Robot system

Abstract

To improve throughput of processing of a substrate by shortening a conveyance time of the substrate.SOLUTION: The robot system 6 includes the first mounting part 5R, the second mounting part 5L located beside the first mounting part, and the horizontal articulated transfer robot 2 for transferring the substrate 9 to the first mounting part and the second mounting part, the transfer robot 2 including the first hand 31 and the second hand 32 for holding the substrate, at least one of the first hand and the second hand being displaced in a direction in which the first hand and the second hand are separated from each other while the first hand is approaching the first mounting part and the second hand is approaching the second mounting part.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] The technology disclosed herein relates to a robot system. [Background technology]

[0002] Patent Document 1 describes a conventional robot system. The conventional robot system performs alignment of substrates. The robot system includes a robot, a first aligner, and a second aligner. The robot transports substrates. The robot has a first hand and a second hand, and can transport two substrates to the first aligner and the second aligner. The combination of a robot having a first hand and a second hand with two aligners improves the throughput of substrate alignment. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-81968 Summary of the Invention [Problem to be solved by the invention]

[0004] Further improvement in throughput is required for substrate processing, and there is a possibility that this can be achieved by optimizing the substrate transport operation by robots. [Means for solving the problem]

[0005] The technology disclosed herein relates to a robot system. a first placement section on which a substrate is placed; a second mounting portion on which the substrate is mounted, the second mounting portion being located beside the first mounting portion; a horizontal articulated transport robot that transports the substrate to the first mounting section and the second mounting section, having a first hand and a second hand that hold the substrate, and at least one of the first hand and the second hand being displaced in a direction away from each other while the first hand is approaching the first mounting section and the second hand is approaching the second mounting section. [Effects of the Invention]

[0006] Since the movement trajectories of the first hand and the second hand when approaching the first placement part and the second placement part are optimized, the robot system can reduce the substrate transport time and improve the substrate processing throughput. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 shows a robot system for transporting a substrate. [Figure 2] FIG. 2 is a block diagram of the robot system. [Figure 3] Figure 3 shows a horizontal articulated robot. [Figure 4] FIG. 4 shows the operation of the first and second hands. [Figure 5] FIG. 5 is a perspective view of the first aligner and the second aligner. [Figure 6] FIG. 6 is a plan view of the first aligner and the second aligner. [Figure 7] FIG. 7 is a front view of the first aligner and the second aligner. [Figure 8] FIG. 8 is a sequence diagram of substrate alignment. [Figure 9] FIG. 9 shows the movement trajectories of the first hand and the second hand. [Figure 10] FIG. 10 shows the movement trajectories of the first hand and the second hand according to a modified example. [Figure 11] FIG. 11 shows a first hand and a second hand according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, an embodiment of a robot system will be described with reference to the drawings. The robot system described here is an example.

[0009] (Robot System) FIG. 1 is a plan view of a substrate transfer system 1. FIG. 2 is a block diagram of the substrate transfer system 1. The substrate transfer system 1 transfers a substrate 9. The substrate 9 is a semiconductor wafer or a glass substrate. The substrate transfer system 1 is, for example, a sorter. The substrate transfer system 1 is, for example, an EFEM (Equipment Front End Module). The substrate transfer system 1 is, for example, a stocker. A robot system 6 is incorporated into the substrate transfer system 1.

[0010] The substrate transfer system 1 includes a housing 10. The housing 10 has a first wall 11, a second wall 12, a third wall 13, and a fourth wall 14. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 are each perpendicular to the floor. The first wall 11 and the third wall 13 face each other in a first direction. The second wall 12 and the fourth wall 14 face each other in a second direction. The first and second directions are both horizontal directions, and the second direction is perpendicular to the first direction. Hereinafter, the first direction will be referred to as the X direction, and the second direction will be referred to as the Y direction. The vertical direction perpendicular to the X and Y directions will be referred to as the Z direction. Note that the X direction, Y direction, and Z direction are used to describe the robot system 6 and are not used to limit the structure of the robot system 6.

[0011] The first wall 11 and the second wall 12 are connected to each other, and the first wall 11 and the fourth wall 14 are connected to each other, and the third wall 13 and the second wall 12 are connected to each other, and the third wall 13 and the fourth wall 14 are connected to each other. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 form a closed conveying space 15.

[0012] The housing 10 also has a ceiling wall. The ceiling wall is connected to the first wall 11, the second wall 12, the third wall 13, and the fourth wall 14, and closes the upper end of the transfer space 15. An aligner 5 is located in the transfer space 15. The aligner 5 aligns the substrate 9. The substrate transfer system 1 includes two aligners 5R and 5L. The two aligners 5R and 5L are aligned along the second wall 12. Details of the aligner 5 will be described later.

[0013] The substrate transfer system 1 has a FOUP (Front Opening Unified Pod) 41. The FOUP 41 accommodates a substrate 9. The FOUP 41 can accommodate multiple substrates 9 lined up in the Z direction. The substrate processing equipment 4 has multiple FOUPs 41. The multiple FOUPs 41 are lined up along a first wall 11. The first wall 11 has openings 17 corresponding to the FOUPs 41. A FOUP opener opens and closes the openings 17. The FOUP opener switches between communication and cut-off between the transfer space 15 and the FOUP 41.

[0014] The substrate transfer system 1 includes a robot 2. The robot 2 is an example of a transfer robot. The robot 2 transfers a substrate 9 between a hoop 41 and an aligner 5 (see the solid lines and the two-dot chain lines in FIG. 1). The robot 2 is located in a transfer space 15. The robot 2 is a horizontal articulated robot. The structure of the robot 2 will be described later.

[0015] The substrate transfer system 1 includes a system controller 18. Note that the system controller 18 is not an essential element of the robot system 6. The system controller 18 performs overall control of the substrate transfer system 1.

[0016] The robot controller 20 is electrically connected to the system controller 18. The electrical connection includes a wired or wireless connection. The robot controller 20 is also electrically connected to the robot 2. The robot controller 20 controls the robot 2. More specifically, the robot controller 20 receives a control signal from the system controller 18 and outputs a control signal to the robot 2. The robot 2 receives the control signal from the robot controller 20 and transports the substrate 9 in this case. The movement trajectories TR1 and TR2 of the hand 3, which will be described later, are the result of the control of the robot 2 by the robot controller 20.

