High-pressure annealing apparatus

Abstract

To provide a method for reducing the risk of breakage of a gas nozzle while operating a high-pressure annealing apparatus.SOLUTION: The high-pressure annealing apparatus (10) includes a chamber (100), a nozzle assembly (20), and a chamber support (130) having a mounting part (131), wherein the nozzle assembly includes a gas supply module (500) on which a lower end of a gas nozzle (200) for injecting gas into a process space of the chamber is seated and which supplies gas to the gas nozzle, a first support (310) covering and contacting a portion of one side of the gas nozzle, and a second support (360) covering and contacting a portion of the other side of the gas nozzle. 400.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a high-pressure annealing apparatus, and more particularly to a high-pressure annealing apparatus in which an integrated nozzle is separated into a nozzle and a gas supply module, and the gas nozzle is supported by a nozzle support member to prevent damage to the gas nozzle. [Background technology]

[0002] Recently, a high-pressure hydrogen annealing process has been applied to remove surface defects of semiconductors using high-pressure hydrogen or deuterium.

[0003] In order to supply gas from such high-pressure annealing equipment, a method has been adopted in which an integrated gas nozzle made of quartz is inserted into a manifold. However, the integrated gas nozzle has a problem in that the bent portion is easily damaged during maintenance and repair.

[0004] To solve this problem, various techniques have been proposed to prevent damage by separating the integrated gas nozzle into a gas nozzle and a gas supply portion connected to a manifold.

[0005] However, in the existing method of inserting a nozzle into one end of a gas supply unit, there is a problem that the gas nozzle tilts, making it impossible to supply gas uniformly onto the substrate, or vibration occurs at the connection point between the gas nozzle that supplies high-temperature, high-pressure gas and the gas supply unit, causing particles to flow onto the substrate.

[0006] The method of inserting a gas nozzle into a gas supply unit, which is the most commonly adopted method, has a problem that the gas nozzle may be damaged during the process of attaching or detaching the gas nozzle to or from the gas supply unit, unlike the integrated gas nozzle.

[0007] In addition, a method of connecting a support to the lower end of the gas supply unit to fix the gas supply module is mainly adopted, but this cannot solve the tilt and vibration of the gas nozzle.

[0008] Therefore, there is a need for a technology that can eliminate the risk of nozzle damage that occurs when inserting a nozzle into a gas supply unit and can reduce vibration by ensuring vertical alignment of the inserted nozzle. Summary of the Invention [Problem to be solved by the invention]

[0009] The present invention is intended to solve the above-mentioned problems of the prior art, and aims to provide a method for reducing the risk of damage to the gas nozzle while operating a high-pressure annealing apparatus.

[0010] In particular, the present invention aims to solve the problem that a gas nozzle made of quartz material is easily damaged at the bent portion during maintenance and repair of a high-pressure annealing device since the gas nozzle is manufactured as a single unit.

[0011] Furthermore, when the gas nozzle is configured as a separate gas supply unit and a gas nozzle, the present invention aims to solve the problem of damage that occurs during the process of attaching or detaching the gas nozzle to or from the gas supply unit, and to solve the problems of vibration and particle generation that occur in the nozzle by ensuring vertical alignment of the gas nozzle.

[0012] The objects of the present invention are not limited to those described above, and other objects and advantages of the present invention not mentioned above can be understood from the following description. [Means for solving the problem]

[0013] In order to achieve the above technical objectives, one embodiment of a high-pressure annealing apparatus according to the present invention includes: a chamber providing a process space in which supplied gas reacts with a substrate; a nozzle assembly for injecting the gas into the process space of the chamber; and a chamber support on which the chamber is mounted, supports the chamber, and has a support portion protruding from an inner surface and supporting at least a portion of the nozzle assembly, wherein the nozzle assembly includes a gas supply module on which a lower end of a gas nozzle is mounted and supplies gas to the gas nozzle; a gas nozzle for injecting gas into the process space of the chamber; a first support abutting and covering a portion of one side of the gas nozzle; and a second support facing the first support abutting and covering a portion of the other side of the gas nozzle, wherein the nozzle assembly may include a nozzle support member for supporting the gas nozzle mounted on the gas supply module through connection between the first support and the second support; and a connecting member for connecting the first support and the second support to each other.

[0014] As an example, the chamber support includes a gas supply module insertion hole into which the gas supply module can be inserted, the mounting part is located at the upper end of the gas module insertion hole, the first support is mounted on the upper end of the mounting part, and a portion of one side of the gas nozzle is in close contact with the inner surface, so that the mounting position on the gas supply module can be adjusted.

[0015] Furthermore, the first support body and the second support body may be in contact with each other at opposite ends while covering a portion of the gas nozzle, and the connecting member may fix the gas nozzle by contacting and pressurizing outer surfaces of the first support body and the second support body.

