Electrical feedthrough, vacuum device and assembly method

Abstract

In particular, an electrical feedthrough for a vacuum pump comprises a wall element having two or more openings, preferably connectable to or part of a vacuum pump / vacuum apparatus, a contact element having a first end and an opposite second end extending through each of the openings, and a respective sealing element disposed between each of the contact elements and the wall element such that the openings are vacuum sealed.

Description

[Technical field]

[0001] The invention relates to an electrical feedthrough, in particular for a vacuum device or vacuum pump, to a vacuum device, in particular a vacuum pump, having such an electrical feedthrough, and to a method for assembling such an electrical feedthrough. [Background technology]

[0002] Vacuum pumps and vacuum systems often need to operate with several electrical components or subsystems within the vacuum environment. These require electrical coupling to systems outside the vacuum environment that typically provide power and control through the walls of the vacuum chamber. The electrical coupling is typically done through electrical connectors that are sealed against the vacuum. These are variously referred to as vacuum feedthrough connectors or vacuum leadthroughs or sealed electrical connectors. Vacuum feedthrough connectors typically have one or more electrical coupling pins located in a metal or plastic connector body that groups multiple coupling pins together. The best vacuum seal is often made by a glass-to-metal seal between the coupling pins and the connector body, which also allows for electrical insulation between the coupling pins and the connector body. Typically, the connector body will be sealed against the vacuum system using an O-ring that allows for easy assembly and disassembly of the feedthrough to the vacuum system. At that point, the O-ring is placed between the connector body and the wall of the vacuum system. Typically, the coupling of the electrical feedthrough to the vacuum side is done with flying leads. The coupling to the other side of the electrical feedthrough can be flying leads soldered directly to the coupling pins or can use an electrical connector that can be coupled to the vacuum feedthrough and easily disconnected.

[0003] In some systems, the electrical connector may be attached to a cable, while in other systems, the electrical connector may be attached directly to a printed circuit board (PCB) or control module. In the latter case, great care must be taken to ensure alignment of the feedthrough and electrical connector in the mounting configuration of the electrical connector and PCB or control module to avoid lateral forces on the electrical connection due to misalignment. Lateral forces or misalignment can cause failure of the electrical connection or insufficient sealing of the electrical feedthrough. Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE PRESENT EMBODIMENT It is therefore an object of the present invention to provide an electrical feedthrough that is easier to assemble and more reliable.

[0005] This technical problem is solved by an electrical feedthrough according to claim 1, a vacuum device according to claim 12 and a method for assembling an electrical feedthrough according to claim 13. [Means for solving the problem]

[0006] The electrical feedthrough according to the invention, in particular an electrical feedthrough for a vacuum device or vacuum pump, comprises a wall element that can be coupled to the vacuum pump or vacuum device. Alternatively, the wall element is constructed integrally with or is part of the vacuum pump or vacuum device. The wall element has two or more openings or apertures, and the contact element extends through each of the openings and has a first end on one side of the wall element and an opposite second end on the other side of the wall element. The first end can extend into the vacuum chamber of the vacuum device or vacuum pump, while the second end is arranged outside the vacuum chamber, i.e. outside the vacuum environment. Alternatively, the second end can extend into the vacuum chamber of the vacuum device or vacuum pump, while the first end is arranged outside the vacuum chamber. The contact element thus allows electrical contact to the inside of the vacuum chamber. According to the invention, an individual sealing element is arranged between each of the contact elements and the wall element to seal the respective opening of the wall element in a vacuum-tight manner. The number of sealing elements therefore corresponds to the number of contact elements, i.e. an individual sealing element is envisaged for each contact element. Preferably there is a direct contact between the sealing element and the respective contact element and / or between the sealing element and the wall element. No intermediate parts such as any connector body as used in the prior art are required, simplifying the construction of the feedthrough and therefore the assembly procedure. Since the wall elements have individual openings for each contact element, instead of a single opening to accommodate the connector body as in the prior art, slight misalignments between the contact elements and the openings are tolerable without compromising the vacuum seal. In a misaligned state, according to the invention each of the contact elements can be slightly misaligned individually without any effect on the vacuum seal. In the prior art, in a misaligned state the entire connector body of the feedthrough has to tilt, which impairs the sealing efficiency, which may result in vacuum leakage. Thus, according to the invention a reliable electrical feedthrough is provided.

