Cell, ablation unit, and rectifier plate

Abstract

This disclosure aims to provide a cell that can efficiently deliver the generated aerosol. [Solution] A cell according to one aspect of the present disclosure comprises a main body and a lid that is detachably attached to the main body, wherein an internal space through which gas can flow is formed by attaching the lid to the main body, the main body is open to the internal space and has a sample chamber in which a sample is placed, and a rectifier plate for rectifying the flowing gas is arranged in the internal space.

Description

Technical Field

[0001] The present disclosure relates to a cell, an ablation unit, and a flow rectifying plate.

Background Art

[0002] For the analysis of a sample, fine fragments, vapor, etc. of the sample generated by partially crushing, heating, etc. may be conveyed to an analyzer by a gas for analysis. A cell used in such an analysis is known (International Publication No. 2019 / 202690).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In Patent Document 1, by providing a diffusion unit that diffuses the gas flowing inside the cell, it is said that the diffused gas can capture the fragments, the vapor, etc. (aerosol) in a wide area inside the cell. When the gas flowing inside the cell is diffused by the diffusion unit, that is, when the flowing gas hits an obstacle, convection etc. occur and the rapid passage inside the cell is suppressed, the time for the gas to send out the aerosol from the cell increases, and there is a possibility that the analysis accuracy of each aerosol decreases because the aerosol generated earlier and the aerosol generated later are sent out from the cell substantially simultaneously.

[0005] In view of the above circumstances, an object of the present disclosure is to provide a cell that can efficiently send out the generated aerosol.

Means for Solving the Problems

[0006] A cell according to one aspect of the present disclosure made to solve the above problems comprises a main body and a lid that is detachably attached to the main body, wherein an internal space through which gas can flow is formed by attaching the lid to the main body, the main body is open to the internal space and has a sample chamber in which a sample is placed, and a rectifier plate for rectifying the flowing gas is arranged in the internal space. [Effects of the Invention]

[0007] A cell according to one aspect of this disclosure can efficiently deliver the generated aerosol. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is a schematic plan view showing a cell according to one embodiment of the present disclosure. [Figure 2] Figure 2 is a schematic side view of the cell in Figure 1. [Figure 3] Figure 3 is a schematic bottom view showing the lid of the cell in Figure 1. [Figure 4] Figure 4 is a schematic plan view showing the main body of the cell in Figure 1. [Figure 5] Figure 5 is a cross-sectional view AA showing an example of the arrangement of the rectifier plates in Figure 2. [Figure 6] Figure 6 is a cross-sectional view AA showing a different arrangement of rectifier plates than that in Figure 5. [Figure 7] Figure 7 is a cross-sectional view AA showing a different rectifier plate than those in Figures 5 and 6. [Figure 8] Figure 8 is a cross-sectional view AA showing a different rectifier plate than those in Figures 5, 6, and 7. [Figure 9] Figure 9 is a cross-sectional view AA showing a different rectifier plate than those in Figures 5 to 8. [Figure 10] Figure 10 is a schematic plan view showing the rectifier plate in Figure 7. [Figure 11] Figure 11 is a schematic side view showing the rectifier plate in Figure 10. [Figure 12]FIG. 12 is a schematic diagram showing a state in which laser light passes through an objective lens in an ablation unit according to an embodiment of the present disclosure. [Figure 13] FIG. 13 is a schematic diagram showing a state in which laser light passes through an fθ lens in the ablation unit of FIG. 12.

Embodiments for Carrying Out the Invention

[0009] [Description of Embodiments of the Present Disclosure] First, embodiments of the present disclosure will be listed and described.

[0010] (1) A cell according to one aspect of the present disclosure is a cell including a main body portion and a lid portion detachably attached to the main body portion. By attaching the lid portion to the main body portion, an internal space through which gas can flow is formed. The main body portion has a sample chamber that is opened to the internal space and in which a sample is placed, and a rectifying plate for rectifying the flowing gas is disposed in the internal space.

