Temperature control device

Abstract

To enable effective temperature control of liquids. [Solution] The temperature control device 1 comprises a circulation channel 10 through which liquid flows, a new liquid supply channel 19f for adding new liquid to the circulation channel 10, heating and cooling units 4U1 and 4U2, a tank 2 for storing liquid to be supplied to an external process, a tank supply port 19 for adding new liquid to the tank 2 from outside the circulation channel 10, switching valves 41 and 42 that can switch the connection between the new liquid supply channel 19f and the heating and cooling units 4U1 and 4U2, and a controller 20 for controlling the heating and cooling units 4U1 and 4U2. The controller 20 controls the switching valves 41 and 42 to connect the new liquid supply channel 19f and the heating and cooling units 4U1 and 4U2 after operation has started and new liquid is added to the tank 2 from the tank supply port 19.

Description

Technical Field

[0001] The present invention relates to a temperature control device.

Background Art

[0002] As shown in Patent Document 1 and Patent Document 2, a technique for maintaining a liquid flowing through a circulation path including a heating device at an appropriate temperature is disclosed.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] In a heating device for a circulating liquid, when a normal-temperature liquid is supplied into a tank during the operation of an external process device, the temperature of the liquid in the tank decreases, so the inlet temperature to the heating device may fluctuate greatly. When the responsiveness of the heating device is slow, it may be difficult to sufficiently compensate for fluctuations in the inlet temperature, etc. with feedforward compensation for each heating device, and this will appear as fluctuations in the outlet temperature of the heating device.

[0005] An aspect of the present invention aims to enable effective adjustment of the temperature of a liquid.

Means for Solving the Problems

[0006] According to an aspect of the present invention, a temperature control device is provided comprising: a circulation channel through which a liquid flows; a new liquid supply channel for adding new liquid to the circulation channel from outside the circulation channel; a plurality of heating and cooling units arranged in the circulation channel for heating or cooling the liquid flowing through the circulation channel; a tank for storing the liquid to be supplied to an external process; a tank supply port for adding new liquid to the tank from outside the circulation channel; a switching valve capable of switching the connection between the new liquid supply channel and the heating and cooling unit; and a controller for controlling the heating and cooling unit, wherein the controller controls the switching valve to connect the new liquid supply channel and the heating and cooling unit after the start of operation and when adding new liquid to the tank from the tank supply port. [Effects of the Invention]

[0007] According to an aspect of the present invention, the temperature of a liquid can be effectively controlled. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is a schematic diagram showing an example of a temperature control device according to the first embodiment, and represents state A. [Figure 2] Figure 2 is a schematic diagram showing the temperature control device shown in Figure 1 in state A. [Figure 3] Figure 3 is a schematic diagram showing an example of a temperature control device according to the first embodiment, and represents state B. [Figure 4] Figure 4 is a schematic diagram showing the temperature control device shown in Figure 3 in state B. [Figure 5] Figure 5 shows the fluctuations in outlet temperature. [Figure 6] Figure 6 is a flowchart showing an example of a temperature control method using a temperature control device according to the first embodiment. [Figure 7] Figure 7 is a schematic diagram showing an example of a temperature control device according to the second embodiment, and represents state A. [Figure 8]Figure 8 is a schematic diagram showing the temperature control device shown in Figure 7 in state A. [Figure 9] Figure 9 is a schematic diagram showing an example of a temperature control device according to the second embodiment, and represents state B. [Figure 10] Figure 10 is a schematic diagram showing the temperature control device shown in Figure 9 in state B. [Figure 11] Figure 11 is a block diagram showing a computer system according to the first embodiment. [Modes for carrying out the invention]

[0009] The following describes embodiments of the present invention with reference to the drawings, but the present invention is not limited thereto. The components of the embodiments described below can be combined as appropriate. In addition, some components may not be used.

