Enable switch, and method for adjusting a laser processing apparatus using the enable switch.

Abstract

This invention provides an enable switch capable of improving operability, and a method for adjusting a laser processing apparatus using the enable switch. [Solution] The enable switch 1 used in a device is provided with a gripping part 3 and an operating part 4 on a main body 2, and the operation of the device is permitted when the operating part 4 is operated. The enable switch 1 is equipped with a fixing part 6 for fixing a predetermined adjustment jig 5 for adjusting the device. Since the adjustment jig 5 can be fixed to the main body 2 with the fixing part 6, the operator can grip the enable switch with one hand and operate the adjustment jig 5 at the same time, so that the other hand is free to operate other adjustment targets of the device.

Description

Technical Field

[0001] The present invention relates to an enable switch and a method for adjusting a laser processing apparatus using the enable switch.

Background Art

[0002] Conventionally, as an apparatus for manufacturing wafers such as semiconductor wafers, a laser processing apparatus is known that irradiates an ingot with a laser beam having a wavelength with permeability, and peels a plate-like member starting from a modified layer formed inside the ingot to manufacture a wafer (for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In an apparatus such as the laser processing apparatus described in Patent Document 1, for example, maintenance may be performed periodically, and an enable switch is used in consideration of the safety of the operator performing the maintenance. However, a conventionally known general enable switch has a problem in that the operator's one hand may be blocked only by gripping the enable switch body, resulting in a lack of operability. For maintenance work, for example, the operator had to hold the enable switch with one hand, hold a light emitting member for confirming the position of the laser with the other hand, and further adjust the optical axis with the hand holding the enable switch. <00,00027> The present invention provides an enable switch capable of improving operability and a method for adjusting a laser processing apparatus using the enable switch.

Means for Solving the Problems

[0006] One aspect of the present invention is, An enable switch used in a device, wherein the main body is provided with a gripping portion and an operating portion, and the operation of the device is permitted when the operating portion is operated, The device is equipped with a fixing part for securing a predetermined adjustment jig for adjusting the aforementioned device.

[0007] Other aspects of the present invention include: A method for adjusting a laser processing apparatus using the above-mentioned enable switch, A permission step that allows a safety shutter that blocks the laser beam from the laser oscillator to the focusing lens to open in response to the operation of the control unit, After the permission step, the irradiation step involves opening the safety shutter and irradiating the laser beam onto the focusing lens, A positioning step of positioning the light-emitting member fixed to the enable switch at a position where it receives the laser beam from the laser oscillator, The system includes an adjustment step of adjusting the optical axis based on the position of the laser beam received by the light-emitting member. [Effects of the Invention]

[0008] According to the present invention, the operability of the enable switch can be improved. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is a schematic diagram showing an example of enable switch 1. [Figure 2] Figure 2 is a perspective view showing another example of enable switch 1. [Figure 3] Figure 3 is a perspective view showing a modified example of Figure 2. [Figure 4] Figure 4 is a flowchart showing an example of a method for adjusting a laser processing device using the enable switch 1. [Modes for carrying out the invention]

[0010] The following describes an enable switch according to one embodiment of the present invention, and a method for adjusting a laser processing apparatus using the enable switch, with reference to the drawings.

[0011] First, let's explain the configuration of the enable switch.

[0012] Figure 1 shows an example of enable switch 1. Enable switch 1 is a manual safety device operated by an operator who is operating an object to be operated, such as a machine or robot, and is used in conjunction with, for example, start control that allows the machine or robot to function. For example, a machine or robot can be set to normal mode and maintenance mode, and operation with the enable switch is possible when maintenance mode is set. Maintenance mode may be set, for example, when starting up a newly shipped device or during periodic maintenance. Normal mode may be set when performing normal operations on the device. In the following description, unless otherwise specified, the object to be operated will be described as a machine.

[0013] As shown in Figure 1, the enable switch 1 comprises a main body 2, a gripping part 3, an operating part 4, and a fixing part 6.

