Ultrasonic inspection device and ultrasonic inspection method

Abstract

To provide an ultrasonic inspection device and an ultrasonic inspection method for improving usability.SOLUTION: An ultrasonic inspection device includes a shaft member and a structure. The shaft member extends in a first direction. The structure is provided around the shaft member on a first plane crossing the first direction, so as to be rotated with the shaft member as a center. The structure includes: an elastomer member provided around the shaft member on the first plane; a first member between the shaft member and the elastomer member; and an element part provided between the first member and the elastomer member. The element part includes an inspection element. The inspection element includes: a first electrode; a first counter electrode; and a first piezoelectric member between the first electrode and the first counter electrode. A direction from the first electrode to the first counter electrode is in a radiation direction along the first plane by passing through the shaft member.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD An embodiment of the present invention relates to an ultrasonic inspection device and an ultrasonic inspection method. [Background technology]

[0002] Various examinations are performed using ultrasonic devices, and it is desirable to improve the ease of use of ultrasonic examination devices. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 7358191 Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE INVENTION Embodiments of the present invention provide an ultrasound inspection device and method that can improve ease of use. [Means for solving the problem]

[0005] According to an embodiment, an ultrasonic inspection device includes a shaft member and a structure. The shaft member extends in a first direction. The structure is provided around the shaft member in a first plane intersecting the first direction and configured to rotate around the shaft member. The structure includes an elastomer member provided around the shaft member in the first plane, a first member provided between the shaft member and the elastomer member, and an element unit provided between at least a portion of the first member and the elastomer member. The element unit includes an inspection element. The inspection element includes a first electrode, a first counter electrode, and a first piezoelectric member provided between the first electrode and the first counter electrode. The direction from the first electrode to the first counter electrode is along a radial direction that passes through the shaft member and along the first plane. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic cross-sectional view illustrating an ultrasonic inspection device according to the first embodiment. [Figure 2] FIG. 2 is a schematic perspective view illustrating the ultrasonic inspection device according to the first embodiment. [Figure 3] FIG. 3 is a schematic view illustrating the ultrasonic inspection device according to the first embodiment. [Figure 4] FIG. 4 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. [Figure 5] FIG. 5 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. [Figure 6] FIG. 6 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. [Figure 7] FIG. 7 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. [Figure 8] FIG. 8 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. [Figure 9] FIG. 9 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) FIG. 1 is a schematic cross-sectional view illustrating an ultrasonic inspection device according to the first embodiment. FIG. 2 is a schematic perspective view illustrating the ultrasonic inspection device according to the first embodiment. 1 and 2, an ultrasonic inspection device 110 according to the embodiment includes a shaft member 60 and a structure 20. The shaft member 60 extends in a first direction D1.

[0009] The first direction D1 is the Z-axis direction. One direction perpendicular to the Z-axis direction is the X-axis direction (e.g., the second direction D2). The direction perpendicular to the Z-axis direction and the X-axis direction is the Y-axis direction (e.g., the third direction D3).

[0010] The structure 20 is provided around the shaft member 60 on a first plane PL1 that intersects with the first direction D1. The structure 20 is configured to rotate around the shaft member 60. The first plane PL1 is along the XY plane, for example.

[0011] The structure 20 includes an elastomer member 25, a first member 21, and an element portion 10. The elastomer member 25 is provided around the shaft member 60 on a first plane PL1. The first member 21 is provided between the shaft member 60 and the elastomer member 25. The element portion 10 is provided between at least a portion of the first member 21 and the elastomer member 25.

[0012] For example, the first member 21 has a cylindrical or polygonal columnar shape extending along the first direction D1. In the example of Fig. 1, the element portion 10 is annular and provided around the first member 21. The elastomer member 25 is annular and provided around the element portion 10, for example. The elastomer member 25 may be provided around the shaft member 60, the first member 21, and the element portion 10 in the first plane PL1.

[0013] The element unit 10 includes a test element 11. The test element 11 includes a first electrode 11a, a first opposing electrode 11b, and a first piezoelectric member 11c. The first piezoelectric member 11c is provided between the first electrode 11a and the first opposing electrode 11b. The direction from the first electrode 11a to the first opposing electrode 11b is along a radial direction Da1 that passes through the shaft member 60 and is aligned with a first plane PL1.

