Vacuum pump with aerosol function

Abstract

To carry out pest control more safely. [Solution] A vacuum pump with a detoxification function is provided, comprising a dry pump for vacuuming exhaust gas from a tool, a detoxification unit for detoxifying the exhaust gas vacuumed by the dry pump, a connecting pipe for connecting the dry pump and the detoxification unit, and a cover member for covering the connecting pipe.

Description

Technical Field

[0001] The present invention relates to a vacuum pump with a pest control function.

Background Art

[0002] In the manufacturing processes of semiconductor devices, liquid crystal panels, solar solar solar solar cells, etc., process gases are introduced into a tool (process chamber) evacuated to a vacuum, and various processes such as etching and CVD processes are performed. Also, such tools are periodically cleaned by flowing a cleaning gas.

[0003] The exhaust gases of these process gases and cleaning gases contain harmful substances such as silane-based gases (SiH4, TEOS, etc.), halogen-based gases (NF3, ClF3, SF6, CHF3, etc.), and PFC gases (CF4, C2F6, etc.), so it is not preferable to release them directly into the atmosphere. Therefore, it is necessary to detoxify these exhaust gases by a pest control system installed on the downstream side of the tool.

[0004] Patent Document 1 discloses a vacuum pump with a pest control function for performing such detoxification.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] The problem of the present invention is to perform pest control more safely or to provide a novel technology different from the inventions described in the above prior art documents.

Means for Solving the Problems

[0007] As an example, the following solutions are provided.

[0008] [1] A dry pump that vacuums up exhaust gases from the tool, A detoxification unit for detoxifying exhaust gas evacuated by the dry pump, A connecting pipe that connects the dry pump and the abatement unit, A vacuum pump with a detoxification function, comprising a cover member that covers the aforementioned connecting pipe.

[0009] [2] The vacuum pump with aerosol function according to [1], wherein the cover member is provided so that even if exhaust gas leaks from the connection between the dry pump and the connecting pipe or the connection between the aerosol unit and the connecting pipe, the leaked exhaust gas will not leak to the outside of the vacuum pump with aerosol function.

[0010] [3] The dry pump has a first housing, The aforementioned detoxification unit comprises a second housing and, The cover member is a vacuum pump with a detoxification function as described in [1] or [2], provided between the first housing and the second housing.

[0011] [4] The first housing is provided with a first exhaust port connected to an exhaust duct, The second housing is provided with a second exhaust port connected to an exhaust duct, The cover member is provided so that even if exhaust gas leaks from the connection point between the connecting pipe and the dry pump, and / or the connection point between the connecting pipe and the abatement unit, it will not leak to the outside of the first housing and the second housing from locations other than the first exhaust port and the second exhaust port, as described in [3].

[0012] [5] Equipped with a mounting platform, The first enclosure is positioned above the aforementioned stand, The second enclosure is positioned below the aforementioned stand, The connecting pipe is provided through the mounting table, and is the vacuum pump with a pest control function described in [3] or [4].

[0013] [6] A part of the cover member is provided between the mounting table and the first housing, Another part of the cover member is provided between the mounting table and the second housing, and is the vacuum pump with a pest control function described in [5].

[0014] [7] Casters are provided at the lower part of the first housing, Another part of the cover member is provided outside the casters, and is the vacuum pump with a pest control function described in [6].

[0015] [8] Casters are provided at the lower part of the first housing, " Another part of the cover member is provided inside the casters, and is the vacuum pump with a pest control function described in [6].

[0016] [9] On the mounting table, A space defined by a part of the cover member, the lower surface of the first housing, and the upper surface of the mounting table, A space defined by another part of the cover member, the upper surface of the second housing, and the lower surface of the mounting table, A hole for communicating them is provided, and it is the vacuum pump with a pest control function described in any one of [6] to [8].

[0017]

[10] In the first housing, a first opening for communicating the internal space of the first housing and the internal space of the cover member is provided, and it is the vacuum pump with a pest control function described in any one of [3] to [9].

