robot systems

Abstract

We provide highly efficient robotic systems. [Solution] In the robot system, the pallet 30 installed on the vehicle body 10 includes a fixed pallet fixed to the vehicle body and a sliding pallet that slides along the first direction on the vehicle body, and both the fixed pallet 300 and the sliding pallet 310 are provided with a loading station 31. The vehicle body has an initial position located directly below the fixed pallet and a material loading position located on one side of the fixed pallet in the first direction, and the sliding pallet moves between the initial position and the material loading position. Simultaneously with the gripping mechanism 20 gripping an item, the sliding pallet moves from the initial position to the material loading position, and the gripping mechanism places the gripped item on the loading station of the sliding pallet at the material loading position.

Description

Technical Field

[0001] The present invention relates to the technical field of handling articles, and particularly to a robot system.

Background Art

[0002] A wafer is a basic raw material for manufacturing semiconductor components. High-purity semiconductor materials are processed into wafers through processes such as pulling and slicing, and then a fine circuit structure is formed through a series of semiconductor manufacturing processes. Further, through cutting, packaging, and testing, it becomes an IC chip and is widely applied to various electronic devices.

[0003] A tray is a container for holding semiconductor components, usually formed of conductive or electrostatic dissipative plastic or carbon fiber materials to protect electrostatically sensitive devices. Trays are generally used for taking out and storing IC chips, have standardized dimensions on the outside, and have cavities arranged neatly inside. Each cavity is used to hold a single IC chip in a specific package form. Trays can be stacked, and multiple-stage stacking can be achieved by adding a new tray to the upper surface structure of the tray for packaging and shipping. [[ID=第十七条]]

[0004] A tray carrier is used to accommodate multiple trays and facilitate lot processing in the production and transportation processes. The dimensions and shape of the tray carrier are adapted to the tray to hold the tray so that it does not shift inside the carrier during transportation.

[0005] In conventional robot systems, a gripping mechanism (mechanical claw) is used to grasp a tray or tray carrier, and the robot arm drives the tray or tray carrier to the upper part of the support plate. The mechanical claw is then released, and the tray or tray carrier is placed on the support plate. However, since both the upper and lower support plates of the robot are fixed structures, their positions cannot be adjusted. When it is necessary to place a tray or tray carrier on the lower support plate, the robot arm must travel a long distance to bring the gripping mechanism to the position of the support plate before performing a lowering operation, which increases the transport time. Furthermore, because the space around the support plate is narrow, there is a risk that the robot arm may come into contact with surrounding modules of the support plate during the process of moving the gripping mechanism, which may lead to damage to the robot or a decrease in safety.

[0006] Therefore, providing highly efficient robotic systems is a technical challenge that those skilled in the art should address urgently. [Overview of the project]

[0007] To address the challenges of the prior art, the present invention provides a robot system that solves one or more technical problems present in the prior art.

[0008] The robot system of the present invention includes a vehicle body, a gripping mechanism, and a pallet. A gripping mechanism provided on the vehicle body, used for gripping and transporting articles. The vehicle body is provided with a pallet, the pallet including a fixed pallet fixedly installed on the vehicle body and a sliding pallet provided on the vehicle body so as to be slidable along a first direction, and each of the fixed pallet and the sliding pallet is provided with a loading station. The vehicle body is defined as having an initial position located directly below the fixed pallet and a material loading position located to the side of the fixed pallet in the first direction, and the sliding pallet is configured to be movable between the initial position and the material loading position. As soon as the gripping mechanism grips the article, the sliding pallet moves from the initial position to the material input position, and the gripping mechanism places the gripped article on the front placement station of the sliding pallet located at the material input position.

