Vibration damping device

Abstract

To provide a vibration control device which can be suitably used for equipment installed in a clean room.SOLUTION: The vibration damping device 1 is installed in the equipment 2 installed on the floor surface F. The vibration control device 1 is provided with a vibration control part 3 installed on a floor surface F and absorbing transmitted vibration and a connection part 5 connecting equipment 2 and the vibration control part 3. The vibration control part 3 includes a fixed metal plate 6 fixed in parallel on the floor surface F, a transmission metal plate 7 fixed to the connection part 5 and transmitting the vibration of the equipment 2, and an elastic part 8 held between the fixed metal plate 6 and the transmission metal plate 7. Thus, even when the transmission metal plate 7 is excessively inclined, the transmission metal plate 7 abuts on the fixed metal plate 6, and the surface coating of the floor is not scraped. Therefore, the damping device 1 can be suitably used for equipment installed in a clean room.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a vibration damping device, and more particularly to a vibration damping device used for equipment installed in a clean room. [Background technology]

[0002] Conventionally, various configurations have been proposed as vibration control devices that are retrofitted to equipment installed on the floor surface inside a building. For example, Patent Document 1 states: As a vibration control device attached to equipment installed on the floor, a vibration damping unit that is installed on the floor surface and absorbs transmitted vibrations; a connection section that connects the device and the vibration damping section, The vibration control section is a transmission metal plate fixed to the connection portion and transmitting vibrations of the device; An elastic part sandwiched between the floor surface and the transmission metal plate; A configuration comprising:

[0003] As a result, the vibrations of the device are absorbed by the vibration damping section, making the device stable and less likely to shake. Furthermore, since the transmission metal plate extends to the side of the equipment, the lateral load against the equipment tipping over can be increased, and the equipment tipping over can also be prevented.

[0004] Furthermore, Patent Document 2 states: As a vibration control device attached to equipment installed on the floor, a vibration damping unit that is installed on the floor surface and absorbs transmitted vibrations; a connection section that connects the device and the vibration damping section, The vibration control section is a transmission metal plate fixed to the connection portion and transmitting vibrations of the device; a laminate of elastic portions and metal plates disposed above and below the transmission metal plate; A configuration is disclosed in which the vibration-damping portion is fixed to the floor surface by a female-threaded anchor embedded under the floor surface and a bolt passing through the vibration-damping portion.

[0005] As a result, the vibrations of the device are absorbed by the metal transmission plate being displaced up and down, left and right, and front and back while being sandwiched between the elastic portions, so that the device is stable and does not easily shake. Furthermore, the elastic part absorbs the high-frequency components of the vibration and lengthens the period of the vibration, thereby further reducing the force transmitted to the equipment.

[0006] In recent years, with the rise in awareness of disaster prevention, there has been an increased demand for fixing and damping floor-mounted equipment. This is no exception even for devices installed in clean rooms. In particular, in equipment installed in clean rooms, such as semiconductor manufacturing equipment, the gases used are often spontaneously combustible or flammable, so fixing and vibration control of the equipment are all the more important.

[0007] In a clean room, the surfaces of floors and other surfaces are generally coated with urethane resin or the like to prevent dust generation. Therefore, if the surface coating such as urethane resin peels off, it becomes impossible to suppress dust generation.

[0008] Here, with the configuration of Patent Document 1, particularly when the elastic part is thin, tilting the equipment may cause the transmission metal plate to tilt excessively, breaking through the elastic part and coming into contact with the surface of the floor, potentially peeling off the surface coating of the floor. Therefore, further improvements are required to use the vibration control device having the configuration of Patent Document 1 for equipment installed in a clean room.