[0010] [First Embodiment] <Temperature control device> A first embodiment will now be described. Figure 1 is a schematic diagram showing an example of a temperature control device according to the first embodiment, and represents state A. Figure 2 is a schematic diagram showing the temperature control device shown in Figure 1 in state A. Figure 3 is a schematic diagram showing an example of a temperature control device according to the first embodiment, and represents state B. Figure 4 is a schematic diagram showing the temperature control device shown in Figure 3 in state B. In Figures 2 and 4, some components have been omitted to simplify the explanation of the liquid flow. The temperature control device 1 controls the temperature of the liquid supplied to the external process device 100.

[0011] The external process equipment 100 is, for example, a semiconductor wafer cleaning device. The semiconductor wafer cleaning device cleans semiconductor wafers one by one at predetermined time intervals. Since the cleaning cycle and the amount of liquid (pure water) used in the semiconductor wafer cleaning device are patterned, the fluctuations in the liquid temperature are also patterned.

[0012] The temperature control device 1 includes a tank 2, a pump 3, a first heating / cooling unit 4U1, a second heating / cooling unit 4U2, a first switching valve 41, a second switching valve 42, a circulation flow path 10, a flow rate sensor 11, an inlet temperature sensor 12, an outlet temperature sensor 13, a supply port 17, a return port 18, a tank supply port 19, a controller 20, and a liquid level controller 30.

[0013] The tank 2 stores a liquid to be supplied to an external process device 100. A pump 3 is connected downstream of the tank 2. The pump 3 is connected upstream of the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2. The liquid stored in the tank 2 is pumped by the pump 3 and passes through the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2. Let the supply amount of the liquid supplied from the tank 2 to the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 via the pump 3 be Q.

[0014] Of the liquid supplied to the external process device 100, the liquid that is not used and is discharged is recovered by the tank 2 via the return port 18. Let the flow rate of the liquid used in the process 101 of the external process device 100 be Qp. Let the flow rate of the liquid recovered by the tank 2 via the return port 18 be Qr.

[0015] A liquid level sensor 2s for detecting the amount of liquid in the tank 2 is disposed in the tank 2. The liquid level sensor 2s detects the level of the liquid surface in the tank 2. The liquid level sensor 2s outputs the detection result to the controller 20.

[0016] When the liquid in the tank 2 becomes equal to or less than a lower limit value (liquid amount threshold value) L2, a required amount of new liquid (hereinafter referred to as "new liquid") is supplied from the tank supply port 19. Let the flow rate of the liquid added from outside the temperature control device 1 to the tank 2 via the tank supply port 19 and the supply valve 19v be Qs.

[0017] The first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are capable of at least one of heating and / or cooling the liquid supplied to the external process apparatus 100. The first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are containers of a certain volume equipped with a liquid inlet and outlet. For example, if the external process apparatus 100 is a pure water heating device, the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are equipped with halogen lamp heaters in quartz bottles with inlets and outlets, and heat the pure water by radiant heat.

[0018] The first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are each composed of one or more heating / cooling units. When composed of multiple heating / cooling units, these units are arranged in series, parallel, or a combination thereof. For example, in Figure 1, the first heating / cooling unit 4U1 is composed of two heating / cooling units, and the second heating / cooling unit 4U2 is composed of one heating / cooling unit.

[0019] The first heating / cooling unit 4U1 is located upstream of the second heating / cooling unit U2. The first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are controlled by the controller 20 so that the outlet temperature PV of the liquid passing through them reaches the target temperature SV.

[0020] An inlet temperature sensor 12 is provided before the inlet of the first heating / cooling unit 4U1, and an outlet temperature sensor 13 and a flow meter are provided after the outlet of the second heating / cooling unit 4U2. The first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 may each be equipped with a temperature sensor or temperature estimation means for measuring the outlet temperature.

[0021] The first heating / cooling unit 4U1 is connected via a switching valve to enable switching between the circulation channel 10 and the new liquid supply channel 19f. The first heating / cooling unit 4U1 is located downstream of the tank 2 and upstream of the supply port 17.

[0022] The second heating / cooling unit U2 is connected to the circulation channel 10. The second heating / cooling unit U2 is located downstream of the first heating / cooling unit 4U1 and upstream of the supply port 17.

