoid complicating the drawing, the operation unit 18 is not shown in Figure 17.

[0091] The first control devices 20A, the second control device 20B, and the database 32 are capable of exchanging signals and data with one another via a LAN line 60.

[0092] A first control device 20A is provided for each measuring device 12. Each first control device 20A controls the operation of the corresponding measuring device 12. Each first control device 20A also includes the measuring device control unit 22 (calibration control unit 22a and shape measurement control unit 22b) described in the first embodiment, a factor information acquisition unit 24, and a data collection processing unit 26. As a result, for each first control device 20A, acquisition of shape measurement results 36 by the shape measurement control unit 22b and acquisition of factor information 38 by the factor information acquisition unit 24 are repeatedly executed, as in the first embodiment.

[0093] Furthermore, the data collection processing unit 26 of each first control device 20A repeatedly stores the shape measurement results 36 and factor information 38 for each measuring device 12 in the database 32 via the LAN line 60. Then, each data collection processing unit 26 repeatedly generates first correspondence information 39 for each measuring device 12 and stores it in the database 32, similar to the first embodiment.

[0094] The second control device 20B includes the data processing unit 28 (the correlation coefficient calculation unit 40, the factor identification unit 42, and the correspondence information generation unit 44) described in the first embodiment above, and a display control unit 30.

[0095] A correlation coefficient calculation unit 40 of the second embodiment performs correlation coefficient calculation processing for each measurement item of the workpiece W for each measuring machine 12, similar to the first embodiment, based on first correspondence information 39 for each measuring machine 12 in the database 32. Furthermore, a factor identification unit 42 of the second embodiment performs factor identification processing for identifying influencing factors for each measurement item of the workpiece W, similar to the first embodiment, for each measuring machine 12. Furthermore, a correspondence information generation unit 44 of the second embodiment generates second correspondence information 46 for each measurement item of the workpiece W for each measuring machine 12, similar to the first embodiment.

[0096] When a display selection operation to select any (or multiple) measurement items for any (or multiple) measuring devices 12 is input to the operation unit 18, the display control unit 30 of the second embodiment generates graph setting data 48, similar to the first embodiment, based on second correspondence information 46 corresponding to the display measurement items of the measuring device 12 selected in the display selection operation. Then, the display control unit 30 of the second embodiment displays a first graph 50 and a second graph 52 superimposed on the display unit 16, similar to the first embodiment, based on the second correspondence information 46 and graph setting data 48 corresponding to the display measurement items of the measuring device 12 selected in the display selection operation.

[0097] As described above, in the second embodiment, while shape measurement of the workpiece W is being performed by multiple measuring machines 12, multiple first control machines 20A individually generate first correspondence information 39 and store it in the database 32, so that the second control machine 20B can easily identify the influencing factors for each measurement item of each measuring machine 12 based on the first correspondence information 39 of each measuring machine 12.

[0098] In the second embodiment, the plurality of first control devices 20A and one second control device 20B are provided separately, but they may be integrated as in the control device 20 of the first embodiment. Also, a second control device 20B may be provided for each of the plurality of first control devices 20A.

[0099] [others] In each of the above embodiments, the factor identification unit 42 identifies one influencing factor for each measurement item of the workpiece W. However, the factor identification unit 42 may identify multiple influencing factors for each measurement item of the workpiece W. In this case, the factor identification unit 42 identifies, for each measurement item of the workpiece W, all factors among multiple types of factors whose correlation coefficient is equal to or greater than a predetermined threshold as influencing factors. Furthermore, the correspondence information generation unit 44 generates second correspondence information 46 that associates the shape measurement results 36 (shape measurement time, actual shape measurement value) with the actual measurement values ​​of multiple types of influencing factors for each shape measurement result 36 of each measurement item of the workpiece W. Then, the display control unit 30 causes the first graph 50 and multiple second graphs 52 corresponding to the multiple types of influencing factors to be superimposed on the display unit 16.

