Work coil for an induction heating type pest control device
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- EDWARDS LTD
- Filing Date
- 2023-07-20
- Publication Date
- 2026-06-19
Smart Images
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Abstract
Description
Technical Field
[0001] The present invention relates to an induction heating type pest control device, and more particularly to a work coil for an induction heating type pest control device.
Background Art
[0002] An induction heating type pest control device including a work coil is known. The work coil is used to inductively heat a susceptor. In an induction heating type pest control device, the susceptor may be a porous pest control chamber. There are induction heating type pest control devices including a work coil, but they may have drawbacks. Therefore, it is desired to provide an improved induction heating type pest control device and a work coil.
Summary of the Invention
Means for Solving the Problems
[0003] According to a first aspect, there is provided an induction heating type pest control device for treating an exhaust stream from a semiconductor processing tool, the pest control device comprising a work coil configured to inductively heat a porous susceptor defining a pest control chamber for treating the exhaust stream, the work coil being hollow so as to define a conduit connected to a source of a reaction reagent, and at least one surface of the work coil defining a plurality of openings in fluid communication with a conduit for conveying the reaction reagent from the conduit to the surface of the work coil for supply to the porous susceptor.
[0004] Some work coils, sometimes also called inductors or inductor coils for induction heating type pest control devices, are water-cooled, but most work coils are not cooled. The first aspect recognizes that there are drawbacks in the efficiency of typical work coils. Specifically, it has been found that not performing cooling leads to undesirable surface oxidation and annealing of the work coil. As a result, the work coil becomes soft and is prone to deformation. Water cooling is effective but inefficient due to heat loss.
[0005] Accordingly, a pest control device is provided. The pest control device can be an induction heating type pest control device. The pest control device can be for processing an exhaust stream from a semiconductor processing tool. The pest control device can include a work coil. The work coil can be configured to, adapted to, or arranged to inductively heat a porous susceptor. The porous susceptor can define a pest control chamber for processing the exhaust stream. The work coil can be hollow to define a conduit. The conduit can be connected to a source of reaction reagent. The conduit can have an inlet for receiving the reaction reagent. At least one surface of the work coil can define a plurality of openings or holes in fluid communication with a conduit for conveying or transferring the reaction reagent from the conduit to the surface of the work coil for supply to the porous susceptor. Thus, the work coil can be protected from the effects of overheating and at the same time improve energy efficiency. This is because the reaction reagent used as a coolant is preheated, its heat is recycled, and used to facilitate pest control in the porous susceptor that defines the pest control chamber, thereby improving energy efficiency. This arrangement eliminates the need for an independent supply of reaction reagent to the pest control chamber as well as an independent supply of cooling water.
[0006] The work coil includes a plurality of turns arranged along the axial length of the work coil, and the openings can be circumferentially dispersed around each turn. In this way, the reaction reagent can be supplied to the porous susceptor that defines the pest control chamber at a desired position and desired flow rate, and the necessary pest control conditions within the pest control chamber can be provided.
[0007] The circumferential dispersion of the openings may be different for each turn. By changing the position of the openings, the supply of the reaction reagent from the work coil to the pest control chamber can be customized, and the openings can be arranged to avoid the respective current flow paths through the turns of the work coil.
[0008] The openings of the turns on the outer axial side can be distributed towards the axial center portion of that turn. In other words, the openings of the turns on the outer axial side or the end turns can be distributed away from the outer axial portion or the end portion of that turn. With this arrangement, the openings are away from the current flowing through the outermost axial portion of that turn and are arranged towards the axial center portion and / or the inner axial portion or the end portion of that turn.
[0009] The openings of the turns on the inner axial side or the intermediate turns can be distributed towards the outer axial portion or the end portion of that turn. In other words, the openings of the turns on the inner axial side or the intermediate turns can be distributed away from the axial center portion or the intermediate portion of that turn. The turns on the inner axial side typically refer to the turns that are not the "end" turns of the coil. With this arrangement, the openings are away from the current flowing through the axial center portion of that turn and are arranged towards the outer axial portion of that turn.