[0023] The circulation channel 10 is a channel through which the liquid supplied to the external process device 100 circulates. The circulation channel 10 is equipped with a tank 2, a pump 3, a first heating / cooling unit 4U1, a second heating / cooling unit 4U2, a flow sensor 11, an inlet temperature sensor 12, an outlet temperature sensor 13, a supply port 17, a return port 18, and a valve 102.

[0024] The flow sensor 11 is positioned between the tank 2 and the first heating / cooling unit 4U1. The flow sensor 11 is positioned between the pump 3 and the first heating / cooling unit 4U1. The flow sensor 11 measures the amount Q of liquid supplied to the first heating / cooling unit 4U1.

[0025] The inlet temperature sensor 12 is positioned between the tank 2 and the inlet of the first heating / cooling unit 4U1. The inlet temperature sensor 12 is positioned between the pump 3 and the first heating / cooling unit 4U1. The inlet temperature sensor 12 measures the liquid inlet temperature Tin, which is the temperature of the liquid flowing into the first heating / cooling unit 4U1.

[0026] The outlet temperature sensor 13 is positioned between the outlet of the second heating / cooling unit 4U2 and the supply port 17 to the external process equipment 100. The outlet temperature sensor 13 measures the outlet temperature PV of the liquid.

[0027] The supply port 17 supplies liquid to the external process device 100. The supply port 17 is a port located downstream of the second heating / cooling unit 4U2 that supplies liquid to the external process device 100. The supply port 17 supplies liquid, whose temperature has been controlled by the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2, to the external process device 100.

[0028] The return port 18 is a port that receives the return liquid from the external process device 100 into the tank 2. The return port 18 returns the liquid from the circulation channel 10 to the tank 2. The return port 18 recovers the excess liquid from the external process device 100 into the tank 2. The flow rate of the liquid recovered into the tank 2 via the return port 18 is Qr.

[0029] The tank supply port 19 is a port for adding fresh liquid to the tank 2 from outside the circulation channel 10. The flow rate of fresh liquid added to the tank 2 via the tank supply port 19 and the supply valve 19v is Qs. The supply valve 19v located at the tank supply port 19 is opened when the liquid level in the tank 2 falls below the lower threshold L2.

[0030] The supply valve 19V is controlled to open and close by a control signal from the liquid level controller 30, which will be described later.

[0031] The channel that supplies heated pure water to the process is called the circulation channel 10. The channel that supplies fresh liquid to tank 2 from outside the circulation channel 10 is called the fresh liquid supply channel 19f.

[0032] The first switching valve 41 and the second switching valve 42 can switch the connection between the new liquid supply channel 19f and a part of the heating and cooling unit.

[0033] The first switching valve 41 is a valve that switches the new liquid supply channel 19f. The first switching valve 41 is connected in a way that allows switching between the circulation channel 10 between the downstream side of the tank 2 and the first heating / cooling unit 4U1 and the new liquid supply channel 19f. The first switching valve 41 is positioned to allow switching between the new liquid supply channel 19f1 downstream of the supply valve 19v and the channel between the pump 3 and the first heating / cooling unit 4U1. The switching of the new liquid supply channel 19f by the first switching valve 41 is controlled by the controller 20, which will be described later.

[0034] The second switching valve 42 is a valve that switches the new liquid supply channel 19f. The second switching valve 42 is connected to switch between the circulation channel 10 between the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 and the new liquid supply channel 19f. The second switching valve 42 is positioned to switch between the new liquid supply channel 19f2 connecting the downstream side of the first switching valve 41 and the tank 2, and the channel between the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2. The switching of the new liquid supply channel 19f of the second switching valve 42 is controlled by a controller 20, which will be described later.

[0035] The new liquid supply channel 19f comprises a new liquid supply channel 19f1 and a new liquid supply channel 19f2. The new liquid supply channel 19f1 is a channel that supplies new liquid to the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2. The new liquid supply channel 19f1 is located between the tank supply port 19 and the supply valve 19v and the first switching valve 41. The new liquid supply channel 19f2 is a channel that supplies temperature-controlled new liquid to the tank 2. The new liquid supply channel 19f2 is located between the second switching valve 42 and the tank 2.

