Device holding plate

Abstract

To provide a device holding plate that can reduce the occurrence of placement errors. [Solution] The device holding plate 30 used in the device testing apparatus 1 for testing the DUT100 includes a housing portion 32 for housing the DUT100, the housing portion 32 includes a guide surface 60 for guiding and holding the DUT100, and the guide surface 60 includes a concave surface 64 having a concave curved cross-sectional shape.

Description

Technical Field

[0001] The present invention relates to a device holding plate used in a device test apparatus for testing a device under test such as a semiconductor integrated circuit device (hereinafter simply referred to as "DUT" (Device Under Test)).

Background Art

[0002] There is known an electronic component test apparatus including a buffer plate and a heat plate each having a plurality of IC chip accommodation recesses for accommodating IC chips (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the above-described electronic component test apparatus, since an IC chip is transported by a pick-and-place apparatus equipped with a suction device, an error may occur in the position of the IC chip. For this reason, a so-called "placement error" may occur, such as the IC chip being accommodated in the IC chip accommodation recess in a tilted or rotated state. If such a placement error occurs, when the pick-and-place apparatus subsequently holds the IC chip, the suction device may damage the IC chip, or the entire electronic component test apparatus may stop because the IC chip cannot be held.

[0005] The problem to be solved by the present invention is to provide a device holding plate capable of suppressing the occurrence of placement errors.

Means for Solving the Problems

[0006] [1] One aspect of the present invention is a device holding plate used in a device testing apparatus for testing a DUT, wherein the device holding plate comprises a housing portion for housing the DUT, the housing portion comprises a guide surface for guiding and holding the DUT, and the guide surface comprises a concave surface having a concave curved cross-sectional shape.

[0007] [2] In a second aspect of the present invention, the device holding plate of the first aspect may be a device holding plate having a pair of guide surfaces facing each other.

[0008] [3] A third aspect of the present invention is a device holding plate of the second aspect, wherein the concave surface has an arc-shaped cross-sectional shape and satisfies the following equation (1). L × 1 / 10 ≤ R ≤ L × 1 / 4 ... (1) However, in equation (1) above, L is the distance between the upper ends of a pair of opposing concave surfaces, and R is the radius of curvature of the concave surface.

[0009] [4] Embodiment 4 of the present invention is a device holding plate in any one of embodiments 1 to 3, wherein the guide surface is a device holding plate having an inclined surface provided above the concave surface.

[0010] [5] Embodiment 5 of the present invention is a device holding plate according to Embodiment 4, wherein the device holding plate comprises a plate body provided with the housing portion and satisfies the following equation (2). θ1 < θ2 ··· (2) However, in equation (2) above, θ1 is the angle between the first straight line and the second straight line, θ2 is the angle between the first straight line and the first tangent line, the first straight line is a straight line parallel to the main surface of the plate body, the second straight line is a straight line parallel to the inclined surface, and the first tangent line is the tangent line at the upper end of the concave surface.

[0011] [6] Embodiment 6 of the present invention is a device holding plate according to Embodiment 4 or 5, wherein the guide surface is a device holding plate having a first convex surface interposed between the inclined surface and the concave surface and having a convexly curved cross-sectional shape.

[0012] [7] Embodiment 7 of the present invention is a device holding plate in any one of embodiments 1 to 6, wherein the device holding plate comprises a plate body provided with the housing portion and satisfies the following equation (3). 80°≦θ²≦90° ··· (3) However, in equation (3) above, θ2 is the angle between the first straight line and the first tangent line, the first straight line is a straight line parallel to the main surface of the plate body, and the first tangent line is the tangent line at the upper end of the concave surface.

[0013] [8] Embodiment 8 of the present invention is a device holding plate in any one of embodiments 1 to 7, wherein the device holding plate comprises a plate body provided with the housing portion and satisfies the following equation (4). 0°≦θ3≦30° ··· (4) However, in equation (4) above, θ3 is the angle between the first straight line and the second tangent line, the first straight line is a straight line parallel to the main surface of the plate body, and the second tangent line is the tangent line at the lower end of the concave surface.

[0014] [9] Embodiment 9 of the present invention is a device holding plate in any one of embodiments 1 to 8, wherein the guide surface has an extended surface provided below the concave surface, and the housing portion has a space formed below the DUT held by the concave surface.

[0015]

[10] A 10th aspect of the present invention is a device holding plate of the 9th aspect, wherein the guide surface is a device holding plate having a second convex surface interposed between the concave surface and the extension surface and having a convexly curved cross-sectional shape.

[0016]

[11] Embodiment 11 of the present invention is a device holding plate in any one of embodiments 1 to 10, wherein the device holding plate is a device holding plate having a groove that opens to the bottom surface of the housing portion.