[0011] The cell allows gas to flow through the internal space formed by attaching the lid portion to the main body portion, and has a rectifying plate in the internal space for rectifying the flow of this gas. Therefore, the gas can be rectified and flow rapidly within the cell, and the aerosol released from the sample can be efficiently sent out.

[0012] (2) In the above (1), the rectifying plate may be detachably disposed in the internal space. By disposing the rectifying plate detachably in the internal space, for example, when the flow rate of the gas or the like is changed and the rectifying plate becomes unnecessary, the cell from which the rectifying plate has been removed can be easily used.

[0013] (3) In the above (1) or (2), the cell may further include a mounting table disposed in the sample chamber for mounting the sample. By providing the cell with the mounting table, the ease with which the gas flowing through the internal space can send out the sample can be improved.

[0014] (4) In any one of the above (1) to (3), the rectifying plate may have a pair of side plate portions that are arranged to face each other such that the rectifying plate is parallel to the gas flow direction in the internal space in a plan view. By having the pair of side plate portions, the rectifying effect can be improved.

[0015] (5) In the above (4), the lid portion or the main body portion has an inlet through which gas flows in and an outlet through which the gas that has passed through the internal space flows out, and the pair of side plate portions may have a tapered portion where the distance between them gradually decreases from the inlet toward the outlet. By having the tapered portion in the pair of side plate portions, the rectifying effect can be further improved, and the ease with which the gas can send out the sample can be further improved.

[0016] (6) The ablation unit according to one aspect of the present disclosure includes any one of the cells of the above (1) to (5).

[0017] Since the ablation unit includes any one of the cells of the above (1) to (5), the aerosol released by ablating the sample can be efficiently sent out.

[0018] (7) The rectifying plate according to one aspect of the present disclosure includes a main body portion and a lid portion that is detachably attached to the main body portion. By attaching the lid portion to the main body portion, an internal space through which gas can flow is formed, and the main body portion is disposed in the internal space of the cell that has a sample chamber that is open to the internal space and in which a sample is disposed, and rectifies the flowing gas.

[0019] Since the rectifying plate is disposed in the internal space of the cell through which gas flows, the gas can be effectively rectified, which can contribute to efficiently sending out the aerosol in the cell by the gas.

[0020] [Details of the Embodiment for Carrying Out the Invention] Hereinafter, embodiments of the present disclosure will be described in detail while referring to the drawings. Note that the drawings are diagrams that illustratively show the embodiments, and the shape, size, scale, arrangement, etc. of each component (member) may be different from the actual ones.

[0021] <Cell> As shown in Figures 1 and 2, the cell 1 comprises a main body 10 and a lid 20 that is detachably attached to the main body 10. By attaching the lid 20 to the main body 10, an internal space R through which gas can flow is formed in the cell 1. In this embodiment, as shown in Figure 3, a recess (thin-walled portion) 20a is formed on the back surface of the lid 20 (the surface on the main body 10 side when attached to the main body 10), and this recess 20a constitutes the internal space R. The main body 10 is open to the internal space R and has a sample chamber 11 in which a sample is placed. In the main body 10 of this embodiment, as shown in Figure 4, a substantially rectangular recess 10a is formed in the center when viewed from above, and this recess 10a constitutes the sample chamber 11. The cell 1 has a rectifier plate that rectifies the flowing gas, which is placed in the internal space R (not shown in Figures 1 to 4). In each figure, cell 1 is shown as a roughly rectangular parallelepiped, but the shape of the cell is not limited to this. Hereafter, the direction in which gas flows through the internal space R may be referred to as the front-to-back direction, the direction perpendicular to the front-to-back direction in a plan view may be referred to as the left-to-right direction, and the direction perpendicular to both the front-to-back direction and the left-to-right direction may be referred to as the up-and-down direction.