[0036] The new liquid inlet temperature sensor 45 measures the temperature Tin2 of the new liquid. The new liquid inlet temperature sensor 45 is located downstream of the supply valve 19v and upstream of the first heating / cooling unit 4U1.

[0037] The new liquid flow meter 46 measures the supply flow rate Qs of the new liquid. The new liquid flow meter 46 is located downstream of the supply valve 19v and upstream of the first heating / cooling unit 4U1.

[0038] The new liquid outlet temperature sensor 47 measures the temperature PVs of the temperature-controlled new liquid just before it is supplied to the tank 2. The new liquid outlet temperature sensor 47 is located on the new liquid supply channel 19f2, directly before the tank 2.

[0039] <effect> Figure 5 shows the fluctuation of the outlet temperature. State A (first state) is the state until the outlet temperature of the liquid controlled by the temperature control device 1 reaches the target temperature SV. State B (second state) is the state in which the outlet temperature of the liquid has reached the target temperature SV and the temperature-controlled liquid is being supplied to the external process device 100.

[0040] State A will be explained using Figures 1 and 2. In the temperature control device 1, the liquid stored in the tank 2 is pumped by the pump 3 and passes through the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2. The temperature of the passing liquid is controlled by the controller 20, which will be described later, so that the temperature PV observed by the outlet temperature sensor 13 reaches the target temperature SV. When the temperature PV reaches the target temperature SV, the system switches to state B. In state A, the circulation channel 10, which is a normal heating channel, is independent of the new liquid supply channel 19f. State A is a state in which the new liquid supply channel 19f and the first heating / cooling unit 4U1 are not connected.

[0041] In state A, the flow path is switched by the first switching valve 41 and the second switching valve 42 so that the liquid stored in tank 2 passes through the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2. In the example shown in Figures 1 and 2, the liquid discharged from tank 2 by pump 3 is temperature-controlled by the two units of the first heating / cooling unit 4U1 and the one unit of the second heating / cooling unit 4U2. In state A, no new liquid is supplied.

[0042] Using FIGS. 3 and 4, state B will be described. After the liquid circulating in the circulation channel 10 reaches the target temperature SV, the liquid temperature-controlled by the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 is supplied from the supply port 17 to the external process device 100. In the external process device 100, for example, a cleaning process of a semiconductor wafer is performed using a part of the supplied liquid. The surplus liquid not used in the external process device 100 is recovered from the return port 18 to the tank 2. When the level of the liquid in the tank 2 drops below the lower threshold value L2 by supplying the liquid to the external process device 100, the controller 20 supplies fresh liquid to the tank 2 via the tank supply port 19 and the supply valve 19v after the fresh liquid is temperature-controlled. In state B, fresh liquid corresponding to the liquid that is insufficient in the tank 2 as the process progresses is repeatedly supplied from the tank supply port 19 and the supply valve 19v. When the level of the liquid in the tank 2 exceeds the upper threshold value L1 due to the addition of fresh liquid, the supply of fresh liquid is stopped.

[0043] In state B, a part of the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 is used for temperature control of the fresh liquid, and the rest is used to control the outlet temperature PV of the pure water supplied to the process of the circulation channel 10. State B is a state in which the fresh liquid supply channel 19f is connected to the first heating / cooling unit 4U1.

[0044] In state B, in the fresh liquid supply channel 19f, the flow path is switched so that two units of the first heating / cooling unit 4U1 are connected by the first switching valve 41 and the second switching valve 42. The controller 20 measures the temperature Tin2 of the fresh liquid with the fresh liquid inlet temperature sensor 45, measures the supply flow rate Qs of the fresh liquid with the fresh liquid flow meter 46, and controls the temperature PVs of the temperature-controlled fresh liquid by the fresh liquid outlet temperature sensor 47 to reach the target temperature SVs (SVs <SV).