[0017]

[12] Embodiment 12 of the present invention is a device holding plate in any one of embodiments 1 to 11, wherein the housing portion is a device holding plate comprising a recess and a projection that protrudes toward the inside of the recess and has the guide surface at its tip.

[0018]

[13] Embodiment 13 of the present invention is a device holding plate according to Embodiment 12, wherein the protrusion is a device holding plate comprising a side surface and a tapered surface provided at the upper end of the side surface.

[0019]

[14] A 14th aspect of the present invention is a device holding plate according to aspect 12 or 13, wherein the protrusion is a device holding plate comprising a side surface and a third convex surface interposed between the guide surface and the side surface and having a convexly curved cross-sectional shape.

[0020]

[15] Aspect 15 of the present invention is a device holding plate in any one of aspects 1 to 14, wherein the housing portion comprises a recess and a plurality of protrusions projecting toward the inside of the recess and each having a guide surface at its tip, the plurality of protrusions including first and second protrusions facing each other and third and fourth protrusions facing each other, and a third straight line passing through the first protrusion and the second protrusion and a fourth straight line passing through the third protrusion and the fourth protrusion intersect each other.

[0021]

[16] Embodiment 16 of the present invention is a device holding plate in any one of embodiments 1 to 15, wherein the device holding plate comprises a plate body on which the housing portion is provided, and a fixing portion for detachably fixing the plate body to a device handling device provided in the device testing apparatus. [Effects of the Invention]

[0022] In the present invention, the housing portion has a guide surface for guiding and holding the DUT. Since the DUT can be guided to a normal holding position by this guide surface and positioned, it is possible to suppress the occurrence of misplacement. Further, in the present invention, since the guide surface has a concave surface with a cross-sectional shape that is curved in a concave shape, it is possible to facilitate the positioning of the DUT.

Brief Description of the Drawings

[0023] [Figure 1] FIG. 1 is a schematic view showing the overall configuration of a device test apparatus according to an embodiment of the present invention. [Figure 2] FIG. 2 is a cross-sectional view showing a part of the configuration of a device test apparatus according to an embodiment of the present invention. [Figure 3] FIG. 3 is a plan view showing a device holding plate according to an embodiment of the present invention. [Figure 4] FIG. 4 is an enlarged perspective view of part A in FIG. 3. [Figure 5] FIG. 5 is an enlarged plan view of part A in FIG. 3. [Figure 6] FIG. 6 is an end view taken along line VI-VI in FIG. 5. [Figure 7] FIG. 7 is an end view showing the housing portion in a state where the DUT is housed according to an embodiment of the present invention. [Figure 8] FIG. 8 is an end view showing the process in which the DUT is housed in the housing portion according to an embodiment of the present invention. [Figure 9] FIG. 9 is a cross-sectional view taken along line IX-IX in FIG. 6. [Figure 10] FIG. 10 is a cross-sectional view taken along line X-X in FIG. 5. [Figure 11] FIG. 11 is a cross-sectional perspective view showing the housing portion in a state where the suction nozzle has sucked the bottom surface according to an embodiment of the present invention.

Modes for Carrying Out the Invention

[0024] Embodiments of the present invention will be described below with reference to the drawings.

[0025] Figure 1 is a schematic diagram showing the overall configuration of the device testing apparatus 1 in this embodiment, and Figure 2 is a cross-sectional view showing a part of the configuration of the device testing apparatus 1 in this embodiment.

[0026] The device test apparatus 1 shown in Figure 1 is a device for testing the electrical characteristics of the DUT100. This device test apparatus 1 tests whether the DUT100 operates properly while applying high or low temperature thermal stress to the DUT100.

[0027] While not particularly limited, DUT100 is a semiconductor device such as a semiconductor integrated circuit element. A specific example of DUT100 is an SoC (System on a Chip). DUT100 may also be a semiconductor device other than an SoC, such as a logic device or a memory device. Furthermore, DUT100 may be a resin-molded device in which a semiconductor chip is packaged with a molding material such as resin. Alternatively, DUT100 may be an unpackaged bare die.

[0028] This device testing apparatus 1 comprises a tester 10 and a handler 20. The tester 10 performs tests to measure and evaluate the electrical characteristics of the DUT 100. The tester 10 comprises a main frame 11 and a test head 12. The test head 12 is connected to the main frame 11 via a cable 13. A socket 15 is mounted on top of the test head 12, and the socket 15 and the test head 12 are electrically connected.

