Arm End Attachment for a Robot Arm

Abstract

The device comprises a robotic arm and an arm end attachment fixedly attached to the robotic arm, wherein the arm end attachment comprises a fixed part of the arm end attachment adapted to receive a replaceable part of the arm end attachment fixedly attached to the robotic arm, a first replaceable part of the arm end attachment adapted to remove a cap from a container, hold the cap, and reinstall the cap on the container, and a second replaceable part of the arm end attachment adapted to install a dispense head on the container and remove the dispense head from the container, wherein the dispense head is capable of dispensing a liquid-based material from the container. A method of using the device is provided.

Description

Technical Field

[0001] The present disclosure relates to the automated dispensing of liquids, such as highly pure and highly corrosive liquids used in semiconductor processing and chemical manufacturing, from containers.

Background Art

[0002] Highly pure and highly corrosive liquids are often utilized in industries such as semiconductor processing and chemical manufacturing. Due to concerns about quality and safety, these liquids generally must be contained in high-integrity containers and dispensed using reliable dispensing systems.

[0003] Conventionally, containers are drums formed from high-purity polyethylene, such as those described in U.S. Patent No. 6,045,000. Examples of dispensing systems suitable for use with these drums are described in U.S. Patents Nos. 4,699,298, 5,108,015, 5,957,328, and 5,526,956. Connections, tubing, and fittings for handling these fluids are often formed from inert materials such as various fluoropolymers. The tubing is typically formed from perfluoroalkoxy (PFA), and the fittings and valve components can be formed from components such as PFA, polytetrafluoroethylene (PTFE), and other various fluoropolymers.

[0004] Conventional drums often include a stopper opening and a drum insert connected to an upward-facing, concentric nipple on the stopper. A dispense head can be operably coupled to the drum insert and include a main fluid passageway that engages to connect to and seal with the stopper. The dispense head can optionally include a recirculation passageway such that fluid dispensed from the drum can later be recirculated back into the drum.

[0005] When using a dispense head to draw a high-purity, highly corrosive, highly caustic liquid from a drum, it can be important not to connect a dispense head for a piece of equipment that requires a certain type of liquid to a drum that contains a different, incorrect, or incompatible liquid. To prevent this, a coded indicia section and recess are provided on the dispense head and drum insert to allow assembly of the drum insert to the dispense head only when the correct coding is present.

[0006] One such dispensing system, the Sentry QCIII Quick Connect System™, is shown in FIGS. 1A and 1B. Drum 10 has two plugs 20, one of which is sealed by a threaded plug 25. A drum insert 30 is installed in the second plug 20. Drum insert 30 includes a plug threading 31 for engagement with plug 20 of drum 10. Drum insert 30 includes a cap threading 32 for engagement with a shipping cap 40 (shown as removed and set aside in FIG. 1A). A down tube 33 can be used to draw out the contents of drum 10. A second, coaxial recirculation channel formed in the volume between down tube 33 and recirculation down tube 34 is open at deflector 35 and can be used for recirculation of the dispensed fluid back to drum 10. Shipping cap 40 can be color-coded to identify the contents of drum 10.

[0007] Dispense head 50 engages drum insert 30 by rotation of a locking ring 51 for dispensing the contents of drum 10. When engaged, dispense head 50 provides communication between tubing 52 and drum 10 for the purpose of drawing out the contents of drum 10, recirculating the drawn fluid back to drum 10, venting drum 10, and verifying establishment of a seal between dispense head 50, drum insert 30, and plug 20 of drum 10.

[0008] The installation of the dispense head 50 is accomplished manually using a torque wrench designed to suit the purpose.

SUMMARY OF THE INVENTION

[0009] The present disclosure provides an apparatus and method for automated dispensing of potentially hazardous liquid-based materials from drums that can provide higher accuracy, speed, reproducibility, and safety. All opening port operations (as well as all dispense operations) on the drum, from removing the shipping cap to installing the dispense head and ultimately reinstalling the shipping cap, can be performed within the enclosure with no personnel present inside the enclosure.