[0014] The main body 2 is a part that constitutes the external appearance of the enable switch 1, and for example, it has a rectangular parallelepiped shape. However, the shape of the main body 2 is not limited to this, and it may also be polygonal or cylindrical.

[0015] The gripping portion 3 is the part that the operator grips when operating the enable switch 1. In the example shown in Figure 1, the gripping portion is the part of the main body 2 that extends downward from the center. The enable switch 1 in this embodiment is a grip-type device that is operated by the operator gripping the gripping portion 3. Therefore, the gripping portion 3 may have, for example, grooves or other features to improve the grip of the fingers so that the operator can easily grasp the enable switch 1.

[0016] The operation unit 4 is a part that receives the input operation of the operator. For example, as shown in FIG. 1, a button type or a switch type configuration can be adopted. When this operation unit 4 is operated, the operation of the mechanical device is permitted. In the example shown in FIG. 1, the operation unit 4 is provided above the main body unit 2. That is, in the example shown in FIG. 1, it can be assumed that the index finger, middle finger, ring finger, and little finger of one hand of the operator touch the gripping part 3, and the thumb touches the operation unit 4, thereby enabling the operation of the enable switch 1.

[0017] When the operation unit 4 is operated by the operator, the operation of the mechanical device is permitted. That is, a signal for operating the mechanical device is output from the enable switch 1 toward the mechanical device. More specifically, while the operator is operating the operation unit 4, the operation of the mechanical device is enabled, for example, by starting control in a maintenance mode (or a safe mode). On the other hand, when the operator is not operating the operation unit 4, the operation of the mechanical device is in a stopped state.

[0018] Note that the on / off switching of the operation unit 4 may be of a conventionally known 2 - position type or 3 - position type. In the case of the 2 - position type, when the operation unit 4 is operated, it becomes an on state of the switch, and when the operation unit 4 is not operated, it becomes an off state of the switch. The 3 - position type has a configuration that takes more into account the reflex actions of people compared to the 2 - position type. For example, when the hand or finger is separated from the operation unit 4, or when the hand or finger lightly touches it, it becomes position 1, and in this state, it is an off state of the switch where the operation of the mechanical device is not permitted. Then, by an intentional operation such as grasping or pressing the operation unit 4, it becomes position 2, and it is an on state of the switch where the operation of the mechanical device is permitted. And when the operator strongly grasps or presses the operation unit 4 due to feeling danger or being surprised by a malfunction of the mechanical device, etc., it becomes position 3, and it is an off state of the switch where the operation of the mechanical device is not permitted.

[0019] Also, the operation unit 4 only needs to be located at a position where the operator's finger can touch it while holding the enable switch 1. Therefore, in addition to the position shown in FIG. 1, for example, it may be provided at a position similar to the gripping unit 3. In such a case, it can be assumed that while gripping the main body unit 2 with all the fingers of one hand of the operator, the operation unit 4 is operated by at least one of the index finger, middle finger, ring finger, and little finger. In addition, as long as it is a position considering the operability of the enable switch 1, the positional relationship between the operation unit 4 and the gripping unit 3 may be arbitrarily set.

[0020] Also, the configuration of the operation unit 4 may be, for example, a dial type, a slider type, etc., in addition to the button type or switch type as shown in FIG. 1.

[0021] The fixing part 6 is a part for fixing a predetermined maintenance jig 5 and is provided at an arbitrary position of the main body unit 2. In the example shown in FIG. 1, the fixing part 6 is provided above the main body unit 2. More specifically, in the example shown in FIG. 1, the fixing part 6 includes an insertion port 7 for inserting the maintenance jig 5 and a fixture 8 for fixing the maintenance jig 5 inserted into the insertion port 7.

[0022] Here, the maintenance jig 5 will be described. The maintenance jig 5 is a predetermined jig used when performing maintenance on a mechanical device or the like. When performing maintenance on a mechanical device or the like, for example, a fixing member such as a loosened bolt may be adjusted. Therefore, in the example shown in FIG. 1, a tool 5a for adjusting the fixing member is shown as an example of the maintenance jig 5. As the tool 5a, for example, a hexagon wrench or a driver for rotating a fixing member such as a bolt is used.