[0007] Preferably, exactly one contact element extends through one of the openings, so that the number of contact elements and the number of openings in the wall element are equal.

[0008] Preferably, the sealing element is an O-ring, so that the opening in the wall element can be circular to match the shape of the O-ring, or alternatively, the opening can have an oval or square or other special cross section, with the sealing element matching that shape to provide a vacuum-tight seal.

[0009] Preferably, each sealing element surrounds the contact element, in particular directly contacting the respective contact element without any intermediate parts or elements, thus reducing the number of parts required for the electrical feedthrough and allowing commercially available contact elements to be used as is without pre-assembly to a connector body or the like.

[0010] Preferably, the respective sealing element is in direct contact with the wall element without intermediate parts or elements, thus reducing the number of parts required for the electrical feedthrough and allowing commercially available sealing elements to be used as is without pre-assembly.

[0011] Preferably, the contact element is a contact pin. In particular, the diameter of the contact pin is between 0.5 mm and 10 mm, a larger diameter being able to supply a larger current into the vacuum chamber. In particular, the contact pin has a constant diameter from the first end to the second end. Alternatively, the diameter of the first end can be smaller than the diameter of the second end or vice versa. Thus, along the contact pin, a stepped or inclined / tapered section occurs in between, preferably at the same axial position as the sealing element where it interacts with the sealing element to improve the sealing effect due to an increase in the clamping effect between the contact element and the sealing element. Alternatively, the contact pin has a first diameter at the first end, a second diameter at the second end and a third diameter at the location of the sealing element, the first diameter being equal to or different from the second diameter, the third diameter being larger than the first and / or second diameter. Thus, flexibility of the contact design can be provided while maintaining a sufficient seal. Also, for different contact designs, if the third diameter is kept constant, there is no need to adapt the contact elements.

[0012] Preferably, the sealing elements are electrically insulating and prevent electrical coupling between the respective contact elements and the wall elements.

[0013] Preferably, a first end of one contact element, preferably two or more contact elements, and more preferably all contact elements may be coupled to a printed circuit board (PCB), a wire as a flying lead, or coupled to a plug, socket, electrical connector, etc. Alternatively or additionally, a second end of one contact element, preferably two or more contact elements, and more preferably all contact elements may be coupled to a PCB, a wire or a plug, socket, electrical connector, etc.

[0014] Preferably, the PCB is coupled to the contact element via a coupling element that provides electrical contact between the PCB and the contact element, in that the coupling element allows a PCB to be coupled to a first end of the contact element and thus located within a vacuum chamber of a vacuum device or vacuum pump, or the coupling element can be used to couple a PCB located outside the vacuum chamber to a second end of the contact element.

[0015] Preferably, the coupling element is cup-shaped or provides an axial abutment for the contact element. In particular, if the contact element is coupled to a PCB arranged inside the vacuum chamber, the contact element can be coupled to the PCB by inserting the contact element into the coupling element. Due to the cup-shape or axial abutment of the coupling element, the contact element is not inserted excessively into the vacuum chamber and the axial position of the contact element can be defined. Thus, assembly is simplified and a reliable and reproducible axial position of the contact element is guaranteed. However, a cup-shaped coupling element can be used at the second end outside the vacuum to further limit the axial movement at the second end as well.

[0016] Preferably, the coupling elements are sleeves surrounding the respective contact elements. In particular, the coupling elements are constructed as sleeves in order to couple the contact elements to a PCB arranged outside the vacuum chamber. The PCB can be attached to the contact elements by inserting the contact elements into the respective coupling elements or, alternatively, by placing the coupling elements on the inserted contact elements. However, sleeve-shaped coupling elements can also be used for the first end inside the vacuum.

[0017] Preferably, one opening, more than one opening or all openings comprise a limiting portion, in that the sealing element is received within a recess defined by the limiting portion, which prevents the sealing element from being pushed through when inserting the sealing element.

[0018] Preferably, two or more openings are constructed separately, or alternatively, all openings in a wall element are constructed identically.

[0019] Preferably, the opening or recess has a conical cross section or tapers towards the wall element to facilitate insertion of the sealing element into the respective recess or opening in the wall element.

