Automatic exchanging apparatus for optical component, laser processing apparatus, automatic exchanging method for optical component, and manufacturing method for processed product

Abstract

To provide an automatic replacing device for an optical part capable of reducing the weight of a machining head in comparison with a conventional one.SOLUTION: The automatic exchanging device 200 for optical components includes a machining head 1 having a head-side housing side 1a and an optical component provided inside the head-side housing side 1a and guiding a laser beam toward a workpiece, a stocker 2 having a storage side 2a capable of storing a used optical component and an unused optical component and attached to an outer surface of the head-side housing side 2a in a state where the storage side 1a can communicate with the inside of the head-side housing side 1a, and a conveyance unit 3 provided separately from the machining head 1 and the stocker 2 and conveying the optical component between the inside of the head-side housing side 1a and the storage side 2a.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to an automatic optical component exchange device, a laser processing device including this automatic exchange device, a method for automatically exchanging optical components, and a method for manufacturing a workpiece. [Background technology]

[0002] Conventionally, laser processing devices have been known in which protective glass is provided between optical components such as a focusing lens installed inside the processing head and the workpiece to protect the optical components from foreign matter such as fumes and spatters generated during laser processing.

[0003] Although protective glass prevents foreign matter from adhering to optical components, foreign matter will still adhere to the protective glass. If the protective glass becomes dirty due to foreign matter adhering to the protective glass, the transmittance of the laser beam through the protective glass will decrease, causing a decrease in the output of the laser beam and resulting in processing defects. For this reason, the protective glass must be replaced periodically.

[0004] To replace the protective glass, laser processing must be temporarily interrupted. Manually replacing the protective glass requires a significant amount of time, resulting in longer interruptions to laser processing and reduced productivity. Furthermore, to operate a laser processing device 24 hours a day, the protective glass must be replaced even at night. Therefore, laser processing devices equipped with automatic replacement devices that can automatically replace the protective glass have been developed and are now in practical use.

[0005] For example, Patent Document 1 discloses a laser processing device including a first head-side housing in which optical components are disposed, a glass holder that rotates around a rotation axis and to which multiple protective glasses are attached at predetermined intervals, and a second head-side housing in which a cleaning mechanism for cleaning the protective glasses is disposed, the glass holder being configured to be movable between the first head-side housing and the second head-side housing. The first head-side housing, the glass holder, and the second head-side housing form a processing head, and a drive mechanism including a drive source for driving the multiple glasses, the glass holder, and the rotation axis is attached to the processing head. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Patent No. 7126224 Summary of the Invention [Problem to be solved by the invention]

[0007] However, with the technology disclosed in Patent Document 1, the capacity of the drive source is increased to generate the driving force for driving the multiple glass sheets, the glass holder, and the rotation shaft, and a drive mechanism including the drive source is attached to the processing head, which makes the processing head heavy and increases the amount of deviation between the axis of the processing head and the center of gravity of the processing head. As a result, the moment applied to the processing head increases when moving the processing head to perform laser processing, which increases the amount of deflection of the processing head and causes a problem of deviation in the irradiation position of the laser beam on the workpiece.

[0008] This problem is not limited to cases where the protective glass is automatically replaced, but is a problem that commonly applies to cases where optical components other than the protective glass are automatically replaced.

[0009] The present disclosure has been made in view of the above, and aims to provide an automatic optical component exchange device that can reduce the weight of a processing head compared to conventional devices. [Means for solving the problem]

[0010] In order to solve the above-mentioned problems and achieve the object, the present disclosure provides an automatic optical component exchange device comprising a processing head, a stocker, and a transport unit. The processing head has a head-side housing and optical components provided inside the head-side housing and guiding a laser beam toward a workpiece. The stocker has a storage section capable of storing used and unused optical components, and the storage section is attached to the outer surface of the head-side housing in a state in which it can communicate with the interior of the head-side housing. The transport unit is provided separately from the processing head and the stocker, and transports optical components between the interior of the head-side housing and the storage section. [Effects of the Invention]

[0011] The automatic optical component exchange device according to the present disclosure has the advantage of being able to reduce the weight of the processing head compared to conventional devices. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is a perspective view showing a laser processing apparatus according to a first embodiment; [Figure 2] FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1, showing the processing head, the stocker, and the transport unit before the protective glass is replaced in the first embodiment. [Figure 3] FIG. 3 is a cross-sectional view taken along the line III-III in FIG. 2, showing the processing head, the stocker, and the transport unit before the protective glass is replaced in the first embodiment. [Figure 4] FIG. 2 is a diagram showing the processing head, the stocker, and the transport unit when replacing the protective glass in the first embodiment, and corresponds to a cross-sectional view taken along line II-II shown in FIG. [Figure 5] 5 is a diagram showing the processing head, the stocker, and the transport unit when replacing the protective glass in the first embodiment, and corresponds to a cross-sectional view taken along line VV shown in FIG. [Figure 6]FIG. 1 is a diagram for explaining the effect of the automatic optical component exchange device according to the first embodiment. [Figure 7] FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a second storage section. [Figure 8] FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a second storage section. [Figure 9] FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a second storage section. [Figure 10] FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a second storage section. [Figure 11] FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a second storage section. [Figure 12] FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a second storage section. [Figure 13] FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a first storage section. [Figure 14] FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a first storage section. [Figure 15] FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a first storage section. [Figure 16] FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a first storage section. [Figure 17]FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a first storage section. [Figure 18] FIG. 10 is a schematic diagram showing a series of operations for replacing a protective glass by the automatic replacement device according to the first embodiment when storing a used protective glass in a first storage section. [Figure 19] FIG. 10 is a diagram showing the processing head, the stocker, and the transport unit before the protective glass is replaced in the second embodiment, and corresponds to the cross-sectional view taken along the line II-II shown in FIG. [Figure 20] FIG. 10 is a diagram showing a processing head, a stocker, and a rotation mechanism during laser processing in the third embodiment, and corresponds to a cross-sectional view taken along line II-II in FIG. [Figure 21] 1. FIG. 10 is a diagram showing the processing head, the stocker, and the rotation mechanism when replacing the protective glass in the third embodiment, and corresponds to the cross-sectional view taken along the line II-II shown in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0013] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An automatic optical component exchange device, a laser processing device, an automatic optical component exchange method, and a method for manufacturing a workpiece according to embodiments will be described in detail below with reference to the accompanying drawings.

[0014] Embodiment 1 FIG. 1 is a perspective view showing a laser processing apparatus 100 according to a first embodiment. Hereinafter, when describing the directions of each component of the laser processing apparatus 100, the right-handed XYZ coordinate system shown in FIG. 1 will be used. The X-axis, Y-axis, and Z-axis are three axes that are perpendicular to each other. Of each axis, the direction of the arrow is designated as the + direction, and the direction opposite to the arrow is designated as the - direction. The direction along the X-axis (X-axis direction) and the direction along the Y-axis (Y-axis direction) are directions that are included in the horizontal direction. The direction along the Z-axis (Z-axis direction) coincides with the vertical direction. Hereinafter, the direction along the Z-axis may also be referred to as the vertical direction. Furthermore, the + direction of the Z-axis is designated as upward, and the - direction of the Z-axis is designated as downward.

[0015] The laser processing apparatus 100 processes the workpiece 13 by irradiating the workpiece 13 with a laser beam r. Processing includes, for example, cutting, welding, and drilling. The workpiece 13 is, for example, a metal plate or a substrate. The laser processing apparatus 100 includes a processing head 1, a stocker 2, a conveying unit 3, a bed 4, two columns 5, a cross rail 6, a laser oscillator 7, multiple transmission mirrors 8, a high-voltage power supply 9, a cooling unit 10, and a control unit 11.