[0009] Furthermore, in the configuration of Patent Document 2, the surface of the floor and the metal plate are in direct contact with each other, so there is a risk that the metal plate in contact with the floor may rotate around the axis of the bolt due to vibrations or the like, scraping off the surface coating of the floor. Therefore, further improvements are required to use the vibration control device with the configuration of Patent Document 2 for equipment installed in a clean room. [Prior art documents] [Patent documents]

[0010] [Patent Document 1] Registered Utility Model No. 3142003 [Patent Document 2] Patent No. 4498833 Summary of the Invention [Problem to be solved by the invention]

[0011] The present disclosure has been made to solve the above problems, and its object is to provide a vibration damping device that can be suitably used for equipment installed in a clean room. [Means for solving the problem]

[0012] According to a first aspect of the present disclosure, a vibration damping device is provided alongside equipment installed on a floor surface, and includes a vibration damping section and a connection section, which will be described below. The vibration damping unit is installed on the floor surface and absorbs transmitted vibrations. The connection portion connects the device and the vibration suppression portion. Here, the vibration damping section comprises a fixed metal plate fixed on the floor surface parallel to the floor surface, a transmission metal plate fixed to the connection section and transmitting the vibration of the equipment, and an elastic section sandwiched between the fixed metal plate and the transmission metal plate.

[0013] The vibration damping unit has a fixed metal plate that is fixed on the floor surface and parallel to the floor surface. As a result, even if the transmission metal plate is excessively tilted, the transmission metal plate only abuts against the fixed metal plate, and there is no risk of the surface coating of the floor being scraped off. Therefore, the vibration damping device can be suitably used for equipment installed in a clean room.

[0014] According to a second aspect of the present disclosure, a vibration damping device is provided alongside equipment installed on a floor surface, and includes a vibration damping section and a connection section, which will be described below. The vibration damping unit is installed on the floor surface and absorbs transmitted vibrations. The connection portion connects the device and the vibration suppression portion. Here, the vibration damping section comprises a transmission metal plate fixed to the connection section and transmitting the vibrations of the equipment, an elastic section sandwiched between the floor surface and the transmission metal plate, and a regulating section that regulates excessive tilt of the transmission metal plate.

[0015] The vibration damping portion includes an elastic portion sandwiched between the floor surface and the metal transmission plate. As a result, the elastic portion comes into direct contact with the floor surface, so there is no risk of the elastic portion scraping off the surface coating of the floor. The vibration suppressing portion also includes a restricting portion that restricts excessive tilt of the transmission metal plate. As a result, excessive tilting of the transmission metal plate is restricted by the restricting portion, so there is no risk of the surface coating of the floor being scraped off. Therefore, the vibration damping device can be suitably used for equipment installed in a clean room. [Brief explanation of the drawings]

[0016] [Figure 1] FIG. 2 is an explanatory diagram of a vibration damping portion (Example 1). [Figure 2] FIG. 2 is an explanatory diagram of a connection portion (Example 1). [Figure 3] FIG. 2 is a perspective view of a connection portion (Example 1). [Figure 4] FIG. 10 is an explanatory diagram of the operation of the vibration suppression unit (Example 1). [Figure 5] FIG. 10 is an explanatory diagram of the operation of the vibration suppression unit (Example 1). [Figure 6] FIG. 10 is an explanatory diagram of a vibration suppression part (Example 2). DETAILED DESCRIPTION OF THE INVENTION

[0017] Hereinafter, modes for carrying out the present disclosure will be described based on examples. It should be noted that the following examples disclose specific examples, and it goes without saying that the present disclosure is not limited to the following examples. [Example]

[0018] [Configuration of Example 1] The configuration of a vibration damping device 1 according to a first embodiment will be described with reference to FIGS. The vibration damping device 1 is installed next to a device 2 placed on the floor F in a clean room, and includes a vibration damping section 3 and a connection section 5, which will be described below. The vibration damping unit 3 is installed on the floor surface F and absorbs transmitted vibrations. The connection section 5 connects the device 2 and the vibration suppression section 3.