[0017] The aligner 5 is also electrically connected to the robot controller 20. As described above, the aligner 5 includes a first aligner 5R and a second aligner 5L. The robot controller 20 and the first aligner 5R are connected via a motor harness 54 and a signal harness 55. The robot controller 20 supplies power for driving the spindle to the first aligner 5R via the motor harness 54. The signal harness 55 sends a control signal to the first aligner 5R. The first aligner 5R is controlled by the robot controller 20. The robot controller 20 and the second aligner 5L are connected via a motor harness 56. The first aligner 5R and the second aligner 5L are connected via a signal harness 57. The robot controller 20 supplies power to the second aligner 5L via the motor harness 56. The first aligner 5R transmits a control signal from the robot controller 20 to the second aligner 5L via a signal harness 57. The robot controller 20 and the second aligner 5L may be connected to each other via a motor harness 56 and a signal harness 57. The aligner 5 may be connected to the system controller 18 and controlled by the system controller 18. Furthermore, the substrate transport system 1 may have an aligner controller dedicated to the aligner, separate from the robot controller 20.

[0018] The first aligner 5R is connected to a vacuum pump via a vacuum tube to hold the substrate 9, which will be described later. The first aligner 5R is also supplied with air for operating the actuator of the support part 52, which will be described later, via an air tube connected to the first aligner 5R. A vacuum tube and an air tube are also connected to the second aligner 5L, independently of the first aligner 5R.

[0019] (Robot structure) As described above, the robot 2 is a horizontally articulated robot. FIG. 3 is a side view of the robot 2. FIG. 4 is a plan view of the hand 3 of the robot 2. As shown in FIG. 1 or 3, the robot 2 has a base 21. The base 21 is installed in the transfer space 15. The robot 2 has a manipulator 200. The manipulator 200 includes an arm 22 and a hand 3.

[0020] The base 21 supports the arm 22. The arm 22 can be raised and lowered in the Z direction relative to the base 21. A first actuator 23 raises and lowers the arm 22. The arm 22 has links 221 and 222. The arm 22 has a plurality of links 221 and 222. The arm 22 of the illustrated robot 2 has two links, link 221 and link 222. Note that the number of links forming the arm 22 is not limited to two.

[0021] A first end of link 221 is supported by base 21. Link 221 is rotatable about a first axis Z1 extending in the Z direction relative to base 21. A second actuator 24 rotates link 221. A second end of link 221 is connected to a first end of link 222. Link 222 is rotatable about a second axis Z2 extending in the Z direction relative to link 221. A third actuator 25 rotates link 222.

[0022] The robot 2 has a first hand 31 and a second hand 32 as hands 3. A so-called double-handed robot 2 has high efficiency in transporting substrates 9. The first hand 31 and the second hand 32 are connected to the second end of the link 222 in a state where they are overlapped in the Z direction. As shown in FIG. 3, the first hand 31 and the second hand 32 are positioned differently from each other by H in the Z direction.

[0023] The first hand 31 is rotatable about a third axis Z3 extending in the Z direction relative to the link 222, and the second hand 32 is also rotatable about the third axis Z3 relative to the link 222. The third axis Z3 is an example of a rotation axis, and the first hand 31 and the second hand 32 rotate about the same rotation axis. The fourth actuator 26 rotates the first hand 31 and the second hand 32 individually. The first hand 31 and the second hand 32 can change their positions between an overlapping state in the Z direction as shown in the upper diagram of FIG. 4 and a separated state as shown in the lower diagram of FIG. 4. As shown by the two-dot chain line in the lower diagram of FIG. 4, the first hand 31 and the second hand 32 can move away from each other to a position where the substrates 9 they are holding do not overlap. Note that the first hand 31 and the second hand 32 are not limited to changing their positions symmetrically in a plan view.

[0024] The first hand 31 and the second hand 32 have the same structure. Hereinafter, the first hand 31 and the second hand 32 will be collectively referred to as the hand 3. The hand 3 is an end effector that holds the substrate 9. As shown in FIG. 4, the hand 3 has a main body 301 and a holding portion 302. The main body 301 supports the holding portion 302. The main body 301 is rotatably connected to the second end of the link 222.

[0025] The holding portion 302 is roughly Y-shaped in a plan view, and has an open tip. As shown in FIG. 3, the holding portion 302 is in the form of a thin plate. The hand 3 generally holds the substrate 9 in various ways, such as gripping, suction, placing, or fitting, and releases the held substrate 9. Note that the hand 3 in the illustration is an edge grip hand. The hand 3 holds the substrate 9 by having multiple guides grip the edges of the substrate 9. The hand 3 releases its hold on the substrate 9 when the guides move away from the edges of the substrate 9. The edge grip hand has a size corresponding to the diameter of the substrate 9. The size of the edge grip hand is relatively large.

[0026] (Aligner structure) FIG. 5 is a perspective view of the first aligner 5R and the second aligner 5L. FIG. 6 is a plan view of the first aligner 5R and the second aligner 5L. FIG. 7 is a front view of the first aligner 5R and the second aligner 5L. The first aligner 5R and the second aligner 5L have the same elements. In FIGS. 5, 6, and 7, elements common to the first aligner 5R and the second aligner 5L are denoted by the same reference numerals.

[0027] As shown in FIG. 5, the first aligner 5R and the second aligner 5L are aligned in the left-right direction. In other words, the second aligner 5L is located next to the first aligner 5R. In this embodiment, the left-right direction corresponds to the alignment direction of the first aligner 5R and the second aligner 5L. The first aligner 5R is located on the right, and the second aligner 5L is located on the left. As shown in FIG. 1, the first aligner 5R and the second aligner 5L are aligned in the X direction in the substrate transfer system 1. The front-to-rear direction of the first aligner 5R and the second aligner 5L corresponds to the Y direction in the substrate transfer system 1, and the up-down direction of the first aligner 5R and the second aligner 5L corresponds to the Z direction in the substrate transfer system 1.

[0028] 6, in this embodiment, the first aligner 5R and the second aligner 5L are positioned symmetrically about a center line CL in a plan view. In other words, the first aligner 5R and the second aligner 5L have the same structure at symmetric positions in a plan view. The center line CL is a line extending in the front-rear direction and corresponds to the Y direction in the substrate transfer system 1.