[0016] The bed 4 is a rectangular parallelepiped member extending in the X-axis and Y-axis directions. A workpiece 13 is placed on the upper surface of the bed 4. Each column 5 is a gate-shaped member placed on the upper surface of the bed 4. The two columns 5 are arranged at a distance from each other in the Y-axis direction. The cross rail 6 is a rectangular prism-shaped member that spans the upper ends of the two columns 5. The cross rail 6 extends in the Y-axis direction. The cross rail 6 is provided so as to be movable in the X-axis direction along the columns 5 by driving a drive mechanism (not shown).

[0017] The laser oscillator 7 is a device that emits a laser beam r. The multiple transmission mirrors 8 are components that reflect the laser beam r emitted from the laser oscillator 7 and guide it to the processing head 1. The high-voltage power supply 9 supplies high-voltage power to the laser oscillator 7. The cooling device 10 is a device that cools the laser oscillator 7 and the processing head 1. The control device 11 is a device that controls the operation of the laser oscillator 7, the operation of the cooling device 10, the movement of the processing head 1, etc.

[0018] The processing head 1 is a member that irradiates a laser beam r toward a workpiece 13. The processing head 1 is attached to a cross rail 6. The processing head 1 is provided so as to be movable in the Y-axis direction and the Z-axis direction along the cross rail 6 by driving a drive mechanism (not shown). The processing head 1 can also move in the X-axis direction as the cross rail 6 moves in the X-axis direction. In other words, the processing head 1 can move along the XYZ coordinate system. The laser processing apparatus 100 performs laser processing by moving the processing head 1 and the workpiece 13 relative to each other. In the example shown in FIG. 1, the position of the workpiece 13 is fixed, and laser processing is performed by moving the processing head 1 along the XYZ coordinate system.

[0019] The stocker 2 is attached to the outer surface of the processing head 1 and is disposed adjacent to the processing head 1 in the X-axis direction. The stocker 2 moves together with the processing head 1 along the XYZ coordinate system.

[0020] The transport unit 3 is arranged away from the processing head 1 and the stocker 2 in the X-axis direction. The transport unit 3 is arranged outside the bed 4. The processing head 1 and the stocker 2 can move towards and away from the transport unit 3. The automatic optical component exchange device 200 includes the processing head 1, the stocker 2, and the transport unit 3. Hereinafter, the automatic optical component exchange device 200 may also be simply referred to as the automatic exchange device 200. The automatic exchange device 200 is a device for automatically exchanging optical components. When exchanging optical components, the processing head 1, the stocker 2, and the transport unit 3 are arranged close to each other in the X-axis direction. The processing head 1, the stocker 2, and the transport unit 3 are each equipped with a dustproof means to prevent foreign matter such as dust from entering inside.

[0021] Next, with reference to FIGS. 2 to 5, the machining head 1, the stocker 2, and the transport unit 3 of the automatic exchanger 200 will be described in detail. FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1, showing the machining head 1, the stocker 2, and the transport unit 3 before the protective glass 12 is replaced in the first embodiment. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 2, showing the machining head 1, the stocker 2, and the transport unit 3 before the protective glass 12 is replaced in the first embodiment. FIG. 4 is a cross-sectional view taken along line II-II in FIG. 1 showing the machining head 1, the stocker 2, and the transport unit 3 when the protective glass 12 is replaced in the first embodiment, and corresponds to the cross-sectional view taken along line VV in FIG. 4. In this embodiment, the protective glass 12 is exemplified as an optical component that is automatically replaced by the automatic exchanger 200.

[0022] 2, the processing head 1 has a head-side housing 1a and a condenser lens 1b. In this embodiment, the axis C of the processing head 1 is parallel to the vertical direction.

[0023] The head-side housing 1a is a generally cylindrical member with openings at both ends in the Z-axis direction. The head-side housing 1a is provided with a plurality of first openings 1c, a plurality of first retraction holes 1d, a plurality of first opening / closing mechanisms 1e, a plurality of glass support portions 1f, a plurality of pads 1g, a plurality of guides 1h (see FIG. 3), and a lens support portion 1i.

[0024] Each of the first openings 1c penetrates the head-side housing 1a from its inner surface to its outer surface at a position opposite each of the storage sections 2a (described later). The first openings 1c are arranged at intervals in the Z-axis direction.

[0025] Each of the multiple first evacuation holes 1d is a bottomed hole recessed from the inner surface of the head-side housing 1a toward the outer surface. Each first evacuation hole 1d opens to the inner surface of the head-side housing 1a but does not open to the outer surface of the head-side housing 1a. Each first evacuation hole 1d is provided above or below the first opening 1c. Each first opening 1c is connected to one first evacuation hole 1d.

[0026] Each of the multiple first opening / closing mechanisms 1e opens and closes a corresponding one of the multiple first openings 1c. As shown in FIG. 4, when the first openings 1c are opened by the first opening / closing mechanism 1e, communication between the interior of the head-side housing 1a and the interior of the storage section 2a is permitted. When the first openings 1c are opened by the first opening / closing mechanism 1e, the first opening / closing mechanism 1e is positioned within the first evacuation hole 1d. On the other hand, as shown in FIG. 2, when the first openings 1c are closed by the first opening / closing mechanism 1e, communication between the interior of the head-side housing 1a and the interior of the storage section 2a is blocked. The first opening / closing mechanism 1e may be any mechanism capable of opening and closing the first openings 1c, and may be appropriately selected from known opening / closing mechanisms. In the example shown in FIGS. 2 and 4, the first opening / closing mechanism 1e is a sliding door that slides in the Z-axis direction. However, it may also be a sliding door that slides in the Y-axis direction or a hinged door that rotates 90 degrees around a horizontal axis extending in the Y-axis direction.

[0027] Each of the multiple glass support parts 1f supports the protective glass 12 arranged inside the head-side housing 1a from below. The multiple glass support parts 1f are arranged at intervals from one another in the Z-axis direction. Each glass support part 1f includes an O-ring 1j that comes into contact with the underside of the protective glass 12.

[0028] Each of the multiple pads 1g is a member that abuts against the outer circumferential surface of the protective glass 12 arranged inside the head-side housing 1a. Each pad 1g abuts against the outer circumferential surface of the protective glass 12 on the side opposite to the first opening 1c in the X-axis direction. The multiple pads 1g are arranged at intervals from one another in the Z-axis direction.

[0029] As shown in FIG. 3, each of the multiple guides 1h is a member that guides the movement of the protective glass 12 inside the head-side housing 1a and positions the protective glass 12 inside the head-side housing 1a. The guides 1h are configured in pairs. Each set of guides 1h is arranged at an interval in the Y-axis direction. Each set of guides 1h supports flanges (not shown) provided at both ends of the protective glass 12 in the Y-axis direction. Although not shown, the two sets of guides 1h are arranged at an interval in the Z-axis direction.

[0030] As shown in Fig. 2, the lens support 1i supports the condenser lens 1b arranged inside the head-side housing 1a. The lens support 1i is provided on the inner surface of the head-side housing 1a and supports the outer peripheral surface of the condenser lens 1b. The lens support 1i is arranged above each glass support 1f and each backing 1g. The number of first openings 1c, first evacuation holes 1d, first opening / closing mechanisms 1e, glass support 1f, backing 1g, and guides 1h may be changed as appropriate to match the number of storage sections 2a.

[0031] The condenser lens 1b is an optical component that is provided inside the head-side housing 1a and that condenses the laser beam r.

[0032] The protective glass 12 is a member provided between the condenser lens 1b and the workpiece 13 to protect the condenser lens 1b. The protective glass 12 serves to prevent foreign matter such as spatter and fumes generated during laser processing from adhering to the condenser lens 1b. The protective glass 12 has a glass body 12a and a glass frame 12b that holds the periphery of the glass body 12a. The glass body 12a has an optical surface 12c exposed from the glass frame 12b. There is one optical surface 12c on the front and one on the back of the glass body 12a.

