Conveying equipment

Abstract

To further improve the transport efficiency of transport equipment that transports goods using at least ground transport vehicles and overhead transport vehicles. [Solution] The transport equipment 4, which includes an overhead transport vehicle 1, a ground transport vehicle 2, and a transport device 3, has a transfer section 5 where goods W are transferred between the overhead transport vehicle 1 and the transport device 3, which is positioned above the floor surface 200 at V1 and away from the floor surface 200. Direct transfer of goods W is possible between the overhead transport vehicle 1 and the ground transport vehicle 2, and between the ground transport vehicle 2 and the transport device 3, the goods W are transferred via the overhead transport vehicle 1 and the transfer section 5.

Description

Technical Field

[0001] The present invention relates to a conveying facility for conveying articles.

Background Art

[0002] Japanese Patent Application Laid-Open No. 2020-184567 discloses a conveying facility that conveys articles and includes a plurality of different conveying devices (in the background art, the reference numerals in parentheses are those of the cited documents). This conveying device includes a ground conveying vehicle (411) that travels on the ground, a ceiling conveying vehicle (511) that travels along a ceiling conveying rail (5), and a loading / unloading device (338) that transfers articles between the ground conveying vehicle (411) and the ceiling conveying vehicle (511).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By using two carrier vehicles, namely a ground carrier vehicle and a ceiling carrier vehicle, it is expected to improve the conveying efficiency within the conveying facility. However, in this conveying facility, since the loading / unloading device for transferring articles between the ground carrier vehicle and the ceiling carrier vehicle is installed on the floor surface, the floor area within the conveying facility tends to be reduced by the area occupied by the loading / unloading device. Also, when the floor area is reduced, the travelable area of the ground carrier vehicle may be restricted. Therefore, there is room for improving the space utilization efficiency in the conveying facility.

[0005] In view of the above background, it is desirable to further improve the conveying efficiency in a conveying facility that conveys articles using at least a ground carrier vehicle and a ceiling carrier vehicle.

Means for Solving the Problems

[0006] In view of the above, the transport equipment comprises an overhead transport vehicle that travels on a track supported on the ceiling to transport articles, a ground transport vehicle that travels on the floor to transport the articles, and a transport device that transports the articles along a transport route different from that of the overhead transport vehicle and the ground transport vehicle, wherein a transfer section for the transfer of articles between the overhead transport vehicle and the transport device is positioned above the floor and away from the floor, allowing for direct transfer of articles between the overhead transport vehicle and the ground transport vehicle, and transferring articles between the ground transport vehicle and the transport device via the overhead transport vehicle and the transfer section.

[0007] With this configuration, goods can be transferred between the overhead transport vehicle and the ground transport vehicle without the need for a transfer section, thus eliminating the need for a transfer section on the floor. While a transfer section is used for transferring goods between the overhead transport vehicle and the transport device, it is positioned above the floor and away from the floor, eliminating the need to secure space on the floor for the transfer section. Therefore, this configuration makes it easier to improve the space utilization efficiency of transport equipment that uses at least ground transport vehicles and overhead transport vehicles to transport goods.

[0008] Further features and advantages of the conveying equipment will become clear from the following description of exemplary and non-limiting embodiments, which will be explained with reference to the drawings. [Brief explanation of the drawing]

[0009] [Figure 1] Plan view showing an example of conveying equipment. [Figure 2] A diagram showing an example of an overhead transport vehicle. [Figure 3] A diagram showing an example of a ground transport vehicle. [Figure 4] A diagram showing an example of how goods are moved. [Figure 5] A diagram showing other examples of how items are moved. [Modes for carrying out the invention]