[0010] Briefly, the present disclosure provides an apparatus comprising: a. a robotic arm; and b. an arm-end attachment fixedly attached to the robotic arm, wherein the arm-end attachment comprises: i. a fixed portion of the arm-end attachment adapted to receive a replaceable portion of the arm-end attachment, fixedly attached to the robotic arm; ii. a first replaceable portion of the arm-end attachment adapted to remove a cap from a container, hold the cap, and reinstall the cap on the container; and iii. a second replaceable portion of the arm-end attachment adapted to install a dispense head on the container and remove the dispense head from the container, wherein the dispense head is capable of dispensing a liquid-based material from the container. In some embodiments, the liquid-based material is a CMP process chemical, and the CMP process chemical is dispensed to a CMP process tool. In some embodiments, the apparatus includes a programmable logic controller that controls the movement of the robotic arm and the arm-end attachment elements and optionally coordinates the actions of the apparatus with those of the CMP process tool. Additional embodiments of the apparatus of the present disclosure are described below.

[0011] In another aspect, the present disclosure is a method for automated dispensing of a liquid-based material from a container, the method comprising: a. providing an apparatus for automated filling or dispensing of a liquid-based material to or from a container, the apparatus comprising: i. a robotic arm; and ii. an arm-end attachment fixedly attached to the robotic arm, wherein the arm-end attachment comprises: 1. a fixed portion of the arm-end attachment fixedly attached to the robotic arm, the fixed portion being adapted to receive a replaceable portion of the arm-end attachment; 2. a first replaceable portion of the arm-end attachment adapted to remove a cap from the container, hold the cap, and reinstall the cap on the container; and 3. a second replaceable portion of the arm-end attachment adapted to install a dispense head on the container and remove the dispense head from the container; b. removing a cap from the container using the first replaceable portion when the first replaceable portion is attached to the fixed portion; and c. installing a dispense head on the container when the second replaceable portion is attached to the fixed portion. In some embodiments, the method further comprises: d. dispensing a liquid-based material from the container through the dispense head. In some embodiments, the method further comprises: e. supplying a portion of the liquid-based material to a CMP process tool; and f. recirculating a portion of the liquid-based material through the dispense head and back into the container. Additional embodiments of the methods of the present disclosure are described below.

[0012] The foregoing summary of the invention of the present disclosure is not intended to describe each embodiment of the present invention. Also, details of one or more embodiments of the present invention are set forth in the following description of modes for carrying out the invention. Other features, objects, and advantages of the present invention will become apparent from the description of modes for carrying out the invention and from the claims.

[0013] All scientific and technical terms used in this specification shall have the meanings commonly used in the relevant technical field, unless otherwise defined.

[0014] As used in this specification and the appended claims, the singular forms "a", "an", and "the" include embodiments having a plurality of referents, unless the context clearly dictates otherwise.

[0015] As used in this specification and the appended claims, the term "or" is generally employed in its meaning including "and / or", unless the context clearly dictates otherwise.

[0016] As used in this specification, the terms "have", "having", "include", "including", "comprise", "comprising", etc. are used in their open-ended sense and generally mean "including, but not limited to". It will be understood that the terms "consisting of" and "consisting essentially of" are subsumed by the term "comprising", among others.

Brief Description of the Drawings

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DETAILED DESCRIPTION OF THE INVENTION

[0018] The present disclosure provides an arm end tooling that can be mounted on a robotic arm. The tooling includes a first piece attached to the arm and a second piece removably attached to the first piece. The first piece includes one or more pneumatic control locks that interact with the second piece. The first piece may include one or more pins, guides, grooves, etc. for guiding the connection between the first piece and the second piece. The first piece includes a servo drive adapter for providing torque to a portion of the second piece. The first piece may include a sensor. In an embodiment, the sensor may measure the torque applied using the servo drive adapter. The sensor may measure the rotation of the servo drive adapter.