[0033] Glass frame 12b is composed of two divided pieces obtained by dividing glass main body 12a in the thickness direction, and the two divided pieces sandwich and hold the periphery of glass main body 12a. Glass frame 12b is made of a metal such as aluminum. As shown in Figure 3, a rectangular parallelepiped-shaped held portion 12d is provided on the surface of glass frame 12b facing conveying unit 3.

[0034] As shown in FIG. 2, the stocker 2 is a box-shaped member. The stocker 2 has multiple storage sections 2a that can store used protective glasses 12 and unused protective glasses 12. Hereinafter, the used protective glasses 12 may be referred to as protective glasses 12A, and the unused protective glasses 12 may be referred to as protective glasses 12B. The stocker 2 is attached to the outer surface of the head-side housing 1a with each storage section 2a being able to communicate with the interior of the head-side housing 1a. The interior of the stocker 2 is divided into two sections in the Z-axis direction by a partition member 2b. The partition member 2b divides the interior of the stocker 2 into two storage sections 2a. The multiple storage sections 2a are independent spaces. The number of storage sections 2a may be changed as appropriate. By opening and closing each first opening / closing mechanism 1e, each storage section 2a can be connected to the interior of the head-side housing 1a and can be isolated from the interior of the head-side housing 1a.

[0035] When none of the protective glasses 12 have been replaced, as shown in FIG. 2, at least one storage section 2a is empty, and the other storage sections 2a store unused protective glasses 12B. On the other hand, when the protective glasses 12 have already been replaced, at least one storage section 2a stores used protective glasses 12A, or each storage section 2a stores used protective glasses 12A. The optical surface 12c of the protective glasses 12 stored in the storage section 2a is perpendicular to the axis C of the processing head 1. The optical surface 12c of the protective glasses 12 arranged inside the head-side housing 1a is also perpendicular to the axis C of the processing head 1. In other words, the protective glasses 12 are arranged in the same orientation inside the head-side housing 1a and in the storage section 2a. A plurality of elastic bodies 2c are provided on the inner surface of the wall surrounding the storage section 2a to support the protective glasses 12 from both the top and bottom. The elastic bodies 2c are, for example, rubber.

[0036] A side wall 2d of the stocker 2 adjacent to the machining head 1 is provided with a second opening 2f at a position corresponding to each storage section 2a. Each second opening 2f penetrates from the inner surface to the outer surface of the side wall 2d. Each second opening 2f connects the storage section 2a to the first opening 1c. The protective glass 12 is transported between the interior of the head-side housing 1a and the storage section 2a through the first opening 1c and the second opening 2f. A side wall 2e of the stocker 2 facing the transport section 3 is provided with a third opening 2g at a position corresponding to each storage section 2a. The side wall 2e is a wall located opposite the side wall 2d in the X-axis direction. Each third opening 2g penetrates from the inner surface to the outer surface of the side wall 2e. Each third opening 2g connects the exterior and interior of the storage section 2a. A second opening 2f and a third opening 2g are provided for each storage section 2a in the stocker 2. Both ends of the storage section 2a in the X-axis direction communicate with the outside of the storage section 2a through the second opening 2f and the third opening 2g.

[0037] The stocker 2 is provided with multiple second opening / closing mechanisms 2h. Each of the multiple second opening / closing mechanisms 2h opens and closes a corresponding one of the multiple third openings 2g. As shown in FIG. 4, when the second opening / closing mechanism 2h opens the third opening 2g, communication between the inside and outside of the storage section 2a is permitted. When the second opening / closing mechanism 2h opens the third opening 2g, the second opening / closing mechanism 2h rotates counterclockwise in FIG. 4 and is positioned outside the stocker 2. On the other hand, as shown in FIG. 2, when the second opening / closing mechanism 2h closes the third opening 2g, communication between the inside and outside of the storage section 2a is blocked. The second opening / closing mechanism 2h may be any mechanism capable of opening and closing the third opening 2g, and may be appropriately selected from known opening / closing mechanisms. In the example shown in FIGS. 2 and 4, the second opening / closing mechanism 2h is a hinged door that rotates 90 degrees around a horizontal axis extending in the Y-axis direction, but it may also be a sliding door that slides in the Z-axis direction.

[0038] The transport unit 3 is provided separately from the processing head 1 and the stocker 2, and transports the protective glass 12 between the inside of the head-side housing 1a and the storage unit 2a. The transport unit 3 has a transport-unit-side housing 3a, a first drive stage unit 3b, a second drive stage unit 3c, and a holder 3d.

[0039] The transport unit side housing 3a is a box-shaped member. The transport unit side housing 3a is placed on a base 3e. A first drive stage unit 3b and a second drive stage unit 3c are housed inside the transport unit side housing 3a. Except when the protective glass 12 is being replaced, a holder 3d is also housed inside the transport unit side housing 3a. A side wall 3f of the transport unit side housing 3a facing the stocker 2 is provided with a plurality of fourth openings 3g, a plurality of second retraction holes 3h, and a plurality of third opening / closing mechanisms 3i.

[0040] Each of the multiple fourth openings 3g penetrates from the inner surface to the outer surface of the side wall 3f at a position facing each of the multiple storage sections 2a. The multiple fourth openings 3g are arranged at intervals in the Z-axis direction. When replacing the protective glass 12, the first opening 1c, the second opening 2f, the third opening 2g, and the fourth opening 3g are aligned in the Z-axis direction and the Y-axis direction.

[0041] Each of the second evacuation holes 3h is a bottomed hole recessed from the inner surface of the side wall 3f toward the outer surface. Each second evacuation hole 3h opens to the inner surface of the side wall 3f but does not open to the outer surface of the side wall 3f. Each second evacuation hole 3h is located above or below the fourth opening 3g. Each fourth opening 3g is connected to one second evacuation hole 3h.

[0042] Each of the multiple third opening / closing mechanisms 3i opens and closes each of the multiple fourth openings 3g. As shown in FIG. 4, when the third opening / closing mechanism 3i opens the fourth opening 3g, communication between the inside and outside of the transport unit-side housing 3a is permitted. When the third opening / closing mechanism 3i opens the fourth opening 3g, the third opening / closing mechanism 3i is positioned within the second evacuation hole 3h. On the other hand, as shown in FIG. 2, when the third opening / closing mechanism 3i closes the fourth opening 3g, communication between the inside and outside of the transport unit-side housing 3a is blocked. The third opening / closing mechanism 3i may be any mechanism capable of opening and closing the fourth opening 3g, and may be appropriately selected from known opening / closing mechanisms. In the example shown in FIGS. 2 and 4, the third opening / closing mechanism 3i is a sliding door that slides in the Z-axis direction, but it may also be a hinged door that rotates 90 degrees around a horizontal axis extending in the Y-axis direction.

[0043] The first drive stage unit 3b moves the holder 3d in the Z-axis direction. By driving the first drive stage unit 3b, the position of the holder 3d in the Z-axis direction can be adjusted. The first drive stage unit 3b is configured to include a drive source such as an air cylinder or a motor.

[0044] The second drive stage unit 3c moves the holding unit 3d in a direction perpendicular to the axis C of the processing head 1 (the X-axis direction in this embodiment). By driving the second drive stage unit 3c, the position of the holding unit 3d in the direction perpendicular to the axis C of the processing head 1 can be adjusted. The second drive stage unit 3c is configured to include a drive source such as an air cylinder or a motor.

[0045] As shown in FIG. 4, the holder 3d holds the protective glass 12. In this embodiment, the holder 3d is an air hand that grips the protective glass 12 and includes an arm 3j and a hand 3k. The arm 3j extends in the X-axis direction. The hand 3k is attached to the tip of the arm 3j. As shown in FIG. 5, the hand 3k grips the held portion 12d of the glass frame 12b. The arm 3j and the hand 3k can be moved in a direction perpendicular to the axis C of the processing head 1 by the second drive stage 3c.