[0045] In state B, the circulation path 10 is switched by the first switching valve 41 and the second switching valve 42 so that one unit of the second heating / cooling unit 4U2 is connected to it. In state B, the inlet temperature Tin has risen to near the target temperature SV, so the power required for heating is small, and one unit is sufficient. The temperature PVs of the new liquid supplied to tank 2 is also supplied at a temperature higher than room temperature, so the temperature drop in tank 2 is reduced, and the fluctuation of the inlet temperature Tin becomes smaller than in the conventional technology. As a result, the power required to suppress temperature fluctuations is also small, and one unit is sufficient.

[0046] <Controller> The controller 20 calculates the amount of operation MV for each heating / cooling unit 4 relative to the target liquid temperature SV based on the measurement results from the flow sensor 11, the inlet temperature sensor 12, and the outlet temperature sensor 13. The controller 20 calculates the amount of operation MV for the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 relative to the target liquid temperature SV based on the supply amount Q measured by the flow sensor 11, the inlet temperature Tin measured by the inlet temperature sensor 12, and the outlet temperature PV measured by the outlet temperature sensor 13. The controller 20 operates the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 according to the calculated amount of operation to control the outlet temperature PV to the desired temperature.

[0047] When operation has started and new liquid is being added to the tank 2 from the tank supply port 19, the controller 20 controls the first switching valve 41 and the second switching valve 42 to connect the new liquid supply channel 19f to the first heating / cooling unit 4U1 as part of the heating / cooling unit.

[0048] In state A, the controller 20 controls the first switching valve 41 and the second switching valve 42 so that the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are connected to the circulation channel 10.

[0049] In state B, the controller 20 controls the first switching valve 41 and the second switching valve 42 so that the first heating / cooling unit 4U1 is connected to the new liquid supply channel 19f and the second heating / cooling unit 4U2 is connected to the circulation channel 10.

[0050] <Liquid Level Controller> The liquid level controller 30 monitors and controls the liquid level in tank 2. Based on the detection result of the liquid level sensor 2s, the liquid level controller 30 outputs an open / close signal to the supply valve 19v.

[0051] When the liquid level in tank 2 decreases to a certain level and the liquid level sensor 2s detects that it is below the predetermined lower threshold L2 of the tank level, the liquid level controller 30 outputs a valve open command to the supply valve 19v. As a result, room temperature liquid is supplied from the tank supply port 19. When the liquid level sensor 2s detects that the room temperature liquid supplied to tank 2 is above the predetermined upper threshold L1 of the tank level, the liquid level controller 30 outputs a valve close command to the supply valve 19v.

[0052] <Computer System> Figure 11 is a block diagram showing a computer system 1000 according to an embodiment. The controller 20 and liquid level controller 30 described above are included in the computer system 1000. The computer system 1000 includes a processor 1001 such as a CPU (Central Processing Unit), a main memory 1002 including non-volatile memory such as ROM (Read Only Memory) and volatile memory such as RAM (Random Access Memory), a storage 1003, and an interface 1004 including input / output channels. The functions of the controller 20 and liquid level controller 30 described above are stored as a program in the storage 1003. The processor 1001 reads the program from the storage 1003, loads it into the main memory 1002, and executes the above-mentioned processing according to the program. The program may be distributed to the computer system 1000 via a network.

[0053] <Temperature control method> Figure 6 is a flowchart showing an example of a temperature control method using a temperature control device according to the first embodiment. When the temperature control device 1 is started, the process shown in the flowchart in Figure 6 is executed.

[0054] The controller 20 performs the control in state A (step ST11). The controller 20 controls the heating and cooling unit 4 using feedback control or the like so that the outlet temperature PV detected by the outlet temperature sensor 13 reaches the target temperature SV for the liquid passing through the circulation channel 10. The controller 20 does nothing for the new liquid supply channel 19f.

