Apparatus for manufacturing display device and method of manufacturing the display device

Abstract

To provide an apparatus for manufacturing a display device and a method of manufacturing the display device.SOLUTION: The apparatus for manufacturing a display device includes: a droplet discharge unit including a nozzle that discharges a droplet; at least one sensor that, with a virtual arbitrary plane having been set on a falling path of the droplet discharged from the droplet discharge unit, senses, when the droplet falls, a partial shape of an outer surface of the droplet projected onto the arbitrary plane or a cross-sectional shape of the droplet projected onto the arbitrary plane; and a controller that calculates, based on a result sensed by the at least one sensor, at least one of a volume of the droplet, a falling speed of the droplet, a discharge angle at which the droplet is discharged from the nozzle, and a falling path of the droplet moving from the nozzle to a substrate. When the at least one sensor is provided in plural, the plurality of sensors may be spaced apart from each other along the falling path of the droplet.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an apparatus and a method, and more particularly to a display device manufacturing apparatus and a display device manufacturing method. Regarding the manufacturing method. [Background technology]

[0002] Mobility-based electronic devices are widely used. Mobile electronic devices include mobile Other than small electronic devices such as mobile phones (mobile phone terminals or smartphones) Recently, tablet PCs have become widely used.

[0003] Such mobile electronic devices may display images or videos to support a variety of functions. The display device is used to provide the user with visual information based on the image. As other components become smaller, the proportion of the display in electronic devices is gradually increasing. Structures that can be folded to a specified angle when flat are also being developed. do.

[0004] To fabricate such a display device, various layers may be formed. At least one of the various layers can be formed by dropping droplets onto the substrate through a head. In such a case, in order to realize a precise image on the display device, It is necessary to accurately deliver droplets to desired locations. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Korean Patent No. 10-0975647 [Patent Document 2] Japanese Patent Application Laid-Open No. 2006-023275 [Patent Document 3] Japanese Patent Application Publication No. 2018-532138 Summary of the Invention [Problem to be solved by the invention]

[0006] Generally, when a droplet is dropped onto a substrate, the droplet is measured to calculate the volume of the droplet. In such cases, the exact volume of the droplet cannot be known, and the volume of the droplet is measured. A separate test table or film is required to measure the drop volume, so many The embodiment of the present invention simplifies the structure and cost while accurately positioning the droplets. The present invention provides a display device manufacturing apparatus and a display device manufacturing method that accurately measure [Means for solving the problem]

[0007] One embodiment of the present invention is a droplet ejection unit including a nozzle for ejecting droplets, and when the droplets fall, A virtual arbitrary plane is set on the falling path of the droplets falling from the droplet discharge unit. and a shape of a part of the outer surface of the droplet projected onto this arbitrary plane, or a shape of a part of the outer surface of the droplet projected onto this arbitrary plane. a sensing unit for sensing a cross-sectional shape of the droplet projected onto the image plane; and Based on this, the volume of the droplet, the falling speed of the droplet, and the discharge time of the droplet from the nozzle are determined. and at least one of the angle and the fall path of the droplet moving from the nozzle to the substrate. and a control unit that calculates one of the above.

[0008] In this embodiment, the sensing unit may include a confocal microscope or a confocal sensor. .

[0009] In this embodiment, a plurality of the sensing parts are provided, and the plurality of sensing parts detect the droplets. The droplets may be spaced apart from one another along the drop path.

[0010] In this embodiment, the sensor is disposed corresponding to at least one of the plurality of sensing units, A reflector that bends the laser beam emitted from the sensing unit and the light reflected by the droplet. It may further include a part.

[0011] In this embodiment, some of the sensing portions have a shape corresponding to a part of the outer surface of the droplet. and another part of the plurality of sensing parts senses a cross section of the droplet relative to an arbitrary surface. Can sense shape.

[0012] In this embodiment, a plurality of the sensing units are provided, and some of the sensing units and the other part of the plurality of sensing parts are opposite to each other with respect to the moving path of the droplet. It may be arranged in a direction.

[0013] In this embodiment, some of the plurality of sensing units sense a part of the shape of the outer surface of the droplet. The other part of the plurality of sensing parts is a cross section of the droplet relative to an arbitrary plane. Can sense shape.

[0014] In this embodiment, the control unit detects the shape of a part of the outer surface of the droplet detected by the sensing unit. The three-dimensional shape of the droplet is calculated by rotating the droplet with respect to the falling path of the droplet. The volume of the droplet can be calculated based on the three-dimensional shape of the droplet.

[0015] In this embodiment, the sensing unit senses the droplets at regular time intervals, and the control unit , the center of the droplet sensed by the sensing unit is connected to the falling path of the droplet or the droplet The ejection angle of the droplet can be calculated.

[0016] In this embodiment, the sensing unit detects the falling of the droplet on a plane perpendicular to the falling direction of the droplet. The shape of a portion of the outer surface of one of said droplets can be sensed at regular time intervals.

[0017] In this embodiment, the control unit detects the shape of a part of the outer surface of the droplet detected by the sensing unit. The droplet is then transformed into a flat shape on a plane perpendicular to the direction of the droplet's fall. Based on the shape, the three-dimensional shape of the droplet can be calculated.

[0018] In this embodiment, the sensing unit detects the droplet at regular time intervals when the droplet falls. The control unit detects the droplet, and determines the distance the droplet moves over a certain period of time. The falling speed of the droplet can be calculated.

[0019] In this embodiment, the ink jet head may further include a storage unit for storing droplets ejected from the nozzle. good.

[0020] In this embodiment, the sensing portion is oriented in a direction perpendicular to the moving path of the droplet. can be arranged as follows.

[0021] Another embodiment of the present invention is a method for discharging a droplet and providing a droplet on a path of the droplet. At least one of the shape of a part of the outer surface of the droplet projected onto a plane and the cross section of the droplet and detecting a shape of a part of the outer surface of the droplet and a cross section of the droplet. The volume of the droplet, the falling velocity of the droplet, the falling time of the droplet, and the like are calculated based on at least one of the above. and calculating at least one of the lower path and the ejection angle of the droplet. A method for manufacturing the device is disclosed.

[0022] In this embodiment, the shape of a part of the outer surface of the droplet and at least one of the cross section of the droplet are The method may further include calculating a three-dimensional shape of the droplet based on at least one of the three-dimensional shape of the droplet.

[0023] In this embodiment, the method further includes calculating the three-dimensional shape of the droplet at regular time intervals. That's fine.

[0024] In this embodiment, the centers of the three-dimensional shapes of the droplets spaced apart from each other are connected to form the droplets. The method further includes calculating at least one of an ejection angle of the droplet and a falling path of the droplet. That's fine.

[0025] In this embodiment, a part of the outer surface of the droplet on a plane perpendicular to the falling path of the droplet and detecting a shape of the droplet perpendicular to the falling path based on the shape of a portion of the outer surface of the droplet. and calculating a cross-sectional shape of the droplet on a plane.

[0026] In this embodiment, the shape of a part of the outer surface of the droplet on a plane perpendicular to the falling path The method may further include sensing the temperature at regular time intervals.

[0027] In this embodiment, the cross-sectional shape of the droplet is calculated at regular time intervals. The method may further include calculating the three-dimensional shape of the droplet.

[0028] In this embodiment, a cross section of the droplet projected onto a plane including the falling path of the droplet is sensed. and rotating the cross section of the droplet based on the falling path of the droplet to determine the shape of the droplet. The method may further include calculating a three-dimensional shape.

[0029] In this embodiment, a part of the outer surface of the droplet on a plane including the falling path of the droplet A step of detecting a shape and determining a plane including the falling path based on the shape of a part of the outer surface of the droplet. The method may further include calculating a cross-sectional shape of the droplet on a surface.

[0030] In this embodiment, the cross-sectional shape of the droplet is rotated based on the falling path of the droplet, The method may further include calculating the three-dimensional shape of the droplet.

[0031] In yet another embodiment of the present invention, the steps of discharging droplets and forming a droplet on a falling path of the droplets are The shape of a part of the outer surface of the droplet projected onto an arbitrary plane and at least one of the cross section of the droplet and detecting at least one of the shape of a portion of the outer surface of the droplet and the cross section of the droplet. a volume of the droplet, a falling velocity ... a step of calculating the drop path and the ejection angle of the droplet; based on at least one of the velocity, the drop path of the droplet, and the ejection angle of the droplet; and controlling at least one of the ejection volume and the ejection speed of the droplets. A method for manufacturing the device is disclosed.

[0032] Other aspects, features, and advantages beyond those described above are set forth in the following drawings, claims, and appended claims. This will become clear from the detailed description of the invention.

[0033] Such general and specific aspects may be used in systems, methods, computer programs, or may be implemented using a combination of a system, a method, and a computer program. [Effects of the Invention]

[0034] The display device manufacturing apparatus and the display device manufacturing method according to the embodiment of the present invention are Therefore, a display device capable of realizing the above-mentioned message can be manufactured.

[0035] The manufacturing apparatus and the manufacturing method of the display device according to the embodiment of the present invention are Time can be measured accurately and precisely. [Brief explanation of the drawings]

[0036] [Figure 1] 1 is a perspective view showing a display device manufacturing apparatus according to an embodiment of the present invention; [Figure 2] FIG. 2 is a perspective view showing a part of the manufacturing apparatus for the display device shown in FIG. [Figure 3A] 3 is a front view showing a partial shape of a droplet placed at a first position shown in FIG. 2. FIG. [Figure 3B] 3B is a perspective view showing a three-dimensional shape of a droplet calculated from a partial shape of the droplet shown in FIG. 3A. FIG. [Figure 4A] 3 is a front view showing a partial shape of a droplet placed at the second position shown in FIG. 2. FIG. [Figure 4B] 4B is a perspective view showing a three-dimensional shape of a droplet calculated from the partial shape of the droplet shown in FIG. 4A. FIG. [Figure 5A] 3 is a front view showing a partial shape of a droplet placed at a third position shown in FIG. 2. FIG. [Figure 5B] 5B is a perspective view showing a three-dimensional shape of a droplet calculated from the partial shape of the droplet shown in FIG. 5A. FIG. [Figure 5C] 3 is a perspective view showing the falling path of droplets discharged from the droplet discharge unit shown in FIG. 2 and the point where the droplets land on the display substrate. FIG. [Figure 6] FIG. 10 is a perspective view showing a part of a display device manufacturing apparatus according to another embodiment of the present invention. [Figure 7]7 is a perspective view showing the relationship between the droplet shown in FIG. 6 and a measurement surface measured by a sensing unit. [Figure 8] 7 is a perspective view showing a plurality of planar shapes of droplets sensed through the sensing unit shown in FIG. 6. FIG. [Figure 9] FIG. 10 is a perspective view showing a part of a display device manufacturing apparatus according to still another embodiment of the present invention. [Figure 10A] 10 is a side view showing the cross-sectional shape of a droplet sensed through the sensing unit shown in FIG. 9. [Figure 10B] 10 is a side view showing the cross-sectional shape of a droplet sensed through the sensing unit shown in FIG. 9. [Figure 10C] 10 is a side view showing the cross-sectional shape of a droplet sensed through the sensing unit shown in FIG. 9. [Figure 11] FIG. 10 is a perspective view showing a part of a display device manufacturing apparatus according to still another embodiment of the present invention. [Figure 12] FIG. 10 is a perspective view showing a part of a display device manufacturing apparatus according to still another embodiment of the present invention. [Figure 13] FIG. 10 is a perspective view showing a part of a display device manufacturing apparatus according to still another embodiment of the present invention. [Figure 14] 1 is a plan view showing a display device manufactured using an apparatus for manufacturing a display device according to an embodiment of the present invention; [Figure 15] 15 is a cross-sectional view showing the display device shown in FIG. 14. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0037] The present invention can be embodied in various forms with various modifications, and the specific implementation Examples are illustrated in the drawings and explained in detail in the detailed description. The manner in which this is accomplished will become clearer with reference to the embodiments described in detail below in conjunction with the drawings. However, the present invention is not limited to the following examples and may be embodied in various forms. It can also be realized.