[0019] Here, the vibration control section 3 comprises a fixed metal plate 6 fixed on the floor surface F parallel to the floor surface F, a transmission metal plate 7 fixed to the connection section 5 and transmitting the vibration of the equipment 2, and an elastic section 8 sandwiched between the fixed metal plate 6 and the transmission metal plate 7. The fixed metal plate 6 is fixed onto the floor surface F via a fixing portion 9. Furthermore, the vibration suppression portion 3 includes an upper metal plate 10 disposed above the transmission metal plate 7, and an upper elastic portion 11 sandwiched between the transmission metal plate 7 and the upper metal plate 10.

[0020] Here, the materials of the fixed metal plate 6, the transmission metal plate 7, and the upper metal plate 10 are not particularly limited, and an optimum material can be selected appropriately depending on the purpose. For example, in places where rusting is undesirable, it is preferable to use stainless steel, aluminum alloy, titanium alloy, nickel alloy, etc. Furthermore, the fixed metal plate 6, the transmission metal plate 7, and the upper metal plate 10 may be made of the same type of material or different types of material. Considering availability, cost, and the like, it is more preferable that the fixed metal plate 6, the transmission metal plate 7, and the upper metal plate 10 are made of stainless steel.

[0021] Furthermore, the material of the elastic portion 8 and the upper elastic portion 11 is not particularly limited as long as it can elastically deform in response to the vibration of the equipment 2, and the most suitable material can be selected as appropriate depending on the purpose. For example, it is preferable to use urethane-based, styrene-based, styrene-butadiene-based, isoprene-based, chloroprene-based resins, etc. The elastic portion 8 and the upper elastic portion 11 may be made of the same material or different materials.

[0022] Furthermore, the material of the fixing portion 9 is not particularly limited as long as it can fix the fixing metal plate 6 to the floor surface F, and the most suitable material can be selected appropriately depending on the purpose. For example, it is preferable to use an elastic material such as a urethane-based, styrene-based, styrene-butadiene-based, isoprene-based, chloroprene-based, or silicone-based resin.

[0023] In addition, when the fixing portion 9 is made of an elastic material, the material of the fixing portion 9 may be the same as or different from the material of the elastic portion 8 or the upper elastic portion 11. Here, when the fixing portion 9 is made of an elastic member, fixing the fixed metal plate 6 onto the floor surface F does not exclude elastic deformation of the fixing portion 9 itself.

[0024] In addition, the vibration damping section 3 has a female screw section 12 formed in the fixed metal plate 6, and the upper metal plate 10, the upper elastic section 11, the transmission metal plate 7, and the elastic section 8 have through holes formed therein through which headed bolts 15 having male screw sections 13 that screw into the female screw section 12 are inserted. The vibration damping portion 3 is fastened in the vertical direction by the male screw portion 13 being screwed into the female screw portion 12.

[0025] More specifically, the female screw portion 12 is the inner surface of a nut integrated into the upper surface of the fixed metal plate 6, and through holes are formed in the upper metal plate 10, the upper elastic portion 11, the transmission metal plate 7, and the elastic portion 8, respectively. By adjusting the fastening force, the elastic modulus of the elastic portion 8 and the upper elastic portion 11 can be adjusted to some extent.

[0026] Here, the diameter of each of the through holes formed in the upper metal plate 10, the upper elastic portion 11, and the elastic portion 8 is approximately equal to the shaft diameter of the headed bolt 15. On the other hand, the diameter of the through hole 7t formed in the transmission metal plate 7 is larger than the shaft diameter of the headed bolt 15 in consideration of movement due to vibration of the device 2.

[0027] As shown in Figures 1 and 2, the connection part 5 is fixed to the equipment 2 and includes an equipment-side connection part 17 having a female screw part 16, and a vibration-damping part-side connection part 19 extending from the transmission metal plate 7, penetrating through in the thickness direction and having a long hole 18 that is long in the extension direction. The device-side connecting portion 17 and the vibration-damping-part-side connecting portion 19 are fastened together by threading the male screw portion 22 of a headed bolt 20 inserted through the elongated hole 18 into the female screw portion 16 .