[0014] For example, the inspection element 11 is configured to emit ultrasonic waves in response to a voltage applied between the first electrode 11a and the first opposing electrode 11b. The voltage may be, for example, pulsed. This causes pulsed ultrasonic waves to be emitted from the inspection element 11. The emitted ultrasonic waves penetrate the interior of the inspection object 80. The ultrasonic waves are then reflected by the bottom surface of the inspection object 80, and a portion of the reflected ultrasonic waves enters the inspection element 11. If there is a defect inside the inspection object 80, the ultrasonic waves are reflected or scattered by the defect, and a portion of the reflected ultrasonic waves (including scattered ultrasonic waves) enters the inspection element 11. The reflected ultrasonic waves generate a voltage (signal) in the inspection element 11. By detecting this signal, the condition of the inspection object 80 can be inspected. For example, in the case of a reflected signal from the bottom surface of the inspection object 80, the time difference between the emitted signal that generates the ultrasonic waves and the received signal generated in response to the reflected ultrasonic waves is detected. This allows the thickness of the inspection object 80, for example, to be detected. If a defect is present, the time difference between the emitted signal that generates an ultrasonic wave and the received signal that is generated in response to the reflected ultrasonic wave (including the scattered ultrasonic wave) is detected. This makes it possible to detect the position of the defect in the inspection object 80. In this way, the inspection element 11 may be configured to detect the inspection object 80 by detecting the reflected ultrasonic wave that is the emitted ultrasonic wave reflected by the inspection object 80. For example, the reflected ultrasonic wave is reflected from the inside or the back surface of the inspection object 80.

[0015] In the embodiment, an elastomer member 25 is provided around the inspection element 11. The elastomer member 25 is in contact with the inspection object 80 and is deformable. The elastomer member 25 is deformable to follow the unevenness of the surface of the inspection object 80. It is possible to prevent an air layer or the like from being formed between the elastomer member 25 and the surface of the inspection object 80. Ultrasonic waves are efficiently incident on and reflected by the inspection object 80 via the elastomer member 25, and a portion of the ultrasonic waves is received by the inspection element 11. It is possible to reduce ultrasonic wave loss due to air layers or the like, enabling highly sensitive inspection.

[0016] For example, a reference example may be considered in which a liquid (such as water) is provided between the test element 11 and the test object 80. In this reference example, since a liquid is required, wiping it off during testing is cumbersome. Depending on the test object 80, contact with water is undesirable. In this reference example, there are likely to be limitations on applications. High-precision detection is difficult.

[0017] In the embodiment, an elastomer member 25 is provided around the element unit 10. This allows ultrasonic waves to be propagated to the inspection object 80 without using a liquid contact medium. This makes it possible to suppress ultrasonic wave loss between the element unit 10 and the inspection object 80, enabling low-noise inspection. In the embodiment, an elastomer member 25 is provided around the element unit 10 in the rotatable structure 20. This allows a wide range of the inspection object 80 to be inspected while rotating the structure 20. According to the embodiment, it is possible to provide an ultrasonic inspection device that is easier to use.

[0018] In the embodiment, the Young's modulus of the elastomer member 25 is preferably, for example, 0.1 MPa or more and 10 MPa or less. This makes it easy for the elastomer member 25 to deform, and allows ultrasonic waves to efficiently propagate to the inspection object 80. Examples of the elastomer member 25 will be described later.

[0019] In the embodiment, the first member 21 holds the element unit 10. It is preferable that the first member 21 has a large acoustic loss. For example, part of the ultrasonic waves emitted from the element unit 10 travels toward the inspection object 80. Meanwhile, another part of the ultrasonic waves travels in the opposite direction to the direction toward the inspection object 80. The ultrasonic waves traveling in the opposite direction are reflected by other members. When the ultrasonic waves traveling in the opposite direction enter the element unit 10, they become noise. The large acoustic loss of the first member 21 can effectively attenuate unnecessary ultrasonic waves traveling in the opposite direction. Noise can be suppressed. For example, unnecessary vibrations are suppressed. This shortens the pulse width of the ultrasonic waves and improves distance resolution.

[0020] For example, it is preferable that the acoustic loss of the ultrasonic waves in the first member 21 (first acoustic loss) is larger than the acoustic loss of the inspection element 11 (second acoustic loss). This makes it possible to effectively attenuate unwanted ultrasonic waves. The acoustic loss of the first member 21 (first acoustic loss) can be expressed as the value of the attenuation constant at room temperature. The attenuation constant of the first member 21 at room temperature may be, for example, 2 dB / (MHz·cm) or more and 200 dB / (MHz·cm) or less.

[0021] For example, an intermediate layer (not shown in FIG. 1) may be provided between the first opposing electrode 11b and the elastomer member 25. For example, the acoustic impedance of the intermediate layer may be between the acoustic impedance of the first piezoelectric member 11c and the acoustic impedance of the elastomer member 25. The intermediate layer is, for example, an acoustic matching layer. When there is a large difference in acoustic impedance between the first piezoelectric member 11c and the elastomer member 25, providing an intermediate layer allows the ultrasonic waves emitted from the first piezoelectric member 11c to be efficiently transmitted to the test object 80.

[0022] The first member 21 may include, for example, a plurality of particles and a resin disposed around the plurality of particles. The plurality of particles may include, for example, an inorganic material. The resin may include, for example, at least one selected from the group consisting of epoxy resin, acrylic resin, urethane resin, and rubber. The inorganic material may include, for example, at least one selected from the group consisting of tungsten powder, unpolarized ceramic, alumina powder, glass beads, and silica powder.

