Mounting apparatus

Abstract

To provide a mounting device capable of improving reliability of mounting by confirming a state in which a workpiece is thermocompression-bonded during production from a viewpoint different from a temperature sensor provided in a heater.SOLUTION: The controller 7 of the mounting device 1 includes an application information acquiring unit 11 that acquires timing at which the pressurizing unit pressurizes the work 100 with the mounting tool 5 and application information about power applied to the heater 4 by the heater control unit 6, an application amount calculating unit 12 that calculates a no-load application amount per predetermined time, calculates a pressure application amount in a pressure application time calculated from the pressure application information and the pressure application time from a first time T1 to a second time T2 acquired by the application information acquiring unit 11 while the pressurizing unit pressurizes the work 100, and calculates a pressure application release application amount by subtracting a value of the no-load application amount during a time corresponding to the pressure application time from the pressure application amount, and a determining unit 16 that determines whether the pressure application release application amount is within a predetermined range.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a mounting device used when mounting components on a substrate via, for example, a bonding material (ACF or the like). [Background technology]

[0002] Conventionally, as shown in Patent Document 1, for example, components (e.g., FPCs) have been mounted on substrates via bonding materials such as anisotropic conductive film (ACF) or anisotropic conductive paste (ACP) containing conductive particles and thermosetting resin. A mounting device (see Patent Document 2, for example) used to mount such workpieces containing anisotropic conductive film or the like includes a mounting head that can move toward and away from a workpiece placed on the device, and the mounting head is equipped with a heater that conducts heat to a mounting tool attached to the bottom end of the head. By pressing the mounting tool heated by the heater against the workpiece, the substrate and the component are electrically connected by the conductive particles and the thermosetting resin is cured to bond them together.

[0003] Such heaters are electrically connected to a heater control unit, and the heater control unit changes the temperature of the heater by changing the power supplied to the heater. Also, a temperature sensor such as a thermocouple is attached inside the heater, and the heater control unit changes the power supplied to the heater based on the temperature information obtained by this temperature sensor. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-82582 [Patent Document 2] Japanese Patent Application Publication No. 2017-118147 Summary of the Invention [Problem to be solved by the invention]

[0005] By monitoring temperature information from a temperature sensor that measures the heater temperature, it is possible to indirectly confirm whether the workpieces were mounted without any problems. However, because the workpiece temperature is not directly monitored, it is impossible to detect defects such as poor conductivity caused by heat being transferred from the mounting tool to the joining material before the mounting tool makes full contact with the workpiece, causing the thermosetting resin to harden before the conductive particles contained in the joining material are fully crushed (pre-hardening). If such defects occur, there is a concern that production will continue and a large number of defective products will be produced, so relying solely on temperature sensors poses a risk.

[0006] In view of these points, the present invention aims to provide a mounting device that can improve the reliability of mounting by checking the state in which the workpiece is thermocompressed during production from a perspective other than that of the temperature sensor equipped in the heater. [Means for solving the problem]

[0007] The present invention relates to a mounting device for thermocompression bonding a workpiece having a joining member interposed between a first member and a second member, the device comprising: a mounting head having a pressure unit that presses the workpiece by directly or indirectly pressing a mounting tool against the second member, and a heater that heats the mounting tool; a heater control unit that applies power to the heater to cause the heater to generate heat; and a controller that can control the mounting head and is connected to the heater control unit, wherein the controller controls application information relating to the timing at which the pressure unit presses the workpiece with the mounting tool and the power that the heater control unit applies to the heater when the mounting head presses and heats the workpiece. an application amount calculation unit that calculates a no-load application amount per predetermined time calculated from the application information acquired by the application information acquisition unit when the pressure unit is not applying pressure to the workpiece, calculates a pressure application amount during the pressure time from a first time to a second time acquired by the application information acquisition unit when the pressure unit is applying pressure to the workpiece and the pressure application amount during the pressure application time calculated from the application information, and calculates a pressure application amount released during pressure application by subtracting the value of the no-load application amount during the time corresponding to the pressure application time from the pressure application amount; and a determination unit that determines whether the pressure application amount released during pressure application is within a predetermined range.

[0008] The present invention also provides a mounting device for thermocompression bonding a workpiece having a joining member interposed between a first member and a second member, the device comprising: a mounting head having a pressure unit that presses the workpiece by directly or indirectly pressing a mounting tool against the second member to apply pressure to the workpiece; a heater that heats the mounting tool; a heater control unit that applies power to the heater to cause the heater to generate heat; and a controller that can control the mounting head and is connected to the heater control unit, wherein the controller has an application information acquisition unit that acquires application information related to the timing at which the pressure unit presses the workpiece with the mounting tool and the power that the heater control unit applies to the heater when the mounting head presses and heats the workpiece; calculates a no-load application amount per predetermined time calculated from the application information acquired by the application information acquisition unit when the pressure unit is not pressing the workpiece; and calculates a pressure application time from a first time to a second time acquired by the application information acquisition unit when the pressure unit presses the workpiece and a pressure application amount during the pressure application time calculated from the application information when the pressure unit presses the workpiece. and an application amount calculation unit that calculates a discharged application amount during compression by subtracting a value of the no-load application amount during a time period corresponding to the pressurizing time from the application amount during compression, wherein the application information acquisition unit is capable of acquiring reference application information regarding the timing at which the pressurizing unit presses the reference workpiece and the power that the heater control unit applies to the heater when a reference workpiece having a known heat capacity is pressurized and heated by the mounting head, and the application amount calculation unit calculates the discharged application amount during compression by subtracting a value of the no-load application amount during a time period corresponding to the pressurizing time from the application amount during compression, The reference pressure application amount of the reference workpiece corresponding to the pressure application amount of the workpiece can be calculated from the timing of pressurizing the reference workpiece and the reference application information acquired by the information acquisition unit, and the controller further calculates a reference conductive heat amount conducted to the reference workpiece from a temperature information measurement unit that measures the temperature of the reference workpiece and the heat capacity of the reference workpiece and the temperature of the reference workpiece obtained by the temperature information measurement unit, and creates a table or relational expression that relates the reference conductive heat amount to the reference pressure application amount,The apparatus is characterized by comprising a conduction heat amount calculation unit that calculates the conduction heat amount of the workpiece based on the reference conduction heat amount related to the reference pressure-bonding discharge application amount corresponding to the pressure-bonding discharge application amount by referring to the table or the relational expression, and a determination unit that determines whether the conduction heat amount is within a predetermined range.

[0009] The present invention also provides a mounting device for thermocompression bonding a workpiece having a joining member interposed between a first member and a second member, the device comprising: a mounting head having a pressure unit that presses the workpiece by directly or indirectly pressing a mounting tool against the second member, and a heater that heats the mounting tool; a heater control unit that applies power to the heater to cause the heater to generate heat; and a controller that can control the mounting head and is connected to the heater control unit, wherein the controller has an application information acquisition unit that acquires application information related to the timing at which the pressure unit presses the workpiece with the mounting tool and the power that the heater control unit applies to the heater when the mounting head presses and heats the workpiece; and and a pattern creation unit that creates an application pattern based on the timing at which the work is pressurized and the application information, wherein the application information acquisition unit is capable of acquiring reference application information regarding the timing at which the pressure unit pressurizes the reference work and the power that the heater control unit applies to the heater when a reference work that is similar to the work is pressurized and heated by the mounting head, and the pattern creation unit is capable of creating a reference application pattern based on the timing at which the reference work is pressurized and the reference application information acquired by the application information acquisition unit when the reference work is pressurized and heated by the mounting head, and the controller further comprises a discrimination unit that compares the application pattern with the reference application pattern and determines whether a difference between the application pattern and the reference application pattern is within a predetermined range. [Effects of the Invention]

[0010] The mounting device of the present invention acquires application information regarding the timing of pressurizing the workpiece and the power to be applied to the heater using an application information acquisition unit. Mounting devices equipped with an application amount calculation unit and a determination unit can determine whether the application amount calculated based on the application information is within a predetermined range. Mounting devices equipped with an application amount calculation unit, a temperature information measurement unit, a conduction heat calculation unit, and a determination unit can determine whether the conduction heat calculated based on the application information is within a predetermined range. Mounting devices equipped with a pattern creation unit and a determination unit can determine whether the difference in the application pattern created based on the application information is within a predetermined range. Thus, the mounting device of the present invention can confirm the thermocompression bonding status of the workpiece during production from a perspective different from that of the temperature sensor equipped in the heater, thereby enabling highly reliable mounting of the workpiece. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a diagram schematically illustrating an embodiment of a mounting apparatus according to the present invention. [Figure 2] FIG. 2 is a diagram illustrating a configuration of a controller. [Figure 3A] FIG. 10 is a diagram relating to a voltage applied to a heater from a heater control unit. [Figure 3B] FIG. 10 is a diagram relating to the current applied to the heater from the heater control unit. [Figure 3C] FIG. 10 is a diagram relating to the power applied to the heater from the heater control unit. [Figure 3D] FIG. 3D is a diagram illustrating the power shown in FIG. 3C. [Figure 4] FIG. 10 is a diagram showing an example of a table relating a reference amount of heat conduction to a reference amount of applied discharge power during compression bonding. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, one embodiment of a mounting device (mounting device 1) according to the present invention will be described with reference to the drawings. In the following description, the orientation shown in Fig. 1 (the orientation in which a work 100, which will be described later, is positioned below and a mounting head 2 is positioned above) will be described, but this orientation is merely an example and is not intended to limit the orientation of the mounting device according to the present invention.