[0029] The handler 20 transports the DUT 100 and presses it into the socket 15, electrically connecting the DUT 100 and the socket 15. This electrically connects the DUT 100 and the test head 12 via the socket 15. The mainframe 11 is, for example, a computer that executes a program, and communicates with the test module (not shown) of the test head 12 according to the program to control the test module. This test module is a wiring board on which electronic components such as test devices used to test the DUT 100 are mounted. This test module generates a test signal in response to instructions from the mainframe 11 and inputs that test signal to the DUT 100. The tester 10 then measures and evaluates the output from the DUT 100 corresponding to that test signal.

[0030] As shown in Figure 2, the handler 20 comprises a chamber 23, a contact arm 24, a pick-and-place device 25, and a device holding plate 30 (soak plate).

[0031] The chamber (soak chamber) 23 is a temperature control device that applies high or low temperature thermal stress to the DUT 100. This chamber 23 consists of a constant temperature bath capable of maintaining the temperature inside the bath at a desired temperature. Therefore, this device test apparatus 1 is capable of testing the DUT 100 while applying thermal stress to the DUT 100, and is capable of performing so-called high-temperature tests and low-temperature tests. The upper part of the test head 12 enters the chamber 23 through an opening 22 formed in the handler 20, and the socket 15 is located inside the chamber 23.

[0032] The contact arm 24 and the device holding plate 30 are positioned within this chamber 23. The device holding plate 30 is detachably fixed to the base 21 of the handler 20 by bolts 26. The configuration of the device holding plate 30 will be described later.

[0033] The contact arm 24 is a moving device that moves the DUT 100 and presses the DUT 100 against the socket 15. The contact arm 24 is equipped with a suction head (suction device) 241 that holds the DUT 100 by suction. The contact arm 24 is capable of moving the suction head 241 in the XYZ directions and rotating the suction head 241 about the Z axis by an actuator (not shown).

[0034] As described above, the socket 15 is also located inside the chamber 23. Therefore, the contact arm 24, while inside the chamber 23, suction-holds the DUT 100 housed in the device holding plate 30 and moves it above the socket 15, then lowers the DUT 100 to press it against the socket 15. In this state, the tester 10 performs a test on the DUT 100. Once the test is complete, the contact arm 24 raises the DUT 100 and then moves it to another device holding plate (e.g., an unsoaked plate) located outside the chamber 23.

[0035] The DUT 100 is transported to the device holding plate 30 by a pick-and-place device 25 from a customer tray (not shown) that has been brought into the handler 20. This pick-and-place device 25 also includes a suction head (suction device) 251 that holds the DUT 100 by suction. The pick-and-place device 25 is capable of moving the suction head 251 in the XYZ directions by an actuator (not shown). The pick-and-place device 25 may transport the DUT 100 from another device holding plate (for example, a loader buffer plate) located outside the chamber 23 instead of the customer tray.

[0036] The configuration of the handler 20 is not limited to the above. For example, instead of the contact arm 24, the handler 20 may be of a type that presses the DUT 100 housed in the test tray against the socket 15 using a Z-axis drive device.

[0037] Next, the configuration of the device holding plate 30 will be explained with reference to Figures 3 to 11.

[0038] Figure 3 is a plan view showing the device holding plate 30 in this embodiment, Figure 4 is an enlarged perspective view of part A in Figure 3, Figure 5 is an enlarged plan view of part A in Figure 3, and Figure 6 is a cross-sectional view along the line VI-VI in Figure 5. Figure 7 is a cross-sectional view showing the housing section 32 with the DUT 100 housed in this embodiment. Figure 8 is a cross-sectional view showing the process of the DUT 100 being housed in the housing section 32 in this embodiment. Figure 9 is a cross-sectional view along the line IX-IX in Figure 6, and Figure 10 is a cross-sectional view along the line XX in Figure 5. Figure 11 is a cross-sectional perspective view showing the housing section 32 with the suction head 241 sucking the bottom surface 43 in this embodiment.

[0039] The device holding plate 30 is a plate that holds multiple DUTs 100. As shown in Figure 3, the device holding plate 30 comprises a plate body 31 and multiple (60 in this embodiment) housing sections 32.

[0040] The plate body 31 is a plate-shaped member having an upper surface 311 and a lower surface 312 (see Figure 2) opposite to the upper surface 311. Multiple storage compartments 32 are open on the upper surface 311 of the plate body 31. Each storage compartment 32 is a concave pocket capable of accommodating a DUT 100. This device holding plate 30 is formed by machining a sheet of metal material such as aluminum.

[0041] Fixing holes 313 are formed at both ends of the plate body 31. The device holding plate 30 is detachably fixed to the base 21 by screwing a bolt 26 inserted into these fixing holes 313 into a female thread formed in the base 21 of the handler 20 (see Figure 2). The method of detachably fixing the device holding plate 30 to the base 21 of the handler 20 is not limited to the above, and for example, the device holding plate 30 may be fixed to the base 21 using a clamp. These fixing holes 313 correspond to an example of a "fixing part" in an embodiment of the present invention.