[0009] Here, the robot system effectively solves the problems of reduced transport efficiency and safety caused by conventional pallet structures by introducing a sliding pallet. When the gripping mechanism grips an item, the sliding pallet moves outward, shortening the relative distance to the gripping mechanism, thereby reducing the travel distance of the gripping mechanism, improving transport efficiency, and optimizing the work process. At the same time, it reduces the risk of contact between the gripping mechanism and surrounding modules of the pallet, improving the safety and durability of the robot system.

[0010] Multiple sliding pallets may be provided, and each sliding pallet may be provided with multiple storage stations as described above. By providing multiple loading stations on a sliding pallet, it becomes possible to process multiple items simultaneously, improving work efficiency and increasing the system's flexibility and processing capacity.

[0011] The robot system may further include a first detection mechanism, which is located at the aforementioned placement station and transmits a first detection signal along a second direction to detect whether or not the item is located at the aforementioned placement station. Here, the second direction and the first direction form a predetermined angle. By providing a first detection mechanism, the presence of items at the loading station can be detected, improving the accuracy and reliability of the work and ensuring the execution of subsequent processes.

[0012] The robot system may further include a main controller and a second detection mechanism, the second detection mechanism which may detect the quantity of the items located at the front storage station of the sliding pallet. When the first detection mechanism detects the presence of the article at the front placement station, it transmits a position signal to the second detection mechanism. The second detection mechanism counts the number of position signals received within a predetermined time and transmits this number to the main controller. The main controller determines, based on the number of position signals, whether the number of articles located at the front placement stations of the sliding pallet has reached a predetermined number. When the number of items located at the pre-loading station of the sliding pallet reaches a predetermined number, the sliding pallet on which the items are loaded returns from the material loading position to the initial position. Here, the first detection mechanism and the second detection mechanism work in coordination, allowing the system to detect and count the number of items on the loading station, and return the sliding pallet to its initial position when the number of items on the loading station of the sliding pallet reaches a predetermined number.

[0013] If the number of items located at the front placement station of the sliding pallet has not reached a predetermined number, the gripping mechanism may continue to grip the items and place them on the front placement station of the sliding pallet at the material input position, and the gripping operation may continue until the main controller determines that the number of items located at the front placement station of the sliding pallet has reached a predetermined number. Here, if the number of items placed on the sliding pallet's loading station has not reached a preset value, the gripping mechanism continues to grip the items and transport them to the loading station, stopping when the number of items reaches the predetermined number. The sliding pallet then returns to its initial position, thereby achieving fully automated item transport and storage. Furthermore, the system ensures that the sliding pallet returns to its initial position only when the number of items reaches the predetermined number, thereby avoiding unnecessary mechanical movements and reducing robot wear.

[0014] The aforementioned article may include the first article and the second article. The mounting station is provided with a plurality of first blocking members and a plurality of second blocking members, the first blocking members being formed to surround a first position for restraining the first article, the second blocking members being formed to surround the outer periphery of the first blocking members, the second blocking members being formed to surround a second position for restraining the second article, and at least a portion of the second blocking members extending above the first blocking members. By providing a first and second blocking member, different types of articles can be secured, increasing the efficiency of pallet use and enhancing the flexibility and adaptability of the loading station. At the same time, these blocking members contribute to improving the positioning accuracy of articles and ensure accurate placement in the designated location.

[0015] The gripping mechanism may include a robot arm assembly and a robot hand assembly, the robot hand assembly being used to grip the article, the robot arm assembly including a plurality of shafts connected in series, one end of each shaft being provided on the top of the vehicle body and the other end being connected to the robot hand assembly, each shaft having a degree of freedom greater than 0, and the robot hand assembly being able to move in any direction. Here, the robot arm assembly employs a multiple-axis design, allowing the robot hand assembly to move in any direction, thereby improving the robot's operability and adaptability. Each axis having a degree of freedom greater than zero expands the robot arm's range of motion, enabling precise position control and motion coordination of the robot hand assembly, and improving work efficiency.