[0055] The controller 20 determines whether it is possible to transition to state B (step ST12). The controller 20 determines that it is possible to transition to state B if both of the following two conditions are met. α is a predetermined threshold. Condition 1 is a condition for determining whether the liquid circulating in the circulation channel 10 has reached the target temperature SV. If the controller 20 determines that it is possible to transition to state B (step ST12; Yes), it proceeds to step ST13. If the controller 20 does not determine that it is possible to transition to state B (step ST12; No), it repeats the process in step ST12. (Condition 1) SV-1[℃]≦PV≦SV+1[℃] (Condition 2) SV-Tin<α

[0056] If it is determined that it is possible to transition to state B (step ST12; Yes), the controller 20 executes the control in state B (step ST13). The controller 20 continues the same control as in state A for the liquid passing through the circulation channel 10. For the liquid passing through the new liquid supply channel 19f, the controller 20 obtains the temperature Tin2 of the new liquid detected by the new liquid inlet temperature sensor 45 and the supply flow rate Qs of the new liquid detected by the new liquid flow meter 46. The controller 20 performs feedback control, etc., so that the temperature PVs of the temperature-controlled new liquid detected by the new liquid outlet temperature sensor 47 just before it is supplied to the tank 2 becomes the target temperature SV.

[0057] In step ST13, the liquid level controller 30 controls the supply of new liquid to tank 2. More specifically, based on the detection result of the liquid level sensor 2s, the liquid level controller 30 outputs an open signal to the supply valve 19v when the liquid level in tank 2 falls below the lower threshold L2. Based on the detection result of the liquid level sensor 2s, the liquid level controller 30 outputs a closed signal to the supply valve 19v when the liquid level in tank 2 exceeds the upper threshold L1.

[0058] The controller 20 determines whether or not to change the target temperature SV (step ST14). If the controller 20 determines to change the target temperature SV (step ST14; No), it proceeds to step ST15. If the controller 20 determines not to change the target temperature SV (step ST14; Yes), it repeats the process in step ST11.

[0059] The controller 20 determines whether or not to stop the operation (step ST15). If the controller 20 determines to stop the operation (step ST15; Yes), it terminates the process in this flowchart. If the controller 20 does not determine to stop the operation (step ST15; No), it repeats the process in step ST14.

[0060] <Effects> As described above, in this embodiment, the new liquid supply channel 19f and the first heating / cooling unit 4U1 are connected after the start of operation and when new liquid is added to the tank 2 from the tank supply port 19. According to this embodiment, the temperature of the new liquid can be controlled without adding a dedicated heating / cooling unit to the new liquid supply channel 19f. In this way, the embodiment makes it possible to effectively adjust the temperature of the liquid.

[0061] In this embodiment, the first heating and cooling unit 4U1 heats the fresh liquid to a target temperature SVs before supplying it, thereby suppressing the temperature drop within the tank 2. As a result, fluctuations in the inlet temperature Tin and outlet temperature PV can be suppressed.

[0062] In this embodiment, in state A, the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are connected to the circulation channel 10. In this embodiment, in state B, the first heating / cooling unit 4U1 is connected to the new liquid supply channel 19f, and the second heating / cooling unit 4U2 is connected to the circulation channel 10. According to this embodiment, the liquid temperature can be effectively adjusted in both state A and state B.

[0063] In this embodiment, the first heating / cooling unit 4U1 is connected to the circulation channel 10 and the new liquid supply channel 19f via a first switching valve 41 and a second switching valve 42, allowing for switching between them. In this embodiment, the second heating / cooling unit 4U2 is connected to the circulation channel 10. According to this embodiment, the temperature of the new liquid can be controlled without adding a dedicated heating / cooling unit to the new liquid supply channel 19f.

[0064] [Second Embodiment] A second embodiment will now be described. Figure 7 is a schematic diagram showing an example of a temperature control device according to the second embodiment, and represents state A. Figure 8 is a schematic diagram showing the temperature control device shown in Figure 7 in state A. Figure 9 is a schematic diagram showing an example of a temperature control device according to the second embodiment, and represents state B. Figure 10 is a schematic diagram showing the temperature control device shown in Figure 9 in state B. In Figures 8 and 10, some components have been omitted to simplify the explanation of the liquid flow. In the second embodiment, the arrangement of the first heating / cooling unit 4U1 and the first switching valve 41 differs from that of the first embodiment. In the following description, components similar to those in the first embodiment are denoted by the same reference numerals and their explanations are omitted.