[0029] As shown in FIG. 7, they are misaligned. In this embodiment, the heights of the mounting surfaces F of the first aligner 5R and the second aligner 5L are different. Specifically, the mounting surface F includes a first mounting surface FR that supports the first aligner 5R and a second mounting surface FL that supports the second aligner 5L. The first mounting surface FR is higher than the second mounting surface FL in the vertical direction. The first aligner 5R is positioned higher than the second aligner 5L by a distance H. The vertical positions of the spindle 51 and support portion 52 of the first aligner 5R, which will be described later, are positioned higher than the vertical positions of the spindle 51 and support portion 52 of the second aligner 5L. The height H corresponds to the amount of positional misalignment H in the Z direction between the first hand 31 and the second hand 32 described above.

[0030] It is not essential that the heights of the first mounting surface FR and the second mounting surface FL are different. The first aligner 5R and the second aligner 5L may be offset from each other in the vertical direction by making the height dimensions of the first aligner 5R and the second aligner 5L different.

[0031] The common configuration of the first aligner 5R and the second aligner 5L will be described below.

[0032] The aligner 5 has a rectangular box-shaped base 50. The base 50 is placed on a placement surface F.

[0033] The aligner 5 has a spindle 51. The spindle 51 holds the substrate 9 and rotates the held substrate 9. The spindle 51 protrudes upward from the base 50. The spindle 51 is cylindrical with its rotation axis in the vertical direction. The upper end surface of the spindle 51 holds the substrate 9 by vacuum suction. The spindle 51 rotates around its rotation axis, thereby rotating the substrate 9 around the rotation axis.

[0034] As shown in Fig. 7, the distance D1 between the center of the spindle 51 of the first aligner 5R and the center of the spindle 51 of the second aligner 5L is longer than the diameter of the substrate 9. As shown in Fig. 6, the substrate 9 placed on the spindle 51 of the first aligner 5R and the substrate 9 placed on the spindle 51 of the second aligner 5L do not overlap in a plan view. Note that hereinafter, the distance D1 will be referred to as the interval D1 between the first aligner 5R and the second aligner 5L. As shown in Fig. 1, the interval D1 is regulated by the width D2 of the substrate transfer system 1 in the X direction.

[0035] The aligner 5 has a support portion 52. The support portion 52 supports the substrate 9 before alignment. The support portion 52 has a plurality of support surfaces 52a. As shown imaginarily in FIG. 6 or 7, the plurality of support surfaces 52a abut against the outer peripheral edge of the lower surface of the substrate 9 to support the substrate 9 from below. As shown in FIG. 6, the support portion 52 has three support surfaces 52a. The three support surfaces 52a are positioned at intervals from one another so that the center of the substrate 9 is included in a triangle formed by connecting the support surfaces 52a. Note that the number of support surfaces 52a is not limited to three.

[0036] The support unit 52 moves the support surface 52a between a support position P1 and a lower position P2. The support position P1 is a position above the spindle 51, as shown by the phantom line in FIG. 7. The robot 2 places the substrate 9 on the support surface 52a located at the support position P1. The lower position P2 is a position below the support position P1. The support unit 52 delivers the substrate 9 to the spindle 51 by lowering the support surface 52a from the support position P1 to the lower position P2. After delivering the substrate 9 to the spindle 51, the support surface 52a returns from the lower position P2 to the support position P1. When the support surface 52a returns from the lower position P2 to the support position P1, the support surface 52a is displaced to bypass the substrate 9, as shown by the solid line in FIG. 6 or 7, so as to prevent interference between the support surface 52a and the substrate 9. The support unit 52 has an actuator that moves the support surface 52a. In order to ensure a space for the support surface 52a to detour, the distance D1 between the first aligner 5R and the second aligner 5L is relatively large.

[0037] The aligner 5 has a sensor 53. The sensor 53 is used to check the eccentricity of the substrate 9, read the ID of the substrate 9, and detect and align the notch or orientation flat of the substrate 9. The sensor 53 is horizontally adjacent to the spindle 51. The sensor 53 is columnar and extends upward from the base 50.

[0038] The sensor 53 is located at a position overlapping the outer peripheral edge of the substrate 9 held by the spindle 51 in a plan view. As described above, the first aligner 5R and the second aligner 5L are located symmetrically with respect to the center line CL in a plan view. The sensor 53 of the first aligner 5R is located on the opposite side of the spindle 51 from the second aligner 5L. The sensor 53 of the second aligner 5L is located on the opposite side of the spindle 51 from the first aligner 5R.

[0039] (Board alignment) Next, alignment of the substrate 9 by the robot system 6 will be described with reference to FIG. 8. FIG. 8 is a sequence diagram of alignment of the substrate 9. The basic operation of the robot 2 is as follows. That is, the robot 2 takes out the substrate 9 before alignment from the first FOUP 411 and transports the substrate 9 to the first aligner 5R and the second aligner 5L. The robot 2 also transports the aligned substrate 9 from the first aligner 5R and the second aligner 5L to the second FOUP 412 and stores the aligned substrate 9 in the second FOUP 412. The robot 2 repeats the transport of the substrate 9 between the FOUP 41 and the aligner 5 until alignment of all the substrates 9 is completed.

[0040] In step S1 of FIG. 8, the robot 2 removes the substrates 9 from the first FOUP 411 and transports them to the first aligner 5R and the second aligner 5L. The robot 2 transports two substrates 9 using the first hand 31 and the second hand 32. In step S2, the robot 2 simultaneously delivers the two transported substrates 9 to the first aligner 5R and the second aligner 5L. More specifically, the robot 2 places the first substrate 9 held by the first hand 31 on the support surface 52a of the first aligner 5R, and also places the second substrate 9 held by the second hand 32 on the support surface 52a of the first aligner 5R. The first aligner 5R is positioned above the second aligner 5L by an amount corresponding to the Z-direction positional deviation H of the first hand 31 and the second hand 32. The robot 2 can simultaneously transfer two substrates 9 to the first aligner 5R and the second aligner 5L.