[0016] The robot hand assembly may include at least one pair of gripping units, the adjacent gripping units moving toward each other to grip the locking structure on the top of the article, or moving toward each other to release the gripping unit from the locking structure and release the article. Here, the gripping unit can move in the direction of approach to fix the locking structure on the top of the article, or move in the direction of repulsion to release the article. This ensures high reliability during gripping and releasing, prevents damage to or dropping of the article due to operational errors, and improves the safety of the system.

[0017] The gripping mechanism may further include multiple sets of connecting mechanisms, one end of which may be connected to the end of the shaft body furthest from the vehicle body, and the other end of which may be connected to a robot hand assembly of a different standard. By providing multiple sets of connection mechanisms, the robot system can accommodate gripping mechanisms of different standards, allowing for quick replacement or adjustment of the robot hand assembly depending on the type of object to meet specific work requirements. Furthermore, the multiple sets of connection mechanisms can work in coordination with multiple sets of gripping mechanisms simultaneously, improving work efficiency.

[0018] The robot system may further include a stage and a sliding mechanism, wherein the sliding pallet is located below the fixed pallet and is attached to the surface of the stage via the sliding mechanism. The sliding mechanism includes a slide rail and a slide table provided on the slide rail, and the sliding pallet moves along the slide rail by the slide table. Here, by positioning the sliding pallet below the fixed pallet, multi-layer storage of goods is achieved within a limited space, optimizing space utilization. The sliding mechanism (slide rail and slide table) ensures that the sliding pallet moves reliably along a predetermined track between its initial position and the material loading position.

[0019] The pallets are provided symmetrically on both sides of the vehicle body, and on one side of the vehicle body, at least three of the above-mentioned storage stations may be provided for each of the sliding pallets and the fixed pallets. Here, by symmetrically arranging pallets on both sides of the vehicle body and providing at least three loading stations on each side, space utilization is greatly improved, allowing the robotic system to accommodate more items in a limited space and increasing its flexibility for handling different types of items.

[0020] The following technical effects are brought about by specific embodiments of the present invention. In the technical solution of the present invention, a robot system is provided, which includes a vehicle body, a gripping mechanism, and a pallet. The gripping mechanism installed on the vehicle body is used to grip and transport goods. The pallet installed on the vehicle body includes a fixed pallet fixed to the vehicle body and a sliding pallet that slides along a first direction on the vehicle body, and both the fixed pallet and the sliding pallet are provided with a loading station. The vehicle body has an initial position located directly below the fixed pallet and a material loading position located on one side of the fixed pallet in the first direction, and the sliding pallet is configured to move between the initial position and the material loading position. As the gripping mechanism grips an item, the sliding pallet moves from the initial position to the material loading position, and the gripping mechanism places the gripped item on the loading station of the sliding pallet at the material loading position. In this solution, by introducing a sliding pallet into the robot system, the problems of reduced transport efficiency and safety caused by conventional pallet structures are effectively solved. As the gripping mechanism grasps an item, the sliding pallet moves outward, bringing it closer to the gripping mechanism. This shortens the distance the gripping mechanism needs to travel, improving transport efficiency. Furthermore, this configuration reduces the risk of contact between the gripping mechanism and surrounding modules of the pallet, enhancing the safety and durability of the robot system. [Brief explanation of the drawing]

[0021] To more clearly explain the technical means in the embodiments of the present invention and the prior art, the accompanying drawings are briefly described below. The accompanying drawings in the following description only show some embodiments of the present invention, and those skilled in the art can derive other drawings from these drawings without creative labor. [Figure 1] FIG. 1 is a schematic diagram of a state where the slide-type pallet of the robot system according to the embodiment of the present invention is not pulled out. [Figure 2] FIG. 2 is a schematic diagram of a state where the slide-type pallet of the robot system according to the embodiment of the present invention is pulled out. [Figure 3] FIG. 3 is a schematic diagram of the placement state of the first article on the placement station according to the embodiment of the present invention. [Figure 4] FIG. 4 is a schematic diagram of the placement state of the second article on the placement station according to the embodiment of the present invention. [Figure 5] FIG. 5 is a schematic diagram of the slide-type pallet according to the embodiment of the present invention. [Figure 6] FIG. 6 is a schematic diagram of the gripping mechanism according to the embodiment of the present invention.