[0038] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In this case, the same or corresponding elements will be denoted by the same reference numerals. Duplicate explanations will be omitted.

[0039] In the following examples, the terms "first," "second," etc. are not limiting but refer to one component. It was used to distinguish the element from other components.

[0040] In the following examples, the singular forms "a," "an," and "the" refer to plural forms unless the context clearly indicates otherwise. Contains expressions.

[0041] In the following examples, terms such as "comprises" or "has" are used in means that a given feature or component is present and one or more other features or components are present. This does not preclude the possibility of additional elements being added.

[0042] In the following examples, portions such as films, regions, components, etc., are disposed on or above other portions. When there is a part, it is not only when it is directly on top of another part, but also when there are other films, regions, or structures in between. This also includes cases where constituent elements are interposed.

[0043] In the drawings, the size of elements may be exaggerated or reduced for clarity. The size and thickness of each component shown in the drawings are shown arbitrarily for the convenience of explanation. The present invention is not necessarily limited to what is shown in the drawings.

[0044] In the following examples, the X-axis, Y-axis, and Z-axis are not limited to the three axes on the Cartesian coordinate system, For example, the X-axis, the Y-axis, and the Z-axis are orthogonal to each other. However, they may refer to different directions that are not perpendicular to each other.

[0045] As certain embodiments may be implemented differently, the order of the specific steps may differ from that described. For example, two steps described as successive may be performed substantially simultaneously. The steps described may be carried out in reverse order.

[0046] FIG. 1 is a perspective view showing a manufacturing apparatus for a display device according to an embodiment of the present invention. 1 is a perspective view showing a part of the manufacturing apparatus for the display device shown in FIG.

[0047] 1 and 2, the display device manufacturing apparatus 100 includes a support unit 110, a gantry 120, a moving unit 130, a droplet ejection unit 140, a sensing unit 150, a storage unit 160, and a control unit It may include 180.

[0048] The support unit 110 includes a stage 111, a guide member 112, a substrate moving member 113, and a substrate circuit. A rolling element 114 may be included.

[0049] The stage 111 has an online mark (not shown) for aligning the display substrate S. ) may also be included.

[0050] Here, the display substrate S may be a display device under manufacture. , glass, polyethersulfone, polyarylate late), polyetherimide, polyethylene naphthalate naphthalate), polyethylene terephthalate, polyphenylene Polyphenylene sulfide, polyimide, polycarbonate (PC), cellulose triacetate (TAC), cellulose acetate propionate It may also contain a polymeric resin such as cellulose acetate propionate.

[0051] The guide members 112 may be arranged on both sides of the substrate moving member 113, spaced apart from each other. The length of the cover member 112 may be longer than the edge length of the display substrate S. Here, the distance between the guide members 112 and the edge length of the display substrate S is It can be measured.

[0052] A gantry 120 may be disposed on the guide member 112. In one embodiment, the guide The member 112 is configured such that the gantry 120 is capable of linear movement along the length of the guide member 112. In particular, the guide member 112 may include a linear motion rail (Lin ear motion rail).

[0053] The substrate moving member 113 can be disposed on the stage 111. For example, referring to FIG. The substrate moving member 113 may extend along the Y direction. In particular, the substrate moving member 113 may include a rail for linear motion. The vehicle may also include a linear motion rail.

[0054] The substrate rotating member 114 can be rotatably disposed on the substrate moving member 113. When the substrate rotating member 114 is rotated, the display substrate S disposed on the substrate rotating member 114 rotates. In one embodiment, the substrate rotating member 114 is a rotating member on which the display substrate S is mounted. The stage 111 can rotate around a rotation axis perpendicular to one surface of the stage 111. 4 is a rotation axis that is perpendicular to one surface of the stage 111 on which the display substrate S is placed. When the display substrate S placed on the substrate rotating member 114 is rotated, the display substrate S It can rotate around a rotation axis perpendicular to one surface of the stage 111 on which it is placed. In such a case, the substrate rotating member 114 rotates the display substrate S after the display substrate S is placed. For example, the substrate rotating member 114 may be a vacuum chuck, an ESC chuck, or the like. (electrostatic chuck), or adhesive chuck. good.

[0055] The gantry 120 may be disposed on the guide member 112. 120 is placed on the guide members 112 spaced apart on both sides of the substrate moving member 113. It may be arranged.

[0056] The gantry 120 can move along the longitudinal direction of the guide member 112. In an embodiment, the gantry 120 may be manually operated for linear motion or may be operated by a motor cylinder (electric cylinder). cylinder; for example, including a stepping motor, a servo motor, and a ball screw) For example, the gantry 120 can be automatically moved linearly in addition to the linear motion. It includes a linear motion block that moves along the rail. It can be dynamically moved linearly.

[0057] The moving part 130 can move linearly on the gantry 120. For example, The moving part 120 may include a rail that allows the moving part 130 to move linearly. The discharge part 140 is disposed on the moving part 130 and moves together with the moving part 130 when the moving part 130 moves. It can move to.

[0058] The moving unit 130 and the droplet ejecting unit 140 may be arranged in various ways. In such a case, one each of the ink ejection unit 130 and the droplet ejection unit 140 may be provided. The droplet discharge unit 140 includes one head and at least one nozzle disposed in the head for discharging droplets DR. The nozzle may also include one or more nozzles.

[0059] In another example, a plurality of droplet ejection units 140 are provided, and one moving unit 130 is provided. Here, the plurality of droplet ejection units 140 may be arranged on one moving unit 130. , can be moved simultaneously by the movement of the moving unit 130. In such a case, each droplet ejection unit 1 40 may include at least one or more heads with at least one or more nozzles. stomach.

[0060] In still another example, a plurality of moving units 130 and a plurality of droplet ejection units 140 are provided. Here, one droplet ejection unit 140 is disposed on one moving unit 130. Or, on one moving part 130, there are a plurality of droplet ejection parts 140. Some of them are arranged on the moving part 130, and some of the droplet discharge parts 140 are arranged on the moving part 130. It is also possible to say that another part is arranged.

[0061] In the following, for the sake of convenience, it is assumed that one droplet ejection unit 140 is arranged in one moving unit 130. This section will explain in detail the cases where

[0062] The moving unit 130 may include a plurality of moving units 130. In such a case, the number of moving units 130 is determined by the liquid. The moving units 130 may be arranged in accordance with the number of the droplet ejection units 140. For example, the moving units 130 may be arranged in accordance with the first moving unit 130. The moving portion 131 may include a first moving portion 131, a second moving portion 132, and a third moving portion 133.

[0063] The distance between the first moving part 131 and the second moving part 132 is 1 / 2 the distance between the second moving part 132 and the third moving part 133. 133. The distance between the first moving part 131 and the second moving part 132 and the distance between the second moving part 132 and the third moving part 13 In this case, the distance between the first moving part 131 to the second moving part 132 may be different from each other. The third moving parts 133 can move independently of each other.

[0064] The moving part 130 can move linearly on the gantry 120. Specifically, the moving part 130 can move along the longitudinal direction of the gantry 120. For example, At least one of the first moving part 131, the second moving part 132, and the third moving part 133 is It can move along the x direction or the -x direction (opposite the x direction).

[0065] In one embodiment, the moving part 130 can be manually moved linearly. The moving part 130 is provided with a motor, a cylinder, etc., and is capable of automatic linear movement. For example, the moving part 130 may be a linear motion moving part that moves along a linear motion rail. It may also include a linear motion block.

[0066] The droplet ejection unit 140 may be disposed in the moving unit 130. For example, the first droplet ejection unit 141 may be , may be disposed on the first moving part 131. In another example, the second droplet ejecting part 142 may be disposed on the second moving part 131. In yet another example, the third droplet ejection section 143 may be disposed at the third moving section 13. It can be placed in 3.

[0067] The droplet ejection unit 140 ejects droplets DR onto the display substrate S or the storage unit 160. Here, the droplets DR are liquid crystals, alignment liquids, or pigments in a solvent. The particles may be mixed in red, green, blue, etc. The DR may be a polymer or small molecule organic material that corresponds to the light-emitting layer of the organic light-emitting display device. In yet another embodiment, the droplets DR are formed by dissolving a solution containing inorganic particles such as quantum dot materials. It may include.

[0068] The first droplet ejection section 141, the second droplet ejection section 142, and the third droplet ejection section 143 are each The amount of droplets DR to be supplied can be adjusted independently. The droplet ejection unit 142 and the third droplet ejection unit 143 are electrically connected to the control unit 180. Therefore, the first droplet ejection section 141, the second droplet ejection section 142, and the third droplet ejection section The units 143 can each adjust the amount of droplets DR to be discharged by the control unit 180. In the above case, at least one of the first droplet ejection unit 140 to the third droplet ejection unit 140 Each of the nozzles may include at least one nozzle that ejects one droplet DR. In such a case, when a plurality of nozzles are provided, at least one of the plurality of nozzles At least one nozzle provides a droplet DR within the opening 19OP shown in FIG. For example, one nozzle may provide droplets DR inside one opening 19OP. In another embodiment, at least two nozzles may be provided in one opening 19O. Inside P, a droplet DR can be provided.