[0010] The embodiments of the transport equipment will be described below with reference to the drawings. Figure 1 is a plan view showing an example of the transport equipment 4. The transport equipment 4 includes an overhead transport vehicle 1, a ground transport vehicle 2, and an inter-floor transport device 3 (transport device) as automatic transport machines for moving articles W (see Figure 2, etc.). Specifically, the transport equipment 4 includes a first automatic transport machine (overhead transport vehicle 1), a second automatic transport machine (ground transport vehicle 2), and a third automatic transport machine (inter-floor transport device 3). Here, "movement" includes the movement of articles W by the overhead transport vehicle 1, ground transport vehicle 2, and inter-floor transport device 3 individually (transportation), the movement of articles W between automatic transport machines (transfer), and the movement of articles W between a fixed target location within the transport equipment 4 (for example, a handover section 5 or storage device 6 described later) and an automatic transport machine (transfer). In this embodiment, a FOUP (Front Opening Unified Pod) containing semiconductor wafers is used as an example of articles W, but articles W are not limited to FOUPs.

[0011] As shown in Figure 2, the overhead transport vehicle 1 suspends and supports the item W and transports the item W by traveling on a running rail 11 (track) supported on the ceiling 100. The ground transport vehicle 2 transports the item W by traveling on the floor surface 200. Although the item W is omitted in the diagram, as shown in Figure 3, the ground transport vehicle 2 transports the item W by placing it on the top surface of a trolley section 21 which functions as a loading section 21a. The inter-floor transport device 3 is a transport device that transports the item W along a transport route 30 (see Figure 5) different from that of the overhead transport vehicle 1 and the ground transport vehicle 2. As shown in Figure 5, in this embodiment, the transport equipment 4 is configured to span multiple floors (two floors are used as an example here), and the inter-floor transport device 3 transports the item W along the vertical direction V between different floors.

[0012] As shown in Figure 5, the transport equipment 4 is provided with a transfer section 5 for the transfer of goods W between the overhead transport vehicle 1 and the inter-floor transport device 3. The transfer section 5 is positioned above V1 relative to the floor surface 200, away from the floor surface 200. The transfer section 5 is positioned so that it does not touch the floor surface 200, and its lowest part V2 is away from the floor surface 200. As a result, the transfer section 5 is positioned at a height that allows at least the ground transport vehicle 2 with goods W on it to travel below V2 of the transfer section 5. Furthermore, it is preferable that the transfer section 5 is positioned at a height that allows an unillustrated worker on the floor surface 200 to pass below V2 of the transfer section 5 or to perform work below V2 of the transfer section 5. For example, it is preferable that the transfer section 5 is positioned approximately 3 meters above V1 of the floor surface 200. As will be described in more detail later, in this embodiment, the entry / exit section 32 of the inter-floor transport device 3 corresponds to the transfer section 5.

[0013] As shown in Figure 4, goods W can be directly transferred between the overhead transport vehicle 1 and the ground transport vehicle 2. On the other hand, since the transfer section 5 (input / output section 32) is located above V1 from the floor surface 200, goods W cannot be directly transferred between the ground transport vehicle 2 and the inter-floor transport device 3. Therefore, the transport equipment 4 transfers goods W between the ground transport vehicle 2 and the inter-floor transport device 3 via the overhead transport vehicle 1 and the input / output section 32 (transfer section 5). In other words, as shown in Figure 5, goods W are transferred between the input / output section 32 (transfer section 5) of the inter-floor transport device 3 and the overhead transport vehicle 1, and as shown in Figure 4, goods W are also transferred between the overhead transport vehicle 1 and the ground transport vehicle 2, thereby transferring goods W between the ground transport vehicle 2 and the inter-floor transport device 3.

[0014] By using two automated transporters, a ground transporter 2 and an overhead transporter 1, it is easy to improve the efficiency of transporting goods W within the transport facility 4. However, if the transfer section 5 is provided on the floor surface 200, the effective floor area of ​​the transport facility 4 will be reduced by the amount of the transfer section 5 installed. If the area of ​​the ground transporter 2 can travel is limited due to the reduced floor area, the improvement in transport efficiency will be limited. This effect tends to be greater when the site area for installing the transport facility 4 is small. In this embodiment, since the ground transporter 2 and the entrance / exit section 32 (transfer section 5) of the inter-floor transport device 3 do not directly transfer goods, there is no need to provide the transfer section 5 on the floor surface 200, and the floor surface 200 can be used effectively. For example, when constructing the transport facility 4 on a limited site area, it is easy to improve space efficiency and transport efficiency.