Mode for Carrying Out the Invention

[0022] Hereinafter, some embodiments of the present invention will be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only for explaining the technical principle of the present invention and do not limit the protection scope of the present invention. As described in the background technology section, conventional robot systems use a gripping mechanism (mechanical claw) to grasp trays or tray carriers, and the robot arm drives the tray or tray carrier to the upper part of the support plate. The mechanical claw then releases, and the tray or tray carrier is placed on the support plate. However, since both the upper and lower support plates of the robot are fixed structures, their positions cannot be adjusted. When placing a tray or tray carrier on the lower support plate, the robot arm must travel a long distance to bring the mechanical claw to the position of the support plate before performing the lowering operation, which increases the transport time. Furthermore, because the space around the support plate is narrow, there is a risk of the robot arm contacting surrounding modules of the support plate while moving the mechanical claw, which can cause damage to the robot or reduce safety. To solve one or more of the technical problems described above, the present invention provides a robot system aimed at improving work efficiency.

[0023] Embodiment 1 Embodiment 1 of the present invention provides a robot system with reference to the schematic diagrams of the robot system shown in Figures 1 and 2. The system includes a vehicle body 10, a gripping mechanism 20, and a pallet 30. The gripping mechanism 20, installed on the vehicle body 10, is used to grip and transport goods. The pallet 30, installed on the vehicle body 10, includes a fixed pallet 300 fixed to the vehicle body 10 and a sliding pallet 310 that slides along a first direction on the vehicle body 10, and both the fixed pallet 300 and the sliding pallet 310 are provided with loading stations 31. The vehicle body 10 has an initial position located directly below the fixed pallet 300 and a material loading position located on one side of the fixed pallet 300 in the first direction, and the sliding pallet 310 is configured to move between the initial position and the material loading position. As soon as the gripping mechanism 20 grips the item, the sliding pallet 310 moves from its initial position to the material input position, and the gripping mechanism 20 places the gripped item on the placement station of the sliding pallet 310 at the material input position. Here, the robot system effectively solves the problems of reduced transport efficiency and safety caused by conventional pallet structures by introducing a sliding pallet. When the gripping mechanism 20 grips an item, the sliding pallet 310 moves outward, shortening the relative distance to the gripping mechanism 20, thereby reducing the travel distance of the gripping mechanism 20, improving transport efficiency, and optimizing the work process. At the same time, it reduces the risk of contact between the gripping mechanism 20 and surrounding modules of the pallet 30, enhancing the safety and durability of the robot system.

[0024] In some embodiments of the present invention, the gripping mechanism 20 comprises a robot hand assembly for gripping an article and a robot arm module for moving the robot hand assembly to a predetermined position.

[0025] In some embodiments of the present invention, the drive system for the sliding pallet 310 may be a sliding mechanism comprising a combination of a sliding rail and a sliding table, or a guide device comprising a combination of a guide seat and a guide assembly. This enables the sliding operation of the pallet.

[0026] In some embodiments of the present invention, the first direction is perpendicular to the vehicle body 10 (height direction).

[0027] Preferably, multiple sliding pallets 310 are provided, and each sliding pallet 310 is provided with multiple loading stations 31. Here, by installing multiple sliding pallets 310 and providing multiple loading stations 31 on each sliding pallet 310, multiple items can be processed simultaneously, improving work efficiency and increasing the system's flexibility and processing capacity. In some embodiments of the present invention, the vehicle body 10 is roughly rectangular in shape, a fixed pallet 300 is provided on the top of the vehicle body 10, and a plurality of sliding pallets 310 are sequentially arranged below the fixed pallet 300. Each sliding pallet 310 has a plurality of loading stations 31.