[0010] The spacing between adjacent turns may vary along the axial length. By changing the spacing between the turns, the generated magnetic field can be customized along the axial length of the decontamination chamber. Also, the amount of reaction reagent supplied to the porous susceptor can be customized.
[0011] The spacing between the turns adjacent on the outer axial side can be made smaller than that between the turns adjacent on the inner axial side. In other words, the spacing between the turns adjacent on the inner axial side can be made larger than that between the turns adjacent on the outer axial side. When the spacing between the axial end turn and the immediately adjacent turn is smaller than the spacing between adjacent inner turns (i.e., adjacent turns excluding the end turns), the generated magnetic field, and thus the heating of the susceptor, can be made more uniform.
[0012] The plurality of openings can be arranged on the surface facing the porous susceptor. This helps direct the reaction reagent towards the location of the susceptor that is experiencing a higher level of heating, thereby assisting in cooling those locations.
[0013] The plurality of openings can be arranged on the surface facing away from the porous susceptor. In this way, the path for the reaction reagent towards the porous susceptor can be made more complex. As a result, a more uniform and diffused supply of the reaction reagent to the decontamination chamber can be provided, promoting decontamination.
[0014] The surface can be a curved surface and / or a flat surface. The work coil can have a curved and / or polygonal cross-section. The cross-section across the work coil can include any suitable cross-section that provides a conduit for the reaction reagent to pass through, provides the required flow direction, or is easy to manufacture. The cross-section can include a curved edge and / or a straight edge. The shape of the cross-section can be a trapezoid with a curved edge. Such a shape is suitable for additive manufacturing.
[0015] The inlet can have a baffle configured, arranged, or adapted to direct the flow of the reaction reagent circumferentially within the work coil. Thus, the reaction reagent can flow around the turns of the work coil.
[0016] The baffle can be configured to divide or split the flow of the reaction reagent within the work coil into circumferential directions in opposite directions. The configuration of the baffle can assist in the even distribution arrangement of the reaction reagent to the openings (more reaction reagent passes through the openings closer to the inlet than the openings farther from the inlet).
[0017] The baffle can extend circumferentially along the conduit and terminate in front of the opening end to divide the conduit into circumferential flow portions in opposite directions. This extends the flow path by providing counterflow within each turn, which helps increase the heat transfer between the work coil and the reaction reagent.
[0018] The work coil can include a helical structure and / or an axial laminate of turns. It has been shown that the axial laminate, or laminated strip coil, does not have a significant adverse effect on electrical performance compared to a helical coil, but can significantly reduce manufacturing costs compared to a helical coil.
[0019] The work coil can be provided with a plurality of inlets arranged at different positions along the axial length of the work coil. In other words, the inlets can include inlets arranged at different positions along the axial length of the work coil. This can facilitate a uniform dispersion arrangement of the reaction reagent within the work coil and through the opening.
[0020] The work coil can surround a porous susceptor. Typically, the work coil and the porous susceptor are coaxially arranged.
[0021] The decontamination device can include at least one of a porous susceptor and a porous insulator configured to be positionable (or positioned) between the work coil and the porous susceptor. The reaction reagent can pass through the porous insulator, whereby the work coil can supply the reagent to the porous susceptor that defines the decontamination chamber. However, during use, radiant heat (e.g., infrared rays) emitted from the porous susceptor that defines the decontamination chamber can be blocked to reduce heating of the work coil and / or the housing.
[0022] The decontamination device can include a housing configured to surround the work coil. When the work coil is surrounded by the housing, the work coil can be disposed within the plenum of the housing.
[0023] According to a second aspect, a method of constructing an inductively heated abatement apparatus for treating an exhaust stream from a semiconductor processing tool is provided, the method including supplying a work coil configured to inductively heat a porous susceptor that defines an abatement chamber for treating the exhaust stream, the work coil being hollow to define a conduit connected to a source of reaction reagent, and at least one surface of the work coil defining a plurality of apertures in fluid communication with a conduit for conveying the reaction reagent from the conduit to the surface of the work coil for supply to the porous susceptor.