[0018]

[11] " In the second housing, a second opening for communicating the internal space of the second housing and the internal space of the cover member is provided, and it is the vacuum pump with a pest control function described in any one of [3] to

[10] .

Brief Description of the Drawings

[0019] [Figure 1] A diagram showing a schematic configuration of a vacuum pump with a pest control function according to an embodiment. [Figure 2] A diagram showing a schematic configuration of a vacuum pump with a pest control function according to a modification of FIG. 1. [Figure 3] A diagram for explaining the gas flow. [Figure 4] A diagram for explaining the gas flow.

Mode for Carrying Out the Invention

[0020] Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.

[0021] FIG. 1 is a diagram showing a schematic configuration of a vacuum pump with a pest control function according to an embodiment. The vacuum pump with a pest control function removes exhaust gas from a tool (not shown) and includes a dry pump 1 and a pest control unit 2. In this embodiment, the dry pump 1 is arranged directly above the pest control unit 2. As an example, the dry pump 1 is placed on a table (mounting table) 61 that covers the pest control unit 2. Thereby, compared with arranging the dry pump 1 on the floor surface, the footprint of the entire apparatus can be reduced. Also, the piping connecting the dry pump 1 and the pest control unit 2 can be shortened, and the cost related to the piping can be suppressed. The following will be described in detail.

[0022] The dry pump 1 has a booster pump (BP) 11, one or more main pumps (MP) 12, a housing 13, etc., and evacuates exhaust gas from a tool (not shown).

[0023] The booster pump 11, connected to the tool (not shown), is a high-capacity pump capable of vacuum-evacuating a large flow rate of exhaust gas from the tool. The main pump 12, located downstream of the booster pump 11, compresses the exhaust gas from the booster pump 11 at each stage to increase the pressure before exhausting it. This ensures a vacuum level inside the tool (not shown). The exhaust gas from the main pump 12 is supplied to the abatement unit 2 via a connecting pipe 3 that penetrates the table 61.

[0024] The housing 13 houses the booster pump 11 and the main pump 12. The housing 13 may be formed from a frame and side, top, and bottom covers (sheet metal) fitted into the frame. The housing 13 is provided with an exhaust port 1a on its top surface, for example. The housing 13 is positioned above the table 61, and there is a space between the bottom surface of the housing 13 and the table 61. An opening 1c is provided on the bottom surface of the housing 13, for example, to connect this space with the internal space of the housing 13. It is desirable that casters 63 be provided on the bottom of the housing 13 so that the dry pump 1 can be easily moved.

[0025] The enclosure 13 is configured such that gas cannot pass between the inside and outside of the enclosure 13 in all parts except for the exhaust port 1a and the opening 1c. Furthermore, the exhaust port 1a is connected to the exhaust duct 62 via the exhaust pipe 1b, creating negative pressure inside the enclosure 13. The exhaust duct 62 is a piece of equipment installed in a factory (such as a semiconductor device manufacturing plant).

[0026] The detoxification unit 2 includes a combustion unit 21, a tank 22, a water rinsing tower 23, and a housing 24, and detoxifies the exhaust gas. Specifically, the combustion unit 21 burns toxic and flammable gases contained in the exhaust gas by, for example, adding air or oxygen to the exhaust gas and burning it. After combustion, the exhaust gas is led to a tank 22 containing water for cooling and removal of powders contained in the exhaust gas after combustion. Subsequently, in a water rinsing tower 23 filled with resin components, water is sprayed into the exhaust gas to remove water-soluble gases. The detoxified gas is then discharged into the exhaust line of the user factory.

[0027] The housing 24 houses the combustion section 21, the tank 22, and the flush tower 23. The housing 24 is positioned below the table 61, and there is a space between the top surface of the housing 24 and the table 61. An opening 2c is provided, for example, on the top surface of the housing 24, which connects this space to the internal space of the housing 24. In addition, the housing 24 is provided with an exhaust port 2a, for example, on its side.

[0028] The housing 24 is configured such that gas cannot move between the inside and outside of the housing 24 in areas other than the exhaust port 2a and the opening 2c. Furthermore, since the exhaust port 2a is connected to the exhaust duct 62 via the exhaust pipe 2b, the inside of the housing 24 is under negative pressure.