[0041] In step S3, the first aligner 5R and the second aligner 5L each move the support surface 52a from the support position P1 to a lower position P2. As the support surface 52a moves down, the substrate 9 is transferred from the support unit 52 to the spindle 51. The first aligner 5R and the second aligner 5L then align the substrate 9 in step S4. More specifically, the first aligner 5R and the second aligner 5L check the eccentricity of the substrate 9, read the ID of the substrate 9, and detect and align the notch or orientation flat of the substrate 9. Note that while performing the alignment, the first aligner 5R and the second aligner 5L return the support surface 52a from the lower position P2 to the support position P1.

[0042] After delivering the substrate 9 in step S2, the robot 2 returns to the first FOUP 411 (step S5) and removes the next substrate 9 from the first FOUP 411. In step S6, the robot 2 transports the next two substrates 9 to the first aligner 5R and the second aligner 5L. Steps S5 and S6 are performed while the first aligner 5R and the second aligner 5L are aligning the substrates 9 through steps S3 and S4. Then, after completing alignment using at least the sensor 53, the robot 2 places the substrate 9 on the support surface 52a positioned at the support position P1 of each of the first aligner 5R and the second aligner 5L (step S7). Note that in step S7, the aligned substrate 9 is placed on the spindle 51.

[0043] After placing the substrate 9 on the support surface 52a, the robot 2 receives the aligned substrate 9 from the spindles 51 of the first aligner 5R and the second aligner 5L (step S8). Because the height positions of the first aligner 5R and the second aligner 5L are offset, the robot 2 can simultaneously receive the substrate 9 from each of the first aligner 5R and the second aligner 5L. Simultaneous delivery and reception improves the throughput of alignment of the substrate 9. The robot 2 transports the aligned substrate 9 to the second FOUP 412 (step S9). After storing the substrate 9 in the second FOUP 412, the robot 2 returns to the first FOUP 411 (step S10) and transports the next substrate 9 removed from the first FOUP 411 to the first aligner 5R and the second aligner 5L (step S6).

[0044] Once the substrate 9 is removed from the spindle 51 in step S8, the states of the first aligner 5R and the second aligner 5L are the same as in step S2. While the robot 2 is transporting the substrate 9 in steps S9, S10, and S6, the processes of the first aligner 5R and the second aligner 5L proceed from step S8 to step S3. The first aligner 5R and the second aligner 5L transfer the substrate 9 from the support 52 to the spindle 51 and align the substrate 9 in step S4. After aligning the substrate 9, the robot 2 places the substrate 9 on the support surfaces 52a of the first aligner 5R and the second aligner 5L in step S7.

[0045] The first aligner 5R and the second aligner 5L repeat steps S3, S4, S7, and S8, and the robot 2 repeats steps S6, S7, S8, S9, and S10, thereby performing alignment of the substrate 9. Because the support portion 52 holds and transfers the substrate 9, the robot 2 can transport the substrate 9 while the first aligner 5R and the second aligner 5L are performing alignment. This reduces unnecessary waiting time for the robot 2. The support portions 52 of the first aligner 5R and the second aligner 5L significantly improve the throughput of alignment of the substrate 9.

[0046] (Robot transport operation) The robot system 6 is characterized by the transportation of the substrate 9 by the robot 2, with the primary objective of further improving the throughput of alignment of the substrate 9. In FIG. 9, the movement trajectory TR1 of the first hand 31 and the movement trajectory TR2 of the second hand 32 of the robot 2 when they approach the first aligner 5R and the second aligner 5L are indicated by dashed arrows. Note that the movement trajectories of the first hand 31 and the second hand 32 when they move away from the first aligner 5R and the second aligner 5L are also the same as the movement trajectories TR1 and TR2 when they approach. In FIG. 9, multiple overlapping positions of the first hand 31 and the second hand 32 approaching the first aligner 5R and the second aligner 5L are depicted. Here, the movement trajectory TR1 of the first hand 31 is the movement trajectory of the center position of the substrate 9 held by the first hand 31, and the movement trajectory TR2 of the second hand 32 is the movement trajectory of the center position of the substrate 9 held by the second hand 32. The first aligner 5R is an example of a first placement unit, and the second aligner 5L is an example of a second placement unit.

[0047] While the first hand 31 and the second hand 32 are approaching the first aligner 5R and the second aligner 5L, the first hand 31 and the second hand 32 are displaced in directions away from each other. That is, while the first hand 31 and the second hand 32 are approaching the first aligner 5R and the second aligner 5L by the drive of the arm 22, they rotate in opposite directions about the third axis Z3. As a result, the first hand 31 and the second hand 32 are displaced in directions away from each other. In FIG. 9, the movement trajectory TR1 of the first hand 31 is tilted to the right with respect to the vertical direction, and the movement trajectory TR2 of the second hand 32 is tilted to the left with respect to the vertical direction.

[0048] More specifically, the arm 22 moves the first hand 31 and the second hand 32 closer to the first aligner 5R and the second aligner 5L so that the third axis Z3 moves on the center line CL. The movement trajectory TR1 of the first hand 31 and the movement trajectory TR2 of the second hand 32 are symmetrical about the center line CL in a plan view.

[0049] The first hand 31 approaches the first aligner 5R in a direction in which the spindle 51 of the first aligner 5R relatively enters the first hand 31 from the tip opening of the first hand 31. In FIG. 9, the first hand 31 moves diagonally upward to the right while gradually tilting to the right. Similarly, the second hand 32 approaches the second aligner 5L in a direction in which the spindle 51 of the second aligner 5L relatively enters the second hand 32 from the tip opening of the second hand 32. In FIG. 9, the second hand 32 moves diagonally upward to the left while gradually tilting to the left.

[0050] When the first hand 31 and the second hand 32 are spaced apart from the first aligner 5R and the second aligner 5L by a first distance L1 or more, they maintain positions close to each other until at least a portion of the substrates 9 overlap. That is, the first hand 31 and the second hand 32 approach the first aligner 5R and the second aligner 5L while maintaining a constant distance between them. Here, the distance between the hand 31 and the aligner 5 is defined in FIG. 9 as the distance between the center of the spindle 51 of the first aligner 5R and the second aligner 5L and the center of the substrate 9 held by the first hand 31 and the second hand 32. The first distance L1 is the distance at which the tip of the holding portion 302 of the first hand 31 approaches the first aligner 5R and the tip of the holding portion 302 of the second hand 32 approaches the second aligner 5L. The first distance L1 is set to an appropriate distance.