[0024] The method can include disposing the work coil around a porous susceptor that defines the abatement chamber.
[0025] The method can include disposing a porous insulator between the work coil and a porous susceptor that defines the abatement chamber.
[0026] The method can include disposing the work coil within a housing.
[0027] The method can include connecting an inlet of the work coil to a source of reaction reagent.
[0028] According to a third aspect, a method of operating an inductively heated abatement apparatus for treating an exhaust stream from a semiconductor processing tool is provided, the method including connecting an inlet of a work coil according to the first aspect to a source of reaction reagent, supplying the reaction reagent to the conduit of the work coil through the inlet, and discharging the reaction reagent from the conduit of the work coil through the plurality of apertures.
[0029] The methods of the second and third aspects can include steps corresponding to any of the features of the first aspect described above.
[0030] Further specific and preferred embodiments are set forth in the appended independent and dependent claims. The features of the dependent claims may, where appropriate, be combined with the features of the independent claims, and may also be combined in combinations other than those explicitly recited in the claims.
[0031] Where the features of an apparatus are described as being operable to provide a certain function, it will be understood that this includes features of the apparatus that provide or are adapted or configured to provide that function.
[0032] Next, embodiments of the present invention will be further described with reference to the accompanying drawings.
Brief Description of the Drawings
[0033]
Figure 1
Figure 2
Figure 3
Figure 4
Modes for Carrying Out the Invention
[0034] Before describing the embodiments in more detail, an overview is first presented. Some embodiments provide a work coil for an inductively heated decontamination apparatus for processing an exhaust stream from a semiconductor processing tool. The work coil is configured to inductively heat a porous susceptor that defines a decontamination chamber for processing the exhaust stream. The work coil is hollow so as to define a conduit, duct, or tube that allows fluid to pass through the work coil. An inlet to the conduit of the work coil can be fluidly coupled to a source of reaction reagent. One or more surfaces of the work coil can define a plurality of openings that are in fluid communication with a conduit that carries the reaction reagent in the conduit to the porous susceptor. The position, distribution, and / or density of the openings can be selected to avoid the induced current path within the work coil and / or to provide a desired flow rate and flow direction. The work coil can be configured to supply the reaction reagent to the susceptor in a diffusive manner. For example, the openings can be evenly distributed circumferentially around a turn of the work coil. Further, the openings can be arranged to create a complex path from the work coil to the susceptor, thereby diffusing the reaction reagent. The reaction reagent can act as a coolant for the work coil and further act as a source of the reaction reagent for the decontamination chamber formed by the susceptor. In this way, the heat absorbed by the reaction reagent from the work coil is reused as the heat used for decontamination. The inductively heated decontamination apparatus can include a work coil, a porous decontamination chamber susceptor, and a porous insulator disposed between the work coil and the porous decontamination chamber susceptor. A housing can be used to house the work coil, susceptor, and insulator.
[0035] Work coil FIG. 1 shows an embodiment of a work coil 10 for use in an inductively heated decontamination apparatus, such as the simplified decontamination apparatus 100 shown in FIG. 2. The inductively heated decontamination apparatus 100 includes a housing 20, a work coil 10, a porous susceptor 40, sometimes referred to as a decontamination chamber, and a porous insulator 30.
[0036] The work coil 10 includes a laminated strip coil. That is, the work coil 10 is assembled from a single loop laminated along the longitudinal axis. The coil 10 is hollow and a conduit is defined within the coil. The cross-section of the work coil 10 is trapezoidal, but any suitable cross-section can be used, for example, one having a circular, square, flat and / or curved surface. In some embodiments, the work coil includes a helical coil instead of or in addition to the laminated strip coil.
[0037] The work coil 10 includes a plurality of turns 12 arranged along the longitudinal axis defined by the work coil 10. The plurality of turns 12 includes an axially outer or end turn 12a and an axially inner turn 12b. The turns 12 are coaxial with each other, and adjacent turns 12 define a gap 18 therebetween. The adjacent axially outer turns 12a, that is, the two turns closest to each end of the work coil 10, have a narrower gap 18a with the adjacent axially inner turn 12b than the gap 18b with the adjacent axially inner turn 12b.