[0046] As shown in FIG. 4, when replacing the protective glass 12, the arm 3j and the hand 3k move to the inside of the head-side housing 1a through the fourth opening 3g, the third opening 2g, the storage section 2a, the second opening 2f, and the first opening 1c. The arm 3j and the hand 3k can move back and forth between the inside of the head-side housing 1a and the inside of the transport unit-side housing 3a through the fourth opening 3g, the third opening 2g, the storage section 2a, the second opening 2f, and the first opening 1c. Although not shown, the transport unit 3 is provided with a guide for guiding the holder 3d. In this embodiment, the protective glass 12 can be transported between the inside of the head-side housing 1a and the storage section 2a individually. The first opening / closing mechanism 1e and the second opening / closing mechanism 2h open and close using the driving force of a driving source located in a location other than the processing head 1 and the stocker 2. The first opening / closing mechanism 1e is small and lightweight, allowing for a small drive source capacity. The processing head 1 does not need to be provided with an additional drive source for the first opening / closing mechanism 1e; the first opening / closing mechanism 1e may be driven by an air cylinder or the like that uses the purge gas flowing into the processing head 1 as a drive source. For example, the first opening / closing mechanism 1e and the second opening / closing mechanism 2h are opened and closed using the drive force of the drive source of the transport unit 3. The third opening / closing mechanism 3i is also opened and closed using the drive force of the drive source of the transport unit 3.

[0047] Next, the effects of this embodiment will be described.

[0048] First, referring to FIG. 6, the moment acting on the machining head 1 will be described. FIG. 6 is a diagram illustrating the effect of the automatic optical component exchange device 200 according to the first embodiment. In FIG. 6, the machining head 1 and the stocker 2 before movement are illustrated on the right side of the page, and the machining head 1 and the stocker 2 after movement are illustrated on the left side of the page. The symbol P in FIG. 6 schematically represents the mounting position P of the machining head 1 relative to the cross rail 6. The symbol G1 in FIG. 6 schematically represents the center of gravity G1 of the machining head 1 when the stocker 2 is not attached. The symbol G2 in FIG. 6 schematically represents the center of gravity G2 of the machining head 1 when the stocker 2 is attached. The symbol Rx in FIG. 6 represents the amount of deviation Rx between the axis C of the machining head 1 and the center of gravity G2 in the X-axis direction. The symbol Rz in FIG. 6 represents the amount of deviation Rz between the axis C of the machining head 1 and the center of gravity G2 in the Z-axis direction. The symbol ax in Fig. 6 represents the acceleration ax of the processing head 1 in the X-axis direction. The symbol az in Fig. 6 represents the acceleration az of the processing head 1 in the Z-axis direction. The double-headed arrow in Fig. 6 represents the moment obtained by combining the moment around the X-axis and the moment around the Z-axis. Although not shown, a moment around the Y-axis also occurs.

[0049] Generally, the lighter the mass of the processing head 1, the smaller the moment around each axis applied to the processing head 1. Furthermore, for each of the X-axis, Y-axis, and Z-axis, the closer the distance between the axis C of the processing head 1 and the center of gravity positions G1, G2, the smaller the moment around each axis applied to the processing head 1. Furthermore, the closer the distance between the mounting position P and the center of gravity positions G1, G2, the smaller the moment around each axis applied to the processing head 1.

[0050] Here, if the moment about the X axis is ΔMx and the mass of the processing head 1 is m, the moment about the X axis ΔMx can be expressed by the following formula (1). ΔMx=m×az×Rx (1)

[0051] Furthermore, if the moment around the Z axis is ΔMz, the moment around the Z axis ΔMz can be expressed by the following formula (2). ΔMz=m×ax×Rz (2)

[0052] As disclosed in Patent Document 1, when a drive mechanism including a drive source for driving the multiple glass sheets, the glass holder, and the rotation axis is attached to the processing head, the processing head becomes correspondingly heavy (the mass m of the processing head increases), and the amount of deviation between the axis center of the processing head and the center of gravity of the processing head increases. As a result, the moment around each axis applied to the processing head increases when the processing head is moved to perform laser processing, which increases the amount of deflection of the processing head relative to each axis, resulting in a problem of deviation of the irradiation position of the laser beam on the workpiece.

[0053] In this regard, in this embodiment, as shown in FIG. 2, the automatic changer 200 includes a transport unit 3 that is provided separately from the machining head 1 and the stocker 2, thereby enabling the machining head 1 to be made lighter than in the conventional system. Therefore, the amount of deviation between the axis C of the machining head 1 and the center of gravity G2 of the machining head 1 shown in FIG. 6 is reduced. This reduces the moment around each axis applied to the machining head 1 when the machining head 1 is moved to perform laser machining, thereby reducing the amount of deflection of the machining head 1 relative to each axis and preventing deviation of the irradiation position of the laser beam r on the workpiece 13 shown in FIG. 1. This allows for higher precision in positioning the laser beam r, improved acceleration resistance, faster movement of the machining head 1, and energy savings.

[0054] Next, with reference to Figures 1, 4, and 7 to 18, the operation of automatically replacing the protective glass 12 by the automatic exchanger 200 of this embodiment (automatic optical component replacement method), the method for manufacturing the workpiece, and the effects thereof will be described. Figures 7 to 12 are schematic diagrams showing a series of operations for replacing the protective glass 12 by the automatic exchanger 200 of this embodiment when a used protective glass 12A is stored in the second-tier storage section 2a. Figures 13 to 18 are schematic diagrams showing a series of operations for replacing the protective glass 12 by the automatic exchanger 200 of this embodiment when a used protective glass 12A is stored in the first-tier storage section 2a. Here, the first tier and the second tier refer to the tiers of the storage section 2a counted from top to bottom on the paper.

[0055] First, referring to Figures 4 and 7 to 12, we will explain the case where a used protective glass 12A is stored in the second storage section 2a and an unused protective glass 12B stored in the first storage section 2a is placed in the head-side housing 1a.

[0056] As shown in FIG. 7, during laser processing, foreign matter such as fumes adhere to the underside of the protective glass 12, resulting in contamination 14. During laser processing, all first opening / closing mechanisms 1e are closed, blocking communication between the interior of the head-side housing 1a and the interior of each storage section 2a. As contamination 14 on the protective glass 12 increases, the transmittance of the protective glass 12 decreases. A sensor (not shown) is installed in the head-side housing 1a to detect the transmittance of the protective glass 12. When the transmittance of the protective glass 12 falls below a preset threshold, laser processing stops and the system switches to an automatic replacement operation for the protective glass 12. At this time, purge gas 15 is supplied from top to bottom into the head-side housing 1a above the protective glass 12. The purge gas 15 swirls within the head-side housing 1a, blocked by the protective glass 12.

[0057] 8, the first opening / closing mechanism 1e of the second stage is opened to allow communication between the inside of the head-side housing 1a and the second-stage storage section 2a. At this time, part of the purge gas 15 flows into the second-stage storage section 2a.

[0058] Next, as shown in FIG. 9, a first transport step is performed in which the transport unit 3 (see FIG. 4) transports the used protective glass 12A from inside the head-side housing 1a to the second-tier storage unit 2a. Specifically, as shown in FIG. 4, the first drive stage unit 3b is driven to move the holder 3d in the positive direction of the Z axis to match the positions of the used protective glass 12A and the second-tier storage unit 2a in the Z axis direction, and then the second drive stage unit 3c is driven to move the holder 3d in the negative direction of the X axis to inside the head-side housing 1a. Next, the used protective glass 12A is gripped by the holder 3d inside the head-side housing 1a. Next, the second drive stage unit 3c is driven to move the holder 3d in the positive direction of the X axis, thereby moving the used protective glass 12A to the second-tier storage unit 2a. Then, the used protective glass 12A is released from the holder 3d and transferred to the second-tier storage unit 2a. As a result, the used protective glass 12A is stored in the second-stage storage section 2a. Subsequently, the second drive stage section 3c is driven to move the holder 3d in the positive X-axis direction to the interior of the transfer section-side housing 3a and return it to its initial position. At this time, as shown in FIG. 9, although some of the purge gas 15 flows from top to bottom while bypassing the second-stage storage section 2a, most of the purge gas 15 flows linearly from top to bottom because the used protective glass 12A is no longer inside the head-side housing 1a. This allows the purge gas 15 to push out foreign matter accumulated inside the head-side housing 1a to the outside of the head-side housing 1a, thereby cleaning the interior of the head-side housing 1a. In other words, flushing can be performed.