[0051] When the first hand 31 and the second hand 32 are closer to the first aligner 5R and the second aligner 5L than the first distance L1, the first hand 31 and the second hand 32 move away from each other as they approach the first aligner 5R and the second aligner 5L. In other words, the first hand 31 and the second hand 32 rotate in opposite directions.

[0052] When the first hand 31 transfers or receives the substrate 9 between the first aligner 5R and the second hand 32 transfers or receives the substrate 9 between the second aligner 5L, the first hand 31 and the second hand 32 move away from each other to a position where the substrates 9 do not overlap.

[0053] Here, in the first aligner 5R, the support portion 52 is positioned so as to overlap the spindle 51 in the Z direction. The center of the substrate 9 placed on the support portion 52 and the center of the substrate 9 placed on the spindle 51 coincide or nearly coincide in the Z direction. The position of the first hand 31 in plan view is the same or substantially the same when the first hand 31 delivers the substrate 9 to the support surface 52a of the first aligner 5R and when the first hand 31 receives the substrate 9 from the spindle 51 of the first aligner 5R. Furthermore, the position of the second hand 32 in plan view is the same or substantially the same when the second hand 32 delivers the substrate 9 to the support surface 52a of the second aligner 5L and when the second hand 32 receives the substrate 9 from the spindle 51 of the second aligner 5L.

[0054] (Action and effect) While the first hand 31 and the second hand 32 are approaching the first aligner 5R and the second aligner 5L, the first hand 31 and the second hand 32 are displaced in directions away from each other. Since the movement trajectories TR1 and TR2 of the first hand 31 and the second hand 32, respectively, are optimized, the transport time of the substrate 9 can be shortened. The robot system 6 can improve the throughput of the alignment of the substrate 9.

[0055] The arm 22 moves the first hand 31 and the second hand 32 closer to the first aligner 5R and the second aligner 5L so that the third axis Z3 moves along the center line CL between the first aligner 5R and the second aligner 5L in a plan view. Both the movement trajectory TR1 of the first hand 31 and the movement trajectory TR2 of the second hand 32 are shortest. This allows the robot 2 to shorten the transport time.

[0056] The first aligner 5R and the second aligner 5L are disposed symmetrically about the center line CL, and no sensor 53 is located between the first aligner 5R and the second aligner 5L. The first hand 31 and the second hand 32, which move along the center line CL, can utilize the large space between the sensor 53 of the first aligner 5R and the sensor 53 of the second aligner 5L. The first hand 31 and the second hand 32 can use the large space to load the substrate 9 into each of the first aligner 5R and the second aligner 5L, and can also load the substrate 9 out of each of the first aligner 5R and the second aligner 5L.

[0057] When the first hand 31 and the second hand 32 are distant from the first aligner 5R and the second aligner 5L, the first hand 31 and the second hand 32 approach each other so that the substrates 9 partially overlap. This reduces the space required to transport the substrates 9. When the first hand 31 and the second hand 32 are close to the first aligner 5R and the second aligner 5L, the first hand 31 and the second hand 32 move away from each other. The first hand 31 approaches the first aligner 5R in a direction in which the spindle 51 of the first aligner 5R relatively enters the first hand 31 from the tip opening of the first hand 31, and the second hand 32 approaches the second aligner 5L in a direction in which the spindle 51 of the second aligner 5L relatively enters the second hand 32 from the tip opening of the second hand 32. The robot 2 can quickly transport the substrates 9 while avoiding interference between the hands 31 and 32 and the aligners 5R and 5L. Furthermore, when the substrates 9 are handed over and received between the hands 31, 32 and the aligners 5R, 5L, the first hand 31 and the second hand 32 move away from each other so that the substrates 9 do not overlap. The robot 2 can smoothly hand over and receive the substrates 9.

[0058] Furthermore, the center of the substrate 9 placed on the support part 52 and the center of the substrate 9 placed on the spindle 51 coincide or nearly coincide in the Z direction. The first hand 31 and the second hand 32 of the robot 2 are positioned at the same position relative to the first aligner 5R and the second aligner 5L in a planar view, whether they are transferring the transported substrate 9 to the support part 52 or receiving the aligned substrate 9 from the spindle 51. The movement trajectories TR1 and TR2 of the first hand 31 and the second hand 32 are the same in a planar view, whether they are transferring the substrate 9 to the first aligner 5R and the second aligner 5L or transferring the substrate 9 from the first aligner 5R and the second aligner 5L. This reduces the burden of teaching the robot 2.

[0059] Furthermore, the movement trajectory TR1 of the first hand 31 and the movement trajectory TR2 of the second hand 32 when the first hand 31 and the second hand 32 move away from the first aligner 5R and the second aligner 5L are the same as the movement trajectories TR1 and TR2 when they move toward each other. Optimizing the movement trajectories TR1 and TR2 when the first hand 31 and the second hand 32 move away from the first aligner 5R and the second aligner 5L shortens the transport time of the substrate 9.

[0060] The first hand 31 and the second hand 32 of the robot 2 are edge-grip hands. The edge-grip hands can easily determine the relative positions of the hand 3 and the substrate 9 when the hand 3 grips the substrate 9. However, because the edge-grip hands are large in size, there is a risk of interference between the first hand 31 and the second hand 32 and the first aligner 5R and the second aligner 5L, which is a disadvantage.

[0061] Furthermore, the first aligner 5R and the second aligner 5L are arranged at a relatively large distance D1 so that the substrates 9 do not overlap. The rotation angle θ1 of the first hand 31 when the first hand 31 delivers or receives the substrate 9 to or from the first aligner 5R is relatively large, and the rotation angle θ2 of the second hand 32 when the second hand 32 delivers or receives the substrate 9 to or from the second aligner 5L is relatively large (see FIG. 4). Because the first hand 31 and second hand 32 are large in size and rotate widely, the first hand 31 and second hand 32 are more likely to interfere with the first aligner 5R and the second aligner 5L.

[0062] The first hand 31 and the second hand 32 move toward the first aligner 5R and the second aligner 5L while displacing away from each other, allowing the first hand 31 and the second hand 32 to be rotated widely while avoiding interference between the large-sized first hand 31 and the second hand 32 and the first aligner 5R and the second aligner 5L.