[0038] Each turn 12 is coupled to an inlet 14 (only one is shown in FIG. 1) configured to fluidly couple a reactant reagent source to the conduit defined by the hollow work coil 10. In embodiments, each turn of the laminated strip coil includes an inlet.
[0039] The work coil 10 further includes a plurality of holes or openings 11 arranged at circumferential intervals on the inner surface 13 of the turns 12 of the work coil 10. In this embodiment, the plurality of openings 11 are arranged in four rows, but other arrangements are also possible. In other embodiments, the openings 11 are arranged in one row or in two or more than three rows. The plurality of openings 11 fluidly couple the conduit of the work coil 10 to the plenum of the housing 20 of the decontamination device 100. Typically, the openings 11 of the axially outer turns 12a are arranged away from the axially central portion of that turn so that there are no openings in the axially central portion to avoid an axially centered eddy current flowing through these turns. The openings of the axially inner turns 12b are arranged in the axially central portion so that there are no openings in the axially outer portions of these turns to avoid an eddy current located in the axially outer portion flowing through these turns.
[0040] The surface defining the opening 11 faces radially inwardly towards the insulator 30 and the susceptor 40. In some embodiments, the surface 13 defining the opening faces radially outwardly at a predetermined angle and / or radially outwardly at a predetermined angle and / or faces perpendicular to the circumference of the turn.
[0041] The work coil 10 further includes an electrical connection portion 16 configured to electrically connect the work coil 10 to a suitable power source.
[0042] FIG. 2 schematically shows the induction heating type decontamination device 100. The work coil 10 is arranged in the housing 20 and surrounds the porous susceptor 40. The porous insulator 30 is coaxial with the work coil 10 and the porous susceptor 40 and is arranged between the work coil 10 and the porous susceptor 40. The work coil 10, the susceptor 40 and the insulator 30 are configured with a cylindrical cross-section. However, other cross-sectional shapes, for example a rectangular cross-section, can also be used.
[0043] Figure 3 shows a turn 12 of the work coil 10 having a baffle 50. The baffle 50 is disposed within a conduit defined by the hollow work coil 10, has a T-shaped portion at the junction of the inlet 14, and is adapted to direct the flow of the reaction reagent from the inlet 14 into a circumferential flow in the opposite direction around a radially outer flow section. The end of the baffle 50 terminates near the blind end of the turn 12, allowing the reaction reagent to flow into the radially inner flow section. In some embodiments, the baffle extends over 5% of the length between the inlet 14 and the open end of the turn 12. In some embodiments, the baffle extends over more than 25%, more than 50%, or more than 75% of the distance between the inlet 14 and the open end of the turn 12. Disposing the baffle 50 to form a circumferential flow in the opposite direction helps to provide a uniform distribution of the reaction reagent to openings spaced circumferentially and extends the residence time within the turn to improve heat transfer.
[0044] In use, the work coil 10 is disposed within the housing 20 of the decontamination device 100 and surrounds the porous insulator 30 and the porous susceptor 40. An alternating current power source supplies electrical energy to the work coil 10, generating a varying magnetic field. The varying magnetic field induces eddy currents in the porous susceptor 40, causing the porous susceptor 40 to heat up and decontaminate the exhaust stream. To facilitate decontamination, a reaction reagent is supplied to a decontamination chamber defined by the porous susceptor. During operation, one or more reaction reagents (e.g., compressed dry air (CDA)) can be supplied through the inlet 14 into the conduit of the work coil 10 to prevent overheating of the work coil 10. Overheating may occur due to radiant heat or other heat from the porous susceptor 40 or due to resistive heating by self-induced eddy currents.