[0015] The following describes an example configuration of the overhead transport vehicle 1, the ground transport vehicle 2, and the inter-floor transport device 3. As shown in Figures 2, 4, and 5, the overhead transport vehicle 1 includes a traveling section 12 that travels along the overhead traveling path (overhead traveling path 10) guided by a pair of traveling rails 11 which are tracks suspended and supported from the ceiling, and a main body section 13 that is located below the traveling rails 11 V2 and suspended and supported by the traveling section 12. The overhead transport vehicle 1 is supported by the traveling rails 11 and operates by receiving non-contact drive power from power supply lines (not shown) arranged along the overhead traveling path 10. The main body section 13 is vertically movable relative to the main body section 13 and includes an article support section 18 that grips an article W with a gripping section 19 and supports it in a suspended state. The overhead transport vehicle 1 grasps the item W placed at the transfer position P with its gripping section 19 and lifts it up, then travels while supporting the item W in a suspended state to transport the item W, and transfers the item W to another transfer position P.

[0016] The running section 12 is equipped with a pair of running wheels 15 that are rotationally driven by a running motor 14. The running wheels 15 roll on the running surfaces formed on the upper surfaces of the running rails 11. In addition to the running motor 14, the main body 13 is equipped with actuators for raising and lowering the article support section 18, actuators for driving the gripping section 19 that grips the article W, and their drive circuits (none of which are shown).

[0017] The ground transport vehicle 2 can be, for example, an AGV (Automatic Guided Vehicle), a transport cart or transport robot with sorting functions, or an AMR (Autonomous Mobile Robot). In this embodiment, for simplicity, as shown in Figure 4, a transport cart that transports items W on it is shown as an example.

[0018] The transmission perspective view in Figure 3 schematically shows an example of a ground transport vehicle 2. As described above, in this embodiment, the ground transport vehicle 2 is an example of a transport trolley mainly composed of a trolley section 21. The ground transport vehicle 2 houses a power storage device 22, a motor 24 that drives the wheels 25, and a motor control device 23 that drives the motor 24 inside the trolley section 21. The power storage device 22 is a secondary battery such as a lithium battery. The ground transport vehicle 2 is equipped with a non-contact power receiving device, a charging circuit, etc. (not shown). A charging spot for charging the power storage device 22 is provided along the travel path of the ground transport vehicle 2 or at a location away from the travel path. When the ground transport vehicle 2 stops at a charging spot, power is supplied to the ground transport vehicle 2 by electromagnetic induction. Of course, the method is not limited to this non-contact power supply method; power may also be supplied to the power storage device 22 by a wired connection at the charging spot.

[0019] A mounting section 21a is formed on the upper surface of the trolley section 21 on which the article W is placed. For example, if an engaging recess or the like is formed on the bottom of the article W, providing an engaging projection on the mounting section 21a that engages with the engaging recess makes it easier to align the article W when it is handed to the mounting section 21a and when it is withdrawn from the mounting section 21a. Furthermore, this does not prevent the installation of a transfer device, such as a robot arm for transferring the article W, on the trolley section 21.

[0020] The floor conveyor 2 can travel on the floor surface 200 without traveling on a track such as the traveling rail 11 of the ceiling conveyor 1. However, even if there is no track, there may be a defined traveling route. The thin dashed line shown in FIG. 1 indicates the traveling route (floor traveling route 20) of the floor conveyor 2. For example, a reference index M is installed on the floor surface 200. The floor conveyor 2 is provided with a sensor 29 capable of acquiring the position information held by the reference index M. The reference index M can use, for example, a magnetic medium such as a magnetic tape or a magnetic marker, a symbol such as a barcode or a mark, or a non-contact electromagnetic medium such as an IC tag. When the reference index M is a magnetic medium, the sensor 29 is preferably a magnetic sensor such as a magnetic induction sensor or a magnetic mark sensor. When the reference index M is a symbol, the sensor 29 is preferably a camera and an image processing device. For example, a barcode reader can be applied as the sensor 29. Also, when the reference index M is a non-contact electromagnetic medium, the sensor 29 may be a tag reader capable of reading the information held by the non-contact electromagnetic medium.