[0028] Here, the vibration suppression section side connecting portion 19 and the transmission metal plate 7 are at a substantially right angle, and the vibration suppression section side connecting portion 19 is extended upward. As shown in FIG. 2, the equipment-side connection portion 17 is composed of a horizontal portion 17h that is fixed to the jack bolt 2a for adjusting the height and level of the equipment 2, and an extension portion 17v that extends upward from the horizontal portion 17h and has a female screw portion 16 formed therein.

[0029] The device-side connection portion 17 and the vibration suppression-part-side connection portion 19 will be described in more detail with reference to FIG. The vibration-damping-part-side connecting part 19 has three elongated holes 18 formed at equal intervals in the minor axis direction (horizontal direction).

[0030] The device side connection part 17 is made up of a first part 17a and a second part 17b. The first part 17a has extensions 17v at both ends, and the horizontal part 17h has a generally U-shaped plan view. A semicircular cutout 24a is formed on the inner periphery of the part furthest from the vibration damping part-side connecting part 19. Second part 17b is configured such that the horizontal section 17h in a plan view fills the inner periphery of first part 17a. Also, a semicircular arc-shaped notch 24b is formed on one end farthest from vibration damping section side connecting section 19, and the other end forms extension section 17v.

[0031] The cylindrical shaft of the jack bolt 2a is sandwiched between the notched portion 24a of the first part 17a and the notched portion 24b of the second part 17b, thereby fixing the device-side connecting portion 17 to the jack bolt 2a.

[0032] Furthermore, female thread portions 16 are formed in the portions of the first part 17a and the second part 17b that form the extension portion 17v. That is, the device side connection portion 17 has three female screw portions 16 formed at equal intervals in the horizontal direction. Then, the male thread portion 22 of the headed bolt 20 inserted through the long hole 18 is screwed into the female thread portion 16, thereby fastening the equipment side connection portion 17 and the vibration damping unit side connection portion 19, and connecting the equipment 2 and the vibration damping unit 3 (see Figures 1 and 2).

[0033] Here, since the equipment side connection part 17 is divided into a first part 17a and a second part 17b, it can be easily fixed to equipment 2 that has already been fixed to the floor surface F with jack bolts 2a. That is, the device-side connecting portion 17 can be easily attached to the device 2 afterward without moving the device 2 or displacing the jack bolt 2a.

[0034] [Operation of Example 1] The operation of the vibration damping device 1 of the first embodiment will be described with reference to FIGS. FIG. 4 is an explanatory diagram of the horizontal displacement of the transmission metal plate 7 (device 2). In this case, the displacement is absorbed by the deformation of the elastic portion 8 and the upper elastic portion 11, so that the horizontal displacement of the transmission metal plate 7 (device 2) can be attenuated.

[0035] FIG. 5 is an explanatory diagram of displacement of the transmission metal plate 7 (device 2) in the tilt direction with the jack bolt 2a as the rotation center. In this case as well, the displacement is absorbed by the deformation of the elastic portion 8 and the upper elastic portion 11, so that the displacement in the tilt direction of the transmission metal plate 7 (device 2) can be attenuated.

[0036] [Effects of Example 1] The vibration damping section 3 comprises a fixed metal plate 6 fixed on the floor surface F parallel to the floor surface F, a transmission metal plate 7 fixed to the connection section 5 and transmitting vibrations of the equipment 2, and an elastic section 8 sandwiched between the fixed metal plate 6 and the transmission metal plate 7. As a result, even if the transmission metal plate 7 is excessively tilted, the transmission metal plate 7 only comes into contact with the fixed metal plate 6, and there is no risk of the surface coating of the floor being scraped off. Therefore, the vibration damping device 1 can be suitably used for the equipment 2 installed in a clean room.

[0037] The fixed metal plate 6 is fixed onto the floor surface F via a fixing portion 9. This allows the vibration damping unit 3 to be fixed onto the floor surface F without drilling holes or the like in the floor surface F. Therefore, the vibration damping device 1 does not generate dust when installed, and can be suitably used for the equipment 2 installed in a clean room.