[0023] In other words, in the example shown in Figure 1, the tool 5a is inserted vertically into the insertion opening 7 formed in the main body 2, and the tool 5a inserted into the insertion opening 7 is fixed by a fastener 8 such as a bolt, thereby functioning as a fixing part 6. In this way, the tool 5a, which is the adjustment jig 5, is fixed to the main body 2, and the tool 5a is integrated with the main body 2. This allows the operator to grip the enable switch 1 and use the tool 5a to tighten fasteners such as bolts in the machine. The enable switch 1 is composed of the main body 2, the gripping part 3, the operating part 4, and the fixing part 6 as described above, but in addition to these components, the adjustment jig 5 fixed to the fixing part 6 may also be a component.

[0024] Furthermore, in the example shown in Figure 1, the tool 5a is fixed to the main body 2 by an insertion opening 7 and a fixing device 8, but the configuration may be any other as long as the tool 5a can be fixed to the main body 2. For example, the main body 2 may not have a hole into which the tool 5a is inserted, such as an insertion opening 7, and the tool 5a may simply be attached to the main body 2 by the fixing device 8. In addition, for example, the insertion opening 7 may be shaped to engage with a hex wrench or screwdriver, and the insertion opening 7 may also serve as the fixing device 8.

[0025] Although not shown in the diagram, the enable switch 1 may also be equipped with a display unit that shows information based on the operation of the control unit 4, the status of the machine, and other such information.

[0026] As described above, the fixing part 6 allows the tool 5a to be fixed to the main body 2, so that the operator can grasp the enable switch 1 with one hand (i.e., one hand) and operate the tool 5a at the same time, allowing the other hand to operate other objects to be adjusted, such as machinery.

[0027] In other words, this configuration allows the operator to easily perform two actions simultaneously: gripping the enable switch 1 with one hand and operating tools, etc. That is, in conventional enable switches that do not have a fixing part 6 for fixing the adjustment jig 5, one hand is occupied by gripping the enable switch 1, and other components to be adjusted or tools, etc., must be operated with only the other hand, resulting in poor operability and work efficiency of the enable switch 1. Therefore, by integrating the adjustment jig 5, such as the tool 5a, with the main body part 2 through the function of this fixing part 6, the operability and work efficiency of the enable switch 1 can be improved.

[0028] Furthermore, by performing the two actions described above simultaneously with one hand holding the enable switch 1, the other hand becomes free or can be used for other operations. In other words, not only is operability improved, but safety is also enhanced. Thus, the configuration of this embodiment provides an enable switch 1 that is both safe and easy to operate.

[0029] [Other examples] Next, another example of the enable switch 1 will be described. In the example shown in Figure 1 above, a tool 5a was used as an example of an adjustment jig 5 fixed to the fixing part 6, but the adjustment jig 5 may be, for example, a sensor card 5b used for maintenance of a laser processing machine. Figure 2 shows an example of the enable switch 1 when the sensor card 5b is fixed to the fixing part 6. In the example shown in Figure 2, since the target of maintenance is a laser processing machine, the machine that is operated is a laser processing machine (not shown).

[0030] In the example in Figure 2, the X-axis direction is a single direction in the horizontal plane. The Y-axis direction is perpendicular to the X-axis direction in the horizontal plane. The Z-axis direction is perpendicular to both the X-axis and Y-axis directions.

[0031] A laser processing apparatus is a type of apparatus used to manufacture wafers such as semiconductor wafers, and comprises a laser oscillator that emits a laser beam of a penetrating wavelength, and a focusing lens that focuses the laser beam emitted by the laser oscillator into the workpiece. When the laser beam is irradiated onto an ingot, a plate-like component is peeled off starting from the modified layer formed inside the ingot, and a wafer is manufactured. A detailed explanation of the laser processing apparatus is omitted.