[0021] In this embodiment, as the reference index M, a form having a general index M1 and a stop index M2 is illustrated. The floor conveyor 2 can travel autonomously. The floor conveyor 2 can travel autonomously while specifying its own vehicle position by LiDAR (Light Detection and Ranging) using an optical sensor such as a laser diode. Further, the position of the vehicle itself may be estimated subsidiarily based on the rotational speed of the motor 24, the rotational speed of the wheels 25, the steering angle of the wheels 25, etc. Also, a magnetic tape or the like may be laid on the floor along the traveling route, and the floor conveyor 2 may travel along the magnetic tape using a magnetic sensor such as a magnetic induction sensor.

[0022] Here, since errors may accumulate and cause misalignment when the traveling distance of the floor transporter 2 becomes long, it is preferable to correct the vehicle position based on the reference index M. The general index M1 is the reference index M for correcting the vehicle position in this way. The general index M1 is provided at a coarser density than the stop index M2 described later on a part of the floor traveling path 20. As described above, the floor transporter 2 may transfer the article W to and from the ceiling transporter 1. In this case, it is preferable that the stop position of the floor transporter 2 is accurately controlled. The stop index M2 is arranged so that the floor transporter 2 can stop at a specified stop position with high accuracy.

[0023] Thus, as one aspect, the floor transporter 2 is configured to travel on the floor surface 200 without a track and to be able to detect the reference index M arranged around the floor traveling path 20. Considering detecting the reference index M using a camera and an image processing device, etc., the reference index M may not be arranged on the floor traveling path 20. The reference index M may be arranged on a pillar existing along the traveling path, on the ceiling, on the lower surface of the traveling rail 11 of the ceiling transporter 1, or on various processing devices (described later) for producing semiconductor products. Note that, regardless of the presence or absence of the reference index M, for example, alignment may be performed by recognizing the ceiling transporter 1 with a camera and an image processing device mounted on the floor transporter 2. For example, alignment of the stop position of the floor transporter 2 may be performed by recognizing the ceiling transporter 1 that is the recipient of the article W.

[0024] The ground transport vehicle 2 can identify its own position by detecting reference indicators M placed around the ground travel path 20 using sensors 29. Furthermore, the ground transport vehicle 2 can autonomously travel while estimating its own position as described above. The ground transport vehicle 2 may also travel on a free path without following the defined ground travel path 20. However, it is preferable that the stopping position for transferring goods W between the ground transport vehicle 1 and the ground transport vehicle 2 be highly accurate. Therefore, it is preferable that the reference indicators M are installed at least at positions corresponding to the transfer position P for transferring goods W between the ground transport vehicle 1 and the ground transport vehicle 2. Specifically, it is preferable that the reference indicators M include at least a stopping indicator M2.

[0025] Here, the "position corresponding to the handover position P" does not have to be a position on the ground travel path 20. As described above, the reference indicator M does not have to be placed on the ground travel path 20, but may be placed on a column, the ceiling, the underside of the travel rail 11 of the overhead transport vehicle 1, or on various processing devices. Accordingly, the stopping indicator M2 included in the reference indicator M may also be placed on a column, the ceiling, the underside of the travel rail 11 of the overhead transport vehicle 1, or on various processing devices. It is preferable that the reference indicator M (stopping indicator M2) is installed at least at a position that identifies the handover position P where the goods W are handed over between the overhead transport vehicle 1 and the ground transport vehicle 2. That is, it is sufficient that the reference indicator M (stopping indicator M2) is placed at a position that allows the ground transport vehicle 2 to identify the handover position P so that the ground transport vehicle 2 can stop at the handover position P.