[0022] The sample (not shown) placed in the sample chamber 11 is not particularly limited and may be a liquid, solid, slurry, gel, etc. The sample is partially crushed, melted, or vaporized by, for example, irradiation with laser light, releasing fine fragments from the crushing, vaporized elements, ionized elements, solid particles formed by the re-condensation of some of the vaporized or ionized elements (hereinafter referred to as aerosols). The gas flowing through the internal space R of the cell 1 sends the aerosols released from the sample out of the internal space R and transports them to the connected instrument (e.g., an analyzer).

[0023] The materials of the main body 10, the lid 20, and the rectifier plate are not particularly limited and may be, for example, known stainless steel, aluminum, resin, etc. The main body 10, the lid 20, and the rectifier plate may each be made of different materials. The cell 1 may be formed to have chemical resistance, heat resistance, explosion-proof properties, etc., depending on the sample to be analyzed, the analysis method, etc.

[0024] The upper surface of the main body 10 constitutes part of the internal space R. A sealing member 40 is preferably placed on the upper surface of the main body 10 to suppress gas leakage from the internal space R. A groove (not shown) for arranging the sealing member 40 is preferably formed on the upper surface of the main body 10. The lid 20 has an inlet 21 through which gas flows in and an outlet 22 through which gas that has passed through the internal space R flows out. The inlet 21 and the outlet 22 are preferably formed so that their axes coincide approximately in the center of a pair of front-to-back side surfaces of the lid 20.

[0025] The lid portion 20 has a roughly rectangular top opening 23 formed in the center of its top surface when viewed from above, and a cover member (not shown) is placed to cover this top opening 23. The cover member may be made of a transparent material so that the inside of the sample chamber 11 can be seen. The lid portion 20 attached to the main body portion 10 may be fixed to the main body portion 10 by known means such as bolts.

[0026] The cell 1 is placed in the sample chamber 11 and may further be equipped with a mounting platform (not shown) on which the sample is placed. By placing the sample on the mounting platform located in the sample chamber 11, the distance between the internal space R and the sample can be adjusted. That is, by making the mounting platform function as a spacer, the vertical distance between the gas flowing through the internal space R and the sample can be adjusted. By adjusting the distance between the gas flowing through the internal space R and the sample, the efficiency of the gas in capturing aerosols released from the sample can be improved.

[0027] The above-mentioned rectifier plate may be fixed in an immovable manner within the internal space R, but it is preferable that it be detachably arranged. For example, if the rectifying effect of the rectifier plate being used becomes insufficient due to a change in the gas flow rate, the detachability of the rectifier plate allows it to be easily replaced with another rectifier plate having a different rectifying effect.

[0028] As shown in Figures 5 and 6, the rectifier plate 30 preferably has a pair of side plate portions 31 that are arranged opposite each other so as to be parallel to the direction of gas flow in the internal space R in a plan view. That is, the rectifier plate 30 preferably rectifies the gas by arranging a pair of plate-shaped members parallel to the direction of gas flow in the internal space R. Note that "parallel" means not only that they are perfectly parallel in a plan view, but also that the angle between each side plate portion 31 is 10° or less.

[0029] Preferably, the pair of side plates 31 extend in the front-rear direction within the internal space R such that the internal space R is separated into two spaces: inside the rectifier plate 30 and outside the rectifier plate 30, in the left-right direction. In other words, it is preferable that the pair of side plates 31 separate the internal space R into the internal space of the rectifier plate 30 and the external space of the rectifier plate 30. Specifically, it is preferable that the front-rear and up-down ends of the pair of side plates 31 abut the inside (inner surface) of the recess 20a of the lid 20 which constitutes the internal space R and the upper surface of the main body 10, so that the pair of side plates 31 partition the inside of the rectifier plate 30 as a closed space. By making the inside of the rectifier plate 30 a closed space, it is possible to suppress the unnecessary scattering of aerosols within the internal space R. In other words, it is possible to suppress the scattering of aerosols into the external space of the rectifier plate 30. Furthermore, by circulating gas through the internal space of the rectifier plate 30 which is a closed space, the ease of rectifying this gas can be improved. These factors improve the efficiency and reliability of the circulating gas capturing and distributing the above-mentioned aerosols.