[0023] 1, in this example, the first piezoelectric member 11c is annular and has a center on the shaft member 60. The first piezoelectric member 11c may be cylindrical, for example.

[0024] In this example, the test element 11 includes a plurality of first opposing electrodes 11b. The plurality of first opposing electrodes 11b are arranged in a ring shape with the shaft member 60 as the center. In this example, the first electrode 11a is ring-shaped with the shaft member 60 as the center. The first electrode 11a may be, for example, cylindrical. The number of the plurality of first opposing electrodes 11b may be, for example, 4 or more and 64 or less.

[0025] In this example, the first electrode 11a is located between the first member 21 and the first piezoelectric member 11c. The plurality of first counter electrodes 11b are located between the first piezoelectric member 11c and the elastomeric member 25. The first electrode 11a is, for example, an inner electrode. The plurality of first counter electrodes 11b are, for example, outer electrodes.

[0026] In the embodiment, one of the plurality of first opposing electrodes 11b may be selected, and a voltage may be applied between the one of the plurality of first opposing electrodes 11b and the first electrode 11a. Ultrasound is emitted from a portion corresponding to the selected one of the plurality of first opposing electrodes 11b. On the other hand, ultrasonic waves are not emitted from the other portions that are not selected. This operation may be controlled by a control unit described below.

[0027] FIG. 3 is a schematic view illustrating the ultrasonic inspection device according to the first embodiment. 3, the control unit 70 may be provided in the ultrasonic inspection device 110. The control unit 70 may be included in the ultrasonic inspection device 110. The control unit 70 may be provided separately from the ultrasonic inspection device 110.

[0028] The control unit 70 is configured to perform a first operation. In the first operation, the control unit 70 is configured to apply a voltage between the first electrode 11a and one of the plurality of first opposing electrodes 11b, but not to apply a voltage between the first electrode 11a and another of the plurality of first opposing electrodes 11b.

[0029] In the first operation, an ultrasonic wave is emitted from a portion corresponding to one of the selected first opposing electrodes 11b. The ultrasonic wave reflected by the inside or rear surface of the test object 80 is detected in the portion corresponding to one of the selected first opposing electrodes 11b.

[0030] On the other hand, ultrasonic waves are not emitted from a portion corresponding to another one of the plurality of first opposing electrodes 11b that has not been selected, and ultrasonic waves reflected by the test object 80 are not detected in the portion corresponding to another one of the plurality of first opposing electrodes 11b that has not been selected.

[0031] Such selective operation results in suppression of unwanted ultrasound and unwanted signals, e.g., noise suppression.

[0032] In the first operation, one of the plurality of first opposing electrodes 11b selected is located between the test object 80 and the shaft member 60.

[0033] As shown in FIG. 3 , a rotation angle sensor 51 may be provided. The rotation angle sensor 51 may be included in the ultrasonic inspection device 110. The rotation angle sensor 51 may be provided separately from the ultrasonic inspection device 110. The rotation angle sensor 51 is configured to detect the rotation angle of the structure 20. The control unit 70 may be configured to perform a first operation based on the rotation angle obtained from the rotation angle sensor 51. One of the plurality of first opposing electrodes 11b may be selected based on the rotation angle. Detection of the rotation angle by the rotation angle sensor 51 may include, for example, at least one of optical detection, electrical detection, and detection based on gravity. Optical detection may include detection using an image such as a camera. Tilt may be detected by detection based on gravity. Any method for detecting the rotation angle may be used.

[0034] 3, an output from the rotation angle sensor 51 may be supplied to a control unit 70. In this example, a plurality of terminals 75 are provided on the shaft member 60. One of the plurality of terminals 75 is electrically connected to one of the plurality of first opposing electrodes 11b. One of the plurality of terminals 75 is selected by, for example, a switch 72. The control unit 70 is configured to control the switch 72.

[0035] The control unit 70 may include a drive circuit 71 and a detection circuit 73. A voltage (signal) output from the drive circuit 71 is applied between one of the plurality of first opposing electrodes 11b and the first electrode 11a via a switch 72 and a terminal 75. A signal obtained from the inspection element 11 is detected by, for example, the detection circuit 73. At least one of the drive circuit 71 and the detection circuit 73 may include, for example, a pulser receiver or an ultrasonic flaw detector.

[0036] 1 and 2, a holding portion 61 may be provided on the shaft member 60. For example, the holding portion 61 may be fixed to another member (for example, a mobile object such as a drone). For example, the holding portion 61 may be operated by a user of the ultrasound inspection device 110. A part of the holding portion 61 (for example, an end portion) may be connected to the rotation angle sensor 51.

[0037] FIG. 4 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. 4, in the ultrasonic inspection device 111 according to the embodiment, the structure of the element unit 10 is different from the structure of the element unit 10 in the ultrasonic inspection device 110. Except for this, the configuration of the ultrasonic inspection device 111 may be the same as the configuration of the ultrasonic inspection device 110.

