Method for removing temporary fixing tape, apparatus for manufacturing a release member and a component (part), and method for manufacturing a component (part).

Abstract

The present invention provides a method for removing temporary fixing tape that is less likely to cause contamination of the material due to adhesive residue and can be efficiently removed from the material in a simple manner, a removal member, a parts manufacturing apparatus equipped with the removal member, and a method for manufacturing parts. [Solution] A method for peeling off a temporary fixing tape 100 to which one or more parts 3 are fixed, wherein the temporary fixing tape has an extendable base material 2 and a temporary fixing layer 1 on one surface of the extendable base material, and is peelable by stretching, the parts are fixed to the temporary fixing layer, and the temporary fixing tape is peeled off from the parts by stretching means in at least one direction.

Description

[Technical Field]

[0001] The present invention relates to a method for peeling off temporary fixing tape used to temporarily fix components in the manufacturing process of electronic components and the like, a peeling member, and a manufacturing apparatus for components (components) and a method for manufacturing components (components). [Background technology]

[0002] In the manufacturing process of electronic components such as semiconductor wafers, multilayer ceramic capacitors (MLCCs), and inductors, the electronic components are temporarily fixed to adhesive tape. After each step, such as grinding, processing, transport, and dicing to form chips, the processed electronic components are peeled off the adhesive tape. The tape used to temporarily fix components (materials) in such manufacturing processes is sometimes called "temporary fixing tape" or "processing tape." Temporary fixing tape requires adhesive properties to prevent peeling during processing of components (materials), but it must also be easily peeled off from the components (materials) after processing without contaminating them.

[0003] For example, Patent Document 1 discloses a method for removing a component (member) by temporarily fixing it to a heat-activated foam release tape and then heating it, thereby reducing the adhesive function of the adhesive layer due to the foaming or expansion of balloons within the adhesive layer (see, for example, Patent Document 1). Patent Document 2 also discloses a method for removing a component (member) by temporarily fixing it to an active energy ray curing release tape and then irradiating it with active energy rays such as UV, thereby reducing the adhesive function of the adhesive layer due to a curing reaction (see, for example, Patent Document 2). [Prior art documents] [Patent Documents]

[0004] [Patent Document 1] Patent No. 5572418 [Patent Document 2] Japanese Patent Publication No. 2015-108044 [Overview of the project] [Problems that the invention aims to solve]

[0005] Because heat-activated foam release tapes require heating during the release process, the temporarily fixed product is subjected to a thermal history, which may affect certain products. In particular, in the manufacturing process of MLCCs, heating the laminated thin films can cause quality problems such as cracks. Furthermore, since multiple processing steps are performed sequentially, products may be transferred from one temporary fixing tape to another between each step. In this case, multiple temporary fixing tapes are temporarily fixed to a single product, and since some temporary fixing tapes are released and others are not, it is necessary to use two types of process tapes with different foaming temperatures. Moreover, precise temperature control is required to ensure that the release tape foams, while the non-release tape does not. Such temperature control is difficult, and the expected release efficiency is not always achieved.

[0006] In temporary fixing methods using active energy ray curing release tape, the product may be affected by the active energy ray irradiation when peeling it off using UV light. Furthermore, the product must be able to transmit UV light, and if the temporary fixing tape is not exposed to a sufficient amount of UV light, the adhesive strength may not decrease sufficiently, making it difficult to peel off the product or resulting in adhesive residue. Additionally, UV irradiation equipment is large and expensive, complicating manufacturing facilities and processes.

[0007] The present invention has been made in view of the above circumstances, and aims to provide a method for peeling off temporary fixing tape that is less likely to cause contamination of parts (components) by adhesive residue and can be efficiently peeled off from parts (components) in a simple manner, a peeling member, a parts (components) manufacturing apparatus equipped with the peeling member, and a method for manufacturing parts (components, also called components or processed products). [Means for solving the problem]

[0008] The present invention has the following aspects. [1] A method for peeling off a temporary fixing tape to which one or more parts are fixed, wherein the temporary fixing tape has an extendable base material and a temporary fixing layer on one surface of the extendable base material, is peelable by stretching, the parts are fixed to the temporary fixing layer, and the temporary fixing tape is peeled off from the parts by stretching means. [2] A method for peeling off the temporary fixing tape described in [1] above, wherein the temporary fixing tape is stretched in two different directions and the two directions form an angle of approximately 90°. [3] A method for peeling off the temporary fixing tape described in [1] or [2] above, wherein the temporary fixing tape is stretched in all directions. [4] A method for peeling off temporary fixing tape according to any one of [1] to [3] above, wherein the stretching means applies tension horizontally to the adhesive surface between the component and the temporary fixing layer. [5] A method for peeling off a temporary fixing tape according to any one of [1] to [4] above, wherein the stretching means applies tension to the adhesive surface between the component and the temporary fixing layer in the direction opposite to the side on which the component is placed. [6] A method for peeling off temporary fixing tape according to any one of [1] to [5] above, wherein the stretching means has a stretching member, and the stretching member presses the temporary fixing tape from the side of the temporary fixing tape opposite to the side on which the component is placed, thereby peeling the temporary fixing tape from the component. [7] The method for peeling off temporary fixing tape according to [6], wherein the stretched member is an annular shape in plan view, having an outer periphery and a hollow region inside the outer periphery, and a part of the surface of the outer periphery is covered by a covering portion that is rotatable along the outer surface of the outer periphery. [8] The method for peeling off temporary fixing tape according to [1] to [7] above, wherein when the temporary fixing tape is stretched in the one direction by the stretching means, the length of the stretched temporary fixing tape in a direction approximately perpendicular to the one direction is 0.9 or more than the length of the temporary fixing tape before stretching in a direction approximately perpendicular to the one direction. [9] A method for peeling off temporary fixing tape according to any one of [1] to [8] above, wherein the temporary fixing layer of the temporary fixing tape is an adhesive layer with a number of recesses formed on its surface.

[10] A method for peeling off temporary fixing tape according to any of [1] to [9] above, wherein the temporary fixing layer of the temporary fixing tape is an adhesive layer.

[11] The temporary fixing tape described above has a 50% elongation stress (50% modulus) in the range of 0.15 MPa to 20 MPa, a breaking elongation of 200% or more, and a method for peeling off the temporary fixing tape described in any of [1] to

[10] above.

[12] A method for peeling off temporary fixing tape as described in any of [1] to

[11] above, wherein the elongation of the temporary fixing tape when peeled off is in the range of 101% to 1500%.

[13] A method for removing temporary fixing tape as described in any of [1] to

[12] above, wherein the above component is an electronic component.

[14] The surface area of ​​the part in contact with the temporary fixing tape is 100 mm 2 The method for removing the temporary fixing tape described in any of the above [1] to

[13] is as follows:

[15] A release member used for peeling off a temporary fixing tape that is peelable by stretching, the release member having an stretchable base material and a temporary fixing layer on one surface of the stretchable base material, the release member having a holding portion for holding the temporary fixing tape, a hollow portion formed by the holding portion, and a stretching means, wherein the holding portion is arranged such that the temporary fixing tape covers the hollow portion, and the stretching means has the function of stretching the surface of the temporary fixing tape covering the hollow portion in at least one direction.

[16] The peeling member according to

[15] , wherein the stretching means is a roll and the roll is arranged in a first stretching direction.

[17] The peeling member according to

[15] , wherein the stretching means is a roll, and the roll is arranged in a first stretching direction and a second stretching direction that forms an angle of approximately 90° with respect to the first stretching direction.

[18] The peeling member according to

[15] , wherein the stretching means is movable up and down within the hollow portion, and further comprises a stretching member that passes through the hollow portion and presses a temporary fixing tape covering the hollow portion in the direction of passage.

[19] The peeling member according to

[18] , wherein the stretching member is an annular shape in plan view, having an outer periphery and a hollow region inside the outer periphery, and a part of the surface of the outer periphery is covered by a covering portion that is rotatable along the outer surface of the outer periphery.

[20] A parts manufacturing apparatus equipped with a release member for the temporary fixing tape described in any of

[15] to

[19] above.

[21] A method for manufacturing a part, comprising at least a peeling step of peeling off a part fixed on a temporary fixing tape using the method for peeling off temporary fixing tape described in any of [1] to

[14] above.

[22] A method for manufacturing the component described in

[21] above, wherein the component is an electronic component.

[23] The above component has a surface area of ​​100 mm² that is in contact with the temporary fixing tape. 2 The method for manufacturing the component described in

[21] or

[22] above, which is as follows:

[24] A method for manufacturing the component described in any of

[21] to

[23] above, wherein the component is a multilayer ceramic capacitor. [Effects of the Invention]

[0009] According to the present invention's method for peeling off temporary fixing tape, a component fixed to one side of the tape can be easily and simply peeled off by stretching the temporary fixing tape in one or more desired directions. Therefore, when peeling between the tape and the component, it is unnecessary to apply external stimuli such as light or heat, which are used in conventional peeling methods for temporary fixing tapes, making the peeling operation easy and suppressing adhesive residue on the component side.

[0010] In other words, according to the present invention, it is possible to provide a method for peeling off temporary fixing tape that is less likely to cause contamination of parts (components) by adhesive residue and can be efficiently peeled off from parts (components) in a simple manner, a peeling member, a parts (components) manufacturing apparatus equipped with the peeling member, and a method for manufacturing parts (components, processed products). [Brief explanation of the drawing]

[0011] [Figure 1] This is a schematic diagram illustrating an example of a method for removing the temporary fixing tape of this disclosure. [Figure 2] This is a schematic diagram illustrating an example of a method for removing the temporary fixing tape of this disclosure. [Figure 3] This is a schematic diagram illustrating an example of a method for removing the temporary fixing tape of this disclosure. [Figure 4] This is a schematic diagram illustrating an example of a method for removing the temporary fixing tape of this disclosure. [Figure 5] This is a schematic diagram showing extension in two or more directions. [Figure 6] This is a schematic diagram showing one embodiment illustrating the direction of tension in the peeling method of the present disclosure. [Figure 7] This is a schematic diagram illustrating an example of a method for removing the temporary fixing tape of this disclosure. [Figure 8] This is a schematic diagram illustrating an example of a method for removing the temporary fixing tape of this disclosure. [Figure 9] This is a schematic diagram illustrating an example of a method for removing the temporary fixing tape of this disclosure. [Figure 10] This is a schematic diagram illustrating an example of a method for removing the temporary fixing tape of this disclosure. [Figure 11] This is a schematic diagram illustrating an example of a method for removing the temporary fixing tape of this disclosure. [Figure 12] This is a schematic diagram showing one embodiment of the peeling member of the present disclosure. [Figure 13] This is a schematic diagram showing one embodiment of the peeling member of the present disclosure. [Figure 14] This is a schematic diagram showing one embodiment of the peeling member of the present disclosure. [Figure 15] This is a schematic diagram showing one embodiment of the peeling member of the present disclosure. [Figure 16] This is a cross-sectional view taken along line AA' in Figure 15. [Figure 17] This is a schematic diagram showing one embodiment of the peeling member of the present disclosure. [Figure 18] This is a schematic diagram showing an example of a stretching means (stretching member). [Figure 19] This is a schematic diagram showing an example of a stretching means (stretching member). [Figure 20] This is a schematic diagram showing one embodiment of a method for manufacturing a component (material) as disclosed herein. [Figure 21] This is a schematic diagram showing one embodiment of a method for manufacturing a component (material) as disclosed herein. [Figure 22] This is a schematic diagram illustrating the vertical movement distance of the stretching means (stretching member) (the distance the tape is pushed out by the stretching means) when a component (member) peels off from the temporary fixing tape. [Figure 23] This is a schematic diagram illustrating a method for measuring the surface adhesion strength of temporary fixing tape. [Modes for carrying out the invention]

[0012] 1. Method for removing temporary fixing tape The method for peeling off temporary fixing tape according to this disclosure (hereinafter sometimes referred to as "this peeling method") is a method for peeling off temporary fixing tape to which one or more parts (members) are temporarily fixed on the surface, wherein the temporary fixing tape has an extendable base material and a temporary fixing layer on one surface of the extendable base material and is peelable by stretching, the parts (members) are temporarily fixed to the temporary fixing layer, and the method involves stretching the temporary fixing tape in at least one direction by a stretching means to peel it off from the parts (members).

[0013] Furthermore, parts that are fixed to temporary fixing tape are also called components. When parts are processed, the parts before processing are sometimes referred to as "workpieces" or "pre-processing parts," and the parts after processing are sometimes referred to as "processed objects" or "post-processing parts." Parts before and after processing are sometimes collectively referred to as "parts" or "attached objects." Hereafter, the term "parts" may be used in the explanation.

[0014] "Elongation" and "extension" refer to the length of an object such as a tape or substrate being increased. In the invention of this disclosure, since the length of an object such as a tape or substrate is increased and the object also stretches out, the term "stretching" may be used. In this specification, "stretching," "elongation," and "extension" are used interchangeably unless otherwise specified.

[0015] Figure 1 is a schematic diagram showing an example of a method for peeling off temporary process tape according to the present disclosure, with Figure 1(a) being a perspective view and Figures 1(b) and (c) being side views. As illustrated in Figure 1, this peeling method involves a temporary fixing layer 1 on one side of an extendable substrate 2, on which one or more parts (members) 3 are temporarily fixed, and the temporary fixing tape 100, which can be peeled off by stretching, is stretched in at least one direction (arrow P) by a stretching means to peel it off from the parts (members) 3 (Figures 1(b) and (c)).

[0016] The temporary fixing tape used in this peeling method is peelable by stretching. "Peeling by stretching" means that when the temporary fixing tape is stretched in one or more directions, the tape stretches and peels away from the adherend. Specifically, the adhesive area between the tape and the component decreases, making it possible to peel it away from the component. In this peeling method, because a temporary fixing tape with the above function is used, stretching the temporary fixing tape generates tensile stress in the tape, and the stretching causes peeling to progress from the outer edge of the adhesive surface, gradually reducing the adhesive area. When this tensile stress becomes greater than the adhesive force between the component and the temporary fixing layer, the component is expected to peel away from the temporary fixing tape. Therefore, this peeling method does not require heating, light irradiation, or equipment for such treatments, unlike conventional thermal expansion release tapes or UV-curing release tapes. Furthermore, it does not require consideration of the optical properties or heat resistance of the tape or component to enable tape peeling through these processes, and it is less likely to cause deterioration or damage to the component. Furthermore, unlike expandable tape used to separate multiple processed parts, the temporary fixing tape used in this peeling method is more easily stretched, and peeling occurs from the parts during the stretching process, so it can be easily peeled off simply by stretching it.

[0017] [Removal Method] This peeling method involves stretching the temporary fixing tape in at least one direction using a stretching means to peel it off from the part (member). Figure 2 is a schematic diagram showing an example of the temporary fixing tape peeling method of this disclosure, and corresponds to a view of the temporary fixing tape on which the part is placed (temporarily fixed) from the mounting surface (top surface) of the part. As schematically shown in Figure 2, the adhesive surface 4 between the temporary fixing layer (not shown) of the temporary fixing tape 100 and the part 3 (not shown) is stretched in the first stretching direction (arrow P). Figure 2 schematically shows the case where the first stretching direction P is a unidirectional direction parallel to the longitudinal direction of the temporary fixing tape 100.

[0018] Stretching of temporary fixing tape is usually done by applying tension, but if the direction of tension is different, it is considered to be a different stretching direction. If the direction of tension is the same or 180° opposite, the stretching direction is considered to be the same.

[0019] The number of parts (components) temporarily fixed on the temporary fixing layer of the temporary fixing tape is not particularly limited; it may be one, or two or more parts may be temporarily fixed. Also, multiple parts may be placed without spacing between them, or they may be placed with gaps between them.

[0020] The parts (components) temporarily fixed to the temporary fixing tape may be temporarily fixed to the upper surface of the temporary fixing tape or to the lower surface of the temporary fixing tape. The upper surface of the temporary fixing tape refers to the surface above the base material when viewed from the side (cross-section) of the temporary fixing tape, and the parts are temporarily fixed in the temporary fixing layer located above the base material of the temporary fixing tape. The lower surface of the temporary fixing tape refers to the surface below the base material when viewed from the side (cross-section) of the temporary fixing tape, and the parts are temporarily fixed in the temporary fixing layer located below the base material of the temporary fixing tape. When the parts are temporarily fixed to the lower surface of the temporary fixing tape, it is preferable because the temporary fixing tape peels off from the parts due to stretching, and the parts fall off due to their own weight, eliminating the need for work such as picking up the parts after peeling.

[0021] In a plan view of the temporary fixing tape, the temporary fixing layer may have an excess portion (hereinafter also referred to as the "excess portion") which is an area other than the adhesive surface with the component. By applying tension to the excess portion and stretching it, the temporary fixing tape including the adhesive surface can be stretched.

[0022] In this peeling method, when the temporary fixing tape is stretched in one direction by the stretching means, it is preferable that the length L' of the stretched temporary fixing tape in the direction approximately perpendicular to the stretching direction is 0.9 or more than the length L of the temporary fixing tape before stretching in the direction approximately perpendicular to the stretching direction. When the temporary fixing tape is stretched, the width in the direction approximately perpendicular to the stretching direction becomes smaller than the width before stretching due to the necking phenomenon. When multiple parts are temporarily fixed to the surface of the temporary fixing layer, if the necking phenomenon occurs, the parts are more likely to be damaged by collisions with each other. According to this peeling method, by setting the ratio (L' / L) of the length L' of the stretched temporary fixing tape in the direction approximately perpendicular to the stretching direction to the length L of the temporary fixing tape before stretching in the direction approximately perpendicular to the stretching direction (L' / L) to 0.9 or more, the temporary fixing tape can be efficiently peeled from the parts while suppressing collisions between parts due to necking. In particular, L' / L is preferably 1 or greater, more preferably greater than 1, and even more preferably 1.1 or greater. L' / L is usually 2 or less, and more preferably 1.5 or less from the viewpoint of performing this peeling method quickly.

[0023] The temporary fixing tape is stretched in at least one direction. The first stretching direction can be arbitrarily set in a plan view of the temporary fixing tape. For example, if the temporary fixing tape has a longitudinal direction and a transverse direction, the stretching direction may be parallel to the longitudinal direction, or it may be in the transverse direction, or it may be in a direction inclined at a desired angle with respect to the longitudinal direction, or any other direction. Alternatively, a single direction may be set based on any point in the plane of the temporary fixing tape, regardless of the longitudinal and transverse directions of the tape. The first stretching direction may be unidirectional or bidirectional, as will be explained later.

[0024] Furthermore, "approximately orthogonal" does not mean that it must be exactly 90° with respect to the extension direction; it is sufficient if it is approximately 90°, and directions that form an angle between 85° and 95° with respect to the extension direction, and even directions that form an angle between 88° and 92°, are permitted.

[0025] One embodiment of this peeling method is schematically shown in Figure 3, but this peeling method is not limited to this embodiment. Figure 3 is a schematic diagram showing an example of the peeling method for temporary fixing tape of the present disclosure, where Figure 3(a) is a side view and Figure 3(b) is a top view. Figure 3 schematically shows one embodiment in which a component 3 is temporarily fixed to a temporary fixing layer (not shown) of temporary fixing tape 100, and the temporary fixing tape 100 is stretched in a first stretching direction P by a stretching means 10. In Figure 3, the stretching means 10 consists of two rolls facing each other in the first stretching direction P, and by reversing the rotation directions of the two rolls that constitute the stretching means 10, an embodiment is shown in which the tape is stretched by pulling from both sides in the bidirectional first stretching direction P by the rotation of each roll. By making the peripheral speeds of the two rolls different, the temporary fixing tape may be stretched in a unidirectional first stretching direction. Note that Figure 1 shows an example in which the first stretching direction P is unidirectional, and Figure 3 shows an example in which it is bidirectional.

[0026] The stretching means is not limited to a roll; for example, it may also be a stretching means that uses two or more movable temporary fixing tape holders, holding different ends of the temporary fixing tape with the temporary fixing tape holders and moving the temporary fixing tape holders. The temporary fixing tape is stretched by having at least one of the two or more temporary fixing tape holders move in a different direction or at a different speed than the other temporary fixing tape holders. In the embodiment shown in Figure 3, tension is applied horizontally to the adhesive surface between the part (member) 3 and the temporary fixing layer of the temporary fixing tape 100 by the stretching means 8. Note that in Figure 3, the part 3 is shown placed on the upper surface of the temporary fixing tape 100 and temporarily fixed, but the part may also be placed on the lower surface of the temporary fixing tape 100 and temporarily fixed.

[0027] In the case of long temporary fixing tapes, a stretching method using two or more rolls is preferred for stretching in the first stretching direction, from the viewpoint of continuous stretching. The stretching ratio in the first stretching direction is not particularly limited, but 1.1 or higher is preferred from the viewpoint of making the entire temporary fixing tape peelable. A stretching ratio of 2 times or less is preferred from the viewpoint of the efficiency of the peeling operation.

[0028] When this peeling method is performed on a parts (components) manufacturing line, the first stretching direction is preferably intersecting the transport direction of the temporary fixing tape, and more preferably approximately perpendicular to the transport direction. This is because it is possible to peel off the temporarily fixed parts while transporting the temporary fixing tape. Furthermore, when this peeling method is performed on a parts manufacturing line, the stretching direction may be in all directions. There are no particular limitations on the stretching method that allows the stretching direction to be in all directions on the manufacturing line, but one example is a method in which a stretching member is pressed against the transported temporary fixing tape from the side opposite to the part placement side, causing the temporary fixing tape to protrude (pushing up or pushing down) so that it becomes convex towards the part placement side. Performing this peeling method on a parts manufacturing line means, for example, continuously performing the manufacturing of parts before processing on the temporary fixing tape, or performing processing such as cutting or dicing on parts before processing, and then peeling the parts from the temporary fixing tape using this peeling method.