[0026] As shown in Figure 5, the inter-floor transport device 3 includes a lifter 31 and an inlet / outlet section 32. The inlet / outlet section 32 is composed of, for example, a conveyor. The inter-floor transport device 3 is a transport device that transports articles W along a transport path 30 (see Figure 5) different from that of the overhead transport vehicle 1 and the ground transport vehicle 2. The ground transport vehicle 2 transports articles W in the horizontal direction. The overhead transport vehicle 1 transports articles W in the horizontal direction and also moves articles W vertically (up and down direction V) when transferring them. The inter-floor transport device 3 is a transport device that transports articles W at least in the up and down direction V. The overhead transport vehicle 1 and the ground transport vehicle 2 transport articles W in the space between one ceiling 100 and one floor surface 200, that is, the space between the first ceiling 101 and the first floor surface 201 (the space on the first floor), and the space between the second ceiling 102 and the second floor surface 202 (the space on the second floor). In contrast, the inter-floor transport device 3 penetrates the first ceiling 101 and the second floor surface 202 to transport the item W between the space on the first floor and the space on the second floor.

[0027] In this embodiment, the inter-floor transport device 3 is given as an example of the third automatic transport device, but the third automatic transport device (transport device) may be an automated warehouse equipped with a stacker crane, or a stacker crane in said automated warehouse. Also, in the case of the goods W being FOUP as in this embodiment, the transport equipment 4 may be installed in semiconductor manufacturing equipment. In such a case, a transport mechanism that moves the goods W, which is installed in various processing equipment for producing semiconductor products by performing various processes on semiconductor wafers, can also be the third automatic transport device (transport device).

[0028] The entry / exit section 32 of the inter-floor transport device 3 corresponds to the transfer section 5 where goods W are transferred between the overhead transport vehicle 1 and the inter-floor transport device 3. As shown in Figure 5, the entry / exit section 32 is positioned above the floor surface 200, V1, and away from the floor surface 200. Goods W are not directly transferred between the entry / exit section 32 and the ground transport vehicle 2; the transfer of goods W is done via the overhead transport vehicle 1. Therefore, in this embodiment, the entry / exit section 32 can be positioned at a height such that the ground transport vehicle 2, with goods W loaded on it, can travel below the transfer section 5, V2. Similarly, in the case of an automated warehouse equipped with a stacker crane or a transport mechanism provided in various processing equipment for producing semiconductor products, the floor surface 200 can be effectively utilized by positioning the transfer section 5 above the floor surface 200, V1, and away from the floor surface 200.

[0029] As shown in Figure 4, the overhead transport vehicle 1 and the ground transport vehicle 2 are aligned vertically in the V direction, and the overhead transport vehicle 1 can transfer the item W by raising and lowering the item W. Specifically, with the overhead transport vehicle 1 and the ground transport vehicle 2 aligned vertically in the V direction, the overhead transport vehicle 1 can transfer the item W to the ground transport vehicle 2 by lowering the item support part 18 while gripping the item W with the gripping part 19. Alternatively, the overhead transport vehicle 1 can transfer the item W from the ground transport vehicle 2 by lowering the item support part 18 with the overhead transport vehicle 1 and the ground transport vehicle 2 aligned vertically in the V direction, gripping the item W placed on the ground transport vehicle 2 with the gripping part 19, and then raising the item support part 18.

[0030] Furthermore, the ground transport vehicle 2 may be equipped with a mechanism that allows the mounting section 21a to be raised and lowered. Therefore, this does not prevent a configuration in which goods W are transferred between the overhead transport vehicle 1 and the ground transport vehicle 2 by raising and lowering the mounting section 21a of the ground transport vehicle 2 without the goods support section 18 of the overhead transport vehicle 1 being raised and lowered. Naturally, this also does not prevent a configuration in which goods W are transferred between the overhead transport vehicle 1 and the ground transport vehicle 2 by raising and lowering both the goods support section 18 of the overhead transport vehicle 1 and the mounting section 21a of the ground transport vehicle 2.