[0019] The first part piece serves as a universal head for interfacing with various second part pieces configured to function with different drum designs or perform different operations on the drum. For example, the second part piece can be designed to remove or place a shipping cap on the drum. The second part piece can be a drum head component configured to facilitate filling or emptying the drum. The second part piece can be mounted in a robot cell for quick changeover. This can enable the robot arm to perform a greater variety of tasks than if the arm end tooling lacked this quick changeover feature.

[0020] The use of one or more guide pins can improve the ability of the robot arm to exchange the second part piece. The guide pins can include a tapered tip and / or can be received in a hole with a conical opening. Similarly, grooves, bumps, divots, guides, etc. can be used to facilitate automated alignment between the first part piece and the second part piece. In one embodiment, the first part piece includes two guide pins for engaging holes in the second part piece. In an embodiment, the first part piece includes guide pins mounted near the outer edge of the first part piece. In another embodiment, the first part piece includes guide pins mounted near a servo drive adapter. In some embodiments, the guide pins are disposed on the first part piece and the holes for receiving the guide pins are disposed on the second part piece. In other embodiments, the guide pins are part of the second part piece and the first part piece includes holes for receiving the guide pins. In still other embodiments, both the first part piece and the second part piece include both guide pins and holes for receiving the guide pins.

[0021] The first part piece includes one or more pneumatically controlled locks. The pneumatically controlled locks facilitate a temporary attachment between the first part piece and the second part piece. The pneumatically controlled locks are configured to remain locked in the event of a loss of pressure to the pneumatically controlled locks. Similarly, the pneumatically controlled locks are configured to remain locked in the event of a loss of power to the system. This helps ensure that the second part piece remains attached to the first part piece in the event of a power failure or loss of pneumatic pressure.

[0022] The first part piece includes one or more servo-driven adapters. The servo-driven adapters may include a rotating wheel with several fingers that extend away from the wheel and away from the first part piece. The fingers interlock with a receiving component on the second part piece and serve to enable the transfer of rotation to the receiving component. In an embodiment, the rotating wheel includes three fingers of equal size. However, various numbers of fingers may be used. In some embodiments, the figure includes fingers of different sizes, or gaps between the fingers. In some embodiments, the fingers and gaps are of equal size, for example, alternating 60-degree arcs around the rotating wheel. For four fingers, a 45-degree arc may be used.

[0023] The first part piece may further include one or more cameras. In an embodiment, the first part piece includes two cameras. The cameras may perform port identification, port location, shipping cap configuration, and drum insert key code verification. The camera vision system capabilities may eliminate the hassle of having to maintain a perfect drum placement on the pallet after filling. Color images with high pixel resolution enable higher quality and safety using additional automated inspections, such as reading product ID tags or key codes on the drum insert. The cameras may include deep learning software.

[0024] The first part piece may include a port for connecting to a programmable logic controller (PLC). In an example, the PLC controls the operation of a servo drive adapter and / or a pneumatically controlled lock.

[0025] In some embodiments, the arm end toolings of the first and second part pieces are part of an automation cell that includes a robotic arm. The automation cell may include framing designed such that a complete automation cell is fully movable by a forklift while maintaining the integrity of sensitive equipment. The automation cell may operate on a single air source and power connection. This ensures a short installation time with minimal invasive infrastructures. The automation cell footprint may allow for expansion or addition of process steps, such as a drum head flush station, test equipment, etc.

[0026] Figures 2A and 2B depict an embodiment of an apparatus according to the present disclosure. The apparatus may be mounted on a base 160 such that the entire apparatus forms a cell 200 that is fully movable (i.e., via a forklift) while maintaining the integrity of sensitive equipment. The cell 200 may be designed to operate on a single air source and power connection. This ensures a short installation time with minimal invasive infrastructures. Typical power needs may include three-phase electricity of 380 - 575V capable of 2.5kW power consumption, generally a 480V power source. A transformer may be added for different plant powers available in different regions. Typical air source needs may include 550 - 690 kPa (80 - 100 PSI) for the operation of pneumatic components. The cell 200 may additionally include a containment wall 170 that includes a door 175. A door safety interlock may be included to prevent the operation of components when the door is open to provide for safe operation. The footprint of the cell 200 may allow for expansion or addition of process steps, such as a dispense head flush station, test equipment, etc.