[0038] In the ultrasonic inspection device 111, the first piezoelectric member 11c is annular around the shaft member 60. The inspection element 11 includes a plurality of first opposing electrodes 11b. The plurality of first opposing electrodes 11b are arranged in an annular shape around the shaft member 60. The plurality of first opposing electrodes 11b are located between the first member 21 and the first piezoelectric member 11c. The first electrode 11a is located between the first piezoelectric member 11c and the elastomer member 25. In this example, the plurality of first opposing electrodes 11b are inner electrodes. The plurality of first electrodes 11a are outer electrodes. The number of the plurality of first opposing electrodes 11b may be, for example, 4 or more and 64 or less.

[0039] In the ultrasonic inspection device 111, the control unit 70 (see FIG. 3) may also perform a first operation. In the first operation, the control unit 70 is configured to apply a voltage between the first electrode 11a and one of the plurality of first opposing electrodes 11b, but not to apply a voltage between the first electrode 11a and another one of the plurality of first opposing electrodes 11b. In the first operation, the selected one of the plurality of first opposing electrodes 11b is located between the inspection object 80 and the shaft member 60.

[0040] FIG. 5 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. 5, in the ultrasonic inspection device 112 according to the embodiment, the structure 20 further includes a second member 22. The configuration of the ultrasonic inspection device 112 other than this may be the same as the configuration of the ultrasonic inspection device 110 or the configuration of the ultrasonic inspection device 111.

[0041] In the ultrasonic inspection device 112, the elastomer member 25 is provided between the element section 10 and the second member 22. The second member 22 satisfies at least one of a first condition and a second condition. In the first condition, the second member 22 includes a plurality of holes 22h. In the second condition, the thickness of the second member 22 is 15 μm or less.

[0042] When the second member 22 includes a plurality of holes 22h, the second member 22 may be, for example, mesh-like. A portion of the elastomer member 25 may be configured to be able to protrude to the outside through the plurality of holes 22h. This allows the structure 20 to rotate more easily while in contact with the inspection object 80. Ultrasonic waves emitted from the element section 10 can be more effectively incident on the inspection object 80.

[0043] When the thickness of the second member 22 is 15 μm or less, the second member 22 can easily conform to the irregularities on the surface of the inspection object 80. The structure 20 can more easily rotate while in contact with the inspection object 80. The ultrasonic waves emitted from the element section 10 can be more effectively incident on the inspection object 80.

[0044] FIG. 6 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. As shown in FIG. 6, in the ultrasonic inspection device 113 according to the embodiment, the first piezoelectric member 11c includes a composite material. The first piezoelectric member 11c including the composite material may include at least one selected from the group consisting of a composite piezoelectric element, a composite piezoelectric vibrator, and a piezoelectric composite. The first piezoelectric member 11c includes, for example, a plurality of inorganic portions 15a and a resin portion 15b between the plurality of inorganic portions. The plurality of inorganic portions 15a include, for example, piezoelectric ceramic. The remaining configuration of the ultrasonic inspection device 113 may be similar to that of the ultrasonic inspection device 110 or the ultrasonic inspection device 111. The ultrasonic inspection device 113 also provides an ultrasonic inspection device that can improve usability.

[0045] FIG. 7 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. 7, in an ultrasonic inspection device 114 according to the embodiment, the element section 10 includes a plurality of inspection elements 11. The configuration of the ultrasonic inspection device 114 other than this may be similar to the configuration of the ultrasonic inspection device 110 and the like.

[0046] In the ultrasonic inspection device 114, the multiple inspection elements 11 are arranged in a ring shape around the shaft member 60. In one of the multiple inspection elements 11, the first electrode 11a and the first opposing electrode 11b are aligned along a second plane that intersects with the radiation direction Da1. The second plane is, for example, perpendicular to the radiation direction Da1. The ultrasonic inspection device 114 also provides an ultrasonic inspection device that can improve usability. The first electrodes 11a included in the multiple inspection elements 11 may be electrically connected to each other.

[0047] FIG. 8 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. 8, in the ultrasonic inspection device 115 according to the embodiment, the element section 10 also includes a plurality of inspection elements 11. The configuration of the ultrasonic inspection device 115 other than this may be similar to the configuration of the ultrasonic inspection device 110 and the like.

[0048] In the ultrasonic inspection device 115, the multiple inspection elements 11 are arranged in a ring shape around the shaft member 60. In one of the multiple inspection elements 11, the first electrode 11a and the first opposing electrode 11b are aligned along a second plane that is inclined with respect to the radiation direction Da1. The ultrasonic inspection device 115 also provides an ultrasonic inspection device that can improve usability. In the ultrasonic inspection device 115, ultrasonic waves emitted from one of the multiple inspection elements 11 are incident on the inspection object 80 in a direction inclined with respect to the radiation direction Da1. For example, inspection can be performed using angle beam inspection. In angle beam inspection, one of the multiple inspection elements 11 can be inspected for defects at a position inclined with respect to the radiation direction Da1.