[0013] First, we will explain the points related to the workpiece 100 to be thermocompression bonded by the mounting apparatus 1. As shown in Fig. 1, the workpiece 100 of this embodiment has an ACF 103 interposed between a substrate 101 and an electronic component 102 such as an FPC. The substrate 101 corresponds to the "first member" in this specification. Similarly, the electronic component 102 corresponds to the "second member," and the ACF 103 corresponds to the "joining member."

[0014] In this embodiment, when the mounting device 1 thermocompresses the workpiece 100, a buffer material 110 is also used. The buffer material 110 may be, for example, a silicone rubber sheet or a tape with a polytetrafluoroethylene (PTFE) film base.

[0015] The buffer material 110 is arranged to cover the top surface of the electronic component 102 when the workpiece 100 is thermocompression-bonded. When the mounting apparatus 1 thermocompression-bonds the workpiece 100, the mounting tool 5 (described later) presses the electronic component 102. If the mounting tool 5 comes into direct contact with the electronic component 102 at this time, it is conceivable that the electronic component 102 may be damaged. However, by covering the top surface of the electronic component 102 with the buffer material 110 and pressing the buffer material 110 with the mounting tool 5, it is possible to prevent the electronic component 102 from being damaged. Furthermore, depending on the type of electronic component 102, the top surface may have an uneven shape, and it is expected that the height of these unevenness will vary depending on, for example, individual differences between the electronic components 102. Even in such cases, the use of the buffer material 110 absorbs this height variation, allowing the electronic component 102 to be uniformly pressed.

[0016] In this embodiment, a buffer temperature sensor 111 for measuring the temperature of the buffer 110 is attached to the buffer 110. One example of the buffer temperature sensor 111 is a clip that can clamp the buffer 110 and has a thermocouple built into it. When attaching the buffer temperature sensor 111 to the buffer 110, it is preferable to position it as close as possible to the part that is pressed by the mounting tool 5. The buffer 110 used has a known heat capacity. The heat capacity HCB (unit: J / K) of the buffer 110 can be calculated by multiplying the specific heat of the material used by the volume of the buffer 110.

[0017] The dotted line in FIG. 1 indicates a reference workpiece 200, which is similar to the workpiece 100 and is used, for example, when mass production of the workpiece 100 is started by the mounting apparatus 1. The reference workpiece 200 is of the same size as the workpiece 100 and can be heated by the mounting apparatus 1. The reference workpiece 200 is preferably formed from a material with high thermal conductivity and excellent heat resistance and strength, and is formed from aluminum nitride in this embodiment. The reference workpiece 200 has a known heat capacity. The specific heat of aluminum nitride is, for example, 720 [J / (kg·K)], so the heat capacity HCS (unit: J / K) of the reference workpiece 200 can be calculated by multiplying this specific heat by the volume of the reference workpiece 200.

[0018] In this embodiment, the reference workpiece 200 is provided with a reference workpiece temperature sensor 201 such as a thermocouple, and the temperature of the reference workpiece 200 can be measured.

[0019] Next, we will explain the configuration of the mounting apparatus 1. The mounting apparatus 1 of this embodiment includes the mounting head 2, heater control unit 6, and controller 7 shown in FIG.

[0020] The mounting head 2 includes a head main body 3 shown in Fig. 1 and a pressure unit (not shown). The head main body 3 is provided so as to be movable in the vertical direction relative to a base (not shown) provided on the mounting device 1, and moves up and down when the pressure unit is driven, and when it moves down, it can apply pressure to the workpiece 100. The pressure unit can be configured, for example, by a device that uses a servo motor to rotate a feed screw to move a nut back and forth, a shaft motor in which a mover moves back and forth relative to a shaft without contact, or a cylinder in which a rod moves back and forth when a medium such as air is introduced.

[0021] Furthermore, the mounting head 2 is equipped with a heater 4 attached to the lower end of the head main body 3. The heater 4 has a heat generating portion that generates heat when power is applied. Methods for generating heat from the heater 4 include, for example, a constant heat method and a pulse heat method. The heater 4 in this embodiment is a pulse heater that heats using the pulse heat method, and the heater 4 is equipped with a temperature sensor such as a thermocouple.

[0022] The mounting head 2 also includes a mounting tool 5 attached to the lower end of the heater 4. The mounting tool 5 is formed in a shape that allows it to press against the portion of the electronic component 102 that comes into contact with the ACF 103. The mounting tool 5 is preferably formed from a material with high thermal conductivity. In this embodiment, the mounting tool 5 is made of aluminum nitride.

[0023] The heater control unit 6 has a function of applying power to the heater 4 to cause the heater 4 to generate heat. The heater control unit 6 in this embodiment is composed of a temperature regulator 6a and a power regulator 6b, which are electrically connected to each other. The temperature regulator 6a is electrically connected to a temperature sensor in the heater 4 and the controller 7, and the power regulator 6b is electrically connected to a heat-generating portion of the heater 4. The temperature regulator 6a outputs an electrical signal to the power regulator 6b, based on an electrical signal related to the target temperature of the heater 4 output from the controller 7 and an electrical signal related to the temperature of the heater 4 obtained from the temperature sensor in the heater 4, including information related to the amount of power output by the power regulator 6b to the heater 4 (hereinafter referred to as "power information"). The power regulator 6b outputs power (AC power) to the heater 4 that results in a predetermined voltage and current, based on the electrical signal from the temperature regulator 6a. Here, the power information is, for example, the voltage value and current value of the electrical signal output from the temperature regulator 6a to the power regulator 6b. In this case, the power regulator 6b outputs power to the heater 4 according to the magnitude of the voltage value, etc. of this electrical signal. For example, when the voltage value of this electrical signal changes from 0 V to 10 V, the magnitude of the power output from the power regulator 6b to the heater 4 changes from 0% to 100%. Here, the voltage value and current value of the power output from the power regulator 6b to the heater 4 are referred to as "power regulator output information." The above-mentioned power information and power regulator output information are collectively referred to as "application information." In other words, the application information is information regarding the power applied to the heater 4 by the heater control unit 6, and includes, for example, the voltage value and current value of the electrical signal output from the temperature regulator 6a to the power regulator 6b, and the voltage value and current value of the power output from the power regulator 6b to the heater 4. Furthermore, there is a similar relationship between the power information and the power regulator output information, such as the relationship between the voltage value of the electrical signal of the temperature regulator 6a and the magnitude of the power of the power regulator 6b, given as an example.

[0024] The controller 7 is electrically connected to the mounting head 2, heater control unit 6, and other components of the mounting apparatus 1. The controller 7 of this embodiment can also be electrically connected to the buffer temperature sensor 111 and reference workpiece temperature sensor 201. As shown in FIG. 2 , the controller 7 includes a control unit 8 that receives electrical signals containing information from various devices connected to the controller 7 and outputs electrical signals containing information for operating these devices to control these devices; a memory unit 9 connected to the control unit 8 and stores programs for operating the control unit 8 and various information; and an output unit 10 connected to the control unit 8 and provides information related to the mounting apparatus 1 to the worker visually and audibly. The control unit 8 can be configured, for example, as a programmable logic controller (PLC) or a dedicated board. The memory unit 9 can be configured, for example, as a semiconductor memory or a hard disk drive. The output unit 10 can be configured, for example, as a simple light-emitting device such as an LED, a device that specifically displays various information such as a display, or a device that emits sound such as a buzzer or speaker.

[0025] The control unit 8 of this embodiment is capable of controlling various devices connected to the controller 7, and is also configured to function as the following application information acquisition unit 11, application amount calculation unit 12, temperature information measurement unit 13, conduction heat calculation unit 14, pattern creation unit 15, discrimination unit 16, and adjustment unit 17.

[0026] The application information acquisition unit 11 has the function of acquiring application information regarding the timing at which the pressure unit applies pressure to the workpiece 100 with the mounting tool 5 and the power that the heater control unit 6 applies to the heater 4 when the mounting head 2 applies pressure and heat to the workpiece 100.

[0027] Furthermore, when the mounting head 2 pressurizes and heats the reference work 200 described above, the application information acquisition unit 11 has a function of acquiring information (hereinafter referred to as "reference application information") regarding the timing at which the pressurizing unit pressurizes the reference work 200 and the power that the heater control unit 6 applies to the heater 4. The reference application information corresponds to the application information described above (power information and power regulator output information when the mounting device 1 thermocompresses the work 100), and is a collective term for the power information (reference power information) and power regulator output information (reference power regulator output information) when the mounting device 1 thermocompresses the reference work 200.