[0027] One or more drums 110 that can be carried on a pallet 111 can be placed within the cell 200 and the closed door 175. The drums 110 can contain any suitable liquid, but the apparatus is suitable for high-purity, highly corrosive, and / or highly caustic liquids, such as those used in industries such as semiconductor processing and chemical manufacturing.

[0028] The apparatus includes a robotic arm 180. A connected programmable logic controller 190, adapted to control the movement of the robotic arm 180 and optionally added functions, can be an integral part of the cell 200. The robotic arm 180 can be a FANUC Foundry PRO M-710iC / 50 robotic arm, characterized by protection against dust ingress and intrusion, chemical vapor resistant epoxy paint, 6-axis movement, 50 kg payload capacity, and a 2050 mm reach. The programmable logic controller 190 can be an Allen Bradley programmable logic control with an AB PanelView HMI touch screen, local network connection capacity, remote access capacity for technical support, and pin output options for communication with an existing CDU system for a fully closed loop process. A Universal Head (UH) 250 is attached to the end of the robotic arm 180. The UH250 is the first piece of the arm end tooling of the present disclosure. The UH250 is capable of engaging and operating a plurality of second pieces of the arm end tooling, including a Shipping Cap End-of-Arm Tool (SC EOAT) 230 and a Dispense Head End-of-Arm Tool (DH EOAT) 240. The robotic arm 180 can reach the SC EOAT docking station 210, the DH EOAT docking station 220, and the drum 110. As shown, the SC EOAT docking station 210 carries the SC EOAT230. As shown, the DH EOAT docking station 220 carries the DH EOAT240.

[0029] Figures 3A and 3B depict the Universal Head (UH) 250 in more detail. The UH 250 is the first piece of the arm end tooling of the present disclosure. The UH 250 comprises a chassis 251 that carries the other components of the UH 250. The chassis 251 includes an upper plate 252 adapted to be attached to the end of the robotic arm 180 either permanently (e.g., by welding, adhesive, rivets, etc.) or semi-permanently (e.g., by machine bolts, etc.). The servo motor 253 is configured to drive a servo drive adapter 254. When engaged with the SC EOAT or the DH EOAT, the servo drive adapter 254 can provide torque to the movable elements of those second pieces. The servo motor 253 may have the ability to monitor torque, rotation, speed, and position (including the start and end points of rotation). The guide pins 255 engage with complementary portions of the SC EOAT or the DH EOAT to guide the attachment of those second pieces and provide stability when attached. The lock 256 engages with complementary portions of the SC EOAT or the DH EOAT to lock the second piece to the UH when engaged. The lock 256 can be pneumatically actuated. The lock 256 can be biased to the locked position such that a loss of power (or pneumatic pressure) to the lock does not cause the lock to open and release the engaged second piece. The UH 250 may additionally comprise a vision system including one or both cameras 257. The vision system may be a high-resolution color system such that the vision system can be used for port identification, port location determination, shipping cap identification, and drum insert identification. Additionally, the UH 250 may comprise a laser rangefinder in or adjacent to one or both of the cameras 257.