[0069] The sensing unit 150 detects the shape of a part of the outer surface of the droplet DR discharged from the droplet discharge unit 140 or The cross-sectional shape of the droplet DR on any one surface can be measured. The sensing unit 150 may take various forms. For example, the sensing unit 150 may be a confocal microscope. cope, Interferometric microscope, or confocal line sensor The confocal microscope may include a tic confocal line sensor. e) is a method for obtaining multiple two-dimensional images of an object at different depths, based on which Confocal microscopes are microscopes that reconstruct the three-dimensional structure of an object based on the It can be a chromatic confocal microscope, a chromatic line confocal microscope, etc. Interferometric microscopes are used to measure changes in the microstructure and phase of an object. An example of an interference microscope is a laser interference microscope. Laser Interferometric Microscope, White Light Interferometer For convenience of explanation, the sensing unit 150 may be a confocal laser microscope. The detailed explanation will be given mainly on the case where an in-sensor is included.

[0070] In one embodiment, the sensing unit 150 is provided to sense a plurality of droplets DR at a time. In another embodiment, a plurality of sensing units 150 may be provided, and each sensing unit 1 50 is arranged corresponding to one droplet discharge unit 140, and the droplets discharged from one droplet discharge unit 140 In another embodiment, the sensing unit 150 may be configured to sense a plurality of droplets DR. One of the plurality of sensing units 150 is connected to one of the plurality of droplet ejection units 140. At least one droplet DR discharged from the sensing unit 150 is sensed. The other one of them is discharged from another part of the plurality of droplet discharge units 140. It is possible to sense one or more droplets DR. For the sake of convenience, the following description will be limited to the sensing unit 1. A plurality of sensing units 150 are provided, and one sensing unit 150 detects the droplets discharged from one droplet discharging unit 140. The detailed description will be focused on the case where a droplet DR is sensed.

[0071] In one embodiment, the sensing unit 150 may be arranged to be fixed on the stage 111. In such a case, a plurality of sensing units 150 are provided, and each sensing unit 150 detects each droplet ejection. In another embodiment, the sensing unit 150 may be arranged to correspond to the sensing unit 140. Although not shown, the stage 111 may be slidably disposed thereon. The number of the sensing units 150 is equal to or less than the number of the droplet ejection units 140. The position of the sensing unit 150 can be changed to correspond to the position of the output unit 140 .

[0072] The storage section 160 may be disposed between the guide members 112. 0 is a value indicating that the droplet DR is temporarily stored when measuring the droplet DR falling from the droplet discharge unit 140. Such a storage section 160 may be disposed on the stage 111. In another embodiment, the storage section 160 may be disposed on the lower surface of the stage 111. In this case, a hole may be formed in the stage 111 where the storage unit 160 is located. .

[0073] The control unit 180 determines the three-dimensional shape of the droplet DR, the liquid droplet size, and the liquid droplet size based on the measurement results of the sensing unit 150. At least one of the falling speed of the droplet DR, the falling path of the droplet DR, and the ejection angle of the droplet DR Furthermore, the control unit 180 can calculate one of the overall manufacturing apparatus 100 for the display device. can be controlled.

[0074] The manufacturing apparatus 100 for the display device described above supplies droplets DR to a display substrate S. An organic layer can be formed on the display substrate S. At this time, the display device manufacturing apparatus 1 In step 00, droplets DR supplied to the display substrate S are applied to various locations on the display substrate S. It is necessary to supply the correct amount to the correct position. After the droplet ejection unit 140 is arranged corresponding to the storage unit 160, the droplets DR are ejected into the storage unit 160. In another embodiment, the droplets DR can be detected by the sensing unit 150. The unit 140 ejects droplets DR onto the display substrate S, and the sensing unit 150 detects the droplets It is also possible to sense DR. , the display substrate S is rotated in the area where the substrate rotating section 114 or the storage section 160 is arranged. A test substrate (not shown) having the same shape as the test substrate is placed on a separately provided support plate. Then, droplets DR are supplied to this test substrate (not shown) from the droplet discharge unit 140, and the sensing unit 1 It is also possible to sense such droplets DR at 50. For convenience, the droplet ejection unit 140 ejects the droplets DR into the storage unit 160, and the sensing unit 150 The detailed description will be given focusing on the case of sensing such droplets DR.

[0075] The sensing unit 150 can sense the droplets DR between the droplet discharge unit 140 and the storage unit 160. In such a case, the sensing unit 150 can sense the shape of a part of the outer surface of the droplet DR. For example, the sensing unit 150 can sense the outer surface shape of the droplet DR on the XZ plane in FIG. A laser beam is emitted toward a first plane SF1 parallel to the droplet DR. It can sense the light that is reflected back.

[0076] Specifically, when the droplets DR fall from the droplet discharge unit 140, the droplets DR fall at the respective times. For example, immediately after the droplets drop from the droplet ejection unit 140, the first time The droplet DR, which has been placed at the first position PO1 after the droplet ejection, is attracted to the nozzle of the droplet ejection unit 140. Therefore, a long tail can be formed. The droplet DR placed at the second position PO2 after the passage of time is the droplet DR placed at the first position PO1. Immediately after the droplet falls from the droplet discharge portion 140, the third time period has elapsed and the third time period has elapsed. The droplet DR placed at the third position PO3 is closer to the tail than the droplet DR placed at the second position PO2. becomes even smaller, becoming almost spherical.

[0077] The sensing unit 150 senses the droplets DR at the first, second, and third times as described above. At this time, the droplet DR can be sensed during the time it starts to fall from the droplet discharge unit 140. The interval, the first time, the interval between the first and second times, and the interval between the second and third times are mutually exclusive. That is, the sensing unit 150 senses the droplets DR at regular time intervals. In this way, the position of the falling droplet DR can be sensed over time.

[0078] The control unit 180 detects the shape of the part of the outer surface of the droplet D At this time, the control unit 180 calculates the three-dimensional shape of the droplet R. The control unit 180 can calculate the volume of the droplet DR based on the shape of the droplet DR. The falling path of the droplet DR is calculated based on the position of the droplet DR sensed at each time in 50. The control unit 180 controls the falling path of the droplets DR so that the droplets DR are ejected from the first ejected position. The angle formed by the longitudinal direction of the nozzle of the droplet discharge part 140 and the falling path is calculated. By outputting the angle of the droplet DR, the control unit 180 can calculate the ejection angle of the droplet DR. It is also possible to calculate the velocity of the droplet DR based on the position of the droplet DR between the droplets.

[0079] The control unit 180 determines the volume of the droplet DR, the falling path of the droplet DR, and the discharge angle of the droplet DR. The droplet discharge unit 140 and the movement are controlled based on at least one of the degree of the discharge and the discharge speed of the droplets DR. The controller 110 can control at least one of the units 130.

[0080] For example, the amount of droplets DR discharged from the droplet discharge unit 140 is adjusted, or the discharge of the droplets DR is adjusted. The speed can be adjusted. In addition, the position of the droplet discharge unit 140 can be adjusted by the moving unit 130. By changing the angle of ejection of the droplets DR and the falling path of the droplets DR, the droplets DR are ejected. The droplets DR can be landed at accurate positions on the display substrate S. Alternatively, the droplet discharge unit 140 may be cleaned by the falling path of the droplets DR, or the display substrate may be cleaned by the falling path of the droplets DR. The moving speed of S or the moving speed of the droplet discharge unit 140 can be controlled. The control method will be described in detail later.

[0081] Therefore, the display device manufacturing apparatus 100 and the display device manufacturing method A droplet DR of a precise amount can be supplied to the droplet S at a precise position.

[0082] Furthermore, the display device manufacturing apparatus 100 and the display device manufacturing method are capable of manufacturing a precision display device. It is possible.

[0083] The following will discuss the falling path of the droplet DR, the falling speed of the droplet DR, the ejection angle of the droplet DR, and A method for measuring the volume of the droplet DR will be described in detail.

[0084] FIG. 3A is a partial view of the shape of a droplet placed at the first position shown in FIG. FIG. 3B is a side view of the droplet calculated through the shape of a portion of the droplet shown in FIG. 3A. 1 and 2 are the same as those in FIG. Indicates the material.

[0085] 3A and 3B, the droplets DR are discharged from the droplet discharge unit 140, and at a first time When the sensing unit 150 is disposed at the first position PO1 between the first plane SF1 and the second plane SF2, the sensing unit 150 is disposed at the first position PO1 between the first plane SF1 and the second plane SF2. A part of the outer surface of the cross section of the droplet DR placed at one position PO1 can be sensed. At this time, the sensing unit 150 determines the distance to be reached according to the color of the laser emitted from the sensing unit 150. Since the distances are different, the wavelength of the laser that collides with the droplet DR and is reflected can be detected. In this way, the distance from the sensing unit 150 to the outer surface of the droplet DR can be sensed. In this case, the sensing unit 150 may be arranged to face in a direction perpendicular to the falling path of the droplet DR. That is, the sensing unit 150 senses the droplet DR on the side of the falling path (for example, the X-axis direction in FIG. 3A). may be placed in

[0086] The sensing unit 150 includes a falling path of the droplet DR as shown in FIG. 3A, or A part of the outer surface of the droplet DR arranged on the first plane SF1, which is parallel to the falling path of the DR, is sensed. It is possible.

[0087] The control unit 180 calculates the three-dimensional shape of the droplet DR based on the result sensed by the sensing unit 150. Specifically, in one embodiment, the control unit 180 detects the The line connecting both ends of the outer surface of the droplet DR is assumed to be the center line CL. In another embodiment, the center line CL may be aligned with the display substrate S on which the droplet DR lands. It can be any line parallel to a line perpendicular to one surface of the center line C. L may be the same as the falling path of the droplet DR or may be parallel to the falling path of the droplet DR. In this case, the falling path of the droplet DR is parallel to a line perpendicular to one surface of the display substrate S. It is possible.

[0088] The control unit 180 rotates a part of the outer surface shape of the droplet DR based on the center line CL. By doing so, the three-dimensional shape of the droplet DR can be calculated.

[0089] The control unit 180 can store the three-dimensional shape of the droplet DR. The control unit 180 can also calculate the first center CE1 of the droplet DR. In this case, the center CE1 is the center of gravity of the three-dimensional shape of the droplet DR, the geometric center of the three-dimensional shape, etc. Possible.