[0059] Next, as shown in FIG. 10, the second-stage first opening / closing mechanism 1e is closed to block communication between the interior of the head-side housing 1a and the second-stage storage section 2a. Meanwhile, the first-stage first opening / closing mechanism 1e is opened to allow communication between the interior of the head-side housing 1a and the first-stage storage section 2a. At this time, although some of the purge gas 15 flows from top to bottom while bypassing the first-stage storage section 2a, most of the purge gas 15 flows linearly from top to bottom. This allows the purge gas 15 to continue pushing out foreign matter accumulated inside the head-side housing 1a to the outside of the head-side housing 1a, thereby cleaning the inside of the head-side housing 1a.

[0060] Next, as shown in FIG. 11, a second transport step is performed in which the transport unit 3 (see FIG. 4) transports the unused protective glass 12B from the first-stage storage unit 2a to the inside of the head-side housing 1a. Specifically, the first drive stage unit 3b shown in FIG. 4 is driven to move the holder 3d in the positive direction of the Z axis to match the position of the first-stage storage unit 2a in the Z axis direction, and then the second drive stage unit 3c is driven to move the holder 3d in the negative direction of the X axis to the inside of the first-stage storage unit 2a. Next, the unused protective glass 12B is gripped by the holder 3d inside the first-stage storage unit 2a. Next, the second drive stage unit 3c is driven to move the holder 3d in the negative direction of the X axis, thereby transporting the unused protective glass 12B to the head-side housing 1a. Then, with the unused protective glass 12B positioned on the optical axis of the condenser lens 1b, the unused protective glass 12B is released from the holder 3d and transferred to the head-side housing 1a. This positions the unused protective glass 12B in the appropriate location inside the head-side housing 1a. Next, the second drive stage 3c is driven to move the holder 3d in the positive X-axis direction to the inside of the transfer unit-side housing 3a and return it to its initial position. At this time, as shown in FIG. 11, the purge gas 15 is obstructed by the unused protective glass 12B and swirls inside the head-side housing 1a. Furthermore, a portion of the purge gas 15 flows into the first-stage storage section 2a.

[0061] 12, the first opening / closing mechanism 1e on the first stage is closed to block communication between the inside of the head-side housing 1a and the first-stage storage section 2a. As a result, all of the first opening / closing mechanisms 1e are closed. At this time, the purge gas 15 swirls inside the head-side housing 1a, hindered by the unused protective glass 12B.

[0062] Next, referring to Figures 4 and 13 to 18, we will explain the case where a used protective glass 12A is stored in the first storage section 2a and an unused protective glass 12B stored in the second storage section 2a is placed in the head side housing 1a.

[0063] As shown in FIG. 13, when laser processing is performed, foreign matter such as fumes adheres to the underside of the protective glass 12, resulting in contamination 14. During laser processing, all first opening / closing mechanisms 1e are closed, blocking communication between the interior of the head-side housing 1a and the interior of each storage section 2a. When the transmittance of the protective glass 12 falls below a preset threshold, laser processing stops and the system switches to an operation to automatically replace the protective glass 12. At this time, purge gas 15 is supplied from top to bottom into the head-side housing 1a above the protective glass 12. The purge gas 15 swirls inside the head-side housing 1a, blocked by the protective glass 12.

[0064] 14, the first opening / closing mechanism 1e of the first stage is opened to allow communication between the inside of the head-side housing 1a and the first-stage storage section 2a. At this time, part of the purge gas 15 flows into the first-stage storage section 2a.

[0065] Next, as shown in FIG. 15, a first transport step is performed in which the transport unit 3 (see FIG. 4) transports the used protective glass 12A from inside the head-side housing 1a to the first-tier storage unit 2a. Specifically, the first drive stage unit 3b (see FIG. 4) is driven to move the holder 3d (see FIG. 4) in the positive direction of the Z-axis to match the positions of the used protective glass 12A and the first-tier storage unit 2a in the Z-axis direction shown in FIG. 14, and then the second drive stage unit 3c (see FIG. 4) is driven to move the holder 3d in the negative direction of the X-axis to inside the head-side housing 1a. Next, the used protective glass 12A is gripped by the holder 3d inside the head-side housing 1a. Next, the second drive stage unit 3c is driven to move the holder 3d in the positive direction of the X-axis, thereby moving the used protective glass 12A to the first-tier storage unit 2a as shown in FIG. 15. Then, the used protective glass 12A is released from the holder 3d and transferred to the first-stage storage section 2a. As a result, the used protective glass 12A is stored in the first-stage storage section 2a. Next, the second drive stage section 3c is driven to move the holder 3d in the positive direction of the X-axis to the inside of the transfer section side housing 3a and return it to its initial position. At this time, although some of the purge gas 15 flows from top to bottom while bypassing the first-stage storage section 2a, since the used protective glass 12A is no longer inside the head side housing 1a, most of the purge gas 15 flows linearly from top to bottom. As a result, foreign matter accumulated inside the head side housing 1a can be pushed out of the head side housing 1a by the purge gas 15, thereby cleaning the inside of the head side housing 1a.

[0066] Next, as shown in FIG. 16, the first opening / closing mechanism 1e of the first stage is closed to block communication between the interior of the head-side housing 1a and the first-stage storage section 2a. Meanwhile, the first opening / closing mechanism 1e of the second stage is opened to allow communication between the interior of the head-side housing 1a and the second-stage storage section 2a. At this time, although some of the purge gas 15 flows from top to bottom while bypassing the second-stage storage section 2a, most of the purge gas 15 flows linearly from top to bottom. This allows the purge gas 15 to continue pushing out foreign matter accumulated inside the head-side housing 1a to the outside of the head-side housing 1a, thereby cleaning the inside of the head-side housing 1a.

[0067] Next, as shown in FIG. 17, a second transport step is performed in which the transport unit 3 (see FIG. 4) transports the unused protective glass 12B from the second-stage storage unit 2a to the inside of the head-side housing 1a. Specifically, the first drive stage unit 3b (see FIG. 4) is driven to move the holder 3d (see FIG. 4) in the positive direction of the Z axis to match the position of the second-stage storage unit 2a in the Z axis direction, and then the second drive stage unit 3c (see FIG. 4) is driven to move the holder 3d in the negative direction of the X axis to the inside of the second-stage storage unit 2a. Next, the unused protective glass 12B (see FIG. 16) is gripped by the holder 3d inside the second-stage storage unit 2a. Next, the second drive stage unit 3c is driven to move the holder 3d in the negative direction of the X axis, thereby transporting the unused protective glass 12B to the head-side housing 1a as shown in FIG. 17. Then, with the unused protective glass 12B positioned on the optical axis of the condenser lens 1b (see FIG. 4), the unused protective glass 12B is released from the holder 3d and handed over to the head-side housing 1a. This positions the unused protective glass 12B in an appropriate position inside the head-side housing 1a. Next, the second drive stage unit 3c is driven to move the holder 3d in the positive direction of the X-axis to the inside of the transfer unit-side housing 3a and return it to its initial position. At this time, the purge gas 15 is obstructed by the unused protective glass 12B and swirls inside the head-side housing 1a. Also, part of the purge gas 15 flows into the second-stage storage unit 2a.