[0049] In the example of FIG. 8, the ultrasonic inspection device 115 further includes a third member 23, a fourth member 24, and an intermediate member 28. The third member 23 is provided between the multiple inspection elements 11 in the circumferential direction centered on the shaft member 60. The third member 23 is provided between the first member 21 and the elastomer member 25 in the radial direction Da1. The fourth member 24 is provided between each of the multiple inspection elements 11 and the elastomer member 25. In this example, the fourth member 24 includes a side that is inclined with respect to the radial direction Da1. One of the multiple inspection elements 11 is provided between the side and the first member 21. As a result, the stacking direction of the multiple inspection elements 11 is inclined with respect to the radial direction Da1.

[0050] A part of the intermediate member 28 is provided between the first member 21 and the fourth member 24. Another part of the intermediate member 28 is provided between the fourth member 24 and the third member 23. The intermediate member 28 is, for example, a sound absorbing material.

[0051] FIG. 9 is a schematic cross-sectional view illustrating the ultrasonic inspection device according to the first embodiment. 9, in the ultrasonic inspection device 116 according to the embodiment, the element section 10 also includes a plurality of inspection elements 11. The configuration of the ultrasonic inspection device 116 other than this may be similar to the configuration of the ultrasonic inspection device 110 and the like.

[0052] The ultrasonic inspection device 116 further includes a third member 23 and a fourth member 24. The third member 23 is provided between the multiple inspection elements 11 in the circumferential direction centered on the shaft member 60. The third member 23 is provided between the first member 21 and the elastomer member 25 in the radial direction Da1. The fourth member 24 is provided between each of the multiple inspection elements 11 and the elastomer member 25. In this example, the fourth member 24 includes a side inclined with respect to the radial direction Da1. One of the multiple inspection elements 11 is provided between the side and the first member 21. As a result, the stacking direction of the multiple inspection elements 11 is inclined with respect to the radial direction Da1.

[0053] The third member 23 may include, for example, the same material as the first member 21. The third member 23 may include, for example, a plurality of particles and a resin disposed around the plurality of particles. The plurality of particles may include, for example, an inorganic material. The resin may include, for example, at least one selected from the group consisting of epoxy resin, acrylic resin, urethane resin, and rubber. The inorganic material may include, for example, at least one selected from the group consisting of tungsten powder, unpolarized ceramic, alumina powder, glass beads, and silica powder.

[0054] The fourth member 24 may include, for example, at least one selected from the group consisting of an acrylic resin, a polyetherimide (PEI) resin, a polystyrene resin, and a polyimide resin. The acrylic resin may include, for example, PMMA.

[0055] The intermediate member 28 may include a sound-absorbing material that absorbs ultrasonic waves reflected between the fourth member 24 and the elastomer member 25, for example.

[0056] When the intermediate member 28 includes a sound-absorbing material, the intermediate member 28 may include a material similar to that of the first member 21. The intermediate member 28 may include, for example, a plurality of particles and a resin disposed around the plurality of particles. The plurality of particles may include, for example, an inorganic material. The resin may include, for example, at least one selected from the group consisting of epoxy resin, acrylic resin, urethane resin, and rubber. The inorganic material may include, for example, at least one selected from the group consisting of tungsten powder, unpolarized ceramic, alumina powder, glass beads, and silica powder.

[0057] The fourth member 24 may include a portion facing the first member 21 and a portion facing the third member 23. The surfaces of these portions may have multiple wedge shapes (e.g., uneven shapes). The multiple wedge shapes cause ultrasonic waves reflected between the fourth member 24 and the elastomer member 25 to be reflected in various directions. The multiple wedge shapes are, for example, reflective structures. The multiple wedge shapes have the function of suppressing ultrasonic waves reflected between the fourth member 24 and the elastomer member 25 from returning to the inspection element 11. When multiple wedge shapes are provided, the intermediate member 28 (e.g., sound-absorbing material) may be omitted.

[0058] A first operation may be performed by the control unit 70 in at least one of the ultrasonic inspection device 114, the ultrasonic inspection device 115, and the ultrasonic inspection device 116. In the first operation, the control unit 70 is configured to apply a voltage between the first electrode 11a included in one of the multiple inspection elements 11 and the first counter electrode 11b included in that one of the multiple inspection elements 11, while not applying a voltage between the first electrode 11a included in another of the multiple inspection elements 11 and the first counter electrode 11b included in that other one of the multiple inspection elements 11. Ultrasonic waves are emitted from the selected portion, and ultrasonic waves are not emitted from the non-selected portions. Reflected ultrasonic waves from the inspection object 80 are detected in the selected portion, and reflected ultrasonic waves are not detected in the non-selected portions.

[0059] In the ultrasonic inspection device 114 , the ultrasonic inspection device 115 , and the ultrasonic inspection device 116 , in the first operation, the one of the plurality of inspection elements 11 is located between the inspection object 80 and the shaft member 60 .