[0045] The reaction reagent supplied to the work coil 10 is guided around the turn 12 by the baffle 50, avoiding the region where the reagent in the work coil 10 is dilute. The reaction reagent is supplied from the work coil 10 to the plenum of the housing 20 through the opening 11 defined on the surface 13 of the turn 12 of the work coil 10. Thereafter, the reaction reagent passes through the porous insulator 30 and the porous susceptor 40 and enters the decontamination chamber, where decontamination can be promoted. The heat extracted from the work coil 10 by the reaction reagent helps with decontamination and can avoid the waste heat associated with the cooled work coil.
[0046] It is preferable that the work coil 10 heats the porous susceptor 40 uniformly. For this purpose, in some embodiments, the axially outer or end turns 12a of the work coil 10 are closer to the immediately adjacent inner turn 12b than the inner turns 12b are to each other. In other words, the spacing between the axially outer turns 12a is smaller than the spacing between adjacent axially inner turns 12b.
[0047] The work coil 10 preferably supplies the reaction reagent to the decontamination chamber in a diffusion pattern by uniformly dispersing it to assist with decontamination. To achieve this, in some embodiments, the opening 11 of the work coil 10 is arranged on the surface of the turn facing away from the porous susceptor 40. This makes the path of the reagent to the porous susceptor 40 more complex and enables a more diffused supply.
[0048] The porous insulator 30 is configured to surround the porous susceptor 40 but allows the reaction reagent gas to pass through the porous susceptor 40. The porous insulator 30 helps prevent the radiant energy and other energy from the porous susceptor 40 from heating the work coil 10 and the housing 20 (which may pose a risk of damaging the decontamination device 100).
[0049] FIG. 4 schematically shows a simplified work coil 10a. As shown in the figure, the region 60a of high current distribution occurs at the outermost axial position of the axially outer turns 12a'. Accordingly, the opening is arranged toward the axial central portion and / or the innermost axial position of the axially outer turns 12a' in the opening region 70a away from this region 60a. The region 60b of high current distribution occurs at the inner or central portion of the axially inner or central turns 12b'. Accordingly, the opening is arranged toward the outermost axial portion of the axially inner turns 12a' in one or both of the opening regions 70b away from this region 60b.
[0050] In some embodiments, a work coil for an induction heating type pest control device as described below is provided. The laminated strip coil has been manufactured and tested and does not show a significant disadvantage in electrical performance compared to a helical coil. Since there is no cooling, it may lead to surface oxidation of copper and may also lead to annealing. As a result, the coil becomes soft and is prone to deformation. Also, a water-cooled coil can be manufactured in a laminated style. Water cooling protects the coil, but there is a waste in that heat is taken away by the cooling water. In some embodiments, the coil is air-cooled with reagent air for the induction reactor or the pest control chamber. The reagent air is divided into as many streams as the number of coil elements. This air flows into each of the coil elements or turns, passes through the hollow portion of the coil element, and is discharged through a plurality of small holes near the susceptor. In one embodiment, the holes face forward, i.e., on the surface of the coil that induces current in the susceptor. In this configuration, the air passes through the ceramic insulator directly below the projection of the coil before flowing into the reaction chamber through the porous susceptor. The holes can be radial, and the holes can be inclined. The radial holes and the inclined holes can be used in combination. The holes can have a uniform size and / or distribution, or the holes can have a "hole area" that is larger towards the ends of the coil element and smaller towards the central portion. The air can flow out of the holes that project backward. These can be adjusted with baffles to bias the air to flow forward towards the susceptor. In this case, the air does not flow into the projection of the coil element, but flows through the gap between the coil elements. This air can follow a complex path through the coil element and first contacts the inner surface of the coil before flowing into the portion of the coil element suitable for air discharge. The flow of air to the individual coils can be made the same, or it can be controlled to be more for certain coils and less for other coils. It is recognized that it is beneficial to have coils that are close at both ends and separated at the central portion, and in cases where it may be preferable to supply more air to the coil elements in the central portion and less air to the coil elements at the ends in proportion to the spacing. The coil can be formed of a copper alloy such as CuCrZr, for example.The coil can be manufactured by AM (additive manufacturing). The coil can be formed of an aluminum alloy. Copper plating can be applied thereto. The plating is applied by an electroless process. The work coil can be made at least in part from aluminum A20X.