[0068] 18, the second-stage first opening / closing mechanism 1e is closed to block communication between the interior of the head-side housing 1a and the second-stage storage section 2a. As a result, all of the first opening / closing mechanisms 1e are closed. At this time, the purge gas 15 swirls inside the head-side housing 1a, hindered by the unused protective glass 12B.

[0069] Next, a method for manufacturing a workpiece will be described with reference to Figures 1 and 4. The method for manufacturing a workpiece includes a replacement step and a processing step. The replacement step is a step of automatically replacing the protective glass 12 shown in Figure 4 by the above-mentioned automatic optical component replacement method. The processing step is a step of processing the workpiece 13 by irradiating the workpiece 13 with a laser beam r shown in Figure 1 through the automatically replaced protective glass 12. By performing the above steps, the workpiece is manufactured.

[0070] In this embodiment, as shown in FIGS. 2 and 4, the stocker 2 has multiple storage sections 2a, which are independent spaces. The head-side housing 1a also has multiple first openings 1c penetrating from the inner surface to the outer surface of the head-side housing 1a at positions facing the multiple storage sections 2a, and multiple first opening / closing mechanisms 1e for opening and closing the multiple first openings 1c. With this configuration, as shown in FIGS. 7 to 18, when replacing or storing the protective glass 12, the used protective glass 12A and the unused protective glass 12B are not placed in the same space. This makes it difficult for foreign matter adhering to the used protective glass 12A to adhere to the unused protective glass 12B. In other words, the adhesion of foreign matter to the unused protective glass 12B can be suppressed. Therefore, the frequency of replacing the protective glass 12 is reduced, which reduces the number of interruptions to laser processing and improves the productivity of the workpiece 13. Furthermore, with the above configuration, as shown in FIGS. 9, 10, 15, and 16, all of the protective glass 12 can be evacuated from the interior of the head-side housing 1a to each storage section 2a, and the first opening / closing mechanisms 1e can block communication between the interior of the head-side housing 1a and each storage section 2a. This allows for cleaning of the interior of the head-side housing 1a by pushing foreign matter accumulated inside the head-side housing 1a out of the head-side housing 1a with purge gas 15 when replacing the protective glass 12. This further reduces the adhesion of foreign matter to the protective glass 12B before use. Therefore, the frequency with which the protective glass 12 needs to be replaced is further reduced, further reducing the number of interruptions to laser processing, further improving the productivity of the workpiece 13.

[0071] 2 and 4, in this embodiment, the protective glass 12 is arranged in the same orientation inside the head-side housing 1a and in the storage section 2a. With this configuration, there is no need to change the orientation (posture) of the protective glass 12 when replacing the protective glass 12, which makes it easier to replace the protective glass 12 and simplifies the structure of the automatic replacement device 200.

[0072] Next, a modification of this embodiment will be described.

[0073] 4 is not limited to the protective glass 12, but may be any optical component disposed inside the head-side housing 1a. The optical component automatically replaced by the automatic exchanger 200 may be, for example, a lens such as the condenser lens 1b, a diffraction grating, a filter, or a mirror.

[0074] 2 and 4, the axis C of the processing head 1 is parallel to the vertical direction, but it may be inclined relative to the vertical direction. In this configuration, the orientations of the stocker 2 and the transport unit 3 are also changed appropriately according to the inclination of the processing head 1.

[0075] 2 and 4, in this embodiment, the stocker 2 is disposed adjacent to the processing head 1 in the X-axis direction, but it need only be disposed in a direction perpendicular to the axis C of the processing head 1. The stocker 2 may also be disposed adjacent to the processing head 1 in the Y-axis direction, for example. In this configuration, the positions of the column 5 and the cross rail 6 shown in FIG. 1 are changed, and the transport unit 3 is disposed away from the processing head 1 and the stocker 2 in the Y-axis direction.

[0076] In this embodiment, the holder 3d is an air hand, but is not particularly limited to this as long as it is capable of holding the protective glass 12. The holder 3d may be, for example, a hole gripper, an electromagnet, or a universal socket.

[0077] Embodiment 2 Next, an automatic exchanger 200A and a laser processing apparatus 100A according to a second embodiment will be described with reference to Fig. 19. Fig. 19 is a diagram showing the processing head 1, the stocker 2, and the transport unit 3 before replacing the protective glass 12 in the second embodiment, and corresponds to a cross-sectional view along line II-II shown in Fig. 1. This embodiment differs from the first embodiment described above in that the stocker 2 is configured to be movable. In the second embodiment, parts that overlap with those in the first embodiment described above will be assigned the same reference numerals and will not be described again.

[0078] 19, the head-side housing 1a is provided with one each of a first opening 1c, a first retraction hole 1d, a first opening / closing mechanism 1e, a glass support portion 1f, and a backing material 1g. Although not shown, the head-side housing 1a is also provided with a set of guides 1h.

[0079] The stocker 2 is movable in the Z-axis direction along the outer surface of the head-side housing 1a and can be positioned so that each storage section 2a faces the first opening 1c. The laser processing apparatus 100A includes a movement mechanism 16 that moves and positions the stocker 2. Although not shown, the movement mechanism 16 includes, for example, two guides that guide the movement of the stocker 2 in the Z-axis direction and multiple pneumatic positioning pins that position the stocker 2 in the Z-axis direction. The entire movement mechanism 16 is covered with an expandable bellows or the like, providing a dustproofing means to prevent the intrusion of foreign matter such as dust into the stocker 2. The movement mechanism 16 moves the stocker 2 using the driving force of a drive source located at a location other than the processing head 1 and the stocker 2. The movement mechanism 16 moves the stocker 2 using, for example, the driving force of the drive source of the transport unit 3. In this embodiment, the transport unit 3 does not include a first drive stage unit 3b.

[0080] 19, when collecting a used protective glass 12A, the stocker 2 is moved and positioned to a position where the empty second-tier storage section 2a and the first opening 1c face each other, and the used protective glass 12A can be transported from the inside of the head-side housing 1a to the second-tier storage section 2a by the transport unit 3. On the other hand, when placing an unused protective glass 12B, the stocker 2 is moved and positioned to a position where the first-tier storage section 2a and the first opening 1c face each other, and the transport unit 3 can transport the unused protective glass 12B from the first-tier storage section 2a to the inside of the head-side housing 1a.

[0081] Next, the effects of this embodiment will be described.

[0082] In this embodiment, the stocker 2 has multiple storage sections 2a, which are independent spaces. The head-side housing 1a is provided with a single first opening 1c that penetrates from the inner surface to the outer surface of the head-side housing 1a. The stocker 2 is configured to be movable along the outer surface of the head-side housing 1a, and each storage section 2a can be positioned to face the first opening 1c. This configuration allows multiple protective glasses 12 to enter and exit the head-side housing 1a through the common first opening 1c and be positioned inside the head-side housing 1a via the common glass support section 1f, pad 1g, and guide 1h. This simplifies the structure of the head-side housing 1a and reduces the installation space for the protective glasses 12 inside the head-side housing 1a. Furthermore, the above configuration allows the installation space for the protective glasses 12 inside the head-side housing 1a to be unified, eliminating the need to adjust the position of the holder 3d in the Z-axis direction to fit the installation space for the protective glasses 12. This allows the first drive stage part 3b of the transport part 3 to be omitted.

[0083] In this embodiment, the head-side housing 1a is provided with a single first opening / closing mechanism 1e that opens and closes the first opening 1c. With this configuration, when replacing the protective glass 12, foreign matter accumulated inside the head-side housing 1a can be pushed out of the head-side housing 1a by the purge gas 15, allowing the interior of the head-side housing 1a to be cleaned, thereby preventing foreign matter from adhering to the protective glass 12B before use. Therefore, the frequency with which the protective glass 12 needs to be replaced is reduced, which in turn reduces the number of interruptions to laser processing and improves the productivity of the workpiece 13.