[0100] In the above embodiments, the first graph 50 and the second graph 52 have been described as examples of images representing the second correspondence information 46, which is the result of identification of influencing factors by the factor identification unit 42. However, other types of images may be displayed on the display unit 16. Furthermore, instead of displaying an image (such as the first graph 50) showing the time-series changes in the shape measurement values ​​and an image (such as the second graph 52) showing the time-series changes in the factor measurement values ​​of the influencing factors on the display unit 16, only the result of identification of one or more influencing factors for each measurement item by the factor identification unit 42 may be displayed on the display unit 16. In this case, for example, a "table" listing the names of one or more influencing factors for each measurement item may be displayed on the display unit 16.

[0101] In the above embodiments, the types of factors that may affect the measurement of the actual shape values ​​of various measurement items have been described using the room temperature, probe radius value, and motor current value as examples, but other factors that may affect the measurement of the actual shape values, such as vibrations occurring inside and outside the measuring device 12 and humidity in the room where the measuring device 12 is installed, are also included.

[0102] In each of the above embodiments, a correlation coefficient is calculated as an index showing the correlation between the shape measurement value of each measurement item and the factor measurement value of each factor, but an index other than the correlation coefficient (such as a numerical value) showing this correlation may also be calculated.

[0103] In the above embodiments, the measuring machine 12 has been described as a three-dimensional coordinate measuring machine that measures the shape (including dimensions) of the workpiece W using the probe 12a, but the present invention can also be applied when the measuring machine 12 is a shape measuring machine that optically measures the shape of the workpiece W using an optical probe. The present invention can also be applied when the measuring machine 12 is a surface roughness measuring machine, a roundness measuring machine, or the like. Furthermore, the present invention can also be applied when the measuring machine 12 is a groove shape measuring machine that measures the shape (width, depth) of a machined groove or the like formed in the workpiece W. In this case, the types of factors that affect the measurement of the measured value are changed appropriately depending on the type of measuring machine 12.

[0104] In each of the above embodiments, the measuring instrument 12 was described as an example of a shape measuring instrument that measures the shape of a workpiece W (object under consideration), but the present invention can also be applied to the management of measuring instruments that perform various measurements other than shape (trend management of factors that affect the actual measured values ​​of the measuring instrument). [Explanation of symbols]

[0105] 10... measurement system, 12... measuring machine, 12a... probe, 12b... electric drive unit, 12c... current measurement unit, 14... temperature sensor, 16... display unit, 18... operation unit, 20... control device, 20A... first control device, 20B... second control device, 22... measuring machine control unit, 22a... calibration control unit, 22b... shape measurement control unit, 24... factor information acquisition unit, 26... data collection processing unit, 28... data processing unit, 30... display control unit, 32... database, 36... shape measurement result, 38... factor information, 39... first correspondence information, 40... correlation coefficient calculation unit, 42... factor identification unit, 44... correspondence information generation unit, 46... second correspondence information, 48... graph setting data, 50... first graph, 52... second graph, 60... LAN line, Coff... absolute value, M... number of factors, N... number of measurement items, tempCoff... provisional value, W... work

Claims

1. a measurement result acquisition step of repeatedly acquiring shape measurement results including shape measurement values ​​that are actual measurements of the shape of the object measured by the measuring device and shape measurement times that are measurement times of the shape measurement values; a factor information acquisition step of repeatedly acquiring, for each of a plurality of types of factors that may affect the measurement of the shape actual measurement value by the measuring instrument, factor information including a factor actual measurement value that is an actual measurement value of the factor and a factor measurement time that is a measurement time of the factor actual measurement value; a first correspondence information generating step of generating, for each of the shape measurement results, first correspondence information that associates the shape measurement results with the actual factor measurement values ​​for each of the factors corresponding to the shape measurement times of the shape measurement results, based on the shape measurement results repeatedly acquired in the measurement result acquiring step and the factor information repeatedly acquired in the factor information acquiring step; a calculation step of calculating a correlation between the actual shape measurement value and each of the factors based on the first correspondence information generated in the first correspondence information generation step; A method for managing a measuring machine having the above features.