[0063] (Variation) Regarding the movement trajectories TR1 and TR2 of the first hand 31 and the second hand 32, both the first hand 31 and the second hand 32 do not have to rotate while the first hand 31 is approaching the first aligner 5R and the second hand 32 is approaching the second aligner 5L. For example, as illustrated in Fig. 10, the robot 2 may rotate only the first hand 31 to reach the first aligner 5R while the second hand 32 reaches the second aligner 5L without rotating it. Alternatively, conversely to Fig. 10, the robot 2 may rotate only the second hand 32 to reach the second aligner 5L while the first hand 31 reaches the first aligner 5R without rotating it. Furthermore, when the robot 2 rotates both the first hand 31 and the second hand 32, the rotation angle of the first hand 31 and the rotation angle of the second hand 32 may be different.

[0064] It is not essential that the first aligner 5R and the second aligner 5L are positioned symmetrically about the center line CL in a plan view. The relative positions of the first aligner 5R and the second aligner 5L may be adjusted according to the movement trajectories TR1 and TR2 of the first hand 31 and the second hand 32.

[0065] The hand 3 of the robot 2 is not limited to an edge grip hand. For example, as shown in FIG. 11, the hand 3 of the robot 2 may be a vacuum hand. The vacuum hand uses negative pressure to hold the substrate 9. The vacuum hand is smaller in size than the edge grip hand. The distance D1 between the first aligner 5R and the second aligner 5L can be the same whether it is an edge grip hand or a vacuum hand. The robot system 6 is highly versatile.

[0066] The support portion 52 of the aligner 5 may support the substrate 9 after alignment. That is, the robot 2 may deliver the substrate 9 before alignment to the spindle 51. The support portion 52 moves the support surface 52a up from the lower position P2 to the support position P1, thereby transferring the aligned substrate 9 from the spindle 51 to the support surface 52a. The robot 2 receives the aligned substrate 9 from the support surface 52a.

[0067] The aligner 5 is not limited to one having a support portion 52. The support portion 52 may be omitted from the first aligner 5R and the second aligner 5L. Since the first aligner 5R and the second aligner 5L without the support portion 52 do not transfer or mount the substrate 9, no space is required for the support surface 52a to be detoured. The distance between the first aligner 5R and the second aligner 5L can be narrow. When the distance between the first aligner 5R and the second aligner 5L is narrow, the substrates 9 may overlap when the substrates 9 are transferred or received between the first hand 31 and the second hand 32 and the first aligner 5R and the second aligner 5L.

[0068] The first aligner 5R and the second aligner 5L do not have to be two aligners having separate bases 50. The aligner 5 may have a structure having a first spindle and a second spindle on a single base. Note that the first aligner and the second aligner referred to here are each functional parts including at least a spindle and a sensor so as to perform alignment of the substrate 9.

[0069] The robot 2 may have a first arm and a second arm. The first arm may support a first hand 31, and the second arm may support a second hand 32.

[0070] The transport operation of the robot 2 associated with the first hand 31 and the second hand 32 disclosed herein is not limited to the transport operation of the substrate 9 associated with the aligner 5. The transport operation of the robot 2 disclosed herein may be applied to the transport operation of the substrate 9 associated with the FOUP 41, for example, or to the transport operation of the substrate 9 associated with substrate processing equipment that performs various processes on the substrate 9.

[0071] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0072] (Aspect) The above-described embodiments are examples of the following aspects.

[0073] (Aspect 1) a first placement section (5R) on which a substrate (9) is placed; a second placement portion (5L) on which the substrate (9) is placed, the second placement portion (5L) being located beside the first placement portion (5R); a horizontal articulated transport robot (2) that transports the substrate (9) to the first placement portion (5R) and the second placement portion (5L), the transport robot (2) having a first hand (31) and a second hand (32) that hold the substrate (9), and in which at least one of the first hand (31) and the second hand (32) is displaced in directions in which the first hand (31) and the second hand (32) move away from each other while the first hand (31) is approaching the first placement portion (5R) and the second hand (32) is approaching the second placement portion (5L); Robotic systems (6).

[0074] Since the movement trajectories (TR1, TR2) of the first hand (31) and the second hand (32) when approaching the first receiver (5R) and the second receiver (5L) are optimized, the transport time of the substrate (9) is shortened. The robot system 6 can improve the throughput of processing the substrate (9).

[0075] (Aspect 2) the transfer robot (2) further includes an arm (22) that supports the first hand (31) and the second hand (32) so that they rotate about the same rotation axis (Z3); The first hand (31) and the second hand (32) rotate about the rotation axis (Z3) while approaching the first placement section (5R) and the second placement section (5L) by the drive of the arm (22). 10. The robot system (6) of claim 1.

[0076] The so-called double-handed transfer robot 2 can simultaneously transfer two substrates 9 held by a first hand 31 and a second hand 32 to the first placement part 5R and the second placement part 5L. The double-handed transfer robot 2 is advantageous in improving the throughput of processing the substrates 9.

[0077] (Aspect 3) The first placement portion (5R) and the second placement portion (5L) are positioned symmetrically about a center line (CL) in a plan view, the arm (22) moves the first hand (31) and the second hand (32) closer to the first placement portion (5R) and the second placement portion (5L) so that the rotation axis (Z3) moves on the center line (CL); The first hand (31) and the second hand (32) rotate in opposite directions around the rotation axis (Z3). 3. The robot system (6) according to embodiment 2.

[0078] The first and second placement sections (5R, 5L) are positioned symmetrically with respect to the center line (CL), and the transfer robot (2) can transfer the substrate (9) along the center line (CL) and deliver the substrate (9) to each of the two placement sections (5R, 5L). The movement trajectories (TR1, TR2) of the first hand (31) and second hand (32) are both shortest. The robot system (6) can reduce the transfer time.

[0079] (Aspect 4) When the first hand (31) and the second hand (32) are spaced apart from the first placement portion (5R) and the second placement portion (5L) by a first distance (L1) or more, they approach each other to a position where at least a portion of the substrates (9) overlap each other, When the first hand (31) and the second hand (32) are closer to the first placement portion (5R) and the second placement portion (5L) than the first distance (L1), the first hand (31) and the second hand (32) rotate in opposite directions as they approach the first placement portion (5R) and the second placement portion (5L). The robot system (6) according to embodiment 3.