[0029] The upper end of the connecting pipe 3 is connected to a connection that penetrates the lower surface of the housing 13 of the dry pump 1. The lower end of the connecting pipe 3 is connected to a connection that penetrates the upper surface of the housing 24 of the abatement unit 2. The connecting pipe 3 also penetrates the table 61.

[0030] One of the features of this embodiment is that the vacuum pump with aerosolization function is equipped with a cover member 4 that covers the connecting pipe 3. The cover member 4 is provided so that even if exhaust gas leaks from the connection between the dry pump 1 and the connecting pipe 3 or from the connection between the aerosolization unit 2 and the connecting pipe 3, the leaked exhaust gas will not leak to the outside of the vacuum pump with aerosolization function.

[0031] As a specific example of configuration, the cover member 4 is provided between the housing 13 of the dry pump 1 and the housing 24 of the abatement unit 2. As a more specific example of configuration, the cover member 4 has an upper portion 41 provided between the table 61 and the housing 13, and a lower portion 42 provided between the table 61 and the housing 24.

[0032] The upper portion 41 covers the area between the table 61 and the housing 13 in the connecting pipe 3. The lower end of the upper portion 41 is in close contact with the upper surface of the table 61, and gas cannot pass between them. Similarly, the upper end of the upper portion 41 is in close contact with the lower surface of the housing 13. The space defined by the upper portion 41, the upper surface of the table 61, and the lower surface of the housing 13 (hereinafter referred to as the "upper space") is in communication with the internal space of the housing 13 through the opening 1c. The inside of the upper portion 41 is connected to the internal space of the housing 13, which is under negative pressure, through the opening 1c, so the inside of the upper portion 41 is under negative pressure. Therefore, even if there is a gap between the upper portion 41 and the table 61, gas leaking from the connection point of the connecting pipe 3 will not escape outside the device through that gap.

[0033] The upper portion 41 may be a skirt provided on the outside of the caster 63 as shown in Figure 1, or it may be provided on the inside of the caster 63 as shown in the modified example in Figure 2.

[0034] The lower portion 42 covers the area between the table 61 and the housing 24 in the connecting pipe 3. The lower end of the lower portion 42 is in close contact with the upper surface of the housing 24, and gas cannot pass between them. Similarly, the upper end of the lower portion 42 is in close contact with the lower surface of the table 61. The space defined by the lower portion 42, the lower surface of the table 61, and the upper surface of the housing 24 (hereinafter referred to as the "lower space") is in communication with the internal space of the housing 24 through the opening 2c. The inside of the lower portion 42 is then connected to the internal space of the housing 24, which is under negative pressure, via the opening 2c, resulting in negative pressure inside the lower portion 42. Therefore, even if there is a gap between the lower portion 42 and the table 61, gas leaking from the connection point of the connecting pipe 3 cannot escape outside the device through that gap.

[0035] Furthermore, the table 61 may be provided with a hole 61a that connects the upper space and the lower space.

[0036] The connecting pipe 3 is connected to the exhaust port of the dry pump 1 with a clamp or flange joint, and to the intake port of the abatement unit 2 with a clamp or flange joint. There is a possibility of gas leakage from this connection point.

[0037] According to this embodiment, even if gas leaks from the connection point between the dry pump 1 and the connecting pipe 3 (indicated by the star in Figure 3), the leaked gas is discharged from the exhaust pipe 1b to the exhaust duct 62 through the opening 1c, the inside of the housing 13, and the exhaust port 1a. Furthermore, if a hole 61a is provided in the table 61, some of the leaked gas is discharged from the exhaust pipe 2b to the exhaust duct 62 through the hole 61a, the opening 2c, the inside of the housing 24, and the exhaust port 2a (see Figure 3). In this way, by providing the cover member 4, the leaked gas is exhausted into the exhaust duct 62 without leaking to the outside of the vacuum pump with abatement function.