2. 2. The measuring machine management method according to claim 1, further comprising a factor identification step of identifying one or more of the influencing factors from among a plurality of types of factors based on the calculation processing result of the calculation step, when the factors that affect the measurement of the actual shape measurement values ​​are defined as influencing factors.

3. 3. The measuring machine management method according to claim 2, further comprising a display control step of displaying the results of the factor identification step on a display unit.

4. a second correspondence information generating step of generating, for each of the shape measurement results based on the identification result, second correspondence information that associates the shape measurement results with the factor actual measurement values ​​of one or more of the influencing factors corresponding to the shape measurement time of the shape measurement results, 4. The measuring instrument management method according to claim 3, wherein the display control step causes the display unit to display, as the identification result, an image representing a time series change in the shape measurement value and a time series change in the factor measurement value of one or more of the influencing factors identified in the factor identification step.

5. 5. The measuring instrument management method according to claim 4, wherein the display control step causes the display unit to display, as the images, a first graph showing a time series change in the shape measurement value and a second graph showing a time series change in the factor measurement value of one or more of the influencing factors.

6. the number of scales on a first axis corresponding to the shape measurement value of the first graph is equal to the number of scales on a second axis corresponding to the factor measurement value of the second graph; 6. The measuring device management method according to claim 5, wherein in the display control step, a value obtained by dividing a difference between an upper limit value and a lower limit value of the shape actual measurement value by the number of scales is determined as a numerical value per scale of the first axis to display the first graph, and a value obtained by dividing a difference between an upper limit value and a lower limit value of the factor actual measurement value by the number of scales is determined as a numerical value per scale of the second axis to display the second graph.

7. 7. The method for managing a measuring device according to claim 6, wherein the display control step causes the first graph and the second graph to be displayed on the display unit in a superimposed state.

8. In the measurement result acquisition step, the shape measurement results are repeatedly acquired for each of a plurality of types of measurement items; In the first correspondence information generating step, the first correspondence information is generated for each of the measurement items, 2. The method for managing a measuring device according to claim 1, wherein the calculation step is performed for each of the measurement items.

9. In the measurement result acquisition step, the shape measurement results are repeatedly acquired from the plurality of measuring machines; In the first correspondence information generating step, the first correspondence information is generated for each of the measuring machines; 2. The measuring machine management method according to claim 1, wherein the calculation step calculates the correlation for each of the factors for each of the measuring machines.

10. 2. The measuring machine management method according to claim 1, wherein, when the measuring machine measures the shape of the workpiece using a probe, the multiple types of factors include an installation environment temperature of the measuring machine, a drive current value of an electric drive unit of the probe provided in the measuring machine, and a radius of a tip of the probe.

11. a measurement result acquisition unit that repeatedly acquires shape measurement results including shape measurement values ​​that are actual measurement values ​​of the shape of the object measured by the measuring device and shape measurement times that are measurement times of the shape measurement values; a factor information acquiring unit that repeatedly acquires, for each of a plurality of types of factors that may affect the measurement of the shape measurement value by the measuring instrument, factor information including a factor measurement value that is an actual measurement value of the factor and a factor measurement time that is a measurement time of the factor measurement value; a first correspondence information generating unit that generates, for each of the shape measurement results, first correspondence information that associates the shape measurement results with the factor actual measurement values ​​for each of the factors corresponding to the shape measurement times of the shape measurement results, based on the shape measurement results repeatedly acquired by the measurement result acquiring unit and the factor information repeatedly acquired by the factor information acquiring unit; a calculation unit that calculates a correlation between the actual shape measurement value and each of the factors based on the first correspondence information generated by the first correspondence information generation unit; A measuring machine management device comprising:

Images