[0016] As another example, the first support includes a flange having a lower end portion extending outward, and a slot located on the flange, with its major axis directed from the gas supply module insertion hole toward the center of the chamber support, and the mounting portion includes a hole that is fastened with a fastener in a state corresponding to the slot, and the mounting position of the nozzle assembly can be adjusted by changing the position of the fastener fastened on the slot.

[0017] As another example, the gas supply module may include a supply module body having a nozzle mounting portion on one side on which the gas nozzle is mounted and a horizontal insertion portion on the other side that is inserted into the gas supply module insertion hole, and the nozzle mounting portion may include a vertical inlet passage formed inside the nozzle mounting portion to introduce gas into the gas nozzle, and a mounting groove formed at an upper end of the nozzle mounting portion, which is a groove in which the lower end of the gas nozzle is mounted.

[0018] For example, the connecting member may include a clip that covers and elastically presses the outer surfaces of the first support body and the second support body to connect the first support body and the second support body to each other.

[0019] For example, the connecting member may include a clamp covering the outer surface of the first support and the second support, and a bolt connected to the clamp to tightly attach the first support and the second support to the gas nozzle.

[0020] As an example, the first support body and the second support body may include extension portions bent outward from both ends and extended therefrom, and fastening holes formed corresponding to the extension portions of the first support body and the extension portions of the second support body, and the connecting member may include fasteners that are respectively connected to the fastening holes and tightly attach the first support body and the second support body to the gas nozzle.

[0021] As an example, the connecting member may include a slider having a through hole into which the first support and the second support are inserted when they are in contact with each other, and the slider may contact the outer surfaces of the first support and the second support into which it is inserted, thereby fixing the first support and the second support in close contact with the nozzle.

[0022] Furthermore, a first thread may be formed on outer surfaces of the first support and the second support, and a second thread may be formed on an inner surface of the slider, and the first thread and the second thread may be coupled together.

[0023] As another example, the mounting groove may include a nozzle alignment protrusion formed by protruding upward from a portion of the mounting groove, and the gas nozzle may include a nozzle alignment groove formed by recessing inward at a position corresponding to the nozzle alignment protrusion, and the nozzle alignment protrusion may be fitted into and coupled to the nozzle alignment groove, thereby aligning the direction of the gas nozzle outlet. [Effects of the Invention]

[0024] According to the present invention, the risk of damage to the gas nozzle when connecting the gas nozzle to the gas supply module is reduced, vertical and horizontal alignment of the gas nozzle is ensured, and vibration during gas supply is reduced, thereby enabling stable gas supply.

[0025] In particular, in the present invention, by using the nozzle support member as a vertical guide, it is possible to prevent the shock that occurs when inserting the gas nozzle into the gas supply module, and to prevent damage to the gas nozzle.

[0026] In addition, the nozzle support member makes surface contact with one side of the gas nozzle to support the gas nozzle, thereby aligning the gas nozzle vertically and reducing vibrations that occur in the nozzle when high-pressure gas is supplied. As a result, the problem of particles being generated due to damage to the gas nozzle during the gas supply process can be solved.

[0027] The effects of the present invention are not limited to those mentioned above, and other effects not mentioned will be clearly understood by those having ordinary skill in the art to which the present invention pertains from the following description. [Brief explanation of the drawings]

[0028] [Figure 1] 1A and 1B are a longitudinal sectional view and an enlarged sectional view showing an embodiment of a high-pressure annealing apparatus according to the present invention; [Figure 2] FIG. 1 is a perspective view showing an embodiment of a nozzle assembly applied to a high-pressure annealing apparatus of the present invention. [Figure 3] FIG. 2 is an exploded view showing an embodiment of a nozzle assembly applied to the high-pressure annealing apparatus of the present invention. [Figure 4] FIG. 2 is an exploded view showing an embodiment of a nozzle support member and a connecting member of the present invention. [Figure 5] 5A and 5B are a cross-sectional view and a perspective view showing the nozzle support member and the connecting member shown in FIG. 4. [Figure 6] 1 shows an embodiment of a gas nozzle mounted on a supply module body of the present invention. [Figure 7] 7 shows a modified embodiment of the supply module body of FIG. 6. FIG. [Figure 8] 10A and 10B are diagrams illustrating an example of adjusting the mounting position of a nozzle assembly applied to the high-pressure annealing apparatus of the present invention. [Figure 9] 10A and 10B are diagrams showing modified embodiments of a nozzle assembly applied to a high-pressure annealing apparatus according to the present invention. [Figure 10] 10A and 10B are diagrams showing modified embodiments of a nozzle assembly applied to a high-pressure annealing apparatus according to the present invention. [Figure 11] 10A and 10B are diagrams showing modified embodiments of a nozzle assembly applied to a high-pressure annealing apparatus according to the present invention. [Figure 12] 10A and 10B are diagrams showing modified embodiments of a nozzle assembly applied to a high-pressure annealing apparatus according to the present invention. [Figure 13]10A and 10B are diagrams showing modified embodiments of a nozzle assembly applied to a high-pressure annealing apparatus according to the present invention. [Figure 14] 10A and 10B are diagrams showing an example of a modified gas nozzle and nozzle mounting portion applied to the high-pressure annealing apparatus of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0029] DETAILED DESCRIPTION OF THE INVENTION For the purposes of explaining the invention, its operating advantages, and objects attained by its practice, the following description will be given by way of example and with reference to preferred embodiments thereof.