[0020] Preferably, an assembly aid is provided which is detachably coupled to the electrical feed-through. In that respect, the assembly aid comprises openings which correspond to the openings of the wall element. In particular, the openings of the assembly aid coincide with the positions of the openings of the wall element. Thus, the number of openings of the assembly aid is the same as the number of openings of the wall element. In particular, the position of the assembly aid is fixed with respect to the wall element, for example having a fixed rotational position with respect to the wall element. Thus, the assembly aid or the wall element can comprise an orientation feature, such as a detent or a keyway which interacts / engages with a corresponding orientation feature of the respective other element. Thus, the orientation feature fixes the rotational position of the assembly aid with respect to the wall element. The assembly aid simplifies the insertion of the contact element as well as the sealing element. In that respect, preferably, the openings of the assembly aid have a conical cross section or taper towards the wall element, facilitating the insertion of the sealing element into the respective recess or opening of the wall element.

[0021] In another aspect, the present invention relates to a vacuum device, in particular a vacuum pump, comprising a housing defining a vacuum chamber, in which an electrical feedthrough as described above is coupled to or integrally constructed with the housing such that a first end of a contact element is disposed within the vacuum chamber and an opposite second end of the contact element is outside the vacuum chamber.

[0022] In another aspect, the present invention relates to a method of assembling an electrical feedthrough, the electrical feedthrough being constructed as specifically described above, the method comprising the steps of: providing at least two openings in a wall element of a vacuum device, in particular a vacuum pump; Inserting a contact element through each of the openings; inserting a respective sealing element between each of the contact elements and the wall element; Includes.

[0023] Thus, in a first step, a wall element is prepared having at least two openings or apertures. In a second step, a contact element is inserted into the opening and passes through it, so that a first end of the contact element can span the vacuum chamber of the vacuum device or vacuum pump, and a second end on the opposite side can be arranged outside the vacuum chamber. Preferably, exactly one contact element is inserted into one opening, such that the number of contact elements is equal to the number of openings. In a third step, individual sealing elements are inserted between each of the contact elements and the wall element, i.e. into the openings of the wall element. At that point, exactly one sealing element is inserted for each contact element, which sealing element is preferably in direct contact with the respective contact element and can surround the contact element. By the sealing elements, the openings of the wall element are sealed in a vacuum-tight manner. However, the order of the steps of the method can be varied accordingly. Thus, a situation is also included in which a sealing element is inserted first into the opening and then a contact element.

[0024] Preferably, before inserting the contact elements into the respective openings of the wall element, the PCB is bonded to the wall element on the vacuum side, i.e. the PCB is placed in a vacuum chamber, and then the contact elements are bonded to the PCB simultaneously in the vacuum chamber by inserting the contact elements through the openings of the wall element, or alternatively the contact elements are inserted and then the PCB is bonded on the vacuum side.

[0025] Preferably, before the insertion of the contact element and / or the sealing element, an assembly aid is removably coupled to the wall element, the assembly aid having an opening that corresponds to the opening of the wall element, i.e. its position and size, for guiding the insertion of the contact element and / or the sealing element. The assembly aid thus facilitates the assembly of the contact element and / or the sealing element, thereby simplifying the assembly of the electrical feed-through.

[0026] Preferably, the method is further developed according to the above mentioned features regarding the electrical feedthrough.

[0027] The present invention will now be described with reference to the accompanying drawings. [Brief description of the drawings]

[0028] [Figure 1] 1 illustrates an electrical feedthrough according to the present invention. [Diagram 2] 2 shows the electrical feedthrough according to FIG. 1 in an unaligned configuration. [Diagram 3] 1 shows an electrical feedthrough according to the present invention, including an assembly aid during assembly. [Figure 4] 1 shows a flow diagram of a method for assembling an electrical feedthrough according to the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0029] Please refer to FIG. 1 which shows an electrical feedthrough according to the invention. The electrical feedthrough comprises a wall element 10 which is coupled to or constructed integrally with the housing of a vacuum device, in particular a vacuum pump. The housing of the vacuum device defines a vacuum chamber 12 at vacuum or low pressure, the opposite outside 14 being at, for example, atmospheric pressure. In the example shown in FIG. 2, the wall element 10 has two openings or apertures 28. However, the invention is not limited to a precise number of openings, three or more openings are also within the scope of the invention. A contact element 30 extends through each of the openings 28, such that a first end of the contact element 30 spans the vacuum chamber 12 and an opposite second end spans the outside 14. In that respect, the contact element 30 is shown as a contact pin with a constant cross section. Alternatively, the cross section of the contact pin can vary such that the contact pin has a larger diameter at the first end than at the second end or vice versa.