[0032] The sensor card 5b is a light-emitting component that emits light when it receives a laser beam irradiated from a laser oscillator; in other words, it is a component that reacts when excited by light. More specifically, the sensor card 5b is coated with a photosensitive material, and when a laser beam is shone on it, it emits light and can be visualized. This sensor card 5b may be the same as those commonly known in the past, for example, a transmissive or reflective laminated sensor screen. Such a sensor card 5b is used, for example, when adjusting the optical axis in a laser processing device.

[0033] Furthermore, since the light-emitting element is used when adjusting the optical axis, it only needs to be capable of converting the laser beam into visible light. Therefore, the light-emitting element is not limited to those coated with a photosensitive material that emit light when a laser beam is shone on them. For example, instead of the sensor card 5b, the light-emitting element may be nanocrystal-containing glass containing nano-order crystals (product name: Yaglass) or fluorescent glass that changes to visible light when a fluorescent substance is excited (product name: Lumirus).

[0034] In the example shown in Figure 2, a plate-shaped member 10 is provided on the upper end face of the main body 2 in the Z-axis direction, in the X-axis direction opposite to the operating section 4. The sensor card 5b is inserted into an insertion opening 70 formed between the plate-shaped member 10 and the upper end face of the main body 2. The sensor card 5b inserted into the insertion opening 70 is then secured by two fasteners 80 arranged side by side in the Y-axis direction above the main body 2.

[0035] In the example shown in Figure 2, the sensor card 5b is fixed to the main body 2 by an insertion slot 70 and a fixing device 80. However, the configuration may be any other as long as the sensor card 5b can be fixed to the main body 2. For example, the sensor card 5b may be press-fitted into the insertion slot 70, or the sensor card 5b may be fixed to the main body 2 by welding or the like.

[0036] Furthermore, in the example shown in Figure 2, the plate-shaped member 10 is provided in the direction opposite to the operating unit 4 in the X-axis direction, so the insertion opening 70 is formed on the opposite side of the fixing device 80 from the operating unit 4. However, as shown in Figure 3, this insertion opening 70 may also be formed on the operating unit 4 side in the X-axis direction. In that case, the sensor card 5b is fixed on the operating unit 4 side. Also, the insertion opening 70 is not limited to the positions shown in Figures 2 and 3, as long as the ease of operation for positioning the sensor card 5b is taken into consideration. In other words, the position of the insertion opening 70 (or in other words, the position of the fixing device 6) may be any suitable position as long as it improves the ease of operation for the operator.

[0037] The other components are the same as in the example in Figure 1. Therefore, the same reference numerals as in Figure 1 are used for the other components, and their explanations are omitted.

[0038] As shown in the examples in Figures 2 and 3, the sensor card 5b can be fixed to the main body 2 by the fixing part 6, allowing the operator to hold the enable switch 1 with one hand (i.e., one hand) while positioning the sensor card 5b, which receives the laser beam, in a predetermined position. In other words, since the operator can hold the enable switch 1 and position the sensor card 5b in a predetermined position with one hand, both operations can be performed simultaneously and easily. The operator can then use their other free hand to hold a tool and adjust the tilt of the reflective mirror, etc.

[0039] [Method for adjusting a laser processing device using an enable switch] Next, a method for adjusting the laser processing apparatus using the enable switch 1 in the embodiment will be described. Figure 4 is a flowchart showing an example of the adjustment method. The adjustment method for the laser processing apparatus using the enable switch 1 includes, as a process, an authorization step S10, an irradiation step S20, a positioning step S30, and an adjustment step S40.

[0040] The authorization step S10 is a step that allows the safety shutter, which blocks the laser beam from the laser oscillator to the focusing lens in the laser processing apparatus, to open in response to the operation of the control unit 4. That is, when the operator presses or grips the control unit 4 to switch it on, an enable signal is output to the laser processing apparatus, and the opening of the safety shutter is permitted.

[0041] The irradiation step S20 is the step in which the safety shutter is opened and the laser beam is irradiated onto the focusing lens after permission to open the safety shutter has been granted in the permission step S10. In addition, in the irradiation step S20, the safety shutter may be opened and the laser beam irradiated onto the focusing lens by an operation other than the operation of the operation unit 4. For example, when the operator turns on a button on the operation panel of the laser processing device, a signal to open the safety shutter is output to the laser processing device. As a result, the safety shutter opens and the laser beam is irradiated onto the focusing lens.