[0029] In this peeling method, the stretching means may stretch the temporary fixing tape in two or more different directions. That is, the stretching means may stretch the temporary fixing tape in one direction (first stretching direction) and in one or more directions other than the first stretching direction (also referred to as "different stretching directions"). The stretching direction may be one direction, two or more directions, or all directions. When the stretching direction is one direction, the apparatus for this peeling method can peel off the temporary fixing tape simply and efficiently. When there are two or more different stretching directions (especially all directions), the adhesive surface is stretched in two or more directions, so the temporary fixing tape can be uniformly peeled off from the part. When stretching in different stretching directions, the holder may function as the stretching means by being driven. When stretching the temporary fixing tape in two or more different directions, the stretching in each direction may be done simultaneously (simultaneous stretching) or sequentially (sequential stretching). The stretching means can be appropriately selected depending on the stretching method, and examples include rolls, grippers, stages, pins, etc., and it is preferable that these are movable. For example, it is preferable that the stage and pins are movable up and down.

[0030] When stretching the temporary fixing tape in different directions, the stretching ratio in each direction is not particularly limited, but 1.1 or higher is preferred. A stretching ratio of 2 or less is preferred from the viewpoint of efficiency of the peeling operation. If there are two or more different directions, the stretching ratios for each direction may be the same or different.

[0031] This peeling method may involve stretching the temporary fixing tape in two different directions. It is preferable that the two stretching directions form an angle of approximately 90°. In this peeling method, the stretching means stretches the temporary fixing tape in two directions: one direction P and a direction P2 different from direction P1. It is preferable that the two directions P1 and P2 form an angle of approximately 90°, i.e., that the two directions are approximately orthogonal, as this allows for uniform stretching. The range of an angle of approximately 90° is the same as the range of "approximately orthogonal" described above. Note that when the angle between direction P1 and direction P2 is 180°, directions P1 and P2 become bidirectional and have the same stretching direction.

[0032] Figure 4 is a schematic diagram showing an example of this peeling method, viewed from the mounting surface (top surface) of the part (member). In Figure 4(a), two rolls are arranged opposite each other in the first stretching direction P1 as the stretching means 8, and one roll is moved in one direction in the first stretching direction P1 to stretch the temporary fixing tape 100 in that direction. As an example of another peeling method, the temporary tape may be stretched in both directions in the first stretching direction by making the peripheral speeds of the two rolls that constitute the stretching means 8 in Figure 4 different. In particular, when continuously stretching a long temporary fixing tape, a stretching means using two or more rolls is preferred for stretching in the first stretching direction. As schematically shown in Figure 4, by stretching the temporary fixing tape 100, the area of ​​the adhesive surface 4 on the surface of the part 3 that is in contact with the temporary fixing tape 100 (the area shown by the dashed line in Figures 4(a) and (b)) decreases, becoming smaller than the area of ​​the adhesive surface before stretching, and the temporary fixing tape 100 is peeled off from the part 3. In the example shown in Figure 4(a), there is a holding part 9 that holds the temporary fixing tape in a direction intersecting the first stretching direction P1. The holding part 9 may also function as a stretching means.

[0033] Figure 4(b) shows an example in which two rolls are arranged opposite each other in the first stretching direction P1 as the first stretching means 8A, and two rolls are arranged opposite each other in a stretching direction different from the first stretching direction P1 (the second stretching direction) P2 as the second stretching means 8B. In the example shown in Figure 4(b), the tape is stretched in two axes, P1 and P2, by one roll, which is the first stretching means 8A, moving in one direction of the first stretching direction P1, and one roll, which is the second stretching means 8B, moving in one direction of the second stretching direction P2. In the peeling method illustrated in Figure 4(b), the temporary fixing tape 100 may be stretched in one direction or both directions of the first stretching direction P1 by the first stretching means 8A, or stretched in one direction or both directions of the second stretching direction P2 by the second stretching means 8B, or both. In the example shown in Figure 4(b), the different stretching direction (second stretching direction) P2 is generally perpendicular to the first stretching direction P1. However, this peeling method is not limited to this, and the angle between the first stretching direction and the second stretching direction should be greater than 0 and less than 360°. However, the case where the angle between the first stretching direction and the different stretching direction is 180° is excluded as it is considered the same stretching direction in both directions. In particular, from the viewpoint of uniformly peeling the temporary fixing tape from the part, it is preferable that the different stretching direction is generally perpendicular to the first stretching direction.

[0034] Figure 4(b) illustrates a method of stretching the temporary fixing tape while the stretching means 8A and 8B move in the stretching direction. However, as shown in Figure 4(c), for example, the rolls, which are the stretching means 8A and 8B, may rotate in fixed positions, so that the temporary fixing tape 100 is stretched in both directions of the first stretching direction P1 by the rotation of the roll, which is the first stretching means 8A, and the temporary fixing tape 100 is stretched in both directions of the second stretching direction P2 by the rotation of the roll, which is the second stretching means 8B. In this case, it is preferable that the rolls, which are the stretching means 8A and 8B, have the function of holding the temporary fixing tape 100, that is, they are both stretching means and holding parts.

[0035] In this peeling method, the temporary fixing tape may be stretched in all directions. In this peeling method, by stretching the temporary fixing tape in all directions using the stretching means, the temporary fixing tape is stretched in all directions within the plane, thereby enabling uniform stretching.

[0036] Figure 5 is a schematic diagram illustrating how the temporary fixing tape 100 is stretched in all directions. Stretching in all directions means that, when any point on the plane of the temporary fixing tape is used as the center, it stretches in all directions within a 360° radius of that center. Because the temporary fixing tape 100 stretches in all directions in its plane, the adhesive surface 4 between the temporary fixing layer and one or more parts (members) can also be stretched in all 360° directions. Note that in Figure 5, the adhesive surface 4 is rectangular, but the shape of the adhesive surface 4 is not limited to a rectangle; it can be circular, elliptical, triangular, or a polygon with five or more sides, depending on the shape of the surface of the part to be attached.

[0037] The method for stretching the temporary fixing tape (adhesive surface) in two or more stretching directions may be sequential stretching or simultaneous stretching. If there are two or more different stretching directions, the temporary fixing tape (adhesive surface) may be stretched sequentially in multiple different stretching directions, stretched simultaneously in multiple different stretching directions, or stretched in a combination of these. When stretching the temporary fixing tape in all directions, it is preferable to stretch all directions simultaneously. Since stretching is performed by applying tension to the excess portion of the temporary fixing tape, the order of stretching can be controlled by controlling the direction in which tension is applied to the excess portion according to the order of stretching.

[0038] Furthermore, when extending in a first extension direction and extending in a different extension direction simultaneously, any one of the directions shall be designated as the first extension direction.

[0039] The stretching of the adhesive surface between the component (member) and the temporary fixing layer is performed, for example, by applying tension to the excess portion. Specifically, tension is applied to the tape by methods such as gripping the temporary fixing tape with a stretching means and pulling it, pulling the temporary fixing tape while winding it up with a stretching means, or pressing a movable stage against the temporary fixing tape as a stretching means to push the temporary fixing tape out (pushing it up or down). The stretching means may apply tension horizontally to the adhesive surface between the component and the temporary fixing layer, or it may apply tension in the direction opposite to the side of the temporary fixing tape on which the component is placed.

[0040] Figure 6 shows an example of applying tension to the temporary fixing tape 100 in the direction opposite to the side on which the component 3 is placed. Applying tension in the direction opposite to the side on which the component (member) 3 is placed is preferable from the viewpoint of saving space in the device. The direction in which tension is applied (indicated by the symbol Q in Figure 6) can be, for example, the direction in which the end of the temporary fixing tape is pulled against the adhesive surface between the component and the temporary fixing tape when stretching, or the opposite direction to the pushing direction when the stretching member is pressed against the temporary fixing tape and pushed out (upward direction when pushing up against the tape surface, downward direction when pushing down against the tape surface).

[0041] The stretching means described above can stretch a component (member) by directly applying tension horizontally to the adhesive surface between the component and the temporary fixing layer. Alternatively, the stretching means can stretch the temporary fixing tape by applying tension in a three-dimensional direction, including the direction perpendicular to the adhesive surface between the component and the temporary fixing layer, by pressing the stretching member against the side of the temporary fixing tape opposite to the surface on which the component is placed. The latter method is preferable from the viewpoint of saving space in the device.

[0042] When tension is applied to the temporary fixing tape in the direction opposite to the side on which the component is placed, as shown in Figure 6, it is preferable that the angle θ (angle θ of the tension relative to the adhesive surface) between the adhesive surface of the component (member) 3 and the temporary fixing tape 100 (in other words, the horizontal surface S of the temporary fixing tape 100) and the direction Q to which the tension is applied is greater than 0° and less than or equal to 90°. In particular, from the viewpoint of easily applying uniform tension, an angle θ of 5° to 89° is preferable, and 10° to 88° is even more preferable. The preferred range for the angle θ may also be 5° to 85°, or 10° to 80°. The angle θ may be fixed or may fluctuate during a continuous peeling operation. When the angle θ is 0°, tension is applied horizontally to the adhesive surface between the component and the temporary fixing layer. In particular, it is preferable that the angle θ is within the above range and that the temporary fixing tape is stretched in all directions, as this makes it easier to peel off multiple components at once when multiple components are temporarily fixed to the temporary fixing layer.

[0043] Specific stretching means and methods that enable stretching in two or more stretching directions (stretching in a direction different from the first stretching direction) are, for example, the means and methods shown in Figures 7 to 11, but are not limited to these.

[0044] Figure 7 schematically shows one configuration in which part (member) 3 is temporarily fixed to the temporary fixing layer (not shown) of the temporary fixing tape 100 and stretched in the first stretching direction P1. Figure 7(a) schematically shows a configuration in which a long temporary fixing tape 100 is stretched between two rolls, similar to Figure 3, and is a top view seen from the mounting surface side of the part. In Figure 7(a), both ends of the temporary fixing tape 100 are held by holders 9, and the tape is stretched in a direction P2 that forms an angle of approximately 90° with respect to the stretching direction P1. In the example shown in Figure 7(a), the two holders 9 are movable and move so that the distance between them gradually widens toward the first stretching direction P2, thereby stretching the adhesive surface (not shown) in different stretching directions. Figure 7 shows a configuration in which stretching in the first stretching direction and stretching in a different stretching direction are performed simultaneously, but both stretching may be performed sequentially. In Figure 7, part 3 is placed on the upper surface of the temporary fixing tape 100, but even if it is placed on the lower surface of the temporary fixing tape 100, the temporary fixing tape 100 can be peeled off from part 3 using the same method.

[0045] In the embodiment illustrated in Figure 7(b), the stretching means 8, which is a roll, is positioned in the machine direction (MD direction) of the temporary fixing tape 100, and holders 9 are positioned on both sides in the direction perpendicular to the machine direction (MD direction) (CD direction). The stretching means 8, which is a roll, stretches the temporary fixing tape 100 in a first stretching direction P1 parallel to the machine direction (MD direction) while winding up the temporary fixing tape 100 as it is being transported. Meanwhile, the holders 9 guide the transport of the temporary fixing tape 100, and the holders 9, which also function as stretching means, grip both ends of the temporary fixing tape 100 and apply tension in direction P2. At this time, the holders 9 may stretch the temporary fixing tape 100 in a second stretching direction P2. In Figure 7(b), the stretching means 8 is positioned in the transport direction (MD direction), and the stretching means extends the temporary fixing tape 100 in a first stretching direction P1 parallel to the transport direction (MD direction). However, a holder 9 without a stretching function may be positioned in the transport direction (MD direction), and the holder 9 positioned in a direction intersecting the transport direction (CD direction) may act as the stretching means 8, extending the temporary fixing tape 100 only in the second stretching direction P2. In this case, the transport and widthwise stretching of the temporary fixing tape 100 can be performed simultaneously.

[0046] Figures 8 and 9 schematically illustrate one configuration in which tension is applied to a temporary fixing tape in the direction opposite to the side on which the component (member) is placed. Figure 8 is a cross-sectional view taken along line XX in Figure 9. As shown in Figure 8, the temporary fixing tape 100 follows the holder 9, so that the excess portion is located on the opposite side of the side on which the component (member) 3 is placed (the adhesive surface side). By applying tension to the excess portion, the adhesive surface (not shown) can be extended in the stretching direction P (horizontal direction). In Figure 8, the member 3 (hereinafter referred to as part 3) is placed on the upper surface of the temporary fixing tape 100, and the direction Q in which tension is applied is downward relative to the temporary fixing tape 100. Although not shown, if the part 3 is placed on the lower surface of the temporary fixing tape 100, and the holder 9 is positioned on the upper side of the temporary fixing tape 100, and the direction Q in which tension is applied is upward relative to the temporary fixing tape 100, the same operation as in Figure 8 can be performed.

[0047] Figure 9 is a schematic diagram viewed from the side on which part (component) 3 of Figure 8 is placed. Tension is applied to the excess portion of the temporary fixing tape 100 in the direction opposite to the side on which part 3 is placed. As explained in Figure 8, a portion of the temporary fixing tape 100 is bent in the direction opposite to the side on which part 3 is placed via the holder 9, and by applying tension to the excess portion by pulling the end, the entire adhesive surface (not shown) is stretched as shown in Figure 9. The dashed line representing the holder 9 in Figure 9 indicates that the temporary fixing tape 100 is on the opposite side from the side on which member 3 is placed.

[0048] As an example of the stretching mechanism shown in Figure 8, for instance, as schematically shown in Figure 10, the temporary fixing tape 100 is held by the stretching member 10 at a position opposite to the component (member) 3 relative to the holder 9, and by moving the stretching member 10 in the opposite direction to the component 3 relative to the holder 9 (direction of arrow Y), tension can be applied to the excess portion of the temporary fixing tape 100 in the same direction as the movement direction Y of the stretching member 10 (direction of arrow Q). At this time, the holder 9 may also be moved in the opposite direction to the movement direction Y of the stretching member 10 in conjunction with the movement of the stretching member 10. When the holder 9 is moved in the opposite direction to the movement direction Y of the stretching member 10 in conjunction with the movement of the stretching member 10, the movements of both can be linked by providing a control unit (not shown) that controls the movement of the holder 9 and the stretching member 10. In Figure 10, component 3 is placed on the upper surface of the temporary fixing tape 10, and the tension direction Q is downward relative to the temporary fixing tape. However, component 3 may also be placed on the lower surface of the temporary fixing tape 10. If component 3 is placed on the lower surface of the temporary fixing tape 10, the same operation can be performed by positioning the holder 9 and the stretching member 10 on the upper side of the temporary fixing tape 100 and directing the tension direction Q upward relative to the temporary fixing tape 100.

[0049] Alternatively, as schematically shown in Figure 11, for example, a temporary fixing tape 100 can be fixed to the holder 9 on the side opposite to the side on which the component 3 is placed using another holder 9', and the adhesive surface (not shown) can be pressed against the component 3 from the back side of the temporary fixing tape 100 (opposite the side on which the component 3 is placed) using an extension member 10 (e.g., a stage or piston) in the direction Y shown in Figure 11, thereby applying tension to the excess portion in the direction opposite to the pressing direction Y by the extension member 10 (the direction of arrow Q in Figure 11). In this case, the holder 9' may be moved in the direction opposite to the pressing direction Y of the extension member 10 in conjunction with the movement of the extension member 10. When the holder 9' is moved in the direction opposite to the pressing direction Y of the extension member 10 in conjunction with the movement of the extension member 10, the movements of both can be linked by providing a control unit (not shown) that controls the movement of the holder 9' and the extension member 10. In Figure 11, member 3 is placed on the upper surface of the temporary fixing tape 10, and the direction of tension Q is downward relative to the temporary fixing tape. However, member 3 may also be placed on the lower surface of the temporary fixing tape 10. If member 3 is placed on the lower surface of the temporary fixing tape 10, the same operation can be performed by positioning the holders 9 and 9' and the stretching member 10 on the upper side of the temporary fixing tape 10, pressing the tape 10 from the upper side with the stretching member 10 to push the tape 10 out to the opposite side, and making the direction of tension Q upward relative to the temporary fixing tape 10.

[0050] The method shown in Figure 10 or Figure 11 is preferable from the viewpoint that the adhesive surface is uniformly stretched in all directions within the adhesive surface, and that the stretching in all directions occurs simultaneously. From this viewpoint, as shown in Figure 8, it is preferable that the stretching means 8 applies tension to the adhesive surface between the part (member 3) and the temporary fixing tape 100 in the direction opposite to the part 3, thereby stretching the adhesive surface. As such a stretching method, for example, as schematically shown in Figure 10, for example, the method of pulling the excess end portion of the temporary fixing tape away from the part 3 is preferred, and as schematically shown in Figure 11, the method of pressing the adhesive surface between the part (member 3) and the temporary fixing tape 100 toward the surface on which the member 3 is placed is preferred by the stretching means 10. In Figures 10 and 11, arrow Y indicates the direction of movement of the holder 9 and the stretching member 10, respectively.

[0051] After the component (member) is peeled off from the temporary fixing tape by the above-described main peeling method, it can be separated from the temporary fixing tape by, for example, suction, clamping, or sweeping. Further, the orientation of the temporary fixing layer of the temporary fixing tape, the orientation of the mounting surface of the component, and the orientation of the peeling member of the temporary fixing tape may be set so that the component 3 can be detached from the temporary fixing tape by the self-weight drop of the component.

[0052] [Component (member)] The component (member) may be a component before processing such as cutting, polishing, cutting, etching, etc. (a component before processing, or a workpiece), or a component after the processing (a component after processing, or a processed product). Examples of the component include electronic components such as semiconductor wafers, multilayer ceramic capacitors, and inductors, optical members such as optical glass and polarizing plates, and ceramic green sheets. Among them, the smaller the component, the smaller the adhesive area with the tape per component, and the effect of using the main peeling method is remarkably exhibited, which is preferable.

[0053] The size of the component (member) peeled off from the tape is not particularly limited, but the adhesive area (the surface area of the surface of the component in contact with the temporary fixing tape) of the temporary fixing tape before stretching per component (member) is 500 mm 2 or less, for example, 100 mm 2 or less is preferable, 50 mm 2 or less is preferable, 30 mm 2 or less is more preferable, 10 mm 2 or less is even more preferable, 3 mm 2 or less is preferable, 1 mm 2 or less is particularly preferable. For a micro-component with a surface area of the surface in contact with the temporary fixing tape of 1 mm 2 or less, it is more preferable that the surface area is 0.5 mm 2 or less, even more preferable is 0.2 mm 2 or less, particularly preferable is 0.1 mm 2 or less, particularly preferable is 0.2 mm 2 or less is preferable. The lower limit of the size of the above-described component (member) is not particularly limited, but for example, 0.001 mm 2Preferably 0.005 mm 2 Preferably 0.01 mm 2 Preferably 0.05 mm 2 That's all.

[0054] When the size of the temporarily fixed part (component) is relatively large, the tape can be stretched while the part is pressed down from above, making it difficult for the part to follow the stretching deformation of the tape. This can easily lead to a decrease in the contact area of ​​the tape relative to the degree of stretching, resulting in peeling. Also, when the surface area of ​​the part that is temporarily fixed in contact with the tape is 1 mm 2 In the case of minute components as described below, because minute components are fragile and precise, they cannot be held down from above, and the minute components follow the stretching deformation of the tape while maintaining their adhesive surface, making them impossible to peel off. However, by using the tape described later, the following can be suppressed, and the effect of reducing the contact area relative to the degree of stretching of the tape is obtained, making it possible to easily peel off even minute components.

[0055] The parts (components) may be subjected to further processing after being peeled off the temporary fixing tape. The processing performed may be the same or different.

[0056] [Temporary fixing tape] The temporary fixing tape used in this peeling method (hereinafter sometimes referred to as "this tape") has a temporary fixing layer on one side of the base material. This tape may be a single-sided specification with a temporary fixing layer on one side of the base material, or a double-sided specification with temporary fixing layers on both sides of the base material. Alternatively, this tape may have a temporary fixing layer on one side of the base material and an adhesive layer on the other side that has greater adhesive strength than the temporary fixing layer. When this tape is a double-sided specification, it is preferable to have a release liner on the surface of the temporary fixing layer to which the parts (members) are not fixed.

[0057] The temporary fixing tape used in this peeling method may be in the form of a long strip (strip or roll) or a single sheet. In the case of a single sheet, its shape may be selected appropriately according to the shape of the part (component), such as a square, circle, or ellipse.

[0058] The stress (25% modulus) of the temporary fixing tape at 25% elongation is preferably in the range of 0.15 MPa to 10 MPa, more preferably in the range of 0.16 MPa to 10 MPa, more preferably in the range of 0.17 MPa to 5 MPa, and even more preferably in the range of 0.18 MPa to 4.5 MPa. This allows the temporary fixing tape to exhibit good temporary fixing properties and reduces tension in the initial stages of elongation.

[0059] The 50% elongation stress (50% modulus) of the temporary fixing tape is preferably in the range of 0.15 MPa to 20 MPa, more preferably in the range of 0.20 MPa to 18 MPa, more preferably in the range of 0.25 MPa to 15 MPa, and even more preferably in the range of 0.3 MPa to 10 MPa. By setting the 50% elongation stress of the temporary fixing tape within the above range, the tension required for stretching will not become excessive, and the amount of stretching required to peel the part (member) from the temporary fixing tape can be suppressed. If the 50% elongation stress is too high, the tape may become too stiff to stretch, while if the 50% elongation stress is too low, when trying to stretch the tape to peel it from the adherend, only the excess portion not adhered to the adherend will stretch, and the tension will not be transmitted to the surface adhered to the adherend, making it impossible to peel.