[0030] For each contact element 30, exactly one opening 28 is provided in the wall element 10, or vice versa, exactly one contact element 30 is inserted into each of the openings 28. Furthermore, a sealing element 36 is arranged around each of the contact elements 30, which may be constructed as an O-ring. The sealing element 36 surrounds the contact element 30 and is in direct contact with the contact element 30. Furthermore, the sealing element 36 is in direct contact with the wall element 10 to provide an airtight seal for maintaining the vacuum in the vacuum chamber 12. In particular, the openings 28 form a recess 33 having a limiting portion 31, which limits the axial movement of the sealing element 36 when inserted into the recess 33 from the outside 14. In that respect, no additional parts are required other than the contact element 30 and the sealing element 36. In particular, the contact element 30 is not in contact with any connector body for grouping two or more contact elements together. Thus, the number of parts of the electrical feedthrough can be reduced.

[0031] In detail, the sealing element 36 is disposed within a recess 33 constructed by the wall element 10. In that respect, the recess 33 may have a diameter between 2 mm and 15 mm, preferably between 3 mm and 8 mm. Furthermore, the contact element 30 may be made of an electrically conductive material, such as copper, brass or silver, may have a length between 5 mm and 100 mm, more preferably between 8 mm and 20 mm, and may have a diameter between 0.5 mm and 10 mm, more preferably between 1 mm and 5 mm. In that respect, if the contact element 30 has a different diameter at the first end than at the second end, a slanted / tapered section or a stepped section may be disposed within the recess 33 and may directly contact the sealing element 36 to enhance the sealing effect of the sealing element 36. Furthermore, the larger diameter of the contact element 30 may provide the possibility of transmitting a larger current. In addition, the sealing element 36 may be constructed from an electrically insulating material to insulate the electrical contact of the contact element 30 from the wall element 10.

[0032] Thus, the contact element 30 provides an electrical connection between the exterior 14 and the vacuum chamber 12 .

[0033] In the example of FIG. 1, a first printed circuit board (PCB) 16 is coupled to the vacuum side of the wall element, i.e., inside the vacuum chamber 12. The first PCB 16 may hold an electric motor 22 or an electric sensor 24. However, the invention is not limited to any particular electrical component supported by the first PCB 16. In that respect, the contact element 30 is coupled to the first PCB 16 by a first coupling element 34. The first coupling element 34 may be cup-shaped and may provide an axial limit to the insertion movement of the contact element 30 from the outside 14 through the opening 28 into the vacuum chamber 12. This insertion movement of the contact element 30 stops when a first end of the contact element 30 abuts against a bottom of the cup-shaped first coupling element 34. In particular, the inner diameter of the first coupling element 34 corresponds to the outer diameter of the contact element 30. Alternatively, the inner diameter of the first coupling element 34 can be larger than the outer diameter of the contact element 30 and a spring-loaded compression element can provide contact between the contact element 30 and the first coupling element 34.

[0034] In the example of FIG. 1, the second PCB 18 is disposed on the outside 14 and coupled to the wall element 10. The second PCB 18 supports further electrical components such as a motor controller 24′, a sensor controller 26 or other sensors 24. However, the invention is not limited to the particular electrical components coupled to the second PCB 18, and other electrical components can be coupled to the second PCB 18. In that respect, the contact elements 30 are coupled to the second PCB 18 by the second coupling elements 32. The second coupling elements 32 are constructed as sleeves surrounding the respective contact elements 30. In that respect, the inner diameter of the sleeve can correspond to the outer diameter of the contact elements 30 to provide electrical contact. Alternatively, the inner diameter of the second coupling elements 32 can be larger than the outer diameter of the contact elements 30, and the second coupling elements 32 can comprise a spring-loaded compression element that enables electrical contact between the contact elements 30 and the second coupling elements 32.

[0035] Additionally, the cover 20 may cover the electrical feedthroughs for added protection.