[0038] Furthermore, even if gas leaks from the connection point between the abatement unit 2 and the connecting pipe 3 (indicated by the star in Figure 4), the leaked gas will pass through the opening 2c, the inside of the housing 24, and the exhaust port 2a, and be discharged from the exhaust pipe 2b into the exhaust duct 62. Also, if a hole 61a is provided in the table 61, some of the leaked gas will pass through the hole 61a, the opening 1c, the inside of the housing 13, and the exhaust port 1a, and be discharged from the exhaust pipe 1b into the exhaust duct 62 (see Figure 4). In this way, by providing the cover member 4, the leaked gas will not leak to the outside of the vacuum pump with abatement function, but will be exhausted into the exhaust duct 62.

[0039] Although Figure 1 shows an example where there is one connecting pipe 3, if there are multiple connecting pipes 3, the cover member 4 may be provided to cover all of the connecting pipes 3 together, or multiple cover members 4 may be provided to cover each of the connecting pipes 3.

[0040] Thus, according to this embodiment, since the cover member 4 is provided, even if gas leaks, the risk of it leaking outside the vacuum pump with aerosolization function is reduced, and safety is improved.

[0041] The functions and effects related to table 61 are described below. It is desirable that casters 61b be provided on the bottom of the legs of table 61. The casters 61b allow table 61 to be moved by pushing it like a trolley. If a stopper (not shown) is used on the casters 61b at the installation location of table 61, the table 61 can be prevented from moving.

[0042] By making table 61 movable, the following problems can be solved. Typically, areas where pollution control equipment and dry pumps are installed also have numerous other pieces of equipment, which can make it difficult to secure sufficient workspace for workers. To place a dry pump weighing over 100 kg onto table 61, a lifter is necessary. However, in locations where sufficient workspace cannot be secured, it may not be possible to use a lifter, or using a lifter may compromise worker safety.

[0043] By using the movable table 61, the dry pump 1 can be placed on the table 61 in advance in an area where workspace can be secured, such as the factory entrance, and then the table 61 and the dry pump can be moved to the installation location by pushing the table 61. Therefore, the worker does not need to use a lifter at the installation location of the dry pump 1. Furthermore, since the table 61 can be used as a trolley, there is no need to prepare a trolley in advance to move the dry pump 1 from the factory entrance to the installation location.

[0044] Furthermore, the top surface of the table 61 has a larger projected area than the housing 24 of the abatement unit 2 when viewed from above, thus providing a larger surface area. As a result, even when the dry pump 1 is installed on the top surface of the table 61, there is still space left over. This extra space can be used by the worker to place their tools (such as screwdrivers), so the presence of the table 61 eliminates the need to prepare a separate stand for tools, thereby increasing the worker's work efficiency during the installation of the dry pump 1 and the abatement unit 2.

[0045] Since the legs of table 61 are approximately 1 meter long, the heavy dry pump 1, weighing over 500 kg, will be installed at a height of more than 1 meter above the decontamination unit 2. However, if the dry pump is installed on top of table 61, there is a possibility that the dry pump 1 could fall if the table tilts due to an earthquake or other reasons. By installing the dry pump 1 on table 61, the tipping angle of table 61 can be made larger than the tipping angle of the dry pump alone, thus improving safety.

[0046] Furthermore, if adjuster bolts are provided at the bottom of the four legs of the table 61, the vertical position of the dry pump 1 can be finely adjusted using these adjuster bolts. When attaching or detaching the connecting pipe 3 that connects the dry pump 1 and the abatement unit 2, a gap is required to insert the centering ring of the joint. Therefore, even if a thin-walled flexible tube cannot be used for the connecting pipe 3 for safety reasons, the pipe can be attached and detached by raising or lowering the adjuster bolts.

[0047] Based on the above description, those skilled in the art may be able to conceive of additional effects and various modifications of the present invention, but the embodiments of the present invention are not limited to the individual embodiments described above. For example, inventions that take only a part of each embodiment, or inventions that combine multiple embodiments, are naturally conceivable. Various additions, modifications, and partial deletions are possible as long as they do not depart from the conceptual idea and spirit of the present invention derived from the contents of the claims and their equivalents.