[0028] The applied amount calculation unit 12 calculates the no-load applied amount Eu0 per predetermined time calculated from the applied information acquired by the applied information acquisition unit 11 when the pressure unit is not applying pressure to the workpiece 100, and also calculates the pressure time from the first time T1 to the second time T2 acquired by the applied information acquisition unit 11 when the pressure unit is applying pressure to the workpiece 100 (see FIGS. 3A to 3C) and the applied amount E1 during this pressure time calculated from the applied information.Furthermore, it has the function of subtracting the no-load applied amount E0 during the time corresponding to this pressure time (the no-load applied amount Eu0 per predetermined time described above converted to a value per time from the first time T1 to the second time T2) from the applied amount E1 during pressure bonding to calculate the discharge applied amount E2 during pressure bonding.The first time T1 and the second time T2 are arbitrary times corresponding to the period (sampling period) at which the applied information acquisition unit 11 acquires voltage and current values. 3A to 3C, the first time T1 coincides with the pressure application start time Ts when the pressure application unit of the mounting head 2 is driven to lower the head main body 3 and starts applying pressure to the workpiece 100, but the first time T1 may be after the pressure application start time Ts. The second time T2 is before the pressure application end time Tf when the pressure application unit of the mounting head 2 is driven to lift the head main body 3 and ends applying pressure to the workpiece 100, but the second time T2 may coincide with the pressure application end time Tf.

[0029] In addition, the application amount calculation unit 12 has the function of calculating the standard pressure application amount ES of the reference work 200, which corresponds to the pressure application amount E2, from the timing of applying pressure to the reference work 200 acquired by the application information acquisition unit 11 when the mounting head 2 applies pressure and heat to the reference work 200 and the standard application information described above.

[0030] Here, the application information acquiring unit 11 and the application amount calculating unit 12 will be specifically described with reference to FIGS. 3A to 3D. In the voltage graph in FIG. 3A, the vertical axis represents the AC voltage value (unit: V) applied to the heater 4 by the power regulator 6b, acquired as application information by the application information acquiring unit 11, and the horizontal axis represents time (unit: seconds). In the current graph in FIG. 3B, the vertical axis represents the AC current value (unit: A) applied to the heater 4 by the power regulator 6b, acquired as application information by the application information acquiring unit 11, and the horizontal axis represents time. In the power graph in FIG. 3C, the vertical axis represents the product of the voltage value and current value acquired by the application information acquiring unit 11, expressed as power (unit: W), and the horizontal axis represents time. Each graph in FIGS. 3A to 3C is drawn as if it were filled in, but this is because the cycle (sampling cycle) for acquiring voltage and current values ​​by the application information acquiring unit 11 is extremely short. That is, the application information acquiring unit 11 can acquire voltage values, current values, and power values ​​in real time. The voltage values, current values, and power values ​​acquired by the application information acquiring unit 11 and the times at which they were acquired are stored in the storage unit 9. For ease of explanation, Fig. 3D is a diagram that shows a schematic representation of the graph shown in Fig. 3C as filled in, but shown as white.

[0031] 3C and 3D, the application amount calculation unit 12 checks the power value before the pressurization start time Ts and the power value after the pressurization end time Tf. Then, the unit 12 calculates the average of the power value per predetermined time before the pressurization start time Ts and the power value per predetermined time after the pressurization end time Tf as the no-load application amount Eu0. The no-load application amount Eu0 per predetermined time may be set using only the power value per predetermined time before the pressurization start time Ts or only the power value per predetermined time after the pressurization end time Tf.

[0032] The applied power calculation unit 12 also checks the pressure application time from the first time T1 to the second time T2 acquired by the application information acquisition unit 11 while the pressure unit is applying pressure to the workpiece 100, and the power value during this pressure application time. The power value during this pressure application time is then calculated as the above-mentioned applied power E1 (unit: J).

[0033] Furthermore, the application amount calculation unit 12 calculates the no-load application amount E0 (unit: J) during the time corresponding to the pressure application time using the calculated pressure application time (second time T2 - first time T1) and the no-load application amount Eu0 per predetermined time. Then, by subtracting the no-load application amount E0 during the pressure application time from the pressure application amount E1, the pressure application amount calculation unit 12 calculates the pressure application amount E2 (unit: J) (E2 = E1 - E0). In FIG. 3D, the pressure application amount E2 roughly corresponds to the area of ​​a rectangular portion located between the first time T1 and the second time T2 and between the power values ​​P0 and P1.

[0034] The temperature information measurement unit 13 has a function of measuring the temperature of the reference workpiece 200 based on information from the reference workpiece temperature sensor 201 described above.

[0035] The temperature information measurement unit 13 also has a function of measuring the temperature of the buffer material 110 based on information from the buffer material temperature sensor 111 when the workpiece 100 is thermocompression bonded using the buffer material 110 .

[0036] The conduction heat quantity calculation unit 14 has the function of calculating a reference conduction heat quantity QS conducted to the reference workpiece 200 from the heat capacity HCS of the reference workpiece 200 and the temperature of the reference workpiece 200 obtained by the temperature information measurement unit 13, creating a table or relational expression relating the reference conduction heat quantity QS to the reference crimping release application quantity ES, and further calculating the conduction heat quantity Q of the workpiece 100 based on the reference conduction heat quantity QS related to the reference crimping release application quantity ES corresponding to the crimping release application quantity E2 by referring to this table or relational expression. Here, the table relating the reference conduction heat quantity QS to the reference crimping release application quantity ES is, for example, as shown in Figure 4, and relates a plurality of values ​​of the reference crimping release application quantity ES to the corresponding values ​​of the crimping release application quantity E2. The relational expression relating the reference conduction heat quantity QS and the reference crimping discharge application amount ES is an expression that interpolates these discrete numerical values ​​when there are multiple values ​​of the reference crimping discharge application amount ES and the crimping discharge application amount E2, for example, as shown in Figure 4. One example of such a relational expression is a linear approximation curve obtained by the least squares method based on the multiple values ​​of the reference crimping discharge application amount ES and the crimping discharge application amount E2.

[0037] In addition, when the workpiece 100 is thermally compressed using the buffer material 110, the conduction heat calculation unit 14 has the function of calculating the buffer material conduction heat QB conducted to the buffer material 110 from the heat capacity HCB of the buffer material 110 and the temperature of the buffer material 110 obtained by the temperature information measurement unit 13, and subtracting the buffer material conduction heat QB from the conduction heat Q of the workpiece 100 to calculate the corrected conduction heat QR of the workpiece 100.

[0038] The pattern creation unit 15 has a function of creating an application pattern based on the timing and application information for applying pressure to the workpiece 100 from the first time T1 to the second time T2 acquired by the application information acquisition unit 11. When, for example, power regulator output information relating to the voltage and current values ​​output from the power regulator 6b to the heater 4 is used as the application information acquired by the application information acquisition unit 11, the pattern creation unit 15 creates, as image data, graphs relating to the voltage, current, and power from the first time T1 to the second time T2 shown in Figures 3A to 3C. The pattern creation unit 15 also has a function of creating a reference application pattern based on the timing and the above-mentioned reference application information for applying pressure to the reference workpiece 200 acquired by the application information acquisition unit 11 when the mounting head 2 applies pressure and heat to the reference workpiece 200. That is, when the reference power regulator output information relating to the voltage value and current value output from the power regulator 6b to the heater 4 is used as the reference application information acquired by the application information acquisition unit 11, the pattern creation unit 15 has a function of creating graphs as image data for the reference workpiece 200, such as those shown in Figures 3A to 3C. The created image data relating to the graph of the workpiece 100 and the image data relating to the graph of the reference workpiece 200 are stored in the storage unit 9.

[0039] The discrimination unit 16 has the function of making a discrimination regarding the above-mentioned pressure-bonding discharge application amount E2, a discrimination regarding the above-mentioned conduction heat amount Q, a discrimination regarding the above-mentioned corrected conduction heat amount QR, and a discrimination regarding the above-mentioned application pattern and reference application pattern.

[0040] Here, with regard to the pressure-bonding release application amount E2, the determination unit 16 has a function of determining whether the pressure-bonding release application amount E2 is within a predetermined range. The predetermined range related to the pressure-bonding release application amount E2 may be determined based on the theoretical value if it can be theoretically derived, or may be determined based on the results of test production of the workpiece 100 performed before mass production of the workpiece 100 is carried out by the mounting apparatus 1. In the embodiment, the value of the predetermined range described above is stored in the memory unit 9, and the determination unit 16 determines whether the pressure-bonding release application amount E2 is within the predetermined range stored in the memory unit 9.

[0041] Furthermore, when the application amount calculation unit 12 calculates the standard crimping release application amount ES of the standard workpiece 200, the determination unit 16 may calculate the difference between the crimping release application amount E2 and the standard crimping release application amount ES, and determine whether this difference is within a predetermined range. In this case as well, the value of the above-mentioned standard range is stored in the memory unit 9, and the determination unit 16 calculates the difference between the crimping release application amount E2 and the standard crimping release application amount ES, and determines whether the value of this difference is within the predetermined range stored in the memory unit 9.