[0090] In this case, the control unit 180 determines the imaginary point where the X-axis, Y-axis, and Z-axis of FIG. 2 meet. The position of the droplet DR on the X-axis, Y-axis, and Z-axis of FIG. 2 can be calculated using the reference point. For example, the control unit 180 controls the nozzle tip of the droplet discharge unit 140 from which the droplets DR fall. The center is set as a reference point, and compared with the first center CE1 of the droplet DR calculated above, the droplet DR Check how much the first center CE1 has moved from the reference point to the X-axis, Y-axis, and Z-axis. In such a case, the control unit 180 determines whether the droplet DR is located at a position away from the reference point in the Y-axis direction. The distance to the first center CE1 can be calculated. After calculating the first center CE1 of the droplet DR based on the result, the control unit 180 In this way, the distance between the first center CE1 of the droplet DR and the reference point can be calculated. The control unit 180 calculates the distance between the first center CE1 of the droplet DR and the reference point in the Z-axis direction as After calculating each distance, the control unit 180 calculates the distance from the reference point. Then, the X, Y, and Z coordinates of the first center CE1 of the droplet DR can be calculated and stored.

[0091] FIG. 4A is a graph showing the shape of a droplet placed at the second position PO2 shown in FIG. FIG. 4B is a side view of the droplet calculated using the shape of a portion of the droplet as shown in FIG. 4A. 1 and 2. indicates the same member.

[0092] Referring to FIGS. 4A and 4B, after the droplet DR is ejected, at a second time, the droplet The DR may further drop from the first position PO1 to a second position PO2. The sensing unit 10 can sense the droplet DR placed at the second position PO2. The sensing method of the sensing unit 150 may be the same as that described above. The first plane SF1 on which a part of the surface of the droplet DR sensed by the sensor is projected is shown in FIG. and a plane that is the same as or parallel to the first plane SF1 shown in FIG. 3B. It is possible.

[0093] The control unit 180 detects the droplet DR placed at the second position PO2 by the detection unit 150. At this time, the three-dimensional shape of the droplet DR can be calculated. The method can be the same or similar to that described above.

[0094] After calculating the three-dimensional shape of the droplet DR placed at the second position PO2, the control unit 18 0 can preserve the three-dimensional shape of the droplet DR at the second position PO2. The three-dimensional shape of the DR is stored in a storage unit (not shown) that is connected to the control unit 180 and provided separately. The control unit 180 may store the calculated droplet DR through the third order method. From the original shape, the second center CE2 of the droplet DR at the second position PO2 can be calculated.

[0095] In this case, the control unit 180 determines whether the second center CE2 of the droplet DR at the second position PO2 is The position in the Z-axis, X-axis, and Y-axis directions relative to the reference point can be calculated. In particular, the control unit 180 calculates the distances as described above, and then calculates the distances of the droplet DR relative to the reference point. The X, Y, and Z coordinates of the second center CE2 can be calculated and stored. Since this may be similar to the calculation method of the first center CE1 described above, a detailed description will be given below. Omitted.

[0096] FIG. 5A is a front view showing a part of the shape of a droplet placed in the third position shown in FIG. FIG. 5B shows the calculated droplet shape as shown in FIG. 5A. 5C is a perspective view showing the three-dimensional shape of a droplet discharged from the droplet discharge unit shown in FIG. 1 is a perspective view showing the falling path of droplets and the landing points on a display substrate. The same reference numerals as those in FIGS. 1 and 2 indicate the same elements.

[0097] 5A to 5C, after the droplet DR is discharged from the droplet discharge unit 140, At the third time, the sensor 150 reaches the third position PO3. , the droplet DR that has reached the third position PO3 can be sensed. The method for sensing droplets DR in PO3 is the same as or similar to the above description, so detailed In this sensing operation, the sensing unit 150 senses the object reflected on the first plane SF1. A part of the surface of the ejected droplet DR can be sensed. Is it the same plane as the first plane shown in FIGS. 3A and 3B, 4A and 4B? Or they may be parallel planes.

[0098] Based on the result of sensing by the sensing unit 150, the control unit 180 detects the droplet D at the third position PO3. The control unit 180 can calculate the three-dimensional shape of the droplet R. In such a case, the three-dimensional center of the droplet DR at the third position PO3 can be calculated. The shape can be approximately the same as or similar to a sphere.

[0099] As described above, the droplets DR at the first position PO1, the second position PO2, and the third position PO3 By calculating the three-dimensional shape of the droplet DR, the control unit 180 can calculate the volume of the droplet DR at each position. For example, the control unit 180 may determine whether the edge of the droplet DR at each position is a part of the planar shape. The connected lines are used as the center line CL to create a three-dimensional shape, and the body of such a three-dimensional shape is By calculating the product, the volume of the droplet DR at each position can be calculated.

[0100] Furthermore, when the droplet DR moves from one position to another, the control unit 180 controls the time and the distance to which the droplet DR moves. The falling speed of the droplet DR can be calculated based on the distance (the distance between the positions) That is, the control unit 180 controls the nozzle tip of the droplet ejection unit 140 in the Z-axis direction. Based on the distance from the first position PO1 to the first position PO1 and the time it takes to travel such a distance, The control unit 180 can calculate the falling speed of the droplet DR in the Z-axis direction. The distance between the first position PO1 and the second position PO2 and the distance from the first position PO1 to the second position PO2 are The falling speed of the droplet DR can be calculated based on the time it takes for the droplet DR to fall to PO2. Furthermore, the control unit 180 controls the distance between the second position PO2 and the third position PO3 in the Z-axis direction. and the time it takes for the droplet DR to fall from the second position P02 to the third position PO3. The control unit 180 calculates the falling speed of the droplet DR. It is also possible to calculate the average falling speed of the droplets DR by arithmetically averaging the falling speeds.

[0101] The control unit 180 connects the centers of the droplets DR at each position to form an imaginary straight line, By connecting such a straight line with the point where the droplet DR is discharged from the droplet discharge unit 140, The control unit 180 can also calculate the falling path of the droplet DR. The angle formed by the falling path of the droplet DR is determined as the ejection angle of the droplet DR, and such an angle is calculated. In another embodiment, the control unit 1 80 is an arbitrary straight line perpendicular to the tip surface of the nozzle of the droplet discharge unit 140 from which the droplet DR is discharged. , the angle between the falling path of the droplet DR and the droplet DR can be determined as the ejection angle of the droplet DR. .

[0102] In the above case, the control unit 180 determines the discharge angle of the droplets DR in the droplet discharge unit 140 and The path of the droplet DR can be calculated in the X-axis direction and the Y-axis direction. For example, as described above, the first center CE1, the second center CE2, and the third center CE3 of the droplet DR Based on the respective positions, the control unit 180 controls the droplet ejection in the X-axis direction or the Y-axis direction. The angle at which the droplet DR is discharged in the X-axis direction or the Y-axis direction from the nozzle end of the nozzle 140 is calculated. In particular, the control unit 180 controls the X, By connecting the Y-axis coordinates with each other, the ejection angle of the droplet DR and the falling path of the droplet DR are calculated. It is possible.

[0103] The control unit 180 determines the three-dimensional shape, volume, and size of the droplet DR through the above process. At least one of the falling speed of the droplets DR, the falling path of the droplets DR, and the ejection angle of the droplets DR One can be calculated.

[0104] Thereafter, the control unit 180 precisely controls the droplet ejection unit based on the above content as described above. can be controlled as follows.

[0105] When droplets DR are supplied to one opening 19OP of the pixel partition film 19 through one nozzle, In this case, the control unit 180 can compare the measured volume of the droplet DR with a preset volume. If it is determined that the measured volume of the droplet DR is less than the set volume, the control unit 180 , the amount of droplets DR discharged from the droplet discharge unit 140 is increased from the previous amount. On the other hand, if the measured volume of the droplet DR exceeds the set volume, If it is determined that the amount of droplets DR discharged from the droplet discharge unit 140 is The droplet ejection unit 140 can be controlled so that the measured If the volume of the droplet DR is the same as the set volume, the control unit 180 controls the droplet DR to maintain the current state. The droplet ejection unit 140 can be controlled. At this time, the preset volume is set by the pixel partition film 19. is the total amount of droplets DR that must be delivered to one opening 19OP, The time for discharging the droplets DR from the droplet discharge unit 140 is adjusted based on the amount of droplets DR discharged. It is also possible.

[0106] On the other hand, one opening 19OP of the pixel partition film 19 is supplied with light through at least two or more nozzles. When supplying droplets DR, the control unit 180 calculates the volume of the droplets DR discharged from each nozzle. In such a case, the control unit 180 controls one opening of the pixel partition film 19. 19 corresponds to a set volume, which is the total amount of droplets DR that must be supplied to the OP. In this way, droplets are ejected through at least one of the two or more nozzles. For example, the control unit 180 may control the supply of a preset droplet D Discharge from at least one of two or more nozzles to correspond to the total amount of R. The volume of the droplets DR to be ejected is adjusted to correspond to that described above, and the operation of the other nozzles is In another embodiment, the control unit 180 may stop the droplets DR from being dispensed. The volume of each droplet DR ejected from at least two or more nozzles is controlled so as to In another embodiment, three droplets DR are set in accordance with the total amount of droplets DR that has already been set. Of the above nozzles, only some may be operated and the other may not be operated. When three nozzles supply droplets DR to one opening 19OP of the pixel partition film 19, The total amount of droplets DR that must be supplied to one opening 19OP of the film 19 is 20mm 3 The amount of droplets ejected from one of the three nozzles is 9 mm 3 and , the amount of droplets DR ejected from another one of the three nozzles is 10 mm 3 and three The amount of droplets DR ejected from another nozzle is 11 mm 3 It is said that In this case, one of the three nozzles and one of the other three nozzles are operated. The other one of the three nozzles may be left inoperative. Therefore, a predetermined amount of droplets DR can be accurately provided to each opening 19OP of the pixel partition film 19. In another embodiment, when a plurality of nozzles are used, droplets DR can be ejected from each nozzle. By controlling the time for which the light is applied to each opening 19OP of the pixel partition film 19 to be different from each other, It is also possible to make the total amount of droplets DR that must be supplied match a preset value. .

[0107] The control unit 180 compares the calculated falling speed (or average falling speed) of the droplets DR with a preset The set speed can be compared. At this time, the control unit 180 determines whether the falling speed is equal to or lower than the set speed. Based on this, the transfer speed of the display substrate S or the movement speed of the droplet discharge unit 140 can be controlled. For example, if the calculated falling speed (or average falling speed) of the droplet DR is greater than the preset value, If the speed is less than the set speed, the control unit 180 controls the droplet ejection unit 140 to eject the droplets onto the display substrate S. When the step of discharging the droplets DR is performed, the transfer speed of the display substrate S or the droplet discharging unit 1 The movement speed of 40 can be controlled to be faster than the preset movement speed. On the other hand, if the calculated falling speed (or average falling speed) of the droplets DR exceeds the preset speed, If the distance exceeds the predetermined distance, the control unit 180 controls the droplet ejection unit 140 to eject the droplets DR onto the display substrate S. When performing the step of moving the display substrate S or the droplet ejection unit 140, Therefore, the moving speed can be controlled to be slower than the preset moving speed. Through this process, the droplets DR can be ejected at accurate positions.