[0030] Figure 4 depicts the shipping cap arm end tool (SC EOAT) 230. The SC EOAT 230 is the second piece of the arm end tooling of the present disclosure. The SC EOAT 230 includes a chassis 231 that carries other components of the SC EOAT 230. The servo drive receiver 232 is configured to engage with the servo drive adapter 254 of the UH250 such that torque is transmitted from the servo motor 253 of the UH250 to the servo drive receiver 232. A belt and pulley system 233 transmits torque to the shipping cap rotor 234. The shipping cap rotor 234 is capable of engaging and holding the shipping cap of the drum. The shipping cap rotor 234 may include active or passive clamp elements (not shown) positioned within the shipping cap rotor 234 such that they can cooperate to function to hold the cap. In passive embodiments, two, three, or more clamp elements are positioned within the shipping cap rotor 234. One or more clamp elements are spring-loaded such that by pressing the shipping cap rotor 234 over the cap, the spring-loaded clamp elements are deflected to the open position and then caused to return to the cap holding position over the cap. In active embodiments, the clamp elements are opened and closed by a powered actuator such as a servo. The pin receiver 235 engages with the guide pin 255 of the UH250 to guide the attachment of the SC EOAT 230 to the UH250 and provide stability when attached. The lock receiver 236 engages with the lock 256 of the UH250 to lock the SC EOAT 230 to the UH250 when engaged. A guard 237 surrounds the belt and pulley system 233 to prevent contamination of the work space from its drive system. When not attached to the UH250, the SC EOAT 230 is stored within the SC EOAT docking station 210. During use, the robot arm 180 moves the UH250 to a position above the SC EOAT docking station 210 to engage or release the SC EOAT 230.

[0031] Figure 5 depicts the Dispense Head Arm End Tool (DH EOAT) 240. The DH EOAT 240 is the second piece of the arm end tooling of the present disclosure. The DH EOAT 240 includes a chassis 241 that carries other components of the DH EOAT 240. The servo drive receiver 242 is configured to engage with the servo drive adapter 254 of the UH250 such that torque is transmitted from the servo motor 253 of the UH250 to the servo drive receiver 242. The belt and pulley system 243 transmits torque to the dispense head rotor 244. The dispense head rotor 244 is capable of holding a dispense head (not shown), and more particularly, the locking ring of the dispense head, for attachment of the drum to the drum insert. The dispense head rotor 244 can be fitted with a standard dispense head, such as the dispense head 50 of FIG. 1A. The pin receiver 245 guides the attachment of the DH EOAT 240 to the UH250 and engages with the guide pin 255 of the UH250 to provide stability when attached. The lock receiver 246 engages with the lock 256 of the UH250 to lock the DH EOAT 240 to the UH250 when engaged. The guard 247 surrounds the belt and pulley system 243 to prevent contamination of the work space from its drive system. When not attached to the UH250, the DH EOAT 240 is stored in the DH EOAT docking station 220. During use, the robot arm 180 moves the UH250 to a position above the DH EOAT docking station 220 to engage or disengage from the DH EOAT 240.

[0032] The method according to the present invention may include some or all of the following actions, which will be described in more detail below.

[0033] 1. The drum is conveyed to the cell.

[0034] 2. By proper positioning of the vision system by the robotic arm, the vision system is used to identify the port openings of the drums and confirm the correct selection of the drums by the shipping cap type and / or other markings.

[0035] 3. By proper positioning of the laser distance meter by the robotic arm, the laser distance meter is used to determine the plane of the shipping cap that is perpendicular to the axis of rotation of the shipping cap.

[0036] 4. The robotic arm engages with the SC EOAT that is stationary at the SC EOAT docking station and uses the SC EOAT to unscrew the shipping cap from the drum insert of the drum by rotating the cap about its axis of rotation. The robotic arm returns the SC EOAT to the SC EOAT docking station and disengages, and the shipping cap remains held by the shipping cap rotor of the SC EOAT.

[0037] 5. The robotic arm engages with the DH EOAT that is stationary at the DH EOAT docking station.

[0038] 6. By proper positioning of the vision system by the robotic arm, the vision system is used to identify the drum insert and confirm the correct selection of the drum and the compatibility of the dispense head with the drum insert.

[0039] 7. The robotic arm aligns the dispense head with the axis of rotation of the shipping cap and engages the locking ring of the dispense head with the drum insert.

[0040] 8. The DH EOAT is used to rotate the locking ring of the dispense head to engage the dispense head with the drum insert with the appropriate torque being monitored.