[0065] The first heating and cooling unit 4U1 is located in the flow path between the return port 18 and the tank 2, or in the new liquid supply flow path 19f. The first heating and cooling unit 4U1 is located upstream of the tank 2 and downstream of the return port 18.

[0066] The second heating and cooling unit 4U2 is located downstream of the pump 3 and upstream of the supply port 17. The second heating and cooling unit 4U2 is located downstream of the tank 2 and upstream of the supply port 17.

[0067] For example, in Figure 7, the first heating / cooling unit 4U1 is composed of two heating / cooling units, and the second heating / cooling unit 4U2 is composed of one heating / cooling unit.

[0068] The first switching valve 41 is a valve that switches the flow path connected to the first heating / cooling unit 4U1. The first switching valve 41 is connected to switch between the circulation flow path 10 between the tank supply port 19 and the first heating / cooling unit 4U1 and the new liquid supply flow path 19f. The first switching valve 41 is controlled by the controller 20, which will be described later, to switch the new liquid supply channel 19f.

[0069] The new liquid supply channel 19f is a channel that supplies new liquid to the tank 2 via the first heating and cooling unit 4U1. The new liquid supply channel 19f1 is located between the tank supply port 19 and supply valve 19v and the tank 2.

[0070] The new liquid inlet temperature sensor 45 measures the temperature Tin2 of the new liquid. The new liquid inlet temperature sensor 45 is located downstream of the supply valve 19v and upstream of the first switching valve 41.

[0071] The new liquid flow meter 46 measures the supply flow rate Qs of the new liquid. The new liquid flow meter 46 is located downstream of the supply valve 19v and upstream of the first switching valve 41.

[0072] The new liquid outlet temperature sensor 47 measures the temperature PVs of the temperature-controlled new liquid just before it is supplied to the tank 2. The new liquid outlet temperature sensor 47 is located between the first heating / cooling unit 4U1 and the tank 2, directly in front of the tank 2.

[0073] As shown in Figures 7 and 8, in state A, the flow path is switched by the switching valve 41 so that the liquid stored in tank 2 is pumped by pump 3, passes through the second heating / cooling unit 4U2, and then passes through the first heating / cooling unit 4U1 from the return port 18. In state A, no new liquid is supplied. In the example shown in Figures 7 and 8, in state A, the liquid that comes out of tank 2 by pump 3 is temperature-controlled by one unit of the second heating / cooling unit 4U2, and the liquid that returns to tank 2 from the return port 18 is temperature-controlled by two units of the first heating / cooling unit 4U1.

[0074] In state A, the temperature control device 1 controls the temperature by the controller 20 so that the temperature PV observed by the outlet temperature sensor 13 becomes the target temperature SV. The temperature control device 1 measures the temperature Tin2 of the new liquid with the new liquid inlet temperature sensor 45, measures the supply flow rate Qs of the new liquid with the new liquid flow meter 46, and controls the temperature by the controller 20 so that the temperature-controlled temperature PVs of the new liquid with the new liquid outlet temperature sensor 47 becomes the target temperature SVs.

[0075] As shown in Figures 9 and 10, in state B, the new liquid supply channel 19f is switched by the first switching valve 41 so that two units of the first heating and cooling unit 4U1 are connected to it. The temperature control device 1 measures the temperature Tin2 of the new liquid with the new liquid inlet temperature sensor 45, measures the supply flow rate Qs of the new liquid with the new liquid flow meter 46, and controls the temperature PVs of the temperature-controlled new liquid with the new liquid outlet temperature sensor 47 so that it becomes the target temperature SVs.

[0076] In state B, similar to state A, one unit of the second heating / cooling unit 4U2 is connected to the circulation channel 10.

[0077] <Effects> As described above, in this embodiment, the temperature of the new liquid can be controlled without adding a dedicated heating and cooling unit to the new liquid supply channel 19f. In this way, the embodiment makes it possible to effectively adjust the temperature of the liquid.

[0078] <Variation> In the above description, the system was described as comprising an inlet temperature sensor 12 and an outlet temperature sensor 13 as temperature sensors. However, it may also be further provided with temperature sensors or temperature estimation means for measuring the outlet temperatures PV of the heating / cooling unit 4U1 and the second heating / cooling unit 4U2, respectively.