[0108] The droplets DR are discharged onto the display substrate S, and the droplets D When R is supplied, the display substrate S or the droplet ejection unit 140 may be moved. The control unit 180 compares the falling path of the droplet DR with the previously set falling path as described above, The movement of the display substrate S or the droplet ejection unit 140 can be controlled.

[0109] Specifically, the control unit 180 compares the falling path of the droplet DR with a preset falling path. At this time, the control unit 180 controls the droplet DR to fall along the path up to the display substrate S. Alternatively, the falling path in the moving direction of the droplet ejection unit 140 can be calculated. Based on the path, the control unit 180 calculates the point where the droplet DR will land on the display substrate S. In particular, the control unit 180 controls the liquid crystal display device 100 to display the liquid crystal display device S on the display substrate S calculated above. The droplet DR impact point passes through the preset point D0 and lands on the display substrate S or the droplet The discharge unit 140 is arranged on an arbitrary straight line parallel to the moving direction (for example, the Y-axis direction in FIG. 5C) of the discharge unit 140. It is possible to determine whether or not the device is placed.

[0110] If it is determined that the calculated landing point of the droplet DR is located on the arbitrary straight line, The control unit 180 can compare the calculated landing point of the droplet DR with the preset point D0. For example, the landing point of the droplet DR calculated by the control unit 180 can be set to the first position shown in FIG. When the droplet is dropped at the first landing point D1, the control unit 180 controls the display substrate S or the droplet ejection unit 14 0 movement speed can be slower than the preset movement speed. When the landing point of the droplet DR is the second landing point D2 shown in FIG. 5, the control unit 180 The moving speed of the display substrate S or the droplet ejection unit 140 is set to be faster than the preset moving speed. It can be made easier.

[0111] If it is determined that the calculated landing point of the droplet DR is not located on the arbitrary straight line, The control unit 180 can then clean the droplet discharge unit 140. For example, When the bullet point is the third bullet point D3 and the fourth bullet point D4 shown in FIG. 5C, the control unit 180 can clean the droplet discharge unit 140. The control unit 180 controls the droplet discharge unit 14 so that the landing points are arranged on the arbitrary straight line. The position of 0 can be adjusted by controlling the moving part 130.

[0112] The control unit 180 compares the calculated discharge angle of the droplet DR with a preset discharge angle. At this time, the control unit 180 adjusts the calculated discharge angle of the droplet DR in the X-axis direction. and Y-axis directions, respectively. In this case, the calculated droplet D The discharge angle of R is in a direction other than the moving direction of the display substrate S or the droplet discharge unit 140. If the angle in the X-axis direction of FIG. 5C exceeds a predetermined value, the control unit 180 The discharge unit 140 can be controlled to be cleaned. Although not shown in the figure, the method involves using a brush or a tank containing cleaning liquid. The cleaning can be performed by spraying a cleaning solution onto the surface.

[0113] The calculated discharge angle of the droplet DR is determined based on the movement of the display substrate S or the droplet discharge unit 140. If the angle does not exceed a predetermined value in the X-axis direction of FIG. 5C, which is a direction other than the direction of the control The control unit 180 is in the direction of movement of the display substrate S or the droplet ejection unit 140, as shown in FIG. The calculated droplet DR ejection angle in the Y-axis direction can be compared with the preset angle. In such a case, the calculated ejection angle of the droplet DR is the first ejection angle shown in FIG. When the angle θ1 is set to θ1, the control unit 180 controls the moving speed of the display substrate S or the droplet ejection unit The movement speed of 140 can be controlled to be slower than the preset movement speed. On the other hand, if the calculated ejection angle of the droplet DR has the second ejection angle θ2 shown in FIG. 5C, In this case, the control unit 180 controls the moving speed of the display substrate S or the moving speed of the droplet ejection unit 140. The speed can be controlled to be faster than the preset moving speed. Through the above control, the droplets DR are ejected from the display substrate according to the ejection angle of the droplets DR. It is possible to make the ball land at an accurate position on the plate S.

[0114] The above-mentioned control may be performed individually or in combination. The unit 180 is configured to detect the three-dimensional shape of the droplet DR, the volume of the droplet DR, the falling speed of the droplet DR, At least two of the drop path and the discharge angle of the droplet DR are mutually different from the preset values. In the case where the droplets DR are different, the droplets DR are formed by controlling the respective components of the manufacturing apparatus for the display device in a composite manner. It is possible to make the droplets land at accurate positions on the display substrate S.

[0115] FIG. 6 is a perspective view showing a part of a manufacturing apparatus for a display device according to another embodiment of the present invention. 7 is a perspective view showing the relationship between the droplet shown in FIG. 6 and the measurement surface measured by the sensing unit. FIG. 8 shows a plurality of slices of droplets sensed through the sensing unit shown in FIG. FIG.

[0116] 6 to 8, the display device manufacturing apparatus 100 is the same as that described in FIGS. Similar to the above, the sensing unit 150 includes a confocal line sensor. Good too.

[0117] The sensing unit 150 may be configured to sense the droplet DR on an arbitrary second plane (SF2, for example, FIG. 6) perpendicular to the falling path of the droplet DR. The laser is irradiated onto the XY plane of the droplet D. It is possible to sense a part of the shape of the slice plane of R. In such a case, the sensing unit 150 Based on the result sensed at step 14, the control unit 180 determines whether the second When the droplet DR passes through the second plane SF2, the overlapping portion between the second plane SF2 and the droplet DR (slump) is formed. The shape of the chair plane can be calculated.

[0118] Specifically, when the sensing unit 150 irradiates the droplet DR with a laser, the laser that collides with the droplet DR The laser beam returns to the sensing unit 150, and the wavelength of the returned laser beam is detected by the sensing unit 150. The control unit 180 analyzes the results sensed by the sensing unit 150 and determines the outer shape of the droplet DR. Such a control unit 180 can calculate the shape of the droplet DR. The part of the shape DR-1A is the entire droplet DR where the droplet DR overlaps with the second plane SF2. It can be determined that the slice plane shape of the body is half of DR-1B. The control unit 180 overlaps with the second plane SF2 using a part DR-1A of the outer surface shape of the droplet DR. The overall planar shape DR-1B of the droplet DR can be calculated.

[0119] The total slab area for the droplet DR overlapping with the second plane SF2 calculated as above is The planar shape of the chair DR-1B can be measured by the sensing unit 150 at regular time intervals over time. For example, if a certain time has passed since the droplet DR was discharged, the sensing unit 150 The laser is emitted at intervals, and the shape of the droplet DR on the second plane SF2 can be detected sequentially. do.

[0120] The sensed result is transmitted to the control unit 180, and the control unit 180 controls the second plane SF2 over time. The sliced ​​planar shapes of the droplets DR can be stacked sequentially. For example, the control unit 1 80 is a diagram showing the first planar shape DR-1 to the Nth planar shape DR-1 of the droplet DR at time intervals as shown in FIG. Shapes (where N is a natural number) can be stacked.

[0121] When N slice planar shapes of droplets DR are stacked as shown in FIG. 8, the control unit 180 The outer surfaces (peripheries) of the sliced ​​planar shapes of the droplets DR are connected to each other to calculate the three-dimensional shape of the droplets DR. When the calculation of the three-dimensional shape of the droplet DR is completed, the control unit 180 The volume of the DR can be calculated.

[0122] Based on the volume of the droplet DR calculated as described above, the control unit 180 controls the droplet discharge unit 140 The amount of droplets DR discharged from the nozzle 10 can be controlled. Based on this, the control unit 180 selects at least two or more nozzles of the droplet ejection unit 140 as follows: It is also possible to determine which nozzles should be activated. By adjusting the discharge speed of the discharge unit 140, the droplets that land on the display substrate S can be It is also possible to control the overall amount of DR.

[0123] Therefore, the manufacturing apparatus and the manufacturing method of the display device are The droplets DR dispensed can be adjusted.

[0124] FIG. 9 is a perspective view showing a part of a manufacturing apparatus for a display device according to still another embodiment of the present invention. 10A to 10C are cross-sectional views of droplets sensed through the sensing unit shown in FIG. FIG.

[0125] 9 to 10C, a manufacturing apparatus (not shown) for manufacturing a display device is similar to that shown in FIGS. This is similar to what was explained in 2.

[0126] The sensing unit 150 may include a confocal microscope or an interferometric microscope. 150 is a third plane SF3 (for example, a plane parallel to the XZ plane in FIG. 9) for the falling droplet DR. That is, the sensing unit 150 can sense the planar shape projected onto the plane (a plane). The cross-sectional shape of the droplet DR placed on the third plane SF3 can be sensed. Depending on the falling path of the droplets DR, the positions of the third planes SF3 are either identical or parallel to each other. Ugh.

[0127] The sensing unit 150 senses the droplet DR at a first position PO as shown in FIGS. 10A to 10C. 1. Detect the cross-sectional shape of the droplet DR at each of the second position PO2 and the third position PO3. In such a case, the sensing unit 150 may operate at regular time intervals to detect each In another embodiment, the position of the droplet DR can be separately sensed at the sensing unit 15. 0 can also continuously sense the cross-sectional shape of the droplet DR.

[0128] The control unit 180 determines the position of the droplet DR based on the cross-sectional shape of the droplet DR detected by the detection unit 150. At this time, the control unit 180 calculates the three-dimensional shape of the droplet D The shape of R is assumed to be that of a body of revolution. Any line that passes through the shape and is parallel to a line perpendicular to the top surface of the display substrate S The straight line can be assumed to be the center line CL. It is also possible to assume that the fall path of R is the center line CL.

[0129] The control unit 180 rotates the cross-sectional shape of the droplet DR based on the center line CL. The control unit 180 controls the shape of the droplet DR formed by rotation to be three-dimensional. Determine the shape.

[0130] The control unit 180 performs the above-mentioned operation at the first position PO1, the second position PO2, and the third position PO3. The control unit 180 can perform the above steps at the first position PO1 and the second position PO2. When the droplet DR is placed at the third position PO3, the center of the droplet DR (not shown) is calculated. Here, the method for calculating the center of the droplet DR is the same as that shown in FIGS. 3A to 5B. Since the description is the same as or similar to that of the above, detailed description will be omitted.

[0131] As described above, the position of the droplet DR, the three-dimensional shape of the droplet DR, and the inside of the droplet DR are recorded at each position. Once the center is determined, the control unit 180 determines the volume of the droplet DR, the falling path of the droplet DR, the position of the droplet DR, and the distance between the droplet DR and the center of the droplet DR. At least one of the falling speed and the ejection angle of the droplet DR can be calculated. At this time, the control unit 180 determines the volume of the droplet DR, the falling path of the droplet DR, the falling speed of the droplet DR, and The method for calculating at least one of the angle of the droplet DR and the ejection angle of the droplet DR is the same as that described above or Since they are similar, detailed description will be omitted.