[0036] Referring to FIG. 2, the same electrical feedthrough as described with reference to FIG. 1 is shown. However, there is a misalignment between the first PCB 16 and the second PCB 18. As shown in FIG. 2, this slight misalignment can be compensated for by the electrical feedthrough according to the present invention. Since individual contact elements 30 are used to provide electrical coupling between the vacuum chamber 12 and the outside 14, when the first PCB 16 and / or the second PCB 18 are misaligned, each contact element 30 tilts slightly to compensate for this misalignment. In that respect, a maximum tilt of 15° or less, preferably 10° or less, and most preferably 6° or less of the contact elements 30 can be tolerated without affecting the sealing of the respective openings 28. If the contact elements 30 are grouped together by the connector body into one contact element, as in the prior art, no compensation can be made without losing the vacuum inside the vacuum chamber 12.

[0037] In addition, as can be seen from Figures 1 and 2, the electronic feedthrough has a low parts count. Indeed, only the contact element 30 and the sealing element 36 are required to enable electronic contact through the wall element 10.

[0038] 1 shows the first and second ends of the contact elements 30 coupled to respective first and second PCBs 16, 18, although other couplings are possible. Thus, the first end of the contact elements 30 and / or the second end of the contact elements 30 may be coupled to a plug or to a wire as a flying lead.

[0039] The contact element 30 is described as having a circular or substantially circular cross-section, although other shapes are possible. The same applies to the recess 33 formed by the wall element 10 as well as to the respective opening 28.

[0040] Reference is made to FIG. 4, which shows a flow chart for the assembly of an electrical feedthrough according to the invention. In step S01, a wall element having two or more openings is provided. In that respect, the wall element 10 is coupled to or integrally constructed with a housing of a vacuum device or vacuum pump. In that respect, the housing defines a vacuum chamber that confines a low pressure or vacuum. In step S02, a contact element 30 is inserted into each of the openings 28. In that respect, preferably exactly one contact element 30 is inserted into each opening 28 of the wall element 10.

[0041] In step S03, the sealing elements 36 are inserted into the openings 28 or into the respective recesses 33 established by the openings to provide an airtight seal of the openings 28. In that respect, the sealing elements 36 can be in direct contact with both the contact elements 30 and the wall element 10. In that respect, for each contact element 30, the individual sealing elements 36 are inserted such that the number of sealing elements 36 is equal to the number of contact elements 30, and more preferably, equal to the number of openings 28.

[0042] Thus, contact element 30 provides a reliable electrical feedthrough that is easy to assemble due to the small number of parts required, and provides a reliable seal even if contact element 30 is misaligned.

[0043] Preferably, prior to inserting the contact elements 30 in step S02, the first PCB 16 is bonded to the vacuum side of the wall element 10. At that point, preferably the first coupling elements 34 are already in place and bonded to the first PCB 16. Thereafter, in step S02, the contact elements 30 are inserted through respective openings 28 in the wall element 10 and into the cup-shaped first coupling elements 34 to provide electrical contact between the contact elements 30 and the first PCB 16.

[0044] Preferably, in step S02, the assembly aid 42 is removably coupled to the wall element 10 before inserting the contact element 30, more preferably after coupling the first PCB 16 to the vacuum side of the wall element 10. At that point, the assembly aid 42 is removably coupled to the wall element 10 to aid in the assembly of the contact element 30 and / or the sealing element 36. The assembly aid is removed upon insertion of the contact element 30 and / or the sealing element 36. At that point, the assembly aid 42 has an opening 44 corresponding to the opening of the wall element. As illustrated in FIG. 3, an inner surface 46 of the opening 44 of the assembly aid 42 is aligned with an inner surface of the respective opening 28 or recess 33. Additionally, the wall element 10 may provide an alignment surface 40 for aligning the assembly aid 42 with respect to the opening 28 of the wall element 10. Additionally, an orientation feature may be implemented to provide a fixed relative position between the assembly aid 42 and the wall element 10. For example, the orientation features can be provided by detents and keyways that prevent rotation of the assembly aid around its position on the wall element 10 and fix the relative rotational position between the wall element 10 and the assembly aid 42. Furthermore, to facilitate the insertion of the sealing element 36, the opening 44 of the assembly aid 42 can have a tapered diameter that decreases towards the wall element 10. Thus, the insertion of the sealing element 36 is simplified due to the increasing diameter of the end of the opening 44 towards the outside 14. The sealing element 36 can then be pressed into the recess 33 of the respective opening 28 to provide a vacuum-tight seal. Figure 3 illustrates the situation where one contact element 30 and one sealing element 36 have already been inserted. In a next step, a second contact element 30 is inserted, followed by a second sealing element 36 into the other opening 28.