[0041] 9. After the contents of the drum are dispensed, the DH EOAT is used to rotate the locking ring of the dispense head to separate the dispense head from the drum insert.

[0042] 10. The robot arm returns the DH EOAT to the DH EOAT docking station, engages the stationary SC EOAT at the SC EOAT docking station, and uses the SC EOAT to reinstall the shipping cap with the monitored appropriate torque.

[0043] Referring to FIG. 6, the robot arm 180 positions the camera 257 of the vision system above the drum 110 such that the field of view 258 includes the shipping cap 40. The vision system is used to identify each port opening of the drum. (The apparatus is shown with the UH250 engaged with the DH EOAT 240 without the dispense head attached thereto and supporting the DH EOAT 240.) The correct selection of the drum is confirmed by the shipping cap type and / or other markings. The location of the shipping cap in the XY plane is determined.

[0044] Referring to FIG. 7, the robot arm 180 positions a laser distance meter adjacent to the camera 257 of the vision system above the drum 110 so as to be able to measure the distance to the location on the shipping cap 40. (The apparatus is shown with the UH250 engaged with the SC EOAT 230 and supporting the SC EOAT 230.) The laser distance meter takes measurements at at least three locations 259. Using these three (or more) data points, a reference plane is determined to which the ports are aligned, which is a plane orthogonal to the axis of rotation of the shipping cap. In subsequent operations, the robot arm 180 is oriented such that the axes of rotation of the SC EOAT and DH EOAT tools are aligned with the axis of rotation of the shipping cap, thereby preventing cross-threading or excessive friction.

[0045] Figure 8 depicts the operation of the robot arm 180 such that the UH250 can engage with the SC EOAT230 for use. The SC EOAT230 is stationary on the SC EOAT docking station 210. The robot arm 180 positions the UH250 directly above the SC EOAT230 such that the guide pin 255 (one of two) of the UH250 is aligned with the pin receiver 235 of the SC EOAT230 and the lock 256 of the UH250 is aligned with the lock receiver 236 of the SC EOAT230. The robot arm 180 lowers the UH250 down onto the SC EOAT230 such that the servo drive adapter 254 engages with the servo drive receiver 232. The lock 256 is engaged to secure the SC EOAT230 to the UH250 for use. In the reverse operation, to return and separate the SC EOAT, the robot arm 180 positions the SC EOAT230 on the SC EOAT docking station 210 and the lock 256 is disengaged. The engagement and separation of the DH EOAT240 is performed in essentially the same manner.

[0046] Figures 9A and 9B depict the operation of the robotic arm 180 with the SC EOAT230 engaged with the UH250 to remove the shipping cap 40 from the drum 110. The robotic arm 180 positions the SC EOAT230 such that the shipping cap rotor 234 is above a predetermined location of the shipping cap in the XY plane and the axis of rotation of the shipping cap rotor 234 is aligned with a predetermined axis of rotation of the shipping cap. The robotic arm 180 lowers the SC EOAT230 over the shipping cap such that the shipping cap rotor 234 engages the shipping cap. The servo motor 253 rotates the shipping cap rotor 234 (generally counterclockwise) to separate the shipping cap and expose the drum insert. The shipping cap is held by the shipping cap rotor 234 until the shipping cap is reinstalled on the drum 110. Reinstalling the shipping cap again involves positioning the SC EOAT230 such that the shipping cap rotor 234 is above a predetermined location of the (installed) shipping cap in the XY plane and the axis of rotation of the shipping cap rotor 234 is aligned with a predetermined axis of rotation of the (installed) shipping cap. The robotic arm 180 lowers the SC EOAT230 over the drum insert such that the shipping cap held by the shipping cap rotor 234 engages the drum insert. The servo motor 253 rotates the shipping cap rotor 234 (generally clockwise) to engage the shipping cap with the drum insert, and the rotational position and torque are monitored to ensure proper sealing of the reinstalled shipping cap.