[0132] The control unit 180 determines the volume of the droplet DR calculated as described above, the falling path of the droplet DR, The droplet discharge unit determines whether or not the droplets DR are falling at a predetermined speed based on at least one of the falling speed of the droplets DR and the discharge angle of the droplets DR. 40 Alternatively, the moving speed of the display substrate S can be controlled.

[0133] Specifically, if it is determined that the calculated volume of the droplet DR exceeds the preset volume, The control unit 180 reduces the amount of droplets DR discharged by the droplet discharge unit 140, thereby The amount of droplets that land on the display substrate S within a certain time can be reduced. If it is determined that the volume of the DR is equal to or less than the preset volume, the control unit 180 controls the droplet ejection unit By increasing the amount of droplets DR discharged from 140, the display substrate S In another embodiment, the amount of droplets DR that land on the target surface can be increased. The volume of R and the total amount of droplets DR that must be supplied to one opening 19OP of the pixel partition film 19 It is also possible to adjust the time during which the droplets DR are discharged from the droplet discharge unit 140 by comparing the time In yet another embodiment, one of the pixel partition films 19 is supplied with the ink through at least two or more nozzles. When droplets DR are supplied to the two openings 19OP, the droplets supplied from each nozzle are The volume of the droplets DR is adjusted, or the droplets are ejected through only some of the nozzles. It is possible to supply DR or control the droplet DR supply time at each nozzle. .

[0134] After measuring the falling path of the droplet DR and the ejection angle of the droplet DR, the control unit 180 Calculating the landing point on the display substrate S and adjusting the position of the droplet discharge unit 140 In another embodiment, the control unit 180 may determine the falling path of the droplets DR and the discharge path of the droplets DR. As described above, the moving speed of the display substrate S or the droplet ejection unit 140 is determined by the ejection angle. The moving speed of the droplet ejection unit 140 can be controlled to perform cleaning. do.

[0135] Therefore, the manufacturing apparatus 100 for a display device and the manufacturing method for a display device can precisely form the droplets DR. Since the discharge can be controlled, droplets can be precisely supplied to the correct position on the display substrate S. can be done.

[0136] FIG. 11 is a perspective view showing a part of a manufacturing apparatus for a display device according to still another embodiment of the present invention. be.

[0137] Referring to FIG. 11, the display device manufacturing apparatus 100 is the same as that described with reference to FIGS. It may be similar to.

[0138] A plurality of sensing units 150 may be provided. In this case, the plurality of sensing units 150 may be configured to detect various For example, one of the sensing units 150 may be arranged to face the droplet D The plurality of sensing units 150 may be arranged to face in a direction perpendicular to the falling path of the R. The other one of them can be arranged so as to face in a direction parallel to the falling path of the droplet DR.

[0139] That is, the plurality of sensing units 150 are a first sensing unit 150A disposed at the center, a second sensing unit 150B disposed at the center, a third sensing unit 150C disposed at the center, a fourth sensing unit 150D disposed at the center, a fourth sensing unit 150E disposed at the center, a fifth sensing unit 150F disposed at the center, a fifth sensing unit 150G ... sixth The second sensing unit 150B and the third sensing unit 150C are disposed apart from the sensing unit 150A. In this case, the second sensing unit 150B and the third sensing unit 150C are arranged to face each other. That's fine.

[0140] The display device manufacturing apparatus 100 has the second sensing unit 150B and the third sensing unit 150C. The reflecting portion 170 may include a second reflecting portion 170B and a third reflecting portion 170C, which are arranged correspondingly. The second reflecting portion 170B and the third reflecting portion 170C are the second sensing portion 150B and the third sensing portion 150C, respectively. The laser beam emitted from the portion 150C is reflected, and the laser beam reflected by the droplet DR is can be guided to the second sensing unit 150B and the third sensing unit 150C, respectively. The second reflecting portion 170B and the third reflecting portion 170C may be mirror-shaped.

[0141] The first sensing unit 150A, the second sensing unit 150B, and the third sensing unit 150C are different from each other. For example, the first sensing unit 150A can sense the droplet DR at the second position PO When the droplet DR is placed on the second sensing unit 150B, the droplet DR can be sensed. can sense the droplet DR when it is placed at the first position PO1. The third sensing unit 150C senses the droplet DR when the droplet DR is placed at the third position PO3. It is possible.

[0142] The first to third sensing units 150A to 150C are configured as a confocal microscope. l microscope), Interferometric microscope or confocal line sensor ( In another example, the first sensor may include one of the following: At least one of the sensing units 150A to 150C is a confocal microscope. cal microscope, Interferometric microscope or confocal line sensor (Chromatic confocal line sensor), and the first sensing unit 150A to the second sensing unit 150B The remaining three sensors 150C are confocal microscopes, interference microscopes, and the like. Interferometric microscope or chromatic confocal line sensor In yet another embodiment, the first sensing unit may include another one of the first and second sensors. The third sensing unit 150A to the third sensing unit 150C may be a confocal microscope, an interference microscope, or the like. Interferometric microscope or Chromatic confocal line sensor The term "sensor" may include different devices.

[0143] The first to third sensing units 150A to 150C are the first to third sensing units. At the position (height section), a part of the plane shape of the droplet DR projected onto an arbitrary plane or the droplet D In such a case, the cross-sectional shape of R can be sensed based on the results sensed by each sensing part. Based on this, the control unit (not shown) can calculate the three-dimensional shape of the droplet DR at each position. Through this, the control unit can calculate the volume of the droplet DR. In addition, the control unit calculates the position of the center of the droplet DR in the height ranges of the first to third positions. Based on the understanding, among the falling path of the droplet DR, the falling speed of the droplet DR, and the discharge angle of the droplet DR, At least one of the following can be calculated.

[0144] Therefore, the manufacturing apparatus 100 for a display device and the manufacturing method for a display device can precisely form the droplets DR. Since it is possible to control the discharge, droplets can be precisely placed at the correct position on the display substrate S. can be supplied.

[0145] FIG. 12 is a perspective view showing a part of a manufacturing apparatus for a display device according to still another embodiment of the present invention. be.

[0146] Referring to FIG. 12, the manufacturing apparatus (not shown) for the display device is the same as that shown in FIG. It may be similar to ro.

[0147] The sensing unit 150 includes a first sensing unit 150A, a second sensing unit 150B, and a third sensing unit 150C. In addition to the fourth sensing unit 150D, a fifth sensing unit 150E and a fourth sensing unit 150F are arranged at an angle to the falling path of the droplet DR. In such a case, the fourth sensing unit 150D and the fifth sensing unit 150E may be included. are arranged corresponding to the fourth reflecting portion 170D and the fifth reflecting portion 170E, and The path can be illuminated with a laser.

[0148] In this case, the first to fifth sensing units 150A to 150E have different heights. For example, the first sensing unit 150A to the fifth sensing unit 150B may be arranged to perform sensing. The sensing points 50E are arranged between the droplet discharge section 140 and the storage section 160, spaced apart from each other. Here, the first to fifth sensing units 150A to 150E are connected to the droplet ejection unit 140. When the space between the storage section 160 and the storage section 160 is divided into a plurality of spaces (height sections) in the vertical direction, The droplets DR passing through the space (height section) can be sensed.

[0149] At least one of the first to fifth sensing units 150A to 150E is As mentioned above, among the confocal line sensors, confocal microscopes, and interference microscopes, It may include at least one of the following.

[0150] In this case, the first to fifth sensing units 150A to 150E are A part of the plane shape of the droplet DR projected onto an arbitrary plane at the position (each height interval) At least one of the cross-sectional shapes of the droplet DR can be sensed.

[0151] Based on the sensed result, the control unit 180 determines whether the droplets DR are in the three positions (each height interval). The dimensional shape can be calculated, and the volume of the droplet DR at each position can be calculated.

[0152] The control unit 180 also calculates the center of the three-dimensional shape of each droplet DR and the falling speed of each droplet DR. At least one of the angle of the droplet DR, the falling path of the droplet DR, and the ejection angle of the droplet DR is calculated. This can be done.

[0153] The volume of the droplet DR calculated in this way, the falling speed of the droplet DR, the falling path of the droplet DR, and The control unit 180 controls the display based on at least one of the angle of the droplets DR and the discharge angle of the droplets DR. When the droplets DR are supplied to the substrate (not shown) by the droplet discharge unit 140, the droplets are accurately landed. The ejection operation of the droplet ejection unit 140 can be adjusted so that the droplet ejection operation is performed.

[0154] Therefore, the manufacturing apparatus 100 for a display device and the manufacturing method for a display device can precisely form the droplets DR. Since the discharge can be controlled, droplets can be precisely supplied to the correct position on the display substrate S. This can be done.

[0155] FIG. 13 is a perspective view showing a part of a manufacturing apparatus for a display device according to still another embodiment of the present invention. is.

[0156] Referring to FIG. 13, the manufacturing apparatus (not shown) for the display device is the same as that described in FIG. It may be similar to.

[0157] Here, a plurality of sensing units 150 are provided, and the plurality of sensing units 150 include a first sensing unit 150 A, second sensing section 150B, third sensing section 150C, fourth sensing section 150D, fifth sensing section 150 In such a case, the first to third sensing units 150A to 150F may be included. The fourth sensing unit 150C may be arranged in the same manner as described above with reference to FIG. The fifth sensing unit 150D is disposed opposite the first sensing unit 150A, and the fifth sensing unit 150E is disposed opposite the second sensing unit The sixth sensing unit 150F is disposed opposite the third sensing unit 150C. Here, the first sensing unit 150A and the fourth sensing unit 150D may be located in the same area. The second sensing unit 15 can sense the droplets DR passing through the same height interval. 0B and the fifth sensing unit 150E sense the droplets DR passing through the same region (same height section). The third sensing unit 150C and the sixth sensing unit 150F pass through the same area (same height section). In this case, the first sensing unit 150A and the fourth sensing unit 150D, the area (second height section) sensed by the second sensing unit 150B and the fifth sensing unit 150E. and the third sensing unit 150C and the sixth sensing unit 150F. The areas sensed by the and (third height intervals) are different from each other and are continuous with each other. or regions spaced apart from one another.

[0158] When the first to sixth sensing units 150A to 150F are arranged as described above, the fifth sensing unit The fifth reflecting portion 170E and the sixth sensing portion 150F correspond to the fifth reflecting portion 170E and the sixth sensing portion 150F, respectively. The sixth reflecting portion 170F may be arranged. Here, the fifth reflecting portion 170E and the sixth reflecting portion 170F may be arranged. respectively detects the lasers emitted from the fifth sensing unit 150E and the sixth sensing unit 150F, The droplet DR can be guided onto the falling path.