[0042] Multiple storage compartments 32 are arranged in a matrix on the upper surface 311 of the plate body 31. Although not particularly limited, in this embodiment, 60 storage compartments 32 are arranged on the upper surface 311 of the plate body 31 in a 4x15 arrangement. In the Y direction in the figure, four storage compartments 32 are arranged at equal intervals. Similarly, in the X direction in the figure, fifteen storage compartments 32 are arranged at equal intervals.

[0043] The number of housing sections 32 provided in the device holding plate 30 is not particularly limited to the above. Furthermore, the arrangement of the multiple housing sections 32 on the upper surface 311 of the plate body 31 is also not particularly limited to the above. The pitch between adjacent housing sections 32 in the Y direction and the pitch between adjacent housing sections 32 in the X direction may be different or the same. Multiple types of device holding plates 30 with different shapes, sizes, numbers, and arrangements of housing sections 32 are available, and when a DUT 100 is replaced, it is replaced with one corresponding to the replacement DUT 100.

[0044] As shown in Figures 4 and 5, each housing section 32 is provided with a recess 40 and four protrusions 50A to 50D. The recess 40 is a depression having a rectangular opening 41 that opens into the upper surface 311 of the plate body 31. The four protrusions 50A to 50D each protrude inward from the inner circumferential surface 42 of the recess 40. The pitch between the housing sections 32 may be reduced to connect adjacent recesses 40. Although not specifically shown, for example, all the recesses 40 formed in the plate body 31 may be connected and integrated to form a single recess.

[0045] Specifically, the first protrusion 50A and the second protrusion 50B protrude from the center of the left and right edges within the inner circumferential surface 42 in Figure 5, facing each other. On the other hand, the third protrusion 50C and the fourth protrusion 50D protrude from the center of the upper and lower edges within the inner circumferential surface 42 in Figure 5, facing each other. In a plan view, the third straight line VL3 and the fourth straight line VL4 intersect perpendicularly at the center of the recess 40. Here, the third straight line VL3 is a hypothetical center line passing through the first protrusion 50A and the second protrusion 50B in a plan view. On the other hand, the fourth straight line VL4 is a hypothetical center line passing through the third protrusion 50C and the fourth protrusion 50D in a plan view. In other words, the four protrusions 50A to 50D protrude from the inner circumferential surface 42 of the recess 40, surrounding the center of the recess 40 from all four sides.

[0046] When the DUT 100, which has been transported by the pick-and-place device 25 described above, is released within the recess 40, the DUT 100 is held by the tips of the four protrusions 50A to 50D. These four protrusions 50A to 50D have basically the same configuration. In this embodiment, the protrusions 50A to 50D are collectively referred to as "protrusions 50".

[0047] Each protruding portion 50 is provided with a guide surface 60 at its tip. This guide surface 60 is a surface that guides and holds the DUT 100 released by the pick-and-place device 25 within the recess 40. As shown in Figure 6, this guide surface 60 comprises an inclined surface 61, a first convex surface 62, a vertical surface 63, a concave surface 64, a second convex surface 65, and an extended surface 66. These inclined surface 61, the first convex surface 62, the vertical surface 63, the concave surface 64, the second convex surface 65, and the extended surface 66 are aligned from top to bottom and are interconnected. That is, these inclined surface 61, the first convex surface 62, the vertical surface 63, the concave surface 64, the second convex surface 65, and the extended surface 66 form a single continuous surface (guide surface 60).

[0048] The inclined surface 61 is a surface with a linear cross-sectional shape. This cross-sectional shape (shown in Figure 6) is the cross-sectional shape obtained when the guide surface 60 is cut by a plane perpendicular to the width direction of the guide surface 60. This inclined surface 61 has a linear cross-sectional shape over the entire width direction of the guide surface 60.

[0049] The upper end of this inclined surface 61 is connected to the upper surface 71 of the protruding portion 50 (the upper surface 311 of the plate body 31). This inclined surface 61 is inclined toward the outside of the recess 40 as it approaches its upper end. A hypothetical second straight line VL2 parallel to this inclined surface 61 is inclined at an angle θ1 with respect to a hypothetical first straight line VL1 parallel to the upper surface 311 of the plate body 31. That is, the inclined surface 61 is inclined at an angle θ1 with respect to the upper surface 311 of the plate body 31 (see Figures 2 and 3).

[0050] The larger the inclination angle θ1 of the inclined surface 61, the greater the inductive force (downward force component) acting on the DUT 100, making it easier to position the DUT 100. On the other hand, the smaller the inclination angle θ1 of the inclined surface 61, the wider the gap between the opposing inclined surfaces 61, thus increasing the tolerance for misalignment of the DUT 100.