[0060] The 25% and 50% elongation stress (modulus) of the temporary fixing tape refers to the stress values ​​measured when the tape was punched out in a dumbbell shape with a gauge length of 20 mm and a width of 5 mm, pulled lengthwise at a tensile speed of 500 mm / min using a Tensilon tensile testing machine (model: RTF-1210, manufactured by A&D Co., Ltd.) under measurement conditions of 23°C and 50% RH, and elongation was measured at 25% and 50% elongation. In this specification, the elongation of the modulus refers to the ratio of the length of elongation to the gauge length before elongation [(gauge length after elongation - gauge length before elongation) / gauge length before elongation] × 100 (%).

[0061] The breaking stress (breaking strength) of the temporary fixing tape is not particularly limited as long as it can be peeled off without breaking during the stretching process, but it can be in the range of 1 MPa to 100 MPa, preferably in the range of 3 MPa to 90 MPa, preferably in the range of 5 MPa to 95 MPa, preferably in the range of 5 MPa to 80 MPa, preferably in the range of 10 MPa to 90 MPa, preferably in the range of 10 MPa to 75 MPa, preferably in the range of 15 MPa to 88 MPa, preferably in the range of 15 MPa to 70 MPa, preferably in the range of 20 MPa to 85 MPa, and preferably in the range of 25 MPa to 80 MPa. By setting the breaking stress of the temporary fixing tape within the above range, it is possible to suppress the occurrence of tearing during stretching and excessive stress required for stretching, and stretching becomes possible with low stress.

[0062] The breaking stress of the temporary fixing tape refers to the stress value measured when a dumbbell-shaped piece with a gauge length of 20 mm and a width of 5 mm is punched out, and pulled lengthwise at a tensile speed of 500 mm / min using a Tensilon tensile testing machine (model: RTF-1210, manufactured by A&D Co., Ltd.) under measurement conditions of 23°C and 50% RH, and then broken.

[0063] The break elongation of the temporary fixing tape is not particularly limited as long as it can be peeled off without breaking during the stretching process, but it can be in the range of 200% to 3000%, preferably in the range of 250% to 2500%, preferably in the range of 300% to 2500%, preferably in the range of 300% to 2000%, preferably in the range of 400% to 2000%, preferably in the range of 400% to 1500%, preferably in the range of 500% to 1500%, preferably in the range of 500% to 1300%, preferably in the range of 600% to 1300%, preferably in the range of 500% to 1000%, and preferably in the range of 600% to 1000%. By setting the break elongation of the temporary fixing tape within the above range, the stress required to stretch the tape can be reduced, and the stretching distance required before the part (member) peels off can be shortened.

[0064] The elongation at break of temporary fixing tape is measured by punching out a dumbbell-shaped piece with a gauge length of 20 mm and a width of 5 mm, and using a Tensilon tensile testing machine (model: RTF-1210, manufactured by A&D Co., Ltd.) under measurement conditions of 23°C and 50% RH, pulling it lengthwise at a tensile speed of 500 mm / min, and measuring the elongation at the time of breakage [{(gauge length after stretching - gauge length before stretching) / gauge length before stretching} × 100 (%)].

[0065] The 180° peel adhesive strength of the temporary fixing tape is not particularly limited as long as it can temporarily fix the parts (components), but it can be in the range of 0.05 N / mm to 1 N / mm, preferably in the range of 0.06 N / mm to 0.8 N / mm, preferably in the range of 0.07 N / mm to 0.5 N / mm, and preferably in the range of 0.1 N / mm to 0.3 N / mm. When the 180° peel adhesive strength of the temporary fixing tape is within the above range, the parts can be temporarily fixed with sufficient adhesive strength, instability during work in temporary fixing can be suppressed, and problems such as adhesive residue on the parts are less likely to occur when the tape is peeled off.

[0066] The 180° peel adhesive strength of temporary fixing tape is measured in accordance with JIS Z 0237 by the following method. If the temporary fixing layer is an adhesive layer, the temporary fixing tape is cut to a length of 150 mm and a width of 25 mm, and the surface on the temporary fixing layer side is attached to a stainless steel plate (length 100 mm, width 30 mm, thickness 3 mm) under an atmosphere of 23°C and 50% RH. A load of 2 kg is applied to the laminated structure of the temporary fixing tape and the stainless steel (SUS) plate, and the test piece is pressed by pressing it back and forth once with a roller while applying a load of 2 kg. After the test piece is left to stand for 1 hour under an atmosphere of 23°C and 50% RH, the strength can be measured by pulling it in the 180° direction at a tensile speed of 300 mm / min using a Tensilon tensile testing machine (model: RTF-1210, manufactured by A&D Co., Ltd.) under an atmosphere of 23°C and 50% RH. Furthermore, if the temporary fixing layer is an adsorption layer, a 20 mm wide tape at 23°C can be attached to a stainless steel plate with the temporary fixing layer side (adsorption layer side) facing the stainless steel plate, pressed once back and forth with a 2 kg roller, left to stand for 1 hour under conditions of 23°C and 50% RH, and then measured by pulling it in a 180° direction at a tensile speed of 300 mm / min using a Tensilon tensile testing machine.

[0067] The elongation of the temporary fixing tape when peeled is preferably in the range of 101% to 1500%, more preferably in the range of 105% to 800%, and even more preferably in the range of 110% to 500%. In particular, when the temporary fixing layer of the temporary fixing tape is an adhesive layer, the elongation of the temporary fixing tape when peeled is preferably in the range of 101% to 1500%, more preferably in the range of 105% to 1000%, and even more preferably in the range of 110% to 500%. Furthermore, when the temporary fixing layer of the temporary fixing tape is an adhesive layer, the elongation of the temporary fixing tape when peeled is preferably in the range of 101% to 400%, more preferably in the range of 105% to 300%, and even more preferably in the range of 110% to 250%. By setting the elongation of the temporary fixing tape when peeled within the above ranges, the parts (members) placed on the temporary fixing layer can be peeled off even if the distance the tape is stretched is small. In particular, the surface area of ​​the surface to be fixed with the temporary fixing tape (the surface to be attached) is 100 mm². 2 (1cm 2 ) Below, and even 1mm 2 In the case of the following minute components, they can be peeled off the temporary fixing tape without needing to be stretched excessively.

[0068] The elongation of temporary fixing tape upon peeling refers to the ratio of the length between the markings of the tape after stretching (initial length between markings + length of the stretched portion of the tape) when the tape has stretched and peeled off the adherend, to the initial length of the tape (initial length between markings). This value is measured and calculated using the following method. A temporary fixing tape (hereinafter referred to as "tape") was cut to a length of 200 mm and a width of 20 mm. The ends of the tape, measuring 50 mm in length and 20 mm in width, were laminated with a 50 μm thick PET film to create gripping tabs for stretching the tape in the longitudinal direction. Three aluminum blocks, each 10 mm long, 10 mm wide, and 4 mm thick, were prepared and attached in series along the length of the tape to the center of the temporary fixing layer surface of the tape. A load of 1 kg / 3 blocks was applied and pressed for 10 seconds to create a test specimen. With the aluminum block of the test specimen facing downwards, the tab at one end of the tape was placed in a fixing jig while the specimen was held horizontally. Then, the tab on the opposite end of the tape was grasped and stretched horizontally at a speed of 300 mm / min. The elongation of the tape when all three aluminum blocks fell from the tape was calculated using the following formula. In the formula below, "initial distance between markings + length of tape after stretching" is the distance between markings of the tape after it has stretched and all the aluminum blocks have fallen. The distance between markings is the length of the tape minus the tab areas on both sides (tape length 200mm - tab area length 50mm × 2 = 100mm). {(Initial distance between gauge marks + length of tape stretched) / Initial distance between gauge marks} × 100 = Elongation at peeling [%]

[0069] <Extensible base material> The stretchable base material (hereinafter sometimes referred to as "base material") in temporary fixing tape only needs to be stretchable (extendable), and may have a single layer or a multilayer structure of two or more layers. The base material only needs to be stretchable in at least one direction, and it is preferable that the base material has stretchability (extendability) in all directions within its plane.

[0070] The base material has at least the ability to stretch under tension, but it may also have the ability to stretch under tension and then contract to return to its original shape when the tension is released, and it does not need to return to its original shape once stretched. From the viewpoint of having stretchability, it is preferable that the base material has at least one of the following physical properties.

[0071] The elongation at break of the base material is preferably 200% or more, more preferably 300% or more, more preferably 400% or more, and even more preferably 500% or more, from the viewpoint of exhibiting stretchability (stretchability). Furthermore, the elongation at break of the base material is not particularly limited as long as it is stretchable, but for example it can be 2000% or less, preferably 1800% or less, more preferably 1700% or less, and even more preferably 1500% or less. When the elongation at break of the base material is within the above range, even if the adhesive strength between the temporary fixing tape and the part (component) is high, the temporary fixing tape can be stretched while suppressing its breakage, and the stretching distance of the tape until the adhesive state between the temporary fixing tape and the part is released (tape peel elongation) does not become too long, making it possible to work in a small space. The elongation at break of the base material can be adjusted by appropriately selecting the material, stretching during the manufacturing process of the base material, etc.

[0072] The elongation at break of the base material is determined by punching out a dumbbell-shaped sample with a gauge length of 20 mm and a width of 5 mm, and using a Tensilon tensile testing machine (model: RTF-1210, manufactured by A&D Co., Ltd.) under measurement conditions of 23°C and 50% RH, pulling it lengthwise at a tensile speed of 500 mm / min, and referring to the elongation at break [{(gauge length at break - gauge length before stretching) / gauge length before stretching} × 100 (%)].

[0073] The breaking strength of the base material is preferably 20 MPa or more, more preferably 30 MPa or more, and even more preferably 40 MPa or more. On the other hand, the breaking strength of the base material is preferably 120 MPa or less, more preferably 100 MPa or less, even more preferably 90 MPa or less, and even more preferably 85 MPa or less. Having the breaking strength of the base material within the above range makes it less likely to tear during the stretching process of the temporary fixing tape, and also prevents the stress used to stretch (tension) the temporary fixing tape from becoming too large. The breaking strength of the base material can be adjusted by appropriately selecting the material, stretching the base material during the manufacturing process, etc.

[0074] The breaking strength of the base material is determined by punching out a dumbbell-shaped piece of the base material with a gauge length of 20 mm and a width of 5 mm, and using a Tensilon tensile testing machine (model: RTF-1210, manufactured by A&D Co., Ltd.) under measurement conditions of 23°C and 50% RH, pulling it lengthwise at a tensile speed of 500 mm / min, and referring to the stress value measured when it breaks.

[0075] The 50% modulus of the base material is preferably 0.1 MPa or higher, more preferably 0.3 MPa or higher, more preferably 1.0 MPa or higher, and even more preferably 5.0 MPa or higher. On the other hand, the 50% modulus of the base material is preferably 20.0 MPa or lower, more preferably 18.0 MPa or lower, and even more preferably 15.0 MPa or lower. By setting the 50% modulus of the base material within the above range, it is possible to suppress defects caused by shape deformation such as slippage when a load is applied to the temporary fixing tape or component (member), and also to stretch the tape with relatively light force in the initial stretching stage of the temporary fixing tape. The 50% modulus of the base material can be adjusted by appropriately selecting the material, stretching the base material during the manufacturing process, etc.

[0076] The 100% modulus of the base material is preferably 0.1 MPa or higher, more preferably 0.3 MPa or higher, more preferably 0.5 MPa or higher, and even more preferably 1 MPa or higher. On the other hand, the 100% modulus of the base material is preferably 25.0 MPa or lower, more preferably 22 MPa or lower, and even more preferably 20.0 MPa or lower. By setting the 100% modulus of the base material within the above range, it is possible to suppress defects caused by shape deformation such as slippage when a load is applied to the temporary fixing tape or part (member), and also to stretch the tape with a relatively small force in the initial stretching of the temporary fixing tape. The 100% modulus of the base material can be adjusted by appropriately selecting the material, stretching the base material during the manufacturing process, etc.

[0077] The 50% and 100% modulus of the base material are determined by punching out a dumbbell shape with a gauge length of 20 mm and a width of 5 mm from the base material, and testing it in a tensile atmosphere of 23°C and 50% RH using a Tensilon tensile testing machine (model: RTF-1210, manufactured by A&D Co., Ltd.) at a tensile speed of 500 mm / min in the longitudinal direction. The stress values ​​refer to the stress values ​​when the elongation is 50% and when the elongation is 100%, respectively. The elongation in the above modulus is the ratio of the length of elongation to the gauge length before elongation [{(gauge length after elongation - gauge length before elongation) / gauge length before elongation} × 100 (%)].

[0078] The rubber hardness of the base material is preferably 25A or higher, more preferably 30A or higher, even more preferably 50A or higher, and even more preferably 85A or higher. On the other hand, the rubber strength of the base material is preferably 100A or lower, and more preferably 98A or lower. By setting the rubber hardness of the base material within the above range, tearing can be prevented during the stretching process of the temporary fixing tape, while flexibility can be imparted to the base material, thus reducing the force required to stretch the tape in the initial stages of stretching. The rubber hardness of the base material can be adjusted by appropriately selecting materials, for example, by changing the molecular weight of the resin constituting the base material, changing the monomer units constituting the copolymer, or selecting a composition.

[0079] The rubber hardness of the base material is measured on the Shore A scale, using a durometer (spring-type rubber hardness tester) (model: GS-719G, manufactured by Teclock Co., Ltd.) in accordance with JIS K 6253.

[0080] The thickness of the base material is not particularly limited, but for example it can be 5 μm or more, preferably 10 μm or more, more preferably 25 μm or more, and even more preferably 40 μm or more. On the other hand, the thickness of the base material is preferably 500 μm or less, more preferably 250 μm or less, and even more preferably 200 μm or less. By setting the thickness of the base material within the above range, the strength of the temporary fixing tape can be ensured, and the stretchability of the temporary fixing tape can be improved, making it easier to stretch with less stress.

[0081] The thickness of the base material is the average of the thicknesses measured using a dial thickness gauge (manufactured by Ozaki Seisakusho Co., Ltd., model G-0.4N or model G-2.4N) at 10 mm intervals along the length and 5 intervals along the width, for a total of 10 points.

[0082] (composition) The substrate is composed of a substrate composition mainly consisting of resin. A resin layer, such as a resin film or resin sheet, can be used as the substrate. Furthermore, the substrate may consist solely of resin, or it may contain other arbitrary components in addition to resin.

[0083] Examples of resins that make up the base material include styrene resins, urethane resins, polyolefin resins, polyester resins, polystyrene, polycarbonate, polymethylpentene, polysulfone, polyetheretherketone, polyethersulfone, polyetherimide, polyimide, fluororesin, nylon, and acrylic resin. These resins may be used individually or in combination of two or more.

[0084] Furthermore, the above resin has a hard segment X and a soft segment Y, and it is preferable that the soft segment Y is a block copolymer composed of a random copolymer of linear structural units and structural units having side chains. The random presence of linear structural units that contribute to crystallinity and structural units that contribute to elongation within the soft segment Y that constitutes the block copolymer makes it easier to achieve both improved extensibility and fracture strength. In other words, the steric hindrance of structural units having side chains in the soft segment Y can be suppressed, and the extensibility due to the soft segment Y can be maintained. On the other hand, the presence of linear structural units in the soft segment Y allows the soft segment Y to form a crystalline structure between molecules when stretched, thereby increasing the cohesive force and improving the fracture strength. The above block copolymer is preferably a triblock copolymer or higher, as it allows the effects of both the hard segment X and the soft segment Y to be easily exhibited. Examples of such resins include styrene-based resins, which are styrene-based block copolymers having hard segments X and soft segments Y and / or hydrogenated thereof; urethane-based resins, which are urethane-based block copolymers having hard segments X and soft segments Y and / or hydrogenated thereof; and acrylic-based resins, which are acrylic-based block copolymers having hard segments X and soft segments Y and / or hydrogenated thereof. Among these, the block copolymer being a triblock copolymer is more preferable because it can achieve both excellent tensile strength due to cohesive force and elongation.

[0085] The above resin is preferably a thermoplastic resin, and among the above-mentioned resins, styrene-based resins, urethane-based resins, and acrylic-based resins are preferred from the viewpoint that they can be easily adjusted to suitable breaking stress and breaking elongation. The base material is preferably mainly composed of a resin selected from the group consisting of styrene-based resins, urethane-based resins, and acrylic-based resins, as it is easy to obtain a base material with excellent moldability and excellent breaking elongation and breaking stress. The content of the resin selected from the above group in 100% by mass of the total resin components constituting the base material is preferably 50% by mass to 100% by mass, more preferably in the range of 70% by mass to 100% by mass, more preferably in the range of 80% by mass to 100% by mass, even more preferably in the range of 90% by mass to 100% by mass, and particularly preferably substantially 100% by mass, that is, the base material is composed of the resin selected from the above group.

[0086] (Styrene resin) The styrene-based resin used as the base material can be any resin having structural units derived from aromatic vinyl compounds, and among these, a resin containing styrene-derived structural units represented by the following general formula (1) is preferred, and a styrene-based block copolymer is even more preferred because it results in a base material with a low elastic modulus in the low elongation range, high strength, and excellent elongation at break.

[0087] [ka]

[0088] The above-mentioned styrene-based resin preferably contains structural units derived from aromatic vinyl compounds, particularly structural units derived from styrene represented by the above general formula (1), in an amount of 5% to 75% by mass, more preferably in an amount of 5% to 50% by mass, even more preferably in an amount of 10% to 45% by mass, and particularly preferably in an amount of 10% to 40% by mass. This is because it is easier to obtain the elongation at break and stress at break of the substrate within a suitable range.

[0089] The above-mentioned styrene resin may have one or more functional groups such as carboxyl groups, hydroxyl groups, acid anhydride groups, amino groups, and epoxy groups in its molecular chain and / or at its molecular ends, as long as it does not impair the purpose and effect of the invention, or it may not have any functional groups. For example, the hydrogen atoms on the benzene ring of the above-mentioned styrene resin may be substituted with alkyl groups such as methyl and ethyl, and the number of substituted alkyl groups may be any of 1 to 5.

[0090] Among the styrene-based resins mentioned above, styrene-based block copolymers are preferred. This is because they have a low modulus of elasticity in the low elongation range, and can be used to create a substrate with high strength and excellent elongation at break. The styrene-based resin may consist of one type of styrene-based block copolymer, or it may be a mixture of two or more types of styrene-based block copolymers.

[0091] Styrene-based block copolymers are copolymers of aromatic vinyl compounds and conjugated diene compounds, and are copolymers and / or hydrogenated products thereof that include blocks mainly composed of aromatic vinyl compound units (hereinafter also referred to as polymer block (A)) and blocks mainly composed of conjugated diene compound units (also referred to as polymer block (B)). "Mainly composed of" means that, with the total mass of each polymer block being 100% by mass, the structural units contained in each polymer block constitute 50% by mass or more, preferably 70% by mass or more, more preferably 90% by mass or more, and even more preferably 95% by mass or more, and may be substantially 100% by mass.

[0092] The preferred range for the proportion of styrene-derived structural units represented by the general formula (1), etc., in the above-mentioned styrene-based block copolymer can be the same as the preferred range for styrene-derived structural units represented by the general formula (1), etc., in the above-mentioned styrene-based resin. This is because it becomes easier to obtain the elongation at break and stress at break of the substrate within a preferred range.

[0093] Specific compounds constituting polymer block (A) and polymer block (B) of the styrene-based block copolymer include, for example, aromatic vinyl compounds and conjugated diene compounds disclosed in Japanese Patent Application Publication No. 2022-094735.

[0094] The styrene-based block copolymer may be a styrene-based diblock copolymer, a styrene-based triblock copolymer, or a styrene-based block copolymer of tetrablocks or more. Furthermore, the styrene-based block copolymer may be a mixture of diblock copolymers and triblock copolymers. Among these, it is more preferable for the styrene-based resin to contain at least a styrene-based triblock copolymer, from the viewpoint of achieving both excellent cohesive strength and extensibility of the substrate.

[0095] Specific examples of styrene-based block copolymers include styrene-isoprene block copolymer, styrene-isoprene-styrene block copolymer, styrene-isoprene-butadiene-styrene block copolymer, styrene-butadiene-styrene block copolymer, styrene-ethylene-butylene block copolymer, and styrene-ethylene-propylene block copolymer. These may be used individually or in combination of two or more. An example of a mixture of the above is a mixture of styrene-isoprene block copolymer and styrene-isoprene-styrene block copolymer.

[0096] Furthermore, the above-mentioned styrene-based block copolymer may also be a hydrogenated styrene-based block copolymer. A hydrogenated styrene-based block copolymer refers to a copolymer in which the double bonds of the main chain of a styrene-based block copolymer are hydrogenated. In particular, a hydrogenated styrene-based block copolymer is preferred, which is composed of polymer block A mainly consisting of styrene compound units and polymer block B, which is a random copolymer composed of units with hydrogenated linear butadiene structures and units with hydrogenated isoprene structures. Since polymer block B has a random presence of linear structural units that contribute to crystallinity and structural units with side chains that contribute to elongation, it is easier to achieve both improved elongation and breaking strength of the tape.

[0097] Examples of the above-mentioned hydrogenated styrene-based block copolymers include hydrogenated products of the block copolymers listed above as specific examples of styrene-based block copolymers, specifically styrene-ethylene / butylene-styrene block copolymer (SEBS), styrene-ethylene-ethylene / propylene-styrene block copolymer (SEEPS), etc. The styrene-ethylene-ethylene / propylene-styrene block copolymer is a hydrogenated product of a block copolymer formed from styrene-butadiene-isoprene-styrene. The styrene-ethylene / butylene-styrene block copolymer is a hydrogenated product of styrene-isoprene / butadiene-styrene block copolymer. Among these, the hydrogenated product of styrene-isoprene-butadiene-styrene block copolymer is particularly preferred.