[0031] Furthermore, the overhead transport vehicle 1 is not only capable of raising and lowering the item support section 18 directly below the travel section 12, but is also configured to raise and lower the item W while the item support section 18 is slid in the path width direction H relative to the travel section 12, as shown in Figure 4, for example. The sliding path 10h when the item support section 18 slides in this way also corresponds to the movement trajectory of the item W.

[0032] The overhead transport vehicle 1 and the ground transport vehicle 2 transfer goods W by raising and lowering the goods W while they are aligned vertically in the direction V. In other words, the overhead transport vehicle 1 and the ground transport vehicle 2 transfer goods W by raising and lowering the goods W while their goods support section 18 and mounting section 21a are aligned vertically in the direction V. The state in which the overhead transport vehicle 1 and the ground transport vehicle 2 are aligned vertically in the direction V is not limited to the case in which the goods support section 18 is located below the running rail 11 (directly below the running section 12), as shown in Figure 4, but also includes the state in which the goods support section 18 slides in the path width direction H, although this is not shown in the figure. Even when the goods support section 18 slides in the path width direction H, the goods W can be transferred between the overhead transport vehicle 1 and the ground transport vehicle 2 by raising and lowering the goods W while the goods support section 18 and the mounting section 21a of the ground transport vehicle 2 are aligned vertically in the direction V.

[0033] To transfer an item W between the overhead transport vehicle 1 and the ground transport vehicle 2, the movement trajectory of the item W by the overhead transport vehicle 1 (overhead travel path 10, slide path 10h) and the travel trajectory of the ground transport vehicle 2 (ground travel path 20) overlap in a vertical view at the position where the item support section 18 rises and falls. Therefore, the travel rail 11 (track) is arranged so that it has a section where the movement trajectory of the item W by the overhead transport vehicle 1 and the ground travel path 20 overlap in a vertical view. In the travel rail 11, the section containing such an overlapping section is called the overlapping section.

[0034] In overlapping sections, the running rail 11 does not necessarily have to be parallel to the ground-level running path 20, but Figure 1 illustrates a configuration in which the running rail 11 (ceiling running path 10) is parallel to the ground-level running path 20. In the example shown in Figure 1, the overlapping section corresponds to the section of running rail 11 located in the overlapping section where the ceiling running path 10 (shown by a thick dashed line) and the ground-level running path 20 (shown by a thin dashed line) overlap. In Figure 1, to ensure clarity, the dashed lines representing the ceiling running path 10 and the dashed lines representing the ground-level running path 20 are offset, but it is preferable that the ceiling running path 10 and the ground-level running path 20 overlap when viewed in the vertical direction.

[0035] Furthermore, in this embodiment, as shown in Figure 4, the transport equipment 4 includes a storage device 6 that is supported by the ceiling 100 and arranged along the travel rail 11 to store the articles W. The storage device 6 is, for example, a warehouse installed on the ceiling side. The lowest part V2 of the storage device 6 is positioned above V1 relative to the floor surface 200, away from the floor surface 200. That is, the storage device 6, like the transfer section 5, is positioned at a height such that the ground transport vehicle 2 with articles W on it can travel along the lower V2 of the transfer section 5. As described above, the article support part 18 of the overhead transport vehicle 1 is slidable along the path width direction H, and the overhead transport vehicle 1 can transfer articles W between the storage device 6 and the overhead transport vehicle 1 by sliding the article support part 18 towards the storage device 6 along the path width direction H. That is, articles W can be transferred directly between the overhead transport vehicle 1 and the storage device 6. Between the ground transport vehicle 2 and the storage device 6, goods W can be transferred via the overhead transport vehicle 1, similar to the transfer between the ground transport vehicle 2 and the inter-floor transport device 3.

[0036] Furthermore, regardless of whether the overhead transport vehicle 1 is configured to allow the article support section 18 to slide, the storage device 6 may be equipped with a transfer device (such as a fork that can move in and out along the path width direction H, or a conveyor that extends along the path width direction H) that can transfer articles W to and from the overhead transport vehicle 1. The articles W may then be transferred between the overhead transport vehicle 1 and the storage device 6 using the transfer device.