[0051] The first convex surface 62 and the vertical surface 63 are connected in order to the lower end of this inclined surface 61.

[0052] The first convex surface 62 has a convexly curved cross-sectional shape. This cross-sectional shape (shown in Figure 6) is the cross-sectional shape obtained when the guide surface 60 is cut by a plane perpendicular to the width direction of the guide surface 60. This first convex surface 62 has a convexly curved cross-sectional shape over the entire width direction of the guide surface 60. Although not particularly limited, in this embodiment, this first convex surface 62 has an arc-shaped cross-sectional shape. Because the guide surface 60 has such a first convex surface 62 between the inclined surface 61 and the vertical surface 63, the DUT 100 sliding on the guide surface 60 can move smoothly from the inclined surface 61 to the vertical surface 63 without bouncing.

[0053] The cross-sectional shape of the first convex surface 62 is not particularly limited as long as it is a convex curved shape. For example, the cross-sectional shape of the first convex surface 62 may be the arc of a curve such as a parabola, ellipse, or hyperbola. That is, the first convex surface 62 has a convex curved shape that extends in the width direction of the guide surface 60.

[0054] The vertical surface 63 following the first convex surface 62 is a plane that extends perpendicularly to the upper surface 311 of the plate body 31. Note that the guide surface 60 does not necessarily have this vertical surface 63. In this case, the upper end 641 of the concave surface 64 is directly connected to the lower end of the first convex surface 62.

[0055] The upper end 641 of the concave surface 64 is connected to the lower end of the vertical surface 63. This concave surface 64 is a surface that guides the DUT 100 and also a surface that holds the guided DUT 100. This concave surface 64 has a concave curved cross-sectional shape. This cross-sectional shape (the cross-sectional shape shown in Figure 6) is the cross-sectional shape obtained when the guide surface 60 is cut by a plane perpendicular to the width direction of the guide surface 60. This concave surface 64 has a concave curved cross-sectional shape over the entire width direction of the guide surface 60.

[0056] Although not particularly limited, in this embodiment, the concave surface 64 has a circular arc cross-sectional shape. Although not particularly limited, the concave surface 64 has a circular arc cross-sectional shape that corresponds substantially to 1 / 4 of the circumference.

[0057] The radius of curvature R of this concave surface 64 satisfies equation (5) below. However, in equation (5) below, L is the distance between the upper ends 641 of the concave surfaces 64 of a pair of opposing projections 50. L × 1 / 10 ≤ R ≤ L × 1 / 4 ... (5)

[0058] The inclination angle θ2 of the hypothetical first tangent line TL1 at the upper end 641 of the concave surface 64 and the inclination angle θ1 of the inclined surface 61 satisfy equation (6) below. However, in equation (6) below, θ2 is the angle between the first straight line VL1 and the first tangent line TL1. θ1 < θ2 ··· (6)

[0059] The inclination angle θ2 of the first tangent TL1 at the upper end 641 of the concave surface 64 satisfies equation (7) below. That is, the concave surface 64 is vertical or nearly vertical at its upper end 641. 80°≦θ²≦90° ··· (7)

[0060] On the other hand, the inclination angle θ3 of the hypothetical second tangent line TL2 at the lower end 642 of the concave surface 64 satisfies equation (8) below. That is, the concave surface 64 is horizontal or nearly horizontal at the lower end 642 compared to the upper end 641. However, in equation (8) below, θ3 is the angle between the first straight line VL1 and the second tangent line TL2. 0°≦θ3≦30° ··· (8)

[0061] The cross-sectional shape of the concave surface 64 is not particularly limited as long as it is a concave, curved shape. For example, the cross-sectional shape of the concave surface 64 may be an arc of a curve such as a parabola, an ellipse, or a hyperbola. That is, the concave surface 64 has a concave curved shape that extends in the width direction of the guide surface 60.

[0062] When the pick-and-place device 25 releases the DUT 100 within the recess 40, if the position of the DUT 100 is misaligned with that of the housing 32, the DUT 100 is guided by the inclined surface 61, the first convex surface 62, the vertical surface 63, and the concave surface 64, and then held in the correct holding position (as shown in Figure 7) on the concave surface 64. In other words, the shape of the guide surface 60 of the housing 32 is used to position the DUT 100 with high precision within the housing 32. Therefore, it is possible to suppress the occurrence of placement errors caused by the pick-and-place device 25.