[0030] First, the terms used in this application are merely for describing specific embodiments and are not intended to limit the present invention, and singular expressions can include plural expressions unless the context clearly indicates otherwise. Furthermore, in this application, terms such as "include" or "have" are intended to specify the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and should be understood not to preclude the presence or possibility of addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0031] When describing the present invention, if it is determined that a detailed description of related known structures or functions may obscure the gist of the present invention, the detailed description thereof will be omitted.

[0032] The present invention provides a technology for a nozzle assembly applied to a high-pressure annealing apparatus that prevents damage to a gas nozzle when the gas nozzle is inserted into a gas supply module, fixes the gas nozzle vertically, and reduces vibration of the gas nozzle, thereby stably supplying gas.

[0033] Hereinafter, the present invention will be described with reference to examples of the present invention.

[0034] FIG. 1 shows one embodiment of a high-pressure annealing apparatus including a nozzle assembly according to the present invention.

[0035] The high pressure annealing apparatus 10 to which the present invention is applied may include a nozzle assembly 20 and a chamber 100. The chamber 100 may have a double chamber structure including an outer chamber 120 and an inner chamber 110.

[0036] The outer chamber 120 may be provided to surround the inner chamber 110 while being spaced apart from the inner chamber 110 by a certain distance. The outer chamber 120 provides an outer space that accommodates the inner chamber 110 and can protect the inner chamber 110 by maintaining the outer space at a pressure corresponding to the high pressure of the inner chamber 110. More specifically, the outer space may be the space excluding the area occupied by the inner chamber 110 from the inner space provided by the outer chamber 120.

[0037] The outer chamber 120 may be made of a metal material, and the material of the outer chamber 120 may be changed depending on the situation.

[0038] The inner chamber 110 may be configured to perform an annealing process in a high-pressure environment, and may be formed of a non-metallic material, preferably a quartz material, for example. The material of the inner chamber 110 may be changed as needed.

[0039] The inner chamber 110 may provide a process space for performing a heat treatment process on a treatment object. A door (not shown) may be selectively fastened to a lower portion of the inner chamber 110, and the inner space of the inner chamber 110 may be sealed by fastening the door.

[0040] The processing object may be located in the process space of the inner chamber 110. The processing object may be placed in the process space of the inner chamber 110 as wafers, stacked in multiple layers on a wafer boat (not shown).

[0041] The gas supplied to the process space of the inner chamber 110 is a first gas, which is a heat treatment process gas, and may be selected from various heat treatment gases such as hydrogen, deuterium, ammonia, oxygen, chlorine, and nitrogen.

[0042] The first gas may be supplied to the process space of the inner chamber 110 via the nozzle assembly 20 .

[0043] For example, the nozzle 200 of the nozzle assembly 20 may be disposed long from the bottom to the top of the process space of the internal chamber 110 to supply the first gas to the process space.

[0044] A plurality of nozzle assemblies 20 can be arranged as needed.

[0045] A protective gas may be supplied to adjust the pressure in the external space of the external chamber 120 to a pressure corresponding to the pressure in the internal chamber 110. The second gas as the protective gas supplied to the external space of the external chamber 120 may be selected from various inert gases such as nitrogen.

[0046] The gas supply means (not shown) may include a flow rate measuring device (not shown) and a pump (not shown) for each of the first gas and the second gas, and the controller may control the gas supply means to follow the heat treatment process profile and adjust the gas supply amount, gas supply time, gas supply rate, gas supply pressure, etc. for the first gas provided to the inner chamber 110 and the second gas provided to the outer chamber 120, respectively.

[0047] The chamber support 130 can support the inner chamber 110 .

[0048] A sealing member (not shown) may be installed between the chamber support 130 and the inner chamber 110 to prevent gas leakage.

[0049] Enlarged cross-sectional view A of FIG. 1 shows an enlarged portion of the longitudinal cross section of the annealing apparatus and gas assembly.

[0050] For example, the chamber support 130 may have one or more protruding mounting portions 131 on the inner wall thereof and one or more gas supply module insertion holes 132 to mount the nozzle assembly 20 therein.

[0051] That is, at least one point of the nozzle assembly 20 is placed on the support part 131, and a part of the nozzle assembly 20 is inserted into the gas supply module insertion hole 132, thereby fixing the position of the nozzle assembly 20.

[0052] For example, the chamber support 130 may be a manifold that can mount a plurality of nozzle assemblies 20. The manifold may be made of a metal material and may be modified as needed depending on the situation.