[0030] The pair of side plates 31 may be formed in a straight line in plan view and arranged substantially parallel to each other within the internal space R (see Figure 5), or they may be arranged so that the distance between them gradually decreases from the inlet 21 to the outlet 22 (see Figure 6). If the pair of side plates 31 are arranged so that the distance between them gradually decreases from the inlet 21 to the outlet 22, they may be formed in a curved shape.

[0031] The pair of side plates 31 should be positioned so as not to overlap with the sample chamber 11 in a plan view. It is also preferable to position the pair of side plates 31 so as to be close to the sample chamber 11 in a plan view. By positioning the pair of side plates 31 so as to be close to the sample chamber 11 in a plan view, it is possible to suppress the widespread scattering of aerosols within the internal space of the rectifier plate 30, and the gas can efficiently deliver the aerosols. When the pair of side plates 31 are positioned substantially parallel within the internal space R in a plan view, it is preferable to position them so that the opposing surfaces (inner surfaces) of the pair of side plates 31 coincide with the pair of inner walls parallel to the front-rear direction of the sample chamber 11 (see Figure 5).

[0032] The pair of side plates 31 may have a tapering portion 32 in which the distance between them gradually decreases from the inlet 21 to the outlet 22, as shown in Figures 7 to 11. The tapering portion 32 may be formed in a straight line (see Figures 7 and 9) or in a curved shape (see Figure 8). The remaining portion of the pair of side plates 31, other than the tapering portion 32, may be formed so that they are at equal intervals (approximately parallel in a plan view). That is, the pair of side plates 31 may have a tapering portion and a parallel portion in a plan view. The tapering portion 32 may be formed between the inlet 21 and the sample chamber 11 in the front-rear direction (see Figure 7), or between the sample chamber 11 and the outlet 22 (see Figure 9), or a portion of it may be located in the region where the sample chamber 11 is formed (see Figure 8). Alternatively, there may be a first tapering section between the inlet 21 and the sample chamber 11, and a second tapering section between the sample chamber 11 and the outlet 22 (not shown). In other words, a pair of side plates may have multiple tapering sections.

[0033] The rectifier plate 30 may have a connecting portion 33 that connects a pair of side plate portions 31. That is, the pair of side plate portions 31 may be integrated by being connected at the connecting portion 33. By integrating the pair of side plate portions 31, the rectifier plate 30 can be easily placed in the internal space R. The rectifier plate 30 of this embodiment has a connecting portion 33 that connects the lower ends (ends on the main body portion 10 side in the internal space R) of the pair of side plate portions 31. The connecting portion 33 has a lower opening 33a that opens the sample chamber 11. The above connecting portion may be formed to connect the upper ends (ends on the lid portion 20 side in the internal space R), the front ends (ends on the inlet 21 side in the internal space R), or the rear ends (ends on the outlet 22 side in the internal space R) of the pair of side plate portions, or it may be a plurality of connecting portions that combine these.

[0034] <Ablation Unit> As shown in Figures 12 and 13, the ablation unit 100 is used, for example, as part of an analyzer. Specifically, the ablation unit 100 partially aerosolizes a sample (not shown) by irradiating the surface of the sample contained in cell 1 with laser light L to ablate it. The aerosol released from the sample is transported to the analyzer 200 by a gas such as helium supplied into cell 1 and analyzed. The analysis unit 200 may be a device that performs known analytical methods such as inductively coupled plasma mass spectrometry or high-frequency inductively coupled plasma atomic emission spectrometry.

[0035] The ablation unit 100 includes a laser device 110 that emits laser light L, a light reflector that reflects the laser light L to an arbitrary position, an fθ lens 130 and an objective lens that focus the transmitted laser light L onto the surface of the sample, and an optical path switching means that switches between a first optical path in which the laser light L passes through the objective lens and a second optical path in which the laser light L passes through the fθ lens 130.