[0038] Here, if the material of the fixed portion 9 is an elastic material, even if the transmission metal plate 7 is tilted excessively and comes into contact with the fixed metal plate 6, the transmission of impact to the floor surface F can be further mitigated. Therefore, the configuration is more suitable for protecting the floor surface F, and is therefore more suitable for use with the device 2 in a clean room. It goes without saying that if the material of the fixed portion 9 is an elastic material, it can absorb transmitted vibrations in the same way as the elastic portion 8 and the like. Furthermore, even if the fixed metal plate 6 is released from the floor surface F, there is no risk of scraping the floor surface F, since the contact with the floor surface F is made of an elastic member.

[0039] The vibration suppressing portion 3 includes an upper metal plate 10 disposed above the transmission metal plate 7, and an upper elastic portion 11 sandwiched between the transmission metal plate 7 and the upper metal plate 10. As a result, the transmission metal plate 7 can absorb the transmitted vibrations by the elastic portion 8 and the upper elastic portion 11. This allows the vibration to be damped more rapidly, and the vibration damping effect to be exerted more quickly.

[0040] The vibration damping part 3 has a female screw part 12 formed in the fixed metal plate 6, and the upper metal plate 10, the upper elastic part 11, the transmission metal plate 7, and the elastic part 8 have through holes formed therein for inserting headed bolts 15 having male screw parts 13 that screw into the female screw parts 12. The vibration damping part 3 is fastened in the vertical direction by screwing the male screw parts 13 into the female screw parts 12.

[0041] This allows the upper metal plate 10, the upper elastic portion 11, the transmission metal plate 7, the elastic portion 8, and the fixed metal plate 6 to be easily integrated. Therefore, the upper metal plate 10, upper elastic portion 11, transmission metal plate 7, elastic portion 8, and fixed metal plate 6 can be prepared as an integrated module, thereby reducing the labor required for installing the vibration control device 1. Moreover, by adjusting the fastening force of the headed bolt 15, the elastic modulus of the elastic portion 8 and the upper elastic portion 11 can also be adjusted.

[0042] The connection part 5 is fixed to the device 2 and includes an device-side connection part 17 having a female thread part 16, and a vibration damping part-side connection part 19 that extends through the transmission metal plate 7 and has a long hole 18 that penetrates through the thickness direction and is long in the extension direction. The device-side connection part 17 and the vibration damping part-side connection part 19 are fastened together by threading the male thread part 22 of a headed bolt 20 that passes through the long hole 18 into the female thread part 16. This allows the elongated holes 18 to absorb differences in the installation positions of the device-side connection parts 17 for various devices 2. Therefore, the number of devices to which the vibration damping device 1 can be installed can be further increased.

[0043] [Configuration of Example 2] The vibration damping device 1 of Example 2 will be described, focusing on the differences from Example 1. Components with the same functions are given the same reference numerals. According to the vibration control device 1 of Example 2, the vibration control section 3 includes a transmission metal plate 7 fixed to the connection section 5 and transmitting the vibration of the equipment 2, an elastic section 8 sandwiched between the floor surface F and the transmission metal plate 7, and a regulating section 25 that regulates excessive tilt of the transmission metal plate 7. The vibration suppressing portion 3 also includes an upper metal plate 10 disposed above the transmission metal plate 7, and an upper elastic portion 11 sandwiched between the transmission metal plate 7 and the upper metal plate 10.

[0044] In addition, the vibration control section 3 has a female screw section 27 formed below the floor surface F, and the upper metal plate 10, the upper elastic section 11, the transmission metal plate 7, and the elastic section 8 have through holes formed therein through which headed bolts 30 having male screw sections 28 that screw into the female screw section 27 can be inserted. Then, the male screw portion 28 is screwed into the female screw portion 27, whereby the vibration damping portion 3 is fastened in the vertical direction.