[0098] The content of styrene-based block copolymer in the substrate is preferably in the range of 100% to 50% by mass, more preferably in the range of 100% to 60% by mass, more preferably in the range of 100% to 70% by mass, even more preferably in the range of 100% to 80% by mass, particularly preferably in the range of 100% to 90% by mass, and may be substantially 100% by mass. This results in a substrate with a low modulus of elasticity in the low elongation range, high strength, and excellent elongation at break.

[0099] Styrene resins can be manufactured using known methods, and the manufacturing method can be appropriately selected depending on the type of styrene resin. For example, known methods can be used to manufacture styrene block copolymers, such as a method of sequentially polymerizing blocks by anionic living polymerization, or a method of manufacturing a block copolymer by first manufacturing a block copolymer having living active ends and then reacting it with a coupling agent. Furthermore, if the styrene resin is a mixture of two or more types of styrene block copolymers, it is also possible to manufacture the mixture simultaneously in a single polymerization step. For more specific manufacturing methods of various styrene resins, for example, methods disclosed in International Publication No. 2019-003933, Japanese Patent Application Publication No. 2022-094735, etc., can be used.

[0100] (Urethane resin) As the urethane resin used as the base material, a reaction product of polyol and polyisocyanate can be suitably used. Specifically, examples of the above reaction product include ester-based polyurethane, ether-based polyurethane, and polycarbonate-based polyurethane. One type of urethane resin may be used, or two or more types may be used in combination.

[0101] Polyols can be appropriately selected depending on the purpose, and examples include polyester polyols, polyether polyols, polycarbonate polyols, and acrylic polyols. One type of polyol may be used, or two or more types may be used in combination. Among these, polyester polyols and polyether polyols are preferred from the viewpoint of obtaining the mechanical properties of the substrate. When heat resistance is required for the substrate, polyester polyols are preferable, and when water resistance or biodegradability is required, polyether polyols are preferable.

[0102] Examples of the above-mentioned polyester polyols include polyesters obtained by esterifying a low molecular weight polyol with a polycarboxylic acid, polyesters obtained by ring-opening polymerization of cyclic ester compounds such as ε-caprolactone, and copolymer polyesters thereof.

[0103] Examples of the low molecular weight polyols mentioned above include aliphatic alkylene glycols such as ethylene glycol, propylene glycol, 1,4-butanediol, 1,6-hexanediol, diethylene glycol, neopentyl glycol, and 1,3-butanediol, and cyclohexanedimethanol, all of which generally have a Mw of approximately 60 to 280.

[0104] Examples of the polycarboxylic acids mentioned above include aliphatic dicarboxylic acids such as succinic acid, adipic acid, sebacic acid, and dodecanedicarboxylic acid; aromatic dicarboxylic acids such as terephthalic acid, isophthalic acid, phthalic acid, and naphthalenedicarboxylic acid; and their anhydrides or esterified products.

[0105] Examples of the above-mentioned polyether polyols include those obtained by addition polymerization of alkylene oxide using one or more compounds having two or more active hydrogen atoms as initiators.

[0106] Examples of the polycarbonate polyols mentioned above include polycarbonate polyols obtained by reacting a carbonate ester and / or phosgene with a low molecular weight polyol, as described later.

[0107] Examples of the above-mentioned carbonate esters include methyl carbonate, dimethyl carbonate, ethyl carbonate, diethyl carbonate, cyclocarbonate, and diphenyl carbonate.

[0108] Examples of low molecular weight polyols that can react with carbonate esters and / or phosgene and can be used in the production of the above polycarbonate polyols include ethylene glycol, diethylene glycol, triethylene glycol, tetraethylene glycol, 1,2-propanediol, 1,3-propanediol, dipropylene glycol, tripropylene glycol, 1,2-butanediol, 1,3-butanediol, 1,4-butanediol, 2,3-butanediol, 1,5-pentanediol, 1,5-hexanediol, 1,6-hexanediol, and 2,5-hexanediol. Examples include 1,7-heptanediol, 1,8-octanediol, 1,9-nonanediol, 1,10-decanediol, 1,11-undecanediol, 1,12-dodecanediol, 2-methyl-1,3-propanediol, neopentyl glycol, 2-butyl-2-ethyl-1,3-propanediol, 3-methyl-1,5-pentanediol, 2-ethyl-1,3-hexanediol, 2-methyl-1,8-octanediol, 1,4-cyclohexanedimethanol, hydroquinone, resorcinol, bisphenol A, bisphenol F, and 4,4'-biphenol.

[0109] Polyisocyanates can be appropriately selected depending on the purpose. For example, alicyclic polyisocyanates, aliphatic polyisocyanates, aromatic polyisocyanates, etc., can be used, with alicyclic polyisocyanates being a prime example. One type of polyisocyanate may be used, or two or more types may be used in combination.

[0110] Examples of the above-mentioned alicyclic polyisocyanates include isophorone diisocyanate, 1,3-bis(isocyanate methyl)cyclohexane, 4,4'-dicyclohexylmethane diisocyanate, 2,4-methylcyclohexane diisocyanate, 2,6-methylcyclohexane diisocyanate, cyclohexylene diisocyanate, methylcyclohexylene diisocyanate, bis(2-isocyanatoethyl)-4-cyclohexylene-1,2-dicarboxylate, 2,5-norbornane diisocyanate, 2,6-norbornane diisocyanate, dimer acid diisocyanate, and bicycloheptane triisocyanate. One type of alicyclic polyisocyanate may be used, or two or more types may be used in combination.

[0111] The above urethane resin preferably has an equivalent ratio (NCO / OH equivalent ratio) of isocyanate groups (NCO) of the polyisocyanate to hydroxyl groups (OH) of the polyol in the range of 1 to 20, more preferably in the range of 1.1 to 13, even more preferably in the range of 1.2 to 5, and particularly preferably in the range of 1.5 to 3.

[0112] As a method for producing urethane resins by reacting polyols and polyisocyanates, known methods can be used. For example, one method involves heating polyols placed in a reaction vessel under atmospheric pressure or reduced pressure to remove moisture, and then supplying polyisocyanates all at once or in portions to react. There are no particular restrictions on the reaction conditions between polyols and polyisocyanates, and they can be appropriately selected considering various conditions such as safety, quality, and cost. However, the reaction temperature is preferably 70°C to 120°C, and the reaction time is preferably 30 minutes to 5 hours.

[0113] When reacting polyols with polyisocyanates, catalysts such as tertiary amine catalysts and organometallic catalysts may be used as needed. Furthermore, the above reaction may be carried out in a solvent-free environment or in the presence of an organic solvent. Examples of organic solvents include ester solvents such as methyl acetate, ethyl acetate, propyl acetate, and butyl acetate; ketone solvents such as acetone, methyl ethyl ketone, methyl butyl ketone, and cyclohexanone; ether ester solvents such as methyl cellosolve acetate and butyl cellosolve acetate; aromatic hydrocarbon solvents such as toluene and xylene; and amide solvents such as dimethylformamide and dimethylacetamide. These may be used individually or in combination of two or more. The organic solvent may be removed during the production of the urethane resin or after the production of the polyurethane by appropriate methods such as reduced-pressure heating or atmospheric-pressure drying.

[0114] (Acrylic polymer) The acrylic polymer used as the base material is not particularly limited, but it is preferable that it includes an acrylic block polymer. The acrylic block copolymer may be a diblock copolymer, a triblock copolymer, or a block copolymer of tetrablock or more. Furthermore, two or more acrylic block copolymers with different block structures may be used in combination. Among these, acrylic triblock copolymers are more preferable because they can achieve both excellent tensile strength and elongation due to their superior cohesive force.

[0115] As the above-mentioned acrylic block copolymer, a triblock copolymer having repeating units represented by general formula (2) can be used.

[0116] [ka]

[0117] (In the above general formula (2), A, B, and C each independently represent a repeating unit, and A and C each independently represent an alkyl methacrylate monomer unit. B represents an alkyl acrylate monomer unit. p, q, and r each independently represent the degree of polymerization of each monomer unit. A and C may be alkyl methacrylate monomer units having the same chemical structure or alkyl methacrylate monomer units having different chemical structures. In the above general formula (2), * represents a bond with another atom, and the same applies hereinafter.)

[0118] In the above general formula (2), A and C each independently represent an alkyl methacrylate monomer unit. The term "alkyl methacrylate monomer unit" refers to the constituent units derived from the alkyl methacrylate monomer when the alkyl methacrylate monomer is (co)polymerized or graft polymerized, i.e., the repeating units derived from the methacrylate monomer. The alkyl methacrylate monomer unit is preferably the alkyl methacrylate monomer unit represented by the following general formula (3).

[0119] [ka]

[0120] (In the above general formula (3), R 1 R represents an alkyl group having 1 to 12 carbon atoms, and 1 or more hydrogen atoms in the alkyl group are substituents R 2 Substituent R may be substituted. 2 Examples include halogen atoms, amino groups, and cyano groups.

[0121] In the above general formula (3), R 1The alkyl group having 1 to 12 carbon atoms is preferred, an alkyl group having 1 to 4 carbon atoms is more preferred from the viewpoint of increasing the cohesiveness of the substrate and increasing the tensile strength, and an alkyl group having 1 or 2 carbon atoms is even more preferred. In addition, the alkyl group having 1 to 12 carbon atoms in the above general formula (3) may be linear, branched, or cyclic, but a linear or branched structure is preferred from the viewpoint of increasing cohesiveness and obtaining a substrate with high tensile strength, and a linear structure is more preferred.

[0122] In the above general formula (3), examples of alkyl groups having 1 to 12 carbon atoms include linear or branched alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, t-butyl, n-pentyl, isopentyl, hexyl, octyl, nonyl, decyl, undecyl, and dodecyl groups, as well as cyclic alkyl groups such as cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, dicyclopentanyl, and adamantyl groups. Of these, from the viewpoint of forming a substrate with high breaking strength, methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, t-butyl, or cyclobutyl groups are preferred, and methyl, ethyl, and propyl groups are more preferred. One or more hydrogen atoms in the above alkyl groups may be substituted with halogen atoms, amino groups, or cyano groups.

[0123] Examples of the alkyl methacrylate monomers mentioned above include methyl methacrylate, ethyl methacrylate, n-propyl methacrylate, isopropyl methacrylate, n-butyl methacrylate, isobutyl methacrylate, sec-butyl methacrylate, t-butyl methacrylate, n-pentyl methacrylate, isopentyl methacrylate, n-hexyl methacrylate, 2-ethylhexyl methacrylate, pentadecyl methacrylate, cyclohexyl methacrylate, lauryl methacrylate, tridecyl methacrylate, and 2-hexyldecyl methacrylate. Of these, methyl methacrylate is preferred.

[0124] In the above general formula (2), B represents an alkyl acrylate monomer unit. In this specification, "alkyl acrylate monomer unit" refers to a constituent unit derived from an alkyl acrylate monomer when an alkyl acrylate monomer is (co)polymerized or graft polymerized, i.e., a repeating unit derived from an acrylate monomer. The alkyl acrylate monomer unit is preferably an alkyl acrylate monomer unit represented by the following general formula (4).

[0125] [ka]

[0126] (In the above general formula (4), R 3 R represents an alkyl group having 1 to 12 carbon atoms, and 1 or more hydrogen atoms in the alkyl group are substituents R 4 Substituent R may be substituted. 4 (These are, for example, halogen atoms, amino groups, or cyano groups.)

[0127] In the above general formula (4), R 3 Alkyl alkyl groups having 1 to 12 carbon atoms are more preferred, and alkyl groups having 4 to 8 carbon atoms are even more preferred. In the above general formula (4), the alkyl group having 1 to 12 carbon atoms may be linear, branched, or cyclic, but linear or branched is preferred. The alkyl group having 1 to 12 carbon atoms is the same as the alkyl group exemplified in the above general formula (3).

[0128] Preferred R in the above general formula (4) 3The alkyl group is a linear or branched alkyl group such as a methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, t-butyl group, n-pentyl group, isopentyl group, hexyl group, octyl group, nonyl group, decyl group, undecyl group, or dodecyl group, or a cyclic alkyl group such as a cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclononyl group, cyclodecyl group, dicyclopentanyl group, or adamantyl group. One or more hydrogen atoms in the alkyl group may be substituted with a halogen atom, an amino group, or a cyano group.

[0129] Examples of the alkyl acrylate monomers mentioned above include methyl acrylate, ethyl acrylate, n-propyl acrylate, isopropyl acrylate, n-butyl acrylate, isobutyl acrylate, sec-butyl acrylate, t-butyl acrylate, amyl acrylate, isoamyl acrylate, n-hexyl acrylate, 2-ethylhexyl acrylate, and lauryl acrylate. Among these, n-butyl acrylate, 2-ethylhexyl acrylate, and copolymers thereof are preferred from the viewpoint of imparting elongation to the substrate.

[0130] In the general formula (2) above, p, q, and r each independently represent the degree of polymerization of each monomer unit. The values ​​of p, q, and r are related to the molecular weight, etc. p / (p+q+r) is preferably 0.02 to 0.40, and more preferably 0.05 to 0.37. q / (p+q+r) is preferably 0.20 to 0.95, and more preferably 0.25 to 0.90. r / (p+q+r) is preferably 0.02 to 0.40, and more preferably 0.05 to 0.37.

[0131] The above acrylic block copolymer is preferably an acrylic block copolymer having repeating units represented by the following general formula (5).

[0132] [ka]

[0133] (In the above general formula (5), R 1 and R 5 Each of these independently represents an alkyl group having 1 to 12 carbon atoms, and one or more hydrogen atoms in the alkyl group are substituents R 2 Substituent R may be substituted. 2 R is, for example, a halogen atom, an amino group, or a cyano group. 3 R represents an alkyl group having 1 to 12 carbon atoms, and one or more hydrogen atoms in the alkyl group are substituents R 4 The substituent R may be substituted. 4 (This is a halogen atom, an amino group, or a cyano group.)

[0134] In the above general formula (5), R 1 R in the above general formula (3) is 1 It is the same as above. In the general formula (5) above, R 3 This is R in the general formula (4) above. 3 It is the same as above. In the general formula (5) above, R 5 R in the above general formula (3) is 1 It is the same as above. Also, in the above general formula (5), p, q and r are the same as p, q and r in the above general formula (2). Furthermore, in the above general formula (5), R 1 and R 5 They may be the same or different.

[0135] When the above acrylic triblock copolymer is represented by the above general formula (5), R 1 From the viewpoint of enabling the substrate to exhibit high breaking strength, it is preferable to select from the group consisting of linear or branched alkyl groups such as methyl groups, ethyl groups, propyl groups, isopropyl groups, n-butyl groups, isobutyl groups, and t-butyl groups, as well as cyclobutyl groups. 3From the viewpoint of enabling the substrate to exhibit high elongation at break, it is preferable to select from the group consisting of methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, t-butyl group, n-pentyl group, isopentyl group, hexyl group, octyl group, nonyl group, decyl group, or undecyl group. 5 From the viewpoint of enabling the substrate to exhibit high breaking strength, it is preferable to select from the group consisting of linear or branched alkyl groups such as methyl groups, ethyl groups, propyl groups, isopropyl groups, n-butyl groups, isobutyl groups, and t-butyl groups, as well as cyclobutyl groups.

[0136] Preferred forms of the above acrylic triblock copolymer include polymethyl methacrylate block - polyacrylate n-butyl block - polymethyl methacrylate block, polyethyl methacrylate block - polyacrylate n-butyl block - polyethyl methacrylate block, polypropyl methacrylate block - polyacrylate n-butyl block - polypropyl methacrylate block, polymethyl methacrylate block - polyacrylate t-butyl block - polymethyl methacrylate block, and polymethyl methacrylate block - polyacrylate propyl block - polymethyl methacrylate block.

[0137] The above acrylic block copolymer may contain one or more of the above triblock copolymers, or one or more of the above diblock copolymers. Furthermore, a mixture of the above triblock copolymer and the above diblock copolymer can be used as the above acrylic block copolymer, and the content of the above diblock copolymer in the mixture can be appropriately selected depending on the purpose.

[0138] The weight-average molecular weight (hereinafter also referred to as "Mw") of the above acrylic block copolymer is preferably in the range of 50,000 to 300,000, more preferably in the range of 100,000 to 250,000, and even more preferably in the range of 130,000 to 230,000. Furthermore, the number-average molecular weight (hereinafter also referred to as "Mn") of the above acrylic block copolymer is preferably in the range of 50,000 to 300,000, more preferably in the range of 100,000 to 250,000, and even more preferably in the range of 130,000 to 230,000. In particular, the Mw of the above block copolymer is preferably in the range of 100,000 to 250,000 and the Mn is preferably in the range of 100,000 to 250,000, and the Mw of the above block copolymer is preferably in the range of 130,000 to 230,000 and the Mn is even more preferably in the range of 130,000 to 230,000. The preferred ranges for Mw and Mn of the acrylic triblock copolymer represented by general formulas (2) and (5) are the same as the above ranges.

[0139] The Mw and / or Mn of the above-mentioned acrylic block copolymer are preferably within the above ranges, from the viewpoint of obtaining a substrate with excellent elongation and tensile strength while also possessing moldability and solubility in solvents for obtaining a substrate with uniform thickness. In particular, it is preferable that Mw and Mn simultaneously satisfy the above ranges. If the Mw and Mn of the above-mentioned acrylic block copolymer are too small, it is difficult to obtain the elongation and tensile strength of the substrate. On the other hand, if the Mw and Mn are too large, it becomes difficult to dissolve in solvents, difficult to mold by heating and melting, and difficult to obtain the desired substrate.

[0140] The Mw and Mn of the above-mentioned acrylic block copolymer are measured by GPC using a GPC instrument (HLC-8329GPC, manufactured by Tosoh Corporation). The Mw and Mn values ​​are based on standard polystyrene equivalents, and the measurement conditions for the GPC method are the same as described above.

[0141] The above acrylic block copolymer may be modified as needed with functional groups such as hydroxyl groups, carboxyl groups, acid anhydride groups, amino groups, and trimethoxysilyl groups in the molecular side chains or at the molecular main chain ends.

[0142] The method for producing the above-mentioned acrylic block copolymer can be appropriately selected from conventionally known production methods, such as a method of sequentially polymerizing the block copolymer by anionic living polymerization or cationic living polymerization. Furthermore, if the block copolymer has stereoregularity such as syndiotacticity, known methods using organometallic complexes may be used.

[0143] When the resin constituting the substrate is an acrylic polymer, the acrylic polymer may be a cured product of the acrylic block copolymer. The cured product of the acrylic block copolymer can be formed, for example, by irradiating a composition containing an acrylic block copolymer, a polymerizable monomer, and a photopolymerization initiator with active energy rays such as ultraviolet light.

[0144] The polymerizable monomers mentioned above are not particularly limited as long as they can be polymerized by irradiation with active energy rays, but polyfunctional (meth)acrylates are preferred. The polyfunctional (meth)acrylates are not particularly limited, and known ones can be used. Examples include polyfunctional (meth)acrylates having two or more polymerizable double bonds in one molecule, such as 1,2-ethanediol diacrylate, 1,2-propanediol diacrylate, 1,4-butanediol diacrylate, 1,6-hexanediol diacrylate, dipropylene glycol diacrylate, neopentyl glycol diacrylate, tripropylene glycol diacrylate, trimethylolpropane diacrylate, trimethylolpropane triacrylate, tris(2-acryloyloxy) isocyanurate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, di(trimethylolpropane) tetraacrylate, di(pentaerythritol) pentaacrylate, and di(pentaerythritol) hexaacrylate. Furthermore, urethane acrylates, polyester acrylates, epoxy acrylates, etc., can also be exemplified as polyfunctional acrylates. These may be used individually or in combination of two or more. The polymerizable monomer is preferably 0.5 to 50 parts by weight, more preferably 1 to 40 parts by weight, 1.5 to 30 parts by weight, and 2 to 25 parts by weight, per 100 parts by weight of the acrylic block copolymer.

[0145] Examples of the above-mentioned photopolymerization initiators include carbonyl compounds such as acetophenones, benzophenones, Michler ketones, and benzoin; sulfur compounds such as tetramethylthiuram monosulfide and thioxanthones; phosphorus compounds such as acylphosphine oxides; titanium compounds such as titanocenes; and azo compounds. One type of photopolymerization initiator may be used alone, or two or more types may be used in combination. Among these, acetophenones and benzophenones are preferred. The content of the above-mentioned photopolymerization initiator is preferably 0.1 to 10 parts by mass, more preferably 0.1 to 7 parts by mass, and even more preferably 0.1 to 5 parts by mass, per 100 parts by mass of the acrylic block copolymer.

[0146] (Other ingredients) The substrate may contain other components as needed, in addition to the various resins described above. Examples of other components include tackifying resins, crosslinking agents, anti-aging agents, UV absorbers, fillers, polymerization inhibitors, surface modifiers, antistatic agents, defoamers, viscosity modifiers, light stabilizers, weather stabilizers, heat stabilizers, antioxidants, leveling agents, organic pigments, inorganic pigments, pigment dispersants, silica beads, organic beads, and other additives, as well as inorganic fillers. Examples of inorganic fillers include silicon dioxide, aluminum oxide, titanium dioxide, zirconia, and antimony pentoxide. These may be used individually or in combination of two or more. The amount of other components contained in the substrate can be appropriately selected within a range that does not impair the properties of the tape.

[0147] <Temporary fixed layer> The "temporary fixing layer" in temporary fixing tape is not particularly limited as long as it can fix a part (component) and the adhesion to the part can be released when the temporary fixing tape is stretched. Such a temporary fixing layer may be, for example, an adhesive layer that can temporarily fix a part by its tackiness (adhesion), or an adhesive layer that can temporarily fix a part by the suction cup function of numerous recesses formed on its surface. "Temporary fixing" refers to the ability to maintain a state in which the part is adhered to the tape, and is called "temporary fixing" because the part is fixed to the tape at least temporarily during the manufacturing process, although it may be permanently "fixed". The temporary fixing property of the temporary fixing tape is that the holding time measured by the "holding force" measurement method described in the Examples section below is 60 minutes or more.