[0080] When the first hand (31) and the second hand (32) are separated from the first placement section (5R) and the second placement section (5L), the first hand (31) and the second hand (32) move closer to each other, thereby reducing the transport space for the substrate (9).

[0081] When the first hand (31) and the second hand (32) approach the first placement section (5R) and the second placement section (5L), the first hand (31) and the second hand (32) move away from each other, and the transport robot (2) can quickly transport the substrate (9) while avoiding interference between the first hand (31) and the second hand (32) and the first placement section (5R) and the second placement section (5L).

[0082] (Aspect 5) When the first hand (31) delivers or receives the substrate (9) to or from the first placement section (5R) and when the second hand (32) delivers or receives the substrate (9) to or from the second placement section (5L), the first hand (31) and the second hand (32) move away from each other to a position where the substrates (9) do not overlap each other. 5. The robot system (6) of embodiment 4.

[0083] The robot (2) can smoothly transfer and receive the substrate (9) between the first receiver (5R) and the second receiver (5L).

[0084] (Aspect 6) the first placement unit is a first aligner (5R) that aligns the substrate (9), the second mounting portion is a second aligner (5L) that aligns the substrate (9), The first aligner (5R) and the second aligner (5L) each have a support portion (52) that supports the substrate (9) before or after alignment and transfers the substrate (9) between the first aligner (5R) and the second aligner (5L) and a spindle (51); the transfer robot (2) delivers the substrate (9) transferred to the first aligner (5R) or the second aligner (5L) to the spindle (51) or the support part (52), and receives the aligned substrate (9) from the support part (52) or the spindle (51); A robot system (6) according to any one of aspects 1 to 5.

[0085] The support unit 52 has a function of supporting the substrate 9 and a function of transferring the substrate 9 to and from the spindle 51. The support unit 52 enables the transfer robot 2 to transfer the next substrate 9 while the first aligner 5R and the second aligner 5L are aligning the substrate 9. The robot system 6 can significantly improve the throughput of substrate 9 alignment.

[0086] (Aspect 7) The support portion (52) supports the substrate (9) above the spindle (51) and moves up and down to transfer the substrate (9) to and from the spindle (51). A robot system (6) according to embodiment 6.

[0087] Because the support portion 52 and the spindle 51 are vertically stacked, the movement trajectories (TR1, TR2) of the first hand 31 and the second hand 32 are the same in a plan view whether the first hand 31 and the second hand 32 approach the support portion 52 or the first hand 31 and the second hand 32 approach the spindle 51. Sharing the movement trajectories (TR1, TR2) reduces the burden of teaching the robot 2.

[0088] (Aspect 8) the transfer robot (2) transfers the substrate (9) from the first placement part (5R) and the second placement part (5L); At least one of the first hand (31) and the second hand (32) is displaced in a direction in which the first hand (31) and the second hand (32) approach each other while the first hand (31) is moving away from the first placement section (5R) and the second hand (32) is moving away from the second placement section (5L). A robot system (6) according to any one of aspects 1 to 7.

[0089] Even when the first hand 31 and the second hand 32 move away from the first placement part 5R and the second placement part 5L, the movement trajectories TR1, TR2 of the first hand 31 and the second hand 32 are optimized. The robot system 6 can shorten the transport time of the substrate 9, thereby improving the throughput of processing the substrate 9.

[0090] (Aspect 9) a first placement section (5R) on which a substrate (9) is placed; a second placement portion (5L) on which the substrate (9) is placed, the second placement portion (5L) being located beside the first placement portion (5R); The transport robot (2) is a horizontal articulated transport robot (2) that transports the substrate from the first mounting portion (5R) and the second mounting portion (5L), and has a first hand (31) and a second hand (32) that hold the substrate (9), and at least one of the first hand (31) and the second hand (32) is displaced in a direction in which the first hand (31) and the second hand (32) approach each other while the first hand (31) is moving away from the first mounting portion (5R) and the second hand (32) is moving away from the second mounting portion (5L). Robotic systems (6).

[0091] (Aspect 10) The first hand (31) and the second hand (32) are edge grip hands that grip the edges of the substrate (9). A robot system (6) according to any one of aspects 1 to 9.

[0092] Because the edge grip hands are large in size, there is a risk of interference between the first hand 31 and the second hand 32 and the first mounting portion 5R and the second mounting portion 5L. The displacement of the first hand 31 and the second hand 32 in directions away from each other while approaching the first mounting portion 5R and the second mounting portion 5L allows the first hand 31 and the second hand 32 to approach or recede from the first mounting portion 5R and the second mounting portion 5L while avoiding interference between the large-sized first hand 31 and the second hand 32 and the first mounting portion 5R and the second mounting portion 5L.

[0093] (Aspect 11) A first hand (31) of a horizontal articulated transfer robot (2) approaches a first placement section (5R) on which a substrate (9) is placed, and a second hand (32) of the transfer robot (2) approaches a second placement section (5L), while the first hand (31) is approaching the first placement section (5R) and the second hand (32) is approaching the second placement section (5L), at least one of the first hand (31) and the second hand (32) is displaced in a direction in which the first hand (31) and the second hand (32) move away from each other, The first hand (31) reaches the first placement section (5R), and the second hand (32) reaches the second placement section (5L) located beside the first placement section (5R). A method for controlling a robot system (6).

[0094] (Aspect 12) A first hand (31) of a horizontal articulated transfer robot (2) moves away from a first placement section (5R) on which a substrate is placed, and a second hand (32) of the transfer robot (2) moves away from a second placement section (5L) located beside the first placement section (5R), while the first hand (31) is moving away from the first placement section (5R) and the second hand (32) is moving away from the second placement section (5L), at least one of the first hand (31) and the second hand (32) is displaced in a direction in which the first hand (31) and the second hand (32) approach each other, The first hand (31) and the second hand (32) overlap each other. A method for controlling a robotic system.