[0045] Here, the diameter of each of the through holes formed in the upper metal plate 10, the upper elastic portion 11, and the elastic portion 8 is approximately equal to the diameter of the shaft 31 of the headed bolt 30. On the other hand, the diameter of the through hole 7t formed in the transmission metal plate 7 is larger than the diameter of the shaft 31 in consideration of movement due to vibration of the device 2. Furthermore, the diameter of the through hole 7t formed in the transmission metal plate 7 is adjusted so that it can engage with the shaft 31 of the headed bolt 30 when the transmission metal plate 7 is excessively tilted.

[0046] Here, forming the female screw portion 27 below the floor surface F means that the female screw anchor 33 with the female screw portion 27 formed thereon is embedded below the floor surface F. This allows the headed bolt 30 to be firmly fixed to the floor surface F. Therefore, the shaft 31 of the headed bolt 30 can restrict excessive tilt of the transmission metal plate 7. In other words, the shaft 31 serves as a restricting portion 25 that restricts excessive tilt of the transmission metal plate 7 .

[0047] [Effects of Example 2] The vibration damping section 3 includes a transmission metal plate 7 fixed to the connection section 5 and transmitting vibrations of the equipment 2, an elastic section 8 sandwiched between the floor surface F and the transmission metal plate 7, and a regulating section 25 that regulates excessive tilt of the transmission metal plate 7.

[0048] The vibration suppressing portion 3 includes an elastic portion 8 sandwiched between the floor surface F and the metal transmission plate 7 . As a result, the elastic portion 8 comes into direct contact with the floor surface F, so there is no risk that the elastic portion 8 will scrape off the surface coating of the floor. Moreover, the restricting portion 25 restricts the metal transmission plate 7 from being excessively tilted. As a result, excessive tilt of the transmission metal plate 7 is restricted by the restricting portion 25, so there is no risk of the surface coating of the floor being scraped off. Therefore, the vibration damping device 1 can be suitably used for the equipment 2 installed in a clean room.

[0049] Here, there may be a concern that the installation portion of the female screw anchor 33 may become a dust generating point, but this is not a problem because the upper part of the female screw anchor 33 is covered by the elastic member 8 or the like. Therefore, there is no risk of dust generation after the vibration damping device 1 is installed, and there is no particular problem with using the vibration damping device 1 according to Example 2 in a clean room.

[0050] However, when installing the female screw anchor 33, it is necessary to drill a hole in the floor surface F and drive the female screw anchor 33 into it, which generates a certain amount of dust. For this reason, it is preferable that the vibration damping device 1 according to the second embodiment be used in a clean room where dust generated during installation is acceptable.

[0051] [Variations] The present invention can be modified in various ways without departing from the spirit of the invention. In the embodiment, the vibration damping device 1 was used for equipment 2 installed inside a clean room, but it can also be used for equipment 2 installed outside a clean room if the floor surface F is relatively smooth.

[0052] In the first embodiment, the fixing portion 9 is made of an elastic member or the like, but the fixing portion 9 may be made of a general adhesive. This allows the fixed metal plate 6 to be fixed to the floor surface F more simply and at low cost.

[0053] In the embodiment, the extension portion 17v of the equipment side connection portion 17 and the vibration damping unit side connection portion 19, which constitute the connection portion 5, are both perpendicular to the floor surface F, but the extension portion 17v and the vibration damping unit side connection portion 19 may also both be parallel to the floor surface F. This allows the area occupied by the vibration damping device 1 in the height direction to be reduced.

[0054] In the embodiment, the equipment side connection portion 17 is fixed to the jack bolt 2a, but this is not restrictive and the female screw portion 16 may be formed on a side plate or the like that is fixed to the equipment 2. This allows the configuration of the connection part 5 to be simpler. In this case, the side plate or the like on which the female screw portion 16 is formed serves as the device side connecting portion 17 .