[0148] The average thickness of the temporary fixing layer is preferably 1 μm or more, more preferably 10 μm or more, even more preferably 30 μm or more, and particularly preferably 40 μm or more. It is also preferably 500 μm or less, more preferably 300 μm or less, even more preferably 200 μm or less, and particularly preferably 100 μm or less. When the temporary fixing tape has temporary fixing layers on both sides of the substrate, the average thickness of the temporary fixing layer on one side of the substrate and the average thickness of the temporary fixing layer on the other side may be the same or different, but it is preferable that they be the same thickness.

[0149] The average thickness of the temporary fixation layer was determined by cutting the material to an arbitrary size and measuring the thickness at five points at 10 mm intervals in the length direction and five points at 10 mm intervals in the width direction using a dial thickness gauge (Ozaki Seisakusho Co., Ltd., model G-0.4N or model G-2.4N). The average of these 10 thicknesses was then used. If the temporary fixation layer is an adsorption layer, since the adsorption layer is fragile and difficult to isolate, the combined thickness of the temporary fixation layer and the release liner was measured using the release liner as a support, and the thickness was taken by subtracting the thickness of the support. In the case of an adsorption layer, areas on the surface of the adsorption layer where recesses are formed are assumed to be virtual surfaces. These virtual surfaces are located in the same plane as the plane in the cross-section of the adsorption layer where no recesses are formed.

[0150] <<Adhesive layer>> If the temporary fixing layer is an adhesive layer, the storage modulus G'(23°C) of the adhesive layer at 23°C is 1 × 10⁻⁶ 4 Pa or higher is preferred, and 1.5 × 10 4 Pa or higher is more preferable, 1.5 × 10 5 Pa or higher is even more preferable, 2 × 10 5 Pa or higher is particularly preferable. Also, 1 × 10 7 Preferably Pa or less, 1 × 10 6 Pa or less is more preferable, 9 × 10 5 Pa or less is even more preferable, 2 × 10 5A value of Pa or less is particularly preferred. By keeping the storage modulus G'(23°C) of the adhesive layer within the above range, peeling from the part can be suppressed even when stress is applied when processing a part (component) on the temporary fixing tape, for example, making it easier to achieve both the adhesive strength required for temporary fixing and the peelability due to stretching. The storage modulus G' of the adhesive layer is measured by stacking adhesive layers until the thickness reaches approximately 2 mm to form a test piece, attaching a 7.9 mm diameter parallel plate to a viscoelasticity tester (Rheometrics Ares 2kSTD), clamping the test piece, and measuring the value at a frequency of 1 Hz and 23°C.

[0151] Examples of adhesives that make up the adhesive layer include acrylic adhesives, silicone adhesives, urethane adhesives, and rubber adhesives. Among these adhesives, adhesives selected from acrylic adhesives, rubber adhesives, and urethane adhesives are preferred.

[0152] The adhesive resin, which is the main component of acrylic adhesives, contains one or more acrylic polymers. The acrylic polymer may be a block copolymer, a random copolymer, or a mixture of block copolymers and random copolymers. Furthermore, the acrylic polymer may have a crosslinked structure (it may be a reaction product of an acrylic copolymer and a crosslinking agent).

[0153] The above-mentioned acrylic block copolymer may be a diblock copolymer, a triblock copolymer, or a block copolymer of tetrablocks or more. Furthermore, the acrylic adhesive resin may use two or more acrylic block copolymers with different block structures in combination. In particular, it is preferable to use at least one of acrylic diblock copolymers and acrylic triblock copolymers, and it is more preferable to use an acrylic triblock copolymer because it is easier to obtain cohesive force and has excellent holding power. The preferred acrylic block copolymer can be the same as the acrylic block copolymers disclosed in, for example, International Publication No. 2021 / 149567, International Publication No. 2021 / 149568, International Publication No. 2021 / 149569, etc.

[0154] The above-mentioned acrylic random copolymer can be produced, for example, by polymerizing (meth)acrylate monomers. "(meth)acrylate" comprehensively refers to both acrylate and methacrylate. Similarly, "(meth)acryloyl" comprehensively refers to both acryloyl and methacryloyl, and "(meth)acrylic" comprehensively refers to both acrylic and methacrylic. Preferred acrylic random copolymers and their constituent monomers can be the same as those disclosed in, for example, International Publication No. 2019 / 003933, International Publication No. 2021 / 039877, International Publication No. 2021 / 039878, etc.

[0155] The adhesive resin, which is the main component of rubber-based adhesives, contains one or more types of rubber-based resins. The rubber-based resin may be synthetic rubber or natural rubber, and is a rubber material that can be used as an adhesive resin. Examples of rubber-based resins include non-diene rubbers and diene rubbers. Examples of non-diene rubbers include silicone rubber. Examples of diene rubbers include homopolymers of conjugated diene compounds and copolymers of conjugated diene compounds with other compounds. Examples of the above homopolymers include polybutadiene, polyisoprene, polyisobutylene, and chloroprene rubber. Examples of the above copolymers include acrylonitrile-butadiene rubber, styrene-butadiene rubber (SBR), and styrene-based resins.

[0156] Among the rubber-based adhesive resins, styrene-based resins are preferred. Among the styrene-based resins, styrene-based block copolymers are preferred, and among these, block copolymers of aromatic vinyl compounds and conjugated diene compounds are preferred, and block copolymers of monovinyl-substituted aromatic compounds and conjugated diene compounds are preferred. The monovinyl-substituted aromatic compound refers to a compound in which one functional group having a vinyl group is bonded to an aromatic ring. A typical example of the aromatic ring is a benzene ring. The benzene ring may also be a benzene ring substituted with a functional group that does not have a vinyl group, such as an alkyl group. The monovinyl-substituted aromatic compound constitutes the hard segment (A segment) in the block copolymer, and specific examples include styrene, α-methylstyrene, vinyltoluene, vinylxylene, etc. Styrene is preferred among these. The conjugated diene compound constitutes the soft segment (B segment) in the block copolymer, and specific examples include 1,3-butadiene, isoprene, etc.

[0157] The copolymerization ratio of the aromatic vinyl compound in the above styrene-based block copolymer is preferably 70% by mass or more, more preferably 90% by mass or more, and may be substantially 100% by mass, based on 100% by mass of the total mass of the block copolymer. Two or more aromatic vinyl compounds may be used in combination. Furthermore, the copolymerization ratio of the conjugated diene compound in the above styrene-based block copolymer is preferably 70% by mass or more, more preferably 90% by mass or more, and may be substantially 100% by mass, based on 100% by mass of the total mass of the block copolymer. Two or more conjugated dienes may be used in combination.

[0158] The block copolymer described above may take the form of a diblock, triblock, radial, or mixture thereof. Triblock and radial copolymers preferably have A segments, such as styrene blocks, at the ends of the polymer chains. The A segments at the ends of the polymer chains readily aggregate to form domains, which is thought to create a pseudo-crosslinked structure and improve the cohesiveness of the adhesive. The block copolymer may also be a hydrogenated block copolymer.

[0159] Examples of styrene-based block copolymers (including hydrogen block copolymers) of aromatic vinyl compounds and conjugated diene compounds include styrene-isoprene copolymer (SI), styrene-isoprene-styrene copolymer (SIS), styrene-isoprene-butadiene-styrene copolymer (SIBS), styrene-butadiene-styrene copolymer (SBS), styrene-ethylene-butylene-styrene copolymer (SEBS), and styrene-ethylene-propylene-styrene copolymer (SEPS). Among these, styrene-isoprene copolymers and mixtures of styrene-isoprene-styrene copolymers are particularly preferred because they exhibit good temporary fixation properties.

[0160] As the adhesive resin that forms the main component of the urethane-based adhesive, a urethane-based polymer, which is a reaction product of a polyol and a polyisocyanate, can be used. The urethane-based polymer is not particularly limited as long as it can function as an adhesive, and examples include ether-based polyurethane, ester-based polyurethane, and carbonate-based polyurethane. Examples of polyols that constitute the urethane-based polymer include polyether polyol, polyester polyol, polycarbonate polyol, and polycaprolactone polyol. Examples of polyisocyanate compounds include diphenylmethane diisocyanate, tolylene diisocyanate, and hexamethylene diisocyanate.

[0161] The adhesive constituting the adhesive layer may contain crosslinking agents such as isocyanate-based crosslinking agents, epoxy-based crosslinking agents, metal chelate-based crosslinking agents, and aziridine-based crosslinking agents, in addition to the adhesive resin described above. When a crosslinking agent is used, the gel fraction value, which is measured by the insoluble content after immersing the adhesive layer in toluene for 24 hours, is used as an indicator of the degree of crosslinking. The gel fraction of the adhesive layer can be set appropriately depending on the purpose, but from the viewpoint of obtaining an adhesive layer with good cohesiveness and adhesion, the gel fraction of the adhesive layer is preferably 10% by mass or more and 70% by mass or less, more preferably 25% by mass or more and 65% by mass or less, and even more preferably 35% by mass or more and 60% by mass or less. The gel fraction refers to the value measured by the method described below.

[0162] (Measurement method) An adhesive is applied to a release sheet so that the thickness after drying is 50 μm, dried at 100°C for 3 minutes, and aged at 40°C for 2 days. The resulting sheet is then cut into 50 mm squares and used as the sample. Next, the mass of the sample before immersion in toluene is measured. After immersion in toluene solution at 23°C for 24 hours, the toluene-insoluble portion of the sample is separated by filtration through a 300-mesh wire mesh, and the mass of the residue (G2) after drying at 110°C for 1 hour is measured. The gel fraction is determined according to the following formula (3). Gel fraction (mass %) = G2 / G1 × 100 ... (3) In formula (3) above, G1 is the mass of the sample before immersion in toluene, and G2 is the mass of the residue after drying at 110°C for 1 hour.

[0163] The adhesive constituting the adhesive layer may contain a tackifying resin in addition to the adhesive resin described above. Specific examples of the tackifying resin include rosin-based tackifying resins, polymerized rosin-based tackifying resins, polymerized rosin ester-based tackifying resins, rosin phenol-based tackifying resins, stabilized rosin ester-based tackifying resins, disproportionated rosin ester-based tackifying resins, hydrogenated rosin ester-based tackifying resins, terpene-based tackifying resins, terpene phenol-based tackifying resins, petroleum resin-based tackifying resins, and (meth)acrylate-based tackifying resins. Specific examples of tackifying resins include, for example, the tackifying resins disclosed in International Publication No. 2021 / 039877, International Publication No. 2021 / 039878, International Publication No. 2021 / 149567, International Publication No. 2021 / 149568, and International Publication No. 2021 / 149569. The content of the tackifying resin is preferably in the range of 5 to 65 parts by mass, and more preferably in the range of 8 to 55 parts by mass, per 100 parts by mass of the adhesive resin.

[0164] The adhesive constituting the adhesive layer may contain a filler in addition to the adhesive resin described above. During the stretching process of the temporary fixing tape, the filler is exposed from the adhesive layer, reducing the contact area with the part (component), allowing the tape to be peeled off more easily and quickly. The filler may be an inorganic filler made of inorganic materials such as metals, metal compounds, carbon, or graphite; an organic filler made of organic materials such as resin fillers; or an organic-inorganic composite filler such as a silicone resin filler. One type may be used, or two or more types may be used in combination. The filler may be hollow or solid, and may be a core-shell type in which a shell is formed on the surface of a core. Specifically, a core-shell type filler in which a shell made of silicone resin is coated on the surface of a core made of a rubber elastic material such as silicone rubber can be exemplified. Specific examples of fillers include the various fillers disclosed in International Publication No. 2021 / 039877, International Publication No. 2021 / 039878, International Publication No. 2021 / 149567, International Publication No. 2021 / 149568, International Publication No. 2021 / 149569, and others.

[0165] When the adhesive layer contains a filler, the filler content can be 5 parts by mass or more and 100 parts by mass or less per 100 parts by mass of the adhesive resin, from the viewpoint of dispersibility of the filler within the adhesive layer and suppression of adhesive residue generation. Preferably, it can be 10 parts by mass or more and 75 parts by mass or less, 12 parts by mass or more and 70 parts by mass or less, 15 parts by mass or more and 60 parts by mass or less, or 20 parts by mass or more and 55 parts by mass or less.

[0166] In addition to the materials mentioned above, the adhesive layer may also contain additives such as polymer components other than adhesive resins, crosslinking agents, antioxidants, UV absorbers, fillers, polymerization inhibitors, surface modifiers, antistatic agents, defoamers, viscosity modifiers, light stabilizers, weather stabilizers, heat stabilizers, antioxidants, leveling agents, organic pigments, inorganic pigments, pigment dispersants, plasticizers, softeners, flame retardants, metal deactivators, silica beads, organic beads, and other inorganic fillers such as silicon dioxide, aluminum oxide, titanium dioxide, zirconia, and antimony pentoxide.

[0167] <<Adsorption layer>> If the temporary fixing layer is an adsorption layer, numerous recesses are formed on the surface of the adsorption layer. These recesses exhibit a suction cup function, allowing the component (member) to be temporarily fixed. When the tape is stretched, the suction cup function is released, and the tape can be peeled off. The adsorption layer only needs to have recesses formed on at least the surface that adheres to the component, and recesses may be formed on both sides of the layer. In addition, while it is sufficient for the adsorption layer to have numerous recesses formed on at least the surface, it is preferable that micropores (also called voids or bubbles) are formed within the layer. The adsorption layer may have a closed-cell structure or a continuous-cell structure, but it is preferable to have a porous structure with a continuous-cell structure. Since the adsorption layer adheres to the component by its suction cup function, it usually does not have tackiness, but it may have tackiness by incorporating an adhesive resin or the like. It is preferable that it does not have tackiness because it is less likely to leave adhesive residue when the tape is stretched. The adsorption layer is also called a micro-suction cup layer due to the suction cup function of the recesses on its surface.

[0168] The average opening diameter of the recesses formed on the surface of the adsorption layer is not particularly limited as long as the recesses can exhibit a suction cup function on the surface of the adsorption layer, but can be, for example, 300 μm or less, preferably 250 μm or less, 200 μm or less, 150 μm or less, 120 μm or less, 100 μm or less, 80 μm or less, or 50 μm or less. Furthermore, the average opening diameter of the recesses is not particularly limited as long as the suction cup function can be exhibited, but can be, for example, 0.1 μm or more, preferably 0.5 μm or more, more preferably 1.0 μm or more, more preferably 5.0 μm or more, and even more preferably 10 μm or more. The average aperture diameter of the recesses refers to the average aperture diameter of the recesses when the adsorption layer is viewed from above. This value is calculated by using a desktop low-vacuum scanning electron microscope (SEM, Hitachi High-Technologies Corporation, "Miniscope™3030Plus") to take a magnified photograph of the adsorption layer surface at 100x magnification, measuring the aperture diameter of an arbitrary recess located in the center of the photograph and 30 recesses located in its vicinity, and then calculating the average value.

[0169] The number of recesses on one surface of the adsorption layer is, for example, 300 per unit area / cm². 2 More preferably, 500 pieces / cm² per unit area. 2 More preferably, 1000 pieces / cm² per unit area. 2 More preferably, 10,000 pieces / cm² per unit area. 2 The above is preferable. Furthermore, there is no particular upper limit to the number of recesses present on one surface of the adsorption layer, but from the viewpoint of the mechanical strength of the adsorption layer, the number of recesses should be 1,000,000 per unit area / cm². 2 The following is preferable: 500,000 pieces / cm 2 The following is preferable: 200,000 pieces / cm 2 The following is preferable: 100,000 pieces / cm 2 The following is preferable, and more preferably, 50,000 pieces / cm² per unit area. 2 The following is the method used: The number of depressions per unit area on the surface of the adsorption layer was determined by taking magnified images (100x magnification) of the surface of the adsorption layer using a desktop low-vacuum scanning electron microscope (SEM, Hitachi High-Technologies Corporation, "Miniscope™3030Plus"), and counting the number of depressions present in an arbitrary 0.5 mm × 0.5 mm square area, in cm². 2 It can be measured by converting it to the number of items per unit.

[0170] The aperture ratio of the recesses in a plan view of the adsorption layer is preferably 1% or more, more preferably 3% or more, even more preferably 5% or more, and particularly preferably 10% or more. There is no particular upper limit to the aperture ratio of the recesses, but for example, the aperture ratio of the recesses is 99% or less, and from the viewpoint of the mechanical strength of the adsorption layer, the aperture ratio of the recesses is preferably 90% or less, more preferably 80% or less, even more preferably 70% or less, even more preferably 60% or less, and particularly preferably 50% or less. The aperture ratio of the recesses refers to the ratio of the projected area of ​​the recesses to the area of ​​the surface of the adsorption layer when the adsorption layer is viewed in plan. The aperture ratio of the recesses was obtained by using an electron microscope (Keyence Corporation, Digital Microscope VHX6000) to photograph the surface of the adsorption layer at a magnification of 200x (auto brightness adjustment, 1.27 mm vertical x 1.7 mm horizontal), calculating the area of ​​the black portion of the image and the total area of ​​the image by software analysis, and then calculating the aperture ratio by dividing the area of ​​the projected black portion by the total area. In the image above, the black areas represent recesses formed on the surface of the adsorption layer, and the area of ​​the black areas corresponds to the projected area of ​​the recesses.

[0171] The apparent density of the adsorbent layer is, for example, 0.1 g / cm³. 3 More than 1.0g / cm 3 The following is possible, among others, 0.15 g / cm³ 3 More than 0.95g / cm 3 The following is preferable: 0.2 g / cm³ 3 More than 0.9g / cm 3 The following is more preferable: 0.3 g / cm³ 3 More than 0.85g / cm 3 The following is even more preferable. By keeping the apparent density of the adsorption layer within the above range, surface adhesion can be improved both initially and over time. The apparent density of the adsorption layer is a value calculated in accordance with JIS K6767, by preparing a test piece of the adsorption layer cut into a rectangle of 4 cm x 5 cm, measuring the mass [g] of the test piece, and determining the apparent volume (length x width x thickness) of the test piece [cm³]. 3 It is calculated by first calculating the volume and then dividing the mass by the apparent volume.

[0172] The resin constituting the adsorption layer is not particularly limited as long as it can exhibit the function of the adsorption layer, and examples include acrylic polymers such as acrylic polymers (including acrylic rubber), urethane resins (including urethane rubber), silicone resins (including silicone rubber), butadiene rubber (polybutadiene, acrylonitrile butadiene rubber, styrene butadiene rubber, methyl methacrylate butadiene rubber, etc.), polyisoprene, ethylene propylene rubber (EPR), ethylene propylene diene ternary copolymer rubber (EPDM), polynorbornene, nitrile rubber, chloroprene rubber, butyl rubber, halogenated butyl rubber, ethylene vinyl acetate rubber (EVA), fluororubber, ethylene acrylic rubber, polyester elastomer, epichlorohydrin rubber, polysulfide rubber, and other synthetic rubbers; natural rubber, chlorinated polyethylene, polyolefin (polyethylene), polystyrene, polyimide, polyvinyl chloride, polypropylene, polyester, phenolic resin, polyacetal resin, silicone resin; and polyolefin-based, polyurethane-based, polyester-based, polyamide-based, and polystyrene-based thermoplastic elastomers. The above resins may be used individually or in combination of two or more. Among them, resins selected from the group consisting of acrylic resin (acrylic polymer), butadiene rubber, and urethane resin are preferred from the viewpoint of exhibiting good flexibility and deformability and easily achieving a suction cup function. The resin constituting the above adsorption layer is preferably mainly composed of one or more resins selected from these groups, preferably containing 50% by mass or more, more preferably 80% by mass or more, even more preferably 90% by mass or more, and particularly preferably 100% by mass. Furthermore, the resin constituting the above adsorption layer is preferably rubber or elastomer from the viewpoint of exhibiting good flexibility and deformability and easily achieving a suction cup (adsorption) function.

[0173] The adsorption layer may contain crosslinking agents, tackifying resins, fillers, and other optional components, similar to the adhesive layer described above.

[0174] The adsorption layer can be formed, for example, by mechanically foaming a resin emulsion, then coating and heat-drying it. For example, if the resin constituting the adsorption layer is an acrylic polymer, an acrylic polymer adsorption layer can be formed by mechanically foaming a (meth)acrylic acid ester polymer emulsion and then heat-drying it. The above resin emulsion becomes a foamy resin emulsion by mechanically dispersing and mixing air bubbles into the resin emulsion, that is, by mechanically foaming the resin emulsion. The resin composition for forming the adsorption layer before mechanical foaming is referred to as "resin emulsion," and the resin composition for forming the adsorption layer after mechanical foaming is referred to as "foamy resin emulsion." The solid content concentration of the foamy resin emulsion is not particularly limited as long as it is possible to form the desired adsorption layer, and can be set as appropriate. For example, it is preferably in the range of 30% to 60% by mass, with the total amount of the foamy resin emulsion being 100% by mass. By keeping the solid content concentration of the foamy resin emulsion within the above range, the foamy state formed in the emulsion can be easily reproduced even after drying, and the bubble structure of the adsorption layer can be easily adjusted. Furthermore, the foaming ratio of the foamy resin emulsion can be, for example, 1.2 times or more and 4 times or less, preferably 1.5 times or more and 3.5 times or less, and more preferably 1.8 times or more and 3 times or less. The specific gravity of the foamy resin emulsion is, for example, 0.1 g / cm³. 3 More than 1.0g / cm 3 The following is possible, among others, 0.15 g / cm³ 3 More than 0.95g / cm 3 The following is preferable: 0.2 g / cm³ 3 More than 0.9g / cm 3 The following is preferable: 0.3 g / cm³ 3 More than 0.8g / cm 3 The following is even more preferable.