[0045] Preferably, after inserting the encapsulation element, the second PCB can be coupled to the wall element 10 on the outside 14 of the housing. Preferably, the contact elements 30 extend through the openings of the second PCB 18. At that point, the second coupling elements 32 can already be in place to provide electrical contact between the contact elements 30 and the second PCB 18 when the second PCB 18 is coupled to the wall element 10, upon insertion of the contact elements 30 into the openings of the second PCB 18. Alternatively, the second PCB 18 can first be installed and coupled to the wall element 10, whereby the contact elements 30 extend through the openings of the second PCB 18. The second coupling elements 32 are then inserted into these openings of the second PCB 18, providing electrical contact between the contact elements 30 and the second PCB 18.

[0046] However, although the assembly method is described above with a particular order of steps, other embodiments of the present invention may deviate from this order as needed. The order of the assembly steps may be freely selected and is not limited by the specific examples or figures above.

[0047] Thus, the present invention provides a simplified and reliable electrical feedthrough that allows for electrical contact and a vacuum-tight seal even with slight misalignment. [Explanation of symbols]

[0048] 10 Wall Elements 12 Vacuum chamber 14 Outside 16 First PCB 18 Second PCB 20 Cover 22 Electric motor 24 Electrical Sensors 24' Motor control device 26 Sensor control device 28 Openings or apertures 30 Contact Elements 31 Restricted Part 32 Second coupling element 33 Recess 34 First coupling element 36 Sealing elements 40 Alignment Surface 42 Assembly aids 44 Opening 46 Inside

Claims

1. In particular, an electrical feedthrough for a vacuum pump, comprising: - comprising a wall element having two or more openings, preferably connectable to or part of a vacuum pump / vacuum device, a contact element having a first end and an opposite second end extends through each of the openings; An electrical feedthrough, wherein a respective sealing element is disposed between each of the contact elements and the wall element such that the opening is vacuum sealed.

2. The electrical feedthrough of claim 1 , wherein exactly one contact element extends through each of the openings.

3. The electrical feedthrough of claim 1 or 2, wherein the sealing element is an O-ring.

4. The electrical feed-through of claim 1 , wherein each of the sealing elements surrounds a contact element.

5. The electrical feed-through according to claim 1 , wherein the contact element is a contact pin.

6. The electrical feedthrough of claim 1 , wherein the first end of each of the contact elements is coupled to a printed circuit board, PCB, a plug, a socket, an electrical connector, or a wire.

7. The electrical feedthrough of claim 1 , wherein the second end of each of the contact elements is coupled to a PCB, a wire or a plug.

8. 8. The electrical feedthrough of claim 6 or 7, wherein the PCB is coupled to the contact element via a coupling element that provides electrical contact between the PCB and the contact element.

9. The electrical feedthrough of claim 8 , wherein the coupling element is cup-shaped or provides an axial abutment for the contact element.

10. 10. The electrical feed-through of claim 8 or claim 9, wherein the coupling element is a sleeve surrounding each of the contact elements.

11. 11. The electrical feedthrough of claim 1, characterized by an assembly aid removably coupled to the electrical feedthrough, the assembly aid comprising an opening corresponding to the opening in the wall element.

12. In particular, a vacuum device is a vacuum pump comprising a housing defining a vacuum chamber, 12. A vacuum device, wherein an electrical feedthrough according to any one of claims 1 to 11 is coupled to or integrally constructed with the housing, such that a first end of the contact element is located within the vacuum chamber and a second, opposite end is located outside the vacuum chamber.

13. In particular, a method for assembling an electrical feedthrough according to any one of claims 1 to 11, comprising the steps of: Providing at least two openings in a wall element of a vacuum device, in particular a vacuum pump; inserting a contact element through each of said openings; inserting a respective sealing element between each of said contact elements and said wall element; The method includes:

14. The method of claim 13, comprising bonding a PCB to the wall element on a vacuum side.

15. 15. The method according to claim 13 or 14, wherein an assembly aid is coupled to the wall element, the assembly aid having openings corresponding to the openings in the wall element for guiding the insertion of the contact element and the sealing element.

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