[0159] In this case, the sensing unit that senses droplets DR in the same region (same height range) is The sensing units may be of the same type or different types. If the first and fourth sensing units 150A and 150D have different shapes, one of the first and fourth sensing units 150A and 150D may be used. One of the first and fourth sensing units 150A and 150D includes a confocal line sensor. The other one of the second sensing unit 150B may include a confocal microscope or an interference microscope. and one of the fifth sensing unit 150E includes a confocal line sensor, and the second sensing unit 15 0B and the other one of the fifth sensing units 150E includes a confocal microscope or an interference microscope. In addition, one of the third sensing unit 150C and the sixth sensing unit 150F may be a confocal The other one of the third sensing unit 150C and the sixth sensing unit 150F includes a point line sensor. may include a confocal microscope or an interference microscope.

[0160] In this case, the results sensed by each sensing unit may be transmitted to the control unit 180. The unit 180 detects the droplet D in each region (height section) based on the results sensed by each sensing unit. In this case, the control unit 180 can calculate the three-dimensional shape of R. The two sensors detect droplets passing through the same area (height range). The sensed results can be combined to calculate the three-dimensional shape of the droplet DR. The control unit 180 detects and calculates the three-dimensional shape of the droplet DR in one region (height section). It is also possible to calculate the three-dimensional shape of the droplet DR by averaging the shapes together.

[0161] As described above, in each region, the control unit 18 0 is the three-dimensional shape of the droplet DR, the volume of the droplet DR, the falling path of the droplet DR, and the discharge path of the droplet DR. At least one of the exit angles can be calculated.

[0162] The control unit 180 can control the droplet discharge unit 140 based on the above results. Cut.

[0163] Therefore, the manufacturing apparatus 100 for a display device and the manufacturing method for a display device can precisely form the droplets DR. Since the discharge can be controlled, droplets can be precisely supplied to the correct position on the display substrate S. This can be done.

[0164] FIG. 14 shows a display device manufactured by the display device manufacturing apparatus according to an embodiment of the present invention. 15 is a cross-sectional view showing the display device shown in FIG.

[0165] 14 and 15, the display device 1 may include a display substrate S. Such a display substrate S includes a substrate 10 and a middle layer (light-emitting layer 22) of the display layer DL. ) and layers other than the common electrode 23.

[0166] A display layer DL and a thin film sealing layer TFE can be disposed on the substrate 10. The display layer DL includes: It may include a pixel circuit layer PCL and a display element layer DEL.

[0167] The substrate 10 may be glass, polyethersulfone, polyaryl Polyarylate, polyetherimide, polyethylene naphthalate ( polyethylene naphthalate, polyethylene terephthalate ), polyphenylene sulfide, polyimide, poly Carbonate (polycarbonate), cellulose triacetate, cellulose acetate pro It may contain a polymeric resin such as cellulose acetate propionate.

[0168] A barrier layer (not shown) may be further included between the display layer DL and the substrate 10. The barrier layer is a barrier layer that prevents the penetration of foreign matter, and is made of silicon nitride (SiN x , x >0), silicon oxide (SiO x , x>0) It is possible.

[0169] A pixel circuit layer PCL is disposed on the substrate 10. FIG. 15 shows a pixel circuit layer PCL The thin film transistor TFT and the components of the thin film transistor TFT are located below (on the substrate 10 side) or and / or a buffer layer 11 and a first gate insulating layer disposed above (on the side opposite to the substrate 10). 13a, the second gate insulating layer 13b, the interlayer insulating layer 15 and the planarizing insulating layer 17 are shown.

[0170] The buffer layer 11 may be made of a material such as silicon nitride, silicon oxynitride, or silicon oxide. The insulating film may contain an inorganic insulator, and may be a single layer film or a multilayer film containing the inorganic insulator.

[0171] The thin film transistor TFT includes a semiconductor layer 12, which includes polysilicon. Alternatively, the semiconductor layer 12 may contain amorphous silicon or an oxide. The semiconductor layer 12 may include a semiconductor, an organic semiconductor, or the like. The drain region 12a is disposed on both sides of the channel region 12c. The gate electrode 14 may overlap the channel region 12c and the source region 12b. It can fit.

[0172] The gate electrode 14 may include a low resistance metal material. The gate electrode 14 may include molybdenum ( Conductive materials include Mo, aluminum (Al), copper (Cu), titanium (Ti), etc. The insulating film may be formed of a laminated film or a single layer containing the above-mentioned materials.

[0173] The first gate insulating layer 13a between the semiconductor layer 12 and the gate electrode 14 is made of silicon oxide ( SiO2), silicon nitride (SiN x ), silicon oxynitride (SiON), aluminum Oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium It may contain inorganic insulators such as HfO2, or ZnO2. stomach.

[0174] A second gate insulating layer 13b may be provided to cover the gate electrode 14. The gate insulating layer 13b is made of silicon oxide (SiO 2), silicon nitride (SiN x ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnic acid The insulating material may include inorganic insulators such as halide (HfO2) or zinc oxide (ZnO2).

[0175] Above the second gate insulating layer 13b (on the side opposite to the substrate 10), a storage capacitor C The upper electrode Cst2 can be disposed on the lower side (the side of the substrate 10). ) and the gate electrode 14. Here, the overlapping portions sandwich the second gate insulating layer 13b. The gate electrode 14 and the upper electrode Cst2 may form a storage capacitor Cst. That is, the gate electrode 14 is connected to the lower electrode Cst1 of the storage capacitor Cst. It can function as.

[0176] In this way, the storage capacitor Cst and the thin film transistor TFT are overlapped. In some embodiments, the storage capacitor Cst is connected to the thin film transistor T It can also be formed so as not to overlap with the FT.

[0177] The upper electrode Cst2 is made of aluminum (Al), platinum (Pt), palladium (Pd), or silver. (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), Iridium (Ir), Chromium (Cr), Calcium (Ca), Molybdenum (Mo), Titanium The aforementioned materials may contain titanium (Ti), tungsten (W), and / or copper (Cu). The film may be a single layer or a laminate of the same material.

[0178] The interlayer insulating layer 15 can cover the upper electrode Cst2. Silicon oxide (SiO2), silicon nitride (SiN x ), silicon oxynitride (SiON) , aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2 O5), hafnium oxide (HfO2), or zinc oxide (ZnO2). The interlayer insulating layer 15 may be a single layer film or a multilayer film containing the above-mentioned inorganic insulating material.

[0179] The drain electrode 16a and the source electrode 16b may be located on the interlayer insulating layer 15. The drain electrode 16a and the source electrode 16b may include a material with good conductivity. The drain electrode 16a and the source electrode 16b are made of molybdenum (Mo) and aluminum (A It may contain conductive materials including copper (Cu), titanium (Ti), etc., and the above materials may be used. In one embodiment, the drain electrode 16a and the The source electrode 16b may have a three-layered structure of Ti / Al / Ti.

[0180] The planarization insulating layer 17 may include an organic insulating layer. General polymers such as acrylate (PMMA) and polystyrene (PS), phenolic groups polymer derivatives having the above structure, acrylic polymers, imide polymers, aryl ether polymers, Amide polymers, fluorine polymers, p-xylene polymers, vinyl alcohol polymers, and blends thereof.

[0181] The display element layer DEL is disposed on the pixel circuit layer PCL having the above-described structure. DEL includes an organic light emitting diode (OLED), but the pixel voltage of the organic light emitting diode (OLED) The electrode 21 is electrically connected to the thin film transistor TFT through a contact hole in the planarizing insulating layer 17. can be effectively linked.

[0182] The pixel PX may include an organic light emitting diode OLED and a thin film transistor TFT. The pixel PX emits, for example, red, green, or blue light through an organic light-emitting diode OLED. They emit light or emit red, green, blue, or white light.

[0183] The pixel electrode 21 is made of indium tin oxide (ITO), indium zinc oxide (ITO), or the like. Indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In2O3) indium oxide), indium gallium oxide (IGO), or aluminum The conductive oxide may include aluminum zinc oxide (AZO). In other embodiments, the pixel electrode 21 is made of silver (Ag), magnesium (Mg), aluminum (Al), or Aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Ne) Reflective coating containing neodymium (Nd), iridium (Ir), chromium (Cr) or their compounds In another embodiment, the pixel electrode 21 may be disposed above the reflective film and / or It may further include a film formed of ITO, IZO, ZnO or In2O3 underneath.

[0184] On the pixel electrode 21, a pixel region having an opening 19OP exposing the center of the pixel electrode 21 is formed. The pixel dividing film 19 includes an organic insulating material and / or an inorganic insulating material. The opening 19OP is a light emitting area ( The area of ​​the light emitting area (EA) can be determined by, for example, the opening 19OP. The width corresponds to the width of the light emitting area EA.

[0185] The light-emitting layer 22 can be disposed in the opening 19OP of the pixel partition film 19. The light emitting layer may include a polymer or small molecule organic material that emits light of a color. Layer 22 may include quantum dot material. Such a light-emitting layer 22 is an embodiment of the present invention. The liquid crystal display device can be formed by discharging droplets using a manufacturing device for the display device.

[0186] Although not shown, a first functional layer and a second functional layer are provided below and above the light-emitting layer 22, respectively. The first functional layer may be, for example, a hole transport layer (HTL). ) or a hole transport layer and a hole injection layer (HIL). The second functional layer is a component disposed on the light-emitting layer 22 and may be optionally The second functional layer is an electron transport layer (ETL) and / or an electron transport layer (EL). The first functional layer and / or the second functional layer may include an electron injection layer (EIL). The second functional layer is formed to cover the entire substrate 10, similar to the common electrode 23 described later. It can be a common layer formed by

[0187] The common electrode 23 may be made of a conductive material with a low work function. For example, the common electrode 23 may be made of Silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), Contains chromium (Cr), lithium (Li), calcium (Ca), or alloys thereof A (semi)transparent layer (e.g., a gold layer at least partially in a mesh or grid pattern) Alternatively, the common electrode 23 may comprise an IT layer on a (semi-)transparent layer comprising the aforementioned material. It may further comprise a transparent conductive layer such as In2O3, IZO, ZnO, or In2O3.

[0188] In one embodiment, the thin film encapsulation layer TFE comprises at least one inorganic encapsulation layer and at least As an example, FIG. 15 shows a thin film encapsulation layer TFE laminated on the substrate. The illustrated structure includes a first inorganic sealing layer 31, an organic sealing layer 32, and a second inorganic sealing layer 33. do.