[0175] As for the mechanical treatment method of the resin emulsion, known methods can be used, such as known bubble generation methods (stirring and mixing methods) such as stirring and mixing the emulsion, or known methods for generating fine bubbles or microbubbles. Known methods for generating fine bubbles or microbubbles include methods that use generation principles such as entraining gas by fluidizing the liquid, or blowing gas into a stationary liquid. Examples of methods for fluidizing the liquid include swirling liquid flow type, static mixer type, ejector type, Venturi type, and pressurized dissolution type. Examples of methods for blowing gas into a stationary liquid include pore type, rotary type, ultrasonic type, vapor condensation type, and electrolysis type. Furthermore, there are no particular limitations on the equipment used for mechanical foaming of the resin emulsion, but examples include batch foamers, continuous foamers, and fine bubble generators. Examples of fine bubble generators include devices that generate bubbles from the pores of porous ceramics. Examples of gases introduced in mechanical foaming include air, nitrogen, and oxygen.

[0176] For temporary fixing tapes having an adhesive layer, the surface adhesive strength F1 one hour after application to the adherend is preferably in the range of 10N / 20mm to 300N / 20mm, more preferably in the range of 20N / 20mm to 200N / 20mm, and more preferably in the range of 30N / 20mm to 100N / 20mm. Furthermore, the surface adhesive strength F2 24 hours after application to the adherend is preferably in the range of 10N / 20mm to 300N / 20mm, more preferably in the range of 20N / 20mm to 200N / 20mm, and more preferably in the range of 30N / 20mm to 100N / 20mm. By having surface adhesive strengths F1 and F2 of the temporary fixing tape having an adhesive layer within the above ranges, the part to be temporarily fixed (adherend) can be held sufficiently, and the stress required when peeling due to stretching is not excessive, allowing for peeling with low elongation and low stress. Furthermore, the rate of change of surface adhesive strength F2 relative to surface adhesive strength F1 (=F2 / F1 × 100) is preferably 50% or more, more preferably 60% or more, even more preferably 70% or more, and particularly preferably 80% or more. On the other hand, the rate of change is preferably 210% or less, more preferably 200% or less, even more preferably 180% or less, even more preferably 160% or less, particularly preferably 140% or less, and most particularly preferably 120% or less. By keeping the rate of change of F2 relative to F1 within the above range, changes in surface adhesive strength over time are suppressed, and peeling can be performed with low elongation and low stress without excessive stress required for peeling by stretching. In addition, the occurrence of adhesive residue on the adherend due to the increase in surface adhesive strength over time can be suppressed. Surface adhesive strengths F1 and F2 can be measured by the method described in the examples below.

[0177] <Optional configuration> If the temporary fixing layer of the temporary fixing tape is an adsorption layer, an intermediate layer may be provided between the adsorption layer and the substrate. The intermediate layer can further improve the adhesion between the adsorption layer and the substrate. The intermediate layer is not particularly limited as long as it is a layer that can adhere the substrate and the adsorption layer, and examples include an adhesive layer, a primer layer, etc. The thickness of the intermediate layer is not particularly limited, but from the viewpoint of allowing the strain of the adsorption layer to occur suitably when the tape is stretched and peeled off and obtaining high adhesion between the substrate and the adsorption layer, it is preferably in the range of 0.01 μm to 100 μm, more preferably in the range of 0.1 μm to 50 μm, and more preferably in the range of 0.5 μm to 20 μm.

[0178] <<Removable Liner>> The temporary fixing tape may have a release liner. If the temporary fixing tape is double-sided, it is preferable to have a release liner on the side of the opposing main surfaces of the temporary fixing tape that is opposite to the surface on which the component (member) is placed. When peeling off a component by pressing a stretching member against the side of the temporary fixing tape opposite to the side on which the component is placed and pushing the temporary fixing tape towards the side on which the component is placed, having a release liner on the side of the temporary fixing tape opposite to the side on which the component is placed can suppress adhesion between the temporary fixing tape and the stretching member. The release liner is not particularly limited and known materials can be used, for example, paper, plastic film, polytetrafluoroethylene (PTFE) film, or plastic film with a release treatment applied to its surface such as silicone treatment or fluorosilicone treatment.

[0179] 2. Peeling Member The release member of this disclosure (hereinafter also referred to as "this release member") comprises a holding portion for holding a temporary fixing tape, a hollow portion formed by the holding portion, and an stretching means, wherein the holding portion is positioned so that the temporary fixing tape covers the hollow portion, and the stretching means has the function of stretching the surface of the temporary fixing tape covering the hollow portion in at least one direction. The member that is temporarily fixed to the temporary fixing tape is also referred to as a component.

[0180] Figures 10-17 are schematic diagrams showing an example of a specific embodiment of the release member. Each drawing will be described in detail later. This release member is preferably used to efficiently carry out the release method described in "1. Method for releasing temporary process tape" above. In other words, this release member is used to release temporary fixing tape that has an stretchable base material and a temporary fixing layer on one surface of the stretchable base material and can be released by stretching.

[0181] (holding part) The holding portion of this release member can hold the excess portion of the temporary fixing tape (for example, the end of the tape) and apply tension to the temporary fixing tape. The holding portion may be a movable holder. The holding portion (holder) may also have the function of stretching the temporary fixing tape in addition to the function of holding the temporary fixing tape. By having the holding portion also serve as a stretching means, the temporary fixing tape can be stretched in one or more stretching directions while being held.

[0182] The above-mentioned holding part is not particularly limited, but the holding parts exemplified in the section "1. Method for peeling off temporary fixing tape" can be used, and examples include a roll, a frame having a cavity such as a square or circular shape (e.g., a ring-shaped disc, an O-ring, etc.), a clip or other clamping device.

[0183] The material of the above-mentioned holding part (holding device) is not particularly limited as long as it does not hinder the stretching of the temporary fixing tape, and examples include metal, plastic, wood, and minerals, but metal or plastic is preferred from the viewpoint of corrosion resistance and impact on parts.

[0184] (Stretching means) The stretching means in this release member has the function of stretching the temporary fixing tape covering the hollow portion in at least one direction. The stretching means directly or indirectly stretches the area of ​​the temporary fixing tape that overlaps with the hollow portion. The stretching means only needs to have the function of stretching the temporary fixing tape, and may also serve as a holding part (holding device).

[0185] The stretching means described above may have the function of stretching in only one direction, or it may have the function of stretching the temporary fixing tape covering the hollow portion in one direction and at least one direction different from the above one direction. This is because it becomes possible to stretch the temporary fixing tape covering the hollow portion in multiple axes. In particular, it is preferable to have the function of stretching the temporary fixing tape covering the hollow portion in all directions. This is because the temporary fixing tape can be stretched uniformly in all directions, and multiple parts fixed in the area of ​​the temporary fixing tape that overlaps with the hollow portion in a plan view can be peeled off simultaneously and all at once.

[0186] In this release member, the stretching means may have the function of stretching the temporary fixing tape covering the hollow portion in two or more directions simultaneously, or it may have the function of stretching each direction sequentially. In this release member, the stretching means may have the function of stretching the temporary fixing tape covering the hollow portion simultaneously in a first stretching direction and in one or more directions different from the first stretching direction.

[0187] The peeling member may have one or more stretching means (stretching members). Examples of stretching means (stretching members) include those exemplified in section 1, "Method for peeling off temporary fixing tape," such as a roll, a stage that can be driven vertically within the hollow section, a convex pin that can be driven vertically within the hollow section, a clamping and moving unit that grips and expands the tape, and other expansion means used in conventional expandable devices. For example, Figure 13 shows an example where the stretching means 10 is a roll. Figures 11, 16, and 17 also show examples where the stretching means 10 is a stretching member that can be driven vertically within the hollow section and can pass through the hollow section and press the temporary fixing tape 100 covering the hollow section in the passing direction. In the above figures, the stretching member is a stage.

[0188] The stretching means (stretching member) 10 shown in Figures 11, 16, and 17 can be driven up and down within the hollow section, and the stretching means (stretching member) 10 presses the temporary fixing tape 100 from the side opposite to the side on which the component (member) 3 is placed, causing the temporary fixing tape 100 to protrude in a convex shape towards the side on which the component (member) 3 is placed. This stretches the temporary fixing tape 100, allowing it to be peeled off the component (member) 3. At this time, from the viewpoint of enabling the adhesion surfaces 4 between multiple components (members) 3 and the temporary fixing tape 100 to be pressed at once, it is preferable that the area of ​​the top of the stretching means (stretching member) that contacts the temporary fixing tape is larger than the surface area of ​​the surface of the component (member) on the opposite side of the temporary fixing tape from the stretching means that contacts the tape. If multiple components (members) are placed on the temporary fixing tape, it is even more preferable that the area of ​​the top of the stretching means (stretching member) is larger than the sum of the surface areas of the surfaces of the multiple components (members) that contact the tape.

[0189] If the stretching means is a stretching member (stage) that can be driven up and down within a hollow section, the portion of the stretching means (stretching member) that presses against the temporary fixing tape, for example, the top of the stretching means (stretching member), may be pointed or planar. In particular, a planar shape is preferred for the top of the stretching means (stretching member) from the viewpoint that a single stretching means (stretching member) can uniformly press the adhesive surfaces between multiple parts and the temporary fixing tape from the side opposite to the side on which the parts are placed. If the top of the stretching member has a surface, the planar shape of the surface can be appropriately selected from an ellipse, circle, triangle, quadrilateral, other polygons, etc.

[0190] If the stretching means (stretching member) is a stretching member that can be driven up and down within a hollow section, and the top of the stretching means (stretching member) is planar (i.e., if the stretching means is a stage that can be driven up and down within a hollow section), the top surface of the stretching means (stretching member) may be rough or smooth. Furthermore, the top surface of the stretching means (stretching member) may have a shape with irregularities, such as a matte or textured surface, or may be Teflon® coated to provide slipperiness. Furthermore, the top surface of the stretching member may be flat or curved. In particular, if the top surface of the stretching means (stretching member) is a rough, flat surface, when the temporary fixing tape is pushed out toward the mounting surface of the part by the drive of the stretching means, contact between the tape and the stretching means is more likely to occur locally at the edges (corners) of the top surface rather than the top surface, making it easier for slippage to occur between the tape and the top of the stretching means, thus making it easier to stretch the temporary fixing tape.

[0191] Furthermore, when the stretching means (stretching member) is a stretching member (stage) that can be driven up and down within the hollow portion, it is preferable that the stretching means (stretching member) has an outer periphery (rim) and a hollow region inside the outer periphery (rim) in plan view. At the top surface of the stretching means (stretching member), the contact area between the temporary fixing tape and the stretching means (stretching member) becomes smaller, making it easier to stretch the temporary fixing tape. Examples of the plan view shape of the outer periphery include a circular shape (annular), a triangular shape, a square shape, a polygonal shape with pentagons or more (polygonal frame shape), etc. When the plan view shape of the surface adhesive force is polygonal, it is preferable that the corners have curvature from the viewpoint of suppressing tape tearing due to contact with the outer periphery during stretching. In particular, it is preferable that the outer periphery (rim) is an annular shape with a hollow region inside, because it can be stretched uniformly in all directions. An example of a shape having an outer periphery (rim) and a hollow region inside the outer periphery (rim) as described above is a spoke shape. The planar shape of the cavity region is not particularly limited and can be set as appropriate depending on the shape of the outer perimeter, such as a circle or polygon.

[0192] Figure 18 is a schematic diagram showing an example of an extension means (extension member), where Figure 18(a) is a side view and Figure 18(b) is a top view. The extension means (extension member) 10 shown in Figure 18 is an annular shape in plan view, having an outer periphery (rim) 21 and a hollow region 22 inside the outer periphery (rim) 21, and is a so-called spoke shape. The hollow region 22 is the area surrounded by the outer periphery (rim) 21.

[0193] Furthermore, when the stretching means (stretching member) is an annular shape in plan view, having an outer periphery and a hollow region inside the outer periphery, it is preferable that a part of the surface of the outer periphery is covered by a covering portion that is rotatable along the outer surface of the outer periphery. Figure 19 is a schematic diagram showing an example of a stretching means (stretching member), where Figure 19(a) is a side view, Figure 19(b) is a top view, and Figure 19(c) is a cross-sectional view of line XX in Figure 19(b). In the stretching means (stretching member) 10 shown in Figure 19, a part of the surface of the outer periphery 21 of the stretching means (stretching member) 10 shown in Figure 18 is covered by a plurality of covering portions 25, and as shown in Figure 19(c), the covering portions 25 are rotatable about the central axis in the cross-section of the outer periphery 21. In other words, the covering portions 25 are rotatable along the outer surface of the outer periphery 21. The arrows in Figure 19(c) represent the rotation of the covering portions 25. The cross-sectional shape of the outer periphery (rim) is preferably circular so that the covering portion that covers the surface of the outer periphery (rim) can rotate along the outer surface of the outer periphery (rim). It is more preferable that the covering portion has a rough surface, as this can further improve the stretchability of the temporary fixing tape. It is also preferable that the covering portion is made of a low-adhesion material such as olefin resin, fluororesin, or Teflon®. The covering portion covers at least a part of the outer periphery, but it may cover the entire outer periphery as long as it can rotate along the outer surface of the outer periphery (rim).

[0194] In Figures 18 and 19, reference numeral 23 denotes a support column that supports the extension member in the vertical direction, and reference numeral 24 denotes a frame that connects the support column and the extension member.

[0195] When the stretching means (stretching member) is a stretching member (e.g., a stage, a convex pin, etc.) that can be driven up and down within the hollow part, the vertical movement distance of the stretching means (the distance the tape is pushed out by the stretching means) when the part (member) is peeled off from the temporary fixing tape is not particularly limited, but can be, for example, 500 mm (50 cm) or less. In particular, even if the movement distance of the stretching means (the distance the tape is pushed out by the stretching means) is small, peeling of the part due to stretching of the temporary fixing tape can occur. From the viewpoint of operability and simplification of the peeling process, 300 mm (30 cm) or less is preferred, 200 mm (20 cm) or less is more preferred, and 100 mm (10 cm) or less is even more preferred. When the movement distance of the stretching means (the distance the tape is pushed out by the stretching means) when the part (member) is peeled off from the temporary fixing tape is preferably as small as possible, but in order to balance with temporary fixing properties, 5 mm or more is preferred, and 10 mm or more is more preferred. The vertical movement distance of the stretching means (stretching member) when a part (member) is peeled off the temporary fixing tape (the distance the tape protrudes due to the stretching means) is the distance traveled from the position S where the top of the stretching means (stretching member) 10, represented by the symbol h in Figure 22, contacts the lower surface of the temporary fixing tape 100 placed on a horizontal plane (position before stretching), until the part 3 is peeled off the temporary fixing tape 100. It is preferable to adjust the physical properties of the temporary fixing tape applied to this peeling member, such as the elongation at peeling, taking the above movement distance into consideration.

[0196] The material of the stretching means (stretching member) described above is not particularly limited as long as it does not hinder the stretching of the temporary fixing tape, and may be metal, plastic, wood, or mineral. From the viewpoint of corrosion resistance and impact on the material, metal or plastic is preferred.

[0197] (hollow part) In this release member, the hollow portion is formed by the holding portion. The hollow portion corresponds to the area surrounded by the holding portion. For example, as shown in Figure 12, if two holders 9 are arranged in parallel with space between them, the area sandwiched between the two holding portions (holders) 9 corresponds to the hollow portion. Also, as illustrated in Figure 14, if the holding portion (holder) 9 is ring-shaped, i.e., a frame, the inside of the frame (ring) corresponds to the hollow portion. In plan view, the hollow portion may be an open system as shown in Figure 12, or a closed system as shown in Figure 14.

[0198] The planar shape of the hollow section is not particularly limited and can be appropriately selected from, for example, an ellipse, circle, triangle, quadrilateral, or other polygon. The size of the hollow section in plan view is also not particularly limited, but it is preferably large enough to encompass the components fixed to the temporary fixing tape in plan view. If there are multiple components fixed to the temporary fixing tape, it is preferable that the hollow section be large enough to encompass all of them.

[0199] (Specific aspects of the release member) Figures 12 and 13 are top views showing an example of a specific embodiment of the release member. A specific embodiment of the release member, for example, as shown in Figure 12, includes a stretching member as the stretching means 10 and a holder as the holding part 9, with the holding part (holder) 9 forming a hollow section (not indicated by a reference numeral). The temporary fixing tape 100 (dotted line portion in Figure 12) is positioned to cover the hollow section.

[0200] The stretching means (stretching member) 10 may be a pair of rolls, as illustrated in Figure 13. The rolls, which are the stretching means (stretching member), can stretch the area located in the hollow part of the temporary fixing tape while holding the temporary fixing tape, for example, by winding up the temporary fixing tape. Alternatively, the rolls, which are the stretching means (stretching member), may have the function of holding the end of the temporary fixing tape, and both or one of the stretching means (stretching member) may be movable to stretch the temporary fixing tape.

[0201] In Figures 12 and 13, one or both sides of the holding portion (holder) 9 may be movable, and the holding portion (holder) 9 may have the function of stretching the temporary fixing tape in a direction different from the stretching direction by the stretching means (stretching member) 10. By having the holding portion (holder) perform the same function as the stretching means (stretching member), the release member can stretch the temporary fixing tape biaxially in a plan view, and the adhesion state with the part can be released by stretching the tape.

[0202] Another preferred embodiment of this release member is exemplified by a release member comprising a holding portion (holder) 9 and a stretching means (stretching member) 10 having a holding function, as shown in Figure 10. The holding portion (holder) 9 is ring-shaped, for example, as shown in Figure 14, and has a hollow portion inside on which the adhesive surface 4 between the part (not shown) and the temporary fixing layer is located. In the example shown in Figure 10, the temporary fixing tape 100 is attached to the holding portion (holder) 9 so as to cover the hollow portion of the holding portion (holder) 9, and the excess portion of the tape is placed on the opposite side from the part 3 via the holding portion (holder) 9 (so as to cover a part of the surface of the holder 9). The end of the temporary fixing tape 100 is held by a movable stretching member 10 that has a holding function, and by moving the stretching member 10 in the direction opposite to the part 3 (the direction indicated by arrow Y in Figure 10), the adhesive surface between the part 3 and the temporary fixing layer is stretched in all directions in the plane, and the temporary fixing tape 100 is peeled off from the part 3.

[0203] In this release member, it is preferable that the stretching means passes through the hollow portion and has a stretching member that presses the temporary fixing tape covering the hollow portion in the passing direction. Another preferred embodiment of this release member is a release member having two holding portions (holders) 9, 9' and a stretching member 10, as shown in Figure 11. In the example shown in Figure 11, the temporary fixing tape 100 is attached to the holding portion (holder) 9 so as to cover the hollow portion of the holding portion (holder) 9, the excess portion of the tape is positioned on the opposite side from the mounting surface of the part 3 via the holding portion (holder) 9, and the end of the tape is fixed by the holding portion (holder) 9'. In the hollow section described above, the stretching means (stretching member) 10 is positioned on the side of the temporary fixing tape 100 opposite to the side on which the part 3 is placed. The stretching means (stretching member) 10 is moved in the direction indicated by arrow Y in Figure 11 (the direction in which the stretching means passes through the hollow section), and the stretching means (stretching member) 10 is pressed from the back side of the adhesive surface between the part 3 and the temporary fixing layer toward the part 3 side. As a result, the adhesive surface located in the hollow section is stretched in all directions within the plane, and the part 3 is peeled away from the temporary fixing tape 100.

[0204] In Figure 11, one holding part (holder) 9' holds and fixes the end of the temporary fixing tape 100. However, as shown in Figures 15 and 16, for example, the temporary fixing tape 100 may be positioned to cover the hollow portion formed by the holding part (holder) 9, the excess portion of the temporary fixing tape 100 may be folded over the holding part (holder) 9, and the excess portion may be pressed by the holding part (holder) 9' located on the side of the temporary fixing tape 100 where the component 3 is placed, with the excess portion and the adhesive surface positioned parallel to each other. In the same manner as in Figure 11, by moving the stretching member 10 so that the stretching member 10 protrudes from the back side of the adhesive surface 4 between the component 3 and the temporary fixing layer (opposite side from the component placement surface of the temporary fixing tape 100) toward the component 3 side (component placement side), the adhesive surface 4 is stretched in all directions within the plane, and the component 3 is peeled off from the temporary fixing tape 100. Note that Figure 16 is a cross-sectional view taken along line A-A' in Figure 15.

[0205] Another embodiment of this release member, as shown in Figure 17, involves pressing the excess portion of the temporary fixing tape 100 with the holding part (holding device) 9 from the side of the temporary fixing tape 100 where the component 3 is placed (the adhesive surface 4 between the component 3 and the temporary fixing tape 100), covering the hollow portion of the holding part (holding device) 9 with the temporary fixing tape 100, and moving the stretching member 10 so that it protrudes from the back side of the adhesive surface 4 between the component 3 and the temporary fixing layer (the side opposite to the component placement surface of the temporary fixing tape 100) toward the component 3 side (component placement side). This stretches the adhesive surface 4 in all directions within the plane, and the component 3 is peeled off from the temporary fixing tape 100.

[0206] In Figures 16 and 17, part (member) 3 is placed on the upper surface of the temporary fixing tape 100, and the direction of tension is downward relative to the temporary fixing tape 100. However, part (member) 3 may also be placed on the lower surface of the temporary fixing tape 100. When part (member) 3 is placed on the lower surface of the temporary fixing tape 100, the stretching means (stretching member) 10 is positioned on the upper side of the temporary fixing tape 100, and the temporary fixing tape 100 is pressed from the upper side by the stretching means (stretching member) 10 to push the temporary fixing tape 100 out to the opposite side (face side), thereby directing the direction of tension upward relative to the temporary fixing tape 100. This allows for the same operation as in Figures 16 and 17.