[0055] In Example 1, the female screw portion 12 formed on the fixed metal plate 6 is the inner surface of a nut integrated on the upper surface of the fixed metal plate 6, but the female screw portion 12 may also be formed directly on the fixed metal plate 6 using a tap or the like. This allows the number of components of the vibration damping device 1 to be reduced.

[0056] In the embodiment, the diameter of the through holes formed in the upper elastic portion 11 and the elastic portion 8 through which the headed bolts 15, 30 are inserted is approximately equal to the shaft diameter of the headed bolts 15, 30, but the diameter of the through holes formed in the upper elastic portion 11 and the elastic portion 8 may also be larger than the shaft diameter. Furthermore, the planar view of each through hole is not particularly limited, and it can be made to have an optimum shape depending on the purpose. This allows the upper elastic portion 11 and the elastic portion 8 to be deformed more easily. [Explanation of symbols]

[0057] 1 vibration damping device 2 equipment 3 vibration damping section 5 connection section 6 fixed metal plate 7 transmission metal plate 8 Elastic part F Floor surface

Claims

1. In a vibration control device installed alongside equipment installed on the floor, a vibration damping unit that is installed on the floor surface and absorbs transmitted vibrations; a connection section that connects the device and the vibration damping section, The vibration damping unit is a fixed metal plate fixed on the floor surface parallel to the floor surface; a transmission metal plate fixed to the connection portion and transmitting vibration of the device; an elastic portion sandwiched between the fixed metal plate and the transmission metal plate; A vibration damping device comprising:

2. 2. The vibration damping device according to claim 1, The vibration damping device is characterized in that the fixed metal plate is fixed onto the floor surface via a fixing portion.

3. The vibration damping device according to claim 1 or 2, The vibration damping unit is an upper metal plate disposed above the transmission metal plate; an upper elastic portion sandwiched between the transmission metal plate and the upper metal plate; A vibration damping device comprising:

4. 4. The vibration damping device according to claim 3, The vibration damping unit is A female screw portion is formed on the fixed metal plate, a through hole through which a headed bolt having a male screw portion that screws into the female screw portion is inserted is formed in the upper metal plate, the upper elastic portion, the transmission metal plate, and the elastic portion; A vibration damping device characterized in that the male screw portion is screwed into the female screw portion, thereby fastening the device in the vertical direction.

5. In a vibration control device installed alongside equipment installed on the floor, a vibration damping unit that is installed on the floor surface and absorbs transmitted vibrations; a connection section that connects the device and the vibration damping section, The vibration damping unit is a transmission metal plate fixed to the connection portion and transmitting vibration of the device; an elastic portion sandwiched between the floor surface and the transmission metal plate; a restricting portion that restricts excessive tilt of the transmission metal plate; A vibration damping device comprising:

6. 6. The vibration damping device according to claim 5, The vibration damping unit is an upper metal plate disposed above the transmission metal plate; an upper elastic portion sandwiched between the transmission metal plate and the upper metal plate; A vibration damping device comprising:

7. 7. The vibration damping device according to claim 6, The vibration damping unit is A female screw portion is formed below the floor surface, a through hole through which a headed bolt having a male screw portion that screws into the female screw portion is inserted is formed in the upper metal plate, the upper elastic portion, the transmission metal plate, and the elastic portion; A vibration damping device characterized in that the male screw portion is screwed into the female screw portion, thereby fastening the device in the vertical direction.

8. 8. The vibration damping device according to claim 7, A vibration damping device characterized in that the shaft of the headed bolt is the restricting portion.

9. The vibration damping device according to claim 1 or claim 5, The connection portion is an equipment-side connection portion fixed to the equipment and having a female screw portion; a vibration-damping-part-side connecting part that is extended on the transmission metal plate, penetrates the plate in a thickness direction, and has a long hole that is long in the extending direction; Equipped with A vibration damping device characterized in that the equipment side connection portion and the vibration damping portion side connection portion are fastened together by threading the male thread portion of a headed bolt inserted through the long hole into the female thread portion.

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