[0053] For example, the chamber support 130 may be provided with a plurality of mounting portions 131 and gas supply module insertion holes 132, so that a plurality of nozzle assemblies 20 can be mounted thereon.

[0054] The nozzle assembly 20 may include a gas nozzle 200 , a nozzle support member 300 , a coupling member 400 , and a gas supply module 500 .

[0055] The gas nozzle 200 can inject gas into the process space.

[0056] The nozzle support member 300 may include a first support 310 and a second support 360 that support the gas nozzle 200 so that the gas nozzle 200 is aligned vertically and fixes the position of the gas nozzle 200 .

[0057] The connecting member 400 may be configured to connect the first support 310 and the second support 360 of the nozzle support member 300 to each other while closely contacting the nozzle.

[0058] The gas supply module 500 can have the gas nozzle 200 mounted on one side at its upper end.

[0059] The other side of the gas supply module 500 can be inserted into a gas supply module insertion hole 132 located on the inner wall of the chamber support 130 .

[0060] The gas supply module 500 can supply gas flowing in from outside the chamber 100 to the gas nozzle 200 .

[0061] FIG. 2 is a perspective view showing an embodiment of a nozzle assembly 20 applied to the high-pressure annealing apparatus 10 according to the present invention, and FIG. 3 is an exploded view of the nozzle assembly 20. As shown in FIG.

[0062] Hereinafter, each configuration of the present invention will be described with reference to FIGS.

[0063] FIG. 4 is an exploded view showing one embodiment of a nozzle support member and a connecting member, and FIG. 5 is a cross-sectional view and a perspective view showing the nozzle support member and the connecting member shown in FIG.

[0064] FIG. 6 shows an embodiment in which a gas nozzle is mounted on a supply module body of the present invention.

[0065] For example, the gas nozzle 200 may have one or more nozzle holes 211 located at the nozzle upper end 210 .

[0066] Additionally, the gas nozzle 200 may have its lower nozzle end 220 mounted on the upper end of the gas supply module 500 .

[0067] For example, the gas nozzle 200 may be made of a non-metallic material, preferably quartz.

[0068] As an example, the injection port 211 may include one or more through holes in the gas nozzle 200 that point into the process space to inject gas into the process space.

[0069] The injection port 211 is not limited to the above embodiment and may be installed at the middle or bottom end of the gas nozzle 200 as needed. Also, the injection port 211 may be configured in the form of a branch pipe that protrudes or extends from the gas nozzle 200.

[0070] The mounting portion 131 may be formed to protrude from the wall surface of the chamber support 130 toward the center of the chamber support 130 .

[0071] The mounting part 131 has a groove 134 recessed from the side surface of the center of the chamber support 130, and the groove 134 of the mounting part 131 is formed larger than the outer diameter of the gas nozzle 200 so that the gas nozzle 200 can pass through the internal space.

[0072] Furthermore, holes 133 may be provided at both upper ends of the groove 134 of the mounting portion 131, into which bolts or fasteners can be fastened.

[0073] The nozzle support member 300 may include a first support 310 contacting one side of the gas nozzle 200 and a second support 360 contacting the other side.

[0074] As an example, the first support 310 may be placed and fixed on the upper surface of the base portion 131 .

[0075] As an example, the first support 310 has a flange 321 extending outward from its lower end portion, and the lower end surface of the flange 321 can be placed on the upper surface of the mounting portion 131 protruding from the chamber support 130 in Figure 3.

[0076] That is, the flange 321 of the first support 310 may extend laterally when the gas supply module insertion hole 132 is viewed from the center of the interior of the chamber support 130 .

[0077] The flange 321 of the first support 310 may include a flange slot 322 whose major axis is oriented from the gas supply module insertion hole 132 toward the center of the inner chamber 110 .

[0078] The first support 310 can be fixed by fastening a fastener to the slot 322 and the corresponding hole 133 of the mounting part 131 .

[0079] For example, the gas nozzle 200 may be mounted on the upper end of one side of the gas supply module 500 with the nozzle lower end 220 in close contact with the inner surface 315 of the first support 310 .

[0080] Furthermore, the gas nozzle 200 may be mounted on the upper end of one side of the gas supply module 500 by adjusting the position of the gas supply module 500 while the nozzle lower end 220 is in close contact with the inner surface 315 of the first support.

[0081] That is, by using the first support 310 as a vertical guide and support for the gas nozzle 200, the gas nozzle 200 is placed on the gas supply module 500 in a vertically aligned state, and the lower end 220 of the gas nozzle can be prevented from being damaged by impact or stress.

[0082] The position where the first support 310 contacts the gas nozzle 200 is not limited to the lower end 220 of the gas nozzle, but can be changed depending on the position of the mounting part 131 to contact the upper or middle side of the gas nozzle 200, thereby providing a guide so that the gas nozzle 200 can be placed on the gas supply module 500 in a vertically aligned state.