[0207] Of the above-mentioned release members, the release members schematically shown in Figures 10, 11, and 13 to 17 are preferred from the viewpoint that they can be uniformly stretched in all directions within the adhesive surface between the temporary fixing tape and the part, and can be suitably used in a method that performs stretching in all directions simultaneously. Furthermore, the release members schematically shown in Figures 14 to 17 are preferred from the viewpoint that they enable the continuous peeling of the temporary fixing tape, allowing parts to be adhered to multiple locations on a long piece of temporary fixing tape, and thus improving the efficiency of the peeling work.

[0208] In a method for manufacturing parts (a method for processing a component (workpiece)), by using this peeling member and performing this peeling method, the part can be peeled from the temporary fixing tape simply by stretching the temporary fixing tape. The part peeled from the temporary fixing tape is further separated from the temporary fixing tape by a desired separation method. The separation method is not particularly limited, but may be any method such as suction, clamping, or sweeping, or separation by the part's own weight falling. When separation is performed by suction, suction means include suction cups, suction machines, suction collets, etc. When separation is performed by clamping, tweezers, clamps, etc., may be used. When separation is performed by sweeping, swing plates, air pressure, brushes, etc., may be used.

[0209] This release member is appropriately installed at a desired position in accordance with the parts manufacturing equipment and parts (components) manufacturing method described later. When the parts are separated from the temporary fixing tape by their own weight, it is preferable to install the release member so that the adhesive surface between the parts and the temporary fixing layer is parallel to the vertical direction, or the parts are facing downwards.

[0210] Furthermore, the details of this release material include not only the details described in this section, but also the information described in "1. Method for removing temporary fixing tape" and subsequent sections.

[0211] 3. Parts manufacturing equipment The parts manufacturing apparatus of this disclosure (hereinafter sometimes referred to as "the manufacturing apparatus") is equipped with a release member as described in "2. Release Member" above. The manufacturing apparatus can efficiently manufacture parts because the above-described release member is incorporated into the manufacturing apparatus. The parts manufactured by the manufacturing apparatus may be referred to as components or processed products, etc.

[0212] The parts (components, processed products) manufactured by this manufacturing apparatus are not particularly limited, but examples include electronic components such as semiconductor wafers, multilayer ceramic capacitors, inductors, and various chip components. Among these electronic components, micro-components (ultra-small electronic components) can be efficiently manufactured by this manufacturing apparatus. Furthermore, this manufacturing apparatus can also be used as a manufacturing apparatus for optical components such as optical glass and polarizing plates.

[0213] The surface area of the surface of the component (member) fixed to the temporary fixing tape is not particularly limited, but the smaller it is, the easier it is to achieve the effects of the invention of the present disclosure. The above surface area can be, for example, 500 mm 2 or less, and 100 mm 2 or less is preferable, 50 mm 2 or less is preferable, 30 mm 2 or less is preferable, 10 mm 2 or less is preferable, 3 mm 2 or less is preferable, 1 mm 2 or less is preferable, 0.8 mm 2 or less is preferable, 0.5 mm 2 or less is preferable, 0.2 mm 2 or less is preferable. Also, the lower limit value of the above surface area is not particularly limited, but for example, 0.001 mm 2 or more, preferably 0.005 mm 2 or more, preferably 0.01 mm 2 or more, preferably 0.05 mm 2 or more. Among them, for micro components (ultra-small electronic components), it is preferable that the surface area of the surface (adhesive surface) fixed to the temporary fixing tape is at a size of millimeter level or less, and more preferably at a micro level size. More specifically, for micro components (ultra-small electronic components), components having a size including the dimensional size defined in JIS C 5101-22:2014 (IEC 60384-22:2011) are preferable. Among them, the size of the surface area of the surface of the micro component (ultra-small electronic component) fixed to the temporary fixing tape is preferably 1 mm 2 or less, more preferably 0.8 mm 2 or less, and even more preferably 0.5 mm 2 or less.

[0214] In addition to the above-described peeling member, the manufacturing apparatus may have one or more other functions. The other functions are not particularly limited, and examples thereof include a processing function for performing processing such as cutting, polishing, cutting, etching, etc., a pressing function for pressing a component against a temporary fixing tape, a transfer function for transferring a component from a temporary fixing tape to another adherent, a manufacturing function for manufacturing a component, an assembling function for assembling components together, a joining function for joining a component and another component, and the like. A member manufacturing apparatus having these functions can complete the process from the start to the completion of a component on a temporary fixing tape with a single apparatus.

[0215] In the manufacturing apparatus, the temporary fixing tape used for fixing components is preferably the tape described in the section "1. Method for Peeling the Temporary Fixing Tape".

[0216] In addition to the details described in this section, the details of the present manufacturing method also include the content described in the above "1. Method for Peeling the Temporary Fixing Tape", "2. Peeling Member", and each subsequent section.

[0217] 4. Method for Manufacturing Components The method for manufacturing components of the present disclosure (hereinafter sometimes referred to as the present manufacturing method) has at least a peeling step of peeling a component fixed on a temporary fixing tape using the method for peeling the temporary fixing tape described in the section "1. Method for Peeling the Temporary Fixing Tape" above. The component obtained by the present manufacturing method may be a processed workpiece or an unprocessed workpiece to be processed.

[0218] FIG. 20 is a process diagram showing an example of the method for manufacturing components of the present disclosure. A component 3 is fixed on a temporary fixing layer (not shown) of a temporary fixing tape 100, and the component 3 is peeled from the temporary fixing tape 100 by stretching the temporary fixing tape 100 in one direction P (FIGS. 20(a) and (b)).

[0219] According to this manufacturing method, since a large number of parts can be peeled off from the temporary fixing tape at once just by stretching the temporary fixing tape from the state where the parts are fixed to the temporary fixing tape, heating, irradiation with energy rays, etc. are not required when peeling off the parts, and the peeling process in part manufacturing can be performed simply and easily. Furthermore, the occurrence of contamination of parts such as adhesive residue can be suppressed.

[0220] As an example of this manufacturing method, it includes a processing step of processing one or more workpieces (members) on the temporary fixing tape to obtain one or more processed products, and a peeling step of peeling the processed products from the temporary fixing tape. The temporary fixing tape has an extensible base material and a temporary fixing layer on one surface of the extensible base material, and is peelable by stretching. In the peeling step, a method of stretching the temporary fixing tape in at least one direction by stretching means to peel the processed products can be mentioned. The processed products correspond to the parts after processing in the sections of "2. Peeling member" and "3. Part manufacturing apparatus" above.

[0221] According to this manufacturing method, after processing the workpiece (member) on the temporary fixing tape and then stretching the temporary fixing tape, a large number of processed products can be peeled off from the temporary fixing tape at once. Also, according to this manufacturing method, since the fixing of the processed products can be released just by stretching the tape, heating, irradiation with energy rays, etc. are not required when peeling off the processed products, the peeling process can be performed simply and easily, and furthermore, the occurrence of contamination of the processed products such as adhesive residue can be suppressed.

[0222] The temporary fixing tape used in this manufacturing method and its peeling method are the same as the content described in the section of "1. Peeling method of temporary fixing tape" above, so the description here is omitted. Also, the parts that can be manufactured in this manufacturing method are not particularly limited and are as already described, so the description here is omitted. The parts peeled off from the temporary fixing tape in the peeling step may be processed (may be processed products), or may not be processed (may be workpieces).

[0223] In the peeling step described above, the component is peeled from the temporary fixing tape using the peeling method described in section "1. Method for peeling off temporary fixing tape". In the peeling step, it is preferable to use the peeling member described in section "2. Peeling member".

[0224] If the manufacturing method further includes the processing steps described later, in the peeling step, the part processed by the processing steps (also referred to as the processed product or the processed component) is peeled from the temporary fixing tape using the peeling method described in section "1. Method for peeling off temporary fixing tape". In the peeling step, it is preferable to use the peeling member described in section "2. Peeling member".

[0225] After the peeling process, the parts peeled from the temporary fixing tape are separated from the temporary fixing tape. The method for separating the parts peeled from the temporary fixing tape is not particularly limited, and the separation method described in section "2. Peeling Member" above for separating parts from temporary fixing tape can be used. The parts may be further sent to the other processes described above.

[0226] In this manufacturing method, in the peeling step, another adherend may be placed on the side of the component opposite to the adhesive surface with the temporary fixing tape, and the temporary fixing tape may be peeled off the component from the composite having the temporary fixing tape, component, and other adherend in this order using the peeling method described above, while simultaneously transferring the component from the temporary fixing tape to the other adherend. In other words, the peeling step may include a transfer step. Figure 21 is a process diagram showing another example of this manufacturing method, in which another adherend 200 is placed on the side of component 3 opposite to the adhesive surface with the temporary fixing tape 100 (Figure 21(a)), and the temporary fixing tape 100 can be stretched to peel off component 3 from the composite having the temporary fixing tape 100, component 3, and other adherend 200 in this order, while simultaneously transferring component 3 to the other adherend 200 (Figures 21(b) and (c)).

[0227] The other adherend to which the parts are transferred is not particularly limited as long as the transferred parts can be fixed directly or indirectly, and examples include adhesive tape, tack tape, other parts to which adhesive has been applied.

[0228] This manufacturing method only needs to include the peeling step described above, but it may also include other steps. For example, this manufacturing method may include a processing step before the peeling step in which the part (also called the workpiece or pre-processing component) temporarily fixed on the temporary fixing tape is processed. The type of processing applied to the part is not particularly limited and includes cutting, polishing, cutting, etching, etc., as already explained in section 3. Part Manufacturing Apparatus. The pre-processing part (workpiece) and the processed part (processed component) have already been explained, so their explanation is omitted here.

[0229] The method for manufacturing this part is not particularly limited as long as the peeling process described above can be performed at least, but the part can be manufactured efficiently by using the apparatus described in section 3, "Part Manufacturing Apparatus."

[0230] The parts obtained by this manufacturing method are not particularly limited, and include the parts already described in section 3, "Parts Manufacturing Equipment." Among these, it is preferable that the parts are electronic components, such as multilayer ceramic capacitors and various chips. Furthermore, the size of the parts obtained by this manufacturing method is not particularly limited, and the sizes already described can be appropriately selected, but among these, a surface area of ​​100 mm² on the surface in contact with the temporary fixing tape is preferable. 2 (1cm 2 It is preferable that the values ​​be less than or equal to the values ​​shown. This is because the effects of the peeling process in this manufacturing method are more pronounced.

[0231] 5. Others This disclosure includes the following aspects: [1] A method for peeling off a temporary fixing tape on which one or more members are temporarily fixed to the surface, wherein the temporary fixing tape has an extendable base material and a temporary fixing layer on at least one surface of the extendable base material and is peelable by stretching, the members are temporarily fixed to the temporary fixing layer, and the temporary fixing tape is peeled off from the members by stretching means to stretch the temporary fixing tape in at least one direction. [2] The method for peeling off a temporary fixing tape according to [1], wherein the stretching means simultaneously or sequentially stretches the temporary fixing tape in the one direction and one or more directions different from the one direction. [3] A method for peeling off a temporary fixing tape according to [1] or [2] above, wherein the stretching means stretches the temporary fixing tape in two different directions, and the two directions form an angle of approximately 90°. [4] A method for peeling off a temporary fixing tape according to any one of [1] to [3] above, wherein the stretching means stretches the temporary fixing tape in all directions. [5] A method for peeling off temporary fixing tape according to any one of [1] to [4] above, wherein the stretching means applies tension horizontally to the adhesive surface between the member and the temporary fixing layer. [6] A method for peeling off temporary fixing tape according to any one of [1] to [5] above, wherein the stretching means applies tension to the adhesive surface between the member and the temporary fixing layer in the direction opposite to the side on which the member is placed. [7] A method for peeling off a temporary fixing tape according to any one of [1] to [6] above, wherein the direction of tension is 90° or less with respect to the adhesive surface. [8] A method for peeling off a temporary fixing tape according to any one of [1] to [7] above, wherein when the temporary fixing tape is stretched in one direction by the stretching means, the length of the stretched temporary fixing tape in a direction substantially perpendicular to the one direction is 0.9 or more than the length of the temporary fixing tape before stretching in a direction substantially perpendicular to the one direction. [9] A method for peeling off temporary fixing tape according to any of [1] to [8] above, wherein the member is an electronic component.

[10] A release member for a temporary fixing tape, comprising a holding portion for holding a temporary fixing tape, a hollow portion formed by the holding portion, and a stretching means, wherein the holding portion is positioned such that the temporary fixing tape covers the hollow portion, and the stretching means has the function of stretching in at least one direction within the surface of the temporary fixing tape covering the hollow portion.

[11] The temporary fixing tape release member according to

[10] , wherein the stretching means further has a stretching function to stretch the temporary fixing tape covering the hollow portion in at least one direction different from the one direction.

[12] The temporary fixing tape release member according to

[10] or

[11] , wherein the stretching means has the function of simultaneously stretching the temporary fixing tape covering the hollow portion in the stretching direction and in two or more directions different from the stretching direction.

[13] A temporary fixing tape release member according to any one of

[10] to

[12] , wherein the stretching means further comprises a stretching member that passes through the hollow portion and presses the temporary fixing tape covering the hollow portion in the direction of passage.

[14] A component manufacturing apparatus comprising a release member for a temporary fixing tape as described in any of

[10] to

[13] above.

[15] A method for manufacturing a workpiece, comprising a processing step of processing one or more members on a temporary fixing tape to obtain one or more workpieces, and a peeling step of peeling the workpieces from the temporary fixing tape, wherein the temporary fixing tape has an extendable base material and a temporary fixing layer on at least one surface of the extendable base material, and is peelable by stretching, and in the peeling step, the workpieces are peeled off by stretching the temporary fixing tape in at least one direction with a stretching means.

[16] A method for manufacturing a workpiece according to

[15] above, wherein the workpiece is an electronic component.

[0232] Although the peeling method, peeling member, manufacturing apparatus, and manufacturing method have been described above, this disclosure is not limited to the configuration of the embodiments described above. In the configuration of the embodiments described above, the peeling method and manufacturing method may have other optional steps added or replaced with any optional steps that perform similar functions. Similarly, in the configuration of the embodiments described above, the peeling member and manufacturing apparatus may have other optional components added or replaced with any optional components that perform similar functions. [Examples]

[0233] The present invention will be described in detail below with reference to examples, but the present invention is not limited to these examples. Note that temporary fixing tape may sometimes be simply referred to as "tape."

[0234] 1. Evaluation of the physical properties of the tape (1) Measurement of thickness The object to be measured was cut into an arbitrary size, and the thicknesses at five positions at intervals of 10 mm in the length direction and the thicknesses at five positions at intervals of 10 mm in the width direction were measured using a dial thickness gauge (manufactured by Ozaki Seisakusho Co., Ltd., model G-0.4N or model G-2.4N). The value obtained by averaging the total ten thicknesses was taken as the thickness of the object. For the adsorption layer, adhesive layer, and intermediate layer, the combined thickness was measured with the release liner as the support, and the value obtained by subtracting the thickness of the support was taken as the thickness.

[0235] (2) Apparent density of the adsorption layer In accordance with JIS K6767, a test piece of the adsorption layer cut into a rectangle with a length of 4 cm and a width of 5 cm was prepared, and the apparent volume (length in the longitudinal direction × length in the transverse direction × thickness) [cm 3 of the test piece was calculated. The mass [g] of the test piece was measured, and the value obtained by dividing the mass by the apparent volume was taken as the apparent density.

[0236] (3) Average opening diameter on the surface of the adsorption layer: The adsorption layer was observed in a plan view using a tabletop low-vacuum scanning electron microscope (SEM, manufactured by Hitachi High-Technologies Corporation, "Miniscope TM3030Plus"). After taking a magnified photograph of the surface of the adsorption layer at a magnification of 100 times, the opening diameters of an arbitrary recess located at the center of the photograph and 30 recesses located in its vicinity were all measured, and the average value was taken as the average opening diameter.

[0237] (4) Porosity on the surface of the adsorption layer: Using an electron microscope (manufactured by Keyence Corporation, digital microscope VHX6000), the surface of the adsorption layer was photographed at a magnification of 200 times (auto brightness adjustment, longitudinal 1.27 mm × transverse 1.7 mm). The area of the black part and the total area of the drawn image were calculated by software analysis, and the porosity obtained by dividing the area of the black part by the total area was shown. In the above image, the black part is the recess formed on the surface of the adsorption layer, and the area of the black part corresponds to the projected area of the recess.

[0238] (5) 50% modulus, breaking strength, elongation at break Test specimens were prepared by punching out dumbbell-shaped pieces of the object to be measured with a gauge length of 20 mm and a width of 5 mm. The specimens were measured using a Tensilon tensile testing machine (model: RTF-1210, manufactured by A&D Co., Ltd.) under measurement conditions of 23°C and 50% RH, by pulling them lengthwise at a tensile speed of 500 mm / min. The 50% modulus was defined as the stress value (unit: N) obtained at 50% elongation divided by the thickness (unit: mm) and width (unit: mm) of the test specimen used for measurement. The breaking strength was defined as the stress value (unit: N) at fracture divided by the thickness (unit: mm) and width (unit: mm) of the test specimen, and the elongation at that time was defined as the elongation at fracture. The formulas for calculating elongation in modulus and elongation at fracture are as explained above.

[0239] (6) Holding power To prevent stretching and peeling of the base material of the temporary fixing tapes obtained in the examples and comparative examples, a PET base material single-sided adhesive tape (DIC Corporation #8625S) was used as a backing. The tapes were cut to a width of 20 mm and a length of 100 mm. At 23°C and a 50% RH atmosphere, the tapes were placed on the surface of a clean, smooth stainless steel plate (hairline polished with 360-grit waterproof abrasive paper) so that the application area was 20 mm x 20 mm. The top surface was pressed together by passing a 2 kg roller back and forth once, and the tapes were left in a 23°C environment for 1 hour to prepare test specimens. With the stainless steel plate constituting the test specimen fixed, the time from when a 1 kg load was applied to the tape at a 70°C environment until the tape fell off the stainless steel plate was measured.

[0240] (7) Surface adhesion F1, F2 As shown in Figure 23, a test stage was created by attaching strong adhesive double-sided tape (DIC Corporation #8625ER-140) 52 to the surface of a 2 mm thick stainless steel plate 51a. A test piece 55 was created by attaching the surface opposite the temporary fixing layer 1 of the base material 2 of a temporary fixing tape 100, cut to 20 mm x 20 mm, to the strong adhesive double-sided tape 52 on the test stage. Next, a stainless steel plate 51b measuring 2 mm thick x 50 mm long x 40 mm wide was attached to the surface of the temporary fixing layer 1 of the tape 100 and pressed with 1 kg for 10 seconds. After being left in an atmosphere of 23°C and 50% RH for 1 hour or 24 hours, the strength [N / 20 mm] when the test piece 55 was peeled off the stainless steel plate 51b at a speed of 300 mm / min in the vertical direction N was measured. The surface adhesive strength of the tape measured after 1 hour of being pressed was defined as F1, and the surface adhesive strength of the tape measured after 24 hours of being pressed was defined as F2.

[0241] 2. Preparation of the base material The following substrates (1) to (3) were prepared.

[0242] ·Base material (1) As the base material (1), an ester-based polyurethane resin film (manufactured by Nippon Matai Co., Ltd., Esmer URS, 100 μm thick) was used.

[0243] ·Base material (2) Toluene was added to a hydrogenated styrene-isoprene-styrene triblock copolymer (SEPS, "Septon 2063", manufactured by Kuraray Co., Ltd.) and stirred until homogenized. This mixture was then applied to a release liner (Film Vina 75E-0010GT, manufactured by Fujimori Kogyo Co., Ltd.) using an applicator to a thickness of 100 μm after drying, and dried at 60°C for 5 minutes to obtain base material (2).

[0244] ·Base material (3) A three-way stopcock was attached to a 3L three-necked flask, and the inside was purged with nitrogen. While stirring at room temperature, 1861g of toluene and 14.3g of 1,2-dimethoxyethane were added, followed by 44.3g of a toluene solution containing 22.3 mmol of isobutylbis(2,6-di-t-butyl-4-methylphenoxy)aluminum, and then 1.04g of a cyclohexane solution of sec-butyllithium containing 1.78 mmol of sec-butyllithium. Subsequently, 21.9g of methyl methacrylate was added. The reaction solution was initially yellow, but became colorless after stirring at room temperature for 60 minutes. Subsequently, the internal temperature of the polymerization solution was cooled to -30°C, and 249g of n-butyl acrylate was added dropwise over 2 hours. After the addition was complete, the mixture was stirred at -30°C for 5 minutes. Furthermore, 21.9 g of methyl methacrylate was added, and the mixture was stirred overnight at room temperature. Then, 24 g of methanol was added to stop the polymerization reaction, and the resulting reaction solution was poured into 15 kg of methanol to precipitate the precipitate. The precipitate was then collected and dried to obtain 296 g of acrylic triblock copolymer (1). The weight-average molecular weight (Mw) and molecular weight distribution (Mw / Mn) of the obtained acrylic triblock copolymer (1) were determined by GPC measurement using the method described above. The weight-average molecular weight (Mw) was 100,000 and the molecular weight distribution (Mw / Mn) was 1.2.

[0245] To 100 parts by mass (solids) of the above acrylic triblock copolymer (1), 2.5 parts by mass of a polyfunctional polymerizable monomer (pentaerythritol triacrylate, manufactured by Toagosei Co., Ltd., Aronics M305, molecular weight 298, trifunctional) and 0.4 parts by mass of a photopolymerization initiator (Irgacure 184, manufactured by IGM Resins BV) were added, and then ethyl acetate was added and stirred to obtain a base material with a solids content of 40% by mass.