[0063] For example, as shown in Figure 8, when released from the pick-and-place device 25, the DUT 100 lands on the opposing guide surfaces 60A and 60B. If the center of the DUT 100 is shifted to the right relative to the center of the housing 32, it will land on the guide surfaces 60A and 60B at an angle. Specifically, one end 111 of the body 110 of the DUT 100 (the lower right end in Figure 8) contacts the inclined surface 61 of one of the guide surfaces 60B (the right guide surface 60 in Figure 8). Conversely, the other end 112 of the body 110 of the DUT 100 (the lower left end in Figure 8) contacts the vicinity of the lower end 642 of the concave surface 64 of the other guide surface 60A (the left guide surface 60 in Figure 8).

[0064] Then, due to the weight of the DUT100, one end 111 of the main body 110 enters the concave surface 64 via the inclined surface 61, the first convex surface 62, and the vertical surface 63, and slides downward on the concave surface 64. Here, as described above, the inclination angle θ2 of the first tangent TL1 at the upper end 641 of the concave surface 64 is vertical or nearly vertical. Therefore, in the initial stage when one end 111 of the main body 110 enters the concave surface 64, the downward force component acting on that end 111 of the main body 110 can be increased. As a result, the inclination of the trajectory of the center of gravity CG of the DUT100 (see Figure 8) can be increased, and the guiding force (centering force) that centers the DUT100 within the housing section 32 becomes larger, making it easier to guide the DUT100 to the normal holding position.

[0065] Meanwhile, the other end 112 of the main body 110 of the DUT100, which is in contact with the vicinity of the lower end 642 of the concave surface 64, slides upward on the concave surface 64. Here, the inclination angle θ3 of the second tangent TL2 at the lower end 642 of the concave surface 64 is horizontal or nearly horizontal. Therefore, the resistance acting on the other end 112 of the main body 110 sliding on the concave surface 64 can be reduced, making it easier to guide the DUT100 to the correct holding position.

[0066] As described above, by using the weight of the DUT100 to guide the DUT100 on the guide surface 60, the tilted state of the DUT100 is eliminated, and the DUT100 is held in the concave surface 64 in a normal holding position. This positions the DUT100 within the housing section 32. As an example of a "misplacement," the example of the DUT100 being placed in the housing section 32 while tilted was given, but "misplacement" is not limited to this. "Misplacement" also includes, for example, cases where the DUT100 is rotating within the housing section 32, or where the DUT100 is rotating and tilted within the housing section 32.

[0067] Returning to Figure 6, the second convex surface 65 is connected to the lower end 642 of the concave surface 64. This second convex surface 65 has a cross-sectional shape that curves in a convex shape. This cross-sectional shape (the cross-sectional shape shown in Figure 6) is the cross-sectional shape obtained when the guide surface 60 is cut by a plane perpendicular to the width direction of the guide surface 60. This second convex surface 65 has a cross-sectional shape that curves in a convex shape over the entire width direction of the guide surface 60. Although not particularly limited, in this embodiment, this second convex surface 65 has a cross-sectional shape of an arc. Because the guide surface 60 is equipped with this second convex surface 65, it is possible to prevent the terminals 120 of the DUT 100 from coming into contact with the guide surface 60 when the body 110 of the DUT 100 slides on the guide surface 60, thereby preventing damage to the DUT 100.

[0068] The cross-sectional shape of the second convex surface 65 is not particularly limited as long as it is a convex curved shape. For example, the cross-sectional shape of the second convex surface 65 may be the arc of a curve such as a parabola, ellipse, or hyperbola. That is, the second convex surface 65 has a convex curved shape that extends in the width direction of the guide surface 60.

[0069] An extension surface 66 is connected to this second convex surface 65. This extension surface 66 is a plane that extends in a direction perpendicular to the upper surface 311 of the plate body 31. The lower end of this extension surface 66 is connected to the bottom surface 43 of the recess 40. As shown in Figure 7, this extension surface 66 creates a space 67 below the DUT 100, which is held in the recess 64 in the normal holding position. By creating this space 67 between the DUT 100 and the bottom surface 43 of the housing 32, contact between the DUT 100 and the bottom surface 43 of the housing 32 can be suppressed when the DUT 100 slides on the guide surface 60, thereby suppressing damage to the DUT 100.

[0070] As shown in Figures 9 and 10, each projection 50 has, in addition to the guide surface 60 described above, a side surface 72, a third convex surface 73, and a tapered surface 74. The side surface 72 is a plane that extends in a direction intersecting the guide surface 60. This side surface 72 is connected to the guide surface 60 via the third convex surface 73.