[0083] Furthermore, a plurality of first supports 310 may be provided, and while being coupled to a plurality of mounting portions 131 corresponding to each support, each first support 310 may contact the side of the gas nozzle 200, thereby forming a vertical guide so that the gas nozzle 200 can be inserted vertically.

[0084] As another example, a flange 321 may be additionally arranged at the upper or middle end of one first support 310, and the first support 310 may be coupled to a plurality of mounting portions 131 provided on the wall surface of the chamber support 130.

[0085] That is, the vertical stability of the first support 310 can be ensured by connecting one long first support 310 to a plurality of vertically arranged mounting portions 131 .

[0086] For example, the coupling member 400 may be a C-shaped clip with one side open and wings formed on both ends.

[0087] That is, the coupling member 400 is made of an elastic material and elastically presses the nozzle support member 300 positioned in the internal space 430 of the coupling member, thereby tightly contacting the nozzle support member 300 with the gas nozzle 200 .

[0088] An upper step 312 may be formed at the upper end of the first support body 310 to fix the connecting member 400, which is a clip, so that it does not move upward, and a lower step 313 may be formed at the bottom of the first support body 310 to fix the connecting member 400 so that it does not come off downward.

[0089] An upper step 362 may be formed at the upper end of the second support 360 to fix the connecting member 400, which is a clip, so that it does not move upward, and a lower step 363 may be formed at the lower end of the second support 360 to fix the connecting member 400 so that it does not come off downward.

[0090] Furthermore, on the outer surfaces between the upper step 312 and the lower step 313 of the first support 310 and between the upper step 362 and the lower step 363 of the second support 360, insertion surfaces 311 and 361 may be formed on each support 310 and 360 so that the first support and the second support 310 and 360 can be inserted into a connecting member 400, which is a clip.

[0091] That is, the nozzle support member 300 can be inserted into the internal space 430 of the connecting member 400 so that both ends 314 of the first support 310 correspond to both ends 364 of the second support 360 and contact each other, and the inner surface of the connecting member 400 covers the insertion surface 361 of the second support 360 on the outside of the second support 360.

[0092] The connecting member 400 covers a portion of the first support 310 and elastically presses the first and second supports 310 and 360 to connect them to each other, thereby allowing the inner surfaces 315 and 365 of the first and second supports 310 and 360 to be tightly attached to the outer surface of the gas nozzle 200.

[0093] When the first support 310 and the second support 360 are elastically pressed against the side of the gas nozzle 200, the friction generated between the inner surfaces 315, 365 of each support can fix the gas nozzle 200 so that it does not move vertically or horizontally.

[0094] The connecting member 400 is provided with extended blades 420 at both ends of the open side, and the connecting member 400 can be easily attached to the nozzle support member 300 by pushing both blades 420 toward the wall surface of the chamber support 130.

[0095] Furthermore, by using both blades 420, the coupling member 400 can be pulled toward the inside of the chamber support member 130, and the coupling member 400 can be easily removed from the nozzle support member 300.

[0096] The connecting direction of the connecting member 400 can be changed depending on the shape of the connecting member and the direction in which the elastic force of the connecting member is applied, and the connecting member 400 can be connected or fixed to the nozzle support member 300 in other directions.

[0097] The gas supply module 500 may include a supply module body 510 , a module mounting cover 520 , and an adapter 530 .

[0098] The lower end 220 of the gas nozzle 200 may be mounted on the upper end of one side of the supply module body 510 .

[0099] One side of the module mounting cover 520 is inserted into the gas supply module insertion hole 132 from the outside of the chamber support 130 .

[0100] Furthermore, the other side of the supply module body 510 is inserted into one side of the module mounting cover 520 inserted into the gas supply module insertion hole 132 from inside the chamber support 130 .

[0101] One side of the adapter 530 is inserted into the other side of the module mounting cover 520 .

[0102] That is, the other side of the supply module body 510 and one side of the adapter 530 are in contact with each other inside the module mounting cover 520 and can be fixed by the module mounting cover 520 .

[0103] A gas supply device (not shown) can be connected to the other side of the adapter 530 .

[0104] For example, the supply module body 510 may include a nozzle mounting portion 511 on one side on which the lower end 220 of the gas nozzle is mounted, and a horizontal insertion portion 517 on the other side that is inserted into one side of the module mounting cover 520.

[0105] For example, a mounting groove 516 may be provided at the upper end of the nozzle mounting portion 511, the lower end of the gas nozzle 220 may be mounted inside the mounting groove 516, and a vertical inlet channel 512 may be formed to allow gas to flow into the inside of the mounted lower end of the gas nozzle 220.

[0106] The horizontal insertion part 517 positioned on the side of the nozzle mounting part 511 has a horizontal inflow path 518 formed therein, allowing the gas injected from the adapter 530 to flow into the nozzle mounting part 511 .