[0042] With regard to the quantity of conduction heat Q, the discrimination unit 16 has a function of determining whether the quantity of conduction heat Q is within a predetermined range. In this embodiment, the value of the above-mentioned predetermined range is stored in the storage unit 9, and the discrimination unit 16 determines whether the value of the quantity of conduction heat Q is within the predetermined range stored in the storage unit 9. With regard to the corrected quantity of conduction heat QR, the discrimination unit 16 has a function of determining whether the corrected quantity of conduction heat QR is within a predetermined range. In this embodiment, the value of the above-mentioned predetermined range is stored in the storage unit 9, and the discrimination unit 16 determines whether the value of the corrected quantity of conduction heat QR is within the predetermined range stored in the storage unit 9.

[0043] The discriminator 16 also has a function of comparing the application pattern with the reference application pattern and determining whether the difference between the application pattern and the reference application pattern is within a predetermined range. To give a specific example, if the application pattern is the power graph shown in FIGS. 3C and 3D, the power slopes at a substantially constant rate from time T1 (pressure start time Ts) to time Ta×2. During this time, the power increases by Pa from time T1 as the reference. The power then remains constant for a while, but then decreases, and at pressurization end time Tf, the power is approximately the same as at pressurization start time Ts. That is, the area increases by (1 / 2)×(Ta×2)×Pa=Ta×Pa from time T1 to time Ta×2 in the application pattern. Here, the reference application pattern, although not shown, has a steeper slope from time T1 compared to the graphs shown in FIGS. 3C and 3D. Specifically, the reference application pattern slopes at a substantially constant rate from time T1 to time Ta in the graphs shown in Figures 3C and 3D, during which the power increases by Pa from time T1 as the reference, becomes constant at Pa from time Ta to time (Ta x 2), and remains the same as the application pattern thereafter. That is, the area increases by (1 / 2) x Ta x Pa + Ta x Pa = (3 / 2) x Ta x Pa from time T1 to time Ta x 2 in the reference application pattern. The determination unit 16 is set to determine that the difference between the application pattern and the reference application pattern is within a predetermined range if the difference in area between the two is within (1 / 4) x Ta x Pa. In this case, the determination unit 16 determines that the difference between the application pattern and the reference application pattern is outside the predetermined range.

[0044] The adjustment unit 17 has a function of adjusting the timing at which the pressure unit of the mounting head 2 applies pressure to the workpiece 100 and / or the power applied by the heater control unit 6 to the heater 4, depending on the discrimination method used by the discrimination unit 16 described above (discrimination method related to the discharge application amount E2 during compression bonding, discrimination method related to the amount of conductive heat Q, discrimination method related to the corrected amount of conductive heat QR, and discrimination method related to the application pattern and the reference application pattern). Note that specific adjustment methods used by the adjustment unit 17 will be described later.

[0045] Next, as a first method for thermocompression bonding the workpiece 100 by the mounting device 1, a specific example will be described in which the application information acquisition unit 11, application amount calculation unit 12, and determination unit 16 provided in the control unit 8 are operated to use a determination method for the application amount E2 released during bonding. Note that the application information acquired by the application information acquisition unit 11 in the following description is power regulator output information related to the voltage value and current value output from the power regulator 6b to the heater 4.

[0046] First, the workpiece 100 is set below the mounting head 2, and pressure and heat are applied to the workpiece 100 by the mounting head 2. In this embodiment, pressure and heat are applied to the workpiece 100 using a buffer material 110.

[0047] The application information acquisition unit 11 acquires the timing at which the pressure unit of the mounting head 2 applies pressure to the workpiece 100 with the mounting tool 5, and also acquires application information regarding the power applied by the heater control unit 6 to the heater 4 (in this embodiment, power regulator output information regarding the voltage and current values ​​output from the power regulator 6b to the heater 4 when heating the workpiece 100).

[0048] The application amount calculation unit 12 calculates the no-load application amount Eu0 per predetermined time of the workpiece 100, which is calculated from the application information (as described above, power regulator output information related to the voltage and current values ​​output from the power regulator 6b to the heater 4 when the workpiece 100 is heated) acquired by the application information acquisition unit 11 when the pressure unit is not applying pressure to the workpiece 100, and also calculates the pressure time from the first time T1 to the second time T2 acquired by the application information acquisition unit 11 when the pressure unit is applying pressure to the workpiece 100 and the application amount E1 during crimping of the workpiece 100 during this pressure time, which is calculated from the application information, and further subtracts the no-load application amount E0 of the workpiece 100 during the time equivalent to this pressure time (the no-load application amount per predetermined time of the workpiece 100 described above converted into a value per time from the first time T1 to the second time T2) from the crimping application amount E1 to calculate the discharge application amount E2 (unit: J) during crimping from the first time T1 to the second time T2. The calculated pressure application amount E2 during compression is stored in the memory unit 9. The first time T1 is the pressure start time Ts when the pressure unit of the mounting head 2 starts applying pressure to the workpiece 100. The predetermined range related to the pressure application amount E2 during compression used in the discrimination unit 16 is derived in advance based on, for example, the results of test production of the workpiece 100 performed before mass production of the workpiece 100 is carried out by the mounting apparatus 1, and this predetermined range is stored in the memory unit 9.

[0049] Next, the discrimination unit 16 determines whether the obtained pressure-bonding discharge application amount E2 is within the predetermined range described above. If the discrimination unit 16 determines that the pressure-bonding discharge application amount E2 is within the predetermined range, the mounting apparatus 1 is operating normally, and the control unit 8 continues the operation of thermocompression bonding the workpiece 100. On the other hand, if the discrimination unit 16 determines that the pressure-bonding discharge application amount E2 is outside the predetermined range pre-stored in the memory unit 9, the control unit 8 issues a notification from the output unit 10 and, if necessary, stops the operation of thermocompression bonding the workpiece 100. This makes it possible to immediately notify the operator that a factor that may cause insufficient curing of the ACF 103 has occurred, and also makes it possible to prevent the production of a large number of defective workpieces 100.

[0050] Incidentally, when the discrimination unit 16 determines that the discharge application amount E2 during compression is outside the predetermined range pre-stored in the memory unit 9, the above-mentioned adjustment unit 17 is activated, making it possible to operate the mounting device 1 without stopping the operation of thermocompression bonding the workpiece 100.

[0051] In this embodiment, when the discrimination unit 16 determines that the pressure application amount E2 from the pressure application start time Ts to the second time T2 is outside a predetermined range pre-stored in the memory unit 9, the adjustment unit 17 has the function of adjusting the timing at which the pressure application unit presses the workpiece 100 and / or the power applied to the heater 4 by the heater control unit 6 from the second time T2 onwards so that the pressure application amount E2 from the time the mounting head 2 starts to press the workpiece 100 to the time it finishes is within a predetermined allowable range.

[0052] With this type of adjustment unit 17, even if it is considered that the required amount of heat has not been applied to the ACF 103 between the pressurization start time Ts and the second time T2, the insufficient amount of heat can be applied after the second time T2, making it possible to continue producing good workpieces 100. Furthermore, with the mounting device 1 of this embodiment, the state in which the workpieces 100 are thermocompression-bonded during production can be confirmed from a perspective different from that of the temperature sensor provided in the heater 4, making it possible to mount the workpieces 100 with high reliability.

[0053] The determination method for the discharge application amount E2 during crimping can be used as follows when the application amount calculation unit 12 calculates the reference discharge application amount ES during crimping of the reference workpiece 200. Note that the application information acquired by the application information acquisition unit 11 in the following description is also assumed to be power regulator output information relating to the voltage value and current value output from the power regulator 6b to the heater 4.

[0054] First, pressure and heat are applied by the mounting head 2 using the reference workpiece 200. After the reference workpiece 200 is set below the mounting head 2, the control unit 8 drives the pressure unit of the mounting head 2 to lower the head main body unit 3, and pressurizes the reference workpiece 200 with the mounting tool 5. In addition, power is supplied from the heater control unit 6 to cause the heater 4 to generate heat, thereby heating the mounting tool 5.

[0055] At this time, the application information acquisition unit 11 acquires the timing when the pressure unit of the mounting head 2 applies pressure to the reference work 200 with the mounting tool 5, and also acquires reference application information regarding the power applied by the heater control unit 6 to the heater 4 (in this embodiment, reference power regulator output information regarding the voltage and current values ​​output from the power regulator 6b to the heater 4 when heating the reference work 200).