[0042] The positioning step S30 is the step of positioning the sensor card 5b, which is fixed to the enable switch 1, at a position where it will receive the laser beam from the laser oscillator. Specifically, the sensor card 5b is positioned on the optical axis of the laser beam output from the laser oscillator. At this time, as described above, the sensor card 5b is fixed by the fixing part 6 of the enable switch 1, so the operator can position the sensor card 5b in the predetermined position while operating the enable switch 1.

[0043] The adjustment step S40 is a step in which the optical axis is adjusted based on the position of the laser beam received by the sensor card 5b. That is, the laser beam received by the sensor card 5b, which was positioned in the positioning step S30, is observed and the optical axis is adjusted. For example, a cross-shaped slit jig is placed on the optical axis (in the optical axis) of the laser beam output from the laser oscillator, and the light transmitted through the cross-shaped slit jig is observed using the sensor card 5b. If the optical axis is misaligned, the optical axis is adjusted so that the laser beam passes through the center of the cross-shaped slit.

[0044] Alternatively, in positioning step S30, the sensor card 5b may be positioned near the reflective mirror, and in adjustment step S40, the position of the laser beam may be observed using the positioned sensor card 5b, and the tilt may be adjusted so that the optical axis is positioned at the center of the reflective mirror.

[0045] In this way, by using the sensor card 5b fixed to the enable switch 1 to adjust the optical axis, the optical axis can be adjusted easily and quickly by human eye, compared to, for example, adjusting the optical axis using another camera or the like.

[0046] Although each embodiment has been described above with reference to the drawings, it goes without saying that the present invention is not limited to these embodiments. It is clear to those skilled in the art that various modifications and alterations can be conceived within the scope of the claims, and these are also understood to naturally fall within the technical scope of the present invention. Furthermore, the components of the above embodiments may be combined arbitrarily without departing from the spirit of the invention.

[0047] This specification contains at least the following information. Note that the components etc. in parentheses indicate those corresponding to the embodiments described above, but are not limited thereto.

[0048] (1) An enable switch (enable switch 1) used in a device, wherein the main body (main body 2) is provided with a gripping part (gripping part 3) and an operating part (operating part 4), and the operation of the device is permitted when the operating part is operated, The device is equipped with a fixing part (fixing part 6) for fixing a predetermined adjustment jig (adjustment jig 5) for adjusting the device. Enable switch.

[0049] According to (1), the adjustment jig can be fixed to the main body by the fixing part, so that the operator can grasp the enable switch with one hand and operate the adjustment jig at the same time, allowing the other hand to be used to operate other adjustment targets of the device.

[0050] (2) The enable switch described in (1), The adjustment jig is further fixed to the aforementioned fixed part. Enable switch.

[0051] According to (2), the provision of an adjustment jig on the enable switch improves the operability of the enable switch and the efficiency of the device's operation.

[0052] (3) An enable switch as described in (1) or (2), The adjustment jig is a tool (tool 5a) for operating the fixed member in the device, The aforementioned fixing part is The insertion opening (insertion opening 7) into which the aforementioned tool is inserted, The system includes a fixing device (fixing device 8) for securing the tool inserted into the insertion opening, Enable switch.

[0053] According to (3), the fixing part allows the tool to be fixed to the main body, so that the operator can grasp the enable switch with one hand and operate the tool at the same time, and thus the other hand can be used to operate other adjustment targets of the device.

[0054] (4) An enable switch as described in (1) or (2), The aforementioned apparatus is a laser processing apparatus that uses a laser oscillator and a focusing lens. The adjustment jig is a light-emitting member (sensor card 5b) that emits light when it receives a laser beam irradiated from the laser oscillator. The aforementioned fixing part is The insertion opening (insertion opening 70) into which the light-emitting member is inserted, A fixing device (fixing device 80) for fixing the light-emitting member inserted into the insertion opening, and having Enable switch.