[0107] The vertical inlet 512 is connected to the horizontal inlet 518 on the side, and can deliver the gas flowing in from the horizontal inlet 518 to the upper end and then inject the gas into the lower end 220 of the gas nozzle.

[0108] As another example, the nozzle mounting portion 511 and the horizontal insert portion 517 may be fabricated as two separate parts that are interconnected.

[0109] For example, as shown in FIG. 6(b), the outer wall 513 and the inner wall 514 of the mounting groove may be formed to have a certain distance D therebetween.

[0110] Furthermore, the fixed distance D is configured to be sufficiently larger than the thickness T of the gas nozzle so that the gas nozzle 200 can be placed in the placement groove 516 without being damaged.

[0111] That is, the sufficiently large distance D can prevent impact and tensile force that may occur when the gas nozzle 200 is inserted into the supply module body 510, thereby reducing the risk of damage to the lower end 220 of the gas nozzle.

[0112] Furthermore, the height H of the outer wall 513 and the height h of the inner wall 514 of the nozzle mounting groove 516 can be configured to a degree that prevents the gas nozzle 200 from coming off.

[0113] FIG. 7 shows a modified example in which the height H of the outer wall 513 and the height h of the inner wall 514 of the nozzle mounting groove are adjusted.

[0114] As an example, the height H of the outer wall 513 and the height h of the inner wall 514 in FIG. 7(a) may be reduced to the height H' of the outer wall 513 and the height h' of the inner wall 514 in FIG. 7(b).

[0115] That is, the heights H' and h' of the outer and inner walls are reduced, and it is possible to prevent the tensile force from being generated by the outer wall 513 and the inner wall 514 of the placement groove due to the inclination of the lower end 220 of the gas nozzle.

[0116] As another example, when the gas nozzle 200 is placed in an inclined position, the outer wall 513 and the inner wall 514 of the mounting groove may be chamfered or filleted at each upper end corner corresponding to the gas nozzle lower end 220 so that the nozzle lower end 220 can be placed in the mounting groove 516 without being damaged.

[0117] Gas flowing in through a gas supply device (not shown) can be injected from outside the chamber 100 through the adapter 530, the horizontal inlet channel 518, the vertical inlet channel 512, and the gas nozzle 200 into the process space through the nozzle outlet 211.

[0118] As another example, to prevent gas leakage between the adapter 530 and the supply module body 510 or between the adapter 530 and the gas supply pipe (not shown), the gas supply module 500 may include a sealing member (not shown) between each component.

[0119] The configuration and material of the gas supply module 500 may be changed depending on the type, temperature, and pressure of the gas to be supplied.

[0120] FIG. 8 shows an example of the position adjustment of the nozzle assembly 20.

[0121] The lower end surface of the first support 310 is placed on the upper surface of the support portion 131, and a fastener is partially inserted into the slot 322 and the hole of the support portion 131 corresponding to the slot 322, thereby fixing the first support 310 vertically.

[0122] The position of a portion of the nozzle assembly 20 within the chamber support 130 can be adjusted in the R direction from the gas supply module insertion hole 132 toward the center of the interior of the chamber support 130 .

[0123] That is, portions 220', 310', 360', 321', 400', 510' of nozzle assembly 20 can be adjusted to move in the R direction from the positions shown by the dashed double-dashed lines.

[0124] The fastener 302 can be fully engaged with the slot 322 of the first support 310 and the hole 133 of the mounting portion to fix the nozzle assembly 20 in place.

[0125] The above-described coupling member 400 is not limited to a clip, but can be modified as needed.

[0126] In this regard, FIGS. 9 to 13 show modified embodiments of the nozzle assembly applied to the high-pressure annealing apparatus of the present invention, and descriptions of parts that overlap with the above-described embodiments will be omitted or will be briefly described.

[0127] As shown in FIG. 9, the coupling member 400b has a protrusion 431b formed from the point where the clip wing 420b starts toward the nozzle support member 300, and is inserted into a groove 316b formed in the insertion portion of the first support member 310b, so that the coupling member 400b can be fixed to the nozzle support member 300.

[0128] As shown in FIG. 10, for example, the coupling member 400c may include a clamp 420c covering the insertion surfaces 311c and 361c of the first support 310c and the second support 310c, a clamp coupling bolt 451c, and a nut 452c.

[0129] The clamp 420c has a hole 440c through which a bolt 451c is connected, so that the connecting member 400c presses the insertion surfaces 311c, 361c of the first support and the second support, and the nozzle support member 300 can be further fitted to the gas nozzle 200 by the connecting member 400c.

[0130] As shown in FIG. 11, for example, the first support 310d and the second support 360d may have blades 340d and 390d, respectively, extending from both ends 314 and 364 of each support in opposite directions of the inner space 301 of the nozzle support member.

[0131] Furthermore, fastening holes 341d formed in blades 340d of the first support and fastening holes 391d formed in blades 390d of the second support may be formed at positions corresponding to each other.