[0056] 3A to 3D, the application amount calculation unit 12 calculates the reference no-load application amount ES of the reference workpiece 200. This is calculated from the reference application information (reference power regulator output information relating to the voltage and current values ​​output from the power regulator 6b to the heater 4 when the reference workpiece 200 is heated, as described above) acquired by the application information acquisition unit 11 when the pressure unit is not applying pressure to the reference workpiece 200, and also calculates the reference no-load application amount per predetermined time of the reference workpiece 200 from the first time T1 to the second time T2 acquired by the application information acquisition unit 11 when the pressure unit is applying pressure to the reference workpiece 200. The reference pressure application amount of the reference workpiece 200 during this pressure application time, calculated from the pressure application time and the reference application information described above, is calculated. Furthermore, the reference no-load application amount of the reference workpiece 200 during a time equivalent to this pressure application time (the no-load application amount of the reference workpiece 200 described above per predetermined time converted into a value per time from the first time T1 to the second time T2) is subtracted from the reference pressure application amount of the reference workpiece 200 to calculate the reference pressure application amount ES (unit: J) from the first time T1 to the second time T2. The calculated reference pressure application amount ES is stored in the memory unit 9. In this embodiment, the first time T1 is the pressure application start time Ts when the pressure unit of the mounting head 2 starts applying pressure to the reference workpiece 200, and the second time T2 is the pressure application end time Tf when the pressure application ends. In this embodiment, the application amount calculation unit 12 calculates the reference pressure application amount ES multiple times, from the pressure application start time Ts to the pressure application end time Tf, at predetermined times corresponding to the sampling period.

[0057] After calculating a plurality of reference pressure bonding discharge application amounts ES from the pressure application start time Ts to the pressure application end time Tf in this manner, the workpiece 100 is set below the mounting head 2, and pressure and heat are applied to the workpiece 100 by the mounting head 2. In this embodiment, pressure and heat are applied to the workpiece 100 using a buffer material 110.

[0058] The application information acquisition unit 11 acquires the timing at which the pressure unit of the mounting head 2 applies pressure to the workpiece 100 with the mounting tool 5, and also acquires application information regarding the power applied by the heater control unit 6 to the heater 4 (in this embodiment, power regulator output information regarding the voltage and current values ​​output from the power regulator 6b to the heater 4 when heating the workpiece 100).

[0059] The application amount calculation unit 12 calculates the no-load application amount Eu0 per predetermined time of the workpiece 100, which is calculated from the application information (as described above, power regulator output information related to the voltage and current values ​​output from the power regulator 6b to the heater 4 when the workpiece 100 is heated) acquired by the application information acquisition unit 11 when the pressure unit is not applying pressure to the workpiece 100, and also calculates the pressure time from the first time T1 to the second time T2 acquired by the application information acquisition unit 11 when the pressure unit is applying pressure to the workpiece 100 and the application amount E1 during crimping of the workpiece 100 during this pressure time, which is calculated from the application information, and further subtracts the no-load application amount E0 of the workpiece 100 during the time equivalent to this pressure time (the no-load application amount per predetermined time of the workpiece 100 described above converted into a value per time from the first time T1 to the second time T2) from the crimping application amount E1 to calculate the discharge application amount E2 (unit: J) during crimping from the first time T1 to the second time T2. The calculated pressure application amount E2 during compression bonding is stored in the storage unit 9. The first time T1 is a pressure application start time Ts at which the pressure application unit of the mounting head 2 starts applying pressure to the workpiece 100, and the pressure application amount E2 during compression bonding is acquired multiple times from the pressure application start time Ts to the second time T2 at the same timing as when the reference pressure application amount ES during compression bonding is calculated.

[0060] Next, the discrimination unit 16 calculates the difference between the crimping release application amounts E2 and the standard crimping release application amounts ES acquired at the same timing for the multiple crimping release application amounts E2 and the standard crimping release application amounts ES, and determines whether or not the value of this difference is within a predetermined range pre-stored in the memory unit 9. The discrimination by the discrimination unit 16 may be made based on the difference between the individual crimping release application amounts E2 acquired and the standard crimping release application amounts ES, or may be made based on the difference between the crimping release application amounts E2 that form a continuous predetermined group and the standard crimping release application amounts ES.

[0061] Here, if the discrimination unit 16 determines that the difference between the discharge application amount E2 during compression bonding and the reference discharge application amount ES during compression bonding is within a predetermined range pre-stored in the memory unit 9, the mounting device 1 is deemed to be operating normally, and the control unit 8 continues the operation of thermocompression bonding of the workpiece 100. On the other hand, if the discrimination unit 16 determines that the difference between the discharge application amount E2 during compression bonding and the reference discharge application amount ES during compression bonding is outside the predetermined range pre-stored in the memory unit 9, the control unit 8 issues a notification from the output unit 10 and, if necessary, stops the operation of thermocompression bonding of the workpiece 100. This makes it possible to immediately notify the operator that a factor that may cause insufficient curing of the ACF 103 has occurred, and also makes it possible to prevent the production of a large number of defective workpieces 100.

[0062] Incidentally, when the discrimination unit 16 determines that the difference between the pressure-bonding discharge application amount E2 and the reference pressure-bonding discharge application amount ES is outside the predetermined range pre-stored in the memory unit 9, the above-mentioned adjustment unit 17 is activated, thereby making it possible to operate the mounting device 1 without stopping the operation of thermocompression bonding the workpiece 100.

[0063] In this embodiment, when the discrimination unit 16 determines that the difference between the pressure-bonding discharge application amount E2 from the pressure-bonding start time Ts to the second time T2 and the standard pressure-bonding discharge application amount ES from the pressure-bonding start time Ts to the second time T2 is outside a predetermined range pre-stored in the memory unit 9, the adjustment unit 17 has the function of adjusting the timing at which the pressure unit presses the workpiece 100 and / or the power applied to the heater 4 by the heater control unit 6 from the second time T2 onwards so that the difference between the pressure-bonding discharge application amount E2 from the start to the end of the pressure-bonding application of the workpiece 100 by the mounting head 2 and the standard pressure-bonding discharge application amount ES from the start to the end of the pressure-bonding application of the standard workpiece 200 by the mounting head 2 falls within a predetermined tolerance range. To explain this point using a specific example, the discrimination unit 16 calculates the sum of the multiple reference pressure-bonding discharge application amounts E2 acquired between the pressure-bonding start time Ts and the second time T2 as the pressure-bonding discharge application amount E2 from the pressure-bonding start time Ts to the second time T2, and calculates the sum of the multiple reference pressure-bonding discharge application amounts ES acquired between the pressure-bonding start time Ts and the second time T2 as the reference pressure-bonding discharge application amount ES from the pressure-bonding start time Ts to the second time T2, and determines whether the difference between these sums is within a predetermined range pre-stored in the memory unit 9. If the discrimination unit 16 determines that the difference is outside this predetermined range, the adjustment unit 17 calculates the sum of the multiple reference pressure-bonding discharge application amounts ES from the pressure-bonding start time Ts to the pressure-bonding end time Tf that have been previously acquired, and also calculates the sum of the multiple pressure-bonding discharge application amounts E2 from the pressure-bonding start time Ts to the pressure-bonding end time Tf that are expected when the workpiece 100 is thermocompressed under the current conditions. Then, the adjustment unit 17 adjusts the timing of pressurizing the workpiece 100 by increasing or decreasing the time that the pressurizing unit pressurizes the workpiece 100 after the second time T2 so that the difference between these totals falls within the tolerance range pre-stored in the memory unit 9, and / or adjusts the power by increasing or decreasing the voltage and current values ​​that the heater control unit 6 applies to the heater 4.

[0064] With such an adjustment unit 17, even if it is considered that the required amount of heat has not been applied to the ACF 103 between the pressurization start time Ts and the second time T2, the insufficient amount of heat can be added after the second time T2, so that good workpieces 100 can be continuously produced.

[0065] Next, as a second method for thermocompression bonding the workpiece 100 by the mounting device 1, a specific example will be described in which the application information acquisition unit 11, application amount calculation unit 12, temperature information measurement unit 13, conduction heat amount calculation unit 14, and determination unit 16 provided in the control unit 8 are operated to use a determination method for the conduction heat amount Q. In this embodiment as well, the application information acquired by the application information acquisition unit 11 is power regulator output information relating to the voltage value and current value output from the power regulator 6b to the heater 4.

[0066] In the second method, first, pressure and heat are applied by the mounting head 2 using the reference workpiece 200. After the reference workpiece 200 is set below the mounting head 2, the control unit 8 drives the pressure unit of the mounting head 2 to lower the head main body unit 3, and pressurizes the reference workpiece 200 with the mounting tool 5. In addition, power is supplied from the heater control unit 6 to cause the heater 4 to generate heat, thereby heating the mounting tool 5.

[0067] The application information acquisition unit 11 acquires the timing when the pressure unit of the mounting head 2 applies pressure to the reference workpiece 200 with the mounting tool 5, and also acquires reference application information regarding the power applied by the heater control unit 6 to the heater 4 (in this embodiment, reference power regulator output information regarding the voltage and current values ​​output from the power regulator 6b to the heater 4 when the reference workpiece 200 is heated). At this time, the temperature information measurement unit 13 measures the temperature of the reference workpiece 200 based on information from the reference workpiece temperature sensor 201, in accordance with the timing when the application information acquisition unit 11 acquires the reference application information.