[0079] The above describes the case where the heating / cooling unit 4U1 and the second heating / cooling unit 4U2 heat a liquid, but the method is also applicable when cooling a liquid.

[0080] In the above description, pump 3 is assumed to be located upstream of heating / cooling unit 4U1 and second heating / cooling unit 4U2, but it may also be located downstream of heating / cooling unit 4U1 and second heating / cooling unit 4U2. [Explanation of Symbols]

[0081] 1...Temperature control device, 2...Tank, 2s...Liquid level sensor, 3...Pump, 4U1...First heating / cooling unit (heating / cooling unit), 4U2...Second heating / cooling unit (heating / cooling unit), 10...Circulation channel, 11...Flow rate sensor, 12...Inlet temperature sensor, 13...Outlet temperature sensor, 17...Supply port, 18...Return port, 19...Tank supply port, 19v...Supply valve, 20...Controller, 30...Liquid level controller, 41...First switching valve (switching valve), 42...Second switching valve (switching valve), 100...External process equipment, 101...Process, 102...Valve, L1...Upper threshold, L2...Lower threshold (liquid volume threshold), MV...Operated volume, MVs...Operated volume, PV...Outlet temperature, PVs...Outlet temperature, Q...Supply amount, Qp...Flow rate, Qr...Flow rate, Qs...Flow rate, SV...Target temperature, Tin...Inlet temperature, Tin2...Inlet temperature.

Claims

1. A circulation channel through which liquid flows, A new liquid supply channel is provided to add new liquid to the aforementioned circulation channel from outside the circulation channel, Multiple heating and cooling units are arranged in the aforementioned circulation channel to heat or cool the liquid flowing through the circulation channel, A tank for storing the liquid to be supplied to an external process, A tank supply port for adding new liquid to the tank from outside the circulation channel, A switching valve that can switch the connection between the new liquid supply channel and a part of the heating and cooling unit, A controller that controls the heating and cooling unit, Equipped with, The controller controls the switching valve to connect the new liquid supply path to a part of the heating and cooling unit after operation has started and new liquid is being added to the tank from the tank supply port. Temperature control device.

2. The state in which the new liquid supply channel and the heating / cooling unit are not connected is defined as the first state. The state in which the new liquid supply channel and the heating / cooling unit are connected is defined as the second state. The aforementioned controller, In the first state, at least a portion of the heating / cooling unit is connected to the circulation channel, and in the second state, the switching valve is controlled so that a portion of the heating / cooling unit is connected to the new liquid supply channel and the rest of the heating / cooling unit is connected to the circulation channel. The temperature control device according to claim 1.

3. The heating and cooling unit comprises a first heating and cooling unit and a second heating and cooling unit. The first heating and cooling unit is connected to the circulation channel and the new liquid supply channel via the switching valve so as to be switchable. The second heating and cooling unit is connected to the circulation path, The temperature control device according to claim 1.

4. A supply port that branches off from the aforementioned circulation channel and supplies liquid to the aforementioned external process, Equipped with, The first heating and cooling unit is located downstream of the tank and upstream of the supply port. The second heating and cooling unit is located downstream of the first heating and cooling unit and upstream of the supply port. The aforementioned switching valve comprises a first switching valve and a second switching valve. The first switching valve is connected to switch between the circulation channel between the downstream side of the tank and the first heating / cooling unit and the new liquid supply channel. The second switching valve is connected to switch between the circulation channel between the first heating / cooling unit and the second heating / cooling unit and the new liquid supply channel. The temperature control device according to claim 3.

5. A supply port that branches off from the circulation channel and supplies liquid to the external process, A return port for returning liquid from the circulation channel to the tank, Equipped with, The first heating and cooling unit is located upstream of the tank and downstream of the return port. The second heating and cooling unit is located downstream of the tank and upstream of the supply port. The switching valve is connected to switch between the circulation path between the tank supply port and the first heating / cooling unit and the new liquid supply path. The temperature control device according to claim 3.

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