[0095] (Aspect 13) a transfer robot (2) having a first hand (31) and a second hand (32) transfers a first substrate (9) and a second substrate (9) to a first aligner (5R) and a second aligner (5L), and delivers the first substrate (9) and the second substrate (9) to the first aligner (5R) and the second aligner (5L); The first aligner (5R) and the second aligner (5L) perform alignment of the first substrate (9) and the second substrate (9), During the alignment of the first substrate (9) and the second substrate (9), the transfer robot (2) transfers a third substrate (9) and a fourth substrate (9) to the first aligner (5R) and the second aligner (5L); the transfer robot (2) delivers the third substrate (9) and the fourth substrate (9) to the first aligner (5R) and the second aligner (5L), and receives the aligned first substrate (9) and the second substrate (9) from the first aligner (5R) and the second aligner (5L); A method for aligning a substrate (9).

[0096] While the first aligner (5R) and the second aligner (5L) are aligning the substrate (9), the transfer robot (2) transfers the next substrate (9), thereby significantly improving the throughput of substrate (9) alignment.

[0097] (Aspect 14) The transfer robot (2) delivers the first substrate (9) to the support portion (52) of the first aligner (5R) and delivers the second substrate (9) to the support portion (52) of the second aligner (5L); After the first aligner (5R) transfers the first substrate (9) from the support part (52) to the spindle (51) and the second aligner (5L) transfers the second substrate (9) from the support part (52) to the spindle (51), the first aligner (5R) and the second aligner (5L) align the first substrate (9) and the second substrate (9); The transfer robot (2) receives the aligned first substrate (9) from the spindle (51) of the first aligner (5R), and receives the aligned second substrate (9) from the spindle (51) of the second aligner (5L). A method for aligning a substrate (9) according to embodiment 13.

[0098] The support parts 52 of the first aligner 5R and the second aligner 5L support the substrate 9, and the first aligner 5R and the second aligner 5L transfer the substrate 9 between the support parts 52 and the spindle 51, thereby enabling transportation of the substrate 9 during alignment. [Explanation of symbols]

[0099] 2. Robot (transport robot) 22 Arm 3 hands 31 First Hand 32 Second Hand 5 Aligner 51 Spindle 52 Support part 5R First aligner (first placement part) 5L Second aligner (second placement section) 6. Robot Systems 9 Substrate CL Chuo Line Z3 3rd axis (rotation axis)

Claims

1. a first placement portion on which a substrate is placed; a second mounting portion on which the substrate is mounted, the second mounting portion being located beside the first mounting portion; a horizontal articulated transport robot that transports the substrate to the first platform and the second platform, the transport robot having a first hand and a second hand that hold the substrate, and in which at least one of the first hand and the second hand is displaced in a direction away from each other while the first hand is approaching the first platform and the second hand is approaching the second platform; Robot system.

2. 2. The robot system according to claim 1, the transfer robot further includes an arm that supports the first hand and the second hand so that the first hand and the second hand rotate about a same rotation axis; At least one of the first hand and the second hand rotates around the rotation axis while approaching the first placement unit and the second placement unit by driving the arm. Robot system.

3. 3. The robot system according to claim 2, the first placement portion and the second placement portion are positioned symmetrically about a center line in a plan view, the arm moves the first hand and the second hand closer to the first placement unit and the second placement unit so that the rotation axis moves on the center line; the first hand and the second hand rotate in opposite directions about the rotation axis; Robot system.

4. 4. The robot system according to claim 3, When the first hand and the second hand are spaced apart from the first placement unit and the second placement unit by a first distance or more, the first hand and the second hand approach each other to a position where at least a portion of the substrates overlap with each other, When the first hand and the second hand are closer to the first placement unit and the second placement unit than the first distance, the first hand and the second hand rotate in opposite directions as they approach the first placement unit and the second placement unit. Robot system.

5. The robot system according to claim 4, when the first hand delivers or receives the substrate to or from the first mounting part and when the second hand delivers or receives the substrate to or from the second mounting part, the first hand and the second hand move away from each other to a position where the substrates do not overlap. Robot system.

6. 2. The robot system according to claim 1, the first mounting part is a first aligner that aligns the substrate, the second mounting part is a second aligner that aligns the substrate, the first aligner and the second aligner each have a support portion that supports the substrate before or after alignment and transfers the substrate between the first aligner and a spindle; the transfer robot delivers the substrate transferred to the first aligner or the second aligner to the spindle or the support unit, and receives the aligned substrate from the support unit or the spindle. Robot system.

7. 7. The robot system according to claim 6, the support section supports the substrate at a position above the spindle, and moves up and down to transfer the substrate to and from the spindle. Robot system.

8. 2. The robot system according to claim 1, the transfer robot transfers the substrate from the first placement part and the second placement part; At least one of the first hand and the second hand is displaced in a direction in which the first hand and the second hand approach each other while the first hand is moving away from the first placement unit and the second hand is moving away from the second placement unit. Robot system.

9. a first placement portion on which a substrate is placed; a second mounting portion on which the substrate is mounted, the second mounting portion being located beside the first mounting portion; a horizontal articulated transport robot that transports the substrate from the first platform and the second platform, the transport robot having a first hand and a second hand that hold the substrate, and in which at least one of the first hand and the second hand is displaced in a direction in which the first hand and the second hand approach each other while the first hand is retracting from the first platform and the second hand is retracting from the second platform, Robot system.

10. The robot system according to claim 1 or 9, the first hand and the second hand are edge grip hands that grip the edges of the substrate; Robot system.

11. a first hand of a horizontal articulated transport robot approaches a first mounting portion on which a substrate is to be placed, and a second hand of the transport robot approaches a second mounting portion; while the first hand is approaching the first placement section and the second hand is approaching the second placement section, at least one of the first hand and the second hand is displaced in a direction in which the first hand and the second hand are separated from each other, The first hand reaches the first placement unit, and the second hand reaches the second placement unit located beside the first placement unit. A method for controlling a robotic system.

12. a first hand of a horizontal articulated transport robot moves away from a first mounting portion on which a substrate is placed, and a second hand of the transport robot moves away from a second mounting portion located beside the first mounting portion; while the first hand is moving away from the first placement unit and the second hand is moving away from the second placement unit, at least one of the first hand and the second hand is displaced in a direction in which the first hand and the second hand approach each other, The first hand and the second hand overlap each other. A method for controlling a robotic system.

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