[0189] The first inorganic sealing layer 31 and the second inorganic sealing layer 33 are made of aluminum oxide, titanium oxide, Tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, silicon The organic encapsulation layer 32 may include one or more inorganic materials such as silicon oxynitride. The polymer material may include acrylic resin, epoxy resin, etc. The organic resin may include alkoxy resin, polyimide, polyethylene, etc. The sealing layer 32 may include an acrylate.

[0190] In another embodiment, the thin film encapsulation layer TFE is formed by the substrate 10 and the transparent upper substrate. , the substrate 10 and the upper substrate are joined by a sealing member at the periphery surrounding the display area. The space may be sealed. Here, a moisture absorbent or a filler may be placed in the internal space. The sealing member may be a sealant, and in other embodiments, the sealing member The sealing member may be made of a material that is hardened by a laser. For example, the sealing member may be made of a frit. Specifically, the sealing member may be an organic sealant such as a urethane resin or an epoxy resin. The sealant may be made of a resin, an acrylic resin, or an inorganic sealant such as silicone. As the urethane-based resin, for example, urethane acrylate can be used. Examples of acrylic resins include butyl acrylate and ethylhexyl acrylate. On the other hand, the sealing member is made of a material that is hardened by heat. do.

[0191] A touch electrode layer (not shown) including a touch electrode is disposed on the thin film encapsulation layer TFE. An optical function layer (not shown) may be disposed on the touch electrode layer. The optical function layer can acquire coordinate information from inputs, such as touch events. , reducing the reflectance of light (external light) incident on the display device 1 from the outside, and / or This can improve the color purity of the light emitted from the display device 1. In one embodiment, the optically functional layer The filter may include a phase retarder and a polarizer. It can be a film type or a liquid crystal coating type, and the λ / 2 phase retarder and / or The polarizer may also be a film type or a liquid crystal coated type. The film type includes a stretched synthetic resin film and is coated with a liquid crystal. The type of polarizer may include liquid crystals aligned in a predetermined orientation. may further include a protective film.

[0192] In another embodiment, the optically functional layer comprises a black matrix and a plurality of color filters. The plurality of color filters may be arranged to separate light emitted from each pixel of the display device 1. The color filters may be arranged in consideration of the hue of the emitted light. Alternatively, the color filters may contain red, green, or blue pigments or dyes. Each of them may further contain quantum dots in addition to the pigments and dyes mentioned above. Some color filters do not contain the pigments or dyes mentioned above, but instead contain dispersions such as titanium dioxide. The color filter may include random particles. The formation can be achieved by ejecting droplets using a manufacturing device.

[0193] In another embodiment, the optically functional layer may include a destructive interference structure. The article may include a first reflective layer and a second reflective layer disposed on different layers. The first reflected light and the second reflected light reflected by the first reflective layer and the second reflective layer, respectively, are destructively interfered with each other, and This can reduce the reflectance of external light.

[0194] An adhesive member may be disposed between the touch electrode layer and the optical function layer. The adhesive portion may be any of those commonly known in the art without any limitations. The material is also a pressure sensitive adhesive (PSA).

[0195] The present invention has been described above with reference to the embodiments illustrated in the drawings, which are given by way of example only. It is understood that various modifications and variations can be made by those skilled in the art. It will be understood that variations in the embodiments and the invention are possible. The technical scope of protection should be determined by the technical idea of ​​the claims.

[0196] In a preferred specific embodiment, the background and solution means are as follows.

[0197] When forming patterns for the light-emitting layer and color filter of an organic light-emitting display device, The ink jet method is used to drop droplets at predetermined locations (especially at each opening in the pixel partition film or each pixel door). The ink droplets are ejected onto the target area and landed thereon.

[0198] Accurate control of the amount of ink supplied by ejection is important to obtain the desired color density. Therefore, in the past, it was necessary to discharge the liquid onto a test substrate and accurately measure the change in weight. And so on.

[0199] In recent years, as in Patent Documents 1 and 2, it has become possible to capture falling droplets using cameras and lasers. It has been proposed.

[0200] However, the three-dimensional outline of the droplet and the volume of the droplet based on this can be accurately and quickly determined. It was not easy to capture this with limited equipment and cost.

[0201] Through intensive research, the present inventors have discovered a confocal microscope or This gave rise to the idea of ​​using a confocal sensor.

[0202] To embody this idea, the following specific examples A1 to A3 were adopted. More specifically, it is any one of B1 to B3, and preferably at least one of C1 to C3. It can also be either one.

[0203] A1 A plurality of height sections in the falling path of the droplet are detected by the respective sensing units (150; particularly, In this way, the droplet's falling surface is captured by a microscope (confocal microscope or confocal sensor). The contours are captured by each of the sensing parts (150) in turn.

[0204] A2 Based on the detection by such a sensor, at each point of the fall (each height section), The three-dimensional contour of the droplet is estimated and constructed.

[0205] A3 Then, based on such a three-dimensional contour, the droplet at each time point (each height interval) The position of the center (center of gravity or geometric center) of the Understand the following:

[0206] B1: Set a virtual plane SF1 including the fall path and the sensing end of the sensing unit (150) (Fig. 2). The sensing unit (150) detects the half ( 2 and 3A). Then, the plane contour of this half is captured along the fall path. By rotating the droplet, the three-dimensional outline of the droplet is constructed (Figure 3B).

[0207] B2: A virtual plane SF2 is set perpendicular to the drop path (Fig. 7). The resulting series of slices are then captured (Fig. 8). The Rice plane is used to construct the three-dimensional outline of the droplet.

[0208] B3 A hypothetical object that includes the falling path and is perpendicular to the line connecting the falling path and the sensing part (150) An imaginary plane SF3 is set (FIG. 9), and the cross section of the droplet cut by this imaginary plane is set to the sensing part (150). Based on this detection, the droplet's three-dimensional rotation around the falling path is calculated. Construct the contours.

[0209] C1: To capture a short falling path with more sensing units (150), A means for bending light such as laser light, such as a reflecting mirror, is used (Fig. 11-1 2) In this way, the sensing unit (150) can be precisely aligned horizontally, vertically, and diagonally. It can be positioned to face a direction.

[0210] C2 The same height section of the fall path can be captured by multiple sensors with different shapes. In particular, it can be captured by a confocal microscope and an interference microscope (Fig. 13,

[0159] ).

[0211] C3: A substrate onto which droplets are supplied, or a stage for this, a discharge unit 140, and one side When moving the projectile in the direction of the target, how much relative movement will the impact point have from the target location? The speed of the relative movement is adjusted by the direction of the displacement (Figure 5C). If the droplets are displaced too far in the direction perpendicular to the surface (Fig. 5C), they are removed by washing. After that, droplets are supplied again. [Explanation of symbols]

[0212] 1 Display device 10 Substrate 100 Display device manufacturing equipment 110 Support part 120 Gantry 130 Mobile Unit 140 Droplet discharge part 150 Sensing part 160 Storage area 170 Control Unit

Claims

1. a droplet ejection unit including a nozzle for ejecting droplets; When the droplets fall, a temporary nozzle arranged on a falling path of the droplets falling from the droplet discharge unit is A plane is set in the image, and the shape of a part of the outer surface of the droplet projected onto the plane is calculated. or a sensing unit that senses the cross-sectional shape of the droplet projected onto this arbitrary plane; Based on the result of sensing by the sensing unit, the volume of the droplet, the falling speed of the droplet, The discharge angle at which the droplets are discharged from the nozzle, and the droplets before moving from the nozzle to the substrate A control unit that calculates at least one of the droplet fall paths. Device.

2. The display device of claim 1 , wherein the sensing unit includes a confocal microscope or a confocal sensor. Manufacturing equipment.

3. The control unit determines the shape of the part of the outer surface of the droplet detected by the sensing unit as the shape of the falling droplet. A three-dimensional shape of the droplet is calculated by rotating the droplet based on the path. The display device manufacturing apparatus according to claim 1 , wherein the volume of the droplet is calculated by the following method.

4. The sensing unit senses the droplets at regular time intervals, and the control unit The centers of the droplets detected sequentially are connected to each other to determine the falling path of the droplets or the droplets. The display device manufacturing apparatus according to claim 1 , wherein the discharge angle is calculated as follows:

5. The sensing unit senses one of the droplets falling on a plane perpendicular to the direction in which the droplets fall. The shape of a part of the outer surface of the droplet is sensed at regular time intervals, The control unit determines the shape of the part of the outer surface of the droplet sensed by the sensing unit as the falling surface of the droplet. The droplet is transformed into a planar shape on a plane perpendicular to the downward direction, and the droplet is The display device manufacturing apparatus according to claim 1 , wherein a three-dimensional shape is calculated.

6. the sensing unit senses the droplet at regular time intervals when the droplet falls, The control unit calculates the falling speed of the droplet based on the moving distance of the droplet for a certain period of time. The display device manufacturing apparatus according to claim 1 ,

7. ejecting droplets; The shape of a part of the outer surface of a falling droplet projected onto an arbitrary plane on the falling path of the droplet, and and sensing at least one of a cross section of the droplet; At least one of the sensed shape of a portion of the outer surface of the droplet and the cross section of the droplet Based on one of the above, the volume of the droplet, the falling speed of the droplet, the falling path of the droplet, and the liquid and calculating at least one of the droplet ejection angles.

8. Based on at least one of the shape of a portion of the outer surface of the droplet and the cross section of the droplet calculating a three-dimensional shape of the droplet; calculating the three-dimensional shape of the droplet at regular time intervals; The centers of the three-dimensional shapes of the droplets spaced apart from each other are connected to each other, and the ejection angle and the front of the droplets are adjusted.

8. The method according to claim 7, further comprising the step of calculating at least one of the droplet fall paths. A method for manufacturing the display device described above.

9. sensing a shape of a portion of the outer surface of the droplet on a plane perpendicular to the falling path of the droplet; Floors and The droplet on a plane perpendicular to the falling path based on the shape of a part of the outer surface of the droplet. calculating a cross-sectional shape of the The shape of a part of the outer surface of the droplet on a plane perpendicular to the falling path is measured at regular time intervals. The sensing stage, The three-dimensional shape of the droplet is calculated based on the cross-sectional shape of the droplet calculated at regular time intervals. The method for manufacturing a display device according to claim 7 , further comprising the step of:

10. sensing a shape of a portion of an outer surface of the droplet on a plane including a falling path of the droplet; The droplet on a plane including the falling path is determined based on the shape of a portion of the outer surface of the droplet. calculating a cross-sectional shape; The cross-sectional shape of the droplet is rotated based on the falling path of the droplet to obtain a three-dimensional shape of the droplet. The method for manufacturing a display device according to claim 7 , further comprising the step of:

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