[0132] A coupling member 400 including a fastener 450d and a nut 452d is fastened to the fastening hole 391d, so that the nozzle support member 300 can be more tightly attached to the gas nozzle 200.

[0133] Furthermore, the first support 310d and the second support 360d are made of a metal material having elasticity, and the blade 340d of the first support and the blade 390d of the second support may be spaced apart by a predetermined distance d.

[0134] That is, by fastening the fasteners 450d to the fastening holes 341d and 391d of the first and second supports, the nozzle support member 300 can be more closely attached to the gas nozzle 200 by the fasteners 450d.

[0135] The structure of forming the predetermined distance d between the supports is not limited to the above embodiment, and may be applied to other modified examples of the connecting member 400 and the nozzle support member 300 as needed.

[0136] As shown in FIG. 12, for example, the coupling member 400e is a slider having a through-hole 430e therein, and the first support 310e and the second support 360e are configured so as not to have upper steps 312, 362 and can be inserted into the internal through-hole 430e of the coupling member 400e.

[0137] In addition, the coupling member 400e contacts the insertion surfaces of the inserted first support member 310e and second support member 360e, and can fix the nozzle support member 300 in a state of being in close contact with the gas nozzle 200.

[0138] Furthermore, the second support 360e may include a protruding portion 380e that protrudes so as not to be pushed downward when inserted into the inner space 430 of the coupling member.

[0139] That is, the second support protrusion 380e can be configured so that the lower step 363 of the second support 360e protrudes in the direction of the corresponding lower step 313 of the first support.

[0140] The lower step 313 of the first support 310e may include a first support groove 330e recessed to correspond to the protrusion 380e of the second support so that the protrusion 380e can be inserted therein.

[0141] The first support groove 330e and the second support protrusion 380e are not limited to the above embodiment and may be applied to other modified examples of the connecting member 400 and the nozzle support member 300 as needed, or may be formed at other positions such as both end surfaces of each support rather than the lower end, so that the second support 360 can be fixed so as not to move up and down when the supports are connected to each other and when the supports are connected to the connecting member.

[0142] For example, the first support 310e and the second support 360e are formed so that their thickness is greater in a certain section than the thickness at the upper end, and the connecting member 400e contacts the outer surface of each support, thereby allowing the nozzle support member 300 to be tightly attached to the gas nozzle 200.

[0143] Furthermore, the thickness is increased toward the bottom end, which can disperse the pressure applied by the coupling member 400e and reduce the risk of damage to the gas nozzle 200.

[0144] That is, the insertion surfaces of the supports 310e and 360e are formed to have an increasing thickness while forming an inclination angle θ, as shown in FIG. 12(b), so that the pressure applied to the lower end of the insertion surface by the connecting member 400e is dispersed and transmitted to the lower end 220 of the gas nozzle, thereby fixing the position of the gas nozzle 200 while reducing the risk of damage to the lower end 220 of the gas nozzle.

[0145] As an example, in FIG. 13, a first thread 431f is provided inside a coupling member 400f, and a second thread 316f is provided on the outer surface of the nozzle support member 300, and the two threads are coupled together to maintain the nozzle support member 300 and the gas nozzle 200 in close contact with each other.

[0146] The first threaded line 431f and the second threaded line 316f are deformed into slots and protrusions, and with the protrusions inserted into the slots, the coupling member 400f can be coupled to the outside of the first support 310f and the second support 360f along the direction of the slots.

[0147] FIG. 14 shows, as an example, alignment groove 221 on gas nozzle bottom end 220 and nozzle alignment protrusion 519 on supply module body 510.

[0148] The nozzle alignment groove 221 and the nozzle alignment protrusion 519 may have a nozzle alignment protrusion 519 at a certain portion of the mounting surface 515 of the mounting groove that comes into contact with the cross section of the gas nozzle lower end 220, in order to easily align the direction of the injection port 211 when the gas nozzle lower end 220 is coupled to the supply module body 510, and a corresponding nozzle alignment groove 221 may be formed by being recessed at the upper end of the gas nozzle lower end 220.

[0149] Therefore, the nozzle alignment protrusion 519 is aligned and coupled to the nozzle alignment groove 221, thereby aligning the nozzle injection port 211, and the gas injected through the injection port 211 can be supplied onto the substrate positioned in the process space.

[0150] The nozzle alignment groove 221 and the protrusion 519 may be configured in an arch shape as shown in the cross section B-B', but may be modified to other shapes as required.

[0151] Furthermore, the nozzle alignment groove 221 and the alignment protrusion 519 are not limited to being formed in one piece, but may be formed in a plurality to further facilitate the direction alignment of the gas nozzle 200 .

[0152] The nozzle assembly mentioned above is not limited to application to a high-pressure annealing chamber configured with a double chamber, but may be applied to a high-pressure annealing chamber configured with a single or multiple chambers as needed.