[0036] The ablation unit 100 may have multiple objective lenses. The ablation unit 100 of this embodiment has three objective lenses 141, 142, and 143. Specifically, the ablation unit 100 has a first objective lens 141, a second objective lens 142, and a third objective lens 143, each with different lens magnifications (hereinafter, these three objective lenses 141, 142, and 143 will also be simply referred to as the "objective lens group 140"). By providing multiple objective lens groups 140, the options for setting the focusing diameter of the laser beam L to different diameters can be increased.

[0037] [Laser device] The laser light L emitted by the laser device 110 is preferably a pulsed laser. Preferably, the laser device 110 can be set to a pulse width of 600 femtoseconds or less, and preferably the wavelength range of the laser light L can be set to deep ultraviolet (for example, wavelength of 280 nm or less). Furthermore, preferably the repetition frequency of the pulse wave can be set to 1 kHz or higher or 10 kHz or higher. By irradiating a sample with such laser light L, aerosols can be efficiently generated, and the accuracy of the analysis can be improved.

[0038] [Light reflecting device] The light reflection device reflects the laser beam L so that it irradiates any position on the sample surface. In other words, the light reflection device controls the irradiation position of the laser beam L on the sample surface. The light reflection device is not particularly limited, but may be a known galvanometer mirror device. The ablation unit 100 of this embodiment has a first galvanometer mirror device 121 that controls the irradiation position of the laser beam L that passes through the objective lens group 140, and a second galvanometer mirror device 122 that controls the irradiation position of the laser beam L that passes through the fθ lens 130. By using the galvanometer mirror devices 121 and 122, the laser beam L that passes through the fθ lens 130 and the objective lens group 140 can be moved to any position on the sample surface, and a desired position or region of the sample can be easily ablated.

[0039] Each of the two galvanometer mirror devices 121 and 122 has a first reflecting mirror 121a and 122a and a second reflecting mirror 121b and 122b, respectively. The first reflecting mirrors 121a and 122a reflect the laser beam L irradiating the sample so that the irradiation position moves in one direction (X direction) on a virtual plane perpendicular to the laser beam L. The second reflecting mirrors 121b and 122b reflect the laser beam L reflected by the first reflecting mirrors 121a and 122a so that the irradiation position moves in a direction (Y direction) perpendicular to the aforementioned one direction. Each of the two galvanometer mirror devices 121 and 122 includes a drive unit (not shown) that rotates each of the reflecting mirrors 121a, 121b, 122a, and 122b, and a control unit (not shown) that controls this drive unit.

[0040] The galvanometer mirror devices 121 and 122 change their angles to correspond to the repetition frequency of the laser beam L. That is, each reflecting mirror 121a, 121b, 122a, and 122b can vary its reflection angle in synchronization with the repetition frequency of the laser beam L. By changing the reflection angle in synchronization with the repetition frequency of the laser beam L, efficient ablation can be performed. For example, it is possible to speed up scanning of the sample surface with the laser beam L, suppress the time difference when ablating multiple locations, and perform ablation at any desired time ratio.

[0041] The laser beam L reflected by the first galvanometer mirror device 121 is reflected by the objective lens reflector 151 toward the objective lens group 140, and the laser beam L reflected by the second galvanometer mirror device 122 is reflected by the fθ lens reflector 152 toward the fθ lens 130.

[0042] The objective lens reflector 151 is preferably a diclock mirror. The diclock mirror reflects the laser light L reflected by the first galvanometer mirror device 121 toward the objective lens group 140, while transmitting the other light. By using a diclock mirror for the objective lens reflector 151, the camera 180 for observing the sample can be easily positioned opposite the cell 170.

[0043] [Optical path switching means] The ablation unit 100 includes a first laser reflector 161 that reflects laser light L toward a first galvanometer mirror device 121, a second laser reflector 162 that reflects laser light L toward a second galvanometer mirror device 122, and a third laser reflector 163 that reflects laser light L emitted from the laser device 110 toward the first laser reflector 161 and the second laser reflector 162.