[0055] According to (4), because the light-emitting member is fixed, the operator can hold the enable switch with one hand and position the light-emitting member that receives the laser beam in a predetermined position, so that the other hand is free to operate other adjustment targets of the device (e.g., the reflective mirror).

[0056] (5) A method for adjusting the laser processing apparatus using the enable switch described in (4), A permission step (permission step S10) allows the opening of a safety shutter that blocks the laser beam from the laser oscillator to the focusing lens in response to the operation of the control unit, After the permission step, the irradiation step (irradiation step S20) is performed by opening the safety shutter and irradiating the laser beam onto the focusing lens, A positioning step (positioning step S30) is performed to position the light-emitting member fixed to the enable switch at a position where it receives the laser beam from the laser oscillator, The system includes an adjustment step (adjustment step S40) that adjusts the optical axis based on the position of the laser beam received by the light-emitting member. A method for adjusting a laser processing device using an enable switch.

[0057] According to (5), by adjusting the optical axis using a light-emitting element, the optical axis can be adjusted easily and quickly by human eyes, compared to, for example, adjusting the optical axis using a camera or the like.

[0058] (6) A method for adjusting a laser processing apparatus using the enable switch described in (5), The irradiation step involves opening the safety shutter and irradiating the focusing lens with the laser beam in response to an operation other than the operation of the operating unit. A method for adjusting a laser processing device using an enable switch.

[0059] According to (6), by requiring other operations in addition to operating the enable switch when irradiating the laser beam, the operator can perform maintenance on the laser processing device more safely. Furthermore, by providing an adjustment jig on the enable switch, the operator can perform other operations with the hand opposite to the one holding the enable switch, making maintenance safer and easier. [Explanation of Symbols]

[0060] 1 Enable switch 2 Main body 3 Gripping part 4 Control section 5. Adjustment jig 5a Tools 5b Sensor card (light-emitting element) 6 Fixed part 7 Insertion slot 8 Fixtures 70 Insertion slot 80 Fixtures S10 Permission Step S20 Irradiation Step S30 Positioning Step S40 Adjustment Step

Claims

1. An enable switch used in a device, wherein the main body is provided with a gripping portion and an operating portion, and the operation of the device is permitted when the operating portion is operated, The device is equipped with a fixing part for fixing a predetermined adjustment jig for adjusting the device, Enable switch.

2. An enable switch according to claim 1, The adjustment jig is further fixed to the aforementioned fixed part. Enable switch.

3. An enable switch according to claim 1 or 2, The adjustment jig is a tool for operating the fixed member in the device, The aforementioned fixing part is An insertion opening into which the aforementioned tool is inserted, A fixing device for securing the tool inserted into the insertion opening, Enable switch.

4. An enable switch according to claim 1 or 2, The aforementioned apparatus is a laser processing apparatus equipped with a laser oscillator and a focusing lens, The adjustment jig is a light-emitting member that emits light by receiving the laser beam irradiated from the laser oscillator, The aforementioned fixing part is An insertion opening into which the light-emitting member is inserted, A fixing device for fixing the light-emitting member inserted into the insertion opening, and having Enable switch.

5. A method for adjusting the laser processing apparatus using the enable switch described in claim 4, A permission step that allows a safety shutter that blocks the laser beam from the laser oscillator to the focusing lens to open in response to the operation of the control unit, After the permission step, the irradiation step involves opening the safety shutter and irradiating the laser beam onto the focusing lens, A positioning step of positioning the light-emitting member fixed to the enable switch at a position where it receives the laser beam from the laser oscillator, The system includes an adjustment step of adjusting the optical axis based on the position of the laser beam received by the light-emitting member. A method for adjusting a laser processing device using an enable switch.

6. A method for adjusting a laser processing apparatus using the enable switch described in claim 5, The irradiation step involves opening the safety shutter and irradiating the focusing lens with the laser beam in response to an operation other than the operation of the operating unit. A method for adjusting a laser processing device using an enable switch.

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