[0068] Then, the application amount calculation unit 12 calculates a plurality of reference pressure-bonding discharge application amounts ES (unit: J) at predetermined times corresponding to the sampling period from the pressure-bonding start time Ts to the pressure-bonding end time Tf in the same procedure as the first method. The memory unit 9 stores information on the plurality of reference pressure-bonding discharge application amounts ES and the temperature of the reference workpiece 200 measured at the timing when the reference pressure-bonding discharge application amounts ES are obtained.

[0069] The conduction heat quantity calculation unit 14 then calculates the reference conduction heat quantity QS (unit: J) conducted to the reference workpiece 200 when the mounting tool 5 applies pressure and heat to the reference workpiece 200. Specifically, with respect to the temperature information of the reference workpiece 200 acquired at the timing of acquiring the reference crimping-time discharge application amount ES, it calculates a temperature difference ΔTS (unit: K) based on the temperature of the reference workpiece 200 at the pressurization start time Ts when pressure was started to be applied to the reference workpiece 200. Then, by multiplying the previously calculated heat capacity HCS of the reference workpiece 200 by this temperature difference ΔTS, it calculates the reference conduction heat quantity QS (QS = HCS × ΔTS) for each timing of acquiring the reference crimping-time discharge application amount ES.

[0070] The conduction heat calculation unit 14 also creates a table 18 that associates the corresponding reference crimping discharge application amount ES with the reference conduction heat amount QS, as shown in FIG. 4 . The reference crimping discharge application amount ES and the reference conduction heat amount QS are acquired for multiple types of reference crimping discharge application amount ES and reference conduction heat amount QS, which are obtained by changing the timing at which the mounting head 2 presses the reference workpiece 200 and the power applied by the heater control unit 6 to the heater 4. Table 18 associates these multiple types of reference crimping discharge application amount ES and reference conduction heat amount QS. The conduction heat calculation unit 14 of this embodiment also has the function of creating a relational expression that associates the reference conduction heat amount QS with the reference crimping discharge application amount ES. The relational expression in this embodiment is a linear approximation curve derived by the least squares method based on the values ​​of the multiple reference crimping discharge application amount ES and the values ​​of the crimping discharge application amount E2 shown in FIG. 4 . This relational expression interpolates the range between the values ​​of the multiple discrete reference crimping discharge application amount ES and the crimping discharge application amount E2.

[0071] Thereafter, the workpiece 100 is set below the mounting head 2, and the mounting head 2 applies pressure and heat to the workpiece 100. After the workpiece 100 is set below the mounting head 2, the control unit 8 drives the pressure unit of the mounting head 2 to lower the head main body 3, and applies pressure to the workpiece 100 with the mounting tool 5. In addition, the heater control unit 6 supplies power to the heater 4 to generate heat, thereby heating the mounting tool 5. Note that in this embodiment as well, the workpiece 100 is applied with pressure and heat using a buffer material 110.

[0072] The application information acquisition unit 11 acquires the timing at which the pressure unit of the mounting head 2 applies pressure to the workpiece 100 with the mounting tool 5, and also acquires application information related to the power applied to the heater 4 by the heater control unit 6 (in this embodiment, power regulator output information related to the voltage and current values ​​output from the power regulator 6b to the heater 4 when heating the workpiece 100). Furthermore, the application amount calculation unit 12 calculates a plurality of pressure-bonding discharge application amounts E2 (unit: J) at predetermined times corresponding to the sampling period from the pressure-bonding start time Ts to the pressure-bonding end time Tf, using the same procedure as in the first method. The calculated pressure-bonding discharge application amounts E2 are stored in the memory unit 9.

[0073] The conduction heat calculation unit 14 refers to the above-mentioned table 18 or relational expression and selects the reference discharge application amount ES during crimping that corresponds to the discharge application amount E2 during crimping. Since the reference discharge application amount ES during crimping is related to the reference conduction heat amount QS, by selecting the reference discharge application amount ES during crimping that corresponds to the value of the discharge application amount E2 during crimping, it is possible to calculate the type of conduction heat amount Q that is estimated to be the amount of heat conducted to the workpiece 100.

[0074] Next, the determination unit 16 determines whether or not the calculated type of conduction heat quantity Q is within a predetermined range pre-stored in the storage unit 9. Note that the determination by the determination unit 16 may be made based on each of the multiple conduction heat quantities Q (conduction heat quantities Q for each predetermined time period corresponding to the sampling period) included in the selected type of conduction heat quantity Q, or based on a continuous predetermined group of conduction heat quantities Q.

[0075] Here, if the discrimination unit 16 determines that the amount of heat conduction Q is within a predetermined range stored in the memory unit 9, the mounting device 1 is deemed to be operating normally, and the control unit 8 continues the operation of thermocompression bonding the workpiece 100. On the other hand, if the discrimination unit 16 determines that the amount of heat conduction Q is outside the predetermined range stored in the memory unit 9, the control unit 8 issues a notification from the output unit 10 and, if necessary, stops the operation of thermocompression bonding the workpiece 100. This makes it possible to immediately notify the operator that a factor that could cause insufficient curing of the ACF 103 has occurred, and also makes it possible to prevent the production of a large number of defective workpieces 100.

[0076] If the discrimination unit 16 determines that the amount of heat conduction Q falls outside the predetermined range stored in the memory unit 9, the adjustment unit 17 described above can be activated to operate the mounting device 1 without stopping the operation of thermocompression bonding the workpiece 100.

[0077] In this embodiment, when the determination unit 16 determines that the amount of conductive heat Q is outside the predetermined range stored in the memory unit 9, the adjustment unit 17 has a function of adjusting, after the second time T2, the timing at which the pressure unit applies pressure to the workpiece 100 and / or the power applied by the heater control unit 6 to the heater 4 so that the amount of conductive heat Q from when the mounting head 2 starts to apply pressure to the workpiece 100 to when it finishes, falls within a predetermined allowable range. To explain this function using a specific example, the determination unit 16 calculates the sum of multiple amounts of conductive heat Q included in the selected type of amount of conductive heat Q from the pressure application start time Ts to the second time T2 as the amount of conductive heat Q from the pressure application start time Ts to the second time T2, and determines whether this sum is within a value stored in advance in the memory unit 9 (a reference value for the amount of conductive heat from the pressure application start time Ts to the second time T2). If the discrimination unit 16 determines that the workpiece 100 is outside this specified range, the adjustment unit 17 adjusts the timing of pressurizing the workpiece 100 by increasing or decreasing the time that the pressurizing unit pressurizes the workpiece 100 from the second time T2 onwards, so that the workpiece 100 falls within the allowable range (the standard allowable range between the pressurization start time Ts and the pressurization end time Tf regarding the amount of conducted heat) previously stored in the memory unit 9, and / or adjusts the power by increasing or decreasing the voltage and current values ​​that the heater control unit 6 applies to the heater 4.

[0078] With this type of adjustment unit 17, even if it is considered that the required amount of heat has not been applied to the ACF 103 between the pressurization start time Ts and the second time T2, the insufficient amount of heat can be applied after the second time T2, making it possible to continue producing good workpieces 100. Furthermore, with the mounting device 1 of this embodiment, the state in which the workpieces 100 are thermocompression-bonded during production can be confirmed from a perspective different from that of the temperature sensor provided in the heater 4, making it possible to mount the workpieces 100 with high reliability.

[0079] The mounting device 1 described above has a function for measuring the temperature of the buffer material 110, thereby enabling more accurate estimation of the amount of heat conducted to the workpiece 100. Below, a procedure for measuring the temperature of the buffer material 110 and calculating the corrected amount of conducted heat QR of the workpiece 100 will be described.

[0080] When the mounting tool 5 applies pressure and heat to the workpiece 100, the temperature information measurement unit 13 measures the temperature of the buffer material 110 based on information from the reference workpiece temperature sensor 201, in synchronization with the timing at which the application information acquisition unit 11 acquires the reference application information (i.e., in synchronization with the timing at which the pressure application amount E2 is acquired). Information related to the measured temperature of the buffer material 110 is stored in the memory unit 9.

[0081] The conduction heat quantity calculation unit 14 then calculates a temperature difference ΔTB (unit: K) based on the temperature of the buffer material 110 at the pressurization start time Ts when pressurization of the workpiece 100 begins, with respect to the temperature information of the buffer material 110 acquired at the timing of acquiring the pressure-bonding release application amount E2. The conduction heat quantity calculation unit 14 then multiplies the previously calculated heat capacity HCB of the buffer material 110 by this temperature difference ΔTB to calculate the buffer material conduction heat quantity QB (unit: J) at each timing of acquiring the pressure-bonding release application amount E2 (QB = HCB × ΔTB). Furthermore, the conduction heat quantity calculation unit 14 subtracts the corrected conduction heat quantity QR from the conduction heat quantity Q calculated with reference to table 18 or the relational expression, to calculate the corrected conduction heat quantity QR (QR = Q - QB) at each timing of acquiring the pressure-bonding release application amount E2.