[0153] The above description merely exemplifies the technical concept of the present invention, and various modifications and variations may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments described herein are for illustrative purposes only, and are not intended to limit the technical concept of the present invention. The scope of protection of the present invention should be interpreted in accordance with the following claims, and all technical concepts within the scope equivalent thereto should be construed as being within the scope of the present invention. [Explanation of symbols]

[0154] 10 High-pressure annealing equipment 20 Nozzle Assembly 100 chambers 110 Inner Chamber 120 Outer Chamber 130 Chamber support 131 Stationary part 132 Gas supply module insertion hole 200 Gas Nozzle 300 Nozzle support member 310 First support 360 Second support 400 Connecting member 500 Gas Supply Module 510 Supply Module Body 520 Module installation cover 530 Adapter

Claims

1. a chamber providing a process space in which supplied gases react with the substrate; a nozzle assembly for injecting the gas into the process volume of the chamber; and a chamber support on which the chamber is placed, supporting the chamber, and including a support portion that projects from an inner surface thereof and supports at least a portion of the nozzle assembly; The nozzle assembly includes: a gas supply module on which a lower end of a gas nozzle is placed and which supplies gas to the gas nozzle; a gas nozzle for injecting gas into the process space of the chamber; a nozzle support member including a first support member that abuts against and covers a portion of one side surface of the gas nozzle, and a second support member that abuts against and covers a portion of the other side surface of the gas nozzle while facing the first support member, the nozzle support member supporting the gas nozzle in a mounted state on the gas supply module through coupling between the first support member and the second support member; a coupling member for coupling the first support and the second support to each other.

2. The chamber support includes: a gas supply module insertion hole into which the gas supply module can be inserted; The stationary unit is Located at the upper end of the gas supply module insertion hole, The first support is The base is placed on the upper end of the base portion, 2. The high pressure annealing apparatus according to claim 1, wherein a portion of one side of the gas nozzle is in close contact with an inner surface of the gas nozzle, and the gas nozzle is positioned on the gas supply module.

3. The first support and the second support are The ends of the nozzle cover a portion of the gas nozzle, and the ends of the nozzle contact each other. The coupling member is 3. The high-pressure annealing apparatus according to claim 2, wherein the outer surfaces of the first support and the second support are brought into contact with each other and pressurized to fix the gas nozzle.

4. The first support is a flange extending outward at its lower end; and a slot located in the flange, the slot having a major axis extending from the gas supply module insertion hole toward a center of the chamber support; The stationary unit is a hole that is fastened by a fastener in a state corresponding to the slot; 3. The high pressure annealing apparatus according to claim 2, wherein the mounting position of the nozzle assembly is adjusted by changing the position of a fastener fastened on the slot.

5. The gas supply module includes: a supply module body including a nozzle mounting portion on one side of which the gas nozzle is mounted, and a horizontal insertion portion on the other side of which the horizontal insertion portion is inserted into the gas supply module insertion hole; The nozzle mounting portion is a vertical inlet channel formed inside the nozzle mounting portion for allowing gas to flow into the gas nozzle; and 3. The high pressure annealing apparatus according to claim 2, further comprising a mounting groove formed at an upper end of the nozzle mounting portion, the mounting groove being a groove in which a lower end of the gas nozzle is mounted.

6. The coupling member is 2. The high pressure annealing apparatus according to claim 1, further comprising a clip that covers and elastically presses the outer surfaces of the first support and the second support to interconnect the first support and the second support.

7. The coupling member is a clamp covering the outer surfaces of the first support and the second support; and 2. The high pressure annealing apparatus according to claim 1, further comprising a bolt coupled to the clamp to tightly attach the first support and the second support to the gas nozzle.

8. The first support and the second support are an extension portion bent outward from each of the ends; and a fastening hole formed in the extension of the first support body and the extension of the second support body, the fastening hole being formed corresponding to each other; The coupling member is 2. The high pressure annealing apparatus of claim 1, further comprising fasteners coupled to the fastening holes, respectively, to tightly connect the first support body and the second support body to the gas nozzle.

9. The coupling member is a slider having a through-hole into which the first support and the second support are inserted in a state of abutting against each other; 2. The high-pressure annealing apparatus according to claim 1, wherein the slider contacts outer surfaces of the first support and the second support, and the first support and the second support are fixed so as to be in close contact with the nozzle.

10. a first screw line is formed on the outer surface of the first support body and the second support body; A second screw line is formed on the inner surface of the slider, The high pressure annealing apparatus according to claim 9, wherein the first thread and the second thread are coupled together.

11. The mounting groove is a nozzle alignment protrusion formed by protruding upward from a portion of the mounting groove, The gas nozzle is a nozzle alignment groove formed by being recessed inward at a position corresponding to the nozzle alignment protrusion, 6. The high pressure annealing apparatus according to claim 5, wherein the nozzle alignment protrusion is fitted into the nozzle alignment groove to align the directions of the nozzle nozzle nozzles.

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