[0246] The obtained substrate material was coated onto a release liner (PET38×1, A3, manufactured by Nippa Co., Ltd.) using an applicator to achieve an average thickness of 100 μm after drying, and dried in an 80°C drying oven for 2 minutes. Next, after lamination to the release liner (PET38×1, A3, manufactured by Nippa Co., Ltd.), an integrated light intensity of 1,000 mJ / cm² was applied using a Heraeus electrodeless UV lamp system. 2 The substrate (3) was prepared by irradiating it with ultraviolet light in such a manner.

[0247] ·Base material (4) A polyester film (Toray Industries, Inc., Lumirror S10, 100 μm thick) was used as the non-stretchable substrate (4).

[0248] The physical properties of each substrate are as follows.

[0249] [Table 1]

[0250] 3. Manufacturing of temporary fixing tape A (adhesive layer type) [Manufacturing Example 1-1] <Preparation of the resin composition (1) for forming the adsorption layer> In a 2 L reaction vessel equipped with a stirrer, thermometer, and condenser, 200 parts by mass of deionized water were charged and heated to 80°C. To this, 225 parts by mass of ethyl acrylate (hereinafter abbreviated as "EA"), 225 parts by mass of n-butyl acrylate (hereinafter abbreviated as "BA"), 70 parts by mass of acrylonitrile (hereinafter abbreviated as "AN"), and 15 parts by mass of N-methylolacrylamide (hereinafter abbreviated as "N-MAM") were added. Six parts by weight of acrylic acid (hereinafter abbreviated as "AA") was emulsified with 15 parts by weight of sodium dodecylbenzenesulfonate and 5 parts by weight of ammonium persulfate in 200 parts by weight of deionized water. This emulsion was added dropwise for 2 hours to carry out emulsion polymerization, and after holding for 2 hours, it was cooled to below 40°C. The pH was adjusted to 7-8 with ammonia water, and the non-volatile content was adjusted from 54% to 56% with deionized water to obtain aqueous acrylic emulsion (1). The obtained aqueous acrylic emulsion (1) had a non-volatile content of 55% and a pH of 7.4. The specific gravity of aqueous acrylic emulsion (1) (resin composition for forming the adsorption layer before mechanical foaming) was 1.01.

[0251] To 100 parts by mass of the above aqueous acrylic emulsion (1), 5 parts by mass of Amidia M-3 (manufactured by DIC Corporation, melamine crosslinking agent) was added, followed by 6 parts by mass of Sunspear RA-33 (manufactured by Sunopco Co., Ltd., surfactant) and 5 parts by mass of RHEOBYK-H 7625-VF (manufactured by Bic Chemie Japan, thickener), and the mixture was uniformly stirred. Subsequently, the mixture was stirred for approximately 2 minutes using a household electric hand mixer (TESCOM THM1300, 600 to 1300 rpm, speed adjustment set to "1" out of 5 levels) to mechanically foam the mixture and obtain an adsorption layer forming resin composition (1) (foamy acrylic resin emulsion) with a specific gravity of 0.51.

[0252] <Preparation of resin composition (1) for forming the intermediate layer> In a reaction vessel equipped with a stirrer, reflux condenser, nitrogen inlet tube, thermometer, and dropping funnel, 75.94 parts by mass of n-butyl acrylate, 5 parts by mass of 2-ethylhexyl acrylate, 15 parts by mass of cyclohexyl acrylate, 4 parts by mass of acrylic acid, 0.06 parts by mass of 4-hydroxybutyl acrylate, and 200 parts by mass of ethyl acetate were charged. The mixture was heated to 65°C while stirring and blowing in nitrogen to obtain mixture (1). Next, 4 parts by mass (2.5% by mass of solids) of 2,2'-azobisisobutyronitrile solution, which had been previously dissolved in ethyl acetate, was added to mixture (1), and the mixture was held at 65°C for 10 hours while stirring to obtain mixture (2). Next, mixture (2) was diluted with ethyl acetate to a solids content of 30% by mass and filtered through a 200-mesh wire mesh to obtain a solution of acrylic copolymer (1) with a weight-average molecular weight of 1.6 million (polystyrene equivalent).

[0253] To 100 parts by mass (solid content) of the above acrylic copolymer (1), 2.0 parts by mass of an epoxy crosslinking agent (a solution with a solid content of 5% obtained by mixing Tetrad X manufactured by Mitsubishi Gas Chemical Company, Inc. with ethyl acetate) was added, and the mixture was stirred until homogeneous to obtain an intermediate layer forming resin composition (1), which is an acrylic adhesive 1.

[0254] <Creating temporary fixing tape A(I)> An intermediate layer was created by applying the above intermediate layer forming resin composition (1) onto a release liner (1) (film vinyl 75E-0010GT, manufactured by Fujimori Kogyo Co., Ltd.) using an applicator so that the thickness after drying was 10 μm, and drying at 80°C for 3 minutes. Subsequently, the intermediate layer was bonded to one side of a substrate (1) that had been corona-treated to have a wet tension of 56 mN / m, and laminated under pressure of 0.2 MPa to create a laminated intermediate. Subsequently, an adsorption layer having a continuous cell structure with numerous depressions formed on its surface was created by applying the above adsorption layer forming resin composition (1) onto a release liner (2) (film vinyl 50E-0010NSD, manufactured by Fujimori Kogyo Co., Ltd.) using an applicator so that the thickness after drying was 110 μm, and drying at 100°C for 5 minutes. The release liner (1) of the laminated intermediate was peeled off, and the adsorption layer was bonded to the surface of the exposed intermediate layer. By laminating it under pressure of 0.2 MPa, a temporary fixing tape A(I) having an adsorption layer on one side of the substrate via the intermediate layer was created.

[0255] [Manufacturing Example 1-2] <Preparation of temporary fixing tape A(II)> Temporary fixing tape A(II) was prepared in the same manner as in manufacturing example 1, except that base material (2) was used instead of base material (1).

[0256] [Manufacturing Examples 1-3] <Preparation of temporary fixing tape A(III)> Temporary fixing tape A(III) was prepared in the same manner as in manufacturing example 1, except that base material (3) was used instead of base material (1).

[0257] [Manufacturing Examples 1-4] <Preparation of temporary fixing tape A(IV)> Temporary fixing tape A(IV) was prepared in the same manner as in manufacturing example 1, except that base material (4) was used instead of base material (1).

[0258] Details regarding the physical properties of the adhesive layer and tape of temporary fixing tapes A(I) to (IV) are as follows.

[0259] [Table 2]

[0260] 4. Manufacturing of temporary fixing tape B (adhesive layer type) [Manufacturing Example 2-1] <Preparation of acrylic triblock copolymers> A mixed solution was prepared by adding 500 ml of dry toluene and 80 ml of a dry toluene solution containing 0.75 g of bis(pentamethylcyclopentadienyl)samarium tetrahydrofuranate complex [(C5Me5)2SmMe(THF)] as a polymerization initiator to a 1000 ml flask whose interior was purged with argon. To this mixed solution, 12.0 ml of methyl methacrylate (hereinafter sometimes referred to as "MMA") was added at 0°C and the mixture was stirred at 0°C for 30 minutes. Then, 20 ml of the solution was sampled from the system and designated as Sample 1. After polymerization of MMA, the polymerization reaction system was cooled to -78°C, and 88.0 ml of n-butyl acrylate (hereinafter sometimes referred to as "nBA") was added as the second monomer and the mixture was stirred at -78°C for 3 hours. Then, 20 ml of the solution was sampled from the system and designated as Sample 2. After polymerization of nBA as described above, 12.0 ml of MMA was added to the polymerization system as the third monomer at -78°C and the solution was stirred. After the solution became homogenized, the temperature was raised to 0°C and stirred for another hour. Polymerization was stopped by adding 50 ml of methanol to the resulting reaction mixture and allowing it to react at room temperature for 2 hours. The reaction solution after polymerization cessation was poured into a large amount of hexane to obtain a precipitated white precipitate. A portion of the white precipitate was then sampled and designated as Sample 3.

[0261] NMR, DSC, and GPC (gel permeation chromatography) measurements were performed on each polymer in samples 1 to 3 above. Based on these measurement results, the number-average molecular weight (Mn), PMMA / PnBA (polymethyl methacrylate block / polyacrylate n-butyl block) ratio, etc., were determined, and the above white precipitate was confirmed to be an acrylic triblock copolymer (PMMA-b-PnBA-b-PMMA) of polymethyl methacrylate (PMMA) block - polyacrylate n-butyl (PnBA) block - polymethyl methacrylate (PMMA) block. The number-average molecular weight (Mn) of the entire PMMA-b-PnBA-b-PMMA copolymer was 95936, and the molecular weight distribution (Mw / Mn) was 1.09. The proportion of each polymer block was PMMA (11% by mass) - PnBA (78% by mass) - PMMA (11% by mass).

[0262] <Preparation of adhesive composition (1)> The obtained acrylic triblock copolymer (PMMA-b-PnBA-b-PMMA) was 100 parts by mass (solid content), and the terpene phenol-based tackifying resin (Tamanol 803L, Arakawa Chemical Industries, Ltd., softening point 150°C) was 50 parts by mass (solid content), and silicone particles (1) (manufactured by Shin-Etsu Chemical Co., Ltd., KMP-600, volume average particle size: 5 μm, particle size distribution (D 90 / D 10 ):3.2) was mixed with 50 parts by mass and ethyl acetate, and stirred until homogeneous, to obtain an adhesive composition (1) with a solid content of 40% by mass.

[0263] <Creating temporary fixing tape B(I)> A solution of the above adhesive composition (1) was applied to a release liner (film vinyl 75E-0010GT, manufactured by Fujimori Kogyo Co., Ltd., hereinafter the same) using an applicator so that the thickness after drying was 50 μm, and an adhesive layer was prepared by drying at 80°C for 3 minutes. Next, one side of the above substrate (1) was corona-treated to achieve a wet tensile strength of 52 mN / m, and then the adhesive layer was bonded to the corona-treated surface of the substrate and laminated under pressure of 0.2 MPa to produce a temporary fixing tape B(I) having an adhesive layer on one side of the substrate.

[0264] [Manufacturing Example 2-2] <Preparation of temporary fixing tape B(II)> Temporary fixing tape B(II) was prepared in the same manner as in manufacturing example 1, except that base material (2) was used instead of base material (1).

[0265] [Manufacturing Example 2-3] <Preparation of temporary fixing tape B(III)> Temporary fixing tape B(III) was prepared in the same manner as in manufacturing example 1, except that base material (3) was used instead of base material (1).

[0266] [Manufacturing Example 2-4] <Preparation of temporary fixing tape B(IV)> Temporary fixing tape B(IV) was prepared in the same manner as in manufacturing example 1, except that base material (4) was used instead of base material (1).

[0267] Details regarding the adhesive layer and physical properties of temporary fixing tapes B(I) to (IV) are as follows.

[0268] [Table 3]

[0269] [Examples 1-1 to 1-6, Comparative Examples 1-1 to 1-2] The obtained tape was cut to a length of 200 mm x width of 20 mm, and the 50 mm x 20 mm ends were laminated with a 50 μm thick PET film to create gripping tabs for stretching the tape in the longitudinal direction. Three aluminum blocks, 10 mm long, 10 mm wide, and 4 mm thick, were prepared and attached in series in the longitudinal direction to the center of the adhesive layer surface of the tape (for comparative examples 1 and 2, the adhesive layer surface), and pressed down with a load of 1 kg / 3 blocks for 10 seconds to form a test specimen. With the aluminum block of the test specimen facing downwards, the tab at one end of the tape was placed in a fixing jig, and then the tab on the opposite side of the tape was grasped and stretched horizontally at a speed of 300 mm / min.

[0270] The elongation of the tape at the time of peeling when all three aluminum blocks fell from the tape was calculated using the following formula. In the formula below, "initial length between markings + length after the tape has been stretched" is the length between markings of the tape after it has been stretched when all the aluminum blocks have fallen. The length between markings is the length of the tape excluding the tab areas on both sides (tape length 200 mm - tab area length 50 mm × 2 = 100 mm). {(Initial distance between gauge marks + length of tape stretched) / Initial distance between gauge marks} × 100 = Elongation at peeling [%]

[0271] The evaluation results are shown below. The criteria for peelability evaluation were as follows: ◎ for elongation of tape when peeled less than 400%, ○ for 400% or more but less than 1000%, △ for 1000% or more, and × for not being able to peel.

[0272] [Table 4]

[0273] [Table 5]

[0274] The results above suggest that in the example using an stretchable tape, the tape peeled off the aluminum block by stretching horizontally from a state in which the aluminum block was fixed by adhesion or suction. The temporary fixing tape with an adhesive layer exhibited less elongation during peeling compared to the temporary fixing tape with an adhesive layer, suggesting that it could be peeled off with less elongation.

[0275] [Examples 2-1 to 2-5, Comparative Examples 2-1 to 2-3] <A peeling method that involves applying tension perpendicular to the adhesive surface of the tape to stretch it.> The tape was cut to a length of 250 mm x width of 250 mm, and nine aluminum blocks measuring 10 mm in length, 10 mm in width, and 4 mm in thickness were prepared. These were arranged in a grid pattern in the center of the surface of the adhesive layer of the tape (for Comparative Examples 1 and 2, the surface of the adhesive layer), and the blocks were bonded together. The test specimens were then pressed with a rubber roller at a speed of 300 mm / min under a load of 2 kg / 30 mm. The test specimen was placed on a fixing ring (with an inner cavity of φ150 mm) for mounting the tape of the device used as a stretching member. A stretching member A (outer circumference φ138 mm, spoke shape, with 16 evenly spaced covering sections made of 10 mm wide PP bands on the outer rim of the spokes, allowing rotation along the outer surface of the outer rim; corresponding to Figure 18(b)) for ejecting the tape of the device was pushed up from the opposite side of the aluminum block of the test specimen at a moving speed of 20 mm / second and a maximum moving distance of 30 cm. The elongation of the tape at the time of peeling when all nine aluminum blocks were peeled off was calculated using the following formula. Whether or not the aluminum blocks had peeled off was determined by whether or not the aluminum blocks slid when poked with a 50 μm thick PET film. In the formula below, the "initial distance between markings" is represented by marking a grid of 10mm squares on the tape, and "initial distance between markings + length of stretched tape" is the distance between markings on the tape after it has stretched and the aluminum block has been completely removed. (Initial distance between markings = 10mm). {(Initial distance between gauge marks + length of tape stretched) / Initial distance between gauge marks} × 100 = Elongation at peeling [%]

[0276] Furthermore, the height at which the stretching member A was pushed up when all nine aluminum blocks had been detached was defined as the travel distance of the stretching means (the distance the tape was pushed out by the stretching means).

[0277] The evaluation results are shown below. The criteria for peelability evaluation were as follows: ◎ for elongation of tape at peeling time of less than 400%, ○ for 400% or more, and × for not being able to peel.

[0278] [Table 6]

[0279] [Table 7]

[0280] From the results above, the tape in the example using an stretchable tape peeled off the aluminum block by being pushed out and stretched by the drive of the stretching member A, from a state in which the aluminum block was fixed by adhesion or suction. The temporary fixing tape in which the temporary fixing layer is an adhesive layer showed a smaller elongation at the time of peeling compared to the temporary fixing tape in which the temporary fixing layer is an adhesive layer, suggesting that peeling is possible at a lower elongation. It is presumed that the result of the tape in Comparative Example 2-2 was due to the inability to reach the elongation required to peel off the aluminum block because of the limit of the range of motion (device limit) of the stretching member A.

[0281] [Example 3] Temporary fixing tapes A(I) and B(I) were stretched in the same manner as in Example 2, with stretching member A replaced by one of the stretching members B to E below. (Extended members B~D) • Stretched member B: A stretched member with a flat surface that has been roughened by hard anodizing treatment. • Stretched member C: A stretched member with a curved surface (ellipse = 138 x 50 mm) and a roughened surface due to hard anodizing treatment. • Stretching member D: An annular stretching member having an outer periphery and an inner cavity region surrounded by the outer periphery in a plan view (Figure 18(a), a configuration without the covering portion of stretching member A).

[0282] The evaluation results are shown below. Table 8 also includes the results for Examples 2-1 and 2-4.

[0283] [Table 8]

[0284] The above results suggest that when a temporary fixing tape is pressed and stretched by an stretching member, the push height required for the part to detach differs depending on the stretching member. Specifically, stretching the temporary fixing tape with stretching member A reduces the push height (travel distance) of the stretching member required for the temporarily fixed part to detach compared to stretching the temporary fixing tape with the other stretching members B to D, suggesting that the removal of the part temporarily fixed to the temporary fixing tape can be made easier. [Explanation of Symbols]

[0285] 100...Temporary fixing tape, 1...Temporary fixing layer, 2...Base material, 3...Part (component, processed product), 4...Adhesive surface, 8, 8A, 8B...Stretching means, 9, 9'...Holder, 10...Stretching member, 21...Outer circumference (rim), 22...Cavity region, 25...Coating part, P, P1, P2...Stretching direction, Q...Direction of tension, θ...Angle made by tension with respect to the adhesive surface, Y...Direction of movement of the stretching member

Claims

1. A method for removing temporary fixing tape to which one or more parts are fixed, The temporary fixing tape comprises an extendable base material and a temporary fixing layer on one surface of the extendable base material, and is peelable by stretching. A method for peeling off a temporary fixing tape, wherein the component is fixed to the temporary fixing layer, and the temporary fixing tape is peeled off from the component by stretching the temporary fixing tape in at least one direction using a stretching means.

2. The method for peeling off a temporary fixing tape according to claim 1, wherein the temporary fixing tape is stretched in two different directions, and the two directions form an angle of approximately 90°.

3. The method for peeling off a temporary fixing tape according to claim 1 or 2, wherein the temporary fixing tape is stretched in all directions.

4. The method for peeling off a temporary fixing tape according to any one of claims 1 to 3, wherein the stretching means applies tension in a horizontal direction to the adhesive surface between the component and the temporary fixing layer.

5. The method for peeling off a temporary fixing tape according to any one of claims 1 to 4, wherein the stretching means applies tension to the adhesive surface between the component and the temporary fixing layer in a direction opposite to the side on which the component is placed.

6. A method for peeling off a temporary fixing tape according to any one of claims 1 to 5, wherein the stretching means has a stretching member, and the stretching member presses the temporary fixing tape from the side of the temporary fixing tape opposite to the side on which the component is placed, thereby peeling the temporary fixing tape from the component.

7. The method for peeling off temporary fixing tape according to claim 6, wherein the stretching member is annular in plan view, having an outer periphery and a hollow region inside the outer periphery, and a part of the surface of the outer periphery is covered by a covering portion that is rotatable along the outer periphery surface of the outer periphery.

8. A method for peeling off a temporary fixing tape according to any one of claims 1 to 7, wherein when the temporary fixing tape is stretched in one direction by the stretching means, the length of the stretched temporary fixing tape in a direction substantially perpendicular to the one direction is 0.9 or more than the length of the temporary fixing tape before stretching in a direction substantially perpendicular to the one direction.

9. The method for peeling off a temporary fixing tape according to any one of claims 1 to 8, wherein the temporary fixing layer of the temporary fixing tape is an adhesive layer having a number of recesses formed on its surface.

10. The method for peeling off a temporary fixing tape according to any one of claims 1 to 8, wherein the temporary fixing layer of the temporary fixing tape is an adhesive layer.

11. The method for peeling off a temporary fixing tape according to any one of claims 1 to 10, wherein the stress (50% modulus) of the temporary fixing tape at 50% elongation is in the range of 0.15 MPa to 20 MPa, and the elongation at break is 200% or more.

12. A method for peeling off temporary fixing tape according to any one of claims 1 to 11, wherein the elongation of the temporary fixing tape when peeled off is in the range of 101% to 1500%.

13. A method for peeling off temporary fixing tape according to any one of claims 1 to 12, wherein the aforementioned component is an electronic component.

14. The surface area of ​​the part that comes into contact with the temporary fixing tape is 100 mm². ２ A method for peeling off temporary fixing tape according to any one of claims 1 to 13 below.

15. A release member used for peeling off a temporary fixing tape that is peelable by stretching, comprising an stretchable base material and a temporary fixing layer on one surface of the stretchable base material, It comprises a holding portion for holding the temporary fixing tape, a hollow portion formed by the holding portion, and an stretching means, The holding portion is arranged such that the temporary fixing tape covers the hollow portion. The stretching means is a release member having the function of stretching the surface of the temporary fixing tape covering the hollow portion in at least one direction.

16. The peeling member according to claim 15, wherein the stretching means is a roll and the roll is arranged in a first stretching direction.

17. The peeling member according to claim 15, wherein the stretching means is a roll, and the roll is arranged in a first stretching direction and a second stretching direction that forms an angle of approximately 90° with respect to the first stretching direction.

18. The peeling member according to claim 15, wherein the stretching means is movable up and down within the hollow portion, and further comprises a stretching member that passes through the hollow portion and presses a temporary fixing tape covering the hollow portion in the direction of passage.

19. The peeling member according to claim 18, wherein the stretching member is annular in plan view, having an outer periphery and a hollow region inside the outer periphery, and a part of the surface of the outer periphery is covered by a covering portion that is rotatable along the outer periphery surface of the outer periphery.

20. A parts manufacturing apparatus comprising a release member for a temporary fixing tape according to any one of claims 15 to 19.

21. A method for manufacturing a part, comprising at least a peeling step of peeling off a part fixed on a temporary fixing tape using the method for peeling off a temporary fixing tape described in any one of claims 1 to 14.

22. The method for manufacturing a component according to claim 21, wherein the component is an electronic component.

23. The aforementioned part has a surface area of ​​100 mm² that comes into contact with the temporary fixing tape. ２ The method for manufacturing a component according to claim 21 or 22, which is as follows:

24. A method for manufacturing a component according to any one of claims 21 to 23, wherein the component is a multilayer ceramic capacitor.

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