[0037] The storage device 6 is preferably capable of storing multiple items W. The storage device 6 can function as a buffer to temporarily store items W being transported on one floor by the overhead transport vehicle 1 and the ground transport vehicle 2. By having the storage device 6 function as a buffer, the transport time to the destination can be shortened, making it easier to improve transport efficiency. The storage device 6 is configured to have multiple holding parts 61 in order to store multiple items W. As described above, items W can be directly transferred between the storage device 6 and the overhead transport vehicle 1. Therefore, as shown in Figure 1, it is preferable that the multiple holding parts 61 be arranged in a line along the overhead travel path 10 (travel rail 11). Furthermore, considering the transfer of items W between the storage device 6 and the ground transport vehicle 2 via the overhead transport vehicle 1, as shown in Figure 1, it is also preferable that the multiple holding parts 61 be arranged in a line along the ground travel path 20 in relation to the ground travel path 20.

[0038] Specifically, as shown in Figure 1, the running rail 11 has parallel sections that are arranged parallel to the ground travel path 20, which is the travel trajectory of the ground transport vehicle 2. Multiple holding sections 61, each capable of storing articles W, are arranged in a line along the parallel sections. The storage device 6 is configured to include such multiple holding sections 61.

[0039] Furthermore, the transport efficiency can be expected to be improved by temporarily storing the goods W transported by the overhead transport vehicle 1. Therefore, the storage device 6 may not have a configuration in which the holding parts 61 are arranged in parallel along the parallel section. In other words, the storage device 6 may be positioned at any position relative to the travel rail 11, and may be positioned in a section that is neither parallel nor overlapping.

[0040] The following is a brief summary of the conveying equipment 4 described above.

[0041] In one embodiment, the transport equipment comprises an overhead transport vehicle that travels on a track supported on the ceiling to transport articles, a ground transport vehicle that travels on the floor to transport the articles, and a transport device that transports the articles along a transport path different from that of the overhead transport vehicle and the ground transport vehicle, wherein a transfer section for the transfer of articles between the overhead transport vehicle and the transport device is positioned above the floor and away from the floor, allowing for direct transfer of articles between the overhead transport vehicle and the ground transport vehicle, and transferring articles between the ground transport vehicle and the transport device via the overhead transport vehicle and the transfer section.

[0042] With this configuration, goods can be transferred between the overhead transport vehicle and the ground transport vehicle without the need for a transfer section, thus eliminating the need to provide a transfer section on the floor. While a transfer section is used for transferring goods between the overhead transport vehicle and the transport device, it is positioned above the floor and away from the floor, eliminating the need to secure space on the floor for the transfer section.

[0043] Furthermore, the transport equipment preferably includes a section in which the overhead transport vehicle and the ground transport vehicle transfer the goods by raising and lowering the goods while they are aligned vertically to each other, and the track is arranged such that the movement trajectory of the goods by the overhead transport vehicle and the travel trajectory of the ground transport vehicle overlap in a vertical view.

[0044] With this configuration, the overhead transport vehicle is positioned in a section where its movement trajectory and travel trajectory overlap in a vertical view, and the ground transport vehicle is positioned vertically parallel to the overhead transport vehicle, allowing for the proper transfer of goods between the ground transport vehicle and the overhead transport vehicle.

[0045] Furthermore, the transport equipment is supported by the ceiling and arranged along the track, and further includes a storage device for storing the articles, wherein the articles can be directly transferred between the overhead transport vehicle and the storage device, and it is preferable that the articles are transferred between the ground transport vehicle and the storage device via the overhead transport vehicle.

[0046] This configuration allows for the storage of items transported by both overhead and ground-level transport vehicles in a storage device supported by the ceiling. Therefore, it is easier to improve the efficiency of floor space utilization compared to a case where a separate storage device is provided for items transported by ground-level transport vehicles.