[0047] Referring to FIG. 10, removal of the shipping cap exposes the drum insert 30 mounted within the plug 20 of the drum 110. After removal of the shipping cap, the robot arm 180 returns the SC EOAT to the SC EOAT docking station along with the shipping cap held by the SC OEAT shipping cap rotor and engages the UH250 with the DH EOAT 240 at the DH EOAT docking station. The DH EOAT 240 includes the dispense head 50 mounted to a dispense head rotor 244 that holds the dispense head 50 by a locking ring of the dispense head 50 (not visible in this figure). (The tubing connected to the dispense head 50 is omitted from this figure for clarity.) Before placing the dispense head 50 on the drum insert 30, the apparatus verifies the appropriate drum insert 30 using a vision system as shown in FIG. 10. The robot arm 180 positions the camera 257 of the vision system on top of the drum 110 such that the field of view 258 includes the drum insert 30 for confirmation of the appropriate drum insert 30.

[0048] Referring additionally to FIG. 11, when the correct drum insert 30 is present, the robot arm 180 positions the DH EOAT 240 such that the dispense head rotor 244 is above the predetermined location of the drum insert 30 in the XY plane (predetermined as the location of the shipping cap), and the axis of rotation of the dispense head rotor 244 is aligned with the predetermined axis of rotation for the drum insert 30 (predetermined as the axis of rotation of the shipping cap). The robot arm 180 lowers the DH EOAT 240 onto the drum insert such that the locking ring of the dispense head 50 held by the dispense head rotor 244 engages the drum insert. The servo motor of the UH250 rotates the dispense head rotor 244 (generally clockwise) to engage the locking ring of the dispense head 50 with the drum insert 30, and the rotational position and torque are monitored to ensure proper sealing of the dispense head 50. Additionally, a proper connection can be verified by use of the verification port of the dispense head 50, which port contains its characteristics. The robot arm 180 remains in place during dispensing of the contents of the drum 110 through the tubing 52 connected to the dispense head. The tubing 52 is shown in a truncated state in FIG. 11. The tubing 52 forms connections for drawing out the contents of the drum 110, recirculating the drawn fluid back into the drum 110, and venting the drum 110, in addition to verifying the establishment of a seal between the dispense head 50, the drum insert 30, and the stopper 20 of the drum 110 (as described above).

[0049] After dispensing is complete, the servo motor of the UH250 rotates the dispense head rotor 244 (generally counterclockwise) to separate the locking ring of the dispense head 50 from the drum insert 30. As described above, the robot arm 180 then returns the DH EOAT 240 to the DH EOAT docking station 220, removes the SC EOAT 230 (which holds the shipping cap) from the SC EOAT docking station 210, and reinstalls the shipping cap.

[0050] It should be understood that various modifications and variations of the present disclosure will be apparent to those skilled in the art without departing from the scope and principles of the present disclosure, and the present disclosure should not be unduly limited to the exemplary embodiments described above.

Claims

1. a. A robotic arm, and b. An arm-end attachment fixedly attached to the robotic arm, wherein the arm-end attachment comprises i. A fixed portion of the arm-end attachment fixedly attached to the robotic arm, the fixed portion being adapted to receive a replaceable portion of the arm-end attachment, and ii. A first replaceable portion of the arm-end attachment adapted to remove a cap from a container, hold the cap, and reinstall the cap on the container, and iii. A second replaceable portion of the arm-end attachment adapted to install a dispense head on the container and remove the dispense head from the container, wherein the dispense head is capable of dispensing a liquid-based material from the container An arm-end attachment comprising An apparatus comprising

2. The apparatus according to claim 1, wherein the first replaceable portion comprises a first rotor, the first rotor comprising a plurality of clamps adapted to close around the cap such that torque can be applied to the cap by rotation of the first rotor.

3. The apparatus according to claim 1, wherein the second replaceable portion comprises a second rotor, the second rotor being engagable with the dispense head and capable of applying torque to the dispense head by rotation of the second rotor.