[0084] Embodiment 3 Next, an automatic exchanger 200B and a laser processing apparatus 100B according to a third embodiment will be described with reference to FIGS. 20 and 21. FIG. 20 shows the processing head 1, the stocker 2, and the rotation mechanism 17 during laser processing in the third embodiment, and corresponds to the cross-sectional view along line II-II shown in FIG. 1. FIG. 21 shows the processing head 1, the stocker 2, and the rotation mechanism 17 during replacement of the protective glass 12 in the third embodiment, and corresponds to the cross-sectional view along line II-II shown in FIG. 1. This embodiment differs from the first and second embodiments in that the stocker 2 is rotatable. In the third embodiment, parts that overlap with those in the first and second embodiments are designated by the same reference numerals, and descriptions thereof will be omitted.

[0085] As shown in FIGS. 20 and 21 , a plurality of fourth opening / closing mechanisms 2i are provided on the side wall 2d of the stocker 2. Each of the plurality of fourth opening / closing mechanisms 2i opens and closes a corresponding one of the plurality of second openings 2f. The plurality of second openings 2f are in communication with one another. When the second openings 2f are opened by the fourth opening / closing mechanism 2i shown in FIG. 21 , communication between the inside and outside of the stocker 2 is permitted. When the second openings 2f are opened by the fourth opening / closing mechanism 2i, the fourth opening / closing mechanisms 2i are positioned in the same second opening 2f so as to overlap each other. On the other hand, when the second openings 2f are closed by the fourth opening / closing mechanism 2i, communication between the inside and outside of the stocker 2 is blocked. The fourth opening / closing mechanism 2i may be any mechanism capable of opening and closing the second openings 2f, and may be appropriately selected from known opening / closing mechanisms. In the example shown in FIG. 21 , the fourth opening / closing mechanism 2i is a sliding door that slides in the Z-axis direction when replacing the protective glass 12. However, it may also be a hinged door that rotates 90 degrees around a horizontal axis extending in the Y-axis direction when replacing the protective glass 12. The fourth opening / closing mechanism 2i opens and closes using the driving force of a drive source located in a location other than the processing head 1 and the stocker 2. For example, the fourth opening / closing mechanism 2i opens and closes using the driving force of the drive source of the transfer unit 3. Each of the multiple fourth opening / closing mechanisms 2i is small and lightweight, so the drive source capacity can be small. It is not necessary to provide additional drive sources for the multiple fourth opening / closing mechanisms 2i in the processing head 1. The multiple fourth opening / closing mechanisms 2i may be driven by an air cylinder or the like that uses purge gas flowing into the processing head 1 as a drive source.

[0086] The laser processing apparatus 100B includes a rotation mechanism 17 that rotates the stocker 2 around a horizontal axis. The rotation mechanism 17 includes a winder 17a, a wire 17b, and a rotation shaft 17c. The winder 17a can wind and unwind the wire 17b. The winder 17a is attached to the head-side housing 1a. The winder 17a is disposed above and spaced apart from the protective glass 12 and the condenser lens 1b provided inside the head-side housing 1a. The wire 17b is wound around the winder 17a. The tip of the wire 17b is attached to one end of the side wall 2e of the stocker 2. This end of the side wall 2e is one horizontal end of the side wall 2e during laser processing as shown in FIG. 20 and the upper end of the side wall 2e during replacement of the protective glass 12 as shown in FIG. 21. The rotation shaft 17c extends in the Y-axis direction and serves as the rotation center of the stocker 2. The rotation shaft 17c is attached to one end of the side wall 2d of the stocker 2. This end of the side wall 2d becomes one horizontal end of the side wall 2d during laser processing as shown in Fig. 20, and becomes the upper end of the side wall 2d during replacement of the protective glass 12 as shown in Fig. 21.

[0087] As shown in Fig. 20, during laser processing, wire 17b is wound around winder 17a. During laser processing, stocker 2 is arranged with second opening 2f facing downward and third opening 2g facing upward. Furthermore, the longitudinal direction of stocker 2 is parallel to axis C of processing head 1, and the lateral direction of stocker 2 is perpendicular to axis C of processing head 1. Furthermore, optical surface 12c of protective glass 12 stored in storage section 2a is parallel to axis C of processing head 1.

[0088] On the other hand, as shown in Figure 21, when replacing the protective glass 12, the wire 17b is unwound from the winder 17a. This causes the stocker 2 to rotate downward about the rotation axis 17c. When replacing the protective glass 12, the stocker 2 is arranged so that the second opening 2f faces the processing head 1 and the third opening 2g faces the conveying unit 3 (not shown). Furthermore, the longitudinal direction of the stocker 2 is perpendicular to the axis C of the processing head 1, and the lateral direction of the stocker 2 is parallel to the axis C of the processing head 1. Furthermore, the optical surface 12c of the protective glass 12 stored in the storage unit 2a is perpendicular to the axis C of the processing head 1.

[0089] The position of the stocker 2 can be changed between a position where the optical surface 12c of the protective glass 12 stored in the storage section 2a is parallel to the axis C of the processing head 1, as shown in Fig. 20, and a position where the optical surface 12c of the protective glass 12 stored in the storage section 2a is perpendicular to the axis C of the processing head 1, as shown in Fig. 21. In the example shown in Fig. 21, a used protective glass 12A is stored in the second-tier storage section 2a, and an unused protective glass 12B stored in the first-tier storage section 2a is placed inside the head-side housing 1a.

[0090] Next, the effects of this embodiment will be described.

[0091] In this embodiment, as shown in FIGS. 20 and 21 , the position of the stocker 2 can be changed between a position where the optical surface 12c of the protective glass 12 stored in the storage section 2a is parallel to the axis C of the processing head 1 and a position where the optical surface 12c of the protective glass 12 stored in the storage section 2a is perpendicular to the axis C of the processing head 1. With this configuration, the stocker 2 is positioned so that the optical surface 12c of the protective glass 12 is parallel to the axis C of the processing head 1 during laser processing. Therefore, compared to the first embodiment, the protrusion of the stocker 2 in the direction perpendicular to the axis C of the processing head 1 is smaller, and the amount of deviation between the axis C of the processing head 1 and the center of gravity G2 of the processing head 1 (see FIG. 6 ) is further reduced. As a result, the moments around each axis applied to the processing head 1 when the processing head 1 is moved to perform laser processing are further reduced, and the amount of deflection of the processing head 1 with respect to each axis is further reduced, thereby further suppressing deviation of the irradiation position of the laser beam r on the workpiece 13. Therefore, it is possible to achieve high precision in positioning of the laser beam r, improvement in acceleration resistance strength, high speed movement of the processing head 1, and energy saving.

[0092] Furthermore, in this embodiment, as shown in FIG. 20 , the position of the stocker 2 can be changed so that the optical surface 12c of the protective glass 12 stored in the storage section 2a is parallel to the axis C of the processing head 1. In other words, since the unused protective glass 12B can be stored inside the storage section 2a with the optical surface 12c parallel to the vertical direction, foreign matter that falls under its own weight is less likely to adhere to the optical surface 12c. In other words, adhesion of foreign matter to the optical surface 12c of the unused protective glass 12B can be suppressed. Therefore, the frequency with which the protective glass 12 needs to be replaced is reduced, which reduces the number of interruptions to laser processing and improves the productivity of the workpiece 13.