[0060] In the embodiment, the structure 20 is pressed against the test object 80. In this state, the elastomeric member 25 is deformed. The elastomeric member 25 has, for example, an ultra-low modulus of elasticity. The elastomeric member 25 is, for example, reversibly deformable to a large extent. The elastomeric member 25 has, for example, viscoelasticity. For example, the elastomeric member 25 is deformable so as to follow the irregularities on the surface of the test object 80.

[0061] When the second member 22 (for example, a mesh sheet member) is provided, the elastomer member 25 deforms and comes into contact with the inspection object 80 through the openings (holes 22h) of the mesh sheet. For example, the elastomer member 25 having adhesiveness can allow the ultrasonic waves to propagate well.

[0062] As already explained, the second member 22 does not need to include the plurality of holes 22h. In this case, the thickness of the second member 22 is 15 μm or less. A thin second member 22 does not substantially reduce the propagation of ultrasonic waves. The second member 22 suppresses adhesion between the elastomer member 25 and the inspection object 80. The second member 22 can improve inspection accuracy. The second member 22 can improve the mobility of the structure 20 relative to the inspection object 80.

[0063] At least one of a thermosetting elastomer and a thermoplastic elastomer can be used for the elastomer member 25. As already explained, the Young's modulus (elastic constant) of the elastomer member 25 is preferably 0.1 MPa or more and 10 MPa or less. If the Young's modulus of the elastomer member 25 exceeds 10 MPa, for example, the ability to conform to the surface of the inspection object 80 and the ability to remove air layers are likely to decrease. If the Young's modulus of the elastomer member 25 is less than 0.1 MPa, for example, it becomes difficult for the shape of the structure 20 to be maintained when the structure 20 is pressed against the inspection object 80.

[0064] In this embodiment, it is preferable that the yield stress of the elastomer member 25 is large. For example, it is preferable that the yield stress of the elastomer member 25 is 2 MPa or more. It is more preferable that the yield stress of the elastomer member 25 is 20 MPa or more.

[0065] In the embodiment, the thickness of the elastomer member 25 is preferably, for example, 10 mm or less. The thickness of the elastomer member 25 may be, for example, 0.5 mm or more and 2 mm or less. For example, the ultrasonic wave propagation performance can be improved.

[0066] The thermoplastic elastomer applicable to the elastomer member 25 may include, for example, at least one selected from the group consisting of polystyrene-based thermoplastic elastomers (SBC, TPS), polyolefin-based thermoplastic elastomers (TPO), vinyl chloride-based thermoplastic elastomers (TPVC), polyurethane-based thermoplastic elastomers (TPU), polyester-based thermoplastic elastomers (TPEE, TPC), and polyamide-based thermoplastic elastomers.

[0067] The thermosetting elastomer applicable to the elastomer member 25 may include, for example, at least one selected from the group consisting of diene rubber and non-diene rubber. The diene rubber may include, for example, at least one selected from the group consisting of styrene-butadiene rubber (SBR), isoprene rubber (IR), butadiene rubber (BR), chloroprene rubber (CR), acrylonitrile-butadiene rubber (NBR), styrene-butadiene-styrene (SBS) block copolymer, styrene-ethylene-butylene-styrene (SEBS), and polyester urethane.

[0068] The non-diene rubber may include at least one selected from the group consisting of butyl rubber, ethylene-propylene rubber (EPM), ethylene-propylene-diene rubber (EPDM), urethane rubber (U), silicone rubber, and fluororubber (FKM). The butyl rubber may include, for example, isobutylene-isoprene rubber (IIR).

[0069] The thermosetting elastomer applicable to the elastomer member 25 may include, for example, other rubbers, such as at least one selected from the group consisting of chlorosulfonated polyethylene (CSM), chlorinated polyethylene (CM), acrylic rubber (ACM), polysulfide rubber (T), and epichlorohydrin rubber (CO, ECO).

[0070] The material of the elastomeric member 25 may be appropriately determined based on at least one of heat resistance, abrasion resistance, oil resistance, and chemical resistance, and may be determined based on the test object 80.

[0071] The elastomeric member 25 may include a plurality of particles, the size (e.g., diameter) of which may be, for example, 200 μm or less.

[0072] The second member 22 may be, for example, sheet-shaped. The second member 22 may include, for example, at least one selected from the group consisting of polyolefin, fluororesin, polyphenylene sulfide, and polyvinylidene chloride. The polyolefin may include, for example, at least one selected from the group consisting of polyester, polyethylene, and polypropylene. The fluororesin may include, for example, at least one selected from the group consisting of polytetrafluoroethylene, polychlorotrifluoroethylene, polyvinylidene fluoride, and polyvinyl fluoride.