[0028] Preferably, the robot system further includes a first detection mechanism (not shown) that transmits a first detection signal along a second direction to detect whether or not an item is present at the placement station 31, where a predetermined angle is maintained between the second direction and the first direction. By providing a first detection mechanism, the presence or absence of items on the loading station 31 can be detected, improving the accuracy and reliability of the work and ensuring the execution of subsequent operations. In some embodiments of the present invention, the first detection mechanism is a laser sensor, and the first detection signal is a laser signal emitted by the sensor. The angle between the second direction and the first direction is 90°.

[0029] Preferably, the robot system further includes a main controller (not shown) and a second detection mechanism (not shown), the second detection mechanism detecting the quantity of items on the loading station 31 of the sliding pallet 310. When the first detection mechanism detects the presence of items on the loading station 31, it transmits a position signal to the second detection mechanism, which counts the number of position signals received within a predetermined time and transmits it to the main controller. Based on the number of position signals, the main controller determines whether the number of items on the loading station 31 of the sliding pallet 310 has reached a predetermined number. If the number of items on the loading station 31 of the sliding pallet 310 has reached a predetermined number, the sliding pallet 310 on which the items are placed returns from the material loading position to its initial position. Here, the first detection mechanism and the second detection mechanism work in conjunction to enable the system to detect and count the number of items on the loading station 31, and the sliding pallet 310 returns to its initial position only when the number of items placed on the loading station 31 of the sliding pallet 310 reaches a predetermined number.

[0030] Preferably, if the number of items on the sliding pallet 310's placement station 31 has not reached a predetermined number, the gripping mechanism 20 continues to grip the items and place them on the sliding pallet 310's placement station 31 at the material input position until the main controller determines that the number of items on the sliding pallet 310's placement station 31 has reached a predetermined number, after which the gripping mechanism 20 stops. Here, if the number of items placed on the loading station 31 of the sliding pallet 310 has not reached a predetermined number, the gripping mechanism 20 continues to grip the items and transport them to the loading station 31, without stopping until the number of items reaches the predetermined number, and the sliding pallet 310 returns to its initial position. This enables the full automation of the item transport and storage process. Furthermore, the system ensures that the sliding pallet 310 returns to its initial position only when the number of items reaches the predetermined number, thereby avoiding unnecessary mechanical movement and reducing robot wear.

[0031] Preferably, referring to Figures 3 to 5, the article includes a first article and a second article. A plurality of first blocking members 311 and a plurality of second blocking members 312 are provided within the mounting station 31. The first blocking members 311 are formed to surround a first position for restraining the first article, the second blocking members 312 are provided to surround the outer periphery of the first blocking members 311, and the second blocking members 312 are formed to surround a second position for restraining the second article. At least a portion of the second blocking members 312 extends above the first blocking members 311. Here, by providing the first blocking member 311 and the second blocking member 312, different types of articles can be secured, improving the efficiency of pallet use and enhancing the flexibility and adaptability of the loading station 31. At the same time, the first blocking member 311 and the second blocking member 312 contribute to improving the positioning accuracy of articles in the loading station 31, ensuring accurate placement in predetermined positions.

[0032] In some embodiments of the present invention, referring to the schematic diagram of a first item placed on a mounting station shown in Figure 3, the first item is a wafer case 313, and the wafer case 313 is positioned in a first position surrounded by the first blocking members 311. Each of the four corners of the wafer case 313 abuts against one of the four first blocking members 311. All four first blocking members 311 have a hollow structure, and a third detection mechanism is provided inside them to detect whether or not the wafer case 313 is correctly positioned relative to the first blocking members 311.