[0093] In this embodiment, as shown in FIG. 20 , a fourth opening / closing mechanism 2i is provided on one longitudinal side wall 2d of the stocker 2, and a second opening / closing mechanism 2h is provided on the other longitudinal side wall 2e of the stocker 2. The second opening 2f in one longitudinal side wall 2d can be closed by the fourth opening / closing mechanism 2i, and the third opening 2g in the other longitudinal side wall 2e can be closed by the second opening / closing mechanism 2h. This configuration prevents foreign matter from entering each storage section 2a even when one longitudinal side wall 2d of the stocker 2 is separated from the processing head 1. Therefore, foreign matter that falls under its own weight is less likely to adhere to the optical surface 12c. In other words, adhesion of foreign matter to the optical surface 12c of the protective glass 12B before use can be further suppressed. Therefore, the frequency of replacing the protective glass 12 is further reduced, which further reduces the number of interruptions to laser processing and further improves the productivity of the workpieces 13.

[0094] The configurations shown in the above embodiments are merely examples, and may be combined with other known technologies, or different embodiments may be combined with each other. It is also possible to omit or modify parts of the configurations as long as they do not deviate from the gist of the invention.

[0095] Various aspects of the present disclosure are summarized below as appendices.

[0096] (Appendix 1) a processing head having a head-side housing and an optical component provided inside the head-side housing and guiding a laser beam toward a workpiece; a stocker having a storage section capable of storing the optical components after use and the optical components before use, the storage section being attached to an outer surface of the head-side housing in a state in which the storage section can communicate with the inside of the head-side housing; a transport unit provided separately from the processing head and the stocker, which transports the optical components between the inside of the head-side housing and the storage unit; An automatic optical component replacement device comprising: (Appendix 2) The stocker has a plurality of storage sections which are spaces independent of each other, The automatic optical component exchange device described in Appendix 1 is characterized in that the head-side housing is provided with a plurality of openings that penetrate from the inner surface to the outer surface of the head-side housing at positions opposite each of the plurality of storage sections, and a plurality of opening / closing mechanisms that open and close each of the plurality of openings. (Appendix 3) The automatic optical component exchange device according to claim 1 or 2, wherein the optical components are arranged in the same orientation inside the head-side housing and in the storage section. (Appendix 4) The stocker has a plurality of storage sections which are spaces independent of each other, The head-side housing is provided with one opening penetrating from the inner surface to the outer surface of the head-side housing, The automatic optical component exchange device described in Appendix 1 is characterized in that the stocker is movable along the outer surface of the head side housing and each of the storage sections is configured to be positionable in a position opposite the opening. (Appendix 5) The automatic optical component exchange device according to claim 4, wherein the head side housing is provided with a single opening / closing mechanism for opening and closing the opening. (Appendix 6) An automatic optical component exchange device described in any one of appendices 1 to 3, characterized in that the position of the stocker can be changed between a position where the optical surfaces of the optical components stored in the storage section are parallel to the axis of the processing head and a position where the optical surfaces of the optical components stored in the storage section are perpendicular to the axis of the processing head. (Appendix 7) A laser processing device comprising the automatic optical component exchange device according to any one of appendices 1 to 6. (Appendix 8) A method for automatically exchanging optical components using an automatic optical component exchange device including: a head-side housing; a processing head having optical components provided inside the head-side housing and guiding a laser beam toward a workpiece; a stocker having a storage section capable of storing the optical components after use and the optical components before use, the storage section being attached to an outer surface of the head-side housing in a state in which the storage section can communicate with the inside of the head-side housing; and a transport section provided separately from the processing head and the stocker and transporting the optical components between the inside of the head-side housing and the storage section, a first transport step of transporting the used optical component from inside the head side housing to the storage section by the transport section; a second transport step of transporting the optical component before use from the storage section to the inside of the head side housing by the transport section; 1. A method for automatically replacing optical components, comprising: (Appendix 9) a replacement step of automatically replacing the optical component by the automatic optical component replacement method described in Supplementary Note 8; a processing step of processing a workpiece by irradiating the workpiece with a laser beam via the automatically replaced optical component; A method for manufacturing a workpiece, comprising: [Explanation of symbols]

[0097] 1 processing head, 1a head side housing, 1b condenser lens, 1c first opening, 1d first retraction hole, 1e first opening / closing mechanism, 1f glass support portion, 1g patch material, 1h guide, 1i lens support portion, 1j O-ring, 2 stocker, 2a storage portion, 2b partition member, 2c elastic body, 2d, 2e, 3f side wall, 2f second opening, 2g third opening, 2h second opening / closing mechanism, 2i fourth opening / closing mechanism, 3 transport portion, 3a transport portion side housing, 3b first drive stage portion, 3c second drive stage portion, 3d holding portion, 3e base, 3g fourth opening, 3h second retraction hole, 3i third opening / closing mechanism, 3j arm portion, 3k hand portion, 4 bed, 5 column, 6 cross rail, 7 laser oscillator, 8 transmission mirror, 9 High voltage power supply, 10 cooling device, 11 control device, 12, 12A, 12B protective glass, 12a glass body, 12b glass frame, 12c optical surface, 12d held part, 13 workpiece, 14 dirt, 15 purge gas, 16 movement mechanism, 17 rotation mechanism, 17a winding machine, 17b wire, 17c rotating shaft, 100, 100A, 100B laser processing device, 200, 200A, 200B automatic exchange device.

Claims

1. a processing head having a head-side housing and an optical component provided inside the head-side housing and guiding a laser beam toward a workpiece; a stocker having a storage section capable of storing the optical components after use and the optical components before use, the storage section being attached to an outer surface of the head-side housing in a state in which the storage section can communicate with the inside of the head-side housing; a transport unit provided separately from the processing head and the stocker, which transports the optical components between the inside of the head-side housing and the storage unit; An automatic optical component replacement device comprising:

2. The stocker has a plurality of storage sections which are spaces independent of each other, The automatic optical component exchange device according to claim 1, characterized in that the head side housing is provided with a plurality of openings penetrating from the inner surface to the outer surface of the head side housing at positions opposite each of the plurality of storage sections, and a plurality of opening / closing mechanisms for opening and closing each of the plurality of openings.

3. 2. The automatic optical component exchange device according to claim 1, wherein the optical components are arranged in the same orientation inside the head-side housing and in the storage section.

4. The stocker has a plurality of storage sections which are spaces independent of each other, The head-side housing is provided with one opening penetrating from the inner surface to the outer surface of the head-side housing, 2. The automatic optical component exchange device according to claim 1, wherein the stocker is configured to be movable along the outer surface of the head side housing and to be capable of positioning each of the storage sections at a position opposite the opening.

5. 5. The automatic optical part exchange device according to claim 4, wherein the head side housing is provided with one opening / closing mechanism for opening and closing the opening.

6. 2. The automatic optical component exchange device according to claim 1, wherein the position of the stocker can be changed between a position where the optical surfaces of the optical components stored in the storage section are parallel to the axis of the processing head, and a position where the optical surfaces of the optical components stored in the storage section are perpendicular to the axis of the processing head.

7. 7. A laser processing apparatus comprising the automatic optical part exchange device according to claim 1.

8. A method for automatically exchanging optical components using an automatic optical component exchange device including: a head-side housing; a processing head having optical components provided inside the head-side housing and guiding a laser beam toward a workpiece; a stocker having a storage section capable of storing the optical components after use and the optical components before use, the storage section being attached to an outer surface of the head-side housing in a state in which the storage section can communicate with the inside of the head-side housing; and a transport section provided separately from the processing head and the stocker and transporting the optical components between the inside of the head-side housing and the storage section, a first transport step of transporting the used optical component from inside the head side housing to the storage section by the transport section; a second transport step of transporting the optical component before use from the storage section to the inside of the head-side housing by the transport section; 1. A method for automatically replacing optical components, comprising:

9. a replacement step of automatically replacing the optical component by the method for automatically replacing the optical component according to claim 8; a processing step of processing a workpiece by irradiating the workpiece with a laser beam via the automatically replaced optical component; A method for manufacturing a workpiece, comprising:

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