[0073] The second member 22 may be a non-adhesive polymer sheet. The Young's modulus of the second member 22 may be higher than the Young's modulus of the elastomer member 25. The Young's modulus of the second member 22 is preferably 100 MPa or higher. This makes it easy to obtain, for example, high slipperiness. The Young's modulus of the second member 22 may be, for example, 2000 MPa or lower. This makes it easy to obtain good conformability to the irregularities on the surface of the inspection object 80.

[0074] (Second embodiment) The second embodiment relates to an ultrasonic inspection method. The ultrasonic inspection method according to the embodiment inspects an inspection object 80 using the ultrasonic inspection device according to the first embodiment. In the ultrasonic inspection method according to the embodiment, the above-described first operation may be performed. An ultrasonic inspection method that can improve ease of use is provided.

[0075] The embodiments may include the following technical solutions. (Technical proposal 1) a shaft member extending in a first direction; a structure provided around the shaft member in a first plane intersecting the first direction and configured to rotate around the shaft member; Equipped with The structure is an elastomer member disposed around the shaft member in the first plane; a first member provided between the shaft member and the elastomer member; an element portion provided between at least a portion of the first member and the elastomer member; Including, the element unit includes a test element, The test element is A first electrode; A first counter electrode; a first piezoelectric member provided between the first electrode and the first counter electrode; Including, An ultrasonic inspection device, wherein the direction from the first electrode to the first opposing electrode is along a radial direction that passes through the shaft member and is along the first plane.

[0076] (Technical proposal 2) the inspection element is configured to emit an ultrasonic wave in response to a voltage applied between the first electrode and the first counter electrode; The ultrasonic inspection device described in Technical Solution 1 is configured such that the inspection element detects the reflected ultrasonic waves that are reflected by the object to be inspected and detects the object to be inspected.

[0077] (Technical proposal 3) The ultrasonic inspection device described in Technical Solution 1, wherein the first piezoelectric member is annular with the shaft member as the center.

[0078] (Technical proposal 4) the test element includes a plurality of the first opposing electrodes, The ultrasonic inspection device described in Technical Proposal 3, wherein the plurality of first opposing electrodes are arranged in a ring shape with the shaft member as the center.

[0079] (Technical proposal 5) the first electrode is between the first member and the first piezoelectric member; The ultrasonic inspection device described in Technical Solution 4, wherein the plurality of first opposing electrodes are located between the first piezoelectric member and the elastomer member.

[0080] (Technical proposal 6) the plurality of first opposing electrodes are located between the first member and the first piezoelectric member, The ultrasonic inspection device described in Technical Solution 4, wherein the first electrode is located between the first piezoelectric member and the elastomer member.

[0081] (Technical proposal 7) a controller configured to perform the first operation; The ultrasonic inspection device described in any one of Technical Solutions 4 to 6, wherein in the first operation, the control unit is configured so that when applying a voltage between the first electrode and one of the plurality of first opposing electrodes, the control unit does not apply the voltage between the first electrode and another of the plurality of first opposing electrodes.

[0082] (Technical proposal 8) The ultrasonic inspection device described in Technical Proposal 7, wherein in the first operation, the one of the plurality of first opposing electrodes is located between the object to be inspected and the shaft member.

[0083] (Technical proposal 9) the element unit includes a plurality of the test elements, The ultrasonic inspection device described in Technical Proposal 3, wherein the plurality of inspection elements are arranged in a ring shape with the shaft member as the center.

[0084] (Technical proposal 10) The ultrasonic inspection device described in Technical Proposal 9, wherein the first electrode and the first opposing electrode are aligned along a second plane that intersects with the radiation direction.

[0085] (Technical proposal 11) The ultrasonic inspection device described in Technical Proposal 9, wherein the first electrode and the first opposing electrode are aligned along a second plane inclined with respect to the radiation direction.

[0086] (Technical proposal 12) a controller configured to perform the first operation; An ultrasonic inspection device according to any one of Technical Proposals 9 to 11, wherein in the first operation, the control unit is configured such that when applying a voltage between the first electrode included in one of the plurality of inspection elements and the first opposing electrode included in the one of the plurality of inspection elements, the control unit does not apply the voltage between the first electrode included in another of the plurality of inspection elements and the first opposing electrode included in the other of the plurality of inspection elements.

[0087] (Technical proposal 13) The ultrasonic inspection device described in Technical Proposal 12, wherein in the first operation, the one of the plurality of inspection elements is located between the object to be inspected and the axial member.

[0088] (Technical proposal 14) The ultrasonic inspection device of any one of Technical Solutions 7, 8, 12 and 13, wherein the control unit is configured to perform the first operation based on a rotation angle obtained from a rotation angle sensor configured to detect a rotation angle of the structure.

[0089] (Technical proposal 15) The ultrasonic inspection device according to Technical Solution 14, further comprising the rotation angle sensor.