[0047] Furthermore, the transport equipment preferably includes an overhead transport vehicle and a ground transport vehicle that move the articles up and down while they are aligned vertically to each other to transfer the articles, a parallel section in the track which is parallel to the travel trajectory of the ground transport vehicle, and a storage device which is arranged along the parallel section and each has a plurality of holding parts capable of storing the articles.

[0048] This configuration makes it easier to shorten the distance traveled by goods when supplying them from the storage device to the ground transport vehicle via the overhead transport vehicle, and when receiving goods from the ground transport vehicle to the storage device via the overhead transport vehicle. Therefore, it is easier to improve the efficiency of goods transport. In addition, by having multiple storage units arranged along a parallel section of the storage device, it is easier to set up multiple locations for the transfer of goods between the overhead transport vehicle and the ground transport vehicle when goods are transferred between the overhead transport vehicle and the storage device via the overhead transport vehicle, thus improving the convenience of the goods transfer operation.

[0049] Furthermore, the transport equipment is preferably configured such that the ground transport vehicle travels on the floor surface without tracks and is capable of detecting reference indicators placed around the travel path of the ground transport vehicle, and that the reference indicators are at least installed at positions that identify the transfer point where the goods are transferred between the overhead transport vehicle and the ground transport vehicle.

[0050] This configuration makes it easier to improve the positional accuracy when stopping the ground transport vehicle at the point where goods are transferred between the overhead transport vehicle and the ground transport vehicle, thus facilitating the proper transfer of goods. [Explanation of symbols]

[0051] 1: Overhead transport vehicle 2: Ground transport vehicle 3: Inter-floor transport device (transport device) 4: Conveying equipment 5: Delivery department 6:Storage device 10: Overhead travel path (travel trajectory of overhead transport vehicle, trajectory of goods moved by overhead transport vehicle) 10h: Slide path (trajectory of goods movement by overhead transport vehicle) 11: Running rails (tracks) 20: Ground travel route (trajectory of the ground transport vehicle) 30: Transport route (a different transport route from overhead transport vehicles and ground transport vehicles) 61: Holding part 100: Ceiling 200: Floor surface M: Standard index P: Handover location V: Vertical direction V1: Upper side W:Goods

Claims

1. An overhead transport vehicle that travels along a track supported by the ceiling to transport goods, A ground transport vehicle that travels on the floor to transport the aforementioned items, A transport system comprising a transport device that transports the articles along a transport route different from that of the overhead transport vehicle and the ground transport vehicle, The transfer section, in which the goods are transferred between the overhead transport vehicle and the transport device, is positioned above the floor surface and away from the floor surface. Direct transfer of the goods is possible between the overhead transport vehicle and the ground transport vehicle. A transport system that transfers the goods between the ground transport vehicle and the transport device via the overhead transport vehicle and the transfer section.

2. The overhead transport vehicle and the ground transport vehicle are positioned vertically relative to each other and transfer the items by raising and lowering the items. The transport equipment according to claim 1, wherein the track has a section arranged such that the trajectory of the movement of the article by the overhead transport vehicle and the travel trajectory of the ground transport vehicle overlap in a vertical view.

3. The storage device is further supported by the ceiling and arranged along the track, and is for storing the articles, Direct transfer of the articles is possible between the overhead transport vehicle and the storage device. The transport equipment according to claim 1, wherein the transfer of the articles between the ground transport vehicle and the storage device is performed via the overhead transport vehicle.

4. The overhead transport vehicle and the ground transport vehicle are positioned vertically relative to each other and transfer the items by raising and lowering the items. The aforementioned track has a parallel section which is a section arranged parallel to the travel trajectory of the ground transport vehicle. The conveying equipment according to claim 3, wherein the storage device is arranged along the parallel section and comprises a plurality of holding sections, each capable of storing the articles.

5. The ground transport vehicle is configured to travel on the floor surface without tracks and to detect reference indicators placed around the travel path of the ground transport vehicle. The transport equipment according to any one of claims 1 to 4, wherein the reference indicator is installed at least at a position that identifies the transfer position for transferring the article between the overhead transport vehicle and the ground transport vehicle.

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