[0082] The discrimination unit 16 then determines whether or not the corrected conduction heat quantity QR is within a predetermined range stored in advance in the memory unit 9. That is, if the discrimination unit 16 determines that the corrected conduction heat quantity QR is within the predetermined range stored in the memory unit 9, the control unit 8 determines that the mounting device 1 is operating normally and continues the operation of thermocompression bonding the workpiece 100, but if the discrimination unit 16 determines that the corrected conduction heat quantity QR is outside the predetermined range stored in the memory unit 9, the control unit 8 issues a notification from the output unit 10 and stops the operation of thermocompression bonding the workpiece 100 as necessary.

[0083] The buffer material conduction heat quantity QB can be said to be the quantity of heat conducted to the buffer material 110 when heated by the heater 4. In other words, the corrected conduction heat quantity QR calculated by subtracting the corrected conduction heat quantity QR from the conduction heat quantity Q can be said to be the net quantity of heat conducted to the workpiece 100. Therefore, by using the corrected conduction heat quantity QR in the judgment by the discrimination unit 16, the quantity of heat conducted to the workpiece 100 can be more accurately estimated, and it can be more accurately determined that a factor causing insufficient hardening of the ACF 103, etc., has occurred.

[0084] The adjustment unit 17 provided in the mounting device 1 of this embodiment is capable of operating the mounting device 1 without stopping the operation of thermocompression bonding the workpiece 100, even if the discrimination unit 16 determines that the corrected conductive heat quantity QR falls outside the predetermined range stored in the memory unit 9, similar to the above-mentioned conductive heat quantity Q.

[0085] In this embodiment, when the determination unit 16 determines that the corrected conduction heat quantity QR is outside the predetermined range stored in the memory unit 9, the adjustment unit 17 has a function of adjusting, from the second time T2 onwards, the timing at which the pressurizing unit applies pressure to the workpiece 100 and / or the power applied by the heater control unit 6 to the heater 4 so that the corrected conduction heat quantity QR from when the mounting head 2 starts to pressurize the workpiece 100 to when it finishes, falls within a predetermined allowable range. To explain this point using a specific example, the determination unit 16 calculates the sum of multiple corrected conduction heat quantities QR from the pressurizing start time Ts to the second time T2 as the corrected conduction heat quantity QR from the pressurizing start time Ts to the second time T2, and determines whether this sum is within a range of a value stored in advance in the memory unit 9 (a reference value from the pressurizing start time Ts to the second time T2 for the corrected conduction heat quantity). If the discrimination unit 16 determines that the workpiece 100 is outside this specified range, the adjustment unit 17 adjusts the timing of pressurizing the workpiece 100 by increasing or decreasing the time that the pressurizing unit pressurizes the workpiece 100 from the second time T2 onwards, so that the workpiece 100 falls within the allowable range (the standard allowable range between the pressurization start time Ts and the pressurization end time Tf for the corrected conduction heat quantity) pre-stored in the memory unit 9, and / or adjusts the power by increasing or decreasing the voltage and current values ​​that the heater control unit 6 applies to the heater 4.

[0086] With this type of adjustment unit 17, even if it is considered that the required amount of heat has not been applied to the ACF 103 between the pressurization start time Ts and the second time T2, the insufficient amount of heat can be applied after the second time T2, making it possible to continue producing good workpieces 100. Furthermore, with the mounting device 1 of this embodiment, the state in which the workpiece 100 is thermocompression bonded during production can be confirmed from a perspective different from that of the temperature sensor provided in the heater 4, and the corrected conduction heat quantity QR can be used to determine the net amount of heat conducted to the workpiece 100, making it possible to mount the workpiece 100 with higher reliability.

[0087] Next, as a third method for thermocompression bonding the workpiece 100 by the mounting apparatus 1, a specific example will be described in which the application information acquisition unit 11, pattern creation unit 15, and discrimination unit 16 provided in the control unit 8 are activated to use a discrimination method regarding the application pattern and the reference application pattern. In this embodiment as well, the application information acquired by the application information acquisition unit 11 is power regulator output information regarding the voltage value and current value output from the power regulator 6b to the heater 4.

[0088] In the third method, first, pressure and heat are applied by the mounting head 2 using the reference workpiece 200. After the reference workpiece 200 is set below the mounting head 2, the control unit 8 drives the pressure unit of the mounting head 2 to lower the head main body unit 3, and pressurizes the reference workpiece 200 with the mounting tool 5. In addition, power is supplied from the heater control unit 6 to cause the heater 4 to generate heat, thereby heating the mounting tool 5.

[0089] The application information acquisition unit 11 acquires the timing when the pressure unit of the mounting head 2 applies pressure to the reference work 200 with the mounting tool 5, and also acquires reference application information regarding the power applied to the heater 4 by the heater control unit 6 (in this embodiment, reference power regulator output information regarding the voltage and current values ​​output from the power regulator 6b to the heater 4 when heating the reference work 200).

[0090] The pattern creation unit 15 then creates a reference voltage application pattern based on the timing of applying pressure to the reference workpiece 200 from the first time T1 to the second time T2, acquired by the voltage application information acquisition unit 11, while the pressure unit of the mounting head 2 applies pressure to the reference workpiece 200, and the reference pressure application amount for the reference workpiece 200 during this pressure application time, calculated from the reference voltage application information. The reference voltage application pattern is, for example, a pattern that serves as a reference for a non-defective product in which the required amount of heat is applied to the ACF 103. In this embodiment, the first time T1 is the pressure start time Ts when the pressure unit of the mounting head 2 begins applying pressure to the reference workpiece 200, and the second time T2 is the pressure end time Tf when the pressure application ends. Note that when creating the reference voltage application pattern, a pattern including a portion before the first time T1 or a portion after the second time T2 may be created. In this embodiment, the pattern creation unit 15 creates, as image data, graphs related to voltage, current, and power, similar to those shown in FIGS. 3A to 3C.

[0091] After creating the reference application pattern for the reference workpiece 200 in this manner, the workpiece 100 is set below the mounting head 2, and the mounting head 2 applies pressure and heat to the workpiece 100. After the workpiece 100 is set below the mounting head 2, the control unit 8 drives the pressure unit of the mounting head 2 to lower the head main body unit 3, and the mounting tool 5 applies pressure to the workpiece 100. In addition, the heater control unit 6 supplies power to the heater 4 to generate heat, thereby heating the mounting tool 5. In this embodiment as well, the workpiece 100 is pressurized and heated using a buffer material 110.

[0092] The application information acquisition unit 11 acquires the timing at which the pressure unit of the mounting head 2 applies pressure to the workpiece 100 with the mounting tool 5, and also acquires application information regarding the power applied by the heater control unit 6 to the heater 4 (in this embodiment, power regulator output information regarding the voltage and current values ​​output from the power regulator 6b to the heater 4 when heating the workpiece 100).

[0093] The pattern creation unit 15 then creates an application pattern based on the timing of applying pressure to the workpiece 100 from the first time T1 to the second time T2 acquired by the application information acquisition unit 11 and the above application information. In this embodiment, the pattern creation unit 15 creates, as image data, graphs related to voltage, current, and power from the first time T1 to the second time T2 shown in Figures 3A to 3C. The created image data is stored in the storage unit 9.

[0094] Next, the discrimination unit 16 compares the application pattern stored in the memory unit 9 with the reference application pattern to determine whether the difference between the application pattern and the reference application pattern is within a predetermined range. For example, if the discrimination unit 16 determines that the area of ​​the reference application pattern increases by (3 / 2) × Ta × Pa from time T1 to time Ta × 2, while the area of ​​the application pattern increases by Ta × Pa during the same time period, resulting in a difference of (1 / 2) × Ta × Pa. If the discrimination unit 16 determines that the difference between the application pattern and the reference application pattern is within a predetermined range if the difference between the areas is within (1 / 4) × Ta × Pa, the discrimination unit 16 determines that the difference is outside the predetermined range, and the control unit 8 issues a notification via the output unit 10 and, if necessary, stops the operation of thermocompression bonding the workpiece 100. This immediately notifies the operator that a cause of insufficient curing of the ACF 103 has occurred and prevents the production of a large number of defective workpieces 100.

[0095] By using the adjustment unit 17 described above, the mounting device 1 of this embodiment can operate without stopping the operation of thermocompression bonding the workpiece 100.

[0096] In this embodiment, when the discrimination unit 16 determines that the difference between the reference application pattern from the pressurization start time Ts to the second time T2 and the application pattern from the pressurization start time Ts to the second time T2 is outside a predetermined range, the adjustment unit 17 has the function of adjusting the timing at which the pressurization unit pressurizes the workpiece 100 and / or the power applied to the heater 4 by the heater control unit 6 from the second time T2 onwards so that the difference between the application pattern from when the mounting head 2 starts to pressurize the workpiece 100 to when it finishes and the reference application pattern from when the mounting head 2 starts to pressurize the reference workpiece 200 to when it finishes is within a predetermined tolerance range. To explain this point with a specific example, the application pattern is the graph related to power described above with reference to Figures 3C and 3D, and the reference application pattern is a graph whose slope becomes steeper from time T1 compared to the graphs shown in Figures 3C and 3D above (a graph that slopes at a substantially constant rate from time T1 to time Ta, during which the power increases Pa with time T1 as the reference, and becomes a constant power Pa from time Ta to time (Ta x 2), and thereafter becomes the same as the application pattern). Furthermore, the discrimination unit 16 is set to determine that the difference between the reference application pattern and the application pattern is within a predetermined range if the difference in area between the reference application pattern and the application pattern is within (1 / 4) × Ta × Pa, and the adjustment unit 17 adjusts the timing of pressurizing the workpiece 100 by increasing or decreasing the time that the pressurizing unit pressurizes the workpiece 100 so that the area of ​​the graph of the application pattern from the pressurizing start time Ts to the pressurizing end time Tf is approximately the same as the area of ​​the graph of the reference application pattern from the pressurizing start time Ts to the pressurizing end time Tf, and / or adjusts the power by increasing or decreasing the voltage and current values ​​that the heater control unit 6 applies to the heater 4.