[0071] As shown in Figure 9, the third convex surface 73 has a convexly curved cross-sectional shape. This cross-sectional shape is the cross-sectional shape obtained when the guide surface 60 is cut with a plane parallel to the upper surface 311 of the plate body 31. The third convex surface 73 has a convexly curved cross-sectional shape over the entire height of the protrusion 50. Although not particularly limited, in this embodiment, the third convex surface 73 has an arc-shaped cross-sectional shape. The presence of this third convex surface 73 in the protrusion 50 suppresses the formation of burrs on the protrusion 50 during the manufacturing of the device holding plate 30, thereby suppressing damage to the DUT 100 caused by these burrs.

[0072] The cross-sectional shape of the third convex surface 73 is not particularly limited as long as it is a curved shape that is convex. For example, the cross-sectional shape of the third convex surface 73 may be the arc of a curve such as a parabola, an ellipse, or a hyperbola. That is, the third convex surface 73 has a convex curved shape that extends in the height direction of the protrusion 50.

[0073] Furthermore, as shown in Figure 10, the tapered surface 74 is provided at the upper end of the side surface 72. This tapered surface 74 connects the side surface 72 and the upper surface 71 of the protrusion 50. This tapered surface 74 is inclined with respect to the upper surface 71 of the protrusion 50, as well as with respect to the side surface 72 of the protrusion 50. By having such a tapered surface 74 on the protrusion 50, the width of the upper part of the protrusion 50 can be narrowed, and interference between the suction heads 241 and 251 entering the housing 32 and the protrusion 50 can be avoided.

[0074] As shown in Figures 5 and 6, the housing portion 32 is provided with a groove 80 formed in the bottom surface 43 of the recess 40. This groove 80 is formed in the center of the bottom surface 43 of the recess 40. In plan view, this groove 80 is surrounded by four protrusions 50A to 50D.

[0075] As shown in Figure 9, the groove 80 has an oval planar shape (a shape consisting of a pair of parallel lines and a pair of semicircles connecting the parallel lines). The groove 80 is formed such that one end 81 is located at the center of the bottom surface 43 of the recess 40, and the other end 82 is located away from the center of the bottom surface 43. As shown in Figures 5 and 11, the other end 82 of the groove 80 is positioned outside the suction nozzle 242 of the suction head 241 that has entered the housing 32.

[0076] In this case, if the housing does not have a groove and the bottom surface of the recess is flat, the suction head may end up adsorbing onto the bottom surface of the housing where the DUT is not housed. In this case, after determining that the suction head has held the DUT, the handler may determine that the DUT has fallen when the suction head rises, causing the handler to stop. In contrast, in this embodiment, even when the suction nozzle 242 of the suction head 241 enters the housing 32 and contacts the bottom surface 43 of the housing 32 to begin suction, a part 82 of the groove 80 is located outside the suction nozzle 242, so the suction head 241 cannot adsorb onto the bottom surface 43, thus preventing the above-mentioned misjudgment.

[0077] The planar shape of the groove 80 is not particularly limited as long as a portion 82 of the groove 80 is located outside the suction nozzle 242 that is in contact with the bottom surface 43 of the housing 32.

[0078] As described above, in this embodiment, the housing section 32 is equipped with a guide surface 60 that guides and holds the DUT 100. By utilizing the shape of this guide surface 60, the DUT 100 is guided to the correct holding position, and the DUT 100 can be positioned with high precision within the housing section 32, thereby suppressing the occurrence of placement errors.

[0079] Furthermore, in this embodiment, the guide surface 60 is equipped with a concave surface 64 having a concave cross-sectional shape. This concave surface 64 allows for a greater inclination of the trajectory of the center of gravity CG of the DUT 100 (see Figure 8), and increases the force that guides the DUT 100 within the housing section 32, thereby facilitating the positioning of the DUT 100.

[0080] The embodiments described above are provided to facilitate understanding of the present invention and are not intended to limit it. Therefore, each element disclosed in the above embodiments is intended to include all design modifications and equivalents that fall within the technical scope of the present invention.

[0081] For example, a device holding plate other than the soak plate 30 provided by the handler 20 may have a housing section 32 equipped with the guide surface 60 described above. Specific examples of such device holding plates other than the soak plate 30 include, for example, a loader buffer plate, an unsoak plate, an exit plate, and an unloader buffer plate. A loader buffer plate is a device holding plate positioned between the customer tray loaded into the handler 20 and the chamber 23 described above. An unsoak plate is a device holding plate positioned in the unsoak chamber that removes the thermal stress applied to the DUT 100 in the soak chamber 23 described above. An exit plate is a device holding plate for transferring the DUT between a pick-and-place device that unloads the DUT from the unsoak chamber and a pick-and-place device that loads the DUT into the unloader section. An unloader buffer plate is a device holding plate positioned in the unloader section that classifies the DUT 100 according to the test results.