[0033] In some embodiments of the present invention, referring to a schematic diagram of a second article placed on a placement station shown in Figure 4, the second article is a tray or tray carrier 314, and the tray or tray carrier 314 is positioned in a second location surrounded by a second blocking member 312. Each of the four corners of the tray or tray carrier 314 abuts against one of the four second blocking members 312. The four second blocking members 312 are also hollow in structure, and a fourth detection mechanism is provided inside them to detect whether the tray or tray carrier 314 is correctly positioned within the second blocking members 312.

[0034] Preferably, the gripping mechanism 20 includes a robot arm assembly 200 and a robot hand assembly 210. The robot hand assembly 210 is used for gripping an object, and the robot arm assembly 200 includes a plurality of shafts connected in series. One end of each shaft is provided on the top of the vehicle body 10, and the other end is connected to the robot hand assembly 210. Each shaft has a degree of freedom greater than 0, allowing the robot hand assembly 210 to move in any direction. Here, the robot arm assembly 200 employs a multiple-axis design, allowing the robot hand assembly 210 to move along any direction, improving the robot's operability and adaptability. Each axis having a degree of freedom greater than zero expands the operating range of the robot arm assembly, enabling precise position control and motion coordination of the robot hand assembly 210, thereby improving work efficiency.

[0035] In some embodiments of the present invention, referring to the schematic diagram of the gripping mechanism shown in Figure 6, the robot arm assembly 200 is composed of a first shaft 201, a second shaft 202, a third shaft 203, and a fourth shaft 204 connected in series from the tip. The degrees of freedom of each of the four shafts are greater than 0, and they work together to enable movement of the robot hand assembly 210 in any direction.

[0036] Preferably, referring to the schematic diagram of a first article being placed on the placement station shown in Figure 3 and the schematic diagram of the gripping mechanism shown in Figure 6, the robot hand assembly 210 includes at least one pair of gripping units 211, where adjacent gripping units 211 move away from each other to grip the locking structure 3130 on the top of the first article, or move towards each other to release the connection between the gripping unit 211 and the locking structure 3130 and release the article. To accommodate different locking structures 3130, adjacent gripping units 211 can either move towards each other to lock the locking structure 3130 on the top of the first article, or move away from each other to release the connection between the gripping unit 211 and the locking structure 3130 and release the article. Here, the gripping units 211 can lock and release the locking structure 3130 at the top of the article by moving closer to or further away from each other. This provides high reliability during gripping and releasing, prevents damage to the article or dropping due to operational errors, and improves the safety of the system.

[0037] Preferably, the gripping mechanism 20 further includes multiple sets of connecting mechanisms 40. One end of the connecting mechanism 40 is connected to the end of the shaft body furthest from the vehicle body 10, and the other end is connected to a robot hand assembly 210 of a different standard. By providing multiple sets of connection mechanisms 40, the robot system can accommodate gripping mechanisms 20 of different specifications, allowing for quick replacement or adjustment of the robot hand assembly according to the type of item to meet specific work requirements. Furthermore, the multiple sets of connection mechanisms 40 enable simultaneous operation of multiple robot hand assemblies 210, improving work efficiency.

[0038] Preferably, referring to the schematic diagram of the robot system shown in Figure 2 with the sliding pallet extended, the robot system further includes a stage 50 and a sliding mechanism. The sliding pallet 310 is located below the fixed pallet 300 and is attached to the surface of the stage 50 via the sliding mechanism. The sliding mechanism includes a sliding rail 51 and a sliding table 52 mounted on the sliding rail 51, and the sliding pallet 310 moves along the sliding rail 51 by the sliding table 52. Here, by positioning the sliding pallet 310 below the fixed pallet 300, multi-layer storage within a limited space is achieved, optimizing space utilization. The sliding mechanism (slide rail 51 and slide table 52) ensures that the sliding pallet 310 moves reliably along a predetermined track between its initial position and the material loading position.