[0051] Exemplary embodiments of the present invention have been disclosed herein in detail with reference to the accompanying drawings, but the present invention is not limited to the exact embodiments, and it is understood that various changes and modifications can be made by those skilled in the art without departing from the scope of the present invention defined by the appended claims and their equivalents.
Explanation of Reference Numerals
[0052] 10, 10a Work coil 11 Opening 12 Turn 12a, 12a’ End turn or axially outer turn 12b, 12b’ Axially inner turn 13 Surface 14 Inlet 16 Electrical connection part 18 Turn interval 18a Interval between turns adjacent axially outside 18b Interval between turns adjacent axially inside 20 Housing 30 Porous insulator 40 Porous susceptor 50 Baffle 60a, 60b High current distribution region 70a, 70b Opening region 100 Decontamination device
Claims
1. An induction heating abatement device for processing the discharge stream from semiconductor processing tools, A work coil configured to inductively heat a porous susceptor that defines a detoxification chamber for processing the aforementioned discharge stream, Equipped with, A decontamination device wherein the work coil is hollow so as to define a conduit connected to a source of reaction reagents, and at least one surface of the work coil defines a plurality of openings that are in fluid communication with the conduit for transporting the reaction reagents from the conduit to the surface of the work coil for supply to the porous susceptor.
2. The abatement device according to claim 1, wherein the work coil comprises a plurality of turns arranged along the axial length of the work coil, and the openings are distributed circumferentially around each of the turns.
3. The pollution control device according to claim 2, wherein the dispersed arrangement of the openings differs for each turn.
4. The abatement device according to claim 2 or 3, wherein the openings of the axially outward turn are distributed toward the axial central portion of the turn.
5. The abatement device according to claim 2 or 3, wherein the openings of the axially outward turn are dispersed away from the axially outward portion of the turn.
6. The abatement device according to claim 2 or 3, wherein the openings of the axially inward turn are dispersed within the axially outward portion of the turn.
7. The abatement device according to claim 2 or 3, wherein the openings of the axially inward turn are dispersed away from the axial central portion of the turn.
8. The abatement device according to claim 2 or 3, wherein the interval between adjacent turns differs along the axial length.
9. The abatement device according to claim 8, wherein the interval is reduced between adjacent turns on the axial side compared to adjacent turns on the axial side.
10. The abatement device according to claim 8, wherein the interval is increased between adjacent turns on the axial side compared to adjacent turns on the axial side.
11. The pollution control device according to any one of claims 1 to 3, wherein the plurality of openings are located on a surface facing the porous susceptor.
12. The pollution control device according to claim 2 or 3, wherein the plurality of openings are located on a surface facing away from the porous susceptor.
13. The abatement device according to claim 11, wherein the surface is at least one of a curved surface and a flat surface.
14. The abatement device according to any one of claims 1 to 3, wherein the work coil has a cross-section that is curved and / or polygonal.
15. The abatement device according to any one of claims 1 to 3, wherein the inlet has a baffle configured to direct the flow of the reaction reagent in the circumferential direction within the work coil.
16. The abatement device according to claim 15, wherein the baffle is configured to divide the flow of the reaction reagent in the work coil in the opposite circumferential direction.
17. The abatement device according to claim 16, wherein the baffle extends circumferentially along the conduit and terminates before the open end in order to divide the conduit into circumferential flow portions in the opposite direction.
18. The abatement device according to any one of claims 1 to 3, wherein the work coil includes at least one of a helical structure and an axially stacked structure of turns.
19. The abatement device according to any one of claims 1 to 3, further comprising a plurality of inlets arranged at different positions along the axial length of the work coil.
20. The abatement device according to any one of claims 1 to 3, wherein the work coil surrounds the porous susceptor.
21. The abatement device according to any one of claims 1 to 3, further comprising at least one of the porous susceptor and a porous insulator disposed between the work coil and the porous susceptor.
22. The abatement device according to any one of claims 1 to 3, further comprising a housing configured to surround the work coil.