[0048] For example, what is described herein as a single device (or component, hereinafter the same) (including what is depicted as a single device in the drawings) may be implemented by multiple devices. Conversely, what is described herein as multiple devices (including what is depicted as multiple devices in the drawings) may be implemented by a single device. Alternatively, some or all of the means or functions that are included in one device may be included in another device.

[0049] Furthermore, not all matters described herein are mandatory requirements. In particular, matters described herein but not included in the claims can be considered optional additional matters.

[0050] It should also be noted that the applicant is only aware of the prior art inventions described in the "Prior Art Documents" section of this specification, and the present invention is not necessarily intended to solve the problems described in those prior art inventions. The problems that the present invention aims to solve should be determined by considering this specification as a whole. For example, if this specification describes that a certain effect is achieved by a particular configuration, it can also be said that the problem that is the inverse of that predetermined effect is solved. However, this does not necessarily mean that such a particular configuration is an essential requirement. [Explanation of Symbols]

[0051] 1. Dry pump 11 Booster pump 12 Main pump 13 cabinets 1a Exhaust port 1b Exhaust pipe 1c opening 2 Harm abatement department 21 Combustion section 22 tanks 23 Washing tower 24 cabinets 2a Exhaust port 2b Exhaust pipe 2c opening 3 Connecting pipe 4 Cover component 41 Upper part 42 Lower part 61 Tables 61a Hole 62 Exhaust duct 63 Casters

Claims

1. A dry pump that vacuums up exhaust gases from the tool, A detoxification unit for detoxifying exhaust gas evacuated by the dry pump, A connecting pipe that connects the dry pump and the abatement unit, A vacuum pump with a detoxification function, comprising a cover member that covers the aforementioned connecting pipe.

2. The vacuum pump with aerosol function according to claim 1, wherein the cover member is provided so that even if exhaust gas leaks from the connection between the dry pump and the connecting pipe or the connection between the aerosol unit and the connecting pipe, the leaked exhaust gas will not leak to the outside of the vacuum pump with aerosol function.

3. The dry pump has a first housing, The aforementioned decontamination unit comprises a second housing and, The cover member is provided between the first housing and the second housing of the vacuum pump with a detoxification function according to claim 1 or 2.

4. The first housing is provided with a first exhaust port connected to an exhaust duct, The second housing is provided with a second exhaust port connected to an exhaust duct, The vacuum pump with aerosolization function according to claim 3, wherein the cover member is provided so that even if exhaust gas leaks from the connection point between the connecting pipe and the dry pump, and / or the connection point between the connecting pipe and the aerosolization unit, it will not leak to the outside of the first housing and the second housing from locations other than the first exhaust port and the second exhaust port.

5. Equipped with a mounting platform, The first enclosure is positioned above the aforementioned stand, The second enclosure is positioned below the aforementioned stand, The aforementioned connecting pipe is provided through the aforementioned mounting base, wherein the vacuum pump with a detoxification function is as described in claim 3.

6. A portion of the cover member is provided between the base described above and the first housing, The other part of the cover member is provided between the base described above and the second housing, wherein the vacuum pump with a detoxification function is as described in claim 5.

7. Casters are provided at the bottom of the first housing. The vacuum pump with aerosolization function according to claim 6, wherein the other part of the cover member is provided on the outside of the caster.

8. Casters are provided at the bottom of the first housing. The vacuum pump with aerosolization function according to claim 6, wherein the other part of the cover member is provided inside the caster.

9. The aforementioned mounting base includes: The space determined by a part of the cover member, the lower surface of the first housing, and the upper surface of the stand described above, The space determined by the other part of the cover member, the upper surface of the second housing, and the lower surface of the stand described above, A vacuum pump with a detoxification function according to claim 6, wherein a hole is provided for connecting the two.

10. The vacuum pump with aerosolization function according to claim 3, wherein the first housing is provided with a first opening that connects the internal space of the first housing with the internal space of the cover member.

11. The vacuum pump with aerosolization function according to claim 3, wherein the second housing is provided with a second opening that connects the internal space of the second housing with the internal space of the cover member.

Images