[0082] Alternatively, if the handler includes a heat plate that houses and heats the DUT100, the housing section 32 with the guide surface 60 described above may be applied to this heat plate. [Explanation of Symbols]

[0083] 1…Device testing equipment 10... Tester 20…Handler 24... Contact Arm 241... Suction head 242... Suction nozzle 30…Device holding plate 31…Plate body 311…Top surface 313…Fixing hole 32...Detention Unit 40…recess 43...Bottom 50, 50A~50D...Protruding part, 1st to 4th protruding part 60, 60A, 60B… Guide surface 61…Slope surface 62...First convex surface 63…Vertical surface 64…Concave 641...Top end 642…lower end 65...Second convex surface 66…extension surface 67…Space 72... Side view 73... The third convex surface 74... Tapered surface 80...Groove 100…DUT

Claims

1. A device holding plate used in a device testing apparatus for testing DUTs, The device holding plate includes a housing portion for housing the DUT, The housing section is equipped with a guide surface for guiding and holding the DUT, The guide surface is a device holding plate having a concave surface with a curved cross-sectional shape.

2. A device holding plate according to claim 1, The housing portion is a device holding plate having a pair of guide surfaces that face each other.

3. A device holding plate according to claim 2, The concave surface has an arc-shaped cross-section, A device holding plate that satisfies the following equation (1). L × 1 / 10 ≤ R ≤ L × 1 / 4 ... (1) However, in equation (1) above, L is the distance between the upper ends of a pair of mutually opposing concave surfaces. R is the radius of curvature of the concave surface.

4. A device holding plate according to claim 1, The guide surface is a device holding plate having an inclined surface provided above the concave surface.

5. A device holding plate according to claim 4, The device holding plate comprises a plate body on which the housing portion is provided, A device holding plate that satisfies equation (2) below. i １ <θ ２ ・・・ (2) However, in equation (2) above, θ １ This is the angle between the first straight line and the second straight line, θ ２ This is the angle between the first straight line and the first tangent line, The first straight line is a straight line parallel to the main surface of the plate body, The second straight line is a straight line parallel to the inclined surface, The first tangent is the tangent at the upper end of the concave surface.

6. A device holding plate according to claim 4, The guide surface is a device holding plate interposed between the inclined surface and the concave surface, and having a first convex surface with a convexly curved cross-sectional shape.

7. A device holding plate according to claim 1, The device holding plate comprises a plate body on which the housing portion is provided, A device holding plate that satisfies equation (3) below. 80°≦θ ２ ≦90° ・・・ (3) However, in equation (3) above, θ ２ This is the angle between the first straight line and the first tangent line, The first straight line is a straight line parallel to the main surface of the plate body, The first tangent is the tangent at the upper end of the concave surface.

8. A device holding plate according to claim 1, The device holding plate comprises a plate body on which the housing portion is provided, A device holding plate that satisfies equation (4) below. 0°≦θ ３ ≦30° ・・・ (4) However, in equation (4) above, θ ３ This is the angle between the first line and the second tangent line, The first straight line is a straight line parallel to the main surface of the plate body, The second tangent is the tangent at the lower end of the concave surface.

9. A device holding plate according to claim 1, The guide surface includes an extended surface provided below the concave surface, The housing portion is a device holding plate having a space formed below the DUT held in the concave surface.

10. A device holding plate according to claim 9, The guide surface is a device holding plate interposed between the concave surface and the extension surface, and having a second convex surface with a convexly curved cross-sectional shape.

11. A device holding plate according to claim 1, The device holding plate is a device holding plate having a groove that opens to the bottom surface of the housing portion.

12. A device holding plate according to any one of claims 1 to 11, The aforementioned housing section is recessed and A device holding plate comprising a projection that protrudes toward the inside of the recess and has the guide surface at its tip.

13. A device holding plate according to claim 12, The aforementioned protrusion is The side and, A device holding plate comprising a tapered surface provided at the upper end of the side surface.

14. A device holding plate according to claim 12, The aforementioned protrusion is The side and, A device holding plate comprising a third convex surface interposed between the guide surface and the side surface, having a convexly curved cross-sectional shape.

15. A device holding plate according to any one of claims 1 to 11, The aforementioned housing section is recessed and It comprises a plurality of protrusions that project inward toward the inside of the recess and each having the guide surface at its tip, The plurality of protrusions are, Mutually opposing first and second protrusions, It includes third and fourth protrusions that face each other, A device holding plate in which a third straight line passing through the first protrusion and the second protrusion and a fourth straight line passing through the third protrusion and the fourth protrusion intersect each other.

16. A device holding plate according to claim 1, The device holding plate is A plate body having the aforementioned storage section, A device holding plate comprising a fixing portion for detachably fixing the plate body to a device handling device provided in the device testing apparatus.

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