[0090] (Technical proposal 16) The structure further includes a second member; the elastomer member is provided between the element portion and the second member, the second member satisfies at least one of a first condition and a second condition, In the first condition, the second member includes a plurality of holes, The ultrasonic inspection device according to any one of Technical Schemes 1 to 15, wherein in the second condition, the thickness of the second member is 15 μm or less.

[0091] (Technical proposal 17) The ultrasonic inspection device according to any one of Technical Schemes 1 to 16, wherein the Young's modulus of the elastomer member is 0.1 MPa or more and 10 MPa or less.

[0092] (Technical proposal 18) 9. The ultrasonic inspection device according to any one of Technical Schemes 1 to 8, wherein a first acoustic loss of the first member is greater than a second acoustic loss of the inspection element.

[0093] (Technical proposal 19) The ultrasonic inspection device according to any one of Technical Schemes 1 to 8, wherein the first piezoelectric member includes a composite material.

[0094] (Technical proposal 20) An ultrasonic inspection method using the ultrasonic inspection device described in any one of Technical Schemes 1 to 19.

[0095] According to the embodiments, an ultrasonic inspection device and an ultrasonic inspection method that can improve ease of use can be provided.

[0096] In this specification, "vertical" and "parallel" do not only mean strictly vertical and strictly parallel, but also include variations in the manufacturing process, and may mean substantially vertical and substantially parallel.

[0097] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of the elements included in the ultrasonic inspection device, such as the shaft member, structure, and control unit, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0098] Any combination of two or more elements of each embodiment to the extent technically possible is also included within the scope of the present invention as long as it encompasses the gist of the present invention.

[0099] In addition, all ultrasonic inspection devices and ultrasonic inspection methods that can be implemented by a person skilled in the art by making appropriate design modifications based on the ultrasonic inspection device and ultrasonic inspection method described above as embodiments of the present invention also fall within the scope of the present invention, as long as they include the gist of the present invention.

[0100] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0101] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0102] 10: element portion, 11: inspection element, 11a: first electrode, 11b: first opposing electrode, 11c: first piezoelectric member, 15a: inorganic portion, 15b: resin portion, 20: structure, 21-24: first to fourth members, 22h: hole, 25: elastomer member, 28: intermediate member, 51: rotation angle sensor, 60: shaft member, 61: holding portion, 70: control portion, 71: drive circuit, 72: switch, 73: detection circuit, 75: terminal, 80: inspection object, 110-116: ultrasonic inspection device, D1-D3: first to third directions, Da1: radiation direction, PL1: first plane

Claims

1. a shaft member extending in a first direction; a structure provided around the shaft member in a first plane intersecting the first direction and configured to rotate around the shaft member; Equipped with The structure is an elastomer member disposed around the shaft member in the first plane; a first member provided between the shaft member and the elastomer member; an element portion provided between at least a portion of the first member and the elastomer member; Including, the element unit includes a test element, The test element is A first electrode; A first counter electrode; a first piezoelectric member provided between the first electrode and the first opposing electrode; Including, An ultrasonic inspection device, wherein the direction from the first electrode to the first opposing electrode is along a radial direction that passes through the shaft member and is along the first plane.

2. The ultrasonic inspection device according to claim 1 , wherein the first piezoelectric member is annular and has the shaft member as its center.

3. the test element includes a plurality of the first opposing electrodes, The ultrasonic inspection device according to claim 2 , wherein the plurality of first opposing electrodes are arranged in a ring shape with the shaft member as the center.

4. a controller configured to perform the first operation; 4. The ultrasonic inspection device according to claim 3, wherein, in the first operation, when applying a voltage between the first electrode and one of the plurality of first opposing electrodes, the control unit is configured not to apply the voltage between the first electrode and another of the plurality of first opposing electrodes.

5. The ultrasonic inspection device according to claim 4 , wherein in the first operation, the one of the plurality of first opposing electrodes is located between the inspection object and the shaft member.

6. the element unit includes a plurality of the test elements, The ultrasonic inspection device according to claim 2 , wherein the plurality of inspection elements are arranged in a ring shape with the shaft member as the center.

7. a controller configured to perform the first operation; 7. The ultrasonic inspection device according to claim 6, wherein, in the first operation, when the control unit applies a voltage between the first electrode included in one of the plurality of inspection elements and the first opposing electrode included in the one of the plurality of inspection elements, the control unit is configured not to apply the voltage between the first electrode included in another of the plurality of inspection elements and the first opposing electrode included in the other of the plurality of inspection elements.

8. The ultrasonic inspection device according to claim 4 , wherein the control unit is configured to perform the first operation based on a rotation angle obtained from a rotation angle sensor configured to detect a rotation angle of the structure.

9. The structure further includes a second member; the elastomer member is provided between the element portion and the second member, the second member satisfies at least one of a first condition and a second condition, In the first condition, the second member includes a plurality of holes, The ultrasonic inspection device according to claim 1 , wherein the second condition is that the thickness of the second member is 15 μm or less.

10. An ultrasonic inspection method using the ultrasonic inspection device according to any one of claims 1 to 9.

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