4. The apparatus according to claim 3, wherein the dispense head comprises three or more through channels.

5. The apparatus according to claim 4, wherein at least one through channel is connected to a CMP tool.

6. The apparatus according to claim 3, wherein the dispense head comprises four or more through channels.

7. The apparatus according to claim 6, wherein at least one through channel is connected to a CMP tool.

8. The apparatus according to claim 1, wherein the liquid-based material is a CMP process chemical, and the CMP process chemical is dispensed to a CMP process tool.

9. The device according to claim 1, wherein the fixed part is a servo motor, and the servo motor is adapted to alternatively engage with the first rotor of the first replaceable part so as to apply torque to the first rotor, and with the second rotor of the second replaceable part so as to apply torque to the second rotor.

10. The device according to claim 9, further comprising, as an addition, a torque monitor for measuring the torque applied by the servo motor.

11. The device according to claim 9, wherein the fixed part further comprises, as an addition, a position monitor for measuring the rotational position of the servo motor.

12. The device according to claim 1, wherein the fixed part comprises one or more locks that maintain the first replaceable part or the second replaceable part in a fixed position relative to the fixed part at a lock position, and release the first replaceable part or the second replaceable part at an open position.

13. The device according to claim 1, wherein the fixed part comprises one or more cameras capable of capturing an image of the container.

14. The device according to claim 1, wherein the fixed part comprises one or more distance measuring detectors.

15. The first replaceable part comprises a first rotor, and the first rotor comprises a plurality of clamps adapted to close around the cap so that torque can be applied to the cap by rotation of the first rotor. The second replaceable part comprises a second rotor, and the second rotor comprises a dispensing head such that torque can be applied to the dispensing head by rotation of the second rotor. The fixed part is a servo motor, and the servo motor is adapted to alternatively engage with the first rotor so as to apply torque to the first rotor, and with the second rotor so as to apply torque to the second rotor. The device comprises a torque monitor for measuring the torque applied by the servo motor. The fixed part comprises one or more locks that, in the locked position, maintain the first replaceable part or the second replaceable part in the fixed position relative to the fixed part, and in the open position, release the first replaceable part or the second replaceable part. The fixed part comprises one or more cameras and one or more distance measuring detectors. The device according to claim 1.

16. Programmable logic controller and additionally comprises wherein the programmable logic controller is functionally connected to receive inputs from the torque monitor, the one or more cameras, and the one or more distance measuring detectors. wherein the programmable logic controller is functionally connected to control the movement of the robotic arm, the movement of the servo motor, and the movement of the one or more locks. The device according to claim 15.

17. The device according to claim 16, wherein the liquid-based material is a CMP process chemical, the CMP process chemical is dispensed to a CMP process tool, and the programmable logic controller is functionally connected to send a status signal to the CMP tool.

18. a. An apparatus for automated filling or dispensing of a liquid-based material to or from a container, the apparatus comprising: i. A robotic arm; ii. An arm end attachment fixedly attached to the robotic arm, wherein the arm end attachment comprises:

1. A fixed part of the arm end attachment fixedly attached to the robotic arm, the fixed part being adapted to receive a replaceable part of the arm end attachment; 2. A first replaceable part of the arm end attachment adapted to remove a cap from the container, hold the cap, and reinstall the cap on the container; 3. A second replaceable part of the arm end attachment adapted to install a dispense head on the container and remove the dispense head from the container. An arm end attachment comprising and providing an apparatus. b. when the first replaceable part is attached to the fixed part, removing the cap from the container using the first replaceable part; c. when the second replaceable part is attached to the fixed part, installing a dispense head on the container; A method comprising the steps of.

19. d. Dispensing a liquid-based material from the container through the dispense head; The method according to claim 18, further comprising the step of.

20. wherein the liquid-based material is a CMP process chemical, and the method further comprises: e. Supplying a portion of the dispensed CMP process chemical to a CMP process tool; f. Recycling a portion of the dispensed CMP process chemical back to the container through the dispense head; The method according to claim 19, further comprising the steps of.

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