[0097] With this type of adjustment unit 17, even if it is considered that the required amount of heat has not been applied to the ACF 103 between the pressurization start time Ts and the second time T2, the insufficient amount of heat can be applied after the second time T2, making it possible to continue producing good workpieces 100. Furthermore, with the mounting device 1 of this embodiment, the state in which the workpieces 100 are thermocompression-bonded during production can be confirmed from a perspective different from that of the temperature sensor provided in the heater 4, making it possible to mount the workpieces 100 with high reliability.

[0098] Although one embodiment of the present invention has been described above, the present invention is not limited to the specific embodiment, and unless otherwise limited in the above description, various modifications and variations are possible within the spirit and scope of the present invention as defined in the claims. For example, the configurations of the above-described embodiment may be added or deleted as appropriate, and the configurations of one embodiment may be incorporated into other embodiments. Furthermore, the effects of the above-described embodiment are merely examples of the effects resulting from the present invention, and do not mean that the effects of the present invention are limited to the above-described effects.

[0099] For example, in the above-described embodiment, the power regulator output information relating to the voltage and current values ​​output from the power regulator 6b to the heater 4 is used as the application information acquired by the application information acquiring unit 11, but the application information may be power information included in the electrical signal output from the temperature regulator 6a to the power regulator 6b. That is, the information acquired by the application information acquiring unit 11 may be, for example, the voltage and current values ​​of the electrical signal output from the temperature regulator 6a to the power regulator 6b. [Explanation of symbols]

[0100] 1: Mounting equipment 2: Mounting head 4: Heater 5: Implementation tools 6: Heater control unit 7: Controller 10: Output section 11: Application information acquisition unit 12: Application amount calculation unit 13: Temperature information measurement unit 14: Conduction heat calculation section 15: Pattern creation section 16: Discrimination part 17: Adjustment section 18: Table 100: Work 101: substrate (first member) 102: Electronic components (secondary components) 103: ACF (joint material) 110: Cushioning material 200: Standard work

Claims

1. A mounting device that thermocompression bonds a workpiece having a first member and a second member with a joining member interposed therebetween, a mounting head including a pressure unit that presses a mounting tool directly or indirectly against the second member to apply pressure to the workpiece, and a heater that heats the mounting tool; a heater control unit that applies power to the heater to cause the heater to generate heat; a controller capable of controlling the mounting head and connected to the heater control unit, The controller an application information acquisition unit that acquires application information regarding the timing at which the pressure unit applies pressure to the workpiece with the mounting tool and the power that the heater control unit applies to the heater when the mounting head applies pressure and heat to the workpiece; an application amount calculation unit that calculates an unloaded application amount per predetermined time calculated from the application information acquired by the application information acquisition unit when the pressure unit is not applying pressure to the workpiece, calculates a pressure application amount during the pressure time calculated from the application information acquired by the pressure application information acquisition unit from a first time to a second time when the pressure unit is applying pressure to the workpiece, and subtracts the value of the unloaded application amount during the time corresponding to the pressure application time from the pressure application amount; and calculates a pressure release application amount during pressure application. a determination unit that determines whether the pressure-bonding discharge application amount is within a predetermined range.

2. the first time is a time when the mounting head starts to pressurize the workpiece, 2. The mounting device according to claim 1, further comprising an adjustment unit that, when the determination unit determines that the pressure application amount during crimping is outside the specified range, adjusts the timing at which the pressure unit applies pressure to the workpiece and / or the power applied to the heater by the heater control unit after the second time so that the pressure application amount during crimping from the time the mounting head starts to pressurize the workpiece to the time it finishes is within a predetermined allowable range.

3. A mounting device that thermocompression bonds a workpiece having a first member and a second member with a joining member interposed therebetween, a mounting head including a pressure unit that presses a mounting tool directly or indirectly against the second member to apply pressure to the workpiece, and a heater that heats the mounting tool; a heater control unit that applies power to the heater to cause the heater to generate heat; a controller capable of controlling the mounting head and connected to the heater control unit, The controller an application information acquisition unit that acquires application information regarding the timing at which the pressure unit applies pressure to the workpiece with the mounting tool and the power that the heater control unit applies to the heater when the mounting head applies pressure and heat to the workpiece; An application amount calculation unit that calculates an unloaded application amount per predetermined time calculated from the application information acquired by the application information acquisition unit when the pressure unit is not pressing the workpiece, calculates a pressure application amount during the pressure time calculated from the application information acquired by the pressure information acquisition unit from a first time to a second time when the pressure unit is pressing the workpiece, and calculates a pressure application amount during the pressure application time calculated from the application information, and subtracts the value of the unloaded application amount during the time corresponding to the pressure application time from the pressure application amount, the application information acquisition unit is capable of acquiring reference application information relating to a timing at which the pressure unit applies pressure to the reference work and a power that the heater control unit applies to the heater when the mounting head applies pressure and heat to a reference work whose heat capacity is known and that is similar to the work, The application amount calculation unit is capable of calculating a reference pressure-bonding release application amount of the reference workpiece corresponding to the pressure-bonding release application amount of the workpiece from the timing of pressurizing the reference workpiece acquired by the application information acquisition unit when pressurizing and heating the reference workpiece with the mounting head and the reference application information, The controller further comprises: a temperature information measuring unit that measures the temperature of the reference workpiece; A conduction heat quantity calculation unit that calculates a reference conduction heat quantity conducted to the reference work from the heat capacity of the reference work and the temperature of the reference work obtained by the temperature information measurement unit, creates a table or a relational expression that correlates the reference conduction heat quantity with the reference crimping discharge application amount, and calculates the conduction heat quantity of the work based on the reference conduction heat quantity related to the reference crimping discharge application amount corresponding to the crimping discharge application amount, by referring to the table or the relational expression; a determination unit that determines whether the amount of conducted heat is within a predetermined range.

4. the first time is a time when the mounting head starts to pressurize the workpiece, 4. The mounting device according to claim 3, further comprising an adjustment unit that, when the determination unit determines that the amount of conductive heat is outside the specified range, adjusts the timing at which the pressure unit applies pressure to the workpiece and / or the power applied to the heater by the heater control unit after the second time period so that the amount of conductive heat from when the mounting head starts to apply pressure to the workpiece to when it finishes is within a predetermined allowable range.

5. A mounting device that thermocompression bonds a workpiece having a first member and a second member with a joining member interposed therebetween, a mounting head including a pressure unit that presses a mounting tool directly or indirectly against the second member to apply pressure to the workpiece, and a heater that heats the mounting tool; a heater control unit that applies power to the heater to cause the heater to generate heat; a controller capable of controlling the mounting head and connected to the heater control unit, The controller an application information acquisition unit that acquires application information regarding the timing at which the pressure unit applies pressure to the workpiece with the mounting tool and the power that the heater control unit applies to the heater when the mounting head applies pressure and heat to the workpiece; a pattern creation unit that creates an application pattern based on the timing of pressing the workpiece from a first time to a second time acquired by the application information acquisition unit while the pressurizing unit presses the workpiece, and the application information; the application information acquisition unit is capable of acquiring reference application information regarding a timing at which the pressure unit applies pressure to the reference work and an electric power that the heater control unit applies to the heater when the mounting head applies pressure and heat to a reference work that is similar to the work, the pattern creation unit is capable of creating a reference application pattern based on the timing for applying pressure to the reference workpiece acquired by the application information acquisition unit and the reference application information when the mounting head applies pressure and heat to the reference workpiece, The controller further comprises: a determination unit that compares the application pattern with the reference application pattern and determines whether a difference between the application pattern and the reference application pattern is within a predetermined range.

6. the first time is a time when the mounting head starts to pressurize the workpiece, 6. The mounting device according to claim 5, further comprising an adjustment unit that, when the discrimination unit determines that the difference between the application pattern and the reference application pattern is outside the specified range, adjusts, after the second time, the timing at which the pressure unit applies pressure to the workpiece and / or the power applied to the heater by the heater control unit so that a difference between the application pattern from when the mounting head starts to press the workpiece until it finishes pressing it and the reference application pattern from when the mounting head starts to press the reference workpiece until it finishes pressing it falls within a predetermined tolerance range.

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