[0044] The second laser reflector 162 is positioned on the optical axis of the laser beam L reflected by the third laser reflector 163. The first laser reflector 161 is configured to move between the optical axis of the laser beam L reflected by the third laser reflector 163 and outside of that optical axis. That is, the first laser reflector 161 moves between a position where it reflects the laser beam L reflected by the third laser reflector 163 and a position where it does not reflect it.

[0045] When the first laser reflector 161 moves to a position where it reflects the laser light L reflected by the third laser reflector 163 toward the first galvanometer mirror apparatus, the laser light L passes through the objective lens group 140 (see Figure 12). When the first laser reflector 161 moves to a position where it does not reflect the laser light L reflected by the third laser reflector 163, the laser light L is reflected by the second laser reflector 162 and passes through the fθ lens 130 (see Figure 13). In other words, the first laser reflector 161 is configured as a means for switching the optical path of the laser light L. The ablation unit 101 can selectively perform ablation of the sample with the laser light L that has passed through the fθ lens 130 and ablation of the sample with the laser light L that has passed through the objective lens group 140 by switching the optical path by moving the first laser reflector 161.

[0046] The means by which the first laser reflector 161 moves between a position that reflects the laser light L reflected by the third laser reflector 163 and a position that does not reflect it are not particularly limited. For example, the first laser reflector 161 may be configured to move in one direction (for example, in the X direction), or the first laser reflector 161 may be rotated so that it moves away from the optical axis of the laser light L reflected by the third laser reflector 163.

[0047] 〔lens〕 The fθ lens 130 and the objective lens group 140 adjust the focusing diameter of the laser beam L. The fθ lens 130 and the objective lens group 140 may be arranged within the laser ablation unit 100 with a gap in the X direction, for example. The fθ lens 130 focuses the laser beam L on the surface of the sample with a relatively large focusing diameter, while the objective lens group 140 focuses with a smaller focusing diameter than the fθ lens 130. A beam expander lens (not shown) that expands the beam diameter may be placed upstream of the fθ lens 130 and the objective lens group 140.

[0048] The three objective lenses 141, 142, and 143 are held in parallel in the X direction in a lens holder 144. The lens holder 144 is mounted on a moving means (not shown), such as a known uniaxial stage, and can be moved in the X direction. By moving the lens holder 144, the ablation unit 100 can select any of the three objective lenses 141, 142, and 143 to change the focusing diameter of the laser beam L on the sample surface.

[0049] The upper limit of the focusing diameter of the laser beam L by at least one of the three objective lenses 141, 142, and 143 may be, for example, 2.0 μm or 1.0 μm. That is, it is preferable that one of the three objective lens groups 140 has a magnification that allows the focusing diameter of the laser beam L on the sample surface to be 2 μm or less. The lower limit of the focusing diameter is not particularly limited and may be, for example, 0.5 μm. By irradiating the sample with laser beam L at such a focusing diameter, fine ablation can be performed.

[0050] 〔stage〕 The ablation unit 100 has a stage 170 on which a cell 1 containing a sample is placed. A gas supply pipe P1 is connected to an inlet 21 of the cell 1 placed on the stage 170, and a gas discharge pipe P2 is connected to an outlet 22.

[0051] The means of positioning cell 1 on stage 170 are not particularly limited, and it may be fixed with bolts, pins, etc., but it is preferable that it be fixed by magnetic force. Specifically, it is preferable that magnets be placed on stage 170 and that cell 1, which is made of a magnetic material such as metal, be fixed by the magnetic force of the magnets. What is placed on stage 170 may be a coil that generates magnetic force when an electric current is passed through it. The magnets or coils may be placed on cell 1, or on stage 170 and cell 1. The stage 170 may be provided with guides for determining the position in which cell 1 is fixed.

[0052] The stage 170 is preferably capable of moving cell 1 in the axial direction of the laser beam L that irradiates the sample, and in two directions that are perpendicular to this axial direction and mutually perpendicular. In other words, an XYZ stage is preferably used as the stage 170. This makes it easy to adjust the irradiation position of the laser beam L that irradiates the sample.