[0039] Preferably, referring to the schematic diagrams of the robot system shown in Figures 1 and 2 and the schematic diagram of the sliding pallet shown in Figure 5, the pallets 30 are provided symmetrically on both sides of the vehicle body 10, and on one side of the vehicle body 10, at least three loading stations 31 are provided for each of the sliding pallet 310 and the fixed pallet 300. Here, by arranging pallets 30 symmetrically on both sides of the vehicle body 10 and providing at least three loading stations 31 on each side, the space utilization rate is greatly improved, allowing the robot system to accommodate more items in a limited space and increasing its flexibility in handling different types of items.

[0040] Embodiment 2 Embodiment two of the present invention provides a method for the alternating operation of a sliding pallet and a gripping mechanism based on Embodiment one, and includes the following: Step S1: The gripping mechanism grips the item. Step S2: The sliding pallet moves from the initial position on the vehicle body to the material loading position. Step S3: The gripping mechanism places the gripped item onto the loading station of the sliding pallet located at the material input position. This robot system effectively solves the problems of reduced transport efficiency and safety caused by conventional pallet structures by introducing a sliding pallet. When the gripping mechanism grips an item, the sliding pallet moves outward to bring the gripping mechanism closer, shortening the distance the gripping mechanism has to travel, improving transport efficiency, and optimizing the workflow. At the same time, it reduces the risk of contact between the gripping mechanism and surrounding modules of the pallet, enhancing the safety and durability of the robot system.

[0041] In this specification, any reference to the terms “one embodiment,” “several embodiments,” “example,” “specific example,” or “several examples” means that the specific features, structures, materials, or properties described in relation to that embodiment or example are included in at least one embodiment or example of this specification. The illustrative use of these terms in this specification does not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or properties described may be combined as appropriate in one or more embodiments or examples.

[0042] Furthermore, the terms “first” and “second” are used for descriptive purposes only and should not be interpreted as indicating an order of numerical importance or implicit importance of the technical features. Features defined as “first” and “second” may explicitly or implicitly include at least one such feature. In this specification, “plural” means at least two (e.g., two, three, etc.) unless otherwise specified.

[0043] Although embodiments described herein have been set forth and explained above, they are illustrative and should not be construed as limiting this specification. Those skilled in the art will understand that these embodiments can be modified, altered, replaced, or transformed within the scope of this specification. [Explanation of Symbols]

[0044] 10: Car body 20: Gripping mechanism 30: Palette 31: Storage Station 40: Connection mechanism 50: Stage 51: Slide rail 52: Sliding Table 200: Robot Arm Assembly 201: First shaft body 202:Second axis body 203:Third axis body 204:Fourth axis body 210: Robot Hand Assembly 211: Gripping unit 300: Fixed pallet 310: Sliding pallet 311: First blocking member 312:Second blocking member 313: Wafer Case 314: Tray Carrier 3130: Locking structure