[0053] The means for moving the laser beam L in the axial direction (adjustment means) of the stage 170 is not particularly limited, but it is preferably configured to be adjustable by a piezoelectric element drive. The upper limit of the minimum movement unit (resolution) in the axial direction is preferably 5 nm, more preferably 2 nm, and even more preferably 1 nm. The lower limit of the minimum movement unit is not particularly limited and may be, for example, 0.1 nm. By setting the minimum movement unit within the above range, the position (distance) at which the laser beam L is focused on the sample surface can be easily and accurately adjusted.

[0054] Since the ablation unit 100 is equipped with the cell 1, the aerosol generated by ablating the sample can be rapidly discharged from the cell 1. For example, even when multiple locations are ablated, each generated aerosol can be rapidly discharged and sequentially transported to the analyzer 200, allowing for highly accurate analysis of each aerosol.

[0055] [Other embodiments] The above embodiments do not limit the configuration of the present invention. Accordingly, the above embodiments allow for the omission, substitution, or addition of components of each part of the above embodiments based on the description herein and common technical knowledge, and all such omissions, substitutions, or additions should be interpreted as falling within the scope of the present invention.

[0056] The shape of the sample chamber in plan view is not limited to a rectangular shape, but may be circular, elliptical, oval, polygonal, or other shapes. The position of the sample chamber in plan view is not limited to the center, but may be formed, for example, close to the gas inlet or close to the gas outlet.

[0057] The internal space through which the gas flows may be formed by creating a recess (thin section) in the main body. Furthermore, the main body may also have an inlet through which the gas flows in and an outlet through which the gas that has passed through the internal space flows out.

[0058] The cell may also be used in devices, equipment, etc. other than the ablation unit. [Industrial applicability]

[0059] A cell according to one aspect of this disclosure can be used in an ablation unit connected to an analyzer that analyzes a sample aerosol, thereby enabling efficient analysis of the sample. [Explanation of Symbols]

[0060] 1 cell 10 Main body 10a recess 11 Sample Room 20 Lid 20a depression 21 Inlet 22 Outlet 23 Top opening 30 Rectifier plate 31 Side plate part 32 Tapering part 33 Connection part 33a Bottom opening 40 sealing member 100 Ablation Units 110 Laser device 121 First Galvanometer Mirror Device 121a,122a First reflecting mirror 121b, 122b Second reflecting mirror 122 Second Galvanometer Mirror Device 130 fθ lens 140 Objective lens group 141 First objective lens 142 Second objective lens 143 Third objective lens 144 Lens Holder 151 Reflecting mirror for objective lens 152 fθ lens reflector 161 First Laser Reflector 162 Second Laser Reflector 163 Third Laser Reflector 170 stages 180 Camera 200 analysis units L Laser light P1 Gas supply pipe P2 Gas discharge pipe R interior space

Claims

1. A cell comprising a main body and a lid that can be attached to the main body, By attaching the lid to the main body, an internal space through which gas can flow is formed. The main body has a sample chamber that is open to the internal space and in which the sample is placed. A cell in which a rectifier plate for straightening the flowing gas is arranged in the internal space described above.

2. The cell according to claim 1, wherein the rectifier plate is detachably arranged in the internal space.

3. The cell according to claim 1, further comprising a mounting platform for placing a sample, which is arranged in the sample chamber described above.

4. The cell according to claim 1, wherein the rectifier plate has a pair of side plate portions that are arranged opposite to each other so as to be parallel to the direction of gas flow in the internal space when viewed in plan.

5. The lid portion or the main body portion has an inlet through which gas flows in and an outlet through which the gas that has passed through the internal space flows out. The cell according to claim 4, wherein the pair of side plates have a tapering portion in which the distance between them gradually decreases from the inlet to the outlet.

6. An ablation unit comprising the cells described in claims 1 to 5.

7. A rectifier plate comprising a main body and a detachable lid, wherein an internal space through which gas can flow is formed when the lid is attached to the main body, and the main body is open to the internal space and is positioned in the internal space of a cell having a sample chamber in which a sample is placed, and rectifies the flowing gas.

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