Claims

1. The robot system includes a vehicle body (10), a gripping mechanism (20), and a pallet (30). The gripping mechanism (20) includes a robot arm assembly (200) and a robot hand assembly (210), the robot hand assembly (210) being used to grip an article, the robot arm assembly (200) being composed of a first shaft (201), a second shaft (202), a third shaft (203), and a fourth shaft (204) connected in series from the tip, the first shaft (201) being provided at the top of the vehicle body (10), the fourth shaft (204) being connected to the robot hand assembly (210), the degrees of freedom of each of the four shafts being greater than 0, and the robot hand assembly (210) being moved along any direction, The pallet (30) is provided symmetrically on both sides of the vehicle body (10), and the pallet (30) includes a fixed pallet (300) fixedly provided on the vehicle body (10), and a sliding pallet (310) slidably provided on the vehicle body (10) along a first direction, each having at least three loading stations (31) on the fixed pallet (300) and the sliding pallet (310), with an initial position located directly below the fixed pallet (300) on the vehicle body (10) and a material loading position located on one side of the fixed pallet (300) in the first direction, and the sliding pallet (310) is arranged to move between the initial position and the material loading position. The gripping mechanism (20) grips the article, and at the same time, the sliding pallet (310) moves from the initial position to the material input position, and the gripping mechanism (20) places the gripped article on the front placement station (31) of the sliding pallet (310) located at the material input position. The article includes a wafer case (313) and a tray carrier (314), wherein a plurality of first blocking members (311) and a plurality of second blocking members (312) are arranged within the aforementioned placement station (31), the first blocking members (311) are formed to surround a first position used to restrict the wafer case (313), the second blocking members (312) surround the outer periphery of the first blocking members (311), the second blocking members (312) are formed to surround a second position used to restrict the tray carrier (314), and at least a portion of the second blocking members (312) extends above the first blocking members (311), In this configuration, the corner of the wafer case (313) abuts against the first blocking member (311), and the first blocking member (311) has a first hollow structure, within which a third detection mechanism is installed, which is used to detect whether the wafer case (313) is correctly positioned relative to the first blocking member (311). A robot system characterized in that the corners of the tray carrier (314) are in contact with the second blocking member (312), the second blocking member (312) has a second hollow structure, a fourth detection mechanism is installed therein and used to detect whether the position of the tray carrier (314) is correctly positioned relative to the second blocking member (312).

2. The robot system according to claim 1, characterized in that a plurality of sliding pallets (310) are provided, and a plurality of mounting stations (31) are provided on each of the sliding pallets (310).

3. The robot system further includes a first detection mechanism, which is provided on the aforementioned placement station (31) and is configured to transmit a first detection signal along a second direction and to detect whether or not the article is located on the aforementioned placement station (31). The robot system according to claim 2, characterized in that a preset angle is maintained between the second direction and the first direction.

4. The robot system further includes a main controller and a second detection mechanism, the second detection mechanism detects the quantity of the items located at the front storage station (31) of the sliding pallet (310), When the first detection mechanism detects the presence of the article at the front-recording station (31), it transmits a position signal to the second detection mechanism, the second detection mechanism counts the number of position signals received within a predetermined time and transmits it to the main controller, and the main controller determines, based on the number of position signals, whether the number of articles located at the front-recording station (31) of the sliding pallet (310) has reached a predetermined number. The robot system according to claim 3, characterized in that when the number of items located on the front placement station (31) of the sliding pallet (310) reaches a predetermined number, the sliding pallet (310) on which the items are placed returns from the material input position to the initial position.

5. The robot system according to claim 4, characterized in that, if the number of articles located on the front placement station (31) of the sliding pallet (310) has not reached a predetermined number, the gripping mechanism (20) continues to grip the articles and place them on the front placement station (31) of the sliding pallet (310) at the material input position, and continues until the main controller determines that the number of articles located on the front placement station (31) of the sliding pallet (310) has reached a predetermined number, after which the gripping mechanism (20) stops.

6. The robotic system according to claim 1, wherein the robotic hand assembly (210) includes at least one pair of gripping units (211), and adjacent gripping units (211) move toward each other to grip a locking structure (3130) on the top of the article, or move toward each other to release the gripping units (211) from the locking structure (3130) and release the article.

7. The robot system according to claim 1, wherein the gripping mechanism (20) further includes a plurality of connecting mechanisms (40), one end of the connecting mechanism (40) is connected to the end of the shaft body furthest from the vehicle body (10), and the other end is connected to a robot hand assembly (210) of a different standard.

8. The robot system further includes a stage (50) and a sliding mechanism, wherein the sliding pallet (310) is located below the fixed pallet (300) and is attached to the surface of the stage (50) via the sliding mechanism. The robot system according to any one of claims 1 to 5, characterized in that the sliding mechanism includes a slide rail (51) and a slide table (52) provided on the slide rail (51), and the sliding pallet (310) moves along the slide rail (51) by means of the slide table (52).

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